WO2016052601A1

WO2016052601A1 - Inspection device, inspection program and inspection method

Info

Publication number: WO2016052601A1
Application number: PCT/JP2015/077699
Authority: WO
Inventors: 井上　浩; 邦宏伊藤
Original assignee: ブラザー工業株式会社
Priority date: 2014-09-30
Filing date: 2015-09-30
Publication date: 2016-04-07
Also published as: JP2016070773A; JP6164186B2

Abstract

In order to suppress variations in the time until measurements begin, and suppress decreases in measurement precision, the present invention is provided with: a rotation mechanism for rotating, about a main shaft, a holder that holds an inspection chip; a position detection unit for detecting the position of the holder rotated by the rotation mechanism; a light emitting unit for emitting a measurement beam; a light receiving unit for receiving a transmitted beam which is the measurement beam emitted by the light emitting unit and transmitted through the inspection chip held by the holder; and a control unit for controlling the rotation by the rotation mechanism; wherein the control unit, within a predetermined standard period of time, rotates a holder that has stopped at an arbitrary position from a position detected by the position detection unit to a measurement position where the measurement beam can be transmitted through the inspection chip held by the holder, and begins measurements on the basis of the transmitted beam received by the light receiving unit after the standard period of time.

Description

Inspection device, inspection program, inspection method

The present invention relates to an inspection apparatus, an inspection program, and an inspection method.

Conventionally, an inspection apparatus that rotates a spindle and applies centrifugal force to a microchip is known from Patent Document 1 and the like. The inspection apparatus disclosed in this patent document includes a rotary drive source including a DC motor and an encoder, a light source, a detector, and a control unit. Before the absorptiometric measurement unit provided on the microchip stops at the stop position corresponding to the light source and the detector, the plasma separated from the blood and the reagent are mixed inside the microchip, and the liquid to be measured Is obtained. The control unit controls the rotational drive source so that the absorbance measurement unit stops at a stop position corresponding to the light source and the detector. The light from the light source is transmitted to the absorptiometry unit of the microchip stopped at the stop position. The transmitted light is detected by the detector, and the absorbance of the liquid to be measured is measured.

JP 2008-8875 A

In order to accurately stop the absorbance measurement unit at the stop position, the control unit stops at one position before stopping at the stop position, and based on the position information detected from the encoder at that position, the stop position It is conceivable to output a drive signal for stopping the motor to the motor. On the other hand, the plasma separated from the blood and the reagent are mixed inside the microchip before stopping at the stop position. Therefore, if the period from the time when the plasma and the reagent are mixed to the time when the absorbance measurement using the light emitted from the light source is varied for each measurement, the measurement accuracy for each measurement may be lowered. That is, if the movement time from an arbitrary position to the stop position varies, the period from the mixing point to the start of absorption spectrophotometry varies, which may reduce the measurement accuracy.

The present invention has been made to solve the above-described problems, and provides an inspection apparatus, an inspection program, and an inspection method capable of suppressing variations in a period until the start of measurement and suppressing a decrease in measurement accuracy. With the goal.

In order to achieve the above object, an inspection apparatus according to claim 1 includes a holder for holding an inspection chip, a rotation mechanism for rotating the holder around a main shaft, and a position of the holder rotated by the rotation mechanism. A position detection unit that detects light, a light emitting unit that emits measurement light, a light receiving unit that receives transmitted light that has passed through an inspection chip held by the holder, and the measurement light emitted from the light emitting unit, and the rotation A control unit that controls rotation by a mechanism, and the control unit holds the measurement light held by the holder from a position detected by the position detection unit within a predetermined period of time. The holder stopped at an arbitrary position is rotated to a measurement position where light can be transmitted, and measurement is started based on the transmitted light received by the light receiving unit after the predetermined period.

According to the inspection apparatus of the first aspect, the holder stopped at an arbitrary position is moved within a predetermined period from the detected position to the measurement position, and the measurement is started after the predetermined period. Even if there is a holder at an arbitrary position, the period until the measurement is started is constant. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement and to suppress a decrease in measurement accuracy.

Further, the control unit may be rotated in a first clockwise direction that is predetermined clockwise or counterclockwise to stop the holder at the measurement position.
For each measurement, when the holder is rotated in the first rotation direction and stopped at the measurement position, or rotated in the second rotation direction opposite to the first rotation direction and stopped at the measurement position, the spindle is rotated. Since the stopping accuracy to the measurement position varies depending on the cogging of the motor to be performed, the measurement accuracy for each measurement is lowered. According to the present disclosure, the holder is rotated in the first rotation direction and stopped at the measurement position. Therefore, the possibility that the measurement accuracy for each measurement is lowered can be reduced.

Further, the control unit may rotate the first rotation direction from the detected position to stop the holder at the measurement position.
According to the present disclosure, the holder is rotated without reversely rotating in the middle from the second rotation direction to the first rotation direction. Therefore, by reversely rotating in the middle, it is possible to reduce the inertia or the liquid injected into the inspection chip held by the holder by stopping. Therefore, the possibility of a decrease in measurement accuracy can be reduced.

