WO2020152948A1 - 直流パルス電源装置 - Google Patents

直流パルス電源装置 Download PDF

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Publication number
WO2020152948A1
WO2020152948A1 PCT/JP2019/043837 JP2019043837W WO2020152948A1 WO 2020152948 A1 WO2020152948 A1 WO 2020152948A1 JP 2019043837 W JP2019043837 W JP 2019043837W WO 2020152948 A1 WO2020152948 A1 WO 2020152948A1
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Prior art keywords
voltage
reactor
power supply
unit
pulse
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Ceased
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PCT/JP2019/043837
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English (en)
French (fr)
Japanese (ja)
Inventor
逸男 讓原
俊幸 安達
知宏 米山
洸一 宮嵜
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Kyosan Electric Manufacturing Co Ltd
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Kyosan Electric Manufacturing Co Ltd
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Priority to KR1020217021136A priority Critical patent/KR102616556B1/ko
Priority to EP19911246.7A priority patent/EP3916992A4/en
Priority to CN201980089992.0A priority patent/CN113366753A/zh
Priority to US17/422,506 priority patent/US11799373B2/en
Publication of WO2020152948A1 publication Critical patent/WO2020152948A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H02M1/34—Snubber circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H02M1/34—Snubber circuits
    • H02M1/342—Active non-dissipative snubbers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0064—Magnetic structures combining different functions, e.g. storage, filtering or transformation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573—Full-bridge at primary side of an isolation transformer
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes

Definitions

  • the present invention relates to a DC pulse power supply device that supplies a pulse output to a load.
  • the pulse output output from the DC pulse power supply is a high frequency (RF) output that repeats the on and off states of the DC voltage at several Hz to several hundred kHz.
  • RF high frequency
  • DC pulse power supply is used as a power supply that supplies pulse output to loads such as plasma generator, pulse laser excitation, and electric discharge machine.
  • loads such as plasma generator, pulse laser excitation, and electric discharge machine.
  • the DC power supply device is used as a plasma generation device, a pulse output is supplied between the electrodes in the plasma generation chamber to ignite the plasma due to the discharge between the electrodes and maintain the generated plasma.
  • FIG. 11A shows an example of the configuration of the DC pulse power supply device.
  • a DC pulse power supply device includes a boost chopper circuit as a circuit that generates a pulse waveform.
  • the DC pulse power supply device 100 includes a DC power supply 110 and a boost chopper circuit 120, and supplies a pulse output obtained by boosting the DC voltage of the DC power supply 110 by the boost chopper circuit 120 to a load 130 (Patent Documents 1 and 2).
  • FIG. 11B shows a configuration example of the boost chopper circuit (Patent Document 3).
  • the step-up chopper circuit 120 is configured by connecting an inductor 121 in series between a DC power source side and a load side, and connecting a switching element 122 in parallel to the load side.
  • the switching element 122 has an ON period and an OFF period.
  • a pulse output boosted according to the width duty ratio is formed. In this on/off operation, energy corresponding to the time width of the on period is accumulated in the DC reactor of the inductor 121, and a pulse output having an amplitude boosted according to the accumulated energy is formed.
  • the amplitude of the pulse output to be boosted is determined by the duty ratio of the time width of the on/off period of the switching element, but when the switching element 122 is off, the set amplitude is set by the vibration generated by the leakage inductance of the DC reactor. Exceeding surge voltage occurs.
  • a series circuit of a diode 123 and a resistor 124 having the same polarity as the power source is connected in parallel to the inductor 121, and a reverse voltage due to the energy stored in the inductor 121 is consumed by the resistor 124. , Surge voltage due to excessive voltage rise is suppressed.
  • FIG. 11C shows that by connecting to the DC power supply 125, the switching element 127 is turned on to store energy in the DC reactor 126, and the output side capacitor 128 is charged with the stored energy during the OFF period of the switching element 127.
  • a boost chopper device provided with a switching element 127 that supplies a voltage higher than that of the DC power supply 125 to a load and absorbs a surge voltage generated when the switching element 127 is turned off by a snubber capacitor to prevent the switching element 127 from being destroyed by an excessive voltage.
  • a configuration example is shown.
  • JP-A-8-222258 (FIG. 1, paragraph 0012) Japanese Patent Laid-Open No. 2006-6053 (FIG. 1) Japanese Unexamined Patent Publication No. 1-252165 (FIG. 1) JP 2004-254401 A (paragraph 0005, paragraph 0010, FIG. 5)
  • FIG. 11D shows the output voltage Vo in the pulse cycle.
  • the output voltage Vo becomes the conduction voltage of the switching element
  • the voltage Vs at the source end S of the switching element 122 is the same as the output voltage Vo.
  • the resistance R can suppress the surge voltage by making the resistance low, but since a voltage similar to the reactor voltage VDCL is applied, the resistance R becomes smaller and the loss in the resistance becomes larger. Therefore, the resistance loss and the surge voltage have an opposite relationship to the resistance R. The larger the resistance R, the smaller the loss due to the resistance but the larger the surge voltage, while the resistance R is smaller. As the surge voltage decreases, the resistance loss increases.
  • the reactor voltage V DCL fluctuates according to the reactor current iL (load current Io).
  • the voltage generated in the resistor R is VR1 when the load current is Io
  • K changes depending on the duty ratio of the switching element and the condition of the load current Io. Therefore, due to the surge of the inductance L, the resistance voltage VR and the output voltage Vo change under the influence of changes in the duty ratio and the load current Io.
  • the output voltage Vo of the DC pulse power supply and the terminal voltage of the switching element will change under the influence of the change in the load current Io. Further, since power loss occurs in the resistor R, the efficiency of the DC pulse power supply device is reduced.
  • the conventionally known methods for preventing damage to switching elements due to surge voltage have the problems of varying output voltage and the problems of power loss caused by current flowing through resistors.
  • the DC pulsed power supply device of the present invention suppresses the surge voltage generated in the reactor by clamping the voltage across the reactor during the off period of the boost chopper circuit, prevents the switching element from being damaged, and outputs the output due to load current fluctuations. It suppresses power loss due to voltage fluctuations and load current and discharge current flowing through the resistor.
  • the DC pulse power supply device of the present invention includes a DC power supply unit and a pulse unit that generates a pulse output by a boost chopper circuit connected to the DC power supply unit.
  • the step-up chopper circuit of the pulse unit includes a DC reactor and a series circuit of switching elements, and a clamp voltage unit is connected to the DC reactor.
  • the clamp voltage unit has its output terminal connected to the connection point between the DC reactor and the switching element. As a result, the clamp voltage is applied to one end of the switching element.
  • the surge voltage which is an excess voltage
  • the clamp voltage section clamps the inter-element voltage of the switching element to a predetermined voltage.
  • the clamp voltage section is not affected by load current fluctuations, so the output voltage does not fluctuate due to load current fluctuations. Further, the clamp voltage unit does not cause power loss due to load current or discharge current flowing through the resistance of the snubber circuit.
