WO2016139917A1 - Dispositif de balayage - Google Patents

Dispositif de balayage Download PDF

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Publication number
WO2016139917A1
WO2016139917A1 PCT/JP2016/000968 JP2016000968W WO2016139917A1 WO 2016139917 A1 WO2016139917 A1 WO 2016139917A1 JP 2016000968 W JP2016000968 W JP 2016000968W WO 2016139917 A1 WO2016139917 A1 WO 2016139917A1
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WIPO (PCT)
Prior art keywords
sensor
support
scanning
axis
amplitude
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PCT/JP2016/000968
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English (en)
Japanese (ja)
Inventor
佐々木　光
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株式会社デンソー
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Publication of WO2016139917A1 publication Critical patent/WO2016139917A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • This disclosure relates to the technology of a scanning device.
  • a laser scan module that draws an image on a screen by scanning RGB laser light reflected by a mirror and projecting it onto a corresponding position on the screen.
  • a mirror as a scanning device, for example, there is a MEMS (micro-electro-mechanical-systems) mirror.
  • Such a MEMS mirror requires the following three controls in order to accurately project the laser beam onto the corresponding position of the screen.
  • the maximum angular amplitude of the MEMS mirror that swings in the sub-scanning direction (H direction) and the main scanning direction (V direction) is controlled to be constant.
  • the resonance frequency is controlled.
  • the distance between the MEMS mirror and the screen is controlled to be constant.
  • a sensor for detecting each posture is required.
  • the sensor for detecting the mirror attitude has a small temperature characteristic. That is the condition.
  • Examples of the sensor used for the MEMS mirror include an optical sensor type, a Hall element type, a capacitance type, a piezoelectric type, and a strain gauge type. Therefore, we tried to verify the superiority of these types in the following various methods. For example, frequency detection, amplitude detection, vertical axis direction displacement detection, temperature characteristics, process ease, and the like.
  • the capacitance type sensor When comparing these items, the capacitance type sensor has an advantage in other detection functions except for the point of amplitude detection.
  • One of the objects of the present disclosure is to provide a scanning device having superiority in amplitude detection as a sensor for detecting the position of a scanning body of a scanning device such as a MEMS sensor in consideration of the above circumstances.
  • a scanning device includes a first support, a plate-like scan that is supported on the first support by a first support shaft and is capable of reciprocating rotation, and a first scan in the rotation direction of the scan.
  • a first sensor that detects passage of the scanning body at one position; a second sensor that detects passage of the scanning body at a second position different from the first position in the rotational direction of the scanning body;
  • a first amplitude detector that calculates the amplitude of the reciprocating rotation of the scanning body around the first support axis from the time difference between the scanning detection signals of the scanning body by the sensor and the second sensor.
  • the first amplitude detector can calculate the amplitude of the reciprocating rotation of the scanning body around the first support shaft from the time difference between the scanning detection signals of the scanning body by the first sensor and the second sensor.
  • FIG. 1A is a plan view showing the outer shape of a MEMS mirror
  • FIG. 1B is a front sectional view taken along the V-axis portion
  • FIG. 1C is an H-axis portion. It is side surface sectional drawing cut
  • FIG. 2 is a schematic configuration diagram of the MEMS mirror and the control device.
  • FIG. 3A is a time chart showing changes in amplitude (angle) around the V axis of the mirror.
  • FIG. 3B is a time chart showing changes in amplitude (angle) around the H axis of the mirror.
  • FIG. 4 is a time chart of a detection signal of amplitude detection by the V direction sensor.
  • FIG. 5 is a time chart of a detection signal for detecting the Z-axis deviation amount by the V direction sensor.
  • FIG. 6 is a time chart of a detection signal of amplitude detection by the H direction sensor.
  • FIG. 7 is a time chart of a detection signal for detecting the Z-axis deviation amount by the H direction sensor.
  • FIG. 1 shows a configuration of a MEMS (micro-electro-mechanical systems) mirror 1 that two-dimensionally scans a laser beam, and is integrally formed by processing a semiconductor substrate such as a silicon substrate.
  • the fixed frame 2 that supports the whole is formed as a rectangular frame having a predetermined width.
  • the fixed frame 2 is assumed to be arranged on the XY plane in FIG.
  • a movable frame 3 is provided inside the fixed frame 2.
  • the movable frame 3 is also a rectangular frame body that is disposed on the XY plane and has a predetermined width dimension.
