WO2019242100A1 - Gallium oxide semiconductor electronic device with vertical structure and manufacturing method therefor - Google Patents

Gallium oxide semiconductor electronic device with vertical structure and manufacturing method therefor Download PDF

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WO2019242100A1
WO2019242100A1 PCT/CN2018/103268 CN2018103268W WO2019242100A1 WO 2019242100 A1 WO2019242100 A1 WO 2019242100A1 CN 2018103268 W CN2018103268 W CN 2018103268W WO 2019242100 A1 WO2019242100 A1 WO 2019242100A1
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type
layer
current
gate
electronic device
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PCT/CN2018/103268
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French (fr)
Chinese (zh)
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张晓东
李军帅
范亚明
张宝顺
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中国科学院苏州纳米技术与纳米仿生研究所
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7827—Vertical transistors
    • H01L29/7828—Vertical transistors without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs

Definitions

  • the invention particularly relates to a gallium oxide vertical structure semiconductor electronic device and a manufacturing method thereof, and belongs to the technical field of semiconductor devices.
  • any solid-state energy conversion system is composed of circuits.
  • Switching power supplies are the cornerstone of energy conversion and are widely implanted in these circuits. If the switching device is implemented in the field of energy conversion to achieve high efficiency and energy saving, the loss of the entire system can be reduced, and at the same time, costs can be saved. Therefore, to implement a zero-loss system, start by making a zero-loss power switch. To realize a zero-loss power switch, the key is to find a suitable semiconductor material so that the resistance of the switch is almost zero when it is turned on.
  • field effect transistors mainly have two types of structures: one is a horizontal structure device, and the other is a vertical structure device (Vertical Field Effect Transistor), which mainly includes vertical MOSFET and vertical current aperture transistor CAVET, Current Aperture, Vertical, Electron, Transistor).
  • the horizontal device has the following disadvantages compared to the vertical device: When the horizontal structure electronic device is in the off state, electrons can reach the drain from the semi-insulating buffer layer, forming a buffer layer leakage phenomenon. The leakage phenomenon of the buffer layer will seriously cause leakage. The pole current has reached the condition of the breakdown judgment at a lower voltage.
  • horizontal structure electronic devices mainly rely on the active area between the gate and the drain to withstand the voltage.
  • the high electric field region is located on the edge of the gate near the drain side.
  • the high electric field injects electrons into the traps on the surface, which causes the current to collapse. This serious reliability problem further limits the lateral device. Application in high voltage field.
  • the main purpose of the present invention is to provide a gallium oxide vertical structure semiconductor electronic device and a manufacturing method thereof to overcome the shortcomings of the prior art.
  • An embodiment of the present invention provides a gallium oxide vertical structure semiconductor electronic device, which includes a buffer layer, a current blocking layer, and a channel layer which are sequentially disposed, and a current formed by an ion implantation process is also distributed in the current blocking layer.
  • a via hole is provided with a source electrode and a gate electrode on the channel layer, the buffer layer is connected to the drain electrode, the drain electrode is disposed opposite to the current blocking layer, and the current via hole is located below the gate electrode.
  • the channel layer and the buffer layer are electrically connected through the current via.
  • An embodiment of the present invention also provides a method for manufacturing a gallium oxide vertical structure semiconductor electronic device, which includes:
  • At least a part of the current blocking layer is processed by ion implantation to form a current via, and the current via is located below the gate.
  • a gate, a source, and a drain are fabricated, the source and the gate are disposed on a channel layer, and the drain is connected to the buffer layer and disposed opposite to the current blocking layer.
  • An embodiment of the present invention further provides a gallium oxide vertical structure semiconductor electronic device manufactured by the method for manufacturing a gallium oxide vertical structure semiconductor electronic device.
  • the gallium oxide vertical structure semiconductor electronic device provided by the present invention has a simple structure, can well meet the requirements of high-power switches, and has a series of advantages such as large saturation current and high breakdown voltage.
  • the material characteristics of Ga 2 O 3 are greatly exerted, so that gallium oxide vertical structure semiconductor electronic devices play a greater role in the field of power semiconductor electronic devices.
  • FIG. 1 is a schematic structural diagram of a gallium oxide vertical structure semiconductor electronic device in a typical embodiment of the present invention.
  • An embodiment of the present invention provides a gallium oxide vertical structure semiconductor electronic device, which includes a buffer layer, a current blocking layer, and a channel layer which are sequentially disposed, and a current formed by an ion implantation process is also distributed in the current blocking layer.
  • a via hole is provided with a source electrode and a gate electrode on the channel layer, the buffer layer is connected to the drain electrode, the drain electrode is disposed opposite to the current blocking layer, and the current via hole is located below the gate electrode.
  • the channel layer and the buffer layer are electrically connected through the current via.
  • the source, channel layer, current via, and drain are turned on in sequence, and when the device is in an off state, the gate can turn the The channel is depleted.
  • the current through-hole is formed by partially inverting the current blocking layer.
  • the buffer layer is formed on the first surface of the substrate, the drain is disposed on the second surface of the substrate, and the first surface is disposed opposite to the second surface.
  • the thickness of the substrate is 1 ⁇ m to 1 mm.
  • the material of the substrate includes N-type or P-type Ga 2 O 3 .
  • the material of the channel layer includes N + -type or P + -type Ga 2 O 3 .
  • the material of the buffer layer includes N-type or P-type Ga 2 O 3 .
  • the thickness of the buffer layer is 1 nm-100 ⁇ m.
  • the material of the current blocking layer includes P-type or N-type Ga 2 O 3 .
  • the material of the current through hole includes N-type or P-type Ga 2 O 3 .
  • the gallium oxide vertical structure semiconductor electronic device includes two sources, and the gate is distributed between the two sources.
  • a gate insulating layer is also distributed between the gate and the channel layer.
  • An embodiment of the present invention also provides a method for manufacturing a gallium oxide vertical structure semiconductor electronic device, which includes:
  • the current via is located below the gate
  • a gate, a source, and a drain are fabricated, the source and the gate are disposed on a channel layer, and the drain is connected to the buffer layer and disposed opposite to the current blocking layer.
  • the manufacturing method includes: performing inversion processing on a part of the current blocking layer, so that a part of the current blocking layer forms the current through hole.
  • the square treatment of the current blocking layer by ion implantation is performed under the conditions of room temperature to 500 ° C.
