WO2016079161A1 - Réacteur cvd ou pvd pour revêtir des substrats de surface importante - Google Patents

Réacteur cvd ou pvd pour revêtir des substrats de surface importante Download PDF

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Publication number
WO2016079161A1
WO2016079161A1 PCT/EP2015/076912 EP2015076912W WO2016079161A1 WO 2016079161 A1 WO2016079161 A1 WO 2016079161A1 EP 2015076912 W EP2015076912 W EP 2015076912W WO 2016079161 A1 WO2016079161 A1 WO 2016079161A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
cvd
coating device
temperature
pvd coating
Prior art date
Application number
PCT/EP2015/076912
Other languages
German (de)
English (en)
Inventor
Patrick Marie Antonius BACKES
Roger ABDEL-KARIM
Original Assignee
Aixtron Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aixtron Se filed Critical Aixtron Se
Priority to JP2017527321A priority Critical patent/JP6602378B2/ja
Priority to CN201580071269.1A priority patent/CN107109650B/zh
Priority to KR1020177015358A priority patent/KR102525990B1/ko
Publication of WO2016079161A1 publication Critical patent/WO2016079161A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Definitions

  • the invention relates to a CVD or PVD coating device having a housing and a gas inlet member attached to the housing with a gas outlet surface having gas outlet openings, with a holding device attached to an upper portion of the housing, to which the gas inlet member at a plurality of suspension points is attached.
  • a generic coating device according to EP 1 815 493 Bl, which shows a housing of a coating device in which a holding device is arranged, which holds a gas inlet member.
  • a similar device is described in US 2008/0317973 AI.
  • a generic coating device has a susceptor for receiving the substrate to be coated and a gas inlet element performing the function of a gas distributor, with which process gases can be introduced into a process chamber which extends between an underside of the gas distributor and the susceptor.
  • the gas distributor has on its underside a plurality of gas outlet openings through which the process gas can enter the process chamber. Within the gas distributor are chambers for distributing the process gas to the gas outlet openings.
  • a gas distributor of this kind is described, for example, in DE 10 2013 101 534 A1.
  • gaseous organic starting materials are fed by means of a carrier gas in a heated gas distributor. These gaseous starting materials enter through the gas outlet openings in the process chamber to condense on a substrate, which rests on the cooled susceptor for this purpose.
  • the substrates may have a surface area of more than 1 m 2 .
  • CVD or PVD reactors with a susceptor diagonal of 2m to 3m. Since the gas inlet member must extend over the entire surface of the susceptor, there is a need to create a gas inlet member with a diagonal of 2 m to 3 m.
  • the process chamber has a process chamber height of a few centimeters.
  • the invention is based on the object of developing a generic coating device such that the process chamber height varies over the entire surface of the susceptor or the gas outlet surface of the gas inlet member only within narrow tolerances.
  • each claim is basically an independent solution to the problem.
  • an assembly is attached at an upper portion of the housing.
  • This assembly includes a gas inlet member having a gas outlet openings having gas outlet surface.
  • the gas outlet surface extends in a particular horizontal gas outlet plane.
  • the assembly is attached to a variety of suspension points on the housing.
  • temperature control means with which the gas inlet member can be tempered from a first temperature, which substantially corresponds to the temperature of the housing, to a second temperature, which is different from the housing temperature. This can be done by heating the gas inlet member, for which purpose the gas inlet member is provided with a heating device. In the unheated state, the gas inlet member has the temperature of the housing.
  • the gas inlet member In the heated state, the gas inlet member has a higher temperature than the housing. But it is also possible that the gas inlet member can be cooled with a cooling device to a temperature which is below the housing temperature.
  • the temperature control means may be channels in the gas outlet member, which are flowed through by a tempered, ie hot or cold liquid. As a result of this tempering and the associated temperature change of components of the assembly, the size of the assembly changes. At least the size of the gas inlet member changes due to the thermal expansion.
  • the fastening means are designed so that they deform in such a change in size of the assembly or have elements that shift against each other in a size change.
  • the fastening means for this purpose have force transmission means which transmit the weight of the assembly to the housing.
  • the power transmission means are in particular elastically deformable or have elements which can preferably be displaced relative to one another without abrasion.
  • the fastening means are preferably fastened exclusively to the outer horizontal edge of the assembly and in particular exclusively to a holding device.
  • the power transmission means can preferably only move / deform in the horizontal direction and not in the vertical direction.
  • the attachment is made preferably on the corners of a polygon.
  • the polygon is a virtual polygon, which defines corner points which are arranged in a horizontal plane at the edge of the holding device. At these vertices of the virtual polygon, the attachment takes place.
  • the polygon can be a triangle or a quadrangle.
  • two attachment points may be assigned to the corner points of the holding device, for example the two corner points of a narrow side.
  • a third attachment point can be arranged in the middle of this narrow side opposite narrow side.
  • the attachment points can also be assigned to the broad side corners or a broadside locally.
  • the force transmission means may each be a bending element.
