WO2020143247A1 - 清洗设备及清洗方法 - Google Patents

清洗设备及清洗方法 Download PDF

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Publication number
WO2020143247A1
WO2020143247A1 PCT/CN2019/106699 CN2019106699W WO2020143247A1 WO 2020143247 A1 WO2020143247 A1 WO 2020143247A1 CN 2019106699 W CN2019106699 W CN 2019106699W WO 2020143247 A1 WO2020143247 A1 WO 2020143247A1
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WO
WIPO (PCT)
Prior art keywords
auxiliary
worktable
panel
cleaning
main
Prior art date
Application number
PCT/CN2019/106699
Other languages
English (en)
French (fr)
Inventor
李强强
王宝友
陈策
方刚
甘柏林
Original Assignee
昆山国显光电有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昆山国显光电有限公司 filed Critical 昆山国显光电有限公司
Publication of WO2020143247A1 publication Critical patent/WO2020143247A1/zh
Priority to US17/168,572 priority Critical patent/US11642706B2/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities

Definitions

  • the present application relates to display panel manufacturing technology, in particular to a cleaning device and a cleaning method.
  • the display panel In the manufacturing process of the display panel, it is necessary to sequentially attach a plurality of functional film layers on the display panel, and the display panel needs to be cleaned before the functional film layers are pasted to eliminate impurities such as particles on the display panel.
  • the display panel In the prior art, the display panel is often cleaned by cleaning equipment.
  • the cleaning equipment includes a machine body, a worktable arranged on the machine body, and a spray head arranged on the upper part of the worktable.
  • the worktable has an assembly surface facing away from the machine body. When in use, install the panel to be cleaned on the assembly surface, control the nozzle to spray cleaning gas, and move the nozzle along one end of the table to the other end, and then blow off the particles and other impurities on the panel to be cleaned by the cleaning gas. Realize the cleaning of the panel to be cleaned.
  • An embodiment of the present application provides a cleaning device to solve that when the spray head moves to the edge of the table, there is no obstruction at the bottom of the spray head, and the cleaning gas sprayed from the spray head will blow up impurities on other positions of the equipment and fall to be cleaned On the panel, the technical problem of poor cleaning effect of the panel to be cleaned.
  • An embodiment of the present application provides a cleaning device, including: a body, a spray head, and a main worktable and a first auxiliary worktable provided on the body;
  • the nozzle of the spray head is set toward the mounting surface of the main worktable, and the spray head is used to move in a preset direction perpendicular to the mounting surface to clean the panel to be cleaned on the mounting surface;
  • the first auxiliary The worktable is located at one end of the main worktable along the preset direction, a first surface of the first auxiliary worktable toward the spray head is parallel to the assembly surface, and the first surface is higher than the assembly surface Or flush with the assembly surface.
  • An embodiment of the present application also provides a method for cleaning a panel using the above cleaning equipment, including:
  • Cleaning gas is sprayed through the spray head, and the spray head is moved in a preset direction to clean the panel;
  • the cleaned panel is moved upward by a telescopic device to be separated from the assembly surface.
  • the first surface on the first auxiliary worktable is parallel to the assembly surface, and the first surface Flush with the assembly surface or higher than the assembly surface; when the spray head moves to the end of the main table in the preset direction, the first surface can prevent the cleaning gas sprayed by the spray head from blowing to other positions of the cleaning equipment, thereby avoiding other The particulate matter at the location blows up, improving the cleaning effect.
  • FIG. 1 is a schematic structural diagram 1 of a cleaning device provided by an embodiment of the present application.
  • FIG. 2 is a second structural diagram of a cleaning device provided by an embodiment of the present application.
  • FIG. 3 is a schematic structural diagram 3 of a cleaning device provided by an embodiment of the present application.
  • FIG. 4 is a top view of a cleaning device provided by an embodiment of the present application.
  • FIG. 1 is a schematic structural diagram 1 of a cleaning device provided by an embodiment of the present application
  • FIG. 2 is a structural schematic diagram 2 of a cleaning device provided by an embodiment of the present application
  • FIG. 3 is a structural schematic view 3 of the cleaning device provided by an embodiment of the present application
  • FIG. 4 A top view of the cleaning device provided by the embodiment of the present application.
  • This embodiment provides a cleaning device, including: a machine body 20, a spray head 10, and a main work table 40 and a first auxiliary work table 30 provided on the machine body 20, wherein the nozzle of the spray head 10 is provided toward the assembly surface of the main work table 40 , And the spray head 10 is used to move in a preset direction to clean the panel 50 to be cleaned on the assembly surface; the first auxiliary worktable 30 is located at one end of the main worktable 40 in the preset direction, and the first auxiliary worktable 30 faces the spray head 10 The first surface is parallel to the assembly surface, and the first surface is higher than or flush with the assembly surface.
  • the body 20 is erected on the ground to carry the entire cleaning equipment; the main worktable 40 and the first auxiliary worktable 30 are both provided on the body 20, the spray head 10 is provided on the upper portion of the main worktable 40, and the spray head 10 Arranged at a distance from the main workbench 40, the spray head 10 is used to spray cleaning gas to the panel 50 to be cleaned to remove impurities such as particles on the panel 50 to be cleaned, so as to achieve cleaning of the panel 50 to be cleaned.
  • the spray head 10 may spray gas such as nitrogen to the panel 50 to be cleaned.
  • the spray head 10 may be connected to the machine body 20 through the drive cylinder, and the center line of the drive cylinder is parallel to the preset direction; so that when the piston rod of the drive cylinder is extended or retracted, the spray head 10 is driven along the upper part of the main table 40 Set direction to move.
  • a driving screw is rotatably provided on the machine body 20, and the axis of the driving screw is parallel to the preset direction; the driving motor is connected to the driving screw, and the driving nut matched with the driving screw is provided on the spray head 10 to drive the driving motor When the screw rotates, it drives the drive nut and the spray head 10 to move in a preset direction.
  • the spray head 10 can also be connected to the machine body 20 through other devices, as long as the spray head 10 can be driven to move in a preset direction.
  • the mounting surface on the main worktable 40 may be a plane parallel to the horizontal plane provided on the top of the main worktable 40 away from the ground, and the mounting surface is used to install the panel 50 to be cleaned; accordingly, the first auxiliary worktable
  • the first surface on 30 is a plane parallel to the horizontal plane provided on the top of the first auxiliary worktable 30 facing away from the ground.
  • the first auxiliary worktable 30 may be connected to the machine body 20 by bolting or snapping.
  • the first auxiliary worktable 30 is disposed at one end of the main worktable 40 along the preset direction to form the first An extension department.
