WO2020168828A1 - Dispositif de détection de défaut - Google Patents

Dispositif de détection de défaut Download PDF

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Publication number
WO2020168828A1
WO2020168828A1 PCT/CN2019/129759 CN2019129759W WO2020168828A1 WO 2020168828 A1 WO2020168828 A1 WO 2020168828A1 CN 2019129759 W CN2019129759 W CN 2019129759W WO 2020168828 A1 WO2020168828 A1 WO 2020168828A1
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WO
WIPO (PCT)
Prior art keywords
control signal
synchronization control
detector
black
dark field
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Application number
PCT/CN2019/129759
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English (en)
Chinese (zh)
Inventor
宋春峰
王婷婷
邹秀阳
陆海亮
Original Assignee
上海微电子装备（集团）股份有限公司
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Publication of WO2020168828A1 publication Critical patent/WO2020168828A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Definitions

  • This application relates to the technical field of semiconductor material defect detection, for example, to a defect detection device.
  • Automatic optical inspection is a fast and automatic defect detection technology that can realize fast, high-precision, and non-destructive inspection of wafers or chips waiting to be inspected. This technology is widely used in PCBs, integrated circuits, LEDs, TFTs, and solar panels.
  • the defect detection device includes a detector, a storage unit, and a workpiece table.
  • the detector needs to collect the image of the object to be detected, and transmit the image information obtained by the photograph to the storage unit and complete the storage.
  • the detector can perform image acquisition on the next detection position of the object to be detected.
  • the defect detection device it takes a long time for the defect detection device to transmit and store images.
  • the workpiece table of the defect detection device can only move at a low speed, so that the defect detection device can collect two consecutive images.
  • the image is continuous.
  • the transmission and storage of the image does not match the movement speed of the workpiece table, which severely restricts the efficiency of defect detection.
  • the present application provides a defect detection device, which can improve defect detection efficiency.
  • An embodiment provides a defect detection device, including:
  • the workpiece table is configured to carry the object to be detected and control the movement of the object to be detected;
  • the synchronization controller is connected to the workpiece table and is configured to receive trigger instructions provided by the workpiece table and generate various synchronization control signals according to the trigger instructions; wherein, the synchronization control signals include bright field synchronization control signals At least one of the control signals synchronized with the dark field;
  • At least one of a bright field illumination light source and a dark field illumination light source wherein the bright field illumination light source is connected to the synchronization controller, and is configured to receive the bright field synchronization control signal, and according to the bright field synchronization
  • the control signal is turned on to illuminate the object to be detected in bright field mode
  • the dark field illumination light source is connected to the synchronization controller, and is set to receive the dark field synchronization control signal, and according to the dark field
  • the field synchronization control signal performs an on operation to illuminate the object to be detected in a dark field mode
  • An imaging component configured to perform imaging processing on the light beam after passing through the object to be detected
  • the beam splitter prism is located on the light exit side of the imaging component and is configured to divide the incident light beam incident on the beam splitter prism into at least two exit beams that propagate in different directions;
  • At least two detectors each of which is connected to the synchronization controller and is configured to receive the bright field synchronization control signal or the dark field synchronization control signal, and according to the bright field synchronization control signal or The dark field synchronization control signal performs an opening operation; each of the detectors is configured to receive one of the exiting beams, and perform defect detection on the object to be inspected according to the exiting beams.
  • the defect detection device by setting a synchronization controller, at least two detectors, and at least one light source of a bright field illumination light source and a dark field illumination light source, bright field illumination can be used in different periods of the defect detection process
  • the light source provides bright field illumination
  • the dark field illumination source provides dark field illumination
  • the synchronization controller is used to control different detectors for defect detection.
  • FIG. 1 is a schematic structural diagram of a defect detection device provided by an embodiment
  • FIG. 2 is a schematic diagram of the structure of a defect detection device provided by an embodiment
  • Figure 3 is a control sequence diagram corresponding to the defect detection device in Figure 2;
  • FIG. 4 is a schematic structural diagram of a defect detection device provided by an embodiment
  • Figure 5 is a control sequence diagram corresponding to the defect detection device in Figure 4.