  • the bending element is connected to a housing-side fastening element and a module-side fastening element. It can be a rectangular, thin plate.
  • the bending plates arranged in the corner area are aligned with respect to the assembly or the holding device in such a way that the assembly or the holding device can spread out both in the widthwise extension direction and in the narrow extension direction.
  • the flexurally elastic plate lies in a vertical plane and has a surface normal which runs in the angle bisector of the enclosed angle of the side walls of the narrow side and broad side of the holding device or assembly.
  • the surface normal is preferably directed to the geometric center of gravity, in particular the center of gravity of the assembly lying in the horizontal plane, so that the temperature expansion direction of the assembly at the attachment point coincides with the main bending direction of the force transmission element.
  • the bending plates thus preferably extend at an angle of 45 ° to the broad side or narrow side.
  • the two bending plates each arranged at adjacent corners thus each extend in a plane, these two vertical planes intersecting at an angle of 90 °.
  • a third mounting plate is attached to one of the two mounting place opposite side wall approximately in the middle of it.
  • the bending plate which likewise extends in a vertical plane, extends parallel to the side wall of the holding device or assembly.
  • the Hauptbie nonung of the power transmission means ie in particular the surface normal of a planar bending element on the center of gravity of the assembly, in particular the gas inlet member or its holding device, on. It may additionally be provided a floating bearing transversely to Biegeverlagerungsraum.
  • a bolt is preferably provided which protrudes with horizontal movement game in an opening.
  • a fastening pin is provided, with which the force transmission means, in particular the bending plate, is fastened to a fastening means, wherein the fastening pin has a bearing flank, which is supported on a sliding element, which lies on a bearing surface, so that the fastening pin is relatively transverse to the Main deformation direction of the bending element relative to the bearing surface can shift.
  • a securing device can be provided which prevents the assembly, in particular the gas inlet member, from falling if the force-transmitting means, in particular a breakage of a bending element, breaks.
  • a securing pin with vertical and / or horizontal movement distance can pass through a securing opening.
  • a fastening means arranged in the corner region of the holding device or the assembly, but which can also be fastened between the two corner points on a lateral wall of the holding device or the assembly, can be formed by a rod or cable extending in the vertical direction.
  • the solid or hollow rod has an upper end, which is preferably fixed to the housing, and a lower end, which is preferably attached to the holding device or the assembly.
  • a bending element in the form of a solid or hollow rod can also be arranged on a side wall of the assembly. The But bending elements can also have a different shape. It is advantageous if the bending elements allow a horizontal movement of the assembly or the holding device with minimal friction.
  • the attachment can be done via angle elements.
  • Fixing means arranged in the corner region can also be fastened to the housing by means of a cross-member.
  • the fastening elements have mutually rolling elements.
  • a first element may be firmly attached to the housing.
  • a second element may be fixedly attached to the assembly or to the holding device, and a third element may connect the first and the second element.
  • There may also be provided two or more elements that connect the fixed to the housing and fixed to the assembly fastener together. These are preferably chain links.
  • the rolling fasteners reference is made to the statements on the bending elements. This is especially true with respect to the directions of movement allowed by the rolling fasteners.
  • the assembly preferably has a retainer which is secured to an upper portion of the housing. It is a temperature-stabilizable or mechanically stabilized holding device. At this dimensionally stable holding device, the gas inlet member is attached to a plurality of suspension points. The suspension points are distributed substantially uniformly over the entire extension surface of the gas inlet member. The distance of the suspension points from each other is at least a factor of 3, but preferably by a factor of 4 or by a factor of 5, less than the diagonal extent of the gas inlet member. It is also possible a maximum distance between two adjacent suspension points, which may amount to a maximum of one tenth of the diagonal extent of the gas inlet member.
  • the holding device may have mechanical stabilizing elements. These mechanical stabilizing elements can by Vertical walls be formed.
  • the holding device preferably forms a framework, which is formed by intersecting vertical walls.
  • the distance between two vertically and optionally also parallel to each other vertical walls is at least a factor of 3, a factor of 4, but preferably a factor of 5, less than the diagonal distance of the gas inlet member.
  • It form in the vertical direction extending cylindrical cells with a base area, which preferably corresponds to a maximum of one hundredth of the base of the gas inlet organ and may have a checkered or honeycomb-like floor plan.
  • the holding device is preferably fastened exclusively to the housing with a horizontal edge. It is the horizontal edge of the retainer that is attached to the housing.
  • the entire central surface portion of the holding device spans freely the gas inlet member, but has at a plurality of substantially uniformly distributed over the surface areas holding a connection to Gaseinlassor- gan.
  • the holding device is temperature-stabilized.
  • an active or a passive temperature stabilization device can be provided.
  • the holding device is temperature-stabilized in such a way that its temperature changes significantly neither in the horizontal direction nor in the vertical direction when the temperature difference to the gas inlet member changes.
  • the temperature varies within the entire body formed by the holding device, so preferably the truss by +/- 5 degrees.
  • the temperature difference between the coldest point and the hottest point is a maximum of 5 degrees.
