WO2016157709A1 - Dispositif d'inspection d'une tête d'éjection de gouttelettes de liquide, procédé d'inspection d'une tête d'éjection de gouttelettes de liquide, et dispositif d'éjection de gouttelettes de liquide - Google Patents

Dispositif d'inspection d'une tête d'éjection de gouttelettes de liquide, procédé d'inspection d'une tête d'éjection de gouttelettes de liquide, et dispositif d'éjection de gouttelettes de liquide Download PDF

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Publication number
WO2016157709A1
WO2016157709A1 PCT/JP2016/001027 JP2016001027W WO2016157709A1 WO 2016157709 A1 WO2016157709 A1 WO 2016157709A1 JP 2016001027 W JP2016001027 W JP 2016001027W WO 2016157709 A1 WO2016157709 A1 WO 2016157709A1
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WO
WIPO (PCT)
Prior art keywords
light
droplet ejection
droplet discharge
wavelength region
discharge head
Prior art date
Application number
PCT/JP2016/001027
Other languages
English (en)
Japanese (ja)
Inventor
彰彦 ▲角▼谷
Original Assignee
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーエプソン株式会社 filed Critical セイコーエプソン株式会社
Publication of WO2016157709A1 publication Critical patent/WO2016157709A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/236—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers using printing techniques, e.g. applying the etch liquid using an ink jet printer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Definitions