  • FIG. 6 is another control sequence diagram corresponding to the defect detection device in FIG. 4;
  • FIG. 7 is a schematic structural diagram of a defect detection device provided by an embodiment
  • FIG. 8 is a control sequence diagram corresponding to the defect detection device in FIG. 7;
  • FIG. 9 is another control sequence diagram corresponding to the defect detection device in FIG. 7;
  • FIG. 10 is a schematic structural diagram of a defect detection device provided by an embodiment.
  • FIG. 1 is a schematic diagram of the structure of the defect detection device provided by this embodiment.
  • the defect detection device includes: a workpiece table 110, which is set to carry the object 210 to be detected and controls the movement of the object 210 to be detected; a synchronization controller 120 is connected to the workpiece table 110 and is set to receive the workpiece table 110.
  • a variety of synchronization control signals are generated according to the trigger instruction; wherein the synchronization control signal includes at least one of a bright field synchronization control signal and a dark field synchronization control signal; the bright field illumination light source 130 and the dark field illumination light source 140 At least one light source in, wherein the bright field illumination light source 130 is connected to the synchronization controller 120, and is configured to receive the bright field synchronization control signal, and perform a turn-on operation according to the bright field synchronization control signal to perform the bright field mode of the object 210 to be detected Illumination; dark-field illumination light source 140, connected to the synchronization controller 120, and set to receive the dark-field synchronization control signal, and according to the dark-field synchronization control signal to perform a turn-on operation to illuminate the object to be detected 210 in dark-field mode; imaging assembly 150 , Configured to perform imaging processing on the light beam after passing through the object 210 to be detected; the beam splitting prism 160 is located on the light exit side of the imaging
  • each detector 170 is connected to the synchronization controller 120, and is set to receive bright field synchronization control signal or dark field synchronization control signal, and according to the bright field synchronization control signal or dark field synchronization control The signal is turned on; each detector 170 is configured to receive an outgoing beam, and perform defect detection on the object 210 to be inspected according to the outgoing beam.
  • the defects of the object 210 to be inspected are diverse, and different defects have different optical characteristics.
  • defect detection can be performed in bright field mode; for small particles, defect detection can be performed in dark field mode.
  • the defect detection device provided in this embodiment includes multiple working modes, for example, dark field mode, bright field mode, and bright field dark field mixed mode. This embodiment uses two detectors 170 as an example to describe the structure and function of the defect detection device provided in this embodiment.
  • the dark field synchronization control signal is set to control one of the detectors 170 to work synchronously with the dark field illumination light source 140, and the dark field illumination light source 140 is used to provide darkness for the object to be inspected 210
  • the detector 170 synchronized with the dark field illumination light source 140 is used to detect defects of the object 210 to be inspected.
  • the dark field synchronization control signal can also simultaneously control another detector 170 to work synchronously with the dark field illumination light source 140, and can also detect defects in the object 210 to be detected.
  • the detector 170 needs to transmit and store the image after completing the image collection.
  • the time required for image transmission and storage is much longer than the time required for image collection.
  • the detector 170 After one of the detectors 170 completes the image acquisition, the detector 170 performs the image transmission and storage stage. At this time, by using the other detector 170, the image acquisition can be continued. After the detector 170 that performs defect detection at the first moment completes image transmission and storage, the detector 170 is used to perform image acquisition again.
  • the two detectors 170 can respectively collect different images, and the images collected by the two detectors 170 can form a complete detection map.
  • the detection map can record defect information at each position of the object 210 to be detected.
  • the other detector 170 can continue to perform image acquisition. Therefore, assuming that only one detector 170 is used for defect detection, the movement speed of the workpiece table is v, the movement speed of the workpiece table 110 of the defect detection device provided in this embodiment can be 2v. Therefore, the defect detection device provided in this embodiment can double the efficiency of defect detection.
  • the defect detection device when the defect detection device is in the bright field mode, using the two detectors 170 to work alternately can also double the efficiency of defect detection. Therefore, for the case where defect detection only needs to be performed in the bright field mode or the dark field mode, the defect detection device provided in this embodiment can improve the detection efficiency.
