WO2018166358A1 - 显影排泡装置以及显影机 - Google Patents

显影排泡装置以及显影机 Download PDF

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Publication number
WO2018166358A1
WO2018166358A1 PCT/CN2018/077829 CN2018077829W WO2018166358A1 WO 2018166358 A1 WO2018166358 A1 WO 2018166358A1 CN 2018077829 W CN2018077829 W CN 2018077829W WO 2018166358 A1 WO2018166358 A1 WO 2018166358A1
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Prior art keywords
bubble
discharging
developing
line
storage tank
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PCT/CN2018/077829
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English (en)
French (fr)
Inventor
李飞
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惠科股份有限公司
重庆惠科金渝光电科技有限公司
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Publication of WO2018166358A1 publication Critical patent/WO2018166358A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means

Definitions

  • the present application relates to the field of manufacturing, and in particular to a developing bubble discharging device and a developing machine.
  • the main object of the present application is to provide a developing bubble discharging device, which aims to solve the problem that air bubbles are present in the liquid storage tank to affect the uniformity of coating of the developing solution.
  • a developing bubble discharging device includes: a liquid storage tank; a recovery pipeline, the first end of the recovery pipeline is for recovering the developer, and the second end is opposite to the liquid storage tank Connecting the recovery line is provided with a regulating valve, the regulating valve is a solenoid valve or a pneumatic valve, part or all of the recovery line is a transparent tube; a bubbler for collecting the liquid storage a bubble in the box, the bubbler is a bubble collecting net, the second end of the recovery pipe extends into the bubble collecting net cover; and a bubble discharging assembly, the discharging device is used for a bubble discharge in the bubbler, the bubble discharge assembly comprising a pumping unit and a bubble discharge line, the first end of the bubble discharge line being in communication with the bubble collecting cover and the bubble discharge line a second end is connected to the pumping unit; the pumping unit includes a washing tank for recovering the washing liquid, and a draining line for discharging the washing liquid in the washing tank, the
  • a developing and bubbling device in another aspect, includes a liquid storage tank, a recovery pipeline, a first end of the recovery pipeline for recovering the developer, and a second end connected to the liquid storage tank a bubbler for collecting air bubbles in the reservoir; and a bubble evacuating assembly for discharging air bubbles in the bubbler.
  • the bubble collector is a bubble collecting net cover, and the second end of the recovery line extends into the bubble collecting net cover.
  • the blister assembly comprises a pumping unit and a venting line, the first end of the blistering line is in communication with the blister pack and the second end of the blister line is The pumping unit is connected.
  • the air extraction unit includes a cleaning tank for recovering the cleaning liquid, and a liquid discharging line for discharging the cleaning liquid in the cleaning tank, the second end of the discharging circuit and the discharging The pipeline is connected, and the position of the cleaning tank is lower than the position of the bubble collecting net.
  • the bubble discharge pipe is a bent pipe, and a bend portion from a first end of the bubble discharge pipe to the bubble discharge pipe is a bubble suction section, and the bubble discharge pipe is from the bubble discharge pipe
  • the second end of the bend to the bubble discharge line is a bubble discharge section which is vertically disposed or inclined upward in the flow direction of the bubble, and the bubble discharge section is inclined downward in the flow direction of the bubble.
  • a regulating valve is disposed on the recovery line.
  • the regulating valve is a solenoid valve or a pneumatic valve.
  • part or all of the recovery line is a transparent tube.
  • a developing machine in another aspect, includes a developing unit, a developing bubble discharging device as described above, and a liquid feeding device for feeding the developing solution in the liquid storage tank to the developing unit. a conduit, the first end of the recovery conduit being coupled to the developing unit.
  • a pump for pumping the developer is disposed on the liquid supply line.
  • a bubble trap for collecting bubbles is disposed in the liquid storage tank, and bubbles in the bubbler can be discharged through the bubble discharge assembly to reduce the bubble content in the developer.
  • FIG. 1 is a schematic structural view of a developing machine according to an embodiment of the present application.
  • FIG. 2 is a schematic diagram of the module of FIG. 1.
  • first”, “second”, and the like in this application are used for descriptive purposes only, and are not to be construed as indicating or implying their relative importance or implicitly indicating the number of technical features indicated.