  • Thermal protection shields for example with reflective surfaces or insulating bodies, can be provided for passive temperature stabilization.
  • tempering media can be used, for example tempering liquids which flow through tempering channels.
  • the temperature control channels can be arranged within the holding device. Preferably, however, the temperature control channels are provided above or below the holding device. If the holding device for temperature control has to be cooled, because the temperature of the gas inlet is held during the coating process at a high temperature, it is preferred to use an active tempering, which is arranged in the region between gas inlet member and holding means.
  • the honeycomb or box-like structure of the holding device which gives it the shape of a truss, also leads to its mechanical stabilization.
  • the fastening means are the said elastic fastening means with which the edge region of the holding device is fastened to the housing.
  • a vertical distance space extends between the gas inlet member and the holding device.
  • the hangers can be elongated metallic or ceramic tension elements, which are fastened with their upper end to the holding device and with their lower end to an attachment point of the gas inlet member.
  • the hangers can be height adjustable. This makes it possible to adjust the distance between the gas outlet surface and susceptor top side, ie the process chamber height, at each suspension point.
  • the hangers are made of a material which has a low thermal expansion coefficient.
  • the walls of the gas inlet member are provided with Temper réelleskanälen.
  • the gas outlet surface forming wall of the gas inlet member but also the wall facing away from it is provided with channels through which a tempering, such as a hot liquid can flow.
  • the holding device is designed as a lightweight component.
  • the measures that are taken to actively reduce the heat transfer from the gas inlet member to the holding device the arrangement may include one or more heat shields in the space between the gas inlet member and holding device.
  • the heat shields are area objects that are parallel to the surface extent of the gas inlet member in the distance space. Their surfaces can be highly reflective. Alternatively, iso- Lier emotions be arranged in the distance space.
  • At least one heat shield can be actively cooled.
  • the actively cooled heat shield is preferably immediately adjacent to the holding device.
  • the actively cooled heat shield can be a plate whose areal extent corresponds approximately to the areal extent of the holding device or the areal extent of the gas inlet element. Within the plate run coolant channels through which a coolant can flow. As a result, the holding device can be kept at a constant temperature. If the gas inlet member is heated, the holding device essentially maintains its temperature. The distance that the process chamber height can change during operation of the device is less than 1 mm.
  • the surface temperature of the housing is about 30 ° C. The temperature of the holding device can be stabilized to a value of 50 ° C.
  • the active heat shield is cooled to a temperature of about 50 °.
  • the trained as a showerhead gas inlet member is operated at a temperature of for example 450 ° and the substrate is cooled to a temperature of 20 °.
  • the passive heat shields which are located between the active heat shield and the gas inlet member, the heat flow from the gas inlet member is reduced to the actively cooled heat shield.
  • a directly adjacent the gas inlet member heat shield for example, a
  • the heat shield may be made of metal or a ceramic material. Between this passive heat shield and the active heat shield, a further passive heat shield can be arranged, which is likewise formed by a metal plate or a ceramic plate. Its temperature during operation is about 270 ° C. It can also be provided more than two passive heat shields between the gas inlet member and the actively cooled heat shield.
  • the surfaces of the heat shields may have a low optical emissivity. They can be polished, reflective surfaces.
  • the hangers can be used to hold the heat shields. But it is also envisaged that the Hanger only protrude through openings of the heat shields, so that a deformation of the heat shields does not affect the position of the gas inlet member in the room.
  • the holding device is stabilized against deformation. These are deformations caused by changing temperature and / or pressure.
  • the heat shields may be hung on separate hangers which are attached either to the housing cover or to the support means.
  • the invention further relates to a method for operating such a device.
  • FIG. 1 shows a section along the line I-I in FIG. 2 through a schematically illustrated PVD coating device, FIG.
  • FIG. 3 shows the section along the line III - III in Fig. 1,
  • FIG. 4 shows the upper housing part of a PVD reactor of a second exemplary embodiment in a sectional view approximately according to FIG. 1, FIG.
  • FIG. 5 shows the cut housing upper part of FIG. 4 in a perspective view
  • FIG. 6 shows a third embodiment of the invention in a representation according to FIG. 3
  • FIG. 7 shows the section along the line VII - VII in Fig. 6,
  • Fig. 12 shows the detail XII in Fig. 11, the figures
  • FIG. 14 shows a further exemplary embodiment in a representation similar to FIG. 6,
  • Fig. 15 is a plan view of a fastener 13.2 of Figure 14
  • Fig. 16 is the section along the line XVI-XVI in Figure 15
  • Fig. 17 is the section along the line XVII-XVII in Figure 16
  • Fig. 18 shows the section according to Line XVIII-XVIII in Fig. 16
  • 19 shows the section along the line IXX-IXX in Figure 16
  • FIG. 23 shows the section according to the line XXIII-XXIII in FIG. 21
  • FIG. 24 shows the section according to the line XXIV-XXIV in FIG. 21, and
  • FIG. 24a enlarges the section XXIVa in FIG. 24.
