WO2019131277A1

WO2019131277A1 - Method for manufacturing optical element assembly

Info

Publication number: WO2019131277A1
Application number: PCT/JP2018/046334
Authority: WO
Inventors: 守藤村
Original assignee: オリンパス株式会社
Priority date: 2017-12-27
Filing date: 2018-12-17
Publication date: 2019-07-04
Also published as: JP2019117363A

Abstract

This method for manufacturing an optical element assembly includes: a step A for holding a first optical element and a second optical element, whereby a first joining surface, which is one of the optical surfaces of the first optical element, and a second joining surface, which is one of the optical surfaces of the second optical element, face each other with an uncured adhesive interposed therebetween, and the outline center axis of the first optical element and the outline center axis of the second optical element are disposed coaxially with respect to a reference axial line; a step B for rotating the second optical element relative to the first optical element, and moving the first joining surface and the second joining surface in a manner that is inclined with respect to the reference axial line, whereby a prescribed positional relationship is established between the entry axis along which inspection light enters the second optical element and the exit axis along which return light, formed by the inspection light being transferred in the first optical element and the second optical element, exits the second optical element; and a step C for curing the uncured adhesive and forming an adhesive cured layer.

Description

Method of manufacturing optical element assembly

The present invention relates to a method of manufacturing an optical element assembly.
Priority is claimed on Japanese Patent Application No. 2017-252602, filed Dec. 27, 2017, the content of which is incorporated herein by reference.

There is known an assembly in which a plurality of optical elements are bonded as an optical element using an adhesive cured layer. In such an assembly, a manufacturing error occurs for each optical element. For this reason, the optical performance as an assembly also changes due to the buildup of the manufacturing error of each optical element.
The greater the number of optical elements that make up the assembly, the smaller the tolerances of the individual optical elements required to satisfy the optical performance of the assembly. For this reason, in some cases, an accuracy exceeding the processing capability of the individual optical elements is required.
In order to keep the manufacturing error of the optical element to an acceptable level, the optical element may be assembled and adjusted at the time of manufacturing the assembly.
For example, Patent Document 1 proposes that a wedge-shaped prism be provided in part of a prism assembly in order to adjust the deviation from the design value of the incident optical axis and the outgoing optical axis in the manufacturing process of the prism assembly. It is done. The wedge-shaped prism is joined to the other prisms of the prism assembly after being rotationally adjusted about the optical axis.

Japanese Patent No. 3735146

The above-described prior art has the following problems.
In the adjustment according to the technique described in Patent Document 1, a wedge-shaped prism is used to rotate the optical axis about the rotation axis of the wedge-shaped prism. However, in order to adjust the direction of the optical axis in accordance with various manufacturing errors, it is necessary to also adjust the attitude of the prisms other than the wedge-shaped prism. For this reason, the adjustment operation becomes complicated because the plurality of prisms including the wedge-shaped prism must be moved and adjusted.
The prism assembly described in Patent Document 1 has a wedge-shaped prism which is not necessary in design, which increases the cost of parts and may make it difficult to miniaturize the prism assembly.
In particular, since the wedge-shaped prism required to correct the manufacturing error is thin, it may be expensive in terms of manufacturing difficulties. In addition, such thin-walled wedge-shaped prisms are difficult to hold and drive during rotational adjustment.

The present invention has been made in view of the above circumstances, and an optical element assembly in which the deviation from the design value of the outgoing optical axis with respect to the incoming optical axis is suppressed without adding the adjustment member is easily performed. It is an object of the present invention to provide a method of manufacturing an optical element assembly that can be manufactured.

In the method of manufacturing an optical element assembly according to the first aspect of the present invention, a first bonding surface which is one of the optical surfaces of the first optical element by holding the first optical element and the second optical element. And the second bonding surface, which is one of the optical surfaces of the second optical element, face each other with an uncured adhesive interposed therebetween, and the outer central axis of the first optical element and the outer center of the second optical element And a step A of arranging the axis coaxially with the reference axis, and rotating the second optical element relative to the first optical element so that the first joint surface and the second joint surface are the reference axis. By operating with respect to the inclination, the inspection light is incident to the second optical element, and the return light formed by transferring the inspection light into the first optical element and the second optical element is generated. Process B in which the emission optical axis from the second optical element has a predetermined positional relationship; Curing the adhesive of and a step C of forming a cured adhesive layer.

According to a second aspect of the present invention, in the method of manufacturing an optical element assembly according to the first aspect, the step A includes the step a of holding the first optical element in a sleeve; The second optical element is inserted from an annular insertion portion having a central axis at a position coinciding with the central axis of the second optical element, and the second joint surface is brought into contact with the first joint surface. After the attitude adjustment of the second optical element is performed, the step b of holding the second optical element at the insertion portion, and the separation of the sleeve and the insertion portion along the reference axis allows the second optical element to be The method may include the step c of separating the first optical element and the second optical element, and the step d of disposing the adhesive between the first bonding surface and the second bonding surface.

According to a third aspect of the present invention, in the method of manufacturing an optical element assembly according to the first aspect, in the step B, a point at which the reference axis intersects the second bonding surface is a rotation center. The first bonding surface and the second bonding surface may be moved in an inclined manner with respect to the reference axis by relatively rotating the second optical element relative to the first optical element.

According to the method of manufacturing an optical element assembly of the present invention according to the above aspects, an optical element assembly in which the deviation from the design value of the outgoing optical axis with respect to the incident optical axis is suppressed without adding adjustment members is facilitated Can be manufactured.

It is a typical front view showing an example of the optical element assembly manufactured with the manufacturing method of the optical element assembly concerning one embodiment of the present invention. It is a typical longitudinal cross-sectional view which shows an example of the optical element joining apparatus which can be used for the manufacturing method of the optical element assembly which concerns on this embodiment. It is a flowchart which shows an example of the manufacturing method of the optical element assembly which concerns on this embodiment. It is process explanatory drawing of the manufacturing method of the optical element assembly which concerns on this embodiment. It is process explanatory drawing of the manufacturing method of the optical element assembly which concerns on this embodiment. It is process explanatory drawing of the manufacturing method of the optical element assembly which concerns on this embodiment.

Hereinafter, a method of manufacturing an optical element assembly according to an embodiment of the present invention will be described with reference to the attached drawings. First, an example of an optical element assembly manufactured by the method of manufacturing an optical element assembly according to the present embodiment will be described.
FIG. 1 is a schematic front view showing an example of an optical element assembly manufactured by the method of manufacturing an optical element assembly according to an embodiment of the present invention.

