WO2016084917A1 - 電気信号処理装置 - Google Patents
電気信号処理装置 Download PDFInfo
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- WO2016084917A1 WO2016084917A1 PCT/JP2015/083290 JP2015083290W WO2016084917A1 WO 2016084917 A1 WO2016084917 A1 WO 2016084917A1 JP 2015083290 W JP2015083290 W JP 2015083290W WO 2016084917 A1 WO2016084917 A1 WO 2016084917A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
- G01N29/348—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with frequency characteristics, e.g. single frequency signals, chirp signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
- G01N29/42—Detecting the response signal, e.g. electronic circuits specially adapted therefor by frequency filtering or by tuning to resonant frequency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
- G01N29/4454—Signal recognition, e.g. specific values or portions, signal events, signatures
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
Definitions
- the present invention provides a high-sensitivity trace moisture sensor, a hydrogen gas sensor, a volatile organic compound sensor using a surface acoustic wave element, and a simple electric device for popularizing portable gas chromatographs and wearable environment measuring instruments to which these are applied.
- the present invention relates to a signal processing device.
- SAW surface acoustic wave
- the ball SAW sensor is a sensor in which the interaction length of the planar SAW sensor is remarkably increased by using a phenomenon in which the SAW wraps around the equator with respect to the Z axis of the piezoelectric crystal sphere (see, for example, Non-Patent Document 2). .
- a planar SAW sensor can use a cut substrate with a low temperature coefficient of sound velocity, but a ball SAW sensor uses such a substrate because the crystal orientation changes continuously along the propagation path. I can't. Further, temperature compensation can be realized by subtracting the outputs of the non-film-forming elements having the same characteristics, but it is not easy to match the temperatures of the propagation paths in the separate elements.
- the temperature coefficient of the sound velocity change of the piezoelectric crystal can be expressed by a constant independent of frequency, such as ppm / ° C. Therefore, temperature compensation using two-frequency measurement that extracts the sensor response by removing the temperature-dependent sensor output by differentiating the delay time change expressed in ppm by propagating SAW of two frequencies to the same path
- the method has been developed by a ball SAW sensor having double-electrode interdigital electrodes capable of transmitting and receiving odd-order harmonics (see, for example, Patent Documents 5 and 6 and Non-Patent Document 6).
- the waveform is exceeded by an analog-to-digital converter (analog digital converter; ADC) with a sampling rate more than twice that of the third harmonic.
- ADC analog digital converter
- the frequency of the received signal is reduced by heterodyne detection, the phase of the received signal can be measured even using an ADC with a low sampling rate (see, for example, Patent Document 7 and Non-Patent Document 7).
- Yamanaka “moily sensitive ball surface acoustic wave sensor using SiOx film ”, Jpn. J. Appl. Phys., 2014, 53, 07KD08 T. Tsuji, R. Mihara, T. Saito, S. Hagihara, T. Oizumi, N. Takeda, T. Ohgi, T. Yanagisawa, S. Akao, N. Nakaso, and K. Yamanaka, “Highly Sensens Acoustic Wave Hydrogen Sensor with Porous Pd-Alloy Film ”, Mater. Trans., 2013, 55, p.1040-1044 T. Nakatsukasa, S. Akao, T. Ohgi, N. Nakaso, T.
- Non-Patent Document 8 there is a problem that the performance of the ADC as described in Non-Patent Document 8 is expensive because it is equivalent to a high-precision digital oscilloscope.
- an inexpensive ADC can be used, but in two-frequency measurement, a combination of a reference signal and a nonlinear element necessary for heterodyne detection.
- the circuit becomes expensive.
- Another problem is that the instability of the nonlinear element can cause a drift in the phase output of the sensor in a long-term measurement such as a one-year measurement.
- the present invention has been made paying attention to such a problem, and an object thereof is to provide an inexpensive electric signal processing apparatus capable of realizing highly accurate temperature compensation in two-frequency measurement in a SAW sensor. .
- the electrical signal processing apparatus is an ADC (analog-digital conversion) that samples a signal from a delay line type SAW (surface acoustic wave) sensor capable of transmitting and receiving two frequencies f 1 and f 2 (f 2 > f 1 ).
- the ADC is characterized in that the sampling frequency f S is lower than twice the frequency f 1 .