Further, the control unit calculates a rotation speed when rotating the holder in the first rotation direction from the detected position and stopping the holder at the measurement position in the certain period, and calculates the calculated rotation speed. Thus, the holder may be rotated in the first rotation direction from the detected position.
According to the present disclosure, since the holder is rotated at the calculated rotational speed, the holder is reliably moved from the detected position to the measurement position within a predetermined period. Even if there is a holder at an arbitrary position, the period until the measurement is started is more reliably constant. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement, and to further suppress a decrease in measurement accuracy.

Further, the control unit rotates in the first rotation direction from the detected position to stop the holder at the measurement position, and from the detected position to the first rotation direction. One of a second route that rotates in a second direction opposite to pass through the measurement position, rotates in a first rotation direction from a predetermined folding position, and stops the holder at the measurement position. May be determined based on the position detected by the position detector, and rotated by the determined route to stop the holder at the measurement position.
According to the present disclosure, since the holder can be moved to the measurement position in either the first route or the second route, the rotation speed can be reduced, the power consumption is reduced, and the rotation speed is increased. As a result, the liquid injected into the inspection chip can be prevented from jumping out. Therefore, the possibility of a decrease in measurement accuracy can be reduced.

In addition, when the control unit determines to rotate the holder in the first route during the certain period, the control unit rotates the holder in the first rotation direction from the detected position, and moves the holder to the measurement position. When calculating the rotation speed in the case of stopping, and rotating the holder in the first rotation direction from the detected position at the calculated rotation speed, and determining to rotate the holder in the second route, When the holder is rotated in the second rotation direction from the detected position to stop the holder in the folding position, and is rotated in the first rotation direction from the folding position to stop the holder in the measurement position. May be calculated based on the remaining time of the predetermined period, and the holder may be rotated in the first rotation direction from the folding position at the calculated rotation speed.
According to the present disclosure, since the holder is rotated at the calculated rotational speed, the holder is reliably moved from the detected position to the measurement position within a predetermined period. Even if there is a holder at an arbitrary position, the period until the measurement is started is more reliably constant. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement, and to further suppress a decrease in measurement accuracy.

In addition, the control unit determines whether or not the predetermined period has elapsed in a state where the holder is stopped at the measurement position, and when it is determined that the predetermined period has elapsed, the light receiving unit receives light. Measurement may be started based on the transmitted light.
According to the present disclosure, since the measurement is started when it is determined that a certain period has elapsed, the timing at which the measurement is started becomes more accurate. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement, and to further suppress a decrease in measurement accuracy.

Further, when the control unit stops the holder at a position different from the measurement position, either the clockwise or counterclockwise first rotation direction from the detected position to the designated position is selected. The holder may be rotated to a designated position along a route closer to the second direction opposite to the first rotation direction.
According to the present disclosure, when the holder is moved to the designated position, the holder is moved along the closer route, so that the holder can be moved to the designated position earlier.

In order to achieve the above object, an inspection program of the present disclosure detects a holder that holds an inspection chip, a rotation mechanism that rotates the holder around a main axis, and a position of the holder that is rotated by the rotation mechanism. A position detecting unit that emits measurement light, a light emitting unit that emits measurement light, a light receiving unit that receives transmitted light that has passed through an inspection chip held by the holder, and the measurement light emitted from the light emitting unit, and the rotation mechanism And a control unit that controls rotation, and the measurement light is transmitted from the position detected by the position detection unit through the inspection chip held by the holder within a predetermined period of time to a computer of the inspection apparatus. The measurement is started based on the rotation step of rotating the holder stopped at an arbitrary position to a possible measurement position and the transmitted light received by the light receiving unit after the predetermined period. Characterized in that to execute a constant step.
Further, the inspection method of the present disclosure includes a holder that holds an inspection chip, a rotation mechanism that rotates the holder around a main shaft, a position detection unit that detects a position of the holder rotated by the rotation mechanism, A light emitting unit that emits measurement light, a light receiving unit that receives transmitted light that has passed through the inspection chip held by the holder, and a control unit that controls rotation by the rotating mechanism. An inspection method for an inspection apparatus comprising: a measurement capable of transmitting the measurement light from the position detected by the position detection unit through the inspection chip held by the holder within a predetermined period of time. A rotation step for rotating the holder stopped at an arbitrary position up to a position, and a measurement step for starting measurement based on the transmitted light received by the light receiving unit after the predetermined period. It is characterized in.
According to the inspection program and the inspection method of the present disclosure, the holder stopped at an arbitrary position is moved within a predetermined period from the detected position to the measurement position, and measurement is started after the predetermined period. Even if there is a holder at an arbitrary position, the period until the measurement is started is constant. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement and to suppress a decrease in measurement accuracy.