The optical element assembly manufactured by the method of manufacturing an optical element assembly according to the present embodiment is configured by bonding a plurality of optical elements using an adhesive. The optical element assembly is not particularly limited in type and number of optical elements. For example, a prism, a lens, a parallel plate, a mirror, a polarizing element, a filter element etc. are mentioned as an optical element.
The optical element assembly is configured by bonding a first optical element composed of one or more optical elements and a second optical element composed of one or more optical elements by an adhesive cured layer. The adhesive cured layer is formed between a first bonding surface, which is one of the optical surfaces of the first optical element, and a second bonding surface, which is one of the optical surfaces of the second optical element.
Here, the ordinal numbers (first and second) in the first optical element and the second optical element are used to distinguish the two optical elements, and represent the arrangement order of the optical elements in the designed optical path. Absent. Therefore, either of the first optical element and the second optical element may be disposed on the object side.

An optical surface is a surface or interface that performs optical action on incident light, such as transmission, refraction, reflection, polarization selection, wavelength selection, and the like. The optical surface may be, for example, a prism surface, a lens surface, a flat surface, a mirror surface, a polarization surface, a filter surface, or the like according to the type of the optical element.
The first bonding surface and the second bonding surface may be a curved surface or a flat surface as long as they have substantially the same surface shape. Therefore, the adhesive cured layer provided between the first bonding surface and the second bonding surface is formed of a thin film.
As described later, in the present embodiment, the relative position of the first bonding surface and the second bonding surface is adjusted, so the thickness of the adhesive cured layer may change depending on the place.

For example, the optical element assembly 4 shown in FIG. 1 is an example of an optical element assembly manufactured by the method of manufacturing an optical element assembly of the present embodiment.
The optical element assembly 4 includes a first prism 2 (second optical element) and a junction prism 1 (first optical element). The first prism 2 and the cemented prism 1 are bonded to each other with the adhesive cured layer 3 interposed therebetween. The adhesive cured layer 3 is formed of a cured body of an appropriate light transmitting resin adhesive capable of adhering the first prism 2 and the junction prism 1 to each other. The curing method of the adhesive forming the adhesive cured layer 3 is not particularly limited. For example, as an adhesive for forming the adhesive cured layer 3, an energy ray-curable resin adhesive cured by energy rays such as UV light, a thermosetting resin adhesive cured by heating, etc. may be used. Good.

Either of the first prism 2 and the cemented prism 1 may be disposed on the object side. In the following, as an example, the design of the optical element assembly 4 based on the designed optical path layout in the case where the incident light L1 enters the first prism 2 and is emitted from the cemented prism 1 as the output light L7. The above configuration is described.
In the design of an optical system, ray tracing is performed by causing various light beams to enter the optical system. Thereby, for example, in the image plane, the arrangement of the optical surface such that the optical characteristics such as aberration are optimum and the optical path of the on-axis luminous flux which is an effective luminous flux in design are determined. An axial chief ray, which is a chief ray of an axial light flux, is an axial line connecting the center of the light flux of the axial light flux, and is a light beam passing through the optical axis of the axial light flux.
Therefore, in the following description, unless otherwise specified, the incident light L1 is the designed axial light flux, and the optical axis of the incident light L1 coincides with the designed optical axis of the optical element assembly 4 .

The first prism 2 includes a first surface 2a (optical surface) which is an incident surface of the incident light L1, and a second surface 2b (an optical surface, a second bonding surface) which is an emitting surface. The first surface 2a and the second surface 2b are both flat.
The second surface 2b is inclined at an acute angle with the normal to the first surface 2a. The second surface 2 b constitutes a second bonding surface of the first prism 2.
In the first prism 2, a prism side surface 2c is formed on the side between the first surface 2a and the second surface 2b.
The shape of the prism side surface 2c is not particularly limited. For example, the prism side surface 2c may be a cylindrical surface, an elliptic cylindrical surface, a prismatic surface, or the like. In the following, as an example, an example in which the prism side surface 2c is formed of a cylindrical surface will be described. The size of the diameter of the first prism 2 (hereinafter referred to as the diameter of the first prism 2) in the range where the prism side surface 2c is formed is d2.
The first prism 2 is made of, for example, a glass material, a transparent resin material, or the like.

The incident light L1 may be shifted from the center of the first surface 2a depending on the design intention or the relationship with other optical systems combined with the optical element assembly 4. In the present embodiment, from the viewpoint of securing a large effective diameter of the incident light L1, an example in the case of entering the center of the first surface 2a along the normal line of the first surface 2a will be described. That is, the incident light L1 is incident on the first surface 2a in a state of being coaxial with the central axis O2 of the prism side surface 2c of the first prism 2.
When the angle of incidence on the first surface 2a of the incident light L1 represents a theta _i, the theta _i is 0 degrees.
The incident light L1 enters the first surface 2a, passes through the first surface 2a, becomes light L2, and travels straight along the central axis O2. When the light L2 reaches the second surface 2b, it becomes light L3 and passes through the second surface 2b.

In the following description of the optical element assembly 4, an xyz Cartesian coordinate system fixed to the optical element assembly 4 may be used.
The z-axis is a normal passing through the center of the first surface 2a. The z-axis is coaxial with the central axis O 2 of the prism side surface 2 c of the first prism 2.
The positive direction of the z-axis is a direction from the first surface 2a to the second surface 2b (a direction from the left side to the right side in FIG. 1). In the design optical path layout, the z-axis is an axis along which the on-axis chief ray of the light L2 travels in the first prism 2.
The y-axis is an axis parallel to the first surface 2a and the second surface 2b among axes perpendicular to the z-axis. In FIG. 1, the positive direction of the y-axis is the direction from the back side to the front side of the sheet.
The x-axis is an axis perpendicular to the z-axis and the y-axis. In FIG. 1, the positive direction of the x axis is a direction from the lower side to the upper side.
In other words, the xyz coordinate system is a right-handed orthogonal coordinate system.

The cemented prism 1 is formed by cementing the second prism 1A and the third prism 1B with each other.
The second prism 1A and the third prism 1B are made of, for example, a glass material, a transparent resin material, or the like. The refractive index of the material of the second prism 1A is larger than the refractive index of the material of the third prism 1B. The refractive index of the material of the second prism 1A may be the same as or different from the refractive index of the material of the first prism 2. In the example shown in FIG. 1, the materials of the second prism 1A and the first prism 2 are different from each other.

