WO2018137673A1 - 掺杂氧化镓晶态材料及其制备方法和应用 - Google Patents
掺杂氧化镓晶态材料及其制备方法和应用 Download PDFInfo
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- WO2018137673A1 WO2018137673A1 PCT/CN2018/074058 CN2018074058W WO2018137673A1 WO 2018137673 A1 WO2018137673 A1 WO 2018137673A1 CN 2018074058 W CN2018074058 W CN 2018074058W WO 2018137673 A1 WO2018137673 A1 WO 2018137673A1
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- 239000002178 crystalline material Substances 0.000 title claims abstract description 85
- 238000002360 preparation method Methods 0.000 title claims abstract description 32
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title 1
- 229910052733 gallium Inorganic materials 0.000 title 1
- 239000013078 crystal Substances 0.000 claims abstract description 101
- 238000000034 method Methods 0.000 claims abstract description 40
- 229910001195 gallium oxide Inorganic materials 0.000 claims abstract description 28
- 238000002156 mixing Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000005693 optoelectronics Effects 0.000 claims abstract description 8
- 239000011941 photocatalyst Substances 0.000 claims abstract description 4
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 148
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims description 27
- 238000000137 annealing Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- 239000000155 melt Substances 0.000 claims description 9
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 10
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 abstract 3
- 239000012298 atmosphere Substances 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
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- 239000002019 doping agent Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 239000003574 free electron Substances 0.000 description 6
- 229910021480 group 4 element Inorganic materials 0.000 description 6
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- 239000000843 powder Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
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- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 2
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- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical class [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
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- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G15/00—Compounds of gallium, indium or thallium
-
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- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/34—Single-crystal growth by zone-melting; Refining by zone-melting characterised by the seed, e.g. by its crystallographic orientation
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
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- H—ELECTRICITY
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0321—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 characterised by the doping material
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- C01P2006/80—Compositional purity
Definitions
- the invention relates to a VB group element doped beta gallium oxide ( ⁇ -Ga 2 O 3 ) crystalline material and a preparation method and application thereof.
- ⁇ -Ga 2 O 3 is a direct bandgap wide bandgap semiconductor material with a band gap of about 4.8-4.9 eV. It has many advantages such as large forbidden band width, fast drift of saturated electrons, high thermal conductivity, high breakdown field strength, and stable chemical properties. It is transparent from deep ultraviolet (DUV) to infrared (IR) regions. Compared to transparent conductive materials (TCOs), a new generation of semiconductor optoelectronic devices with shorter wavelengths can be prepared.
- DUV deep ultraviolet
- IR infrared
- Pure ⁇ -Ga 2 O 3 crystals exhibit semi-insulating or weak n-type conductivity.
- the currently known main method for improving the n-type conductivity of ⁇ -Ga 2 O 3 crystals is to carry out tetravalent ions (IV elements).
- Doping mainly including doping of Si, Hf, Ge, Sn, Zr, Ti plasmas of the fourth main group and the fourth sub-group. Taking Si as an example, the main mechanism for increasing the carrier concentration is as follows:
- Si and Sn in the group IV element are two commonly used doping elements.
- the use of Si-doped ⁇ -Ga 2 O 3 single crystals is disclosed in US Pat. No. 2,070,166, 967, A1 and Japanese Patent Publication No. JP 2015083536 A.
- the resistivity of the Si-doped ⁇ -Ga 2 O 3 single crystal disclosed in the above two documents is in the range of 2.0 ⁇ 10 ⁇ 3 to 8.0 ⁇ 10 2 ⁇ cm, the resistivity may be as low as 2.0 ⁇ 10 ⁇ 3 ⁇ cm. But the above minimum resistivity is only theoretical. It is difficult to achieve in practice.
- the problem solved by the present invention is to overcome the limitation of the improvement of the electrical conductivity of the existing Group IV element doped crystalline ⁇ -Ga 2 O 3 , and to prepare the high conductivity Group IV element doped crystalline ⁇ -Ga 2 O 3 .
- There are defects in crystal crystallization and harsh process conditions and a class of VB group doped ⁇ -Ga 2 O 3 crystalline materials and a preparation method and application thereof are provided.
