WO2016095415A1 - 一种激光烧结设备及烧结方法 - Google Patents
一种激光烧结设备及烧结方法 Download PDFInfo
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- WO2016095415A1 WO2016095415A1 PCT/CN2015/078754 CN2015078754W WO2016095415A1 WO 2016095415 A1 WO2016095415 A1 WO 2016095415A1 CN 2015078754 W CN2015078754 W CN 2015078754W WO 2016095415 A1 WO2016095415 A1 WO 2016095415A1
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- Prior art keywords
- laser sintering
- sintered
- heating
- laser
- glass
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- 238000000149 argon plasma sintering Methods 0.000 title claims abstract description 175
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000005245 sintering Methods 0.000 title abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 84
- 238000010438 heat treatment Methods 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims description 35
- 238000004093 laser heating Methods 0.000 claims description 7
- 238000009423 ventilation Methods 0.000 claims description 7
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 230000000873 masking effect Effects 0.000 claims 1
- 238000005336 cracking Methods 0.000 abstract description 5
- 238000000137 annealing Methods 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 76
- 239000003292 glue Substances 0.000 description 32
- 239000006059 cover glass Substances 0.000 description 19
- 239000005357 flat glass Substances 0.000 description 14
- 238000004806 packaging method and process Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
Definitions
- the present disclosure relates to the field of display manufacturing technology, and more particularly to a laser sintering apparatus and a sintering method.
- An Organic Light-Emitting Diode (OLED) display device is a display device that autonomously emits light by a current-driven luminescent material. Since the luminescent materials in OLED displays are sensitive to temperature, air, and water, good packaging is critical to the lifetime and picture quality of OLED displays.
- packaging technologies for OLED displays such as laser packaging, thin film packaging, and injection packaging. Among them, laser encapsulation technology is the most mature OLED packaging technology. Its main working principle is to use the precise and rapid temperature rise of laser to clamp on two glass substrates (one for cover glass and one for back with luminescent material and circuit pattern). A glass glue at a specific position between the plate glass) enables encapsulation of the two substrates.
- the glass glue Due to the traditional laser sintering, the glass glue will instantly increase from room temperature to 800-1000 ° C, and then to room temperature. The rapid heating and cooling process will accumulate a certain shrinkage stress inside the glass glue, which will cause the glass glue. And the glass substrate encapsulated by the glass glue is easily cracked or even broken.
- the choice of the second method is not limited to the mass production, so the two methods make the manufacture of OLED displays very limited.
- An object of the disclosed technical solution is to provide a laser sintering apparatus and a sintering method for solving In the prior art display manufacturing process using a laser for sintering, the large shrinkage stress generated by laser sintering causes cracking or breakage of the material to be sintered.
- the present disclosure provides a laser sintering apparatus, wherein the laser sintering apparatus includes:
- a laser sintering head for outputting laser light to a portion of the material to be sintered disposed on the device to be sintered for laser sintering
- Heating means for heating the portion of the material to be sintered and/or the portion of the sintered material before and/or after the laser sintering of the laser sintering head.
- the laser sintering apparatus described above wherein the heating means is for heating a portion of the material to be sintered to 400 to 500 degrees before laser sintering of the laser sintering head.
- the laser sintering apparatus described above wherein the laser sintering apparatus further comprises:
- a support substrate for placing a device to be sintered wherein the heating device is disposed on the other side of the support substrate on which the device to be sintered is placed.
- the laser sintering apparatus described above wherein a surface of the support substrate for placing the device to be sintered is provided with a ventilation duct, and the ventilation duct is disposed corresponding to a region of the material to be sintered, and is used for After the laser sintering of the laser sintering head is completed, the gas input to the region at a predetermined temperature is cooled.
- the laser sintering apparatus described above wherein the heating device comprises an infrared generator, and the infrared light emitted by the infrared generator has a wavelength of 795 nm to 810 nm.
- the laser sintering apparatus described above wherein the heating device is further provided with a mask plate on a side of the material to be sintered, an opening on the mask plate and a material to be sintered of the device to be sintered Partial correspondence.
- the laser sintering apparatus described above wherein a mask is further disposed between the heating device and the support substrate, and the opening on the mask corresponds to a portion of the material to be sintered of the device to be sintered. .
- the support substrate is a transparent substrate.