  • the present invention relates to a droplet discharge head inspection device, a droplet discharge head inspection method, and a droplet discharge device.
  • an organic layer of an organic electroluminescence (Electroluminescence, hereinafter abbreviated as EL) element is formed using a droplet discharge method such as an inkjet method.
  • the ink jet apparatus includes a large number of nozzles for discharging droplets, and nozzle discharge defects may occur.
  • the following Patent Document 1 irradiates inspection light into a cavity of a droplet discharge head in which a functional liquid is accommodated, and determines the functional liquid based on the intensity of the reflected inspection light. A method for determining the state has been proposed.
  • the droplet discharge head inspection apparatus can emit light in the red wavelength region having lower energy than light in the short wavelength region such as the blue wavelength region from the illumination device. As a result, even when light is applied to the droplet discharge surface during the inspection of the droplet discharge head, the deterioration of the functional liquid is unlikely to proceed. Thereby, a long-life electronic device can be obtained.
  • the wavelength region included in the light emitted from the illumination device may be 600 nm or more. According to this configuration, deterioration of the functional liquid can be suppressed.
  • a droplet discharge head inspection device includes an illumination device that emits light including at least a red wavelength region toward a droplet discharge surface of a droplet discharge head that discharges a functional liquid.
  • An image pickup device that picks up an image of the droplet discharge surface irradiated with light from the illumination device, and is disposed between the illumination device and the image pickup device, and shields light in a wavelength range shorter than the red wavelength range.
  • a filter to be provided.
  • the filter In the liquid droplet ejection head inspection apparatus according to one aspect of the present invention, light including at least a wavelength region greater than or equal to the red wavelength region is emitted from the illumination device, and light in a wavelength region shorter than the red wavelength region is blocked by the filter. .
  • light in the red wavelength range which has lower energy than light in the short wavelength range such as the blue wavelength range, can be emitted from the illumination device.
  • the wavelength range of the light irradiated to a droplet discharge head can be adjusted by replacing
  • the filter that transmits light in the red wavelength region transmits light having a wavelength region of 600 nm or more and shields light having a wavelength region of less than 600 nm. There may be. According to this configuration, deterioration of the functional liquid can be suppressed.
  • the illumination device can switch between emission of light in the red wavelength region and emission of light in a wavelength region other than the red wavelength region. May be. According to this configuration, for example, when using a functional liquid that does not cause deterioration, the illumination device can be switched to emit light in a wavelength region other than the red wavelength region. Thereby, the test
  • the functional liquid may be a functional liquid used for forming an organic layer of an organic electroluminescence element. According to this configuration, a long-life organic EL element can be obtained.
  • a droplet discharge apparatus includes the droplet discharge head and the droplet discharge head inspection apparatus according to one aspect of the present invention. According to this configuration, since the droplet discharge device includes the droplet discharge head inspection device according to one aspect of the present invention, it is possible to manufacture a long-life electronic device.
  • a droplet discharge head inspection method irradiates light in a red wavelength region toward a droplet discharge surface of a droplet discharge head that discharges a functional liquid for forming an electronic device. Further, the liquid droplet ejection surface is observed.
  • the droplet discharge head inspection method for example, light in the red wavelength region having a lower energy than that of light closer to a short wavelength such as the blue wavelength region is irradiated from the illumination device.
  • a short wavelength such as the blue wavelength region
  • FIG. 1 is a schematic configuration diagram showing a droplet discharge device of this embodiment.
  • FIG. 2 is a schematic configuration diagram showing the droplet discharge head inspection apparatus of the present embodiment.
  • the scale of the size may be varied depending on the component.
  • the conveyance device 5 is a roll-to-roll type conveyance device.
  • the transport device 5 includes a material supply roller 11, a material removal roller 12, and transport rollers 13a to 13f.
  • the feed roller 11 is a roller around which a sheet-like workpiece W is wound, and supplies the workpiece W.
  • the material removal roller 12 takes up the drawn work W and removes the material.
  • the conveyance rollers 13a to 13f convey the workpiece W between the material supply roller 11 and the material removal roller 12.
  • a stage 15 is disposed between the transport roller 13 c and the transport roller 13 d at an intermediate position of the transport device 5.
  • the stage 15 has a number of suction holes (not shown) and is connected to a negative pressure generation source (not shown). The stage 15 sucks the workpiece W through a large number of suction holes and holds the workpiece W flat.
  • the droplet discharge head 2 is disposed to face the stage 15.
  • the droplet discharge head 2 is fixed to a carriage 16 having a main scanning axis and a sub-scanning axis orthogonal to the main scanning axis, and draws a predetermined pattern on the surface of the workpiece W.
  • the droplet discharge head 2 includes a nozzle plate 26, a cavity 23, a vibration plate 22, a piezoelectric element 21 composed of PZT or the like, and a common ink chamber 24.
  • a plurality of nozzle holes 25 are formed in the nozzle plate 26.
  • the cavity 23 communicates with the opening of each nozzle hole 25.
  • the diaphragm 22 constitutes one wall surface of the cavity 23.
  • the piezoelectric element 21 displaces the diaphragm 22.
  • the common ink chamber 24 sends the functional liquid into each cavity 23.
  • the diaphragm 22 is composed of an elastically deformable thin plate portion 29, a convex portion 27, and a thick plate portion for connection to a head member (not shown).
  • the convex portion 27 and the piezoelectric element 21 are connected to each other.
  • the diaphragm 22 bends upward (the direction opposite to the direction in which the nozzle plate 26 is disposed) and the cavity 23 expands, and the common ink chamber 24 functional fluids flow into the cavity 23. Thereafter, when the piezoelectric element 21 is driven in the extending direction, the diaphragm 22 moves in the arrangement direction of the nozzle plate 26 and the cavity 23 contracts. Thereby, the functional liquid in the cavity 23 is compressed, and droplets are ejected from the nozzle hole 25.
  • a predetermined pattern can be formed on the workpiece W depending on which nozzle hole 25 out of the many nozzle holes 25 formed in the droplet discharge head 2 is discharged.
  • the droplet discharge device 1 is provided with an inspection unit 3.
  • the inspection unit 3 is arranged on the upstream side in the conveyance direction of the workpiece W with respect to the droplet discharge head 2.
  • the inspection unit 3 includes an illumination device 32, an imaging device 31, and a determination unit 33.
  • the illuminating device 32 emits light L1 having a wavelength region equal to or greater than the red wavelength region toward the droplet discharge surface 26a of the nozzle plate 26. More specifically, the illuminating device 32 is composed of a light emitting element that emits light in the red wavelength region having a wavelength of 600 nm or more. For example, a light emitting diode (LED) can be used as the light emitting element.
  • the imaging device 31 receives the reflected light L2 from the droplet discharge surface 26a of the nozzle plate 26 irradiated with light by the illumination device 32, and images the appearance of the droplet discharge surface 26a.