  • the material of the channel layer includes N + -type or P + -type Ga 2 O 3 .
  • the material of the buffer layer includes N-type or P-type Ga 2 O 3 .
  • the material of the current blocking layer includes P-type or N-type Ga 2 O 3 .
  • the material of the current through hole includes N-type or P-type Ga 2 O 3 .
  • the manufacturing method includes manufacturing two sources, and the gate is distributed between the two sources.
  • the manufacturing method includes: providing a gate insulating layer on the channel layer, and then manufacturing a gate on the gate insulating layer.
  • the buffer layer is formed on the first surface of the substrate, the drain is disposed on the second surface of the substrate, and the first surface is disposed opposite to the second surface.
  • the manufacturing method further includes: forming an ohmic contact between the source electrode and the channel layer, and forming an ohmic contact between the drain electrode and the buffer layer or the substrate.
  • An embodiment of the present invention further provides a gallium oxide vertical structure semiconductor electronic device manufactured by the method for manufacturing a gallium oxide vertical structure semiconductor electronic device.
  • the forbidden bandwidth of the Ga 2 O 3 material provided by the embodiment of the present invention is 4.7 to 5.3 eV, and the breakdown field strength is 8 to 10 MV / cm. Therefore, the critical field strength of Ga 2 O 3 is more than 20 to 30 times that of Si. It is also more than twice as much as the third-generation semiconductors GaN and SiC, and the Ga 2 O 3 Barriga's figure of merit is also more than 2 to 4 times that of GaN and SiC and other materials. It is higher in low-frequency devices. Based on the above excellent performance, Ga Compared with traditional Si and third-generation semiconductor materials, 2 O 3 materials and devices have great advantages in high-power and high-voltage devices, and have the potential to affect the entire power conversion field.
  • Ga 2 O 3 field effect transistors mainly have two types of structures: one is a horizontal structure device, and the other is a vertical field effect transistor (Vertical Field Effect Transistor), which mainly includes vertical MOSFETs and vertical current aperture transistors. CAVET, Current Aperture Vertical Electron Transistor).
  • VET Vertical Field Effect Transistor
  • CAVET Current Aperture Vertical Electron Transistor
  • a gallium oxide vertical structure semiconductor electronic device may include: an N-type or P-type Ga 2 O 3 substrate (1 ⁇ m-1 mm) and an N-type or P-type substrate disposed in this order.
  • Ga 2 O 3 buffer layer (1 nm-100 ⁇ m).
  • a P-type or N-type Ga 2 O 3 current blocking layer (1 nm-100 ⁇ m) is provided above the N-type or P-type Ga 2 O 3 buffer layer.
  • N-type Ga 2 O 3 within the current blocking layer is formed with a P-type or N-type Ga 2 O 3 power flow hole, in the P-type or N-type Ga 2 O 3 and N-type current blocking layer or a P-type Ga 2 O 3
  • An N + -type or P + -type Ga 2 O 3 channel layer (1 nm-100 ⁇ m) is formed above the current via, and two source and gate electrodes are provided on the N + -type or P + -type Ga 2 O 3 channel layer.
  • the gate is located between two sources, and the drain is disposed on the back (ie, below) of the N-type or P-type Ga 2 O 3 substrate; the gate and the N + or P + -type Ga 2 O 3 trench
  • a gate insulation layer is also provided between the track layers, and the insulation layer may be a high-K dielectric material such as aluminum nitride; wherein the current through-hole is ion-implanted by a part of a P-type or N-type Ga 2 O 3 current blocking layer.
  • the Ga 2 O 3 current via is located below the gate.
  • a source electrode and a gate electrode are located at the top of the device, a drain electrode is located at the bottom of the device, and a buffer layer (N-type or P-type Ga 2 O 3 ) current blocking layer (P-type or N-type Ga 2 O 3) and the vicinity of the channel layer (N + type or P + type Ga 2 O 3) exists, so that electrons can not pass, so that electrons can only flow through the channel layer by the horizontal electric The holes flow into the buffer layer.
  • the electrons from the source pass through the horizontal channel (N + or P + Ga 2 O 3 ), the control region under the gate, and the current blocking layer (P or N Ga 2 O 3 ) in this order. Aperture, N-type or P-type Ga 2 O 3 buffer layer and N-type or P-type Ga 2 O 3 substrate, and finally reach the drain; in the off state, the gate layer (N + or P + -type Ga 2 O 3 ) is completely depleted.
  • the withstand voltage of the device is mainly borne by a PN junction formed by a reverse-biased N-type or P-type Ga 2 O 3 buffer layer / P-type or N-type Ga 2 O 3 .
  • the N-type or P-type Ga 2 O 3 buffer layer thickness can be controlled to improve the withstand voltage of the device. Because the Ga 2 O 3 material has a strong breakdown field, the thickness of the drift region can be greatly reduced under the same withstand voltage condition, thereby obtaining a smaller on-resistance. Therefore, the device of this structure has a high breakdown voltage and a low on-state. Resistance, high current characteristics.
  • an N-type or P-type Ga 2 O 3 film (that is, a buffer layer) can be grown on a N-type or P-type Ga 2 O 3 substrate by a semiconductor thin film epitaxy technology, and then a P-type or N layer is epitaxially grown.
  • Ga 2 O 3 thin film ie, current blocking layer
  • a patterned mask is used to ion implant a part of the second epitaxially grown P-type or N-type Ga 2 O 3 thin film to form an inverted N.
  • Ion implantation of the current blocking layer During the ion implantation process, lattice damage due to ion bombardment will affect the performance of the semiconductor thin film. Therefore, in the key process of ion implantation, high temperature ion implantation can be performed, that is, the device substrate Warm to room temperature to 500 ° C (that is, the ion implantation process is performed at room temperature to 500 ° C.
  • Ion implantation and high temperature treatment can be performed simultaneously or alternately; or high temperature treatment can be performed after the ion implantation is completed; the temperature ranges are all Room temperature -500 °C); the introduction of high temperature process will repair the lattice damage introduced by ion implantation, and will also increase the activation rate of implanted ions to a certain extent and improve device performance.
  • the N-type implanted ions include: Si, Sn, Ge, etc.
  • the P-type implanted ions include: Mg, B, In, etc.