- the laser sintering apparatus described above wherein the device to be sintered comprises opposite first sides and second sides, and the material to be sintered is disposed between the first side and the second side;
- the laser sintering head is disposed opposite to the first side for outputting laser light toward the first side;
- the heating device is disposed opposite to the second side for adding to the second side heat.
- the laser sintering apparatus described above, wherein the laser sintering head and the heating device are disposed on the same side of the device to be sintered.
- the present disclosure also provides a laser sintering method, the laser sintering method comprising:
- Heating of the portion of the material to be sintered and/or the portion of the sintered material is performed before and/or after laser sintering.
- the portion of the material to be sintered is heated to 400 to 500 degrees in the step of heating the portion of the material to be sintered before the laser sintering.
- the laser sintering method described above uses an infrared generator to emit a wavelength of 795 nm to 810 nm in a step of heating the portion of the material to be sintered and/or the portion of the sintered material before and/or after laser sintering.
- the infrared light is heated to the portion of the sintered material and/or the portion of the sintered material.
- the laser sintering method further comprises:
- the gas into which the sintered material is partially supplied with a predetermined temperature is cooled.
- the portion of the sintered material is cooled at a temperature decreasing rate of 10 degrees/minute in a process of lowering a temperature at which a portion of the sintered material is supplied with a predetermined temperature.
- laser sintering and heating are respectively performed on both sides of the material to be sintered of the apparatus to be sintered.
- Figure 1 is a schematic view of the structure of a general display
- FIG. 2 is a schematic view showing an application structure of a laser sintering apparatus according to a first embodiment of the present disclosure
- FIG. 3 is a schematic view showing an application structure of a laser sintering apparatus according to a second embodiment of the present disclosure
- FIG. 4 is a schematic view showing an application structure of a laser sintering apparatus according to a third embodiment of the present disclosure.
- a laser sintering head for outputting laser light to a portion of the material to be sintered disposed on the device to be sintered for laser sintering
- Heating means for heating the portion of the material to be sintered and/or the portion of the sintered material before and/or after the laser sintering of the laser sintering head reduces the laser by preheating a portion of the material to be sintered of the apparatus to be sintered before laser sintering, and/or annealing the portion of the sintered material after laser sintering by providing a heating device.
- the temperature difference before sintering is compared with that of laser sintering and/or the decreasing speed of the temperature after laser sintering is reduced to reduce the stress on the material to be sintered and the device to be sintered, and to avoid cracking or even cracking of the device to be sintered due to shrinkage stress. Damage situation.
- the device to be sintered comprises opposite first sides and second sides, the material to be sintered is disposed between the first side and the second side; the laser sintering head and the first a side oppositely disposed for outputting laser light toward the first side; the heating device is disposed opposite the second side for heating toward the second side; that is, the laser sintering head and the heating device are respectively Laser sintering and heating are performed on different sides of the device to be sintered.
- the arrangement of the laser sintering head and the heating device is not limited to the above, and may be provided on the same side of the device to be sintered.
- the laser sintering apparatus of the above structure of the present disclosure can be used for packaging of a display, and the glass glue part coated by the package is heated by a laser to melt and melt the glass glue to assemble the two parts of the display together. Therefore, when the device to be sintered is applied to a display package, the device to be sintered is a display to be packaged, and the material to be sintered is a glass glue.
- FIG. 1 is a schematic structural view of a general display, including a back panel glass 1 and a cover glass 2 disposed oppositely and in parallel, wherein a device for realizing image display is disposed between the back panel glass 1 and the cover glass 2, for an OLED display
- a device for realizing image display is disposed between the back panel glass 1 and the cover glass 2, for an OLED display
- each of the illuminating work is disposed between the back glass 1 and the cover glass 2 Energy layer.
- a glass paste 3 is applied to the frame portion of the back glass 1 , and the cover glass 2 is covered over the light-emitting functional layer, and then the upper surface of the cover glass 2 is coated with a glass paste portion for laser sintering.
- the back sheet glass 1 and the cover glass 2 are consolidated together.
- the first side and the second side of the above-mentioned display to be packaged are formed as the outer surface of the back sheet glass 1 or the cover glass 2 of the display to be packaged, in particular, the present disclosure.