  • clamp voltage section One example of the configuration of the clamp voltage unit is composed of a regenerative unit.
  • the regenerative unit is connected between both ends of the DC reactor of the step-up chopper circuit, and regenerates the voltage exceeding the set voltage among the reactor voltage of the DC reactor to the DC power supply unit. Since the regenerative unit regenerates the voltage exceeding the set voltage to the DC power supply unit, this set voltage becomes the clamp voltage of the clamp voltage unit, and the DC reactor connected to the output terminal of the clamp voltage unit when the switching element is off. Clamps the voltage at the end of the switch and the voltage at one end of the switching element to the clamp voltage.
  • One configuration example of the regenerative unit is a capacitor connected in parallel to the reactor voltage of the pulse unit, an inverter circuit that orthogonally converts the capacitor voltage of the capacitor, a transformer that transforms the AC voltage of the inverter circuit, and a And a rectifier that rectifies an AC voltage.
  • the regenerative unit uses the set voltage as the voltage across the capacitor, and regenerates the voltage exceeding the voltage across the capacitor to the DC power supply unit.
  • the clamp voltage can be changed according to the transformation ratio of the transformer.
  • the reactor voltage of the DC reactor with the low voltage side voltage as the reference is the regenerative input voltage.
  • the DC reactor can be in the form of a tapless single-winding transformer, or two DC reactors that are magnetically coupled can be configured as a tapped single-winding transformer or a double-winding transformer.
  • one end of the DC reactor is connected to the output end of the DC power supply unit, and one end of the second DC reactor is connected to the output end of the pulse unit.
  • the connection point between the reactor and the second DC reactor is connected to the source side of the switching element of the boost chopper circuit.
  • the output terminal of the clamp voltage unit is connected to the connection point between the DC reactor and the second DC reactor.
  • the clamp voltage unit clamps the voltage at the connection point between the end of the DC reactor to which the output end of the clamp voltage unit is connected to the second DC reactor and the voltage at one end of the switching element to the clamp voltage when the switching device is in the OFF state. To do.
  • the DC reactor can be a first form in which the DC reactor is provided on the low voltage side of the pulse part and a second form in which the DC reactor is provided on the high voltage side of the pulse part.
  • the high voltage side of the DC reactor is connected to the high voltage side of the clamp voltage section (regeneration section), and the low voltage side of the DC reactor is clamp voltage section (regeneration section).
  • the reactor voltage of the DC reactor is input to the regenerative unit as a regenerative input voltage based on the low voltage side voltage of the DC power source unit.
  • the voltage across the switching element is clamped during the off period of the boost chopper circuit to prevent the switching element from being damaged, and to prevent the output voltage from fluctuating due to the load current fluctuation and the load. It suppresses power loss due to current and discharge current flowing through the resistor.
  • the DC pulsed power supply device of the present invention prevents damage to the switching element by clamping the voltage across the switching element during the off period of the boost chopper circuit, and at the same time, fluctuates the output voltage due to load current fluctuations, and the load current and discharge. Power loss due to current flowing through the resistor is suppressed.
  • the first mode is a mode in which the DC reactor of the step-up chopper circuit is one DC reactor, and it can be configured by a tapless single-winding transformer.
  • the second form is a form of two DC reactors that are magnetically coupled, and can be configured by a single-winding transformer with a tap, or two DC reactors or a multiple-winding transformer that are magnetically coupled.
  • FIGS. 1(c) to 1(e) are diagrams for explaining a schematic configuration of a pulse unit and a clamp voltage unit included in a DC pulse power supply device of the present invention, and a voltage.
  • FIG. 1(a) shows a first embodiment. , (B), and the second embodiment will be described with reference to FIGS. 1(c) to 1(e).
  • 1A to 1E show a configuration in which the DC reactor is provided on the low voltage side of the pulse portion.
  • the DC pulse power supply device includes a DC power supply unit 10, a pulse unit 20 that generates a pulse output by a boost chopper circuit connected to the DC power supply unit 10, and a clamp voltage unit 30.
  • FIG. 1 shows an example in which the terminals on the side of the DC power supply are denoted by A and B, the low voltage side is the terminal A, and the high voltage side is the terminal B.
  • the pulse unit 20 includes a step-up chopper circuit including a DC reactor 21 and a switching element 22 connected in series, the DC reactor 21 is connected in series between the DC power supply unit 10 and a load, and the switching element 22 is parallel to the load. Connected.
  • the load is represented by a capacitor connected to the output end of the pulse unit 20.
  • the stored energy is accumulated in the DC reactor 21 when the boost chopper circuit is on, and the reactor voltage is generated in the DC reactor 21 by the stored energy when it is off.
  • the reactor voltage is boosted by repeating on and off operations of the boost chopper circuit.
  • FIGS. 1(a) and 1(b) show a configuration in which the source S side of the switching element 22 is connected to the load-side end of a single-winding transformer without taps, and FIGS. 1(c) to 1(e) are single-winding with taps. The configuration in which the source S side of the switching element 22 is connected to the tap of the transformer is shown.
  • the clamp voltage unit 30 is a circuit unit that clamps the inter-element voltage of the switching element 22 to a predetermined voltage, and can be configured by a regeneration unit.
  • the regenerative unit inputs the reactor voltage V DCL of the DC reactor 21, and regenerates an excess voltage component (V DCL ⁇ Vin) exceeding the regenerative input voltage Vin, which is the set voltage, to the DC power supply unit.
  • the regenerative unit does not regenerate when the reactor voltage V DCL does not exceed the set voltage, and when the reactor voltage V DCL exceeds the set voltage, regenerates the voltage exceeding the set voltage to the DC power supply unit.
  • the step-up of the step-up chopper circuit is clamped at the set voltage, and the generation of excess voltage is suppressed.
  • the set voltage is determined by the regenerative input voltage Vin of the regenerative unit, and when the reactor voltage V DCL of the DC reactor 21 does not exceed the regenerative input voltage Vin of the regenerative unit, the regenerative unit does not regenerate the regenerative input voltage Vin. When the voltage exceeds VDCL-Vin, the regenerative unit regenerates the excess voltage (VDCL-Vin) toward the DC power supply unit.
  • the regenerative input voltage Vin of the regenerative unit which is a set voltage that defines the regenerative operation, can be set based on the DC voltage VAB of the DC power supply unit and the regenerative unit.
  • One configuration example of the regenerative unit includes a capacitor connected in parallel to the reactor voltage of the pulse unit 20, an inverter circuit that orthogonally converts the capacitor voltage across the capacitor, a transformer that transforms the AC voltage of the inverter circuit, and a transformer. And a rectifier for rectifying the AC voltage of the converter, and the output terminal of the rectifier is connected to the DC power supply unit.
