WO2016123934A1 - 靶材厚度测量装置 - Google Patents

靶材厚度测量装置 Download PDF

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Publication number
WO2016123934A1
WO2016123934A1 PCT/CN2015/085296 CN2015085296W WO2016123934A1 WO 2016123934 A1 WO2016123934 A1 WO 2016123934A1 CN 2015085296 W CN2015085296 W CN 2015085296W WO 2016123934 A1 WO2016123934 A1 WO 2016123934A1
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WIPO (PCT)
Prior art keywords
target
thickness measuring
measuring device
test probe
target thickness
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PCT/CN2015/085296
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English (en)
French (fr)
Inventor
王德永
李业发
彭亮
郑琮錡
崔大永
Original Assignee
京东方科技集团股份有限公司
合肥鑫晟光电科技有限公司
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Application filed by 京东方科技集团股份有限公司, 合肥鑫晟光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/913,163 priority Critical patent/US9778024B2/en
Publication of WO2016123934A1 publication Critical patent/WO2016123934A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/207—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40—Caliper-like sensors
    • G01B2210/42—Caliper-like sensors with one or more detectors on a single side of the object to be measured and with a backing surface of support or reference on the other side

Definitions

  • Embodiments of the present invention relate to a target thickness measuring device.
  • a conventional target thickness gauge is used to measure the amount or balance of the target for sputtering.
  • An object of an embodiment of the present invention is to provide a target thickness measuring device, whereby the amount of use of the target can be determined, for example, more quickly and accurately.
  • a target thickness measuring apparatus including: a bracket; and a plurality of ranging units mounted on the bracket and arranged in the first direction, the plurality of ranging The units are respectively used to measure the thickness of a plurality of points of the target in the first direction.
  • the thickness of a plurality of points of the target material is measured at one time by using a plurality of ranging units, thereby obtaining a plurality of thickness values of the target along a straight line at one time, thereby improving measurement efficiency.
  • each of the ranging units comprises a test probe movable in a second direction perpendicular to the first direction, the second direction being perpendicular to a surface of the target, the test probes having opposite a first end and a second end, the first end contacting a surface of the target; wherein the thickness of the target is measured by measuring a distance the test probe moves in the second direction.
  • a plurality of thickness values of the target along a straight line can be obtained by a simple structure at a time, and the reliability of the target thickness measuring device is high, and the measurement is convenient and quick.
  • the target thickness measuring device further comprises: detachable a scale plate mounted on the bracket and disposed adjacent to the test probe, the surface of the scale plate facing the test probe having a scale, according to which the second end of the test probe can be determined The position in the second direction.
  • the surface of the scale plate facing the test probe is substantially parallel to the first direction and the second direction.
  • the target thickness measuring device further comprises: a measured value collecting unit, wherein the measured value collecting unit is configured to collect the measured values of the plurality of points measured by the plurality of ranging units.
  • the thickness of a plurality of points of the target is measured at one time by using a plurality of ranging units, and the measured values of the plurality of ranging units are collected by the measurement value collecting unit at a time, thereby further improving the measurement efficiency.
  • the measurement value acquisition unit is an image acquisition device for acquiring an image of a second end of a plurality of test probes; and the target thickness measurement device further comprises a processing unit, The processing unit is configured to process an image acquired by the image acquisition device to obtain a position of a second end of the plurality of test probes, thereby obtaining a thickness of the target.
  • an image of the second end of the plurality of test probes is collected by the image acquisition device, and the image processing is performed by the processing unit, and the position of the second end of the plurality of test probes can be obtained, thereby obtaining the thickness of the target.
  • the distribution so that the target thickness measuring device has high reliability, the measurement is convenient and fast, and the target thickness measuring device has strong anti-noise property.
  • each of the distance measuring units further includes a coil spring sleeved on the test probe for applying a force to the test probe in a second direction toward a surface of the target, and disposed adjacent to The coil springs on the test probe are staggered in the second direction.
  • test probes can be densely arranged, whereby the measurement points are more dense.
