WO2018179362A1 - Dispositif de génération de plasma - Google Patents

Dispositif de génération de plasma Download PDF

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Publication number
WO2018179362A1
WO2018179362A1 PCT/JP2017/013679 JP2017013679W WO2018179362A1 WO 2018179362 A1 WO2018179362 A1 WO 2018179362A1 JP 2017013679 W JP2017013679 W JP 2017013679W WO 2018179362 A1 WO2018179362 A1 WO 2018179362A1
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WO
WIPO (PCT)
Prior art keywords
gas
supply device
input
supplied
power
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PCT/JP2017/013679
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English (en)
Japanese (ja)
Inventor
航 日下
Original Assignee
株式会社Ｆｕｊｉ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Ｆｕｊｉ filed Critical 株式会社Ｆｕｊｉ
Priority to EP17902625.7A priority Critical patent/EP3606293B1/fr
Priority to CN201780088513.4A priority patent/CN110419268A/zh
Priority to JP2019508131A priority patent/JP6816260B2/ja
Priority to US16/495,154 priority patent/US10772181B2/en
Priority to PCT/JP2017/013679 priority patent/WO2018179362A1/fr
Publication of WO2018179362A1 publication Critical patent/WO2018179362A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3494—Means for controlling discharge parameters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/10—Testing at atmospheric pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits

Definitions

  • the present invention relates to a plasma generator that generates plasma gas by converting a processing gas into plasma.
  • a processing gas is supplied to the reaction chamber, and electric power is supplied to a plurality of electrodes arranged in the reaction chamber. As a result, discharge occurs in the reaction chamber, and the processing gas is turned into plasma, thereby generating plasma gas.
  • the following patent document describes an example of such a plasma generator.
  • the present specification describes a power supply device that supplies power to a plurality of electrodes disposed in a reaction chamber, a processing gas supply device that supplies processing gas to the reaction chamber, and the power A control device for controlling the operation of the supply device and the processing gas supply device, and when the control device is supplying power to the electrode in a state where the processing gas is supplied to the reaction chamber, When a stop signal is input, the first operation mode in which the supply of power to the electrode is stopped and the supply of the processing gas to the reaction chamber is stopped, and the supply of power to the electrode is stopped.
  • a plasma generator that controls the operation of the power supply device and the processing gas supply device in any one of the second operation modes in which the processing gas is continuously supplied to the reaction chamber is disclosed.
  • the processing gas is continuously supplied to the reaction chamber, so that the plasma processing can be performed immediately, Plasma processing can be performed efficiently.
  • FIG. 1 is a perspective view of the entire atmospheric pressure plasma generator 10 from a perspective from obliquely above.
  • FIG. 2 is a perspective view of the lower end portion of the atmospheric pressure plasma generator 10 from a perspective from obliquely below.
  • FIG. 3 is a perspective view of the lower end portion of the atmospheric pressure plasma generator 10 from a perspective from obliquely above.
  • 4 is a cross-sectional view taken along line AA in FIG.
  • the width direction of the atmospheric pressure plasma generator 10 is referred to as the X direction
  • the depth direction of the atmospheric pressure plasma generator 10 is referred to as the Y direction
  • the direction perpendicular to the X direction and the Y direction, that is, the vertical direction is referred to as the Z direction.
  • the plasma gas ejection device 12 includes a housing 20, a cover 22, and a pair of electrodes 24 and 26.
  • the housing 20 includes a main housing 30, a heat radiating plate 31, a ground plate 32, a lower housing 34, and a nozzle block 36.
  • the main housing 30 has a generally block shape, and a reaction chamber 38 is formed inside the main housing 30.
  • four first gas flow paths 50 are formed in the main housing 30 so as to extend in the Y direction, and the four first gas flow paths 50 are spaced at a predetermined interval in the X direction. Are lined up. One end of each first gas channel 50 opens to the reaction chamber 38, and the other end opens to the side surface of the main housing 30.
  • each second gas passage 52 is formed in the main housing 30 so as to correspond to the four first gas passages 50 so as to extend in the Z direction.
