Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/70—Auxiliary operations or equipment
  • B23K26/702—Auxiliary equipment
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
  • G02B7/003—Alignment of optical elements
  • G02B7/004—Manual alignment, e.g. micromanipulators
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
  • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
  • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
  • G05B19/00—Programme-control systems
  • G05B19/02—Programme-control systems electric
  • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
  • G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/70—Auxiliary operations or equipment
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
  • G05B2219/00—Program-control systems
  • G05B2219/30—Nc systems
  • G05B2219/45—Nc applications
  • G05B2219/45165—Laser machining

Definitions

• the invention relates to a Cartesian positioning device for positioning an optical system and to a laser processing head for processing a workpiece by means of a laser beam comprising such a Cartesian positioning device.
• optics such as a lens or beamforming optics must be set independently in at least two directions.
• an optical device arranged in the laser processing head for adjusting the laser beam by a fine nozzle bore of a laser processing head in two directions perpendicular to the optical axis of the laser processing head must be set independently.
• conventional positioning devices for positioning an optical system there is the problem that the optics are not displaced exactly linearly or not on mutually perpendicular axes. This makes a precise adjustment difficult and affects a reproducibility of a desired position.
• JP 2004-361862A a condenser system for a laser processing apparatus is shown, wherein a lens can perform a movement in two-dimensional direction perpendicular to the optical axis.
• two sets of micrometer and spring are arranged orthogonal to each other.
• the invention is therefore based on the object to provide a Cartesian positioning device for positioning an optic and a laser processing head with the same, wherein a positioning of the optics in two directions independently is made possible in a compact and simple design and with improved ease of use.
• a Cartesian positioning device for positioning an optic comprises a first actuator, or y actuator, for linear movement of an optics socket along a first Cartesian axis, i. in the y direction, and a second actuator, or x actuator, for linear movement of the optics socket along a second Cartesian axis, i. in the x-direction, wherein both the first and the second actuator along the first Cartesian axis, d. H. along the y-direction, is adjustable.
• the first and the second Cartesian axes, i. H. the y-direction and the x-direction perpendicular to each other.
• the x and the y-adjusting element can be parallel to each other adjustable.
• the adjusting elements may be formed, for example, as threaded spindles. This allows a compact design and independent positioning along two Cartesian axes.
• the Cartesian axes i. x-axis and y-axis, denote the axes of a Cartesian coordinate system whose third axis is the z-axis.
• the two adjusting elements are arranged side by side on a support element to which the optical socket is attached.
• at least one of the two control elements is calibrated.
• a certain adjustment value of one of the adjusting elements can be assigned to a specific value for the linear movement along the corresponding Cartesian axis.
• the y-adjusting element and / or the x-adjusting element each comprise a micrometer screw. This makes it possible to reproduce a positioning of the optics and to simplify exact positioning of the optics in an optical system.
• One end of the y-actuator may be formed as a y-slider.
• one end of the x-actuator may be formed as an x-slider.
• the y-slider can movably connect the y-actuator to the optics socket.
• the x-slider can be the x- Connecting actuator with the optics mount movable.
• the x-slider and / or the y-slider can be guided along at least one slide guide element.
• the y-actuator or the y-slider can be coupled to the optics socket by means of a linear guide unit in the x-direction movable.
• the y-actuator or the y-slider and the optical socket can be movably connected to each other via a rail or carriage system.
• the linear guide unit has a first part, which is arranged on a selected by the y-actuator (or y-slider) and the optical socket, and a second part, which at the other selected by the y-actuator (or y-slider) and the optical socket is arranged.
• the first part of the linear guide unit may have an undercut, in which a projection of the second part of the linear guide unit formed with a corresponding shape is guided.
• An example of the linear guide unit is a dovetail guide.
• the connection of the y-adjusting element or the y-slider with the optic socket zug- and / or druckinvariant is a dovetail guide.
• a transmission element may be arranged between the x-slider and the optical socket.
