WO2019090890A1 - 溶液气泡去除装置及涂布机 - Google Patents

溶液气泡去除装置及涂布机 Download PDF

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Publication number
WO2019090890A1
WO2019090890A1 PCT/CN2017/115999 CN2017115999W WO2019090890A1 WO 2019090890 A1 WO2019090890 A1 WO 2019090890A1 CN 2017115999 W CN2017115999 W CN 2017115999W WO 2019090890 A1 WO2019090890 A1 WO 2019090890A1
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Prior art keywords
tank
pipe
solution
polyimide solution
removing device
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PCT/CN2017/115999
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English (en)
French (fr)
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郑颖
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武汉华星光电半导体显示技术有限公司
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Priority to US15/740,721 priority Critical patent/US20190282931A1/en
Publication of WO2019090890A1 publication Critical patent/WO2019090890A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0063—Regulation, control including valves and floats
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0042—Degasification of liquids modifying the liquid flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0073—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042
    • B01D19/0078—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042 by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet

Definitions

  • the invention relates to a display panel production technology, in particular to a solution bubble removing device and a coating machine.
  • a flexible display is a display device formed based on a flexible substrate. Since the flexible display device has the characteristics of being curlable, wide viewing angle, and easy to carry, it has broad application prospects and good market potential.
  • flexible display substrate materials include ultra-thin glass, plastic film, and metal foil.
  • Polyimide is a kind of polymer with repeating units of imide, which has the advantages of wide temperature, chemical resistance, high strength and high insulation.
  • PI has been widely used in aviation, aerospace, microelectronics and other fields.
  • PI has been successfully applied to some flexible display electronic products as a flexible substrate material.
  • OLED Organic Light-Emitting Diode
  • the existing PI liquid often contains a large number of micron-sized bubbles, and the bubbles cannot be discharged very efficiently before and during coating.
  • these bubbles will diffuse to the surface of the PI film to form a certain size of bubbles (Bubble), as shown in Figure 1, these bubbles (Bubble) in the subsequent array (Array) may appear concave or convex during the process, which seriously affects the progress of the post process.
  • H-VCD high-temperature vacuum drying
  • Array infrared baking
  • the commonly used methods for removing bubbles in the PI solution are: placing the PI solution in a vacuum environment and vacuuming all the time; however, continuous vacuuming causes the low-boiling organic solvent NMP (N-methylpyrrolidone) in the PI liquid to volatilize.
  • NMP N-methylpyrrolidone
  • Another method is to continuously mechanically stir the PI liquid for 16-18 hours and pass a clean nitrogen gas bubble.
  • this method takes a long time and cannot be adapted to industrialization. Production needs.
  • the present invention provides a solution bubble removing device and a coating machine for removing bubbles in a solution.
  • the present invention provides a bubble removing device for a polyimide solution, the device comprising a first can body, a second can body disposed in the first can body, and an ultrasonic generator disposed on the first can body
  • the volume of the second tank is smaller than the volume of the first tank, and the first tank and the second tank respectively form two first chambers and a second chamber which are not connected to each other, and the first chamber Water is contained therein, the second chamber is filled with a solution, and the second tank is provided with an outlet pipe, an inlet pipe, and an exhaust pipe respectively communicating with the second cavity.
  • a filter is arranged on the liquid outlet pipe.
  • the second tank body is disposed at a lower portion of the first tank body.
  • the ultrasonic generator is disposed at the bottom of the first can body.
  • an exhaust valve is disposed on the exhaust pipe.
  • an inlet valve is disposed on the inlet pipe.
  • a first pump is further disposed on the inlet pipe.
  • a second pump is disposed on the liquid outlet pipe between the filter and the second tank body.
  • the invention also provides a coating machine, comprising a storage tank, a coating nozzle, and a bubble removing device of the polyimide solution, wherein the liquid discharging pipe is connected with a solution pipe of the coating nozzle, and the liquid is introduced.
  • the tube is connected to the storage tank.
  • the present invention forms a first cavity in the first can body and is in the first place by providing a volume smaller than the second can body in the first can body and an ultrasonic generator disposed on the first can body.
  • Water is filled into the cavity, and the second cavity of the second tank is filled with a polyimide solution, and an exhaust pipe, an outlet pipe, and an inlet pipe are disposed on the second tank, and ultrasonic vibration is used.