  • the first surface on the first auxiliary worktable 30 can block the cleaning gas, so as to avoid the cleaning gas from blowing up particles and other impurities in other positions of the cleaning equipment And fall on the panel 50 to be cleaned.
  • the first surface may be flush with the assembly surface, that is, the first surface is parallel to the assembly surface and coplanar, and the vertical distance between the nozzle 10 and the first surface is equal to the distance between the nozzle 10 and the assembly surface Vertical distance; or, the first surface is higher than the assembly surface, the first surface is higher than the assembly surface can reduce the distance between the first surface and the spray head 10, so that the spray head 10 moves to the main table 40 toward the first auxiliary work At one end of the table 30, the air flow from the nozzle 10 is relatively stable.
  • the vertical distance between the first surface and the main table 40 is equal to the thickness of the panel 50 to be cleaned, such that the first surface is parallel to the top surface of the panel 50 to be cleaned placed on the assembly surface and is coplanar, to further The stability of the airflow when the spray head 10 moves to the end of the main table 40 toward the first auxiliary table 30 is improved.
  • the vertical distance between the spray head 10 and the panel 50 to be cleaned may be 2 ⁇ m to 3 ⁇ m.
  • the vertical distance between the mounting surface and the spray head 10 is the vertical distance between the spray head 10 and the cleaning panel and the The total thickness of the cleaning panel 50.
  • the distance between the spray head 10 and the panel 50 to be cleaned can also be other values, as long as the cleaning equipment has a good cleaning effect.
  • the working process of the cleaning device provided in this embodiment is as follows: firstly, the panel 50 to be cleaned is installed on the mounting surface of the main table 40, then the spray head 10 is controlled to spray cleaning gas, and at the same time, the spray head 10 is controlled to move in a preset direction During the movement of the spray head 10, the sprayed cleaning gas blows away impurities such as particles attached to the panel 50 to be cleaned, so as to achieve cleaning of the panel 50 to be cleaned.
  • the cleaning gas sprayed from the spray head 10 blows onto the first surface of the first auxiliary table 30, the first surface prevents the cleaning gas from blowing To other locations of the cleaning equipment, avoid blowing up particles and other impurities from other locations of the cleaning equipment.
  • the first surface on the first auxiliary worktable 30 is parallel to the assembly surface, and the first surface is The assembling surface is flush or higher than the assembling surface; when the spray head 10 moves in the preset direction to the end of the main table 40 toward the first auxiliary table 30, the first surface can prevent the cleaning gas sprayed by the spray head 10 from blowing To other locations of the cleaning equipment, to avoid blowing up particulate matter from other locations, improving the cleaning effect.
  • the first auxiliary worktable 30 is connected to the body 20 through a first lifting device.
  • the first lifting device is used to drive the first auxiliary worktable 30 to move in a direction perpendicular to the first surface.
  • the distance between the first surface and the assembly surface can be adjusted by the first lifting device to ensure that the first surface is flush with the top surface of the panel 50 to be cleaned installed on the assembly surface; display panels of different thicknesses can be cleaned, Improve the versatility of cleaning equipment.
  • the first lifting device drives the first auxiliary table 30 to move in a direction perpendicular to the first surface from 0 mm to 3 mm.
  • the first lifting device drives the first auxiliary table 30 to be perpendicular to the first surface
  • the moving range in the direction is 1mm.
  • the first lifting device may include a first lifting bolt 301, and a first threaded hole provided on the body 20 with a center line perpendicular to the first surface, wherein the first lifting bolt 301 Can be screwed into the first threaded hole, and the first lifting bolt 301 abuts on the first auxiliary table 30; by twisting the first lifting bolt 301, the first auxiliary table 30 can be driven in a direction perpendicular to the first surface mobile.
  • the first lifting device further includes a first locking nut 303 that cooperates with the first lifting bolt 301.
  • the first locking nut 303 is tightened , So that the first locking nut 303 abuts against the body 20, and the friction between the first locking nut 303 and the body 20 prevents the first lifting bolt 301 from rotating, so as to avoid the first lifting caused by the shaking of the body 20 during cleaning
  • the bolt 301 in turn causes the height of the first auxiliary table 30 to change.
  • the first lifting device may further include a first telescopic cylinder 305, the cylinder body of the first telescopic cylinder 305 is connected to the machine body 20, and the piston rod of the first telescopic cylinder 305 works with the first auxiliary work
  • the table 30 is connected to drive the first auxiliary table 30 to move upward when the piston rod of the first telescopic cylinder 305 is extended from the cylinder, and to drive the first rod when the piston rod of the first telescopic cylinder 305 is retracted into the cylinder
  • An auxiliary table 30 moves downward.
  • a first slide rail may be provided on the main worktable 40, the center line of the first slide rail is perpendicular to the assembly surface, a first slide groove is provided on the first auxiliary worktable 30, and the first slide rail is provided at In the first chute, to improve the stability of the first auxiliary table 30.
  • the cleaning device further includes a second auxiliary workbench 60.
  • the second auxiliary workbench 60 is disposed at the other end of the main workbench 40 along a predetermined direction, and the second auxiliary workbench 60 is parallel to the second surface of the spray head 10 On the assembly surface, the second surface is higher than the assembly surface or flush with the assembly surface.
  • the first auxiliary workbench 30 is located at one end of the main workbench 40 in the preset direction
  • the second auxiliary workbench 60 is located at the other end of the main workbench 40 in the preset direction, so that the spray head 10 moves to the main workbench 40 in the preset direction
  • the gas sprayed by the spray head 10 at both ends will be blocked to further avoid blowing up particles and other impurities from other positions of the cleaning equipment, so as to further improve the cleaning effect of the cleaning equipment.
  • the spray head 10 can be moved back and forth in a preset direction to perform multiple cleanings on the panel 50 to be cleaned, which can further improve the cleaning effect.
  • the second auxiliary worktable 60 is provided at the other end of the main worktable 40 along the preset direction, that is, the second auxiliary worktable 60 is the second extension part outward of the other end of the main worktable 40.
  • the second surface on the second auxiliary table 60 may be flush with the assembly surface, that is, the second surface is parallel to the assembly surface and coplanar, and the distance between the spray head 10 and the second surface is equal to that between the spray head 10 and the assembly surface Distance; or, the second surface is higher than the assembly surface; the second surface is higher than the assembly surface can reduce the distance between the second surface and the spray head 10, so that the spray head 10 moves to the other end of the main table 40 At this time, the air flow from the spray head 10 is relatively stable.