• the transmission element can be movably connected to the carrier element or mounted therein in the x-direction.
• the transmission element can be movably connected to the optical socket by a first guide unit.
• the first guide unit can be set up to guide the optical socket in the y-direction.
• the first guide unit comprises a linear guide unit, such as a dovetail guide.
• the first guide unit may comprise a first guide extending in the y direction, for example a slot, and a first guide pin guided therein.
• the first guide may be formed in one selected from the transmission member and the optical socket, and the first guide pin may be formed in the other selected from the transmission member and the optical socket.
• the transmission element can be movably connected to the x-slide by a second guide unit.
• the second guide unit may be configured to form an adjustment movement of the x-adjusting element along the y-direction into a movement of the transmission element along a predetermined direction which forms an angle of less than 90 ° with the y-direction, preferably an angle of approximately 45 ° to transform.
• the second guide unit may comprise a second guide extending in the predetermined direction, for example a slot, and a second guide pin guided therein.
• the second guide can in one selected by the transmission element and the x-actuator (or x-slide) may be formed and the second guide pin may be formed in the other selected from the transmission element and the x-actuator (or x-slide).
• the second guide unit can move the transmission element and thus the optical socket in the x-direction.
• the linear displacement of the x-actuator along the y-direction is converted by the diagonally oriented second guide in a movement of the transmission element in the xy plane. Due to the linear guide unit, which couples the y-actuator and the optical socket together, the movement of the transmission element can be converted into a linear movement of the optical socket in the x-direction.
• the x-adjusting element or the x-slider can be coupled to the optical socket via a lever element movable.
• an adjustment of the x-adjusting element can be transmitted via a lever element to the optical socket.
• the lifting element has a first end and a second end, wherein the lever element is coupled at its first end to the x-adjusting element or the x-slider and at its second end to the carrier element.
• the lever member may be coupled at a point between the first end and the second end.
• the lever element may be connected to the carrier element via a rotary joint.
• the lever element is pivotally mounted in the xy plane on the support element.
• the lever element can be movably connected by a first guide unit to the optical socket.
• the lever member may be movably connected by a second guide unit to the x-actuator or with the x-slider.
• the first guide unit can be configured to guide the optical sensor linearly in the y-direction.
• the first guide unit also allows rotation of the lever about the first guide pin.
• the second guide unit may be configured to transmit an adjusting movement of the x-adjusting element to the lever element.
• the linear displacement of the x-actuator along the y-direction is converted as a pivoting movement of the lever member in xy plane.
• the second guide may be curved or curved.
• the second guide unit allows rotation of the lever about the second guide pin.
• the linear guide unit which couples the y-actuator and the optical socket together By the linear guide unit which couples the y-actuator and the optical socket together, the pivotal movement of the lever member can be converted into a linear movement of the optical socket in the x-direction.
• the lever element may be L-shaped.
• the lever element can be coupled to the optical socket in the region in which both legs of the lens Meet shape.
• the first guide unit can therefore be arranged at a break point of the L-shaped lever element.
• the L-shape of the lever element allows an even more compact design.
• a portion of the first guide unit e.g. the first guide pin or the first guide, arranged on a fastening extension of the optical socket.
• the attachment extension of the optical socket can extend in the y-direction to the support element. This allows a compact arrangement of the transmission elements of the x- and y-adjusting movement on the optical socket.
• the first guide unit may comprise a first guide pin and a first guide.
• the second guide unit may comprise a second guide pin and a second guide.
• the first guide pin and / or the second guide pin are preferably formed on the lever element or on the transmission element. This simplifies the production processes.
• the first and / or second guide may comprise a recess, a guide groove, or a hole, in particular a slot.
• the first guide is preferably formed on the optical socket.
• the second guide is preferably formed on the x-actuator or x-slider.
• At least one slide guide element can be provided, which leads to a movement of the x-slider or the y-slider in the y-direction.
• the slider guide element can be designed as a guide pin or guide rib either on the x or y slide or on the carrier element.