  • the transformer ratio determines the voltage ratio between the voltage across the capacitor and the voltage of the DC power supply. Since the capacitor voltage of the regenerative unit is determined by the voltage of the DC power supply unit and the transformation ratio of the transformer, the regenerative unit uses the capacitor voltage as the set voltage of the regenerative input voltage Vin to start and stop the regenerative operation. Since the set voltage depends on the voltage of the DC power supply unit and the transformer ratio of the transformer, the set voltage can be changed by changing the transformer ratio of the transformer. By changing the set voltage, the clamp voltage in the step-up chopper circuit can be changed and the operating voltage of the regenerative operation can be changed.
  • the DC reactor 21 is connected between the DC power supply unit and the source S side of the switching element 22 of the boost chopper circuit.
  • the source S side of the switching element 22 of the step-up chopper circuit is connected to the load-side end of the DC reactor 21 or the tap of the DC reactor 21.
  • the clamp voltage unit 30 and the DC reactor of the pulse unit 20 may be connected in a plurality of forms.
  • the first mode is a mode in which a tapless single-winding transformer is provided as a DC reactor, the output end of the clamp voltage unit 30 is connected to the load side of the DC reactor 21, and the other end is connected to the DC power supply unit side (FIG. 1). Configuration example shown in (a)).
  • the second embodiment is provided with a single-winding transformer with a tap as a DC reactor, the output end of the clamp voltage unit 30 is connected to a connection point s between the first DC reactor 21a and the second DC reactor 21b, and the other end is a DC power supply. It is a form (configuration example shown in FIG. 1C) of connecting to the terminal A on the section side.
  • the source S side of the switching element 22 of the boost chopper circuit is connected to the load side end of the DC reactor 21, and the clamp voltage portion is connected to this connection point s. 30 output terminals are connected.
  • the s between the DC reactor 21 and the source S side of the switching element 22 is clamped by the clamp voltage VC of the clamp voltage unit 30, and the voltage Vs at the connection point s is obtained by superposing the clamp voltage VC on the DC voltage VAB of the DC power supply unit ( VAB+VC).
  • FIG. 1B shows the voltage state of the configuration of the first mode, showing the voltage Vs at the connection point s and the output voltage Vo.
  • the voltage Vs at the connection point s and the output voltage Vo are the same voltage. Even if the voltage rises due to the release of the energy stored in the DC reactor 21, the voltage at the connection point s is clamped by the clamp voltage VC of the clamp voltage unit 30. As a result, the voltage Vs and the output voltage Vo are held at (VAB+VC), and an excessive voltage rise is suppressed.
  • the resistance R is connected in parallel to the inductance shown in FIG. 11B, as shown by the voltage change of the one-dot chain line in FIG. Surge voltage is generated. The resistance R can suppress the surge voltage by reducing the resistance, but since a voltage similar to the reactor voltage VDCL is applied, the resistance becomes large.
  • the entire reactor voltage of the DC reactor 21 is input to the regenerative unit, and the regenerative operation is performed based on the comparison with the set voltage of the regenerative unit.
  • the regeneration destination can be, for example, a DC power supply unit.
  • the DC reactor 21 is composed of a magnetically coupled series circuit of a first DC reactor 21a and a second DC reactor 21b, and a switching element of a boost chopper circuit.
  • the source S side of 22 is connected to the taps of the first DC reactor 21a and the second DC reactor 21b, and the output end of the clamp voltage unit 30 is connected with this tap as a connection point s. Therefore, the tap of the DC reactor 21, the output terminal of the clamp voltage source, and the source S side of the switching element 22 of the boost chopper circuit are connected to the connection point s.
  • connection point s between the tap of the DC reactor 21 and the source S side of the switching element 22 is clamped by the clamp voltage VC of the clamp voltage unit 30, and the voltage Vs at the connection point s is superimposed on the DC voltage VAB of the DC power supply unit by the clamp voltage VC. (VAB+VC).
  • FIG. 1(d) and 1(e) show the voltage state of the configuration of the second embodiment
  • FIG. 1(d) shows the voltage Vs at the connection point s
  • FIG. 1(e) shows the output voltage Vo. ..
  • the voltage at the connection point s is clamped by the clamp voltage VC of the clamp voltage unit 30.
  • the voltage Vs is held at (VAB+VC)
  • the voltage of the output voltage Vo is held at (VAB+VC+VDCL2)
  • an excessive voltage rise is suppressed.
  • the resistor R is connected in parallel to the inductance shown in FIG. 11B, as shown by the voltage change of the one-dot chain line in FIGS. And surge voltage occurs.
  • the resistance R can suppress the surge voltage by reducing the resistance, but since a voltage similar to the reactor voltage VDCL is applied, the resistance becomes large.
  • the clamp voltage unit 30 when the clamp voltage unit 30 is composed of the regenerative unit, the voltage across the first DC reactor 21a of the DC reactor 21 is input to the regenerative unit as the reactor voltage, and the set voltage of the regenerative unit is The regenerative operation is performed based on the comparison of.
  • the regeneration destination can be, for example, a DC power supply unit.
  • the clamp voltage unit 30 in order to suppress the surge voltage to the switching element, it is desirable to connect the clamp voltage unit 30 to the midpoint which is the connection point between the DC reactor 21 and the switching element 22.
  • the coupling coefficient in the ideal case is 1, but the actual coupling coefficient is smaller than 1. This is due to the influence of the leakage magnetic flux, and this leakage magnetic flux becomes the leakage inductance 21c connected in series to the first DC reactor 21a and the second DC reactor 21b. In this configuration, by connecting the clamp voltage unit 30, generation of a surge voltage due to the leakage inductance 21c is suppressed.
  • 2A to 2C show the case where one of the output ends of the clamp voltage unit 30 is connected to the DC power supply unit side and the other is connected to the load side of the second DC reactor 21b.
  • the voltage is not clamped to the voltage Vs at the source terminal S of the switching element 22 and the clamp voltage VC of the clamp voltage unit 30.
  • the voltage generated in the first DC reactor 21a becomes VDCL1.
  • the surge voltage due to the leakage inductance 21c becomes VL. That is, a voltage of V DCL1 +VL is generated in the voltage Vs.
  • the voltage component (VDCL1+VDCL2+VL) included in the output voltage Vo depends on the voltage component (VDCL1) due to the inductance of the first DC reactor 21a, the voltage component (VDCL2) due to the inductance of the second DC reactor 21b, and the leakage inductance of the leakage inductance 21c. Since the surge voltage component (VL) is added, the output voltage Vo is affected by the surge voltage.
  • the output end of the clamp voltage unit 30 is connected to the connection point between the first DC reactor 21a and the second DC reactor 21b.
  • the clamp voltage unit 30 is configured by the regenerative unit 30A.
  • the first configuration example is a configuration in which the reactor voltage across the DC reactor of the boost chopper circuit is regenerated
  • the second to fifth configuration examples are the DC reactors of one of the two DC reactors that are magnetically coupled in the boost chopper circuit. It is a configuration for regenerating the reactor voltage.
  • the second and fifth configuration examples are configurations in which two DC reactors that are magnetically coupled are a single-winding transformer with a tap
  • the third and fourth configuration examples are two DC couplings that are magnetically coupled.
