WO2018041605A1 - Vakuumpumpen-rotor - Google Patents
Vakuumpumpen-rotor Download PDFInfo
- Publication number
- WO2018041605A1 WO2018041605A1 PCT/EP2017/070447 EP2017070447W WO2018041605A1 WO 2018041605 A1 WO2018041605 A1 WO 2018041605A1 EP 2017070447 W EP2017070447 W EP 2017070447W WO 2018041605 A1 WO2018041605 A1 WO 2018041605A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- shaft
- vacuum pump
- rotor
- pump rotor
- displacement
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C3/00—Rotary-piston machines or pumps, with non-parallel axes of movement of co-operating members, e.g. of screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/90—Improving properties of machine parts
- F04C2230/91—Coating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/20—Geometry of the rotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/02—Light metals
- F05C2201/021—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
- F05C2201/0448—Steel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/90—Alloys not otherwise provided for
- F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2251/00—Material properties
- F05C2251/04—Thermal properties
- F05C2251/042—Expansivity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2253/00—Other material characteristics; Treatment of material
- F05C2253/12—Coating
Definitions
- the invention relates to a vacuum pump rotor, in particular for screw pumps, claw pumps, Roots pumps and multi-stage claw and Roots pumps.
- Rotors are usually made of steel or cast iron.
- the rotor has a rotor shaft with one or more displacement elements, wherein the displacement elements are designed differently depending on the pump type.
- the rotor shaft and the displacement elements are in this case made in one piece from steel or cast iron. Due to the hardness of steel and cast iron machining the corresponding vacuum pump rotors, for example, for producing a helical groove in a rotor for a screw pump is complicated and expensive. In particular, the tooling costs are high.
- vacuum pump rotors are known for screw pumps, in which the shaft is made of steel and carries a displacement element made of aluminum.
- Vacuum pump rotors made of different materials represent a considerable manufacturing effort, since the two components must be joined together and also due to the high temperatures occurring in vacuum pumps, due to the different thermal expansion coefficients of the materials, a precise cooling must be ensured.
- the object of the invention is to provide a vacuum pump rotor which has high reliability at a low manufacturing cost.
- the vacuum pump rotor has a rotor shaft, on which at least two displacement elements are arranged.
- the displacement elements are, in particular, displacement elements for screw pumps, claw pumps, roots pumps or multistage claw or root pumps.
- the rotor shaft has at least one shaft end for the arrangement of bearing elements.
- at least two bearing elements are provided.
- the rotor shaft may have two shaft ends, so that a bearing element is arranged on each shaft end for two-sided mounting.
- the rotor shaft, the at least one displacement element and the shaft ends of the rotor shaft are made of aluminum or an aluminum alloy. According to the invention thus the entire vacuum pump rotor is made of the same material. As a result, the manufacturing cost can be significantly reduced, since the machining of aluminum and aluminum alloys is cheaper. In particular, the tooling costs are lower.
- the rotor shaft is integrally formed with at least one of the displacement elements. Furthermore, it is preferred that all displacement elements are formed integrally with the rotor shaft. This has the advantage that no joining of the components is required. Furthermore, it is preferred that the at least one shaft end is formed integrally with the rotor shaft.
- the at least one displacement element and the at least one shaft end aluminum or an aluminum alloy used, the one
- the aluminum alloy it is preferable to use AISi9Mg or AISil7Cu4Mg. It is particularly preferred that the alloy has a high silicon content of preferably at least 15%.
- wear-critical surfaces of the at least one displacement element and / or the rotor shaft and / or the shaft ends are provided with a wear-reducing coating.
- a wear-reducing coating may be, for example, an anodic coating.
- the coating may be chromic or sulfuric, anodized or hard-coated.
- a bush made of a harder material, in particular steel or ceramic is arranged on the at least one shaft end.
- the bushing can be pressed onto the at least one shaft end or cast into the shaft end during production.
- a surface of the at least one displacement element is provided with a runflat coating.
- a runflat coating for example based on PTFE or molybdenum sulfide, has the advantage that when two contact displacement elements come into contact, the coating runs in, and so far seizing of the vacuum-pump rotors is avoided.