  • the device shown in Figures 1 to 3 is a PVD device for coating large-area substrates with organic layers.
  • the substrates may have a rectangular shape with a diagonal of more than 1 m, preferably more than 2 m or 3 m.
  • the lower housing part 2 carries a susceptor 15 for supporting the substrate.
  • the susceptor 15 has a plurality of coolant channels 16, through which a coolant can be introduced into the process chamber.
  • the susceptor is maintained at a temperature of about 20 ° C by means of the coolant.
  • the upper part 1 of the housing has a housing cover, which is mechanically stabilized by a rib structure 17, 18.
  • the lower housing part 2 has a similar rib structure for the mechanical stabilization of the housing. se convinceds.
  • Temperierstoffkanäle be arranged through which a liquid temperature control medium flows to keep the housing cover at a predetermined temperature.
  • fastening means 13, 14 are provided. It is elastic fastening means 13, 14, with which a holding device 3 is attached to its horizontal edge on the upper housing part 1.
  • the holding device 3 is a lightweight component in the form of a framework or a honeycomb structure. It has a plurality along vertical connecting lines of interconnected surface elements 4, 5.
  • the surface elements 4, 5 form vertical walls.
  • the holding device 3 is formed by a crossing vertical walls 4, 5 forming the holding frame, which is fastened with its edge 3 'via the fastening means 13, 14 on the housing 1. Since the holding device 3 is attached to the housing 1 only at its edge 3 ', a bending of the housing cover that is unavoidable in the interior of the housing 1, 2 does not lead to any relevant change in position of the holding device 3 within the housing 1, 2 The entire surface area of the holding device 3 surrounded by the edge 3 'freely undercuts the ceiling wall of the housing upper part 1 extending parallel thereto.
  • the fastening means 13, 14 are fastened to the edge of the top wall of the housing top part 1.
  • the holding device 3 forms an open or closed cell structure, wherein the horizontal surfaces of the cells are at least a factor of 100 smaller than the horizontal surface of the holding device 3.
  • the vertical height of a surface may be in the order of magnitude of a circle-equivalent diagonal of the horizontal surface of the cell ,
  • a gas inlet element 7, which is a hollow body whose walls have tempering channels 9, is arranged vertically above the susceptor 15.
  • the distance of the bottom of the gas inlet member 7, which forms a gas outlet surface T, to the top of the susceptor 15 is a few centimeters.
  • the gas outlet surface T has a plurality of showerhead-like arranged gas outlet openings 8 through which 7 process gases can flow from the cavity of the gas inlet member into the process chamber, which is formed by the top of the susceptor 15 and the underside of the gas inlet member 7.
  • the gas inlet member 7 is tempered to temperatures of about 450 ° C.
  • the gas inlet member 7 is fastened with mechanical fastening elements 6 on the holding device 3.
  • the mechanical fastening elements 6 are arranged distributed substantially uniformly over the entire extension surface of the gas inlet member 7.
  • the distances of adjacent fasteners 6 from each other are substantially less than an edge length or the diagonal of the gas inlet member 7.
  • the maximum distance, the two adjacent fastener 6 have less than the tenth part of the circle equivalent diagonal of the gas inlet member.
  • the mechanical fastening elements are hanger 6, which are fastened to the holding device 3 with a head 6 'and extend over a vertical distance space to the gas inlet member 7. There, the trailer 6 are attached to suspension points 6 'with their feet on the gas inlet member 7.
  • the gas inlet member 7 has two mutually parallel walls, each having Temperierstoffkanäle 9.
  • the walls of all six sides tempering, for example. Electric heaters or channels, by a temperature control liquid can flow, so that the gas inlet member can be heated homogeneously to a temperature of, for example, 450 °.
  • the attachment points 6 ' may be provided on the upper wall of the gas inlet member 7.
  • the attachment points 6 'but are provided on the gas outlet openings 8 having wall of the gas inlet member 7. The feet of the hangers 6 are thus fastened there to the lowermost wall of the gas outlet organ 7.
  • the heads 6 "of the hangers 6 are mounted in openings or recesses 19 in the upper side of the holding device 3.
  • the heads 6" can be of
  • Screws that are screwed into threads, so that can be changed by rotation of the heads 6 ", the length of the hangers 6 and the vertical position of the suspension points 6 'but the heads 6" can also be formed by nuts or other adjusting members be with which the altitude of the gas inlet organ can be adjusted locally. This allows the height of the process chamber to be preset locally.
  • the hangers 6 are preferably made of a material which has only a low coefficient of thermal expansion, so that the heating of the hanger 6 does not affect the local height of the process chamber.
  • the holding device 3 is not only a mechanically stabilized support frame, but also a temperature-stabilized support frame.
  • an actively tempered heat shield 11 is located immediately below the holding device 3.
  • the heat shield 11 is a plate made of metal or ceramic with coolant channels 12. A coolant is passed through these coolant channels 12, which causes the actively cooled heat shield 11 brings to a temperature of about 50 °.
  • the holding device can also be cooled directly.
