WO2019193624A1 - 電子顕微鏡 - Google Patents

電子顕微鏡 Download PDF

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Publication number
WO2019193624A1
WO2019193624A1 PCT/JP2018/014102 JP2018014102W WO2019193624A1 WO 2019193624 A1 WO2019193624 A1 WO 2019193624A1 JP 2018014102 W JP2018014102 W JP 2018014102W WO 2019193624 A1 WO2019193624 A1 WO 2019193624A1
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WO
WIPO (PCT)
Prior art keywords
electron beam
beam density
unit
current value
electron
Prior art date
Application number
PCT/JP2018/014102
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English (en)
French (fr)
Japanese (ja)
Inventor
長沖　功
圭司 田村
康行 野寺
Original Assignee
株式会社日立ハイテクノロジーズ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立ハイテクノロジーズ filed Critical 株式会社日立ハイテクノロジーズ
Priority to PCT/JP2018/014102 priority Critical patent/WO2019193624A1/ja
Priority to JP2020512112A priority patent/JP6971388B2/ja
Priority to CN201880091817.0A priority patent/CN111919277B/zh
Publication of WO2019193624A1 publication Critical patent/WO2019193624A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Definitions

  • the present invention relates to an electron microscope.
  • Patent Document 1 Some electron microscopes that irradiate a sample with an electron beam measure the current value of the electron beam (for example, Patent Document 1).
  • the electron microscope described in Patent Document 1 has an energy filter that generates a deflection field in the optical path of an electron beam and disperses the electron beam according to energy.
  • the electron microscope controls the intensity of the deflection field of the energy filter based on the current value of the electron beam absorbed by the slit plate above the position of the sample.
  • An object of the present invention is to provide an electron microscope that can appropriately specify the influence of an electron beam on a sample.
  • an electron microscope that irradiates a sample with an electron beam, which includes an irradiation unit that irradiates an electron beam and a first phosphor, and a signal generated from the sample by irradiation of the electron beam by the irradiation unit.
  • a transmission image imaging unit that detects and transmits a transmission image, a current value measurement unit that measures a current value of a signal to the first phosphor of the transmission image imaging unit, and a current value measured by the current value measurement unit;
  • An electron beam density calculating unit that calculates an electron beam density based on the area of the first phosphor, and a control unit that performs output control using information about the electron beam density calculated by the electron beam density calculating unit.
  • FIG. 1 is a diagram showing an outline of a configuration example of an electron microscope according to the present embodiment.
  • the electron microscope according to the present embodiment is an electron microscope that irradiates a sample with an electron beam.
  • the electron microscope of this embodiment has an electron gun 1, a first irradiation lens coil 2, a second irradiation lens coil 3, a first deflection coil 4, and a second deflection coil 5.
  • the electron microscope includes an objective lens coil 6, an objective lens coil 7, an electromagnetic sample image moving coil 8, a first intermediate lens coil 9, a second intermediate lens coil 10, a first projection lens coil 11, and A second projection lens coil 12 is provided.
  • the electron microscope also includes excitation power supplies 13 to 23, digital-analog converters (DACs) 24 to 34, an MPU 35 as a microprocessor, a storage device 36, an arithmetic device 37, a CRT controller 38, and a monitor (CRT) 39. .
  • the electron microscope has interfaces (I / F) 40 to 41, a magnification switching rotary encoder 42, an input rotary encoder 43, a keyboard 44, a RAM 45, and a ROM 46.
  • the electron microscope also includes a camera control unit 48, a fluorescent plate 49 (second phosphor), a sample holder 51 that holds a sample, a camera 56 (transmission image capturing unit), and a mouse 57.
  • the electron microscope irradiates a sample with an electron beam, detects a signal generated from the sample by irradiation of the electron beam, and captures a transmission image.
  • a procedure for obtaining a transmission image will be briefly described.
  • the MPU 35 of the electron microscope reads the lens data for the transmission image stored in the ROM 47 and supplies it to the digital / analog converters (DAC) 24 to 34.
