WO2018110178A1 - Système de véhicule en déplacement - Google Patents

Système de véhicule en déplacement Download PDF

Info

Publication number
WO2018110178A1
WO2018110178A1 PCT/JP2017/040742 JP2017040742W WO2018110178A1 WO 2018110178 A1 WO2018110178 A1 WO 2018110178A1 JP 2017040742 W JP2017040742 W JP 2017040742W WO 2018110178 A1 WO2018110178 A1 WO 2018110178A1
Authority
WO
WIPO (PCT)
Prior art keywords
traveling vehicle
traveling
section
controller
vehicle
Prior art date
Application number
PCT/JP2017/040742
Other languages
English (en)
Japanese (ja)
Inventor
一見 原崎
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2018110178A1 publication Critical patent/WO2018110178A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions

Definitions

  • One embodiment of the present invention relates to a traveling vehicle system.
  • the traveling vehicle system described in Patent Literature 1 includes a plurality of traveling vehicles that travel along a track, and a controller that communicates with each of the plurality of traveling vehicles and controls the operations of the plurality of traveling vehicles. Yes.
  • a plurality of zones are set on the track in order to realize backward traveling of traveling vehicles while preventing interference between traveling vehicles, and only one traveling vehicle exists in each of the plurality of zones. Thus, the operation of the traveling vehicle is controlled.
  • an appropriate section for prohibiting the entry of another following traveling vehicle is set according to the current position of the traveling vehicle at a timing when the traveling vehicle is going to travel backward. It is an object of the present invention to provide a traveling vehicle system that can realize backward traveling of a traveling vehicle while preventing interference with the traveling vehicle.
  • a traveling vehicle system of one embodiment of the present invention includes a plurality of traveling vehicles that travel along a track, and a controller that communicates with each of the plurality of traveling vehicles and controls operations of the plurality of traveling vehicles, When the traveling vehicle is located in a predetermined section of the track, when the traveling vehicle tries to travel backward to a destination point behind the traveling vehicle in the predetermined section, the traveling vehicle transmits a backward traveling permission request to the controller.
  • an interference prevention section including a section from the current position of the traveling vehicle to the destination point is set, and another traveling located immediately behind the traveling vehicle in the predetermined section
  • a reverse drive permission to the destination point is transmitted to the travel vehicle that transmitted the reverse travel permission request, and other travel vehicles If it is stopped or the scheduled stop in the stop section, it does not send a reverse travel permission to the destination point in the vehicle that sent the reverse travel authorization request.
  • an interference prevention section including a section from the current position of the traveling vehicle to a destination point behind the traveling vehicle is set. Then, when another traveling vehicle located immediately behind the traveling vehicle is stopped or scheduled to stop behind the interference prevention section, backward traveling of the traveling vehicle is permitted. On the other hand, when another traveling vehicle located immediately behind the traveling vehicle is stopped or scheduled to stop in the interference prevention zone, the backward traveling of the traveling vehicle is not permitted. For this reason, without setting a zone in advance, it is possible to set only a section where entry of other traveling vehicles should be prohibited as an interference prevention section, and to realize backward travel of the traveling vehicle within the interference prevention section.
  • an appropriate section for prohibiting the entry of other following traveling vehicles is set to prevent the traveling vehicles from interfering with each other. It becomes possible to realize reverse traveling of the car.
  • the interference prevention section is a section from the current position of the traveling vehicle that transmitted the reverse travel permission request to the rear end of the traveling vehicle in a state where the traveling vehicle is located at the destination point. It may be. In this case, since the shortest section where entry of other traveling vehicles should be prohibited can be set as the interference prevention section, smooth traveling of the other traveling vehicles can be realized.
  • the track may include a plurality of branching / merging portions that branch or join, and the predetermined section may be a section between the branching / merging portions adjacent to each other on the track. In this case, it is possible to suppress an increase in the number of other traveling vehicles that are stopped in order to realize the backward traveling of the traveling vehicle.
  • an appropriate section for prohibiting the entry of another following traveling vehicle is set in accordance with the current position of the traveling vehicle at a timing when the traveling vehicle is going to travel backward. It is possible to achieve reverse travel of the traveling vehicle while preventing this interference.
  • FIG. 1 is a plan view of a part of a traveling vehicle system according to an embodiment of the present invention.
  • FIG. 2 is a sequence diagram for illustrating reverse travel control in the traveling vehicle system of FIG.
  • FIG. 3 is a plan view for illustrating reverse travel control in the traveling vehicle system of FIG. 1.
  • FIG. 4 is a plan view for explaining reverse travel control in the traveling vehicle system of FIG. 1.
  • FIG. 5 is a plan view for explaining reverse travel control in the traveling vehicle system of FIG. 1.
  • the traveling vehicle system 1 includes a track 10, a plurality of traveling vehicles 20, and a controller 50.
  • the track 10 is laid near the ceiling of a semiconductor manufacturing factory equipped with a plurality of processing devices.
  • the traveling vehicle 20 is an OHT (Overhead Hoist Transfer) and travels along the track 10 while being suspended on the track 10.
  • OHT Overhead Hoist Transfer
  • the forward direction of the traveling vehicle 20 is determined.
  • the traveling vehicle 20 normally travels in one direction (forward direction) along the track 10 (forward travel). Further, the traveling vehicle 20 travels in a direction opposite to one direction along the track 10 (reverse traveling) when the backward traveling control described in the present embodiment is performed, for example.
