WO2018168608A1 - Capteur de pression - Google Patents
Capteur de pression Download PDFInfo
- Publication number
- WO2018168608A1 WO2018168608A1 PCT/JP2018/008776 JP2018008776W WO2018168608A1 WO 2018168608 A1 WO2018168608 A1 WO 2018168608A1 JP 2018008776 W JP2018008776 W JP 2018008776W WO 2018168608 A1 WO2018168608 A1 WO 2018168608A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- insulating sheet
- pressure
- lead pins
- pressure sensor
- housing
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 claims abstract description 51
- 230000001070 adhesive effect Effects 0.000 claims abstract description 51
- 239000011521 glass Substances 0.000 claims abstract description 39
- 239000004065 semiconductor Substances 0.000 claims abstract description 36
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 239000007788 liquid Substances 0.000 abstract description 16
- 238000007789 sealing Methods 0.000 abstract description 14
- 230000005611 electricity Effects 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 230000003068 static effect Effects 0.000 abstract description 3
- 230000015556 catabolic process Effects 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 14
- 238000001514 detection method Methods 0.000 description 11
- 238000001723 curing Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Abstract
Le but de la présente invention est de fournir un capteur de pression permettant de maintenir de manière stable une tension de claquage d'électricité statique élevée sans utiliser de grandes quantités d'un adhésif indépendamment de la présence ou non d'un circuit de protection contre les décharges électrostatiques. Un capteur de pression (100) selon la présente invention comprend : une puce de capteur à semi-conducteur (126) scellée par un liquide dans une chambre d'étanchéité liquide (124A) et qui détecte la pression d'un fluide introduit dans une chambre de pression (112A) ; une pluralité de broches de connexion (128) connectées à la puce de capteur à semi-conducteur (126) par l'intermédiaire de fils de liaison (126a) et connectées à une borne de connexion (133) ; un verre hermétique (124) qui protège la chambre d'étanchéité liquide (124A) des conditions environnementales environnantes et maintient les broches de connexion (128) ; et un boîtier métallique (121) disposé autour des broches de connexion (128) et qui maintient le verre hermétique (124), et qui comprend en outre une feuille isolante (151) disposée autour des broches de connexion (128) s'étendant depuis le verre hermétique (124) et recouvrant une surface, sur le côté borne de connexion (133), du boîtier (121).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201880018027.XA CN110418950B (zh) | 2017-03-17 | 2018-03-07 | 压力传感器 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-053206 | 2017-03-17 | ||
| JP2017053206A JP6480969B2 (ja) | 2017-03-17 | 2017-03-17 | 圧力センサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2018168608A1 true WO2018168608A1 (fr) | 2018-09-20 |
Family
ID=63522979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2018/008776 WO2018168608A1 (fr) | 2017-03-17 | 2018-03-07 | Capteur de pression |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6480969B2 (fr) |
| CN (1) | CN110418950B (fr) |
| WO (1) | WO2018168608A1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111023529B (zh) * | 2019-12-12 | 2020-12-25 | 深圳市金广电器有限公司 | 一种应用于空调制冷设备中的快速反应压力传感器 |
| CN113074845B (zh) * | 2021-04-14 | 2023-10-03 | 江西新力传感科技有限公司 | 一种压力传感器芯片的制造工艺 |