- the VB group doped ⁇ -Ga 2 O 3 crystalline material exhibits n-type conductivity characteristics, and a high conductivity ⁇ -Ga 2 O 3 crystalline material can be prepared by a conventional process.
- ions doped with a higher valence state than Ga 3+ can increase the conductivity of the crystalline ⁇ -Ga 2 O 3 to some extent, but if the doping ion is too high, the charge It is difficult to balance, and it is easy to produce more doping defects.
- the defects consume electrons, which makes the number of freely movable carriers significantly lower, and can not effectively achieve the improvement of crystalline ⁇ -Ga 2 O 3 conductivity by doping high-valent ions. The purpose of this will also seriously affect the application properties of the material. Therefore, in the prior art, a Group IV element having a higher valence than Ga 3+ is generally used to dope the crystalline ⁇ -Ga 2 O 3 , and there is no report of doping with a VB group element.
- the inventors of the present invention found that after annealing the crystalline ⁇ -Ga 2 O 3 doped with the VB group element, the oxygen vacancies in the crystal can be removed, and the control range of the carrier concentration can be increased to provide a basis for its application.
- the term crystalline material refers to a solid material in which the internal structure exhibits a long-range order state, including solid crystals and liquid crystals in which solid substances are dominant.
- the crystalline material is divided according to the macroscopic aggregation state and grain size in the crystal crystallization process, including single crystal, thin film, polycrystalline (powder crystal), eutectic, microcrystalline and nanocrystalline.
- the macroscopic form of the crystalline material is not particularly limited, and may be, for example, a powder, a granule, a film, or the like.
- the molecular formula of the VB group doped ⁇ -Ga 2 O 3 crystalline material is Ga 2(1-x) M 2x O 3 , 0.000000001 ⁇ x ⁇ 0.01, preferably x is 0.000001 ⁇ x ⁇ 0.01.
- the M-doped ⁇ -Ga 2 O 3 crystalline material is preferably an M-doped ⁇ -Ga 2 O 3 crystal, more preferably an M-doped ⁇ -Ga 2 O 3 single crystal.
- the resistivity of the M-doped ⁇ -Ga 2 O 3 crystalline material is preferably in the range of 2.0 ⁇ 10 ⁇ 3 to 3.6 ⁇ 10 2 ⁇ cm; when M is Ta, more preferably the 4 ⁇ 10 -3 to 7.9 ⁇ ⁇ cm range; when M is Nb, more preferably within 5.5 ⁇ 10 -3 to 36 ⁇ ⁇ cm range; when M is V, more preferably at 3 ⁇ 10 -2 Up to 50 ⁇ cm.
- the carrier concentration of the M-doped ⁇ -Ga 2 O 3 crystalline material is preferably in the range of 3.7 ⁇ 10 15 to 6.3 ⁇ 10 19 /cm 3 ; when M is Ta, it is better.
- the ground is in the range of 3.7 ⁇ 10 15 to 3.0 ⁇ 10 19 /cm 3 ; when M is Nb, more preferably in the range of 9.55 ⁇ 10 16 to 1.8 ⁇ 10 19 /cm 3 ; when M is V, it is better.
- the ground is in the range of 5 x 10 15 to 3.69 x 10 18 /cm 3 .
- the doping scheme provided by the present invention can be mixed by a conventional crystal growth method with M 2 O 5 and Ga 2 O 3 having a purity of 4 N or more in a molar ratio (0.000000001-0.01): (0.999999999-0.99) according to a conventional method in the art. After crystal growth is sufficient.
- the term purity refers to the mass fraction of M 2 O 5 or Ga 2 O 3 in the sample.
- a purity of 4 N means that the mass content of M 2 O 5 or Ga 2 O 3 is 99.99%.
- the conductivity of the final crystalline material may be affected by excessive impurities.
- the purity of the M 2 O 5 and Ga 2 O 3 is preferably 5 N or more, that is, the mass content of M 2 O 5 or Ga 2 O 3 in the sample is 99.999%.
- the purity of Ga 2 O 3 used in the preparation process is preferably 6 N or more, that is, Ga in the sample.