  • the bracket is provided with a limiting device, one end of the coil spring is connected to the limiting device, and the other end of the coil spring is connected with the test probe, thereby facilitating fixing the coil spring s position.
  • the limiting device is provided with a plurality of through holes, the test probes being adapted to pass through the through holes respectively, thereby facilitating positioning and guiding of the test probe.
  • the first end of the test probe is provided with balls to allow the test probe to move smoothly over the surface of the target.
  • the measurement value acquisition unit is fixed to the bracket extending from the bracket, thereby facilitating the relative position of the fixed value acquisition unit and the bracket, and moving the measurement value acquisition unit together with the bracket.
  • the target thickness measuring device further includes: guiding means for guiding the carriage to move in a third direction perpendicular to the first direction and the second direction.
  • the stent can be moved, for example, by a guiding device, whereby the curved shape of the surface of the entire target or the thickness distribution of the entire target can be conveniently obtained.
  • the target thickness measuring device further includes: a support plate on which the target is mounted; and the guiding device includes a guide rail disposed on the support plate and a slide connected to the bracket A block assembly that is slidable on the rail.
  • the image acquisition device is adapted to acquire an image of the scale of the scale plate; and the image processing unit is adapted to process the image of the scale of the acquired scale plate to derive the position of the scale of the scale plate Data is used as a basis for measurement.
  • the scale plate may be removed after the image acquisition device acquires an image of the scale of the scale plate.
  • the scale plate is removed, thereby making the structure of the target thickness measuring device simpler and reducing the cost of the target thickness measuring device.
  • FIG. 1 is a schematic side view of a target thickness measuring device according to an embodiment of the present invention when measuring a target thickness
  • FIG. 2 is a schematic side view of a target thickness measuring device in accordance with an embodiment of the present invention.
  • FIG. 3 is a schematic perspective view of a portion of components of a target thickness measuring device in accordance with an embodiment of the present invention
  • FIG. 4 is a front elevational view of a target thickness measuring device in accordance with an embodiment of the present invention, with some components omitted for clarity;
  • FIG. 5 is a schematic diagram of a distance measuring unit of a target thickness measuring device according to an embodiment of the present invention.
  • FIG. 6 is a schematic structural view of two adjacent ranging units of a target thickness measuring device according to an embodiment of the present invention.
  • FIGS. 1 and 2 illustrate a target thickness measuring device according to an embodiment of the present invention
  • FIGS. 3 and 4 illustrate partial components of a target thickness measuring device according to an embodiment of the present invention.
  • a target thickness measuring apparatus 100 includes: a bracket 6; and a plurality of ranging units 13 mounted to the bracket 6 and arranged in the first direction D1, the plurality of The ranging unit 13 is used to measure the thicknesses of the plurality of points of the target 2 in the first direction D1, respectively.
  • the thickness of a plurality of points of the target 2 is measured at one time by using the plurality of distance measuring units 13, whereby a plurality of thickness values of the target 2 along a straight line can be obtained at one time, and the measurement efficiency is improved.
  • the target thickness measuring device 100 may further include: a measured value collecting unit 8 for collecting measured values of a plurality of points measured by the plurality of ranging units 13.
  • the target 2 is mounted on a target backing plate (supporting plate) 1.
  • the bracket 6 can be a frame.
  • the thickness of a plurality of points of the target 2 is measured at one time by using the plurality of ranging units 13 , and the measured values of the plurality of ranging units 13 are collected by the measured value collecting unit 8 at a time, thereby A plurality of thickness values of the target 2 along a straight line can be obtained, which further improves the measurement efficiency.
  • the thickness of the target 2 can be estimated with the naked eye or the corresponding data can be read with the naked eye using the scale plate 12 mentioned later.
  • each of the ranging units 13 may include a test probe 15 movable in a second direction D2 perpendicular to the first direction D1, the second direction being perpendicular to a surface of the target,
  • the test probe 15 is perpendicular to the surface of the target 2, i.e., disposed in the second direction.