  • the traveling vehicle 20 transports a FOUP (Front Opening Unified Pod) 90 containing a plurality of semiconductor wafers as a transported object to a load port provided in each processing apparatus.
  • the controller 50 communicates with each traveling vehicle 20 and controls the operation of each traveling vehicle 20.
  • FOUP Front Opening Unified Pod
  • downstream and upstream are based on the traveling direction when the traveling vehicle 20 travels forward along the track 10. The term is used.
  • the track 10 has a plurality of sections.
  • the track 10 has a branch point (a branch junction) where one section branches into a plurality of sections, and a junction (a branch junction) where a plurality of sections merge into one section.
  • the track 10 includes a portion constituted by sections 10a, 10b, 10c, 10d, and 10e.
  • the section 10a and the section 10b join the section 10c at the joining point 11a.
  • the section 10c and the section 10e join the section 10d at the joining point 11b.
  • the “predetermined section” refers to a section between adjacent junctions, a section between adjacent branch points, or between adjacent junctions and branch points on the track 10. It is a section.
  • the predetermined section S in FIG. 1 is a section 10c between adjacent junctions 11a and 11b.
  • orbit 10 shown in the figure is an example, Comprising: It is not limited to this.
  • the FOUP 90 is supplied to the load port 101 by the traveling vehicle 20, the semiconductor wafer accommodated in the FOUP 90 is taken into the processing apparatus 100. Then, the semiconductor wafer is stored in the FOUP 90 again after being subjected to a predetermined process in the processing apparatus 100. As a result, the FOUP 90 is in a state where it can be transported by the traveling vehicle 20.
  • the two processing apparatuses 100 are a processing apparatus 100A and a processing apparatus 100B arranged on the downstream side of the processing apparatus 100A.
  • a load port 101 provided in the processing apparatus 100A is a load port 101A.
  • a load port 101 provided in the processing apparatus 100B is a load port 101B.
  • the traveling vehicle 20 has a transfer mechanism for transferring the FOUP 90 to the load port 101.
  • the transfer mechanism includes, for example, a gripping part that grips the FOUP 90 and a lifting mechanism that lifts and lowers the gripping part.
  • the traveling vehicle 20 that has stopped at the position where the FOUP 90 can be transferred to the load port 101 can transfer the FOUP 90 to the load port 101 by operating the transfer mechanism.
  • the transfer of the FOUP 90 to the load port 101 includes a case where the FOUP 90 held (loaded) by the traveling vehicle 20 is supplied (unloaded) to the load port 101 and a case where the FOUP 90 placed on the load port 101 is transferred. And the case where the traveling vehicle 20 acquires (catch).
  • the controller 50 includes a transport controller 50A and a traveling vehicle controller 50B.
  • the transport controller 50A is a host controller for the traveling vehicle controller 50B.
  • the conveyance controller 50A communicates with a manufacturing controller (not shown) and the traveling vehicle controller 50B.
  • the manufacturing controller communicates with the processing apparatus 100 and transmits a transport request for transporting the FOUP 90 to the load controller 101 provided in the processing apparatus 100 to the transport controller 50A.
  • the traveling vehicle controller 50B sends a transport corresponding to the transport request to any traveling vehicle 20 located in a predetermined jurisdiction area on the track 10. Assign a command.
  • the jurisdiction area of the traveling vehicle controller 50B in FIG. 1 includes sections 10a, 10b, 10c, 10d, and 10e.
  • Each of the transport controller 50A, the traveling vehicle controller 50B, and the manufacturing controller is configured as a computer apparatus including, for example, a processor, a memory, a storage, and a communication device.
  • a processor executes predetermined software (program) read into a memory or the like, and controls reading and writing of data in the memory and storage, and communication between controllers by a communication device, thereby controlling each controller. The function is realized.
  • the following blocking control is performed at the junction and the branch point. That is, in the blocking control, blocking areas that prohibit entry of the traveling vehicle 20 are set in advance at the junction and the branch point.
  • traveling vehicle 20 travels along track 10 and reaches a predetermined distance to the junction or branch point where the blocking area is set, it transmits a blocking area passage permission request to traveling vehicle controller 50B.
  • the traveling vehicle controller 50B When the traveling vehicle controller 50B receives the passage permission request from the traveling vehicle 20 and does not permit the other traveling vehicle 20 to pass through the blocking area, the traveling vehicle controller 50B transmits the passage permission request to the traveling vehicle 20 that has transmitted the passage permission request. It is determined that the passage of the blocking area is permitted, and the passage permission of the blocking area is transmitted to the traveling vehicle 20. The said traveling vehicle 20 will pass the said blocking area, if the passage permission of the said blocking area is received from the traveling vehicle controller 50B.
  • the traveling vehicle controller 50B receives the passage permission request from the traveling vehicle 20
  • the traveling vehicle controller 50B has already permitted the other traveling vehicle 20 to pass through the blocking area, and has transmitted the passage permission request. It is determined that the passage of the blocking area is not permitted to 20 and the passage permission of the blocking area is not transmitted to the traveling vehicle 20.
  • the traveling vehicle 20 does not receive the passage permission of the blocking area from the traveling vehicle controller 50B
  • the traveling vehicle 20 stops on the upstream side of the blocking area and receives the passage permission of the blocking area from the traveling vehicle controller 50B. stand by.
  • the traveling vehicle controller 50B transmits passage permission through the blocking area to the traveling vehicle 20 that has transmitted the passage permission request. To do.
