WO2020108038A1 - 多自由度样品杆 - Google Patents

多自由度样品杆 Download PDF

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Publication number
WO2020108038A1
WO2020108038A1 PCT/CN2019/106864 CN2019106864W WO2020108038A1 WO 2020108038 A1 WO2020108038 A1 WO 2020108038A1 CN 2019106864 W CN2019106864 W CN 2019106864W WO 2020108038 A1 WO2020108038 A1 WO 2020108038A1
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WO
WIPO (PCT)
Prior art keywords
rotating shaft
circuit board
sample
piezoelectric ceramic
sample rod
Prior art date
Application number
PCT/CN2019/106864
Other languages
English (en)
French (fr)
Inventor
王宏涛
张奕志
Original Assignee
浙江大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201811450211.XA external-priority patent/CN111257355B/zh
Priority claimed from CN201811450175.7A external-priority patent/CN111337521B/zh
Priority claimed from CN201811450184.6A external-priority patent/CN111257358B/zh
Priority claimed from CN201811450173.8A external-priority patent/CN111257354B/zh
Application filed by 浙江大学 filed Critical 浙江大学
Priority to JP2021502455A priority Critical patent/JP7055519B2/ja
Publication of WO2020108038A1 publication Critical patent/WO2020108038A1/zh
Priority to US17/334,870 priority patent/US11670478B2/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • H01J37/226Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/208Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/03Investigating materials by wave or particle radiation by transmission
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/10Different kinds of radiation or particles
    • G01N2223/102Different kinds of radiation or particles beta or electrons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007Holding mechanisms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202Movement
    • H01J2237/20207Tilt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202Movement
    • H01J2237/20214Rotation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202Movement
    • H01J2237/20221Translation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202Movement
    • H01J2237/20264Piezoelectric devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes

Definitions

  • the invention relates to a sample rod used under an electron microscope and a transmission electron microscope.
  • TEM Transmission electron microscopy
  • 1932 Ruska invented a transmission electron microscope using electron beam as the light source. The resolution of TEM can reach 0.2nm.
  • In-situ observation technology has a long history in the research of transmission electron microscopy.
  • a transmission electron microscope transmission electron microscope
  • research has important practical significance.
  • the difficulty of in situ technology in transmission electron microscopy is not only to accurately apply physical effects on the sample, but also to meet a series of harsh conditions, such as maintaining the ultra-high vacuum of the electron microscopy system to ensure the extremely high stability of the sample stage Degree, and can not interfere with the imaging optical path, the entire structure must be compact to fit the narrow sample chamber of the transmission electron microscope. Therefore, the difficulty of in situ electron microscopy technology is mainly reflected in the research and production of in situ sample rods.
  • the piezoelectric probe includes a piezoelectric ceramic tube and a small ball.
  • the small ball is fixed to the end of the piezoelectric ceramic tube.
  • the small ball is equipped with a sample holder that holds the small ball by a flexible wire claw.
  • the piezoelectric ceramic tube controls the small ball to circulate with a small amplitude (slowly moving and quickly withdrawing) of a small amplitude (under 2.5 microns in the axial direction of the piezoelectric ceramic tube and below 30 microns in the remaining two directions).
  • the flexible wire claw grasps the ball by friction, and the piezoelectric ceramic tube makes a cyclic movement.
  • the sample holder is shaken step by step by the friction force between the flexible wire claw and the ball, resulting in a larger stroke and a longer step length. Large displacement control (coarse adjustment).
  • the piezoelectric ceramic tube Combined with the small stroke and continuously adjustable displacement control (fine adjustment) produced by the piezoelectric ceramic tube, it can accumulate three degrees of freedom in a narrow space (one degree of axial translation and two degrees of freedom around the ball) Precise displacement control for large strokes (approximately 3 mm).
  • This three-dimensional piezoelectric probe has been used in the NanoEx 3D STM/EP system and NanoEx 3D Indentor system of the FEl company in the United States to realize in-situ STM, in-situ indentation and electrical exploration under the transmission electron microscope.
  • the disadvantages of this three-dimensional probe are: 1.
  • the flexible wire claw is easy to deform. In order to maintain the friction between it and the ball, the shape of the flexible wire claw needs to be adjusted frequently, but there are many flexible wire claws, and each cannot be guaranteed.
  • the consistency of the flexible wire claw causes the reliability and accuracy of the three-dimensional probe to become lower and lower with the time and number of uses.
  • the length of the flexible wire claw makes a gap between the sample holder and the small ball. When the ball moves in a circular motion, the sample holder is moved away from the ball or close to the ball along the wire claw, so as to realize the axial displacement of the sample However, the sample holder is suspended on the small ball through the flexible wire claw.
  • the sample holder and the sample on it will fall down due to gravity, and the position accuracy is not high.
  • the observation field of view in the transmission electron microscope is on the order of nanometers and micrometers.
  • the position deviation of the sample under the influence of gravity is likely to cause the area to be observed on the sample to deviate from the observation field of the electron microscope and cannot be observed; and the presence of the position deviation makes it difficult to The area to be observed is adjusted to a position and angle suitable for observation. 3.
  • the probe clamping device moves back and forth along the axial direction of the piezoelectric ceramic tube, the relationship between the shape of the flexible wire claw and the above friction force is complicated, and it is difficult to adjust the shape to ensure that the friction force is always appropriate.
  • the probe clamping device is affected by gravity, which makes it easy to produce coupling motion during coarse adjustment, and it is difficult to accurately control the probe; even because the shape of the flexible wire claw is improperly adjusted, the ball cannot be grasped, which may cause the probe to clamp The device fell into the device, causing damage to the device.
  • a multi-degree-of-freedom sample rod is provided with a nano-positioner.
  • the nano-positioner includes a piezoelectric ceramic tube and a joint ball.
  • the joint ball is fixed to the end of the piezoelectric ceramic tube.
  • At the head of the clamping mechanism there is a sample clamping nozzle.
  • the piezoelectric ceramic tube controls the joint ball to perform a "slow movement and rapid withdrawal" of small amplitude cyclic movement.
  • the clamping mechanism grips the joint ball through friction, and the piezoelectric ceramic tube performs cyclic movement.
  • the sample gripper is shaken step by step through the friction between the gripping mechanism and the joint ball, resulting in a displacement control with a large stroke and a large step; combined with the piezoelectric ceramic tube itself, the stroke is small and continuous Adjustable displacement control.
  • the first aspect of the present invention aims to provide a multi-degree-of-freedom sample rod with accurate rotation around small spherical spheres and axial rotation driving capability of the sample rod, and stable performance in repeated use.
  • the multi-degree-of-freedom sample rod is provided with a nano-positioner.
  • the nano-positioner includes a driving member, a joint ball and a pressing member assembly.
  • the joint ball is fixed to the driving member.
  • the pressing member assembly includes at least two pressing members and an elastic connecting assembly.
  • the elastic connecting component connects the adjacent pressing pieces, the pressing pieces hold the joint ball, and the pressing pieces and the joint ball have a pre-tightening force.
  • piezoelectric ceramic tubes are used as driving parts.
  • the driving part, the joint ball and the pressing part assembly constitute a clamping mechanism.
  • the pressing piece is used to hold the joint ball.
  • the pressing piece serves to stably support the sample and the sample holder.
  • the piezoelectric ceramic tube (driving piece) does not move At this time, the friction between the pressing member and the joint ball enables the pressing member to accumulate to rotate or swing relative to the joint ball.
  • each pressing member has a recessed portion and a connecting portion, and the elastic connecting component is provided between the connecting portions of adjacent pressing members.
  • the recessed portions of all the pressing members constitute dimples that cooperate with the joint ball.
  • the dimples are in line contact or surface contact or point contact with the joint ball; the elastic connection component makes the pretension between the pressing member and the joint ball.
  • the dimple is hemispherical, or V-shaped, or conical.
  • the pressing member is an integrated plate body, and the concave portion is located in the center of the plate body.
  • the first pressing piece and the second pressing piece are located on both sides of the joint ball.
  • the first pressing piece is on the top
  • the second pressing piece is on the bottom
  • the recess of the second pressing piece is a through hole.
  • the inner wall of the through hole is hemispherical, V-shaped or conical.
  • the first pressing piece is provided with a sample fixture.
  • the pressing member is located outside the joint ball.
  • the nano-positioner faces upwards, and the two sides are the outer side when the sample rod is placed upright, left, right, and front.
  • the pressing member is provided with a sample clamping part.
  • the sample holding part is combined into a sample fixture, and the sample fixture is used to install the sample.
  • the pressing member includes a first pressing member and a second pressing member, and a plurality of mounting positions are evenly distributed around the concave portions of the first pressing member and the second pressing member, and each mounting position corresponds to an elastic connection
  • the assembly the installation position of the first pressing piece is aligned with the installation position of the second pressing piece.
  • one end of the elastic connecting component is installed at the installation position of the first pressing piece, and the other end is installed at the installation position of the second pressing piece.
  • the surface of the recess of the first pressing member has a wear-resistant layer.
  • the surface of the recess of the second pressing member has a wear-resistant layer.
  • the elastic connecting component is used to provide pressure between the pressing member and the joint ball.
  • the elastic connection component is an elastic column (such as a silicone column, a rubber column, etc.) made of a spring or an elastic material.
  • One end of the elastic connection component is fixed to the first pressing member, and the other end is fixed to the second pressing member. After the two pressing parts hold the joint ball, the elastic connecting component is in a deformed state, and the restoring force of the elastic connecting component provides the pre-tightening force between the two pressing parts and the joint ball.
  • the elastic connecting component is composed of a screw and a spring
  • the spring is sleeved on the screw
  • the spring is located between the screw and the first pressing piece
  • the installation position of the second pressing piece is a screw hole that meshes with the screw.
  • the installation position of the first pressing member is a through hole, and the through hole is clearance-matched with the screw. There is no friction between the through hole and the screw, which is beneficial to the spring pushing the first pressing piece.
  • the screw extends beyond the mounting hole of the second pressing piece, or there is a fixing portion between the screw and the second pressing piece.
  • the screw and the second pressure piece are welded or fixed, or bonded, or the thread on the screw is broken.
  • the screw and the second pressure piece are welded or fixed, or bonded, or the thread on the screw is broken.
  • the screw and the second pressure piece are welded or fixed, or bonded, or the thread on the screw is broken.
  • the screw and the second pressure piece are welded or fixed, or bonded, or the thread on the screw is broken.
  • the pre-tightening force between the pressing member and the joint ball is adjusted by the degree of screw tightening, which reduces the design and manufacturing requirements for the elasticity itself.
  • the second aspect of the present invention aims to provide a driving member structure capable of driving a sample to swing or rotate around a spherical surface of a joint ball at multiple angles.
  • the driving part is a piezoelectric ceramic tube. By setting a conductive area on the piezoelectric ceramic tube, the swing direction of the pressing part, the sample holder and the sample relative to the joint ball is controlled.
  • the driving member is a piezoelectric ceramic tube.
  • the piezoelectric ceramic tube is a hollow tube. One end of the piezoelectric ceramic tube is fixed to the joint ball, and the other end is mounted on the sample rod.
  • the piezoelectric ceramic tube has an inner surface and an outer surface. Surface, a plurality of conductive area groups are provided on one surface of the piezoelectric ceramic tube, each conductive area group includes two symmetric conductive areas, all conductive areas are independent of each other, and each conductive area has a conductive line; One surface is the conductive part of the whole area. The conductive part of the whole area is to guide the electrical coating to completely cover another surface.
  • the conductive area is arranged on the outer surface of the piezoelectric ceramic tube, and the entire area of the conductive part is arranged on the inner surface of the piezoelectric ceramic tube.
  • the conductive area is provided on the inner surface of the piezoelectric ceramic tube, and the entire area of the conductive portion is provided on the outer surface of the piezoelectric ceramic tube.
  • the conductive area groups are evenly distributed along the outer (inner) surface of the piezoelectric ceramic tube, the entire area of the conductive portion covers the inner (outer) surface.
  • the voltage directions of the two conductive regions of each conductive region group are opposite.
  • the joint ball is connected to the piezoelectric ceramic tube through a ball seat.
  • the ball seat includes a connecting rod fixed to the joint ball and a connecting seat fixed to the piezoelectric ceramic tube.
  • the diameter of the connecting rod is smaller than the diameter of the joint ball.
  • the connecting rod and the connecting seat are detachably fastened and connected.
  • the connecting rod is first passed through the concave through hole of the second pressing piece, the concave of the second pressing piece contacts the joint ball, and then the connecting rod is fixed to the connecting seat.
  • it is convenient to disassemble and replace the second pressing member.
  • the third aspect of the present invention is to provide a sample rod capable of leading out the static electricity accumulation caused by electron beam imaging in a transmission electron microscope.
  • the head of the nanodriver is provided with a tube for loading the sample, and the tube is provided with a pre-tightening screw to lock the sample, and the nano-driver is provided with an electrostatic discharge member, a pre-tightening screw
  • the static electricity exporting parts can conduct electricity.
  • the nano-driver is provided with an electrical path connecting the pre-tightening screw and the static electricity exporting part.
  • the static electricity exporting part is connected to the wire, the wire is grounded, or connected to a constant voltage power supply provided by an external device, or connected
  • the sample shaft is connected to the transmission electron microscope.
  • the static electricity on the area to be observed of the sample is transmitted to the pre-tightening screw through the sample, and the pre-tightening screw reaches the static electricity outlet through the electrical path on the nanodrive, and the current on the static electricity outlet is led out through the wire.
  • the electrical path may be a wire connecting the pre-tightening screw and the static electricity outlet, and only the length of the wire needs to be redundant so that the wire does not affect the activity of the nanodrive.
  • the nano-actuator adopts the above-mentioned structure, the sleeve is provided on the first pressing member, and the electrostatic discharge member is fixedly installed on the second pressing member.
  • the first pressing member, the sleeve, and the second pressing member are all conductors.
  • the elastic connecting component includes a screw and a spring, and the screw and the spring are both conductors, and the surface of the through hole corresponding to the first pressing member and the screw remains conductive. In this way, the flow of static electricity is: sample ⁇ pre-tightening screw ⁇ first pressing piece ⁇ spring ⁇ screw ⁇ second pressing piece ⁇ static discharge piece.
  • the static electricity exporting member is a conductive screw
  • the second pressing member has a screw hole matched with the conductive screw
  • the nut of the conductive screw faces away from the first pressing member
  • the wire is located between the nut of the conductive screw and the second pressing member between.
  • the conductive screw can be installed and the wire can be fixed to the conductive screw.
  • the wire is welded to the conductive screw, and the wire is directly welded to the conductive screw to make the wire connection more stable.
  • the screw portion of the conductive screw is located in the second pressing member. That is to say, except for the head, the rest of the conductive screw is located in the second pressing member, and its tail does not extend beyond the second pressing member, nor does it screw into the first pressing member. In this way, it is avoided that the relative movement between the first pressing piece, the joint ball and the second pressing piece affects the stability of the conductive screw.
  • the head of the conductive screw is exposed to the second pressing member.
  • the wire can be pressed between the conductive screw and the surface of the second pressing piece, the wire does not need to be embedded in the screw hole of the second pressing piece, and the wire is not easily broken.
  • the tail portion of the conductive screw is fixed to the second pressing part by spot welding. Spot welding fixes the conductive screw in the second pressing piece, maintains the stability of the current transmission, and also prevents the conductive screw from coming off the second pressing piece and falling.
  • the transmission electron microscope is very expensive and difficult to maintain. Once the parts or samples fall in the sample chamber of the transmission electron microscope, it will cause huge losses, and the sample chamber has limited space, and the dropped parts are difficult to take out. important.
  • a fourth aspect of the present invention is to provide a sample rod capable of stably holding samples of various thicknesses and sizes, and capable of consistently appearing in the observation field of view of a transmission electron microscope.
  • the sample needs to be loaded on the sample rod through the sample holder.
  • the sample is a rod with a diameter of 0.3 mm and a length of 10 mm.
  • the area to be observed in the sample is an area with a thickness of 100 nm or less at one end of the sample, such as a needle tip or attached nanoparticles. There may be multiple areas to be observed on each sample.
  • the sample is rotated around the axis. In order to keep the area to be observed of the sample always within the field of view of the transmission electron microscope observation, the area to be observed of the sample should be as close as possible to the axis of rotation.
  • the usual way to install the sample is: set the sleeve at the front of the sample rod, and the locking screw presses the sample against the sleeve wall from one side.
  • the inner diameter of the sleeve needs to The sample is thick, so the area of the sample to be observed will inevitably deviate from the center axis of the sample rod.
  • the observation scale of the transmission electron microscope is usually in the order of micrometers and nanometers. When the area to be observed of the sample is observed, it is likely that the area to be observed of the sample after the piezoelectric rubbing mechanism rotates the sample exceeds the observation field of the transmission electron microscope.
  • a sample gripper is set for mounting the sample, and the sample and the sample gripper are installed as sample components into the front end of the sample rod.
  • the sample holder includes a clamping part and a connecting part, and the sample is loaded on the clamping part.
  • a tool such as pliers
  • the connection part of the sample holder is in clearance fit with the sleeve. For example, if the sleeve is round, the connection part of the sample holder is cylindrical, as long as the connection part can fit in the clearance of the sleeve.
  • the pre-tightening screw directly abuts the sample holder, samples of any size can be installed on the sample holder, and then the sample assembly is installed on the sample rod, so that the sample rod can be loaded with good versatility.
  • the pre-tightening screw only needs to tighten the sample clamp nozzle.
  • the pre-tightening screw does not contact the sample and will not cause damage to the sample.
  • the installation gap between the sample clamp nozzle and the sample rod can be set as small as possible to ensure the sample
  • the sample shaft should be as close as possible.
  • the clamping part has a sample loading hole at the center line.
  • the loading hole is set at the center of the clamping part, which is conducive to the balanced clamping of the sample.
  • a buffer gap connecting the loading hole is formed symmetrically on both sides of the loading hole.
  • the buffer gap can allow the sample loading hole to increase in size, so that the sample is smoothly loaded into the sample loading hole.
  • the clamping part gradually shrinks from the bottom to the top, the top is flat, and the clamping part is hollow.
  • the flat shape at the top reduces the space occupied by the sample holder and facilitates the operation of the sample.
  • the hollow clamping part increases the depth of the sample.
  • the clamping part and the connecting part are fixedly connected or integrally formed, the clamping part is on the top, and the connecting part is on the bottom.
  • the fixed connection method may be welding.
  • the integral molding method can ensure the smooth connection of the clamping part and the connecting part.
  • the connecting portion is a solid column, or the connecting portion is hollow.
  • the solid column is not prone to squeeze deformation, and the pre-tightened screw is pressed against the solid column to maintain the reliability of the sample-sample clamp installation.
  • the connecting part is hollow, the length of the sample is further increased, and the manufacturing cost of the jaw is reduced.
  • the pre-tightening screws correspond to the recesses inserted into the connection part, while locking the connection part, it can also prevent the rotation displacement of the sample.
  • the sample holder is a conductor. Therefore, the static electricity accumulated on the area to be observed of the sample is easily led out.
  • the sample holder can be a thin-walled copper tube.
  • the use of thin-walled copper tubes, low cost, can adapt to samples of different diameters.
  • the static current direction is: sample ⁇ jaw ⁇ pre-tightening screw ⁇ first pressing piece ⁇ spring ⁇ screw ⁇ second pressing piece ⁇ static discharge piece.
  • an object of the present invention is to provide a method for adjusting a sample so that the area to be observed of the sample is always within the observation field of the transmission electron microscope.
  • the method for adjusting the area to be observed of the sample to the rotation axis of the rotating shaft includes the following steps:
  • the coupling may move back and forth.
  • the piezoelectric rubbing mechanism needs to be driven to drive the position of the sample feature point projected on the electron microscope screen to the same X position.
  • the overall diameter of the transmission electron microscope sample rod is about 15mm. Considering that the O-ring groove for sealing needs to be installed, and sufficient structural rigidity is reserved, the space diameter of the rotating shaft does not exceed 10mm.
  • an object of the present invention is to provide a sample rod that can automatically return to a sample rod that coincides with the center axis of the sample rod after rotating around the axis of the sample rod.
  • the sample rod is set to include a housing and a rotating shaft, the housing is coaxial with the rotating shaft, and the rotating shaft is located in the inner cavity of the housing; the inner cavity is provided with a piezoelectric rubbing mechanism and self-positioning for rotating the rotating shaft Mechanism, the self-positioning mechanism has a symmetrical slope, the slope is in contact with the rotating shaft.
  • the central axis of the shaft can always be automatically reset to the original position due to the role of the inclined plane, so as to avoid the displacement of the center of the shaft and the sample to be observed area from the observation field of the transmission electron microscope.
  • the rotating shaft is a ceramic shaft.
  • the self-positioning mechanism includes a supporting block, the supporting block has a symmetrical inclined surface, and the inclined surface of the supporting block contacts the rotating shaft.
  • the inclined surface of the supporting block has a wear-resistant layer, and the wear-resistant layer is a contact part with the rotating shaft.
  • multiple supporting blocks are distributed along the axial direction of the rotating shaft.
  • the self-positioning mechanism includes a pressing plate, the pressing plate has a flat plate, and a slope is symmetrically arranged on both sides of the flat plate.
  • the rotating shaft is limited between the supporting block and the pressing plate, so that the rotating shaft does not move up and down and left and right when rotating around the shaft.
  • each supporting block corresponds to a pressing plate, the supporting block is below, and the pressing plate is above.
  • the self-positioning mechanism includes a plurality of supporting blocks and a pressing plate.
  • the pressure plate has a pair of mounting wings, and the mounting wings have fixing holes; the mounting wings are located at one end of the slope.