1 is a perspective view showing a configuration of an inspection apparatus 1. FIG. FIG. 2 is a sectional view taken along the line II-II in FIG. 1 and a perspective view of a test chip 2. It is an expansion perspective view of the upper part of inspection system 3 in the state where upper case 11 was removed. 2 is a block diagram showing an electrical configuration of the inspection apparatus 1. FIG. It is a flowchart which shows the flow of the test | inspection process in embodiment. It is explanatory drawing explaining rotation control of the holder 61 of planar view. It is a flowchart which shows the flow of the test | inspection process in a modification.

<1. Schematic structure of inspection system 3>
An embodiment embodying the present disclosure will be described with reference to the drawings. The schematic structure of the inspection system 3 will be described with reference to FIGS. The inspection system 3 of the present embodiment includes the inspection chip 2 shown in FIG. 2 that can store a sample and a reagent that are liquids, and the inspection apparatus 1 that performs inspection using the inspection chip 2. As shown in FIGS. 2 and 3, the inspection chip 2 is supported by a holder 61 of the inspection apparatus 1. When the inspection apparatus 1 rotates the holder 61 and the inspection chip 2 around the vertical axis A <b> 1 separated from the holder 61 and the inspection chip 2, centrifugal force acts on the holder 61 and the inspection chip 2. When the inspection apparatus 1 rotates the holder 61 and the inspection chip 2 about the horizontal axis A2, the centrifugal direction, which is the direction of the centrifugal force acting on the holder 61 and the inspection chip 2, is switched with respect to the inspection chip 2.

<2. Structure of the inspection apparatus 1>
The structure of the inspection apparatus 1 will be described with reference to FIGS. In the following description, the upper, lower, right, left, front side, and back side of FIG. 2 are respectively the upper, lower, front, rear, left, and right sides of the inspection apparatus 1. And In the present embodiment, the direction of the vertical axis A1 is the vertical direction of the inspection apparatus 1, and the direction of the horizontal axis A2 is the direction of the speed when the holder 61 and the inspection chip 2 are rotated about the vertical axis A1. . 3 shows a state in which the upper housing 11 and the pair of side housings 13 shown in FIG. 1 of the inspection apparatus 1 are removed.

As shown in FIG. 1, the inspection apparatus 1 includes a housing 10. The housing 10 has a box-shaped frame structure. The housing 10 includes an upper housing 11, a lower housing 12, and a pair of side housings 13. A pair of side housing | casing 13 is a rectangular board | plate material long in an up-down direction. Each surface of the pair of side housings 13 faces in the left-right direction. The pair of side housings 13 are separated in the left-right direction. The lower housing 12 is a plate member spanned between the lower end of each of the pair of side housings 13, the lower side of the front end, and the lower side of the rear end. The upper housing 11 is a plate member spanned between the upper ends of the pair of side housings 13, the upper side of the front end, and the upper side of the rear end. A hole 11A is formed in the upper housing 11 between the front portion and the upper portion. The upper housing 11 rotatably supports one end of a lid member 11B that is a rectangular plate material. When the other end facing the one end of the lid member 11B approaches the upper housing 11 by rotation, the lid member 11B covers the hole 11A. An operation unit 94 including a power switch and a plurality of operation switches is provided on the right side of the upper portion of the upper housing 11.

As shown in FIGS. 2 and 3, the inspection apparatus 1 includes a case 80, an upper plate 32, a turntable 33, an angle changing mechanism 34, a holder 61, and a control device 90 shown in FIG. Provided inside the body 10. The upper plate 32 is a rectangular plate material spanned between the front upper end and the rear upper end of the lower housing 12. The turntable 33 is a disk provided rotatably on the upper plate 32. An inspection chip 2 to be described later is supported by a holder 61 disposed above the turntable 33.

As shown in FIG. 2, the inspection chip 2 is mainly composed of a transparent synthetic resin plate 20. One surface of the plate material 20 is sealed with a sheet 291, and the other surface of the plate material 20 is sealed with a sheet 292. The

sheets

291 and 292 are transparent synthetic resin thin plates. Between the plate member 20 and the sheet 291 and between the plate member 20 and the sheet 292, a liquid flow path (not shown) through which the liquid sealed in the inspection chip 2 can flow is formed. The

sheets

291 and 292 seal the flow path forming surface of the plate material 20. The reagent and specimen injected into the test chip 2 are quantified or mixed in the process of flowing through the liquid flow path, and a mixed liquid is generated. The liquid mixture is stored in a measurement unit 293 formed in a part of the liquid channel. The inspection chip 2 is held by the holder 61 with the thickness direction extending in the front-rear direction and the left-right direction.