Abstract

Disclosed are a gallium oxide semiconductor electronic device with a vertical structure and a preparation method therefor. The gallium oxide semiconductor electronic device with a vertical structure comprises a buffer layer, a current blocking layer, and a channel layer that are sequentially disposed, wherein a current via formed by means of ion implantation is further provided in the current blocking layer, a drain and a gate are disposed on the channel layer, the buffer layer is connected to the drain, the drain is disposed opposite the current blocking layer, the current via is located below the gate, and the channel layer and the buffer layer are electrically connected through the current via. The gallium oxide semiconductor electronic device with a vertical structure provided by the present invention has a simple structure, can meet requirements of high-power switches, and has a series of advantages such as a large saturation current and a high breakdown voltage, and greatly exploits the material characteristics of Ga2O3, allowing the gallium oxide semiconductor electronic device with a vertical structure to play a greater role in the field of power semiconductor electronic devices.

Description

氧化镓垂直结构半导体电子器件及其制作方法Gallium oxide vertical structure semiconductor electronic device and manufacturing method thereof 技术领域Technical field
本发明特别涉及一种氧化镓垂直结构半导体电子器件及其制作方法，属于半导体器件技术领域。The invention particularly relates to a gallium oxide vertical structure semiconductor electronic device and a manufacturing method thereof, and belongs to the technical field of semiconductor devices.
背景技术Background technique
在现代社会中，电力电子技术是实现各种能源与电能转换和利用的核心，也国民经济和国家安全领域的基础和重要支柱，电力电子器件在电力电子技术领域的应用和市场中起着决定性作用，它是弱电控制与强电运行之间的桥梁，是信息技术与先进制造技术，传统和现代产业实现自动化、智能化、节能化、机电一体化的基础支撑。随着高压变频、交流传动机车/动车组、城市轨道交通、电动/混合动力汽车、通讯及新一代数据中心服务器、无线通讯、无人机等无线技术的不断发展，迫切需要更高性能的电力电子器件满足其发展需求。In modern society, power electronics technology is the core to realize the conversion and utilization of various energy and electric energy. It is also the foundation and important pillar of the national economy and national security. Power electronics devices play a decisive role in the application and market of power electronics technology. Function, it is the bridge between weak current control and strong current operation, and it is the basic support for information technology and advanced manufacturing technology, traditional and modern industries to realize automation, intelligence, energy saving, and mechatronics. With the continuous development of high-frequency inverters, AC-driven locomotives / EMUs, urban rail transit, electric / hybrid vehicles, communications and new-generation data center servers, wireless communications, drones and other wireless technologies, the need for higher-performance power Electronic devices meet their development needs.
一般来讲，任何固态能量转换系统都是由电路组成，开关电源作为能量转换的基石，被广泛植入在这些电路中。如果在能量转换领域中把开关器件实现高效节能，能把整个系统的损耗降低，同时还可节省成本。因此，要实现一个零损耗的系统，首先从制作一个零损耗的功率开关开始。而要实现一个零损耗功率开关，关键在于找到一种合适的半导体材料，使得处于开启状态下开关的电阻几乎为零。Generally speaking, any solid-state energy conversion system is composed of circuits. Switching power supplies are the cornerstone of energy conversion and are widely implanted in these circuits. If the switching device is implemented in the field of energy conversion to achieve high efficiency and energy saving, the loss of the entire system can be reduced, and at the same time, costs can be saved. Therefore, to implement a zero-loss system, start by making a zero-loss power switch. To realize a zero-loss power switch, the key is to find a suitable semiconductor material so that the resistance of the switch is almost zero when it is turned on.
当前技术最为成熟的硅(Si)基功率器件已经达到硅材料极限，也更难实现高击穿电压，低导通电阻，大电流，耐高温，小型化的电子器件的需求与发展趋势，新型的超宽带隙半导体(Ga 2O 3)材料与器件相较于传统的半导体材料有很大的优势，特别适用于高压、大功率和高温应用，是电力电子应用最具潜力的材料之一。 At present, the most mature silicon (Si) -based power devices have reached the limit of silicon materials, and it is more difficult to achieve high breakdown voltage, low on-resistance, high current, high temperature resistance, and the demand and development trend of miniaturized electronic devices. Compared with traditional semiconductor materials, ultra-wide band gap semiconductor (Ga 2 O 3 ) materials and devices have great advantages. They are especially suitable for high voltage, high power, and high temperature applications. They are one of the most promising materials for power electronics applications.
目前，场效应晶体管(Field Effect Transistor,FET)主要有两种结构类型的：一是水平式结构器件，二是垂直结构器件(Vertical Field Effect Transistor，主要包括垂直MOSFET 和垂直电流孔径晶体管CAVET,Current Aperture Vertical Electron Transistor)。然而，水平式器件相对于垂直型器件存在如下劣势：水平式结构电子器件在关断状态下，电子可以从半绝缘缓冲层到达漏端，形成缓冲层漏电现象，缓冲层泄漏现象严重会使得漏极电流在较低电压下就已经到达击穿判定的条件。同时，水平式结构电子器件主要依靠栅极与漏极之间的有源区来承受耐压，要获得大的击穿电压，需设计很大的栅极与漏极间距，从而增大了芯片所需的面积，与小型化的需求不符，也不利于降低制作成本。大功率转换应用需要大电流和高电压，采用水平结构设计的芯片既不经济且制备困难。At present, field effect transistors (FETs) mainly have two types of structures: one is a horizontal structure device, and the other is a vertical structure device (Vertical Field Effect Transistor), which mainly includes vertical MOSFET and vertical current aperture transistor CAVET, Current Aperture, Vertical, Electron, Transistor). However, the horizontal device has the following disadvantages compared to the vertical device: When the horizontal structure electronic device is in the off state, electrons can reach the drain from the semi-insulating buffer layer, forming a buffer layer leakage phenomenon. The leakage phenomenon of the buffer layer will seriously cause leakage. The pole current has reached the condition of the breakdown judgment at a lower voltage. At the same time, horizontal structure electronic devices mainly rely on the active area between the gate and the drain to withstand the voltage. To obtain a large breakdown voltage, a large gate-drain spacing needs to be designed, which increases the chip. The required area is inconsistent with the demand for miniaturization and is not conducive to reducing production costs. High power conversion applications require large currents and high voltages. Chips designed with horizontal structures are neither economical nor difficult to prepare.