  • the test probe 15 has opposing first and second ends that contact the surface of the target 2 and measure the thickness of the target 2 by measuring the distance the test probe moves in the second direction.
  • Each of the ranging units 13 may also include probe balls 17 that enable the test probes 15 to move smoothly over the surface of the target 2.
  • the test probe 15 can be brought into close contact with the surface of the target 2 by an external force such as elasticity, gravity, or magnetic force.
  • an external force such as elasticity, gravity, or magnetic force.
  • each of the distance measuring units 13 may further include a coil spring that is sleeved on the test probe 15 for applying a force to the test probe 15 toward the surface of the target 2 in the second direction D2.
  • the coil springs 16 disposed on the adjacent test probes 15 are staggered in the second direction D2.
  • the test probes 15 can be densely arranged, so that the measurement points are denser.
  • the upper end of the coil spring 16 is connected to a blocking member (restricting means) 18, the blocking member 18 is connected to the bracket 6, and the lower end of the coil spring 16 is connected to the test probe 15, thereby being directed to the test probe 15. Apply force.
  • the blocking member 18 may be provided with a plurality of through holes through which the test probe 15 passes, and the through hole of the blocking member 18 guides and positions the test probe 15.
  • the test is performed in the second direction D2.
  • the distance between the lower end of the needle 15 and the upper surface of the target backing plate 1 i.e., the position of the upper or lower end of the test probe 15 in the second direction D2 and the upper or lower end of the test probe 15 at the reference position
  • the distance is the target thickness; and if the position at which the lower end of the test probe 15 is in contact with the upper surface of the unused target 2 is set as the reference position, the upper end of the test probe 15 in the second direction D2
  • the distance between the position of the lower end and the position of the upper end or the lower end of the test probe 15 at the reference position is the thickness of the target consumption.
  • the actual thickness of the target can be determined by the original thickness of the target and the thickness of the target.
  • any other suitable component may be used in place of the test probe to measure distance, such as an electronic vernier caliper, an electronic proximity ranging unit, a sensor that measures distance, and the like.
  • the target thickness measuring device 100 further includes a scale plate 12 detachably mounted to the bracket 6 and disposed adjacent to the test probe 15, the orientation of the scale plate 12 being tested.
  • the surface of the needle 15 has a scale from which the position of the second end of the test probe 15 in the second direction D2 can be determined.
  • the surface of the scale plate 12 facing the test probe 15 may be substantially parallel to the first direction D1 and the second direction D2. Thereby, for example, a plurality of thickness values of the target 2 along a straight line can be obtained more accurately.
  • the measurement value acquisition unit 8 may be an image acquisition device such as a camera for collecting images of the second ends of the plurality of test probes 15.
  • the measurement value acquisition unit 8 can be fixed, for example, on a bracket extending from the bracket 6 so as to move together with the bracket 6.
  • the target thickness measuring device 100 further includes a processing unit 7 for processing an image acquired by the image capturing device to obtain a position of the second end of the plurality of test probes 15, thereby The thickness of the target 2 is obtained.
  • an image of the second end of the plurality of test probes 15 is acquired by the image acquisition device, and the image processing is performed by the processing unit 7, so that the positions of the second ends of the plurality of test probes 15 can be obtained, whereby the thickness of the target 2 can be obtained.
  • the target thickness measuring apparatus 100 may further include: a guiding device 20 for guiding the bracket 6 in a direction perpendicular to the first direction D1 and the second direction D2.
  • the third direction D3 moves.
  • the bracket 6 can be moved, for example, by the guide device 20, so that the curved shape of the surface of the entire target 2 or the thickness distribution of the entire target 2 can be easily obtained.
  • the guide 20 may include a guide rail 4; and a slider assembly 5 coupled to the bracket 6 and slidable on the guide rail 4.
  • the guide rail 4 can be disposed on the backboard 1.
  • the slider assembly 5 may include a first roller 10 that rolls along two outer sides in a first direction D1 of the guide rail 4.