• a corresponding groove or bore may be formed on the other of the x- or y-slider and the support member in which the slider-guide member is guided.
• the slider guide element may also be formed as a part of a dovetail guide, wherein the other part of the dovetail guide may be formed to the x- or y-slider.
• a laser processing head for processing a workpiece by means of a laser beam comprises a Cartesian positioning device for positioning an optical system according to one of the exemplary embodiments described.
• the optics is arranged in a beam path of the laser processing head.
• the carrier element of the Cartesian positioning device can be attached by means of fastening means, for example screws, to a housing of the laser processing head.
• An optical axis of the laser processing head preferably runs in the z-direction of the Cartesian coordinate system, ie perpendicular to the xy plane.
• x-direction, x-actuator, x-slider are each equal to the first direction, first actuator, first slider and can be replaced.
• y-direction, y-actuator, y-slider are each equal to the second direction, second actuator, second slider and can be replaced.
• the first or x-direction is perpendicular to the second or y-direction.
• Figure 1 is a schematic plan view of a Cartesian positioning device according to an embodiment of the present invention.
• Figure 2 is a plan view of the Cartesian positioning device of Figure 1 with two spring elements;
• Figure 3 is a plan view of the Cartesian positioning device of Figure 1 displaced in the y direction;
• Figure 4 is a plan view of the Cartesian positioning device of Figure 1, which is displaced in the x direction;
• Figures 5a and 5b are perspective side views of the Cartesian positioning device according to another embodiment;
• Figures 6a and 6b are front and top views of a portion of the Cartesian positioning apparatus of Figure 5;
• FIGS. 7a and 7b show a plan view and a side view of an optical socket of the Cartesian positioning device from FIG. 5; and FIGS. 8a and 8b show a plan view and a side view of a transfer element of the Cartesian positioning device from FIG. 5.
• FIG. 1 shows a schematic plan view of a Cartesian positioning device for positioning an optics according to a first embodiment of the present invention.
• the positioning device comprises a carrier element 20, to which an optical socket 10 for holding an optic is attached.
• the carrier element 20 can be fastened via fasteners 21, such as screws, to a housing of a laser processing head, so that the optics can be arranged in the beam path of the laser processing head.
• the optical socket 10 can be linearly displaced by means of two adjusting elements 30 and 40 respectively along a first and a second Cartesian axis.
• a displacement along the first Cartesian axis is independent of a displacement along the second Cartesian axis.
• x-axis and y-axis are axes of a Cartesian or orthogonal coordinate system.
• a movement in the x-direction or in the y-direction denotes a movement along the x-axis or along the y-axis.
• a movement in the x-direction is independent of a movement in the y-direction and thus has no component in the y-direction.
• a y-slider 50 is arranged, via which the y-actuator 30 is coupled to the optical socket 10.
• the y-slider 50 and the optical socket 10 via a linear guide unit 15 are movably connected to each other.
• the linear guide unit 15 may include, for example, a carriage formed on the y-slider 50 and a rail guide formed on the optical mount 10.
• the linear guide unit 15 is arranged in the x direction and allows a linear movement of the optical socket 10 in the x direction.
• the y-slider 50 may, for example, have a dovetail groove in which a suitably shaped rail of the optical socket 10 is guided.
• a dovetail groove may be provided on the optical socket 10 and the appropriate Rail on the y-slider 50.
• the linear guide unit 15 is formed so that the connection between the y-slider 50 and the optical socket 10 is tensile and christinvariant.
• the y-slider 50 which is fixedly coupled to the optical socket 10 in the y-direction, is likewise displaced in the y-direction and displaces the optical socket 10 accordingly by tension or pressure the y-axis.
• an x-slider 60 is arranged, which is movably coupled via a lever element 70 to the optical socket 10.
• the lever element 70 is fastened to the carrier element 20 via a swivel joint 71, so that the lever element 70 can be pivoted about the swivel joint 71 in the x-y plane.