  • the distance between the second surface and the main table 40 is equal to the thickness of the panel 50 to be cleaned, so that the second surface is parallel to and coplanar with the top surface of the panel 50 to be cleaned placed on the assembly surface to further improve the spray head 10 Stability of air flow when moving to the other end of the main table 40.
  • first surface and the second surface may be parallel and coplanar, or parallel and different.
  • the second auxiliary table 60 is connected to the body 20 through a second lifting device, and the second lifting device is used to drive the second auxiliary table 60 to move in a direction perpendicular to the second surface.
  • the distance between the second surface and the assembly surface can be adjusted by the second lifting device to ensure that the second surface is flush with the top surface of the panel 50 to be cleaned installed on the assembly surface; Cleaning improves the versatility of cleaning equipment.
  • the second lifting device drives the second auxiliary table 60 to move in a direction perpendicular to the second surface from 0 mm to 3 mm.
  • the second lifting device drives the second auxiliary table 60 to be perpendicular to the second surface
  • the moving range in the direction is 1mm.
  • the second lifting device may include a second lifting bolt 302, and a second threaded hole provided in the body 20 with a center line perpendicular to the second plane, and the second lifting bolt 302 is rotated Into the second threaded hole, and the second lifting bolt 302 abuts against the second auxiliary table 60; by twisting the second lifting bolt 302, the second auxiliary table 60 can be driven to move in a direction perpendicular to the second plane.
  • the second lifting device further includes a second locking nut 304 that cooperates with the second lifting bolt 302.
  • the second locking nut 304 is tightened , So that the second locking nut 304 abuts against the body 20, and the friction between the second locking nut 304 and the body 20 prevents the second lifting bolt 302 from rotating, so as to avoid the second lifting caused by the shaking of the body 20 during cleaning
  • the rotation of the bolt 302 causes the height of the second auxiliary table 60 to change.
  • the second lifting device may further include a second telescopic cylinder 306, the cylinder body of the second telescopic cylinder 306 is connected to the machine body 20, and the piston rod of the second telescopic cylinder 306 and the second auxiliary work
  • the table 60 is connected to drive the second auxiliary table 60 to move upward when the piston rod of the second telescopic cylinder 306 is extended from the cylinder, and to drive the first rod when the piston rod of the second telescopic cylinder 306 is retracted into the cylinder.
  • the second auxiliary table 60 moves downward.
  • a second slide rail may be provided on the main worktable 40, the center line of the second slide rail is perpendicular to the assembly surface, a second slide groove is provided on the second auxiliary worktable 60, and the second slide rail is provided on the In the second chute, the stability of the second auxiliary table 60 is improved.
  • the cleaning device further includes a plurality of support columns 401.
  • the main worktable 40 is provided with a plurality of telescopic holes 402 whose center lines are perpendicular to the assembly surface.
  • Each support column 401 is provided in a telescopic hole 402 Inside; the support column 401 is connected to the main table 40 through a telescopic device, and the telescopic device is used to drive the support column 401 to extend or contract from the telescopic hole 402 to the telescopic hole 402.
  • the support column 401 is driven out of the telescopic hole 402 by the telescopic device, and then the panel 50 to be cleaned is placed on the top of each support column 401, and then the support column 401 is contracted into the telescopic hole 402 by the telescopic device, so as to The panel 50 to be cleaned is dropped on the assembly surface.
  • the support columns 401 are driven to extend out of the telescopic holes 402 by the telescopic device, and then each support column 401 abuts the panel 50 to be cleaned, so that the panel 50 to be cleaned is separated from the mounting surface, and then the panel 50 to be cleaned It can be removed from the support column 401, which is convenient for the panel 50 to be cleaned.
  • the telescopic device may include a cylinder, the cylinder and the support column 401 are both disposed in the telescopic hole 402, the cylinder body of the cylinder is connected to the main worktable 40, and the piston rod of the cylinder is connected to the support column 401.
  • the driving support column 401 is extended from the cylinder; when the piston rod is contracted into the cylinder body, the support column 401 is driven to contract into the telescopic hole 402.
  • the telescopic device may also include a hydraulic cylinder and the like.
  • the cleaning device further includes at least one detection device 403 provided on the main workbench 40.
  • the detection device 403 is used to detect the panel 50 to be cleaned.
  • the detecting device 403 detects that the supporting column 401 has the panel 50 to be cleaned, the supporting column is controlled to contract into the telescopic hole 402.
  • the detection device 403 can detect whether the supporting column 401 has the panel 50 to be cleaned, so as to control the supporting column 401.
  • the telescopic device when the detection device 403 does not detect the panel 50 to be cleaned, the telescopic device is controlled to drive the support column 401 to extend from the telescopic hole 402 to receive the cleaning panel 50; when the detection device 403 detects the presence of the support column 401 When the panel 50 to be cleaned, the telescopic device is controlled to drive the support column 401 to contract into the telescopic hole 402, so that the panel 50 to be cleaned falls on the assembly surface.
  • the detection device 403 may include an infrared emitter and an infrared receiver. Both the infrared emitter and the infrared receiver are provided on the main workbench 40. When the support column 401 has the panel 50 to be cleaned, the infrared rays emitted by the infrared emitter are reflected by the panel 50 to be cleaned and then received by the infrared receiver; when the support column 401 does not have the panel 50 to be cleaned, the infrared receiver cannot receive infrared light .
  • the detection device 403 may further include a button.
  • the detection device 403 is perpendicular to the main The mounting surface of the working table 40 is movably provided.
  • the driving structure of the detection device 403 can refer to the driving structure of the support column 401.
  • the cleaning device further includes a plurality of limiters 404 disposed on the main worktable 40 and surrounding the assembly surface.
  • the limiter 404 is connected to the main workbench 40 through a moving device.
  • the moving device is used to
  • the limiting member 404 is driven to move, so that the limiting member 404 abuts the panel 50 to be cleaned, thereby adjusting the position of the panel 50 to be cleaned on the main table 40, so that the spray head 10 is facing the panel 50 to be cleaned.
  • the stopper 404 may include a cylinder and a wear-resistant part disposed at the top of the cylinder.
  • the wear-resistant part is in contact with the panel 50 to be cleaned to prevent the panel 50 to be cleaned from scratching the limiting member 404, resulting in insufficient dimensional accuracy of the limiting member 404.
  • the wear-resistant portion may be mainly composed of polyetheretherketone.
  • the wear part can also be composed of other wear-resistant materials.
  • the limiting member 404 in this embodiment may move in a direction parallel to the preset direction, or in a direction parallel to the mounting surface and perpendicular to the preset direction, so as to adjust the position of the panel 50 to be cleaned.
  • the limiter 404 can also move in a direction perpendicular to the assembly surface to adjust the height of the limiter 404.