  • the upper end portion of each second gas flow path 52 opens to the corresponding first gas flow path 50, and the lower end portion opens to the bottom surface of the main housing 30.
  • the heat radiating plate 31 is disposed on the side surface of the main housing 30 where the first gas flow path 50 opens, and closes the opening to the side surface of the first gas flow path 50.
  • the heat radiating plate 31 has a plurality of fins (not shown) and radiates heat from the main housing 30.
  • the ground plate 32 functions as a lightning rod, and is fixed to the lower surface of the main housing 30.
  • the ground plate 32 has four through holes 56 penetrating in the vertical direction corresponding to the four second gas flow paths 52, and each through hole 56 has a corresponding second gas flow path. 52.
  • the lower housing 34 has a block shape and is fixed to the lower surface of the ground plate 32.
  • a recess 60 is formed on the upper surface of the lower housing 34 so as to extend in the X direction, and the recess 60 faces the four through holes 56 of the ground plate 32.
  • six third gas passages 62 are formed in the lower housing 34 so as to extend in the Z direction, and the six third gas passages 62 are spaced at a predetermined interval in the X direction. Are lined up.
  • the upper end portion of each third gas flow path 62 opens to the recess 60, and the lower end portion opens to the bottom surface of the lower housing 34.
  • Each through hole 56 of the ground plate 32 faces one end of the recess 60 of the lower housing 34 in the Y direction, and the third gas flow path 62 of the lower housing 34 is the other end of the recess 60 in the Y direction. Open to the part.
  • the nozzle block 36 is fixed to the lower surface of the lower housing 34, and the six fourth gas passages 66 extend in the Z direction corresponding to the six third gas passages 62 of the lower housing 34. Is formed.
  • the upper end portion of each fourth gas flow channel 66 is connected to the corresponding third gas flow channel 62, and the lower end portion opens at the bottom surface of the nozzle block 36.
  • the cover 22 has a generally bowl shape, and is disposed on the lower surface of the ground plate 32 so as to cover the lower housing 34 and the nozzle block 36.
  • a through hole 70 is formed in the lower surface of the cover 22.
  • the through hole 70 is larger than the lower surface of the nozzle block 36, and the lower surface of the nozzle block 36 is located inside the through hole 70.
  • a through hole 72 is also formed in the side surface of the cover 22 on the heated gas ejection device 14 side so as to extend in the Y direction.
  • the pair of electrodes 24 and 26 are disposed so as to face each other inside the reaction chamber 38 of the main housing 30.
  • the pair of electrodes 24, 26 are connected to a power supply device (see FIG. 5) 73, and power is supplied from the power supply device 73.
  • a processing gas supply device (see FIG. 5) 74 is connected to the reaction chamber 38.
  • the processing gas supply device 74 includes an inert gas supply device (see FIG. 5) 76 and an active gas supply device (see FIG. 5) 78.
  • the inert gas supply device 76 is a device that supplies an inert gas such as nitrogen as a processing gas at an arbitrary flow rate (L / min).
  • the active gas supply device 78 is a device that supplies an active gas such as oxygen as a processing gas at an arbitrary flow rate (L / min). Thereby, the inert gas and the active gas are separately supplied to the reaction chamber 38.
  • the heated gas ejection device 14 includes a protective cover 80, a gas pipe 82, a heater 83, and a connecting block 84.
  • the protective cover 80 is disposed so as to cover the heat radiating plate 31 of the plasma gas ejection device 12.
  • the gas pipe 82 is disposed inside the protective cover 80 so as to extend in the Z direction, and a heating gas supply device 86 (see FIG. 5) 86 is connected to the gas pipe 82.
  • the heating gas supply device 86 is a device that supplies an active gas such as oxygen or an inert gas such as nitrogen at an arbitrary flow rate (L / min).
  • a generally cylindrical heater 83 is disposed on the outer peripheral surface of the gas pipe 82, and the gas pipe 82 is heated by the heater 83. Thereby, the gas supplied to the gas pipe 82 from the heating gas supply device 86 is heated.
