WO2018198350A1 - Chambre à vapeur - Google Patents

Chambre à vapeur Download PDF

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Publication number
WO2018198350A1
WO2018198350A1 PCT/JP2017/017035 JP2017017035W WO2018198350A1 WO 2018198350 A1 WO2018198350 A1 WO 2018198350A1 JP 2017017035 W JP2017017035 W JP 2017017035W WO 2018198350 A1 WO2018198350 A1 WO 2018198350A1
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WO
WIPO (PCT)
Prior art keywords
sheet
vapor chamber
formula
distance
less
Prior art date
Application number
PCT/JP2017/017035
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English (en)
Japanese (ja)
Inventor
岸本　敦司
宗一 久米
池田　治彦
拓生 若岡
近川　修
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to PCT/JP2017/017035 priority Critical patent/WO2018198350A1/fr
Priority to JP2019506538A priority patent/JP6741142B2/ja
Priority to CN201880005148.0A priority patent/CN110088556B/zh
Priority to PCT/JP2018/016936 priority patent/WO2018199215A1/fr
Publication of WO2018198350A1 publication Critical patent/WO2018198350A1/fr
Priority to US16/414,802 priority patent/US11150030B2/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes

Definitions

  • the present invention relates to a vapor chamber.
  • the vapor chamber has a structure in which a wick that transports hydraulic fluid by capillary force is provided inside the casing, and the hydraulic fluid is enclosed.
  • the hydraulic fluid absorbs heat from the heating element in the evaporation section that absorbs heat from the heating element, evaporates in the vapor chamber, moves to the condensation section, is cooled, and returns to the liquid phase.
  • the working fluid that has returned to the liquid phase is moved again to the heating element side (evaporating part) by the capillary force of the wick, and cools the heating element.
  • the vapor chamber operates independently without external power, and heat can be diffused at a high speed two-dimensionally using the latent heat of vaporization and the latent heat of condensation of the working fluid.
  • Patent Document 1 includes a casing in which a convex portion having a hollow portion formed by two opposing plate-like bodies is formed in the central portion, and a working fluid sealed in the hollow portion, A vapor chamber is disclosed in which the hollow portion is provided with a wick structure and the outer peripheral portion of the convex portion is sealed by laser welding.
  • Patent Document 2 discloses a vapor chamber in which two or more etched metal sheets are stacked to form a container in which at least a part of the outer peripheral portion is sealed by bonding. The vapor chamber is characterized in that the outer peripheral portion of the metal sheet is formed by diffusion bonding the side wall of the metal sheet, and the width of the side wall is 0.3 mm or more.
  • the vapor chambers described in Patent Documents 1 and 2 are pre-processed such as forming a metal sheet constituting the casing in a convex shape in advance or forming a groove in the sheet in order to form an internal space of the casing. Is required.
  • the present inventors do not perform the pre-processing of the metal sheet for forming such an internal space of the housing, but provide a column between two sheets constituting the housing, thereby providing the interior of the housing. Tried to secure space.
  • the vapor chamber thus obtained may be inferior in reliability.
  • An object of the present invention is to provide a highly reliable vapor chamber using a casing in which a column is provided between two sheets.
  • the present inventors have determined the distance between the two sheets and the two sheets.
  • the present invention has found that a highly reliable vapor chamber can be obtained by adjusting the width of the joining portion according to the distance from the location where the two sheets start approaching to join the sheets to the joining portion. It came to.
  • a housing composed of a first sheet and a second sheet facing each other, the outer edges of which are joined; A pillar provided between the first sheet and the second sheet so as to support them from the inside; A hydraulic fluid enclosed in the housing, The first sheet and the second sheet do not have a corner portion whose angle is 90 ° or less between the joint portion and the column closest to the joint portion, Vapor chamber satisfying the following formula 1, formula 2, and formula 3 Formula 1: c ⁇ 1.8 ⁇ b / a + 0.270 Formula 2: 0.016 ⁇ b / a ⁇ 0.125 Formula 3: b ⁇ 0.500 [Where: a is the distance (mm) from the position where the sheet starts to deform to the end of the joint, b is the distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform, c is the width (mm) of the joint. ] Is provided.
  • a heat dissipation device having the above-described vapor chamber.
  • an electronic apparatus comprising the vapor chamber or the heat dissipation device.
  • the distance between the inner end of the joint and the pillar closest to the joint, and the joint can be improved by adjusting the width of the joint portion according to the distance between the first sheet and the second sheet at the position where the closest column exists.
  • a highly reliable vapor chamber can be easily manufactured.
  • FIG. 1 is a cross-sectional view schematically showing a cross section of a vapor chamber 1 in one embodiment of the present invention.
