WO2017204015A1 - Élément piézoélectrique stratifié, dispositif d'injection pourvu de celui-ci et système d'injection de carburant - Google Patents

Élément piézoélectrique stratifié, dispositif d'injection pourvu de celui-ci et système d'injection de carburant Download PDF

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Publication number
WO2017204015A1
WO2017204015A1 PCT/JP2017/018182 JP2017018182W WO2017204015A1 WO 2017204015 A1 WO2017204015 A1 WO 2017204015A1 JP 2017018182 W JP2017018182 W JP 2017018182W WO 2017204015 A1 WO2017204015 A1 WO 2017204015A1
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WIPO (PCT)
Prior art keywords
layer
piezoelectric element
laminated
injection
multilayer piezoelectric
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PCT/JP2017/018182
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English (en)
Japanese (ja)
Inventor
山元　堅
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京セラ株式会社
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Publication date
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Priority to JP2018519194A priority Critical patent/JP6619515B2/ja
Publication of WO2017204015A1 publication Critical patent/WO2017204015A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/20—Closing valves mechanically, e.g. arrangements of springs or weights or permanent magnets; Damping of valve lift
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present disclosure relates to a laminated piezoelectric element used as, for example, a piezoelectric driving element (piezoelectric actuator), a pressure sensor element, a piezoelectric circuit element, and the like, an injection apparatus including the same, and a fuel injection system.
  • a piezoelectric driving element piezoelectric actuator
  • a pressure sensor element a piezoelectric sensor
  • a piezoelectric circuit element a piezoelectric circuit element
  • a laminated piezoelectric element As a laminated piezoelectric element, a laminated body having an active portion in which piezoelectric layers and internal electrode layers are alternately laminated and an inactive portion in which piezoelectric layers are laminated, and a side surface of the laminated body are provided. What is provided with the coating layer is known.
  • the covering layer is provided for the purpose of suppressing migration and discharge between the internal electrode layers, for example.
  • the multilayer piezoelectric element of the present disclosure includes a multilayer body having an active portion in which piezoelectric layers and internal electrode layers are alternately stacked, and an inactive portion in which piezoelectric layers are stacked, and a side surface of the multilayer body.
  • a coating layer provided, and the coating layer has a two-layer structure including an inner first layer and an outer second layer, and the outer surface of the first layer has a plurality of convex portions. Or it has a some recessed part.
  • the injection device of the present disclosure includes a container having an injection hole and the multilayer piezoelectric element described above, and the injection hole is opened and closed by driving the multilayer piezoelectric element.
  • the fuel injection system of the present disclosure includes a common rail that stores high-pressure fuel, the above-described injection device that injects the high-pressure fuel stored in the common rail, a pressure pump that supplies the high-pressure fuel to the common rail, and the injection An injection control unit for supplying a drive signal to the apparatus.
  • FIG. 3 is a schematic longitudinal sectional view taken along line iii-iii of the multilayer piezoelectric element shown in FIG.
  • FIG. 3 is a schematic longitudinal sectional view taken along line iii-iii of the multilayer piezoelectric element shown in FIG.
  • It is a schematic longitudinal cross-sectional view of the other example of the multilayer piezoelectric element of this embodiment.
  • the coating layer forming material applied when the coating layer is formed on the side surface of the multilayer body is cured from the surface. Therefore, the surface of the coating layer has a hard and dense structure. Therefore, by forming the coating layer into a multilayer structure (formed in two steps), the coating layer can have a structure having a hard and dense structure, and this configuration further prevents discharge. Seems to be able to.
  • the laminated piezoelectric element described above is used, for example, by being fixed.
  • a hard and dense structure region exists in the coating layer along the stacking direction of the laminate, and the softness in the stacking direction is reduced.
  • a stress load is applied to the interface between the coating layer and the laminate, causing cracks, and discharging through the cracks may reduce the displacement of the multilayer piezoelectric element.
  • the present disclosure has been made in view of the above circumstances, and provides a multilayer piezoelectric element in which stress load on the interface between the coating layer and the multilayer body is suppressed and discharge is less likely to occur, an injection device including the multilayer piezoelectric element, and a fuel injection system The purpose is to do.