The second prism 1A is a quadrangular prism when viewed from the y-axis direction. The second prism 1A has a first surface 1a (first joint surface), a second surface 1b, and a third surface 1c as optical surfaces.
The first surface 1 a is an incident surface on which the light L 3 enters the cemented prism 1. The first surface 1a is a flat surface. The first surface 1 a is bonded to the second surface 2 b of the first prism 2 by the adhesive cured layer 3. For this reason, the first surface 1 a constitutes a first bonding surface of the cemented prism 1.
The first surface 1a is disposed in parallel with the second surface 2b, sandwiching the adhesive cured layer 3 having a constant layer thickness in design.
The light L3 emitted from the second surface 2b passes through the adhesive cured layer 3 and is incident on the first surface 1a. The light L3 is refracted according to the difference in refractive index between the first prism 2 and the second prism 1A. In the example illustrated in FIG. 1, the light L3 travels obliquely in the positive x-axis direction as it travels in the positive z-axis direction by the light L2 being refracted by the first surface 1a.

The second surface 1b is an optical surface that internally reflects the light L3. The second surface 1b is formed by the interface of the junction of the second prism 1A and the third prism 1B.
The second surface 1b is a flat surface disposed on the z-axis positive direction side of the first surface 1a. The second surface 1b is disposed in parallel to the y-axis, similarly to the first surface 1a. However, the inclination angle of the second surface 1 b with respect to the z-axis is smaller than that of the first surface 1 a.
Therefore, when the light L3 is reflected by the second surface 1b, it travels as the light L4 in the diagonal direction toward the x-axis negative direction as it travels in the z-axis positive direction.

The third surface 1c is an optical surface that internally reflects the light L4. The third surface 1c is formed on a part of the outer surface in the negative direction of the x-axis in the second prism 1A.
The third surface 1c is a flat surface disposed on the x-axis negative direction side of the second surface 1b. The third surface 1c is disposed parallel to the y-axis, as with the second surface 1b. However, the inclination angle of the third surface 1c with respect to the z axis is smaller than that of the second surface 1b.
Therefore, when the light L4 is reflected by the third surface 1c, the light L4 travels as the light L5 in the diagonal direction toward the x-axis positive direction as it travels in the z-axis positive direction. The light L5 is reflected in an oblique direction approaching the z-axis in the zx plane.
The third surface 1c may be provided with a reflection coating to increase the reflectance.

When the light L5 which is the reflected light of the third surface 1c reaches the second surface 1b, the light L5 passes through the second surface 1b, becomes light L6, and enters the third prism 1B. At this time, since the light L6 is refracted by the second surface 1b, the light L6 travels in a diagonal direction closer to the z-axis.

The fourth surface 1d is an optical surface formed of a plane that transmits the light L6. For this reason, the fourth surface 1d is an exit surface that emits the outgoing light L7 made of the transmitted light of the light L6.
Fourth surface 1d is emitted light L7 is provided so as to emit at a predetermined emission angle theta _o. For example, in the example illustrated in FIG. 1, the fourth surface 1 d is a flat surface disposed on the x-axis positive direction side of the second surface 1 b. The fourth surface 1d is disposed parallel to the y-axis, similarly to the second surface 1b. However, the inclination angle of the fourth surface 1d with respect to the z-axis is larger than that of the second surface 1b.
Therefore, as the light L6 is refracted by the fourth surface 1d, the outgoing light L7 travels obliquely in the positive x-axis direction as it travels in the positive z-axis direction.

The shapes of the prism side 1e excluding the third surface 1c in the second prism 1A and the prism side 1f of the third prism 1B are not particularly limited. For example, the

prism side surfaces

1e and 1f may be cylindrical surfaces, elliptical cylindrical surfaces, prismatic surfaces, or the like.
In the following, as an example, an example in which the prism side faces 1e and 1f are cylindrical surfaces coaxial with each other will be described. The diameter of the second prism 1A in the range in which the prism side 1e is formed (hereinafter referred to as the diameter of the second prism 1A) and the diameter of the third prism 1B in the range in which the prism side 1f is formed (hereinafter, the third prism Although they may be different from each other as the diameter of 1 B), hereinafter, an example in which the size of each of these diameters is d1 will be described.
The central axis O1 of the prism side faces 1e and 1f is disposed coaxially with the z axis in design.
The diameter size d1 of the second prism 1A and the third prism 1B and the diameter size d2 of the first prism 2 may be different from each other or may be equal to each other.

With such a configuration, the optical element assembly 4 outputs the incident light L1 incident from the first surface 2a along the z-axis in the zx plane, deflected in a direction rotated by θ _o counterclockwise in the figure. It is a light deflection element to be emitted as the emitted light L7.
The optical element assembly 4 includes the first surface 2a, the second surface 2b, the first surface 1a, the second surface 1b, the third surface 1c, and the second surface along the above-described optical path in order to realize deflection of light. 1b and 4th surface 1d are arranged in this order.
Since the optical element assembly 4 has the prism side faces 2c, 1e, 1f made of cylindrical surfaces on the outer peripheral part, the optical element assembly 4 has a substantially cylindrical shape as a whole.

The optical element assembly 4 may be attached to an appropriate optical device with only the first prism 2, the second prism 1A, and the third prism 1B assembled, or may be attached to an appropriate holder. As an optical unit, it may be attached to an optical instrument.
For example, the optical unit 6 may be formed by fixing the optical element assembly 4 to the inside of the cylindrical lens barrel 5. In this case, the size of the inner diameter of the inner peripheral surface 5a of the lens barrel 5 is d5, which is larger than both d2 and d1.
The optical element assembly 4 can be inserted inside the inner peripheral surface 5a of the barrel 5 by forming the outer diameter to be less than d5. The optical element assembly 4 is fixed to the barrel 5 in a state of being positioned in the range of a gap between the optical element assembly 4 and the inner circumferential surface 5 a. As a method of fixing the optical element assembly 4, for example, adhesion is used.

The main optical performance as a light deflection element in the optical element assembly 4 is the size and direction of the outgoing angle of the outgoing light L7. The size and direction of the emission angle of the emission light L7 are determined from the design values by accumulating the position error and the attitude error of the optical surface in the optical element assembly 4 caused by the manufacturing error of the first prism 2 and the cemented prism 1. Change.
As described below, in the method of manufacturing an optical element assembly according to this embodiment, the emitted light is adjusted by adjusting the relative position between the cemented prism 1 and the first prism 2 when the optical element assembly 4 is manufactured. The size and direction of the emission angle of L7 are within the allowable range.