此外，在水平式器件中高电场区域位于靠近漏极一侧的栅极边缘，由于高电场将电子注入表面存在的陷阱中，从而造成电流的崩塌，这一严重的可靠性问题进一步限制了横向器件在高压领域的应用。In addition, in the horizontal device, the high electric field region is located on the edge of the gate near the drain side. The high electric field injects electrons into the traps on the surface, which causes the current to collapse. This serious reliability problem further limits the lateral device. Application in high voltage field.
发明内容Summary of the Invention
本发明的主要目的在于提供一种氧化镓垂直结构半导体电子器件及其制作方法，以克服现有技术的不足。The main purpose of the present invention is to provide a gallium oxide vertical structure semiconductor electronic device and a manufacturing method thereof to overcome the shortcomings of the prior art.
为实现前述发明目的，本发明采用的技术方案包括：In order to achieve the foregoing objectives, the technical solutions adopted by the present invention include:
本发明实施例提供了一种氧化镓垂直结构半导体电子器件，其包括依次设置的缓冲层、电流阻挡层和沟道层，所述电流阻挡层内还分布有经离子注入的方式处理形成的电流通孔，所述沟道层上设置有源极和栅极，所述缓冲层与漏极连接，所述漏极与电流阻挡层相背对设置，所述电流通孔位于栅极下方，所述沟道层与缓冲层经所述电流通孔电连接。An embodiment of the present invention provides a gallium oxide vertical structure semiconductor electronic device, which includes a buffer layer, a current blocking layer, and a channel layer which are sequentially disposed, and a current formed by an ion implantation process is also distributed in the current blocking layer. A via hole is provided with a source electrode and a gate electrode on the channel layer, the buffer layer is connected to the drain electrode, the drain electrode is disposed opposite to the current blocking layer, and the current via hole is located below the gate electrode. The channel layer and the buffer layer are electrically connected through the current via.
本发明实施例还提供了一种氧化镓垂直结构半导体电子器件的制作方法，其包括：An embodiment of the present invention also provides a method for manufacturing a gallium oxide vertical structure semiconductor electronic device, which includes:
在缓冲层上形成电流阻挡层，Forming a current blocking layer on the buffer layer,
至少采用离子注入的方式对所述电流阻挡层的部分区域进行加工处理以形成电流通孔，所述电流通孔位于栅极下方，At least a part of the current blocking layer is processed by ion implantation to form a current via, and the current via is located below the gate.
在所述电流阻挡层上形成沟道层，且所述沟道层与缓冲层能够经由所述电流通孔电连接，Forming a channel layer on the current blocking layer, and the channel layer and the buffer layer can be electrically connected via the current via,
制作栅极、源极和漏极，所述源极和栅极设置在沟道层上，所述漏极与缓冲层连接 并与电流阻挡层相背对设置。A gate, a source, and a drain are fabricated, the source and the gate are disposed on a channel layer, and the drain is connected to the buffer layer and disposed opposite to the current blocking layer.
本发明实施例还提供了由所述的氧化镓垂直结构半导体电子器件的制作方法制作的氧化镓垂直结构半导体电子器件。An embodiment of the present invention further provides a gallium oxide vertical structure semiconductor electronic device manufactured by the method for manufacturing a gallium oxide vertical structure semiconductor electronic device.
与现有技术相比，本发明提供的氧化镓垂直结构半导体电子器件，结构简单，能够很好的满足了大功率开关的需求，且拥有大的饱和电流、高击穿电压等一系列优势，极大的发挥Ga 2O 3材料特性，使氧化镓垂直结构半导体电子器件在功率半导体电子器件领域发挥更大的作用。 Compared with the prior art, the gallium oxide vertical structure semiconductor electronic device provided by the present invention has a simple structure, can well meet the requirements of high-power switches, and has a series of advantages such as large saturation current and high breakdown voltage. The material characteristics of Ga 2 O 3 are greatly exerted, so that gallium oxide vertical structure semiconductor electronic devices play a greater role in the field of power semiconductor electronic devices.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明一典型实施案例中一种氧化镓垂直结构半导体电子器件的结构示意图。FIG. 1 is a schematic structural diagram of a gallium oxide vertical structure semiconductor electronic device in a typical embodiment of the present invention.
具体实施方式detailed description
鉴于现有技术中的不足，本案发明人经长期研究和大量实践，得以提出本发明的技术方案。如下将对该技术方案、其实施过程及原理等作进一步的解释说明。In view of the shortcomings in the prior art, the inventor of the present case was able to propose the technical solution of the present invention through long-term research and extensive practice. The technical scheme, its implementation process and principle will be further explained as follows.
本发明实施例提供了一种氧化镓垂直结构半导体电子器件，其包括依次设置的缓冲层、电流阻挡层和沟道层，所述电流阻挡层内还分布有经离子注入的方式处理形成的电流通孔，所述沟道层上设置有源极和栅极，所述缓冲层与漏极连接，所述漏极与电流阻挡层相背对设置，所述电流通孔位于栅极下方，所述沟道层与缓冲层经所述电流通孔电连接。An embodiment of the present invention provides a gallium oxide vertical structure semiconductor electronic device, which includes a buffer layer, a current blocking layer, and a channel layer which are sequentially disposed, and a current formed by an ion implantation process is also distributed in the current blocking layer. A via hole is provided with a source electrode and a gate electrode on the channel layer, the buffer layer is connected to the drain electrode, the drain electrode is disposed opposite to the current blocking layer, and the current via hole is located below the gate electrode. The channel layer and the buffer layer are electrically connected through the current via.
进一步的，在所述器件处于开态时，所述源极、沟道层、电流通孔与漏极依次导通，而在所述器件处于关态时，所述栅极能够将栅下的沟道耗尽。Further, when the device is in an on state, the source, channel layer, current via, and drain are turned on in sequence, and when the device is in an off state, the gate can turn the The channel is depleted.
进一步的，所述电流通孔是由部分所述电流阻挡层经反型处理后形成。Further, the current through-hole is formed by partially inverting the current blocking layer.
进一步的，所述缓冲层形成在衬底的第一表面上，所述漏极设置于所述衬底的第二表面上，所述第一表面与第二表面相背对设置。Further, the buffer layer is formed on the first surface of the substrate, the drain is disposed on the second surface of the substrate, and the first surface is disposed opposite to the second surface.
优选的，所述衬底的厚度为1μm-1mm。Preferably, the thickness of the substrate is 1 μm to 1 mm.