  • the reactor is a double-winding transformer.
  • the first to fifth configuration examples use the voltage on the low voltage side of the DC power supply unit as the reference voltage.
  • the DC pulse power supply device of the present invention includes a DC power supply unit (DC unit) 10, a pulse unit 20A for supplying a pulse output generated by a boost chopper circuit connected to the DC power supply unit 10 to a load 4, and a pulse unit 20A.
  • the regenerative unit 30A is provided as a clamp voltage unit that regenerates the excessive voltage rise generated to the DC power supply unit 10 side and clamps the upper limit voltage of the source end of the switching element 22 and the output end of the DC pulse power supply device to the clamp voltage. , And supplies a pulse output to the load 4 via the output cable 3.
  • the control circuit unit 40 controls the DC power supply unit 10, the pulse unit 20A, and the regenerative unit 30A.
  • FIG. 3 shows an example of the plasma generator as the load 4, the load 4 is not limited to the plasma generator, and may be applied to a pulse laser excitation, an electric discharge machine, or the like.
  • the DC power supply unit (DC unit) 10 includes a rectifier 11 that rectifies the AC voltage of the AC power supply 2 into a DC voltage, and a snubber circuit 12 that absorbs and suppresses spike-like high voltage that occurs transiently during rectification.
  • a single-phase inverter circuit 13 for converting a DC voltage into an AC voltage a single-phase transformer 14 for converting the AC voltage of the single-phase inverter circuit 13 into a predetermined voltage value, and a voltage conversion by the single-phase transformer 14.
  • a rectifier 15 that rectifies an AC voltage into a DC voltage, and a capacitor 16 (CF) that has a voltage across the DC voltage of a DC power supply unit are provided.
  • FIG. 3 shows an example of the capacitive load of the plasma generator as the load 4.
  • one end of the plasma generator is grounded to supply a negative voltage, so that the DC power supply unit 10 is configured to generate a pulse output of a negative voltage.
  • the single-phase inverter circuit 13 performs a switching operation according to a control signal from the control circuit unit 40, and converts a DC voltage into an AC voltage having a predetermined frequency.
  • Each of the circuit elements of the rectifiers 11 and 15, the snubber circuit 12, the single-phase inverter circuit 13, and the single-phase transformer 14 that configure the DC power supply unit 10 may have any commonly known circuit configuration.
  • the pulse unit 20A generates a pulse waveform from the DC voltage by the boost chopper circuit.
  • the step-up chopper circuit includes a DC reactor 21A connected in series between the DC power supply side and the load side, a switching element (Q1) 22 connected in parallel to the load side, and an ON/OFF operation of the switching element 22. Is provided with a drive circuit 23.
  • the DC power supply unit side of the pulse unit 20A includes a grounded terminal B and a negative voltage terminal A as a low voltage side.
  • the illustrated switching element 22 is an example of an FET, the source S side is connected to the low voltage side, the drain D side is connected to the ground voltage side, and the drive signal from the drive circuit 23 is input to the gate G side.
  • control circuit unit 40 In order to operate the boost chopper circuit, the control circuit unit 40 generates a signal that determines the time width or duty ratio of the ON period and the OFF period of the switching element 22 corresponding to the target pulse output, and the DC power supply unit 10 A control signal is generated based on the voltage and current at the output terminal of the.
  • the drive circuit 23 outputs a drive signal to the gate G of the switching element 22 based on the control signal of the control circuit section 40 to cause the switching element 22 to turn on/off.
  • the source S side of the switching element 22 is connected to the load side of the DC reactor 21A, and the drain D side of the switching element 22 is grounded.
  • the load side of the DC reactor 21A is grounded, and a current flows from the terminal B to the terminal A through the switching element 22 in the ON state and the DC reactor 21A.
  • electromagnetic energy is accumulated in the DC reactor 21A.
  • the switching element 22 is switched from the ON state to the OFF state, the stored energy stored in the DC reactor 21A causes the reactor voltage V DCL to be generated in the DC reactor 21A.
  • the step-up chopper circuit raises the output voltage Vo according to the duty ratio of the ON/OFF time by repeating the ON operation and the OFF operation of the switching element 22.
  • the regenerative unit 30A regenerates a voltage exceeding the set voltage among the reactor voltages of the DC reactor of the boost chopper circuit to the DC power supply unit.
  • the regenerative unit 30A includes a diode 31, a capacitor 32 (C1), an inverter circuit 33, a transformer 34, and a rectifier 35.
  • the regenerative unit 30A regenerates a voltage component exceeding the set voltage to the DC power supply unit to clamp the reactor voltage to the capacitor voltage VC1 of the capacitor 32 (C1). Function as.
  • the clamp voltage of the clamp voltage section is determined by the capacitor voltage VC1.
  • the regeneration unit 30A clamps the upper limit voltage at the source end of the switching element 22 and the output end of the DC pulse power supply device to the capacitor voltage VC1, and applies an excessive voltage to the drain-source voltage VDS of the switching element 22. It is suppressed that the output voltage fluctuates due to the fluctuation of the load current.
  • One end of the capacitor 32 (C1) is connected to the load side end of the DC reactor 21A, the other end is connected to the DC power supply side end of the DC reactor 21A via the diode 31, and is connected to the first DC reactor 21a.
  • the generated reactor voltage is applied.
  • the diode 31 is connected with the direction from the pulse section 20A to the capacitor 32 (C1) of the regenerative section 30A as the forward direction, and when the reactor voltage V DCL of the DC reactor 21A exceeds the capacitor voltage VC1 of the capacitor 32 (C 1), the reactor 31 is connected. Regeneration by the regeneration unit 30A is performed for the amount of voltage in which the voltage VDCL exceeds the capacitor voltage VC1 of the capacitor 32 (C1). Therefore, the regeneration unit 30A performs the regeneration operation with the capacitor voltage VC1 of the capacitor 32 (C1) as the threshold value.
  • the capacitor voltage VC1 is a voltage corresponding to the regenerative input voltage Vin in FIG.
  • the regenerative unit 30A has a configuration in which one end is connected to the low voltage side input end of the pulse unit 20A, and the DC reactor 21a of the DC reactor 21a is referenced with the low voltage side voltage (negative voltage) as a reference. Regeneration is performed using the reactor voltage V DCL as the regenerative input voltage Vin.
  • the inverter circuit 33 performs orthogonal conversion between the DC voltage on the side of the capacitor 32 and the AC voltage on the side of the transformer 34, and makes the capacitor voltage VC1 of the capacitor 32 (C1) a constant voltage based on the DC voltage VAB of the DC power supply unit. In addition to holding, when the reactor voltage VDCL exceeds the capacitor voltage VC1 of the capacitor 32 (C1), the excess voltage is converted into AC and regenerated to the DC power supply side. Since the capacitor voltage VC1 is maintained at a constant voltage, the reactor voltage V DCL of the DC reactor 21A is clamped to the capacitor voltage VC1.