  • FIG. 1 is a schematic perspective view showing an example of the multilayer piezoelectric element of the present embodiment
  • FIG. 2 is a partially broken schematic perspective view of the multilayer piezoelectric element shown in FIG. 1
  • FIG. 3 is a diagram of the multilayer piezoelectric element of the present embodiment. It is a schematic longitudinal cross-sectional view of an example.
  • a laminated piezoelectric element 1 shown in FIGS. 1 to 3 includes a laminated body 10 having an active portion 13 in which piezoelectric layers 11 and internal electrode layers 12 are alternately laminated and an inactive portion 14 in which piezoelectric layers 11 are laminated. And a coating layer 16 provided so as to surround the side surface of the laminate 10.
  • the covering layer 16 has a two-layer structure including an inner first layer 161 and an outer second layer 162, and the outer surface of the first layer 161 has a plurality of recesses 163. Yes.
  • the multilayer body 10 constituting the multilayer piezoelectric element 1 includes an active portion 13 in which a plurality of piezoelectric layers 11 and internal electrode layers 12 are alternately stacked, and the multilayer body 10 so as to be positioned outside the active portion 13 in the stacking direction. And inactive portions 14 formed by laminating piezoelectric layers 11 provided at both ends in the laminating direction.
  • the active portion 13 is a portion where the piezoelectric layer 11 extends or contracts in the stacking direction during driving
  • the inactive portion 14 is a portion where the piezoelectric layer 11 does not extend or contract in the stacking direction during driving.
  • the laminated body 10 is formed in a rectangular parallelepiped shape having a length of 0.5 to 10 mm, a width of 0.5 to 10 mm, and a height of 1 to 100 mm, for example.
  • the height of the active portion 13 is, for example, 75 to 95% of the height of the stacked body 10.
  • the laminate 10 may have a hexagonal column shape, an octagonal column shape, or the like.
  • the piezoelectric layer 11 constituting the multilayer body 10 is formed of ceramics having piezoelectric characteristics.
  • ceramics for example, a perovskite oxide made of lead zirconate titanate (PbZrO 3 -PbTiO 3 ), Lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ), or the like can be used.
  • the thickness of the piezoelectric layer 11 is, for example, 3 to 250 ⁇ m.
  • the internal electrode layer 12 constituting the multilayer body 10 is formed by simultaneous firing with ceramics forming the piezoelectric body layer 11, and is alternately laminated with the piezoelectric body layers 11 so as to sandwich the piezoelectric body layers 11 from above and below.
  • a driving voltage is applied to the piezoelectric layer 11 sandwiched between them.
  • this forming material for example, a conductor mainly composed of a silver-palladium alloy or a conductor containing copper, platinum, or the like can be used.
  • the positive electrode and the negative electrode are alternately led out to a pair of opposing side surfaces of the stacked body 10 and electrically connected to the pair of external electrodes 15 provided on the side surfaces of the stacked body 10. It is connected.
  • the internal electrode layer 12 has a thickness of 0.1 to 5 ⁇ m, for example.
  • the laminate 10 may include a metal layer that is a layer for relaxing stress and does not function as the internal electrode layer 12.
  • External electrodes 15 are respectively provided on a pair of opposing side surfaces of the laminate 10 from which the positive electrode or negative electrode (or ground electrode) of the internal electrode layer 12 is derived, and are electrically connected to the derived internal electrode layer 12. It is connected.
  • the external electrodes 15 are provided from the active portion 13 to the inactive portion 14 respectively.
  • the external electrode 15 is preferably formed by baking a conductive paste containing a metal such as Ag or Cu.
  • the thickness of the external electrode 15 is formed to a thickness of 5 to 70 ⁇ m.
  • the lead member 17 is joined to the external electrode 15 and the lead member 17 is pulled out, so that electrical connection with an external circuit is made.
  • a coating layer 16 is provided so as to surround the side surface of the laminate 10.
  • the covering layer 16 has an effect of suppressing migration and electric discharge on the side surface of the multilayer body 10 where both ends of the positive electrode and the negative electrode of the internal electrode layer 12 reach.
  • the covering layer 16 is provided so as to cover the end portion of the internal electrode layer 12 so as not to be exposed. In the example shown in the figure, the covering layer 16 is covered so as to surround the side surface of the laminate 10 including the external electrode 15. Yes.