  • the inner side of the flat plate is provided with a wear-resistant layer, and the wear-resistant layer is the contact part with the rotating shaft.
  • the elastic mounting component is composed of a screw and a spring.
  • the spring is sleeved on the shaft of the screw, and the spring is located between the mounting wing and the nut of the screw.
  • the elastic mounting component enables the pressure plate to jog in the radial direction of the rotating shaft, which not only has a pretension force on the rotating shaft, but also allows the rotating shaft to rotate automatically.
  • the rotating shaft is limited between the pressure plate and the supporting block, and the pre-tightening force is adjusted by rotating the screw during assembly. After the assembly is completed, the spring does not continue to deform during use.
  • an object is to provide a sample rod capable of simultaneously driving the rotation of the rotating shaft and the axial movement, or selectively driving the rotation of the rotating shaft or the axial movement.
  • each group of rotating shaft driving components includes a driving unit, the driving unit includes a substrate and a piezoelectric ceramic sheet, and the substrate is an insulator , Or the substrate is a PCB printed circuit board.
  • the rotating shaft driving assembly includes an axial driving unit.
  • the shear deformation direction of the piezoelectric ceramic sheet of the axial driving unit is consistent with the axial direction of the rotating shaft.
  • the piezoelectric ceramic sheet is adhered to the substrate and pressed
  • a conductive coating is applied to both surfaces of the electroceramic sheet.
  • voltage signals are input between the conductive coatings, such as continuous or intermittent sawtooth waves.
  • the rotating shaft driving assembly includes a rotating driving unit, the shear deformation direction of the piezoelectric ceramic sheet of the rotating driving unit is consistent with the hoop direction of the rotating shaft, the piezoelectric ceramic sheet is bonded to the substrate, and the piezoelectric ceramic sheet Conductive coating is applied on both sides.
  • voltage signals are input between the conductive coatings, such as continuous or intermittent sawtooth waves.
  • the driving unit of the rotating shaft drive assembly includes a substrate, a first piezoelectric ceramic sheet and a second piezoelectric ceramic sheet; the deformation direction of the first piezoelectric ceramic sheet and the second piezoelectric ceramic
  • the deformation directions of the sheets are orthogonal, and the surfaces of both sides of the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet are coated with a conductive coating.
  • voltage signals are input between the conductive coatings, such as continuous sawtooth waves.
  • the deformation direction of the first piezoelectric ceramic sheet is orthogonal to the deformation direction of the second piezoelectric ceramic sheet.
  • the deformation direction of the first piezoelectric ceramic sheet is along the axial direction of the rotating shaft (the front-rear direction), which is used to drive the rotating shaft to translate back and forth
  • the deformation direction of the second piezoelectric ceramic sheet is along the circumferential direction of the rotating shaft (the direction of rotation), and is used to rotate the rotating shaft to rotate automatically.
  • the first piezoelectric ceramic sheet is stacked on the second piezoelectric ceramic sheet, or the second piezoelectric ceramic sheet is stacked on the first piezoelectric ceramic sheet; between the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet Bonding and fixing.
  • the drive unit is provided with a wear-resistant layer. The wear layer is in direct contact with the shaft, reducing wear and extending the life of the drive unit.
  • one side surface of the first piezoelectric ceramic sheet and one side surface of the second piezoelectric ceramic sheet are connected, and a common wire is shared.
  • the rotating shaft drive assembly is provided with three or five groups along the axis of the rotating shaft.
  • five sets of rotating shaft driving components are provided, two sets of rotating shaft driving components are symmetrically arranged in front and back of the rotating shaft, and one set of rotating shaft driving components is provided in the middle position.
  • Two sets of rotating shaft driving components limit the rotation and axial movement of the rotating shaft.
  • Multiple sets of rotating shaft driving components are provided to apply the same force to the rotating shaft, which is conducive to the rotating shaft rotation and axial movement.
  • An eighth aspect of the present invention is to provide a sample rod capable of accommodating a rotating shaft drive assembly and a rotating shaft.
  • the skeleton is arranged between the casing and the rotating shaft, and the skeleton is coaxial with the casing and the rotating shaft.
  • the skeleton serves as a transitional part between the rotating shaft and the casing.
  • the rotating shaft and the skeleton are coaxial, and then the rotating shaft-skeleton is installed in the casing, so that the rotating shaft, the skeleton and the casing are coaxial to improve the installation accuracy.
  • the skeleton also provides a mounting position for the rotating shaft drive assembly, and the skeleton also plays a role of separating the rotating shaft from the wires and avoiding the wires from interfering with the movement of the rotating shaft.
  • the skeleton has a matching part that fits into the gap of the inner wall of the housing, a receiving slot for accommodating the rotating shaft, and a mounting part for carrying accessories.
  • the receiving slot has a symmetric slope, and a printed circuit board is fixed on the mounting part. There are connecting wires on the circuit board.
  • the supporting block is fixed to the accommodating groove, and the accommodating groove is provided with multiple sections along the axial direction of the skeleton; the skeleton is provided with an installation cavity for accommodating the rotating shaft drive assembly, and the accommodation groove and the installation cavity are spaced apart.
  • the wear-resistant layer of the rotating shaft drive assembly forms a slope for limiting the rotating shaft.
  • each drive unit has its own connection circuit board for current flow
  • the connection circuit board is a PCB printed circuit board
  • the connection circuit board has a line that is in electrical communication with the rotation drive assembly
  • each rotation axis drive assembly corresponds to a rotation Connected to the circuit board
  • the transfer circuit board is a PCB printed circuit board, and there is a connecting line on the transfer circuit board
  • the current connected to the circuit board is collected on the transfer circuit board
  • the transfer circuit board is connected to the transfer wire, and the transfer wire and the sample rod Connect the signal connector on.
  • the signal connector is connected to an external signal source, and the drive unit outputs a control signal.
  • the circuit board is used to realize the transmission of electrical signals to avoid the interference of the wires with the rotation of the rotating shaft.
  • the transfer circuit board is fixed to the skeleton, and the rotating shaft is located below the transfer circuit board.
  • the adapter circuit board is located between the pressure plate and the rotating shaft drive assembly.
  • the transfer circuit board is a PCB printed circuit board. The solderable area of the drive unit is limited and the soldering is not strong. Using the transfer circuit board can reduce the contact with the wires on the drive unit during the assembly process to protect the solder joints.
  • the connecting circuit board and the switching circuit board are electrically connected by wires.
  • the skeleton is cylindrical, a groove is cut on one side of the skeleton, the groove penetrates the axial direction of the skeleton, the accommodating groove and the installation cavity are located on the groove; the arc surface of the skeleton is the bottom, and the opening of the groove is the top, and the connection There is a gap in the position of the circuit board, and the gap is formed by cutting off part of the skeleton wall from top to bottom.
  • the walls at both ends of the notch play the role of positioning and connecting the circuit board.
  • each connecting circuit board is less than or equal to the wall thickness of the skeleton, and the connecting circuit board is fixed to the top surface of the notch with screws.
  • the plane of the skeleton wall where the switching circuit board is installed is higher than the plane of the skeleton wall where the connection circuit board is installed.
  • the transfer circuit board is partially suspended and interleaved with the connection circuit board below it to save installation space; and there is a gap between the transfer circuit board and the connection circuit board to avoid short circuit of the wires.
  • the skeleton is provided with mounting screw holes, and the screw holes penetrate the skeleton from top to bottom.
  • the threaded holes are all through holes, which is convenient for cleaning the skeleton, keeping the sample rod clean, and avoiding contamination and interference with the sample cavity in the transmission electron microscope.
  • an object is to provide a sample rod capable of inserting an optical fiber into a sample rod so as to photograph the changing process of the sample in situ under a transmission electron microscope.
  • Insert the optical fiber in the sample rod the function of the optical fiber is: 1) Use the light source to adjust to a specific spectrum of light, pass through the electron microscope, irradiate the sample, and apply an electromagnetic field; 2) Collect the light emitted/reflected by the sample and exit the electron microscope for measurement And analysis, such as: measuring the black body radiation emitted by the sample to measure the sample temperature.
  • the optical fiber groove is opened on the side of the skeleton, and the optical fiber groove penetrates the skeleton axially.
  • the side of the skeleton is provided with an optical fiber slot for the passage of optical fibers, which can avoid the abrasion of optical fibers.
  • the head of the sample rod has a front-end circuit board.
  • the front-end circuit board is a PCB printed circuit board.
  • the front-end circuit board is connected to the fiber slot, and the front-end circuit board and the fiber slot are on the same straight line.
  • the reason why the fiber slot is opened on the side of the skeleton is because there is a front-end circuit board at the head of the sample rod.
  • the fiber slot is connected to the front-end circuit board.
  • the front-end circuit board has the function of guiding the optical fiber. It has a small bending amplitude. If the bending amplitude of the fiber head is too large, it will cause attenuation of the optical signal and even break the fiber. The optical signal is attenuated, the signal-to-noise ratio of the signal is reduced, or it cannot be measured below the measurement range of the instrument.
  • the front-end circuit board is mounted on the skeleton through a mounting block.
  • the mounting block fixes the front-end circuit board to the frame through bolts.
  • the front-end circuit board has a guiding plane for guiding the optical fiber, and the guiding plane is flush with the optical fiber groove.
  • the guide plane extends toward the sample holder, and the optical fiber approaches the sample along the guide plane.
  • two optical fibers are provided symmetrically on the skeleton.
  • the front-end circuit board has symmetrically arranged guide planes, and the guide planes are connected with the optical fiber grooves one by one.
  • the fiber slot and the connecting circuit board are on the same straight line. That is, the connection circuit board is arranged along the route where the fiber slot is located, and the lead wires connecting the circuit board can be led out from the inner wall of the skeleton or through the fiber slot. In this way, the arrangement of the wire and the rotation of the rotating shaft do not interfere with each other.
  • the optical fiber groove is linear and can accommodate at least an optical fiber with a diameter of 0.5 mm.
  • the tenth aspect of the present invention is to provide a method for stably inputting the signal outside the sample rod into the sample rod, thereby controlling the precise movement of the nanodriver, and at the same time, collecting the static electricity and sample rod in the TEM sample chamber
  • the output of the received information is stable, and the connection between the wires is reliable, and the sample rod that does not interfere with the rotation of the rotating shaft and is not interfered by the rotating shaft.
  • the wires that connect to the front-end circuit board need to be connected to the outside control box and pass from the outside of the skeleton.
  • Long-term contact friction not only causes wear on the wires, but also has a small wire diameter and a variety of wires that are tangled with each other.
  • the bottom of the skeleton is provided with a wire passage for the passage of the wire, which can avoid the wear and entanglement of the wire.
  • the bottom of the skeleton is provided with a wire groove, the wire groove penetrates the skeleton axially, and the wire groove is a groove open to the bottom.
  • the wires of the front-end circuit board pass through the wire trough.
  • the piezoelectric ceramic sheet used to drive the translation or rotation of the rotating shaft is a piezoelectric ceramic shear sheet that will undergo shear deformation under the action of an applied electric field along the thickness direction.
  • both sides of the piezoelectric ceramic sheet are evenly coated with conductive coatings, which are upper electrode and lower electrode.
  • the driving unit has a substrate, a piezoelectric ceramic sheet, and a wear-resistant sheet.
  • the substrate has a ceramic sheet region and an electrode region.
  • the piezoelectric ceramic sheets are stacked and bonded to the ceramic sheet region.
  • piezoelectric ceramic sheet there is one piezoelectric ceramic sheet in the ceramic sheet area, or at least two piezoelectric ceramic sheets are stacked.
  • the directions of expansion and contraction of the piezoelectric ceramic sheets are different from each other.
  • the substrate is a PCB printed circuit board.
  • the substrate is a metal-based PCB printed circuit board.
  • the substrate is an aluminum-based PCB printed circuit board.
  • the substrate has recesses and a pair of mounting holes, the mounting holes are used as the front and rear ends of the substrate, the ceramic sheet area and the electrode area are located in the center of the substrate, the recesses are located at the front and rear ends of the substrate, around the mounting holes; The sheet area and the electrode area are located on the left and right sides of the substrate.
  • the lower electrode of the lowermost piezoelectric ceramic sheet is in direct contact with the ceramic sheet region on the substrate, and is connected to the electrode region on the substrate through a line on the ceramic sheet region;
  • the upper electrode surface of the uppermost piezoelectric ceramic sheet has an A region And area B; area A is pasted with a wear-resistant sheet; area B is electrically connected to an adapter wire; the other end of the adapter wire is electrically connected to the electrode area on the substrate.
  • the transfer wire is soldered to the area B; or, the transfer wire is adhered to the area B with conductive glue.
  • the upper electrode of each layer of piezoelectric ceramic sheet has an overlapping area and an exposed area; the overlapping area is above the piezoelectric ceramic sheet
  • the lower electrode of the layered piezoelectric ceramic sheet is electrically connected; the exposed area is electrically connected to an adapter wire; the other end of the adapter wire is electrically connected to the electrode area on the substrate.
  • the adapter wire is soldered to the exposed area; or, the adapter wire is adhered to the exposed area with conductive glue.
  • the transfer wire is soldered to the electrode area on the substrate.
  • the overlapping area is in direct contact with the lower electrode of the piezoelectric ceramic sheet above the piezoelectric ceramic sheet.
  • the lower electrode is grounded. Because the upper and lower electrodes of each piezoelectric ceramic sheet can be equivalent to a capacitive load, and the voltage required to drive each piezoelectric ceramic sheet is relatively high, when driving the lowermost piezoelectric ceramic sheet with a high-frequency signal, the voltage The signal is easy to leak to the skeleton and may damage the electron microscope. Therefore, keeping the lower electrode of the lowermost piezoelectric ceramic sheet grounded can reduce the voltage leaking to the skeleton.
  • the driving unit includes an electrode plate and a piezoelectric ceramic sheet, and the piezoelectric ceramic sheet is adhesively fixed to the surface of the electrode plate.
  • the electrode plate is a conductor, and the electrode plate is electrically connected to the lead wire.
  • the driving unit includes a first electrode plate, a first piezoelectric ceramic sheet and a second electrode plate, the first piezoelectric ceramic sheet is shear-deformed along the axis of the rotating shaft, or the first piezoelectric ceramic sheet is circumferentially oriented along the rotating shaft Shear deformation; the first piezoelectric ceramic sheet is between the first electrode plate and the second electrode plate, and the first electrode plate and the second electrode plate have respective lead ends.
  • the driving unit includes a first electrode plate, a first piezoelectric ceramic plate, a second electrode plate, a second piezoelectric ceramic plate, and a third electrode plate;
  • the installation order is the first electrode plate, the first piezoelectric ceramic plate , The second electrode plate, the second piezoelectric ceramic sheet, the third electrode plate;
  • the shear deformation direction of the first piezoelectric ceramic sheet is different from the shear deformation direction of the second piezoelectric ceramic sheet; No contact with the shaft.
  • the first electrode plate is adhesively fixed on the insulating layer
  • the insulating layer is adhesively fixed on the frame or the casing
  • the third electrode plate is provided with a wear-resistant layer in contact with the rotating shaft.
  • the first, second, and third are only to illustrate that there are three electrode plates; the first and second are only to illustrate that there are two piezoelectric ceramic sheets.
  • the first electrode plate is grounded. Since the first electrode plate, the insulating layer and the skeleton can be equivalent to capacitive loads in the circuit, and the voltage required to drive each piezoelectric ceramic sheet is high, when driving each piezoelectric ceramic sheet with a high-frequency signal, the voltage The signal is easy to leak to the skeleton and may damage the electron microscope. Therefore, keeping the first electrode plate grounded can reduce the voltage leaking to the skeleton. Driving the second electrode plate and the third electrode plate with an appropriate voltage signal can also obtain the required electric field without affecting the realization of the driving function.
  • an object is to provide a sample rod that can obtain the rotation angle of a rotating shaft in real time and is convenient for installing a magnetic field sensor.
  • the end of the rotating shaft is provided with a magnet, and the skeleton is provided with a lead-out circuit board.
  • the magnetic field changes with rotation and forward and backward movement.
  • the magnetic field sensor measures the magnetic field, and the position information of the rotating shaft, that is, the rotation angle and moving distance of the rotating shaft, can be obtained through the magnetic field. Since the projection angle is required for three-dimensional reconstruction, the rotation angle of the rotating shaft needs to be measured.
  • the moving distance of the measuring rotating shaft is to make the sample located at the position when the magnetic field sensor is calibrated, so that the error of measuring the rotating angle of the rotating shaft is smaller.
  • the current sample rod is driven by three degrees of freedom, and the sample rod is driven by four degrees of freedom, which increases the axial rotation of the rotating shaft. By measuring the rotating angle of the rotating shaft, it provides a projection angle for three-dimensional reconstruction.
  • the end of the rotating shaft is provided with a magnet
  • the skeleton is provided with a lead-out circuit board
  • the skeleton is provided with a notch.
  • the lead-out circuit board includes a bending portion, the bending portion is located in the notch, and the magnetic field sensor is fixed to the bending portion. Place the magnetic field sensor in the gap to reduce the occupied space, thereby reducing the outer diameter of the suit skeleton.
  • the space of the gap is much larger than the space required to accommodate the magnetic field sensor, which provides enough operation space for disassembly and maintenance of the magnetic field sensor.
  • the lead-out circuit board includes a flat portion, and the flat portion and the bent portion are bent over the skeleton, the flat portion and the bent portion are connected by a wire, and the magnetic field sensor is soldered to the bent portion.
  • the lead-out circuit board is a PCB printed circuit board. The solder connection between the magnetic field sensor and the lead-out circuit board can not only fix the magnetic field sensor, but also short-circuit a pair of pins on the lead-out circuit board, reducing the number of wires that need to be connected.
  • the flat portion and the bent portion are in an "L" shape, and the magnetic field sensor is opposed to the magnet.
  • the use of bent circuit boards occupies a small area and is easy to disassemble. If you do not bend the circuit board, there is not enough space for screws, and it needs to be fixed by glue, which is difficult to disassemble and repair.
  • the lead-out circuit board has two sets of lead-out terminals, one set of lead-out terminals is electrically connected to the wires of the drive unit, and the other set of lead-out terminals is connected to the electrical connector of the sample rod.
  • the twelfth aspect of the present invention aims to use the aforementioned sample rod to reconstruct in-situ the three-dimensional reconstruction method of the sample shape changes actually occurring in the transmission electron microscope sample chamber.
  • the method of using the multi-degree-of-freedom sample rod for in-situ dynamic three-dimensional reconstruction of the sample includes the following steps:
  • step S4 Import the photo obtained in step S3 to the computer for three-dimensional reconstruction.
  • the static electricity on the area to be observed of the sample is transferred to the pre-tightening screw through the sample, and the pre-tightening screw reaches the electrostatic outlet through the electrical path on the nano-driver.
  • the current on the electrostatic discharge member is drawn out through the wire to avoid the electrostatic field generated on the area to be observed of the sample when the electron beam is irradiated to the sample, which affects the imaging of the electron beam.
  • the observation scale of the transmission electron microscope is usually in the micrometer or nanometer range, when the area to be observed is observed, it is likely that the area to be observed after the sample is rotated by the nanodriver exceeds the observation field of the transmission electron microscope, which is capable of observing samples of various sizes .
  • the sample rod is set to include a housing and a rotating shaft, the housing is coaxial with the rotating shaft, and the rotating shaft is located in the inner cavity of the housing; the inner cavity is provided with a piezoelectric rotating mechanism that rotates the rotating shaft and rotates Self-positioning mechanism, the self-positioning mechanism has a symmetrical slope, and the slope is in contact with the rotating shaft. No matter how the shaft rotates, the central axis of the shaft can always be automatically reset to the original position due to the role of the inclined plane, so as to avoid the displacement of the center of the shaft and the sample to be observed area from the observation field of the transmission electron microscope.
  • the sample rod is provided with a skeleton.
  • the skeleton is between the casing and the rotating shaft, and the skeleton is coaxial with the casing and the rotating shaft.
  • the skeleton serves as a transitional part between the rotating shaft and the casing.
  • the rotating shaft and the skeleton are coaxial, and then the rotating shaft-skeleton is installed in the casing to make the rotating shaft, the skeleton and the casing coaxial to improve the installation accuracy;
  • the rotating shaft drive assembly provides the installation position, and the skeleton also plays a role of separating the rotating shaft from the wires to avoid the wires from interfering with the movement of the rotating shaft.
  • the function of the optical fiber is to use the light source to adjust the light to a specific spectrum, pass it into the electron microscope, illuminate the sample, and apply an electromagnetic field; And analysis; there is a fiber slot for the passage of optical fibers on the side of the skeleton, and the front end circuit board is connected with the fiber slot. While avoiding the wear of the fiber, the fiber head is led out of the front end circuit board, and the fiber head has a small bending amplitude.
  • the sample rod is equipped with a rotating shaft drive component.
  • the rotating shaft drive component can make the rotating shaft move and rotate in an axial direction to meet the multi-directional observation of the sample.
  • the sample rod can detect the position information of the rotating shaft.
  • the solder connection between the magnetic field sensor and the lead-out circuit board can not only fix the magnetic field sensor, but also short-circuit one of the pins on the lead-out circuit board, reducing the number of wires that need to be connected;
  • the circuit board includes a flat portion and a bent portion. The flat portion and the bent portion are vertically laid on the surface of the skeleton. The magnetic field sensor is fixed to the bent portion.
  • the bent circuit board is used, which occupies a small area and is easy to disassemble.
  • Figure 1 is a schematic diagram of a sample rod.
  • FIG. 2 is a schematic diagram of a piezoelectric ceramic tube.