- the gap height i. E. the gap between the compression causing components, such as between two screw rotors or between a rotor outside and inside reduced.
- FIG. 1 shows a schematic side view of a screw rotor.
- a vacuum pump rotor of a screw pump has a rotor shaft 10, on which in the illustrated embodiment, two displacement elements 12, 14 are arranged.
- the rotor shaft 10 and the Displacement elements 12, 14 integrally formed.
- the two displacement elements 12, 14 have a different pitch, wherein the greater slope displacement element 14 is connected to the inlet of the vacuum pump on the left side in the figure and the lower slope having displacement element 12 on the right in FIG Side is connected to the outlet of the vacuum pump.
- the rotor shaft 10 has in the illustrated embodiment, two shaft ends 16, since it is in the illustrated embodiment, a pump pump mounted on two sides pump.
- the two shaft ends 16 serve to receive bearing elements.
- the two shaft ends 16 may additionally be provided with a socket, not shown, which is made in particular of a harder material.
- the bushing can be pressed onto the shaft ends or cast into them.
- the illustrated vacuum pump rotor is preferably formed in one piece, so that the shaft 10 including the shaft ends 16 and the two displacement elements 12, 14 is made of a material, in particular aluminum or an aluminum alloy.
- the illustrated vacuum pump rotor has a shaft extension 18. This serves, for example, to receive a toothed wheel via which the rotor shaft 10 is driven or optionally synchronized with the second screw pump rotor.
- the projection 18 is formed integrally with the shaft 10 and made of the same material.
- Surfaces 20, 22 of the displacement member 14 may be provided with a wear reducing coating and / or a runflat coating. This is also the case with a surface 24 of the Rotor shaft 10 possible. Of course, corresponding coatings can also be provided in the displacement element 12.
- shaft end ends 16 are not provided with a bushing, it is advantageous to provide the surface 26 of the shaft ends 16 with a wear-reducing coating.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019511567A JP2019525075A (ja) | 2016-08-30 | 2017-08-11 | 真空ポンプロータ |
KR1020197005582A KR20190039963A (ko) | 2016-08-30 | 2017-08-11 | 진공 펌프 로터 |
CA3033552A CA3033552A1 (en) | 2016-08-30 | 2017-08-11 | Vacuum pump rotor |
BR112019002760A BR112019002760A2 (pt) | 2016-08-30 | 2017-08-11 | rotor de bomba de vácuo |
US16/326,041 US20190264686A1 (en) | 2016-08-30 | 2017-08-11 | Vacuum-pump rotor |
CN201780052594.2A CN109690088A (zh) | 2016-08-30 | 2017-08-11 | 真空泵转子 |
EP17757490.2A EP3507499A1 (de) | 2016-08-30 | 2017-08-11 | Vakuumpumpen-rotor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202016005207.2 | 2016-08-30 | ||
DE202016005207.2U DE202016005207U1 (de) | 2016-08-30 | 2016-08-30 | Vakuumpumpen-Rotor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018041605A1 true WO2018041605A1 (de) | 2018-03-08 |
Family
ID=59699670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2017/070447 WO2018041605A1 (de) | 2016-08-30 | 2017-08-11 | Vakuumpumpen-rotor |
Country Status (9)
Country | Link |
---|---|
US (1) | US20190264686A1 (de) |
EP (1) | EP3507499A1 (de) |
JP (1) | JP2019525075A (de) |
KR (1) | KR20190039963A (de) |
CN (1) | CN109690088A (de) |
BR (1) | BR112019002760A2 (de) |
CA (1) | CA3033552A1 (de) |
DE (1) | DE202016005207U1 (de) |