  • the traveling vehicle 20 receives permission to pass through the blocking area from the traveling vehicle controller 50B, the traveling vehicle 20 starts traveling again along the track 10 and passes through the blocking area.
  • reverse traveling control performed in the following situation will be described. That is, as shown in FIG. 1, there are a first traveling vehicle 20A, a second traveling vehicle 20B, a third traveling vehicle 20C, and a fourth traveling vehicle 20D as the traveling vehicles 20 on the track 10.
  • the first traveling vehicle 20A is located in a predetermined section S (section 10c) of the track 10.
  • the first traveling vehicle 20A holds the FOUP 90 and stops at a position where the FOUP 90 can be transferred to the load port 101B provided in the processing apparatus 100B. This position is the current position P of the first traveling vehicle 20A.
  • the second traveling vehicle 20B and the third traveling vehicle 20C are traveling forward on the downstream side of the junction 11a in the predetermined section S and on the upstream side of the processing apparatus 100A.
  • the second traveling vehicle 20B is located in front of the third traveling vehicle 20C.
  • the second traveling vehicle 20B is located in the immediate vicinity of the rear of the first traveling vehicle 20A in the predetermined section S.
  • the fourth traveling vehicle 20D travels forward on the section 10a connected to the upstream side of the section 10c, which is the predetermined section S.
  • the first traveling vehicle 20A supplies the FOUP 90 to the load port 101B provided in the processing apparatus 100B, and becomes an empty carriage.
  • the traveling vehicle controller 50B assigns a transportation instruction for the FOUP 90 to the first traveling vehicle 20A.
  • the first traveling vehicle 20 ⁇ / b> A has a destination point T (here, the first traveling vehicle 20 ⁇ / b> A is within the predetermined section S).
  • a reverse travel permission request is transmitted to the traveling vehicle controller 50B (step S10).
  • the traveling vehicle controller 50B when the traveling vehicle controller 50B receives the reverse travel permission request from the first traveling vehicle 20A, the section from the current position P to the destination point T of the first traveling vehicle 20A. Is set (step S11).
  • the interference prevention section R is a section from the current position P of the first traveling vehicle 20A to the rear end 21 of the first traveling vehicle 20A in a state where the first traveling vehicle 20A is located at the destination point T. Is included.
  • the traveling vehicle controller 50B performs broadcast communication on all traveling vehicles 20 in the jurisdiction area (the first traveling vehicle 20A, the second traveling vehicle 20B, the third traveling vehicle 20C, and the fourth traveling vehicle 20D). Simultaneously, the stop request for notifying the interference prevention section R and stopping behind the interference prevention section R is transmitted (step S12). In FIG. 2, an arrow regarding broadcast communication for the first traveling vehicle 20 ⁇ / b> A is omitted.
  • the second traveling vehicle 20B determines whether the stop is necessary. Specifically, in determining whether or not each traveling vehicle 20 needs to be stopped, if the traveling vehicle 20 is located within the predetermined section S, it is determined that the stop is necessary (stop determination), and the predetermined section If it is not located within S, it is determined that a stop is not necessary (determination is not required). When each traveling vehicle 20 determines that a stop is necessary (stop determination), it starts a stop operation (deceleration) at an appropriate timing according to the situation.
  • step S13 since the second traveling vehicle 20B is located within the predetermined section S, it is determined that the stop is necessary (stop determination), and the stop operation is started (step S13). Similarly, since the third traveling vehicle 20C is located within the predetermined section S, it is determined that it is necessary to stop (stop determination), and a stop operation is started (step S14). On the other hand, since the fourth traveling vehicle 20D is not located within the predetermined section S, it is determined that it is not necessary to stop (determination is not necessary), and continues traveling forward (step S15).
  • a section in which another traveling vehicle 20 cannot enter the predetermined section S even if it continues traveling forward unless it orbits the track 10.
  • the traveling vehicle 20 is located in the predetermined section S even when traveling forward in the section 10d downstream of the section 10d or the section 10e joining the section 10c at the junction 11b downstream of the section 10c. Because it is not, stop is judged unnecessary.
  • the traveling vehicle controller 50B performs polling communication on all the traveling vehicles 20 (first traveling vehicle 20A, second traveling vehicle 20B, third traveling vehicle 20C, and fourth traveling vehicle 20D) in the jurisdiction area. Sequentially, a status request for a report (status report) regarding the current running status and the like is transmitted. In FIG. 2, an arrow related to polling communication for the first traveling vehicle 20A is omitted.
  • Each traveling vehicle 20 that has received the state request from the traveling vehicle controller 50B transmits a state report to the traveling vehicle controller 50B.
  • the state report of each traveling vehicle 20 includes information as to whether or not the traveling vehicle 20 can stop behind the interference prevention section R in the predetermined section S when the traveling vehicle 20 determines stop. included.
  • the state report includes information that the traveling vehicle 20 is scheduled to stop (can be stopped) when it is expected that the traveling vehicle 20 can stop behind the interference prevention section R in the predetermined section S.
  • information indicating that the traveling vehicle 20 is stopped is included.
  • the status report includes information that the stop is unnecessary when the traveling vehicle 20 determines that the stop is unnecessary.
  • the second traveling vehicle 20B is located at a position sufficiently separated from the interference prevention section R and can be stopped behind the interference prevention section R. For this reason, when the second traveling vehicle 20B receives the state request from the traveling vehicle controller 50B (step S16), the second traveling vehicle 20B includes information indicating that the second traveling vehicle 20B is scheduled to stop behind the interference prevention section R in the predetermined section S. The report is transmitted to the traveling vehicle controller 50B (step S17). Similarly, the third traveling vehicle 20 ⁇ / b> C is located at a point sufficiently separated from the interference prevention section R and can be stopped behind the interference prevention section R.