  • Fig. 3 is the effect diagram of the present invention for observing the region to be observed of the sample under a transmission electron microscope, where abc is a single-step large-step motion driven by using a larger sawtooth peak-peak drive, and def is using a smaller sawtooth peak- Single-step small step movement under peak drive.
  • Figure 4 is a schematic diagram of the first sample holder.
  • Fig. 5 is a schematic diagram of a second sample fixture.
  • Figure 6 is a schematic diagram of a third sample holder.
  • FIG. 7 is a schematic diagram of a fourth sample fixture.
  • FIG. 8 is a schematic diagram of electrostatic discharge.
  • 9 is a schematic diagram of the installation of conductive screws.
  • Figure 10 is a schematic diagram of a sample gripper.
  • Fig. 11 is a schematic diagram of the cooperation between the supporting block and the pressing plate.
  • Fig. 12 is a schematic structural view of a pressing plate.
  • Fig. 13 is a schematic diagram of drive unit distribution.
  • Fig. 14 is a schematic diagram of a driving unit having a pressing plate.
  • 15 is a schematic diagram of a three-point drive shaft.
  • 16 is a schematic diagram of the skeleton structure.
  • Figure 17 is the first arrangement of piezoelectric ceramics and electrodes.
  • FIG. 19 is a schematic diagram of detecting the position information of the rotating shaft.
  • Fig. 20 is a schematic diagram of a structure with a fiber slot on the skeleton.
  • Fig. 21 is a schematic diagram of a wire groove on the skeleton.
  • Figure 22 is a schematic diagram of a sample rod with a housing.
  • Fig. 23 is a comparison table of the performance of the present invention and the existing sample rod.
  • Figure 1 shows the multi-degree-of-freedom sample rod.
  • the sample rod is provided with a nano-positioner.
  • the nano-positioner includes a driving member 101, a joint ball 103 and a pressing member assembly.
  • the joint ball 103 is fixed to the driving member 101.
  • the pressing member assembly includes at least two pressing members 105 It is connected to the elastic connecting component 104, and the elastic connecting component 104 is connected to the adjacent pressing member.
  • the pressing member assembly embraces the joint ball 103, and the pressing member and the joint ball 103 have a pretension force.
  • a piezoelectric ceramic tube is used as the driving member 101.
  • each pressing member has a concave portion 1051 and a connecting portion 1052 respectively, and the elastic connecting component 104 is disposed between the connecting portions 1052 of adjacent pressing members, and the concave portions 1051 of all the pressing members
  • the dimples that cooperate with the joint ball 103 are formed.
  • the dimples are in line contact or surface contact or point contact with the joint ball 103;
  • the elastic connecting component 1052 provides a pre-tension between the pressing member and the joint ball 103, when the joint ball 103 is stationary, or the driving member 101 moves slowly with the joint ball 103 At this time, the static friction between the joint ball 103 and the pressing member 105 makes the pressing member 105 stationary relative to the joint ball 103.
  • the dimples are hemispherical, or V-shaped, or conical.
  • the pressing member 105 is an integrated plate body, and the concave portion 1051 is located in the center of the plate body.
  • the pressing member 105 is located outside the joint ball 103.
  • the nano-positioner faces upwards, and the two sides are the outer side when the sample rod is placed upright, left, right, and front.
  • the pressing member 105 is provided with a sample holding part.
  • the sample holding part is combined into a sample fixture, and the sample fixture is used to install the sample.
  • the pressing member 105 is used to hold the joint ball 103 from both sides of the joint ball 103, and the elastic connecting assembly 104 provides a pretension force between the pressing member 105 and the joint ball 103.
  • the pressing member includes a first pressing member 1053 and a second pressing member 1054, and the concave portion 1051 of the first pressing member 1053 and the concave portion 1051 of the second pressing member 1054 respectively
  • a plurality of installation positions are evenly distributed, and each installation position corresponds to an elastic connecting assembly 104, and the installation position of the first pressing member 1053 is aligned with the installation position of the second pressing member 1054.
  • one end of the elastic connecting component 104 is installed at the installation position of the first pressing member 1053, and the other end is installed at the installation position of the second pressing member 1054.
  • the first pressing piece 1053 is on the top, the second pressing piece 1054 is on the bottom, and the recess of the second pressing piece 1054 is a through hole.
  • the inner wall of the through hole is hemispherical, V-shaped or conical.
  • the first pressing member 1053 is provided with a sample holder.
  • first pressing member 1053 and the second pressing member 1054 are located on both sides of the joint ball 103 respectively.
  • the surface of the concave portion 1051 of the first pressing member 1053 has a wear-resistant layer.
  • the surface of the recess 1051 of the second pressing member 1054 has a wear layer 113.
  • the wear-resistant layer helps to maintain the stability of friction.
  • the joint ball 103 has a wear-resistant layer on the surface, or the joint ball 103 is made of a wear-resistant material. For example, it is made of aluminum or aluminum alloy, and the surface of the depression and the surface of the joint ball are treated with anodizing.
  • the nanopositioner When the left side (or the right side, the front side, and the back side) of the driving member swings, the nanopositioner is moved to the side by frictional force, thereby moving the sample to the side.
  • the moving distance of the sample is proportional to the voltage value of the opposite constant voltage applied to the above two conductive coatings. Observe the position of the sample repeatedly, and adjust the voltage value accordingly, so that the sample moves to the desired position.
  • the elastic connecting component 104 is an elastic column (such as a silicone column, a rubber column, etc.) made of spring or elastic material, and one end of the elastic connecting component 104 is fixed to the first pressing member 1053 , The other end is fixed with the second pressing member 1054. After the two pressing members hold the joint ball 103, the elastic connecting assembly 104 is in a deformed state, and the restoring force of the elastic connecting assembly 104 provides a pre-tensioning force between the two pressing members and the joint ball 103.
  • an elastic column such as a silicone column, a rubber column, etc.
  • the elastic connecting component is composed of a screw 1041 and a spring 1042, the spring 1042 is sleeved on the screw 1041, the spring 1042 is located between the screw 1041 and the first pressing member 1053, and the installation position of the second pressing member 1054 is a screw hole that meshes with the screw 1041 .
  • the spring 1042 is in a compressed state.
  • the spring 1042 pushes the first pressing member 1053 toward the second pressing member 1054.
  • the spring 1042 provides the first pressing member 1053 and the second pressing member The preload between 1054 and the joint ball 103.
  • the mounting position of the first pressing member 1053 is a through hole, and the through hole is in clearance fit with the screw 1041. There is no friction between the through hole and the screw 1041, which facilitates the spring 42 to push the first pressing member 1053.
  • the screw 1041 extends out of the mounting hole 1043 of the second pressing member 1054, or there is a fixed portion between the screw 1041 and the second pressing member 1054; or the screw 1041 passes through the first pressing member 1053 and the second pressing member in turn
  • the piece 1054 is engaged with the nut.
  • the screw 1041 and the second pressing member 1054 are fixed by welding, or adhesively fixed, or the thread on the screw is broken. This is because when the first ball 1053 and the second pressure piece 1054 are displaced by the cyclic movement of the articular ball 103, the first pressure piece 1053 and the second pressure piece 1054 will swing between the screw 1041 and the second pressure piece 1054.
  • the vibration of the screw causes the screw 1041 to loosen or even disengage from the second pressing member 1054; the loosening of the screw 1041 will affect the precise control of the position; the screw 1041 disengages from the second pressing member 1054, causing the first pressing member 1053 and the sample to fall, damaging the electron microscope.
  • the purpose of fixing the screw and the second pressing piece, or setting nuts, and reserving the redundant thread is to buffer or resist the impact when the nano positioner is shaken, to prevent the screw from separating from the second pressing piece 1054 and causing the nano positioner and the sample to fall off.
  • the stable connection between the pressing member and the joint ball 103 is maintained.
  • the pre-tightening force between the pressing member and the joint ball 103 is adjusted by the degree of tightening of the screw 1041, which reduces the design and manufacturing requirements for the elasticity itself.
  • the elastic connecting assembly 104 provides continuous and stable pressure between the pressing member and the joint ball 103, so that there is a stable friction between the pressing member and the joint ball 103.
  • the driving member 101 is a piezoelectric ceramic tube.
  • the piezoelectric ceramic tube is a hollow tube. One end of the piezoelectric ceramic tube is fixed to the joint ball 103, and the other end is mounted on the sample rod.
  • the piezoelectric ceramic tube has an inner surface and an outer surface.
  • a plurality of conductive area groups are provided on one surface of the piezoelectric ceramic tube, as shown in FIG. 6, each conductive area group includes two symmetric conductive areas 1011, and all conductive areas 1011 Independent of each other, each conductive area 1011 has a conductive wire; the other surface of the piezoelectric ceramic tube is the entire area conductive portion 1012. The entire area of the conductive portion 1012 is to guide the electrical coating to completely cover the other surface.
  • the conductive area is provided on the outer surface of the piezoelectric ceramic tube, and the entire area of the conductive portion 1012 is provided on the inner surface of the piezoelectric ceramic tube.
  • the conductive area 1011 is provided on the inner surface of the piezoelectric ceramic tube, and the entire area of the conductive portion 1012 is provided on the outer surface of the piezoelectric ceramic tube.
  • the conductive area groups are evenly distributed along the outer (inner) surface of the piezoelectric ceramic tube, the entire area of the conductive portion 1012 covers the inner (outer) surface.
  • the joint ball 103 is connected to the piezoelectric ceramic tube through the ball seat 102.
  • the ball seat 102 includes a connecting rod fixed to the joint ball 103 and a connecting seat fixed to the piezoelectric ceramic tube.
  • the diameter of the rod is smaller than the diameter of the joint ball 103.
  • the connecting rod and the connecting base are detachably fastened and connected. For example, screw connection, key connection, etc.
  • the connecting rod is first passed through the concave through hole of the second pressing piece, the concave of the second pressing piece contacts the joint ball, and then the connecting rod is fixed to the connecting seat.
  • it is convenient to disassemble and replace the second pressing member.
  • the bottom end of the piezoelectric ceramic tube is fixed, and a wire is welded to the conductive coating on the inner side of the piezoelectric ceramic tube and kept grounded, and four wires are welded to the four conductive coatings on the outer side of the piezoelectric ceramic tube, respectively
  • the other end is connected to each output end of the voltage amplifier, and then each input end of the voltage amplifier is connected to the function signal generator.
  • the two degrees of freedom of the sample rod can be driven separately.
  • the method of driving the sample rod to any degree of freedom to move the sample to the desired position in this degree of freedom is to apply positive and negative sawtooth waves to the two symmetrical conductive coatings on the outer surface of the piezoelectric ceramic tube through the wire.
  • the sawtooth wave may be continuous or sub-pulse, as shown in FIG. 3.
  • the preferred parameters are peak-to-peak 100V, frequency below 100Hz, and slew rate above 100V/ ⁇ s.
  • the peak-to-peak value can reduce the motion step size, but the peak-to-peak value is too low (in some cases, below 40V) will make the motion step size drop to zero, the reason may be related to the microstructure of the friction surface.
  • the peak-to-peak value is higher than 100V, it will break through the piezoelectric ceramic and damage the piezoelectric ceramic tube.
  • the frequency When the frequency is higher than 100HZ, the intrinsic vibration of the piezoelectric ceramic tube or the overall device structure will be excited, so that the movement of the joint ball 103 is no longer a "slow and fast" movement in the plane.
  • the driving principle of the nanopositioner cannot be satisfied, and the sample cannot motion. Reducing the frequency can reduce the number of movement steps generated per unit time and control the movement speed of the sample.
  • the slew rate is lower than 100V/ ⁇ s, the motion acceleration of the joint ball 103 in the sliding phase will be too small, and the frictional force can keep the moving parts to follow the joint ball 103 without sliding, and the sample cannot generate long-stroke motion by accumulating various steps.
  • the connecting rod and the connecting base are detachably fastened.
  • screw connection for example, screw connection, key connection, etc.
  • key connection etc.
  • the sample fixture is a sleeve 106, and the sleeve 106 is integrated with the first pressing member 1053, and a pre-tightening screw 1061 is installed on the wall of the sleeve 106. Insert the rod-shaped or tube-shaped sample into the sleeve 106 and press the sample with the pre-tightening screw 1061 to complete the clamping of the sample.
  • the sample fixture is a cone, and the cone 1062 is integrated with the first pressing member 1053.
  • the powder sample is glued to the apex of the cone 1062 to complete the clamping of the sample.
  • another form of the sample fixture includes a base 1063, a gasket 1064, and a fastening screw 1065; the base 1063 is divided into a connecting portion and a clamping portion, and the connecting portion is a cylinder fixed with the first pressing member
  • the clamping portion is an incomplete cylinder cut with a flat surface.
  • the gasket 1064 is fastened to the clamping portion by a fastening screw 1065.
  • the flat surface of the clamping portion and the gasket 1064 are used to clamp the sample 1066.
  • another form of the sample fixture includes a clamp 108 and a sleeve 106.
  • the clamp 108 is located in the sleeve 106, and the sleeve 106 is integrated with the first pressing member 1053, and the sleeve 106 penetrates the wall
  • a pre-tightening screw 1061 is installed. Insert the rod-shaped or tube-shaped sample into the clamping nozzle 108, and press the clamping screw 108 with the pre-tightening screw 1061 to complete the clamping of the sample.
  • the head of the nanodriver when the sample is a conductor or a semiconductor, the head of the nanodriver is provided with a sleeve 106 for loading the sample, and the sleeve is provided with a pre-tightening screw 1061 for locking the sample.
  • the tail end of the nano-driver is provided with an electrostatic lead-out member 107, and the pre-tightening screw 1061 and the electrostatic lead-out member 107 can conduct electricity.
  • the nano-driver is provided with an electrical path connecting the pre-tightening screw 1061 and the static-lead leading-out member 107.
  • the wire is grounded, or it is connected to a constant voltage power supply provided by an external device, or to the sample shaft, and then to the transmission electron microscope.
  • a constant voltage power supply provided by an external device, or to the sample shaft, and then to the transmission electron microscope.
  • the static electricity on the area to be observed of the sample is transmitted to the pre-tightening screw 1061 through the sample.
  • the pre-tightening screw 1061 reaches the static electricity outlet 107 through the electrical path on the nanodrive, and the current on the static electricity outlet 107 is drawn out through the wire.
  • the electrical path may be a wire connecting the pre-tightening screw 1061 and the static electricity outlet 107, and only the length of the wire needs to be redundant so that the wire does not affect the activity of the nanodrive.
  • the nano-actuator adopts the above-mentioned structure.
  • the sleeve 106 is provided on the first pressing member 1053, and the electrostatic discharge member 107 is fixedly installed on the second pressing member 1054, the first pressing member 1053, the sleeve Both the 106 and the second pressing member 1054 are conductors.
  • the elastic connecting assembly 104 includes a screw 1041 and a spring 1042.
  • the spring 1042 is sleeved on the screw 1041.
  • the screw 1041 and the spring 1042 are both conductors, and the surface of the through hole corresponding to the screw 1041 of the first pressing member 1053 remains conductive. In this way, the flow of static electricity is: sample ⁇ pre-tightening screw ⁇ first pressing piece ⁇ spring ⁇ screw ⁇ second pressing piece ⁇ static discharge piece.
  • the static electricity discharge member 107 is a conductive screw
  • the second pressing member 1054 has a screw hole that cooperates with the conductive screw.
  • the nut of the conductive screw faces away from the first pressing member 1053, and the wire is located on the conductive screw. Between the nut and the second pressing member 1054. This is because, in this way, the conductive screw can be installed and the wire can be fixed to the conductive screw.
  • the screw portion of the conductive screw is located in the second pressing member 1054. That is to say, except for the head, the rest of the conductive screw is located in the second pressing member 1054, and its tail does not extend beyond the second pressing member 1054, nor does it screw into the first pressing member 1053.
  • the tail of the conductive screw is fixed to the second pressing member 1054 by spot welding. Spot welding fixes the conductive screw in the second pressing member 1054, maintains the stability of current transmission, and also prevents the conductive screw from coming off the second pressing member 1054 and falling.
  • the transmission electron microscope is very expensive and difficult to maintain. Once the parts or samples fall in the sample chamber of the transmission electron microscope, it will cause huge losses, and the sample chamber has limited space, and the dropped parts are difficult to take out. important.
  • the head of the conductive screw is exposed to the second pressing member 1054. In this way, the wire can be pressed between the conductive screw and the surface of the second pressing member 1054. The wire does not need to be embedded in the screw hole of the second pressing member 1054, and the wire is not easily broken.
  • the sample needs to be loaded on the sample rod.
  • the sample is a rod with a diameter of 0.3 mm and a length of 10 mm.
  • the area to be observed in the sample is an area with a thickness of 100 nm or less at one end of the sample, such as a needle tip or attached nanoparticles. There may be one or more areas to be observed on each sample.
  • the sample rotates around the axis. In order to keep the area to be observed of the sample in the transmission electron microscope observation field, the area to be observed of the sample should be as close as possible to the axis of rotation.
  • the usual way to install the sample is to set the sleeve at the front of the sample rod, and the pre-tightening screw presses the sample against the sleeve wall from one side.
  • the inner diameter of the sleeve needs to The sample is thick, so the area of the sample to be observed will inevitably deviate from the center axis of the sample rod.
  • the observation scale of the transmission electron microscope is usually in the order of micrometers and nanometers. When the area to be observed of the sample is observed, it is likely that the area to be observed of the sample after the piezoelectric rubbing mechanism rotates the sample exceeds the observation field of the transmission electron microscope.
  • a sample holder is provided for installing samples. The sample and the sample holder are installed as sample components into the front end of the sample rod for easy installation and disassembly.
  • the sample holder 108 includes a clamping portion 1081 and a connecting portion 1082, and the sample is loaded on the clamping portion 1081.
  • a sample hole 1083 is provided at the center line of the clamping part, and the sample is installed in the sample hole 1083.
  • the connecting portion 1082 of the sample holder is in clearance fit with the sleeve 106.
  • the connecting portion 1082 has a cylindrical shape, as long as the connecting portion 1082 can be clearance-fitted with the sleeve 106.
  • the pre-tightening screw 1061 directly abuts the sample holder, samples of any size can be installed on the sample holder, and then the sample assembly is installed on the sample rod, so that the sample that can be loaded on the sample rod has good versatility.
  • the pre-tightening screw 1061 only needs to tighten the sample clamp nozzle.
  • the pre-tightening screw 1061 does not contact the sample and will not cause damage to the sample, and the installation gap between the sample clamp 108 and the sample rod can be set as small as possible, thereby Ensure that the sample is as close as possible to the shaft of the sample rod.
  • a buffer gap 1084 communicating with the sample loading hole 1083 is formed symmetrically on both sides of the sample loading hole 1083.
  • the buffer gap 1084 can allow the sample loading hole 1083 to have an increased size, so that the sample is smoothly loaded into the sample loading hole 1083.
  • the clamping portion 1081 gradually shrinks from the bottom to the top, and the top is flat. The flat shape at the top reduces the space occupied by the sample holder 108 and facilitates sample manipulation.
  • the clamping portion 1081 is hollow. The hollow clamping portion 1081 can increase the depth of the sample.
  • the clamping portion 1081 and the connecting portion 1082 are fixedly connected or integrally formed.
  • the clamping portion 1081 is on top, the connecting portion 1082 is on the bottom, the connecting portion 1082 is a solid column, or the connecting portion 1082 is hollow.
  • fixed connection refers to welding and other methods.
  • the connecting part 1082 is a solid column, the solid column is not prone to squeeze deformation, and the pre-tightening screw 1061 is pressed against the solid column to maintain the reliability of the sample-sample clamp installation.
  • the connecting portion 1082 is hollow, the depth of the sample can be further increased, and the manufacturing cost of the sample holder 108 can also be reduced.
  • the connecting portion 1082 has a recess.
  • the pre-tightening screw 1061 corresponds to the recess inserted into the connecting portion 1082, and while locking the connecting portion 1082, it can also prevent the sample from rotating and displacing.
  • the sample holder 108 is a conductor. Therefore, the static electricity accumulated on the area to be observed of the sample is easily led out.
  • the sample holder 108 may be a thin-walled copper tube. The use of thin-walled copper tubes not only has low manufacturing cost, but also can adapt to samples of different sizes.
  • the static current direction is: sample ⁇ jaw ⁇ pre-tightening screw ⁇ first pressing piece ⁇ spring ⁇ screw ⁇ second pressing piece ⁇ static discharge piece.
  • the method for adjusting the area to be observed of the sample to the rotation axis of the rotating shaft includes the following steps:
  • the coupling may move back and forth.
  • the piezoelectric rubbing mechanism needs to be driven to drive the position of the sample feature point projected on the electron microscope screen to the same X position.
  • the overall diameter of the transmission electron microscope sample rod is about 15mm. Considering that the O-ring groove for sealing needs to be installed, and sufficient structural rigidity is reserved, the space diameter of the rotating shaft does not exceed 10mm.
  • the sample rod is set to include a housing 109 and a rotating shaft 110, the housing 109 is coaxial with the rotating shaft 110, and the rotating shaft 110 is located in the inner cavity of the housing 109;
  • the rubbing mechanism and the self-positioning mechanism, the self-positioning mechanism has a symmetrical slope, and the slope is in contact with the rotating shaft.
  • the central axis of the rotating shaft can always be automatically reset to the original position due to the role of the inclined plane, so as to avoid that the center of the rotating shaft 110 shifts and the sample to be observed area deviates from the observation field of the transmission electron microscope.
  • the rotating shaft 110 is a ceramic shaft.
  • the self-positioning mechanism includes a supporting block 1092.
  • the supporting block 1092 has a symmetrical inclined surface 10921, and the inclined surface of the supporting block 1092 is in contact with the rotating shaft 110.