  • a passive heat shield 10 is provided, which may also be a metal plate or a ceramic plate.
  • the passive heat shield has a temperature which is in the range between the temperature of the gas inlet member and the temperature of the active heat shield.
  • the temperature of the passive heat shield can be in the range between 400 ° and 200 °.
  • the individual heat shields can have temperatures of 270 ° or 350 °.
  • the temperature of the holding device is thereby maintained at about 50 °.
  • the housing temperature is then about 30 ° C.
  • the passive heat shields 10 are preferably metal plates with highly reflective surfaces. Their emission coefficient is less than 0.2.
  • the second embodiment of a housing upper part 1 shown in Figures 4 and 5 also has a designed as a lightweight component holding frame 3, which is formed by a truss-like chamber structure, wherein vertical chamber walls 4, 5 are connected to each other at vertical connecting lines.
  • the chamber walls 4, 5 can also be formed here by thin metal plates.
  • the support frame 3 still has a horizontally extending upper horizontal wall 20 and a lower horizontal wall 21.
  • only the vertical peripheral edge 3 'of the holding device 3 is connected to the housing 1.
  • the Related fasteners 13 may be elastic attachment means. All walls of the holding device 3 are made of thinnest sheet materials, such as sheets. It forms an open or closed-cell space structure.
  • the holding device 3 is fastened to the edge of a ceiling plate of the housing upper part 1. However, it is also possible to manufacture the holding device 3 monolithically, for example to mill out a framework from a solid block.
  • a gas inlet member 7 with a multiplicity of gas outlet openings is fastened to the holding device 3 via a multiplicity of fastening points 6 'arranged substantially uniformly over the extension surface of the gas inlet member 7.
  • There are mechanical fasteners 6 are connected, which are also formed here of hangers.
  • the head of the hanger 6 "is connected to the holding device 3.
  • the foot of the hanger 6 is connected to the gas inlet member 7 at the attachment points 6.
  • at least one actively cooled heat shield 11 is provided, which is arranged directly below the holding device and extends parallel to the underside of the holding device 3. Between the actively cooled heat shield 11 and the upper side of the gas inlet member 7 extends a plurality of mutually parallel passive heat shields 10th
  • the heat shields are connected to the hangers 6.
  • the hangers 6 thus not only hold the gas inlet member 7 on the holding device 3, but also the heat shields 10, 11 in its vertical position.
  • the heat shields 10, 11 can also be attached to the holding device 3 with separate hangers. They have highly reflective surfaces.
  • the heat shields 10, 11, whose vertical position is essentially uncritical, are attached directly to the housing 1 via separate suspension devices.
  • Respective suspension devices may be provided at the edge of the heat shields 10, 11. However, they can also be provided in the middle surface area of the heat shields 10, 11 and, for example, reach through passage openings of the holding device 3 in order to be fastened to the ceiling of the housing upper part 1.
  • closable openings 22 in the region between the stiffening ribs 17, 18 are arranged. By opening these openings 22, access to the upper side of the holding device 3 or to the upper horizontal wall 20 is possible.
  • the heads 6" can be formed by threaded parts, so that the effective length of the trailer 6 can be influenced by turning the heads 6 ".
  • the hangers thus form setting members in order to locally influence the height of the process chamber, that is to say the distance of the gas inlet member 7 from the susceptor 15.
  • the device described above is used to deposit OLEDs on large area substrates.
  • solid, in powder form starting materials are brought via an evaporator into a gaseous form.
  • the organic vapor thus formed is fed into the gas inlet member 7, where the vapor from the gas outlet Openings T emerges to condense on the surface of a resting on the susceptor 15 substrate.
  • the holding device 3 forms together with the gas inlet member 7, an assembly 23 which is fastened by means of fastening means 13, 14 at an upper portion of a housing 1.
  • the holding device 3 is also here a lightweight body, for example a frame formed by a framework. It has a rectangular floor plan with four corners and the corners connecting side walls. On two, connected by a side wall corners are fasteners 13.1. On the middle of the opposite side wall is another fastener 13.2, so that the fastening means 13.1, 13.2 are arranged on the vertices of an isosceles triangle.
  • the fastening means 13.1, 13.2 consist essentially of three fastening elements. They each have a fastening element 24.1, 24.2, with which the fastening means 13.1, 13.2 is attached to the upper housing part 1.
  • Another fastening element 25.1, 25.2 is attached to the holding device 3.
  • the fastening element 25. 1 is an angle-shaped element which comprises the corner area of the holding device 3 and has angle legs which are connected in a planar manner to the side wall of the holding device 3.
  • the fastener 25.2 has a extending in a plane mounting side, the wall approximately in the middle of the sides of the holding device 3 is fixed.
  • the two fastening elements 24.1 or 24.2 and 25.1 or 25.2 are each connected to each other by means of an intermediate element 26.1, 26.2.
  • the intermediate elements 26.1, 26.2 are used for power transmission, with which the weight is transmitted from the fastening means 25.1, 25.2 on the fastening means 24.1, 24.2.