  • the covering layer 16 is configured by overlapping a plurality of layers, and has a two-layer structure including an inner first layer 161 and an outer second layer 162.
  • the first layer 161 is formed of, for example, a silicone resin or an epoxy resin
  • the second layer 162 is formed of, for example, a silicone resin or an epoxy resin. Since the coating layer 16 is configured by overlapping a plurality of layers, the stress applied to the interface between the coating layer 16 and the laminate 10 is dispersed and reduced in each layer constituting the coating layer 16.
  • the outer surface of the first layer 161 has a plurality of recesses 163.
  • the hard and dense structure bends along the plurality of recesses 163, so that the coating layer 16 extends in the stacking direction of the stacked body 10.
  • a region having a hard and dense structure is provided inside. Therefore, a stress applied to the interface between the coating layer 16 and the laminate 10 is suppressed, and a multilayer piezoelectric element that is less likely to cause discharge over a long period of time can be realized.
  • the thickness of the first layer 161 in the region excluding the plurality of recesses 163 is, for example, 10 to 150 ⁇ m, and the thickness of the second layer 162 is, for example, 20 to 200 ⁇ m.
  • the width of the plurality of recesses 163 is, for example, 50 to 500 ⁇ m and the depth is 5 to 60 ⁇ m.
  • the plurality of recesses 163 may extend in the circumferential direction of the first layer 161, and may be uniformly in the circumferential direction.
  • the inner first layer 161 is made of a soft material such as silicone resin
  • the plurality of recesses 163 are soft inside even if the hard portion of the surface of the silicone resin constituting the first layer 161 is not deformed so much. Since the portion is freely deformable, for example, stress can be prevented from being concentrated in the plurality of recesses 163 even when the stacked piezoelectric element 1 is expanded and contracted at high speed.
  • a plurality of concave portions 163 are arranged on the side of the inactive portion 14, but as shown in FIG. 4, a plurality of concave portions 163 are arranged on the side of the active portion 13. It is good to have. According to this configuration, since there are the plurality of concave portions 163 on the side of the active portion 13 that is easily deformed during driving, the effect of suppressing the stress load on the interface between the coating layer 16 and the laminate 10 is increased.
  • a plurality of convex portions 164 may be used instead of the plurality of concave portions 163.
  • the plurality of recesses 163 are preferably arranged on the side of the central portion when the active portion 13 is divided into three equal parts in the stacking direction. Since the central portion when the plurality of concave portions 163 divide the active portion 13 into three equal parts in the stacking direction is the portion that is most easily stretchable and deformed in the active portion 13, there are a plurality of concave portions 163 on the side of this portion. In addition, the effect of suppressing the stress load on the interface between the coating layer 16 and the laminate 10 is further increased. A plurality of convex portions 164 may be used instead of the plurality of concave portions 163.
  • the plurality of recesses 163 may be provided uniformly over the entire interface between the first layer 161 and the second layer 162.
  • the plurality of convex portions 164 may be provided uniformly over the entire interface between the first layer 161 and the second layer 162.
  • a plurality of recesses 163 are preferably arranged in a lattice pattern.
  • the plurality of recesses 163 are arranged in a lattice form that the plurality of recesses 163 are arranged at positions corresponding to points (lattice points) where each lattice intersects when a lattice that virtually intersects each other is drawn. It is to be done.
  • the plurality of concave portions 163 and the plurality of convex portions 164 may have a shape in which trapezoidal irregularities are continuous when viewed in a cross section perpendicular to the coating layer 16.
  • the some recessed part 163 and the some convex part 164 follow the expansion-contraction of the laminated body 10, and the effect which further suppresses the stress load to the interface of the coating layer 16 and the laminated body 10 increases.
  • a tapered shape such as a semicircular cross section, a semi-elliptical cross section, and a triangular cross section may be employed.
  • the bottoms of the plurality of recesses 163 and the top surfaces of the plurality of projections 164 are preferably rounded. Thereby, it is difficult for stress to concentrate and it is possible to prevent cracks in the coating layer 16.
  • a ceramic green sheet to be the piezoelectric layer 11 is produced.