  • the connecting block 84 is connected to the lower end of the gas pipe 82 and is fixed to the side surface of the cover 22 on the heated gas ejection device 14 side in the Y direction.
  • the connecting block 84 is formed with a communication passage 90 that is bent in an L shape.
  • One end of the communication passage 90 opens on the upper surface of the connection block 84, and the other end of the communication passage 90 is Y. Open in the side surface on the plasma gas ejection device 12 side in the direction.
  • One end portion of the communication passage 90 communicates with the gas pipe 82, and the other end portion of the communication passage 90 communicates with the through hole 72 of the cover 22.
  • the control device 16 includes a controller 100 and a plurality of drive circuits 102.
  • the plurality of drive circuits 102 are connected to the power supply device 73, the inert gas supply device 76, the active gas supply device 78, the heater 83, and the heating gas supply device 86.
  • the controller 100 includes a CPU, a ROM, a RAM, and the like, mainly a computer, and is connected to a plurality of drive circuits 102. Thereby, the operation of the plasma gas ejection device 12 and the heated gas ejection device 14 is controlled by the controller 100.
  • the process gas is supplied to the electrodes 24 and 26 in the state where the process gas is supplied to the reaction chamber 38 in the plasma gas ejection device 12, so that the process gas is generated inside the reaction chamber 38. It is turned into plasma. Then, plasmaized gas, that is, plasma gas, is ejected from the lower end of the fourth gas passage 66 of the nozzle block 36. Further, the gas heated by the heated gas ejection device 14 is supplied into the cover 22. Thereby, plasma gas is ejected from the through-hole 70 of the cover 22 with the heated gas, and a to-be-processed object is plasma-processed.
  • plasmaized gas that is, plasma gas
  • the atmospheric pressure plasma generator 10 can selectively perform plasma processing in either the normal mode or the standby mode.
  • the normal mode when the stop button is operated during the plasma processing, the supply of power to the electrodes 24 and 26 is stopped and the supply of the processing gas to the reaction chamber 38 is stopped.
  • the standby mode when the stop button is operated during the plasma processing, the supply of power to the electrodes 24 and 26 is stopped, but the processing gas is continuously supplied to the reaction chamber 38.
  • the processing gas is supplied to the reaction chamber 38. Then, after the processing gas is supplied to the reaction chamber 38 to some extent, that is, after a predetermined time has elapsed after the start button is operated, power is supplied to the electrodes 24 and 26 to generate plasma gas.
  • the processing gas is continuously supplied. Therefore, when the plasma processing is restarted, that is, when the start button is operated, power is supplied to the electrodes 24 and 26. Supplyed, plasma gas is generated.
  • the atmospheric pressure plasma generator 10 is provided with a selection button for selecting either the normal mode or the standby mode, and an operation signal is input to the controller 100 by operating the selection button. Then, the operation mode of the atmospheric pressure plasma generator 10 is set to an operation mode corresponding to the operation signal, that is, one of the normal mode and the standby mode selected by operating the selection button.
  • the atmospheric pressure plasma generator 10 is provided with a start button and a stop button, and an operation signal is input to the controller 100 by operating each operation button. Then, when the atmospheric pressure plasma generator 10 is set to the normal mode, an operation signal (hereinafter sometimes referred to as “start signal”) by operating the start button is input to the controller 100.
  • start signal an operation signal
  • the inert gas is supplied to the reaction chamber 38 by the inert gas supply device 76.
  • the heating gas is supplied to the gas pipe 82 by the heating gas supply device 86. That is, the inert gas and the heating gas are supplied at the timing when the start signal is input.
  • a voltage is applied to the electrodes 24, 26, that is, electric power is supplied after a set time from the input of the start signal, specifically 2.5 seconds.
  • a discharge is generated between the pair of electrodes 24 and 26 while the inert gas is supplied to some extent inside the reaction chamber 38, and the inert gas is turned into plasma by the discharge.