- the laser sintering head and the heating device of the laser sintering apparatus may be respectively located on the outer surface of the back sheet glass 1 and the outer surfaces of the cover glass 2, or may be located on the outer surface of the back sheet glass 1 or the cover glass 2 The same side of the outer surface.
- FIG. 2 is a schematic diagram of an application structure of a laser sintering apparatus according to a first embodiment of the present disclosure.
- the laser sintering head 10 and the heating device 20 are disposed above the cover glass 2 of the display, and the outer surface of the cover glass 2 is heated by the heating device 20, and the glass glue is heated.
- the laser sintering head 10 After heating to a predetermined temperature, the laser sintering head 10 outputs laser light to a corresponding portion of the glass paste 3 on the outer surface of the cover glass 2, and performs laser sintering to consolidate the glass paste 3, and the cover glass 2 and the back glass 1 connected.
- the temperature difference between the laser sintering and the laser sintering can be reduced to reduce the stress of the glass glue and the glass substrate, and the crack of the glass substrate due to the shrinkage stress is avoided. Even the damage.
- the heating device 20 can further heat the corresponding portion of the cover glass 2 to the corresponding portion of the glass paste 3 after the laser sintering head 10 performs laser sintering.
- the glass glue 3 is annealed to slowly lower the glass glue 3, further reducing the stress of the glass glue and the glass substrate, and avoiding the effects of cracks or even damage due to shrinkage stress.
- the heating device 20 may be an infrared generator that is heated by infrared light, or may be a laser generator. Like the laser sintering head 10, the laser is used for heating.
- the heating device 20 preheats the glass paste 3 at a temperature of 400 to 500 degrees before the laser sintering head 10 is sintered; and the sintering is completed at the laser sintering head 10.
- the temperature at the time of annealing is also 400 to 500 degrees; in addition, when the glass paste 3 is sintered by the laser sintering head 10, the temperature reached by the glass paste 3 is 800 to 1000 degrees.
- the laser sintering head 10 and the heating device 20 are on the same side of the display The surface is heated. It should be noted that the laser sintering head 10 and the heating device 20 can be simultaneously disposed on both sides with respect to the display, that is, the laser sintering head 10 and the heating device 20 are provided on both sides of the display, thereby achieving the glass glue 3 Heat cured effect.
- the present disclosure also provides the laser sintering apparatus of the second embodiment.
- the laser sintering head 10 and the heating device 20 are disposed on both sides of the display as compared with the laser sintering apparatus of the first embodiment.
- the laser sintering head 10 is disposed on the upper side of the display for outputting laser light to the corresponding portion of the glass paste 3 on the outer surface (first side) of the cover glass 2 for laser sintering;
- the heating device 20 is disposed on the lower side of the display For heating the outer surface (second side surface) of the back sheet glass 1 corresponding to the glass glue 3 portion.
- the heating device 20 may preheat the glass paste 3 before the laser sintering head 10 outputs the laser for laser sintering, or may continue to the outer surface of the back glass 1 after the sintering of the laser sintering head 10 is completed.
- the corresponding portion of the glue 3 is heated, and the glass glue 3 is annealed to reduce the stress of the glass glue and the glass substrate, thereby avoiding cracks or even breakage due to shrinkage stress.
- the manner in which the heating device 20 is heated in the second embodiment and the temperature at which the glass glue 3 needs to be heated are the same as in the first embodiment, and will not be described in detail herein.
- FIG. 4 is a schematic view showing an application structure of the laser sintering apparatus according to the third embodiment of the present disclosure.
- the laser sintering head 10 and the heating device 20 are disposed on both sides of the display.
- the laser sintering apparatus further includes:
- the support substrate 30 is used to place a display to be packaged.
- the laser sintering head 10 is disposed on a side of the cover glass 2 of the display away from the back glass 1 for outputting laser light toward the outer surface of the cover glass 2 to heat the corresponding portion of the glass paste 3;
- the other side of the display substrate 30 is placed on the support substrate 30 and supported by the base 50, and the heating device 20 is configured to heat the corresponding portion of the glass paste 3 of the back sheet glass 1 through the support substrate 30.
- the support substrate 30 is transparent, and the heating device 20 includes an infrared generator for emitting infrared light having a wavelength of 795 to 810 nm, and the infrared light of the wavelength range is used to correspond to the glass paste 3 of the back sheet glass 1.