优选的，所述衬底的材质包括N型或P型Ga 2O 3。 Preferably, the material of the substrate includes N-type or P-type Ga 2 O 3 .
进一步的，所述沟道层的材质包括N+型或P+型Ga 2O 3。 Further, the material of the channel layer includes N + -type or P + -type Ga 2 O 3 .
进一步的，所述缓冲层的材质包括N型或P型Ga 2O 3。 Further, the material of the buffer layer includes N-type or P-type Ga 2 O 3 .
优选的，所述缓冲层的厚度为1nm-100μm。Preferably, the thickness of the buffer layer is 1 nm-100 μm.
进一步的，所述电流阻挡层的材质包括P型或N型Ga 2O 3。 Further, the material of the current blocking layer includes P-type or N-type Ga 2 O 3 .
优选的，所述电流通孔的材质包括N型或P型Ga 2O 3。 Preferably, the material of the current through hole includes N-type or P-type Ga 2 O 3 .
进一步的，所述的氧化镓垂直结构半导体电子器件包括两个源极，所述栅极分布于所述两个源极之间。Further, the gallium oxide vertical structure semiconductor electronic device includes two sources, and the gate is distributed between the two sources.
进一步的，所述栅极与沟道层之间还分布有栅绝缘层。Further, a gate insulating layer is also distributed between the gate and the channel layer.
本发明实施例还提供了一种氧化镓垂直结构半导体电子器件的制作方法，其包括：An embodiment of the present invention also provides a method for manufacturing a gallium oxide vertical structure semiconductor electronic device, which includes:
在缓冲层上形成电流阻挡层，Forming a current blocking layer on the buffer layer,
至少对所述电流阻挡层的部分区域进行加工处理以形成电流通孔，所述电流通孔位于栅极下方，Processing at least a part of the current blocking layer to form a current via, the current via is located below the gate,
在所述电流阻挡层上形成沟道层，且所述沟道层与缓冲层能够经由所述电流通孔电连接，Forming a channel layer on the current blocking layer, and the channel layer and the buffer layer can be electrically connected via the current via,
制作栅极、源极和漏极，所述源极和栅极设置在沟道层上，所述漏极与缓冲层连接并与电流阻挡层相背对设置。A gate, a source, and a drain are fabricated, the source and the gate are disposed on a channel layer, and the drain is connected to the buffer layer and disposed opposite to the current blocking layer.
进一步的，所述的制作方法包括：对所述电流阻挡层的部分区域进行反型处理，以使部分所述电流阻挡层形成所述电流通孔。Further, the manufacturing method includes: performing inversion processing on a part of the current blocking layer, so that a part of the current blocking layer forms the current through hole.
优选的，采用离子注入的方处理电流阻挡层是在室温至500℃条件下进行的。Preferably, the square treatment of the current blocking layer by ion implantation is performed under the conditions of room temperature to 500 ° C.
进一步的，所述沟道层的材质包括N+型或P+型Ga 2O 3。 Further, the material of the channel layer includes N + -type or P + -type Ga 2 O 3 .
进一步的，所述缓冲层的材质包括N型或P型Ga 2O 3。 Further, the material of the buffer layer includes N-type or P-type Ga 2 O 3 .
进一步的，所述电流阻挡层的材质包括P型或N型Ga 2O 3。 Further, the material of the current blocking layer includes P-type or N-type Ga 2 O 3 .
进一步的，所述电流通孔的材质包括N型或P型Ga 2O 3。 Further, the material of the current through hole includes N-type or P-type Ga 2 O 3 .
进一步的，所述的制作方法包括制作两个源极，所述栅极分布于所述两个源极之间。Further, the manufacturing method includes manufacturing two sources, and the gate is distributed between the two sources.
进一步的，所述的制作方法包括：在所述沟道层上设置栅绝缘层，之后在所述栅绝缘层上制作栅极。Further, the manufacturing method includes: providing a gate insulating layer on the channel layer, and then manufacturing a gate on the gate insulating layer.
进一步的，所述缓冲层形成在衬底的第一表面上，所述漏极设置于所述衬底的第二 表面上，所述第一表面与第二表面相背对设置。Further, the buffer layer is formed on the first surface of the substrate, the drain is disposed on the second surface of the substrate, and the first surface is disposed opposite to the second surface.
进一步的，所述制作方法还包括：使源极与沟道层形成欧姆接触，使漏极与缓冲层或衬底形成欧姆接触。Further, the manufacturing method further includes: forming an ohmic contact between the source electrode and the channel layer, and forming an ohmic contact between the drain electrode and the buffer layer or the substrate.
本发明实施例还提供了由所述的氧化镓垂直结构半导体电子器件的制作方法制作的氧化镓垂直结构半导体电子器件。An embodiment of the present invention further provides a gallium oxide vertical structure semiconductor electronic device manufactured by the method for manufacturing a gallium oxide vertical structure semiconductor electronic device.
对于半导体功率电子器件，巴利加优值(Baliga’s figure of merit，其可作为低损耗性指标，FOM＝BV 2/R on)是一个用于综合评价功率器件的指标，获得许多业内学者的认可，其中击穿场强(BV)和导通电阻(R on)是影响器件性能的两个重要参数。 For semiconductor power electronic devices, Baliga's figure of merit (which can be used as a low loss index, FOM = BV 2 / R on ) is an index for comprehensive evaluation of power devices, which has been recognized by many industry scholars Among them, breakdown field strength (BV) and on-resistance (R on ) are two important parameters that affect device performance.
本发明实施例提供的Ga 2O 3材料的禁带宽带为4.7～5.3eV，击穿场强是8～10MV/cm，因此Ga 2O 3的临界场强是Si的20～30余倍，也是第三代半导体GaN和SiC的2倍多，而Ga 2O 3巴利加优值也是GaN和SiC等材料的2～4倍多；在低频器件方面更高，基于上述的优异表现，Ga 2O 3材料与器件相较于传统的Si以及第三代半导体材料在大功率、高电压器件上的极大优势，拥有影响整个功率转换领域的潜力。 The forbidden bandwidth of the Ga 2 O 3 material provided by the embodiment of the present invention is 4.7 to 5.3 eV, and the breakdown field strength is 8 to 10 MV / cm. Therefore, the critical field strength of Ga 2 O 3 is more than 20 to 30 times that of Si. It is also more than twice as much as the third-generation semiconductors GaN and SiC, and the Ga 2 O 3 Barriga's figure of merit is also more than 2 to 4 times that of GaN and SiC and other materials. It is higher in low-frequency devices. Based on the above excellent performance, Ga Compared with traditional Si and third-generation semiconductor materials, 2 O 3 materials and devices have great advantages in high-power and high-voltage devices, and have the potential to affect the entire power conversion field.
