WO2019131277A1 - Procédé de fabrication d'ensemble élément optique - Google Patents

Procédé de fabrication d'ensemble élément optique Download PDF

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Publication number
WO2019131277A1
WO2019131277A1 PCT/JP2018/046334 JP2018046334W WO2019131277A1 WO 2019131277 A1 WO2019131277 A1 WO 2019131277A1 JP 2018046334 W JP2018046334 W JP 2018046334W WO 2019131277 A1 WO2019131277 A1 WO 2019131277A1
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WIPO (PCT)
Prior art keywords
optical element
prism
axis
optical
light
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PCT/JP2018/046334
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English (en)
Japanese (ja)
Inventor
守 藤村
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オリンパス株式会社
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Publication of WO2019131277A1 publication Critical patent/WO2019131277A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors

Definitions

  • the present invention relates to a method of manufacturing an optical element assembly.
  • Priority is claimed on Japanese Patent Application No. 2017-252602, filed Dec. 27, 2017, the content of which is incorporated herein by reference.
  • Patent Document 1 proposes that a wedge-shaped prism be provided in part of a prism assembly in order to adjust the deviation from the design value of the incident optical axis and the outgoing optical axis in the manufacturing process of the prism assembly. It is done.
  • the wedge-shaped prism is joined to the other prisms of the prism assembly after being rotationally adjusted about the optical axis.
  • the present invention has been made in view of the above circumstances, and an optical element assembly in which the deviation from the design value of the outgoing optical axis with respect to the incoming optical axis is suppressed without adding the adjustment member is easily performed. It is an object of the present invention to provide a method of manufacturing an optical element assembly that can be manufactured.
  • a first bonding surface which is one of the optical surfaces of the first optical element by holding the first optical element and the second optical element.
  • the second bonding surface which is one of the optical surfaces of the second optical element, face each other with an uncured adhesive interposed therebetween, and the outer central axis of the first optical element and the outer center of the second optical element
  • the inspection light is incident to the second optical element, and the return light formed by transferring the inspection light into the first optical element and the second optical element is generated.
  • Process B in which the emission optical axis from the second optical element has a predetermined positional relationship; Curing the adhesive of and a step C of forming a cured adhesive layer.
  • the step A includes the step a of holding the first optical element in a sleeve;
  • the second optical element is inserted from an annular insertion portion having a central axis at a position coinciding with the central axis of the second optical element, and the second joint surface is brought into contact with the first joint surface.
  • the step b of holding the second optical element at the insertion portion, and the separation of the sleeve and the insertion portion along the reference axis allows the second optical element to be
  • the method may include the step c of separating the first optical element and the second optical element, and the step d of disposing the adhesive between the first bonding surface and the second bonding surface.
  • a point at which the reference axis intersects the second bonding surface is a rotation center.
  • the first bonding surface and the second bonding surface may be moved in an inclined manner with respect to the reference axis by relatively rotating the second optical element relative to the first optical element.
  • an optical element assembly in which the deviation from the design value of the outgoing optical axis with respect to the incident optical axis is suppressed without adding adjustment members is facilitated Can be manufactured.
  • FIG. 1 is a schematic front view showing an example of an optical element assembly manufactured by the method of manufacturing an optical element assembly according to an embodiment of the present invention.
  • the optical element assembly manufactured by the method of manufacturing an optical element assembly according to the present embodiment is configured by bonding a plurality of optical elements using an adhesive.
  • the optical element assembly is not particularly limited in type and number of optical elements. For example, a prism, a lens, a parallel plate, a mirror, a polarizing element, a filter element etc. are mentioned as an optical element.
  • the optical element assembly is configured by bonding a first optical element composed of one or more optical elements and a second optical element composed of one or more optical elements by an adhesive cured layer.
  • the adhesive cured layer is formed between a first bonding surface, which is one of the optical surfaces of the first optical element, and a second bonding surface, which is one of the optical surfaces of the second optical element.
  • first and second are used to distinguish the two optical elements, and represent the arrangement order of the optical elements in the designed optical path. Absent. Therefore, either of the first optical element and the second optical element may be disposed on the object side.
  • An optical surface is a surface or interface that performs optical action on incident light, such as transmission, refraction, reflection, polarization selection, wavelength selection, and the like.
  • the optical surface may be, for example, a prism surface, a lens surface, a flat surface, a mirror surface, a polarization surface, a filter surface, or the like according to the type of the optical element.
  • the first bonding surface and the second bonding surface may be a curved surface or a flat surface as long as they have substantially the same surface shape. Therefore, the adhesive cured layer provided between the first bonding surface and the second bonding surface is formed of a thin film. As described later, in the present embodiment, the relative position of the first bonding surface and the second bonding surface is adjusted, so the thickness of the adhesive cured layer may change depending on the place.
  • the optical element assembly 4 shown in FIG. 1 is an example of an optical element assembly manufactured by the method of manufacturing an optical element assembly of the present embodiment.
  • the optical element assembly 4 includes a first prism 2 (second optical element) and a junction prism 1 (first optical element).
  • the first prism 2 and the cemented prism 1 are bonded to each other with the adhesive cured layer 3 interposed therebetween.
  • the adhesive cured layer 3 is formed of a cured body of an appropriate light transmitting resin adhesive capable of adhering the first prism 2 and the junction prism 1 to each other.
  • the curing method of the adhesive forming the adhesive cured layer 3 is not particularly limited.
  • an adhesive for forming the adhesive cured layer 3 an energy ray-curable resin adhesive cured by energy rays such as UV light, a thermosetting resin adhesive cured by heating, etc. may be used. Good.
  • Either of the first prism 2 and the cemented prism 1 may be disposed on the object side.