  • heating by the heater 83 is started after a set time, specifically, 2.5 seconds have elapsed after the power is supplied to the electrodes 24 and 26, that is, after the start signal is input.
  • the gas pipe 82 can be heated in a state where the heating gas is supplied to the gas pipe 82 to some extent, and the gas pipe 82 can be prevented from being blown.
  • the reaction chamber is activated by the active gas supply device 78 after a set time from the input of the start signal, specifically, after elapse of 3.5 seconds, that is, after elapse of 1 second after power is supplied to the electrodes 24 and 26.
  • 38 is supplied with active gas.
  • the reaction chamber 38 not only the previously supplied inert gas but also the active gas is turned into plasma by discharge. That is, after the inert gas is supplied to the reaction chamber 38, power is supplied to the electrodes 24 and 26, whereby the inert gas is turned into plasma, and then the active gas is supplied to the reaction chamber 38.
  • the inert gas and the active gas are turned into plasma. Thereby, it becomes possible to generate plasma gas effectively.
  • the plasma gas generated in the reaction chamber 38 flows in the Y direction in the first gas flow path 50 and flows downward in the second gas flow path 52 and the through hole 56. Then, the plasma gas flows into the recess 60. Further, the plasma gas flows in the recess 60 in the Y direction, and flows downward in the third gas channel 62 and the fourth gas channel 66. Thereby, plasma gas is ejected from the lower end of the fourth gas channel 66.
  • the gas pipe 82 to which the heating gas is supplied is heated by the heater 83, so that the gas supplied to the gas pipe 82 is heated to 600 ° C. to 800 ° C. .
  • the heated gas flows into the cover 22 from the through hole 72 of the cover 22 through the communication passage 90 of the connection block 84.
  • the heated gas flowing into the cover 22 is ejected from the through hole 70 of the cover 22.
  • the plasma gas ejected from the lower end of the fourth gas passage 66 of the nozzle block 36 is protected by the heated gas. Thereby, it becomes possible to perform a plasma process appropriately.
  • the object to be processed is placed at a predetermined distance from the jet outlet from which the plasma gas is jetted, and the plasma gas is jetted from the jet outlet to the target to be processed. That is, at the time of plasma treatment, the plasma gas is ejected into the air, and the object to be treated is irradiated with the plasma gas ejected into the air. At this time, the plasma gas reacts with an active gas such as oxygen in the air to generate ozone. For this reason, there exists a possibility that plasma gas may deactivate and a plasma processing cannot be performed appropriately.
  • the gas heated by the heated gas ejection device 14 is ejected into the cover 22 and ejected from the through hole 70 of the cover 22.
  • the plasma gas ejected from the lower end of the nozzle block 36 is protected by the heated gas. Since the heated gas is heated to 600 ° C. to 800 ° C. in the gas pipe 82, the heated gas ejected from the through hole 70 is 250 ° C. or higher. Since ozone is decomposed at 200 ° C. or higher, ozonization of the plasma gas covered with the heated gas is prevented. Thereby, the deactivation of plasma gas is prevented, and it becomes possible to perform a plasma process appropriately.
  • the heated gas of 200 ° C. or higher is ejected toward the object to be processed together with the plasma gas, the object to be processed is heated by the heating gas, and the heated object to be processed is subjected to plasma treatment.
  • the reactivity of a to-be-processed object improves and it becomes possible to perform a plasma process effectively.
  • stop signal an operation signal by the operation of the stop button (hereinafter sometimes referred to as “stop signal”) is input to the controller 100, and supply of inert gas and active gas and supply of power to the electrodes 24 and 26 are performed. Stops, and heating of the gas pipe 82 by the heater 83 is also stopped. That is, in the normal mode, the supply of the inert gas and the active gas and the power supply to the electrodes 24 and 26 are stopped at the timing when the stop signal is input, and the heating of the gas pipe 82 by the heater 83 is also stopped.
