WO2017162509A1 - Verfahren und vorrichtung zur plasmabehandlung von behältern - Google Patents

Verfahren und vorrichtung zur plasmabehandlung von behältern Download PDF

Info

Publication number
WO2017162509A1
WO2017162509A1 PCT/EP2017/056223 EP2017056223W WO2017162509A1 WO 2017162509 A1 WO2017162509 A1 WO 2017162509A1 EP 2017056223 W EP2017056223 W EP 2017056223W WO 2017162509 A1 WO2017162509 A1 WO 2017162509A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
process gas
treatment
station
stations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2017/056223
Other languages
German (de)
English (en)
French (fr)
Inventor
Alexander DISTERHOF
Michael Herbort
Sebastian Kytzia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KHS GmbH
Original Assignee
KHS Corpoplast GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KHS Corpoplast GmbH filed Critical KHS Corpoplast GmbH
Priority to EP17714654.5A priority Critical patent/EP3433395B1/de
Priority to JP2018549488A priority patent/JP6836601B2/ja
Priority to US16/085,894 priority patent/US10619237B2/en
Publication of WO2017162509A1 publication Critical patent/WO2017162509A1/de
Anticipated expiration legal-status Critical
Priority to US16/807,635 priority patent/US20200263292A1/en
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3288—Maintenance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3321—CVD [Chemical Vapor Deposition]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means

Definitions

  • the plasma chamber at the same time or temporally shortly before the
  • Plasma chambers 17 equipped. As a result, two containers 5 can be treated simultaneously.
  • this is thought to be the sub-chamber interior spaces at least by separate
  • FIG. 5 shows a front view of the plasma station 3 according to FIG. 3 and FIG. 4 in a closed state of the plasma chamber 17.
  • the carriage 24 with the cylindrical chamber wall 18 is lowered relative to the positioning in FIG. 4, so that the chamber wall 18 moves against the chamber bottom 29 is. In this positioning state, the plasma coating can be performed.
  • Process gas is opened during the plasma treatment.
  • the intended process vacuum line avoids a transfer of extracted process gas into the supply circuits of the further vacuum lines, for example the first to fourth vacuum lines 71... 74.
  • Valve device 80.1 include.
  • bypass line 84 comprises at least one via the central
  • Container interior 5.1 relative to the Kamme nnenraunn 4 performed. It is also possible for the gas lance 36 to be moved into the container 5 in synchronism with the beginning of evacuation of the chamber interior 4. Subsequently, the pressure in the container interior 5.1 can be lowered even further. In addition, it is also intended to carry out the positioning movement of the gas lance 36 at least partially parallel to the positioning of the chamber wall 18. After reaching a sufficiently low vacuum process gas is in the
  • first and sixth valve device 71 .1 and 85.1 open and thus on the first and sixth vacuum line 71 and 85 both the
  • Valve device 71 .1 for example, the second valve device 72.1 are opened and thus the container interior 5.1 are lowered via the second vacuum line 72 to a lower pressure level. Also, the container interior 5.1 and / or the plasma chamber 17 can still be lowered via the third or fourth vacuum line 73, 74 to further lower vacuum levels, if this

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
PCT/EP2017/056223 2016-03-24 2017-03-16 Verfahren und vorrichtung zur plasmabehandlung von behältern Ceased WO2017162509A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP17714654.5A EP3433395B1 (de) 2016-03-24 2017-03-16 Verfahren und vorrichtung zur plasmabehandlung von behältern
JP2018549488A JP6836601B2 (ja) 2016-03-24 2017-03-16 容器をプラズマ処理するための方法および装置
US16/085,894 US10619237B2 (en) 2016-03-24 2017-03-16 Method and device for plasma treatment of containers
US16/807,635 US20200263292A1 (en) 2016-03-24 2020-03-03 Method and device for plasma treatment of containers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016105548.4A DE102016105548A1 (de) 2016-03-24 2016-03-24 Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
DE102016105548.4 2016-03-24

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US16/085,894 A-371-Of-International US10619237B2 (en) 2016-03-24 2017-03-16 Method and device for plasma treatment of containers
US16/807,635 Division US20200263292A1 (en) 2016-03-24 2020-03-03 Method and device for plasma treatment of containers

Publications (1)

Publication Number Publication Date
WO2017162509A1 true WO2017162509A1 (de) 2017-09-28