Next, an optical element bonding apparatus that can be used for manufacturing the optical element assembly 4 will be described.
FIG. 2 is a schematic vertical sectional view showing an example of an optical element bonding apparatus that can be used in the method of manufacturing an optical element assembly according to the embodiment of the present invention.

As shown in FIG. 2, the optical element bonding apparatus 10 includes a first holding unit 11, a second holding unit 12, a gonio stage 13, a stage driving unit 14, an autocollimator 15, and a UV light source 16. The optical element bonding apparatus 10 further includes adhesive application means (not shown).

In the following, in order to facilitate reference of the relative position in the optical element bonding apparatus 10, the XYZ coordinate system described in FIG. 2 may be used. However, the arrangement attitude of the optical element bonding apparatus 10 is not limited to such an arrangement attitude. The optical element bonding apparatus 10 may be disposed in an orientation in which the XYZ coordinate system is appropriately rotated.
The Z axis is a vertical axis. The positive direction of the Z axis is vertically upward.
The X axis and the Y axis are two axes orthogonal to each other in a horizontal plane orthogonal to the Z axis. In FIG. 2, the X axis is a coordinate axis extending in the left and right direction in the drawing. The positive direction of the X axis is the direction from the left side to the right side in the drawing. The Y axis is a coordinate axis extending in the depth direction of the drawing. The positive direction of the Y axis is the direction from the front side to the back side of the drawing.

The first holding unit 11 is a device portion that holds the cemented prism 1 and translates the cemented prism 1 in a direction (Z-axis direction) along at least the Z-axis.
The first holding unit 11 includes a holding sleeve 11A, a moving stage 11B, and a driving unit 11C.

The holding sleeve 11A includes a sleeve 11a (cylindrical body) and a bottom plate 11d.
The sleeve 11a is formed of a cylindrical body capable of housing the junction prism 1 and a part of the first prism 2 inside. On the inner surface of the sleeve 11a, a first inner circumferential surface 11b and a second inner circumferential surface 11c, which are cylindrical surfaces coaxial with the central axis C of the sleeve 11a, are formed in this order.
The first inner circumferential surface 11b is a cylindrical surface which can insert the cemented prism 1 along the central axis O1 and positions the cemented prism 1 in a direction perpendicular to the central axis O1 in the inserted state. For this reason, the size Db of the inner diameter of the first inner circumferential surface 11b is a size that allows the prism side faces 1e and 1f to be movably fitted in the z-axis direction.
The second inner circumferential surface 11c is a cylindrical surface into which the cemented prism 1 can be inserted along the central axis O1 and the first prism 2 along the central axis O2. Furthermore, the inner diameter of the second inner circumferential surface 11c can be such that the first prism 2 can be inclined within an angle range in which the manufacturing error of the cemented prism 1 and the first prism 2 can be corrected inside the second inner circumferential surface 11c. Have.
That is, assuming that the adjustment gap on one side is Δ, and the larger one of d1 and d2 is d0, the size Dc of the inner diameter of the second inner circumferential surface 11c is d0 <Dc ≦ d2 + 2 · Δ.
Furthermore, it is preferable that Dc is equal to or less than the size d5 of the inner diameter of the barrel 5 in which the optical element assembly 4 is assembled.

The bottom plate 11 d is a member that covers the end of the first holding portion 11 in which the first inner circumferential surface 11 b is formed. In the bottom plate 11d, a holding surface 11e for holding the cemented prism 1 is formed in the inside of the sleeve 11a in contact with the fourth surface 1d of the cemented prism 1. The shape of the holding surface 11e is not particularly limited as long as the central axis O1 of the cemented prism 1 can be coaxially arranged with the central axis C of the holding sleeve 11A.
For example, the holding surface 11e may be a plane inclined with respect to the central axis C by the same angle as the inclination angle of the fourth surface 1d with respect to the central axis O1. In this case, the central axis O1 of the cemented prism 1 is coaxial with the central axis C in a state where the fourth surface 1d is in close contact with the holding surface 11e.

In the moving stage 11B, the second inner circumferential surface 11c of the holding sleeve 11A opens in the positive Z-axis direction. By supporting the holding sleeve 11A, the moving stage 11B makes the central axis C of the holding sleeve 11A parallel to the Z axis. Furthermore, the moving stage 11B moves the holding sleeve 11A in the Z-axis direction.
For example, the movement stage 11B may be configured to include a linear movement stage having a movement degree of freedom at least in the Z-axis direction.
The drive unit 11C has an operation unit (not shown). The drive unit 11C drives the moving stage 11B based on the operation input from the operator via the operation unit (not shown).

The second holding unit 12 holds the first prism 2 so that the first surface 2a as the second bonding surface tilts at least one point on the second surface 2b of the first prism 2. This is a device for rotating the first prism 2 relative to the cemented prism 1.
The second holding unit 12 includes a chuck 12A, a support arm 12B, a gonio stage 13, and a stage driving unit 14.

The chuck 12 </ b> A detachably holds the prism side surface 2 c of the first prism 2. The chuck 12A holds the first prism 2 such that the central axis O2 of the first prism 2 is coaxial with the holding central axis H of the chuck 12A.
By supporting the chuck 12A, the support arm 12B has a predetermined positional relationship with the rotational center of the gonio stage 13 described later by the chuck 12A. The support arm 12B may be provided with a position adjustment mechanism that adjusts the support position of the chuck 12A in order to be able to arrange an optical element having a shape different from that of the first prism 2 described above at the same predetermined position. Such a position adjustment mechanism may include, for example, a moving stage having an appropriate degree of freedom of movement.

The gonio stage 13 is a rotation stage having a rotation center (rotation center) Q on an axis parallel to the Z axis. The rotational direction of the gonio stage 13 can be selected between the direction around one axis and the directions around two axes orthogonal to each other as needed. For example, according to the manufacturing error of the first prism 2 and the cemented prism 1, the rotational direction of the gonio stage 13 is uniaxial if it is possible to obtain necessary optical characteristics even with the pivotal movement about one axis. It may be a turning direction. However, it is more preferable that the rotational direction of the gonio stage 13 be capable of rotating around two axes.
The gonio stage 13 includes a base portion 13A mounted on a plane parallel to the XY plane, and a moving portion 13B moving along a guide surface 13a on the base portion 13A.
In the moving unit 13B, support arms 12B of the second holding unit 12 are provided to intersect (orthogonal).