- the mass content of 2 O 3 is 99.9999%.
- the M-doped ⁇ -Ga 2 O 3 crystalline material may be further subjected to an annealing operation to remove oxygen vacancies in the crystal and increase the control range of the carrier concentration.
- the temperature and time of the annealing may be conventional in the art, for example, annealing at 1000 ° C - 1200 ° C for 3-10 h.
- the M-doped ⁇ -Ga 2 O 3 crystalline material may contain an impurity element which is inevitably contained in the raw material during the refining process, and an impurity element which is inevitably mixed in the process, and the above impurity element is relative to all constituent components.
- the content is preferably 10 ppm or less.
- the crystal growth method and growth conditions employed for preparing the ⁇ -Ga 2 O 3 -doped material are not particularly limited, and may be conventional crystal growth methods and growth conditions in the art.
- the doped ⁇ -Ga 2 O 3 crystalline material is a single crystal
- the single crystal is usually grown by a melt method conventionally used in the art, and the melt growth method generally introduces a seed crystal into the melt to control the single crystal.
- the core then phase change at the phase interface between the seed crystal and the melt to promote the continuous growth of the crystal, generally including the pulling method, the guided mode method, the helium descent method, the optical floating zone method, the flame melting method, etc., the optical floating zone
- Both the method and the guided mode method are simple and efficient methods, and the embodiment of the present invention employs an optical floating zone method.
- the step of preparing the M-doped ⁇ -Ga 2 O 3 single crystal by the optical floating zone method generally includes mixing, rod making, sintering and crystal growth.
- the mixing may be carried out by a mixing method conventionally used in the art, such as wet mixing.
- the kind and amount of the solvent to be used in the wet mixing are not particularly limited as long as the M 2 O 5 and Ga 2 O 3 can be uniformly mixed and easily removed later, and a volatile solvent such as ethanol is generally used.
- the solvent can be completely volatilized by baking.
- the wet mixing may also be carried out by a wet ball milling process, which may be conventional in the art, for example 12-24 h.
- the pressure bar can be operated in a manner conventional in the art, and the pressure bar is generally performed using an isostatic press.
- the mixture of M 2 O 5 and Ga 2 O 3 is in a powder form, can be easily pressed, and can make the pressing uniform, so if the mixture has agglomeration before pressing, it can be ground by grinding, such as ball milling. It is ground into a powder.
- M 2 O 5 and 6N Ga 2 O 3 having a purity of 4 N or more are mixed in a molar ratio (0.000001-0.01): (0.999999-0.99), and then subjected to wet ball milling by adding an appropriate amount of absolute ethanol.
- the ball milling time is 12-24h, so that M 2 O 5 and Ga 2 O 3 are thoroughly mixed, and then the obtained mixture is baked at 80-100 ° C for 3-6h, so that the ethanol is completely volatilized, and then dried.
- the mixture is ball milled into a powder for use in a pressure bar.
- the sintering can be carried out according to the sintering temperature and time conventional in the art for removing moisture in the M 2 O 5 and Ga 2 O 3 mixture, and solid-phase reaction of M 2 O 5 and Ga 2 O 3 Forming a polycrystalline material.
- the sintering temperature is preferably from 1400 to 1600 ° C, and the sintering time is preferably from 10 to 20 hours.
- the sintering is generally carried out in a muffle furnace.
- the crystal growth atmosphere is preferably a vacuum, an inert atmosphere or an oxidizing atmosphere to ensure the valence state of the VB group metal M ions.
- the inert atmosphere may be an inert atmosphere conventional in the art, such as a nitrogen atmosphere or an argon atmosphere;
- the oxidizing atmosphere may be an oxidizing atmosphere conventional in the art, such as an oxygen atmosphere or an air atmosphere.
- the preparation of the VB group metal M-doped ⁇ -Ga 2 O 3 single crystal is generally carried out by a melt method, generally using a ⁇ -Ga 2 O 3 crystal as a seed crystal, and using sintered M 2 O 5 and Ga 2 O 3 .
