WO2019144931A1 - 一种湿气发电机及其制备方法 - Google Patents

一种湿气发电机及其制备方法 Download PDF

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WO2019144931A1
WO2019144931A1 PCT/CN2019/073180 CN2019073180W WO2019144931A1 WO 2019144931 A1 WO2019144931 A1 WO 2019144931A1 CN 2019073180 W CN2019073180 W CN 2019073180W WO 2019144931 A1 WO2019144931 A1 WO 2019144931A1
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electrode
moisture
moisture generator
generator according
substrate
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PCT/CN2019/073180
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English (en)
French (fr)
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周运鸿
杜利·沃尔特·W
肖明
刘磊
沈道智
邹贵生
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清华大学
周运鸿
杜利·沃尔特·W
肖明
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Publication of WO2019144931A1 publication Critical patent/WO2019144931A1/zh

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N3/00—Generators in which thermal or kinetic energy is converted into electrical energy by ionisation of a fluid and removal of the charge therefrom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/002—Generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • the invention relates to a moisture generator and a preparation method thereof, and belongs to the technical field of new energy power generation.
  • an object of the present invention is to provide a moisture generator which is based on nanowires, has a high power output density, and has a good self-generation function.
  • the present invention provides a moisture generator including a substrate, a first electrode, a nanowire layer, and a second electrode which are sequentially disposed, wherein the nanowire layer is disposed at the first electrode and Between the second electrodes, which consist of randomly distributed nanowires.
  • the first electrode, the nanowire layer and the second electrode form a sandwich power generating structure, and the first electrode and the second electrode serve as output electrodes of a voltage and current of the power generating structure; in use, the structure Exposed to a moisture-laden environment, moisture diffuses in the nanowire layer, a potential difference is generated between the first electrode and the second electrode, and a charge flow is formed between the first electrode and the second electrode to generate an electric current.
  • the above moisture may also be referred to as water vapor, which may be derived from ambient air, human body breathing, human fingers, animal breathing, volatile liquids, and the like.
  • random distribution means that the nanowires are distributed in an irregular pattern throughout the nanowire layer.
  • the nanowires may cross each other to form a nanowire network structure.
  • the nanowires are formed more with each other (relative to the vertical arrangement).
  • Holes or voids
  • the pores formed by the intersection of the nanowires have a pore diameter of less than 200 nm, preferably a majority of less than 100 nm.
  • This random distribution is preferably formed by electrophoretic deposition.
  • the material of the nanowire has a positive zeta potential or a negative zeta potential.
  • the material of the nanowire is a material having a resistivity of more than 100 ohm ⁇ m, and the short circuit between the first electrode and the second electrode can be avoided.
  • the nanowire layer is hydrophilic. More preferably, the contact angle (or wetting angle) of the nanowire layer with water is ⁇ ⁇ 60°.
  • the nanowire layer has good hydrophilicity and can promote the diffusion of moisture and the like in the nanowire layer, thereby increasing the power output density.
  • the thickness of the nanowire layer can be controlled to be 1-100 ⁇ m, preferably 5-20 ⁇ m.
  • the relationship between the thickness of the nanowire layer and the voltage is shown in FIG.
  • the nanowires employed may be titanium oxide nanowires and/or zinc oxide nanowires.
  • the diameter of the nanowires is preferably from 70 to 300 nm.
  • the substrate, the first electrode, and the second electrode may each be in the form of a layer or a film.
  • the thickness of the substrate can be controlled to be 10-5000 microns.
  • the thickness of the first electrode and the second electrode may be 0.05 to 100 ⁇ m, respectively.
  • the substrate may be a common base material such as a pure metal, an alloy, a polymer material or an inorganic material.
  • the pure metal suitable for the substrate may be gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or tin; and the material suitable for the alloy of the substrate may be selected from the group consisting of gold, silver, platinum, aluminum, nickel, copper.
  • At least two of titanium, chromium and tin; suitable for polymer materials may be selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, polyimide, polytetrafluoroethylene, poly Vinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, polychloroether, polymethyl methacrylate, polyvinyl alcohol, polyisobutylene, polyethylene Alcohol, polyacrylonitrile, polycarbonate, polybutylene terephthalate, polyethylene naphthalate, polydifluorodichloroethylene, p-xylene ring dimer, ethylene-vinyl acetate copolymerization
  • a perfluoroethylene-propylene copolymer an acrylonitrile-butadiene-styrene terpolymer, and a vinyl chloride-vinyl acetate copoly
  • the flexibility of existing flexible devices is only the use of flexible substrates, and the overall flexibility of the device is not considered. After undergoing multiple bending, the relative performance of these devices will be degraded, and the existing wetness Gas generators have little concern for flexibility.
  • the moisture generator of the present invention can adopt a flexible material substrate and cooperate with a nanowire layer (the nanowire layer itself also has good flexibility) and the like, so that the moisture generator has overall flexibility, after 10,000 mechanical bending. After folding, the output voltage and other performance did not drop significantly.
  • the material of the flexible material substrate may be polyethylene terephthalate, polyimide, polyethylene terephthalate, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride. Ethylene, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, and the like.
  • the first electrode and the second electrode are output electrodes as voltage and current of the power generating structure, and any conventional electrode material may be used, and the first electrode and the second electrode may be layered or Film-like, for example, the first electrode and the second electrode include an indium tin metal oxide (ITO) film, a graphene film, a silver nanowire film coating, or gold, silver, platinum, aluminum, nickel, copper, titanium, A layer or film formed of one of chromium, tin or alloys thereof. Further, the materials of the first electrode and the second electrode may be the same or different.
  • ITO indium tin metal oxide
  • the invention also provides a preparation method of the above-mentioned humid gas generator, which comprises the following steps:
  • a second electrode is formed on the surface of the nanowire layer.
  • the first electrode and the second electrode may be pulsed laser deposition, molecular beam epitaxy, magnetron sputtering, ion plating, vacuum evaporation, chemical vapor deposition, electroplating, chemical wet method, and Any one of the templating methods is prepared by deposition.
  • the nanowire layer can be formed by an electrophoretic deposition method, a droplet coating method, or a spin coating method. Compared with the droplet coating method and the spin coating method, when the electrophoretic deposition method is employed, the prepared nanowire layer can be more uniform and dense, and the short circuit between the first electrode and the second electrode can be avoided, and It also has higher efficiency in the preparation process.