  • the intermediate elements 26.1, 26.2 are thus force transmission means, which in the exemplary embodiment of FIGS. 6 to 8 each have the shape of a rectangular plate.
  • An upper portion of the bending element 26.1, 26.2 is in each case connected to a housing-side fastening element 24.1, 24.2.
  • a lower portion of the intermediate element 26.1, 26.2 is connected to the brau jury districten fastener 25.1, 25.2.
  • the bending elements 26.1, 26.2 have a vertically extending bending surface, so that the surface normal points in the horizontal direction.
  • the surface normals of the bending elements 26.1 have approximately in the direction of the bisector of the two meeting in the vertex sidewalls of the holding device 3.
  • the surface normals of the bending elements 26.1 but in the direction of the geometric center of gravity M of the holding device 3, so that the thermal expansion direction h at the attachment point coincides with the surface normal of the bending elements 26.1.
  • the surface normal of the bending element 26.2 extends in a direction transverse to the side wall of the holding device. With a temperature expansion of the holding device 3, the latter can expand in the horizontal plane. In this case, the distance between the individual corners of the holding device 3 can increase or decrease. Such a change in size of the holding device 3 is associated with a slight bending of the planar bending element 26.1, 26.2.
  • the bending elements may be bending plates having mutually parallel edges, which are each secured with mounting jaws on a fastening element 24.1, 24.2, 25.1, 25.2 of the housing or the holding device.
  • the force transmission means according to the invention are designed so or attached to fasteners that they allow an evasive movement of the assembly 23, in particular of the gas inlet member, only in the horizontal plane.
  • the displacement paths of the bending elements are therefore smaller by at least one order of magnitude (factor 10) than the length of the bending section of the bending element.
  • Fig. 9 shows a variant of a fastening element 13.4.
  • a flexurally elastic intermediate element 26.4 in the form of a rod which may be solid or hol, is connected to the holding device 3 by means of an upper fastening element 24.4 with the housing 1 and a lower fastening element 25.4. Instead of a rod but also a rope can be used.
  • the rod and the cable are the force transmission means with which the weight is transmitted from the holding device 3 and the gas inlet member to the housing.
  • the fastening elements 24.1 and 25.4 may be angular elements.
  • the intermediate element 26.1 is preferably made of metal, as are the intermediate elements 26.1 and 26.2.
  • the rod 26.4 extends in the vertical direction. But he can also be inclined to do so. He has a circular cross section, but can also have another, for example. Have a polygonal cross-section.
  • the exemplary embodiment illustrated in FIG. 10 essentially corresponds to the corner holder illustrated in FIGS. 6 and 8. Shown, however, is designed as a Traverse housing-side fastening element 24.1, which is fastened with screws on the inner side walls of the upper housing part 1.
  • the assembly-side fixing element 25.1 has two mutually angled angle leg at a 90 ° angle, which are also secured by screws to the assembly 23. Each offset by 45 ° to the angle legs of the fastener 25.1 side is connected to the flexurally elastic intermediate element 26.1.
  • In the intermediate ment 26.1 is as in the intermediate element 26.1 to a power transmission means.
  • FIG. 11 and 12 shows a compound of a cross member 30 which is supported by two housing-side fastening elements 24.3, 24.4, and four chain links 27, 28, 29 connected to a module-side fastening element 25.3, which is an angle element.
  • An uppermost chain element 27 is held by a fastening bolt of the traverse 30 and for this purpose is inserted into a slot of the crossmember 30.
  • a lower chain element 29 is held between two fastening branches in the fastening element 25.3 and is likewise penetrated by a fastening bolt.
  • There are two intermediate chain links 28 which connect the upper chain link 27 to the lower chain link 29.
  • the chain links 27, 28, 29 form a power transmission means to transmit the weight force.
  • a third, not shown fastening means may be provided approximately in the middle of the two corner regions side wall, which also has a plurality of interlocking chain links 27, 29, 29, so that the local narrow wall can dodge in a direction transverse to its extension direction.
  • Fig. 13 a shows schematically the arrangement of fastening means 13 at two corner regions and in the middle of an opposite side wall of an assembly 23, so that the fastening means 13 are arranged at the vertices of an isosceles triangle.
  • Fig. 13 b shows the arrangement of fasteners 13 at the four corners of a rectangular plan having assembly, in which case the fastening means 13 are arranged on the vertices of a quadrangle.
  • FIG. 13 c shows a further variant in which the fastening means 13 are arranged approximately in the middle of the mutually perpendicular side walls of the assembly 23.
  • These are bending elements which have a bending direction that run perpendicular to the extension direction of the side walls.
  • the bending elements are designed such that the assembly 23 can also extend in a direction that lies in the surface of the bending elements.
  • the bending elements can not be designed as a flat body, but for example, be designed like a comb or have spokes.
  • FIG. 13 d shows the attachment of an assembly 23 using four fasteners 13, wherein two fastening means 13 are attached to two opposite side walls of the assembly 23 in each case.