- the ADC may be synchronized with a transmission signal to the SAW sensor. Further, by processing the received signal from the SAW sensor, organic to extract the components of f 1 and f 2, the center frequency f 1 and f 2, bandwidth of 20% or less of the band-pass filter for each center frequency
- the ADC may be configured to sample the signal extracted from the bandpass filter.
- the band-pass filter is composed of two components that extract the component of f 1 and the component that extracts the component of f 2
- the ADC may be composed of two components corresponding to each band-pass filter.
- the electrical signal processing device is provided so as to be able to block aliasing of frequencies other than the two aliasing frequencies f u1 and f u2 used for response measurement with respect to the signal sampled by the ADC.
- Digital filter as to block the aliasing frequencies other than f u1, may be made from two but block the aliasing frequencies other than f u2.
- the SAW sensor may be a delay line type SAW sensor using SAW that goes around the substrate, and the SAW sensor may be a ball SAW sensor.
- the electrical signal processing apparatus extracts two frequencies f 1 and f 2 (f 2 > f 1 ) by applying narrow-band frequency filtering to a received waveform in a SAW sensor capable of transmitting and receiving a plurality of frequencies.
- the frequency used in the two-frequency measurement in the SAW sensor is represented by f 1 and f 2 (f 2 > f 1 )
- oversampling at a frequency more than twice f 2 or two low frequencies It is possible to provide an electric signal processing device capable of realizing temperature compensation with the same accuracy as that using these without using a circuit.
- a dual frequency measurement system capable of temperature compensation of a practical ball SAW sensor can be simplified and provided at low cost.
- FIG. 2 is a graph showing measured waveforms at points A to C in FIG. (A) The power spectrum of the waveform A of FIG. 2, (b) The power spectrum of the waveforms B and C of FIG. (A) a graph showing a delay time when a two-frequency measurement is performed from an oversampled waveform when a trace moisture is measured by the dual-frequency measurement system shown in FIG. 1, and (b) a delay time when further temperature compensation is performed. It is a graph to show.
- FIG. 1 A graph showing a delay time when a two-frequency measurement is performed from an undersampled waveform when the trace moisture is measured by the two-frequency measurement system shown in FIG. 1, and (b) a delay time when further temperature compensation is performed. It is a graph to show. It is a block diagram which shows the 2nd Example of the two-frequency measurement system containing the electric signal processing apparatus of embodiment of this invention.
- A A graph showing a measurement waveform at point A in FIG. 6, (b) a spectrum (solid line) when the waveform is subjected to fast Fourier transform (FFT), and a wavelet transform waveform at point B in FIG. It is a graph which shows a spectrum (dashed line) when performing FFT.
- FIG. 1 A graph showing a delay time when a two-frequency measurement is performed from an undersampled waveform when the trace moisture is measured by the two-frequency measurement system shown in FIG. 1, and (b) a delay time when further temperature compensation is performed. It is a graph to show. It is a
- FIG. 7A is a graph showing a measured waveform at point A in FIG. 6, and FIG. 7B is a graph showing a wavelet transform waveform at point B in FIG. 6 (the solid line is the real part and the broken line is the absolute value).
- 6 shows (a) a graph showing a change in delay time of a signal having an aliasing frequency f u1 when a trace amount of moisture is measured by the dual frequency measurement system shown in FIG. 6, and (b) showing a change in delay time of a signal having an aliasing frequency f u2.
- undersampling by a simple electric signal processing device is useful for temperature compensation by two-frequency measurement for a sensor in which a sol-gel SiOx film for measuring trace moisture is formed on a harmonic ball SAW crystal element. It shows that. There, the ball SAW sensor can clearly measure the response to 20 nmol / mol of trace moisture, which was difficult to measure without using a CRDS (cavity ringdown spectrometer). It shows that the sensor response compensated for temperature using oversampling matched with a correlation coefficient of 0.9999.
- f S is the ADC sampling frequency
- f 1 and f 2 are two frequencies transmitted and received by the delay line type SAW sensor
- f 0 is a frequency that is a common multiple of f 1 and f 2.
- f u1 and f u2 represent two aliasing frequencies used for response measurement in the output obtained by undersampling, and are attributed to f 1 and f 2 , respectively.