  • a ceramic slurry is prepared by mixing a calcined powder of piezoelectric ceramic, a binder made of an organic polymer such as acrylic or butyral, and a plasticizer. And a ceramic green sheet is produced using this ceramic slurry by using tape molding methods, such as a doctor blade method and a calender roll method.
  • the piezoelectric ceramic any material having piezoelectric characteristics may be used.
  • a perovskite oxide made of lead zirconate titanate (PbZrO 3 -PbTiO 3 ) can be used.
  • the plasticizer dibutyl phthalate (DBP), dioctyl phthalate (DOP), or the like can be used.
  • a conductive paste to be the internal electrode layer 12 is produced. Specifically, a conductive paste is prepared by adding and mixing a binder and a plasticizer to a metal powder of a silver-palladium alloy. This conductive paste is applied on the ceramic green sheet in the pattern of the internal electrode layer 12 using a screen printing method. Further, a plurality of ceramic green sheets on which the conductive paste is printed are laminated, subjected to binder removal treatment at a predetermined temperature, fired at a temperature of 900 to 1200 ° C., and then subjected to a predetermined grinding using a surface grinder or the like.
  • the active part 13 provided with the piezoelectric body layers 11 and the internal electrode layers 12 that are alternately laminated is manufactured by performing a grinding process so as to have a shape.
  • the inactive portion 14 is produced by laminating sheets that are not coated with the conductive paste that becomes the internal electrode layer 12.
  • the laminated body 10 is manufactured by combining the active part 13 and the inactive part 14.
  • the laminate 10 is not limited to the one produced by the above manufacturing method, and any laminate 10 can be produced as long as the laminate 10 formed by laminating a plurality of piezoelectric layers 11 and internal electrode layers 12 can be produced. It may be produced by a manufacturing method.
  • a conductive paste containing a metal such as Ag or Cu is used for the external electrode 15, and this is a region where one end of both electrodes of the internal electrode layer 12 on the side surface of the laminate 10 is derived.
  • a thickness of 5 to 70 ⁇ m It can be formed by controlling to a predetermined thickness or width by screen printing or dispensing.
  • the first layer 161 constituting the coating layer 16 can be formed by using, for example, nylon or silicone resin and controlling the thickness and width to a predetermined thickness by printing or dispensing.
  • the second layer 162 can be similarly formed by controlling to a predetermined thickness or width by printing or dispensing.
  • a configuration in which the outer surface of the first layer 161 has a plurality of convex portions 164 or a plurality of concave portions 163 (a configuration in which the interface between the first layer 161 and the second layer 162 is uneven) is employed.
  • corrugation can also be produced by changing the size of a mesh and recoating.
  • a multilayer electric element 1 is completed by applying a direct current electric field of 0.1 to 3 kV / mm to the external electrode 15 to polarize the piezoelectric layer 11 constituting the multilayer body 10.
  • the multilayer piezoelectric element 1 is connected to an external power source via an external electrode 15 and applies a voltage to the piezoelectric layer 11 so that each piezoelectric layer 11 can be largely displaced by the inverse piezoelectric effect. .
  • This makes it possible to function as an automobile fuel injection valve that injects and supplies fuel to the engine, for example.
  • FIG. 12 is a schematic cross-sectional view illustrating an example of the injection device of the present embodiment.
  • the multilayer piezoelectric element 1 of the above example is accommodated in a storage container (container) 23 having an injection hole 21 at one end.
  • a needle valve 25 capable of opening and closing the injection hole 21 is disposed.
  • a fluid passage 27 is disposed in the injection hole 21 so as to be able to communicate with the movement of the needle valve 25.
  • the fluid passage 27 is connected to an external fluid supply source, and fluid is constantly supplied to the fluid passage 27 at a high pressure. Therefore, when the needle valve 25 opens the injection hole 21, the fluid supplied to the fluid passage 27 is discharged from the injection hole 21 to the outside or an adjacent container, for example, a fuel chamber (not shown) of the internal combustion engine. It is configured.
  • the upper end portion of the needle valve 25 has a large inner diameter, and is a piston 31 slidable with a cylinder 29 formed in the storage container 23.
  • the multilayer piezoelectric element 1 of the above-described example is stored in contact with the piston 31.