The angle changing mechanism 34 is a drive mechanism provided on the turntable 33. The angle changing mechanism 34 rotates the inspection chip 2 by rotating the holder 61 around the horizontal axis A2. The case 80 is provided above the upper plate 32 and covers the turntable 33, the angle changing mechanism 34, and the holder 61. The light source 71 and the optical sensor 72 of the measuring unit 7 shown in FIG. 3 that perform optical measurement on the inspection chip 2 are provided on the upper side of the upper plate 32 and outside the case 80. The control device 90 is a controller that controls various processes of the inspection device 1. As shown in FIG. 3, the control device 90 is disposed below the upper plate 32. A rotating mechanism for rotating the turntable 33 around the vertical axis A1 is provided at the lower part of the upper plate 32 as follows.

As shown in FIG. 2, a spindle motor 35 that supplies driving force for rotating the turntable 33, and a spindle 57 that extends upward from the inside of the lower casing 12, closer to the lower part of the central portion in the casing 10. Is installed. The main shaft motor 35 is a DC motor. The shaft 36 of the main shaft motor 35 protrudes upward and is connected to the main shaft 57. The main shaft 57 passes through the upper plate 32 and protrudes above the upper plate 32. The upper end portion of the main shaft 57 is connected to the center portion of the turntable 33. When the main shaft motor 35 rotates the shaft 36, the driving force is transmitted to the main shaft 57. At this time, the turntable 33 rotates around the main shaft 57 in conjunction with the rotation of the main shaft 57. An encoder 96 is disposed below the spindle motor 35, and an origin sensor 97 is disposed above the spindle motor 35. In FIG. 2, the rotating disks of the encoder 96 and the origin sensor 97 are illustrated, but the light emitting unit and the light receiving unit are not illustrated.

The main shaft 57 is a hollow cylindrical body. The inner shaft 40 is a shaft that can move in the vertical direction inside the main shaft 57. As shown in FIG. 3, the inner shaft 40 extends through the main shaft 57 and above the turntable 33, and is connected to a pair of rack gears 43 described later.

As shown in FIG. 2, a stepping motor 51 for moving the inner shaft 40 up and down is fixed near the rear of the central portion of the housing 10. The shaft 58 of the stepping motor 51 protrudes rightward. A pinion gear (not shown) is fixed to the tip of the shaft 58. The pinion gear meshes with a rack gear (not shown). The main shaft 57 is provided with a slit 57A that extends in the vertical direction. A connecting portion (not shown) extending from the outside of the main shaft 57 to the inside through the slit 57A is provided. The inner end of the connecting portion is connected to the inner shaft 40. When the stepping motor 51 rotates the shaft 58, the connecting portion moves up and down along the slit 57A in conjunction with the rotation of the pinion gear fixed to the tip of the shaft 58. The inner shaft 40 moves up and down in conjunction with the connecting portion.

The detailed structure of the angle changing mechanism 34 will be described. The angle changing mechanism 34 includes a pair of rack gears 43. The pair of rack gears 43 are metal plate-like members. As shown in FIG. 3, the pair of rack gears 43 are fixed to the upper ends of mutually opposing surfaces of the inner shaft 40 having a prismatic shape. One rack gear 43 extends from the inner shaft 40 in one direction perpendicular to the vertical direction when viewed from above, and the other rack gear 43 extends to the opposite side to the one direction side. As shown in FIG. 2, a gear 431 is formed in the vertical direction at the end of the pair of rack gears 43 opposite to the inner shaft 40 side. The rack gear 43 moves up and down as the inner shaft 40 moves up and down.

As shown in FIG. 3, support portions 47 are provided on the counterclockwise direction side of each rack gear 43 as viewed from above. The support part 47 supports the holder 61 rotatably. More specifically, as shown in FIGS. 2 and 3, the support portion 47 includes two cylindrical portions 471, an extending portion 472, and a support shaft 473. The two cylindrical portions 471 are arranged side by side along the rack gear 43 and extend in the vertical direction. The extending portion 472 extends from the upper end of the cylindrical portion 471 in a direction away from the inner shaft 40 along the rack gear 43, and the distal end fixes the support shaft 473. The support shaft 473 extends in the clockwise direction when viewed from above from the position fixed to the extending portion 472, and the tip thereof is disposed inside the gear portion 76 formed in the holder 61. The gear portion 76 meshes with the gear 431 of the rack gear 43. As the rack gear 43 moves up and down, the gear portion 76 rotates around the support shaft 473, whereby the holder 61 rotates. Therefore, the inspection chip 2 held by the holder 61 rotates around the support shaft 473.

In the present embodiment, as the main shaft motor 35 rotationally drives the turntable 33, the holder 61 and the inspection chip 2 rotate around the main shaft 57, which is a vertical axis, and a centrifugal force is applied to the holder 61 and the inspection chip 2. Act. The rotation around the vertical axis A1 of the holder 61 and the inspection chip 2 is referred to as revolution. On the other hand, as the stepping motor 51 moves the inner shaft 40 up and down, the holder 61 and the inspection chip 2 rotate around the support shaft 473 that is a horizontal axis, and the centrifugal force acting on the holder 61 and the inspection chip 2. The centrifugal direction of the relative change. The rotation around the horizontal axis A2 of the holder 61 and the inspection chip 2 is referred to as rotation.