  • the inclined surface 10921 of the supporting block 1092 has a wear-resistant layer 113, and the wear-resistant layer 113 is a contact portion with the rotating shaft 110.
  • a plurality of supporting blocks 1092 are distributed along the axial direction of the rotating shaft 110.
  • the self-positioning mechanism includes a pressing plate 1093.
  • the pressing plate 1093 has a flat plate 10931, and a slope 10932 is symmetrically provided on both sides of the flat plate 10931.
  • the rotating shaft 110 is limited between the supporting block 1092 and the pressing plate 1093, so that the rotating shaft 110 does not move up and down and left and right when rotating around the shaft.
  • each supporting block 1092 corresponds to a pressing plate 1093, the supporting block 1092 is below, and the pressing plate 1093 is above.
  • the self-positioning mechanism includes a plurality of supporting blocks 1092 and a pressing plate 1093.
  • the pressure plate 1093 has a pair of mounting wings 10933, and the mounting wings 10933 have fixing holes 10934; the mounting wings 10933 are located at one end of the slope 10932.
  • a wear-resistant layer 113 is provided on the inner side of the flat plate, and the wear-resistant layer 113 is a contact portion with the rotating shaft 110.
  • a frame 112 is provided between the housing 109 and the rotating shaft 110, and the mounting wings 10933 are assembled to the frame 112 through the elastic mounting assembly 114.
  • the elastic mounting assembly 114 is composed of a screw 1141 and a spring 1142.
  • the spring 1142 is sleeved on the shaft of the screw 1141, and the spring 1142 is located between the mounting wing 10933 and the nut of the screw 1141.
  • the elastic mounting assembly 114 enables the pressure plate 1093 to move slightly in the radial direction of the rotating shaft 110, which not only pretensions the rotating shaft 110, but also allows the rotating shaft 110 to rotate.
  • the rotating shaft 110 is limited between the pressing plate 1093 and the supporting block 1092, and the preload force is adjusted by rotating the screw 1141 during assembly. After the assembly is completed, the spring 1142 does not continue to deform during use.
  • At least one set of rotating shaft driving components is provided between the frame 112 and the rotating shaft 110, and the rotating shaft driving component is a piezoelectric rubbing mechanism.
  • Each group of rotating shaft driving components includes a driving unit, and the driving unit includes a substrate and a pressing unit.
  • the electric ceramic sheet, the substrate is an insulator, or the substrate is a PCB printed circuit board.
  • the rotating shaft driving assembly includes an axial driving unit.
  • the shear deformation direction of the piezoelectric ceramic sheet of the axial driving unit is consistent with the axial direction of the rotating shaft.
  • the piezoelectric ceramic sheet is adhered to the substrate and pressed
  • a conductive coating is applied to both surfaces of the electroceramic sheet.
  • voltage signals are input between the conductive coatings, such as continuous or intermittent sawtooth waves.
  • the rotating shaft drive assembly includes a rotation driving unit, the shear deformation direction of the piezoelectric ceramic sheet of the rotation driving unit is consistent with the hoop direction of the rotating shaft 110, the piezoelectric ceramic sheet is bonded to the substrate, and the piezoelectric ceramic sheet The both sides of the surface are coated with a conductive coating.
  • voltage signals are input between the conductive coatings, such as continuous or intermittent sawtooth waves.
  • the driving unit of the rotating shaft drive assembly includes a substrate, a first piezoelectric ceramic sheet and a second piezoelectric ceramic sheet; the deformation direction of the first piezoelectric ceramic sheet and the second piezoelectric ceramic
  • the deformation directions of the sheets are orthogonal, and the surfaces of both sides of the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet are coated with a conductive coating.
  • voltage signals are input between the conductive coatings, such as continuous sawtooth waves.
  • the deformation direction of the first piezoelectric ceramic sheet is orthogonal to the deformation direction of the second piezoelectric ceramic sheet.
  • the deformation direction of the first piezoelectric ceramic sheet is along the axial direction of the rotating shaft (the front-rear direction), which is used to drive the rotating shaft 110 forward and backward In translation
  • the deformation direction of the second piezoelectric ceramic sheet is along the circumferential direction of the rotation shaft (which is the rotation direction), and is used to rotate the rotation shaft 110 to rotate.
  • the first piezoelectric ceramic sheet is stacked on the second piezoelectric ceramic sheet, or the second piezoelectric ceramic sheet is stacked on the first piezoelectric ceramic sheet; the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet are bonded and fixed .
  • the driving unit is provided with a wear-resistant layer 113.
  • the wear layer 113 directly contacts the rotating shaft 110 to reduce wear and extend the service life of the drive unit.
  • One side surface of the first piezoelectric ceramic sheet and one side surface of the second piezoelectric ceramic sheet are in conduction, and share a single wire.
  • the rotating shaft drive assembly is provided with two or three groups along the axis of the rotating shaft 110.
  • One set of rotating shaft drive components limits the rotation and axial movement force of the rotating shaft.
  • Multiple sets of rotating shaft drive components are provided to apply the same direction force to the rotating shaft 110, which is beneficial to the rotating shaft rotation and axial movement.
  • Two-point drive shaft solution A set of shaft drive components are set along the axis at the front end of the shaft.
  • the group of shaft drive components includes two sets of drive units symmetrically arranged along the shaft. The left and right sides of the shaft are driven by the drive units. The contact points of the wear plates on the surfaces of the two drive units are flush with the rotating shaft 110.
  • a and b in the figure are two sets of drive units 111, respectively.
  • the front end of the shaft 110 is provided with a group of shaft drive assemblies along the axial direction.
  • the front end shaft drive assembly includes two sets of drive units symmetrically arranged along the shaft.
  • a set of rotating shaft drive assemblies is provided between the pressing plate 1093 and the rotating shaft 110, and the set of rotating shaft drive assemblies includes a set of drive units.
  • the position of the pressure plate 1093 should be above the two sets of drive units.
  • the contact points of the wear plates on the surfaces of the three sets of drive units and the rotating shaft 110 are flush. If the contact point is staggered along the axis of the rotating shaft 110, it is easy to cause the rear end of the rotating shaft 110 to tilt.
  • the pressure plate 1093 has a through hole in the lateral direction, and the copper foil passes through the through hole.
  • the copper foil serves as the extraction medium for the electrode of the drive unit and is connected to the external wire. See FIG. 15, a, b, and c are three sets of drive units respectively. 111.
  • Five-point drive shaft scheme When the shaft drive components are set to five groups, the front and rear ends of the shaft 110 are respectively symmetrically provided with two sets of shaft drive components, and each group of shaft drive components includes two sets of drive units symmetrically arranged along the shaft.
  • a group of rotation shaft drive assemblies is provided at the central position of the rotation shaft 110.
  • the group of rotation shaft drive assemblies includes a group of drive units, and the group of drive units is located between the pressing plate 1093 and the rotation shaft 110.
  • the contact points of the wear plates on the surfaces of the two sets of driving units at the front and rear ends of the rotating shaft 110 and the rotating shaft 110 are flush. Referring to FIG. 13, a, b, c, d, and e in the figure are five sets of driving units 111, respectively.
  • the skeleton 112 is provided between the casing 109 and the rotating shaft 110, and the skeleton 113 is coaxial with the casing 109 and the rotating shaft 110.
  • the frame 112 serves as a transition part between the rotating shaft 110 and the housing 109. During assembly, the rotating shaft 110 and the frame 112 are coaxial, and then the rotating shaft-frame is installed in the housing, so that the rotating shaft 110, the frame 113 and the housing 109 are coaxial. Installation accuracy.
  • the frame 112 also provides a mounting position for the rotating shaft drive assembly.
  • the frame 112 also plays a role of separating the rotating shaft from the wire and preventing the wire from interfering with the movement of the rotating shaft.
  • the frame 112 has a matching portion 1121 that fits into the inner wall of the housing 109, a receiving groove 1122 for receiving a rotating shaft, and a mounting portion 1123 for carrying accessories.
  • the receiving groove 1122 has a symmetrical slope, and the mounting portion 1123 is fixed
  • the connection circuit board is a PCB printed circuit board.
  • the supporting block 1092 is fixed to the accommodating groove 1122.
  • the accommodating groove 1122 is provided with multiple segments along the axial direction of the skeleton 112; the skeleton 112 is provided with an installation cavity 1125 for accommodating the rotating shaft drive assembly, and the accommodation groove 1122 and the installation cavity 1125 are spaced apart. After the rotating shaft drive assembly is installed in place, the wear-resistant layer of the rotating shaft drive assembly forms a slope for limiting the rotating shaft.
  • Each drive unit has its own connection circuit board 1124 for current flow.
  • the connection circuit board is a PCB printed circuit board. There is a line on the connection circuit board 1124 that is in electrical communication with the rotary drive assembly; each rotary shaft drive assembly corresponds to an adapter
  • the circuit board 1131, the transfer circuit board 1131 is a PCB printed circuit board, and there is a communication line on the transfer circuit board 1131; the current connecting the circuit board 1124 is collected on the connection circuit board 1131, and the transfer circuit board 1131 is connected to the conveying wire
  • the wire is connected to the signal connector on the sample rod.
  • the signal connector is connected to an external signal source and outputs a control signal.
  • the circuit board is used to realize the transmission of electrical signals to avoid the interference of the wires with the rotation of the rotating shaft.
  • the adapter circuit board 1131 is fixed to the frame 112, and the rotating shaft 110 is located below the adapter circuit board 1131, see FIG.
  • the adapter circuit board 1131 is located between the pressing plate 1093 and the rotating shaft driving assembly.
  • the transfer circuit board 1131 is a PCB printed circuit board.
  • the solderable area of the drive unit 111 is limited and the soldering is not strong. Using the transfer circuit board 1131 can reduce the contact with the wires on the drive unit during the assembly process to protect the soldering. point. Connect 6 wires from the two drive units on the left and right of the adapter circuit board 1131 (including 9 wires in the drive unit under the pressure plate during three-point drive) into 3 wires to simplify the electrical connection.
  • the connecting circuit board 1124 and the switching circuit board 1131 are electrically connected by wires.
  • the skeleton 112 has a cylindrical shape, a groove is cut on one side of the skeleton 112, the groove penetrates the axial direction of the skeleton 112, the accommodating groove 1122 and the installation cavity 1125 are located on the groove; the arc surface of the skeleton 112 is used as the bottom, and the groove
  • the opening is the top, and there is a notch at the position where the connecting circuit board 1124 is placed, and the notch is formed by cutting away part of the skeleton wall from the top to the bottom.
  • the walls at both ends of the notch serve to position and connect the circuit board 1124.
  • each connecting circuit board 1124 is less than or equal to the wall thickness of the skeleton, and the connecting circuit board 1124 is fixed to the top surface of the notch with screws.
  • the plane of the skeleton wall where the switching circuit board 1131 is installed is higher than the plane of the skeleton wall where the connection circuit board 1124 is installed.
  • the transfer circuit board 1131 is partially suspended and installed with the connection circuit board 1124 below it, which saves installation space; and, there is a gap between the transfer circuit board 1131 and the connection circuit board 1124 to avoid short circuit of the wires.
  • the frame 112 is provided with mounting screw holes 1126, and the screw holes 1126 penetrate the frame 112 from top to bottom.
  • the threaded holes 1126 are all through holes, which is convenient for cleaning the skeleton 112, keeping the sample rod clean, and avoiding contamination and interference with the sample cavity in the transmission electron microscope.
  • Insert the optical fiber in the sample rod the function of the optical fiber is: 1) Use the light source to adjust to a specific spectrum of light, pass through the electron microscope, irradiate the sample, and apply an electromagnetic field; 2) Collect the light emitted/reflected by the sample and exit the electron microscope for measurement And analysis, such as: measuring the black body radiation emitted by the sample to measure the sample temperature.
  • the fiber groove 1127 is opened on the side of the frame 112, and the fiber groove 1127 penetrates the frame 112 axially.
  • the optical fiber passes through the optical fiber groove 1127, which can prevent the optical fiber from being worn.
  • the head of the sample rod has a front end circuit board 1129.
  • the front end circuit board 1129 is connected to the fiber slot 1127, and the front end circuit board 1129 and the fiber slot 1127 are located on the same straight line.
  • the reason why the fiber slot 1127 is opened on the side of the frame 112 is because there is a front end circuit board 1129 at the head of the sample rod.
  • the fiber slot 1127 is connected to the front end circuit board 1129.
  • the front end circuit board 1129 has the function of guiding the optical fiber 1130. At the front end circuit board 1129, the optical fiber head has a small bending amplitude. If the fiber head is bent too much, it will cause light wave attenuation and even break the fiber.
  • the front-end circuit board 1129 is mounted on the frame through a mounting block 1132.
  • the mounting block 1132 fixes the front-end circuit board 1129 to the frame 112 with bolts.
  • the front-end circuit board 1129 has a guide plane 1133 for guiding the optical fiber, and the guide plane 1133 is flush with the fiber slot 1127.
  • the guide plane 1133 extends toward the sample holder, and the optical fiber approaches the sample along the guide plane 1133.
  • Two optical fiber slots 1127 are symmetrically formed on the frame 112.
  • the front-end circuit board 1129 has a guide plane 1133 arranged symmetrically, and the guide plane 1133 and the fiber slot 1127 are connected one by one.
  • fiber 1130 can choose any one fiber slot 1127 through, or use two fibers 1130, respectively through two fiber slots 1127, such as through a different spectrum, or one fiber to emit light, another collection Light.
  • the fiber slot 1127 and the connection circuit board 1124 are located on the same straight line. That is, the connection circuit board is arranged along the route of the fiber slot 1127, and the lead wires of the connection circuit board 1124 can be led out from the inner wall of the skeleton 112 or can pass through the fiber slot 1127. In this way, the arrangement of the wires and the rotation of the rotating shaft 110 do not interfere with each other.
  • the optical fiber groove 1127 is linear, and the optical fiber groove 1127 can accommodate at least an optical fiber with a diameter of 0.5 mm.
  • the wires connecting the front-end circuit board need to be connected to the external control box.
  • the wires pass outside the skeleton 109.
  • the long-term contact friction not only causes wear on the wires, but also has a small wire diameter and a variety of wires that are tangled with each other.
  • the bottom of the frame 112 is provided with a wire passage 1128 for the passage of the wire, which can avoid the wear and entanglement of the wire.
  • the bottom of the skeleton 112 is provided with a thread-through groove 1128, the thread-through groove 1128 penetrates the skeleton 112 in the axial direction, and the thread-through groove 1128 is a groove open to the bottom.
  • the piezoelectric ceramic sheet used to drive the translation or rotation of the rotating shaft is a piezoelectric ceramic shear sheet that will undergo shear deformation under the action of an applied electric field along the thickness direction.
  • both sides of the piezoelectric ceramic sheet are evenly coated with conductive coatings, which are upper electrode and lower electrode.
  • the driving unit 111 has a substrate 1111, a piezoelectric ceramic sheet 1112, and a wear-resistant sheet 113.
  • the substrate 1111 has a ceramic sheet region 1113 and an electrode region 1114.
  • the piezoelectric ceramic sheets are stacked and bonded to There are a plurality of lines on the ceramic plate area 1113 and the electrode area 1114, and the lines are electrically connected to the conductive coating on the surface of the piezoelectric ceramic plate.
  • the ceramic sheet region 1113 has one piezoelectric ceramic sheet, or at least two piezoelectric ceramic sheets 1112 are stacked. When there are at least two piezoelectric ceramic sheets 1112, the directions of expansion and contraction of the piezoelectric ceramic sheets 1112 are different from each other.
  • the substrate 1111 is a PCB printed circuit board.
  • the substrate 1111 is a metal-based PCB printed circuit board.
  • the substrate 1111 is an aluminum-based PCB printed circuit board.
  • the substrate 1111 has recesses and a pair of mounting holes 1116, and the mounting holes 1116 are used as the front and rear ends of the substrate 1111, the ceramic sheet region 1113 and the electrode region 1114 are located at the center of the substrate, and the recesses are located at the front and rear ends of the substrate 1111 , Around the mounting hole; the ceramic sheet region 1113 and the electrode region 1114 are located on the left and right sides of the substrate 1111.
  • the lower electrode of the lowermost piezoelectric ceramic sheet is in direct contact with the ceramic sheet region 1113 on the substrate 1111, and is connected to the electrode region 1114 on the substrate 1111 through a line on the ceramic sheet region 1113; the upper layer of the uppermost piezoelectric ceramic sheet
  • the electrode surface has an area A and an area B; the area A is pasted with a wear-resistant sheet 113; the area B is electrically connected to an adapter wire; one end of the adapter wire is electrically connected to the electrode area 1114 on the substrate 1111.
  • the transfer wire is soldered to the area B; or, the transfer wire is adhered to the area B with conductive glue.
  • the upper electrode of each piezoelectric ceramic sheet except for the uppermost piezoelectric ceramic sheet has an overlapping area and an exposed area;
  • the lower electrode of the piezoelectric ceramic sheet on the upper layer is electrically connected;
  • the exposed area is electrically connected to an adapter wire; one end of the adapter wire is electrically connected to the electrode area 1114 on the substrate.
  • the adapter wire is soldered to the exposed area; or, the adapter wire is adhered to the exposed area with conductive glue.
  • the transfer wire is soldered to the electrode region 1114 on the substrate 1111.
  • the overlapping area is in direct contact with the lower electrode of the piezoelectric ceramic sheet above the piezoelectric ceramic sheet.
  • the driving unit includes an electrode plate and a piezoelectric ceramic sheet, and the piezoelectric ceramic sheet is adhesively fixed to the surface of the electrode plate.
  • the electrode plate is a conductor, and the electrode plate is electrically connected to the lead wire.
  • the driving unit includes a first electrode plate 1117, a first piezoelectric ceramic sheet 1118, and a second electrode plate 1119.
  • the first piezoelectric ceramic sheet 1118 is shear-deformed along the axis of the rotating shaft 110, or the first piezoelectric The ceramic sheet 1118 is sheared and deformed in the circumferential direction along the rotation axis; the first piezoelectric ceramic sheet 1118 is between the first electrode plate 1117 and the second electrode plate 1119, and the first electrode plate 1117 and the second electrode plate 1119 have respective lead ends .
  • the driving unit includes a first electrode plate 1117, a first piezoelectric ceramic sheet 1118, a second electrode plate 1119, a second piezoelectric ceramic sheet 1110, and a third electrode plate 1120;
  • the installation order is first electrode plate 1117, The first piezoelectric ceramic sheet 1118, the second electrode plate 1119, the second piezoelectric ceramic sheet 1110, and the third electrode plate 1120; the shear deformation direction of the first piezoelectric ceramic sheet 1118 and the shear of the second piezoelectric ceramic sheet 1110 The direction of shear deformation is different; the third electrode plate 1120 is close to the rotating shaft 110 but not in contact with the rotating shaft 110.
  • the first electrode plate 1117 is adhesively fixed on the insulating layer
  • the insulating layer is adhesively fixed on the frame or the casing
  • the third electrode plate 1120 is provided with a wear-resistant layer 113 in contact with the rotating shaft.
  • the first, second, and third are only to illustrate that there are three electrode plates; the first and second are only to illustrate that there are two piezoelectric ceramic sheets.
  • the first electrode plate, the insulating layer and the skeleton can be equivalent to a capacitive load in the circuit, and the voltage required to drive each piezoelectric ceramic sheet is relatively high, so when driving each piezoelectric ceramic sheet with a high-frequency signal
  • the voltage signal is easy to leak to the skeleton, which may damage the electron microscope. Therefore, keeping the first electrode plate 1117 grounded can reduce the voltage leaking to the skeleton.
  • the end of the rotating shaft is provided with a magnet 1101, and the frame 112 is provided with a lead-out circuit board 1106.
  • the magnetic field changes with rotation and back-and-forth movement. Since the projection angle is required for three-dimensional reconstruction, the rotation angle of the rotating shaft needs to be measured.
  • the moving distance of the measuring rotating shaft is to make the sample located at the position when the magnetic field sensor is calibrated, so that the error of measuring the rotating angle of the rotating shaft is smaller.
  • the current sample rod is driven by three degrees of freedom, and the sample rod is driven by four degrees of freedom, which increases the axial rotation of the rotating shaft, and provides a projection angle for three-dimensional reconstruction by measuring the rotating angle of the rotating shaft.
  • the end of the rotating shaft 110 is provided with a magnet 1101, the frame 112 is provided with a lead circuit board 1106, the frame 112 is notched, the lead circuit board 1106 includes a bent portion 1105, the bent portion 1105 is located in the gap, and the magnetic field sensor 1103 is fixed to the bent portion 1105 .
  • the magnetic field sensor 1103 is placed in the gap to reduce the occupied space, thereby reducing the outer diameter of the suit skeleton.
  • the space of the notch is much larger than the space required to accommodate the magnetic field sensor 1103, which provides enough operation space for the disassembly and maintenance of the magnetic field sensor 1103.
  • the lead-out circuit board 1106 includes a flat portion 1104, the flat portion 1104 and the bent portion 1105 are bent to cover the frame 112, the flat portion 1104 and the bent portion 1105 are connected by a wire, and the magnetic field sensor 1103 and the bent portion 1105 are soldered connection.
  • the lead-out circuit board 1106 is a PCB printed circuit board. The solder connection between the magnetic field sensor 1103 and the lead-out circuit board 1106 not only fixes the magnetic field sensor 1103, but also shorts one pair of pins on the lead-out circuit board 1106, reducing the number of wires that need to be connected.
  • the flat portion 1104 and the bent portion 1105 are in an “L” shape, and the magnetic field sensor 1103 is opposed to the magnet 1101.
  • bent circuit boards occupies a small area and is easy to disassemble. If you do not bend the circuit board, there is not enough space for screws, and it needs to be fixed by glue, which is difficult to disassemble and repair.
