CN109690088A - 真空泵转子 - Google Patents

真空泵转子 Download PDF

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Publication number
CN109690088A
CN109690088A CN201780052594.2A CN201780052594A CN109690088A CN 109690088 A CN109690088 A CN 109690088A CN 201780052594 A CN201780052594 A CN 201780052594A CN 109690088 A CN109690088 A CN 109690088A
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Prior art keywords
vacuum pump
pump rotor
armature spindle
rotor according
shaft end
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托马斯·德赖费特
沃尔夫冈·吉伯曼
罗兰德·穆勒
德克·席勒
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Leybold GmbH
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Leybold GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C3/00—Rotary-piston machines or pumps, with non-parallel axes of movement of co-operating members, e.g. of screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/20—Geometry of the rotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0448—Steel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for
    • F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties
    • F05C2251/042—Expansivity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/12—Coating

Abstract

一种真空泵转子，包括设置在转子轴(10)上的至少一个位移元件(12、14)。转子轴(10)包括至少一个轴端(16)以便在其上设置轴承元件。转子元件(10)、所述至少一个位移元件(12、14)和所述至少一个轴端(16)由铝或铝合金制成。

Description

真空泵转子
【技术领域】
本发明涉及一种真空泵转子，特别是涉及用于螺杆泵、爪式泵、罗茨泵以及多级爪式罗茨泵的真空泵转子。
【背景技术】
转子通常由钢或铸铁制成。这里，转子包括具有一个或多个位移元件的转子轴，其中，位移元件根据泵型具有不同配置。这里，转子轴和位移元件由钢或铸铁一体形成。由于刚和铸铁的硬度，例如，对相应的真空泵转子的加工以在用于螺杆泵的转子上产生螺旋槽是复杂的且昂贵的。特别是，会涉及到高加工成本。
进一步地，用于螺杆泵的真空泵转子是公知的，其中轴由钢制成并且支撑由铝制成的位移元件。由于这两个部件必须接合在一起，而且由于发生在真空泵处的高温，由不同材料制成的真空泵转子涉及相当大的制造工作。由于材料的不同热膨胀系数，必须确保精确的冷却。
【发明内容】
本发明的目的在于提供一种可靠性高且制造成本低的真空泵转子。
根据本发明，该目的利用根据权利要求1的真空泵转子来实现。
根据本发明的真空泵转子包括转子轴，在该转子轴上设置有至少两个位移元件。取决于转子类型，位移元件特别是用于螺杆泵、爪式泵、罗茨泵或多级爪式和罗茨泵的位移元件。转子轴包括至少一个轴端以便在其上设置轴承元件。当转子轴只配置有一个轴端时，这些转子是悬式真空泵转子。在悬式真空泵转子的情况下，设置至少两个轴承元件。同样，转子轴可以包括两个轴端，使得在每个轴端处设置轴承元件以用于两侧安装。
根据本发明，转子轴、至少一个位移元件和转子轴的轴端均由铝或铝合金制成。根据本发明，因此，整个真空泵转子由一种相同的材料制成。因此，由于铝和铝合金的加工成本较低，可以显著地降低制造成本。特别是，加工成本较低。
即使位移元件是单独地制造的并与转子轴连接在一起，但由于这两个部件的膨胀系数相同，所以这在制造过程中更容易执行。因此，在温度变化的情况下没有断开连接的风险。即使单独部件由不同的铝合金制成，但由于两个膨胀系数仅仅略有不同，因此这也是适用的。
根据特别优选的实施例，转子轴与至少一个位移元件一体形成。此外，优选地，所有位移元件均与转子轴一体形成。这样做的优势在于不需要将部件接合在一起。此外，优选地，该至少一个轴端与转子轴一体形成。
优选地，对于转子、所述至少一个位移元件和所述至少一个轴端而言，所使用的铝或铝合金的热膨胀系数小于或等于21×10-6/K，并且优选地小于或等于18×10-6/K。作为铝合金，优选地使用AlSi9Mg或AlSi17Cu4Mg。特别优选地，合金具有优选地至少15％的高硅含量。
根据另一优选实施例，特别地，所述至少一个位移元件和/或转子轴和/或轴端的磨损临界表面设置有减磨涂层。例如，这可以是阳极涂层。该涂层可以是含铬或含硫的、阳极化的或硬涂覆的。
根据另一优选实施例，在所述至少一个轴端处设置有由较硬的材料(特别是钢或陶瓷材料)制成的衬套。因此，特别是在很容易磨损的区域内，减少了磨损。
在制造期间，衬套可以被压到所述至少一个轴端上或者被模制到轴端中。
根据另一优选实施例，所述至少一个位移元件的表面设置有应急操作涂层。这里，优选地，只有位移元件的表面设置有这种涂层，该涂层可以在操作期间与另一个位移元件接触。例如，提供基于PTFE或亚硫酸钼的应急操作涂层的优势在于：当两个位移元件彼此接触时，涂层收缩，并且从而防止真空泵转子卡死。进一步地，提供这种涂层减小了间隙高度，即引起压缩的部件之间的间隙，诸如两个螺杆转子之间的间隙或转子的外部与内部之间的间隙。由于间隙高度减小，真空泵的抽吸能力和可实现的最终压力增加。降低了温度和功耗。
【附图说明】
下面将参照附图基于优选实施例对本发明进行详细地解释，在附图中：
图1示出了螺杆转子的侧面示意图。
【具体实施方式】
下面基于示例性螺杆转子对本发明进行描述，其中，本发明也特别适用于爪式泵、罗茨泵和多级爪式和罗茨泵的转子。
在图示的示例性实施例中，螺杆泵的真空泵转子包括转子轴10，在该转子轴10上设置有两个位移元件12、14。特别地，转子轴10与位移元件12、14一体形成。在图示的示例性实施例中，这两个位移元件12、14具有不同的螺距，其中，具有较大螺距的位移元件14连接至真空泵的在图中左手侧上的入口，而具有较小螺距的位移元件12连接至真空泵的在图中右手侧上的出口。
由于在图示的示例性实施例中是安装在两侧的真空泵转子，因此在图示的示例性实施中，转子轴10包括两个轴端16。这两个轴端16用于容纳轴承元件。此外，这两个轴端16可以设置有衬套(未示出)，该衬套特别是由较硬的材料制成。衬套可以被压到轴端上或被模制到轴端中。
图示的真空泵转子优选地形成为单件，使得包括轴端16和两个位移元件12、14的轴10由一种材料制成，特别是由铝或铝合金制成。
进一步地，图示的真空泵转子包括轴突起18。轴突起18用于容纳齿轮，例如，经由该齿轮驱动转子轴10或者可以使转子轴10与第二螺杆泵转子同步。优选地，突起18也与轴10一体形成并且由相同材料制成。
位移元件14的表面20、22可以设置有减磨涂层和/或赋予应急操作性能的涂层。这在转子轴10的表面24上也是可能的。当然，也可以在位移元件12上设置对应的涂层。
如果轴端16未设置有衬套，那么，优选地，向轴端16的表面26提供减磨涂层。