  • the imaging device 31 is constituted by, for example, a CCD camera.
  • the determination unit 33 determines the state of the droplet discharge surface 26 a of the nozzle plate 26 based on the imaging result of the imaging device 31. For example, when the determination unit 33 determines that an abnormality has occurred in the droplet discharge surface 26a of the nozzle plate 26, the recovery operation of the droplet discharge head 2 is performed using a flushing unit, a capping unit, a wiping unit, and the like, which will be described later. You may do it. Or you may make it perform the operation
  • the illumination device 32 and the imaging device 31 are provided on the same axis.
  • the illumination device 32 is disposed on the side far from the nozzle plate 26, and the imaging device 31 is disposed on the side close to the nozzle plate.
  • the arrangement of the illumination device 32 and the imaging device 31 is not limited to this example.
  • the illumination device 32 and the imaging device 31 are not necessarily provided on the same axis.
  • a maintenance unit 4 is installed in the droplet discharge device 1.
  • the maintenance unit 4 is disposed on the upstream side in the transport direction of the workpiece W with respect to the droplet discharge head 2.
  • the maintenance unit 4 includes a flushing unit 44, a capping unit 45, and a wiping unit 46.
  • the flushing unit 44 is a device that receives droplets ejected from the droplet ejection head 2 when the flow path in the droplet ejection head 2 is washed. For example, when solid matter is mixed in the droplet discharge head 2 or when the functional liquid is thickened, the solid discharge or the thickened functional liquid is removed from the droplet discharge head 2. The nozzle holes 25 are washed by discharging droplets.
  • the flushing unit 44 has a function of collecting discharged droplets.
  • the capping unit 45 is a device that mainly covers the droplet discharge head 2 and sucks the functional liquid in the droplet discharge head 2.
  • the droplets ejected from the droplet ejection head 2 may have volatility. In this case, when the solvent of the functional liquid present in the droplet discharge head 2 volatilizes from the nozzle hole 25, the viscosity of the functional liquid may change and the nozzle hole 25 may be clogged.
  • the capping unit 45 covers the droplet discharge head 2 to prevent the nozzle hole 25 from being clogged. Also, with the liquid droplet ejection head 2 covered, a negative pressure is generated inside the lid, and the functional liquid in the liquid droplet ejection head 2 is sucked, thereby causing bubbles, foreign matter, etc. in the liquid droplet ejection head 2. Can be removed. Thereby, clogging of the nozzle hole 25 can be eliminated, and the droplet discharge head 2 can be recovered.
  • the inventor inspects the droplet ejection head 2 using the inspection unit 3 in the droplet ejection apparatus 1 described above and then discharges the functional liquid to produce an organic EL element, the organic EL element having a long lifetime is obtained.
  • the cause of the problem that it was difficult to obtain an element was examined.
  • FIG. 3 shows wavelength ranges of various color lights that can be used as inspection light.
  • the curve with the symbol SW indicates the spectrum of white light.
  • the spectrum of white light has a sharp peak near the wavelength of 450 nm and a gentle peak near the wavelength of 560 nm.
  • a curve with a symbol SB indicates a spectrum of blue light.
  • the spectrum of blue light shows a steep peak near the wavelength of 470 nm.
  • the curve with symbol SG indicates the spectrum of green light.
  • the spectrum of green light shows a steep peak near the wavelength of 520 nm.
  • the curve with the symbol SR indicates the spectrum of red light.
  • the spectrum of red light shows a steep peak near the wavelength of 640 nm.
  • the functional liquid for forming an organic layer used in a light emitting layer, a hole injection layer, a hole transport layer, etc. when the functional liquid for forming an organic layer used in a light emitting layer, a hole injection layer, a hole transport layer, etc. is irradiated with ultraviolet light or visible light, the functional liquid absorbs the light and deteriorates. There is. Therefore, the present inventor prepared three types of functional liquids in which white light, blue light, and red light were irradiated for 240 hours in a nitrogen atmosphere with respect to the functional liquid used for forming the red light emitting layer. Then, the organic EL element was produced using three types of functional liquids, respectively, and the lifetime of the organic EL element was evaluated. As the lifetime of the organic EL element, LT95 (time until the emission luminance decreases by 5% from the initial value), which is an index used for evaluating the lifetime of the organic EL element, was adopted. The evaluation results are shown in [Table 1].
  • the droplet discharge device 1 includes the inspection unit 3 that uses light in the wavelength region of the red wavelength region of 600 nm or more as the inspection light, and thus functions in the droplet discharge head 2. Even if the liquid droplet ejection surface 26a is inspected in a state where the liquid is contained, deterioration of the functional liquid due to light irradiation can be suppressed. Therefore, a long-life organic EL element can be manufactured using the droplet discharge device 1 of the present embodiment.
  • FIG. 4 is a schematic configuration diagram of an inspection unit according to the second embodiment.
  • the same components as those in FIG. 2 used in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • the illumination device 52 includes a light emitting element 53 and a filter 54.
  • the light emitting element 53 is a light emitting element that emits light including light in the red wavelength range, specifically, white light, for example.
  • white light for example.
  • a white LED is used as the light emitting element 53.
  • the filter 54 receives the white light emitted from the light emitting element 53 and transmits the red light component of the white light. More specifically, the filter 54 transmits light having a wavelength range of 600 nm or more and shields light having a wavelength range of less than 600 nm.
  • the same effect as the first embodiment that a long-life organic EL element can be manufactured can be obtained. Furthermore, according to the configuration of the present embodiment, even when the same light emitting element 53 is used, the wavelength range of light irradiated from the inspection unit 51 to the droplet discharge head 2 can be changed by replacing the filter 54. Thereby, the wavelength range of inspection light can be adjusted so that it may become the optimal wavelength range for suppression of deterioration of a functional fluid.
  • the filter 54 may be capable of being taken in and out of the optical path of the white light L1 emitted from the light emitting element 53, as indicated by reference numeral 54a in FIG.
  • the illumination device 52 can switch between irradiation of red light and light in a wavelength region other than the red wavelength region, for example, emission of white light.
  • the illumination device can be switched so as to emit white light. Thereby, it can test
  • the inspection unit includes the imaging device, and the droplet ejection surface of the droplet ejection head is inspected based on the image captured by the imaging device.
  • the inspection unit does not necessarily include the imaging device. Good.
  • a method in which the user visually observes the droplet discharge surface may be used.
  • the inspection unit may be a separate inspection device independent of the droplet discharge device.
  • each part of the droplet discharge device and the inspection unit can be changed as appropriate.
  • light in the red wavelength range is used as the light emitted toward the droplet discharge surface 26a.
  • light in the infrared wavelength range having a longer wavelength than the red wavelength range may be used.
  • an infrared camera having high sensitivity to infrared light may be used as the imaging device.
  • the present invention may also be applied to a droplet discharge apparatus for manufacturing electronic devices other than organic EL elements.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Ink Jet (AREA)