  • the inverter circuit 33 can be configured by, for example, a bridge circuit of switching elements. The opening/closing operation of the switching element is controlled by the control signal ⁇ from the control circuit unit 40.
  • the transformer 34 modulates the voltage ratio between the DC voltage VAB of the DC power supply unit 10 and the capacitor voltage VC1 of the capacitor 32 (C1) based on the transformation ratio.
  • the transformation ratio of the transformer 34 is (n2:n1)
  • the rectifier 35 rectifies the AC voltage on the transformer 34 side into the DC voltage on the DC power supply unit 10 side.
  • the DC side terminal of the rectifier 35 is connected to the terminals A and B of the DC power supply unit 10 and regenerates power to the DC power supply unit 10 only when the capacitor voltage VC1 exceeds a voltage based on the DC voltage VAB.
  • the configuration of the regenerative unit 30A is limited to the above-described configuration as long as it has a function of clamping the voltage across the DC reactor 21A to a predetermined voltage and a function of regenerating electric power exceeding the predetermined voltage to the DC power supply unit side. It is not something that can be done.
  • FIG. 4A shows the ON state (on) and OFF state (off) of the switching element 22 (Q1)
  • FIG. 4B shows the reactor voltage V DCL of the DC reactor 21A
  • FIG. 4C shows the drain-source voltage VDS of the switching element 22
  • FIG. 4D shows the output voltage Vo.
  • S1 to S14 in the figure show the ON state and the OFF state of each stage.
  • the switching element 22 is in the on state (on) in the states with odd numbers S1, S3,... S13, and the switching element 22 is in the off state with even numbers S2, S4,. (Off) is shown.
  • the voltage of the drain-source voltage VDS of the switching element 22 becomes a voltage according to the reactor voltage VDCL and gradually increases, but has not reached the capacitor voltage VC1 of the regenerative unit.
  • FIG. 4 shows a state in which the voltage value on the negative side increases (FIG. 4(c)).
  • As the output voltage Vo a voltage obtained by adding the reactor voltage V DCL to the DC voltage V AB of the DC power supply unit is output (FIG. 4(d)).
  • the reactor voltage V DCL shown by the solid line shows a state where it is clamped to the capacitor voltage V C1
  • the case where the reactor voltage V DCL shown by the broken line is not clamped at the capacitor voltage V C1 is shown as a comparative example.
  • the voltage of the drain-source voltage VDS of the switching element 22 becomes a voltage according to the reactor voltage VDCL, and is held at the voltage of the capacitor voltage VC1 of the regenerative unit.
  • the drain-source voltage VDS shown by the solid line shows the state clamped to the capacitor voltage VC1
  • the drain-source voltage VDS shown by the broken line shows the case not clamped to the capacitor voltage VC1 as a comparative example. ing. Note that FIG. 4 shows a state in which the voltage value on the negative side increases (FIG. 4(c)).
  • the output voltage Vo As the output voltage Vo, the voltage component of the DC voltage VAB of the DC power supply unit and the reactor voltage V DCL is output. Since the reactor voltage VDCL is clamped, the output voltage Vo is maintained at a constant voltage (FIG. 4(d)).
  • FIG. 5A shows the output voltage Vo in the regenerative state in the first configuration example.
  • the DC pulse power supply device outputs the pulse output of the output voltage Vo with the switching cycle of the step-up chopper circuit as the pulse cycle T.
  • the pulse output has an on period Ton in which the switching element is in the on state and an off period Toff in which the switching element is in the off state within the pulse period T.
  • the output voltage Vo during the on period Ton is a voltage value corresponding to the drain-source voltage VDS.
  • the output voltage Vo in the off period Toff is (VAB+VDCL) in which the reactor voltage VDCL is superimposed on the DC voltage VAB of the DC power supply unit, but the reactor voltage VDCL is clamped to the capacitor voltage VC1 (VAB+VC1). .. Since the DC voltage VAB and the capacitor voltage VC1 are constant voltages, the output voltage Vo of the pulse output is held at a constant voltage.
  • the broken line portion in FIG. 5A represents the suppression voltage component (VDCL-VC1) obtained by subtracting the clamped capacitor voltage VC1 from the reactor voltage VDCL.
  • VDCL-VC1 the suppression voltage component obtained by subtracting the clamped capacitor voltage VC1 from the reactor voltage VDCL.
  • the regenerative unit 30A includes an inverter circuit 33 that outputs an AC voltage obtained by orthogonally converting the DC voltage of the capacitor voltage VC1 of the capacitor 32 (C1) to the transformer 34.
  • the inverter circuit 33 includes a bridge circuit 33a including switching elements QR1 to QR4, and a drive circuit 33b that generates a drive signal for driving the switching elements QR1 to QR4 based on the control signal ⁇ . Note that, here, an example of a full bridge circuit is shown as the bridge circuit 33a, but a half bridge circuit or a multiphase inverter circuit may be used.
  • the pulse output generated by the DC power supply unit (DC unit) 10 and the step-up chopper circuit connected to the DC power supply unit 10 is loaded as in the first configuration.
  • a regeneration unit 30A that regenerates an excessive voltage increase of the pulse unit 20B to the DC power supply unit 10 side and a control circuit that controls the DC power supply unit 10, the pulse unit 20b, and the regeneration unit 30A.
  • the unit 40 is provided and supplies a pulse output to the load 4 via the output cable 3.
  • a second configuration example of the DC pulse power supply device of the present invention will be described with reference to FIG.
  • the second configuration example is different from the first configuration example in the configuration of the boost chopper circuit of the pulse unit 20, and the other configurations are the same as the first configuration example.
  • a configuration different from the first configuration example will be described, and description of other common configurations will be omitted.
  • the DC reactor 21A included in the boost chopper circuit of the first configuration example is composed of a single coil.
  • the DC reactor 21B of the second configuration example is configured by a single-winding transformer with a tap instead of the single coil of the boost chopper circuit of the first configuration example.
  • the DC reactor 21B formed by the tapped single-winding transformer can be configured by connecting the first DC reactor 21a and the second DC reactor 21b that are magnetically coupled in series, and the first DC reactor 21a and the second DC reactor 21a can be connected in series.
  • the connection point of the DC reactor 21b is the tap point.
  • One end of the first DC reactor 21a is connected to the terminal A on the low voltage side of the DC power supply unit, one end of the second DC reactor 21b is connected to the load side, and the first DC reactor 21a and the second DC reactor 21a are connected.
  • the tap point of the connection point of 21b is connected to the source S end of the switching element 22.
  • the tap point of the connection point of the DC reactor 21B is grounded, and the terminal B is connected via the switching element 22 in the ON state and the first DC reactor 21a of the DC reactor 21B. Current flows through. At this time, electromagnetic energy is accumulated in the first DC reactor 21a.
  • the reactor voltage VDDL1 is applied to the first DC reactor 21a by the reactor current iL flowing by the stored energy stored in the first DC reactor 21a of the DC reactor 21B. Then, a reactor voltage V DCL2 is generated in the second DC reactor 21b.