  • FIG. 2 is a plan view schematically showing the vapor chamber 1 according to one embodiment of the present invention as viewed from the first sheet side.
  • the vapor chamber 1 of the present embodiment includes a housing 4 composed of a first sheet 2 and a second sheet 3 facing each other, and a working fluid sealed in the casing (FIG. 1). Not shown).
  • a plurality of pillars 5 are provided between the first sheet 2 and the second sheet 3 to support them from the inside.
  • the first sheet 2 and the second sheet 3 are supported by the pillar 5 in the inner region 11 (hereinafter also referred to as “central region”) connecting the pillars 5 existing on the edge side, and are separated by a predetermined distance. .
  • the first sheet 2 and the second sheet 3 are close to each other in the region 12 outside the central region 11 (hereinafter, also referred to as “terminal region”), contact at the outer edge portion, and are bonded and sealed.
  • the portion 6 where the first sheet and the second sheet are joined is also referred to as a “joint portion”.
  • the first sheet 2 and the second sheet 3 typically begin to approach each other from the end of the column 5 closest to the edge of the sheet and are joined to each other at the joint 6 located at the outer edge of the sheet. Is sealed.
  • seat 3 has the some convex part 7 in the inner surface (namely, main surface by the side of the internal space of a housing
  • a wick 8 is provided on the second sheet 3. That is, in the vapor chamber 1 of the present embodiment, the wick 8 is positioned on the second sheet 3, the column 5 is positioned on the wick 8, and the first sheet 2 is positioned on the column 5.
  • the casing 4 includes a first sheet 2 and a second sheet 3 that face each other.
  • the size of the casing 4 is not particularly limited.
  • the thickness of the housing 4 (indicated by T in FIG. 1) is preferably 100 ⁇ m or more and 600 ⁇ m or less, more preferably 200 ⁇ m or more and 500 ⁇ m or less.
  • the length (indicated by L in FIG. 1) and the width (indicated by W in FIG. 2) of the housing 4 can be appropriately set according to the application to be used, for example, 5 mm to 500 mm, 20 mm or more. It may be 300 mm or less, or 50 mm or more and 200 mm or less.
  • the shape of the casing 4 is not particularly limited.
  • the planar shape of the housing 4 (the shape shown in FIG. 2, that is, the shape seen from the upper side in FIG. 1) is a polygon such as a triangle or a rectangle, a circle, an ellipse, a combination of these, etc. It can be.
  • the material for forming the first sheet 2 and the second sheet 3 is not particularly limited as long as it has characteristics suitable for use as a vapor chamber, such as thermal conductivity, strength, flexibility, and the like.
  • the material constituting the first sheet 2 and the second sheet 3 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing them as a main component, particularly preferably. It can be copper.
  • the materials constituting the first sheet 2 and the second sheet 3 may be the same or different, but are preferably the same.
  • the thickness (indicated by t in FIG. 1) of the first sheet 2 and the second sheet 3 is not particularly limited, but is preferably 10 ⁇ m to 200 ⁇ m, more preferably 30 ⁇ m to 100 ⁇ m, for example, preferably 40 ⁇ m to 60 ⁇ m. It can be:
  • the second sheet 3 has a plurality of convex portions 7 on the main surface on the inner space side.
  • the hydraulic fluid can be held between the convex portions, and the transmittance of the vapor chamber of the present invention can be increased.
  • the transmittance By increasing the transmittance, the heat transport capability of the vapor chamber is improved.
  • the convex portion refers to a portion having a relatively higher height than the surroundings, and in addition to the portion protruding from the main surface, the height is relatively high due to a concave portion formed on the main surface, such as a groove. The part which becomes.
  • the height of the convex portion 7 is not particularly limited, but may be preferably 1 ⁇ m or more and 100 ⁇ m or less, more preferably 5 ⁇ m or more and 50 ⁇ m or less, and further preferably 15 ⁇ m or more and 30 ⁇ m or less.
  • the distance between the convex portions 7 is not particularly limited, but may be preferably 1 ⁇ m or more and 500 ⁇ m or less, more preferably 5 ⁇ m or more and 300 ⁇ m or less, and further preferably 15 ⁇ m or more and 150 ⁇ m or less.
  • the capillary force can be further increased.
  • the transmittance can be further increased by increasing the distance between the convex portions.
  • the shape of the convex portion 7 is not particularly limited, but may be a cylindrical shape, a prism shape, a truncated cone shape, a truncated pyramid shape, or the like. Further, the shape of the convex portion 7 may be a wall shape, that is, a shape in which a groove is formed between adjacent convex portions.
  • the convex portion 7 is not an essential component and may not exist.
  • the first sheet 2 and the second sheet 3 are joined to each other at their outer edge portions.
  • the joining method is not particularly limited.
  • laser welding, resistance welding, diffusion joining, brazing, TIG welding (tungsten-inert gas welding), ultrasonic joining, or resin sealing can be used.
  • Laser welding, resistance welding or brazing can be used.
  • the pillar 5 supports the first sheet 2 and the second sheet 3 from the inside so that the distance between the first sheet and the second sheet is a predetermined distance.
