TWI489043B - 真空幫浦 - Google Patents

真空幫浦 Download PDF

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Publication number
TWI489043B
TWI489043B TW099110635A TW99110635A TWI489043B TW I489043 B TWI489043 B TW I489043B TW 099110635 A TW099110635 A TW 099110635A TW 99110635 A TW99110635 A TW 99110635A TW I489043 B TWI489043 B TW I489043B
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pumping
section
corrosion
stage
vacuum pump
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TW099110635A
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TW201102518A (en
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Emmanuel Uzoma Okoroafor
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Edwards Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00Fluid
    • F04C2210/10Fluid working
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • F04C2220/12Dry running
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/30Use in a chemical vapor deposition [CVD] process or in a similar process
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00Metals
    • F05C2201/04Heavy metals
    • F05C2201/0433Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436Iron
    • F05C2201/0439Cast iron
    • F05C2201/0442Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

真空幫浦
本發明係關於一種真空幫浦,且特定言之本發明係關於一種適於泵送腐蝕性流體之真空幫浦。
圖7中顯示一已知真空幫浦50,其包括一泵送機構52。該泵送機構包括複數個泵送級54,其用於沿著高真空下之流體之一入口58與低真空下之流體之一出口60之間之一流體流徑56泵送流體至大氣壓力。顯示有五個泵送級54。一馬達62驅動該等泵送級54之每一者中的諸轉子R使之相對於諸定子S旋轉。
若被泵送的流體包括腐蝕劑,諸如氟,則造成對該泵送機構52之腐蝕。經時,腐蝕造成在該泵送機構之組件之表面上之沈積物之積累,其造成該等泵送級54之該等轉子R與該等定子S之間的運轉間隙之減少。在該幫浦經過許多小時之持續操作之後,腐蝕可使該等泵送級之該等轉子與定子接觸而造成幫浦故障。
藉由用耐腐蝕材料製造泵送機構可減少真空幫浦中之腐蝕,但通常此等材料係昂貴的。
本發明提供一種用於泵送腐蝕性流體之真空幫浦,該幫浦包括:一泵送機構,其包括沿著高真空下之流體之一入口與低真空下之流體之一出口之間之一流體流徑之複數個泵送級,且其中在該流徑之一第一區段處之該泵送機構材 料相較於在該第一區段下游之該流徑之一第二區段處之該泵送機構材料較不耐腐蝕。
在隨附請求項中定義本發明之其他較佳態樣及/或任選態樣。
為了充分瞭解本發明,現將參考隨附圖式描述僅作為實例給出之本發明之一實施例。
參考圖1,顯示用於泵送腐蝕性流體之一多級真空幫浦10。一泵送機構12包括用於沿著高真空下之流體之一入口18與低真空下之流體之一出口20之間之一流體流徑16泵送流體至大氣壓力之複數個泵送級14。在此實例中顯示有五個泵送級14。一馬達22驅動該等泵送級14之每一者中的一轉子R使之相對於一定子S旋轉。
為達成本發明,執行圖7中顯示的先前技術幫浦之一分析且圖2顯示一圖表,其中經時(在此實例中為10,000小時)腐蝕積累係相對於該先前技術幫浦之幫浦參考溫度而繪製。在該圖表中,一第一線顯示在沿著該流徑56之一中間泵送級之轉子及定子之諸面處之積累,且一第二線顯示在沿著該流徑56之一最終泵送級之轉子及定子之該等面處之積累。在此實例中,該中間泵送級係第3級。腐蝕積累係以微米量測而溫度係以攝氏度量測。在該圖表中使用的該溫度係在該最終泵送級處取得的一幫浦參考溫度。應意識到該中間泵送級之溫度小於在該圖表中顯示的該溫度但為了簡潔並未顯示。在操作期間該幫浦參考溫度增加且增加 視許多因素而定,諸如所泵送之流體類型及該幫浦所作的功。
在圖7中,製成該泵送機構之材料係相對不耐腐蝕的。此一材料之一實例係SG鐵。由圖2將可見的是最終級之腐蝕積累遠大於中間泵送級之腐蝕積累,尤其當幫浦參考溫度在200℃時。在此參考溫度下,在該最終級處之腐蝕積累恰低於400μm,而在該中間級處,積累僅恰高於50μm。