  • DAC digital / analog converters
  • the excitation power supplies 13 to 23 output current to the first irradiation lens coil 2, the second irradiation lens coil 3, and the objective lens coil 6 of each lens system.
  • the excitation power supplies 13 to 23 also output current to the first intermediate lens coil 9, the second intermediate lens coil 10, the first projection lens coil 11, and the second projection lens coil 12.
  • the MPU 35 reads the current values of the excitation power supply 13 and the excitation power supply 14 and specifies the spot size of the electron gun.
  • the spot size is the diameter of the electron beam irradiated by the electron gun 1.
  • the MPU 35 sends the spot size to the camera control unit 48.
  • the MPU 35 makes an electron beam irradiation request to the electron gun 1.
  • the electron gun 1 irradiates the sample on the sample holder 51 with an electron beam.
  • the electron gun 1 functions as an irradiation unit.
  • the electron beam transmitted through the sample on the sample holder 51 is the electromagnetic sample image moving coil 8, the first intermediate lens coil 9, the second intermediate lens coil 10, the first projection lens coil 11, and the second projection.
  • the light is projected onto the fluorescent plate 49 via the lens coil 12.
  • the fluorescent plate 49 is a phosphor coated on, for example, an aluminum plate. Therefore, the phosphor emits light according to the signal transmitted through the sample.
  • the camera 56 detects a signal due to the light emission that has passed through the fluorescent plate 49 to capture a transmission image, and generates image data based on the transmission image. As described above, the camera 56 detects a signal generated from the sample by the electron beam irradiation by the electron gun 1 and generates image data of a transmission image. The camera 56 sends the generated transmission image data to the camera control unit 48.
  • This camera 56 has a scintillator at the flange portion.
  • the flange portion of the camera 56 will be described with reference to FIG.
  • FIG. 2 is a side sectional view of the flange portion of the camera 56.
  • the flange portion of the camera 56 includes an aluminum coating layer 101, a scintillator 102 (first phosphor), an insulator 103, a flange 104, glass 105, and a current reading terminal 106 (current value measuring unit).
  • the camera 56 includes the first phosphor.
  • the aluminum coating layer 101 is a layer made of aluminum.
  • the scintillator 102 is a scintillator attached below the aluminum coating layer 101.
  • the scintillator 102 has a phosphor applied on a glass 105.
  • the phosphor emits a transmission image of the sample, passes through the glass 105, and is received by a CCD (not shown) or the like through an optical lens of the camera 56.
  • the CCD converts the received transmission image into an electrical signal.
  • the camera 56 generates transmission image data based on the electrical signal. In addition, you may receive light by other solid-state image sensors, such as CMOS.
  • the glass 105 is a glass located below the scintillator 102.
  • Insulator 103 is positioned so as to surround aluminum coating layer 101 and scintillator 102.
  • the aluminum coating layer 101, the scintillator 102, the insulator 103, and the glass 105 are located above the flange 104.
  • the current reading terminal 106 is a terminal that is connected to the aluminum coating layer 101 and reads a known current value.
  • the current reading terminal 106 measures the current value of the signal to the scintillator 102. In this way, the current reading terminal 106 is connected to the aluminum coating layer 101 in contact with the scintillator 102 and reads the current value, so the current value of the signal to the scintillator 102 is measured.
  • the camera 56 sends the current value measured by the current reading terminal 106 to the camera control unit 48.
  • the camera 56 may repeatedly generate image data of a transmission image based on a predetermined timing and measure the current value with the current reading terminal 106. In this case, the camera 56 may send the regenerated image data of the transmission image and the remeasured current value to the camera control unit 48.
  • FIG. 3 is a diagram illustrating functional blocks of the camera control unit 48. Note that the functions shown in FIG. 3 may be realized by combining the camera control unit 48 and the MPU 35.
  • the camera control unit 48 is realized by a CPU (Central Processing Unit), a microprocessor, or the like.
  • the camera control unit 48 includes an acquisition unit 481, a setting unit 482, an electron beam density calculation unit 483, a comparison unit 484, and an output control unit 485.