  • the design of the optical element assembly 4 based on the designed optical path layout in the case where the incident light L1 enters the first prism 2 and is emitted from the cemented prism 1 as the output light L7.
  • the above configuration is described.
  • ray tracing is performed by causing various light beams to enter the optical system.
  • the arrangement of the optical surface such that the optical characteristics such as aberration are optimum and the optical path of the on-axis luminous flux which is an effective luminous flux in design are determined.
  • An axial chief ray which is a chief ray of an axial light flux, is an axial line connecting the center of the light flux of the axial light flux, and is a light beam passing through the optical axis of the axial light flux. Therefore, in the following description, unless otherwise specified, the incident light L1 is the designed axial light flux, and the optical axis of the incident light L1 coincides with the designed optical axis of the optical element assembly 4 .
  • the first prism 2 includes a first surface 2a (optical surface) which is an incident surface of the incident light L1, and a second surface 2b (an optical surface, a second bonding surface) which is an emitting surface.
  • the first surface 2a and the second surface 2b are both flat.
  • the second surface 2b is inclined at an acute angle with the normal to the first surface 2a.
  • the second surface 2 b constitutes a second bonding surface of the first prism 2.
  • a prism side surface 2c is formed on the side between the first surface 2a and the second surface 2b.
  • the shape of the prism side surface 2c is not particularly limited.
  • the prism side surface 2c may be a cylindrical surface, an elliptic cylindrical surface, a prismatic surface, or the like.
  • the size of the diameter of the first prism 2 (hereinafter referred to as the diameter of the first prism 2) in the range where the prism side surface 2c is formed is d2.
  • the first prism 2 is made of, for example, a glass material, a transparent resin material, or the like.
  • the incident light L1 may be shifted from the center of the first surface 2a depending on the design intention or the relationship with other optical systems combined with the optical element assembly 4.
  • the incident light L1 is incident on the first surface 2a in a state of being coaxial with the central axis O2 of the prism side surface 2c of the first prism 2.
  • the angle of incidence on the first surface 2a of the incident light L1 represents a theta i
  • the theta i is 0 degrees.
  • the incident light L1 enters the first surface 2a, passes through the first surface 2a, becomes light L2, and travels straight along the central axis O2.
  • the light L2 reaches the second surface 2b, it becomes light L3 and passes through the second surface 2b.
  • the z-axis is a normal passing through the center of the first surface 2a.
  • the z-axis is coaxial with the central axis O 2 of the prism side surface 2 c of the first prism 2.
  • the positive direction of the z-axis is a direction from the first surface 2a to the second surface 2b (a direction from the left side to the right side in FIG. 1).
  • the z-axis is an axis along which the on-axis chief ray of the light L2 travels in the first prism 2.
  • the y-axis is an axis parallel to the first surface 2a and the second surface 2b among axes perpendicular to the z-axis.
  • the positive direction of the y-axis is the direction from the back side to the front side of the sheet.
  • the x-axis is an axis perpendicular to the z-axis and the y-axis.
  • the positive direction of the x axis is a direction from the lower side to the upper side.
  • the xyz coordinate system is a right-handed orthogonal coordinate system.
  • the cemented prism 1 is formed by cementing the second prism 1A and the third prism 1B with each other.
  • the second prism 1A and the third prism 1B are made of, for example, a glass material, a transparent resin material, or the like.
  • the refractive index of the material of the second prism 1A is larger than the refractive index of the material of the third prism 1B.
  • the refractive index of the material of the second prism 1A may be the same as or different from the refractive index of the material of the first prism 2. In the example shown in FIG. 1, the materials of the second prism 1A and the first prism 2 are different from each other.
  • the second prism 1A is a quadrangular prism when viewed from the y-axis direction.
  • the second prism 1A has a first surface 1a (first joint surface), a second surface 1b, and a third surface 1c as optical surfaces.
  • the first surface 1 a is an incident surface on which the light L 3 enters the cemented prism 1.
  • the first surface 1a is a flat surface.
  • the first surface 1 a is bonded to the second surface 2 b of the first prism 2 by the adhesive cured layer 3. For this reason, the first surface 1 a constitutes a first bonding surface of the cemented prism 1.
  • the first surface 1a is disposed in parallel with the second surface 2b, sandwiching the adhesive cured layer 3 having a constant layer thickness in design.
  • the light L3 emitted from the second surface 2b passes through the adhesive cured layer 3 and is incident on the first surface 1a.
  • the light L3 is refracted according to the difference in refractive index between the first prism 2 and the second prism 1A.
  • the light L3 travels obliquely in the positive x-axis direction as it travels in the positive z-axis direction by the light L2 being refracted by the first surface 1a.
  • the second surface 1b is an optical surface that internally reflects the light L3.
  • the second surface 1b is formed by the interface of the junction of the second prism 1A and the third prism 1B.
  • the second surface 1b is a flat surface disposed on the z-axis positive direction side of the first surface 1a.
  • the second surface 1b is disposed in parallel to the y-axis, similarly to the first surface 1a.
  • the inclination angle of the second surface 1 b with respect to the z-axis is smaller than that of the first surface 1 a. Therefore, when the light L3 is reflected by the second surface 1b, it travels as the light L4 in the diagonal direction toward the x-axis negative direction as it travels in the z-axis positive direction.
  • the third surface 1c is an optical surface that internally reflects the light L4.
  • the third surface 1c is formed on a part of the outer surface in the negative direction of the x-axis in the second prism 1A.
  • the third surface 1c is a flat surface disposed on the x-axis negative direction side of the second surface 1b.
  • the third surface 1c is disposed parallel to the y-axis, as with the second surface 1b. However, the inclination angle of the third surface 1c with respect to the z axis is smaller than that of the second surface 1b.