WO (1) | WO2018041605A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202018000178U1 (de) * | 2018-01-12 | 2019-04-15 | Leybold Gmbh | Kompressor |
DE102018210922A1 (de) * | 2018-07-03 | 2020-01-09 | Leybold Gmbh | Zwei- oder Mehrwellen-Vakuumpumpe |
CN114607609A (zh) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | 一种新组合形式的干式真空泵 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1986005555A1 (en) * | 1985-03-15 | 1986-09-25 | Svenska Rotor Maskiner Ab | A screw-type rotary machine having at least one rotor made of a plastics material |
JP2001032790A (ja) * | 1999-07-23 | 2001-02-06 | Shimadzu Corp | ターボ分子ポンプ |
EP2096317A1 (de) * | 2008-02-27 | 2009-09-02 | VARIAN S.p.A. | Verfahren zur Herstellung der Rotoranordnung einer Rotationsvakuumpumpe |
EP2615307A1 (de) * | 2012-01-12 | 2013-07-17 | Vacuubrand Gmbh + Co Kg | Schraubenrotor für eine Schraubenvakuumpumpe |
JP2014173467A (ja) * | 2013-03-07 | 2014-09-22 | Shimadzu Corp | 真空ポンプ |
EP2896837A2 (de) * | 2014-01-21 | 2015-07-22 | Pfeiffer Vacuum Gmbh | Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19626515A1 (de) * | 1996-07-02 | 1998-01-08 | Ghh Borsig Turbomaschinen Gmbh | Sperrflüssigkeitsabdichtung eines ölfreien Schraubenverdichters |
SE505358C2 (sv) * | 1996-10-22 | 1997-08-11 | Lysholm Techn Ab | Axeltapp för lättmetalrotor |
DE20013338U1 (de) * | 2000-08-02 | 2000-12-28 | Werner Rietschle GmbH + Co. KG, 79650 Schopfheim | Verdichter |
CN1399074A (zh) * | 2001-07-27 | 2003-02-26 | 大晃机械工业株式会社 | 干式真空泵 |
JP4218756B2 (ja) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | 真空排気装置 |
CN103436744B (zh) * | 2013-07-16 | 2015-11-25 | 安徽省天马泵阀集团有限公司 | 强度高、耐热性好的铝合金泵轴材料及其制造方法 |
-
2016
- 2016-08-30 DE DE202016005207.2U patent/DE202016005207U1/de not_active Expired - Lifetime
-
2017
- 2017-08-11 CA CA3033552A patent/CA3033552A1/en not_active Abandoned
- 2017-08-11 US US16/326,041 patent/US20190264686A1/en not_active Abandoned
- 2017-08-11 KR KR1020197005582A patent/KR20190039963A/ko not_active Application Discontinuation
- 2017-08-11 BR BR112019002760A patent/BR112019002760A2/pt not_active Application Discontinuation
- 2017-08-11 WO PCT/EP2017/070447 patent/WO2018041605A1/de unknown
- 2017-08-11 JP JP2019511567A patent/JP2019525075A/ja not_active Withdrawn
- 2017-08-11 EP EP17757490.2A patent/EP3507499A1/de not_active Withdrawn
- 2017-08-11 CN CN201780052594.2A patent/CN109690088A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1986005555A1 (en) * | 1985-03-15 | 1986-09-25 | Svenska Rotor Maskiner Ab | A screw-type rotary machine having at least one rotor made of a plastics material |
JP2001032790A (ja) * | 1999-07-23 | 2001-02-06 | Shimadzu Corp | ターボ分子ポンプ |
EP2096317A1 (de) * | 2008-02-27 | 2009-09-02 | VARIAN S.p.A. | Verfahren zur Herstellung der Rotoranordnung einer Rotationsvakuumpumpe |
EP2615307A1 (de) * | 2012-01-12 | 2013-07-17 | Vacuubrand Gmbh + Co Kg | Schraubenrotor für eine Schraubenvakuumpumpe |
JP2014173467A (ja) * | 2013-03-07 | 2014-09-22 | Shimadzu Corp | 真空ポンプ |
EP2896837A2 (de) * | 2014-01-21 | 2015-07-22 | Pfeiffer Vacuum Gmbh | Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
BR112019002760A2 (pt) | 2019-05-14 |
KR20190039963A (ko) | 2019-04-16 |
CN109690088A (zh) | 2019-04-26 |
CA3033552A1 (en) | 2018-03-08 |
EP3507499A1 (de) | 2019-07-10 |
US20190264686A1 (en) | 2019-08-29 |
DE202016005207U1 (de) | 2017-12-01 |
JP2019525075A (ja) | 2019-09-05 |
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