  • the gas supply by the heating gas supply device 86 is continued even if a stop signal is input, and is stopped after a set time, specifically 60 seconds, after the stop signal is input. That is, after a set time has elapsed since the stop signal was input, the gas supply by the heating gas supply device 86 is stopped. Thereby, after the heating by the heater 83 is stopped to the gas pipe 82 heated to a very high temperature by the heater 83, the gas pipe 82 can be cooled by supplying the gas for a set time.
  • the set time from when the stop signal is input until the gas supply by the heating gas supply device 86 is stopped may be referred to as a cooling time.
  • the atmospheric pressure plasma generator 10 operates. That is, the inert gas and the heating gas are supplied at the timing when the start signal is input, and power is supplied to the electrodes 24 and 26 after 2.5 seconds have elapsed from the timing, and the gas pipe is supplied by the heater 83. 82 is heated. Then, after 3.5 seconds have elapsed from the timing when the start signal is input, the active gas is supplied. Thus, the supply of the processing gas and the heating gas is stopped during the period from when the stop button is operated until the start button is operated again, that is, while the plasma processing is not being performed. It becomes possible to suppress consumption of the heating gas.
  • the atmospheric pressure plasma generator 10 when the atmospheric pressure plasma generator 10 is set to the standby mode and the start signal is input to the controller 100 in a state where the processing gas is not supplied to the reaction chamber 38, the same as in the normal mode.
  • the operation of the atmospheric pressure plasma generator 10 is controlled. That is, as shown in FIG. 7, the inert gas and the heating gas are supplied at the timing when the start signal is input, and power is supplied to the electrodes 24 and 26 after 2.5 seconds have elapsed from the timing.
  • the gas pipe 82 is heated by the heater 83. Then, after 3.5 seconds have elapsed from the timing when the start signal is input, the active gas is supplied.
  • the inert gas and the heating gas are continuously supplied even when the stop button is operated. Specifically, at the timing when the stop signal is input to the controller 100, the supply of the active gas and the power supply to the electrodes 24 and 26 are stopped, and the heating of the gas pipe 82 by the heater 83 is also stopped. On the other hand, even if a stop signal is input to the controller 100, the supply of the inert gas and the heating gas is not stopped, and the inert gas and the heating gas are continuously supplied.
  • the inert gas and the heating gas are continuously supplied after the stop signal is input, when the start button is operated again and the start signal is input to the controller 100, the electrodes 24, 26 is supplied with electric power, and the gas pipe 82 is heated by the heater 83. That is, even when the stop button is operated, the inert gas is continuously supplied to the reaction chamber 38, and therefore, power is supplied to the electrodes 24 and 26 at the timing when the start signal is input to the controller 100. Further, even when the stop button is operated, the heating gas is continuously supplied to the gas pipe 82, so that the gas pipe 82 is heated by the heater 83 at the timing when the start signal is input to the controller 100. Then, after a set time, specifically, 1 second has elapsed after the start signal is input, the active gas is supplied.
  • the standby mode after the stop signal is input, when the inert gas is continuously supplied to the reaction chamber 38, a discharge is generated in the reaction chamber 38 at the timing when the start button is operated again, and the inactive gas is generated.
  • the active gas is turned into plasma.
  • the active gas is supplied to the reaction chamber 38, whereby the inert gas and the active gas are turned into plasma in the reaction chamber 38.
  • the gas pipe 82 In the standby mode, when the heating gas is continuously supplied to the gas pipe 82 after the stop signal is input, the gas pipe 82 is heated by the heater 83 again at the timing when the start button is operated. The gas is heated in the gas pipe 82. Accordingly, it is possible to eject the heated gas into the cover 22 almost simultaneously with the plasma gas generated immediately after the start button is operated, and to ensure proper plasma processing.
  • the start button may not be operated after the stop button is operated. In such a case, the continuously supplied inert gas and heating gas are wasted. For this reason, in the atmospheric pressure plasma generation apparatus 10, after the stop button is operated and the start button is not operated, the supply of the inert gas and the heating gas is stopped when the set time has elapsed. . That is, as shown in FIG. 8, when the start signal is not input to the controller 100 before the set time has elapsed since the stop signal is input to the controller 100, the supply of the inert gas and the heating gas is stopped. Is done.