圖3顯示如圖2所示之一等效圖表,除了在此分析中製成該幫浦之材料係相對耐腐蝕的。此一材料之一實例係富鎳SG鐵。在圖3中,在中間泵送級及最終泵送級兩者處之腐蝕積累均減少,但在該最終泵送級處之積累已減少大約300μm至恰低於100μm而在該中間泵送級處之積累僅已減少大約30μm至大約20μm。
當考慮圖7中顯示的幫浦時,因為通常在沿著該流徑自一泵送級至下一泵送級增加之壓縮比下,流體由各個泵送級54壓縮,所以沿著該流徑56之流體之壓力自該入口58至該出口60增加。流體及該泵送機構之溫度亦沿著該流徑增加。
因此,若被泵送的流體包括腐蝕劑,諸如氟,則當溫度及壓力增加時對該泵送機構52造成之腐蝕量沿著該流徑56增加。增加的壓力增加可用於腐蝕該泵送機構之腐蝕性分子的量且增加的溫度增加腐蝕作用。因此,腐蝕積累在該最終泵送級處大於在該中間泵送級處。因此,幫浦故障因 在其中積累最大之該泵送機構之該最終級處之運轉間隙之減少而發生。雖然如圖3所示可增加耐腐蝕性,但幫浦故障通常發生於該泵送機構之該最終級處。
在圖1顯示的該幫浦中,該泵送機構包括一第一區段24及一第二區段26。該第二區段26係在該第一區段24下游。在操作期間,該下游區段26之溫度及壓力大於該上游區段24之溫度及壓力。因此,當泵送腐蝕性流體時,區段24之腐蝕小於區段26之腐蝕。因為在區段24中該等轉子及定子上之腐蝕性沈積物之積累小於在區段26中之腐蝕性沈積物之積累,故該第一區段24相較於該第二區段26需要較不耐腐蝕。因此該第一區段24可由相較於該第二區段之材料相對不昂貴之材料製成。
該第一區段24及該第二區段26包括各自複數個泵送級14。該第一區段沿著該流體流徑鄰近於該第二區段。在圖1中,該第一區段包括第1泵送級、第2泵送級及第3泵送級而該第二區段26包括第4泵送級及第5泵送級。在另一配置中,該第一區段及該第二區段之一者可包括一單一泵送級。譬如,該第一區段可包括第1泵送級至第4泵送級而該第二區段可包括該第5泵送級。因為在該最終下游泵送級處溫度及壓力增加至最大程度,故可期望由耐腐蝕材料製造此級而級1至級4可由較不耐腐蝕之材料製造。另一選擇為,該第一區段可包括該第1泵送級且該第二區段可包括該第2泵送級至該第5泵送級。
圖4中顯示等效於圖2及圖3中顯示的該等圖表之一圖 表,其繪製圖1中顯示的該幫浦之相對於幫浦參考溫度的腐蝕積累。圖4顯示在200℃下,在該泵送機構之該最終級處之積累已自如圖2所示之大約400μm減少至恰低於100μm,如同根據圖3之一耐腐蝕幫浦之情況。然而,在圖4中,在該中間(或第3)級處之腐蝕積累與圖2中顯示的一不耐腐蝕幫浦之腐蝕積累相同。在此點上,即使該中間級係由不耐腐蝕材料(例如SG鐵)製成且該最終級係由耐腐蝕材料(例如富鎳鐵)製成,但該中間級之腐蝕積累係大約50μm,其小於該最終級之腐蝕積累。因此,均由耐腐蝕材料製成一泵送機構之該第一區段及該第二區段兩者不可得到益處且如此做會不必要地增加一幫浦之成本。
對於該第一區段及該第二區段應選擇材料使得在該第一區段處之腐蝕沈積物之積累小於或等於在該第二區段處之腐蝕沈積物之積累。較佳地,該等泵送級之組件係由經選擇材料製造使得在腐蝕性氣體之泵送期間在各個級中之腐蝕沈積物之積累大體上係各級相等。以此方式,用於該等各種泵送級之材料可以一成本有效方式選擇同時保持可接受的耐腐蝕性。在圖1中,該第二區段26之各個泵送級14之該定子R及該轉子S係由富鎳鐵製成,而該第一區段24之各個泵送級14之該轉子R及該定子S係由SG(球狀石墨)鐵製成。
圖5中顯示此等材料之實例,但根據需要可選擇其他材料。譬如,鎳可耐受氟但若被泵送的流體含有其他腐蝕劑,則將期望選擇一種適當的耐腐蝕材料。此外,該泵送 機構之該第一區段可由不同於SG鐵之材料製成。
若該幫浦被用於泵送特別腐蝕性流體,則該第一區段可由譬如富鎳SG鐵之耐腐蝕材料製成,而該第二區段可由諸如鑄造不銹鋼或鎳合金之更耐腐蝕材料製成。
圖5顯示SG鐵及富鎳SG鐵兩者之三個實例。較佳的是為第一區段及第二區段選擇具有類似線性膨脹係數之材料。在此點上,Ni-res D-5S係較佳耐腐蝕材料,因為其線性膨脹係數為12.6m/mK,此類似於SG鐵之係數12.5m/mK。
圖6中顯示富鎳SG鐵材料之組分,富鎳SG鐵材料展現良好耐腐蝕性質以及在高溫條件下之良好強度及硬度。在此一材料中,將可見的是鎳含量相對高並在24重量%與32重量%之間。
相同材料或類似材料較佳用於各個區段中之該轉子R及該定子S以避免與具有不同熱膨脹係數之組件相關聯的問題。
圖1中以簡化形式顯示該真空幫浦10。該真空幫浦可包括爪式泵送機構或魯式泵送機構或其他類型乾式泵送機構,尤其其中該泵送機構之組件之間之運轉間隙需要為小以增加效能。
10‧‧‧多級真空幫浦
12‧‧‧泵送機構
14‧‧‧泵送級
16‧‧‧流體流徑
18‧‧‧入口
20‧‧‧出口
22‧‧‧馬達
24‧‧‧第一區段
26‧‧‧第二區段
50‧‧‧已知真空幫浦
52‧‧‧泵送機構
54‧‧‧泵送級
56‧‧‧流體流徑
58‧‧‧入口
60‧‧‧出口
62‧‧‧馬達
圖1顯示穿過一真空幫浦之一簡化截面圖;圖2係顯示具有由相對不耐腐蝕之材料製成的一泵送機構之一幫浦之經時腐蝕積累相對於幫浦參考溫度之一圖表; 圖3係顯示具有由相對耐腐蝕之材料製成的一泵送機構之一幫浦之經時腐蝕積累相對於幫浦參考溫度之一圖表;圖4係顯示具有由相對不耐腐蝕之材料及相對耐腐蝕之材料製成的一泵送機構之一幫浦之經時腐蝕積累相對於幫浦參考溫度之一圖表;圖5係顯示耐腐蝕材料及不耐腐蝕材料之性質之一表;圖6係顯示耐腐蝕材料之組分之一實例之一表;及圖7係穿過一先前技術真空幫浦之一簡化截面圖。
10‧‧‧多級真空幫浦
12‧‧‧泵送機構
14‧‧‧泵送級
16‧‧‧流體流徑
18‧‧‧入口
20‧‧‧出口
22‧‧‧馬達
24‧‧‧第一區段
26‧‧‧第二區段