- the polycrystalline material is melted to form a melt, and the melt is gradually cooled and crystallized along the seed crystal to form a single crystal, and the specific method includes a floating zone method, a guided mode method, a temperature ladder method, a descending method, a pulling method, and the like.
- the growing VB group metal M-doped ⁇ -Ga 2 O 3 single crystal is carried out by a floating zone method, and is carried out according to the following steps: sintering the M 2 O 5 and Ga 2 O 3 polycrystals
- the rod is loaded into the floating zone furnace as a feeding rod, and the ⁇ -Ga 2 O 3 crystal in the ⁇ 010> direction is used as a seed crystal.
- the seed crystal is melted first by heating, and then the rod is contacted to adjust the rotation speed of the rod and the seed crystal.
- the growth atmosphere is air atmosphere, after the crystal growth is completed, pull the melting zone, slowly drop to room temperature, remove the crystal .
- the invention also provides a VB group metal M doped ⁇ -Ga 2 O 3 crystalline material obtained by the above preparation method.
- the invention also provides the use of the M-doped ⁇ -Ga 2 O 3 crystalline material on a power electronic device, an optoelectronic device, a photocatalyst or a conductive substrate.
- the optoelectronic device comprises a transparent electrode, a solar panel, a light emitting device, a photodetector, a sensor, etc.;
- the conductive substrate comprises a substrate material as GaN and/or AlN, a substrate material of Ga 2 O 3 itself Wait.
- the reagents and starting materials used in the present invention are commercially available.
- the limit ability of the invention for using the 5-valent VB group metal ion doped crystalline ⁇ -Ga 2 O 3 to provide free electrons is 1:2, which is significantly higher than the ability of +4 valence ion doping to provide free electrons (1: 1), therefore, more free electrons can be provided at the same doping concentration, which is more favorable for increasing the carrier concentration and improving the conductivity.
- the present invention employs a 5-valent VB group metal ion doped crystalline ⁇ -Ga 2 O 3 , and the conductivity of the ⁇ -Ga 2 O 3 crystalline material can be controlled by controlling the content of the doping element M.
- the resistivity of the Ta-doped ⁇ -Ga 2 O 3 crystalline material of the present invention can be controlled in the range of 2.0 ⁇ 10 -4 to 1 ⁇ 10 4 ⁇ cm, and the carrier concentration can be 5 ⁇ 10 12 to 7 ⁇ . Control is achieved in the range of 10 20 /cm 3 .
- the present invention Nb-doped ⁇ -Ga 2 O 3 crystalline material resistivity to 1 ⁇ 10 4 ⁇ ⁇ cm to achieve control within a range of 2.5 ⁇ 10 -4, the carrier concentration may be 5 ⁇ 10 12 to 5.6 ⁇
- the control is realized in the range of 10 20 /cm 3 ;
- the resistivity of the V-doped ⁇ -Ga 2 O 3 crystalline material of the present invention can be controlled in the range of 2.0 ⁇ 10 -4 to 1 ⁇ 10 4 ⁇ cm, carriers
- the concentration can be controlled in the range of 5 x 10 12 to 7 x 10 20 /cm 3 .
- the VB group metal-doped ⁇ -Ga 2 O 3 crystalline material of the present invention can be prepared by a conventional method in the art, without expensive raw materials and demanding processes.
- the present invention can remove the oxygen vacancies in the crystal lattice and increase the control range of the carrier concentration, thereby providing a basis for its application.
- Fig. 1 is a graph showing the relationship between the doping concentration of Ta 2 O 5 and the carrier concentration and resistivity of the 1-4Ta-doped ⁇ -Ga 2 O 3 primary crystal of Example 1-4.
- Example 2 is a graph showing the relationship between the doping concentration of Ta 2 O 5 and the carrier concentration of the Ta-doped ⁇ -Ga 2 O 3 crystal after annealing in Example 1-3.
- Example 3 is a graph showing the relationship between the Nb 2 O 5 doping concentration and the carrier concentration and resistivity of Example 5-9 Nb-doped ⁇ -Ga 2 O 3 primary crystal.