- the synthesizer 11 by using the temperature compensated crystal oscillator (TCXO) 11a, a burst signal of f S and f 0 synchronized thereto are generated.
- the signal of f 0 is frequency-divided using a frequency divider (FDIV) 12 and converted into signals of f 1 and f 2 , processed by low-pass filters (LPF) 16 a and 16 b, respectively.
- LPF low-pass filters
- the transmission signal Tx is amplified by the amplifier 17b and input to the SAW sensor 1 through the rf switch (Switch) 17c.
- Reflected signal Rx from the SAW sensor 1 passes through the rf switch 17c, is amplified by the amplifier 17d, narrow band-pass filter of a center frequency f 1 and f 2 (band-pass filter; BPF) 13a, a 13b Processed and recorded by ADCs 14a, 14b. Note that the input of the transmission signal Tx to the SAW sensor 1 and the output of the reflection signal Rx from the SAW sensor 1 are switched using the rf switch 17c. Of the signals recorded by the ADCs 14 a and 14 b, signals of frequency components other than f u1 and f u2 are blocked by the bandpass filters 15 a and 15 b and the delay time is measured using the computer 18.
- sampling at the sampling frequency f S synchronizes f S and the transmission signal. I simulated the situation to do.
- ⁇ 50
- oversampling for f 1 and f 2 in the case of under-sampling was performed on f u1 and f u2.
- the delay time was measured from the difference in propagation time between the 3 and 7 round waves.
- FIG. 2A shows a waveform obtained by oversampling at point A in FIG.
- B and C in FIG. 2 represent waveforms that are undersampled after BPF application (waveforms at points B and C in FIG. 1).
- FIG. 3 shows a power spectrum corresponding to the waveform of FIG.
- FIG. 3 (a) in the spectrum of the waveform obtained by oversampling, components of f 1 and f 2, as shown in FIG. 3 (b), in the spectrum of the waveform obtained by undersampling , F u1 and f u2 components were confirmed.
- FIG. 4 shows a trace moisture moisture concentration of 4 ⁇ 790 nmol / mol (H 2 O concentration), from the waveform obtained by oversampling, the 2 frequency measurement of f 1 and f 2 The results are shown.
- FIG. 4 (a) it represents a dashed and solid line delay time in f 1 and f 2, respectively (Delay time).
- FIG. 5 shows the result when undersampling is performed as in FIG.
- a broken line and a solid line represent outputs of f u1 and f u2 , respectively. Since f 1 ⁇ f S , when the output of f u1 is subtracted from the output of f u2 by a factor of ⁇ 1.5 based on the output enlargement ratio due to undersampling, as shown in FIG. Temperature compensation similar to This response coincided with the response in the case of using oversampling with a correlation coefficient
- 0.9999 by a linear function.
- oversampling and simulated undersampling in a computer are used.
- a transmission / reception signal using a burst wave is converted to a narrow bandpass filter.
- the electrical signal processing device that applies undersampling after processing in the above was applied to a trace moisture sensor consisting of a ball SAW sensor. Specifically, a small amount of moisture is generated using the diffusion tube method by installing a 3.3 mm diameter crystal ball SAW sensor in an ultra-high vacuum cell using an amorphous silica film synthesized by the sol-gel method as a sensitive film. The N 2 gas flow (1 L / min) of the vessel was measured.
- f S is the ADC sampling frequency
- f 1 and f 2 are two frequencies transmitted and received by the delay line type SAW sensor
- f 0 is a frequency that is a common multiple of f 1 and f 2.
- f u1 and f u2 represent two aliasing frequencies used for response measurement in the output obtained by undersampling, and are attributed to f 1 and f 2 , respectively.
- FDIV1, 2, 3 temperature-compensated crystal oscillator
- FDIV1, 2, 3 temperature-compensated crystal oscillator
- f S 100 MHz
- f 2 240 MHz
- f 1 80 MHz, respectively.
- the signals f 1 and f 2 are processed by low-pass filters (LPF1, 2) 26a and 26b, respectively, synthesized by an adder 27a, and generated by a timing controller (TC) 27b synchronized with the signal of f S.
- LPF1, 2 low-pass filters
- TC timing controller
- the transmission burst signal Tx is generated by the rf switch (SW) 27c using the switch signal.