  • the boost chopper circuit raises the output voltage Vo by repeating the ON operation and the OFF operation of the switching element 22 as in the first configuration example.
  • the voltage ratio between the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b is a value corresponding to the ratio of the inductance ratio of the first DC reactor 21a and the second DC reactor 21b. Become.
  • the reactor voltage VDDCL1 of the first DC reactor 21a and the second DC reactor 21a is n1p:n2p
  • the voltage ratio (VDCL1/VDCL2) of the DC reactor 21b to the reactor voltage V DCL2 is the winding number ratio (n1p/n2p).
  • the regeneration unit 30A of the second configuration example operates similarly by applying the reactor voltage V DCL1 of the first DC reactor 21a of the DC reactor 21B instead of the reactor voltage V DCL of the DC reactor 21A of the first configuration example. ..
  • the regenerative unit 30A regenerates a voltage component exceeding the set voltage to the DC power supply unit to clamp the reactor voltage to the capacitor voltage VC1 of the capacitor 32 (C1). Function as.
  • the clamp voltage of the clamp voltage section is determined by the capacitor voltage VC1.
  • the regeneration unit 30A clamps the upper limit voltage at the source end of the switching element 22 and the output end of the DC pulse power supply device to the capacitor voltage VC1, and applies an excessive voltage to the drain-source voltage VDS of the switching element 22. It is suppressed that the output voltage fluctuates due to the fluctuation of the load current.
  • one end of the capacitor 32 (C1) is connected to the connection point between the first DC reactor 21a and the second DC reactor 21b of the DC reactor 21B, and the other end is connected via the diode 31 to the first DC reactor.
  • 21a is connected to the end on the DC power supply side and a reactor voltage V DCL1 generated in the first DC reactor 21a is applied.
  • the regeneration unit 30A regenerates the voltage for which the reactor voltage V DCL1 exceeds the capacitor voltage V C1 of the capacitor 32 (C1). Therefore, the regeneration unit 30A performs the regeneration operation using the capacitor voltage VC1 of the capacitor 32 (C1) as the threshold value as in the first configuration example.
  • FIG. 5B shows the output voltage Vo in the regenerative state in the second configuration example.
  • the DC pulse power supply device outputs the pulse output of the output voltage Vo with the switching cycle of the step-up chopper circuit as the pulse cycle T.
  • the pulse output has an on period Ton in which the switching element is in the on state and an off period Toff in which the switching element is in the off state within the pulse period T.
  • the output voltage Vo during the on period Ton is a voltage value corresponding to the reactor voltage VDCL2.
  • the output voltage Vo during the off period Toff becomes (VAB+VDCL1+VDCL2) in which the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b are superimposed on the DC voltage V AB of the DC power supply unit.
  • the reactor voltage VDCL1 is clamped to the capacitor voltage VC1
  • the output voltage Vo becomes (VAB+VC1+VDCL2). Since the DC voltage VAB and the capacitor voltage VC1 are constant voltages, the output voltage Vo of the pulse output is maintained at a substantially constant voltage.
  • the broken line portion in FIG. 5(b) represents the suppression voltage.
  • the voltage applied to the source terminal of the switching element changes from VDCL1 to VC1 due to the clamp of the capacitor voltage VC1 due to regeneration, whereby the voltage (VDCL1-VC1) is suppressed.
  • the reactor voltage V DCL1 since the reactor voltage V DCL1 is suppressed, the reactor voltage V DCL2 generated by the second DC reactor 21b is also suppressed to (V DCL1 ⁇ VC1) ⁇ (n2p/n1p) according to the winding ratio. Therefore, the clamp amount of the output voltage is (V DCL1-VC1) ⁇ (1+n2p/n1p).
  • the configuration in which the resistance R is connected in parallel to the inductance shown in FIG. 11B as shown by the voltage change of the alternate long and short dash line in FIG. Surge voltage is generated.
  • the pulse output is generated by the DC power supply unit (DC unit) 10 and the boost chopper circuit connected to the DC power supply unit 10, similarly to the first and second configurations.
  • the pulse unit 20C supplied to the load 4, the regenerative unit 30A that regenerates the excessive voltage increase of the pulse unit 20C to the DC power supply unit 10 side, the DC power supply unit 10, the pulse unit 20C, and the regenerative unit 30A are controlled. And a pulse output to the load 4 via the output cable 3.
  • a third configuration example of the DC pulse power supply device of the present invention will be described with reference to FIG.
  • the third configuration example is different from the first and second configuration examples in the configuration of the boost chopper circuit of the pulse unit 20C, and the other configurations are similar to the first and second configuration examples.
  • configurations different from the first and second configuration examples will be described, and description of other common configurations will be omitted.
  • the DC reactor 21B included in the boost chopper circuit of the second configuration example is composed of a single-winding transformer with a tap.
  • the DC reactor 21C of the third configuration example is configured by a multiple-winding transformer instead of the tapped single-winding transformer of the boost chopper circuit of the second configuration example.
  • the double-winding transformer of the DC reactor 21C is an example of a positive polarity transformer.
  • the DC reactor 21C using a multi-winding transformer has a configuration in which a magnetically coupled first DC reactor 21a and second DC reactor 21b are connected in parallel.
  • One end of the first DC reactor 21a is connected to the low voltage side terminal A of the DC power supply unit, and the other end is connected to the source S end of the switching element 22.
  • One end of the second DC reactor 21b is connected to the source S end of the switching element 22, and the other end is connected to the load side.
  • the switching element 22 When the switching element 22 is in the ON state, the switching element 22 side end of the first DC reactor 21a of the DC reactor 21C is grounded, and the switching element 22 in the ON state from the terminal B and the first DC reactor 21a. A current flows to the terminal A via the. At this time, electromagnetic energy is accumulated in the first DC reactor 21a.
  • the reactor voltage VDDL1 is applied to the first DC reactor 21a by the reactor current iL flowing due to the stored energy stored in the first DC reactor 21a of the DC reactor 21C. Then, the reactor voltage V DCL2 is generated in the second DC reactor 21b due to the magnetic coupling with the first DC reactor 21a.
  • the step-up chopper circuit raises the output voltage Vo by repeating the ON operation and the OFF operation of the switching element 22 as in the first and second configuration examples.
  • the voltage ratio between the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b is a value corresponding to the ratio of the inductance ratio of the first DC reactor 21a and the second DC reactor 21b. Become.
  • the winding ratio of the multi-winding coil of the first DC reactor 21a and the second DC reactor 21b of the DC reactor 21C is (n1p:n2p)
  • the voltage ratio (VDCL1/VDCL2) of the DC reactor 21b to the reactor voltage V DCL2 is the winding number ratio (n1p/n2p).
  • the regenerative unit 30A of the third configuration example operates in the same manner as the reactor voltage V DCL1 of the first DC reactor 21a of the DC reactor 21B of the second configuration example.