  • the slider assembly 5 can also be packaged
  • the second ball 14 is rolled along the top surface of the guide rail 4.
  • the target thickness measuring device can measure the usage amount of the target 2 quickly, efficiently, accurately, and in batches, and can obtain a use surface map of the entire target 2.
  • the target thickness measuring device can visually display the usage curve of the target 2 at a certain position when the target 2 is used by using a plurality of test probes 15, and the test probe 15 is tested.
  • a scale plate 12 is mounted on the back, and the data can be directly read by the naked eye.
  • an image acquisition device such as a camera in front of the test probe 15 can obtain an image of a position curve (or image) of the second end of the plurality of test probes 15 and a scale line of the corresponding scale plate 12, and the image passes through the processing unit. 7 draw the corresponding data.
  • the bracket 6 slides to the next test position, and the above process is repeated again to quickly obtain the test data of the next point.
  • the target thickness measuring device may be provided with means for measuring the position of the bracket 6 in the third direction D3 and a driving unit such as a motor that drives the carriage 6 to slide in the third direction D3.
  • the image capture device may acquire an image of the scale of the scale plate 12, and the image processing unit 7 processes the image of the scale of the scale plate to obtain position data of the scale of the scale plate 12, the scale plate
  • the position data of the scale of 12 can be stored in the memory as a measurement reference, and then the scale plate 12 can be removed.