  • the polyimide solution After being separated from the surface of the polyimide liquid, it is discharged through the exhaust pipe to remove the bubbles in the polyimide solution, which can reduce the defoaming time, greatly reduce the time required for the process, and improve the use efficiency of the polyimide solution. At the same time, the volatilization of the low-boiling organic solvent in the polyimide solution is effectively controlled, and the stable ratio of the polyimide solution is maintained.
  • Figure 1 is a schematic view of the structure of the present invention.
  • the present invention discloses a bubble removing device for a polyimide solution, the device comprising a first can body 1 , a second can body 2 disposed in the first can body 1 , and a first Ultrasonic generator 3 on tank 1, first tank 1 for loading intermediate medium, such as water, etc., second tank 2 for degassing, transfer of polyimide solution, first tank 1 and second
  • the shape of the can body 2 may be a cylindrical structure, and the first can body 1 is placed in a vertical position, which saves space.
  • the volume of the second can body 2 is smaller than the volume of the first can body 1.
  • the first can body 1 and the second can body 2 respectively form two first cavity 11 and second cavity 21 which are not connected to each other.
  • the first chamber 11 is filled with water
  • the second chamber 21 is filled with a polyimide solution
  • the second tank 2 is respectively provided with a liquid outlet tube 22 and a liquid inlet tube that communicate with the second chamber 21, respectively. 23 and the exhaust pipe 24.
  • the outlet pipe 22, the inlet pipe 23, and the exhaust pipe 24 both pass through the first can body 1 and extend out of the first can body 1, and the outlet pipe 22 and the inlet pipe 23 are from the first can body 1.
  • the top of the exhaust pipe 24 extends from the side wall of the first can body 1; the sound wave generator 3 is disposed at the bottom of the first can body 1, since the first can body 1 is placed vertically, The contact area with the ultrasonic generator 3 is increased.
  • the structure of the ultrasonic generator 3 in the present invention is the prior art and is not specifically limited herein.
  • a filter 25 is provided on the discharge pipe 22 for filtering impurities in the polyimide solution to prevent clogging of the coating nozzle.
  • the second can body 2 is provided at the lower portion of the first can body 1, so that the cavitation of the ultrasonic generator can be better applied to the polyimide solution in the second can body 2.
  • the exhaust pipe 24 is provided with an exhaust valve 26, and specifically, the exhaust valve 26 is a solenoid valve, which can better control the exhaust gas automatically.
  • an inlet valve 27 is provided on the inlet pipe 23, and the inlet valve 27 is used to control the polyimide solution entering the second tank 2.
  • the inlet valve 27 is Solenoid valve, this can be more Good requirements for automation.
  • a first pump 28 is further disposed on the inlet pipe 23, and a second pump 29 is disposed between the filter 25 and the second tank 2 on the liquid outlet pipe 22, thereby performing a polyimide solution. Input and output control.
  • the bubble removing device of the polyimide solution in the present invention may further be provided with a controller for controlling the control valve 26, the ultrasonic generator 3, the inlet valve 27, the first pump 28, and the second pump 29, and the like. Automated control.
  • the present invention also discloses a coating machine comprising a storage tank 4, a coating nozzle 5 and a coating station 6, and further comprising a bubble removing device of the above polyimide solution, the device comprising a tank body 1, a second tank body 2 disposed in the first tank body 1, and an ultrasonic generator 3 disposed on the first tank body 1, the first tank body 1 for loading an intermediate medium such as water, etc.
  • the second tank body 2 is used for degassing, and the polyimide solution is transferred.
  • the shape of the first tank body 1 and the second tank body 2 may be a cylindrical structure, and the first tank body 1 is placed in a vertical position, which can save Space; the volume of the second tank body 2 is smaller than the volume of the first tank body 1, and the first tank body 1 and the second tank body 2 respectively form two first chambers 11 and a second volume that are not connected to each other.
  • the chamber 21 is filled with water in the first chamber 11, the second chamber 21 is filled with a polyimide solution, and the second tank 2 is provided with a liquid outlet tube 22 communicating with the second chamber 21, respectively.
  • the liquid pipe 23 and the exhaust pipe 24 are connected to the solution pipe of the coating head 5, and the inlet pipe 23 is connected to the storage tank 4.