Abstract

La présente invention concerne un dispositif d'inspection d'une tête d'éjection de gouttelettes de liquide, moyennant quoi un élément EL organique ayant une longue durée de vie est obtenu. Ce dispositif d'inspection d'une tête d'éjection de gouttelettes de liquide est muni d'un dispositif d'éclairage (32) pour émettre de la lumière dans une région de longueur d'onde égale ou supérieure à la région des longueurs d'ondes rouges vers une face d'éjection de gouttelettes de liquide (26a) d'une tête d'éjection de gouttelettes de liquide (26) pour éjecter un liquide fonctionnel, et un dispositif d'imagerie (31) pour capturer une image de la face d'éjection de gouttelettes de liquide (26a) éclairée par la lumière du dispositif d'éclairage (32).
PCT/JP2016/001027 2015-03-27 2016-02-25 Dispositif d'inspection d'une tête d'éjection de gouttelettes de liquide, procédé d'inspection d'une tête d'éjection de gouttelettes de liquide, et dispositif d'éjection de gouttelettes de liquide WO2016157709A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-066187 2015-03-27
JP2015066187A JP2016185502A (ja) 2015-03-27 2015-03-27 液滴吐出ヘッド検査装置、液滴吐出ヘッド検査方法および液滴吐出装置

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Publication Number Publication Date
WO2016157709A1 true WO2016157709A1 (fr) 2016-10-06

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WO (1) WO2016157709A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7428474B2 (ja) * 2019-03-19 2024-02-06 コニカミノルタ株式会社 インク検出装置およびインクジェット記録装置
JP7546443B2 (ja) 2020-10-14 2024-09-06 キヤノン株式会社 液体吐出装置及びインプリント装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002001961A (ja) * 2000-06-21 2002-01-08 Matsushita Electric Ind Co Ltd 記録装置
JP2004136582A (ja) * 2002-10-18 2004-05-13 Seiko Epson Corp 液滴吐出ヘッドの液滴吐出検査方法、液滴吐出検査装置、および液滴吐出装置
JP2006137138A (ja) * 2004-11-15 2006-06-01 Canon Inc 記録装置
JP2008135679A (ja) * 2006-10-25 2008-06-12 Tokyo Electron Ltd 液処理装置、液処理方法及び記憶媒体
JP2009181982A (ja) * 2008-01-29 2009-08-13 Tokyo Electron Ltd 液処理装置
JP2012049153A (ja) * 2010-08-24 2012-03-08 Tokyo Electron Ltd 液処理装置及び液処理方法
JP2012096170A (ja) * 2010-11-02 2012-05-24 Seiko Epson Corp 液滴吐出装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002001961A (ja) * 2000-06-21 2002-01-08 Matsushita Electric Ind Co Ltd 記録装置
JP2004136582A (ja) * 2002-10-18 2004-05-13 Seiko Epson Corp 液滴吐出ヘッドの液滴吐出検査方法、液滴吐出検査装置、および液滴吐出装置
JP2006137138A (ja) * 2004-11-15 2006-06-01 Canon Inc 記録装置
JP2008135679A (ja) * 2006-10-25 2008-06-12 Tokyo Electron Ltd 液処理装置、液処理方法及び記憶媒体
JP2009181982A (ja) * 2008-01-29 2009-08-13 Tokyo Electron Ltd 液処理装置
JP2012049153A (ja) * 2010-08-24 2012-03-08 Tokyo Electron Ltd 液処理装置及び液処理方法
JP2012096170A (ja) * 2010-11-02 2012-05-24 Seiko Epson Corp 液滴吐出装置

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