• the carrier element 20 may have a fastening extension 22, which extends from an inner side of the carrier element 20 in the y-direction to the optical mount 10 in order to facilitate a pivoting movement of the lever element 70 about the pivot 71.
• the lever element 70 is movably connected via a first guide unit 80 to the optical mount 10 and via a second guide unit 90 to the x-slide 60.
• the hinge 71 may be provided at one end of the L-shape, the first guide unit 80 and at the break point where both legs of the L-shape meet the second guide unit 90. This allows a space-saving arrangement for implementation of the linear adjusting movement of the x-adjusting element 40 in the y-direction in a pivoting movement of the lever member 70 in the xy plane.
• the first guide unit 80 comprises a first guide pin 81 which runs in a first guide 82.
• the first guide 82 extends straight in the y direction.
• the first guide pin 81 is formed on the lever member 70, while the first guide 82, such as a groove or a slot, is formed in the optical socket 10.
• the first guide unit 80 thus allows a linear movement of the optical socket 10 in the y-direction.
• the second guide unit 90 further has a second guide pin 91, which runs in a second guide 92.
• the second guide 92 such as a groove or a slot, preferably formed on the x-slider 60, while the second guide pin 91 is provided on the lever member 70.
• the invention is not limited thereto.
• the formation of the first guide pin 81 and / or the second guide pin 91 on the lever member 70 simplifies the manufacture.
• the second guide 92 may be curved or curved. Both the first guide 82 and the second guide 92 allow a rotational movement of the respective first and second guide pins 81 and 91.
• the lifting element 70 is pivoted about the rotary joint 71, whereby the optical mount 10, which is fixed in the y-direction by the linear guiding unit 15, along the linear guiding unit 15 in x Direction is moved.
• An adjusting movement of the y-adjusting element 30 is transmitted directly to the optical socket 10 via the y-slider 50, wherein the optical socket 10 is linearly guided in the y-direction by the first guide unit 80.
• the optical socket 10 may have a fastening extension 11 which extends from the optical socket 10 in the y-direction to the support element 20.
• a part of the first guide unit 80 i. the first guide pin 81 or the first guide 82 may be arranged. This also allows a compact arrangement of the elements for transmitting the adjusting movement of the x-adjusting element 40 in the y-direction in a movement along the x-axis of the optical socket 10th
• Both the y-adjusting element 30 and the x-adjusting element 40 are axially fixed, so that movement of the optical socket 10 in the other Cartesian direction is prevented. Both the y-actuator 30 and the x-actuator 40 are parallel to each other along the y-direction adjustable.
• the x and / or y control element is preferably calibrated, so that a specific adjustment movement can be assigned an exact value of the displacement of the optical mount 10 along the corresponding Cartesian axis. For example, a micrometer screw can be used as the calibrated control element.
• the slider Guide elements 23 may also be provided on the y-slide 50 or on the x-slide 60 and be guided in corresponding bores in the carrier element 20.
• Figure 2 shows the Cartesian positioning device of Figure 1, further comprising spring elements 18 between the optical mount 10 and the support member 20 are provided to prevent idling when changing direction.
• Figure 3 shows the Cartesian positioning device of Figure 1, wherein the y-actuator 30 has been adjusted by a predetermined amount in the y-direction (down).
• the optical mount 10 connected to the y-actuator 30 via the linear guide 15 and the y-slider 50 is also pulled in the y-direction, the first guide pin 81 being displaced in the first guide 82.
• Figure 4 shows the Cartesian positioning device of Figure 1, wherein the x-actuator 40 has been adjusted by a predetermined amount in the y-direction (down).
• the lever member 70 is pivoted about the pivot 71 in the x-y plane, wherein the second guide pin 91 is guided along the second guide 92.
• the pivotal movement of the lever element 70 is transmitted to the optical mount 10 via the first guide unit 80 and converted by the linear guide unit 15 into a linear x movement.
• FIGS. 5 to 8 show a second embodiment of the Cartesian positioning device according to the invention.