  • features defining “first” or “second” may include at least one of the features, either explicitly or implicitly.
  • the meaning of "a plurality” is at least two, such as two, three, etc., unless specifically defined otherwise.
  • fixed may be a fixed connection, or may be a detachable connection, or may be integrated; It may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be an internal connection of two elements or an interaction relationship of two elements unless explicitly defined otherwise.
  • fix may be a fixed connection, or may be a detachable connection, or may be integrated; It may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be an internal connection of two elements or an interaction relationship of two elements unless explicitly defined otherwise.
  • specific meanings of the above terms in the present application can be understood on a case-by-case basis.
  • the present application proposes a developing bubble discharging device, which aims to solve the problem that air bubbles exist in the liquid storage tank and affect the uniformity of coating of the developing solution.
  • the developing and bubbling device includes a liquid storage tank 1, a first end for recovering the developing solution, and a second end of the recovery line 3 communicating with the liquid storage tank 1
  • a bubbler (not labeled) for collecting bubbles in the reservoir 1
  • a bubble discharging assembly (not labeled) for discharging the bubbles in the bubbler.
  • a bubble trap for collecting bubbles is disposed in the liquid storage tank 1, and bubbles in the bubbler can be discharged through the bubble discharge assembly to reduce the bubble content in the developer.
  • the amount of bubbles in the developer is small, and coating unevenness due to bubbles at the time of applying the developer can be prevented, so that the defect rate of the glass substrate can be greatly reduced, thereby reducing The production cost of the liquid crystal panel.
  • the bubbler may be of various structures capable of collecting bubbles, for example, a mesh cover or a perforated casing or the like.
  • the bubble collector may be a bubble collecting net cover 2, and the second end of the recovery pipe 3 protrudes into the bubble collecting net cover 2, so that the developing liquid in the recovery line 3 can pass through
  • the screening of the bubble collecting net cover 2 collects the air bubbles in the bubble collecting net cover 2, and allows the bubble-free developing liquid to flow out from the bubble collecting net cover 2 to complete the collection of the bubbles in the developing solution and prevent the coating and developing.
  • the coating caused by the bubbles is not uniform during the liquid.
  • the blister assembly may optionally include a pumping unit and a venting line 4, the first end of the blistering line 4 is in communication with the blister grid 2 and the second end of the blistering line 4 is connected to the pumping unit
  • the air suction unit can timely extract the air bubbles in the bubble collecting net 2 through the bubble discharging line 4, thereby preventing the air bubbles from running out of the bubble collecting net cover 2.
  • the pumping unit may be a vacuum pump or other structure capable of generating a pressure difference between the two ends of the bubble discharging conduit 4, specifically, the pressure of the first end of the bulb discharging conduit 4 is stronger than the second end of the bulb discharging conduit 4. The pressure is such that air bubbles can move from the first end of the discharge conduit 4 to the second end of the discharge conduit 4.
  • the pumping unit includes a washing tank 5 for recovering the washing liquid, and a draining line 6 for discharging the washing liquid in the washing tank 5, and the discharging duct
  • the second end of the fourth end communicates with the drain line 6, and the position of the washing tank 5 is lower than the position of the bubble collecting net cover 2, or the liquid level in the washing tank 5 is lower than the liquid level in the liquid storage tank 1.
  • the cleaning liquid for cleaning the developing unit 10 can be recovered to the cleaning tank 5 after the cleaning process is completed, and discharged to the subsequent liquid processing device through the liquid discharge line 6 for treatment to prevent the cleaning liquid from polluting the environment.
  • the flow rate of the washing liquid in the drain line 6 is large, so that the pressure in the drain line 6 is small.
  • the first end of the bubble discharging conduit 4 communicates with the bubble collecting net cover 2 and the second end of the bubble discharging pipe 4 communicates with the draining pipe 6, because the pressure in the bubble collecting net cover 2 is generally atmospheric pressure, and the row is discharged.
  • the liquid line 6 has a small pressure and is generally less than atmospheric pressure, so that the pressure at the first end of the bubble discharge line 4 is stronger than the pressure at the second end of the bubble discharge line 4, and the bubble can be first from the discharge line 4 The end moves toward the second end of the bubble evacuation line 4.