  • the acquisition unit 481 is a part that acquires information from each device. For example, when an appropriate electron beam density (for example, a lower limit electron beam density or an upper limit electron beam density) that is a reference electron beam density is input from the keyboard 44 or the mouse 57, the appropriate electron beam density is acquired. The acquisition unit 481 sends the appropriate electron beam density to the setting unit 482.
  • an appropriate electron beam density for example, a lower limit electron beam density or an upper limit electron beam density
  • FIG. 4 is a diagram showing an example of an appropriate electron beam density input screen.
  • the appropriate electron beam density input screen is a screen for inputting an appropriate electron beam density.
  • the MPU 35 displays the appropriate electron beam density input screen on the CRT 39.
  • the appropriate electron beam density input screen includes a lower limit set value input area 111, an upper limit set value input area 112, and a setting button 113.
  • the MPU 35 receives the input appropriate electron beam density. The density is sent to the camera control unit 48.
  • the acquisition unit 481 acquires transmission image data from the camera 56. When the acquisition unit 481 acquires the image data, the acquisition unit 481 sends it to the output control unit 485. The acquisition unit 481 acquires a current value from the camera 56. When acquiring the current value, the acquiring unit 481 sends the current value to the electron beam density calculating unit 483. The acquisition unit 481 may acquire the current spot size from the MPU 35.
  • the setting unit 482 is a part for setting an appropriate electron beam density.
  • the setting unit 482 acquires the appropriate electron beam density from the acquisition unit 481, the setting unit 482 sets the electron beam density by storing the appropriate electron beam density.
  • the electron beam density calculation unit 483 is a part that calculates the electron beam density based on the current value acquired by the acquisition unit 481 and the area of the scintillator 102 of the camera 56.
  • the electron beam density calculation unit 483 acquires the current value acquired by the acquisition unit 481 (the current value of the signal to the scintillator 102).
  • the electron beam density calculation unit 483 stores information on the area of the scintillator 102 in advance, and calculates the electron beam density based on the current value acquired by the acquisition unit 481 and the information on the area.
  • the electron beam density calculation unit 483 sends the calculated electron beam density to the comparison unit 484.
  • the electron beam density calculation unit 483 also sends the calculated electron beam density to the output control unit 485.
  • the comparison unit 484 is a part that compares the electron beam density calculated by the electron beam density calculation unit 483 with the appropriate electron beam density set by the setting unit 482.
  • the comparison unit 484 acquires the electron beam density from the electron beam density calculation unit 483.
  • the comparison unit 484 acquires the appropriate electron beam density set in the setting unit 482.
  • the comparison unit 484 compares the electron beam density calculated by the electron beam density calculation unit 483 with the appropriate electron beam density set by the setting unit 482. For example, the comparison unit 484 compares the electron beam density calculated by the electron beam density calculation unit 483 with the range from the lower limit electron beam density to the upper limit electron beam density of the appropriate electron beam density, and the electron beam density calculation unit. It is determined whether or not the electron beam density calculated by 483 is included in the range.
  • the comparison unit 484 compares the electron beam density calculated by the electron beam density calculation unit 483 with the upper limit electron beam density when the appropriate electron beam density is designated only as the upper limit electron beam density, It is determined whether or not the upper limit electron beam density is exceeded.
  • the comparison unit 484 sends the comparison result (information indicating whether or not the range indicated by the appropriate electron beam density or the upper limit of the appropriate electron beam density is exceeded) to the output control unit 485.
  • the output control unit 485 is a part that performs output control using information about the electron beam density calculated by the electron beam density calculation unit 483.
  • the output control unit 485 acquires the electron beam density (current electron beam density) from the electron beam density calculation unit 483. Further, the output control unit 485 acquires image data of a transmission image from the acquisition unit 481. Further, the output control unit 485 acquires the result of comparison from the comparison unit 484. The output control unit 485 acquires the appropriate electron beam density set by the setting unit 482.
  • the output control unit 485 causes the monitor 39 to display a screen (electron beam density display screen) based on the above-described current electron beam density, image data of a transmission image, a comparison result, and an appropriate electron beam density.