The detailed structure of the case 80 will be described. As shown in FIG. 3, the case 80 is a cylindrical member whose upper side is closed. The case 80 has a side surface portion 80A and an upper surface portion 80B. A hole 80C is formed from the front upper side of the side surface 80A to the front of the upper surface 80B. The case 80 is installed on the upper side of the upper plate 32. More specifically, the case 80 is provided outside the rotation range in which the holder 61 and the inspection chip 2 are rotated as seen from the main shaft 57 at the rotation center of the turntable 33. Case 80 covers the rotation range from above. Hereinafter, an area in the case 80 is referred to as a rotation area 81.

A hole 80D is formed on the diagonally right rear side of the side surface 80A of the case 80. A hole 80E is formed on the diagonally left rear side of the side surface 80A of the case 80. The measurement unit 7 that performs optical measurement on the inspection chip 2 includes a light source 71 as a light emitting unit that emits measurement light, and an optical sensor 72 as a light receiving unit that detects measurement light emitted from the light source 71. The light source 71 is disposed on the right side of the hole 80D and the height at which the measurement light from the light source 71 passes through the hole 80D and the hole 80E by a fixing member (not shown). The optical sensor 72 is disposed on the left side of the hole 80E and the height of receiving the measurement light that has passed through the hole 80D and the hole 80E by a fixing member (not shown).

In the present embodiment, the rear position of the spindle 57 in the reciprocable range of the inspection chip 2 is a measurement position where the inspection chip 2 is irradiated with measurement light. When the inspection chip 2 is at the measurement position, the measurement light 70 connecting the light source 71 and the optical sensor 72 intersects the

sheets

291 and 292 of the inspection chip 2 shown in FIG. A hole 61A is formed in the holder 61 at a position close to the measurement unit 293 in a state where the inspection chip 2 shown in FIG. The measurement light 70 emitted from the light source 71 passes through the measurement unit 293 of the inspection chip 2 at the measurement position, and further passes through the hole 61 </ b> A of the holder 61 and is detected by the optical sensor 72. As described above, optical measurement by the measurement unit 7 is performed.

In the present embodiment, within the reciprocable range of the inspection chip 2, the front side position of the main shaft 57 is located through the hole 11 </ b> A formed in the upper housing 11 and the hole 80 </ b> C of the case 80. This is the take-out position to be taken out from the holder 61. This take-out position is also a position where the inspection chip 2 is inserted into the holder 61 through the hole 11A and the hole 80C. The measurement position and the extraction position have a positional relationship reversed with respect to the main shaft 57.

<3. Electrical configuration of control device 90>
With reference to FIG. 4, the electrical configuration of the control device 90 as a control unit will be described. The control device 90 includes a CPU 91 that controls the main control of the inspection device 1, a RAM 92 that temporarily stores various data, a flash memory 93 that stores parameters, and a ROM 95 that stores control programs. An operation unit 94 is connected to the CPU 91. As the control device 90, a personal computer connected to the inspection device 1 from the outside may be used, or a dedicated control device connected to the inspection device 1 from the outside may be used. The CPU 91 has a timer function. In the following description, the timer function is referred to as a timer.

Furthermore, a DC motor that is the spindle motor 35, an encoder 96 as a position detection unit, an LED (Light Emitting Diode) as a light source 71, and a PD (Photo Detector) as an optical sensor 72 are connected to the CPU 91. The CPU 91 controls the revolution of the holder 61 and the inspection chip 2 by transmitting a control signal for rotating the spindle motor 35 to the spindle motor 35 via a motor driver (not shown). When the encoder 96 applies light to the rotating disk provided with a plurality of optical slits arranged in parallel on the circumference through the slit and detects the light, the CPU 91 measures the rotation angle and the rotation speed. . Based on this measurement value, a control signal is sent from the CPU 91 to the spindle motor 35, whereby the turntable 33 is rotated at a desired speed and stopped at a desired angle. The CPU 91 detects a signal from the origin sensor 97, associates each optical slit of the encoder 96 with the position of the holder 61 in the rotation region 81, and controls the revolution of the holder 61. As an example, the origin sensor 97 has a rotating disk having regions with different diameters. When this rotating disk is rotated, a period in which light from the light emitting part is shielded and a period in which light from the light emitting part is received are generated in the light receiving part. At the boundary between the light shielding period and the light receiving period, the position of the optical slit through which the light from the light emitting portion of the encoder 96 passes is set as the origin. Revolution control in the rotation area 81 of the holder 61 is executed with this origin as a reference. In the following description, the number of optical slits of the encoder 96, that is, the total number of pulses is described as 2812 pulses. The CPU 91 controls the rotation of the holder 61 and the inspection chip 2 by transmitting a control signal for rotating the stepping motor 51 to the stepping motor 51 via a motor driver (not shown).