  • the image acquisition device may obtain a position curve or image of the second end of the plurality of test probes 15. Based on the position data of the scale of the stored scale plate 12, the position data of the second end of the corresponding plurality of test probes 15 is derived from the position curve or image of the second end of the plurality of test probes 15 by the image processing unit 7.
  • the scale plate is removed after the image pickup device acquires the image of the scale of the scale plate, thereby making the structure of the target thickness measuring device simpler and reducing the cost of the target thickness measuring device.
  • the target thickness measuring device quickly and intuitively displays the curved surface of the target 2, and can realize preliminary thickness estimation and accurate thickness measurement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

一种靶材厚度测量装置，其包括：支架(6)；以及安装于支架(6)并沿第一方向排列的多个测距单元(13)，所述多个测距单元(13)分别用于测量靶材(2)在第一方向上的多个点的厚度。利用多个测距单元(13)一次测量靶材(2)的多个点的厚度，由此一次获得靶材(2)沿一条直线的多个厚度值，提高了测量效率。

Description

靶材厚度测量装置 技术领域
本发明的实施例涉及一种靶材厚度测量装置。
背景技术
传统的靶材厚度测量仪用于测量溅射用靶材使用量或余量。
发明内容
本发明的实施例的目的是提供一种靶材厚度测量装置，由此例如可以更快速准确地确定靶材的使用量。
根据本发明的实施例，提供了一种靶材厚度测量装置，该靶材厚度测量装置包括：支架；以及安装于支架并沿第一方向排列的多个测距单元，所述多个测距单元分别用于测量靶材在第一方向上的多个点的厚度。
采用上述技术方案，例如利用多个测距单元一次测量靶材的多个点的厚度，由此一次可以获得靶材沿一条直线的多个厚度值，提高了测量效率。
根据本发明的实施例，每一个测距单元包括能够沿与第一方向垂直的第二方向移动的测试探针，所述第二方向垂直于靶材的表面，所述测试探针具有相对的第一端和第二端，所述第一端接触靶材的表面；其中，通过测量测试探针沿第二方向移动的距离来测量靶材的厚度。
采用上述技术方案，例如通过采用多个测试探针，由简单的结构一次可以获得靶材沿一条直线的多个厚度值，靶材厚度测量装置的可靠性高，测量方便快捷。
根据本发明的实施例，所述的靶材厚度测量装置还包括：可拆卸 地安装于支架并与测试探针相邻设置的刻度板，所述刻度板的朝向测试探针的表面具有刻度，根据所述刻度板的刻度能够确定所述测试探针的第二端在第二方向的位置。
采用上述技术方案，例如通过设置刻度板，可以直观地获得靶材沿一条直线的多个厚度值。
根据本发明的实施例，所述刻度板的朝向测试探针的表面大致与第一方向和第二方向平行。
采用上述技术方案，例如可以更准确地获得靶材沿一条直线的多个厚度值。
根据本发明的实施例，所述的靶材厚度测量装置还包括：测量值采集单元，所述测量值采集单元用于采集多个测距单元测量的多个点的测量值。
采用上述技术方案，例如利用多个测距单元一次测量靶材的多个点的厚度，由测量值采集单元一次采集多个测距单元的测量值，由此进一步提高了测量效率。
根据本发明的实施例，所述测量值采集单元是图像采集装置，所述图像采集装置用于采集多个测试探针的第二端的图像；并且所述靶材厚度测量装置还包括处理单元，所述处理单元用于对所述图像采集装置采集的图像进行处理以获得多个测试探针的第二端的位置，由此获得靶材的厚度。
采用上述技术方案，例如由图像采集装置采集多个测试探针的第二端的图像，通过处理单元对图像处理，可以获得多个测试探针的第二端的位置，由此可以获得靶材的厚度分布，从而靶材厚度测量装置的可靠性高、测量方便快捷、靶材厚度测量装置的抗噪性强。