  • a screen electron beam density display screen
  • FIGS. 5 is a diagram showing a display example of the electron beam density display screen.
  • the electron beam density display screen has an electron beam density display region 121 and a transmission image display region 122.
  • the electron beam density display area 121 includes a current electron beam density display area 123 and a comparison result display area 124.
  • the current electron beam density display area 123 a numerical value of the current electron beam density is displayed.
  • the comparison result display area 124 information based on the comparison result is displayed. For example, in the comparison result display area 124, an indicator 131 indicating the current electron beam density is displayed, and the indicator 131 is displayed in a color based on the comparison result.
  • the output control unit 485 displays the indicator 131 in green.
  • the output control unit 485 displays the indicator 131 in red. Note that the output control unit 485 may not display the indicator 131 by color.
  • the output control unit 485 displays the current electron beam density with an indicator as output control using information on the electron beam density calculated by the electron beam density calculation unit 483.
  • the output control unit 485 displays the color-coded display based on the comparison result as output control based on the comparison result by the comparison unit 484.
  • FIG. 6 is a diagram showing details of the electron beam density display area 121. As shown in FIG. 6, a lower limit position 125 and an upper limit position 126 are displayed in the comparison result display area 124 in the electron beam density display area 121.
  • the output control unit 485 may display only the current electron beam density without performing comparison using the appropriate electron beam density when the reference electron beam density is not input.
  • FIG. 7 is a flowchart showing processing for displaying the electron beam density based on the current value measured by the scintillator 102 of the camera 56 by the electron microscope.
  • the current reading terminal 106 measures the current value of the scintillator 102 in the camera 56 and sends the current value from the camera 56 to the camera control unit 48.
  • the acquisition unit 481 of the camera control unit 48 acquires the current value (step S1).
  • the electron beam density calculation unit 483 calculates the electron beam density based on the current value and the area of the scintillator 102 stored in advance (step S2).
  • the output control unit 485 displays the electron beam density by displaying the screen including the electron beam density (electron beam density display screen) on the monitor 39 (step S3).
  • FIG. 8 is a flowchart showing a process for determining whether or not the calculated electron beam density deviates from the range indicated by the appropriate electron beam density and displaying the result.
  • the MPU 35 sends the appropriate electron beam density to the camera control unit 48.
  • the acquisition unit 481 acquires the appropriate electron beam density.
  • the electron microscope receives an input of an appropriate electron beam density (step S11).
  • the setting unit 482 sets the appropriate electron beam density (step S12). Subsequently, the current value of the scintillator 102 is acquired (step S13) and the electron beam density is calculated (step S14), similarly to steps S1 and S2 shown in FIG.
  • the comparison unit 484 determines whether or not the calculated electron beam density is out of the range of the appropriate electron beam density, and sends the determined result to the output control unit 485 (step S15).
  • the comparison result by the comparison unit 484 indicates that the electron beam density does not deviate from the range of the appropriate electron beam density (step S15: Yes)
  • the output control unit 485 displays the electron beam density indicator in green. Generate an electron beam density display screen.
  • the output control unit 485 displays the electron beam density display screen (step S16).
  • the output control unit 485 displays an electron beam density indicator. An electron beam density display screen displayed in red is generated. The output control unit 485 displays the electron beam density display screen (step S17).
  • the output control unit 485 not only displays based on the comparison result as described above, but also controls the electron gun 1 to control the spot when the current electron beam density deviates from the range of the appropriate electron beam density. The size may be reduced.
  • the output control unit 485 may directly control the electron gun 1, the excitation power source 13, the excitation power source 14 and the like in order to change the spot size.
  • the output control unit 485 may change the irradiation state by the electron gun 1 based on the comparison result as output control based on the comparison result.
  • FIG. 9 is a flowchart showing a process of reducing the spot size based on the result of determining whether or not the calculated electron beam density is out of the range of the appropriate electron beam density.
  • Steps S21 to S26 shown in FIG. 9 are the same as steps S11 to S16 in the flowchart shown in FIG.