Family

ID=58461268

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2017/056223 Ceased WO2017162509A1 (de) 2016-03-24 2017-03-16 Verfahren und vorrichtung zur plasmabehandlung von behältern

Country Status (5)

Country Link
US (2) US10619237B2 (enExample)
EP (1) EP3433395B1 (enExample)
JP (1) JP6836601B2 (enExample)
DE (1) DE102016105548A1 (enExample)
WO (1) WO2017162509A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3798193A1 (de) * 2019-09-30 2021-03-31 Krones AG Vorrichtung zum beschichten von behältnissen mit bypass und verfahren zum betreiben einer solchen vorrichtung
WO2021094252A1 (de) * 2019-11-11 2021-05-20 Khs Corpoplast Gmbh Vorrichtung und verfahren zur plasmabehandlung von behältern

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018114776A1 (de) 2018-06-20 2019-12-24 Khs Corpoplast Gmbh Vorrichtung zum Beschichten von Behältern mit einer Barriereschicht und Verfahren zur Heizung eines Behälters
DE102018129694A1 (de) * 2018-11-26 2020-05-28 Khs Corpoplast Gmbh Vorrichtung und Verfahren zur Plasmabehandlung von Behältern
DE102020105000A1 (de) 2020-02-26 2021-08-26 Khs Corpoplast Gmbh Verfahren zur Beschichtung von Behältern sowie beschichteter Behälter
DE102020130917A1 (de) 2020-11-23 2022-05-25 Khs Corpoplast Gmbh Mehrweg-Kunststoffbehälter, Verfahren zum Waschen von solchen Behältern, Verfahren zum Beschichten von solchen Behältern und Behälterbehandlungsmaschine für die Getränkeindustrie
DE102023107505A1 (de) * 2023-03-24 2024-09-26 Khs Gmbh Behälterbeschichtungsanlage, insbesondere zum Beschichten von Getränkebehältern
DE102023112998A1 (de) 2023-05-17 2024-11-21 Khs Gmbh Ventileinsatz für eine Behälterbeschichtungsanlage, Ventilanordnung und Behälterbeschichtungsanlage
DE102023112961A1 (de) 2023-05-17 2024-11-21 Khs Gmbh Ventileinsatz für eine Behälterbeschichtungsanlage, Ventilanordnung und Behälterbeschichtungsanlage
DE102023112963A1 (de) 2023-05-17 2024-11-21 Khs Gmbh Ventileinsatz für eine Behälterbeschichtungsanlage, Ventilanordnung und Behälterbeschichtungsanlage
DE102023113416A1 (de) 2023-05-23 2024-11-28 Khs Gmbh Beschichtungsanlage sowie Verfahren zum Beschichten von Behältern
DE102023132995A1 (de) 2023-11-27 2025-05-28 Khs Gmbh Verfahren zum Beschichten von Mehrwegbehältern, nach diesem Verfahren hergestellte Behälter und Behälterbeschichtungsmaschine zum Beschichten von Mehrweg-Kunststoffbehältern
DE102024102398B3 (de) 2024-01-29 2025-01-23 Khs Gmbh Verfahren zur Produktion und Qualitätsprüfung von mittels Plasma beschichteten Kunststoffflaschen
DE102024109778A1 (de) 2024-04-09 2025-10-09 Khs Gmbh Plasmabehandlungsanlage für Behälter und Verfahren zur Plasmabehandlung von Behältern

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (en) 1994-02-16 1995-08-24 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
WO1999017334A1 (en) 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
EP1010773A1 (en) 1997-02-19 2000-06-21 Kirin Beer Kabushiki Kaisha Method and apparatus for producing plastic container having carbon film coating
WO2000058631A1 (fr) 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression
US20020192369A1 (en) * 2000-10-24 2002-12-19 Masahiro Morimoto Vapor deposition method and apparatus
DE10225609A1 (de) * 2002-06-07 2003-12-24 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102004020185A1 (de) 2004-04-22 2005-11-24 Schott Ag Gaslanze für die Innenbeschichtung von Hohlkörpern
US20130041241A1 (en) * 2009-07-02 2013-02-14 John T. Felts Pecvd coating methods for capped syringes, cartridges and other articles