  • the stopper 404 includes a first body and a second body.
  • the first body may be connected to the body 20 through a first driving device.
  • the first driving device may be a hydraulic cylinder, a cylinder, an electric push rod, etc.
  • a device that moves the main body parallel to the preset direction; the second main body and the first main body are connected by a second driving device, which can be a hydraulic cylinder, a pneumatic cylinder, an electric push rod, etc., which can drive the first main body parallel
  • the cylinder is connected to the second body through a third drive device, which can be a hydraulic cylinder, a cylinder, etc. that can drive the cylinder in a direction perpendicular to the assembly surface Mobile device.
  • the cylinder When working, the cylinder is moved upward by the third driving device so that the wear part on the cylinder is flush with the panel 50 to be cleaned; then the first driving device and/or the second driving device are operated to drive the first
  • the main body and the second body move in a preset direction, and/or drive the second body to move in a direction parallel to the mounting surface and perpendicular to the preset direction, so that the wear part abuts the edge of the panel 50 to be cleaned to drive the cleaning
  • the panel 50 moves to adjust the position of the panel 50 to be cleaned.
  • the end of the first auxiliary table 30 facing the main table 40 is provided with a first concave portion
  • the end of the main table 40 facing the first auxiliary table 30 is provided with a second concave portion.
  • a recessed portion and a second recessed portion surround a receiving groove 405, and a stopper 404 between the main worktable 40 and the first auxiliary worktable 30 is disposed in the receiving groove 405.
  • the limiting member 404 is retracted into the accommodating groove 405 by moving the mobile device, which can prevent the limiting member 404 from blocking the movement of the spray head 10 during cleaning.
  • a third recessed portion is provided at an end of the second auxiliary table 60 facing the main table 40, and a fourth recessed portion, a third recessed portion and a first
  • the four recessed portions are surrounded by an accommodating groove 405, and the limiting member 404 between the main worktable 40 and the second auxiliary worktable 60 is disposed in the accommodating groove 405. This can prevent the stop portion between the second auxiliary table 60 and the main table 40 from blocking the movement of the spray head 10.
  • the use process of the cleaning device provided in this embodiment is as follows: first, the support column 401 is driven to extend out of the telescopic hole 402 through the telescopic device to receive the cleaning panel 50; and then the panel 50 to be cleaned is placed on top of each support column 401 ; After the moving device drives the limiter 404 to extend away from the assembly surface, and the wear part of the limiter 404 is to clean the edge of the panel 50 to be cleaned; and then by moving the drive limiter 404 along the preset direction and /Or move in a direction parallel to the assembly