  • a mirror portion 4 is provided inside the movable frame 3.
  • the mirror unit 4 is a circular plate arranged on the XY plane, and is a reflective surface finished to a mirror surface so that one surface reflects laser light.
  • the movable frame 3 is supported inside the fixed frame 2 by two support portions 2a.
  • the support part 2a is disposed inside the fixed frame 2 at the center of two side parts arranged in the Y direction, and is provided along a V (vertical) axis directed in the X axis direction.
  • the support portion 2a has an elastic restoring force against a torsional force around the V axis.
  • the movable frame 3 is supported by the fixed frame 2 so as to be rotatable within a predetermined range about the V axis.
  • the mirror part 4 is supported inside the movable frame 3 by two support parts 3a.
  • the support portion 3a is disposed inside the movable frame 3 at the center of two side portions disposed in the X direction, and is provided along an H (horizontal) axis directed in the Y axis direction.
  • the support portion 3a has an elastic restoring force against a torsional force around the H axis.
  • the mirror unit 4 is supported by the movable frame 3 so as to be rotatable within a predetermined range about the H axis.
  • the counter electrode 5a is provided on one side and the counter electrode 6a is provided on the other side inside the center of the two sides arranged in the X direction of the fixed frame 2. Further, on the outer side of the central part of the two side parts arranged in the X direction of the movable frame 3, a counter electrode 5b is provided on one side part and a counter electrode 6b is provided on the other side part.
  • the counter electrodes 5 a and 5 b are arranged alternately so that the electrode surfaces are parallel to the YZ plane and a plurality of the opposing electrodes 5 a and 5 b protrude from the fixed frame 2 and the movable frame 3.
  • the counter electrodes 6 a and 6 b are also arranged alternately so that the electrode surfaces are arranged in parallel to the YZ plane and a plurality of the electrodes are protruded from the fixed frame 2 and the movable frame 3.
  • the counter electrodes 5a and 5b constitute a V direction sensor SV1 that detects rotation around the V axis
  • the counter electrodes 6a and 6b constitute a V direction sensor SV2 that detects rotation around the V axis.
  • These counter electrodes 5a and 5b (6a and 6b) are provided such that the area of the facing portion changes with the rotation of the movable frame 3 while maintaining the facing distance between them.
  • an electric capacity capacitor
  • a change in the capacitance value can be detected by a change in the facing area. The position state is detected.
  • the counter electrodes 5c and 6c are also provided at the same position on the XY plane as the counter electrodes 5a and 6a on the fixed frame 2 side and at positions shifted in the Z direction. Yes.
  • the counter electrodes 5b and 5c or the counter electrodes 6b and 6c constitute V-direction sensors SV3 and SV4 composed of capacitors (capacitors) having the same principle as described above.
  • the counter electrode 7a is provided on one side and the counter electrode 8a is provided on the other side inside the central part of the two sides arranged in the Y direction of the movable frame 3. Further, counter electrodes 7b and 8b are provided at corresponding portions of the outer peripheral portion of the mirror portion 4, respectively.
  • the counter electrodes 7a and 7b or the counter electrodes 8a and 8b are arranged in an alternating manner so that the electrode surfaces are arranged in parallel to the XZ plane, and a plurality of the electrodes are projected from the movable frame 3 and the mirror unit 4, respectively.
  • the counter electrodes 7a and 7b constitute an H direction sensor SH1 that detects rotation around the H axis
  • the counter electrodes 8a and 8b constitute an H direction sensor SH2 that detects rotation around the H axis.
  • These counter electrodes 7a and 7b (8a and 8b) are provided so that the areas of the facing portions change in accordance with the rotation of the mirror portion 4 while maintaining the facing distance between them.
  • an electric capacity (capacitor) is configured, and a change in the capacitance value can be detected by a change in the facing area. The position state is detected.
  • the counter electrodes 7c and 8c are provided at the same position on the XY plane as the counter electrodes 7a and 8a on the movable frame 3 side, and at positions shifted in the Z direction. Yes.
  • the counter electrodes 7b and 7c or the counter electrodes 8b and 8c constitute H-direction sensors SH3 and SH4 including capacitors (capacitors) having the same principle as described above.
  • the movable frame 3 is set to V by using the counter electrodes 5a and 5b of the V-direction sensor SV1 or the counter electrodes 6a and 6b of the V-direction sensor SV2.
  • a drive electrode unit is provided for reciprocating rotation around the axis.