  • the formation of the nanowire layer by electrophoretic deposition is carried out according to the following steps:
  • the substrate on which the first electrode is formed is placed in the sol, and the other conductive substrate is inserted such that the side of the substrate with the first electrode is opposite to the conductive substrate;
  • a voltage is applied between the substrate and the conductive substrate to deposit the nanowires onto the surface of the first electrode, and then taken out and dried to form a nanowire layer.
  • the present invention also provides a humidity sensor comprising the above-described moisture generator. Place the moisture generator in the environment to be measured and the moisture in the environment will induce a voltage across the generator. Moreover, the output voltage at both ends of the moisture generator is determined by the humidity of the environment. The greater the humidity, the greater the output voltage across the generator; the output voltage across the generator can be used to characterize the ambient humidity level.
  • the specific working principle is: when the moisture generator is exposed to the moisture in the environment, the ions in the moisture diffuse in the channel formed by the nanowire, so that the ions preferentially flow in the channel, thereby the first electrode and the second electrode A potential difference is formed between them.
  • the humidity level of the environment can be characterized by measuring the voltage across the generator. Considering that this wet gas generator has good shape adaptability and does not require additional circuit drive, this self-driven flexible humidity sensor has important application prospects in the field of environmental monitoring.
  • the present invention also provides a respiration sensor comprising the above described wet gas generator.
  • the moisture generator is placed in the vicinity of a person's nose or mouth to monitor the respiratory rate of the human body in real time.
  • the output voltage of the wet gas generator is related to the respiratory rate and the respiratory intensity, and the output voltage can be used to characterize the human respiratory rate.
  • the specific working principle is: the gas exhaled by the human body during the breathing process has a higher humidity, when the exhaled gas and When the nanowire layer in the wet gas generator contacts, the ions in the moisture diffuse in the channels (ie, pores, voids) formed by the nanowires, so that the ions preferentially flow in the channels, thereby the first electrode and the second electrode. A potential difference is formed between them.
  • the moisture in the nanowire channel evaporates and separates, and the voltage between the first electrode and the second electrode decreases accordingly.
  • a corresponding periodic electrical signal can be generated between the first electrode and the second electrode of the moisture generator.
  • the moisture generator of the present invention has good shape adaptability, and the generated voltage can be directly used to analyze the breathing state of the human body without requiring additional circuit driving, the self-driven wearable creature. Respiratory testing will have important application prospects in future medical monitoring and sleep quality testing.
  • the base material of the moisture generator is preferably made of a material that is non-toxic to the human body (or animal body), has good adhesion to the skin, and has a certain shape adaptability, especially to the human face directly.
  • the base material to be contacted preferably satisfies the above conditions, such as a polymethylsiloxane film or a polyethylene terephthalate film.
  • the present invention also provides a finger touch sensor comprising the above described wet gas generator.
  • the moisture generator can detect the touch of a human finger.
  • the output voltage of the wet gas generator is related to the pressing frequency of the finger and the pressing pressure, and the electrical signal output by the generator can be used to indicate whether the finger is pressed or not.
  • the specific working principle is: when the human body presses the moisture generator, the moisture of the finger skin spreads to the generator, and when the moisture contacts the nanowire layer, the ions in the moisture diffuse in the channel formed by the nanowire, thereby The ions preferentially flow in the channel to form a potential difference between the first electrode and the second electrode.
  • the moisture in the nanowire channel evaporates and the voltage between the first electrode and the second electrode decreases.
  • the pressing condition of the human finger can be obtained.
  • the voltage generated by the moisture generation of the present invention can be directly used to detect the pressing of the human finger without additional circuit driving, the self-driven human finger touch sensor can have a great application prospect in the touch panel. .
  • the invention also provides a human body exhalation alcohol concentration test system, which is formed by connecting the first electrode and the second electrode of the above-mentioned moisture generator and the commercial alcohol sensor (TGS 822) in series, and the partial pressure of the two ends of the alcohol sensor is Measurement signal.
  • the working principle is that the gas exhaled by the human body contains moisture, and the moisture interacts with the nanowire network to induce a voltage between the first electrode and the second electrode of the generator, and the voltage is used to drive the alcohol sensor. If the gas exhaled by the human body contains a certain concentration of alcohol, the resistance of the alcohol sensor will change due to the action of alcohol, and the voltage signal at both ends of the sensor will also change accordingly. By analyzing the strength of the signal, the human body can be exhaled.
  • the level of alcohol in the gas Since the moisture in the gas exhaled by the human body interacts with the generator to generate a voltage, and this voltage directly drives the alcohol sensor, the alcohol test system does not require additional circuit drive. This self-driven gas detection system has great application prospects in drunk driving tests and human health monitoring.
  • the moisture generator provided by the invention adopts a network structure formed by nanowires, the structure has good hydrophilicity, and a large number of nano-voids contained therein are favorable for moisture diffusion, and the moisture generator can be made higher. Power output density.
  • the moisture generator of the present invention is composed of a three-dimensional stacked structure of a first electrode, a nanowire layer and a second electrode, and has a compact structure, is easy to prepare, has low cost, and is easy to be processed in large quantities.
  • the base of the moisture generator is made of flexible material
  • the nano-wire layer network structure with good flexibility can make the moisture generator have good mechanical flexibility, and can be used as a sensor on the surface of human skin to monitor human breathing in real time. State, or as a wearable touch screen; since the sensor itself can output a humidity-related voltage, the intrinsic voltage can characterize the breathing or touch state, so that the sensor does not require additional circuitry to operate, especially for Self-powered system.
  • Embodiment 1 is a schematic structural view of a moisture generator provided in Embodiment 1.
  • Figure 2 is a scanning electron micrograph of the structure of the titanium dioxide nanowire network.
  • FIG 3 is a cross-sectional view showing the structure of a titanium dioxide nanowire network.
  • Figure 4 is a graph showing the results of the wetting angle test of water droplets on the titanium dioxide nanowire network structure.
  • Fig. 5 is a graph showing voltage and current output results of the moisture generator of the first embodiment in a humid atmosphere.
  • Fig. 6 is a schematic view showing the mechanical bending process of the wet gas generator of the first embodiment.
  • Fig. 7 is a graph showing the results of voltage output of the wet gas generator of the first embodiment after mechanical bending.
  • Figure 8 is a diagram showing the voltage output of the wet gas generator of Embodiment 2 in a humid environment.
  • Figure 9 is a cross-sectional view of a vertically grown titanium dioxide nanowire array synthesized by hydrothermal method in a comparative example.