The guide surface 13a has, for example, a cylindrical surface having a radius R centered on a rotation center axis passing through the rotation center Q when the gonio stage 13 rotates in a direction around one axis.
For example, when the gonio stage 13 rotates in a direction around two axes, the guide surface 13a may be configured as a spherical surface having a radius R centered on the rotation center Q. However, the gonio stage 13 may be configured such that the gonio stage rotating in the direction around one axis is overlapped in two stages such that the rotation center axes thereof are orthogonal to each other at the rotation center Q. In this case, the turning radius of each gonio stage differs from each other.

In the following, the gonio stage 13 will be described as being configured to rotate in a direction around two axes. Specifically, the gonio stage 13 can rotate around an axis parallel to the Y-axis intersecting at the rotation center Q and around an axis parallel to the X-axis.
The second holding portion 12 on the moving portion 13B is adjusted in position as necessary, so that the rotation center Q is an extension of the holding central axis H of the chuck 12A at least before the adjustment described later is started. Located in
At a neutral position of rotation of the gonio stage 13 as shown in FIG. 2, the holding central axis H of the chuck 12A is disposed in parallel with the Z axis.

The stage drive unit 14 has an operation unit (not shown). The stage drive unit 14 drives the gonio stage 13 based on an operation input from the operator via an operation unit (not shown).

The autocollimator 15 is a device portion that makes the inspection light T incident on the designed light path of the first prism 2 and detects a deviation of the return light T ′ of the inspection light T. In the present embodiment, the auto-collimator 15 can be rotated by interlocking with the rotation of the moving unit 13B by the support unit (not shown). Thus, the autocollimator 15 can keep the incident position and the incident angle of the inspection light T on the first surface 2a in the same state, even if the first surface 2a of the first prism 2 rotates.

The UV light source 16 is a curing means for curing the adhesive described later by irradiating UV (ultraviolet) light necessary for curing the adhesive described later. In the present embodiment, the UV light source 16 is an advancing position facing the first surface 2a on the Z-axis positive direction side and a retracted position not facing the first surface 2a by the holding portion (not shown) (two-dot chain line in FIG. Reference) and are arranged switchably.
In FIG. 2, the UV light source 16 is shown in the retracted position.
When the UV light source 16 is disposed at the exit position, the UV light can be made incident on the first surface 2a along the central axis O2.

Next, a method of manufacturing an optical element assembly according to the present embodiment performed using the optical element bonding apparatus 10 will be described.
FIG. 3 is a flowchart showing an example of a method of manufacturing an optical element assembly according to the present embodiment. 4 to 6 are process explanatory views of a method of manufacturing an optical element assembly according to the present embodiment.

An example of the method of manufacturing an optical element assembly according to the present embodiment is performed by executing steps S1 to S9 shown in FIG. 3 in accordance with the flow shown in FIG.
In step S1, the cemented prism 1 which is the first optical element is held by the first holding unit 11 (step a).
Specifically, as shown in FIG. 4, the cemented prism 1 is inserted inside the first inner circumferential surface 11b, and the fourth surface 1d of the cemented prism 1 abuts on the holding surface 11e of the holding sleeve 11A. Thus, the cemented prism 1 is positioned and held inside the holding sleeve 11A.
The holding sleeve 11A is disposed at a position where the central axis C is parallel to the Z axis and passes through the rotation center Q of the gonio stage 13 at an appropriate time before or after the cemented prism 1 is held by the holding sleeve 11A. Further, the holding sleeve 11A is moved so that the rotation center Q is positioned on the surface of the first surface 1a.
Such movement of the holding sleeve 11A is performed by the movable stage 11B based on the operation input of the operator to the drive unit 11C. This movement may be performed by a manual operation in which the operator indicates the movement amount. However, when the operator instructs to start the movement, the movement to the arrangement position stored in advance in the drive unit 11C may be automatically performed according to the design shape of the cemented prism 1.
Above, step S1 is completed.

After step S1, step S2 is performed. In step S2, the first prism 2 and the junction prism are in a state in which the second surface 2b of the first prism 2 which is the second junction surface is in contact with the first surface 1a of the junction prism 1 which is the first junction surface. After the attitude of 1 is adjusted, a step (step b) of inserting the first prism 2 from the chuck 12A described later is performed.
Specifically, as shown in FIG. 4, the chuck 12A is opened so that the first prism 2 can be inserted while the gonio stage 13 is moved to the neutral position (see the two-dot chain line in FIG. 4) . In this state, the first prism 2 (see the two-dot chain line in FIG. 4) is inserted into the upper portion of the holding sleeve 11A in a posture in which the second surface 2b is oriented in the negative Z-axis direction. At this time, the opened chuck 12 A serves as an insertion guide for the first prism 2. Therefore, by setting the opening diameter of the chuck 12A to be slightly larger than the outer diameter of the prism side surface 2c, the first prism 2 with the central axis O2 of the first prism 2 substantially coaxial with the holding central axis H 2 are inserted into the holding sleeve 11A.
When the first prism 2 is inserted in a state of being shifted around the central axis O2, the second surface 2b and the first surface 1a do not contact each other. When the position of the first prism 2 about the central axis O2 is properly corrected, as shown by the solid line in FIG. 4, the second surface 1 b and the first surface 1 a are free of minute gaps due to errors in flatness. They abut each other on the whole surface. Whether the second surface 1b and the first surface 1a are in full contact with each other, for example, is the height of the first surface 2a projecting from the outer end surface in the Z-axis positive direction of the chuck 12A minimized? It is judged by how.
In the present embodiment, the state in which the second surface 2 b of the first prism 2 is in full contact with the first surface 1 a is maintained by the weight of the first prism 2. In this state, the on-plane point P which is the intersection of the second surface 2b and the central axis O1 coincides with the rotation center Q. Furthermore, the central axes O1, O2, C and the holding central axis H are arranged coaxially with each other.
The central axis C constitutes a reference axis of adjustment in the optical element bonding apparatus 10.
Above, step S2 is completed.

After step S2, step S3 is performed. In step S3, the cemented prism 1 and the first prism 2 are held apart from each other (step c).
Specifically, the holding sleeve 11A is moved in the Z-axis negative direction by the moving stage 11B. At this time, the first prism 2 is held by the chuck 12A on the first holding portion 11. The cemented prism 1 is held in the holding sleeve 11A of the first holding portion 11 by its own weight.
The amount of movement of the holding sleeve 11A is not particularly limited as long as a gap in which an adhesive described later can be disposed is formed between the first surface 1a and the second surface 2b.
In the present embodiment, as shown in FIG. 5, a gap is formed between the first surface 1a and the second surface 2b to such an extent that an adhesive application nozzle 17 described later can be inserted.
Above, step S3 is completed.

