WO2016112685A1 - 基于静压气浮解耦装置的三分量标准振动台 - Google Patents

基于静压气浮解耦装置的三分量标准振动台 Download PDF

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Publication number
WO2016112685A1
WO2016112685A1 PCT/CN2015/087342 CN2015087342W WO2016112685A1 WO 2016112685 A1 WO2016112685 A1 WO 2016112685A1 CN 2015087342 W CN2015087342 W CN 2015087342W WO 2016112685 A1 WO2016112685 A1 WO 2016112685A1
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axis
static pressure
pressure air
vibration table
vibration
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PCT/CN2015/087342
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English (en)
French (fr)
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何闻
张旭飞
贾叔仕
周杰
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浙江大学
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Priority to US15/535,059 priority Critical patent/US10422717B2/en
Priority to EP15877598.1A priority patent/EP3246686B1/en
Priority to JP2017525104A priority patent/JP6359771B2/ja
Publication of WO2016112685A1 publication Critical patent/WO2016112685A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • G01M7/06—Multidirectional test stands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/12—Measuring characteristics of vibrations in solids by using direct conduction to the detector of longitudinal or not specified vibrations

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  • the invention relates to a three-component standard vibration table based on a static pressure air flotation decoupling device.
  • the calibration of the three-dimensional vibration sensor is mostly performed by the single-dimensional vibration calibration system, and the three measurement axes are sequentially performed, and this method takes a long time and complicated data processing, and considers the mutual coupling between the dimensions of the three-dimensional sensor. It is difficult to obtain a sensitivity matrix that reflects the coupling relationship between dimensions. Therefore, the development of a three-component standard vibration table capable of simultaneously exciting the three-dimensional vibration sensor with three axes has important theoretical and practical significance for the development of the calibration technology of the vibration sensor and the advancement of the corresponding industry technology.
  • Chinese patent 201110207297.5 discloses a three-component standard vibration table based on a lock-type decoupling device, comprising a base, an X-direction electromagnetic vibration table, a Y-direction electromagnetic vibration table, a Z-direction electromagnetic vibration table and a three-dimensional vibration platform, each electromagnetic vibration The platform is connected to the three-dimensional vibration platform through the motion decoupling device;
  • the motion decoupling device comprises a first frame and a second frame, the first frame and the second frame are mutually engaged, and the first frame and the second frame are both outer and inner sides
  • the first connecting side and the second connecting side between the outer side and the inner side are formed, the outer side of the frame is opposite to the inner side, and the inner side of the frame is inserted into the other frame;
  • the inner side of the first frame is provided with an air flow channel And a vent hole communicating with the air flow passage, the vent hole communicates with the outside;
  • the inner edge of the first frame has a slight gap between the inner edge and the outer edge of the
  • the shortcoming of the vibrating table is as follows: 1. Fixing the first frame on the vibration table, fixing the second frame on the three-dimensional vibration platform, and the first frame and the second frame are fastened to each other to form a lock-type structure, and the first frame and the first frame are The mounting accuracy of the second frame is high, the air film area between the first frame and the second frame is limited, and the presence of the second frame increases the quality of the three-dimensional vibration platform.
  • Static pressure air flotation technology based on small orifice throttling is adopted.
  • the small orifice throttling method usually designs the air cavity at the outlet of the orifice to improve the bearing capacity.
  • the existence of the air cavity inevitably causes the static pressure air flotation system.
  • Producing "air hammer" vibration phenomenon at a specific frequency segment, reducing the support stability and upper limit frequency of the static air flotation system, and, in addition, limited by the size of the throttle hole And the machining accuracy it is difficult to ensure the uniformity of the bearing capacity between each orifice, so that the moving parts of the supported vibrating table are inclined and rotated, which has an effect on the decoupling of the three-component vibrating table.
  • the present invention provides a three-component standard vibration table based on a static pressure air flotation decoupling device with large bearing capacity, stable support and good support uniformity.
  • a three-component standard vibration table based on a static pressure air-floating decoupling device comprising a base, the base is provided with an X-axis vibration table and an X-axis recovery device, a Y-axis vibration table and a Y-axis recovery device, Z An axial vibration table, and a three-dimensional vibration platform;
  • the X-axis vibration table is opposite to the X-axis recovery device via a three-dimensional vibration platform, and the Y-axis vibration table is opposite to the Y-axis recovery device via a three-dimensional vibration platform;
  • the X-axis vibration table and the Y-axis vibration table are respectively fixed with the respective vibration table side static pressure air floating plates, and a gap between the vibration table side static pressure air floating plate and the three-dimensional vibration platform is formed;
  • the X axial recovery device and the Y axial recovery device are respectively composed of a respective return spring and a spring side static pressure air floating plate, and the return spring is fixed with the spring side static pressure air floating plate; the Z axial vibration table and the Z axial air floating plate
  • the decoupling device is fixed, and a gap between the Z-axis air flotation decoupling device and the three-dimensional vibration platform can form a gas film.
  • the spring side static pressure air floating plate and the vibration table side static pressure air floating plate are symmetrically disposed on both sides of the three-dimensional vibration platform.
  • the X-axis vibration table and the X-axis recovery device cooperate to realize the vibration of the three-dimensional vibration platform along the X-axis; the Y-axis vibration table and the Y-axis recovery device work together to realize the three-dimensional vibration platform along the Y-axis Vibration; Z-axis vibration table is used to realize the vibration of the three-dimensional vibration platform along the Z-axis.
  • the X-axis vibration table and the X-axis recovery device push the X-axis vibration of the three-dimensional vibration platform to be the same as the X-axis.
  • Both the X-axis return spring and the Y-axis return spring are air springs.
  • the spring side static pressure air floating plate and the vibrating table side static pressure air floating plate are respectively fixed by the respective substrates and fixed to the substrate
  • the upper porous throttle member is formed with an air flow passage communicating with the porous throttle member.
  • the high pressure gas forms a uniform gas film between the static pressure air floating plate and the three-dimensional vibration platform through the air flow passage and the porous throttle member.
  • porous throttle members there are a plurality of porous throttle members, and the porous throttle members are evenly distributed on the substrate.
  • X-axis spring side static pressure air floating plate and vibrating table side static pressure air floating plate form X-axis air-floating decoupling device, Y-axis spring side static pressure air floating plate and vibration table side static pressure air floating plate A Y-axis air flotation decoupling device is formed.
  • the Z-axis air-floating decoupling device is composed of a first connecting plate, a second connecting plate, an adjusting pad and a Z-axis static pressure air floating plate; the adjusting pad is located between the first connecting plate and the second connecting plate, first The connecting plate, the second connecting plate and the adjusting pad are rigidly connected and enclose the air floating cavity, the Z-axis static pressure air floating plate is placed in the air floating cavity; the second connecting plate is provided with a notch, and the three-dimensional vibration platform passes through the gap and the Z-axis static The air pressure floating plate is fixed; the first connecting plate and the second connecting plate are respectively provided with respective air flow passages and porous throttle members, and the air flow passage of each connecting plate communicates with the porous throttle member.
  • the three-dimensional vibration platform is provided with a connecting angle column, and the second connecting plate is provided with a right angle notch, which is used to connect the three-dimensional vibration platform with the second connecting plate, and between the first connecting plate and the first connecting plate A space is formed, and at the same time, there is also a space between the vertical static pressure air floating plate and the adjustment pad, and the presence of the respective spaces allows the three-dimensional vibration platform to freely vibrate in the X and Y directions.
  • the X, Y and Z axial air flotation decoupling devices together constitute a porous static pressure air flotation decoupling device for decoupling the designed three-axis standard vibration table output triaxial motion.
  • the working process of the invention is: when an axial vibration table generates motion, the vibration is first transmitted to the vibration table and the air spring because the corresponding axial vibration table and the air spring and the air flotation decoupling device are rigidly connected by bolts.
  • the connected air-floating decoupling device transmits the vibration to the three-dimensional vibration platform through a uniform static pressure gas film generated by the corresponding axial air-floating decoupling device; due to the uniform axial static air film to the corresponding axial motion force transmission performance Good, and the resistance generated by the other two axial movements is small, which is in line with the requirements of motion decoupling. Therefore, the motion of the output of the three-dimensional vibration platform is the synthesis of the output vibration of the three-axis vibration table of X, Y and Z. .
  • the invention has the advantages that: 1.
  • the air film in the X axial direction and the Y axial direction is located between the static pressure air floating plate and the three-dimensional vibration platform, and the air film can cover a large area.
  • the vibration table and the recovery device alternately drive the three-dimensional vibration platform, and the burden of the vibration table is reduced; the overall and vibration of the static pressure air-floating plate in the X-axis and the Y-axis
  • the table or the return spring is fixed and there is no problem of deformation.
  • the porous static pressure air-floating decoupling device avoids the interference of non-transmission to motion while achieving the vibration force transmission well, and completes the decoupling of the three-component motion of the three-component vibration table. Since the throttle area of the porous throttle member is much larger than the conventional orifice orifice mode, it can provide greater load carrying capacity while having stable and uniform support performance. The utility solves the problem that the traditional small hole throttling generates "air hammer" vibration and the tilting and rotation of the moving parts of the vibrating table.
  • Figure 1 is a structural diagram of a three-component standard vibration table.
  • Figure 2 is a connection diagram of the X-axis vibration table.
  • Figure 3 is a connection diagram of the X-axis recovery device.
  • Figure 4 is a Z-axis vibration table connection diagram.
  • Figure 5 is a structural view of the Z-axis air flotation decoupling device, (a) is a front view of the air flotation decoupling device, and (b) is a cross-sectional view taken along line A-A of (a).
  • Figure 6 is a three-dimensional vibration platform installation diagram.
  • a three-component standard vibration table based on a static pressure air flotation decoupling device includes a base 1, and the base 1 is provided with an X-axis vibration table 2 vibrating along the X-axis and an X-axis recovery
  • the platform 5; the X-axis vibration table 2 and the X-axis recovery device 6 cooperate to realize the vibration of the three-dimensional vibration platform 5 along the X-axis;
  • the Y-axis vibration table 3 and the Y-axis recovery device 7 cooperate to realize the The three-dimensional vibration platform 5 vibrates in the Y-axis;
  • the Z-axis vibration table 4 is used to realize the vibration of the three-dimensional vibration platform 5 along the Z-axis.
  • the X-axis vibrating table 2 is fixed to the vibrating table side static pressure air floating plate 21.
  • the X-axis returning device 6 is statically operated by the X-axis air spring 61 and the spring side.
  • the air-pressure floating plate 62 is composed; the X-axis vibration table 2 and the X-axis recovery device 6 pass between the vibration table side static pressure air floating plate 21 and the spring side static pressure air floating plate 62 and the three-dimensional vibration platform 5, respectively.
  • a gas film is formed for transmitting X-axis vibration.
  • the vibrating table side static pressure air floating plate 21 is a plate-like structure, and the first transmitting surface 211 and the second transmitting surface 212 are formed thereon; the vibrating table side static pressure air floating plate 21 and the X axis are
  • the moving vibration of the X-axis vibrating table 2 is transmitted to the vibrating table side static pressure air floating plate 21 by the bolting of the moving member of the vibrating table 2, and the second transmitting surface 212 is interposed between the second transmitting surface 212 and the three-dimensional vibration platform 5
  • There is a small gap and a gas film is generated in this minute gap, and the output vibration of the X-axis vibration table 2 is further transmitted to the three-dimensional vibration table 5 through the gas film.
  • the second transmission surface 212 is provided with a plurality of throttle mounting holes for mounting the porous throttle member 213 on the vibrating table side static pressure air floating plate 21 by gluing, the vibration table side
  • the static pressure air floating plate 21 is internally provided with a gas path structure for supplying air to the porous throttle member 213, and when the static pressure air floating plate 21 is externally compressed air to the vibrating table side, the porous throttle member is used.
  • the throttling effect of 213 forms a uniform static between the three-dimensional vibration platform 5 and the second transmission surface 212 Compressed air film to achieve the transmission of vibration.
  • the spring side static pressure air floating plate 62 has the same structure as the vibration table side static pressure air floating plate 21, and constitutes a third transmission surface 621 and a fourth transmission surface 622; the spring side static pressure gas
  • the floating plate 62 is screwed to the X-axis air spring 61 to transmit the restoring force provided by the X-axis air spring 61 to the spring-side static pressure air floating plate 62, and the fourth transmission surface 622 and the There is a small gap between the three-dimensional vibration platforms 5, and a gas film is generated in this minute gap, and the restoring force provided by the X-axis air spring 61 is further transmitted to the three-dimensional vibration platform 5 through the gas film.
  • the fourth transmission surface 622 is provided with a plurality of throttle mounting holes for attaching the porous throttle member 213 to the spring-side static pressure air floating plate 62 by means of glue, the spring side static pressure
  • the air floating plate 62 is internally provided with an air passage structure for supplying air to the porous throttle member 213.
  • the section of the porous throttle member 213 is The flow acts to form a uniform static pressure gas film between the three-dimensional vibration platform 5 and the fourth transmission surface 622 to realize the transmission of vibration.
  • the X-axis vibration table 2 cooperates with the X-axis air spring 61 to output the vibration of the X-axis vibration table 2 by the transmission of the uniform static pressure gas film generated by the X-axis air-floating decoupling device. It is transmitted to the three-dimensional vibration platform 5, and the excitation of the three-dimensional vibration platform 5 along the X-axis is completed.
  • the Y-axis air-floating decoupling device has the same structure as the X-axis air-floating decoupling device, and the Y-axis vibrating table 3 has the same structure as the X-axis vibrating table 2, and the Y-axis air spring and the X-axis
  • the air spring 61 has the same structure, and similarly, the Y-axis vibration table 3 and the Y-axis air spring cooperate by the transmission of the uniform static pressure film generated by the Y-axis air-floating decoupling device.
  • the Y-axis vibration table output vibration is transmitted to the three-dimensional vibration platform 5, and the three-dimensional vibration platform 5 is excited along the Y-axis.
  • the Z-axis vibrating table 4 is fixed to the Z-axis air flotation decoupling device 41.
  • the Z-axis air flotation decoupling device 41 is composed of a first connecting plate 411, a second connecting plate 412, an adjusting pad 413, a Z-axis static pressure air floating plate 414, and the like.
  • the first connecting plate 411 is provided with a first connecting surface 4111, a second connecting surface 4112; the second connecting plate 412 is provided with a third connecting surface 4121, a fourth connecting surface 4122;
  • the vertical static pressure air floating plate 414 is provided with a first air floating surface 4141 and a second air floating surface 4142;
  • the first connecting plate 411 is connected with the Z axial vibration table 4 by bolts for Z
  • the output vibration of the axial vibration table 4 is transmitted to the first connecting plate 411;
  • the first connecting plate 411, the adjusting pad 413 and the second connecting plate 412 are connected by bolts, and are connected by the second connecting surface 4112 and the third
  • the connecting surface 4121 and the adjusting pad 413 together form an air floating chamber 415;
  • the Z-axis static pressure air floating plate 414 is installed in the air floating chamber 415, and the first air floating surface 4141 and the first
  • the second connecting surface 4112 is opposite to the second air floating surface 4142 is opposite to the third connecting surface 4121.
  • the second connecting surface 4112 and the third connecting surface 4121 are respectively provided with a plurality of throttle mounting holes for mounting the porous throttle member 213 to the first connecting plate 411 and the second connecting plate by glue bonding.
  • the first connecting plate 411 and the second connecting plate 412 are respectively provided with a gas path structure for supplying air to the porous throttle member 213, and the first connecting plate 411 and the second connecting plate are connected to the first connecting plate 411 and the second connecting plate 412.
  • the three-dimensional vibration platform 5 is provided with a connecting angle column 51
  • the second connecting plate 412 is provided with a right angle notch to jointly connect the three-dimensional vibration platform 5 and the second air floating surface 4142 .
  • the fourth connecting surface 4122 and at the same time, as shown in FIG. 5, there is also a gap between the Z-axis static air floating plate 414 and the adjusting pad 413. The presence of the respective intervals allows the three-dimensional vibration table 5 to freely vibrate in the X, Y directions.
  • the Z-axis vibration table is further realized by the joint action of the uniform static pressure film formed between the second connecting surface 4112 and the first air floating surface 4141 and between the third connecting surface 4121 and the second air floating surface 4142. 4
  • the output vibration is transmitted to the three-dimensional vibration platform 5, and the excitation of the three-dimensional vibration platform 5 along the Z-axis is completed.
  • the X, Y and Z axial air flotation decoupling devices together constitute a porous static pressure air flotation decoupling device for decoupling the designed three-axis standard vibration table output triaxial motion.
  • the working process of the invention is: when an axial vibration table generates motion, the vibration is first transmitted to the vibration table and the air spring because the corresponding axial vibration table and the air spring and the air flotation decoupling device are rigidly connected by bolts.
  • the connected air-floating decoupling device transmits the vibration to the three-dimensional vibration platform 5 through a uniform static pressure gas film generated by the corresponding axial air-floating decoupling device; because the uniform static pressure gas film transmits the corresponding axial motion force
  • the performance is good, and the resistance generated by the other two axial movements is small, which is in line with the requirement of motion decoupling. Therefore, the output of the three-dimensional vibration platform 5 is the output vibration of the three-axis vibration table of X, Y and Z. Synthesis.
  • the invention has the advantages that: 1.
  • the air film in the X axial direction and the Y axial direction is located between the static pressure air floating plate and the three-dimensional vibration platform, and the air film can cover a large area.
  • the vibration table and the recovery device alternately drive the three-dimensional vibration platform, and the burden of the vibration table is reduced; the overall and vibration of the static pressure air-floating plate in the X-axis and the Y-axis
  • the table or the return spring is fixed and there is no problem of deformation.
  • the porous static pressure air flotation decoupling device avoids the non-transmission to the transportation while achieving the vibration force transmission well.
  • the dynamic interference well completes the decoupling of the three-component motion of the three-component shaking table output. Since the throttling area of the porous throttling device is much larger than the traditional orifice throttling mode, it can provide more bearing capacity, and has stable and uniform supporting performance, effectively solving the "air hammer" vibration generated by the traditional small orifice throttling and Problems such as tilting and rotating of the moving parts of the vibrating table.
  • the difference between the embodiment and the first embodiment is that the vibrating table side static pressure air floating plate 21, the spring side static pressure air floating plate 62, the first connecting plate 411 and the second connecting plate 412 are each provided with one.
  • the throttle mounting hole is used for mounting a whole piece of the porous throttle member 213 by gluing to achieve throttling.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

基于静压气浮解耦装置的三分量标准振动台，包括底座(1)，所述的底座(1)上设有X轴向振动台(2)和X轴向回复装置(6)，Y轴向振动台(3)和Y轴向回复装置(7)，Z轴向振动台(4)，和三维振动平台(5)；X轴向振动台(2)隔着三维振动平台(5)与X轴向回复装置(6)相对，Y轴向振动台(3)隔着三维振动平台(5)与Y轴向回复装置(7)相对；X轴向振动台(2)和Y轴向振动台(3)分别与各自的振动台侧静压气浮板(21)固定，振动台侧静压气浮板(21)与三维振动平台(5)之间有能形成气膜的间隙；X轴向回复装置(6)和Y轴向回复装置(7)分别由各自的复位弹簧(61)和弹簧侧静压气浮板(62)组成；Z轴向振动台(4)与Z轴向气浮解耦装置(41)固定，Z轴向气浮解耦装置(41)与三维振动平台(5)之间有能形成气膜的间隙。

Description

基于静压气浮解耦装置的三分量标准振动台 技术领域
本发明涉及一种基于静压气浮解耦装置的三分量标准振动台。
技术背景
目前对三维测振传感器的校准多采用单维振动校准系统对三测量轴依次进行，而这种方法耗时较长、数据处理复杂，同时考虑到三维传感器各维间的相互耦合，该方法较难得到反映维间耦合关系的灵敏度矩阵。因此，研制出可对三维测振传感器三轴向同时激振的三分量标准振动台，对测振传感器校准技术的发展及相应行业技术的进步都具有重要的理论和实际意义。
中国专利201110207297.5披露了一种基于锁扣式解耦装置的三分量标准振动台，包括底座，X向电磁振动台，Y向电磁振动台，Z向电磁振动台和三维振动平台，每个电磁振动台均通过运动解耦装置与三维振动平台连接；运动解耦装置包括第一边框和第二边框，第一边框和第二边框相互扣合，第一边框和第二边框均由外边、内边、外边与内边之间的第一连接侧边和第二连接侧边组成，边框的外边与内边相对，边框的内边插入另一个边框内；第一边框的内边中设有气流通道和与气流通道连通的通气孔，通气孔与外界连通；第一边框的内边与第二边框的内边和外边之间均有微小间隙，微小间隙形成第一边框内边的气浮导轨；第二边框的内边与第一边框的外边之间设有防止第二边框与第一边框外边接触的间隔；气流通道与外部压缩空气源连通；第一边框的外边与电磁振动台连接，第二边框的外边与三维振动平台连接。这种振动台采用锁扣式结构及静压气浮支承实现力的传递，来解决三分量运动解耦的问题。
该振动台的缺点在于：1、通过在振动台上固定第一边框，在三维振动平台上固定第二边框，第一边框和第二边框相互扣合形成锁扣式结构，存在第一边框和第二边框的安装精度要求高，第一边框和第二边框之间的气膜面积有限，且第二边框的存在增大了三维振动平台的质量。
2、振动台往复振动时均需要通过锁扣式结构拉动三维振动平台，锁扣式结构容易出现形变，振动台的负担大。
3、采用基于小孔节流的静压气浮技术，小孔节流方式通常在节流孔出口处设计气腔以提高承载能力，然而，气腔的存在不可避免的使静压气浮系统在特定频率段产生“气锤”振动现象，降低了静压气浮系统的支撑稳定性及上限使用频率，此外，受限于节流小孔尺寸 及加工精度，很难保证每个节流孔之间承载能力的均匀性，从而使被支撑的振动台运动部件产生倾斜及旋转，对三分量振动台运动解耦产生影响。
发明内容
为克服现有小孔节流技术使用于三分量标准振动台运动解耦装置时难以获得较好地承载能力的同时具有较高的支撑稳定性以及由于支撑均匀性差而造成振动台运动部件倾斜及旋转的缺点，本发明提供了一种承载力大、支撑稳定且支撑均匀性好的基于静压气浮解耦装置的三分量标准振动台。
基于静压气浮解耦装置的三分量标准振动台，包括底座，所述的底座上设有X轴向振动台和X轴向回复装置，Y轴向振动台和Y轴向回复装置，Z轴向振动台，和三维振动平台；
其特征在于：X轴向振动台隔着三维振动平台与X轴向回复装置相对，Y轴向振动台隔着三维振动平台与Y轴向回复装置相对；
X轴向振动台和Y轴向振动台分别与各自的振动台侧静压气浮板固定，振动台侧静压气浮板与三维振动平台之间有能形成气膜的间隙；
X轴向回复装置和Y轴向回复装置分别由各自的复位弹簧和弹簧侧静压气浮板组成，复位弹簧与弹簧侧静压气浮板固定；Z轴向振动台与Z轴向气浮解耦装置固定，Z轴向气浮解耦装置与三维振动平台之间有能形成气膜的间隙。
进一步，弹簧侧静压气浮板和振动台侧静压气浮板对称地设置于三维振动平台两侧。
X轴向振动台、X轴向回复装置共同作用实现所述的三维振动平台沿X轴向振动；Y轴向振动台，Y轴向回复装置共同作用实现所述的三维振动平台沿Y轴向振动；Z轴向振动台用于实现所述的三维振动平台沿Z轴向振动。
以X轴向振动台和X轴向回复装置推动三维振动平台的X轴向振动为例，X轴向振动台向靠近三维振动平台运动时，X轴向振动台及其与三维振动平台之间的气膜推动三维振动平台向X轴向回复装置的方向运动，此时X轴向的复位弹簧被压缩；当X轴向振动台复位时，三维振动平台失去X轴向振动台的推力，X轴向的复位弹簧复位，使三维振动平台在X轴向复位。Y轴向振动台和Y轴向回复装置推动三维振动平台的Y轴向振动与X轴向相同。
X轴向的复位弹簧和Y轴向的复位弹簧均为空气弹簧。
进一步，弹簧侧静压气浮板和振动台侧静压气浮板分别由各自的基板和固定于基板 上的多孔质节流件组成，基板中设有与多孔质节流件连通的气流通道。高压气经气流通道和多孔质节流件在静压气浮板与三维振动平台之间形成均匀的气膜。
进一步，多孔质节流件有多个，多孔质节流件均匀分布于基板上。
X轴向的弹簧侧静压气浮板和振动台侧静压气浮板形成X轴向气浮解耦装置，Y轴向的弹簧侧静压气浮板和振动台侧静压气浮板形成Y轴向气浮解耦装置。
进一步，Z轴向气浮解耦装置由第一连接板、第二连接板、调整垫、Z轴静压气浮板组成；调整垫位于第一连接板和第二连接板之间，第一连接板、第二连接板和调整垫刚性连接并围成气浮腔，Z轴静压气浮板放置于气浮腔内；第二连接板设有缺口，三维振动平台经过缺口与Z轴静压气浮板固定；第一连接板和第二连接板上分别设有各自的气流通道和多孔质节流件，每个连接板的气流通道与多孔质节流件连通。
所述的三维振动平台设有连接角柱，所述的第二连接板设有直角缺口，共同实现将所述的三维振动平台与第二连接板连接，且与所述的第一连接板之间形成间隔，与此同时，在所述的垂直静压气浮板及所述的调整垫之间也存在间隔，所述各间隔的存在使三维振动平台可以沿X、Y轴向自由振动。
所述的X、Y、Z轴向气浮解耦装置共同组成多孔质静压气浮解耦装置，用于实现设计的三轴向标准振动台输出三轴向运动的解耦。
本发明的工作过程为：当某轴向振动台产生运动时，由于对应轴向振动台及空气弹簧与气浮解耦装置之间通过螺栓刚性连接，振动首先传递到与该振动台及空气弹簧连接的气浮解耦装置，再通过对应轴向气浮解耦装置产生的均匀静压气膜将振动传递至三维振动平台；由于所述的均匀静压气膜对相应轴向运动力传递性能好，并对另外两个轴向运动产生的阻力小，很好地符合了运动解耦的要求，所以，三维振动平台输出的运动即是X、Y、Z三轴向振动台输出振动的合成。
本发明的优点在于：1、X轴向和Y轴向的气膜位于静压气浮板与三维振动平台之间，气膜能够覆盖的面积大。
2、三维振动平台的X轴向和Y轴向振动过程中，振动台和回复装置交替驱动三维振动平台，振动台的负担减轻；X轴向和Y轴向的静压气浮板整体与振动台或复位弹簧固定，不存在变形的问题。
3、多孔质静压气浮解耦装置，在很好地实现振动力传递的同时，避免了非传递向运动的干扰，很好地完成了三分量振动台输出三分量运动的解耦。由于多孔质节流件的节流面积远大于传统小孔节流方式，可提供更大承载能力的同时、具有稳定且均匀的支撑性能，有 效解决了传统小孔节流产生“气锤”振动及振动台运动部件倾斜及旋转等问题。
附图说明
图1为三分量标准振动台结构图。
图2为X轴向振动台连接图。
图3为X轴向回复装置连接图。
图4为Z轴向振动台连接图。
图5为Z轴向气浮解耦装置结构图，(a)是气浮解耦装置的正视图，(b)是(a)的A-A向剖视图。
图6为三维振动平台安装图。
具体实施方式
实施例一
基于静压气浮解耦装置的三分量标准振动台，如图1所示，包括底座1，所述的底座1上设有沿X轴向振动的X轴向振动台2以及X轴向回复装置6，沿Y轴向振动的Y轴向振动台3以及Y轴向回复装置7，沿Z轴向振动的Z轴向振动台4，和与所述的振动台与回复装置连接的三维振动平台5；X轴向振动台2、X轴向回复装置6共同作用实现所述的三维振动平台5沿X轴向振动；Y轴向振动台3，Y轴向回复装置7共同作用实现所述的三维振动平台5沿Y轴向振动；Z轴向振动台4用于实现所述的三维振动平台5沿Z轴向振动。
如图2所示，所述的X轴向振动台2与振动台侧静压气浮板21固定，如图3所示，X轴向回复装置6由X轴向空气弹簧61及弹簧侧静压气浮板62组成；X轴向振动台2与X轴向回复装置6分别通过振动台侧静压气浮板21及弹簧侧静压气浮板62与所述的三维振动平台5之间形成气膜，用于传递X轴向振动。
所述的振动台侧静压气浮板21为板状结构，其上构成第一传递面211、第二传递面212；所述的振动台侧静压气浮板21与所述的X轴向振动台2运动部件通过螺栓连接，实现将X轴向振动台2输出振动传递到振动台侧静压气浮板21，所述的第二传递面212与所述的三维振动平台5之间存在微小间隙，并在此微小间隙产生气膜，通过气膜进一步将X轴向振动台2输出振动传递到三维振动平台5。
所述的第二传递面212设有多个节流器安装孔，用于将多孔质节流件213通过胶接方式安装于振动台侧静压气浮板21上，所述的振动台侧静压气浮板21内部设有对多孔质节流件213供气的气路结构，当向所述的振动台侧静压气浮板21通以外部压缩空气时，由于多孔质节流件213的节流作用，在所述的三维振动平台5与第二传递面212之间形成均匀静 压气膜，实现对振动的传递。
所述的弹簧侧静压气浮板62与所述的振动台侧静压气浮板21结构相同，其上构成第三传递面621、第四传递面622；所述的弹簧侧静压气浮板62与所述的X轴向空气弹簧61通过螺栓连接，实现将X轴向空气弹簧61提供的回复力传递到弹簧侧静压气浮板62，所述的第四传递面622与所述的三维振动平台5之间存在微小间隙，并在此微小间隙产生气膜，通过气膜进一步将X轴向空气弹簧61提供的回复力传递到三维振动平台5。
所述的第四传递面622设有多个节流器安装孔，用于将多孔质节流件213通过胶接方式安装于弹簧侧静压气浮板62上，所述的弹簧侧静压气浮板62内部设有对多孔质节流件213供气的气路结构，当向所述的弹簧侧静压气浮板62通以外部压缩空气时，由于多孔质节流件213的节流作用，在所述的三维振动平台5与第四传递面622之间形成均匀静压气膜，实现对振动的传递。
所述的振动台侧静压气浮板21与弹簧侧静压气浮板62共同构成X轴向气浮解耦装置。
通过所述的X轴向气浮解耦装置产生的均匀静压气膜的传递作用，所述的X轴向振动台2与X轴向空气弹簧61共同作用将X轴向振动台2输出振动传递到三维振动平台5，完成对三维振动平台5沿X轴向激振。
Y轴向气浮解耦装置与X轴向气浮解耦装置结构相同，Y轴向振动台3与所述的X轴向振动台2结构相同，Y轴向空气弹簧与所述的X轴向空气弹簧61结构相同，同理，通过所述的Y轴向气浮解耦装置产生的均匀静压气膜的传递作用，所述的Y轴向振动台3与Y轴向空气弹簧共同作用实现将Y轴向振动台输出振动传递到三维振动平台5，完成对三维振动平台5沿Y轴向激振。
如图4所示，Z轴向振动台4与Z轴向气浮解耦装置41固定。所述的Z轴向气浮解耦装置41由第一连接板411、第二连接板412、调整垫413、Z轴静压气浮板414等组成。
如图5所示，所述的第一连接板411设有第一连接面4111、第二连接面4112；所述的第二连接板412设有第三连接面4121、第四连接面4122；所述的垂直静压气浮板414设有第一气浮面4141、第二气浮面4142；所述的第一连接板411与所述的Z轴向振动台4通过螺栓连接，用于将Z轴向振动台4输出振动传递到第一连接板411；所述的第一连接板411、调整垫413以及第二连接板412通过螺栓连接，并由所述的第二连接面4112、第三连接面4121以及调整垫413共同围成气浮腔415；所述的Z轴静压气浮板414安装在所述的气浮腔415内，所述的第一气浮面4141与所述的第二连接面4112相对，所述的第二气浮面 4142与所述的第三连接面4121相对，通过调整所述的调整垫413的尺寸，可以在所述的第二气浮面4142与第三连接面4121之间形成微小间隙。
所述的第二连接面4112与第三连接面4121均设有多个节流器安装孔，用于将多孔质节流件213通过胶接方式安装于第一连接板411与第二连接板412上；所述的第一连接板411与第二连接板412内部均设有对多孔质节流件213供气的气路结构，当向所述的第一连接板411与第二连接板412通以外部压缩空气时，由于第二气浮面4142与第三连接面4121之间微小间隙的存在以及多孔质节流件213的节流作用，在所述的第二连接面4112与第一气浮面4141之间以及第三连接面4121与第二气浮面4142之间均形成均匀静压气膜。
如图6所示，所述的三维振动平台5设有连接角柱51，所述的第二连接板412设有直角缺口，共同实现将所述的三维振动平台5与第二气浮面4142连接，且与所述的第四连接面4122之间形成间隔，与此同时，如图5所示，在所述的Z轴静压气浮板414及所述的调整垫413之间也存在间隔，所述各间隔的存在使三维振动平台5可以沿X、Y轴向自由振动。
通过所述的第二连接面4112与第一气浮面4141之间以及第三连接面4121与第二气浮面4142之间形成的均匀静压气膜的共同作用，进一步实现将Z轴向振动台4输出振动传递到三维振动平台5，完成对三维振动平台5沿Z轴向激振。
所述的X、Y、Z轴向气浮解耦装置共同组成多孔质静压气浮解耦装置，用于实现设计的三轴向标准振动台输出三轴向运动的解耦。
本发明的工作过程为：当某轴向振动台产生运动时，由于对应轴向振动台及空气弹簧与气浮解耦装置之间通过螺栓刚性连接，振动首先传递到与该振动台及空气弹簧连接的气浮解耦装置，再通过对应轴向气浮解耦装置产生的均匀静压气膜将振动传递至三维振动平台5；由于所述的均匀静压气膜对相应轴向运动力传递性能好，并对另外两个轴向运动产生的阻力小，很好地符合了运动解耦的要求，所以，三维振动平台5输出的运动即是X、Y、Z三轴向振动台输出振动的合成。
本发明的优点在于：1、X轴向和Y轴向的气膜位于静压气浮板与三维振动平台之间，气膜能够覆盖的面积大。
2、三维振动平台的X轴向和Y轴向振动过程中，振动台和回复装置交替驱动三维振动平台，振动台的负担减轻；X轴向和Y轴向的静压气浮板整体与振动台或复位弹簧固定，不存在变形的问题。
3、多孔质静压气浮解耦装置，在很好地实现振动力传递的同时，避免了非传递向运 动的干扰，很好地完成了三分量振动台输出三分量运动的解耦。由于多孔质节流件节流面积远大于传统小孔节流方式，可提供更大承载能力的同时、具有稳定且均匀的支撑性能，有效解决了传统小孔节流产生“气锤”振动及振动台运动部件倾斜及旋转等问题。
实施例二
本实施例与实施例一的区别在于：所述的振动台侧静压气浮板21、弹簧侧静压气浮板62、第一连接板411以及第二连接板412上均设有1个节流器安装孔，用于通过胶接方式安装一整片多孔质节流件213，实现节流作用。
本说明书实施例所述的内容仅仅是对发明构思的实现形式的列举，本发明的保护范围不应当被视为仅限于实施例所陈述的具体形式，本发明的保护范围也及于本领域技术人员根据本发明构思所能够想到的等同技术手段。

Claims (6)

  1. 基于静压气浮解耦装置的三分量标准振动台，包括底座，所述的底座上设有X轴向振动台和X轴向回复装置，Y轴向振动台和Y轴向回复装置，Z轴向振动台，和三维振动平台；其特征在于：X轴向振动台隔着三维振动平台与X轴向回复装置相对，Y轴向振动台隔着三维振动平台与Y轴向回复装置相对；X轴向振动台和Y轴向振动台分别与各自的振动台侧静压气浮板固定，振动台侧静压气浮板与三维振动平台之间有能形成气膜的间隙；X轴向回复装置和Y轴向回复装置分别由各自的复位弹簧和弹簧侧静压气浮板组成，复位弹簧与弹簧侧静压气浮板固定；Z轴向振动台与Z轴向气浮解耦装置固定，Z轴向气浮解耦装置与三维振动平台之间有能形成气膜的间隙。
  2. 如权利要求1所述的基于静压气浮解耦装置的三分量标准振动台，其特征在于：弹簧侧静压气浮板和振动台侧静压气浮板对称地设置于三维振动平台两侧。
  3. 如权利要求2所述的基于静压气浮解耦装置的三分量标准振动台，其特征在于：X轴向的复位弹簧和Y轴向的复位弹簧均为空气弹簧。
  4. 如权利要求3所述的基于静压气浮解耦装置的三分量标准振动台，其特征在于：弹簧侧静压气浮板和振动台侧静压气浮板分别由各自的基板和固定于基板上的多孔质节流件组成，基板中设有与多孔质节流件连通的气流通道。
  5. 如权利要求4所述的基于静压气浮解耦装置的三分量标准振动台，其特征在于：多孔质节流件有多个，多孔质节流件均匀分布于基板上。
  6. 如权利要求5所述的基于静压气浮解耦装置的三分量标准振动台，其特征在于：Z轴向气浮解耦装置由第一连接板、第二连接板、调整垫、Z轴静压气浮板组成；调整垫位于第一连接板和第二连接板之间，第一连接板、第二连接板和调整垫刚性连接并围成气浮腔，Z轴静压气浮板放置于气浮腔内；第二连接板设有缺口，三维振动平台经过缺口与Z轴静压气浮板固定；第一连接板和第二连接板上分别设有各自的气流通道和多孔质节流件，每个连接板的气流通道与多孔质节流件连通。
PCT/CN2015/087342 2015-01-15 2015-08-18 基于静压气浮解耦装置的三分量标准振动台 WO2016112685A1 (zh)

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