The CPU 91 controls the light emission timing and light emission intensity of the light source 71 by transmitting a control signal. Further, the CPU 91 receives the signal intensity from the optical sensor 72.

<4. Flow of inspection process>

The flow of the inspection process of this embodiment will be described with reference to the flowchart shown in FIG. The flowchart illustrated in FIG. 5 illustrates processing executed by the CPU 91 when the user operates the power switch of the operation unit 94 and power is supplied to the inspection apparatus 1. In the present embodiment, the inspection apparatus 2 includes two holders 61. The two holders 61 are provided at positions inverted with respect to the main shaft. In the following description, the inspection chip 2 held by one holder 61 will be described. An inspection program for executing the flowchart shown in FIG. This inspection program may be stored in the ROM 95 at the time of shipment of the inspection apparatus 1, or after the inspection, the inspection apparatus 1 may be connected to the Internet, downloaded from a server (not shown), and stored in the ROM 95.

In S1, it is determined whether or not there is an instruction to move to the designated position. The movement instruction to the designated position is a control signal sent from the CPU 91 to the spindle motor 35 in the following three cases. The first is a case where the inspection chip 2A is inserted into the holder 61. In this case, a control signal is transmitted to the spindle motor 35 so that the holder 61 is positioned at a take-out position described later. The second case is a case where the holder 61 is positioned at a measurement position, which will be described later, after executing a predetermined centrifugal process for transmitting a control signal to the spindle motor 35 and the stepping motor 51 for the inspection chip 2. The predetermined centrifugation process is a process of mixing the reagent and the sample injected into the test chip 2 and storing the generated mixed solution in the measurement unit 293. The third is a case where the inspection chip 2A is taken out from the holder 61. In this case, a control signal is transmitted to the spindle motor 35 so that the holder 61 is positioned at a take-out position described later. If there is an instruction to move to the designated position, the process proceeds to S2. If it is determined that there is no instruction to move to the designated position, the process of S1 is executed again.

In S2, it is determined whether or not the spindle motor 35 is stopped. This determination is performed based on a signal from the encoder 96. If it is determined that the spindle motor 35 is stopped, the process proceeds to S4. If it is determined that the spindle motor 35 has not stopped, the process proceeds to S3.

In S3, stop control of the spindle motor 35 is executed. This stop control is to transmit a control signal for stopping the revolution of the holder 61 to the spindle motor 35. For example, the revolution of the holder 61 is decelerated by transmitting a reverse pulse to the spindle motor 35. The rotation speed of the holder 61 when mixing the reagent and the sample injected into the test chip 2 is approximately 4000 rpm. The revolution is stopped by decelerating 1000 rpm per second from this rotation speed. The holder 61 may be stopped suddenly by executing a control for applying a sudden brake by short-circuiting both terminals of the spindle motor 35 with a motor driver or a relay. Further, a holder (not shown) may be connected to the main shaft 57 to stop the holder 61 suddenly. When the stop control is finished, the process proceeds to S4.

In S4, the stop position is acquired. The stop position will be described with reference to the schematic diagram shown in FIG. The holder 61 is stopped at an arbitrary position in the rotation area 81. In general, in order to stop the rotating holder 61 at a specific position, it is necessary to gradually decrease the rotation speed and control the rotation speed, the rotation time, and the like based on a signal from the encoder 96. However, the rotational speed is gradually decreased. For example, in a situation where the rotational speed of the main shaft motor 35 is a low speed rotation such as 20 rpm, the main shaft motor 35 does not rotate smoothly. There is a possibility that the position and rotation speed of the holder 61 cannot be accurately detected. As a result, it may be difficult to accurately stop the rotating holder 61 at a specific position without stopping the rotation. In addition, it may take time to stop at a specific position with high accuracy. In particular, in the control of the spindle motor 35 of the spindle 57 extending in the vertical direction, the measurement light 70 is stopped at a position substantially perpendicular to the

sheets

291 and 292 of the inspection chip 2 held by the holder 61. Have difficulty. Further, in the spindle motor 35 that rotates the holder 61 at a high speed of 4000 rpm, it is difficult to accurately stop the holder 61 without stopping the rotation. In the present embodiment, the rotating holder 61 is temporarily stopped at an arbitrary position, and the position information of the position of the holder 61 stopped at the arbitrary position is received from the encoder 96. Then, based on the position information of the position of the holder 61 stopped at an arbitrary position, the holder 61 is moved to the desired position more accurately and earlier by executing the rotation control to move to the measurement position Pm or the extraction position P1. Can be moved. In the present embodiment, the rotation area 81 is divided into area 1, area 2, and area 3, and the process is executed. The measurement position Pm is a measurement position at which the measurement light is irradiated to the inspection chip 2 held by the holder 61 as shown in FIG. At this measurement position Pm, the measurement light 70 from the light source 71 intersects the