  • Figure 10 is the wetting angle of water on a vertically grown titanium dioxide nanowire array.
  • Figure 11 is a graph showing the results of the voltage change across the humidity sensor as a function of humidity in the environment.
  • Figure 12 is a graph showing the voltage output of the respiratory monitoring sensor during human breathing.
  • Fig. 13 is a graph showing the voltage output of the finger pressing sensor during the pressing of the human finger.
  • Figure 14 is a graph showing the voltage output across the sensor when the human body drinks alcohol to the alcohol detection system.
  • Figure 15 is a graph showing the voltage output across the sensor when the human body drinks 100 ml of alcohol and then blows it into the alcohol detection system.
  • Figure 16 is a graph showing the voltage output across the sensor when the human body drinks 200 ml of alcohol and then blows it into the alcohol detection system.
  • Figure 17 is a graph showing the relationship between the thickness of the nanowire layer and the voltage.
  • the moisture generator comprises a substrate 1, a first electrode 2, a nanowire layer 3, and a second electrode 4, wherein:
  • the substrate is a flexible substrate made of polyethylene terephthalate having a size of 1 cm ⁇ 1 cm and a thickness of 50 ⁇ m;
  • the first electrode is layered, which is an indium tin oxide film having a thickness of 300 nm;
  • the nanowire layer is made of titanium dioxide nanowires with a diameter of 70-300 nm and a nanowire layer thickness of 10 ⁇ m; the nanowires cross each other to form a titanium dioxide nanowire network structure; the morphology of the titanium dioxide nanowires and the cross section of the coating 2 and 3 respectively; the titanium dioxide nanowire network structure has good hydrophilicity, and the wetting angle with water is 13 degrees, as shown in FIG. 4;
  • the second electrode is layered and made of aluminum and has a thickness of 100 nm.
  • the moisture generator is prepared according to the following steps:
  • the nanowire layer is formed by the following specific steps:
  • titanium dioxide nanowires were dispersed in an organic solvent (a mixed solution of 250 ml of alcohol, 4 ml of acetone and 2 ml of water), and stirred well until completely dispersed to form a titania nanowire sol.
  • organic solvent a mixed solution of 250 ml of alcohol, 4 ml of acetone and 2 ml of water
  • the substrate is placed in a heating oven at 100 ° C for 12 hours to dry, and a titanium dioxide nanowire layer is obtained to form a nanowire network structure.
  • Example 1 The actual test of the moisture generator based on the titanium dioxide nanowire structure obtained in Example 1 was carried out according to the following steps:
  • the moisture generator is placed in a humidity controllable cavity.
  • the output voltage of the moisture generator can reach about 0.5 volts in a short time;
  • the relative humidity drop in the cavity is 10%, the output voltage of the wet gas generator is about 0 volts;
  • the output voltage of the wet gas generator reaches about 0.5 volt again, as shown in Fig. 5.
  • the picture in a is shown.
  • the short-circuit current of the wet generator When the relative humidity in the cavity rises from 10% to 95%, the short-circuit current of the wet generator can reach about 8 ⁇ A in a short time. When the relative humidity in the cavity drops to 10%, the output voltage of the wet gas generator is about 0 microamperes, as shown in the figure b in Fig. 5.
  • the output power density of the wet gas generator of the present embodiment is 4 ⁇ W/cm -2 .
  • the bending resistance of the moisture generator was tested, as shown in Fig. 6, and the bending radius was 6 mm.
  • the voltage output of the wet gas generator is not shown to be significantly reduced as shown in Fig. 7, indicating that the mechanical performance of the wet gas generator based on the titanium dioxide nanowire network structure is better.
  • the moisture generator comprises a substrate 1, a first electrode 2, a nanowire layer 3, and a second electrode 4, wherein:
  • the substrate is a glass having a thickness of 1 mm and having a size of 1 cm x 1 cm;
  • the first electrode is layered, which is fluorine-doped tin oxide, and has a thickness of 300 nm;
  • the nanowire layer is made of titanium dioxide nanowires having a diameter of 70-300 nm and a nanowire layer having a thickness of 10 micrometers;
  • the second electrode is layered and made of aluminum and has a thickness of 100 nm.
  • the moisture generator is prepared according to the following steps:
  • a nanowire layer is formed on the surface of the first electrode by electrophoretic deposition, and the specific process is as follows
  • a second electrode having a thickness of 100 nm was formed on the surface of the nanowire layer by electron beam evaporation.
  • Example 2 The actual test was carried out on the moisture generator based on the titanium dioxide nanowire structure obtained in Example 2, specifically according to Example 1:
  • the moisture generator is placed in a humidity controllable cavity.
  • the output voltage of the moisture generator can reach about 0.5 volts in a short time;
  • the relative humidity drop in the cavity is 10%, the output voltage of the wet gas generator is about 0 volts;
  • the output voltage of the wet gas generator reaches about 0.5 volt again, as shown in Fig. 8. Shown.
  • Example 2 The electrophoretic deposited titanium dioxide nanowires in Example 2 were replaced by hydrothermal growth of nanowires to obtain a titanium dioxide nanowire array perpendicular to the substrate, the cross section of which is shown in FIG. Figure 9 shows the case where the nanowires are grown vertically, and the nanowire density is high, and the wetting angle of water on the vertical nanowire array is 80 degrees, as shown in Fig. 10, thereby indicating that the titanium dioxide nanowires are vertically arranged.
  • the hydrophilicity of the array is worse than that of the electrophoretic deposited nanowire network.
  • a second electrode having a thickness of 100 nm was formed on the surface of the nanowire layer by electron beam evaporation.
  • Example 1 The actual test of the moisture generator based on the titanium dioxide nanowire structure obtained in the present comparative example was carried out in accordance with Example 1:
  • the moisture generator is placed in a humidity controllable cavity.
  • the output voltage of the moisture generator can reach about 0.015 volts in a short time;
  • the moisture generator output voltage is approximately 0 volts when the relative humidity drop in the chamber is 10%.
  • the output voltage is only a wet gas generator using a titanium dioxide nanowire network structure. 3%.
  • the moisture generator of Embodiment 1 can detect the humidity level in the environment.
  • the output voltage of the moisture generator is related to the humidity level of the environment. When the humidity of the environment is high, the output voltage of the generator is high. Conversely, when the humidity of the environment is low, the output voltage of the generator is low.