  • the light L4 when the light L4 is reflected by the third surface 1c, the light L4 travels as the light L5 in the diagonal direction toward the x-axis positive direction as it travels in the z-axis positive direction.
  • the light L5 is reflected in an oblique direction approaching the z-axis in the zx plane.
  • the third surface 1c may be provided with a reflection coating to increase the reflectance.
  • the light L5 which is the reflected light of the third surface 1c reaches the second surface 1b
  • the light L5 passes through the second surface 1b, becomes light L6, and enters the third prism 1B.
  • the light L6 since the light L6 is refracted by the second surface 1b, the light L6 travels in a diagonal direction closer to the z-axis.
  • the fourth surface 1d is an optical surface formed of a plane that transmits the light L6.
  • the fourth surface 1d is an exit surface that emits the outgoing light L7 made of the transmitted light of the light L6.
  • Fourth surface 1d is emitted light L7 is provided so as to emit at a predetermined emission angle theta o.
  • the fourth surface 1 d is a flat surface disposed on the x-axis positive direction side of the second surface 1 b.
  • the fourth surface 1d is disposed parallel to the y-axis, similarly to the second surface 1b.
  • the inclination angle of the fourth surface 1d with respect to the z-axis is larger than that of the second surface 1b. Therefore, as the light L6 is refracted by the fourth surface 1d, the outgoing light L7 travels obliquely in the positive x-axis direction as it travels in the positive z-axis direction.
  • the shapes of the prism side 1e excluding the third surface 1c in the second prism 1A and the prism side 1f of the third prism 1B are not particularly limited.
  • the prism side surfaces 1e and 1f may be cylindrical surfaces, elliptical cylindrical surfaces, prismatic surfaces, or the like.
  • the prism side faces 1e and 1f are cylindrical surfaces coaxial with each other will be described.
  • the diameter of the second prism 1A in the range in which the prism side 1e is formed (hereinafter referred to as the diameter of the second prism 1A) and the diameter of the third prism 1B in the range in which the prism side 1f is formed (hereinafter, the third prism Although they may be different from each other as the diameter of 1 B), hereinafter, an example in which the size of each of these diameters is d1 will be described.
  • the central axis O1 of the prism side faces 1e and 1f is disposed coaxially with the z axis in design.
  • the diameter size d1 of the second prism 1A and the third prism 1B and the diameter size d2 of the first prism 2 may be different from each other or may be equal to each other.
  • the optical element assembly 4 outputs the incident light L1 incident from the first surface 2a along the z-axis in the zx plane, deflected in a direction rotated by ⁇ o counterclockwise in the figure. It is a light deflection element to be emitted as the emitted light L7.
  • the optical element assembly 4 includes the first surface 2a, the second surface 2b, the first surface 1a, the second surface 1b, the third surface 1c, and the second surface along the above-described optical path in order to realize deflection of light. 1b and 4th surface 1d are arranged in this order. Since the optical element assembly 4 has the prism side faces 2c, 1e, 1f made of cylindrical surfaces on the outer peripheral part, the optical element assembly 4 has a substantially cylindrical shape as a whole.
  • the optical element assembly 4 may be attached to an appropriate optical device with only the first prism 2, the second prism 1A, and the third prism 1B assembled, or may be attached to an appropriate holder.
  • the optical unit 6 may be formed by fixing the optical element assembly 4 to the inside of the cylindrical lens barrel 5.
  • the size of the inner diameter of the inner peripheral surface 5a of the lens barrel 5 is d5, which is larger than both d2 and d1.
  • the optical element assembly 4 can be inserted inside the inner peripheral surface 5a of the barrel 5 by forming the outer diameter to be less than d5.
  • the optical element assembly 4 is fixed to the barrel 5 in a state of being positioned in the range of a gap between the optical element assembly 4 and the inner circumferential surface 5 a.
  • adhesion is used as a method of fixing the optical element assembly 4.
  • the main optical performance as a light deflection element in the optical element assembly 4 is the size and direction of the outgoing angle of the outgoing light L7.
  • the size and direction of the emission angle of the emission light L7 are determined from the design values by accumulating the position error and the attitude error of the optical surface in the optical element assembly 4 caused by the manufacturing error of the first prism 2 and the cemented prism 1. Change. As described below, in the method of manufacturing an optical element assembly according to this embodiment, the emitted light is adjusted by adjusting the relative position between the cemented prism 1 and the first prism 2 when the optical element assembly 4 is manufactured.
  • the size and direction of the emission angle of L7 are within the allowable range.
  • FIG. 2 is a schematic vertical sectional view showing an example of an optical element bonding apparatus that can be used in the method of manufacturing an optical element assembly according to the embodiment of the present invention.
  • the optical element bonding apparatus 10 includes a first holding unit 11, a second holding unit 12, a gonio stage 13, a stage driving unit 14, an autocollimator 15, and a UV light source 16.
  • the optical element bonding apparatus 10 further includes adhesive application means (not shown).
  • the XYZ coordinate system described in FIG. 2 may be used.
  • the arrangement attitude of the optical element bonding apparatus 10 is not limited to such an arrangement attitude.
  • the optical element bonding apparatus 10 may be disposed in an orientation in which the XYZ coordinate system is appropriately rotated.
  • the Z axis is a vertical axis.
  • the positive direction of the Z axis is vertically upward.
  • the X axis and the Y axis are two axes orthogonal to each other in a horizontal plane orthogonal to the Z axis.
  • the X axis is a coordinate axis extending in the left and right direction in the drawing.
  • the positive direction of the X axis is the direction from the left side to the right side in the drawing.
  • the Y axis is a coordinate axis extending in the depth direction of the drawing.
  • the positive direction of the Y axis is the direction from the front side to the back side of the drawing.