surface and perpendicular to the preset direction, the wear part abuts the edge of the panel 50 to be cleaned to adjust the position of the panel 50 to be cleaned; afterwards, the support column 401 is contracted to the telescopic hole 402 by the telescopic device To place the panel 50 to be cleaned on the assembly surface, and the limiter 404 between the first auxiliary table 30 and the main table 40 and the limit between the second auxiliary table 60 and the main table 40 The position piece

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  • Cleaning In General (AREA)

Abstract

一种清洗设备及清洗方法，清洗设备包括：机体（20）、喷头（10）、以及设置在机体（20）上的主工作台（40）和第一辅助工作台（30）；喷头（10）的喷口朝向主工作台（40）的装配面设置，且喷头（10）用于沿垂直于装配面的预设方向移动，以清洗装配面上的待清洗面板（50）；第一辅助工作台（30）位于主工作台（40）沿预设方向的一端，第一辅助工作台（30）朝向喷头（10）的第一表面平行于装配面，第一表面高于装配面或者第一表面与装配面平齐。基于该结构，在喷头沿预设方向移动至主工作台的一端时，第一表面可以阻止由喷头喷出的清洗气体吹向清洗设备的其他位置，进而避免将其他位置的颗粒物吹起，提高了清洗效果。

Description

清洗设备及清洗方法 技术领域
本申请涉及显示面板制造技术，尤其涉及一种清洗设备及清洗方法。
背景技术
在显示面板的制造过程中，需要在显示面板上依次贴附多个功能膜层，在粘贴功能膜层之前需要对显示面板进行清洗，以消除显示面板上的颗粒物等杂质。现有技术中，常通过清洗设备对显示面板进行清洗。清洗设备包括机体、设置在机体上的工作台以及设置在工作台上部的喷头，工作台具有背离机体的装配面。使用时，将待清洗面板安装在装配面上，控制喷头喷出清洗气体，并且使喷头沿工作台的一端向另一端移动，进而通过清洗气体将待清洗面板上的颗粒物等杂质吹掉，以实现对待清洗面板的清洗。
然而，在喷头移动至工作台边缘时，喷头下部没有任何阻挡物，由喷头喷出的清洗气体会将设备其他位置上的杂质吹起并落到待清洗面板上，导致待清洗面板的清洗效果差。
发明内容
本申请实施例提供一种清洗设备，以解决在喷头移动至工作台边缘时，喷头下部没有任何阻挡物，由喷头喷出的清洗气体会将设备其他位置上的杂质吹起并落到待清洗面板上，导致待清洗面板的清洗效果差的技术问题。
本申请实施例提供一种清洗设备，包括：机体、喷头、以及设置在所述机体上的主工作台和第一辅助工作台；
所述喷头的喷口朝向所述主工作台的装配面设置，且所述喷头用于沿垂直于装配面的预设方向移动，以清洗所述装配面上的待清洗面板；所述第一辅助工作台位于所述主工作台沿所述预设方向的一端，所述第一辅助工作台朝向所述喷头的第一表面平行于所述装配面，所述第一表面高于所述装配面或者与所述装配面平齐。
本申请实施例还提供一种使用上述清洗设备清洗面板的方法，包括：
将所述面板放置在所述主工作台的装配面上；
驱动所述第一辅助工作台沿垂直于所述装配面的方向移动，以使其第一表面与所述面板的顶面平齐；
通过所述喷头喷出清洗气体，并且使所述喷头沿预设方向移动，以对所述面板进行清洗；
待清洗结束后，通过伸缩装置使清洗的面板向上移动，与所述装配面分离。
本申请实施例提供的清洗设备和清洗方法，通过将第一辅助工作台设置在主工作台沿预设方向的一端，第一辅助工作台上的第一表面与装配面平行，并且第一表面与装配面平齐或者高于装配面；在喷头沿预设方向移动至主工作台的一端时，第一表面可以阻止由喷头喷出的清洗气体吹向清洗设备的其他位置，进而避免将其他位置的颗粒物吹起，提高了清洗效果。
附图说明
图1为本申请实施例提供的清洗设备的结构示意图一；
图2为本申请实施例提供的清洗设备的结构示意图二；
图3为本申请实施例提供的清洗设备的结构示意图三；
图4为本申请实施例提供的清洗设备的俯视图。
具体实施方式
图1为本申请实施例提供的清洗设备的结构示意图一；图2为本申请实施例提供的清洗设备的结构示意图二；图3为本申请实施例提供的清洗设备的结构示意图三；图4为本申请实施例提供的清洗设备的俯视图。
请参照图1-图4。本实施例提供一种清洗设备，包括：机体20、喷头10、以及设置在机体20上的主工作台40和第一辅助工作台30，其中喷头10的喷口朝向主工作台40的装配面设置，且喷头10用于沿预设方向移动，以清洗装配面上的待清洗面板50；第一辅助工作台30位于主工作台40沿预设方向的一端，第一辅助工作台30朝向喷头10的第一表面平行于装配面，第一表面高于装配面或者与装配面平齐。
本实施例中，机体20架设在地面上，以承载整个清洗设备；主工作台 40和第一辅助工作台30均设置在机体20上，喷头10设置在主工作台40的上部，并且喷头10与主工作台40间隔的设置，喷头10用于向待清洗面板50喷射清洗气体，以去除待清洗面板50上的颗粒物等杂质，实现对待清洗面板50的清洗。优选地，喷头10可以向待清洗面板50喷射氮气等气体。
具体地，喷头10可以通过驱动缸与机体20连接，驱动缸的中心线与预设方向平行；以在驱动缸的活塞杆伸出或者缩回时，带动喷头10在主工作台40上部沿预设方向移动。或者，在机体20上可转动的设置有驱动螺杆，驱动螺杆的轴线与预设方向平行；驱动电机与驱动螺杆传动连接，喷头10上设置有与驱动螺杆配合的驱动螺母，以在驱动电机驱动螺杆转动时，带动驱动螺母和喷头10沿预设方向移动。喷头10还可以通过其他的装置与机体20连接，只要能够驱动喷头10沿预设方向移动即可。
本实施例中，主工作台40上的装配面可以为主工作台40上背离地面的顶端设置的与水平面平行的平面，装配面用于安装待清洗面板50；相应地，第一辅助工作台30上的第一表面为第一辅助工作台30上背离地面的顶端设置的与水平面平行的平面。
具体地，第一辅助工作台30可以通过螺栓连接或者卡接等方式与机体20连接，第一辅助工作台30设置在主工作台40沿预设方向的一端，以形成主工作台40的第一外延部。当喷头10沿预设方向移动至靠近第一辅助工作台30的一端时，第一辅助工作台30上的第一表面可以阻挡清洗气体，以免清洗气体将清洗设备其他位置的颗粒物等杂质吹起并落在待清洗面板50上。
本实施例中，第一表面可以与装配面平齐，即第一表面与装配面平行且共面设置，此时喷头10与第一表面之间的垂直距离等于喷头10与装配面之间的垂直距离；或者，第一表面高于装配面，第一表面高于装配面可以减小第一表面与喷头10之间的距离，以使喷头10移动至主工作台40朝向到第一辅助工作台30的一端时，由喷头10喷出的气流较为稳定。进一步地，第一表面与主工作台40之间的垂直距离等于待清洗面板50的厚度，使得第一表面与放置在装配面上的待清洗面板50的顶面平行且共面设置，以进一步提高喷头10移动至主工作台40朝向到第一辅助工作台30的一端时气流的稳定性。