  • the lead-out circuit board 1106 has two sets of lead-out terminals, one set of lead-out terminals is electrically connected to the wires of the driving unit 111, and the other set of lead-out terminal sample rod electrical connectors are connected.
  • the method of using the multi-degree-of-freedom sample rod for in-situ dynamic three-dimensional reconstruction of the sample includes the following steps:
  • three-dimensional reconstruction refers to the establishment of a mathematical model suitable for computer representation and processing of three-dimensional objects, which belongs to the prior art.
  • Fig. 23 is a performance comparison list of the present invention and the existing sample rod, which is currently the only four-degree-of-freedom sample rod.

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Abstract

一种多自由度样品杆,包括外壳(109)和转轴(110),外壳(109)与转轴(110)之间设有骨架(112),骨架(112)与外壳(109)、转轴(110)同轴;可选地,骨架(112)和转轴(110)之间设有至少一组转轴驱动组件,样品杆上设有纳米定位器,纳米定位器的尾端设有静电导出件。

Description

多自由度样品杆 技术领域
本发明涉及电子显微镜、透射电镜下使用的样品杆。
背景技术
透射电子显微镜(TEM)可以看到在普通光学显微镜下无法看清的小于0.2μm的细微结构,这些结构称为亚显微结构或超微结构。1932年Ruska发明了以电子束为光源的透射电子显微镜,目前TEM的分辨力可达0.2nm。
原位观察技术在透射电子显微学研究中有着悠久的历史。通过在样品上施加各种物理作用,利用透射电子显微镜(透射电镜)来观察材料的微观结构和化学状态的变化,可以直观地研究材料或器件在实际使用过程中的性能表现,对于材料性能的研究有着重要的实际意义。透射电镜中的原位技术其难度在于不但要将物理作用准确地施加在样品上,同时还要满足一系列苛刻的条件,比如要维持电镜系统的超高真空度,保证样品台极高的稳定度,且不能干扰成像光路,整个结构必须紧凑以适用于透射电镜狭小的样品室等。因此,原位电镜技术的难点主要体现在原位样品杆的研究和制作上。
瑞典K.Svensson等人在2003年发表的文章《Compact design of a transmission electron microscope-scanning tunneling microscope holder with three-dimensional coarse motion》公开了一种三维压电探针,这种三维压电探针是透射电镜样品杆的一部分,压电探针包括一根压电陶瓷管和一颗小球,小球固定于压电陶瓷管末端,小球上装有通过柔性丝爪抓住小球的样品夹持器,压电陶瓷管控制小球作“缓慢移动、快速撤回”的微小幅度(压电陶瓷管轴向方向2.5微米以下、其余两个方向30微米以下)的循环运动。柔性丝爪通过摩擦力抓紧小球,压电陶瓷管作循环运动,样品夹持器通过柔性丝爪与小球之间的摩擦力被一步步甩动,由此产生行程较大、步长较大的位移控制(粗调)。结合压电陶瓷管本身产生的行程较小、连续可调的位移控制(精调),可以在狭小空间内累积实现三个自由度(轴向平移一个自由度、以及绕小球旋转两个自由度)的较大行程(约3mm)的精确的位移控制。这种三维压电探针己运用于美国FEl公司的NanoEx 3D STM/EP系统和NanoEx 3D lndentor系统,实现透射电子显微镜下的原位STM、原位压痕和电气探查。
这种三维探针的缺点在于:1、柔性丝爪易变形,为了保持它与小球之间的摩擦力,需要经常调整柔性丝爪的形状,但柔性丝爪有多根,无法保证每根柔性丝爪的一致性,从而造成三维探针随着使用的时间和次数,其可靠性和精度越来越低。2、柔性丝爪的长度使样品夹持器与小球之间有间隙,小球循环运动时,使样品夹持器顺着丝爪远离小球或者靠近小球,从而实现样品的轴向位移,但样品夹持器通过柔性丝爪悬挂在小球上,样品夹持器及其上的样品受重力作用会向下坠,位置精度不高。而透射电镜中的观测视野范围是纳米和微米级,样品受重力作用的位置偏差很可能导致样品上的待观察区域偏离电镜的观测视野范围而无法观察;并且位置偏差的存在导致很难将样品的待观测区域调整到适合观察的位置和角度。3、探针夹持装置沿压电陶瓷管轴向方向前后运动时,柔性丝爪的形状与上述摩擦力之间的关系复杂,调整其形状难以保证该摩擦力始终合适。加上探针夹持装置受重力的影响,使得在粗调时容易产生耦合运动,难以准确控制探针;甚至由于柔性丝爪的形状调整不当,不能抓住小球,可能使探针夹持装置掉落到设备内部,造成设备损坏。
发明内容
一种多自由度样品杆,样品杆上设有纳米定位器,纳米定位器包括一根压电陶瓷管和一颗关节球,关节球固定于压电陶瓷管末端,关节球上装有加持机构,夹持机构头端设有样品夹嘴,压电陶瓷管控制关节球作“缓慢移动、快速撤回”的微小幅度的循环运动,夹持机构通过摩擦力抓紧关节球,压电陶瓷管作循环运动,样品夹嘴通过夹持机构与关节球之间的摩擦力被一步步甩动,由此产生行程较大、步长较大的位移控制;结合压电陶瓷管本身产生的行 程较小、连续可调的位移控制。
本发明的第一方面,目的在于提供一种具有精确的绕小球球面转动和样品杆轴向自转驱动能力,且在重复使用中性能稳定的多自由度样品杆。
多自由度样品杆,样品杆上设有纳米定位器,纳米定位器包括驱动件、关节球和压件组件,关节球与驱动件固定,压件组件包括至少两个压件和弹性连接组件,弹性连接组件连接相邻的压件,压件抱住关节球,压件与关节球之间具有预紧力。比如压电陶瓷管作为驱动件。驱动件、关节球和压件组件构成夹持机构。
压件
压件用于抱住关节球,在压电陶瓷管(驱动件)未产生运动时,压件起到稳定支撑样品和样品夹持器的作用,当压电陶瓷管(驱动件)未产生运动时,压件与关节球之间的摩擦力使压件能够累积的相对关节球转动或摆动。
作为优选的方案,每个压件分别具有凹陷部和连接部,弹性连接组件设于相邻压件的连接部之间,所有压件的凹陷部组成与关节球配合的凹窝。凹窝与关节球线接触或者面接触或者点接触;弹性连接组件使压件与关节球之间具有预紧力,当关节球静止、或者驱动件带着关节球缓慢运动时,关节球与压件之间的静摩擦力使压件相对关节球静止。当驱动件带着关节球快速复位时,关节球和压件之间产生滑动摩擦力,关节球复位时,压件保持原位、不跟随关节球复位,或者虽随关节球产生复位运动,但运动行程小于关节球复位行程。
优选的,凹窝呈半球形,或者V形,或者圆锥形。
优选的,压件为一体式的板体,凹陷部位于板体的中央。
优选的,第一压件和第二压件分别位于关节球两侧。或者,第一压件在上,第二压件在下,第二压件的凹窝为通孔。通孔的内壁呈半球形、V形或圆锥形等。优选的,第一压件设有样品夹具。
优选的,压件位于关节球的外侧。样品杆直立放置时,纳米定位器朝上,两侧是以样品杆直立放置时、左右前后为外侧。优选的,压件上设有样品夹持部。当所有压件装配到位时,样品夹持部组合成一个样品夹具,样品夹具用于安装样品。安装时,用压件从关节球的两侧抱住关节球,弹性连接组件提供压件与关节球之间的预紧力。
作为优选的方案,压件包括第一压件和第二压件,第一压件的凹陷部和第二压件的凹陷部周围分别均匀分布多个安装位,每个安装位对应一个弹性连接组件,第一压件的安装位与第二压件的安装位对位。如此,弹性连接组件一端安装于第一压件的安装位,另一端安装于第二压件的安装位。
作为优选的方案,第一压件的凹窝表面有耐磨层。优选的,第二压件的凹窝表面有耐磨层。
弹性连接组件
弹性连接组件用于为提供压件与关节球之间的压力。
作为优选的方案,弹性连接组件为弹簧或弹性材料制成的弹性柱(如硅胶柱、橡胶柱等),弹性连接组件一端与第一压件固定,另一端与第二压件固定。两个压件抱住关节球后,弹性连接组件处于形变状态,弹性连接组件的回复力提供两个压件与关节球之间的预紧力。
或者,弹性连接组件由螺杆和弹簧组成,弹簧套装于螺杆,弹簧位于螺杆和第一压件之间,第二压件的安装位是跟螺杆啮合的螺孔。螺杆与第二压件的安装位啮合后,弹簧处于被压缩状态,弹簧将第一压件向第二压件推,弹簧提供第一压件、第二压件跟关节球之间的预紧力。
优选的,第一压件的安装位是通孔,通孔与螺杆间隙配合。通孔与螺杆之间无摩擦,有利于弹簧推动第一压件。
优选的,螺杆伸出第二压件的安装孔,或者螺杆与第二压件之间有固定部。比如,第二 压件安装到位后,将螺杆和第二压件焊接固定、或粘接固定等,或破坏螺杆上的螺纹。这是因为,关节球循环运动而带动第一压件和第二压件位移时,第一压件和第二压件甩动会造成螺杆与第二压件之间的振动,造成螺杆松动甚至脱离第二压件;螺杆松动将影响位置的精确控制;螺杆脱离第二压件,则造成第一压件和样品掉落,损坏电镜。
用螺杆和弹簧的方式,通过螺杆旋紧的程度来调整压件与关节球之间的预紧力,降低了对弹性本身的设计制造要求。
驱动件
本发明的第二个方面,目的在于提供一种能够驱动样品绕关节球的球面多角度摆动或转动的驱动件结构。驱动件为压电陶瓷管,通过在压电陶瓷管上设置导电区域,从而控制压件、样品夹持器和样品相对关节球的摆动方向。
作为优选的方案,驱动件为压电陶瓷管,压电陶瓷管是呈中空的管体,压电陶瓷管一端与关节球固定,另一端安装于样品杆;压电陶瓷管具有内表面和外表面,压电陶瓷管的一个表面上设置多个导电区域组,每个导电区域组包括两个对称的导电区域,所有导电区域相互独立,每个导电区域有导电线;压电陶瓷管的另一个表面为整区域导电部。整区域导电部是指导电涂层完整覆盖另一个表面。
优选的,导电区域组设于压电陶瓷管的外表面,整区域导电部设于压电陶瓷管的内表面。或者,导电区域组设于压电陶瓷管的内表面,整区域导电部设于压电陶瓷管的外表面。如,导电区域组沿压电陶瓷管的外(内)表面均匀分布,则整区域导电部覆盖内(外)表面。
优选的,相邻的导电区域之间有绝缘涂层。
优选的,每个导电区域组的两个导电区域的电压方向相反。
作为优选的方案,关节球通过球座与压电陶瓷管相连,球座包括与关节球固定的连接杆和与压电陶瓷管固定的连接座,连接杆的直径比关节球的直径小。
作为优选的方案,连接杆与连接座为可拆卸式紧固连接。如,螺纹连接,键连接等。安装时,先将连接杆穿过第二压件的凹窝通孔,第二压件的凹窝与关节球接触,再将连接杆与连接座固定。由此,方便第二压件的拆装和更换。
静电导出
本发明的第三个方面,在于提供一种能够将透射电子显微镜中由于电子束成像而造成的静电积聚向外导出的样品杆。
由于透射电子显微镜以电子束成像,电子束照射到样品时,样品的待观测区域上会积累静电而产生静电场,静电场会偏转电子束,影响电子束成像,因此需要将样品的待观测区域上的静电向外引出。
作为优选的方案:当样品是导体或半导体时,纳米驱动器的头端设有装载样品的套管,套管上装有锁紧样品的预紧螺钉,纳米驱动器设有静电导出件,预紧螺钉和静电导出件均能够导电,纳米驱动器上设置有连通预紧螺钉和静电导出件的电通路,静电导出件与导线连接,导线接地,或接到由外部设备提供的恒压电源上,或接到样品杆杆身,进而接到透射电镜上。如此,样品的待观测区域上的静电通过样品传递到预紧螺钉,预紧螺钉经纳米驱动器上的电通路到达静电导出件,静电导出件上的电流经导线向外引出。
优选的,电通路可以是连接预紧螺钉和静电导出件的导线,只需要将导线长度设置冗余,使导线不影响纳米驱动器的活动即可。或者,纳米驱动器采用上述的结构,套管设于第一压件,静电导出件固定安装于第二压件,第一压件、套管和第二压件均为导体,第一压件和第二压件之间至少有一个弹性连接组件,弹性连接组件包括螺杆和弹簧,螺杆和弹簧均为导体,第一压件与螺杆对应的通孔表面保持导电。如此,静电的流向为:样品→预紧螺钉→第一压件→弹簧→螺杆→第二压件→静电导出件。
优选的,静电导出件为导电螺钉,第二压件上有跟导电螺钉配合的螺孔,导电螺钉的螺 帽朝远离第一压件的方向,导线位于导电螺钉的螺帽和第二压件之间。这是因为,这样能方面安装导电螺钉、将导线固定到导电螺钉。或者,导线与导电螺钉焊接,导线直接焊接到导电螺钉上,使导线连接更稳固。
优选的,导电螺钉的螺杆部位于第二压件内。也就是说,导电螺钉除了头部以外,其余部分位于第二压件内,其尾部不伸出第二压件、更不旋入第一压件内。如此,避免第一压件、关节球和第二压件之间的相对运动影响导电螺钉的稳定性。
优选的,导电螺钉的头部外露于第二压件。这样,导线可以压紧在导电螺钉和第二压件的表面之间,导线不用嵌入第二压件的螺孔内,导线不容易断。
优选的,导电螺钉的尾部与第二压件点焊固定。点焊将导电螺钉固定在第二压件内,保持电流传输的稳定性,也避免导电螺钉脱离第二压件、跌落。透射电镜非常昂贵且维修困难,一旦零件或样品等在透射电镜的样品腔内跌落,将造成巨大损失,且样品腔空间有限,跌落的部件难以取出,因此,样品杆各个零件的连接可靠性非常重要。
样品夹嘴
本发明的第四个方面,目的在于提供一种能够将各种粗细型号的样品都稳定装夹,并且能够一直稳定的出现在透射电镜的观察视域内的样品杆。
样品需要通过样品夹嘴装载在样品杆上。比如,样品是一根Φ0.3mm,长10mm的棒状。而样品的待观察区域是样品一端的厚度100nm以下的区域,如针尖或附着的纳米颗粒等。每个样品上可能有多个待观察区域。在做样品观测实验时,样品作绕轴转动,为了使样品的待观测区域始终保持在透射电镜观测视野内,要使样品的待观测区域尽量靠近转轴。通常安装样品的方式是:在样品杆前端设置套管,锁紧螺钉从一侧将样品压紧于套管壁上,而为了使样品能够顺利、无损地装入套管内,套管内径需要比样品粗,因此样品的待观测区域必然会偏离样品杆的中轴。但,透射电子显微镜的观测尺度通常是微米、纳米级,在观测样品的待观测区域时,很可能压电搓动机构旋转样品后样品的待观测区域超出透射电镜观测视野。为能够观测各种尺寸的样品,设置样品夹嘴用于安装样品,样品和样品夹嘴作为样品组件装入样品杆前端。
作为优选的方案,样品夹嘴包括夹紧部和连接部,样品装载于夹紧部。装夹样品时,将样品部分地插入铜管,然后用工具(如钳子等)将插入的铜管一端夹紧、使该段铜管内表面与样品贴合,形成拱起,为夹紧部,从而将样品限制在拱起处,完成样品与样品夹嘴的装配。样品夹嘴的连接部与套管间隙配合,例如,套管呈圆形,则样品夹嘴的连接部呈圆柱形,只要连接部能够与套管间隙配合即可。这样,预紧螺钉直接抵紧样品夹嘴,任意尺寸的样品都可以安装在样品夹嘴上,再将样品组件安装在样品杆上,这样,样品杆可装载的样品通用性好。预紧螺钉只需要将样品夹嘴抵紧即可,预紧螺钉不接触样品,不会对样品造成损伤,且样品夹嘴与样品杆之间的安装间隙可以设置得尽量小,从而保证样品跟样品杆轴尽量接近。
优选的,夹紧部中线位置具有装样孔。装样孔设置于夹紧部的中线位置,利于样品的平衡夹紧。
优选的,装样孔两侧对称开有连通装样孔的缓冲间隙。当装样孔的尺寸小于样品尺寸时,缓冲间隙能够使装样孔有尺寸增大的空间,从而使样品顺利地装入装样孔中。
优选的,夹紧部从底部向顶部逐渐收缩,顶部呈扁状,夹紧部呈中空状。顶部呈扁状减小了样品夹嘴的占用空间,方便操作样品。中空的夹紧部,增加样品的深入长度。
优选的,夹紧部和连接部固定连接或一体成型,夹紧部在上,连接部在下。固定连接的方式可以为焊接。一体成型的方式可以保证夹紧部和连接部平滑连接。
优选的,连接部为实心柱,或者连接部为空心。实心柱不容易发生挤压形变,预紧螺钉抵住实心柱,保持样品-样品夹嘴安装的可靠性。连接部为空心时,进一步增加样品的伸入长度,而且减少了夹嘴的制造成本。
优选的,连接部上有凹坑。预紧螺钉对应插入连接部的凹坑,在锁紧连接部的同时,还能阻止样品自转位移。
优选的,样品夹嘴为导体。从而便于将样品的待观测区域上积聚的静电向外导出。
优选的,样品夹嘴可以是薄壁铜管。使用薄壁铜管,成本低,可适配不同直径的样品。
当样品杆具有夹嘴时,此时静电流向为:样品→夹嘴→预紧螺钉→第一压件→弹簧→螺杆→第二压件→静电导出件。
样品对准转轴轴线的调整方法
本发明的第五个方面,其目的在于提供一种能将样品的待观测区域始终在透射电镜观测视野内的样品调整方法。
为了在转轴自转时,样品的待观测区域始终在透射电镜观测视野内,需要使样品的待观测区域尽量接近转轴的旋转轴线。
将样品的待观测区域调整到转轴的旋转轴线上的方法,包括以下步骤:
S1、制作上述样品夹嘴,将样品装夹在样品夹嘴内,再将样品夹嘴装入样品杆夹具;
S2、将带有样品的样品杆插入透射电镜,找到样品的一个待观测区域,并选取样品的待观测区域的一个特征点,选取原则是该特征点在旋转过程中应易于辨别;
S3、使转轴自转到0°,记录样品特征点投影到电镜屏幕上的位置为D1;使转轴自转到180°,记录样品特征点投影到电镜屏幕上的位置为D2;
S4、驱动纳米定位器,沿使用Y方向驱动,将样品特征点投影到电镜屏幕上的位置移动到D1和D2的中心位置Dz;
S5、使转轴自转到90°,驱动纳米定位器,沿Z方向驱动将样品特征点投影到电镜屏幕上的位置移动到Dz;
S6、使转轴自转到0°,驱动纳米定位器,沿Y方向驱动将样品特征点投影到电镜屏幕上的位置移动到Dz;
S7、重复S5-S6,直到来回旋转时样品特征点投影到电镜屏幕上的位置在电镜下的横向位置不变;
S8、增大透射电镜放大倍数,并重复S3-S7。直到机械误差造成的随机移动不可忽略,则说明样品特征点准确地位于转轴上。
旋转过程中可能会耦合前后移动,每次旋转完成后需要驱动压电搓动机构,沿X方向驱动将样品特征点投影到电镜屏幕上的位置移动到相同的X位置。
透射电镜样品杆的整体直径约为15mm,考虑到需要安装密封用的O圈槽,并预留足够的结构刚度,转轴的空间直径不超过10mm。
样品杆轴线的自定位
本发明的第六个方面,其目的在于提供一种样品在绕样品杆轴向自转后,能够自动复位到跟样品杆中轴线重合的样品杆。
为实现样品绕轴360°自转,将样品杆设置为包括外壳和转轴,外壳与转轴同轴,转轴位于外壳的内腔;内腔内部设有搓动转轴自转的压电搓动机构和自定位机构,自定位机构具有对称的斜面,斜面与转轴接触。转轴无论怎么转动,由于斜面的作用,转轴的中心轴总能自动复位到原始位置,从而避免转轴中心移位而导致的样品的待观测区域脱离透射电镜观测视野。优选的,转轴为陶瓷轴。
作为优选的方案,自定位机构包括托块,托块具有对称的斜面,托块的斜面与转轴接触。优选的,托块斜面上具有耐磨层,耐磨层为与转轴的接触部位。优选的,沿转轴的轴向分布有多个托块。
作为优选的方案,自定位机构包括压板,压板具有平板,平板两侧对称设置一个斜坡。转轴被限制在托块和压板之间,使转轴在绕轴自转时不发生上下和左右的位移。优选的,每 个托块对应一个压板,托块在下,压板在上。或者,自定位机构包括多个托块和一个压板。
优选的,压板具有一对安装翼,安装翼上有固定孔;安装翼位于斜坡一端。平板内侧设有耐磨层,耐磨层是与转轴的接触部位。