  • the synchronization controller 120 can be used to simultaneously control one of the detectors 170 And the bright-field illumination light source 130, thereby performing image acquisition in the bright-field mode.
  • the synchronization controller 120 can be used to simultaneously control the other detector 170 and the dark field illumination light source 140 to perform image collection in the dark field mode.
  • the two detectors 170 can respectively obtain a complete defect inspection result in bright field mode and a complete defect inspection result in dark field mode. Therefore, there is no need to The inspection object 210 performs the second defect inspection. Compared with the case where only one detector is included, the movement speed of the workpiece table 110 of the defect detection device provided in this embodiment does not decrease. Therefore, the defect detection device provided in this embodiment also works in the bright field and dark field mixed mode. The detection efficiency can be doubled.
  • the defect detection device by setting the synchronization controller 120, at least two detectors 170, and at least one of the bright-field illumination light source 130 and the dark-field illumination light source 140, it can be used at different periods of the defect detection process.
  • One of the detectors 170 can be used for image detection. During transmission and storage, at least another detector 170 is used for image acquisition, thereby improving the efficiency of defect detection.
  • the defect detection device includes a dark field illumination light source 140; the dichroic prism 160 is configured to divide the incident light beam incident on the dichroic prism 160 into a first outgoing light beam 181 and a second outgoing light beam 181 and a second light beam that propagate in different directions.
  • Two outgoing beams 182; at least two detectors include a first black and white detector 171 and a second black and white detector 172; wherein, the first black and white detector 171 is configured to receive the first outgoing beam 181, and the second black and white detector 172 is configured to The second outgoing beam 182 is received;
  • the dark field synchronization control signal includes a first dark field synchronization control signal and a second dark field synchronization control signal;
  • the synchronization controller 120 is set to alternately generate the first dark field synchronization control signal and the second dark field synchronization control signal Control signal;
  • the first dark field synchronization control signal is set to sequentially control the first black and white detector 171 and the dark field illumination light source 140 to turn on;
  • the second dark field synchronization control signal is set to sequentially control the second black and white detector 172 and the dark field illumination light source 140 is turned on.
  • the synchronization controller 120 can be used to generate the first dark field synchronization control signal (corresponding to square wave 1 in FIG. 3), and the first dark field synchronization control signal can control the first dark field synchronization control signal.
  • the black and white detector 171 is turned on. After the first black and white detector 171 is turned on, the first dark field synchronization control signal can control the dark field illumination light source 140 to flicker; after the dark field illumination light source 140 is flickered, the first black and white detector 171 completes image acquisition.
  • the workpiece table 110 carries the object 210 to be detected and moves to the next detection position, and the synchronization controller 120 generates a second dark field synchronization control signal (corresponding to square wave 2 in FIG. 3).
  • the second dark field synchronization control signal can control the second black and white detector 172 to turn on; after the second black and white detector 172 is turned on, the second dark field synchronization control signal can also control the dark field illumination light source 140 to flicker. After the dark field illumination light source 140 completes flickering, the second black and white detector 172 completes image acquisition.
  • the synchronization controller 120 generates the first dark field synchronization control signal again, and controls the first black and white detector 171 to turn on again. In this way, the first black and white detector 171 and the second black and white detector 172 are repeatedly used for defect detection.
  • the second black and white detector 172 performs image collection;
  • the first black-and-white detector 171 performs image collection, thereby improving defect detection efficiency.
  • both the first dark field synchronization control signal and the second dark field synchronization control signal may be square waves, wherein the rising edge of the first dark field synchronization control signal can control the first black and white detector 171 to turn on, The rising edge of the second dark field synchronization control signal can control the second black and white detector 172 to turn on, and the rising edge of the first dark field synchronization control signal and the rising edge of the second dark field synchronization control signal can also control the dark field illumination light source 140 to turn on .
  • the first black-and-white detector 171, the second black-and-white detector 172, and the dark field illumination light source 140 can all be automatically extinguished after being turned on for a period of time.
  • the detector can collect effective image collection.
  • the illumination energy of the dark-field illumination source 140 should provide as much dark-field illumination as possible for the detector.