  • the wet gas generator is used as a humidity sensor, the relationship between the output voltage at both ends and the humidity of the environment is shown in Fig. 11. It can be seen that the voltage of the sensor is positively correlated with the humidity level and can be applied to the humidity level of the detection environment.
  • the moisture generator of Embodiment 1 can be attached to the nasal cavity or the mouth of the human body for real-time monitoring of the respiratory rate of the human body.
  • the moisture generator output voltage is related to the respiratory rate and respiratory intensity, and the output voltage can be used to characterize the human respiratory rate.
  • Example 1 The moisture generator in Example 1 was attached as a sensor to a distance of 8 mm from the nasal cavity, and the voltage output across the sensor was changed as a healthy human body was breathing as shown in FIG. It can be seen that the frequency of the voltage pulse signal output by the sensor is consistent with the human respiratory frequency, and the voltage pulse can be clearly separated.
  • the voltage signal generated by the sensor itself can be used to characterize the breathing condition and does not require an external power supply.
  • the deformable moisture generator of Embodiment 1 can detect the touch of a human finger.
  • the output voltage of the wet gas generator is related to the pressing frequency and the pressing pressure, and the electrical signal output by the generator can be used to indicate whether the finger is pressed or not.
  • the moisture generator is attached to the surface of the human skin, and the electrode is led out by the copper wire, and the voltage across the device is measured in real time during the process of pressing the nanowire network structure with the finger.
  • the finger is pressed once every 1.5 seconds, the pressing pressure is about 4 kPa, and a voltage pulse signal with an amplitude of about 150 millivolts can be measured at both ends of the device, as shown in FIG. Adjacent voltage pulses do not overlap, and each pulse can be clearly distinguished, indicating that the response speed of the sensor is faster.
  • the moisture generator of Embodiment 1 can be used to drive an alcohol sensor to measure the alcohol level of the exhaled gas of the human body.
  • the generator is connected in series with a commercial alcohol sensor (TGS 822).
  • TGS 822 commercial alcohol sensor
  • the distance between the generator and the human mouth is 1 cm.
  • the human body exhales the generator and the alcohol sensor at a speed of 4 meters per second.
  • the peak voltage interval across the sensor is measured to be 20-45 millivolts, as shown in FIG.
  • the peak voltage interval across the sensor is about 10-15 millivolts, as shown in Figure 15.