In steps S1 to S3 described above, the reference axis (central axis) as a whole such that the first surface 1a (first joint surface) and the second surface 2b (second joint surface) face each other apart from each other C) A step of holding the cemented prism 1 (first optical element) and the first prism 2 (second optical element) is performed.

After step S3, step S4 is performed. In step S4, an adhesive is disposed between the first surface 1a and the second surface 2b (step d).
Specifically, as shown in FIG. 5, the adhesive application nozzle 17 for supplying the adhesive 18 is inserted from the gap between the first prism 2 and the upper end of the holding sleeve 11A. An adhesive supply unit (not shown) for storing the adhesive 18 is connected to the adhesive application nozzle 17. The adhesive application nozzle 17 and the adhesive supply unit constitute an adhesive application means in the optical element bonding apparatus 10.

The adhesive 18 forms the adhesive cured layer 3 after curing. As the adhesive 18, an appropriate light transmitting resin adhesive capable of adhering the first prism 2 and the cemented prism 1 to each other is used. As the adhesive 18, for example, an energy ray-curable resin adhesive, a thermosetting resin adhesive, or the like may be used.
In the present embodiment, an example in which the adhesive 18 is a UV curable resin adhesive will be described.
The supply amount of the adhesive 18 is an appropriate amount that can form the adhesive cured layer 3 over the entire range of the effective diameter of the first surface 1 a and the second surface 2 b.
When the predetermined amount of adhesive 18 is supplied onto the first surface 1a, the supply of the adhesive 18 is stopped. Thereafter, the adhesive application nozzle 17 is retracted from between the first prism 2 and the first holding portion 11.
Above, step S4 is completed.

After step S4, step S5 is performed. In step S5, the adhesive 18 is thinned by relatively translating the cemented prism 1 and the first prism 2 along the central axis C.
Specifically, as shown in FIG. 2, the holding sleeve 11A is moved in parallel in the Z-axis positive direction by the moving stage 11B. By such parallel movement, the first surface 1a and the second surface 2b approach each other in a state in which they are maintained in parallel. Thus, the uncured adhesive 18 is sandwiched between the first surface 1 a and the second surface 2 b and is stretched.
When the distance between the first surface 1a and the second surface 2b reaches the designed distance t, the moving stage 11B is stopped. The layer thickness of the adhesive 18 is 0 in the range of the optical characteristics necessary for the optical element assembly 4 and the amount of rotation of the first prism 2 necessary for the correction of the optical axis offset described later. It is decided beforehand as a size which does not become. That is, if the cemented prism 1 and the first prism 2 are manufactured as designed, the optical axis of the on-axis light beam incident on the optical element assembly 4 with such an arrangement is the optical axis of the designed optical path layout. Match
Above, step S5 is completed.

In the present embodiment, the first surface 1a (first joint surface) and the second surface 2b (second joint surface) face each other with an uncured adhesive interposed therebetween by the steps S1 to S5 described above, and the joint prism The central axis (external center axis) O1 of 1 (first optical element) and the central axis (external center axis) O2 of the first prism 2 (second optical element) are coaxial with the central axis (reference axis) C In the state, the step of holding the cemented prism 1 and the first prism 2 (step A) is performed.

After step S5, step S6 is performed. In step S6, the inspection light is incident along the incident optical axis of the assembled optical element assembly 4 through the uncured adhesive 18, and the deviation of the optical axis in the optical element assembly 4 is detected, An operation of rotating the first prism 2 relative to the cemented prism 1 with respect to the movement center Q is performed.
Specifically, as shown in FIG. 2, the autocollimator 15 is disposed on the Z-axis positive direction side of the first surface 2 a. The autocollimator 15 is supported by a support (not shown) such that the optical axis of the inspection light T is coaxial with the holding central axis H.
The inspection light T is repeatedly refracted and internally reflected by the first prism 2 and the cemented prism 1 as an axial light beam.

For example, when the inspection light T reaches the fourth surface 1d, light is generated that is scattered back by the fourth surface 1d. A part of the light reverses the light path leading to the fourth surface 1 d and becomes return light T ′ returning to the autocollimator 15.
As described above, when there is no manufacturing error in the cemented prism 1 and the first prism 2, the return light T ′ reverses the designed light path, so that the return light T ′ emitted from the first surface 2 a The optical axis and the optical axis of the inspection light T are coaxial. This state is detected by the return light T 'being coincident with the optical axis of the autocollimator 15.
If there is a manufacturing error on any of the optical surfaces in the optical element assembly 4, the inspection light T deviates from the designed light path. Therefore, the autocollimator 15 detects that the optical axis of the return light T 'is offset from the optical axis of the autocollimator. The shift amount of the return light T 'can be converted to the shift amount of the emission angle of the light emitted from the fourth surface 1d.

When the shift of the optical axis of the return light T ′ is detected by the autocollimator 15, the operator rotates the moving unit 13B based on the shift direction and the shift amount of the optical axis so as to reduce the shift amount.
This is the end of step S6.

After step S6, step S7 is performed. In step S7, it is determined whether the amount of deviation of the optical axis of the return light T 'is in an allowable range.
Specifically, an allowance for determination of the shift amount of the optical axis of the return light T ′ detected on the autocollimator 15 corresponding to the shift amount of the emission angle permitted in the optical element assembly 4 is determined in advance. There is. The operator determines whether the shift amount of the optical axis of the return light T ′ is within the allowable range by comparing the shift amount of the optical axis of the return light T ′ detected by the autocollimator 15 with the determination allowable value.
If the amount of deviation is less than or equal to the determination allowable value, step S8 is performed.
If the amount of deviation exceeds the determination allowable value, step S6 is performed.

In step S8, the relative rotational movement of the first prism 2 is stopped.
Specifically, the operator performs an operation input to stop the rotation of the gonio stage 13 through the operation unit (not shown) of the stage drive unit 14. Thereby, the rotation of the first prism 2 is stopped.
Above, step S8 is completed.