  • the dark-field illumination source 140 only provides illumination for the current image acquisition. Therefore, In each defect detection, the turn-on time of the dark-field illumination light source 140 should be later than the turn-on time of the detector, and the turn-off time of the dark-field illumination light source 140 should be earlier than the turn-off time of the detector.
  • the turn-on time and turn-off time of the first black-and-white detector 171 in one detection period are t1 and t4, respectively, and the turn-on time and the off time of the dark-field illumination light source 140 are t2 and t3, respectively, then t2 Time is later than time t1, and time t3 is earlier than time t4, the process of turning on the dark field illumination light source 140 between time t2 and time t3 is called flickering of the dark field illumination light source.
  • FIG. 4 is a schematic structural diagram of another defect detection device provided by this embodiment
  • FIG. 5 is a control sequence diagram corresponding to the defect detection device in FIG. 4.
  • the defect detection device includes a bright field illumination light source 130; the dichroic prism 160 is configured to divide the incident light beam incident on the dichroic prism 160 into at least the first outgoing light beam 181 and The second outgoing beam 182; at least two detectors include a first black and white detector 171 and a second black and white detector 172; wherein the first black and white detector 171 is configured to receive the first outgoing beam 181, and the second black and white detector 172 is configured To receive the second outgoing beam 182;
  • the bright field synchronization control signal includes a first bright field synchronization control signal and a second bright field synchronization control signal; the synchronization controller 120 is set to alternately generate the first bright field synchronization control signal and the second bright field synchronization control signal Synchronization control signal; the first bright field synchronization control
  • the working principle of the bright field mode is similar to that of the dark field mode. The only difference is that in the dark field illumination mode, the dark field illumination light source 140 is used for illumination, and in the bright field illumination mode, the bright field illumination light source 130 is used for illumination. Therefore, for the working principle and beneficial effects of the bright field mode, please refer to the description of the dark field mode.
  • Fig. 6 is another control timing chart corresponding to the defect detection device in Fig. 4.
  • the light splitting prism 160 is a three-splitting prism; the three-splitting prism is set to divide the incident light beam incident on the three-splitting prism into a first outgoing beam 181, a second outgoing beam 182, and The third outgoing beam 183; at least two detectors also include a color detector 173; the color detector 173 and the first black and white detector 171 jointly receive the first bright field synchronization control signal, or the color detector 173 and the second black and white detector The detector 172 jointly receives the second bright field synchronization control signal; the color detector 173 is configured to receive the third outgoing light beam 183, and take a picture of the object 210 to be detected according to the third outgoing light beam 183.
  • the light beam can be divided into a first exit beam 181, a second exit beam 182, and a third exit beam 183.
  • the color detector 173 can take a picture of the object 210 to be detected by receiving the third exit beam 183.
  • 6 exemplarily takes the color detector 173 and the first black-and-white detector 171 jointly receiving the first bright-field synchronization control signal as an example to illustrate the principle and beneficial effects of the defect detection device provided in this embodiment. While the first black and white detector 171 is performing defect detection, the color detector 173 can take a picture of the detection area of the first black and white detector 171, and the defect on the object 210 to be detected can be displayed more intuitively and clearly by taking the picture.
  • the color detector 173 can take a picture of a defect in a half area of the object 210 to be inspected during the entire inspection process. If after data processing, it is found that there are defects in the area detected by the second black and white detector 172, the workpiece table 110 can be used to drive the object 210 to be detected to the position corresponding to the defect, and the color detector 173 can be used to detect the defect. The position of the object 210 to be detected is photographed.
  • FIG. 7 is a schematic structural diagram of a defect detection device provided by an embodiment
  • FIG. 8 is a control sequence diagram corresponding to the defect detection device in FIG. 7.
  • the defect detection device includes a bright-field illumination light source 130 and a dark-field illumination light source 140; the beam splitting prism 160 is configured to divide the incident light beam incident on the beam splitting prism 160 into at least different directions.
  • the two black and white detectors 172 are set to receive the second outgoing beam 182;
  • the synchronization controller 120 is set to alternately generate a bright field synchronization control signal (square wave 1 in FIG. 8) and a dark field synchronization control signal (square wave 2 in FIG.