  • the third traveling vehicle 20C receives the state request from the traveling vehicle controller 50B (step S18)
  • the third traveling vehicle 20C includes information indicating that it is scheduled to stop behind the interference prevention section R in the predetermined section S.
  • the report is transmitted to the traveling vehicle controller 50B (step S19).
  • the fourth traveling vehicle 20D is not located in the predetermined section S and does not need to be stopped. Therefore, when the fourth traveling vehicle 20D receives the state request from the traveling vehicle controller 50B (step S20), the fourth traveling vehicle 20D transmits a state report including information indicating that the stop is unnecessary to the traveling vehicle controller 50B (step S21). .
  • the traveling vehicle controller 50B sends the first traveling vehicle 20A to the destination point T based on the status reports received from the second traveling vehicle 20B, the third traveling vehicle 20C, and the fourth traveling vehicle 20D. It is determined whether to allow reverse travel. Specifically, the traveling vehicle controller 50B receives status reports from all the traveling vehicles 20 except the first traveling vehicle 20A among the traveling vehicles 20 that have transmitted the status request, and stops at all of the status reports. When either information indicating that it is possible (during stoppage, scheduled stoppage) or information indicating that stoppage is not necessary is included, it is determined that reverse travel is permitted for the first traveling vehicle 20A (step S22). In this case, the traveling vehicle controller 50B transmits a reverse traveling permission to the destination point T to the first traveling vehicle 20A (step S23).
  • the traveling vehicle controller 50B performs the following control in the blocking control. That is, when the traveling vehicle controller 50B transmits the backward traveling permission to the destination point T to the first traveling vehicle 20A, another traveling is performed until the first traveling vehicle 20A completes the backward traveling to the destination point T. The vehicle 20 is not permitted to pass through the blocking area set at the junction point 11a that is the nearest junction point or branch point upstream of the destination point T. As a result, another traveling vehicle 20 (for example, the fourth traveling vehicle 20D) located upstream from the junction 11a receives the passage permission of the blocking area set at the junction 11a from the traveling vehicle controller 50B. I can't.
  • the traveling vehicle 20 (second traveling vehicle 20B and third traveling vehicle 20C) existing in the predetermined section S including the interference prevention section R is stopped or can be stopped behind the interference prevention section R. If it is confirmed, it is possible to suppress the interference between the first traveling vehicle 20A and the other traveling vehicle 20 even if the first traveling vehicle 20A is allowed to travel backward.
  • step S22 the traveling vehicle controller 50B does not receive a state report from at least one traveling vehicle 20 other than the first traveling vehicle 20A among the traveling vehicles 20 that transmitted the state request, or the received state report.
  • the traveling vehicle controller 50B does not transmit the backward traveling permission to the destination point T to the first traveling vehicle 20A.
  • step S22 the traveling vehicle controller 50B determines that any traveling vehicle 20 other than the first traveling vehicle 20A among the traveling vehicles 20 in the predetermined section S is stopped or scheduled to stop in the interference prevention section R. In addition, it is determined that the backward traveling to the destination point T is not permitted for the first traveling vehicle 20A, and the backward traveling permission to the destination point T is not transmitted to the first traveling vehicle 20A.
  • the first traveling vehicle 20A receives the permission to travel backward from the traveling vehicle controller 50B, the first traveling vehicle 20A travels backward to the destination point T as shown in FIGS. 2 and 4 (step S24).
  • the first traveling vehicle 20A does not travel backward to the destination point T but travels forward, for example, when the backward traveling permission is not received from the traveling vehicle controller 50B.
  • the reverse travel control in the traveling vehicle system 1 is completed.
  • the traveling vehicle controller 50B transmits the backward traveling permission to the destination point T to the first traveling vehicle 20A in the blocking control
  • the first traveling vehicle 20A travels backward to the destination point T.
  • the other traveling vehicle 20 is not permitted to pass through the blocking area set at the junction point 11a that is the nearest junction point or branch point upstream of the destination point T.
  • the traveling vehicle controller 50B transmits the passage permission of the blocking area set at the junction 11a to the other traveling vehicle 20, and then transmits the backward traveling permission to the destination point T to the first traveling vehicle 20A.
  • the other traveling vehicle 20 enters the predetermined section S through the junction 11a. Even in such a situation, in order to prevent the traveling vehicles 20 from interfering with each other more reliably, in the backward traveling control in the traveling vehicle system 1, the following control may be performed following step S24.
  • the operations of the second traveling vehicle 20B, the third traveling vehicle 20C, and the fourth traveling vehicle 20D while the first traveling vehicle 20A travels backward in step S24 will be described.
  • the second traveling vehicle 20B and the third traveling vehicle 20C that have been determined to stop in steps S13 and S14 are traveling while decelerating within the predetermined section S to stop behind the interference prevention section R during step S24.
  • the fourth traveling vehicle 20D that has made the determination that the stop is unnecessary in step S15 and has received permission to pass through the blocking area set at the junction 11a continues to travel forward without deceleration during step S24. is doing. As a result, the fourth traveling vehicle 20D enters the predetermined section S through the junction 11a.