目前Ga 2O 3场效应晶体管(Field Effect Transistor,FET)主要有两种结构类型的：一是水平式结构器件，二是垂直结构器件(Vertical Field Effect Transistor，主要包括垂直MOSFET和垂直电流孔径晶体管CAVET,Current Aperture Vertical Electron Transistor)。目前研究对象大多为横向结构Ga 2O 3器件，其大多应用在中小功率领域，而更大功率的高压大电流领域，主要为垂直结构器件，为此，本发明实施例提供了一种新型Ga 2O 3垂直结构器件以满足高压/高流应用。 At present, Ga 2 O 3 field effect transistors (FETs) mainly have two types of structures: one is a horizontal structure device, and the other is a vertical field effect transistor (Vertical Field Effect Transistor), which mainly includes vertical MOSFETs and vertical current aperture transistors. CAVET, Current Aperture Vertical Electron Transistor). At present, most of the research objects are Ga 2 O 3 devices with lateral structure, which are mostly applied in the field of small and medium power, while the fields of high voltage and high current with higher power are mainly vertical structure devices. Therefore, an embodiment of the present invention provides a new Ga 2 O 3 vertical structure devices to meet high pressure / high flow applications.
如下将结合附图对该技术方案、其实施过程及原理等作进一步的解释说明。The technical solution, its implementation process and principle will be further explained with reference to the drawings as follows.
请参阅图1，在本发明的实施例中，一种氧化镓垂直结构半导体电子器件可以包括：依次设置的N型或P型Ga 2O 3衬底(1μm-1mm)和N型或P型Ga 2O 3缓冲层(1nm-100μm)，所述N型或P型Ga 2O 3缓冲层上方设置有P型或N型Ga 2O 3电流阻挡层(1nm-100μm)，在P型或N型Ga 2O 3电流阻挡层内形成有N型或P型Ga 2O 3电流通孔，在所述P型或N型Ga 2O 3电流阻挡层以及N型或P型Ga 2O 3电流通孔上方形成有N+型或P+型Ga 2O 3沟道层(1nm-100μm)，以及，在N+型或P+型Ga 2O 3沟道层上设置有两个源极和栅极，所述栅极位于两个源极之间，漏极设置于所述N型或P型Ga 2O 3衬底的背面(即下方)； 在栅极和N+型或P+型Ga 2O 3沟道层之间还设置有栅绝缘层，绝缘层可以是氮化铝等高K介质材料；其中所述电流通孔是由部分P型或N型Ga 2O 3电流阻挡层经离子注入的方式反型处理后形成的N型或P型Ga 2O 3电流通孔，N型或P型Ga 2O 3电流通孔位于栅极下方。 Referring to FIG. 1, in an embodiment of the present invention, a gallium oxide vertical structure semiconductor electronic device may include: an N-type or P-type Ga 2 O 3 substrate (1 μm-1 mm) and an N-type or P-type substrate disposed in this order. Ga 2 O 3 buffer layer (1 nm-100 μm). A P-type or N-type Ga 2 O 3 current blocking layer (1 nm-100 μm) is provided above the N-type or P-type Ga 2 O 3 buffer layer. N-type Ga 2 O 3 within the current blocking layer is formed with a P-type or N-type Ga 2 O 3 power flow hole, in the P-type or N-type Ga 2 O 3 and N-type current blocking layer or a P-type Ga 2 O 3 An N + -type or P + -type Ga 2 O 3 channel layer (1 nm-100 μm) is formed above the current via, and two source and gate electrodes are provided on the N + -type or P + -type Ga 2 O 3 channel layer. The gate is located between two sources, and the drain is disposed on the back (ie, below) of the N-type or P-type Ga 2 O 3 substrate; the gate and the N + or P + -type Ga 2 O 3 trench A gate insulation layer is also provided between the track layers, and the insulation layer may be a high-K dielectric material such as aluminum nitride; wherein the current through-hole is ion-implanted by a part of a P-type or N-type Ga 2 O 3 current blocking layer. N-type or P-type Ga 2 O 3 current through hole formed after inversion processing, N-type or P-type The Ga 2 O 3 current via is located below the gate.
具体的，在本发明实施例提供的一种氧化镓垂直结构半导体电子器件中，源极和栅极位于器件的顶部，漏极位于器件的底部，缓冲层(N型或P型Ga 2O 3)与沟道层(N+型或P+型Ga 2O 3)附近存在电流阻挡层(P型或N型Ga 2O 3)，使得电子无法通过，从而电子只能由水平沟道层经电流通孔流入缓冲层内。在开态下，电子从源极出发，依次经过水平沟道(N+型或P+型Ga 2O 3)、栅极下方控制区、电流阻挡层(P型或N型Ga 2O 3)之间的孔径，N型或P型Ga 2O 3缓冲层和N型或P型Ga 2O 3衬底，最终到达漏极；在关态下，栅极将其下方的沟道层(N+型或P+型Ga 2O 3)完全耗尽，此时器件耐压主要由反偏N型或P型Ga 2O 3缓冲层/P型或N型Ga 2O 3形成的P-N结所承受。因此可以通过控制N型或P型Ga 2O 3缓冲层厚度，提高器件耐压度。由于Ga 2O 3材料击穿场强大，在相同的耐压情况下，漂移区的厚度可以大大降低，进而得到更小的导通电阻，所以此结构的器件具有高击穿电压，低导通电阻，大电流的特性。 Specifically, in a gallium oxide vertical structure semiconductor electronic device provided by an embodiment of the present invention, a source electrode and a gate electrode are located at the top of the device, a drain electrode is located at the bottom of the device, and a buffer layer (N-type or P-type Ga 2 O 3 ) current blocking layer (P-type or N-type Ga 2 O 3) and the vicinity of the channel layer (N + type or P + type Ga 2 O 3) exists, so that electrons can not pass, so that electrons can only flow through the channel layer by the horizontal electric The holes flow into the buffer layer. In the open state, the electrons from the source pass through the horizontal channel (N + or P + Ga 2 O 3 ), the control region under the gate, and the current blocking layer (P or N Ga 2 O 3 ) in this order. Aperture, N-type or P-type Ga 2 O 3 buffer layer and N-type or P-type Ga 2 O 3 substrate, and finally reach the drain; in the off state, the gate layer (N + or P + -type Ga 2 O 3 ) is completely depleted. At this time, the withstand voltage of the device is mainly borne by a PN junction formed by a reverse-biased N-type or P-type Ga 2 O 3 buffer layer / P-type or N-type Ga 2 O 3 . Therefore, the N-type or P-type Ga 2 O 3 buffer layer thickness can be controlled to improve the withstand voltage of the device. Because the Ga 2 O 3 material has a strong breakdown field, the thickness of the drift region can be greatly reduced under the same withstand voltage condition, thereby obtaining a smaller on-resistance. Therefore, the device of this structure has a high breakdown voltage and a low on-state. Resistance, high current characteristics.