  • the liquid outlet pipe 22, the liquid inlet pipe 23, and the exhaust pipe 24 both pass through the first can body 1 and extend out of the first can body 1, and the liquid discharge pipe 22 and the liquid inlet pipe 23 are from the first can body 1.
  • the top of the exhaust pipe 24 extends from the side wall of the first can body 1; the sound wave generator 3 is disposed at the bottom of the first can body 1, since the first can body 1 is placed vertically, The contact area with the ultrasonic generator 3 is increased; and a filter 25 is provided on the discharge pipe 22 for filtering impurities in the polyimide solution to prevent clogging of the coating nozzle.
  • the second can body 2 is provided at the lower portion of the first can body 1, so that the cavitation of the ultrasonic generator 3 can be better applied to the polyimide solution in the second can body 2.
  • the exhaust pipe 24 is provided with an exhaust valve 26, and specifically, the exhaust valve 26 is a solenoid valve, which can better control the exhaust gas automatically.
  • an inlet valve 27 is provided on the inlet pipe 23, and the inlet valve 27 is used to control the polyimide solution entering the second tank 2.
  • the inlet valve 27 is Solenoid valves, which can better meet the requirements of automation.
  • a first pump 28 is further disposed on the inlet pipe 23, and a second pump 29 is disposed between the filter 25 and the second tank 2 on the liquid outlet pipe 22 to input and output the polyimide solution. control.
  • control valve 26, the ultrasonic generator 3, the inlet valve 27, the first pump 28, the second pump 29, and the like are automatically controlled by a controller of the coater.
  • the working process of the bubble removing device of the polyimide solution in the present invention is as follows: when the second tank body 2 is fed with a polyimide (PI) solution through a liquid inlet pipe, the pipe wall inlet valve 27, and then the ultrasonic generator The action of the cavitation in the water in the first tank 1 passes through the second tank 2 to the PI solution in the tank, so that the gas