JPS5312190B2 - - Google Patents

Info

Publication number
JPS5312190B2
JPS5312190B2 JP5635972A JP5635972A JPS5312190B2 JP S5312190 B2 JPS5312190 B2 JP S5312190B2 JP 5635972 A JP5635972 A JP 5635972A JP 5635972 A JP5635972 A JP 5635972A JP S5312190 B2 JPS5312190 B2 JP S5312190B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5635972A
Other languages
Japanese (ja)
Other versions
JPS4917749A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5635972A priority Critical patent/JPS5312190B2/ja
Publication of JPS4917749A publication Critical patent/JPS4917749A/ja
Publication of JPS5312190B2 publication Critical patent/JPS5312190B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring Devices (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Optical Transform (AREA)
  • Indicating Measured Values (AREA)
JP5635972A 1972-06-05 1972-06-05 Expired JPS5312190B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5635972A JPS5312190B2 (zh) 1972-06-05 1972-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5635972A JPS5312190B2 (zh) 1972-06-05 1972-06-05

Publications (2)

Publication Number Publication Date
JPS4917749A JPS4917749A (zh) 1974-02-16
JPS5312190B2 true JPS5312190B2 (zh) 1978-04-27

Family

ID=13025034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5635972A Expired JPS5312190B2 (zh) 1972-06-05 1972-06-05

Country Status (1)

Country Link
JP (1) JPS5312190B2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443415Y2 (zh) * 1987-07-08 1992-10-14

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095419A (ja) * 1983-10-31 1985-05-28 Canon Inc 光学走査装置
DE102017107282B4 (de) * 2017-04-05 2021-02-25 Precitec Gmbh & Co. Kg Kartesische Positioniervorrichtung und Laserbearbeitungskopf mit derselben

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443415Y2 (zh) * 1987-07-08 1992-10-14

Also Published As

Publication number Publication date
JPS4917749A (zh) 1974-02-16

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