  • the position of the cleaning tank 5 is lower than the position of the bubble collecting net cover 2, or the liquid level in the washing tank 5 is lower than the liquid level in the liquid storage tank 1, so that the cleaning liquid in the washing tank 5 is not poured back. Go to the bubble mesh cover 2.
  • the bubble discharge line 4 can be a bent tube, and the bend from the first end of the discharge line 4 to the discharge line 4 is a bubble-absorbing section (not shown).
  • the second end of the bubble discharge line 4 to the bubble discharge line 4 is a bubble discharge section (not shown), and the bubble suction section is vertically disposed or inclined upward along the flow direction of the bubble, and the flow of the bubble discharge section along the bubble The direction is tilted downwards. Since the mass of the bubble is light, the bubble in the bubble-absorbing section can move upward under the action of the pressure difference, and the developer with a larger mass cannot move upward, thereby separating the bubble from the developer and preventing the developer from entering the bubble-discharging section.
  • the blister assembly thus provided can perform the bubble discharging process by using the structure (the cleaning tank 5 and the liquid discharge line 6) which the developing machine itself has, and has a clever structure, which is versatile, and can greatly reduce the foaming cost. Further, this embodiment has an advantage of a small space occupation with respect to the manner of performing bubble discharge using a vacuum pump.
  • the recovery line 3 is provided with a regulating valve 9.
  • the flow rate of the developing liquid in the recovery line 3 can be reduced by controlling the regulating valve 9, so that the size of the bubble contained in the developing solution is reduced to reduce The difficulty of collecting bubbles.
  • the regulating valve 9 can be selected as a solenoid valve or a pneumatic valve, and the user can remotely control the flow rate of the developing solution in the recovery line 3.
  • part or all of the recovery line 3 is a transparent tube, and the state of the developer can be visually observed through the transparent tube.
  • the transparent tube may be an acrylic tube or a transparent PVC (polyvinyl chloride) tube.
  • the above-described developing and bubbling device can be applied to a developing machine, and when the developing solution is applied to the glass substrate through the nozzle 11, the amount of bubbles in the developing solution is small, so that uneven coating due to bubbles at the time of applying the developing solution can be prevented. Therefore, it is possible to produce an advantageous effect of greatly reducing the defective ratio of the glass substrate and reducing the production cost of the liquid crystal panel.
  • the present application also provides a developing machine, as shown in FIG. 1, which includes a developing unit 10, a developing bubble discharging device as described above, and a feeding device for feeding the developing liquid in the liquid storage tank 1 to the developing unit 10.
  • the liquid line 7, the first end of the recovery line 3 is connected to the developing unit 10.
  • the first end of the liquid supply line 7 is in communication with the liquid storage tank 1 and the second end of the liquid supply line 7 is provided with a nozzle 11 so that the developing liquid in the liquid storage tank 1 can be sent to the developing unit 10 for development.
  • the liquid is applied to the glass substrate through the nozzle 11.
  • a bubble trap for collecting bubbles is disposed in the liquid storage tank 1, and bubbles in the bubbler can be discharged through the bubble discharge assembly to reduce the bubble content in the developer.
  • the amount of bubbles in the developer is small, and coating unevenness due to bubbles at the time of applying the developer can be prevented, so that the defect rate of the glass substrate can be greatly reduced, thereby reducing The production cost of the liquid crystal panel.
  • the liquid supply line 7 is further provided with a pump 8 for pumping the developing solution to power the delivery of the developing solution.
  • the pump 8 here may be a centrifugal pump or a vane pump or the like.
  • the power of the pump 8 should be adjusted as small as possible to reduce the flow rate of the developing solution in the liquid supply line 7 to prevent the generation of bubbles.
  • the disclosed systems, devices, and/or methods may be implemented in other ways.
  • the device embodiments described above are merely illustrative.
  • the division of the unit is only a logical function division.
  • there may be another division manner for example, multiple units or components may be combined or Can be integrated into another system, or some features can be ignored or not executed.
  • the mutual coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interface, device or unit, and may be in an electrical, mechanical or other form.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of the embodiment.