  • the peak voltage interval across the sensor is about 2-6 millivolts, as shown in Figure 16. It shows that the alcohol detection system can detect the alcohol level of the exhaled gas of the human body more sensitively.

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Abstract

本发明涉及一种湿气发电机及其制备方法。该湿气发电机包括依次设置的基底、第一电极、纳米线层和第二电极，其中，所述纳米线层设置在所述第一电极和所述第二电极之间，其是由随机分布的纳米线组成。本发明还提供了上述湿气发电机的制备方法。本发明所提供的湿气发电机采用纳米线形成的网络结构，该结构具有良好的亲水性，并且其中所含有的大量纳米空隙对湿气扩散十分有利，能够使湿气发电机具有较高的功率输出密度。当湿气发电机的基底采用柔性材料制成时，配合具有良好柔性的纳米线层网络结构，使得湿气发电机具有良好的机械柔性，可以作为湿度传感器检测环境湿度，也可以贴在人体皮肤表面，实时监测人体呼吸状态、或作为可穿戴的触摸电子屏，还可以用于驱动酒精传感器。

Description

一种湿气发电机及其制备方法 技术领域
本发明涉及一种湿气发电机及其制备方法，属于新能源发电技术领域。
背景技术
近年来，随着能源危机和环境问题的逐渐加剧，清洁、可再生能源器件的研究和应用得到全球的关注。其中，太阳能、热能、机械振动能、风能、声波能、生物能源等陆续被用来发电，在自供电系统和可穿戴领域有广泛的应用前景。
然而，上述能源形式在应用上仍然有较多限制，例如太阳能发电装置在无光照时无法工作；机械振动在被用来发电的同时也可能降低系统的可靠性，风能发电装置在无风条件下无法工作。
最近，湿气作为自然界和生物过程中广泛存在的资源正被用来发电，扩展了自然界中可用来发电的资源。然而，现有的湿气发电方法输出功率密度较低，对于器件的机械柔性报道较少，而且湿气发电在自供电、可穿戴领域的报道较少鲜有报道。
发明内容
为解决上述技术问题，本发明的目的在于提供一种湿气发电机，该湿气发电机基于纳米线，具有较高的功率输出密度，具有良好的自发电功能。
为达到上述目的，本发明提供了一种湿气发电机，其包括依次设置的基底、第一电极、纳米线层和第二电极，其中，所述纳米线层设置在所述第一电极和所述第二电极之间，其是由随机分布的纳米线组成。
在本发明的湿气发电机中，第一电极、纳米线层和第二电极形成夹层发电结构，第一电极与第二电极作为发电结构的电压和电流的输出电极；在使用时，该结构暴露在有湿气的环境中，湿气在纳米线层中扩散，在第一电极和第二电极之间产生电势差，在第一电极与第二电极之间形成电荷流动，产生电流。上述湿气也可以称为水汽，其可以来自于环境空气、人体的呼吸、人体手指、动物的呼吸、挥发性液体等。
在本发明的一个具体实施方案中，随机分布是指在整个纳米线层内，纳米线以无规律的形式分布。当纳米线层以纳米线随机分布的方式存在时，纳米线可以相互交叉形成纳米线网络结构，例如图2和图3所示，纳米线相互之间会形成较多(相对于竖直排列的方式)的孔洞(或称空隙)，这样有助于湿气在纳米线层中的扩散，并且可以获得相对于竖直排列方式更高的功率输出密度。优选地，在上述纳米线网络结构中，纳米线相 互交叉形成的孔的孔径小于200纳米，优选大部分小于100纳米。这种随机分布的方式优选是采用电泳沉积的方法形成的。
在本发明的湿气发电机中，优选地，纳米线的材料具有正的Zeta电位或负的Zeta电位。
在本发明的湿气发电机中，优选地，所述纳米线的材料为电阻率大于100欧姆·米的材料，可以避免第一电极与第二电极短路。
在本发明的湿气发电机中，优选地，所述纳米线层为亲水性的。更优选地，所述纳米线层与水的接触角(或称润湿角)θ≤60°。纳米线层具有良好的亲水性，能够促进湿气等在纳米线层中的扩散，进而提高功率输出密度。
在本发明的湿气发电机中，纳米线层的厚度可以控制为1-100微米，优选为5-20微米。纳米线层的厚度与电压的关系如图17所示。
在本发明的湿气发电机中，所采用的纳米线可以为氧化钛纳米线和/或氧化锌纳米线。纳米线的直径优选为70-300纳米。
在本发明的湿气发电机中，基底、第一电极、第二电极均可以为层状或薄膜状。基底的厚度可以控制为10-5000微米。第一电极和第二电极的厚度分别可以为0.05-100微米。
在本发明的湿气发电机中，基底可以采用常见的基底材料，例如纯金属、合金、高分子材料或无机材料。其中，适于基底的纯金属可以为金、银、铂、铝、镍、铜、钛、铬或锡等；适于基底的合金的材料可以选自金、银、铂、铝、镍、铜、钛、铬和锡中的至少两种；适于高分子材料可以选自聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚酰亚胺、聚四氟乙烯、聚偏氟乙烯、聚酰胺、聚氯乙烯、聚二甲基硅烷、聚苯乙烯、聚乙烯、聚偏二氯乙烯、聚氯醚、聚甲基丙烯酸甲酯、聚乙烯醇、聚异丁烯、聚乙烯醇缩甲醛、聚丙烯腈、聚碳酸酯、聚对苯二甲酸丁二酯、聚萘二甲酸乙二醇酯、聚二氟二氯乙烯、对二甲苯环二体、乙烯-醋酸乙烯酯共聚物、全氟乙烯-丙烯共聚物、丙烯腈-丁二烯-苯乙烯三元共聚物和氯乙烯-醋酸乙烯共聚物等中的一种；适于基底的无机材料可以为陶瓷或玻璃，其中，陶瓷优选选自氧化硼、二氧化硅、氧化铝、氧化镁、氧化锆、氮化硅、氮化铝、氮化镓、氮化硼、氮化钛、碳化硼、碳化硅、碳化钛和硼化钛中的至少一种。
现有的柔性电路板等柔性器件的柔性仅是采用柔性基板，并未考虑器件整体的柔性，这些器件在经历了多次弯折之后，其相关性能会产生一定的下降，而现有的湿气发 电机对于柔性则基本没有关注。本发明的湿气发电机可以采用柔性材料基底，并配合纳米线层(纳米线层本身也具有良好的柔性)等结构，使湿气发电机具有整体柔性，在经过了一万次的机械弯折之后，其输出电压等性能并未出现明显下降。上述柔性材料基底的材质可以为聚对苯二甲酸乙二醇酯、聚酰亚胺、聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚四氟乙烯、聚偏氟乙烯、聚酰胺、聚氯乙烯、聚二甲基硅烷、聚苯乙烯、聚乙烯、聚偏二氯乙烯等。