  • the first holding unit 11 is a device portion that holds the cemented prism 1 and translates the cemented prism 1 in a direction (Z-axis direction) along at least the Z-axis.
  • the first holding unit 11 includes a holding sleeve 11A, a moving stage 11B, and a driving unit 11C.
  • the holding sleeve 11A includes a sleeve 11a (cylindrical body) and a bottom plate 11d.
  • the sleeve 11a is formed of a cylindrical body capable of housing the junction prism 1 and a part of the first prism 2 inside.
  • a first inner circumferential surface 11b and a second inner circumferential surface 11c which are cylindrical surfaces coaxial with the central axis C of the sleeve 11a, are formed in this order.
  • the first inner circumferential surface 11b is a cylindrical surface which can insert the cemented prism 1 along the central axis O1 and positions the cemented prism 1 in a direction perpendicular to the central axis O1 in the inserted state.
  • the size Db of the inner diameter of the first inner circumferential surface 11b is a size that allows the prism side faces 1e and 1f to be movably fitted in the z-axis direction.
  • the second inner circumferential surface 11c is a cylindrical surface into which the cemented prism 1 can be inserted along the central axis O1 and the first prism 2 along the central axis O2.
  • the inner diameter of the second inner circumferential surface 11c can be such that the first prism 2 can be inclined within an angle range in which the manufacturing error of the cemented prism 1 and the first prism 2 can be corrected inside the second inner circumferential surface 11c.
  • the size Dc of the inner diameter of the second inner circumferential surface 11c is d0 ⁇ Dc ⁇ d2 + 2 ⁇ ⁇ .
  • Dc is equal to or less than the size d5 of the inner diameter of the barrel 5 in which the optical element assembly 4 is assembled.
  • the bottom plate 11 d is a member that covers the end of the first holding portion 11 in which the first inner circumferential surface 11 b is formed.
  • a holding surface 11e for holding the cemented prism 1 is formed in the inside of the sleeve 11a in contact with the fourth surface 1d of the cemented prism 1.
  • the shape of the holding surface 11e is not particularly limited as long as the central axis O1 of the cemented prism 1 can be coaxially arranged with the central axis C of the holding sleeve 11A.
  • the holding surface 11e may be a plane inclined with respect to the central axis C by the same angle as the inclination angle of the fourth surface 1d with respect to the central axis O1.
  • the central axis O1 of the cemented prism 1 is coaxial with the central axis C in a state where the fourth surface 1d is in close contact with the holding surface 11e.
  • the second inner circumferential surface 11c of the holding sleeve 11A opens in the positive Z-axis direction.
  • the moving stage 11B makes the central axis C of the holding sleeve 11A parallel to the Z axis.
  • the moving stage 11B moves the holding sleeve 11A in the Z-axis direction.
  • the movement stage 11B may be configured to include a linear movement stage having a movement degree of freedom at least in the Z-axis direction.
  • the drive unit 11C has an operation unit (not shown). The drive unit 11C drives the moving stage 11B based on the operation input from the operator via the operation unit (not shown).
  • the second holding unit 12 holds the first prism 2 so that the first surface 2a as the second bonding surface tilts at least one point on the second surface 2b of the first prism 2. This is a device for rotating the first prism 2 relative to the cemented prism 1.
  • the second holding unit 12 includes a chuck 12A, a support arm 12B, a gonio stage 13, and a stage driving unit 14.
  • the chuck 12 ⁇ / b> A detachably holds the prism side surface 2 c of the first prism 2.
  • the chuck 12A holds the first prism 2 such that the central axis O2 of the first prism 2 is coaxial with the holding central axis H of the chuck 12A.
  • the support arm 12B has a predetermined positional relationship with the rotational center of the gonio stage 13 described later by the chuck 12A.
  • the support arm 12B may be provided with a position adjustment mechanism that adjusts the support position of the chuck 12A in order to be able to arrange an optical element having a shape different from that of the first prism 2 described above at the same predetermined position.
  • a position adjustment mechanism may include, for example, a moving stage having an appropriate degree of freedom of movement.
  • the gonio stage 13 is a rotation stage having a rotation center (rotation center) Q on an axis parallel to the Z axis.
  • the rotational direction of the gonio stage 13 can be selected between the direction around one axis and the directions around two axes orthogonal to each other as needed.
  • the rotational direction of the gonio stage 13 is uniaxial if it is possible to obtain necessary optical characteristics even with the pivotal movement about one axis. It may be a turning direction. However, it is more preferable that the rotational direction of the gonio stage 13 be capable of rotating around two axes.
  • the gonio stage 13 includes a base portion 13A mounted on a plane parallel to the XY plane, and a moving portion 13B moving along a guide surface 13a on the base portion 13A.
  • support arms 12B of the second holding unit 12 are provided to intersect (orthogonal).
  • the guide surface 13a has, for example, a cylindrical surface having a radius R centered on a rotation center axis passing through the rotation center Q when the gonio stage 13 rotates in a direction around one axis.
  • the guide surface 13a may be configured as a spherical surface having a radius R centered on the rotation center Q.
  • the gonio stage 13 may be configured such that the gonio stage rotating in the direction around one axis is overlapped in two stages such that the rotation center axes thereof are orthogonal to each other at the rotation center Q. In this case, the turning radius of each gonio stage differs from each other.
  • the gonio stage 13 will be described as being configured to rotate in a direction around two axes. Specifically, the gonio stage 13 can rotate around an axis parallel to the Y-axis intersecting at the rotation center Q and around an axis parallel to the X-axis.
  • the second holding portion 12 on the moving portion 13B is adjusted in position as necessary, so that the rotation center Q is an extension of the holding central axis H of the chuck 12A at least before the adjustment described later is started.