  • the traveling vehicle controller 50B sets all traveling vehicles 20 in the jurisdiction area (first traveling vehicle 20A, second traveling vehicle 20B, third traveling).
  • the vehicle 20C and the fourth traveling vehicle 20D) are simultaneously notified by broadcast communication of the interference prevention section R and a stop request for stopping behind the interference prevention section R is transmitted (step S25).
  • the interference prevention section R notified to each traveling vehicle 20 is the same section as the interference prevention section R notified in step S12.
  • Each traveling vehicle 20 is notified again for the case where the vehicle 20 exists.
  • an arrow regarding broadcast communication for the first traveling vehicle 20 ⁇ / b> A is omitted.
  • the fourth traveling vehicle 20D determines again whether or not the stop is necessary. Since the fourth traveling vehicle 20D has entered the predetermined section S as a result of continuing the forward traveling, it is determined that it is necessary to stop (stop determination) and starts the stop operation (step S26).
  • the second traveling vehicle 20B and the third traveling vehicle 20C stop behind the interference prevention section R in the predetermined section S (steps S27 and S28).
  • the fourth traveling vehicle 20D stops behind the interference prevention section R in the predetermined section S (step S29).
  • the traveling vehicle controller 50B performs polling communication on all the traveling vehicles 20 (first traveling vehicle 20A, second traveling vehicle 20B, third traveling vehicle 20C, and fourth traveling vehicle 20D) in the jurisdiction area. Sequentially, a status request for a status report is transmitted. In FIG. 2, an arrow related to polling communication for the first traveling vehicle 20A is omitted.
  • the second traveling vehicle 20B has already stopped behind the interference prevention section R in the predetermined section S. Therefore, when the second traveling vehicle 20B receives the state request from the traveling vehicle controller 50B (step S30), the second traveling vehicle 20B transmits a state report including information indicating that the vehicle is stopped to the traveling vehicle controller 50B (step S31). . The traveling vehicle controller 50B confirms the stop of the second traveling vehicle 20B by receiving this state report from the second traveling vehicle 20B (step S32). Similarly, the third traveling vehicle 20 ⁇ / b> C has already stopped behind the interference prevention section R in the predetermined section S.
  • the third traveling vehicle 20C transmits a state report including information indicating that the vehicle is stopped to the traveling vehicle controller 50B (step S34). .
  • the traveling vehicle controller 50B receives this state report from the third traveling vehicle 20C, thereby confirming the stop of the third traveling vehicle 20C (step S35).
  • the fourth traveling vehicle 20D has already stopped behind the interference prevention section R in the predetermined section S. Therefore, when the fourth traveling vehicle 20D receives a state request from the traveling vehicle controller 50B (step S36), the fourth traveling vehicle 20D transmits a state report including information indicating that the vehicle is stopped to the traveling vehicle controller 50B (step S37). .
  • the traveling vehicle controller 50B receives this state report from the fourth traveling vehicle 20D, thereby confirming the stop of the fourth traveling vehicle 20D (step S38).
  • the first traveling vehicle 20A transmits an interference prevention section release request for releasing the setting of the interference prevention section R to the traveling vehicle controller 50B.
  • the traveling vehicle controller 50B receives the interference prevention section release request from the first traveling vehicle 20A, the traveling vehicle controller 50B cancels the setting of the interference prevention section R and broadcasts all the traveling vehicles 20 in the jurisdiction area simultaneously by broadcast communication. Notify that the setting of the interference prevention section R has been canceled.
  • the traveling vehicle 20 When each traveling vehicle 20 is notified from the traveling vehicle controller 50B that the setting of the interference prevention section R has been released, the traveling vehicle 20 responds to the situation of each traveling vehicle 20 at an appropriate timing according to the situation of each traveling vehicle 20. Perform the operation. For example, the first traveling vehicle 20A may start conveying the FOUP 90 placed on the load port 101A, and the second traveling vehicle 20B, the third traveling vehicle 20C, and the fourth traveling vehicle 20D make a stop request. Accordingly, the forward traveling stopped may be resumed.
  • the traveling vehicle 20 is not located in the predetermined section S, and therefore, when the traveling unnecessary travel is determined and the forward traveling is continued. Also, after entering the predetermined section S, it is possible to stop by making a stop determination. For this reason, it becomes possible to prevent interference between the traveling vehicles 20 more reliably.
  • the traveling vehicle controller 50B determines whether the traveling vehicle 20 in the predetermined section S except for the first traveling vehicle 20A is stopped or scheduled to stop behind the interference prevention section R. The reverse travel permission to the destination point T is transmitted to the one traveling vehicle 20A.
  • the traveling vehicle controller 50B is the first when the traveling vehicle 20 in the predetermined section S other than the first traveling vehicle 20A is stopped or scheduled to stop in the interference prevention section R.
  • the backward traveling permission to the destination point T is not transmitted to the traveling vehicle 20A.
  • the interference prevention section R only the section where entry of the other traveling vehicle 20 should be prohibited is set as the interference prevention section R, and the first traveling vehicle 20A travels backward in the interference prevention section R. Can be realized. Therefore, according to the current position P of the first traveling vehicle 20A at the timing when the first traveling vehicle 20A is going to travel backward, an interference prevention section R that prohibits the entry of another traveling vehicle 20 that follows is set. It is possible to achieve reverse travel of the first traveling vehicle 20A while preventing interference between the two vehicles.