  • the injection hole 21 is opened and closed by driving the laminated piezoelectric element 1. Specifically, when the multilayer piezoelectric element 1 is extended by applying a voltage, the piston 31 is pressed, the needle valve 25 closes the fluid passage 27 leading to the injection hole 21, and the supply of fluid is stopped. When the voltage application is stopped, the laminated piezoelectric element 1 contracts, the disc spring 33 pushes back the piston 31, the fluid passage 27 is opened, and the injection hole 21 communicates with the fluid passage 27. Fluid injection is performed.
  • the fluid passage 27 may be opened by applying a voltage to the multilayer piezoelectric element 1 and the fluid passage 27 may be closed by stopping the application of the voltage.
  • the multilayer piezoelectric element 1 does not necessarily have to be inside the container 23, as long as the multilayer piezoelectric element 1 is configured to apply pressure for controlling the ejection of fluid to the inside of the container 23 by driving the multilayer piezoelectric element 1.
  • the fluid includes various liquids and gases such as conductive paste in addition to fuel, ink, and the like.
  • the injection device 19 of the present example employing the multilayer piezoelectric element 1 of the above example is used for an internal combustion engine, the fuel is accurately injected into the combustion chamber of the internal combustion engine such as an engine over a longer period of time compared to the conventional injection device. Can be made.
  • FIG. 13 is a schematic diagram illustrating an example of the fuel injection system of the present embodiment.
  • the fuel injection system 35 of this example includes a common rail 37 that stores high-pressure fuel as a high-pressure fluid, and a plurality of injection devices 19 of the above-described examples that inject the high-pressure fluid stored in the common rail 37.
  • a pressure pump 39 for supplying a high-pressure fluid to the common rail 37 and an injection control unit 41 for supplying a drive signal to the injection device 19 are provided.
  • the injection control unit 41 controls the amount and timing of high-pressure fluid injection based on external information or an external signal. For example, if the fuel injection system 35 of this example is used for engine fuel injection, the amount and timing of fuel injection can be controlled while sensing the state of the combustion chamber of the engine with a sensor or the like.
  • the pressure pump 39 serves to supply fluid fuel from the fuel tank 43 to the common rail 37 at a high pressure. For example, in the case of the fuel injection system 35 of the engine, the fluid fuel is fed into the common rail 37 at a high pressure of 1000 to 2000 atmospheres (about 101 MPa to about 203 MPa), preferably 1500 to 1700 atmospheres (about 152 MPa to about 172 MPa).
  • the high-pressure fuel sent from the pressure pump 39 is stored and sent to the injection device 19 as appropriate.
  • the ejection device 19 ejects a certain fluid from the ejection holes 21 to the outside or an adjacent container.
  • the target for injecting and supplying fuel is an engine
  • high-pressure fuel is injected from the injection hole 21 into the combustion chamber of the engine in a mist form.
  • desired injection of high-pressure fuel can be stably performed over a long period of time.
  • a multilayer piezoelectric element was produced as follows. First, a ceramic slurry was prepared by mixing a calcined powder of a piezoelectric ceramic mainly composed of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) having an average particle size of 0.4 ⁇ m, a binder, and a plasticizer. Using this ceramic slurry, a ceramic green sheet serving as a piezoelectric layer having a thickness of 50 ⁇ m was prepared by a doctor blade method.
  • a ceramic slurry was prepared by mixing a calcined powder of a piezoelectric ceramic mainly composed of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) having an average particle size of 0.4 ⁇ m, a binder, and a plasticizer.
  • a ceramic green sheet serving as a piezoelectric layer having a thickness of 50 ⁇ m was prepared by a doctor blade method.
  • a binder was added to the silver-palladium alloy to produce a conductive paste to be an internal electrode layer.
  • a conductive paste serving as an internal electrode layer was printed on one side of the ceramic green sheet by a screen printing method, and 200 ceramic green sheets printed with the conductive paste were laminated. Further, a total of 15 ceramic green sheets not printed with the conductive paste serving as the internal electrode layer were laminated on the top and bottom of the 200 ceramic green sheets printed with the conductive paste serving as the internal electrode layer. . Then, it was fired at 980 to 1100 ° C. and ground to a predetermined shape using a surface grinder to obtain a 5 mm square laminate.