  • the pillar 5 may be in direct contact with each sheet, or may be supported via another member such as a wick.
  • the material which forms the said pillar 5 is not specifically limited, For example, it is a metal, for example, they are copper, nickel, aluminum, magnesium, titanium, iron, or an alloy which has them as a main component, Especially preferably, it is copper. obtain.
  • the material forming the pillar is the same material as either or both of the first sheet and the second sheet.
  • the height of the pillar 5 can be appropriately set according to the desired thickness of the vapor chamber, preferably 50 ⁇ m or more and 500 ⁇ m or less, more preferably 100 ⁇ m or more and 400 ⁇ m or less, and further preferably 100 ⁇ m or more and 200 ⁇ m or less, for example 125 ⁇ m or more. 150 ⁇ m or less.
  • the height of the column means the height in the thickness direction of the vapor chamber (the height in the vertical direction in FIG. 1).
  • the shape of the column 5 is not particularly limited, but may be a columnar shape, a prismatic shape, a truncated cone shape, a truncated pyramid shape, or the like.
  • the thickness of the column 5 is not particularly limited as long as it gives strength capable of suppressing deformation of the casing of the vapor chamber.
  • the equivalent circle diameter of a cross section perpendicular to the column height direction is 100 ⁇ m or more and 2000 ⁇ m or less.
  • the thickness may be preferably 300 ⁇ m or more and 1000 ⁇ m or less.
  • the arrangement of the pillars 5 is not particularly limited, but is preferably arranged evenly, for example, in the form of lattice points so that the distance between the pillars is constant. By arranging the columns evenly, a uniform strength can be ensured throughout the vapor chamber.
  • the number and interval of the pillars 5 are not particularly limited, but are preferably 0.125 or more and 0.5 or less, more preferably 0.125 or more, more preferably 1 or less per 1 mm 2 of the main surface area of one sheet that defines the internal space of the vapor chamber. It may be 0.2 or more and 0.3 or less.
  • the pillar 5 may be formed integrally with the first sheet, or may be manufactured separately from the first sheet and then fixed to a predetermined portion of the first sheet.
  • the wick 8 is not particularly limited as long as it has a structure capable of moving the hydraulic fluid by capillary force.
  • the capillary structure that exhibits the capillary force for moving the working fluid is not particularly limited, and may be a known structure used in a conventional vapor chamber.
  • examples of the capillary structure include fine structures having irregularities such as pores, grooves, and protrusions, such as a fiber structure, a groove structure, and a network structure.
  • the thickness of the wick 8 is not particularly limited, but may be, for example, 5 ⁇ m to 200 ⁇ m, preferably 10 ⁇ m to 80 ⁇ m, and more preferably 30 ⁇ m to 50 ⁇ m.
  • the size and shape of the wick 8 are not particularly limited.
  • the wick 8 has a size and shape that can be continuously installed from the evaporation section to the condensation section inside the housing.
  • the wick 8 is not an essential component and may not exist.
  • irregularities, grooves, or the like may be formed on the surface of one or both of the first sheet and the second sheet, and the sheet itself may function as a wick.
  • the pillar 5 can directly contact both the first sheet and the second sheet.
  • the hydraulic fluid is not particularly limited as long as it can cause a gas-liquid phase change under the environment in the casing, and for example, water, alcohols, alternative chlorofluorocarbon, or the like can be used.
  • the hydraulic fluid is an aqueous compound, preferably water.
  • the first sheet 2, the second sheet 3, the pillar 5, and the wick 8 described above are stacked in the order of the second sheet 3, the wick 8, the pillar 5, and the first sheet 2. It is in the state that was done.
  • the first sheet 2 and the second sheet 3 approach in the end region 12 as they approach the edge of the sheet, contact at the outer edge, and are joined and sealed.
  • the portion where the first sheet and the second sheet are joined is also referred to as a “joint portion”.
  • At least one of the first sheet and the second sheet is deformed (curved or refracted) in the terminal region to approach the other sheet, but is 90 ° or less, preferably 100 ° or less, more preferably 110 ° or less. Does not deform at an angle.
  • the distance (mm) from the position where the sheet starts to be deformed to the end of the joint is “a”, and the position between the first sheet and the second sheet at the position where the sheet starts to deform is
  • the distance (mm) is “b” and the joint width (mm) is “c”
  • the following formulas 1 to 3 are satisfied.
  • the vapor chamber of the present invention satisfies the following formulas 1 ′, 2 ′ and 3 ′.
  • Formula 1 ′ c ⁇ 1.8 ⁇ b / a + 0.470
  • Formula 2 ′ 0.030 ⁇ b / a ⁇ 0.100
  • Formula 3 ′ b ⁇ 0.400
  • the width of the joint can be preferably 1.000 mm or less, more preferably 0.800 mm or less. That is, c can be preferably 1.000 or less, more preferably 0.800 or less.
  • the distance between the first sheet and the second sheet at the position where the sheet starts to deform may be preferably 0.060 mm or more, more preferably 0.100 or more. That is, b can be preferably 0.060 or more, more preferably 0.100 or more.