根据本发明的实施例，每一个测距单元还包括套在测试探针上用于沿第二方向朝向靶材的表面对所述测试探针施加作用力的螺旋弹簧，并且设置在相邻的所述测试探针上的螺旋弹簧在第二方向上交错设置。
采用上述技术方案，测试探针能够密集地排列，由此测量点更加密集。
根据本发明的实施例，所述支架上设置有限位装置，所述螺旋弹簧的一端与所述限位装置相连，所述螺旋弹簧的另一端与所述测试探针相连，从而便于固定螺旋弹簧的位置。
根据本发明的实施例，所述限位装置设有多个通孔，测试探针适于分别穿过所述通孔，从而便于定位和引导测试探针。
根据本发明的实施例，所述测试探针的所述第一端设置有滚珠，以使得测试探针在靶材的表面上平滑移动。
根据本发明的实施例，所述测量值采集单元固定在从支架伸出的托架上，从而便于固定测量值采集单元与支架的相对位置，并使测量值采集单元与支架一起移动。
根据本发明的实施例，所述的靶材厚度测量装置还包括：导向装置，用于引导支架沿与第一方向和第二方向垂直的第三方向移动。
采用上述技术方案，例如通过导向装置使支架能够移动，由此可以方便地获得整个靶材的表面的曲面形状或整个靶材的厚度分布。
根据本发明的实施例，所述的靶材厚度测量装置，还包括：支撑板，靶材安装在支撑板上；并且所述导向装置包括设置在支撑板上的导轨和连接到支架上的滑块组件，所述滑块组件能够在所述导轨上滑动。
根据本发明的实施例，所述图像采集装置适于采集刻度板的刻度的图像；并且所述图像处理单元适于对采集的刻度板的刻度的图像进行处理而得出刻度板的刻度的位置数据作为测量的基准。在所述图像采集装置获取了刻度板的刻度的图像后可以拆掉所述刻度板。
采用上述技术方案，例如在所述图像采集装置获取了刻度板的刻度的图像后拆掉所述刻度板，由此使靶材厚度测量装置结构更简单，并且可以降低靶材厚度测量装置的成本。
附图说明
图1为根据本发明的实施例的靶材厚度测量装置的测量靶材厚度时的示意侧视图；
图2为根据本发明的实施例的靶材厚度测量装置的示意侧视图；
图3为根据本发明的实施例的靶材厚度测量装置的部分组件的示意立体图；
图4为根据本发明的实施例的靶材厚度测量装置的主视图，其中为了清楚起见省去了部分组件；
图5为根据本发明的实施例的靶材厚度测量装置的测距单元的示意图；以及
图6为根据本发明的实施例的靶材厚度测量装置的两个相邻的测距单元的结构示意图。
具体实施方式
下面结合说明书附图来说明本发明的具体实施方式。
下面结合附图，对本发明实施例的具体实施方式进行详细地说明。另外，在下面的详细描述中，为便于解释，阐述了许多具体的细节以提供对本披露实施例的全面理解。然而明显地，一个或多个实施例在没有这些具体细节的情况下也可以被实施。在其他情况下，公知的结构和装置以图示的方式体现以简化附图。
图1和2示出了根据本发明的实施例的靶材厚度测量装置，而图3和4示出了根据本发明的实施例的靶材厚度测量装置的部分组件。
如图1至4所示，根据本发明的实施例的靶材厚度测量装置100包括：支架6；以及安装于支架6并沿第一方向D1排列的多个测距单元13，所述多个测距单元13分别用于测量靶材2在第一方向D1上的多个点的厚度。例如利用多个测距单元13一次测量靶材2的多个点的厚度，由此一次可以获得靶材2的沿一条直线的多个厚度值，提高了测量效率。靶材厚度测量装置100还可以包括：测量值采集单元8，所述测量值采集单元8用于采集多个测距单元13测量的多个点的测量值。靶材2安装在靶材背板(支撑板)1上。支架6可以是框架。例如利用多个测距单元13一次测量靶材2的多个点的厚度，由测量值采集单元8一次采集多个测距单元13的测量值，由此一次 可以获得靶材2的沿一条直线的多个厚度值，进一步提高了测量效率。在不设置测量值采集单元8的情况下，可以用肉眼估计靶材2的厚度或利用后面提到的刻度板12，用肉眼读取对应的数据。
如图3至6所示，每一个测距单元13可以包括能够沿与第一方向D1垂直的第二方向D2移动的测试探针15，所述第二方向垂直于靶材的表面，所述测试探针15垂直于靶材2的表面，即沿第二方向设置。测试探针15具有相对的第一端和第二端，所述第一端接触靶材2的表面，通过测量测试探针沿第二方向移动的距离来测量靶材2的厚度。每一个测距单元13还可以包括探针滚珠17，探针滚珠17使测试探针15能够在靶材2的表面的平滑移动。可通过弹力、重力、磁力等外力使测试探针15与靶材2的表面紧密接触。例如通过采用多个测试探针15，由简单的结构一次可以获得靶材2沿一条直线的多个厚度值，靶材厚度测量装置的可靠性高，测量方便快捷。