  • the output control unit 485 determines the spot size with respect to the electron gun 1. Reduce. That is, the output control unit 485 changes the spot size (step S27), and proceeds to step S23.
  • the camera control unit 48 reduces the spot size, recalculates the electron beam density, and the electron beam density is It is determined whether or not the linear density range is deviated.
  • the output control unit 485 may further generate an electron beam density display screen in which an electron beam density indicator is displayed in red, and display the electron beam density display screen.
  • the current value may be corrected.
  • the above correction is performed based on the correlation between the current value of the signal generated from the sample and the current value of the signal generated from the sample in the scintillator 102 in the fluorescent plate 49 positioned between the camera 56 and the sample. May be.
  • the camera control unit 48 corrects the current value acquired by the acquisition unit 481 (current value measured by the current reading terminal 106), and based on the corrected result and the area of the first phosphor.
  • the electron beam density may be calculated.
  • FIG. 10 is a diagram showing the results of measuring the current value at each spot size.
  • the vertical axis of the graph in FIG. 10 indicates the current value, and the horizontal axis indicates the spot size.
  • the current value measured by the fluorescent plate 49 is measured higher, and the difference between the current value measured by the fluorescent plate 49 and the current value measured by the scintillator 102 becomes more significant as the spot size increases. .
  • information for example, information in a table format
  • the electron beam density calculation unit 483 indicates information indicating the correlation between the respective phosphors.
  • the electron beam density calculation unit 483 refers to the information indicating the correlation, corrects the current value acquired by the acquisition unit 481, and calculates the electron beam density using the corrected result.
  • the electron beam density calculation unit 483 corrects the electron beam density of the fluorescent plate 49 corresponding to the spot size of the current electron beam irradiated by the electron gun 1. Note that the electron beam density calculation unit 483 acquires information indicating the spot size of the electron beam irradiated by the electron gun 1 from a part controlling the electron gun 1 (for example, MPU 35). And
  • the electron beam density calculation unit 483 corrects the current value measured by the scintillator 102 in consideration of the current value in the fluorescent screen 49 located between the camera 56 and the sample. Thereby, the electron beam density calculation part 483 can calculate the electron beam density reflecting the influence degree to a sample using the electric current value measured in the position nearer to a sample.
  • the electron gun 1 irradiates an electron beam
  • the camera 56 having the scintillator 102 detects a signal generated from the sample by the irradiation of the electron beam and captures a transmission image.
  • the current reading terminal 106 measures the current value of the signal to the scintillator 102
  • the electron beam density calculation unit 483 calculates the electron beam density based on the measured current value and the area of the scintillator 102, and performs output control.
  • the unit 485 performs output control using information on the calculated electron beam density.
  • the electron microscope measures the current value of the signal (signal transmitted through the sample) to the scintillator 102 of the camera 56, and calculates the electron beam density based on the current value and the area of the scintillator 102. Information that can specify the influence of the electron beam on the sample can be calculated. Further, in the above-described embodiment, the electron microscope displays the current value at the time of capturing the transmission image, and therefore can provide information on the electron beam density in real time.
  • the output control unit 485 displays the electron beam density with an indicator, the influence on the sample can be output in a format that the user can visually recognize.
  • the setting unit 482 sets an appropriate electron beam density
  • the comparison unit 484 compares the electron beam density calculated by the electron beam density calculation unit 483 with the appropriate electron beam density. Since the output control unit 485 performs output control based on the result of comparison by the comparison unit 484, output control can be performed according to the degree of influence of the electron beam on the sample.
  • the output control unit 485 displays the indicators in different colors based on the comparison result. As described above, since the electron microscope performs color-coded display based on the comparison result, the user can easily recognize the degree of influence of the electron beam on the sample.
  • the output control unit 485 controls the electron gun 1 to reduce the spot size.
  • the output control part 485 changes the irradiation state of the electron gun 1, the influence degree to the sample of an electron beam can be reduced.
  • the camera control unit 48 has described the case where the calculated electron beam density is displayed, but other output control using the electron beam density may be performed.
  • the camera control unit 48 may store the calculated electron beam density or transmit it to an external device.