  • the holding central axis H of the chuck 12A is disposed in parallel with the Z axis.
  • the stage drive unit 14 has an operation unit (not shown).
  • the stage drive unit 14 drives the gonio stage 13 based on an operation input from the operator via an operation unit (not shown).
  • the autocollimator 15 is a device portion that makes the inspection light T incident on the designed light path of the first prism 2 and detects a deviation of the return light T ′ of the inspection light T.
  • the auto-collimator 15 can be rotated by interlocking with the rotation of the moving unit 13B by the support unit (not shown).
  • the autocollimator 15 can keep the incident position and the incident angle of the inspection light T on the first surface 2a in the same state, even if the first surface 2a of the first prism 2 rotates.
  • the UV light source 16 is a curing means for curing the adhesive described later by irradiating UV (ultraviolet) light necessary for curing the adhesive described later.
  • the UV light source 16 is an advancing position facing the first surface 2a on the Z-axis positive direction side and a retracted position not facing the first surface 2a by the holding portion (not shown) (two-dot chain line in FIG. Reference) and are arranged switchably.
  • the UV light source 16 is shown in the retracted position.
  • the UV light can be made incident on the first surface 2a along the central axis O2.
  • FIG. 3 is a flowchart showing an example of a method of manufacturing an optical element assembly according to the present embodiment.
  • 4 to 6 are process explanatory views of a method of manufacturing an optical element assembly according to the present embodiment.
  • step S1 the cemented prism 1 which is the first optical element is held by the first holding unit 11 (step a). Specifically, as shown in FIG. 4, the cemented prism 1 is inserted inside the first inner circumferential surface 11b, and the fourth surface 1d of the cemented prism 1 abuts on the holding surface 11e of the holding sleeve 11A. Thus, the cemented prism 1 is positioned and held inside the holding sleeve 11A.
  • the holding sleeve 11A is disposed at a position where the central axis C is parallel to the Z axis and passes through the rotation center Q of the gonio stage 13 at an appropriate time before or after the cemented prism 1 is held by the holding sleeve 11A. Further, the holding sleeve 11A is moved so that the rotation center Q is positioned on the surface of the first surface 1a. Such movement of the holding sleeve 11A is performed by the movable stage 11B based on the operation input of the operator to the drive unit 11C. This movement may be performed by a manual operation in which the operator indicates the movement amount. However, when the operator instructs to start the movement, the movement to the arrangement position stored in advance in the drive unit 11C may be automatically performed according to the design shape of the cemented prism 1. Above, step S1 is completed.
  • step S2 is performed.
  • step S2 the first prism 2 and the junction prism are in a state in which the second surface 2b of the first prism 2 which is the second junction surface is in contact with the first surface 1a of the junction prism 1 which is the first junction surface.
  • step (step b) of inserting the first prism 2 from the chuck 12A described later is performed. Specifically, as shown in FIG. 4, the chuck 12A is opened so that the first prism 2 can be inserted while the gonio stage 13 is moved to the neutral position (see the two-dot chain line in FIG. 4) . In this state, the first prism 2 (see the two-dot chain line in FIG.
  • the opened chuck 12 A serves as an insertion guide for the first prism 2. Therefore, by setting the opening diameter of the chuck 12A to be slightly larger than the outer diameter of the prism side surface 2c, the first prism 2 with the central axis O2 of the first prism 2 substantially coaxial with the holding central axis H 2 are inserted into the holding sleeve 11A.
  • the first prism 2 is inserted in a state of being shifted around the central axis O2, the second surface 2b and the first surface 1a do not contact each other.
  • the second surface 1 b and the first surface 1 a are free of minute gaps due to errors in flatness. They abut each other on the whole surface. Whether the second surface 1b and the first surface 1a are in full contact with each other, for example, is the height of the first surface 2a projecting from the outer end surface in the Z-axis positive direction of the chuck 12A minimized? It is judged by how. In the present embodiment, the state in which the second surface 2 b of the first prism 2 is in full contact with the first surface 1 a is maintained by the weight of the first prism 2.
  • step S2 is completed.
  • step S3 is performed.
  • step S3 the cemented prism 1 and the first prism 2 are held apart from each other (step c). Specifically, the holding sleeve 11A is moved in the Z-axis negative direction by the moving stage 11B. At this time, the first prism 2 is held by the chuck 12A on the first holding portion 11. The cemented prism 1 is held in the holding sleeve 11A of the first holding portion 11 by its own weight.
  • the amount of movement of the holding sleeve 11A is not particularly limited as long as a gap in which an adhesive described later can be disposed is formed between the first surface 1a and the second surface 2b. In the present embodiment, as shown in FIG. 5, a gap is formed between the first surface 1a and the second surface 2b to such an extent that an adhesive application nozzle 17 described later can be inserted.
  • step S3 is completed.
  • steps S1 to S3 described above the reference axis (central axis) as a whole such that the first surface 1a (first joint surface) and the second surface 2b (second joint surface) face each other apart from each other C)
  • a step of holding the cemented prism 1 (first optical element) and the first prism 2 (second optical element) is performed.
  • step S4 is performed.
  • an adhesive is disposed between the first surface 1a and the second surface 2b (step d).
  • the adhesive application nozzle 17 for supplying the adhesive 18 is inserted from the gap between the first prism 2 and the upper end of the holding sleeve 11A.
  • An adhesive supply unit (not shown) for storing the adhesive 18 is connected to the adhesive application nozzle 17.
  • the adhesive application nozzle 17 and the adhesive supply unit constitute an adhesive application means in the optical element bonding apparatus 10.
  • the adhesive 18 forms the adhesive cured layer 3 after curing.