  • the set time for which the inert gas and the heating gas are continuously supplied may be described as a standby time.
  • the atmospheric pressure plasma generator 10 is provided with a setting button for arbitrarily setting a standby time. As a result, the operator can arbitrarily set the standby time according to the frequency of the plasma processing operation and the like, thereby improving the workability in the standby mode.
  • the standby time can be arbitrarily set, so the standby time may be set to a relatively short time. Specifically, for example, the standby time may be set to 50 seconds. In such a case, if the supply of the heating gas is stopped when the standby time has elapsed without the start button being operated after the stop button is operated, the gas pipe 82 cannot be cooled appropriately. There is a fear. Specifically, as described above, in the normal mode, after the stop button is operated to cool the heated gas pipe 82, the gas is supplied to the gas pipe 82 by the heating gas supply device 86 and the cooling time (60 seconds). ) Continuously supplied. This cooling time is set to a time necessary for properly cooling the gas pipe 82. For this reason, when the gas is supplied to the gas pipe 82 only for a time shorter than the cooling time after the stop button is operated, the gas pipe 82 may not be cooled appropriately.
  • the start signal is sent to the controller 100 before the standby time elapses after the stop signal is input to the controller 100 as shown in FIG. If not input, only the supply of inert gas is stopped. Then, the supply of the heating gas is stopped at the timing when the cooling time has elapsed since the stop signal was input to the controller 100. Thereby, the gas pipe 82 can be appropriately cooled.
  • the supply of the inert gas and the heating gas can be stopped without waiting for the standby time to elapse.
  • the stop button is operated again before the standby time elapses after the stop button is operated, the supply of the inert gas and the heating gas is stopped. That is, as shown in FIG. 10, when the stop signal is input again to the controller 100 before the standby time elapses after the stop signal is input to the controller 100, the supply of the inert gas and the heating gas is performed. Is stopped. For this reason, for example, when all the operations related to the plasma processing are completed, the supply of the inert gas and the heating gas can be stopped without waiting for the standby time to elapse by operating the stop button twice. it can. Thereby, useless consumption of the inert gas and the heating gas can be suppressed.
  • the time until the stop button is operated again is shorter than the cooling time before the standby time elapses after the stop button is operated, the supply of the heating gas is stopped. 82 may not be properly cooled. Therefore, if the time until the stop button is operated again is shorter than the cooling time before the standby time elapses after the stop button is operated, it is not possible at the timing when the stop button is operated again. Only the supply of active gas is stopped. That is, as shown in FIG. 11, when the time until the second stop signal is input before the standby time elapses after the first stop signal is input is shorter than the cooling time, 2 Only the supply of the inert gas is stopped at the timing when the second stop signal is input. Then, the supply of the heating gas is stopped at the timing when the cooling time has elapsed after the first stop signal is input. Thereby, the gas pipe 82 can be appropriately cooled.
  • the atmospheric pressure plasma generator 10 is an example of a plasma generator.
  • the heated gas ejection device 14 is an example of a heated gas ejection device.
  • the control device 16 is an example of a control device.
  • the electrodes 24 and 26 are examples of electrodes.
  • the reaction chamber 38 is an example of a reaction chamber.
  • the power supply device 73 is an example of a power supply device.
  • the processing gas supply device 74 is an example of a processing gas supply device.
  • the inert gas supply device 76 is an example of an inert gas supply device.
  • the active gas supply device 78 is an example of an active gas supply device.
  • the heater 83 is an example of a heater.
  • the heating gas supply device 86 is an example of a heating gas supply device.
  • the normal mode is an example of a first operation mode.
  • the standby mode is an example of a second operation mode.
  • this invention is not limited to the said Example, It is possible to implement in the various aspect which gave various change and improvement based on the knowledge of those skilled in the art. Specifically, for example, in the above-described embodiment, the present invention is applied to the atmospheric pressure plasma generator 10, but can be applied to plasma generators having various structures. Specifically, for example, the present invention can be applied to the plasma generator 110 shown in FIG.