- a Ta-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Ta 2x O 3 (x 0.000001), belonging to a monoclinic system and a space group of C2/m, which is prepared as follows The method is prepared, and the specific steps are as follows:
- Crystal growth the sintered polycrystalline rod is placed in a floating zone furnace as a loading rod, and the ⁇ -Ga 2 O 3 crystal in the ⁇ 010> direction is placed below as a seed crystal; The crystal melts and then contacts the upper rod to stabilize the crystal growth; the crystal growth rate is 5 mm/h, the rotation speed is 10 rpm, and the growth atmosphere is an air atmosphere; after the crystal growth is completed, the drop of the feed rod is stopped, and the The natural drop of the crystal gradually separates the melting zone, and then slowly drops to room temperature after about 1 hour, and the crystal is taken out; the obtained primary crystal is intact without cracking and the color is uniform;
- Annealing The obtained primary crystals were annealed at 1000 ° C for 3 h.
- a Ta-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Ta 2x O 3 (x 0.00005), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions were the same as those in Example 1, except that the doping concentration of Ta 2 O 5 in the step (1) was different, and the molar ratio of Ga 2 O 3 and Ta 2 O 5 was 0.99995: 0.00005.
- a Ta-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Ta 2x O 3 (x 0.001), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions were the same as those in Example 1, except that the doping concentration of Ta 2 O 5 in the step (1) was different, and the molar ratio of Ga 2 O 3 and Ta 2 O 5 was 0.999: 0.001, and the annealing operation was not performed.
- a Ta-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Ta 2x O 3 (x 0.01), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions were the same as those in Example 1, except that the doping concentration of Ta 2 O 5 in the step (1) was different, and the molar ratio of Ga 2 O 3 and Ta 2 O 5 was 0.99:0.01, and the annealing operation was not performed.
- the conditions are the same as those in the first embodiment except that the dopant Nb 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment.
- the conditions are the same as those in the first embodiment except that the dopant Nb 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment.
- An Nb-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Nb 2x O 3 (x 0.0001), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions are the same as those in the first embodiment except that the dopant Nb 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment, and the annealing treatment is not performed.
- a Nb-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) Nb 2x O 3 (x 0.002), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions are the same as those in the first embodiment except that the dopant Nb 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment, and are not annealed.
- the conditions are the same as those in the first embodiment except that the dopant Nb 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment, and are not annealed.
- a V-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) V 2x O 3 (x 0.01), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions are the same as those in the first embodiment except that the dopant V 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment, and are not annealed.
- a V-doped ⁇ -Ga 2 O 3 single crystal having a molecular formula of Ga 2(1-x) V 2x O 3 (x 0.00001), belonging to a monoclinic system, a space group of C2/m, and a preparation step thereof
- the conditions are the same as those in the first embodiment except that the dopant V 2 O 5 and the doping concentration are different in the step (1), and the preparation steps and conditions are the same as those in the first embodiment, and are not annealed.
- a pure ⁇ -Ga 2 O 3 single crystal having the same preparation steps and conditions as in Example 1 except that Ta 2 O 5 doping was not performed.
- the M-doped ⁇ -Ga 2 O 3 single crystals obtained in Examples 1 to 12 and the pure ⁇ -Ga 2 O 3 single crystals of the comparative examples (including the primary crystals and the annealed crystals) were each cut into 5 mm ⁇ 5 mm ⁇ 0.3.
- the mm sample was fabricated using a Hall effect tester after making indium electrodes on the four corners.
- the test results showed that the conductivity types of the doped crystals of Examples 1 to 12 were n-type, and the carrier concentration and resistivity test results of the samples of Examples 1 to 4, 7 to 12 and the comparative examples are shown in Table 1 below:
- the pure ⁇ -Ga 2 O 3 primary crystal is nearly insulated after annealing.
- the carrier concentration is greatly increased after the ⁇ -Ga 2 O 3 single crystal is doped with the VB group element, and the conductivity is obviously improved, wherein the carrier concentration is increased at least.
- the resistivity is reduced by at least 500 times, indicating that the M metal ions have been successfully doped into the ⁇ -Ga 2 O 3 lattice, and the desired regulation effect is obtained.
- the present invention draws the Ta 2 O 5 doping concentration-carrier concentration of the unannealed samples of Examples 1-4.