existing in the solution and the dissolved gas continuously condense into small bubbles, and finally Gathering into a spherical bubble and escaping from the surface of the liquid, then opening the exhaust valve 26 to discharge the gas, and then withdrawing the PI solution through the second pump 29 on the discharge pipe 22 and passing through the outlet pipe 22, the filter 25, and then coating The solution conduit of the showerhead 5 enters the coating nozzle 5.
  • PI polyimide
  • the invention has the ultrasonic treatment of the polyimide solution, can effectively remove the bubbles in the solution, avoids the bubbles in the coating process, affects the subsequent process, and produces defects; the ultrasonic treatment of the polyimide solution is convenient and quick, only the PI solution is needed. After a few minutes of treatment, the production cycle is greatly improved, and the production efficiency is improved; the whole process is fast, effectively avoiding the volatilization of the low-boiling organic compound NMP, ensuring the stable ratio of the PI solution, and making the coating process stable and uniform.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Degasification And Air Bubble Elimination (AREA)

Abstract

一种聚酰亚胺溶液的气泡去除装置及包含其的涂布机，该装置包括第一罐体（1）、设于第一罐体（1）中的第二罐体（2）以及设于第一罐体（1）上的超声波发生器（3），第二罐体（2）的体积小于第一罐体（1）的体积，第一罐体（1）与第二罐体（2）分别形成两个互不相连的第一容腔（11）和第二容腔（21），第一容腔（11）内装有水，第二容腔（21）中装有溶液，在第二罐体（2）上分别设有与第二容腔（21）连通的出液管（22）、进液管（23）、以及排气管（24），出液管（22）与涂布喷头（5）的溶液管道连接，进液管（23）与储存罐（4）连接。该聚酰亚胺溶液的气泡去除装置及包含其的涂布机，实现对聚酰亚胺溶液中气泡的去除，这样能够缩小脱泡时间，大大减少工艺所需时间。

Description

溶液气泡去除装置及涂布机 技术领域
本发明涉及一种显示面板生产技术，特别是一种溶液气泡去除装置及涂布机。
背景技术
柔性显示是一种基于柔性基底形成的显示装置。由于柔性显示装置具有可卷曲、宽视角、便于携带等特点，因此具有广阔的应用前景和良好的市场潜力。目前，可用于柔性显示基底材料有超薄玻璃、塑料薄膜以及金属箔片等。
聚酰亚胺(PI)是一类具有酰亚胺重复单元的聚合物，具有适用温度广、耐化学腐蚀、高强度、高绝缘等优点。PI作为一种特种工程材料，已广泛应用在航空、航天、微电子等领域。目前PI作为柔性基底材料已经成功的应用到一些柔性显示电子产品上。
目前基于PI进行开发和制作的柔性OLED(Organic Light-Emitting Diode,OLED)器件，通常以狭缝式涂布(Slit Coat)的方式将经过解冻和脱泡PI液体涂覆到玻璃基板上，之后通过红外烘烤的方式进行亚胺化和干燥。
然而现有的PI液中常常含有大量微米尺寸的气泡，在涂覆前和涂覆时都不能对气泡进行十分有效的排出。在涂覆后制程中如高温真空干燥(H-VCD)和红外烘烤阶段，这些气泡会扩散到PI薄膜表面形成一定尺寸的气泡(Bubble)，如图1，这些气泡(Bubble)在后续阵列(Array)工艺过程中可能会出现凹陷或凸起等现象，严重影响到后制程的进行。目前可用于除泡的方法大致有真空法和搅拌法两类。