- the support substrate 30 and the back sheet glass 1 are made of the same material and are made of a material that does not absorb the light of the wavelength band, so that infrared light is not absorbed by the support substrate 30 and the back sheet glass 1, It can be used only to heat the glass glue 3 to heat.
- the laser sintering apparatus further includes:
- the mask 40 is disposed between the heating device 20 and the support substrate 30.
- the mask 40 is provided with an opening 41 corresponding to the corresponding portion of the glass paste of the back glass 1 on the display to be packaged.
- the glass glue corresponding portion of the back glass 1 on the support substrate 30 is also provided with a through hole communicating with the opening 41 of the mask 30, so that the light emitted by the heating device 20 passes through the mask 40 and the support substrate 30 only.
- the corresponding portion of the glass glue 3 that is transferred to the back sheet glass 1.
- the mask 40 can also be disposed on the side of the heating device 20 facing the glass glue 3, so that the mask 40 can also partially block the heat generated by the heating device 20, so that The other parts of the display are not affected by the heating means.
- a surface of the support substrate 30 for placing a surface of the display to be packaged (that is, a surface that is in contact with the back sheet glass 1) is provided with a ventilation duct 31, and the ventilation duct 31 corresponds to the glass glue portion.
- An area is provided for cooling a gas of a predetermined temperature in a region of the glass paste portion after the laser sintering of the laser sintering head 10 is completed.
- the gas may be N2 or clean air.
- the glass paste 3 is subjected to a temperature drop rate of 10 degrees/minute by inputting a gas of a predetermined temperature to a region corresponding to the glass paste on the surface of the back sheet glass 1. Cooling, compared with the natural cooling after laser sintering, the temperature is slow, reducing the stress of the glass glue and the glass substrate, and avoiding cracks or even damage due to shrinkage stress.
- the infrared light is output by the heating device 20, so that the glass paste 3 of the display is preheated before sintering, preferably, when the temperature is reached.
- the heating device 20 stops outputting infrared light, that is, stops heating; at this time, the laser burns the head 10 to output laser light, and scans the corresponding portion of the glass glue on the upper surface of the cover glass 2 to heat the glass glue 3 to At 800 to 1000 degrees, the laser sintering is stopped; thereafter, the ventilation duct 31 below the back glass 2 is passed through a predetermined temperature of N2 or clean air to cool the glass paste 3 at a temperature drop rate of 10 degrees/minute.
- the glass glue of the display is sintered by the method, and the glass glue part is preheated before the laser sintering, and the glass glue part is slowly cooled after the laser sintering, thereby reducing the temperature difference and the reduction before the laser sintering compared with the laser sintering.
- the rate of temperature drop after sintering of the small laser to reduce the stress of the glass paste and the glass substrate, and avoid cracks or even damage due to shrinkage stress.
- Another aspect of a specific embodiment of the present disclosure provides a laser sintering method, the laser sintering method comprising:
- Heating of the portion of the material to be sintered and/or the portion of the sintered material is performed before and/or after laser sintering.
- the portion of the material to be sintered is heated to 400 to 500 degrees.
- an infrared generator is used to emit infrared light having a wavelength of 795 nm to 810 nm to the portion of the material to be sintered. And/or the portion of the sintered material is heated.
- the laser sintering method further includes:
- the gas into which the sintered material is partially supplied with a predetermined temperature is cooled.
- the portion of the sintered material is cooled at a temperature decreasing rate of 10 degrees/minute.
- the step of heating the portion of the material to be sintered and/or the portion of the material to be sintered may be performed on the same side or on the opposite side of the device to be sintered, respectively, and before and/or after the laser sintering.
- laser sintering and heating are respectively performed on both sides of the material to be sintered of the apparatus to be sintered. This ensures that the internal temperature difference of the material to be sintered is reduced.
- the device to be sintered is a display to be packaged, and the material to be sintered is a glass glue.
- the above-described laser sintering apparatus and laser sintering method of the present disclosure are not limited to the package applied only to the display, and the laser sintering apparatus and the laser sintering method of the embodiments of the present disclosure can be solved as long as the processing method using the laser sintering method is employed.
- the problem of cracking or breakage of the material to be sintered is caused by the large shrinkage stress generated by laser sintering.