- the curve of resistivity can be seen in detail in FIG. Examples 5-9 correspond to a Nb 2 O 5 doping concentration-carrier concentration-resistivity curve, as specifically shown in FIG.
- the present invention draws the Ta 2 O 5 doping concentration-carrier concentration curve of the sample after annealing in Example 1-3, specifically See Figure 2.
- the above-described group VB element-doped carrier concentration and resistivity of ⁇ -Ga 2 O 3 single crystal according to the present invention is to obtain particular experiment, the influence of practice material purity, preparation and test conditions and the like, will There is a difference between the actually measured doping crystal carrier fluid concentration and the resistivity and the theoretical value, or there is an undetectable condition. Therefore, the above embodiments are merely illustrative. Those skilled in the art can infer the carrier of the VB group element doped ⁇ -Ga 2 O 3 crystalline material according to the VB group element doping concentration disclosed in the present invention in combination with common knowledge in the art.
- the concentration can be substantially controlled in the range of 5 ⁇ 10 12 to 7 ⁇ 10 20 /cm 3
- the specific resistance can be controlled in the range of 2.0 ⁇ 10 -4 to 1 ⁇ 10 4 ⁇ ⁇ cm.
- the limit value of the resistivity of the Hall effect low resistance module is 10 5 ⁇ cm.
- the experiment of the present invention shows that the 6N pure ⁇ -Ga 2 O 3 crystal exceeds the test limit after annealing, indicating that the resistivity is >10 5 ⁇ . ⁇ cm, so the resistivity can be controlled to 1 ⁇ 10 4 ⁇ cm by doping with 6N pure ⁇ -Ga 2 O 3 , which is 1/1266 of the embodiment 1, and the current carrying in the embodiment Multiplying the sub-concentration by 1/1266 yields 3 ⁇ 10 12 /cm 3 , so that a carrier concentration of the Ta-doped ⁇ -Ga 2 O 3 crystalline material of 5 ⁇ 10 12 /cm 3 is also feasible.
- the doping concentration of Ta corresponding to the carrier concentration is 10 -7 at%.
- the carrier concentration can be controlled in the range of 5 ⁇ 10 12 to 7 ⁇ 10 20 /cm 3 .
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Abstract