在本发明的湿气发电机中，第一电极与第二电极是作为发电结构的电压和电流的输出电极，任何常规的电极材料均可以使用，第一电极和第二电极可以为层状或薄膜状，例如：第一电极和第二电极包括铟锡金属氧化物(ITO)薄膜、石墨烯薄膜、银纳米线膜涂层，或者，金、银、铂、铝、镍、铜、钛、铬、锡或其合金的一种所形成的层或薄膜。并且，第一电极与第二电极的材质可以相同，也可以不同。
本发明还提供了上述湿气发电机的制备方法，其包括以下步骤：
在基底上形成第一电极；
在第一电极的表面形成纳米线层；
在纳米线层的表面形成第二电极。
在制备本发明的湿气发电机时，第一电极和第二电极可以采用脉冲激光沉积、分子束外延、磁控溅射、离子镀、真空蒸镀、化学气相沉积、电镀、化学湿法和模板法中的任何一种方法沉积制备得到。纳米线层可以通过电泳沉积法、液滴涂布法(Drop-casting)或旋涂法形成。相比于液滴涂布法和旋涂法，当采用电泳沉积法时，所制备的纳米线层能够更加均匀、更加致密，能够避免第一电极和第二电极之间出现短路的情况，而且，在制备过程中也具有更高的效率。
在上述制备方法中，优选地，采用电泳沉积法形成纳米线层时按照以下步骤进行：
将纳米线分散于溶剂中，得到纳米线溶胶；
将形成了第一电极的基底置于溶胶中，插入另一导电基板，使基底带有第一电极的一侧与导电基板相对；
在基底与导电基板之间施加电压，使纳米线沉积到第一电极的表面，然后取出，经过烘干，形成纳米线层。
本发明还提供了一种湿度传感器，其包括上述湿气发电机。将湿气发电机置于要测量的环境中，环境中的湿气将会诱导发电机两端产生电压。并且，湿气发电机两端的输出电压由环境的湿度决定，湿度越大，发电机两端的输出电压越大；发电机两端输出电 压大小可以用来表征环境的湿度水平。具体工作原理是：当湿气发电机接触到环境中的湿气时，湿气中的离子在纳米线形成的通道中扩散，使离子在通道中择优流动，从而在第一电极和第二电极之间形成电势差。当湿度变高时，湿气中的水分子浓度变大，湿气中的离子浓度变高，在纳米线构成的通道中扩散的离子数目增多，湿气发电机第一电极和第二电极之间之间的电压变高。而当环境中的湿度变低时，湿气中的水分子浓度变小，湿气中的离子浓度变低，在纳米通道中扩散的离子数目增减少，湿气发电机第一电极和第二电极之间的电压降低。通过测量发电机两端的电压即可表征环境的湿度水平。考虑到本湿气发电机具有很好的形状自适应性，并且不需要额外的电路驱动，这种自驱动的柔性湿度传感器在环境监测领域有重要的应用前景。
本发明还提供了一种呼吸传感器，其包括上述湿气发电机。该湿气发电机设置在人的鼻腔或口腔附近，用于实时监测人体的呼吸频率。湿气发电机输出电压跟呼吸频率和呼吸强度有关，并且输出电压可以用来表征人体呼吸频率，其具体工作原理是：人体在呼吸过程中呼出的气体有较高的湿度，当呼出的气体与湿气发电机中的纳米线层接触时，湿气中的离子在纳米线形成的通道(即孔、空隙)中扩散，从而使离子在通道中择优流动，从而在第一电极和第二电极之间形成电势差。当人体吸气时，纳米线通道中的湿气蒸发分离，第一电极和第二电极之间电压会随之而下降。当人体周期性呼吸时，湿气发电机的第一电极和第二电极之间可以产生相应的周期性电信号。通过分析电信号的频率和大小可以得到关于人体呼吸频率和呼吸深度等信息。同时，考虑到本发明的湿气发电机具有很好的形状自适应性，并且产生的电压可直接用来分析人体的呼吸状况，而不需要额外的电路驱动，这种自驱动的可穿戴生物呼吸检测在未来的医疗监护和睡眠质量检测等方面会有重要的应用前景。
在用于呼吸传感器时，湿气发电机的基底材料优选采用对人体(或者动物体)无毒、与皮肤有较好粘接性、有一定形状自适应性的材料，特别是与人体面部直接接触的基底材料优选满足上述条件，例如聚甲基硅氧烷薄膜或聚对苯二甲酸乙二醇酯薄膜。
本发明还提供了一种手指触摸传感器，其包括上述湿气发电机。当用于手指触摸传感器时，湿气发电机可以检测人体手指的触摸。湿气发电机的输出电压与手指的按压频率和按压压力有关，发电机输出的电信号可用来表征手指的按压与否。具体工作原理是：当人体按压湿气发电机时，手指皮肤的湿气扩散到发电机，当湿气与纳米线层接触时，湿气中的离子在纳米线形成的通道中扩散，从而使离子在通道中择优流动，从而在第一电极和第二电极之间形成电势差。当人体手指离开湿气发电机时，纳米线通道中的湿气 蒸发分离，第一电极和第二电极之间的电压随之而下降。通过分析电信号的频率和大小可以得到关于人体手指的按压状况。同时考虑到本发明的湿气发电产生的电压可直接用来检测人体手指的按压，而不需要额外的电路驱动，这种自驱动的人体手指触摸传感器可在触摸板方面有较大的应用前景。
本发明还提供一种人体呼气中酒精浓度测试系统，该系统由上述湿气发电机的第一电极和第二电极以及商用酒精传感器(TGS 822)串联而成，酒精传感器两端的分压作为测量信号。其工作原理是：人体呼出的气体中含有湿气，湿气跟纳米线网络相互作用，诱使发电机第一电极和第二电极之间产生电压，该电压用以驱动酒精传感器。如果人体呼出的气体中含有一定浓度的酒精，那么酒精传感器的电阻会因为酒精的作用而发生变化，传感器两端的电压信号也会发生相应改变，通过分析信号强弱，则可以得出人体呼出的气体中的酒精水平。由于人体呼出的气体中的湿气与发电机相互作用产生了电压，并且该电压直接驱动了酒精传感器，从而酒精测试系统不需要额外的电路驱动。这种自驱动的气体检测系统在酒驾测试、人体健康监测等方面有较大的应用前景。
本发明所提供的湿气发电机采用纳米线形成的网络结构，该结构具有良好的亲水性，并且其中所含有的大量纳米空隙对湿气扩散十分有利，能够使湿气发电机具有较高的功率输出密度。另外，本发明的湿气发电机由第一电极、纳米线层、第二电极的三维堆叠结构组成，器件结构紧凑，易于制备，成本较低，有易于大批量加工制造。当湿气发电机的基底采用柔性材料制成时，配合具有良好柔性的纳米线层网络结构，可以使湿气发电机具有良好的机械柔性，可以作为传感器贴在人体皮肤表面，实时监测人体呼吸状态、或作为可穿戴的触摸电子屏；由于传感器本身即可输出与湿度相关的电压，该本征电压即可表征呼吸或者触摸状态，从而传感器工作时不需要额外的电路来驱动，尤其适用于自供电系统中。
附图说明
图1为实施例1提供的湿气发电机的结构示意图。
图2为二氧化钛纳米线网络结构的扫描电镜图。
图3为二氧化钛纳米线网络结构的截面图。
图4为水滴在二氧化钛纳米线网络结构上的润湿角测试结果图。
图5为实施例1的湿气发电机在湿气环境中的电压和电流输出结果图。
图6为实施例1的湿气发电机的机械弯折过程示意图。
图7为实施例1的湿气发电机在机械弯折后的电压输出结果图。
图8为实施例2的湿气发电机在湿气环境中的电压输出。
图9为对比例采用水热法合成的竖直生长的二氧化钛纳米线阵列截面图。
图10为水在竖直生长的二氧化钛纳米线阵列上的润湿角。