  • the bright field synchronization control signal is set to sequentially control the first black and white detector 171 and the bright field illumination light source 130 to turn on; the dark field synchronization control signal is set to sequentially control the second black and white detector 172 and the dark field illumination light source 140 to turn on.
  • the bright field synchronization control signal can control the first black and white detector 171 to turn on; after the first black and white detector 171 is turned on, the bright field synchronization control signal is also set to control the bright field illumination light source 130 to flicker; in the bright field illumination light source After the flashing of 130 is completed, the first black and white detector 171 completes image acquisition.
  • the workpiece stage 110 carries the object 210 to be detected and moves to the next detection position, and the synchronization controller 120 generates a dark field synchronization control signal; the dark field synchronization control signal can control the second black and white detector 172 to turn on; After being turned on, the dark field synchronization control signal can also control the dark field illumination light source 140 to flicker, and the second black and white detector 172 completes image acquisition.
  • the first black-and-white detector 171 and the second black-and-white detector 172 can be controlled to repeatedly perform detection alternately.
  • the turn-on time of the first black and white detector 171 and the second black and white detector 172 by reasonably controlling the turn-on time of the first black and white detector 171 and the second black and white detector 172, more than 99% of the regions of the image detected by the first black and white detector 171 and the second black and white detector 172 can be overlapped. .
  • the first black-and-white detector 171 and the second black-and-white detector 172 can respectively obtain the complete defect detection result in the bright field mode and the complete defect detection result in the dark field mode. As a result of the defect detection, there is no need to perform a second defect detection on the object 210 to be detected, thereby improving the efficiency of defect detection.
  • Fig. 9 is another control timing chart corresponding to the defect detection device in Fig. 7.
  • the beam splitting prism 160 is a three-splitting prism; the three-splitting prism is configured to divide the incident light beam incident on the three-splitting prism into a first outgoing beam 181, a second outgoing beam 182, and The third outgoing beam 183; at least two detectors also include a color detector 173; the color detector 173 and the first black and white detector 171 jointly receive the bright field synchronization control signal; the color detector 173 is set to receive the third outgoing beam 183, And according to the third outgoing beam 183, the object to be detected 210 is photographed.
  • the second black and white detector 172 is set to detect defects in the dark field mode, and the color detector 173 does not need to be used for taking pictures in the dark field mode. Therefore, the color detector 173 can generally be combined with the first black and white detector.
  • the device 171 jointly receives the bright field synchronization control signal, so that while the bright field mode is used to detect defects, the object 210 to be detected can also be photographed.
  • FIG. 10 is a schematic structural diagram of a defect detection device provided by an embodiment.
  • the defect detection device further includes at least two detector connection components; the detector connection components are located on the propagation path of the outgoing beam, and the detector connection components correspond to the detectors one-to-one.
  • the optical paths between the three light-emitting surfaces of the three-beam prism and the corresponding detectors should be equal; however, considering the limited space in the defect detection device, in order to satisfy the light The distances are equal, and the optical distances of multiple outgoing beams can be adjusted by using the detector connection component.
  • the first detector connection component 271 corresponds to the first black-and-white detector 171, the first outgoing beam 181 passes through the first detector connection component 271 to the first black-and-white detector 171; the second detector connection component 272 is connected to the The second black-and-white detector 172 corresponds, and the second outgoing beam 182 passes through the second detector connecting component 272 to reach the second black-and-white detector 172; the third detector connecting component 273 corresponds to the color detector 173, and the third outgoing beam 183 passes through The color detector 173 is reached through the third detector connection assembly 273.
  • the number of detectors in Figure 10 is three, therefore, the number of detector connection components is also three, but this does not limit the number of detector connection components and detectors.
  • the defect detection device further includes at least one of a bright field lighting component 131 and a dark field lighting component 141; wherein the bright field lighting component 131 is located on the propagation path of the light beam emitted by the bright field lighting source 130; The field illumination component 141 is located on the propagation path of the light beam emitted by the dark field illumination light source 140.