Abstract

本申请公开一种显影排泡装置以及显影机，其中，该显影排泡装置包括储液箱；回收管路，所述回收管路的第一端用于回收显影液且第二端与所述储液箱连通；聚泡器，所述聚泡器用于收集所述储液箱内的气泡；以及，排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出，储液箱内设置有收集气泡的聚泡器，并通过排泡组件能够将聚泡器内的气泡排出，以降低显影液中的气泡含量。

Description

显影排泡装置以及显影机 技术领域
本申请涉及制造领域，尤其涉及一种显影排泡装置以及显影机。
背景技术
随着经济的发展，人们生活水平提高，各种电器产品(例如，电视机、电脑等)已经融入了我们的生活，而电器产品上的液晶面板是影响电器产品的性能以及用户体验的关键因素。其中，在液晶面板的黄光阵列制程中，利用显影机台涂覆显影液，经喷嘴涂覆后剩余的显影液从与储液箱相连的回收管路落下，最后流入储液箱中。由于落下时重力作用会在回收管路内产生诸多气泡，这些气泡随着显影液进入储液箱中，再经与储液箱相连的送液管路进入显影段，气泡会附着在玻璃基板表面，严重影响了显影液涂覆的均匀性，进而使得玻璃基板的不良率升高。
因此，需要提供一种能够将储液箱内的气泡排出的显影排泡装置。
发明内容
本申请的主要目的是提供一种显影排泡装置，旨在解决储液箱内存在气泡而影响显影液涂覆均匀性的问题。
一方面，本申请实施例提出的一种显影排泡装置，包括：储液箱；回收管路，所述回收管路的第一端用于回收显影液且第二端与所述储液箱连通所述回收管路上设置有调节阀，所述调节阀为电磁阀或者气动阀，所述回收管路的部分或者全部为透明管；聚泡器，所述聚泡器用于收集所述储液箱内的气泡，所述聚泡器为聚泡网罩，所述回收管路的第二端伸入所述聚泡网罩内；以及，排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出，所述排泡组件包括抽气单元以及排泡管路，所述排泡管路的第一端与所述聚泡网罩连通且所述排泡管路的第二端与所述抽气单元连接；所述抽气单元包括用于回收清洗液的清洗箱以及用于排出所述清洗箱内清洗液的排液管路，所述排泡 管路的第二端与所述排液管路连通，且所述清洗箱的位置低于所述聚泡网罩的位置；所述排泡管路为弯折管，从所述排泡管路的第一端到所述排泡管路的弯折处为吸泡段，从所述排泡管路的弯折处到所述排泡管路的第二端为排泡段，所述吸泡段竖直设置或者沿气泡的流动方向向上倾斜，所述排泡段沿气泡的流动方向向下倾斜。
另一方面，本申请实施例提出的一种显影排泡装置包括储液箱；回收管路，所述回收管路的第一端用于回收显影液且第二端与所述储液箱连通；聚泡器，所述聚泡器用于收集所述储液箱内的气泡；以及，排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出。
可选地，所述聚泡器为聚泡网罩，所述回收管路的第二端伸入所述聚泡网罩内。
可选地，所述排泡组件包括抽气单元以及排泡管路，所述排泡管路的第一端与所述聚泡网罩连通且所述排泡管路的第二端与所述抽气单元连接。
可选地，所述抽气单元包括用于回收清洗液的清洗箱以及用于排出所述清洗箱内清洗液的排液管路，所述排泡管路的第二端与所述排液管路连通，且所述清洗箱的位置低于所述聚泡网罩的位置。
可选地，所述排泡管路为弯折管，从所述排泡管路的第一端到所述排泡管路的弯折处为吸泡段，从所述排泡管路的弯折处到所述排泡管路的第二端为排泡段，所述吸泡段竖直设置或者沿气泡的流动方向向上倾斜，所述排泡段沿气泡的流动方向向下倾斜。
可选地，所述回收管路上设置有调节阀。
可选地，所述调节阀为电磁阀或者气动阀。
可选地，所述回收管路的部分或者全部为透明管。
再一方面，本申请实施例提出的一种显影机，其包括显影单元、如上所述的显影排泡装置以及用于将所述储液箱内的显影液送入所述显影单元的送液管路，所述回收管路的第一端与所述显影单元连接。
可选地，所述送液管路上设置有用于泵送显影液的泵。
本申请技术方案中，储液箱内设置有收集气泡的聚泡器，并通过排泡组件能够将聚泡器内的气泡排出，以降低显影液中的气泡含量。经喷嘴将显影液涂覆于玻璃基板时，显影液中气泡含量较少，从而能够防止涂覆显影液时 因气泡造成的涂覆不均匀，因而能够大幅降低玻璃基板的不良率，进而降低液晶面板的生产成本。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图示出的结构获得其他的附图。