优选的,外壳与转轴之间有骨架,安装翼通过弹性安装组件装配于骨架。弹性安装组件由螺杆和弹簧组成,弹簧套装于螺杆的杆身,弹簧位于安装翼和螺杆的螺帽之间。弹性安装组件使压板能够沿转轴的径向方向微动,对转轴既有预紧力,又让转轴能够自转。转轴被限制在压板和托块之间,在装配时通过旋转螺杆调节预紧力的大小。装配完成后,使用时弹簧不继续变形。
转轴驱动组件
本发明的第七个方面,目的在于提供一种能够同时驱动转轴自转和轴向移动,或者选择性驱动转轴自转或轴向移动样品杆。
作为优选的方案,外壳与转轴之间有骨架,骨架和转轴之间设有至少一组转轴驱动组件,每一组转轴驱动组件包括驱动单元,驱动单元包括基板和压电陶瓷片,基板为绝缘体,或基板为PCB印制电路板。
驱动转轴轴向移动的一种方案:转轴驱动组件包括轴向驱动单元,轴向驱动单元的压电陶瓷片的剪切变形方向与转轴的轴向一致,压电陶瓷片粘接于基板,压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的或间断的锯齿波等。
驱动转轴自转的一种方案:转轴驱动组件包括自转驱动单元,自转驱动单元的压电陶瓷片的剪切变形方向与转轴的环向一致,压电陶瓷片粘接于基板,压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的或间断的锯齿波等。
转轴自转和轴向移动组合的一种方案:转轴驱动组件的驱动单元包括基板,第一压电陶瓷片和第二压电陶瓷片;第一压电陶瓷片的形变方向和第二压电陶瓷片的形变方向正交,第一压电陶瓷片和第二压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的锯齿波等。
第一压电陶瓷片的形变方向和第二压电陶瓷片的形变方向正交,比如,第一压电陶瓷片的形变方向沿转轴的轴向(为前后方向),用于驱动转轴前后平移,第二压电陶瓷片的形变方向沿转轴的环向(为旋转方向),用于搓动转轴自转。
优选的,第一压电陶瓷片叠在第二压电陶瓷片上,或者,第二压电陶瓷片叠在第一压电陶瓷片上;第一压电陶瓷片和第二压电陶瓷片之间粘接固定。优选的,驱动单元设有耐磨层。耐磨层直接与转轴接触,降低磨损,延长驱动单元的使用寿命。
优选的,第一压电陶瓷片的一侧表面与第二压电陶瓷片的一侧表面导通,共用一根导线。
优选的,转轴驱动组件沿转轴轴向设置三组或五组。优选的,设置五组转轴驱动组件,转轴前后分别对称设置两组转轴驱动组件,中间位置设置一组转轴驱动组件。两组转轴驱动组件使转轴自转和轴向移动的力有限,设置多组转轴驱动组件,对转轴施加同方向的力,利于转轴自转和轴向移动。
骨架
本发明的第八个方面,在于提供一种能够容纳转轴驱动组件和转轴的样品杆。
骨架设置在外壳与转轴之间,骨架与外壳、转轴同轴。骨架作为转轴和外壳之间的过渡部件,在装配时,使转轴与骨架同轴,再将转轴-骨架装入外壳内,使转轴、骨架和外壳同轴,以提高安装精度。另外,骨架还为转轴驱动组件提供安装位置,骨架还起到将转轴和导线分离、避免导线干扰转轴运动的作用。
作为优选的方案,骨架具有与外壳的内壁间隙配合的匹配部、容纳转轴的容纳槽和用于承载配件的安装部,容纳槽具有对称的斜面,安装部上固定有印制电路板,印制电路板上有连接导线。
优选的,托块固定于容纳槽,容纳槽沿骨架轴向设置多段;骨架上设有容纳转轴驱动组件的安装腔,容纳槽和安装腔间隔分布。转轴驱动组件安装到位后,转轴驱动组件的耐磨层形成对转轴限位的斜面。
优选的,每个驱动单元有各自用于电流流通的连接电路板,连接电路板为PCB印制电路板,连接电路板上有跟转动驱动组件电连通的线路;每个转轴驱动组件对应一个转接电路板,转接电路板为PCB印制电路板,转接电路板上有连通线路;连接电路板的电流汇集于转接电路板,转接电路板与输送导线连接,输送导线与样品杆上的信号接头相连。信号接头与外界信号源相连,驱动单元输出控制信号。采用电路板的方式实现电信号传递,避免导线干扰转轴转动。
优选的,转接电路板与骨架固定,转轴位于转接电路板下方。优选的,转接电路板位于压板与转轴驱动组件之间。转接电路板为PCB印制电路板,驱动单元可焊区域面积有限,焊接不牢,用转接电路板可以在装配过程中减小对驱动单元上导线的触碰,以保护焊点。
优选的,连接电路板和转接电路板之间用导线电连接。
优选的,骨架呈圆柱形,骨架一侧切制有槽,槽贯通骨架的轴向,容纳槽和安装腔均位于槽上;以骨架的圆弧面为底,以槽的开口为顶,放置连接电路板的位置有缺口,缺口从顶向下切除部分骨架壁形成。缺口两端的壁起到定位连接电路板的作用。
优选的,每个连接电路板的宽度小于或等于骨架的壁厚,连接电路板用螺钉固定于缺口的顶面。
优选的,安装转接电路板的骨架壁平面高于安装连接电路板的骨架壁平面。这样,转接电路板部分悬空、与其下方的连接电路板交错安装,节约安装空间;并且,转接电路板和连接电路板之间有间隙,避免电线短路。
优选的,骨架上设有安装螺纹孔,螺纹孔从上向下贯穿骨架。螺纹孔均为通孔,便于清洗骨架,保持样品杆洁净,避免污染和干扰透射电镜内的样品腔。
光纤接入
本发明的第九个方面,目的在于提供一种能够将光纤接入样品杆内,从而在透射电镜下原位拍摄样品的变化过程的样品杆。
在样品杆中接入光纤,光纤的作用是:1)用光源调整为特定光谱的光,通入电镜,照射样品,施加电磁场;2)搜集样品发出/反射的光,传出电镜,进行测量和分析,如:测量样品发出的黑体辐射而测得样品温度。
作为优选的方案,光纤槽开设于骨架侧面,光纤槽轴向贯穿骨架。在骨架侧面开设有用于光纤通过的光纤槽,能够避免光纤磨损。
作为优选的方案,样品杆头部具有前端电路板,前端电路板为PCB印制电路板,前端电路板与光纤槽衔接,前端电路板与光纤槽位于同一直线。光纤槽之所以开在骨架侧面,是因为在样品杆头部具有前端电路板,光纤槽与前端电路板衔接,前端电路板具有导引光纤的作用,光纤头部经过前端电路板,光纤头部具有较小的弯曲幅度,如果光纤头部弯曲幅度过大,会引起光信号衰减,甚至折断光纤。光信号衰减,信号的信噪比下降,或低于仪器测量范围无法测量。
优选的,前端电路板通过安装块安装于骨架。优选的,安装块通过螺栓将前端电路板固定于骨架上。前端电路板具有导引光纤的导引平面,导引平面与光纤槽平齐。导引平面向样品夹嘴方向延伸,光纤顺着导引平面靠近样品。
优选的,骨架上对称的开设有两个光纤。相应得,前端电路板具有对称设置的导引平面,导引平面与光纤槽一一衔接。开有两个光纤槽,光纤可以选择任意一个光纤槽通过,或者使用两根光纤,分别通过两个光纤槽,比如通不同的光谱,或者一根光纤发光,另一根搜集光。
优选的,光纤槽与连接电路板位于同一直线上。即连接电路板沿光纤槽所在路线布置, 连接电路板的引出导线可以从骨架内壁引出,也可以从光纤槽中穿过,如此设置,导线的布置与转轴的转动互不干扰。
优选的,光纤槽呈直线状,至少能容纳直径0.5mm的光纤。
电线引出
本发明的第十个方面,在于提供一种能够将样品杆外的信号稳定的输入到样品杆内、从而控制纳米驱动器精确运动,同时,又能将透射电镜样品舱内的静电、样品杆采集到的信息稳定的输出,并且导线之间连接可靠,又不会干扰转轴转动,也不被转轴干扰的样品杆。
连通前端电路板的导线需要与外界的控制箱连接,从骨架外部经过,长期的接触摩擦不仅对导线造成磨损,而且导线直径小,各种导线繁杂,相互之间容易缠绕。在骨架底部开有用于导线通过的过线槽,能够避免导线的磨损和缠绕。
作为优选的方案,骨架的底部开设有过线槽,过线槽轴向贯穿骨架,过线槽为向底敞口的槽。
作为优选的方案,前端电路板的导线从过线槽穿过。
压电陶瓷片与电极的布置
用于驱动转轴平移或自转的压电陶瓷片是在沿厚度方向的外加电场作用下会发生剪切变形的压电陶瓷剪切片。
优选的,压电陶瓷片的两侧表面均匀涂敷了导电涂层,为上层电极和下层电极。
作为优选的方案,驱动单元具有基板、压电陶瓷片和耐磨片,基板上具有陶瓷片区域和电极区域,压电陶瓷片堆叠粘接于陶瓷片区域,电极区域上有复数线路,复数线路与压电陶瓷片表面的导电涂层电连接。
优选的,陶瓷片区域有一个压电陶瓷片,或者堆叠有至少两个压电陶瓷片。
优选的,有至少两个压电陶瓷片时,压电陶瓷片的伸缩方向互不相同。
优选的,基板为PCB印制电路板。
优选的,基板为金属基PCB印制电路板。
优选的,基板为铝基PCB印制电路板。优选的,基板上有凹台和一对安装孔,以安装孔作为基板的前后两端,陶瓷片区域和电极区域位于基板的中央,凹台位于基板的前后两端,在安装孔周围;陶瓷片区域和电极区域位于基板的左右两侧。
优选的,最下层压电陶瓷片的下层电极与基板上的陶瓷片区域直接接触,通过陶瓷片区域上的线路连接到基板上的电极区域;最上层压电陶瓷片的上层电极表面具有A区域和B区域;A区域粘贴有耐磨片;B区域与一根转接导线电连接;转接导线的另一端与基板上的电极区域电连接。
优选的,转接导线锡焊于B区域;或者,转接导线以导电胶水粘接于B区域。
优选的,有多个压电陶瓷片时,除了最上层压电陶瓷片外,每一层压电陶瓷片的上层电极具有重叠区域和外露区域;重叠区域与这层压电陶瓷片的上一层压电陶瓷片的下层电极电连接;外露区域与一根转接导线电连接;转接导线的另一端与基板上的电极区域电连接。
优选的,转接导线锡焊于外露区域;或者,转接导线以导电胶水粘接于外露区域。
优选的,转接导线锡焊于基板上的电极区域。
优选的,重叠区域与这层压电陶瓷片的上一层压电陶瓷片的下层电极直接接触。
优选的,下层电极接地。由于各个压电陶瓷片的上层电极和下层电极可以等效为容性负载,且驱动各个压电陶瓷片所需的电压较高,所以在用高频信号驱动最下层压电陶瓷片时,电压信号容易泄露到骨架上,可能会损坏电镜。因此,使最下层压电陶瓷片的下层电极保持接地,可以减少泄露到骨架上的电压。
或者,另一种压电陶瓷片与电极的布置方式,驱动单元包括电极板和压电陶瓷片,压电陶瓷片粘接固定于电极板表面。电极板为导体,电极板与引出导线电连接。
作为优选的方案,驱动单元包括第一电极板、第一压电陶瓷片和第二电极板,第一压电陶瓷片沿转轴轴向剪切变形,或者第一压电陶瓷片沿转轴环向剪切变形;第一压电陶瓷片在第一电极板和第二电极板之间,第一电极板和第二电极板分别具有各自的引线端。
优选的,驱动单元包括第一电极板,第一压电陶瓷片,第二电极板,第二压电陶瓷片和第三电极板;安装顺序依次为第一电极板、第一压电陶瓷片、第二电极板、第二压电陶瓷片、第三电极板;第一压电陶瓷片的剪切变形方向和第二压电陶瓷片的剪切变形方向不同;第三电极板靠近转轴但不与转轴接触。
优选的,第一电极板粘接固定于绝缘层上,绝缘层粘接固定于骨架或外壳上,第三电极板上设有与转轴接触的耐磨层。第一、第二和第三只是为了说明有三个电极板;第一和第二只是为了说明有两个压电陶瓷片。
优选的,第一电极板接地。由于第一电极板、绝缘层和骨架在电路中可以等效为容性负载,且驱动各个压电陶瓷片所需的电压较高,所以在用高频信号驱动各个压电陶瓷片时,电压信号容易泄露到骨架上,可能会损坏电镜。因此,使第一电极板保持接地,可以减少泄露到骨架上的电压。而以适当的电压信号驱动第二电极板和第三电极板,也能获得所需的电场,不影响驱动功能的实现。
转轴的位置信息
本发明的第十一个方面,目的在于提供一种能够实时获得转轴的转动角度,并且便于安装磁场传感器的样品杆。
转轴末端设有磁铁,骨架设有引出电路板,旋转及前后运动时磁场随之变化,磁场传感器测得磁场,通过磁场能得出转轴的位置信息即转轴的转动角度和移动距离。因为三维重构需要投影角度,所以需测量转轴的转动角度。测转轴的移动距离是为了使样品位于标定磁场传感器时的位置,使测量转轴的转动角度的误差更小。目前的样品杆为三自由度驱动,而本样品杆为四自由度驱动,增加了转轴的轴向转动,通过测量转轴的转动角度,为三维重构提供投影角度。
转轴末端设有磁铁,骨架设有引出电路板,骨架开有缺口,引出电路板包括弯折部,弯折部位于缺口内,磁场传感器固定于弯折部。将磁场传感器放置于缺口内,减小占用空间,从而减小套装骨架的外壳直径。缺口的空间远大于容纳磁场传感器所需要的空间,为拆卸维修磁场传感器提供足够的操作空间。
作为优选的方案,引出电路板包括平面部,平面部和弯折部弯折覆盖于骨架,平面部和弯折部通过导线连接,磁场传感器与弯折部焊锡连接。引出电路板为PCB印制电路板。磁场传感器与引出电路板焊锡连接不仅能固定磁场传感器,而且能对引出电路板上的其中一对引脚作短接,减少需要连接的导线个数。
作为优选的方案,平面部和弯折部呈“L”型,磁场传感器与磁铁相对。使用弯折电路板,占用面积小,容易拆卸。如果不弯折电路板,空间不足以放置螺丝,需要胶粘固定,难以拆卸维修。
优选的,引出电路板具有两组引出端子,一组引出端子与驱动单元的导线电连接,另一组引出端子与样品杆电接头连接。
使用多自由度样品杆进行样品原位动态三维重构的方法
本发明的第十二个方面,目的在于应用前述的样品杆,原位重构透射电镜样品舱内实际发生的样品形态变化的三维重构方法。
使用多自由度样品杆进行样品原位动态三维重构的方法,包括以下步骤:
S1,制作上述样品杆,将样品装入样品杆头端,将样品杆插入透射电镜;
S2、将样品的待观测区域上的一个特征点调整到与样品杆轴线对准;
S3、使转轴累积旋转180°,每隔1°拍摄一张照片;
S4、将步骤S3获得的照片导入电脑,进行三维重构。
本发明的优点在于:
1、通过在纳米定位器设置预紧螺钉、电通路和静电导出件,样品的待观测区域上的静电通过样品传递到预紧螺钉,预紧螺钉经纳米驱动器上的电通路到达静电导出件,静电导出件上的电流经导线向外引出,避免电子束照射到样品时样品的待观测区域上产生静电场而影响电子束成像。
2、由于透射电子显微镜的观测尺度通常是微米、纳米级,在观测的待观测区域时,很可能纳米驱动器旋转样品后样品的待观测区域超出透射电镜观测视野,为能够观测各种尺寸的样品,设置样品夹嘴用于安装样品,样品和样品夹嘴作为样品组件装入样品杆前端。
3、为实现样品绕轴360°自转,将样品杆设置为包括外壳和转轴,外壳与转轴同轴,转轴位于外壳的内腔;内腔中设有搓动转轴自转的压电搓动机构和自定位机构,自定位机构具有对称的斜面,斜面与转轴接触。转轴无论怎么转动,由于斜面的作用,转轴的中心轴总能自动复位到原始位置,从而避免转轴中心移位而导致的样品的待观测区域脱离透射电镜观测视野。
4、样品杆设有骨架,骨架在外壳与转轴之间,骨架与外壳、转轴同轴。骨架作为转轴和外壳之间的过渡部件,在装配时,使转轴与骨架同轴,再将转轴-骨架装入外壳内,使转轴、骨架和外壳同轴,提高安装精度;另外,骨架还为转轴驱动组件提供安装位置,骨架还起到将转轴和导线分离、避免导线干扰转轴运动的作用。
5、在样品杆中接入光纤,光纤的作用一是用光源调整为特定光谱的光,通入电镜,照射样品,施加电磁场;二是搜集样品发出/反射的光,传出电镜,进行测量和分析;在骨架侧面开设有用于光纤通过的光纤槽,前端电路板与光纤槽衔接,在避免光纤磨损的同时,光纤头部由前端电路板引出,光纤头部具有较小的弯曲幅度。
6、样品杆设有转轴驱动组件,转轴驱动组件能够使转轴轴向移动和自转,满足样品的多方位观测。
7、样品杆能够检测转轴位置信息,磁场传感器与引出电路板焊锡连接不仅能固定磁场传感器,而且能对引出电路板上的其中一对引脚作短接,减少需要连接的导线个数;引出电路板包括平面部和弯折部,平面部和弯折部垂直铺设于骨架表面,磁场传感器固定于弯折部,使用弯折电路板,占用面积小,容易拆卸。
8、用弹性连接组件提供压件与关节球之间的预紧力,使压件与关节球之间有可调的稳定的静摩擦力和动摩擦力,用静摩擦力支撑样品和样品夹持器、压件,减小重力对样品运动的影响,提高位移控制精度;纳米定位器包含的部件数量少,且连接关系简洁明了,易于生产、易于调整校准;凹窝与关节球匹配,压件与关节球之间的位置稳定,压件之间的连接关系稳固,避免纳米定位器脱落。
附图说明
图1是样品杆的示意图。
图2为压电陶瓷管的示意图。
图3是本发明在透射电镜下观察样品的待观测区域的效果图,其中a.b.c为使用较大的锯齿波峰-峰值驱动下的单步的大步长运动,d.e.f为使用较小的锯齿波峰-峰值驱动下的单步的小步长运动。
图4是第一种样品夹具的示意图。
图5是第二种样品夹具的示意图。
图6是第三种样品夹具的示意图。
图7是第四种样品夹具的示意图。
图8是静电导出的示意图。
图9是导电螺钉的安装示意图。
图10是样品夹嘴的示意图。
图11是托块和压板配合的示意图。
图12是压板的结构示意图。
图13是驱动单元分布示意图。
图14是压板具有驱动单元的示意图。
图15是三点驱动转轴的示意图。
图16是骨架结构示意图。
图17是第一种压电陶瓷片与电极的布置方式。
图18是第二种压电陶瓷片与电极的布置方式。
图19为转轴位置信息检测示意图。
图20为骨架上具有光纤槽的结构示意图。
图21是骨架上有过线槽的示意图。
图22是带有外壳的样品杆示意图。
图23是本发明与现有的样品杆的性能对比列表。
具体实施方式
图1为多自由度样品杆。如图2所示,样品杆上设有纳米定位器,纳米定位器包括驱动件101、关节球103和压件组件,关节球103与驱动件101固定,压件组件包括至少两个压件105和弹性连接组件104,弹性连接组件104连接相邻的压件,压件组件抱住关节球103,压件与关节球103之间具有预紧力。比如压电陶瓷管作为驱动件101。
压件
在一些实施例中,如图2所示,每个压件分别具有凹陷部1051和连接部1052,弹性连接组件104设于相邻压件的连接部1052之间,所有压件的凹陷部1051组成与关节球103配合的凹窝。凹窝与关节球103线接触或者面接触或者点接触;弹性连接组件1052使压件与关节球103之间具有预紧力,当关节球103静止、或者驱动件101带着关节球103缓慢运动时,关节球103与压件105之间的静摩擦力使压件105相对关节球103静止。当驱动件101带着关节球103快速复位时,关节球103和压件105之间产生滑动摩擦力,关节球103复位时,压件105保持原位、不跟随关节球103复位,或者虽随关节球103产生复位运动,但运动行程小于关节球复位行程。
凹窝呈半球形,或者V形,或者圆锥形。
压件105为一体式的板体,凹陷部1051位于板体的中央。
压件105位于关节球103的外侧。样品杆直立放置时,纳米定位器朝上,两侧是以样品杆直立放置时、左右前后为外侧。优选的,压件105上设有样品夹持部。当所有压件装配到位时,样品夹持部组合成一个样品夹具,样品夹具用于安装样品。安装时,用压件105从关节球103的两侧抱住关节球103,弹性连接组件104提供压件105与关节球103之间的预紧力。
如图2-5所示,在一些实施例中,压件包括第一压件1053和第二压件1054,第一压件1053的凹陷部1051和第二压件1054的凹陷部1051周围分别均匀分布多个安装位,每个安装位对应一个弹性连接组件104,第一压件1053的安装位与第二压件1054的安装位对位。如此,弹性连接组件104一端安装于第一压件1053的安装位,另一端安装于第二压件1054的安装位。第一压件1053在上,第二压件1054在下,第二压件1054的凹窝为通孔。通孔的内壁呈半球形、V形或圆锥形等。第一压件1053设有样品夹具。
或者,第一压件1053和第二压件1054分别位于关节球103两侧。
第一压件1053的凹陷部1051表面有耐磨层。第二压件1054的凹陷部1051表面有耐磨层113。耐磨层有利于保持摩擦力的稳定。关节球103表面有耐磨层,或者关节球103由耐磨材料制成。比如用铝或铝合金制作,并用阳极氧化处理凹陷部的表面和、或关节球表面。
驱动件左侧(或右侧、前侧、后侧)摆动时,通过摩擦力使纳米定位器向该侧移动,进而使样品向该侧移动。样品的移动距离与向上述两片导电涂层施加的相反的恒定电压的电压值成正比。反复观察样品的位置,并据此调整电压值,使样品移动到需要的位置。
弹性连接组件
如图2-5所示,在一些实施例中,弹性连接组件104为弹簧或弹性材料制成的弹性柱(如硅胶柱、橡胶柱等),弹性连接组件104一端与第一压件1053固定,另一端与第二压件1054固定。两个压件抱住关节球103后,弹性连接组件104处于形变状态,弹性连接组件104的回复力提供两个压件与关节球103之间的预紧力。