  • the interference prevention section R includes the first traveling vehicle 20 ⁇ / b> A in a state where the first traveling vehicle 20 ⁇ / b> A is located at the destination point T from the current position P of the first traveling vehicle 20 ⁇ / b> A that transmitted the reverse travel permission request. This is a section up to the rear end 21. For this reason, since the shortest section which should prohibit entry of other traveling vehicles 20 can be set as interference prevention section R, smooth traveling of other traveling vehicles 20 is realizable.
  • the track 10 has a plurality of merge points and branch points including the merge points 11 a and 11 b, and the predetermined section S is a section between the merge points 11 a and 11 b adjacent to each other on the track 10. . For this reason, it is possible to suppress an increase in the number of other traveling vehicles 20 that are stopped to realize the backward traveling of the first traveling vehicle 20A.
  • the traveling vehicle controller 50B receives the state reports from all the traveling vehicles 20 except the first traveling vehicle 20A among the traveling vehicles 20 that transmitted the state request, and When all of these status reports include either information indicating that the vehicle can be stopped (stopped, scheduled to stop) or information indicating that it is not necessary to stop, the first traveling vehicle 20A moves backward to the destination point T. A travel permit is being sent. However, when the traveling vehicle controller 50B includes information indicating that the state report received from at least the second traveling vehicle 20B can stop behind the interference prevention section R (during stoppage, stoppage is planned), The reverse travel permission to the destination point T may be transmitted to the single traveling vehicle 20A.
  • the traveling vehicle controller 50B can stop the second traveling vehicle 20B located immediately behind the first traveling vehicle 20A in the predetermined section S behind the interference prevention section R (during and scheduled to stop).
  • the reverse travel permission to the destination point T may be transmitted to the first traveling vehicle 20A that transmitted the reverse travel permission request.
  • the traveling vehicle controller 50B does not receive a status report from at least one traveling vehicle 20 other than the first traveling vehicle 20A among the traveling vehicles 20 that transmitted the state request, or In the case where at least one of the received status reports does not include information indicating that the vehicle can be stopped (during or scheduled to stop) and information indicating that the vehicle does not need to be stopped, The reverse travel permission to the destination point T is not transmitted. However, the traveling vehicle controller 50B includes information that the second traveling vehicle 20B is not able to stop behind the interference prevention section R (during or is scheduled to stop) in the state report received from the second traveling vehicle 20B. In this case, the reverse travel permission to the destination point T may not be transmitted to the first traveling vehicle 20A.
  • the traveling vehicle controller 50B can stop the second traveling vehicle 20B located immediately behind the first traveling vehicle 20A in the predetermined section S behind the interference prevention section R (during and scheduled to stop). Otherwise, the reverse travel permission to the destination point T may not be transmitted to the first traveling vehicle 20A that transmitted the reverse travel permission request.
  • the predetermined section may not be a section between junctions or branch points adjacent to each other on the track 10 (that is, all of one section), for example, a part of one section It may be.
  • the current position P of the first traveling vehicle 20A is a position where the FOUP 90 can be transferred to the load port 101B provided in the processing apparatus 100B in the predetermined section S.
  • the current position P is It is not limited to such a position.
  • the current position P may be a parking point for the first traveling vehicle 20 ⁇ / b> A to stand by on the track 10.
  • the traveling vehicle controller 50B may have some or all of the functions of the transport controller 50A, and the transport controller 50A may have some or all of the functions of the traveling vehicle controller 50B. Also good. Alternatively, one controller may have the functions of the transport controller 50A and the traveling vehicle controller 50B.
  • each traveling vehicle 20 includes, for example, a distance measuring unit that measures a distance (an inter-vehicle distance) to another traveling vehicle 20 positioned in front of the own vehicle using an optical sensor or the like, and the distance measuring unit. And a braking unit that stops the traveling vehicle 20 when the measured inter-vehicle distance is equal to or less than a predetermined value. In this case, interference between the traveling vehicles 20 can be more reliably prevented.
  • the object to be conveyed that is transported by the traveling vehicle system 1 of one aspect of the present invention is not limited to the FOUP 90 in which a plurality of semiconductor wafers are accommodated, but other containers in which glass wafers, reticles, and the like are accommodated. There may be.
  • the traveling vehicle system 1 of one embodiment of the present invention is not limited to a semiconductor manufacturing factory, and can be applied to other facilities.
  • the OHT is exemplified as the traveling vehicle 20.
  • the traveling vehicle 20 is not limited to the OHT and may be any device that can travel along the track 10.
  • an appropriate section for prohibiting the entry of other following traveling vehicles is set to prevent the traveling vehicles from interfering with each other. It is possible to provide a traveling vehicle system that can realize reverse traveling.
  • SYMBOLS 1 ... Traveling vehicle system, 10 ... Track, 11a, 11b ... Junction (branch junction part), 20 ... Traveling vehicle, 20A ... 1st traveling vehicle, 20B ... 2nd traveling vehicle, 20C ... 3rd traveling vehicle, 20D ... 4th traveling vehicle, 21 ... rear end, 50 ... controller, 50A ... transport controller, 50B ... traveling vehicle controller, P ... current position, R ... interference prevention section, S ... predetermined section, T ... destination point.