示例性地，喷头10与待清洗面板50之间的垂直距离可以为2微米-3微米，相应地，装配面与喷头10之间的垂直距离为喷头10和清洗面板之间的垂直距离与待清洗面板50厚度之和。当然，喷头10与待清洗面板50之间的距离还可以为其他值，只要保证清洗设备具有较好的清洗效果即可。
本实施例提供的清洗设备的工作过程为：首先将待清洗面板50设置在主工作台40上的装配面上，之后控制喷头10喷出清洗气体，与此同时控制喷头10沿预设方向移动，喷头10在移动的过程中，通过喷出的清洗气体将附着在待清洗面板50上的颗粒物等杂质吹掉，以实现对待清洗面板50的清洗。当喷头10移动至主工作台40朝向到第一辅助工作台30的一端时，由喷头10喷出的清洗气体吹到第一辅助工作台30的第一表面上，第一表面阻止清洗气体吹向清洗设备的其他位置，避免将清洗设备其他位置的颗粒物等杂质吹起。
本实施例提供的清洗设备，通过将第一辅助工作台30设置在主工作台40沿预设方向的一端，第一辅助工作台30上的第一表面与装配面平行，并且第一表面与装配面平齐或者高于装配面；在喷头10沿预设方向移动至主工作台40朝向到第一辅助工作台30的的一端时，第一表面可以阻止由喷头10喷出的清洗气体吹向清洗设备的其他位置，进而避免将其他位置的颗粒物吹起，提高了清洗效果。
本实施例中，第一辅助工作台30通过第一升降装置与机体20连接，第一升降装置用于驱动第一辅助工作台30沿垂直于第一表面的方向移动。通过第一升降装置可以调节第一表面与装配面之间的距离，以保证第一表面与安装在装配面上的待清洗面板50的顶面平齐；可以对不同厚度的显示面板进行清洗，提高了清洗设备的通用性。
示例性地，第一升降装置驱动第一辅助工作台30沿垂直于第一表面方向的移动范围为0mm-3mm，优选地，第一升降装置驱动第一辅助工作台30沿垂直于第一表面方向的移动范围为1mm。
参照图2，在一个可实现的方式中，第一升降装置可以包括第一升降螺栓301，和在机体20上设置的中心线与第一表面垂直的第一螺纹孔，其中第一升降螺栓301可旋入到第一螺纹孔内，并且第一升降螺栓301抵顶在第一辅助工作台30上；通过扭转第一升降螺栓301可以驱动第一辅助 工作台30沿垂直于第一表面的方向移动。
进一步地，第一升降装置还包括与第一升降螺栓301配合的第一锁定螺母303，在通过扭转第一升降螺栓301来调节第一辅助工作台30的高度后，旋紧第一锁定螺母303，以使第一锁定螺母303抵顶在机体20上，进而通过第一锁定螺母303与机体20之间的摩擦力阻止第一升降螺栓301转动，以免在清洗时机体20抖动导致的第一升降螺栓301，进而导致第一辅助工作台30的高度发生改变。
参照图3，在其他的实现方式中，第一升降装置还可以包括第一伸缩缸305，第一伸缩缸305的缸体与机体20连接，第一伸缩缸305的活塞杆与第一辅助工作台30连接，以在第一伸缩缸305的活塞杆由缸体内伸出时，驱动第一辅助工作台30向上移动，在第一伸缩缸305的活塞杆向缸体内收缩时，驱动第一辅助工作台30向下移动。
本实施例中，可以在主工作台40上设置第一滑轨，第一滑轨的中心线与装配面垂直，第一辅助工作台30上设置第一滑槽，第一滑轨滑设在第一滑槽内，以提高第一辅助工作台30的稳定性。
本实施例中，清洗设备还包括第二辅助工作台60，第二辅助工作台60设置在主工作台40沿预设方向的另一端，第二辅助工作台60朝向喷头10的第二表面平行于装配面，第二表面高于装配面或者与装配面平齐。第一辅助工作台30位于主工作台40沿预设方向的一端，第二辅助工作台60位于主工作台40沿预设方向的另一端，使得喷头10沿预设方向运动至主工作台40两端时喷头10喷出的气体都会受到阻挡，以进一步避免将清洗设备其他位置的颗粒物等杂质吹起，以进一步提高清洗设备的清洗效果。优选地，可以使喷头10沿预设方向往复移动，以对待清洗面板50进行多次清洗，可进一步提高清洗效果。
本实施例中，第二辅助工作台60设置在主工作台40上沿预设方向的另一端，即第二辅助工作台60为主工作台40另一端向外的第二外延部。第二辅助工作台60上的第二表面可以与装配面平齐，即第二表面与装配面平行且共面设置，此时喷头10与第二表面之间的距离等于喷头10与装配面之间的距离；或者，第二表面高于装配面；第二表面高于装配面可以减小第二表面与喷头10之间的距离，以使喷头10移动至主工作台40的 所述另一端时，由喷头10喷出的气流较为稳定。进一步地，第二表面与主工作台40之间的距离等于待清洗面板50的厚度，使得第二表面与放置在装配面上的待清洗面板50的顶面平行且共面，以进一步提高喷头10移动至主工作台40另一端时气流的稳定性。
本实施例中第一表面与第二表面可以平行且共面设置，或者平行且异面设置。
本实施例中，第二辅助工作台60通过第二升降装置与机体20连接，第二升降装置用于驱动第二辅助工作台60沿垂直于第二表面的方向移动。通过第二升降装置可以调节第二表面与装配面之间的距离，以保证第二表面与安装在装配面上的待清洗面板50的顶面平齐；可以对不同厚度的待清洗面板50进行清洗，提高了清洗设备的通用性。
示例性地，第二升降装置驱动第二辅助工作台60沿垂直于第二表面方向的移动范围为0mm-3mm，优选地，第二升降装置驱动第二辅助工作台60沿垂直于第二表面方向的移动范围为1mm。
参照图2，在一个可实现的方式中，第二升降装置可以包括第二升降螺栓302，和在机体20上设置的中心线与第二平面垂直的第二螺纹孔，第二升降螺栓302旋入到第二螺纹孔内，并且第二升降螺栓302抵顶在第二辅助工作台60上；通过扭转第二升降螺栓302可以驱动第二辅助工作台60沿垂直于第二平面的方向移动。
进一步地，第二升降装置还包括与第二升降螺栓302配合的第二锁定螺母304，在通过扭转第二升降螺栓302来调节第二辅助工作台60的高度后，旋紧第二锁定螺母304，以使第二锁定螺母304抵顶在机体20上，进而通过第二锁定螺母304与机体20之间的摩擦力阻止第二升降螺栓302转动，以免在清洗时机体20抖动导致的第二升降螺栓302转动，进而导致第二辅助工作台60的高度发生改变。
参照图3，在其他的实现方式中，第二升降装置还可以包括第二伸缩缸306，第二伸缩缸306的缸体与机体20连接，第二伸缩缸306的活塞杆与第二辅助工作台60连接，以在第二伸缩缸306的活塞杆由缸体内伸出时，驱动第二辅助工作台60向上移动，在第二伸缩缸306的活塞杆向缸体内收缩时，驱动第二辅助工作台60向下移动。
本实施例中，可以在主工作台40上设置第二滑轨，第二滑轨的中心线与装配面垂直，第二辅助工作台60上设置第二滑槽，第二滑轨滑设在第二滑槽内，以提高第二辅助工作台60的稳定性。
参照图4，本实施例中，清洗设备还包括多个支撑柱401，主工作台40上设置有多个中心线与装配面垂直的伸缩孔402，每一支撑柱401设置在一个伸缩孔402内；支撑柱401通过伸缩装置与主工作台40连接，伸缩装置用于驱动支撑柱401由伸缩孔402内伸出或者收缩至伸缩孔402内。
使用时，首先通过伸缩装置驱动支撑柱401由伸缩孔402内伸出，之后将待清洗面板50放置在各支撑柱401的顶端，之后通过伸缩装置驱动支撑柱401向伸缩孔402内收缩，以使待清洗面板50落在装配面上。相反，在清洗之后，通过伸缩装置驱动支撑柱401由伸缩孔402内伸出，进而各支撑柱401抵顶待清洗面板50，以使待清洗面板50与装配面分离，进而将待清洗面板50由支撑柱401上取下，方便了待清洗面板50的取放。