  • the plasma generator 110 includes a plasma gas ejection device 112, an upper cover 114, a slide mechanism 116, and a lower cover 118.
  • the plasma gas ejection device 112 has substantially the same configuration as the plasma gas ejection device 12.
  • the upper cover 114 has a generally covered cylindrical shape and is held by a slide mechanism 116 so as to be slidable in the vertical direction.
  • a through hole (not shown) having a shape corresponding to the plasma gas ejection device 112 is formed in the lid portion of the upper cover 114.
  • the plasma generator 110 is being fixed by standing in the cover part of the upper cover 114 so that the through-hole may be covered. For this reason, the lower end portion of the plasma gas ejection device 112 protrudes toward the inside of the upper cover 114.
  • the lower cover 118 is generally disk-shaped, and the outer diameter of the lower cover 118 is larger than the outer diameter of the upper cover 114. Then, when the upper cover 114 is slid downward by the slide mechanism 116, the lower end of the upper cover 114 is in close contact with the upper surface of the lower cover 118, and the inside of the upper cover 114 is sealed.
  • the petri dish 120 or the like that stores liquid is placed on the upper surface of the lower cover 118, and the upper cover 114 is in close contact with the lower cover 118.
  • the plasma process is given to the liquid accommodated in the petri dish 120 by ejecting plasma gas with the plasma gas ejection apparatus 112.
  • the operation of the plasma gas ejection device 112 is controlled in the same manner as the plasma gas ejection device 12.
  • the plasma generator 110 can achieve the same effects as the atmospheric pressure plasma generator 10.
  • the inert gas in the standby mode, when the stop button is operated, the inert gas is continuously supplied and the supply of the active gas is stopped, but when the stop button is operated, The inert gas and the active gas may be continuously supplied.
  • nitrogen or the like is exemplified as the inert gas and oxygen or the like is exemplified as the active gas, but both can be dry air.
  • Atmospheric pressure plasma generator (plasma generator) 14: Heated gas ejection device 16: Control device 24: Electrode 26: Electrode 38: Reaction chamber 73: Power supply device 74: Process gas supply device 76: Inert gas supply device 78: Active gas supply device 83: Heater 86: Heating gas supply device 110: Plasma generator

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

Ce dispositif de génération de plasma comprend: un dispositif d'alimentation électrique qui fournit de l'énergie à une pluralité d'électrodes qui sont disposées dans une chambre de réaction; un dispositif d'alimentation en gaz de traitement qui fournit un gaz de traitement à la chambre de réaction; et un dispositif de commande qui commande les opérations du dispositif d'alimentation électrique et du dispositif d'alimentation en gaz de traitement. Dans les cas où un signal d'arrêt est entré lorsqu'une puissance est fournie aux électrodes dans un état dans lequel la chambre de réaction est alimentée avec le gaz de traitement, le dispositif de commande commande les opérations du dispositif d'alimentation électrique et du dispositif d'alimentation en gaz de traitement dans un premier mode de fonctionnement pour arrêter l'alimentation électrique des électrodes, et pour arrêter l'alimentation en gaz de traitement dans la chambre de réaction, ou un second mode de fonctionnement pour arrêter l'alimentation électrique vers les électrodes, mais pour continuer à fournir le gaz de traitement à la chambre de réaction.
PCT/JP2017/013679 2017-03-31 2017-03-31 Dispositif de génération de plasma WO2018179362A1 (fr)

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US16/495,154 US10772181B2 (en) 2017-03-31 2017-03-31 Plasma generation device
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US10772181B2 (en) 2020-09-08
EP3606293A1 (fr) 2020-02-05
US20200029413A1 (en) 2020-01-23
JPWO2018179362A1 (ja) 2019-11-14
CN110419268A (zh) 2019-11-05
EP3606293A4 (fr) 2020-03-25
JP6816260B2 (ja) 2021-01-20

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