Landscapes

  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

La présente invention concerne système de véhicule en déplacement qui est pourvu d'une pluralité de véhicules en déplacement et d'un dispositif de commande. Un premier véhicule en déplacement envoie au dispositif de commande une demande de permission de marche arrière lorsqu'il essaie d'effectuer une marche arrière vers un point de destination à l'arrière dans une section prescrite. Dans ce cas, une section de prévention d'interférence est définie, qui comprend une section à partir de la position actuelle du premier véhicule en déplacement jusqu'au point de destination, et lorsqu'un autre véhicule en déplacement positionné directement à l'arrière dans la section prescrite est à l'arrêt ou planifie de s'arrêter plus en arrière que la section de prévention d'interférence, une autorisation de marche arrière est envoyée au premier véhicule en déplacement, et lorsqu'il est à l'arrêt ou planifie de s'arrêter dans la section de prévention d'interférence, une autorisation de marche arrière n'est pas envoyée au premier véhicule en déplacement.
PCT/JP2017/040742 2016-12-14 2017-11-13 Système de véhicule en déplacement WO2018110178A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-242361 2016-12-14
JP2016242361A JP2020024476A (ja) 2016-12-14 2016-12-14 走行車システム

Publications (1)

Publication Number Publication Date
WO2018110178A1 true WO2018110178A1 (fr) 2018-06-21

Family

ID=62558681

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/040742 WO2018110178A1 (fr) 2016-12-14 2017-11-13 Système de véhicule en déplacement

Country Status (3)