  • an appropriate light transmitting resin adhesive capable of adhering the first prism 2 and the cemented prism 1 to each other is used.
  • the adhesive 18 for example, an energy ray-curable resin adhesive, a thermosetting resin adhesive, or the like may be used. In the present embodiment, an example in which the adhesive 18 is a UV curable resin adhesive will be described.
  • the supply amount of the adhesive 18 is an appropriate amount that can form the adhesive cured layer 3 over the entire range of the effective diameter of the first surface 1 a and the second surface 2 b.
  • step S5 is performed.
  • step S5 the adhesive 18 is thinned by relatively translating the cemented prism 1 and the first prism 2 along the central axis C. Specifically, as shown in FIG. 2, the holding sleeve 11A is moved in parallel in the Z-axis positive direction by the moving stage 11B. By such parallel movement, the first surface 1a and the second surface 2b approach each other in a state in which they are maintained in parallel. Thus, the uncured adhesive 18 is sandwiched between the first surface 1 a and the second surface 2 b and is stretched. When the distance between the first surface 1a and the second surface 2b reaches the designed distance t, the moving stage 11B is stopped.
  • the layer thickness of the adhesive 18 is 0 in the range of the optical characteristics necessary for the optical element assembly 4 and the amount of rotation of the first prism 2 necessary for the correction of the optical axis offset described later. It is decided beforehand as a size which does not become. That is, if the cemented prism 1 and the first prism 2 are manufactured as designed, the optical axis of the on-axis light beam incident on the optical element assembly 4 with such an arrangement is the optical axis of the designed optical path layout. Match Above, step S5 is completed.
  • the first surface 1a (first joint surface) and the second surface 2b (second joint surface) face each other with an uncured adhesive interposed therebetween by the steps S1 to S5 described above, and the joint prism
  • the central axis (external center axis) O1 of 1 (first optical element) and the central axis (external center axis) O2 of the first prism 2 (second optical element) are coaxial with the central axis (reference axis) C
  • the step of holding the cemented prism 1 and the first prism 2 is performed.
  • step S6 is performed.
  • step S6 the inspection light is incident along the incident optical axis of the assembled optical element assembly 4 through the uncured adhesive 18, and the deviation of the optical axis in the optical element assembly 4 is detected, An operation of rotating the first prism 2 relative to the cemented prism 1 with respect to the movement center Q is performed.
  • the autocollimator 15 is disposed on the Z-axis positive direction side of the first surface 2 a.
  • the autocollimator 15 is supported by a support (not shown) such that the optical axis of the inspection light T is coaxial with the holding central axis H.
  • the inspection light T is repeatedly refracted and internally reflected by the first prism 2 and the cemented prism 1 as an axial light beam.
  • the inspection light T when the inspection light T reaches the fourth surface 1d, light is generated that is scattered back by the fourth surface 1d. A part of the light reverses the light path leading to the fourth surface 1 d and becomes return light T ′ returning to the autocollimator 15.
  • the return light T ′ when there is no manufacturing error in the cemented prism 1 and the first prism 2, the return light T ′ reverses the designed light path, so that the return light T ′ emitted from the first surface 2 a
  • the optical axis and the optical axis of the inspection light T are coaxial. This state is detected by the return light T 'being coincident with the optical axis of the autocollimator 15.
  • the autocollimator 15 detects that the optical axis of the return light T 'is offset from the optical axis of the autocollimator.
  • the shift amount of the return light T ' can be converted to the shift amount of the emission angle of the light emitted from the fourth surface 1d.
  • step S6 When the shift of the optical axis of the return light T ′ is detected by the autocollimator 15, the operator rotates the moving unit 13B based on the shift direction and the shift amount of the optical axis so as to reduce the shift amount. This is the end of step S6.
  • step S7 it is determined whether the amount of deviation of the optical axis of the return light T 'is in an allowable range. Specifically, an allowance for determination of the shift amount of the optical axis of the return light T ′ detected on the autocollimator 15 corresponding to the shift amount of the emission angle permitted in the optical element assembly 4 is determined in advance. There is. The operator determines whether the shift amount of the optical axis of the return light T ′ is within the allowable range by comparing the shift amount of the optical axis of the return light T ′ detected by the autocollimator 15 with the determination allowable value. If the amount of deviation is less than or equal to the determination allowable value, step S8 is performed. If the amount of deviation exceeds the determination allowable value, step S6 is performed.
  • step S8 the relative rotational movement of the first prism 2 is stopped. Specifically, the operator performs an operation input to stop the rotation of the gonio stage 13 through the operation unit (not shown) of the stage drive unit 14. Thereby, the rotation of the first prism 2 is stopped. Above, step S8 is completed.
  • the deviation between the optical axis of the inspection light T detected by the autocollimator 15 and the optical axis of the return light T ′ is eliminated.
  • An example of the case is depicted schematically.
  • the first prism 2 is arranged so that the on-plane point P and the rotation center Q coincide with each other, and therefore, the first prism 2 rotates around the rotation center Q, and the on-plane point P becomes the rotation center Q. Match. Therefore, the first surface 1a and the second surface 2b are not parallel to each other.
  • the uncured adhesive 18 sandwiched between the first surface 1a and the second surface 2b is a layer of the adhesive 18 as it proceeds in the negative X-axis direction on the X-axis negative direction side with respect to the on-plane point P It is thicker.
  • the layer thickness of the adhesive 18 becomes thicker as it proceeds in the positive direction of the X-axis. Since the first surface 1a and the second surface 2b are separated by the distance t in step S5, the layer thickness of the adhesive 18 does not become zero even at the most X-axis positive direction side.
  • the end of the first prism 2 in the negative Z-axis direction is inserted inside the second inner circumferential surface 11c of the holding sleeve 11A.