图11为湿度传感器两端的电压随环境中湿度变化结果图。
图12为呼吸监测传感器在人体呼吸过程中的电压输出结果图。
图13为手指按压传感器在人体手指按压过程中的电压输出结果图。
图14为人体饮酒前向酒精检测系统吹气时传感器两端电压输出结果图。
图15为人体饮100毫升酒后向酒精检测系统吹气时传感器两端电压输出结果图。
图16为人体饮200毫升酒后向酒精检测系统吹气时传感器两端电压输出结果图。
图17为纳米线层的厚度与电压的关系曲线。
具体实施方式
为了对本发明的技术特征、目的和有益效果有更加清楚的理解，现对本发明的技术方案进行以下详细说明，但不能理解为对本发明的可实施范围的限定。
实施例1
本实施例提供了一种湿气发电机，其结构如图1所示。该湿气发电机包括基底1、第一电极2、纳米线层3、第二电极4，其中：
基底为柔性基底，材质为聚对苯二甲酸乙二醇酯，其尺寸为1厘米×1厘米，厚度为50微米；
第一电极为层状，其为氧化铟锡薄膜，厚度为300纳米；
纳米线层的材质为二氧化钛纳米线，其直径分布在70-300纳米，纳米线层的厚度为10微米；纳米线相互交叉形成二氧化钛纳米线网络结构；二氧化钛纳米线的形貌和涂层的截面分别如图2和图3所示；二氧化钛纳米线网络结构的亲水性好，与水的润湿角为13度，如图4所示；
第二电极为层状，其材质为铝，厚度为100纳米。
该湿气发电机是按照以下步骤制备的：
采用磁控溅射法在基底上形成第一电极；
采用电泳沉积法在第一电极的表面形成纳米线层；
采用电子束蒸发法在纳米线层的表面形成第二电极；
纳米线层通过以下具体步骤形成：
(1)将0.5克二氧化钛纳米线分散于有机溶剂中(250毫升酒精、4毫升丙酮和2 毫升水组成的混合溶液)，并充分搅拌直至完全分散，形成二氧化钛纳米线溶胶。
(2)将形成有第一电极的基板置于溶胶中，取厚度为100微米的钛基板平行放置距基板5毫米的地方，并在基板和钛板之间施加30伏特的恒定电压，沉积1分钟后取出基板。
(3)将基板置于100℃的加热炉中放置12小时烘干，即可得到二氧化钛纳米线层，形成纳米线网络结构。
对实施例1所得到的基于二氧化钛纳米线结构的湿气发电机进行实际测试，具体按照以下步骤进行：
将湿气发电机置于一湿度可控的腔体中，当腔体中的相对湿度由10％上升到95％的时候，湿气发电机输出电压可在短时内达到约0.5伏特；当腔体中相对湿度降为10％时，湿气发电机输出电压约为0伏特；当腔体中相对湿度再次上升到95％时，湿气发电机输出电压再次达到约0.5伏特，如图5中的a图所示。
对湿气发电机的短路电流进行测试：当腔体中的相对湿度由10％上升到95％的时候，湿气发电机短路电流可在短时内达到约8微安。当腔体中相对湿度降为10％时，湿气发电机输出电压约为0微安，如图5中的b图所示。
通过计算可以得出：本实施例的湿气发电机的输出功率密度为4μW/cm -2。
对该湿气发电机的耐弯折性能进行测试，具体方式如图6所示，弯折半径为6毫米。在超过1万次机械弯折过程中，该湿气发电机的电压输出如图7所示，并未出现明显降低，说明基于二氧化钛纳米线网络结构的湿气发电机的机械柔性较好。
实施例2
本实施例提供了一种湿气发电机，其结构如图1所示。该湿气发电机包括基底1、第一电极2、纳米线层3、第二电极4，其中：
基底为厚度为1毫米的玻璃，其尺寸为1厘米×1厘米；
第一电极为层状，其为掺氟氧化锡，厚度为300纳米；
纳米线层的材质为二氧化钛纳米线，其直径分布在70-300纳米，纳米线层的厚度为10微米；
第二电极为层状，其材质为铝，厚度为100纳米。
该湿气发电机是按照以下步骤制备的：
采用磁控溅射法在基底上形成第一电极；
采用电泳沉积法在第一电极的表面形成纳米线层，具体工艺如下
(1)将0.5克二氧化钛纳米线分散于有机溶剂中(250毫升酒精、4毫升丙酮和2毫升水组成的混合溶液)，并充分搅拌直至完全分散，形成二氧化钛纳米线溶胶；
(2)将基板极置于溶胶中，取厚度为100微米的钛基板平行放置距基板5毫米的地方，并在基板和钛板之间施加30伏特的恒定电压，沉积1分钟后取出基板；
(3)将基板置于100℃的加热炉中放置12小时烘干，即可得到二氧化钛纳米线层，形成纳米线网络结构；
采用电子束蒸发法在纳米线层的表面形成厚度为100纳米的第二电极。
对实施例2所得到的基于二氧化钛纳米线结构的湿气发电机进行实际测试，具体按照实施例1进行：
将湿气发电机置于一湿度可控的腔体中，当腔体中的相对湿度由10％上升到95％的时候，湿气发电机输出电压可在短时内达到约0.5伏特；当腔体中相对湿度降为10％时，湿气发电机输出电压约为0伏特；当腔体中相对湿度再次上升到95％时，湿气发电机输出电压再次达到约0.5伏特，如图8所示。
对比例
将实施例2中的电泳沉积二氧化钛纳米线换成水热法生长纳米线，得到垂直于基板的二氧化钛纳米线阵列，其截面如图9所示。图9显示是纳米线竖直生长的情况，并且纳米线密度高，水在竖直纳米线阵列上的润湿角为80度，如图10所示，由此可以说明二氧化钛纳米线竖直排列的阵列的亲水性比电泳沉积的纳米线网络结构要差。
采用电子束蒸发法在纳米线层的表面形成厚度为100纳米的第二电极。
对本对比例所得到的基于二氧化钛纳米线结构的湿气发电机进行实际测试，具体按照实施例1进行：
将湿气发电机置于一湿度可控的腔体中，当腔体中的相对湿度由10％上升到95％的时候，湿气发电机输出电压可在短时内达到约0.015伏特；当腔体中相对湿度降为10％时，湿气发电机输出电压约为0伏特。与采用二氧化钛纳米线网络结构的湿气发电机相比，采用二氧化钛纳米线竖直排列的阵列的湿气发电机在相同湿气环境中，输出电压只有采用二氧化钛纳米线网络结构的湿气发电机的3％。
实施例3
实施例1的湿气发电机可以检测环境中的湿度水平。湿气发电机输出电压跟环境的湿度水平相关，环境的湿度高时，发电机输出电压高。反之，环境的湿度较低时，发电机的输出电压较低。湿气发电机作为湿度传感器时，两端的输出电压跟环境的湿度关系 如图11所示。由此看出，传感器的电压跟湿度水平呈正相关可应用于检测环境的湿度水平。
实施例4
实施例1的湿气发电机可以贴在人体鼻腔或口腔附近，用于实时监测人体的呼吸频率。湿气发电机输出电压跟呼吸频率和呼吸强度有关，并且输出电压可用来表征人体呼吸频率。
将实施例1中的湿气发电机作为传感器贴在距离鼻腔8毫米的地方，传感器两端的电压输出随着健康人体呼吸过程中的变化如图12所示。由此可以看出，传感器输出的电压脉冲信号频率跟人体呼吸频率一致，电压脉冲之可以清晰分开。该传感器自身产生的电压信号即可用来表征呼吸状况，不需要外部电源供电。
实施例5