| CN112798158B (zh) * | 2021-04-14 | 2021-08-10 | 江西新力传感科技有限公司 | 一种压力传感器芯片及压力传感器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015194105A1 (fr) * | 2014-06-17 | 2015-12-23 | 株式会社鷺宮製作所 | Unité de capteur et dispositif de détection de pression le contenant |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6251513B1 (en) * | 1997-11-08 | 2001-06-26 | Littlefuse, Inc. | Polymer composites for overvoltage protection |
| US6487912B1 (en) * | 1999-09-28 | 2002-12-03 | Rosemount Inc. | Preinstallation of a pressure sensor module |
| JP3987386B2 (ja) * | 2001-11-20 | 2007-10-10 | 株式会社鷺宮製作所 | 圧力センサ |
| US7132922B2 (en) * | 2002-04-08 | 2006-11-07 | Littelfuse, Inc. | Direct application voltage variable material, components thereof and devices employing same |
| JP4052263B2 (ja) * | 2004-03-04 | 2008-02-27 | 株式会社デンソー | 圧力センサ |
| JP2005308397A (ja) * | 2004-04-16 | 2005-11-04 | Saginomiya Seisakusho Inc | 圧力センサ |
| JPWO2010101103A1 (ja) * | 2009-03-05 | 2012-09-10 | 昭和電工株式会社 | 放電ギャップ充填用組成物および静電放電保護体 |
| CN102054625A (zh) * | 2009-11-03 | 2011-05-11 | 泰科电子(深圳)有限公司 | 接触器 |
| JPWO2013132988A1 (ja) * | 2012-03-05 | 2015-07-30 | 昭和電工株式会社 | 放電ギャップ充填用組成物および静電放電保護体 |
| KR101483278B1 (ko) * | 2012-06-11 | 2015-01-14 | 가부시키가이샤 사기노미야세이사쿠쇼 | 압력 센서 및 압력 센서의 제조 방법 |
| JP5651670B2 (ja) * | 2012-10-25 | 2015-01-14 | 株式会社鷺宮製作所 | 圧力検知ユニット |
| US9915577B2 (en) * | 2014-12-02 | 2018-03-13 | Sensata Technologies, Inc. | Case isolated oil filled MEMS pressure sensor |
| CN204214596U (zh) * | 2014-12-03 | 2015-03-18 | 浙江三花股份有限公司 | 一种制冷系统及其压力传感器 |
-
2017
- 2017-03-17 JP JP2017053206A patent/JP6480969B2/ja active Active
-
2018
- 2018-03-07 WO PCT/JP2018/008776 patent/WO2018168608A1/fr active Application Filing
- 2018-03-07 CN CN201880018027.XA patent/CN110418950B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015194105A1 (fr) * | 2014-06-17 | 2015-12-23 | 株式会社鷺宮製作所 | Unité de capteur et dispositif de détection de pression le contenant |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6480969B2 (ja) | 2019-03-13 |
| JP2018155622A (ja) | 2018-10-04 |
| CN110418950A (zh) | 2019-11-05 |
| CN110418950B (zh) | 2021-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3239680B1 (fr) | Capteur de pression et module de capteur de pression | |
| WO2018168608A1 (fr) | Capteur de pression | |
| JP3987386B2 (ja) | 圧力センサ | |
| KR102249785B1 (ko) | 압력센서 | |
| JP6786469B2 (ja) | 圧力センサのシールド構造、および、それを備える圧力センサ | |
| JP6892404B2 (ja) | 圧力センサ | |
| WO2019107140A1 (fr) | Structure de protection de capteur de pression et capteur de pression équipé de ladite structure | |
| JP7389274B2 (ja) | 圧力センサ | |
| WO2018025434A1 (fr) | Capteur de pression et module de capteur de pression | |
| JP6795538B2 (ja) | 圧力センサ | |
| WO2019107086A1 (fr) | Structure de protection pour capteur de pression, et capteur de pression pourvu de celle-ci | |
| WO2019150871A1 (fr) | Capteur de pression | |
| JP6810680B2 (ja) | 圧力センサ | |
| JP6464012B2 (ja) | 圧力センサ | |
| WO2024004248A1 (fr) | Capteur de pression | |
| JP6930014B2 (ja) | 圧力センサのシールド構造、および、それを備える圧力センサ | |
| JP7325099B2 (ja) | 圧力センサ | |
| JP6698044B2 (ja) | 圧力センサ | |
| WO2018055953A1 (fr) | Capteur de pression | |
| JP3333703B2 (ja) | 圧力センサ及び圧力センサの製造方法 | |
| JP2018197729A (ja) | 圧力センサ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18766968 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 18766968 Country of ref document: EP Kind code of ref document: A1 |