  • the mirror unit 4 is connected to the H direction using the configuration of the counter electrodes 7a and 7b of the H direction sensor SH1 or the counter electrodes 8a and 8b of the H direction sensor SH2.
  • a drive electrode unit is provided for reciprocating rotation around the axis. The drive electrode group including these drive electrode portions is driven and controlled as described later.
  • the mirror unit 4 corresponds to a scanning body
  • the movable frame 3 corresponds to a first support
  • the H axis corresponds to a first support shaft
  • the fixed frame 2 corresponds to a second support
  • the V axis corresponds to a second support shaft.
  • the H direction sensor SH1 is a first sensor provided at the first position
  • the H direction sensors SH3 and SH4 are second sensors provided at the second position
  • the H direction sensor SH2 is a third sensor provided at the third position
  • V The direction sensor SV1 corresponds to a fourth sensor provided at the fourth position
  • the V direction sensors SV3 and SV4 correspond to a fifth sensor provided at the fifth position
  • the V direction sensor SV2 corresponds to a sixth sensor provided at the sixth position.
  • the MEMS mirror 1 reflects the laser light emitted from the RGB laser unit 20 (corresponding to a light source) on the reflection surface of the mirror unit 4 and irradiates the projection surface of the screen 30.
  • the control device 10 reciprocally rotates the mirror portion 4 of the MEMS mirror 1 in the H-axis direction, and reciprocally rotates the movable frame 3 in the V-axis direction.
  • the laser light from the RGB laser unit 20 is reflected by the mirror unit 4 and projected while being scanned in the X direction and Y direction of the screen 30, and is drawn on the entire projection surface of the screen 30.
  • the screen 30 corresponds to a scanning surface.
  • the RGB laser unit 20 outputs laser light corresponding to each color of RGB, and the control device 10 synchronizes the output timing of each color with the RGB laser unit 20 in the mirror unit 4 of the MEMS mirror 1. To control the rotation position.
  • the control device 10 includes a sensor signal receiver 11, a timing controller 12, a laser knit controller 13, a drive signal generator 14 (H direction drive signal generator 14a, V direction drive signal generator 14b), a phase adjuster 15, An amplitude adjustment unit 16 is provided.
  • the control device 10 functions as a first amplitude detector (means), a first vertical axis deviation detector (means), a second amplitude detector (means), and a second vertical axis deviation detector (means). Have.
  • the sensor signal receiving unit 11 uses detection signals corresponding to the capacitance values output from the sensors SV1 to SV4 and SH1 to SH4 of the MEMS mirror 1 as sensor signals around the V axis and sensor signals around the H axis, respectively.
  • the divided signals are received and output to the timing controller 12 as voltage signals corresponding to the capacitance values.
  • the timing control unit 12 has functions as a reference signal generation unit, a synchronous detection unit, and a timing generation unit.
  • the timing generation unit generates a timing signal having a predetermined period.
  • the reference signal generation unit generates a reference signal synchronized with the display timing on the screen 30 from the timing signal, and outputs the reference signal to the synchronous detection unit. Normally, a reference signal having the same frequency as the scanning frequency of the axis to be adjusted is generated, and when adjusting the X direction, a scanning frequency around the H axis is output, and when adjusting the Y direction, scanning around the V axis is performed. Output frequency.
  • a voltage signal corresponding to the capacitance value input from the sensor signal receiver 11 is synchronously detected by the reference signal generated by the reference signal generator, and the detected signal is sent to the phase adjuster 15 and the amplitude adjuster 16. Output.
  • the synchronous detection unit is configured to be able to switch the input from the sensor signal receiving unit 11.
  • the phase adjustment unit 15 adjusts and outputs the phase of the drive signal that drives the MEMS mirror 1 based on the synchronously detected signal, and includes a phase control unit, an H-axis phase shifter, and a V-axis phase shifter. .
  • the phase control unit receives an output from the synchronous detection unit of the timing control unit 12, calculates a phase shift amount for the H-axis phase shifter and the V-axis phase shifter, and outputs the phase shift amount as a phase shift command.
  • the H-axis phase shifter shifts the phase of the drive signal output from the H-direction drive signal generator 14a of the drive signal generator 14 based on the phase shift command from the phase controller, and the H-axis of the amplitude adjuster 16 Output to the amplitude changer.