Claims (7)

  1. 一種用於泵送腐蝕性流體之乾式真空幫浦(10),該幫浦包括:一乾式泵送機構(12),其包括沿著高真空下之流體之一入口(18)與低真空下之流體之一出口(20)之間之一流體流徑(16)之複數個泵送級(14),該等泵送級(14)的每一者包含一定子(S)及一轉子(R),其中該等泵送級包含一魯式泵送機構或一爪式泵送機構,其特徵在於在該流徑之一第一區段(24)處之該泵送機構(12)之材料相較於在該第一區段下游之該流徑之一第二區段(26)處之該泵送機構之材料較不耐腐蝕。
  2. 如請求項1之真空幫浦,其中該第一區段及該第二區段之各自材料係使得在該第一區段處之腐蝕性沈積物之積累小於或等於在該第二區段處之腐蝕性沈積物之積累。
  3. 如請求項1或2之真空幫浦,其中該第一區段及該第二區段係由各自複數個該等泵送級界定。
  4. 如請求項1或2之真空幫浦,其中該第一區段沿著該流體流徑鄰近於該第二區段。
  5. 如請求項1或2之真空幫浦,其中該第二區段之該泵送級或各個泵送級包括由富鎳鐵製成的組件。
  6. 如請求項1或2之真空幫浦,其中該第一區段之該泵送級或各個泵送級包括由球狀石墨鐵製成的組件。
  7. 如請求項1或2之真空幫浦,其中該等泵送級之組件係由經選擇材料製造使得在腐蝕性氣體之泵送期間在各個級中之腐蝕沈積物之積累大體上係各級相等。
TW099110635A 2009-04-29 2010-04-06 真空幫浦 TWI489043B (zh)

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JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
FR3051852B1 (fr) * 2016-05-24 2018-06-15 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes

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US20020131884A1 (en) * 1998-03-23 2002-09-19 Masaru Mito Dry vacuum pump
US6874989B2 (en) * 2002-09-10 2005-04-05 Kabushiki Kaisha Toyota Jidoshokki Vacuum pump
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WO2007132259A1 (en) * 2006-05-11 2007-11-22 Edwards Limited Vacuum pump

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GB0907298D0 (en) 2009-06-10
TW201102518A (en) 2011-01-16
WO2010125368A2 (en) 2010-11-04
WO2010125368A3 (en) 2010-12-23
KR20170063990A (ko) 2017-06-08
US20120045322A1 (en) 2012-02-23
BRPI1009368A2 (pt) 2016-03-08
JP5636042B2 (ja) 2014-12-03
EP2425137A2 (en) 2012-03-07
CN102414449A (zh) 2012-04-11
KR20120007014A (ko) 2012-01-19
CN102414449B (zh) 2015-12-16

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