  • the fastening means 13 are spaced from the corner points. They are, for example, spaced by a third of the side length of the respective vertex and associated with the longer side walls.
  • the bending elements can be formed here by rods which are fixedly secured to the housing with an upper end, so that the lower end, which is attached to the assembly 23, can shift elastic in a horizontal plane.
  • Figures 14 to 24a show a particularly preferred embodiment in which the assembly 23, which may be a holding device 3 with attached gas inlet member 7 or only a gas inlet member 7, is attached to three attachment points on the housing.
  • the assembly 23 which may be a holding device 3 with attached gas inlet member 7 or only a gas inlet member 7, is attached to three attachment points on the housing.
  • three fastening means 13.1, 13.2 are provided, which act on the horizontal edge of the assembly 23 and form this assembly-side fastening elements 25.1 and 25.2.
  • the assembly 23 has a non-square, rectangular plan. At two corners of a shorter side of the rectangle two assembly-side fasteners 25.1 are attached.
  • Each of the two assembly-side fastening elements 25.1 is connected to a housing-side fastening element 24.1, which is fastened to the housing, on the shorter rectangular side opposite shorter rectangle side is in the middle of the third fastening means 13.1, which also a component-side fixing element 25.2 and a housing-side fastening means 24.2 has.
  • each assembly-side fastening element 25.1, 25.2 is connected to an intermediate element 26.1, 26.2 with a housing-side fastening element 24.1, 24.2.
  • the intermediate element 26.1, 26.2 is a force transmission means in the form of a bending plate.
  • the bending plate has a substantially rectangular cross-section and on its upper and lower sides of a thickening material.
  • the upper material thickening of the intermediate element 26.1, 26.2 has screw-on bores, through which fastening screws are screwed, with which the intermediate element 26.1, 26.2 is screwed to the fastening element 24.1, 24.2 on the housing side.
  • the fastening element 24.1, 24.2 on the housing side has a vertically displaceable adjustment body 14 to which the force transmission means is fastened.
  • the adjusting body 41 can be adjusted in height so as to adjust the distance of the gas inlet member 7 from the susceptor 15.
  • the lower material thickening of the intermediate element 26.1, 26.2 has a bearing opening 36.
  • This bearing opening 36 is penetrated by a mounting pin 32 which is fixedly connected to the assembly-side fastening element 25.1, 25.2.
  • the assembly-side fixing element 25.1, 25.2 has for this purpose a vertically extending slot into which the lower material thickening of the intermediate element 26.1, 26.2 is inserted.
  • the slot is crossed by a mounting hole 35 into which the mounting pin 32 is inserted, the part of a bolt 31st
  • the holding opening 36 has a bearing surface 40 extending in the horizontal direction, on which a sliding element 39 lies.
  • a bearing flank 38 of the fastening pin 32 is supported in such a way that the bearing flank 38 can shift slightly in the horizontal direction relative to the bearing surface 40.
  • a securing device 34, 33 is provided.
  • the securing device is a securing pin 33 which is fixedly attached to one of the two modules 24, 25 and which engages in an eye 34 of the other fastening element.
  • the safety tap is fen 33 the module-side fastener 25.1, 25.2 assigned stationary.
  • the securing pin 33 is formed by the said pin 31.
  • the securing eye is formed by a securing opening 34, which sits on an extension of the housing-side fastening element 24.1, 24.2.
  • the diameter of the securing opening 34 is greater than the diameter of the securing pin 33, so that the securing pin 33 projects freely into the opening 34.
  • the peripheral surface of the securing pin 33 has a distance to the inner wall of the securing opening 34 over its entire circumference, so that the securing pin 33 projects freely and without contact into the securing opening 34.
  • the securing device has an engaging with all workedem distance in a securing opening 34 securing pin 33, wherein the securing pin 33 is associated with either a housing-side or a module-side fastener and the securing opening 34 the other fastening element, wherein the assembly-soapy fastener and the housing side Fastener otherwise be connected together only by a horizontal evasive movement enabling intermediate element.
  • a CVD or PVD coating device which is characterized in that the fastening means 13, 14 power transmission means 26.1, 26.2, 26.3, 26.4; 27, 28, 29, which deform at a caused by the temperature change of the assembly 23 or shift against each other.
  • a CVD or PVD coating device which is characterized in that the assembly 23 is attached only at its horizontal edge 3 'on the housing 1, 2.
  • a CVD or PVD coating device which is characterized in that the assembly 23 with elastically deformable force transmission centers 26.1, 26.2, 26.4 is fastened to the housing 1, 2, which have a main deformation direction which points to the horizontal centroid M of the assembly 23 is directed.
  • a CVD or PVD coating device which is characterized in that the gas inlet member 7 with a plurality of distributed over the entire horizontal extension surface arranged hangers 6 at one with the fastening means 13, 14 on the housing 1, 2 fixed holding device 3 of Assembled assembly 23, wherein the hangers 6 extend in the vertical direction of the suspension points 6 'to the holding device 3 and in a vertical distance space between Gaseinlassorgan 7 and holding means 3, a tempering device 11, 12 and / or one or more heat shields 10, 11 are arranged.