  • the V-axis phase shifter shifts the phase of the drive signal output from the V-direction drive signal generator 14b of the drive signal generator 14 based on the phase shift command from the phase controller, and the amplitude adjuster 16 Output to the V-axis amplitude changing unit.
  • the amplitude adjustment unit 16 adjusts and outputs the amplitude of the drive signal whose phase has been adjusted by the phase adjustment unit 15 based on the synchronously detected signal.
  • the amplitude control unit, the H direction amplitude change unit, and the V direction axis An amplitude changing unit is provided.
  • the amplitude control unit receives the output of the synchronous detection unit of the timing control unit 12, calculates the amplitude change amounts for the H direction amplitude change unit and the V direction amplitude change unit, and outputs them as amplitude change command signals, respectively.
  • the H direction amplitude change unit changes the amplitude of the drive signal output from the H direction phase shifter of the phase adjustment unit 15 based on the amplitude change command from the amplitude control unit, and outputs the change to the drive electrode group of the MEMS mirror 1.
  • the V direction amplitude changing unit changes the amplitude of the drive signal output from the V direction phase shifter of the phase adjusting unit 15 based on the amplitude change command from the amplitude control unit, to the drive electrode group of the MEMS mirror 1. Output.
  • the drive signal generation unit 14 generates a drive signal for driving the MEMS mirror 1 in synchronization with the timing signal from the timing control unit 12, and includes the H direction drive signal generation unit 14a and the V direction drive signal generation unit 14b. I have.
  • the H direction drive signal generation unit 14a is an oscillator that generates a drive signal (H direction drive signal) for driving the mirror unit 4 of the MEMS mirror 1 around the H axis. In this embodiment, a sine wave drive signal is generated. appear.
  • the V direction drive signal generator 14b is an oscillator that generates a drive signal (V direction drive signal) for driving the movable frame 3 of the MEMS mirror 1 around the V axis. In this embodiment, the V direction drive signal generator 14b generates a triangular wave drive signal. To do.
  • the control device 10 has a configuration having the above functions, but specifically, has a configuration including a CPU, a ROM, a RAM, an input / output interface circuit, and the like, and controls for realizing the above functions.
  • the program is running.
  • the control device 10 controls the drive of the MEMS mirror 1 by adjusting the phase and amplitude of the drive signal based on the reference signal and the signals of the sensors SH1 to SH3 and SV1 to SV3. Thereby, the MEMS mirror 1 is driven and controlled.
  • the control device 10 has the following functions based on the sensor signal received by the sensor signal receiving unit 11 described above. That is, the control device 10 functions as a first amplitude detection unit (means) that detects amplitude from the rotation angle in the H direction, and functions as a second amplitude detection unit (means) that detects amplitude from the rotation angle in the V direction. .
  • the control device 10 also includes a first vertical axis deviation detection unit (means) that detects a deviation in the Z direction and a second vertical axis deviation corresponding to the case where the detection operation is performed in a state where acceleration is received. It also has a function as a detection unit (means).
  • the control device 10 performs drive control on the MEMS mirror 1 as follows to reflect the laser light of the RGB laser unit 20 on the reflection surface of the mirror unit 4 and thereby screen 30.
  • An image is displayed while scanning on the projection plane.
  • a scanning pattern for projecting laser light onto the projection surface of the screen 30 is moved in the Y-axis direction while repeatedly scanning in the X-axis direction. Therefore, the scanning speed in the X-axis direction is fast and the scanning speed in the Y-axis direction is slow.
  • the control device 10 gives a drive signal around the V-axis to the drive electrode group, and the amplitude V ( ⁇ V) of the movable frame 3 exhibiting a triangular wave shape as shown in FIG. 3A. ) Rotate and vibrate by changing Thereby, the mirror part 4 is rotationally oscillated around the V axis.
  • the control device 10 is driven and controlled so that the amplitude determined by the maximum value of the rotation angle ⁇ V when the movable frame 3 rotates around the V axis changes in the linear pattern of FIG. 3A.
  • the period of amplitude change around the V axis is shown as TV, and the amplitude is shown as AV.
  • the amplitude is AV1.
  • the inclination becomes small and the angular velocity becomes small under the condition that the period TV is constant.
  • control device 10 gives a drive signal around the H axis to the drive electrode group to control the scanning of the screen 30 in the X axis direction, and the mirror unit 4 has a sinusoidal amplitude as shown in FIG. 3B.
  • the control device 10 is driven and controlled so that the amplitude determined by the maximum value of the rotation angle ⁇ H when the mirror unit 4 rotates around the H axis changes in the linear pattern of FIG. 3B.