Claims (10)

1.一种真空泵转子，其包括：
设置在转子轴(10)上的至少一个位移元件(12、14)，
其中，所述转子轴(10)包括至少一个轴端(16)以便在其上设置轴承元件，
其特征在于
所述转子轴(10)、所述至少一个位移元件(12、14)和所述至少一个轴端(16)由铝或铝合金制成。
2.根据权利要求1所述的真空泵转子，其特征在于，在所述转子轴(10)上设置有至少两个位移元件(12、14)。
3.根据权利要求1或2所述的真空泵转子，其特征在于，所述转子轴(10)与至少一个所述位移元件(12、14)一体形成。
4.根据权利要求1所述的真空泵转子，其特征在于，所述转子轴(10)与所有位移元件(12、14)一体形成。
5.根据权利要求1至4中任一项所述的真空泵转子，其特征在于，所使用的铝或所使用的铝合金的热膨胀系数小于或等于21×10-6/K，并且优选地小于或等于18×10-6/K。
6.根据权利要求1至5中任一项所述的真空泵转子，其特征在于，所使用的铝合金包括优选地至少15％的高硅含量。
7.根据权利要求1至6中任一项所述的真空泵转子，其特征在于，所述至少一个位移元件(12、14)和/或所述转子轴(10)的表面(20、22、24、26)设置有减磨涂层。
8.根据权利要求1至7中任一项所述的真空泵转子，其特征在于，所述至少一个轴端(16)包括衬套，所述衬套由较硬的材料制成，特别是由钢或陶瓷材料制成。
9.根据权利要求8所述的真空泵转子，其特征在于，所述衬套被压到所述至少一个轴端(16)上或者被模制到所述至少一个轴端(16)中。
10.根据权利要求1至9中任一项所述的真空泵转子，其特征在于，至少一个所述位移元件(12、14)的表面(20、22、24、26)，并且特别地所有位移元件(12、14)的表面(20、22、24、26)设置有应急操作涂层。
CN201780052594.2A 2016-08-30 2017-08-11 真空泵转子 Pending CN109690088A (zh)

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PCT/EP2017/070447 WO2018041605A1 (de) 2016-08-30 2017-08-11 Vakuumpumpen-rotor

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