For example, in FIG. 6, in a state where the first prism 2 is rotated clockwise, the deviation between the optical axis of the inspection light T detected by the autocollimator 15 and the optical axis of the return light T ′ is eliminated. An example of the case is depicted schematically.
The first prism 2 is arranged so that the on-plane point P and the rotation center Q coincide with each other, and therefore, the first prism 2 rotates around the rotation center Q, and the on-plane point P becomes the rotation center Q. Match. Therefore, the first surface 1a and the second surface 2b are not parallel to each other.
Thus, the uncured adhesive 18 sandwiched between the first surface 1a and the second surface 2b is a layer of the adhesive 18 as it proceeds in the negative X-axis direction on the X-axis negative direction side with respect to the on-plane point P It is thicker. On the other hand, on the positive side in the X-axis direction with respect to the point P on the surface, the layer thickness of the adhesive 18 becomes thicker as it proceeds in the positive direction of the X-axis. Since the first surface 1a and the second surface 2b are separated by the distance t in step S5, the layer thickness of the adhesive 18 does not become zero even at the most X-axis positive direction side.

The end of the first prism 2 in the negative Z-axis direction is inserted inside the second inner circumferential surface 11c of the holding sleeve 11A. The first prism 2 tilts from the central axis C inside the second inner circumferential surface 11 c. However, since the size of the inner diameter of the second inner circumferential surface 11c is Dc described above, the first prism 2 never comes in contact with the second inner circumferential surface 11c.
If the amount of rotation of the gonio stage 13 becomes too large due to an erroneous operation etc., the operator sees that the side surface 2c of the prism is in contact with the upper end of the first holding portion 11, and the amount of rotation becomes too large. You can know that.

In step S6 to step S8 according to the present embodiment, the first surface 1a (first bonding) is produced by rotating the cemented prism 1 (first optical element) relative to the first prism 2 (second optical element). A step (step B) is performed in which the surface) and the second surface 2b (second joint surface) are moved in an inclined manner with respect to the central axis C (reference axis). As a result, the incident axis of the inspection light T on the first prism 2 (second optical element) and the emission axis of the return light T ′ corresponding to the inspection light T from the first prism 2 (second optical element) Match The present invention is not limited to this. For example, an incident axis of the inspection light T on the first prism 2 (second optical element) and an emission axis of the return light T ′ corresponding to the inspection light T from the first prism 2 (second optical element) are predetermined. It would be good if

After step S8, step S9 is performed. In step S9, the adhesive cured layer 3 is formed (step C).
Specifically, first, as indicated by a two-dot chain line in FIG. 6, the UV light source 16 is advanced to the advanced position. Thereafter, UV light is emitted from the UV light source 16 toward the first surface 2a. The UV light enters the first prism 2 from the first surface 2 a and is applied to the uncured adhesive 18.
The adhesive cured layer 3 in which the adhesive 18 is completely cured by continuing the irradiation of the UV light in a state where the cemented prism 1 and the first prism 2 are held by the first holding unit 11 and the second holding unit 12 respectively. May be formed. After the adhesive cured layer 3 is formed, step S9 is completed, and the optical element assembly 4 is manufactured.
The optical element assembly 4 is removed from the optical element bonding apparatus 10 by releasing the holding by the first holding unit 11 and the second holding unit 12. The removed optical element assembly 4 is fixed to, for example, the lens barrel 5 after being inspected if necessary.

In step S9, the UV light irradiation may not be performed until the adhesive 18 is completely cured. As the curing of the adhesive 18 proceeds, for example, due to an external force acting at the time of removal from the first holding portion 11 and the second holding portion 12, a positional deviation between the cemented prism 1 and the first prism 2 does not occur. If the intensity is obtained, the irradiation of UV light may be stopped.
In this case, the adhesive 18 forms an adhesive cured layer 3 ′ during curing. After the adhesive cured layer 3 ′ is formed, the optical element assembly 4 is removed from the optical element bonding apparatus 10 by releasing the holding by the first holding unit 11 and the second holding unit 12.
The removed optical element assembly 4 is subjected to a curing process to further cure the adhesive cured layer 3 '. For example, a curing process of irradiating or heating UV light of higher intensity is performed. When the curing of the adhesive cured layer 3 'proceeds and the adhesive cured layer 3 is formed, step S9 ends. Thus, the optical element assembly 4 is manufactured.

Thus, when the curing process of the adhesive 18 is divided into a plurality of curing processes, in the process of forming the adhesive cured layer 3 from the adhesive cured layer 3 ', the optical element assembly 4 is removed from the optical element bonding apparatus 10. It can be done in the For this reason, restrictions in the curing process are reduced, and more efficient curing can be performed. For example, it becomes possible to easily irradiate the UV light to a portion where the UV light is not easily hit by the UV light irradiation from the first surface 2a. For example, even if the heating furnace can not carry in the optical element bonding apparatus 10, it may be possible to carry in if only the optical element assembly 4 is. For example, it is also possible to simultaneously cure a plurality of optical element assemblies 4.
According to such a curing method, since the other optical element assembly 4 can be manufactured without occupying the optical element bonding apparatus 10 until the adhesive 18 is completely cured, productivity is improved.

Even when there is a manufacturing error in the cemented prism 1 and the first prism 2, the optical element assembly 4 manufactured in this manner has the axes at the incident surface and the exit surface by adjustment at the time of bonding in the manufacturing method of the present embodiment. The amount of deviation of the upper luminous flux from the design value of the optical axis is within an allowable range. Specifically, fall first and the incident angle theta _i of surface 2a, respectively tolerance error of the emission angle theta _o, in fourth surface 1d is emitting surface is an incident surface of the optical element assembly 4 There is.

As described above, according to the method of manufacturing an optical element assembly according to this embodiment, an optical element set in which the deviation from the design value of the outgoing optical axis with respect to the incident optical axis is suppressed without adding the adjustment member. Three-dimensional can be easily manufactured.
For example, in the present manufacturing method, the adjustment of the optical axis is performed only by relatively rotating and moving the two optical elements centering on one point, so the manufacturing apparatus is simplified and the adjustment is facilitated.
In particular, since the on-plane point located at the center of the designed axial light flux in the second joint surface is used as the rotation center of the relative rotational movement, the change in the layer thickness of the uncured adhesive Occur symmetrically around the This makes it easy to predict changes in the layer thickness of the adhesive. As a result, it is possible to prevent rework of adjustment due to excessive change in the layer thickness of the adhesive cured layer due to the movement of the second bonding surface, and therefore, rapid manufacturing is possible.

For example, in the present manufacturing method, even if the first prism 2, the second prism 1A, and the third prism 1B in the optical element assembly 4 include manufacturing errors, the optical performance as the optical element assembly 4 can be easily facilitated. It can be improved.
Alternatively, the tolerance value of the manufacturing error of each of the first prism 2, the second prism 1A, and the third prism 1B in the optical element assembly 4 can be relaxed. This reduces the manufacturing cost of the optical element assembly 4.