进一步地，伸缩装置可以有多种，只要能够驱动支撑柱401由伸缩孔402内伸出或者收缩至伸缩孔402内即可。例如，伸缩装置可以包括气缸，气缸和支撑柱401均设置在伸缩孔402内，气缸的缸体与主工作台40连接，气缸的活塞杆与支撑柱401连接。活塞杆由缸体内伸出时，驱动支撑柱401由伸缩孔402内伸出；活塞杆向缸体内收缩时，驱动支撑柱401向伸缩孔402内收缩。伸缩装置还可以包括液压缸等。
参照图4，本实施例中，清洗设备还包括设置在主工作台40上的至少一个检测装置403，检测装置403用于检测待清洗面板50。当检测装置403检测到支撑柱401上具待清洗面板50时，控制支撑柱收缩至伸缩孔402内。通过检测装置403可以检测出支撑柱401上是否具有待清洗面板50，以便于对支撑柱401进行控制。
示例性地，当检测装置403没有检测到待清洗面板50时，控制伸缩装置驱动支撑柱401由伸缩孔402内伸出，以承接待清洗面板50；当检测装置403检测到支撑柱401上存在待清洗面板50时，控制伸缩装置驱动支撑柱401收缩至伸缩孔402内，以使待清洗面板50落在装配面上。
本实施例中的检测装置403可以有多种，例如：检测装置403可以包括红外线发射器和红外线接收器，红外线发射器和红外线接收器均设置在 主工作台40上。当支撑柱401上具有待清洗面板50时，红外线发射器发出的红外线经待清洗面板50反射后被红外线接收器接收；当支撑柱401上没有待清洗面板50时，红外线接收器接收不到红外线。检测装置403还可以包括按键，当支撑柱401上具有待清洗面板50时，待清洗面板50按压按键，进而检测到支撑柱401上具有待清洗面板50，此时该检测装置403沿垂直于主工作台40的装配面可移动地设置，该检测装置403的驱动结构可以参照支撑柱401的驱动结构。
参照图4，本实施例中，清洗设备还包括设置在主工作台40上且环绕装配面的多个限位件404，限位件404通过移动装置与主工作台40连接，移动装置用于驱动限位件404移动，以使限位件404抵顶待清洗面板50，进而调节待清洗面板50在主工作台40上的位置，以使喷头10正对待清洗面板50。
本实施例中，限位件404可以包括柱体以及设置在柱体顶端的耐磨部。耐磨部与待清洗面板50接触，以免待清洗面板50将限位件404划伤，导致限位件404的尺寸精度不足。优选地，耐磨部可以主要由聚醚醚酮构成。耐磨部还可以由其他耐磨材料构成。
本实施例中的限位件404可以沿平行于预设方向的方向移动，或沿平行于装配面且垂直于预设方向的方向移动，以调节待清洗面板50的位置。另外限位件404还可以沿垂直于装配面的方向移动，以调节限位件404的高度。
示例性地，限位件404包括第一主体以及第二主体，第一主体可以通过第一驱动装置与机体20连接，第一驱动装置可以为液压缸、气缸、电动推杆等，能够驱动第一主体沿平行于预设方向移动的装置；第二主体与第一主体之间通过第二驱动装置连接，第二驱动装置可以为液压缸、气缸、电动推杆等能够驱动第一主体沿平行于装配面且垂直于预设方向的方向移动的装置；柱体通过第三驱动装置与第二主体连接，第三驱动装置可以为液压缸、气缸等能够驱动柱体沿垂直于装配面的方向移动的装置。
工作时，通过第三驱动装置驱动柱体向上移动，以使柱体上的耐磨部与待清洗面板50平齐；之后使第一驱动装置和/或第二驱动装置工作，以驱动第一主体和第二主体沿预设方向移动，和/或驱动第二主体沿平行于 装配面且垂直于预设方向的方向移动，使得耐磨部抵顶待清洗面板50的边缘，以驱动待清洗面板50移动，实现调节待清洗面板50的位置。
参照图4，本实施例中，第一辅助工作台30朝向主工作台40的一端设置有第一凹陷部，主工作台40朝向第一辅助工作台30的一端设置有第二凹陷部，第一凹陷部和第二凹陷部围设成容置槽405，位于主工作台40和第一辅助工作台30之间的限位件404设置在容置槽405内。在清洗时，通过移动移动装置控制限位件404收缩至容置槽405内，可以避免在清洗时限位件404阻挡喷头10移动。
进一步地，在第二辅助工作台60朝向主工作台40的一端设置有第三凹陷部，主工作台40朝向第二辅助工作台60的一端设置有第四凹陷部，第三凹陷部和第四凹陷部围设成容置槽405，位于主工作台40和第二辅助工作台60之间的限位件404设置在容置槽405内。这可以避免位于第二辅助工作台60和主工作台40之间的限位部阻挡喷头10移动。
本实施例提供的清洗设备的使用过程为：首先，通过伸缩装置驱动支撑柱401由伸缩孔402内伸出，以承接待清洗面板50；之后将待清洗面板50放置在各支撑柱401的顶端；之后移动装置驱动限位件404向背离装配面的方向伸出，并使限位件404的耐磨部正对待清洗面板50的边缘；之后通过移动将驱动限位件404沿预设方向和/或与装配面平行且与预设方向垂直的方向移动，耐磨部抵顶待清洗面板50的边缘，以调节待清洗面板50的位置；之后通过伸缩装置驱动支撑柱401收缩至伸缩孔402内，以将待清洗面板50放置装配面上，并且使位于第一辅助工作台30与主工作台40之间的限位件404以及第二辅助工作台60与主工作台40之间的限位件404收缩至容置槽405内；之后通过第一升降装置驱动第一辅助工作台30沿垂直于装配面的方向移动，以使第一表面与待清洗面板50的顶面平齐，与此同时通过第二升降装置驱动第二辅助工作台60沿垂直于装配面的方向移动，以使第二表面与待清洗面板50的顶面平齐；之后使喷头10喷出清洗气体，并且使喷头沿预设方向移动，以对待清洗面板50进行清洗；待清洗结束后，通过伸缩装置驱动支撑柱401由伸缩孔402内伸出，以抵顶待清洗面板50向上移动，以使待清洗面板50与装配面分离。
最后应说明的是：以上各实施例仅用以说明本申请的技术方案，而非对 其限制；尽管参照前述各实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。

Claims (18)

  1. 一种清洗设备，包括：机体、喷头以及设置在所述机体上的主工作台和第一辅助工作台；
    所述喷头的喷口朝向所述主工作台的装配面设置，且所述喷头用于沿垂直于装配面的预设方向移动以清洗所述装配面上的待清洗面板；所述第一辅助工作台位于所述主工作台沿垂直于所述装配面的预设方向的一端，所述第一辅助工作台朝向所述喷头的第一表面平行于所述装配面，所述第一表面高于所述装配面或者与所述装配面平齐。
  2. 根据权利要求1所述的清洗设备，其中，所述第一表面与所述装配面的高度差等于所述待清洗面板的厚度。
  3. 根据权利要求1所述的清洗设备，其中，所述第一辅助工作台通过第一升降装置与所述机体连接，所述第一升降装置用于驱动所述第一辅助工作台沿垂直于所述第一表面的方向移动。
  4. 根据权利要求3所述的清洗设备，其中，所述第一升降装置包括第一升降螺栓，和在所述机体上设置的中心线与所述第一表面垂直的第一螺纹孔，其中所述第一升降螺栓可旋入到所述第一螺纹孔内，并且所述第一升降螺栓抵顶在所述第一辅助工作台上。
  5. 根据权利要求4所述的清洗设备，其中，所述第一升降装置还包括与所述第一升降螺栓配合的第一锁定螺母。
  6. 根据权利要求3所述的清洗设备，其中，所述第一升降装置包括第一伸缩缸，所述第一伸缩缸的缸体与所述机体连接，所述第一伸缩缸的活塞杆与所述第一辅助工作台连接。
  7. 根据权利要求1所述的清洗设备，其中，在所述主工作台上设置第一滑轨，所述第一滑轨的中心线与所述装配面垂直，所述第一辅助工作台上设置第一滑槽，第一滑轨设置在所述第一滑槽内。