如图3至6所示，每一个测距单元13还可以包括套在测试探针15上用于沿第二方向D2朝向靶材2的表面对所述测试探针15施加作用力的螺旋弹簧16，并且设置在相邻的所述测试探针15上的螺旋弹簧16在第二方向D2上交错设置。由此，例如测试探针15能够密集地排列，从而测量点更加密集。如图5所示，螺旋弹簧16的上端与阻挡件(限位装置)18连接，阻挡件18与支架6连接，并且螺旋弹簧16的下端与测试探针15连接，由此向测试探针15施加作用力。阻挡件18可以设有多个通孔，测试探针15穿过阻挡件18的通孔，阻挡件18的通孔对测试探针15进行导向和定位。
例如，如图4所示，如果将在第二方向D2上的、测试探针15与靶材背板1的上表面接触的位置设为基准位置，则在第二方向D2上的、测试探针15的下端与靶材背板1的上表面的距离(即在第二方向D2上的、测试探针15的上端或下端的位置与测试探针15在基准位置时的上端或下端的位置的距离)是靶材厚度；而如果将测试探针15的下端与未使用的靶材2的上表面接触的位置设为基准位置，则在第二方向D2上的、测试探针15的上端或下端的位置与测试探针15在基准位置时的上端或下端的位置的距离是靶材消耗的厚度， 利用靶材的原厚度和靶材消耗的厚度可求出靶材的实际厚度。
作为选择，也可以采用其它任何合适的部件来代替测试探针来测量距离，例如，电子游标卡尺、电子感应测距单元、测量距离的传感器等。
如图3和4所示，所述的靶材厚度测量装置100还包括：可拆卸地安装于支架6并与测试探针15相邻设置的刻度板12，所述刻度板12的朝向测试探针15的表面具有刻度，根据所述刻度板12的刻度能够确定所述测试探针15的第二端在第二方向D2的位置。通过设置刻度板12，可以直观地获得靶材2沿一条直线的多个厚度值，并且可以用肉眼读取对应的数据。所述刻度板12的朝向测试探针15的表面可以大致与第一方向D1和第二方向D2平行。由此，例如可以更准确地获得靶材2沿一条直线的多个厚度值。
如图1至3所示，所述测量值采集单元8可以是诸如照相机的图像采集装置，所述图像采集装置用于采集多个测试探针15的第二端的图像。测量值采集单元8例如可以固定在从支架6伸出的托架上，以便于随着支架6一起移动。并且，所述靶材厚度测量装置100还包括处理单元7，所述处理单元7用于对所述图像采集装置采集的图像进行处理以获得多个测试探针15的第二端的位置，由此获得靶材2的厚度。例如，由图像采集装置采集多个测试探针15的第二端的图像，通过处理单元7对图像处理，可以获得多个测试探针15的第二端的位置，由此可以获得靶材2的厚度分布，从而靶材厚度测量装置的可靠性高、测量方便快捷、靶材厚度测量装置的抗噪性强。
如图1至4所示，根据本发明的实施例，所述的靶材厚度测量装置100还可以包括：导向装置20，用于引导支架6沿与第一方向D1和第二方向D2垂直的第三方向D3移动。由此，例如通过导向装置20使支架6能够移动，从而可以方便地获得整个靶材2的表面的曲面形状或整个靶材2的厚度分布。导向装置20可以包括导轨4；以及与支架6连接并在导轨4上滑动的滑块组件5。导轨4可以设置在背板1上。滑块组件5可以包括：第一滚柱10，第一滚柱10沿着导轨4的第一方向D1上的两个外侧面滚动。此外滑块组件5还可以包 括：第二滚珠14，第二滚珠14沿着导轨4的顶面滚动。
根据本发明的实施例的靶材厚度测量装置可以快速、有效、准确、批量测量靶材2的使用量，并能够得出整个靶材2的使用曲面图。
根据本发明的实施例的靶材厚度测量装置通过采用多个测试探针15，在测量靶材2某一处使用量时可直观的显示出该处靶材2的使用曲线，测试探针15后面安装有刻度板12，可以用肉眼直接读出数据。此外，测试探针15前方的诸如相机的图像采集装置可获得多个测试探针15的第二端的位置曲线(或图像)和对应的刻度板12的刻度线的图像，由该图像通过处理单元7得出相应的数据。支架6滑动至下一测试位置，再次重复以上过程即可快速得出下一点的测试数据。靶材厚度测量装置可以设置测量支架6在第三方向D3上的位置的装置以及驱动支架6在第三方向D3上滑动的诸如马达的驱动单元。