实施例1的可变形湿气发电机可以检测人体手指的触摸。湿气发电机输出电压跟按压频率和按压压力有关，发电机输出的电信号可用来表征手指的按压与否。将湿气发电机贴在人体皮肤表面，并用铜导线引出电极，在手指按压纳米线网络结构过程中实时测量器件两端的电压。手指每隔1.5秒左右按压一次发电机，按压压力约为4千帕斯卡，器件两端可以测量到幅值约为150毫伏特的电压脉冲信号，如图13所示。相邻的电压脉冲没有出现重叠，各脉冲可以清楚地分辨出来，说明该传感器的响应速度较快。
实施例6
实施例1的湿气发电机可以用来驱动酒精传感器，从而测量人体呼出气体的酒精水平。将发电机和商用酒精传感器(TGS 822)串联，发电机距离人体口腔的距离为1厘米，人体以4米每秒的速度向发电机和酒精传感器呼气。当人体未饮酒时，测得传感器两端的峰值电压区间为20-45毫伏特，如图14所示。当人体饮完100毫升啤酒后，对着发电机和传感器呼气，传感器两端的峰值电压区间约为10-15毫伏特，如图15所示。而当人体饮完200毫升啤酒后，再对着发电机和传感器呼气时，传感器两端的峰值电压区间约为2-6毫伏特，如图16所示。说明该酒精检测系统可以较为灵敏的检测人体呼出气体的酒精水平。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明。凡不脱离本发明技术方案范围和原则之内做出任何的修饰、变动、修改或改进等变化，均应在本发明的保护范围内。

Claims (32)

  1. 一种湿气发电机，其包括依次设置的基底、第一电极、纳米线层和第二电极，其中，所述纳米线层设置在所述第一电极和所述第二电极之间，其是由随机分布的纳米线组成，所述纳米线相互交叉形成纳米线网络结构。
  2. 根据权利要求1所述的湿气发电机，其中，所述随机分布是指在整个纳米线层内，纳米线以无规律的形式分布。
  3. 根据权利要求2所述的湿气发电机，其中，在所述纳米线网络结构中，纳米线相互交叉形成的孔的孔径小于200纳米。
  4. 根据权利要求1所述的湿气发电机，其中，所述纳米线的材料为电阻率大于100欧姆·米的材料。
  5. 根据权利要求1所述的湿气发电机，其中，所述纳米线的材料具有正的Zeta电位或负的Zeta电位。
  6. 根据权利要求1所述的湿气发电机，其中，所述纳米线层为亲水性的。
  7. 根据权利要求6所述的湿气发电机，其中，所述纳米线层与水的接触角θ≤60°。
  8. 根据权利要求1所述的湿气发电机，其中，所述纳米线为氧化钛纳米线和/或氧化锌纳米线。
  9. 根据权利要求1所述的湿气发电机，其中，所述纳米线层的厚度为1-100微米。
  10. 根据权利要求9所述的湿气发电机，其中，所述纳米线层的厚度为5-20微米。
  11. 根据权利要求1所述的湿气发电机，其中，所述纳米线的直径为70-300纳米。
  12. 根据权利要求1所述的湿气发电机，其中，所述基底为层状或薄膜状。
  13. 根据权利要求12所述的湿气发电机，其中，所述基底的厚度为10-5000微米。
  14. 根据权利要求1所述的湿气发电机，其中，所述第一电极和所述第二电极均为层状或薄膜状。
  15. 根据权利要求14所述的湿气发电机，其中，所述第一电极和所述第二电极的厚度分别为0.05-100微米。
  16. 根据权利要求1所述的湿气发电机，其中，所述基底的材料为纯金属、合金、高分子材料或无机材料。
  17. 根据权利要求16所述的湿气发电机，其中，所述纯金属为金、银、铂、铝、镍、铜、钛、铬或锡。
  18. 根据权利要求16所述的湿气发电机，其中，所述合金的材料选自金、银、铂、 铝、镍、铜、钛、铬和锡中的至少两种。
  19. 根据权利要求16所述的湿气发电机，其中，所述高分子材料选自聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚酰亚胺、聚四氟乙烯、聚偏氟乙烯、聚酰胺、聚氯乙烯、聚二甲基硅烷、聚苯乙烯、聚乙烯、聚偏二氯乙烯、聚氯醚、聚甲基丙烯酸甲酯、聚乙烯醇、聚异丁烯、聚乙烯醇缩甲醛、聚丙烯腈、聚碳酸酯、聚对苯二甲酸丁二酯、聚萘二甲酸乙二醇酯、聚二氟二氯乙烯、对二甲苯环二体、乙烯-醋酸乙烯酯共聚物、全氟乙烯-丙烯共聚物、丙烯腈-丁二烯-苯乙烯三元共聚物和氯乙烯-醋酸乙烯共聚物中的一种。
  20. 根据权利要求16所述的湿气发电机，其中，所述无机材料为陶瓷或玻璃。
  21. 根据权利要求20所述的湿气发电机，其中，所述陶瓷选自氧化硼、二氧化硅、氧化铝、氧化镁、氧化锆、氮化硅、氮化铝、氮化镓、氮化硼、氮化钛、碳化硼、碳化硅、碳化钛和硼化钛中的至少一种。
  22. 根据权利要求1所述的湿气发电机，其中，所述基底为柔性材料基底。
  23. 根据权利要求22所述的湿气发电机，其中，所述柔性材料基底的材质为聚对苯二甲酸乙二醇酯、聚酰亚胺、聚萘二甲酸乙二醇酯、聚四氟乙烯、聚偏氟乙烯、聚酰胺、聚氯乙烯、聚二甲基硅烷、聚苯乙烯、聚乙烯或聚偏二氯乙烯。
  24. 根据权利要求1所述的湿气发电机，其中，所述第一电极包括铟锡金属氧化物薄膜、石墨烯薄膜、银纳米线膜涂层，或者，金、银、铂、铝、镍、铜、钛、铬、锡或其合金的一种所形成的层或薄膜；
    所述第二电极包括铟锡金属氧化物薄膜、石墨烯薄膜、银纳米线膜涂层，或者，金、银、铂、铝、镍、铜、钛、铬、锡或其合金的一种所形成的层或薄膜。
  25. 权利要求1所述的湿气发电机的制备方法，其包括以下步骤：
    在基底上形成第一电极；
    在第一电极的表面形成纳米线层；
    在纳米线层的表面形成第二电极。
  26. 根据权利要求25所述的制备方法，其中，所述纳米线层通过电泳沉积法、液滴涂布法或旋涂法形成。
  27. 根据权利要求25所述的制备方法，其中，采用电泳沉积法形成纳米线层时按照以下步骤进行：
    将纳米线分散于溶剂中，得到纳米线溶胶；
    将形成了第一电极的基底置于溶胶中，插入另一导电基板，使基底带有第一电极的一侧与导电基板相对；
    在基底与导电基板之间施加电压，使纳米线沉积到第一电极的表面，然后取出，经过烘干，形成纳米线层。
  28. 一种湿度传感器，其中包括权利要求1所述的湿气发电机。
  29. 一种呼吸传感器，其包括权利要求1所述的湿气发电机。
  30. 根据权利要求29所述的呼吸传感器，其中，所述湿气发电机设置在人的鼻腔或口腔附近。
  31. 一种手指触摸传感器，其包括权利要求1所述的湿气发电机。
  32. 一种酒精检测器，其中包括权利要求1所述的湿气发电机。
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