  • a conductive paste containing Ag was formed on the surface of the laminate by screen printing as an external electrode.
  • a coating layer having a two-layer structure shown in FIG. 5 was formed. Specifically, a resin made of silicone is applied to the side surface of the laminate with a dispenser so that a convex portion having a width of 100 ⁇ m and a height of 30 ⁇ m is formed on the side of the central portion of the laminate, and cured at 150 ° C. One layer was formed. Furthermore, the same resin made of silicone was similarly applied from above to form a second layer. In addition, the thickness of the area
  • Example 2 a laminated piezoelectric element provided with a coating layer having a two-layer structure without unevenness was produced.
  • the laminated piezoelectric element of Sample 2 as a comparative example cracked at the interface between the coating layer and the laminated body by 1 ⁇ 10 5 continuous driving, and the end of the internal electrode layer was exposed to the air. The amount of displacement decreased due to discharge.
  • the laminated piezoelectric element of Sample 1 as an example was driven without changing the displacement even after continuous driving 1 ⁇ 10 7 times.
  • silicone resin was melted with a silicon remover (resin dissolving agent) after driving and the surface of the laminate was observed, there was no trace of discharge of the internal electrode layer and no cracks.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

La présente invention concerne un élément piézoélectrique stratifié (1) qui est pourvu de : un corps stratifié (15) ayant une section active (13), dans laquelle des couches piézoélectriques (11) et des couches d'électrode interne (12) sont stratifiées de façon alternée, et une section inactive (14), dans laquelle les couches piézoélectriques (11) sont stratifiées; et une couche de revêtement (16) qui est disposée de sorte que la couche de revêtement entoure la surface latérale du corps stratifié (15). La couche de revêtement (16) présente une structure à double couche constituée d'une première couche interne (161) et d'une deuxième couche externe (162), et la surface externe de la première couche (161) comporte une pluralité de sections saillantes (163) ou une pluralité de sections évidées (164).
PCT/JP2017/018182 2016-05-25 2017-05-15 Élément piézoélectrique stratifié, dispositif d'injection pourvu de celui-ci et système d'injection de carburant WO2017204015A1 (fr)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
JP7489313B2 (ja) 2020-12-25 2024-05-23 Tdk株式会社 振動デバイス

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DE102006014606A1 (de) * 2006-03-29 2007-10-04 Siemens Ag Verfahren zur Herstellung eines gekapselten Hochdruckaktors
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WO2011093293A1 (fr) * 2010-01-26 2011-08-04 京セラ株式会社 Element piezo-electrique stratifie, procede de production dudit element, dispositif d'injection comprenant l'element piezo-electrique stratifie et systeme d'injection de combustible
US20150050514A1 (en) * 2012-03-28 2015-02-19 Airbus Defence and Space GmbH Coating method, surface layer structure, as well as applications
JP2015506093A (ja) * 2011-12-02 2015-02-26 エプコス アーゲーＥｐｃｏｓ Ａｇ 圧電素子及び圧電素子の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003180090A (ja) * 2001-12-10 2003-06-27 Denso Corp 圧電アクチュエータ
DE102006014606A1 (de) * 2006-03-29 2007-10-04 Siemens Ag Verfahren zur Herstellung eines gekapselten Hochdruckaktors
DE102009047512A1 (de) * 2009-04-09 2010-10-14 Robert Bosch Gmbh Aktormodul und Brennstoffeinspritzventil
WO2011093293A1 (fr) * 2010-01-26 2011-08-04 京セラ株式会社 Element piezo-electrique stratifie, procede de production dudit element, dispositif d'injection comprenant l'element piezo-electrique stratifie et systeme d'injection de combustible
JP2015506093A (ja) * 2011-12-02 2015-02-26 エプコス アーゲーＥｐｃｏｓ Ａｇ 圧電素子及び圧電素子の製造方法
US20150050514A1 (en) * 2012-03-28 2015-02-19 Airbus Defence and Space GmbH Coating method, surface layer structure, as well as applications

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7489313B2 (ja) 2020-12-25 2024-05-23 Tdk株式会社 振動デバイス

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