目前常用的去除PI溶液中气泡的方法有：将PI溶液静置于真空环境中并一直抽真空；但持续抽真空会造成PI液中低沸点有机溶剂NMP(N-甲基吡咯烷酮)挥发而出现PI固含量偏离，出现膜厚异常等情况；另有通过持续机械搅拌PI液16-18小时，并通过通入干净的氮气带气泡的方法，但此法所需时间较长，不能适应工业化量产的需求。
发明内容
为克服现有技术的不足，本发明提供一种溶液气泡去除装置及涂布机，实现对溶液中的气泡进行去除。
本发明提供了一种聚酰亚胺溶液的气泡去除装置，该装置包括第一罐体、设于第一罐体中的第二罐体以及设于第一罐体上的超声波发生器，所述第二罐体的体积小于第一罐体的体积，所述第一罐体与第二罐体分别形成两个互不相连的第一容腔和第二容腔，所述第一容腔内装有水，第二容腔中装有溶液，在第二罐体上分别设有与第二容腔连通的出液管、进液管、以及排气管。
进一步地，所述出液管上设有过滤器。
进一步地，所述第二罐体设于第一罐体的下部。
进一步地，所述超声波发生器设于第一罐体的底部。
进一步地，所述排气管上设有排气阀。
进一步地，所述进液管上设有进液阀。
进一步地，所述进液管上还设有第一泵。
进一步地，所述出液管上位于过滤器与第二罐体之间设有第二泵。
本发明还提供了一种涂布机，包括储存罐、涂布喷头，还包括所述的聚酰亚胺溶液的气泡去除装置，所述出液管与涂布喷头的溶液管道连接，进液管与储存罐连接。
本发明与现有技术相比，通过在第一罐体中设置体积小于第二罐体以及在第一罐体上设置超声波发生器，使第一罐体中形成第一空腔并在第一空腔中装入水，而第二罐体的第二空腔中装入聚酰亚胺溶液并在第二罐体上设置排气管、出液管以及进液管，采用超声波振动的方式，在介质水中产生空话作用，穿透第二罐体作用到罐内的聚酰亚胺溶液，使聚酰亚胺溶液内存在的气体不断凝聚，成为细小的气泡，最后聚集呈未球状气泡而脱离聚酰亚胺液体表面后通过排气管排出，实现对聚酰亚胺溶液中气泡的去除，这样能够缩小脱泡时间，大大减少工艺所需时间，提高聚酰亚胺溶液的使用效率，同时也有效控制了聚酰亚胺溶液中低沸点有机溶剂的挥发，维持聚酰亚胺溶液稳定的配比。
附图说明
图1是本发明的结构示意图。
具体实施方式
下面结合附图和实施例对本发明作进一步详细说明。
如图1所示，本发明公开了一种聚酰亚胺溶液的气泡去除装置，该装置包括第一罐体1、设于第一罐体1中的第二罐体2以及设于第一罐体1上的超声波发生器3，第一罐体1用于装载中间介质，例如水等，第二罐体2用于脱气，转载聚酰亚胺溶液，第一罐体1和第二罐体2的形状可以为圆柱体结构，第一罐体1的放置为立式放置，这样能够节省空间。
所述第二罐体2的体积小于第一罐体1的体积，所述第一罐体1与第二罐体2分别形成两个互不相连的第一容腔11和第二容腔21，第一容腔11内装有水，第二容腔21中装有聚酰亚胺溶液，在第二罐体2上分别设有与第二容腔21连通的出液管22、进液管23以及排气管24。具体地，出液管22、进液管23以及排气管24均穿过第一罐体1并伸出第一罐体1外，出液管22和进液管23从第一罐体1的顶部伸出，排气管24则从第一罐体1的侧壁伸出；超过声波发生器3设置在第一罐体1的底部，由于第一罐体1为立式放置，因此能够增加与超声波发生器3的接触面积。
本发明中超声波发生器3的结构为现在技术，在此不做具体限定。
如图1所示，在出液管22上设有过滤器25，过滤器25用于滤除聚酰亚胺溶液中的杂质，防止堵塞涂布喷头。
如图1所示，第二罐体2设于第一罐体1的下部，这样能够更好的使超声波发生器的空化作用作用到第而罐体2中的聚酰亚胺溶液中。
如图1所示，排气管24上设有排气阀26，具体地，排气阀26为电磁阀，这样能够更好的对排气进行自动化控制。
如图1所示，在进液管23上设有进液阀27，进液阀27用于对进入第二罐体2中的聚酰亚胺溶液进行控制，具体地，进液阀27为电磁阀，这样能够更 好的实现自动化的要求。
本发明中在进液管23上还设有第一泵28，在出液管22上位于过滤器25与第二罐体2之间设有第二泵29，从而对聚酰亚胺溶液进行输入以及输出的控制。
本发明中的聚酰亚胺溶液的气泡去除装置中还可以设有一个控制器，用于对控制阀26、超声波发生器3、进液阀27、第一泵28以及第二泵29等进行自动化控制。
如图1所示，本发明还公开了一种涂布机，包括储存罐4、涂布喷头5以及涂布台6，还包括上述的聚酰亚胺溶液的气泡去除装置，该装置包括第一罐体1、设于第一罐体1中的第二罐体2以及设于第一罐体1上的超声波发生器3，第一罐体1用于装载中间介质，例如水等，第二罐体2用于脱气，转载聚酰亚胺溶液，第一罐体1和第二罐体2的形状可以为圆柱体结构，第一罐体1的放置为立式放置，这样能够节省空间；所述第二罐体2的体积小于第一罐体1的体积，所述第一罐体1与第二罐体2分别形成两个互不相连的第一容腔11和第二容腔21，第一容腔11内装有水，第二容腔21中装有聚酰亚胺溶液，在第二罐体2上分别设有与第二容腔21连通的出液管22、进液管23以及排气管24，所述出液管22与涂布喷头5的溶液管道连接，进液管23与储存罐4连接。