  • the regenerative unit 30A regenerates a voltage component exceeding the set voltage to the DC power supply unit to clamp the reactor voltage to the capacitor voltage VC1 of the capacitor 32 (C1). Function as.
  • the clamp voltage of the clamp voltage section is determined by the capacitor voltage VC1.
  • the regeneration unit 30A clamps the upper limit voltage at the source end of the switching element 22 and the output end of the DC pulse power supply device to the capacitor voltage VC1, and applies an excessive voltage to the drain-source voltage VDS of the switching element 22. It is suppressed that the output voltage fluctuates due to the load current fluctuation.
  • one end of the capacitor 32 (C1) is connected to the switching element side end of the first DC reactor 21a of the DC reactor 21C, and the other end is connected to the DC of the first DC reactor 21a via the diode 31. It is connected to the end on the power supply unit side, and a reactor voltage V DCL1 generated in the first DC reactor 21a is applied.
  • the diode 31 is connected with the direction from the pulse portion to the capacitor 32 (C1) of the regenerative unit 30A as the forward direction, and when the reactor voltage V DCL1 of the first DC reactor 21a exceeds the capacitor voltage V C1 of the capacitor 32 (C1).
  • the regeneration unit 30A regenerates the voltage for which the reactor voltage V DCL1 exceeds the capacitor voltage V C1 of the capacitor 32 (C1). Therefore, the regeneration unit 30A performs the regeneration operation using the capacitor voltage VC1 of the capacitor 32 (C1) as the threshold value, as in the first and second configuration examples.
  • the fourth configuration of the DC pulse power supply device of the present invention is similar to the configurations of the first, second, and third configurations, and outputs a pulse by a DC power supply unit (DC unit) 10 and a boost chopper circuit connected to the DC power supply unit 10.
  • Pulse generator 20D that supplies the load 4 to the load 4
  • a regeneration unit 30A that regenerates an excessive voltage increase of the pulse unit 20D to the DC power supply unit 10 side
  • a DC power supply unit 10 a pulse unit 20D, and a regeneration unit 30A.
  • a fourth configuration example of the DC pulse power supply device of the present invention will be described with reference to FIG.
  • the fourth configuration example is different from the third configuration example in the configuration of the transformer that forms the DC reactor of the boost chopper circuit of the pulse unit 20D, and the other configurations are the same as the third configuration example.
  • the DC reactor 21C included in the boost chopper circuit of the third configuration example is composed of an additive-polarity double-winding transformer.
  • the DC reactor 21D of the fourth configuration example is configured by a depolarization multiple-winding transformer instead of the additive polarity double-winding transformer of the boost chopper circuit of the third configuration example.
  • the direct-current reactor 21D with a multi-winding transformer has a configuration in which a magnetically coupled first direct-current reactor 21a and second direct-current reactor 21b are connected in parallel.
  • One end of the first DC reactor 21a is connected to the low voltage side terminal A of the DC power supply unit, and the other end is connected to the source S end of the switching element 22.
  • One end of the second DC reactor 21b is connected to the terminal A on the low voltage side of the DC power supply unit, and the other end is connected to the load side.
  • the switching element 22 When the switching element 22 is in the ON state, the end of the first DC reactor 21a on the switching element 22 side of the DC reactor 21D is grounded, and the switching element 22 in the ON state from the terminal B and the first DC reactor 21a. A current flows to the terminal A via the. At this time, electromagnetic energy is accumulated in the first DC reactor 21a.
  • the reactor voltage i DCL1 is applied to the first DC reactor 21a by the reactor current iL flowing by the stored energy stored in the first DC reactor 21a of the DC reactor 21D.
  • the reactor voltage V DCL2 is generated in the second DC reactor 21b due to the magnetic coupling with the first DC reactor 21a.
  • the step-up chopper circuit raises the output voltage Vo by repeating the ON operation and the OFF operation of the switching element 22 as in the first, second, and third configuration examples.
  • the voltage ratio between the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b is a value corresponding to the ratio of the inductance ratio of the first DC reactor 21a and the second DC reactor 21b. Become.
  • the winding ratio of the multi-winding coil of the first DC reactor 21a and the second DC reactor 21b of the DC reactor 21D is (n1p:n2p)
  • the voltage ratio (VDCL1/VDCL2) of the DC reactor 21b to the reactor voltage V DCL2 is the winding number ratio (n1p/n2p).
  • the DC reactor 21D of the regenerative unit of the fourth configuration example operates in the same manner as the reactor voltage V DCL1 of the first DC reactor 21a of the DC reactor 21C of the third configuration example.
  • the regenerative unit 30A regenerates a voltage component exceeding the set voltage to the DC power supply unit to clamp the reactor voltage to the capacitor voltage VC1 of the capacitor 32 (C1). Function as.
  • the clamp voltage of the clamp voltage section is determined by the capacitor voltage VC1.
  • the regeneration unit 30A clamps the upper limit voltage at the source end of the switching element 22 and the output end of the DC pulse power supply device to the capacitor voltage VC1, and applies an excessive voltage to the drain-source voltage VDS of the switching element 22. It is suppressed that the output voltage fluctuates due to the fluctuation of the load current.
  • one end of the capacitor 32 (C1) is connected to the switching device side end of the first DC reactor 21a of the DC reactor 21D, and the other end is connected to the DC of the first DC reactor 21a via the diode 31. It is connected to the end on the power supply unit side, and a reactor voltage V DCL1 generated in the first DC reactor 21a is applied.
  • the diode 31 is connected with the direction from the pulse portion to the capacitor 32 (C1) of the regenerative unit 30A as the forward direction, and when the reactor voltage V DCL1 of the first DC reactor 21a exceeds the capacitor voltage V C1 of the capacitor 32 (C1).
  • the regeneration unit 30A regenerates the voltage for which the reactor voltage V DCL1 exceeds the capacitor voltage V C1 of the capacitor 32 (C1). Therefore, the regeneration unit 30A performs the regeneration operation using the capacitor voltage VC1 of the capacitor 32 (C1) as a threshold value, as in the first, second, and third configuration examples.
  • the fifth configuration of the DC pulse power supply device of the present invention is similar to the first configuration, in that the pulse output generated by the DC power supply unit (DC unit) 10 and the boost chopper circuit connected to the DC power supply unit 10 is loaded. 4 is supplied to the pulse generator 20E, a regeneration unit 30A that regenerates an excessive voltage increase of the pulse unit 20E to the DC power supply unit 10 side, and a control circuit that controls the DC power supply unit 10, the pulse unit 20E, and the regeneration unit 30A.
  • the unit 40 is provided and supplies a pulse output to the load 4 via the output cable 3.
  • a fifth configuration example of the DC pulse power supply device of the present invention will be described with reference to FIG.
  • the fifth configuration example is different from the second configuration example in the installation mode of the DC reactor of the boost chopper circuit, and the other configurations are the same as the second configuration example.
  • a configuration different from the second configuration example will be described, and description of other common configurations will be omitted.