- the transmission burst signal Tx is amplified by an amplifier (Amp1) 27d and input to the SAW sensor 1 through a directional coupler (DC) 27e.
- the reflected signal Rx from the SAW sensor 1, through a directional coupler 27e, an amplifier (Amp2) was amplified by 27f, at Q values respectively 20 and 40, the center frequency of f 1 and f 2 narrow band-pass filter (Band-pass filter; BPF) Processed by 23a and 23b and recorded by ADCs 24a and 24b.
- BPF narrow band-pass filter
- the transmission burst signal Tx input to the SAW sensor 1 and the reflection signal Rx output from the SAW sensor 1 are switched using the directional coupler 27e.
- signals of frequency components other than f u1 and f u2 are blocked by the bandpass filters 25 a and 25 b, and the delay time is measured using the computer 28.
- f 1/2 .
- wavelet analysis was used to measure the delay time.
- the undersampled waveform at point A in FIG. 6 is shown in FIG. Further, the spectrum when the waveform is subjected to fast Fourier transform (FFT) is shown by a solid line in FIG. As indicated by the solid line in FIG. 7B, the components of f u1 and f u2 were confirmed in the spectrum of the waveform after undersampling. Further, the amplitude of f u2 at this time was about 33.8 dB larger than the amplitude of f u1 .
- FFT fast Fourier transform
- FIG. 8A shows a part of the undersampled waveform at point A in FIG. 6 (part of FIG. 7A).
- FIG. 8B shows the wavelet transform waveform at point B in FIG. 6, that is, the waveform when 100 points are interpolated by wavelet transform from FIG.
- the solid line in FIG. 8B indicates the real part, and the broken line indicates the absolute value (envelope).
- the zero crossing time closest to the peak of the absolute value was measured as the delay time.
- the spectrum when the waveform of FIG.8 (b) carries out the fast Fourier transform is shown with a broken line in FIG.7 (b).
- FIGS. 9A and 9B show the aliasing frequencies f u1 and f u2 when a trace moisture of 2.4 to 680 nmol / mol moisture concentration (H 2 O concentration) is generated by the trace moisture generator.
- the delay time change (Delay time change) between 3 and 7 rounds of the signal is shown.
- FIGS. 9A and 9B show the results of dividing the relative delay time changes ⁇ t u1 and ⁇ t u2 at f u1 and f u2 by the output enlargement rate by undersampling, respectively.
- FIG. 9 (c) the relative delay time change Delta] t u2 in f u2, it shows the results of temperature compensation by subtracting the relative delay time change Delta] t u1 in f u1.
- FIGS. 9 (a) and 9 (b) the fluctuation of the output with respect to a constant water concentration was remarkably observed in 4 to 7h, but as shown in FIG. 9 (c), by performing temperature compensation by the difference, The fluctuation could be removed.
- the rms noise from 0 to 1 h was 0.00998 ppm, and the signal-to-noise ratio of the response to 2.4-18 nmol / mol was 92.1.
- a ball SAW sensor is used as a delay line type SAW sensor.
- a delay line type SAW sensor using a general planar substrate and a delay line type SAW sensor using a SAW that circulates around the substrate. It is also applicable to.