具体地，出液管22、进液管23以及排气管24均穿过第一罐体1并伸出第一罐体1外，出液管22和进液管23从第一罐体1的顶部伸出，排气管24则从第一罐体1的侧壁伸出；超过声波发生器3设置在第一罐体1的底部，由于第一罐体1为立式放置，因此能够增加与超声波发生器3的接触面积；在出液管22上设有过滤器25，过滤器25用于滤除聚酰亚胺溶液中的杂质，防止堵塞涂布喷头。
第二罐体2设于第一罐体1的下部，这样能够更好的使超声波发生器3的空化作用作用到第而罐体2中的聚酰亚胺溶液中。
如图1所示，排气管24上设有排气阀26，具体地，排气阀26为电磁阀，这样能够更好的对排气进行自动化控制。
如图1所示，在进液管23上设有进液阀27，进液阀27用于对进入第二罐体2中的聚酰亚胺溶液进行控制，具体地，进液阀27为电磁阀，这样能够更好的实现自动化的要求。
在进液管23上还设有第一泵28，在出液管22上位于过滤器25与第二罐体2之间设有第二泵29，从而对聚酰亚胺溶液进行输入以及输出的控制。
通过涂布机的控制器，对控制阀26、超声波发生器3、进液阀27、第一泵28以及第二泵29等进行自动化控制。
本发明中聚酰亚胺溶液的气泡去除装置的工作过程如下：当第二罐体2中经进液管输入聚酰亚胺(PI)溶液后，管壁进液阀27，再超声波发生器的作用下，使第一罐体1内的水中产生空化作用，穿过第二罐体2作用到罐内的PI溶液，使溶液内存在及溶解的气体不断凝聚，成为细小的气泡，最后聚集成为球状气泡而脱离液体表面，然后打开排气阀26，使气体排出，然后经过出液管22上的第二泵29将PI溶液抽出并经出液管22、过滤器25后经涂布喷头5的溶液管道进入涂布喷头5。
本发明具有采用超声波处理聚酰亚胺溶液，能有效去除溶液中的气泡，避免涂布过程存在气泡影响后续制程，产生不良；采用超声波处理聚酰亚胺溶液，方便快捷，仅需对PI溶液进行几分钟处理，大大提升了生产节拍，提高生产效率；整个处理过程快速，有效避免了低沸点有机化合物NMP的挥发，保证了PI溶液的稳定配比，使得涂布过程稳定均一。
虽然已经参照特定实施例示出并描述了本发明，但是本领域的技术人员将理解：在不脱离由权利要求及其等同物限定的本发明的精神和范围的情况下，可在此进行形式和细节上的各种变化。

Claims (18)

  1. 一种聚酰亚胺溶液的气泡去除装置，其中：该装置包括第一罐体、设于第一罐体中的第二罐体以及设于第一罐体上的超声波发生器，所述第二罐体的体积小于第一罐体的体积，所述第一罐体与第二罐体分别形成两个互不相连的第一容腔和第二容腔，所述第一容腔内装有水，第二容腔中装有溶液，在第二罐体上分别设有与第二容腔连通的出液管、进液管以及排气管。
  2. 根据权利要求1所述的聚酰亚胺溶液的气泡去除装置，其中：所述出液管上设有过滤器。
  3. 根据权利要求1所述的聚酰亚胺溶液的气泡去除装置，其中：所述第二罐体设于第一罐体的下部。
  4. 根据权利要求1所述的聚酰亚胺溶液的气泡去除装置，其中：所述超声波发生器设于第一罐体的底部。
  5. 根据权利要求3所述的聚酰亚胺溶液的气泡去除装置，其中：所述超声波发生器设于第一罐体的底部。
  6. 根据权利要求1所述的聚酰亚胺溶液的气泡去除装置，其中：所述排气管上设有排气阀。
  7. 根据权利要求1所述的聚酰亚胺溶液的气泡去除装置，其中：所述进液管上设有进液阀。
  8. 根据权利要求7所述的聚酰亚胺溶液的气泡去除装置，其中：所述进液管上还设有第一泵。
  9. 根据权利要求2所述的聚酰亚胺溶液的气泡去除装置，其中：所述出液管上位于过滤器与第二罐体之间设有第二泵。
  10. 一种涂布机，包括储存罐、涂布喷头，其中：还包括聚酰亚胺溶液的气泡去除装置，该装置包括第一罐体、设于第一罐体中的第二罐体以及设于第一罐体上的超声波发生器，所述第二罐体的体积小于第一罐体的体积，所述第一罐体与第二罐体分别形成两个互不相连的第一容腔和第二容腔，所述第一容 腔内装有水，第二容腔中装有溶液，在第二罐体上分别设有与第二容腔连通的出液管、进液管以及排气管；所述出液管与涂布喷头的溶液管道连接，进液管与储存罐连接。
  11. 根据权利要求10所述的涂布机，其中：所述出液管上设有过滤器。
  12. 根据权利要求10所述的涂布机，其中：所述第二罐体设于第一罐体的下部。
  13. 根据权利要求10所述的涂布机，其中：所述超声波发生器设于第一罐体的底部。
  14. 根据权利要求12所述的涂布机，其中：所述超声波发生器设于第一罐体的底部。
  15. 根据权利要求10所述的涂布机，其中：所述排气管上设有排气阀。
  16. 根据权利要求10所述的涂布机，其中：所述进液管上设有进液阀。
  17. 根据权利要求16所述的涂布机，其中：所述进液管上还设有第一泵。
  18. 根据权利要求11所述的涂布机，其中：所述出液管上位于过滤器与第二罐体之间设有第二泵。
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