Description
Claims (24)
- 一种掺杂氧化镓晶态材料,其特征在于,所述掺杂氧化镓晶态材料为VB族元素掺杂的氧化镓晶态材料,其电阻率在2.0×10 -4到1×10 4Ω·cm范围内和/或载流子浓度在5×10 12到7×10 20/cm 3范围内。
- 如权利要求1所述的掺杂氧化镓晶态材料,其特征在于,所述氧化镓为单斜晶系的β-Ga 2O 3晶体,空间群为C2/m。
- 如权利要求1所述的掺杂氧化镓晶态材料,其特征在于,所述掺杂氧化镓晶态材料的分子式为Ga 2(1-x)M 2xO 3,掺杂元素M为VB族元素钒(V)、铌(Nb)、钽(Ta)中的一种或其任意组合,0.000000001≤x≤0.01。
- 如权利要求3所述掺杂氧化镓晶态材料,其特征在于,0.000001≤x≤0.01。
- 如权利要求1~3中任一项所述的掺杂氧化镓晶态材料,其特征在于,所述的掺杂氧化镓晶态材料为Ta掺杂β-Ga 2O 3晶态材料,其电阻率在2.0×10 -4到1×10 4Ω·cm范围内和/或载流子浓度在5×10 12到7×10 20/cm 3范围内。
- 如权利要求5所述的掺杂氧化镓晶态材料,其特征在于,所述Ta掺杂β-Ga 2O 3晶态材料的分子式为Ga 2(1-x)Ta 2xO 3,0.000000001≤x≤0.01;优选的,0.000001≤x≤0.01。
- 如权利要求6所述的掺杂氧化镓晶态材料,其特征在于,所述Ta掺杂β-Ga 2O 3晶态材料为Ta掺杂β-Ga 2O 3晶体;和/或,所述Ta掺杂β-Ga 2O 3晶态材料的电阻率在2.0×10 -3到3.6×10 2Ω·cm范围内;和/或,所述Ta掺杂β-Ga 2O 3晶态材料的载流子浓度在3.7×10 15到6.3×10 19/cm 3范围内。
- 如权利要求7所述的掺杂氧化镓晶态材料,其特征在于,所述Ta掺 杂β-Ga 2O 3晶态材料为Ta掺杂β-Ga 2O 3单晶;和/或,所述Ta掺杂β-Ga 2O 3晶态材料的电阻率在4×10 -3-7.9Ω·cm范围内;和/或,所述Ta掺杂β-Ga 2O 3晶态材料的载流子浓度在3.7×10 15到3.0×10 19/cm 3范围内。
- 如权利要求1~3中任一项所述的掺杂氧化镓晶态材料,其特征在于,所述掺杂氧化镓晶态材料为Nb掺杂β-Ga 2O 3晶态材料,其电阻率在2.5×10 -4到1×10 4Ω·cm范围内和/或载流子浓度在5×10 12到5.6×10 20/cm 3范围内。
- 如权利要求9所述的掺杂氧化镓晶态材料,其特征在于,所述Nb掺杂β-Ga 2O 3晶态材料的分子式为Ga 2(1-x)Nb 2xO 3,0.000000001≤x≤0.008;优选的,Nb掺杂浓度范围为0.0001~0.8mol%,即0.000001≤x≤0.008。
- 如权利要求10所述的掺杂氧化镓晶态材料,其特征在于,所述Nb掺杂β-Ga 2O 3晶态材料为Nb掺杂β-Ga 2O 3晶体;和/或,所述Nb掺杂β-Ga 2O 3晶态材料的电阻率在2.5×10 -3到3.6×10 2Ω·cm范围内;和/或,所述Nb掺杂β-Ga 2O 3晶态材料的载流子浓度在3.7×10 15到5×10 19/cm 3范围内。
- 如权利要求11所述的掺杂氧化镓晶态材料,其特征在于,所述Nb掺杂β-Ga 2O 3晶态材料为Nb掺杂β-Ga 2O 3晶体;和/或,所述Nb掺杂氧化镓晶体的电阻率在5.5×10 -3到36Ω·cm范围内;和/或,所述Nb掺杂氧化镓晶体的载流子浓度在9.55×10 16到1.8×10 19/cm 3范围内。
- 如权利要求1~3中任一项所述的掺杂氧化镓晶态材料,其特征在于,所述掺杂氧化镓晶态材料为V掺杂β-Ga 2O 3晶态材料,其电阻率在2.0×10 -4到1×10 4Ω·cm范围内和/或载流子浓度在5×10 12到7×10 20/cm 3范围内。
- 如权利要求13所述的掺杂氧化镓晶态材料,其特征在于,所述V 掺杂β-Ga 2O 3晶态材料的分子式为Ga 2(1-x)V 2xO 3,0.000000001≤x≤0.01,优选的,V的掺杂浓度范围为0.000001≤x≤0.01。
- 如权利要求14所述的掺杂氧化镓晶态材料,其特征在于,所述V掺杂β-Ga 2O 3晶态材料为V掺杂β-Ga 2O 3晶体;和/或,所述V掺杂β-Ga 2O 3晶态材料的电阻率在2.0×10 -3到3.6×10 2Ω·cm范围内;和/或,所述V掺杂β-Ga 2O 3晶态材料的载流子浓度在3.7×10 15到6.3×10 19/cm 3范围内。
- 如权利要求15所述的掺杂氧化镓晶态材料,其特征在于,所述V掺杂β-Ga 2O 3晶态材料为V掺杂β-Ga 2O 3单晶;和/或,所述V掺杂β-Ga 2O 3晶态材料的电阻率在3×10 -2到50Ω·cm范围内;和/或,所述V掺杂β-Ga 2O 3晶态材料的载流子浓度在5×10 15到3.69×10 18/cm 3范围内。