  8. 根据权利要求1所述的清洗设备，其中，所述清洗设备还包括第二辅助工作台，所述第二辅助工作台设置在所述主工作台沿所述预设方向的另一端，所述第二辅助工作台朝向所述喷头的第二表面平行于所述装配面，所述第二表面高于所述装配面或者与所述装配面平齐。
  9. 根据权利要求7所述的清洗设备，其中，所述第一表面与所述第二表面平行且共面设置，或者平行且异面设置。
  10. 根据权利要求7所述的清洗设备，其中，所述第二辅助工作台通过第二升降装置与所述机体连接，所述第二升降装置用于驱动所述第二辅助工作台沿垂直于所述第二表面的方向移动。
  11. 根据权利要求1-10任一项所述的清洗设备，其中，所述清洗设备还包括多个支撑柱，所述主工作台上设置有多个中心线与所述装配面垂直的伸缩孔，每一所述支撑柱设置在一个所述伸缩孔内；所述支撑柱通过伸缩装置与所述主工作台连接，所述伸缩装置用于驱动所述支撑柱由所述伸缩孔内伸出或者收缩至所述伸缩孔内。
  12. 根据权利要求11所述的清洗设备，其中，所述清洗设备还包括设置在所述主工作台上的至少一个检测装置，所述检测装置用于检测位于支撑柱上的所述待清洗面板。
  13. 根据权利要求1-10任一项所述的清洗设备，其中，所述清洗设备还包括设置在所述主工作台上且环绕所述装配面的多个限位件，所述限位件通过移动装置与所述主工作台连接，所述移动装置用于驱动所述限位件移动，以使所述限位件抵顶所述待清洗面板，进而调节所述待清洗面板在所述主工作台上的位置。
  14. 根据权利要求13所述的清洗设备，其中，所述限位件沿平行于所述预设方向的方向移动，沿平行于所述装配面且垂直于所述预设方向的方向移动，或沿垂直于所述装配面的方向移动。
  15. 根据权利要求13所述的清洗设备，其中，所述第一辅助工作台朝向所述主工作台的一端设置有第一凹陷部，所述主工作台朝向所述第一辅助工作台的一端设置有第二凹陷部，所述第一凹陷部和所述第二凹陷部围设成容置槽，位于所述主工作台和所述第一辅助工作台之间的所述限位件设置在所述容置槽内。
  16. 根据权利要求13所述的清洗设备，其中，所述限位件包括柱体以及设置在所述柱体顶端的耐磨部。
  17. 根据权利要求16所述的清洗设备，其中，所述限位件包括第一主体以及第二主体，其中所述第一主体通过第一驱动装置与所述机体连接， 所述第一驱动装置为能够驱动所述第一主体沿平行于所述预设方向移动的装置；所述第二主体与所述第一主体之间通过第二驱动装置连接，所述第二驱动装置为能够驱动所述第一主体沿平行于所述装配面且垂直于所述预设方向的方向移动的装置；所述柱体通过第三驱动装置与所述第二主体连接，所述第三驱动装置为能够驱动所述柱体沿垂直于所述装配面的方向移动的装置。
  18. 一种使用权利要求1-17中任一项所述的清洗设备清洗面板的方法，包括：
    将所述面板放置在所述主工作台的装配面上；
    驱动所述第一辅助工作台沿垂直于所述装配面的方向移动，以使其第一表面与所述面板的顶面平齐；
    通过所述喷头喷出清洗气体，并且使所述喷头沿预设方向移动，以对所述面板进行清洗；
    待清洗结束后，通过伸缩装置使清洗的面板向上移动，与所述装配面分离。
PCT/CN2019/106699 2019-01-09 2019-09-19 清洗设备及清洗方法 WO2020143247A1 (zh)

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Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
CN209363167U (zh) * 2019-01-09 2019-09-10 昆山国显光电有限公司 清洗设备
CN112505959B (zh) * 2021-02-03 2021-05-25 苏州盟萤电子科技有限公司 一种液晶面板的清洗设备
CN115365232B (zh) * 2022-08-24 2023-09-22 哈尔滨工业大学（威海） 一种薄壁管材激光清洗自动化辅助装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101145505A (zh) * 2006-09-15 2008-03-19 大日本网目版制造株式会社 基板处理装置和基板处理方法
KR20100019156A (ko) * 2008-08-08 2010-02-18 주식회사 디엠에스 에어나이프 장치
CN103286087A (zh) * 2012-03-05 2013-09-11 三星显示有限公司 用于面板的清洁系统和面板的清洁方法
CN207307915U (zh) * 2017-08-26 2018-05-04 深圳天溯计量检测股份有限公司 一种可升降型洁净工作台
CN108568419A (zh) * 2018-03-30 2018-09-25 昆山国显光电有限公司 基板清洗系统及清洗方法
CN209363167U (zh) * 2019-01-09 2019-09-10 昆山国显光电有限公司 清洗设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3937698B2 (ja) * 2000-07-06 2007-06-27 セイコーエプソン株式会社 洗浄方法および液晶装置の製造方法
JP3979464B2 (ja) * 2001-12-27 2007-09-19 株式会社荏原製作所 無電解めっき前処理装置及び方法
US7066789B2 (en) * 2002-07-29 2006-06-27 Manoclean Technologies, Inc. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
KR102092702B1 (ko) * 2011-06-14 2020-05-28 삼성디스플레이 주식회사 기판 세정 장치
CN108369905B (zh) 2015-12-07 2022-08-23 东京毅力科创株式会社 基板清洗装置
CN106975628B (zh) * 2017-05-19 2020-02-21 惠科股份有限公司 一种显示面板清洗装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101145505A (zh) * 2006-09-15 2008-03-19 大日本网目版制造株式会社 基板处理装置和基板处理方法
KR20100019156A (ko) * 2008-08-08 2010-02-18 주식회사 디엠에스 에어나이프 장치
CN103286087A (zh) * 2012-03-05 2013-09-11 三星显示有限公司 用于面板的清洁系统和面板的清洁方法
CN207307915U (zh) * 2017-08-26 2018-05-04 深圳天溯计量检测股份有限公司 一种可升降型洁净工作台
CN108568419A (zh) * 2018-03-30 2018-09-25 昆山国显光电有限公司 基板清洗系统及清洗方法
CN209363167U (zh) * 2019-01-09 2019-09-10 昆山国显光电有限公司 清洗设备

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