  • the “position where the sheet starts to deform” means a position where one or both of the first sheet and the second sheet starts deformation toward the other sheet for bonding.
  • the “position where the sheet begins to deform” may be the boundary between the central region 11 and the end region 12.
  • the “distance (mm) from the position where the sheet starts to deform to the end of the joint” means the distance from the position where the sheet starts to deform to the end of the nearest joint.
  • distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform refers to the inner main surface of the first sheet and the second sheet at the position where the sheet starts to deform. This means the distance between the inner main surfaces.
  • the distance between the inner main surfaces of a 1st sheet and a 2nd sheet is based on the surface at the time of assuming that this convex part or a recessed part does not exist.
  • the height direction position (position in the vertical direction in FIG. 1) where the joint portion 6 of the first sheet and the second sheet exists is the height (first position) between the first sheet and the second sheet in the central region 11. As long as it is the same height as the sheet or the second sheet).
  • the position in the height direction where the joint portion 6 exists is an intermediate portion between the first sheet and the second sheet, that is, the height direction from the joint portion to the inner main surface of the first sheet in the central region 11. The distance and the distance in the height direction from the joint portion to the inner main surface of the second sheet in the central region 11 are equal.
  • the vapor chamber of this invention was demonstrated by the said embodiment, the vapor chamber of this invention is not limited to the aspect shown in figure, Various modifications are possible.
  • the vapor chamber in another aspect may further have a convex portion on the inner main surface of the first sheet 2.
  • a concave portion may be present instead of the convex portion on one or both inner main surfaces of the first sheet 2 or the second sheet 3.
  • the vapor chamber in another aspect may further have a wick on the first sheet 2.
  • the pillar 5 may support the first sheet 2 via the wick without directly contacting the first sheet 2.
  • the vapor chamber of the present invention has a high heat transport capability and a high thermal diffusion capability as described above, it is preferably used for a heat dissipation device.
  • the present invention also provides a heat dissipation device comprising the vapor chamber of the present invention.
  • the vapor chamber of the present invention is advantageous for downsizing (particularly thinning), and is suitable for use in equipment that requires downsizing, such as electronic equipment.
  • the present invention also provides an electronic apparatus comprising the vapor chamber of the present invention or the heat dissipation device of the present invention.
  • Example 1 A 70 mm ⁇ 120 mm Cu sheet was prepared as the first sheet.
  • the size of the central region was 50 mm ⁇ 100 mm.
  • a column was formed by etching.
  • the columns were placed in the central region at 1.3 mm intervals.
  • the thickness t of the first sheet was 0.05 mm.
  • a 70 mm ⁇ 120 mm Cu sheet was prepared.
  • the size of the central region was 50 mm ⁇ 100 mm.
  • a convex portion was formed by etching.
  • the convex portion was a quadrangular prism having a bottom surface of 0.15 mm ⁇ 0.15 mm and a height of 0.03 mm.
  • the convex portions were arranged in the central region at intervals of 0.15 mm.
  • the thickness t of the second sheet was 0.05 mm.
  • a vapor chamber was prepared according to the following procedure.
  • the second sheet, the wick, and the first sheet were laminated in this order from the bottom, and the outer periphery 4 sides were welded by resistance welding to produce a vapor chamber body.
  • the pillars formed on the first sheet were disposed inward, and the convex portions formed on the second sheet were disposed inward.
  • a Cu pipe was inserted therein, and the vapor chamber main body and the Cu pipe were fixed with solder.
  • This Cu pipe was connected to a syringe containing a vacuum pump and working fluid via a switching valve.
  • the switching valve was connected to the inside of the vapor chamber and the vacuum pump, and the inside of the vapor chamber body was depressurized. Thereafter, the valve was switched, the inside of the vapor chamber was connected to the syringe containing the working fluid, and after a predetermined amount of working fluid was injected into the vapor chamber, the Cu pipe was caulked and sealed to obtain the vapor chamber of Example 1. .
  • Example 2 A vapor chamber of Example 2 was produced in the same manner as Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.500 mm.
  • Comparative Example 1 A vapor chamber of Comparative Example 1 was produced in the same manner as in Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.300 mm.
  • the vapor chamber of the present invention Since the vapor chamber of the present invention has high reliability, it can be used for a wide range of applications. In particular, it can be used as a cooling device for electronic devices or the like in applications where small and efficient heat transport is required.