  • a CVD or PVD coating device which is characterized in that the fastening means 13, 14, 13.1, 13.2, 13.3, 13.4 at the edge of a rectangular plan having assembly 23 at the vertices of a polygon, in particular a triangle or quadrangle are arranged.
  • a CVD or PVD coating device which is characterized in that at least one force transmission means is an elastically deformable bending element 26.1, 26.2, 26.4.
  • a CVD or PVD coating device which is characterized in that the force transmission element 26.1, 26.2 is a rectangular plate or that the bending element 26.4 is a solid or hollow rod, or that the bending element is a cable.
  • a CVD or PVD coating device which is characterized in that at least one force transmission means 13.3 has elements rolling against each other 27, 28, 29.
  • a CVD or PVD coating device which is characterized in that of the rolling elements against each other, a first element 27 is fixedly secured to the housing 1, 2, a second element 29 is fixedly secured to the assembly, and at least a third Element 28 connects the first and second elements 27, 29 with each other.
  • a CVD or PVD coating device which is characterized in that the force transmission means is an intermediate element 26.1, 26.3, 26.4, with the at least one of the arranged in particular in a corner region fasteners 24.1, 24.2, 24.3, 24.4 via an intermediate element 26.1 , 26.3, 26.4 on a fastener fastened to the assembly 23
  • a CVD or PVD coating device which is characterized in that a bending element 26.4 can move with its attached to a module-side fastening element 25.4 end in a horizontal plane bending elastic with respect to its on the housing-side fastening element 24.4.
  • a CVD or PVD coating device which is characterized in that the housing-side fastener 24.1 - 24.3 is located approximately at the same vertical height, as the associated assembly-side fastener 25.1 - 25.3.
  • a CVD or PVD coating device which is characterized by a securing device, which at a fraction of the power transmission means 26.1, 26.2, 26.3, 26.4; 27, 28, 29 comes into effect to hold the assembly 23 on the housing 1, in particular to a module-side fastener 25.1 - 25.4 on the housing-side fastener 24.1,

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

La présente invention concerne un dispositif de revêtement par dépôt CVD ou PVD comprenant un boîtier (1, 2) et un module (23) qui est fixé au boîtier (1, 2), présente un organe d'entrée de gaz (7) doté d'ouvertures de sortie de gaz (8), s'étend dans un plan de sortie de gaz et présente des surfaces de sortie de gaz (7'), lequel module est fixé à une section supérieure du boîtier (1) en une pluralité d'emplacements de suspension (6') par des moyens de fixation (13, 14). Des moyens de régulation de température (9) permettent de faire passer la température de l'organe d'entrée de gaz (7) d'une première température qui correspond sensiblement à la température du boîtier (1, 2), à une seconde température différente de la température du boîtier. Les moyens de fixation (13, 14) présentent des moyens de transfert de force (26.1, 26.2, 26.3, 26.4; 27, 28, 29) qui, lors d'un changement de taille du module (23) résultant du changement de température, se déforment ou se déplacent les uns contre les autres. Le module comprend un dispositif de retenue (3) auquel l'organe d'entrée de gaz (7) est fixé au moyen d'une pluralité d'élément de suspension (6) répartis sur toute la surface d'extension horizontale, et le dispositif de retenue (3) n'est fixé au boîtier (1) qu'au niveau de son bord par l'intermédiaire des moyens de transfert de force (26.1, 26.2, 26.3, 26.4; 27, 28, 29).
PCT/EP2015/076912 2014-11-20 2015-11-18 Réacteur cvd ou pvd pour revêtir des substrats de surface importante WO2016079161A1 (fr)

Priority Applications (3)

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JP2017527321A JP6602378B2 (ja) 2014-11-20 2015-11-18 大面積基板コーティング用ｃｖｄ又はｐｖｄ反応炉
CN201580071269.1A CN107109650B (zh) 2014-11-20 2015-11-18 用于对大面积的基板覆层的cvd或pvd反应器
KR1020177015358A KR102525990B1 (ko) 2014-11-20 2015-11-18 대면적 기판들을 코팅하기 위한 cvd- 또는 pvd-반응기

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DE102014019721.2 2014-11-20
DE102014019721 2014-11-20
DE102015110440.7 2015-06-29
DE102015110440.7A DE102015110440A1 (de) 2014-11-20 2015-06-29 CVD- oder PVD-Reaktor zum Beschichten großflächiger Substrate

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KR (1) KR102525990B1 (fr)
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CN107109650B (zh) 2020-06-16
DE102015110440A1 (de) 2016-05-25
CN107109650A (zh) 2017-08-29
JP6602378B2 (ja) 2019-11-06
JP2017538037A (ja) 2017-12-21
KR20170084159A (ko) 2017-07-19
TW201628705A (zh) 2016-08-16
KR102525990B1 (ko) 2023-04-25
TWI683700B (zh) 2020-02-01

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