- the laser sintering apparatus and the laser sintering method of the present disclosure can reduce the temperature difference before laser sintering compared to laser sintering and/or reduce the temperature drop rate after laser sintering to reduce the stress of the glass paste and the glass substrate. To avoid cracks or even damage due to shrinkage stress.
Abstract
Description
Claims (16)
- 一种激光烧结设备,包括:激光烧结头,用于朝待烧结装置上所设置的待烧结材料部分输出激光,进行激光烧结;加热装置,用于在所述激光烧结头进行激光烧结之前和/或之后,朝所述待烧结材料部分和/或已烧结材料部分进行加热。
- 如权利要求1所述的激光烧结设备,其中,所述加热装置用于在所述激光烧结头进行激光烧结之前,使所述待烧结材料部分加热到400至500度。
- 如权利要求1所述的激光烧结设备,其中,所述激光烧结设备还包括:用于放置所述待烧结装置的支撑基板,其中所述加热装置设置于所述支撑基板放置所述待烧结装置的另一侧。
- 如权利要求3所述的激光烧结设备,其中,所述支撑基板上用于放置所述待烧结装置的表面开设有通风管道,且所述通风管道对应所述待烧结材料部分的区域设置,用于当所述激光烧结头的激光烧结完成后,对所述区域输入预定温度的气体进行降温。
- 如权利要求1至4任一项所述的激光烧结设备,其中,所述加热装置包括红外发生器,所述红外发生器所发出红外光的波长为795nm至810nm。
- 如权利要求1所述的激光烧结设备,其中,所述加热装置朝向所述待烧结材料的一侧还设置有掩膜板,所述掩膜板上的开孔与所述待烧结装置的所述待烧结材料部分对应。
- 如权利要求3所述的激光烧结设备,其中,所述加热装置与所述支撑基板之间还设置有掩膜板,所述掩膜板上的开孔与所述待烧结装置的所述待烧结材料部分对应。
- 如权利要求3所述的激光烧结设备,其中,所述支撑基板为透明基板。
- 如权利要求1所述的激光烧结设备,其中,所述待烧结装置包括相对的第一侧面和第二侧面,所述待烧结材料设置在所述第一侧面与所述第二侧面之间;所述激光烧结头与所述第一侧面相对设置,用于朝所述第一侧面输出激光;所述加热装置与所述第二侧面相对设置,用于朝所述第二侧面进行 加热。
- 如权利要求1所述的激光烧结设备,其中,所述激光烧结头和所述加热装置设置在所述待烧结装置的同侧。
- 一种激光烧结方法,包括:朝待烧结装置上所设置的待烧结材料部分输出激光,进行激光烧结;在进行激光烧结之前和/或之后,朝所述待烧结材料部分和/或已烧结材料部分进行加热。
- 如权利要求11所述的激光烧结方法,其中,在进行激光烧结之前,朝所述待烧结材料部分进行加热的步骤中,使所述待烧结材料部分加热到400至500度。
- 如权利要求11所述的激光烧结方法,其中,在进行激光烧结之前和/或之后,朝所述待烧结材料部分和/或已烧结材料部分进行加热的步骤中,采用红外发生器发出波长为795nm至810nm的红外光对所述待烧结材料部分和/或已烧结材料部分进行加热。
- 如权利要求11所述的激光烧结方法,其中,所述激光烧结方法还包括:在进行激光烧结之后,对所述已烧结材料部分输入预定温度的气体进行降温。
- 如权利要求14所述的激光烧结方法,其中,在对已烧结材料部分输入预定温度的气体进行降温的过程中,使所述已烧结材料部分以10度/分的降温速度进行降温。
- 如权利要求11所述的激光烧结方法,其中,在进行激光烧结和朝所述待烧结材料部分进行加热的步骤中,在待烧结装置的所述待烧结材料的两侧分别进行激光烧结以及加热。
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US14/888,341 US10205130B2 (en) | 2014-12-15 | 2015-05-12 | Laser sintering device and laser sintering method |
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CN104466034A (zh) * | 2014-12-15 | 2015-03-25 | 京东方科技集团股份有限公司 | 一种激光烧结设备及烧结方法 |
CN105679970B (zh) * | 2016-04-11 | 2017-08-08 | 京东方科技集团股份有限公司 | 胶体烧结设备及方法 |
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