Country Link
JP (1) JP2020024476A (fr)
TW (1) TW201826060A (fr)
WO (1) WO2018110178A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020235255A1 (fr) * 2019-05-22 2020-11-26
CN112650211A (zh) * 2019-10-11 2021-04-13 细美事有限公司 Oht车辆控制方法以及装置
JPWO2020049876A1 (ja) * 2018-09-05 2021-08-12 村田機械株式会社 走行車システム
US11390282B2 (en) 2020-02-07 2022-07-19 Honda Motor Co., Ltd. System and method for intersection communication
EP4056501A4 (fr) * 2019-11-07 2023-11-08 Murata Machinery, Ltd. Système de transport et système de transport
TWI828745B (zh) * 2018-09-04 2024-01-11 日商村田機械股份有限公司 搬送車系統
US11952024B2 (en) 2022-07-08 2024-04-09 Daifuku Co., Ltd. Transportation facility

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3767419B1 (fr) * 2018-03-15 2023-01-04 Murata Machinery, Ltd. Dispositif de commande de véhicule en déplacement et système de véhicule en déplacement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163803A (ja) * 1988-12-19 1990-06-25 Toshiba Corp 無人搬送車制御システム
JP2005306570A (ja) * 2004-04-23 2005-11-04 Murata Mach Ltd 搬送システム
JP2013020423A (ja) * 2011-07-11 2013-01-31 Murata Mach Ltd 有軌道台車システム
JP2016051221A (ja) * 2014-08-28 2016-04-11 村田機械株式会社 搬送車システム及び搬送車システムの制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163803A (ja) * 1988-12-19 1990-06-25 Toshiba Corp 無人搬送車制御システム
JP2005306570A (ja) * 2004-04-23 2005-11-04 Murata Mach Ltd 搬送システム
JP2013020423A (ja) * 2011-07-11 2013-01-31 Murata Mach Ltd 有軌道台車システム
JP2016051221A (ja) * 2014-08-28 2016-04-11 村田機械株式会社 搬送車システム及び搬送車システムの制御方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI828745B (zh) * 2018-09-04 2024-01-11 日商村田機械股份有限公司 搬送車系統
JPWO2020049876A1 (ja) * 2018-09-05 2021-08-12 村田機械株式会社 走行車システム
JPWO2020235255A1 (fr) * 2019-05-22 2020-11-26
WO2020235255A1 (fr) * 2019-05-22 2020-11-26 村田機械株式会社 Système de véhicules en déplacement et procédé de commande de véhicules en déplacement
CN113841099A (zh) * 2019-05-22 2021-12-24 村田机械株式会社 行驶车系统及行驶车的控制方法
JP7226537B2 (ja) 2019-05-22 2023-02-21 村田機械株式会社 走行車システム及び走行車の制御方法
TWI831970B (zh) * 2019-05-22 2024-02-11 日商村田機械股份有限公司 移行車系統及移行車之控制方法
CN113841099B (zh) * 2019-05-22 2024-04-26 村田机械株式会社 行驶车系统及行驶车的控制方法
CN112650211A (zh) * 2019-10-11 2021-04-13 细美事有限公司 Oht车辆控制方法以及装置
EP4056501A4 (fr) * 2019-11-07 2023-11-08 Murata Machinery, Ltd. Système de transport et système de transport
US11390282B2 (en) 2020-02-07 2022-07-19 Honda Motor Co., Ltd. System and method for intersection communication
US11952024B2 (en) 2022-07-08 2024-04-09 Daifuku Co., Ltd. Transportation facility

Also Published As

Publication number Publication date
JP2020024476A (ja) 2020-02-13
TW201826060A (zh) 2018-07-16

Similar Documents

Publication Publication Date Title
WO2018110178A1 (fr) Système de véhicule en déplacement
US11226637B2 (en) Traveling vehicle system, and control method for traveling vehicle system
JP6460260B2 (ja) 搬送システム及び搬送方法
WO2017029871A1 (fr) Système de transport
KR102586754B1 (ko) 반송차 시스템
KR20200116999A (ko) 반송 시스템
JP2019185499A (ja) 走行車システム及び走行車の制御方法
US20220073277A1 (en) Article Transport Facility
JP2005239314A (ja) 搬送車監視制御装置、搬送システム、及び搬送車監視制御方法
JP2005239315A (ja) 搬送車監視制御装置、無人搬送車、搬送システム、及び搬送車監視制御方法
WO2021241046A1 (fr) Système de chariots et procédé destiné à commander un chariot
WO2021241079A1 (fr) Système pour véhicule en mouvement et procédé de commande de véhicule en mouvement
JP5278736B2 (ja) 搬送車システム
US20240059497A1 (en) Transfer system and control method thereof
WO2023238533A1 (fr) Système de transport
JP2021189604A (ja) 台車システム、及び台車の制御方法
JP2024012942A (ja) 物品搬送設備
JPWO2020049876A1 (ja) 走行車システム
JP2000276230A (ja) 搬送システム
JP2005242540A (ja) 無人搬送車の走行制御方法および走行制御システム並びに無人搬送車

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17879856

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17879856

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP