WO2016110198A1 - 检测装置 - Google Patents

检测装置 Download PDF

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Publication number
WO2016110198A1
WO2016110198A1 PCT/CN2015/099360 CN2015099360W WO2016110198A1 WO 2016110198 A1 WO2016110198 A1 WO 2016110198A1 CN 2015099360 W CN2015099360 W CN 2015099360W WO 2016110198 A1 WO2016110198 A1 WO 2016110198A1
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WIPO (PCT)
Prior art keywords
platform
detecting
detecting device
electrode
actuating mechanism
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PCT/CN2015/099360
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English (en)
French (fr)
Inventor
张家玮
Original Assignee
史拓莱姆有限公司
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Application filed by 史拓莱姆有限公司 filed Critical 史拓莱姆有限公司
Priority to US15/532,502 priority Critical patent/US10338097B2/en
Priority to CN201580052468.8A priority patent/CN106796247A/zh
Publication of WO2016110198A1 publication Critical patent/WO2016110198A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Definitions

  • the invention relates to a detection device, and more particularly to a detection device that is easy to manufacture.
  • An atomic force microscope is a detection device for detecting minute objects.
  • the atomic force microscope touches the surface of the object by a probe and moves along the surface of the object, and then the light lever is used to read the micro-actuation of the probe, so that the shape of the minute object can be accurately measured.
  • the existing atomic force microscope has its body made of metal, so that the material is expensive, the manufacturing process is not easy, and it is not easy to carry.
  • the present invention provides a detection device that is easy to manufacture.
  • the invention provides a detecting device for detecting a test object, comprising:
  • a first platform comprising a plurality of first circuit boards that are coupled to each other, at least a portion of the plurality of first circuit boards being electrically connected to each other, the first platform being provided with a load for carrying the object to be tested station;
  • a second platform includes at least one second circuit board, the second platform is provided with a detecting module for detecting the object to be tested, and the detecting module is electrically connected to at least a part of the plurality of second circuit boards;
  • a plurality of screws are coupled between the first platform and the second platform.
  • the second circuit board is provided with a plurality of nuts corresponding to the plurality of screws, and each of the nuts is electrically connected to the second circuit board, and the screws are respectively screwed to the corresponding nuts and abutted on the second circuit board.
  • the first platform is provided with a plurality of nuts corresponding to the plurality of screws, and each of the nuts is electrically connected to the second circuit board, and the screws are respectively screwed to the corresponding nuts and abutted on the second circuit board.
  • one of the first circuit boards is provided with a hole electrode, a groove electrode and an electrode piece, wherein one screw abuts the hole electrode, the other screw abuts the groove electrode, and the other screw abuts Connect the electrode sheet.
  • the plurality of screws are electrically connected to the hole electrode, the groove electrode and the electrode piece to electrically connect the first platform to the second platform.
  • an actuating mechanism disposed on the first platform is further included.
  • the actuating mechanism comprises a plurality of piezoelectric horns disposed on the first platform, and a plurality of rams connected between the corresponding piezoelectric horns and the actuating mechanism.
  • an actuating mechanism disposed on the second platform is further included.
  • the actuating mechanism interlocks the detecting module.
  • the actuating mechanism comprises a plurality of piezoelectric horns disposed on the second platform and a plurality of rams connected between the corresponding piezoelectric horn and the actuating mechanism.
  • each of the screws is electrically connected to one of the first circuit boards and one of the second circuit boards.
  • the detecting module comprises a probe.
  • the detecting module comprises an optical detecting component.
  • the detecting device provided by the invention is mainly made of a circuit board, which is easy to manufacture, low in cost, easy to assemble, small in size, light in weight, and convenient to carry.
  • FIG. 1 is a perspective exploded view of a detecting device in accordance with a preferred embodiment of the present invention.
  • FIG. 2 is another perspective exploded view of the detecting device according to a preferred embodiment of the present invention.
  • FIG 3 is a perspective view of a detecting device in accordance with a preferred embodiment of the present invention.
  • FIG. 4 is another schematic configuration diagram of a first platform in a detecting device according to a preferred embodiment of the present invention.
  • FIG. 5 is still another schematic configuration diagram of a first platform in a detecting apparatus according to a preferred embodiment of the present invention.
  • a preferred embodiment of the present invention provides a detecting device for detecting an object to be tested 10.
  • the detecting device of the present invention comprises a first platform 100, a second platform 200, a plurality of screws 310/320/330, a loading platform 400, an actuating mechanism 500 and a detecting module 600.
  • the first platform 100 includes a plurality of first circuit boards 110, and the plurality of first circuit boards 110 are coupled to each other. At least a portion of the first circuit board 110 is soldered to each other and electrically connected to each other.
  • the conductive tape 121 may be adhered as shown in FIG. 4 to connect the plurality of first circuit boards 110 to each other.
  • a plurality of first circuit boards 110 are connected by wires 122.
  • the plurality of first circuit boards 110 include a bottom plate 110a and a top plate 110b disposed in parallel with each other, and the bottom plate 110a and the top plate 110b are horizontally disposed.
  • the plurality of first circuit boards 110 further includes a plurality of vertical plates 110c perpendicular to the bottom plate 110a and the top plate 110b, and each of the vertical plates 110c is respectively connected to the bottom plate 110a and the top plate 110b.
  • the bottom plate 110a and the top plate 110b are respectively circular plates
  • the vertical plate 110c is a pair of rectangular plates
  • the vertical plates 110c are vertically arranged and cross-connected.
  • the top plate 110b is provided with a hole electrode 111b and a groove electrode 112b electrically connected to the top plate 110b
  • the top plate 110b is further provided with an electrode piece 113b electrically connected to the top plate 110b.
  • the second platform 200 preferably includes a second circuit board 210.
  • the second circuit board 210 is provided with a plurality of nuts 221, 222, and 223, and the nuts 221, 222, and 223 are respectively electrically connected.
  • the second circuit board 210 in the present embodiment, preferably has three nuts 221, 222, 223.
  • the number of the screws 310, 320, 330 preferably corresponds to the number of nuts 221, 222, 223, and each of the screws 310, 320, 330 corresponds to each of the nuts 221, 222, 223, respectively.
  • 320, 330 are respectively screwed to the corresponding nuts 221, 222, 223 and abut against the top plate 110b of the first platform 100, thereby being connected between the first platform 100 and the second platform 200 to connect the second platform 200 Supported on the top plate 110b of the first platform 100.
  • the plurality of screws 310, 320, and 330 are respectively abutted on the hole electrode 111b, the groove electrode 112b, and an electrode piece 113b, thereby being electrically connected between the first platform 100 and the second platform 200.
  • the screws 310, 320, and 330 are twisted, the screw 310 abutting against the hole electrode 111b is fixed, and the screw 320 abutting on the groove electrode 112b has a linear degree of freedom along the groove electrode 112b, and the screw 330 abuts against the electrode piece 113b.
  • the stage 400 is carried on the top plate 110b of the first platform 100 for carrying the object to be tested 10.
  • the actuation mechanism 500 is disposed on the first platform 100.
  • the actuation mechanism 500 includes a plurality of piezoelectric horns 510 disposed on the first platform 100 and the actuation mechanism 500 interlocks the stage 400.
  • the piezoelectric horn 510 is disposed on one surface of the bottom plate 110a and disposed toward the top plate 110b. Each piezoelectric horn 510 is electrically connected to the bottom plate 110a.
  • the actuation mechanism 500 also includes a plurality of jacks 520 that correspond to the plurality of piezoelectric horns 510.
  • Each of the jacks 520 is movably disposed through the top plate 110b. One end of each of the jacks 520 abuts the corresponding piezoelectric horn 510, and the stage 400 is carried on the other end of the plurality of jacks 520.
  • the tilting angle of the stage 400 can be adjusted by energizing each of the horns to push the corresponding jack 520.
  • the detecting module 600 is disposed on the second platform 200 for detecting the object to be tested 10 , and the detecting module 600 is preferably disposed on the second circuit board 210 and electrically connected to the second circuit board 210 .
  • the detecting module 600 includes a probe 610 and an optical detecting component 620.
  • the probe 610 is configured to face the surface of the object to be tested 10, and the optical detecting component 620 is configured to read the action of the probe 610.
  • the optical detecting component 620 is preferably electrically connected to the second circuit board 210.
  • the optical detecting component 620 can be an optical detecting component 620 capable of forming an optical lever, or can be an optical detecting component 620 like an optical disk reading head.
  • the relative position of the stage 400 and the probe 610 can be adjusted by adjusting the inclination of the stage 400, but the invention is not limited thereto.
  • the aforementioned actuation mechanism 500 can also be disposed on the second platform 200 and interlocked with the detection module 600.
  • the piezoelectric horn 510 of the actuating mechanism 500 can also be disposed on the second circuit board 210, and connected between the corresponding piezoelectric horn 510 and the detecting module 600 by the jack 520, thereby adjusting the check.
  • the relative position of the stage 400 and the probe 610 can be adjusted by measuring the inclination of the module 600.
  • Each of the screws 310, 320, and 330 respectively abuts and electrically connects the hole electrode 111b, the groove electrode 112b, and the electrode pad 113b on the top plate 110b of the first platform 100, thereby enabling the first platform 100 and the second platform 200 to be electrically connected.
  • the connection is made such that the detection module 600 on the second platform 200 can be electrically connected to the circuit boards 110 of the first platform 100. Therefore, corresponding circuits can be disposed on the circuit boards 110 of the first platform 100 to operate the detection module 600.
  • the detecting device of the present invention is mainly made by splicing a circuit board. Since the circuit board is easy to manufacture and low in cost, the assembly method of the splicing is also easy to assemble, so that the selling price of the detecting device can be greatly reduced and mass production is facilitated. Furthermore, the detecting device of the present invention is mainly made of a circuit board, and its weight is much smaller than that of the existing atomic force microscope, so that it is easy to carry.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Microscoopes, Condenser (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

一种检测装置，用于检测一待测物（10），包括一第一平台（100）、一第二平台（200）及多个螺杆（310，320，330）；第一平台（100）包含相互榫接组合的多个第一电路板（110），至少一部分的第一电路板（110）相互电性连接，第一平台（100）上设置有用以承载待测物（10）的一载台（400）；第二平台（200）包含至少一第二电路板（210），第二平台（200）上设置有用以检测待测物（10）的一检测模块（600），检测模块（600）电性连接至少一部分的第二电路板（210）；螺杆（310，320，330）连接于第一平台（100）及第二平台（200）之间。该检测装置主要由电路板榫接制成，其制作容易、成本低廉、易于组装，且体积小、轻量，便于携带。

Description

检测装置 技术领域
本发明有关于检测装置，尤指一种易于制造的检测装置。
背景技术
原子力显微镜为一种用于检测微小对象的检测装置。原子力显微镜借由一探针接触对象的表面并且沿对象表面移动，再借由光杠杆来读取探针的微小作动，因此而能够精确量测到微小对象的外形。现有的原子力显微镜其本体均由金属制成，因此不但材料成本昂贵、制造加工不易而且笨动不便于携带。
发明内容
本发明提供一种易于制造的检测装置。
本发明提供一种检测装置，用于检测一待测物，包括：
一第一平台，包含相互榫接组合的多个第一电路板，至少一部分的该多个第一电路板相互电性连接，该第一平台上设置有用以承载所述待测物的一载台；
一第二平台，包含至少一第二电路板，该第二平台上设置有用以检测所述待测物的一检测模块，该检测模块电性连接至少一部分的该多个第二电路板；及
多个螺杆，连接于该第一平台及该第二平台之间。
进一步地，其中该第二电路板上设有对应该多个螺杆的多个螺母，且各该螺母分别电性连接第二电路板，各该螺杆分别螺接在对应的该螺母并且抵接于第一平台。
进一步地，其中一该第一电路板上设有一孔电极、一槽电极以及一电极片，其中一该螺杆抵接该孔电极，另一该螺杆抵接该槽电极，再另一该螺杆抵接该电极片。
进一步地，其中该多个螺杆分别电性连连接该孔电极、该槽电极以及该电极片而使该第一平台电性连接该第二平台。
进一步地，还包括设置在该第一平台的一致动机构。
进一步地，其中该致动机构连动该载台。
进一步地，其中该致动机构包含设置在该第一平台的多个压电喇叭，以及连接在对应的该压电喇叭以及该致动机构之间的多个顶杆。
进一步地，还包括设置在该第二平台的一致动机构。
进一步地，其中该致动机构连动该检测模块。
进一步地，其中该致动机构包含设置在该第二平台的多个压电喇叭以及连接在对应的该压电喇叭以及该致动机构之间的多个顶杆。
进一步地，其中各该螺杆分别电性连其中一该第一电路板以及其中一该第二电路板。
进一步地，其中该检测模块包含一探针。
进一步地，其中该检测模块包含一光学检测组件。
本发明具有的优点在于：
本发明提供的检测装置主要由电路板榫接制成，其制作容易、成本低廉、易于组装，而且体积小、轻量，进而便于携带。
附图说明
图1为本发明较佳实施例的检测装置的一立体分解示意图。
图2为本发明较佳实施例的检测装置的另一立体分解示意图。
图3为本发明较佳实施例的检测装置的立体示意图。
图4为本发明较佳实施例的检测装置之中第一平台的另一可能配置示意图。
图5为本发明较佳实施例的检测装置之中第一平台的又另一可能配置示意图。
图中：
10                        待测物；
100                       第一平台；
110                       第一电路板；
110a                      底板；
110b                      顶板；
111b                      孔电极；
112b                      槽电极；
113b                      电极片；
110c                      立板；
200                       第二平台；
210                       第二电路板；
221、222、223                螺母；
310、320、330                螺杆；
400                          载台；
500                          致动机构；
510                          压电喇叭；
520                          顶杆；
600                          检测模块；
610                          探针；
620                          光学检测组件。
具体实施方式
下面结合附图和具体实施例对本发明作进一步说明，以使本领域的技术人员可以更好地理解本发明并能予以实施，但所举实施例不作为对本发明的限定。
参阅图1至图3，本发明的较佳实施例提供一种检测装置，用于检测一待测物10。本发明的检测装置包含一第一平台100、一第二平台200、多个螺杆310/320/330、一载台400、一致动机构500以及一检测模块600。
第一平台100包含多个第一电路板110，而且该多个第一电路板110相互榫接组合。至少一部分的第一电路板110相互焊接而电性连接，但本发明不限定于此，也可以如图4所示黏贴导电胶带121借以相互导接多个第一电路板110，也可以如图5所示借由导线122连接而导接多个第一电路板110。于本实施例中，该多个第一电路板110中包含有相互平行间隔配置的底板110a以及一顶板110b，且底板110a以及顶板110b呈水平置。该多个第一电路板110中还包含有多个立板110c，该多个立板110c垂直于底板110a以及顶板110b，而且各立板110c分别榫接底板110a以及顶板110b。较佳地，底板110a以及顶板110b分别为圆板，立板110c为一对矩形板，立板110c相互垂直配置而且交叉榫接。顶板110b上开设有电性连接顶板110b的一孔电极111b以及一槽电极112b，且顶板110b上还设有电性连接顶板110b的一电极片113b。
于本实施例中，第二平台200较佳地包含一第二电路板210，第二电路板210上设有多个螺母221、222、223，且各螺母221、222、223分别电性连接第二电路板210，于本实施例中，螺母221、222、223较佳地为三个。