- 一种VB族元素M掺杂的β-Ga 2O 3晶态材料的制备方法,其特征在于,包括如下步骤:将纯度在4N以上的M 2O 5和Ga 2O 3按照摩尔比(0.000000001-0.01):(0.999999999-0.99)混合后进行晶体生长,获得掺杂氧化镓晶态材料;可选地,晶体生长完毕后,所得M掺杂β-Ga 2O 3晶态材料还进行退火步骤。
- 如权利要求17所述的制备方法,其特征在于:所述M 2O 5和Ga 2O 3的纯度优选5N以上;所述M掺杂β-Ga 2O 3晶态材料为M掺杂β-Ga 2O 3单晶时,制备过程中使用的Ga 2O 3纯度较佳地在6N以上;所述的摩尔比优选(0.000001-0.01):(0.999999-0.99)。
- 如权利要求17或18所述的制备方法,其特征在于,所述M掺杂 β-Ga 2O 3晶态材料为M掺杂β-Ga 2O 3单晶时,采用熔体法生长单晶,包括导模法、提拉法、浮区法、坩埚下降法中的任意一种。
- 一种如权利要求17-19中任一项所述制备方法制得的M掺杂β-Ga 2O 3晶态材料。
- 如权利要求1~16和20中任一项所述M掺杂β-Ga 2O 3晶态材料在电力电子器件、光电子器件、光催化剂或导电衬底上的应用。
- 如权利要求21所述的应用,其特征在于,所述光电子器件包括透明电极、太阳能电池板、发光器件、光探测器和/或传感器;所述导电衬底包括作为GaN和/或AlN以及Ga 2O 3自身的衬底材料。
- 如权利要求5~8中任一项所述Ta掺杂β-Ga 2O 3晶态材料在电力电子器件、光电子器件、光催化剂或导电衬底上的应用。
- 如权利要求23所述的应用,其特征在于,所述光电子器件包括透明电极、太阳能电池板、发光器件、光探测器和/或传感器;所述导电衬底包括作为GaN和/或AlN以及Ga 2O 3自身的衬底材料。
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CN1469842A (zh) * | 2000-10-17 | 2004-01-21 | ������������ʽ���� | 氧化物材料、氧化物薄膜的制造方法以及使用该材料的元件 |
JP2004262684A (ja) * | 2003-02-24 | 2004-09-24 | Univ Waseda | β−Ga2O3系単結晶成長方法 |
US20070166967A1 (en) | 2004-02-18 | 2007-07-19 | Noboru Ichinose | Method for controlling conductivity of ga2o3 single crystal |
CN102431977A (zh) * | 2011-09-05 | 2012-05-02 | 吉林大学 | 一种制备锰掺杂氮化镓纳米材料的方法 |
CN103878010A (zh) * | 2014-04-15 | 2014-06-25 | 哈尔滨工业大学 | VB族金属离子掺杂(Ga1-xZnx)(N1-xOx)固溶体光催化剂的制备方法 |
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JP2004262684A (ja) * | 2003-02-24 | 2004-09-24 | Univ Waseda | β−Ga2O3系単結晶成長方法 |
US20070166967A1 (en) | 2004-02-18 | 2007-07-19 | Noboru Ichinose | Method for controlling conductivity of ga2o3 single crystal |
CN102431977A (zh) * | 2011-09-05 | 2012-05-02 | 吉林大学 | 一种制备锰掺杂氮化镓纳米材料的方法 |
CN103878010A (zh) * | 2014-04-15 | 2014-06-25 | 哈尔滨工业大学 | VB族金属离子掺杂(Ga1-xZnx)(N1-xOx)固溶体光催化剂的制备方法 |
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EP3572561B1 (en) | 2023-06-28 |
EP3572561A4 (en) | 2020-01-08 |
JP6956189B2 (ja) | 2021-11-02 |
US11098416B2 (en) | 2021-08-24 |
KR20200002789A (ko) | 2020-01-08 |
EP3572561A1 (en) | 2019-11-27 |
KR102414621B1 (ko) | 2022-06-30 |
JP2020505305A (ja) | 2020-02-20 |
US20190352798A1 (en) | 2019-11-21 |
SG11202000619WA (en) | 2020-02-27 |
CN110325671A (zh) | 2019-10-11 |
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