图1为本申请实施例的显影机的结构示意图；
图2为图1的模块示意图。
本申请目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施例
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本申请的一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
需要说明，本申请实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
另外，在本申请中如涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本申请中，除非另有明确的规定和限定，术语“连接”、“固定”等应做广义理解，例如，“固定”可以是固定连接，也可以是可拆卸连接，或 成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
另外，本申请各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本申请要求的保护范围之内。
本申请提出一种显影排泡装置，旨在解决储液箱内存在气泡而影响显影液涂覆均匀性的问题。
请参照图1、图2，在本申请一种实施例中，显影排泡装置包括储液箱1、第一端用于回收显影液且第二端与储液箱1连通的回收管路3、用于收集储液箱1内气泡的聚泡器(未标示)以及用于将聚泡器内的气泡排出的排泡组件(未标示)。本申请技术方案中，储液箱1内设置有收集气泡的聚泡器，并通过排泡组件能够将聚泡器内的气泡排出，以降低显影液中的气泡含量。经喷嘴11将显影液涂覆于玻璃基板时，显影液中气泡含量较少，从而能够防止涂覆显影液时因气泡造成的涂覆不均匀，因而能够大幅降低玻璃基板的不良率，进而降低液晶面板的生产成本。
其中，聚泡器可以为能够收集气泡的多种结构，例如，网罩或者带孔的壳体等。作为一种可选的实施例，聚泡器可为聚泡网罩2，回收管路3的第二端伸入聚泡网罩2内，从而使得回收管路3内的显影液能够先经聚泡网罩2的筛选，将气泡收集于聚泡网罩2内，而让不含气泡的显影液从聚泡网罩2内流出，以完成对显影液内气泡的收集，防止涂覆显影液时因气泡造成的涂覆不均匀。
进一步地，排泡组件可可选包括抽气单元以及排泡管路4，排泡管路4的第一端与聚泡网罩2连通且排泡管路4的第二端与抽气单元连接，抽气单元能够及时将聚泡网罩2内的气泡经排泡管路4抽出，从而防止气泡从聚泡网罩2内跑出。其中，抽气单元可以为真空泵或者其他能够使排泡管路4的两端产生压强差的结构，具体为使排泡管路4的第一端的压强大于排泡管路4的第二端的压强，从而使气泡能够从排泡管路4的第一端向排泡管路4的第 二端移动。
例如，在可选的实施例中，如图1所示，抽气单元包括用于回收清洗液的清洗箱5以及用于排出清洗箱5内清洗液的排液管路6，排泡管路4的第二端与排液管路6连通，且清洗箱5的位置低于聚泡网罩2的位置，或者说，清洗箱5内的液面低于储液箱1内的液面。用于对显影单元10进行清洗的清洗液能够在清洗过程完成后回收至清洗箱5，再经排液管路6排入后续的液体处理装置进行处理，以防止清洗液污染环境。其中，为了提升处理效率，排液管路6中清洗液的流速较大，因而使得排液管路6内的压强较小。排泡管路4的第一端与聚泡网罩2连通且排泡管路4的第二端与排液管路6连通，由于聚泡网罩2内的压强一般为大气压强，而排液管路6压强较小且通常会小于大气压强，因此使得排泡管路4的第一端的压强大于排泡管路4的第二端的压强，气泡能够从排泡管路4的第一端向排泡管路4的第二端移动。并且，清洗箱5的位置低于聚泡网罩2的位置，或者说，清洗箱5内的液面低于储液箱1内的液面，从而使得清洗箱5内的清洗液不会倒灌到聚泡网罩2内。