本实施例可以通过半导体薄膜外延技术在N型或P型Ga 2O 3衬底上生长一定厚度的N型或P型Ga 2O 3薄膜(即缓冲层)，然后外延一层P型或N型Ga 2O 3薄膜(即电流阻挡层)，然后利用图形化掩模对第二层外延生长的P型或N型Ga 2O 3薄膜的部分区域进行离子注入，以使其反型形成N型或P型Ga 2O 3的电流通孔，之后再通过外延技术在第二层外延生长的P型或N型Ga 2O 3薄膜上生长高浓度N+型或P+型Ga 2O 3薄膜(即沟道层)，之后在反型区上方沉积绝缘介质和金属电极(gate)，使其可以控制电流的开与关，在反型区域的器件上方的两侧和衬底背面制备欧姆接触电极使其成为此垂直结构电子器件的源极(source)和漏极(drain)。 In this embodiment, an N-type or P-type Ga 2 O 3 film (that is, a buffer layer) can be grown on a N-type or P-type Ga 2 O 3 substrate by a semiconductor thin film epitaxy technology, and then a P-type or N layer is epitaxially grown. Ga 2 O 3 thin film (ie, current blocking layer), and then a patterned mask is used to ion implant a part of the second epitaxially grown P-type or N-type Ga 2 O 3 thin film to form an inverted N. type or P type Ga electrical flow hole 2 O 3, followed by regrowth high concentration N + type or P + type Ga 2 O 3 thin film (on the second layer a P-type epitaxially grown or N-type Ga 2 O 3 thin films by epitaxial technique That is, the channel layer), and then depositing an insulating medium and a metal electrode (gate) over the inversion region, so that it can control the on and off of the current, and preparing ohmic contact electrodes on both sides above the device in the inversion region and on the back of the substrate. This makes it a source and a drain of this vertical structure electronic device.
电流阻挡层的离子注入：由于在离子注入过程中，会因为离子轰击造成晶格损伤，进而影响半导体薄膜的性能，所以离子注入的关键工艺中，可以进行高温离子注入，即对器件衬底进行加温至室温至500℃(即离子注入的过程在室温至500℃条件下进行，离子注入和高温处理可以同时进行，也可以交替进行；或者离子注入结束后再进行高温处 理；温度范围均是室温-500℃)；高温工艺的引入，会修复离子注入引入的晶格损伤，也会一定程度上提高注入离子的激活率，提高器件性能。Ion implantation of the current blocking layer: During the ion implantation process, lattice damage due to ion bombardment will affect the performance of the semiconductor thin film. Therefore, in the key process of ion implantation, high temperature ion implantation can be performed, that is, the device substrate Warm to room temperature to 500 ° C (that is, the ion implantation process is performed at room temperature to 500 ° C. Ion implantation and high temperature treatment can be performed simultaneously or alternately; or high temperature treatment can be performed after the ion implantation is completed; the temperature ranges are all Room temperature -500 ℃); the introduction of high temperature process will repair the lattice damage introduced by ion implantation, and will also increase the activation rate of implanted ions to a certain extent and improve device performance.
由于源极和漏极的欧姆接触影响器件性能，所以对此区域进行离子注入以提高器件性能。其中N型注入离子包括：Si，Sn，Ge等，P型注入离子包括：Mg，B，In等。Since the ohmic contact between the source and the drain affects the device performance, ion implantation is performed in this region to improve the device performance. The N-type implanted ions include: Si, Sn, Ge, etc., and the P-type implanted ions include: Mg, B, In, etc.
应当理解，上述实施例仅为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施，并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰，都应涵盖在本发明的保护范围之内。It should be understood that the above-mentioned embodiments are only for describing the technical concept and features of the present invention, and the purpose thereof is to enable those familiar with the technology to understand the contents of the present invention and implement them accordingly, and shall not limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered by the protection scope of the present invention.

Claims (12)

  1. 一种氧化镓垂直结构半导体电子器件，其特征在于包括依次设置的缓冲层、电流阻挡层和沟道层，所述电流阻挡层内还分布有经离子注入的方式处理形成的电流通孔，所述沟道层上设置有源极和栅极，所述缓冲层与漏极连接，所述漏极与电流阻挡层相背对设置，所述电流通孔位于栅极下方，所述沟道层与缓冲层经所述电流通孔电连接。A gallium oxide vertical structure semiconductor electronic device is characterized in that it includes a buffer layer, a current blocking layer, and a channel layer which are sequentially arranged, and the current blocking layer also has current vias formed through ion implantation. A source electrode and a gate electrode are disposed on the channel layer, the buffer layer is connected to the drain electrode, the drain electrode is disposed opposite to the current blocking layer, the current through hole is located below the gate electrode, and the channel layer And the buffer layer is electrically connected through the current through hole.
  2. 根据权利要求1所述的氧化镓垂直结构半导体电子器件，其特征在于：在所述器件处于开态时，所述源极、沟道层、电流通孔与漏极依次导通，而在所述器件处于关态时，所述栅极能够将栅下的沟道耗尽。The semiconductor electronic device of the vertical structure of gallium oxide according to claim 1, characterized in that, when the device is in an on state, the source electrode, the channel layer, the current via and the drain electrode are sequentially turned on, When the device is in an off state, the gate can deplete a channel under the gate.