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4866346A (en) * 1987-06-22 1989-09-12 Applied Science & Technology, Inc. Microwave plasma generator
DE4120176C1 (enExample) 1991-06-19 1992-02-27 Schott Glaswerke, 6500 Mainz, De
DE4233512C2 (de) * 1992-10-06 2000-07-13 Leybold Ag Verfahren zur Steuerung von Prozeßgasen für Beschichtungsanlagen und Beschichtungsanlage zu seiner Durchführung
CN100412230C (zh) * 2002-05-24 2008-08-20 肖特股份公司 用于等离子涂层的多位涂层装置和方法
JP3699474B2 (ja) * 2003-02-28 2005-09-28 鹿毛 剛 プラスチック成形体のガスバリア性測定方法
FR2894165B1 (fr) * 2005-12-01 2008-06-06 Sidel Sas Installation d'alimentation en gaz pour machines de depot d'une couche barriere sur recipients
JP2009076881A (ja) * 2007-08-30 2009-04-09 Tokyo Electron Ltd 処理ガス供給システム及び処理装置
JP4798288B2 (ja) * 2008-05-30 2011-10-19 東洋製罐株式会社 蒸着装置
DE102010055155A1 (de) * 2010-12-15 2012-06-21 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (en) 1994-02-16 1995-08-24 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
EP1010773A1 (en) 1997-02-19 2000-06-21 Kirin Beer Kabushiki Kaisha Method and apparatus for producing plastic container having carbon film coating
WO1999017334A1 (en) 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
WO2000058631A1 (fr) 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression
US20020192369A1 (en) * 2000-10-24 2002-12-19 Masahiro Morimoto Vapor deposition method and apparatus
DE10225609A1 (de) * 2002-06-07 2003-12-24 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102004020185A1 (de) 2004-04-22 2005-11-24 Schott Ag Gaslanze für die Innenbeschichtung von Hohlkörpern
US20130041241A1 (en) * 2009-07-02 2013-02-14 John T. Felts Pecvd coating methods for capped syringes, cartridges and other articles

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3798193A1 (de) * 2019-09-30 2021-03-31 Krones AG Vorrichtung zum beschichten von behältnissen mit bypass und verfahren zum betreiben einer solchen vorrichtung
US11332325B2 (en) 2019-09-30 2022-05-17 Krones Ag Apparatus for coating containers with bypass and method for operating such an apparatus
WO2021094252A1 (de) * 2019-11-11 2021-05-20 Khs Corpoplast Gmbh Vorrichtung und verfahren zur plasmabehandlung von behältern

Also Published As

Publication number Publication date
US20200263292A1 (en) 2020-08-20
US10619237B2 (en) 2020-04-14
DE102016105548A1 (de) 2017-09-28
US20190032200A1 (en) 2019-01-31
JP6836601B2 (ja) 2021-03-03
JP2019510881A (ja) 2019-04-18
EP3433395B1 (de) 2020-04-29
EP3433395A1 (de) 2019-01-30
DE102016105548A8 (de) 2017-11-23

Similar Documents

Publication Publication Date Title
EP3433395B1 (de) Verfahren und vorrichtung zur plasmabehandlung von behältern
EP1507890B1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP1507893B1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP3389730B1 (de) Verfahren und vorrichtung zur plasmabehandlung von behältern
DE102010055155A1 (de) Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
DE10225607A1 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
EP2958732A1 (de) Verfahren und vorrichtung zum herstellen und füllen von behältern
WO2003100115A1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP2630273A1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP2576857A1 (de) Vorrichtung zur plasmabehandlung von werkstücken
EP1507889B1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP4059039B1 (de) Vorrichtung und verfahren zur plasmabehandlung von behältern
DE10225609A1 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102011104730A1 (de) Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
WO2009121324A1 (de) Vorrichtung zur plasmabehandlung von werkstücken
EP1507885B1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
EP1507884B1 (de) Verfahren und vorrichtung zur plasmabehandlung von werkstücken
DE10253513B4 (de) Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
EP4417730A1 (de) Vorrichtung und verfahren zur versorgung einer anlage zur beschichtung von werkstücken mit für den beschichtungsprozess benötigten prozessgasen
WO2009036722A2 (de) Vorrichtung zur plasmabehandlung von werkstücken

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2018549488

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2017714654

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2017714654

Country of ref document: EP

Effective date: 20181024

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17714654

Country of ref document: EP

Kind code of ref document: A1