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

Selon l'invention, une chambre à vapeur (1) comporte: une enveloppe (4) constituée d'une première feuille (2) et d'une deuxième feuille (4) jointes au niveau d'une partie bord externe; des supports (5) situés entre les première feuille (2) et deuxième feuille (3) et destinés à supporter ces feuilles côté interne; et un fluide hydraulique enfermé à l'intérieur de l'enveloppe (4). La première feuille (2) et la deuxième feuille (3) ne présentent pas de partie d'angle inférieur ou égal à 90° entre une partie jonction (6) et le support (5) le plus proche de cette partie jonction (6). En outre, les formules ci-dessous sont satisfaites. Formule 1: c ≥ 1,8 x b / a + 0,270. Formule 2: 0,016 ≤ b / a ≤ 0.125. Formule 3: b ≤ 0,500. [Dans ces formules, a représente la distance (mm) entre le point à partir duquel les feuilles commencent à changer de forme et l'extrémité de la partie jonction, b représente la distance (mm) entre les deux feuilles au niveau du point à partir duquel les feuilles commencent à changer de forme, et c représente la largeur (mm) de la partie jonction.]
PCT/JP2017/017035 2017-04-28 2017-04-28 Chambre à vapeur WO2018198350A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2017/017035 WO2018198350A1 (fr) 2017-04-28 2017-04-28 Chambre à vapeur
JP2019506538A JP6741142B2 (ja) 2017-04-28 2018-04-26 ベーパーチャンバー
CN201880005148.0A CN110088556B (zh) 2017-04-28 2018-04-26 均热板
PCT/JP2018/016936 WO2018199215A1 (fr) 2017-04-28 2018-04-26 Chambre à vapeur
US16/414,802 US11150030B2 (en) 2017-04-28 2019-05-17 Vapor chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/017035 WO2018198350A1 (fr) 2017-04-28 2017-04-28 Chambre à vapeur