sheets

291 and 292 shown in FIG. The take-out position P1 is a position where the inspection chip 2 held by the holder 61 can be taken out and inserted from the hole 80C of the cover 80, and is a position reversed from the measurement position Pm with respect to the main shaft 57. Area 1 is an area from the measurement position Pm to the extraction position P1 counterclockwise. Area 2 is an area from the take-out position P1 to a later-described branch position P2 counterclockwise. Area 3 is an area from the branch position P2 to the measurement position Pm counterclockwise. Based on the signal from the encoder 96, data indicating the stop position of the holder 61 stopped at an arbitrary position is stored in the RAM 92. At this time, when the stop position is included in the area 1, the data indicating the stop position is stored in association with the data indicating the area 1. Similarly, when the stop position is included in area 2, data indicating the stop position is stored in association with data indicating area 2. When the stop position is included in the area 3, the data indicating the stop position is stored in association with the data indicating the area 3. When the acquisition of the stop position ends, the process proceeds to S5.

As shown in FIG. 5, in S5, it is determined whether or not to move to the measurement position. This determination is executed depending on whether or not the movement instruction to the designated position determined in S1 is a movement instruction to the measurement position. If it is determined that the instruction is to move to the measurement position, the process proceeds to S6. If it is not a movement instruction to the measurement position, that is, a movement instruction to the take-out position, the process proceeds to S21.

In S6, the timer is reset. That is, the time t indicated by the timer is zero. When the timer reset is completed, the process proceeds to S7.

In S7, the timer is started. When the start of the timer is completed, the process proceeds to S8.

In S8, it is determined whether or not the stop position acquired in S4 is area 3. If it is determined that the stop position is area 3, the process proceeds to S9. If it is determined that the stop position is not area 3, that is, the stop position is area 1 or area 2, the process proceeds to S11.

Here, the movement control of the holder 61 stopped at an arbitrary position to the measurement position Pm will be described. When the stop position acquired in S4 is area 1, as shown in FIG. 6, the movement distance is shorter when moving to the measurement position Pm in the clockwise direction (Clockwise). On the other hand, when the stop position acquired in S4 is area 2 or area 3, as shown in FIG. 6, the movement distance is shorter when moving counterclockwise to the measurement position Pm. In general, when the holder 61 is rotated clockwise and stopped at the measurement position Pm, and when the holder 61 is rotated counterclockwise and stopped at the measurement position Pm, a DC motor that is an example of the main motor 35 is used. The stopping accuracy varies depending on the cogging. Therefore, if the movement from the arbitrary stop position to the measurement position Pm is controlled clockwise and counterclockwise according to the stop position, the distribution of the displacement of the stop position with respect to the measurement position Pm for each measurement becomes large. As a result, the measurement accuracy varies from measurement to measurement. In this embodiment, the movement from an arbitrary stop position to the measurement position Pm is controlled in a clockwise direction regardless of the stop position. Therefore, in this embodiment, when the stop position is the area 3, after moving the holder 61 counterclockwise, the holder 61 is moved clockwise to stop at the measurement position Pm. That is, as shown in FIG. 6, it is moved counterclockwise from the stop position included in the area 3 to the turn-back position Pr, moved clockwise from the turn-back position Pr, and stopped at the measurement position Pm. This movement method is an example of the second route of the present invention. When the stop position is the area 2, the movement distance is shortened by moving it counterclockwise to the measurement position Pm. However, the holder 61 is moved clockwise from the stop position included in the area 2 to measure the measurement position Pm. To stop. When the stop position is area 1, the holder 61 is moved clockwise from the stop position included in area 1 and stopped at the measurement position Pm. When the stop position is Area 1 or Area 2, a moving method of moving from the stop position to the measurement position in a clockwise direction is an example of the first route of the present invention.

The turn-back position Pr will be described. The rotation control of the DC motor that is the spindle motor 35 shown in FIG. 4 is controlled by pulse control. In general, since the minute rotation operation of the DC motor requires time, it takes more time to change the position smaller than to change the position greatly. For example, it takes a long time to change the position by transmitting a PWM (Pulse Width Modulation) signal to the DC motor so as to move it by a distance of one pulse detected by the encoder 96. In the present embodiment, even if a positional deviation of ± 2 pulses from the measurement position Pm occurs, the process proceeds assuming that the measurement position Pm is stopped. As a result, when the position shift is generated by 3 pulses from the measurement position Pm, the control for moving to the measurement position Pm is executed again. As a result, the smallest number of pulses when changing the position is three pulses, and the time required for the position change is shortened. Accordingly, the turn-back position Pr is set at a position shifted by three pulses counterclockwise from the measurement position Pm. For example, when the number of pulses required for rotating the holder 61 around the rotation region 81 is 2812 pulses,
(3 pulses / 2812 pulses) * 360 ° = 0.384 ° (1)
From Expression (1), the position where the angle is changed counterclockwise by 0.384 ° from the measurement position Pm around the main shaft 57 is the turn-back position Pr. If the holder 61 is moved by transmitting a PWM signal to the spindle motor 35 so as to be moved by a distance corresponding to three pulses detected by the encoder 96, it takes about 100 ms.