于本实施例中，螺杆310、320、330的数目较佳地与螺母221、222、223的数目相对应，各螺杆310、320、330分别对应各该螺母221、222、223，各螺杆310、320、330分别螺接在对应的螺母221、222、223并且抵接于第一平台100的顶板110b，借此连接于该第一平台100及第二平台200之间而将第二平台200支撑在第一平台100的顶板110b上。较佳地，该多个螺杆310、320、330分别抵接在孔电极111b、槽电极112b以及一电极片113b，借此而电性连接于第一平台100及第二平台200之间。当扭转各螺杆310、320、330时，抵接于孔电极111b的螺杆310固定，抵接于槽电极112b的螺杆320具有沿槽电极112b的直线自由度，抵接于电极片113b的螺杆330具有沿电极片113b的平面自由度，借此而能够通过当扭转螺杆310/320/330以调校第二平台200的水平。
载台400承载在第一平台100上的顶板110b上，其用以承载待测物10。
于本实施例中，致动机构500设置在第一平台100。致动机构500包括设置在该第一平台100的多个压电喇叭510且致动机构500连动载台400。压电喇叭510设置在底板110a的一面上而且朝向顶板110b配置，各压电喇叭510分别电性连接底板110a。致动机构500还包括对应该多个压电喇叭510的多个顶杆520。
各顶杆520分别可活动地贯穿顶板110b配置，各顶杆520的一端抵接对应的压电喇叭510，载台400则承载在该多个顶杆520的另一端上。借由对各喇叭通电而能够推顶对应顶杆520，借此调整载台400的倾角。
检测模块600设置在第二平台200上以用于检测待测物10，检测模块600较佳地设置在第二电路板210上并且电性连接第二电路板210。检测模块600包含有一探针610以及一光学检测组件620，探针610朝向载台400配置而能够用以接触待测物10的表面，光学检测组件620用以读取探针610的作动，光学检测组件620较佳地电性连接第二电路板210。其中，光学检测组件620可以是能够形成光杠杆的光学检测组件620，也可以是一如同光盘读取头的光学检测组件620。
借由调整载台400的倾角而能够调整载台400与探针610的相对位置，但本发明不以此为限。例如，前述的致动机构500也可以设置在第二平台200上且连动检测模块600。致动机构500的压电喇叭510也可以设置在第二电路板210，并且借由顶杆520连接在对应的压电喇叭510及检测模块600之间，借此调整检 测模块600的倾角而能够调整载台400与探针610的相对位置。
各螺杆310、320、330分别抵接而电性连接第一平台100顶板110b上的孔电极111b、槽电极112b以及一电极片113b，借此能够将第一平台100与第二平台200电性连接，使得第二平台200上的检测模块600能够电性连接第一平台100的各电路板110，因此能够在第一平台100的各电路板110上布设对应的电路来操作检测模块600。
综上所述，本发明的检测装置主要由电路板榫接制成。由于电路板制作容易且成本低廉，榫接的组装方式也易于组装，因此能够大幅降低检测装置的售价并且有利于量产。再者，本发明的检测装置主要由电路板制成，其重量远小于现有的原子力显微镜，因此便于携带。
以上所述实施例仅是为充分说明本发明而所举的较佳的实施例，本发明的保护范围不限于此。本技术领域的技术人员在本发明基础上所作的等同替代或变换，均在本发明的保护范围之内。本发明的保护范围以权利要求书为准。

Claims (13)

  1. 一种检测装置，用于检测一待测物，其特征在于，包括：
    一第一平台，包含相互榫接组合的多个第一电路板，至少一部分的该多个第一电路板相互电性连接，该第一平台上设置有用以承载所述待测物的一载台；
    一第二平台，包含至少一第二电路板，该第二平台上设置有用以检测所述待测物的一检测模块，该检测模块电性连接至少一部分的该多个第二电路板；及多个螺杆，连接于该第一平台及该第二平台之间。
  2. 根据权利要求1所述的检测装置，其特征在于，其中该第二电路板上设有对应该多个螺杆的多个螺母，且各该螺母分别电性连接第二电路板，各该螺杆分别螺接在对应的该螺母并且抵接于第一平台。
  3. 根据权利要求2所述的检测装置，其特征在于，其中一该第一电路板上设有一孔电极、一槽电极以及一电极片，其中一该螺杆抵接该孔电极，另一该螺杆抵接该槽电极，再另一该螺杆抵接该电极片。
  4. 根据权利要求3所述的检测装置，其特征在于，其中该多个螺杆分别电性连连接该孔电极、该槽电极以及该电极片而使该第一平台电性连接该第二平台。
  5. 根据权利要求1所述的检测装置，其特征在于，还包括设置在该第一平台的一致动机构。
  6. 根据权利要求5所述的检测装置，其特征在于，其中该致动机构连动该载台。
  7. 根据权利要求5所述的检测装置，其特征在于，其中该致动机构包含设置在该第一平台的多个压电喇叭，以及连接在对应的该压电喇叭以及该致动机构之间的多个顶杆。
  8. 根据权利要求1所述的检测装置，其特征在于，还包括设置在该第二平台的一致动机构。
  9. 根据权利要求8所述的检测装置，其特征在于，其中该致动机构连动该检测模块。
  10. 根据权利要求9所述的检测装置，其特征在于，其中该致动机构包含设置在该第二平台的多个压电喇叭以及连接在对应的该压电喇叭以及该致动机构之间的多个顶杆。
  11. 根据权利要求1所述的检测装置，其特征在于，其中各该螺杆分别电性连其 中一该第一电路板以及其中一该第二电路板。
  12. 根据权利要求1所述的检测装置，其特征在于，其中该检测模块包含一探针。
  13. 根据权利要求1所述的检测装置，其特征在于，其中该检测模块包含一光学检测组件。
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