• a diagonal displacement of a transmission element 170 is used for converting the adjustment movement of the x-positioning element 140 in the y-direction into a displacement of the optical socket 110 in the x-direction. This allows a compact, stable and backlash-free design.
• FIGS. 5a and 5b show side perspective views of the Cartesian positioning device according to the second embodiment.
• the positioning device comprises a carrier element 120 on which an optical mount 110 for holding optics in the x-direction and in the y-direction is adjustably mounted.
• the support member 120 may include attachment means 121 for attachment to a laser processing head.
• a seal member 200 may be provided to prevent the support member 120 and the laser processing head from dust particles and the like. seal.
• a y-actuator 130 and an x-actuator 140 are provided on the support member 120 which are parallel to each other in the y-direction adjustable and each y slide 150 and an x-slide 160th exhibit.
• FIG. 5 a shows a first guide 182 formed in the optical socket 110, in which a first guide pin 181 of the transmission element 170 is guided in the y-direction. This allows a shift of the optical socket 110 in the y-direction with respect to the x-slider 160.
• the y-slider 150 is connected to the optical socket 110 via a linear guide unit 115, which is set up to guide a movement of the optical socket 110 with respect to the y-slider 150 in the x-direction.
• a linear guide unit 115 which is set up to guide a movement of the optical socket 110 with respect to the y-slider 150 in the x-direction.
• an x-linear guide element 111 on the optical socket 110 and a corresponding x-linear guide selement 151 on the y-slider 150 are formed.
• the linear guide unit 115 may include a dovetail guide, as shown in Fig. 5b.
• a notch as shown in FIGS. 5 a and 5 b, may be provided in the optical socket 110, in which at least one spring element 118 may be inserted in order to connect the optical socket 110 to the carrier element 120.
• the at least one spring element 118 may be arranged to provide a restoring force to the optics mount 110 toward the support member.
• the at least one spring element 118 can run around one side of the optical socket 110 and be attached to the carrier element 120 adjacent to the x-slider 160 and the y-slider 150, respectively. As a result, tolerances in the adjusting movement of the adjusting elements 130 and 140 or when moving the optical socket 110 can be reduced.
• a slider guide element 123 may be provided, which is set up for a linear guide in the y-direction.
• the slider guide element 123 may be formed rod-shaped and guided in a bore of the y-slider 150 and the x-slider 160.
• at least one dovetail guide may be formed in the slider guide member 123 to guide the y-slider 150 and the x-slider 160 in the y-direction, respectively.
• a part of a positioning device without the optical socket 110 and the transmission element 170 is shown.
• the carrier element 120 and the transmission element 170 may be coupled via an x-linear guide unit.
• the support element 120 may preferably have a slot extending in the x-direction, in which at least part of the transfer element 170 is inserted.
• the carrier element 120 with the transmission element 170 be coupled by a dovetail guide.
• at least one fastening element 122 may be provided in the carrier element 120 in order to connect the transmission element 170 to the carrier element 120.
• two rod-shaped fastening elements 122 such as screws or bolts, are shown, which are arranged in the guide slot of the carrier element 120.
• the fasteners 122 are in the transmission element guides shown in Fig. 8a
• the transmission element 170 used to couple the transmission element 170 on the support member 120 in the x-direction movable.
• the transmission element 170 may comprise guide pins which run in a groove formed in the carrier element 120 or in the guide slot.
• a slider guide element 123 with two dovetail guides is shown to stabilize both the y-slider 150 and the x-slider 160.
• a corresponding counterpart to the guide of the slide guide element 123 is formed as a y-linear guide element 152 in the y slide 150 or as a y-linear guide element 161 in the x slide 160.
• the y-slider 150 may thus comprise two mutually perpendicular linear guide elements, such as the x-linear guide element 151 for guiding the optical socket 110 in the x-direction on the y-slider 150, and the y-linear guide selement 152 for guiding the Actuating movement of the y-slider 150 in y-direction to lead.