  • the bright field illuminating component 131 is configured to adjust the light beam emitted by the bright field illuminating light source 130, including collimation and beam expansion; similarly, the dark field illuminating component 141 has similar functions.
  • the defect detection device further includes a transflective lens 190; the transflective lens 190 is configured to reflect the light beam emitted by the bright field illumination light source 130 to the object to be detected 210, and to reflect the object to be detected 210 Or the scattered light beam is transmitted to the imaging component 150.
  • the transflective lens 190 is configured to reflect the light beam emitted by the bright field illumination light source 130 to the object to be detected 210, and to reflect the object to be detected 210 Or the scattered light beam is transmitted to the imaging component 150.
  • the light beam emitted from the bright field illumination light source 130 reaches the half mirror 190 after passing through the bright field illumination assembly 131, and the light beam reflected by the half mirror 190 reaches the object to be detected 210, and is The light beam reflected by the object 210 passes through the half mirror 190 to reach the imaging component 150.
  • the light beam emitted from the dark field illuminating light source 140 passes through the dark field illuminating component 141 and reaches the object to be inspected 210. Part of the scattered light beam scattered by the object to be inspected 210 can pass through the half mirror 190 to reach the imaging component 150.
  • the dark field lighting assembly 141 is a hollow ring structure. Therefore, the light beam generated by the bright field lighting source 130 can pass through the hollow ring structure of the dark field lighting assembly 141 during propagation without passing through the dark field lighting. Component 141 touches.
  • both the bright field illumination light source 130 and the dark field illumination light source 140 are flicker light sources.
  • this embodiment adopts two detectors to perform detection alternately, during the detection process, in order to avoid crosstalk of the illumination beams corresponding to the two different detectors, the illumination time of the bright field illumination light source 130 and the dark field illumination light source 140 are relatively short.
  • a flicker light source can be used. After the flicker light source receives the turn-on signal, it can emit light for a preset length of time, and then it can be automatically extinguished.
  • the synchronous controller is a programmable control device or a synchronous board.
  • the programmable control device and the synchronous board are both excellent synchronous control devices, which can be applied to the defect detection device provided in this embodiment. However, this does not limit the defect detection device provided in this embodiment.

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Abstract

L'invention concerne un dispositif de détection de défaut, comprenant : un support de pièce (110) configuré pour supporter un objet en cours de test (210) et pour commander l'objet en cours de test (210) afin qu'il se déplace ; un contrôleur de synchronisation (120) configuré pour recevoir une commande de déclenchement fournie par le support de pièce (110), et pour générer, en fonction de la commande de déclenchement, au moins un signal parmi un signal de commande de synchronisation de fond clair et un signal de commande de synchronisation de fond noir ; une d'une source d'éclairage de fond clair (130) et/ou d'une source d'éclairage de fond noir (140), la source d'éclairage de fond clair (130) étant configurée pour recevoir le signal de commande de synchronisation de fond clair, et la source d'éclairage de fond noir (140) étant configurée pour recevoir le signal de commande de synchronisation de fond noir ; un composant d'imagerie (150) configuré pour effectuer un traitement d'imagerie sur un faisceau de lumière ayant traversé l'objet à tester (210) ; un prisme de dédoublement de faisceau (160) situé sur un côté émetteur de lumière du composant d'imagerie (150) ; et au moins deux détecteurs (170, 171, 172), chaque détecteur (170, 171, 172) étant connecté au contrôleur de synchronisation (120).
PCT/CN2019/129759 2019-02-22 2019-12-30 Dispositif de détection de défaut WO2020168828A1 (fr)

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CN201910132634.5A CN111610195A (zh) 2019-02-22 2019-02-22 一种缺陷检测装置

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CN113252564A (zh) * 2021-05-25 2021-08-13 上海御微半导体技术有限公司 一种运动台与探测器同步控制的装置和方法
CN115876789A (zh) * 2022-12-07 2023-03-31 睿励科学仪器（上海）有限公司 一种暗场成像方法和装置

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CN112964726B (zh) * 2021-02-05 2023-07-14 上海御微半导体技术有限公司 一种缺陷检测装置和方法

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