  • the DC reactor 21E included in the step-up chopper circuit of the fifth configuration example is composed of a single-winding transformer with a trap, like the DC reactor 21B of the step-up chopper circuit of the second configuration example, but is different in the installation mode for the power supply line. ..
  • the DC reactor 21B of the second configuration example is connected to the low-voltage power supply line of the DC power supply unit, whereas the DC reactor 21E of the fifth configuration example is connected to the high-voltage power supply line of the DC power supply unit. Connected.
  • the DC reactor 21E by the tapped single-winding transformer is configured by serially connecting the first DC reactor 21a and the second DC reactor 21b which are magnetically coupled to each other.
  • the first DC reactor 21a and the second DC reactor 21b are connected to each other.
  • the connection point of is the tap point.
  • One end of the first DC reactor 21a is connected to the terminal B on the high voltage side of the DC power supply unit, one end of the second DC reactor 21b is connected to the load side and grounded, and the first DC reactor 21a and the second DC reactor 21a are connected to each other.
  • the tap point of the connection point of the DC reactor 21b is connected to the drain D end of the switching element 22.
  • the tap point of the connection point of the DC reactor 21E is grounded via the second DC reactor 21b, the terminal B to the first DC reactor 21a, and the switching element 22 in the ON state.
  • a current flows to the terminal A via the.
  • electromagnetic energy is accumulated in the first DC reactor 21a.
  • the reactor voltage VDDL1 is applied to the first DC reactor 21a by the reactor current iL that flows due to the stored energy stored in the first DC reactor 21a of the DC reactor 21E. Then, a reactor voltage V DCL2 is generated in the second DC reactor 21b.
  • the boost chopper circuit raises the output voltage Vo by repeating the ON operation and the OFF operation of the switching element 22 as in the first configuration example.
  • the voltage ratio between the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b is a value corresponding to the ratio of the inductance ratio of the first DC reactor 21a and the second DC reactor 21b. Become.
  • the winding number ratio of the tapped single-turn coil of the first DC reactor 21a and the second DC reactor 21b of the DC reactor 21E is n1p:n2p
  • the voltage ratio (VDCL1/VDCL2) of the DC reactor 21b to the reactor voltage V DCL2 is the winding number ratio (n1p/n2p).
  • the regeneration unit 30A of the fifth configuration example operates similarly by applying the reactor voltage V DCL1 of the first DC reactor 21a of the DC reactor 21E instead of the reactor voltage V DCL of the DC reactor 21A of the first configuration example. ..
  • the regenerative unit 30A regenerates a voltage component exceeding the set voltage to the DC power supply unit to clamp the reactor voltage to the capacitor voltage VC1 of the capacitor 32 (C1). Function as.
  • the clamp voltage of the clamp voltage section is determined by the capacitor voltage VC1.
  • the regeneration unit 30A clamps the upper limit voltage at the source end of the switching element 22 and the output end of the DC pulse power supply device to the capacitor voltage VC1, and applies an excessive voltage to the drain-source voltage VDS of the switching element 22. It is suppressed that the output voltage fluctuates due to the fluctuation of the load current.
  • one end of the capacitor 32 (C1) is connected to the connection point between the first DC reactor 21a and the second DC reactor 21b of the DC reactor 21E, and the other end is connected via the diode 31 to the first DC reactor.
  • 21a is connected to the end on the DC power supply side and a reactor voltage V DCL1 generated in the first DC reactor 21a is applied.
  • the regeneration unit 30A regenerates the voltage for which the reactor voltage V DCL1 exceeds the capacitor voltage V C1 of the capacitor 32 (C1). Therefore, the regeneration unit 30A performs the regeneration operation using the capacitor voltage VC1 of the capacitor 32 (C1) as the threshold value as in the first configuration example.
  • FIG. 5B shows the output voltage Vo in the regenerative state in the fifth configuration example, as in the second configuration example.
  • the DC pulse power supply device outputs the pulse output of the output voltage Vo with the switching cycle of the step-up chopper circuit as the pulse cycle T.
  • the pulse output has an on period Ton in which the switching element is in the on state and an off period Toff in which the switching element is in the off state within the pulse period T.
  • the output voltage Vo during the on period Ton is a voltage value corresponding to the reactor voltage VDCL2.
  • the output voltage Vo during the off period Toff becomes (VAB+VDCL1+VDCL2) in which the reactor voltage V DCL1 of the first DC reactor 21a and the reactor voltage V DCL2 of the second DC reactor 21b are superimposed on the DC voltage V AB of the DC power supply unit.
  • the reactor voltage VDCL1 is clamped to the capacitor voltage VC1
  • the output voltage Vo becomes (VAB+VC1+VDCL2). Since the DC voltage VAB and the capacitor voltage VC1 are constant voltages, the output voltage Vo of the pulse output is maintained at a substantially constant voltage.
  • the broken line portion in FIG. 5(b) represents the suppression voltage.
  • the voltage applied to the source terminal of the switching element changes from VDCL1 to VC1 due to the clamp of the capacitor voltage VC1 due to regeneration, whereby the voltage (VDCL1-VC1) is suppressed.
  • the reactor voltage V DCL1 since the reactor voltage V DCL1 is suppressed, the reactor voltage V DCL2 generated by the second DC reactor 21b is also suppressed to (V DCL1 ⁇ VC1) ⁇ (n2p/n1p) according to the winding ratio. Therefore, the clamped amount of the output voltage is (V DCL1-VC1) ⁇ (1+n2p/n1p).
  • the DC pulse power supply device of the present invention can be applied as a power source for supplying power to a plasma generator, and can also be used as a power supply device for supplying pulse output to a load such as pulse laser excitation or an electric discharge machine.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Inverter Devices (AREA)
  • Amplifiers (AREA)
  • Generation Of Surge Voltage And Current (AREA)
PCT/JP2019/043837 2019-01-24 2019-11-08 直流パルス電源装置 Ceased WO2020152948A1 (ja)

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KR1020217021136A KR102616556B1 (ko) 2019-01-24 2019-11-08 직류 펄스 전원 장치
EP19911246.7A EP3916992A4 (en) 2019-01-24 2019-11-08 Dc pulsed power supply device
CN201980089992.0A CN113366753A (zh) 2019-01-24 2019-11-08 直流脉冲电源装置
US17/422,506 US11799373B2 (en) 2019-01-24 2019-11-08 DC pulse power supply device

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JP6835900B2 (ja) * 2019-04-11 2021-02-24 株式会社京三製作所 直流パルス電源装置、及び直流パルス電源装置の磁気飽和リセット方法
WO2022254711A1 (ja) * 2021-06-04 2022-12-08 三菱電機株式会社 電力変換装置及び電源装置

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KR20210099100A (ko) 2021-08-11
US20220094261A1 (en) 2022-03-24
TW202110052A (zh) 2021-03-01
JP2020120523A (ja) 2020-08-06
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US11799373B2 (en) 2023-10-24
EP3916992A1 (en) 2021-12-01

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