  • the period of amplitude change around the H axis is shown as TH
  • the amplitude is shown as AH.
  • the amplitude is AH1.
  • the peak value becomes small under the condition that the period TH is constant, so that the angular velocity at the portion crossing the H direction sensor becomes small.
  • FIG. 4A shows a time transition of the rotation angle ⁇ V when the movable frame 3 rotates around the V axis.
  • the V direction sensor SV1 constituted by the counter electrodes 5a and 5b is in a state where the movable frame 3 is aligned with the fixed frame 2, that is, the rotation angle ⁇ V.
  • the value is “0”, the maximum capacity value is indicated.
  • the counter electrodes 5a and 5b are not opposed to each other, so that the capacitance value becomes zero.
  • a position where the capacitance value of the V-direction sensor SV1 shows a pulsed peak is observed at time t1 when the rotation angle ⁇ V becomes “0”. Further, a pulse-like peak is shown at time t2 when the movable frame 3 rotates to the maximum angle and the rotation angle ⁇ V returns to the position of “0”. Thereafter, a pulse-like peak is shown at time t3 when the movable frame 3 rotates to the opposite side and the rotation angle ⁇ V returns to the position of “0” again.
  • the V direction sensor SV3 constituted by the counter electrodes 5b and 5c is a position slightly rotated from the state where the movable frame 3 is aligned with the fixed frame 2. (PV3) is in an opposing state. Therefore, as shown in FIG. 4C, the time point t1a indicating the maximum capacitance value of the V-direction sensor SV3 is a time point slightly delayed from t1.
  • This time difference (t1a-t1) is short when the rotational speed of the movable frame 3 is fast, and long when it is slow.
  • the rotation speed corresponds to the amplitude AV of the movable frame 3. Therefore, the amplitude AV1 in the V direction can be obtained by obtaining the time difference (t1a-t1).
  • the amplitude AV1 can be detected with high accuracy by detecting the time difference in the second half of the period TV where the movable frame 3 rotates slowly. It can.
  • the peak value of the V direction sensor SV3 is generated at a time t2a prior to this.
  • FIG. 4 (d) shows the capacitance value of the V-direction sensor SV3 when the amplitude AV1 of the movable frame 3 shown in FIG. 4 (a) is smaller than this.
  • the peak value is obtained at a time t1b later than the time t1a and the peak value is obtained at a time t2b earlier than the time t2a because the amplitude is reduced.
  • the movable frame 3 and the mirror unit 4 may be displaced by the Z axis due to the force due to the acceleration. That is, the movable frame 3 protrudes from the fixed frame 2 in the Z-axis direction, for example.
  • the symmetrical relationship between the V direction sensors SV1 and SV2 is broken.
  • the time axis at which the rotation angle ⁇ V is “0” is slightly shifted in the amplitude direction and shifted to, for example, ZV.
  • the peak positions of the capacitance values of the V-direction sensors SV1 and SV2 are deviated from the state where no Z-axis deviation occurs.
  • the first half of the period TV one of them is slightly delayed at time t1c, and the other is shifted slightly ahead of time t1d.
  • the second half of the cycle TV one is shifted to a time t2c that is earlier, and the other is shifted to a time t2d that is delayed.
  • the control apparatus 10 performs a calculation process by a program.
  • FIG. 6A shows the time transition of the rotation angle ⁇ H when the mirror unit 4 rotates around the H axis.
  • the H direction sensor SH1 configured by the counter electrodes 7a and 7b is in a state in which the mirror unit 4 is aligned with the movable frame 3, that is, the rotation angle ⁇ H.
  • the value is “0”, the maximum capacity value is indicated.
  • the counter electrodes 7a and 7b are not opposed to each other, so that the capacitance value becomes zero.
  • a position where the capacitance value of the H direction sensor SH1 shows a pulse-like peak is observed at time t1 when the rotation angle ⁇ H becomes “0”. Further, a pulse-like peak is shown at time t2 when the mirror unit 4 rotates to the maximum angle and the rotation angle ⁇ H returns to the position of “0”. Thereafter, a pulse-like peak is shown at time t3 when the mirror unit 4 rotates to the opposite side and the rotation angle ⁇ H returns to the position of “0” again.
  • the period from time t1 to t3 corresponds to the cycle TH.