- SAW sensor 11 Synthesizer 11a Temperature compensation type crystal oscillator 12 Frequency divider 13a, 13b Narrow band-pass filter 14a, 14b ADC 15a, 15b Band pass filter 16a, 16b Low pass filter 17a Adder 17b, 17d Amplifier 17c rf switch 18 Computer 21 Synthesizer 21a Temperature Compensated Crystal Oscillator 22a, 22b, 22c Frequency Divider 23a, 23b Narrow Band Pass Filter 24a, 24b ADC 25a, 25b Band pass filter 26a, 26b Low pass filter 27a Adder 27b Timing controller 27c rf switch 27d, 27f Amplifier 27e Directional coupler 28 Computer
Abstract
Description
fimage(N)=|f-NfS| (1)
で与えられる。fは受信信号の周波数、fSはサンプリング周波数、Nは整数を表す。
第1の実施例として、高調波ボールSAW水晶素子に微量水分測定用のゾルゲルSiOx膜を成膜したセンサについて、簡易型電気信号処理装置によるアンダーサンプリングが、二周波数測定による温度補償に有用であることを示す。そこでは、ボールSAWセンサが、従来はCRDS(キャビティリングダウン分光分析装置)を用いないと測定が困難だった、20 nmol/molの微量水分に対する応答を明瞭に測定することができ、アンダーサンプリングとオーバーサンプリングとを用いて温度補償されたセンサ応答が、相関係数0.9999で一致したことを示す。
11 シンセサイザ
11a 温度補償型水晶発振器
12 分周器
13a、13b 狭帯域バンドパスフィルタ
14a、14b ADC
15a、15b バンドパスフィルタ
16a、16b ローパスフィルタ
17a 加算器
17b、17d 増幅器
17c rfスイッチ
18 コンピュータ
21 シンセサイザ
21a 温度補償型水晶発振器
22a、22b、22c 分周器
23a、23b 狭帯域バンドパスフィルタ
24a、24b ADC
25a、25b バンドパスフィルタ
26a、26b ローパスフィルタ
27a 加算器
27b タイミングコントローラ
27c rfスイッチ
27d、27f 増幅器
27e 方向性カプラ
28 コンピュータ
Claims (8)
- 2周波数f1、f2(f2>f1)を送受信可能な遅延線型SAW(弾性表面波)センサからの信号をサンプリングするADC(アナログデジタル変換器)を有し、前記ADCは、サンプリング周波数fSがf1の2倍よりも低周波数であることを
特徴とする電気信号処理装置。 - 前記ADCは、前記SAWセンサへの送信信号と同期可能であることを特徴とする請求項1記載の電気信号処理装置。
- 前記SAWセンサからの受信信号を処理して、f1およびf2の成分を抽出するよう、中心周波数f1およびf2、バンド幅が各中心周波数の20%以下のバンドパスフィルタを有し、
前記ADCは、前記バンドパスフィルタから抽出された信号をサンプリングするよう構成されていることを
特徴とする請求項1または2記載の電気信号処理装置。 - 前記ADCによりサンプリングした信号に対して、応答の測定に用いる2周波数fu1およびfu2以外の周波数のエリアシングを遮断可能に設けられたデジタルフィルタを有することを特徴とする請求項1乃至3のいずれか1項に記載の電気信号処理装置。
- fu1=f1/4、fu2=f1/2であることを特徴とする請求項4記載の電気信号処理装置。
- f2=3f1、fS=5f1/4であることを特徴とする請求項1乃至5のいずれか1項に記載の電気信号処理装置。
- 前記SAWセンサが基板を周回するSAWを用いる遅延線型SAWセンサであることを特徴とする請求項1乃至6のいずれか1項に記載の電気信号処理装置。
- 前記SAWセンサがボールSAWセンサであることを特徴とする請求項1乃至7のいずれか1項に記載の電気信号処理装置。
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EP15863626.6A EP3225985B1 (en) | 2014-11-28 | 2015-11-26 | Two-frequency measurement system comprising a delay line surface acoustic wave sensor |
JP2016561951A JP6260918B2 (ja) | 2014-11-28 | 2015-11-26 | 電気信号処理装置 |
US15/515,886 US10436757B2 (en) | 2014-11-28 | 2015-11-26 | Electrical signal processing device |
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WO2018084296A1 (en) * | 2016-11-07 | 2018-05-11 | Ball Wave Inc. | System, method and computer program product for measuring gas concentration |
JP2019015545A (ja) * | 2017-07-04 | 2019-01-31 | 日本無線株式会社 | 特性測定装置 |
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US11313836B2 (en) | 2018-01-31 | 2022-04-26 | Ball Wave Inc | System, method and computer program product for gas analysis |
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US11333631B2 (en) | 2016-11-07 | 2022-05-17 | Ball Wave Inc. | System, method and computer program product for measuring gas concentration |
JP2019015545A (ja) * | 2017-07-04 | 2019-01-31 | 日本無線株式会社 | 特性測定装置 |
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US10436757B2 (en) | 2019-10-08 |
EP3225985A4 (en) | 2017-11-22 |
US20170307567A1 (en) | 2017-10-26 |
EP3225985A1 (en) | 2017-10-04 |
EP3225985B1 (en) | 2018-10-24 |
JPWO2016084917A1 (ja) | 2017-07-27 |
JP6260918B2 (ja) | 2018-01-24 |
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