In the description of the above embodiment, the example in which the cemented prism 1 is moved in the Z-axis direction and the first prism 2 is rotationally moved around the rotation center Q has been described. However, each movement may be performed relative to each other between the cemented prism 1 and the first prism 2.
For example, the first prism 2 may be fixed, and the cemented prism 1 may be moved in the Z-axis direction, or the cemented prism 1 and the first prism 2 may be moved in the Z-axis direction.
For example, the first prism 2 may be fixed and the cemented prism 1 may be rotated. Furthermore, the cemented prism 1 and the first prism 2 may be rotated respectively.

In the description of the above embodiment, an example in which the rotation center Q of the gonio stage 13 coincides with the on-plane point P of the second surface 2 b has been described. Even if the rotation center Q does not coincide with the on-plane point P, if it is near the on-plane point, substantially the same effect as in the case of coincidence is obtained. For this reason, the rotation center Q may be coincident with a point on the surface located substantially at the center of the designed axial light flux. The range of the approximate center may be sufficient if the amount of deviation from the center is sufficiently smaller than the effective diameter of the axial light flux, that is, the effective diameter of the second surface 2b.

In the description of the above embodiment, each step of the present manufacturing method has been described as an example in the case where it is performed by the manual operation of the operator operating the optical element bonding apparatus 10. The present manufacturing method may be partially or entirely automatically performed by the optical element bonding apparatus 10 or a working robot replacing the operator.

Since the autocollimator is used in the description of the above embodiment, the shift amount of the optical axis of the optical element assembly is detected by comparing the optical axis of the inspection light on the incident surface with the optical axis of the return light from the output surface. In the case of The shift amount of the optical axis of the optical element assembly may be detected by the shift amount from the design value of the optical axis of the inspection light transmitted through the exit surface. In this case, for example, if an optical sensor is disposed at a position facing the exit surface, the amount of deviation of the optical axis of the inspection light can be detected.

In the description of the above embodiment, the optical element assembly 4 has been described as an example of a light deflection element that deflects incident light in the zx plane. When the optical element assembly is a light deflection element, the light deflection direction is not limited to in-plane deflection. For example, the optical element assembly may be a light deflection element that performs deflection such that the optical axis of the incident light and the optical axis of the emitted light do not exist in the same plane.

In the description of the above embodiment, the example in the case of manufacturing the optical element assembly 4 in which the optical element is formed only of the prism has been described. If the shift amount of the optical axis of the optical element assembly can be detected, the optical element assembly may include an optical element other than a prism or an optical surface such as a lens surface. For example, when the optical element assembly includes a lens surface, the amount of deviation of the optical axis may be detected by detecting the imaging position on the image plane.

In the description of the above embodiment, when the number of optical elements in the optical element assembly is three, the junction prism 1 in which the second prism 1A and the third prism 1B are joined is the first optical element and the first prism 2 is the first. The two optical elements have been described in the example in which the adjustment of the optical axis offset by the relative rotational movement is performed. When the optical element assembly includes three or more optical elements, how to select the first optical element and the second optical element is an appropriate combination that can efficiently correct the manufacturing error of each optical surface by relative rotational movement, It may be used according to the optical characteristics of the optical element assembly.

Although the preferred embodiments and examples of the present invention have been described above, the present invention is not limited to the respective embodiments and examples. Additions, omissions, substitutions, and other modifications of the configuration are possible without departing from the spirit of the present invention.
Further, the present invention is not limited by the above description, and is limited only by the appended claims.

According to each of the above-described embodiments, it is possible to provide a method of easily manufacturing an optical element assembly in which the deviation from the design value of the outgoing optical axis with respect to the incident optical axis is suppressed without adding an adjustment member.

1 junction prism (first optical element)
1a First surface (optical surface, first bonding surface)

1A Second Prism

1B Third Prism 1d Fourth Surface (Optical Surface, Emitting Surface)
2 First prism (second optical element)
2a First surface (optical surface, incident surface)
2b Second surface (second joint surface)
3, 3 'Adhesive Hardening Layer 4 Optical Element Assembly 5 Lens Barrel 6 Optical Unit 10 Optical Element Bonding Device 11 First Holding Portion 11a Sleeve (Cylindrical Body)

11A holding sleeve

11B moving stage

11C driving unit 12 second holding unit 12A chuck 12B support arm 13 gonio stage 14 stage driving unit 15 autocollimator 16 UV light source 17 adhesive application nozzle 18 adhesive C central axis (reference axis)
H Holding central axis L1 Incident light L1 Incident light L2, L3, L4, L5, L6 Light L7 Outgoing light O1, O2 Central axial line P Point on the plane Q Rotation center T Inspection light T 'Return light θ _i Incident angle θ _o Output Horn

Claims

By holding the first optical element and the second optical element, the first bonding surface which is one of the optical surfaces of the first optical element and the second bonding surface which is one of the optical surfaces of the second optical element And A facing each other with an uncured adhesive interposed therebetween, and disposing the center axis of the outer shape of the first optical element and the center axis of the outer shape of the second optical element coaxially with the reference axis;
The inspection light is moved by rotating the second optical element relative to the first optical element so that the first bonding surface and the second bonding surface are inclined with respect to the reference axis. The incident axis to the second optical element, the return axis formed by transferring the inspection light into the first optical element and the second optical element, and the output axis from the second optical element are at predetermined positions Process B to be related
Curing the uncured adhesive to form an adhesive cured layer;
A method of manufacturing an optical element assembly, comprising:
The process A is
Holding the first optical element in a sleeve;
The second optical element is inserted from an annular insertion portion having a central axis at a position coincident with the central axis in the sleeve, and the second joint surface is brought into contact with the first joint surface, and the first optical A step b of holding the second optical element at the insertion portion after adjusting the attitude of the element and the second optical element;
Separating the first optical element and the second optical element by separating the sleeve and the insertion portion along the reference axis;
Placing the adhesive between the first bonding surface and the second bonding surface;
A method of manufacturing an optical element assembly according to claim 1, comprising:
In the step B, the second optical element is moved relative to the first optical element with respect to the first optical element, with the point at which the reference axis intersects the second joint surface as a rotation center. The method of manufacturing an optical element assembly according to claim 1, wherein the second bonding surface moves inclining with respect to the reference axis.