根据本发明的一些实施例，图像采集装置可以获取刻度板12的刻度的图像，由图像处理单元7对刻度板的刻度的图像进行处理而得出刻度板12的刻度的位置数据，该刻度板12的刻度的位置数据可以存储在存储器中作为测量基准，然后可以拆掉刻度板12。在测量过程中，图像采集装置可获得多个测试探针15的第二端的位置曲线或图像。基于存储的刻度板12的刻度的位置数据，通过图像处理单元7由多个测试探针15的第二端的位置曲线或图像得出相应的多个测试探针15的第二端的位置数据。在图像采集装置获取了刻度板的刻度的图像后拆掉刻度板，由此使靶材厚度测量装置结构更简单，并且可以降低靶材厚度测量装置的成本。
根据本发明的实施例的靶材厚度测量装置快捷直观地展示靶材2的曲面，可实现初步厚度估计和精确测量厚度。
以上实施方式仅用于说明本发明，而并非对本发明的限制，有关技术领域的普通技术人员，在不脱离本发明的精神和范围的情况下，还可以做出各种变化和变型，因此所有等同的技术方案也属于本发明的范畴，本发明的专利保护范围应由权利要求限定。

Claims (14)

  1. 一种靶材厚度测量装置，包括：
    支架；以及
    安装于支架并沿第一方向排列的多个测距单元，所述多个测距单元分别用于测量靶材在第一方向上的多个点的厚度。
  2. 根据权利要求1所述的靶材厚度测量装置，其中：
    每一个测距单元包括能够沿与第一方向垂直的第二方向移动的测试探针，所述第二方向垂直于靶材的表面，
    所述测试探针具有相对的第一端和第二端，所述第一端接触靶材的表面；
    其中，通过测量测试探针沿第二方向移动的距离来测量靶材的厚度。
  3. 根据权利要求2所述的靶材厚度测量装置，还包括：
    可拆卸地安装于支架并与测试探针相邻设置的刻度板，所述刻度板的朝向测试探针的表面具有刻度，根据所述刻度板的刻度能够确定所述测试探针的第二端在第二方向的位置。
  4. 根据权利要求3所述的靶材厚度测量装置，其中：
    所述刻度板的朝向测试探针的表面大致与第一方向和第二方向平行。
  5. 根据权利要求1所述的靶材厚度测量装置，还包括：
    测量值采集单元，所述测量值采集单元用于采集多个测距单元测量的多个点的测量值。
  6. 根据权利要求2至4中的任一项所述的靶材厚度测量装置，还包括：
    测量值采集单元，所述测量值采集单元用于采集多个测距单元测量的多个点的测量值。
  7. 根据权利要求6所述的靶材厚度测量装置，其中：
    所述测量值采集单元是图像采集装置，所述图像采集装置用于采 集多个测试探针的第二端的图像；并且
    所述靶材厚度测量装置还包括处理单元，所述处理单元用于对所述图像采集装置采集的图像进行处理以获得多个测试探针的第二端的位置，由此获得靶材的厚度。
  8. 根据权利要求2所述的靶材厚度测量装置，其中：
    每一个测距单元还包括套在测试探针上用于沿第二方向朝向靶材的表面对所述测试探针施加作用力的螺旋弹簧，并且设置在相邻的所述测试探针上的螺旋弹簧在第二方向上交错设置。
  9. 根据权利要求8所述的靶材厚度测量装置，其中：
    所述支架上设置有限位装置，所述螺旋弹簧的一端与所述限位装置相连，所述螺旋弹簧的另一端与所述测试探针相连。
  10. 根据权利要求9所述的靶材厚度测量装置，其中：
    所述限位装置设有多个通孔，测试探针适于分别穿过所述通孔。
  11. 根据权利要求2所述的靶材厚度测量装置，其中：
    所述测试探针的所述第一端设置有滚珠，以使得测试探针在靶材的表面上平滑移动。
  12. 根据权利要求7所述的靶材厚度测量装置，其中：所述测量值采集单元固定在从支架伸出的托架上。
  13. 根据权利要求2至4中的任一项所述的靶材厚度测量装置，还包括：
    导向装置，用于引导支架沿与第一方向和第二方向垂直的第三方向移动。
  14. 根据权利要求13所述的靶材厚度测量装置，还包括：
    支撑板，靶材安装在支撑板上；并且
    所述导向装置包括设置在支撑板上的导轨和连接到支架上的滑块组件，所述滑块组件能够在所述导轨上滑动。15、根据权利要求7所述的靶材厚度测量装置，其中：
    所述图像采集装置适于采集刻度板的刻度的图像；并且
    所述图像处理单元适于对采集的刻度板的刻度的图像进行处理而得出刻度板的刻度的位置数据作为测量的基准。
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CN104613844A (zh) * 2015-02-05 2015-05-13 合肥鑫晟光电科技有限公司 靶材厚度测量装置

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