  • the H direction sensor SH3 constituted by the counter electrodes 7b and 7c is a position slightly rotated from the state where the mirror unit 4 is aligned with the movable frame 3. It is in a state of facing at PH3. Therefore, as shown in FIG. 6C, the time t1e indicating the maximum capacitance value of the H-direction sensor SH3 is a time slightly delayed from t1, and the time t2e is also a time earlier than t2.
  • the time differences (t1e ⁇ t1) and (t2 ⁇ t2e) are short when the rotation speed of the mirror unit 4 is fast and long when the rotation speed is slow.
  • the rotation speed corresponds to the amplitude AH of the mirror unit 4. Therefore, the amplitude AH1 in the H direction can be obtained by obtaining the time difference (t1e-t1) or (t2-t2e).
  • FIG. 6 (d) shows the capacitance value of the H direction sensor SH3 when the amplitude AH1 of the mirror section 4 shown in FIG. 6 (a) becomes an amplitude AH2 smaller than this.
  • the peak value is obtained at a time t1f later than the time t1e and the peak value is obtained at a time t2f earlier than the time t2a because the amplitude is reduced.
  • the peak positions of the capacitance values of the H direction sensors SH1 and SH2 are deviated from the state where no Z-axis deviation occurs.
  • the first half of the period TV one of them is slightly delayed at time t1g, and the other is shifted slightly before time t1h.
  • the second half of the cycle TH one of them becomes a time t2g that is advanced, and the other is a time t2h that is delayed.
  • the amount of deviation in the Z-axis direction can be calculated.
  • the change in amplitude with respect to rotation in the H direction and the amount of deviation in the Z-axis direction can be obtained from the capacitance values detected by the H direction sensors SH1 to SH3.
  • the Z axis deviation occurs due to acceleration in the Z direction
  • what is required when the mirror unit 4 projects onto the screen 30 is the value obtained by the Z axis deviation with respect to the rotation in the V direction and H
  • the MEMS mirror 1 is provided with the V direction sensors SV1 and SV3 that detect the position of the movable frame 3, and the H direction sensors SH1 and SH3 that detect the position of the mirror unit 4 are provided. did.
  • the control device 10 can detect the rotational speed from the detection time difference when the rotation angle ⁇ of the movable frame 3 passes near “0”, and the amplitude AV of the movable frame 3 can be obtained. Similarly, the control device 10 can determine the amplitude AH of the mirror unit 4.
  • the MEMS mirror 1 is provided with the V direction sensors SV1 and SV2 at positions facing each other across the V axis, and the H direction sensors SH1 and SH2 are disposed at positions facing each other across the H axis.
  • the deviation amount can be obtained by the control device 10.
  • the Z-axis deviation of the mirror unit 4 can be similarly obtained.
  • the mirror part 4 can obtain
  • embodiment is not limited only to one embodiment mentioned above, For example, it can deform
  • the counter electrodes constituting the V direction sensor and the H direction sensor may have a configuration in which the number of electrodes is further increased. Since the capacitance value increases by increasing the number of counter electrodes, detection accuracy can be improved.
  • V direction sensor SV4 and the H direction sensor SH4 can perform the same detection operation even if they are not provided according to the above-described operation principle.
  • the present invention can also be applied to a one-dimensional scanning device.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention a trait à un dispositif de balayage. Le dispositif de balayage comprend : un premier corps de support (3) ; un corps de balayage pouvant pivoter de manière alternative et en forme de plaque (4) porté par un premier arbre de support (axe H, 3a) sur le premier corps de support ; un premier capteur (SH1) qui détecte le corps de balayage dépassant une première position dans la direction de rotation de ce corps de balayage ; un second capteur (SH3) qui détecte le corps de balayage dépassant une seconde position différente de la première dans la direction de rotation dudit corps de balayage ; ainsi qu'une première unité de détection d'amplitude (10) qui sert à calculer l'amplitude du pivotement alternatif du corps de balayage autour du premier arbre de support à l'aide de la différence de temps entre les signaux de détection détectés par le premier capteur et le second capteur lorsque ledit corps de balayage dépasse les capteurs.
PCT/JP2016/000968 2015-03-04 2016-02-24 Dispositif de balayage WO2016139917A1 (fr)

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JP2015042342A JP6369357B2 (ja) 2015-03-04 2015-03-04 走査装置
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CN107908066B (zh) * 2017-11-22 2019-07-02 浙江大学 用于反射投影成像体积显示的无轴传动扫描装置

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