或者,弹性连接组件由螺杆1041和弹簧1042组成,弹簧1042套装于螺杆1041,弹簧1042位于螺杆1041和第一压件1053之间,第二压件1054的安装位是跟螺杆1041啮合的螺孔。螺杆1041与第二压件1054的安装位啮合后,弹簧1042处于被压缩状态,弹簧1042将第一压件1053向第二压件1054推,弹簧1042提供第一压件1053、第二压件1054跟关节球103之间的预紧力。第一压件1053的安装位是通孔,通孔与螺杆1041间隙配合。通孔与螺杆1041之间无摩擦,有利于弹簧42推动第一压件1053。
在一些实施例中,螺杆1041伸出第二压件1054的安装孔1043,或者螺杆1041与第二压件1054之间有固定部;或者螺杆1041依次穿过第一压件1053、第二压件1054与螺母啮合。比如,第二压件1054安装到位后,将螺杆1041和第二压件1054焊接固定、或粘接固定等,或破坏螺杆上的螺纹。这是因为,关节球103循环运动而带动第一压件1053和第二压件1054位移时,第一压件1053和第二压件1054甩动会造成螺杆1041与第二压件1054之间的振动,造成螺杆1041松动甚至脱离第二压件1054;螺杆1041松动将影响位置的精确控制;螺杆1041脱离第二压件1054,则造成第一压件1053和样品掉落,损坏电镜。将螺杆和第二压件固定,或者设置螺母、预留冗余段螺纹的目的是缓冲或抵抗纳米定位器甩动时的冲击,避免螺杆脱离第二压件1054造成纳米定位器和样品脱落,保持压件与关节球103之间的稳定连接。
用螺杆1041和弹簧1042的方式,通过螺杆1041旋紧的程度来调整压件与关节球103之间的预紧力,降低了对弹性本身的设计制造要求。弹性连接组件104为压件和关节球103之间提供持续、稳定的压力,从而使压件和关节球103之间存在稳定的摩擦力。
驱动件
如图2所示,在一些实施例中,驱动件101为压电陶瓷管,压电陶瓷管的呈中空的管体,压电陶瓷管一端与关节球103固定,另一端安装于样品杆;压电陶瓷管具有内表面和外表面,压电陶瓷管的一个表面上设置多个导电区域组,如图6所示,每个导电区域组包括两个对称的导电区域1011,所有导电区域1011相互独立,每个导电区域1011有导电线;压电陶瓷管的另一个表面为整区域导电部1012。整区域导电部1012是指导电涂层完整覆盖另一个表面。
如图2所示,导电区域组设于压电陶瓷管的外表面,整区域导电部1012设于压电陶瓷管的内表面。或者,导电区域1011组设于压电陶瓷管的内表面,整区域导电部1012设于压电陶瓷管的外表面。如,导电区域组沿压电陶瓷管的外(内)表面均匀分布,则整区域导电部1012覆盖内(外)表面。相邻的导电区域1011之间有绝缘涂层。每个导电区域组的两个导电区域1011的电压方向相反。
在一些实施例中,如图3所示,关节球103通过球座102与压电陶瓷管相连,球座102包括与关节球103固定的连接杆和与压电陶瓷管固定的连接座,连接杆的直径比关节球103 的直径小。连接杆与连接座为可拆卸式紧固连接。如,螺纹连接,键连接等。安装时,先将连接杆穿过第二压件的凹窝通孔,第二压件的凹窝与关节球接触,再将连接杆与连接座固定。由此,方便第二压件的拆装和更换。
将压电陶瓷管的底端固定,用一根导线焊接到压电陶瓷管的内侧面的导电涂层并保持接地,将四根导线分别焊接到压电陶瓷管外侧面的四片导电涂层上,另一端接到电压放大器的各个输出端,然后将电压放大器的各个输入端接到函数信号发生器上。该样品杆的两个自由度可以分别驱动。驱动样品杆任意自由度,使样品在该自由度上移动到需要的位置的办法为:通过导线向压电陶瓷管外侧面上对称的两片导电涂层施加正负相反的锯齿波。该锯齿波可以是连续的,也可以是分脉冲的,如图3所示。导电区域1011越多,关节球103可能的运动方向越多。
如图3所示,对连续的锯齿波,优选的参数为峰-峰值100V,频率100Hz以下,压摆率100V/μs以上。适当降低峰-峰值可以减小运动步长,但峰-峰值过低(在一些案例中,低于40V)会使运动步长急剧降到零,原因可能与摩擦面的微观结构有关。峰-峰值高于100V时会击穿压电陶瓷,破坏压电陶瓷管。频率高于100HZ时会激发压电陶瓷管或整体装置结构的本征振动,使关节球103的运动不再是平面内的“缓慢、快速”运动,纳米定位器的驱动原理不能满足,样品不能运动。降低频率可以降低单位时间内产生的运动步数,控制样品的运动速度。压摆率低于100V/μs时会使得滑动阶段关节球103运动加速度过小,摩擦力能保持运动部件跟随关节球103运动而不产生滑动,样品不能通过累积各步来产生长行程运动。
通过其它观测设备(如光学显微镜、电子显微镜等)观察样品的所在位置,当样品运动到目标位置附近时,向上述对称的导电区域施加相反的恒定电压,使压电陶瓷管的一侧发生伸长,另一侧发生缩短,总体表现为弯曲,进而使固定于压电陶瓷管一端的关节球103向一侧移动。
在一些实施例中,连接杆与连接座为可拆卸式紧固连接。如,螺纹连接,键连接等。由此,方便第一压件的拆装和更换。
如图4所示,样品夹具为套管106,套管106与第一压件1053一体,套管106壁上贯穿安装有预紧螺钉1061。将棒状或管状样品插入套管106内,用预紧螺钉1061压紧样品,则完成样品的装夹。
如图5所示样品夹具的另一种形式,样品夹具为圆锥,圆锥1062与第一压件1053一体。将粉末状样品胶粘在圆锥1062顶点,即完成样品的装夹。
如图6所示样品夹具的另一种形式,样品夹具包括基体1063,垫片1064和紧固螺钉1065;基体1063分为连接部和夹持部,连接部为与第一压件固定的圆柱体,夹持部为切制有平面的不完整圆柱体,垫片1064通过紧固螺钉1065紧固于夹持部,夹持部的平面与垫片1064之间用于装夹样品1066。
如图7所示样品夹具的另一种形式,样品夹具包括夹嘴108和套管106,夹嘴108位于套管106中,套管106与第一压件1053一体,套管106壁上贯穿安装有预紧螺钉1061。将棒状或管状样品插入夹嘴108内,用预紧螺钉1061压紧夹嘴108,则完成样品的装夹。
静电导出
由于透射电子显微镜以电子束成像,电子束照射到样品时,样品的待观测区域上会积累静电而产生静电场,静电场会偏转电子束,影响电子束成像,因此需要将样品的待观测区域上的静电向外引出。
在一些实施例中,如图8和图9所示,当样品是导体或半导体时,纳米驱动器的头端设有装载样品的套管106,套管上装有锁紧样品的预紧螺钉1061,纳米驱动器的尾端设有静电导出件107,预紧螺钉1061和静电导出件107能够导电,纳米驱动器上设置有连通预紧螺钉1061和静电导出件107的电通路,静电导出件107与导线连接,导线接地,或接到由外 部设备提供的恒压电源上,或接到样品杆杆身,进而接到透射电镜上。如此,样品的待观测区域上的静电通过样品传递到预紧螺钉1061,预紧螺钉1061经纳米驱动器上的电通路到达静电导出件107,静电导出件107上的电流经导线向外引出。
作为一个具体的实施例,电通路可以是连接预紧螺钉1061和静电导出件107的导线,只需要将导线长度设置冗余,使导线不影响纳米驱动器的活动即可。或者,纳米驱动器采用上述的结构,如图8和图9所示,套管106设于第一压件1053,静电导出件107固定安装于第二压件1054,第一压件1053、套管106和第二压件1054均为导体,第一压件1053和第二压件1054之间至少有一个弹性连接组件104,弹性连接组件104包括螺杆1041和弹簧1042,弹簧1042套装于螺杆1041,螺杆1041和弹簧1042均为导体,第一压件1053与螺杆1041对应的通孔表面保持导电。如此,静电的流向为:样品→预紧螺钉→第一压件→弹簧→螺杆→第二压件→静电导出件。
作为一个具体的实施例,静电导出件107为导电螺钉,第二压件1054上有跟导电螺钉配合的螺孔,导电螺钉的螺帽朝远离第一压件1053的方向,导线位于导电螺钉的螺帽和第二压件1054之间。这是因为,这样能方面安装导电螺钉、将导线固定到导电螺钉。导电螺钉的螺杆部位于第二压件1054内。也就是说,导电螺钉除了头部以外,其余部分位于第二压件1054内,其尾部不伸出第二压件1054、更不旋入第一压件1053内。如此,避免第一压件1053、关节球103和第二压件1054之间的相对运动影响导电螺钉的稳定性。导电螺钉的尾部与第二压件1054点焊固定。点焊将导电螺钉固定在第二压件1054内,保持电流传输的稳定性,也避免导电螺钉脱离第二压件1054、跌落。透射电镜非常昂贵且维修困难,一旦零件或样品等在透射电镜的样品腔内跌落,将造成巨大损失,且样品腔空间有限,跌落的部件难以取出,因此,样品杆各个零件的连接可靠性非常重要。导电螺钉的头部外露于第二压件1054。这样,导线可以压紧在导电螺钉和第二压件1054的表面之间,导线不用嵌入第二压件1054的螺孔内,导线不容易断。
样品夹嘴
样品需要装载在样品杆上。比如,样品是一根Φ0.3mm,长10mm的棒状。而样品的待观察区域是样品一端的厚度100nm以下的区域,如针尖或附着的纳米颗粒等。每个样品上可能有一个或多个待观察区域。在做样品观测实验时,样品绕轴转动,为了使样品的待观测区域始终保持在透射电镜观测视野内,要使样品的待观测区域尽量靠近转轴。通常安装样品的方式是:在样品杆前端设置套管,预紧螺钉从一侧将样品压紧于套管壁上,而为了使样品能够顺利、无损地装入套管内,套管内径需要比样品粗,因此样品的待观测区域必然会偏离样品杆的中轴。但,透射电子显微镜的观测尺度通常是微米、纳米级,在观测样品的待观测区域时,很可能压电搓动机构旋转样品后样品的待观测区域超出透射电镜观测视野。为能够观测各种尺寸的样品,设置样品夹嘴用于安装样品,样品和样品夹嘴作为样品组件装入样品杆前端,方便安装和拆卸。
作为优选的方案,如图10所示,样品夹嘴108包括夹紧部1081和连接部1082,样品装载于夹紧部1081。夹紧部中线位置具有装样孔1083,样品装在装样孔1083中。装夹样品时,将样品部分地插入铜管,然后用工具(如钳子等)将插入的铜管一端夹紧、使该段铜管内表面与样品贴合,形成拱起,为夹紧部1081,从而将样品限制在拱起处,完成样品与样品夹嘴108的装配。样品夹嘴的连接部1082与套管106间隙配合。如,套管106呈圆形,则连接部1082呈圆柱形,只要连接部1082能够与套管106间隙配合即可。这样,预紧螺钉1061直接抵紧样品夹嘴,任意尺寸的样品都可以安装在样品夹嘴上,再将样品组件安装在样品杆上,这样,样品杆可装载的样品通用性好。预紧螺钉1061只需要将样品夹嘴抵紧即可,预紧螺钉1061不接触样品,不会对样品造成损伤,且样品夹嘴108与样品杆之间的安装间隙可以设置得尽量小,从而保证样品跟样品杆轴尽量接近。
作为一个具体的实施例,装样孔1083两侧对称开有连通装样孔1083的缓冲间隙1084。当装样孔1083的尺寸小于样品尺寸时,缓冲间隙1084能够使装样孔1083有尺寸增大的空间,从而使样品顺利地装入装样孔1083中。夹紧部1081从底部向顶部逐渐收缩,顶部呈扁状。顶部呈扁状减小了样品夹嘴108的占用空间,方便操作样品。夹紧部1081呈中空状。空心状的夹紧部1081能够增加样品的深入长度。
作为一个具体的实施例,夹紧部1081和连接部1082固定连接,或一体成型,夹紧部1081在上,连接部1082在下,连接部1082为实心柱,或者连接部1082为空心。在这里,固定连接是指焊接等方式。连接部1082为实心柱时,实心柱不容易发生挤压形变,预紧螺钉1061抵住实心柱,保持样品-样品夹嘴安装的可靠性。连接部1082为空心时,可以进一步增大样品的深入长度,还可以减少样品夹嘴108的制造成本。
优选的,连接部1082上有凹坑。预紧螺钉1061对应插入连接部1082的凹坑,在锁紧连接部1082的同时,还能阻止样品自转位移。
样品夹嘴108为导体。从而便于将样品的待观测区域上积聚的静电向外导出。样品夹嘴108可以是薄壁铜管。使用薄壁铜管,不仅制造成本低,而且能适配不同尺寸的样品。当样品杆具有夹嘴时,此时静电流向为:样品→夹嘴→预紧螺钉→第一压件→弹簧→螺杆→第二压件→静电导出件。
样品对准转轴轴线的调整方法
为了在转轴自转时,样品的待观测区域始终在透射电镜观测视野内,需要使样品的待观测区域尽量接近转轴的旋转轴线。
将样品的待观测区域调整到转轴的旋转轴线上的方法,包括以下步骤:
S1、制作上述样品夹嘴,将样品装夹在样品夹嘴内,再将样品夹嘴装入样品杆的样品夹具;
S2、将带有样品的样品杆插入透射电镜,找到样品的一个待观测区域,并选取样品的待观测区域的一个特征点,选取原则是该特征点在旋转过程中应易于辨别;
S3、使转轴自转到0°,记录样品特征点投影到电镜屏幕上的位置为D1;使转轴自转到180°,记录样品特征点投影到电镜屏幕上的位置为D2;
S4、驱动纳米定位器,沿Y方向驱动,将样品特征点投影到电镜屏幕上的位置移动到D1和D2的中心位置Dz;
S5、使转轴自转到90°,驱动纳米定位器,沿Z方向驱动将样品特征点投影到电镜屏幕上的位置移动到Dz;
S6、使转轴自转到0°,驱动纳米定位器,沿Y方向驱动将样品特征点投影到电镜屏幕上的位置移动到Dz;
S7、重复S5-S6,直到来回旋转时样品特征点投影到电镜屏幕上的位置在电镜下的横向位置不变;
S8、增大透射电镜放大倍数,并重复S3-S7。直到机械误差造成的随机移动不可忽略,则说明样品特征点准确地位于转轴上。
旋转过程中可能会耦合前后移动,每次旋转完成后需要驱动压电搓动机构,沿X方向驱动将样品特征点投影到电镜屏幕上的位置移动到相同的X位置。
透射电镜样品杆的整体直径约为15mm,考虑到需要安装密封用的O圈槽,并预留足够的结构刚度,转轴的空间直径不超过10mm。
样品杆轴线的自定位
为实现样品绕轴360°自转,将样品杆设置为包括外壳109和转轴110,外壳109与转轴110同轴,转轴110位于外壳109的内腔;内腔中设有搓动转轴自转的压电搓动机构和自定位机构,自定位机构具有对称的斜面,斜面与转轴接触。转轴无论怎么转动,由于斜面的作 用,转轴的中心轴总能自动复位到原始位置,从而避免转轴110中心移位而导致的样品的待观测区域脱离透射电镜观测视野。优选的,转轴110为陶瓷轴。
作为优选的方案,自定位机构包括托块1092,如图11所示,托块1092具有对称的斜面10921,托块1092的斜面与转轴110接触。优选的,托块1092斜面10921上具有耐磨层113,耐磨层113为与转轴110的接触部位。优选的,沿转轴110的轴向分布有多个托块1092。
作为优选的方案,自定位机构包括压板1093,如图11和图12所示,压板1093具有平板10931,平板10931两侧对称设置一个斜坡10932。转轴110被限制在托块1092和压板1093之间,使转轴110在绕轴自转时不发生上下和左右的位移。优选的,每个托块1092对应一个压板1093,托块1092在下,压板1093在上。或者,自定位机构包括多个托块1092和一个压板1093。
如图12所示,压板1093具有一对安装翼10933,安装翼10933上有固定孔10934;安装翼10933位于斜坡10932一端。平板内侧设有耐磨层113,耐磨层113是与转轴110的接触部位。
外壳109与转轴110之间有骨架112,安装翼10933通过弹性安装组件114装配于骨架112。如图12所示,弹性安装组件114由螺杆1141和弹簧1142组成,弹簧1142套装于螺杆1141的杆身,弹簧1142位于安装翼10933和螺杆1141的螺帽之间。弹性安装组件114使压板1093能够沿转轴110的径向方向微动,对转轴110既有预紧力,又让转轴110能够自转。转轴110被限制在压板1093和托块1092之间,在装配时通过旋转螺杆1141调节预紧力的大小。装配完成后,使用时弹簧1142不继续变形。
转轴驱动组件
作为优选的方案,骨架112和转轴110之间设有至少一组转轴驱动组件,所述转轴驱动组件即为压电搓动机构,每一组转轴驱动组件包括驱动单元,驱动单元包括基板和压电陶瓷片,基板为绝缘体,或基板为PCB印刷电路板。
驱动转轴轴向移动的一种方案:转轴驱动组件包括轴向驱动单元,轴向驱动单元的压电陶瓷片的剪切变形方向与转轴的轴向一致,压电陶瓷片粘接于基板,压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的或间断的锯齿波等。
驱动转轴自转的一种方案:转轴驱动组件包括自转驱动单元,自转驱动单元的压电陶瓷片的剪切变形方向与转轴110的环向一致,压电陶瓷片粘接于基板,压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的或间断的锯齿波等。
转轴自转和轴向移动组合的一种方案:转轴驱动组件的驱动单元包括基板、第一压电陶瓷片和第二压电陶瓷片;第一压电陶瓷片的形变方向和第二压电陶瓷片的形变方向正交,第一压电陶瓷片和第二压电陶瓷片的两侧表面涂敷导电涂层。驱动时,导电涂层之间输入电压信号,比如输入连续的锯齿波等。
第一压电陶瓷片的形变方向和第二压电陶瓷片的形变方向正交,比如,第一压电陶瓷片的形变方向沿转轴的轴向(为前后方向),用于驱动转轴110前后平移,第二压电陶瓷片的形变方向沿转轴的环向(为旋转方向),用于搓动转轴110自转。第一压电陶瓷片叠在第二压电陶瓷片上,或者,第二压电陶瓷片叠在第一压电陶瓷片上;第一压电陶瓷片和第二压电陶瓷片之间粘接固定。驱动单元设有耐磨层113。耐磨层113直接与转轴110接触,降低磨损,延长驱动单元的使用寿命。第一压电陶瓷片的一侧表面与第二压电陶瓷片的一侧表面导通,共用一根导线。
优选的,转轴驱动组件沿转轴110轴向设置两组或三组。一组转轴驱动组件使转轴自转和轴向移动的力有限,设置多组转轴驱动组件,对转轴110施加同方向的力,利于转轴自转和轴向移动。但是,如果转轴驱动组件设置过多,易造成施力紊乱。
两点驱动转轴的方案:转轴前端沿轴向设置一组转轴驱动组件,该组转轴驱动组件包括 沿转轴对称设置的两组驱动单元,转轴左、右两侧分别受到驱动单元提供的驱动力,两个驱动单元表面的耐磨片与转轴110的接触点平齐,参见图13,图中的a、b分别为两组驱动单元111。
三点驱动转轴的方案:转轴驱动组件设置为两组时,转轴110前端沿轴向设置一组转轴驱动组件,前端转轴驱动组件包括沿转轴对称设置的两组驱动单元。压板1093与转轴110之间设置一组转轴驱动组件,该组转轴驱动组件包括一组驱动单元。压板1093的位置应位于两组驱动单元的上方,三组驱动单元表面的耐磨片与转轴110的接触点平齐,平齐是指轴向平齐。如果接触点沿转轴110轴向错开,易造成转轴110后端翘起。压板1093横向开有通孔,铜箔从通孔中穿出,铜箔作为驱动单元电极的引出介质,与外界导线连接,参见图15,图中的a、b、c分别为三组驱动单元111。
五点驱动转轴的方案:转轴驱动组件设置为五组时,转轴110前后端分别沿轴向对称设置两组转轴驱动组件,每组转轴驱动组件包括沿转轴对称设置的两组驱动单元。转轴110中部位置设有一组转轴驱动组件,该组转轴驱动组件包括一组驱动单元,该组驱动单元位于压板1093与转轴110之间。其中,转轴110前、后端的两组驱动单元表面的耐磨片与转轴110的接触点平齐,参见图13,图中的a、b、c、d、e分别为五组驱动单元111。
骨架
如图21所示,骨架112设置在外壳109与转轴110之间,骨架113与外壳109、转轴110同轴。骨架112作为转轴110和外壳109之间的过渡部件,在装配时,使转轴110与骨架112同轴,再将转轴-骨架装入外壳内,使转轴110、骨架113和外壳109同轴,提高安装精度。另外,骨架112还为转轴驱动组件提供安装位置,骨架112还起到将转轴和导线分离、避免导线干扰转轴运动的作用。