作为一种可选的实施例，排泡管路4可为弯折管，从排泡管路4的第一端到排泡管路4的弯折处为吸泡段(未标示)，从排泡管路4的弯折处到排泡管路4的第二端为排泡段(未标示)，吸泡段竖直设置或者沿气泡的流动方向向上倾斜，排泡段沿气泡的流动方向向下倾斜。由于气泡的质量较轻，在吸泡段气泡能够在压强差的作用下向上移动，而质量较大的显影液则无法向上移动，从而使得气泡与显影液分离，防止显影液进入排泡段。当气泡通过弯折处后，在压强差与重力的作用下，气泡能够顺利地进入排液管路6内，被清洗液强制带出。如此设置的排泡组件能够利用显影机本身具有的结构(清洗箱5与排液管路6)完成排泡过程，结构巧妙，一举多得，且能够大幅度地降低排泡成本。此外，相对于利用真空泵进行排泡的方式，该实施例还具有空间占用小的优点。
进一步地，为了控制进入聚泡网罩2内的气泡大小，回收管路3上设置有调节阀9。当观察到聚泡网罩2内的气泡过大时，可以通过控制调节阀9来减小回收管路3内显影液的流速，从而使得显影液所含的气泡的尺寸减小，以减小气泡收集的难度。其中，调节阀9可以可选为电磁阀或者气动阀，用 户能够对回收管路3内的显影液的流速进行远程控制。而为了便于观察气泡的大小，在可选的实施例中，回收管路3的部分或者全部为透明管，通过透明管可直观地对显影液的状态进行观察。其中，透明管可为亚克力管或者透明PVC(聚氯乙烯)管等。
上述的显影排泡装置能够应用于显影机上，经喷嘴11将显影液涂覆于玻璃基板时，显影液中气泡含量较少，从而能够防止涂覆显影液时因气泡造成的涂覆不均匀，因而能够产生大幅降低玻璃基板的不良率并降低液晶面板的生产成本的有益效果。
另外，本申请还提供一种显影机，如图1所示，其包括显影单元10、如上所述的显影排泡装置以及用于将储液箱1内的显影液送入显影单元10的送液管路7，回收管路3的第一端与显影单元10连接。其中，送液管路7的第一端与储液箱1连通且送液管路7的第二端设置有喷嘴11，从而能够将储液箱1内的显影液送入显影单元10，显影液通过喷嘴11涂覆于玻璃基板上。本申请技术方案中，储液箱1内设置有收集气泡的聚泡器，并通过排泡组件能够将聚泡器内的气泡排出，以降低显影液中的气泡含量。经喷嘴11将显影液涂覆于玻璃基板时，显影液中气泡含量较少，从而能够防止涂覆显影液时因气泡造成的涂覆不均匀，因而能够大幅降低玻璃基板的不良率，进而降低液晶面板的生产成本。
其中，送液管路7上还设置有用于泵送显影液的泵8，以给显影液的输送提供动力。此处的泵8可以为离心泵或者叶片泵等。在使用泵8泵送显影液时，需要注意使送液管路7的第一端没入储液箱1的液面下，以防止空气进入送液管路7内而产生气泡，并且在满足显影液的输送要求的前提下，应尽量调小泵8的功率，以减小送液管路7内显影液的流速，防止气泡产生。
在本申请所提供的几个实施例中，应该理解到，所揭露的系统，装置和/或方法，可以通过其它的方式实现。例如，以上所描述的装置实施例仅仅是示意性的，例如，所述单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多路单元或组件可以结合或者可以集成到另一个系统，或一些特征可以忽略，或不执行。另一点，所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口，装置或单元的间接耦合或通信连接，可以是电性，机械或其它的形式。
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多路网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。
最后应说明的是：以上实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的精神和范围。

Claims (20)

  1. 一种显影排泡装置，包括：
    储液箱；
    回收管路，所述回收管路的第一端用于回收显影液且第二端与所述储液箱连通所述回收管路上设置有调节阀，所述调节阀为电磁阀或者气动阀，所述回收管路的部分或者全部为透明管；
    聚泡器，所述聚泡器用于收集所述储液箱内的气泡，所述聚泡器为聚泡网罩，所述回收管路的第二端伸入所述聚泡网罩内；以及，
    排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出，所述排泡组件包括抽气单元以及排泡管路，所述排泡管路的第一端与所述聚泡网罩连通且所述排泡管路的第二端与所述抽气单元连接；