  • the first prism 2 tilts from the central axis C inside the second inner circumferential surface 11 c.
  • the size of the inner diameter of the second inner circumferential surface 11c is Dc described above, the first prism 2 never comes in contact with the second inner circumferential surface 11c. If the amount of rotation of the gonio stage 13 becomes too large due to an erroneous operation etc., the operator sees that the side surface 2c of the prism is in contact with the upper end of the first holding portion 11, and the amount of rotation becomes too large. You can know that.
  • step S6 to step S8 the first surface 1a (first bonding) is produced by rotating the cemented prism 1 (first optical element) relative to the first prism 2 (second optical element).
  • step B is performed in which the surface) and the second surface 2b (second joint surface) are moved in an inclined manner with respect to the central axis C (reference axis).
  • the incident axis of the inspection light T on the first prism 2 (second optical element) and the emission axis of the return light T ′ corresponding to the inspection light T from the first prism 2 (second optical element) Match
  • the present invention is not limited to this.
  • an incident axis of the inspection light T on the first prism 2 (second optical element) and an emission axis of the return light T ′ corresponding to the inspection light T from the first prism 2 (second optical element) are predetermined. It would be good if
  • step S9 the adhesive cured layer 3 is formed (step C). Specifically, first, as indicated by a two-dot chain line in FIG. 6, the UV light source 16 is advanced to the advanced position. Thereafter, UV light is emitted from the UV light source 16 toward the first surface 2a. The UV light enters the first prism 2 from the first surface 2 a and is applied to the uncured adhesive 18. The adhesive cured layer 3 in which the adhesive 18 is completely cured by continuing the irradiation of the UV light in a state where the cemented prism 1 and the first prism 2 are held by the first holding unit 11 and the second holding unit 12 respectively. May be formed.
  • step S9 is completed, and the optical element assembly 4 is manufactured.
  • the optical element assembly 4 is removed from the optical element bonding apparatus 10 by releasing the holding by the first holding unit 11 and the second holding unit 12.
  • the removed optical element assembly 4 is fixed to, for example, the lens barrel 5 after being inspected if necessary.
  • step S9 the UV light irradiation may not be performed until the adhesive 18 is completely cured.
  • the curing of the adhesive 18 proceeds, for example, due to an external force acting at the time of removal from the first holding portion 11 and the second holding portion 12, a positional deviation between the cemented prism 1 and the first prism 2 does not occur. If the intensity is obtained, the irradiation of UV light may be stopped. In this case, the adhesive 18 forms an adhesive cured layer 3 ′ during curing. After the adhesive cured layer 3 ′ is formed, the optical element assembly 4 is removed from the optical element bonding apparatus 10 by releasing the holding by the first holding unit 11 and the second holding unit 12.
  • the removed optical element assembly 4 is subjected to a curing process to further cure the adhesive cured layer 3 '.
  • a curing process for example, a curing process of irradiating or heating UV light of higher intensity is performed.
  • step S9 ends.
  • the optical element assembly 4 is manufactured.
  • the optical element assembly 4 is removed from the optical element bonding apparatus 10. It can be done in the For this reason, restrictions in the curing process are reduced, and more efficient curing can be performed. For example, it becomes possible to easily irradiate the UV light to a portion where the UV light is not easily hit by the UV light irradiation from the first surface 2a. For example, even if the heating furnace can not carry in the optical element bonding apparatus 10, it may be possible to carry in if only the optical element assembly 4 is. For example, it is also possible to simultaneously cure a plurality of optical element assemblies 4. According to such a curing method, since the other optical element assembly 4 can be manufactured without occupying the optical element bonding apparatus 10 until the adhesive 18 is completely cured, productivity is improved.
  • the optical element assembly 4 manufactured in this manner has the axes at the incident surface and the exit surface by adjustment at the time of bonding in the manufacturing method of the present embodiment.
  • the amount of deviation of the upper luminous flux from the design value of the optical axis is within an allowable range. Specifically, fall first and the incident angle theta i of surface 2a, respectively tolerance error of the emission angle theta o, in fourth surface 1d is emitting surface is an incident surface of the optical element assembly 4 There is.
  • Three-dimensional can be easily manufactured.
  • the adjustment of the optical axis is performed only by relatively rotating and moving the two optical elements centering on one point, so the manufacturing apparatus is simplified and the adjustment is facilitated.
  • the on-plane point located at the center of the designed axial light flux in the second joint surface is used as the rotation center of the relative rotational movement, the change in the layer thickness of the uncured adhesive Occur symmetrically around the This makes it easy to predict changes in the layer thickness of the adhesive.
  • the optical performance as the optical element assembly 4 can be easily facilitated. It can be improved.
  • the tolerance value of the manufacturing error of each of the first prism 2, the second prism 1A, and the third prism 1B in the optical element assembly 4 can be relaxed. This reduces the manufacturing cost of the optical element assembly 4.
  • each movement may be performed relative to each other between the cemented prism 1 and the first prism 2.
  • the first prism 2 may be fixed, and the cemented prism 1 may be moved in the Z-axis direction, or the cemented prism 1 and the first prism 2 may be moved in the Z-axis direction.
  • the first prism 2 may be fixed and the cemented prism 1 may be rotated.
  • the cemented prism 1 and the first prism 2 may be rotated respectively.
  • the rotation center Q of the gonio stage 13 coincides with the on-plane point P of the second surface 2 b. Even if the rotation center Q does not coincide with the on-plane point P, if it is near the on-plane point, substantially the same effect as in the case of coincidence is obtained. For this reason, the rotation center Q may be coincident with a point on the surface located substantially at the center of the designed axial light flux. The range of the approximate center may be sufficient if the amount of deviation from the center is sufficiently smaller than the effective diameter of the axial light flux, that is, the effective diameter of the second surface 2b.