如图16所示,骨架112具有与外壳109的内壁间隙配合的匹配部1121、容纳转轴的容纳槽1122和用于承载配件的安装部1123,容纳槽1122具有对称的斜面,安装部1123上固定有连接电路板1124,连接电路板1124上有连接导线。连接线路板为PCB印制电路板。
托块1092固定于容纳槽1122,容纳槽1122沿骨架112轴向设置多段;骨架112上设有容纳转轴驱动组件的安装腔1125,容纳槽1122和安装腔1125间隔分布。转轴驱动组件安装到位后,转轴驱动组件的耐磨层形成对转轴限位的斜面。
每个驱动单元有各自用于电流流通的连接电路板1124,连接电路板为PCB印制电路板,连接电路板1124上有跟转动驱动组件电连通的线路;每个转轴驱动组件对应一个转接电路板1131,转接电路板1131为PCB印制电路板,转接电路板1131上有连通线路;连接电路板1124的电流汇集于连接电路板1131,转接电路板1131与输送导线连接,输送导线与样品杆上的信号接头相连。信号接头与外界信号源相连,输出控制信号。采用电路板的方式实现电信号传递,避免导线干扰转轴转动。
作为一个具体的实施例,转接电路板1131与骨架112固定,转轴110位于转接电路板1131下方,参见图13。转接电路板1131位于压板1093与转轴驱动组件之间。转接电路板1131为PCB印制电路板,驱动单元111可焊区域面积有限,焊接不牢,用转接电路板1131可以在装配过程中减小对驱动单元上导线的触碰,以保护焊点。将转接电路板1131左右两个驱动单元引出的6根导线(三点驱动时包括压板下方的驱动单元共9根导线)接成3根,简化电气连接。
优选的,连接电路板1124和转接电路板1131之间用导线电连接。
优选的,骨架112呈圆柱形,骨架112一侧切制有槽,槽贯通骨架112的轴向,容纳槽1122和安装腔1125均位于槽上;以骨架112的圆弧面为底,以槽的开口为顶,放置连接电路板1124的位置有缺口,缺口从顶向下切除部分骨架壁形成。缺口两端的壁起到定位连接电路板1124的作用。
优选的,每个连接电路板1124的宽度小于或等于骨架的壁厚,连接电路板1124用螺钉固定于缺口的顶面。
优选的,安装转接电路板1131的骨架壁平面高于安装连接电路板1124的骨架壁平面。这样,转接电路板1131部分悬空、与其下方的连接电路板1124安装,节约安装空间;并且,转接电路板1131和连接电路板1124之间有间隙,避免电线短路。
优选的,如图21所示,骨架112上设有安装螺纹孔1126,螺纹孔1126从上向下贯穿骨架112。螺纹孔1126均为通孔,便于清洗骨架112,保持样品杆洁净,避免污染和干扰透射电镜内的样品腔。
光纤接入
在样品杆中接入光纤,光纤的作用是:1)用光源调整为特定光谱的光,通入电镜,照射样品,施加电磁场;2)搜集样品发出/反射的光,传出电镜,进行测量和分析,如:测量样品发出的黑体辐射而测得样品温度。
作为优选的方案,如图20所示,光纤槽1127开设于骨架112的侧面,光纤槽1127轴向贯穿骨架112。光纤从光纤槽1127中穿过,能够避免光纤磨损。
作为优选的方案,样品杆头部具有前端电路板1129,前端电路板1129与光纤槽1127衔接,前端电路板1129与光纤槽1127位于同一直线。光纤槽1127之所以开在骨架112侧面,是因为在样品杆头部具有前端电路板1129,光纤槽1127与前端电路板1129衔接,前端电路板1129具有导引光纤1130的作用,光纤头部经过前端电路板1129,光纤头部具有较小的弯曲幅度。如果光纤头部弯曲幅度过大,会引起光波衰减,甚至折断光纤。
前端电路板1129通过安装块1132安装于骨架。安装块1132通过螺栓将前端电路板1129固定于骨架112上。前端电路板1129具有导引光纤的导引平面1133,导引平面1133与光纤槽1127平齐。导引平面1133向样品夹嘴方向延伸,光纤顺着导引平面1133靠近样品。
骨架112上对称的开设有两个光纤槽1127。相应得,前端电路板1129具有对称设置的导引平面1133,导引平面1133与光纤槽1127一一衔接。开有两个光纤槽1127,光纤1130可以选择任意一个光纤槽1127通过,或者使用两根光纤1130,分别通过两个光纤槽1127,比如通不同的光谱,或者一根光纤发光,另一根搜集光。
如图16所示,光纤槽1127与连接电路板1124位于同一直线上。即连接电路板沿光纤槽1127路线布置,连接电路板1124的引出导线可以从骨架112内壁引出,也可以从光纤槽1127中穿过,如此设置,导线的布置与转轴110的转动互不干涉。光纤槽1127呈直线状,光纤槽1127至少能容纳直径0.5mm的光纤。
电线引出
连通前端电路板的导线需要与外界的控制箱连接,导线从骨架109外部经过,长期的接触摩擦不仅对导线造成磨损,而且导线直径小,各种导线繁杂,相互之间容易缠绕。在骨架112底部开有用于导线通过的过线槽1128,能够避免导线的磨损和缠绕。
作为优选的方案,如图21所示,骨架112的底部开设有过线槽1128,过线槽1128轴向贯穿骨架112,过线槽1128为向底敞口的槽。
压电陶瓷片与电极的布置
用于驱动转轴平移或自转的压电陶瓷片是在沿厚度方向的外加电场作用下会发生剪切变形的压电陶瓷剪切片。
优选的,压电陶瓷片的两侧表面均匀涂敷了导电涂层,为上层电极和下层电极。
作为优选的方案,如图17所示,驱动单元111具有基板1111、压电陶瓷片1112和耐磨片113,基板1111上具有陶瓷片区域1113和电极区域1114,压电陶瓷片堆叠粘接于陶瓷片区域1113,电极区域1114上有复数线路,线路与压电陶瓷片表面的导电涂层电连接。
陶瓷片区域1113有一个压电陶瓷片,或者堆叠有至少两个压电陶瓷片1112。有至少两 个的压电陶瓷片1112时,压电陶瓷片1112的伸缩方向互不相同。
优选的,基板1111为PCB印刷电路板。
优选的,基板1111为金属基PCB印刷电路板。
优选的,基板1111为铝基PCB印刷电路板。优选的,基板1111上有凹台和一对安装孔1116,以安装孔1116作为基板1111的前后两端,陶瓷片区域1113和电极区域1114位于基板的中央,凹台位于基板1111的前后两端,在安装孔周围;陶瓷片区域1113和电极区域1114位于基板1111的左右两侧。
优选的,最下层压电陶瓷片的下层电极与基板1111上的陶瓷片区域1113直接接触,通过陶瓷片区域1113上的线路连接到基板1111上的电极区域1114;最上层压电陶瓷片的上层电极表面具有A区域和B区域;A区域粘贴有耐磨片113;B区域与一根转接导线电连接;转接导线的一端与基板1111上的电极区域1114电连接。
优选的,转接导线锡焊于B区域;或者,转接导线以导电胶水粘接于B区域。
优选的,有至少两个的压电陶瓷片时,除了最上层压电陶瓷片外的每一层压电陶瓷片的上层电极具有重叠区域和外露区域;重叠区域与这层压电陶瓷片的上一层压电陶瓷片的下层电极电连接;外露区域与一根转接导线电连接;转接导线的一端与基板上的电极区域1114电连接。
优选的,转接导线锡焊于外露区域;或者,转接导线以导电胶水粘接于外露区域。
优选的,转接导线锡焊于基板1111上的电极区域1114。
优选的,重叠区域与这层压电陶瓷片的上一层压电陶瓷片的下层电极直接接触。
或者,另一种压电陶瓷片与电极的布置方式,驱动单元包括电极板和压电陶瓷片,压电陶瓷片粘接固定于电极板表面。电极板为导体,电极板与引出导线电连接。
如图18所示,驱动单元包括第一电极板1117、第一压电陶瓷片1118和第二电极板1119,第一压电陶瓷片1118沿转轴110轴向剪切变形,或者第一压电陶瓷片1118沿转轴环向剪切变形;第一压电陶瓷片1118在第一电极板1117和第二电极板1119之间,第一电极板1117和第二电极板1119分别具有各自的引线端。
优选的,驱动单元包括第一电极板1117,第一压电陶瓷片1118,第二电极板1119,第二压电陶瓷片1110和第三电极板1120;安装顺序依次为第一电极板1117、第一压电陶瓷片1118、第二电极板1119、第二压电陶瓷片1110、第三电极板1120;第一压电陶瓷片1118的剪切变形方向和第二压电陶瓷片1110的剪切变形方向不同;第三电极板1120靠近转轴110但不与转轴110接触。
优选的,第一电极板1117粘接固定于绝缘层上,绝缘层粘接固定于骨架或外壳上,第三电极板1120上设有与转轴接触的耐磨层113。第一、第二和第三只是为了说明有三个电极板;第一和第二只是为了说明有两个压电陶瓷片。
优选的,第一电极板、绝缘层和骨架在电路中可以等效为容性负载,且驱动各个压电陶瓷片所需的电压较高,所以在用高频信号驱动各个压电陶瓷片时,电压信号容易泄露到骨架上,可能会损坏电镜。因此,使第一电极板1117保持接地,可以减少泄露到骨架上的电压。而以适当的电压信号驱动第二电极板1119和第三电极板1120,也能获得所需的电场,不影响驱动功能的实现。
转轴的位置信息
转轴末端设有磁铁1101,骨架112设有引出电路板1106,旋转及前后运动时磁场随之变化,磁场传感器测得磁场,通过磁场能得出转轴的位置信息即转轴的转动角度和移动距离。因为三维重构需要投影角度,所以需测量转轴的转动角度。测转轴的移动距离是为了使样品位于标定磁场传感器时的位置,使测量转轴的转动角度的误差更小。目前的样品杆为三自由度驱动,而本样品杆为四自由度驱动,增加了转轴的轴向转动,通过测量转轴的转动角度为 三维重构提供投影角度。
转轴110末端设有磁铁1101,骨架112设有引出电路板1106,骨架112开有缺口,引出电路板1106包括弯折部1105,弯折部1105位于缺口内,磁场传感器1103固定于弯折部1105。将磁场传感器1103放置于缺口内,减小占用空间,从而减小套装骨架的外壳直径。缺口的空间远大于容纳磁场传感器1103所需要的空间,为拆卸维修磁场传感器1103提供足够的操作空间。
作为优选的方案,引出电路板1106包括平面部1104,平面部1104和弯折部1105弯折覆盖于骨架112,平面部1104和弯折部1105通过导线连接,磁场传感器1103与弯折部1105焊锡连接。引出电路板1106为PCB印制电路板。磁场传感器1103与引出电路板1106焊锡连接不仅能固定磁场传感器1103,而且能对引出电路板1106上的其中一对引脚作短接,减少需要连接的导线个数。
作为优选的方案,平面部1104和弯折部1105呈“L”型,磁场传感器1103与磁铁1101相对。使用弯折电路板,占用面积小,容易拆卸。如果不弯折电路板,空间不足以放置螺丝,需要胶粘固定,难以拆卸维修。
优选的,引出电路板1106具有两组引出端子,一组引出端子与驱动单元111的导线电连接,另一组引出端子样品杆电接头连接。
使用多自由度样品杆进行样品原位动态三维重构的方法
使用多自由度样品杆进行样品原位动态三维重构的方法,包括以下步骤:
S1,制作上述样品杆,将样品装入样品杆头端,将样品杆插入透射电镜;
S2、将样品的待观测区域上的一个特征点调整到与样品杆轴线对准;
S3、使转轴累积旋转180°,每隔1°拍摄一张照片;
S4、将步骤S3得到的照片导入电脑,进行三维重构。其中,三维重构是指对三维物体建立适合计算机表示和处理的数学模型,属于现有技术。
图23是本发明与现有的样品杆的性能对比列表,这是目前唯一一个四自由度样品杆。
在缺少本文中所具体公开的任何元件、限制的情况下,可以实现本文所示和所述的发明。所采用的术语和表达法被用作说明的术语而非限制,并且不希望在这些术语和表达法的使用中排除所示和所述的特征或其部分的任何等同物,而且应该认识到各种改型在本发明的范围内都是可行的。因此应该理解,尽管通过各种实施例和可选的特征具体公开了本发明,但是本文所述的概念的修改和变型可以被本领域普通技术人员所采用,并且认为这些修改和变型落入所附权利要求书限定的本发明的范围之内。本文中所述或记载的文章、专利、专利申请以及所有其他文献和以电子方式可得的信息的内容在某种程度上全文包括在此以作参考,就如同每个单独的出版物被具体和单独指出以作参考一样。申请人保留把来自任何这种文章、专利、专利申请或其他文献的任何及所有材料和信息结合入本申请中的权利。

Claims (31)

  1. 多自由度样品杆,其特征在于:包括外壳和转轴,外壳与转轴之间设有骨架,骨架与外壳、转轴同轴。
  2. 如权利要求1所述的多自由度样品杆,其特征在于:外壳具有内腔,转轴位于外壳的内腔,内腔中设有自定位机构。
  3. 如权利要求2所述的多自由度样品杆,其特征在于:自定位机构包括托块和压板,托块具有对称的斜面,托块的斜面与转轴接触;压板具有平板,平板两侧对称设有斜坡;转轴位于托块和压板之间;平板与转轴接触的面设有耐磨层。
  4. 如权利要求3所述的多自由度样品杆,其特征在于:压板具有一对安装翼,安装翼上有固定孔,安装翼通过弹性安装组件装配于骨架。
  5. 如权利要求4所述的多自由度样品杆,其特征在于:弹性安装组件由螺杆和弹簧组成,弹簧套装于螺杆的杆身,弹簧位于安装翼和螺杆的螺帽之间。
  6. 如权利要求1所述的多自由度样品杆,其特征在于:骨架具有与外壳的内壁间隙配合的匹配部、容纳转轴的容纳槽和用于承载配件的安装部,容纳槽具有对称的斜面,安装部上固定有连接电路板,连接电路板上有连接导线。
  7. 如权利要求2所述的多自由度样品杆,其特征在于:所述样品杆具有转轴驱动组件,托块设置于骨架,托块固定于容纳槽,容纳槽沿骨架轴向设置多段;骨架上设有容纳转轴驱动组件的安装腔,容纳槽和安装腔间隔分布。
  8. 如权利要求7所述的多自由度样品杆,其特征在于:转轴驱动组件包括驱动单元,每个驱动单元有各自用于电流流通的连接电路板,连接电路板为PCB印制电路板,连接电路板上有跟转动驱动组件电连通的线路;每个转轴驱动组件对应一个转接电路板,转接电路板为PCB印制电路板,转接电路板上有连通线路;连接电路板的电流汇集于转接电路板。
  9. 如权利要求8所述的多自由度样品杆,其特征在于:连接电路板和转接电路板之间用导线电连接;和、或转接电路板固定于骨架,转轴位于转接电路板下方。
  10. 如权利要求6所述的多自由度样品杆,其特征在于:骨架呈圆柱形,骨架一侧切制有槽,槽贯通骨架的轴向,容纳槽和安装腔均位于槽上;以骨架的圆弧面为底,以槽的开口为顶,放置连接电路板的位置有缺口,缺口从顶向下切除部分骨架壁形成。
  11. 如权利要求7所述的多自由度样品杆,其特征在于:每个连接电路板的宽度小于或等于骨架的壁厚,连接电路板用螺钉固定于缺口的顶面;和、或安装转接电路板的骨架壁平面高于安装连接电路板的骨架壁平面。
  12. 如权利要求1所述的多自由度样品杆,其特征在于:骨架上设有安装螺纹孔,螺纹孔从上向下贯穿骨架。
  13. 如权利要求1所述的多自由度样品杆,其特征在于:转轴末端设有磁铁,骨架设有引出电路板,骨架开有缺口,引出电路板包括弯折部,弯折部位于缺口内,磁场传感器固定于弯折部。
  14. 如权利要求13所述的多自由度样品杆,其特征在于:引出电路板包括平面部,平面部和弯折部弯折覆盖于骨架,平面部和弯折部通过导线连接,磁场传感器与弯折部焊锡连接。
  15. 如权利要求14所述的多自由度样品杆,其特征在于:引出电路板为PCB印制电路板;平面部和弯折部垂直,磁场传感器与磁铁相对。
  16. 如权利要求1所述的多自由度样品杆,其特征在于:骨架开有光纤槽;光纤槽开于骨架侧面,光纤槽轴向贯穿骨架。
  17. 如权利要求16所述的具有光纤的多自由度样品杆,其特征在于,样品杆头部具有前端电路板,前端电路板具有导引光纤的导引平面,前端电路板与光纤槽衔接,导引平面与光纤槽平齐。
  18. 具有转轴驱动组件的多自由度样品杆,其特征在于:包括骨架和转轴,骨架和转轴之间 设有至少一组转轴驱动组件,每一组转轴驱动组件包括驱动单元,驱动单元包括基板和压电陶瓷片。
  19. 如权利要求18所述的具有转轴驱动组件的多自由度样品杆,其特征在于:基板为PCB印制电路板,基板上具有陶瓷片区域和电极区域,压电陶瓷片堆叠粘接于陶瓷片区域,压电陶瓷片的两侧表面均匀涂敷导电涂层,为上层电极和下层电极;电极区域上有复数线路,线路与压电陶瓷片表面的导电涂层电连接。
  20. 如权利要求19所述的具有转轴驱动组件的多自由度样品杆,其特征在于:陶瓷片区域有一个压电陶瓷片,或者堆叠有至少两个压电陶瓷片,有至少两个压电陶瓷片时,压电陶瓷片的伸缩方向互不相同。
  21. 如权利要求20所述的具有转轴驱动组件的多自由度样品杆,其特征在于:基板上有凹台和一对安装孔,以安装孔作为基板的前后两端,陶瓷片区域和电极区域位于基板的中央,凹台位于基板的前后两端,在安装孔周围;陶瓷片区域和电极区域位于基板的左右两侧。
  22. 如权利要求21所述的具有转轴驱动组件的多自由度样品杆,其特征在于:最下层压电陶瓷片的下层电极与基板上的陶瓷片区域直接接触,通过陶瓷片区域上的线路连接到基板上的电极区域;最上层压电陶瓷片的上层电极表面具有A区域和B区域;驱动单元具有耐磨片,耐磨片粘贴于A区域;B区域与一根转接导线电连接;转接导线的一端与基板上的电极区域电连接。
  23. 如权利要求22所述的具有转轴驱动组件的样品杆,其特征在于:转接导线锡焊于B区域;或者,转接导线以导电胶水粘接于B区域。
  24. 如权利要求23所述的具有转轴驱动组件的多自由度样品杆,其特征在于:有至少两个压电陶瓷片时,除了最上层压电陶瓷片外的每一层压电陶瓷片的上层电极具有重叠区域和外露区域;重叠区域与这层压电陶瓷片的上一层压电陶瓷片的下层电极电连接;外露区域与一根转接导线电连接;转接导线的一端与基板上的电极区域电连接;转接导线锡焊于外露区域;或者,转接导线以导电胶水粘接于外露区域;和、或转接导线锡焊于基板上的电极区域。
  25. 如权利要求24所述的具有转轴驱动组件的多自由度样品杆,其特征在于:驱动单元包括第一电极板、第二电极板和第三电极板,压电陶瓷片包括第一压电陶瓷片和第二压电陶瓷片;安装顺序依次为第一电极板、第一压电陶瓷片、第二电极板、第二压电陶瓷片、第三电极板;第一压电陶瓷片的剪切变形方向和第二压电陶瓷片的剪切变形方向不同;第三电极板靠近转轴但不与转轴接触。
  26. 如权利要求25所述的具有转轴驱动组件的多自由度样品杆,其特征在于:第一电极板粘接固定于基板上,基板为绝缘层,第三电极板上设有与转轴接触的耐磨层。
  27. 具有静电导出作用的多自由度样品杆,样品杆上设有纳米定位器,纳米定位器包括压件组件,压件组件包括至少两个压件和弹性连接组件,纳米驱动器设有装载样品的套管,套管上装有锁紧样品的预紧螺钉,其特征在于:纳米驱动器的尾端设有静电导出件,预紧螺钉和静电导出件能够导电,纳米驱动器上设置有连通预紧螺钉和静电导出件的电通路,静电导出件与导线连接。
  28. 如权利要求27所述的具有静电导出作用的多自由度样品杆,其特征在于:电通路包括压件组件和连接导线,压件组件包括第一压件和第二压件,第一压件和第二压件均为导体,静电导出件设于第二压件,第一压件和第二压件之间至少有一个弹性连接组件,弹性连接组件包括螺杆和弹簧,弹簧套装于螺杆,螺杆和弹簧均为导体。
  29. 如权利要求28所述的具有静电导出作用的多自由度样品杆,其特征在于:静电导出件为导电螺钉。
  30. 如权利要求29所述的具有静电导出作用的多自由度样品杆,其特征在于:第二压件上有跟导电螺钉配合的螺孔,导电螺钉的头部螺帽朝远离第一压件的方向,导线位于导电螺钉 的头部螺帽和第二压件之间。
  31. 如权利要求30所述的具有静电导出作用的多自由度样品杆,其特征在于:导电螺钉的螺杆部位于第二压件内;和、或导电螺钉的尾部与第二压件点焊固定;和、或导电螺钉的头部外露于第二压件。
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