    所述抽气单元包括用于回收清洗液的清洗箱以及用于排出所述清洗箱内清洗液的排液管路，所述排泡管路的第二端与所述排液管路连通，且所述清洗箱的位置低于所述聚泡网罩的位置；
    所述排泡管路为弯折管，从所述排泡管路的第一端到所述排泡管路的弯折处为吸泡段，从所述排泡管路的弯折处到所述排泡管路的第二端为排泡段，所述吸泡段竖直设置或者沿气泡的流动方向向上倾斜，所述排泡段沿气泡的流动方向向下倾斜。
  2. 一种显影排泡装置，包括：
    储液箱；
    回收管路，所述回收管路的第一端用于回收显影液且第二端与所述储液箱连通；
    聚泡器，所述聚泡器用于收集所述储液箱内的气泡；以及，
    排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出。
  3. 如权利要求2所述的显影排泡装置，其中，所述回收管路上设置有调节阀。
  4. 如权利要求2所述的显影排泡装置，其中，所述聚泡器为聚泡网罩，所述回收管路的第二端伸入所述聚泡网罩内。
  5. 如权利要求4所述的显影排泡装置，其中，所述回收管路上设置有调节阀。
  6. 如权利要求4所述的显影排泡装置，其中，所述排泡组件包括抽气单元以及排泡管路，所述排泡管路的第一端与所述聚泡网罩连通且所述排泡管路的第二端与所述抽气单元连接。
  7. 如权利要求6所述的显影排泡装置，其中，所述回收管路上设置有调节阀。
  8. 如权利要求6所述的显影排泡装置，其中，所述抽气单元包括用于回收清洗液的清洗箱以及用于排出所述清洗箱内清洗液的排液管路，所述排泡管路的第二端与所述排液管路连通，且所述清洗箱的位置低于所述聚泡网罩的位置。
  9. 如权利要求8所述的显影排泡装置，其中，所述回收管路上设置有调节阀。
  10. 如权利要求8所述的显影排泡装置，其中，所述排泡管路为弯折管，从所述排泡管路的第一端到所述排泡管路的弯折处为吸泡段，从所述排泡管路的弯折处到所述排泡管路的第二端为排泡段，所述吸泡段竖直设置或者沿气泡的流动方向向上倾斜，所述排泡段沿气泡的流动方向向下倾斜。
  11. 如权利要求10所述的显影排泡装置，其中，所述回收管路上设置有调节阀。
  12. 如权利要求11所述的显影排泡装置，其中，所述调节阀为电磁阀或者气动阀。
  13. 如权利要求11所述的显影排泡装置，其中，所述回收管路的部分或者全部为透明管。
  14. 一种显影机，包括：
    显影单元；
    显影排泡装置，所述显影排泡装置包括：
    储液箱；
    回收管路，所述回收管路的第一端与所述显影单元连接以用于回收显影液且第二端与所述储液箱连通；
    聚泡器，所述聚泡器用于收集所述储液箱内的气泡；以及，
    排泡组件，所述排泡组件用于将所述聚泡器内的气泡排出；以及
    送液管路，所述送液管路用于将所述储液箱内的显影液送入所述显影单元。
  15. 如权利要求14所述的显影机，其中，所述聚泡器为聚泡网罩，所述回收管路的第二端伸入所述聚泡网罩内。
  16. 如权利要求15所述的显影机，其中，所述排泡组件包括抽气单元以及排泡管路，所述排泡管路的第一端与所述聚泡网罩连通且所述排泡管路的第二端与所述抽气单元连接。
  17. 如权利要求16所述的显影机，其中，所述抽气单元包括用于回收清洗液的清洗箱以及用于排出所述清洗箱内清洗液的排液管路，所述排泡管路的第二端与所述排液管路连通，且所述清洗箱的位置低于所述聚泡网罩的位置。
  18. 如权利要求17所述的显影机，其中，所述排泡管路为弯折管，从所述排泡管路的第一端到所述排泡管路的弯折处为吸泡段，从所述排泡管路的弯折处到所述排泡管路的第二端为排泡段，所述吸泡段竖直设置或者沿气泡的流动方向向上倾斜，所述排泡段沿气泡的流动方向向下倾斜。
  19. 如权利要求18所述的显影机，其中，所述回收管路上设置有调节阀。
  20. 如权利要求14所述的显影机，其中，所述送液管路上设置有用于泵送显影液的泵。
PCT/CN2018/077829 2017-03-15 2018-03-02 显影排泡装置以及显影机 WO2018166358A1 (zh)

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