Publications (1)

Publication Number Publication Date
WO2018198350A1 true WO2018198350A1 (fr) 2018-11-01

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Application Number Title Priority Date Filing Date
PCT/JP2017/017035 WO2018198350A1 (fr) 2017-04-28 2017-04-28 Chambre à vapeur

Country Status (1)

Country Link
WO (1) WO2018198350A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021246494A1 (fr) * 2020-06-04 2021-12-09 古河電気工業株式会社 Composant pour équipement électrique/électronique
JP7434066B2 (ja) 2020-06-04 2024-02-20 古河電気工業株式会社 電気・電子機器用部品
JP7470575B2 (ja) 2020-06-04 2024-04-18 古河電気工業株式会社 電気・電子機器用部品

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322463A (ja) * 1992-05-19 1993-12-07 Furukawa Electric Co Ltd:The ヒ−トパイプの封止部構造
JPH093571A (ja) * 1995-06-14 1997-01-07 Mitsubishi Shindoh Co Ltd ヒートシンク
JPH0989480A (ja) * 1995-09-22 1997-04-04 Furukawa Electric Co Ltd:The ヒートパイプ
JP3062459U (ja) * 1999-03-25 1999-10-08 嘉豪 李 超薄板状ヒ―トパイプ
JP2004324906A (ja) * 2003-04-21 2004-11-18 Sony Corp 冷却装置、電子機器及び冷却装置の製造方法
CN203704739U (zh) * 2013-11-05 2014-07-09 苏州聚力电机有限公司 异质复合式导热装置
WO2016017471A1 (fr) * 2014-08-01 2016-02-04 古河電気工業株式会社 Caloduc plat
JP2016050682A (ja) * 2014-08-28 2016-04-11 東芝ホームテクノ株式会社 シート型ヒートパイプ
JP2016061538A (ja) * 2014-09-22 2016-04-25 富士通株式会社 熱輸送デバイス、熱輸送デバイスの製造方法、及び電子機器
CN105841532A (zh) * 2015-01-12 2016-08-10 江苏格业新材料科技有限公司 类热管并行结构泡沫铜均热板的制造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322463A (ja) * 1992-05-19 1993-12-07 Furukawa Electric Co Ltd:The ヒ−トパイプの封止部構造
JPH093571A (ja) * 1995-06-14 1997-01-07 Mitsubishi Shindoh Co Ltd ヒートシンク
JPH0989480A (ja) * 1995-09-22 1997-04-04 Furukawa Electric Co Ltd:The ヒートパイプ
JP3062459U (ja) * 1999-03-25 1999-10-08 嘉豪 李 超薄板状ヒ―トパイプ
JP2004324906A (ja) * 2003-04-21 2004-11-18 Sony Corp 冷却装置、電子機器及び冷却装置の製造方法
CN203704739U (zh) * 2013-11-05 2014-07-09 苏州聚力电机有限公司 异质复合式导热装置
WO2016017471A1 (fr) * 2014-08-01 2016-02-04 古河電気工業株式会社 Caloduc plat
JP2016050682A (ja) * 2014-08-28 2016-04-11 東芝ホームテクノ株式会社 シート型ヒートパイプ
JP2016061538A (ja) * 2014-09-22 2016-04-25 富士通株式会社 熱輸送デバイス、熱輸送デバイスの製造方法、及び電子機器
CN105841532A (zh) * 2015-01-12 2016-08-10 江苏格业新材料科技有限公司 类热管并行结构泡沫铜均热板的制造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021246494A1 (fr) * 2020-06-04 2021-12-09 古河電気工業株式会社 Composant pour équipement électrique/électronique
JP7434066B2 (ja) 2020-06-04 2024-02-20 古河電気工業株式会社 電気・電子機器用部品
JP7470575B2 (ja) 2020-06-04 2024-04-18 古河電気工業株式会社 電気・電子機器用部品

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