  • the material type of the sample may be specified by user input or the like and set according to the material type of the sample.
  • an appropriate electron beam density may be set in consideration of a difference in transmittance of each material type.
  • the functions or the like of the present invention described above may be realized by hardware by designing a part or all of them with, for example, an integrated circuit.
  • the microprocessor unit or the like may be realized by software by interpreting and executing an operation program that realizes each function or the like. Hardware and software may be used together.
  • control lines and information lines shown in the figure are those that are considered necessary for the explanation, and not all control lines and information lines on the product are necessarily shown. Actually, it may be considered that almost all the components are connected to each other.
  • control lines and information lines shown in the figure are those that are considered necessary for the explanation, and not all control lines and information lines on the product are necessarily shown. Actually, it may be considered that almost all the components are connected to each other.
  • Electromagnetic sample image moving coil 9 ... First intermediate lens coil, 10 ... Second intermediate lens coil, 11 ... First projection lens coil, 12 ... Second projection lens coil, 35 ... Micro Processor, 44 ... Keyboard, 45 ... RAM, 46 ... ROM, 48 ... Camera controller, 49 ... Fluorescent screen, 51 ... Sample holder, 56 ... Camera, 57 ... Mouse, 101 ... Aluminum coating layer, 102 ...

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PCT/JP2018/014102 2018-04-02 2018-04-02 電子顕微鏡 WO2019193624A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2018/014102 WO2019193624A1 (ja) 2018-04-02 2018-04-02 電子顕微鏡
JP2020512112A JP6971388B2 (ja) 2018-04-02 2018-04-02 電子顕微鏡
CN201880091817.0A CN111919277B (zh) 2018-04-02 2018-04-02 电子显微镜

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PCT/JP2018/014102 WO2019193624A1 (ja) 2018-04-02 2018-04-02 電子顕微鏡

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331955A (en) * 1976-09-03 1978-03-25 Siemens Ag Transmission scanning particle beam microscope
JPH0353440A (ja) * 1989-07-19 1991-03-07 Fujitsu Ltd 電子ビーム装置
JPH1116967A (ja) * 1997-06-26 1999-01-22 Hitachi Ltd 試料検査装置
US7091486B1 (en) * 2004-09-09 2006-08-15 Kla-Tencor Technologies Corporation Method and apparatus for beam current fluctuation correction
JP2007128807A (ja) * 2005-11-07 2007-05-24 Jeol Ltd 電子顕微鏡の露光時間及び照射条件の設定方法
WO2015016040A1 (ja) * 2013-08-02 2015-02-05 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡
JP2016009622A (ja) * 2014-06-25 2016-01-18 富士通株式会社 電子顕微鏡における検出器の位置調整方法及び画像検出器の位置調整方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4597207B2 (ja) * 2008-03-31 2010-12-15 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5743950B2 (ja) * 2012-04-27 2015-07-01 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP6118898B2 (ja) * 2013-05-30 2017-04-19 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331955A (en) * 1976-09-03 1978-03-25 Siemens Ag Transmission scanning particle beam microscope
JPH0353440A (ja) * 1989-07-19 1991-03-07 Fujitsu Ltd 電子ビーム装置
JPH1116967A (ja) * 1997-06-26 1999-01-22 Hitachi Ltd 試料検査装置
US7091486B1 (en) * 2004-09-09 2006-08-15 Kla-Tencor Technologies Corporation Method and apparatus for beam current fluctuation correction
JP2007128807A (ja) * 2005-11-07 2007-05-24 Jeol Ltd 電子顕微鏡の露光時間及び照射条件の設定方法
WO2015016040A1 (ja) * 2013-08-02 2015-02-05 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡
JP2016009622A (ja) * 2014-06-25 2016-01-18 富士通株式会社 電子顕微鏡における検出器の位置調整方法及び画像検出器の位置調整方法

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CN111919277B (zh) 2023-08-01
JP6971388B2 (ja) 2021-11-24
CN111919277A (zh) 2020-11-10
JPWO2019193624A1 (ja) 2021-03-18

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