  • each step of the present manufacturing method has been described as an example in the case where it is performed by the manual operation of the operator operating the optical element bonding apparatus 10.
  • the present manufacturing method may be partially or entirely automatically performed by the optical element bonding apparatus 10 or a working robot replacing the operator.
  • the shift amount of the optical axis of the optical element assembly is detected by comparing the optical axis of the inspection light on the incident surface with the optical axis of the return light from the output surface.
  • the shift amount of the optical axis of the optical element assembly may be detected by the shift amount from the design value of the optical axis of the inspection light transmitted through the exit surface. In this case, for example, if an optical sensor is disposed at a position facing the exit surface, the amount of deviation of the optical axis of the inspection light can be detected.
  • the optical element assembly 4 has been described as an example of a light deflection element that deflects incident light in the zx plane.
  • the light deflection direction is not limited to in-plane deflection.
  • the optical element assembly may be a light deflection element that performs deflection such that the optical axis of the incident light and the optical axis of the emitted light do not exist in the same plane.
  • the optical element assembly may include an optical element other than a prism or an optical surface such as a lens surface.
  • the optical element assembly may include a lens surface, the amount of deviation of the optical axis may be detected by detecting the imaging position on the image plane.
  • the junction prism 1 in which the second prism 1A and the third prism 1B are joined is the first optical element and the first prism 2 is the first.
  • the two optical elements have been described in the example in which the adjustment of the optical axis offset by the relative rotational movement is performed.
  • how to select the first optical element and the second optical element is an appropriate combination that can efficiently correct the manufacturing error of each optical surface by relative rotational movement, It may be used according to the optical characteristics of the optical element assembly.
  • first optical element 1a First surface (optical surface, first bonding surface) 1A Second Prism 1B Third Prism 1d Fourth Surface (Optical Surface, Emitting Surface) 2 First prism (second optical element) 2a First surface (optical surface, incident surface) 2b Second surface (second joint surface) 3, 3 'Adhesive Hardening Layer 4
  • Optical Element Assembly 5 Lens Barrel 6
  • Optical Unit 10 Optical Element Bonding Device 11 First Holding Portion 11a Sleeve (Cylindrical Body) 11A holding sleeve 11B moving stage 11C driving unit 12 second holding unit 12A chuck 12B support arm 13 gonio stage 14 stage driving unit 15 autocollimator 16 UV light source 17 adhesive application nozzle 18 adhesive C central axis (reference axis) H Holding central axis L1 Incident light L1 Incident light L2, L3, L4, L5, L6 Light L7 Outgoing light O1, O2 Central axial line P Point on the plane Q Rotation center T Inspection light T '

Abstract

L'invention concerne un procédé de fabrication d'un ensemble élément optique, comprenant : une étape A destinée à maintenir un premier élément optique et un deuxième élément optique, une première surface de jonction, qui est une des surfaces optiques du premier élément optique, et une deuxième surface de jonction, qui est une des surfaces optiques du deuxième élément optique, se faisant face l'une à l'autre avec un adhésif non durci interposé entre celles-ci, et l'axe central de contour du premier élément optique et l'axe central de contour du deuxième élément optique étant disposés de façon coaxiale par rapport à une ligne axiale de référence ; une étape B destinée à faire tourner le deuxième élément optique par rapport au premier élément optique et à déplacer la première surface de jonction et la deuxième surface de jonction de façon inclinée par rapport à la ligne axiale de référence, une relation de position déterminée étant établie entre l'axe d'entrée le long duquel pénètre la lumière d'inspection dans le deuxième élément optique et l'axe de sortie le long duquel la lumière de retour, formée par la lumière d'inspection transférée dans le premier élément optique et le deuxième élément optique, ressort du deuxième élément optique ; et une étape C destinée à durcir l'adhésif non durci et à former une couche durcie adhésive.
PCT/JP2018/046334 2017-12-27 2018-12-17 Procédé de fabrication d'ensemble élément optique WO2019131277A1 (fr)

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JP2017-252602 2017-12-27
JP2017252602A JP2019117363A (ja) 2017-12-27 2017-12-27 光学素子組立体の製造方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023031913A1 (fr) * 2021-08-30 2023-03-09 Lumus Ltd. Procédé et appareil de liaison de surfaces optiques par alignement actif
US11796729B2 (en) 2021-02-25 2023-10-24 Lumus Ltd. Optical aperture multipliers having a rectangular waveguide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09133829A (ja) * 1995-11-07 1997-05-20 Toshiba Mach Co Ltd 光ファイバ部品間接続面の面合せ機構およびこの機構を用いた光ファイバ部品の接続装置
JP2003015007A (ja) * 2001-06-29 2003-01-15 Toshiba Mach Co Ltd 面合わせ装置及び面合わせ方法
JP2004157200A (ja) * 2002-11-05 2004-06-03 Nippon Sheet Glass Co Ltd 光学素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09133829A (ja) * 1995-11-07 1997-05-20 Toshiba Mach Co Ltd 光ファイバ部品間接続面の面合せ機構およびこの機構を用いた光ファイバ部品の接続装置
JP2003015007A (ja) * 2001-06-29 2003-01-15 Toshiba Mach Co Ltd 面合わせ装置及び面合わせ方法
JP2004157200A (ja) * 2002-11-05 2004-06-03 Nippon Sheet Glass Co Ltd 光学素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11796729B2 (en) 2021-02-25 2023-10-24 Lumus Ltd. Optical aperture multipliers having a rectangular waveguide
WO2023031913A1 (fr) * 2021-08-30 2023-03-09 Lumus Ltd. Procédé et appareil de liaison de surfaces optiques par alignement actif

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