  3. 根据权利要求1或2所述的氧化镓垂直结构半导体电子器件，其特征在于：所述电流通孔是由部分所述电流阻挡层经反型处理后形成。The semiconductor electronic device of vertical structure of gallium oxide according to claim 1 or 2, characterized in that the current via is formed after part of the current blocking layer is subjected to inversion processing.
  4. 根据权利要求3所述的氧化镓垂直结构半导体电子器件，其特征在于：所述缓冲层形成在衬底的第一表面上，所述漏极设置于所述衬底的第二表面上，所述第一表面与第二表面相背对设置；优选的，所述衬底的厚度为1μm-1mm；优选的，所述衬底的材质包括N型或P型Ga 2O 3；和/或，所述沟道层的材质包括N+型或P+型Ga 2O 3；和/或，所述缓冲层的材质包括N型或P型Ga 2O 3；优选的，所述缓冲层的厚度为1nm-100μm；和/或，所述电流阻挡层的材质包括P型或N型Ga 2O 3；优选的，所述电流通孔的材质包括N型或P型Ga 2O 3。 The semiconductor electronic device of gallium oxide vertical structure according to claim 3, wherein the buffer layer is formed on a first surface of the substrate, and the drain is disposed on the second surface of the substrate, so that The first surface and the second surface are disposed opposite to each other; preferably, the thickness of the substrate is 1 μm to 1 mm; preferably, the material of the substrate includes N-type or P-type Ga 2 O 3 ; and / or The material of the channel layer includes N + or P + type Ga 2 O 3 ; and / or, the material of the buffer layer includes N or P type Ga 2 O 3 ; preferably, the thickness of the buffer layer is 1 nm-100 μm; and / or, the material of the current blocking layer includes P-type or N-type Ga 2 O 3 ; preferably, the material of the current through hole includes N-type or P-type Ga 2 O 3 .
  5. 根据权利要求1所述的氧化镓垂直结构半导体电子器件，其特征在于包括两个源极，所述栅极分布于所述两个源极之间。The semiconductor electronic device of gallium oxide vertical structure according to claim 1, comprising two sources, and the gate is distributed between the two sources.
  6. 根据权利要求1或5所述的氧化镓垂直结构半导体电子器件，其特征在于：所述栅极与沟道层之间还分布有栅绝缘层。The gallium oxide vertical structure semiconductor electronic device according to claim 1 or 5, wherein a gate insulating layer is further distributed between the gate and the channel layer.
  7. 一种氧化镓垂直结构半导体电子器件的制作方法，其特征在于包括：A manufacturing method of a gallium oxide vertical structure semiconductor electronic device is characterized in that it includes:
    在缓冲层上形成电流阻挡层，Forming a current blocking layer on the buffer layer,
    至少采用离子注入的方式对所述电流阻挡层的部分区域进行加工处理以形成电流通孔，所述电流通孔位于栅极下方，At least a part of the current blocking layer is processed by ion implantation to form a current via, and the current via is located below the gate.
    在所述电流阻挡层上形成沟道层，且所述沟道层与缓冲层能够经由所述电流通孔电 连接，Forming a channel layer on the current blocking layer, and the channel layer and the buffer layer can be electrically connected via the current via,
    制作栅极、源极和漏极，所述源极和栅极设置在沟道层上，所述漏极与缓冲层连接并与电流阻挡层相背对设置。A gate, a source, and a drain are fabricated, the source and the gate are disposed on a channel layer, and the drain is connected to the buffer layer and disposed opposite to the current blocking layer.
  8. 根据权利要求7所述的制作方法，其特征在于包括：对所述电流阻挡层的部分区域进行反型处理，以使部分所述电流阻挡层形成所述电流通孔；优选的，采用离子注入的方处理电流阻挡层是在室温至500℃条件下进行的。The manufacturing method according to claim 7, further comprising: inverting a portion of the current blocking layer to form a portion of the current blocking layer to form the current through hole; preferably, ion implantation is used. The square treatment of the current blocking layer is performed at room temperature to 500 ° C.
  9. 根据权利要求7或8所述的制作方法，其特征在于：所述沟道层的材质包括N+型或P+型Ga 2O 3；和/或，所述缓冲层的材质包括N型或P型Ga 2O 3；和/或，所述电流阻挡层的材质包括P型或N型Ga 2O 3；优选的，所述电流通孔的材质包括N型或P型Ga 2O 3。。 The manufacturing method according to claim 7 or 8, characterized in that: the material of the channel layer includes N + type or P + type Ga 2 O 3 ; and / or, the material of the buffer layer includes N type or P type Ga 2 O 3 ; and / or, the material of the current blocking layer includes P-type or N-type Ga 2 O 3 ; preferably, the material of the current through hole includes N-type or P-type Ga 2 O 3 . .
  10. 根据权利要求7所述的制作方法，其特征在于包括制作两个源极，所述栅极分布于所述两个源极之间。The manufacturing method according to claim 7, further comprising manufacturing two sources, and the gate is distributed between the two sources.
  11. 根据权利要求7所述的制作方法，其特征在于包括：在所述沟道层上设置栅绝缘层，之后在所述栅绝缘层上制作栅极；The method according to claim 7, further comprising: providing a gate insulating layer on the channel layer, and then fabricating a gate on the gate insulating layer;
    和/或，所述缓冲层形成在衬底的第一表面上，所述漏极设置于所述衬底的第二表面上，所述第一表面与第二表面相背对设置。And / or, the buffer layer is formed on the first surface of the substrate, the drain is disposed on the second surface of the substrate, and the first surface is disposed opposite to the second surface.
    和/或，所述制作方法还包括：使源极与沟道层形成欧姆接触，使漏极与缓冲层或衬底形成欧姆接触。And / or, the manufacturing method further includes: forming an ohmic contact between the source electrode and the channel layer, and forming an ohmic contact between the drain electrode and the buffer layer or the substrate.
  12. 由权利要求7-11中任一项所述的氧化镓垂直结构半导体电子器件的制作方法制作的氧化镓垂直结构半导体电子器件。The gallium oxide vertical structure semiconductor electronic device manufactured by the method for manufacturing a gallium oxide vertical structure semiconductor electronic device according to any one of claims 7-11.
PCT/CN2018/103268 2018-06-22 2018-08-30 Gallium oxide semiconductor electronic device with vertical structure and manufacturing method therefor WO2019242100A1 (en)

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