• the x-slider 160 may include at least the y-linear guide member 161 for guiding the displacement of the x-slider 160 in the y-direction. But it can also be provided one or more further linear guide element.
• interdigitated linear guide elements may be provided on the x-slider 160 and the y-slider 150 to stabilize relative movement with respect to each other in the y-direction.
• FIGS. 7a and 7b show views of the optical socket 110.
• the optical socket 110 has an x-linear guide element 111, which forms a linear guide unit with the x-linear guide element 151 of the y-slider 150.
• the optical mount 110 and the y-slide 150 are coupled to each other in a movable manner via a linear guide in the x-direction.
• the optical socket 110 also has a first guide 182, which guides a movement in the y-direction.
• the first guide 182 is formed at an angle 45 ° to the second guide 192 in the x-slider 160.
• a first guide pin 181 of the transmission element 170 is inserted into the first guide 182 of the optical socket 110 in order to enable a movement of the optical socket in the y-direction with respect to the x-slider.
• the transmission element 170 preferably has an L-shape, on one leg of which at least one transmission element guide 171, e.g. a slot or slot (extending in the x-direction), and on the other leg of which the first and second guide pins 181 and 191 project in opposite directions perpendicular to the x and y directions.
• the first and second guide pins 181 and 191 are formed on opposite surfaces of the transmission member 170.
• the first and second guide pins 181 and 191 may also be formed by a bolt or screw that penetrates the transmission element.
• the optics socket 110 can be displaced in the y-direction when the y-slider 150 is moved with respect to the x-slider 160.
• the second guide pin 191 of coupled to the optical socket 110 transmission element 170 in the diagonal guide 192 of the x-slider 160 and the linear guide unit 115 which couples the optical socket 110 and the y-slider 150 in the x-direction, an adjusting movement of the x-slider 160 in the y-direction is converted into a displacement of the optical socket 110 in the x-direction or transmitted.
• concave or convex portions e.g. a linear guide or a dovetail guide, can be interchanged with each other.
• a Cartesian positioning device which allows accurate and reproducible positioning of an optic in the x-direction and in the y-direction, positioning in the two Cartesian directions x and y being independent of one another.
• calibrated control elements such as micrometer screws
• a agreed adjusting movement or a rotation angle of the actuating element to be associated with a precise value of the linear movement of the optical mount 10 along the corresponding x- or y-axis. Since both the y-actuator 30 and the x-actuator 40 in the same direction, d. H . parallel to each other along the y-direction, are adjustable, both adjusting elements 30 and 40 can be arranged side by side on the support member 20. As a result, accessibility of the adjusting elements is improved for a user and also allows a space-saving arrangement of the adjusting elements.

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• Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Plasma & Fusion (AREA)
• Mechanical Engineering (AREA)
• Human Computer Interaction (AREA)
• Manufacturing & Machinery (AREA)
• Automation & Control Theory (AREA)
• Mounting And Adjusting Of Optical Elements (AREA)
• Lens Barrels (AREA)
• Laser Beam Processing (AREA)

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Family Applications (1)

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Citations (5)

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• 2017
  • 2017-04-05 DE DE102017107282.9A patent/DE102017107282B4/de active Active
• 2018
  • 2018-04-05 KR KR1020197031587A patent/KR102314560B1/ko active IP Right Grant
  • 2018-04-05 US US16/603,101 patent/US11305384B2/en active Active
  • 2018-04-05 JP JP2019554994A patent/JP6944536B2/ja active Active
  • 2018-04-05 CN CN201880029774.3A patent/CN110582714B/zh active Active
  • 2018-04-05 EP EP18716234.2A patent/EP3607374B1/de active Active
  • 2018-04-05 WO PCT/EP2018/058698 patent/WO2018185208A1/de unknown
  • 2018-04-05 PL PL18716234T patent/PL3607374T3/pl unknown

Patent Citations (5)

Non-Patent Citations (2)

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