The branch position P2 will be described. In the present embodiment, it is controlled whether the holder 61 is moved counterclockwise from the arbitrary stop position or the holder 61 is moved clockwise from the branch position P2. Since the return position Pr is a position deviated counterclockwise by 3 pulses from the measurement position Pm, the branch position P2 may be a position deviated counterclockwise by 3 pulses from the extraction position P1. Since the time required to change the rotation direction from the counterclockwise direction to the clockwise direction at the turn-back position Pr is required, the branch position P2 is set as follows. The time required for the branch position P2 to move clockwise from the branch position P2 and stop at the measurement position Pm is the time required to move counterclockwise from the branch position P2 to the turn-back position Pr, and counterclockwise. This is a position that is equal to the sum of the time required to change the direction of rotation from clockwise to clockwise and the time required to move clockwise from the turn-back position Pr to the measurement position Pm. For example, the branch position P2 is determined in advance by the maximum rotational speed Xrpm, the stop time at the turn-back position Pr, and the time required to move from the turn-back position Pr to the measurement position Pm in the clockwise direction. The maximum rotational speed Xrpm is the maximum rotational speed of the spindle motor 35 that can be stopped with good stopping accuracy, and is, for example, about 20 rpm. As the stop time at the turn-back position Pr, the time required to change the rotation direction from counterclockwise to clockwise is measured and stored in the FLASH 93 in advance. This stop period is, for example, 0.2 seconds. The time required to move clockwise from the turn-back position Pr to the measurement position Pm is measured in advance and stored in the FLASH 93. The time required for this movement is, for example, 0.1 seconds. The total number of pulses of the encoder 96 is 2812 pulses, the pulse position of the encoder 96 corresponding to the measurement position Pm is 0 pulse, the number of pulses increases clockwise from there, and the pulse position corresponding to the branch position P2 is α. In this case, the time required to move counterclockwise from the branch position P2 to the folding position Pr is expressed by the equation (2), and the time required to move counterclockwise from the branch position P2 to the folding position Pr It is represented by (3).
(1 / X) × ((2812-α) / 2812) (2)
(1 / X) (α / 2812) (3)
Maximum rotation speed, Formula (2), Formula (3), 0.2 seconds that is the stop time at the turn-back position Pr, and 0.1 time that is required to move clockwise from the turn-back position Pr to the measurement position Pm Equation (4) is derived from
(1 / X) × ((2812-α) / 2812) = (1 / X) (α / 2812) + 0.2 + 0.1 (4)
Α satisfying the equation (4) indicates the branch position P2.

That is, in S8, in the subsequent processing, it is determined whether or not the stop position acquired in S4 is the area 3 in order to determine whether to rotate counterclockwise or clockwise. Hereinafter, a flow of inspection processing for reducing variation in measurement accuracy for each measurement while shortening the movement time from an arbitrary stop position to the measurement position Pm will be described.

In S9, the target position is set to the folding position Pr. When the setting is completed, the process proceeds to S10.

In S10, the rotation direction is set counterclockwise. When the setting is completed, the process proceeds to S11. Counterclockwise is an example of the second rotational direction of the present invention.

In S11, the arrival time is set to the measurement mode. In the present embodiment, the measurement mode is a preset travel time from an arbitrary stop position to the turn-back position Pr. For example, when the rotation speed of the spindle motor is set to a preset speed, and the holder 61 is rotated at this rotation speed, the moving liquid is stored in the measurement unit 293 of the test chip 2. , Based on the highest speed among the speeds that do not flow out of the measurement unit 293 due to centrifugal force. When the arrival time is set to the measurement mode, the process proceeds to S12.

In S12, the movement to the target position is started. That is, since the folding position Pr is set as the target position in S9, the movement to the folding point is started. The movement to the turn-back position Pr rotates the spindle in the counterclockwise rotation direction set in S10 and the arrival time set in S11. When the movement to the folding position Pr is started, the process proceeds to S13.

In S13, it is determined whether or not the target position has been reached. That is, in S9, since the folding position Pr is set as the target position, it is determined whether or not the folding position Pr has been reached. This determination is performed based on a signal from the encoder 96. If it is determined that the return position Pr has been reached, the process proceeds to S14. If it is determined that it has not reached, the process proceeds to S13.

In S14, the target position is set to the measurement position Pm. When the setting is completed, the process proceeds to S15.

In S15, the rotation direction is set clockwise. When the setting is completed, the process proceeds to S16. The clockwise direction is an example of the first rotation direction of the present invention.

In S16, the arrival time is set to (3-t) seconds. Time t is the time indicated by the timer in S16. The time indicated by the timer in S16 is the elapsed time from the time when the timer was started in S7. That is, the subsequent movement time to the measurement position Pm is (3-t) seconds. That is, the time from moving from an arbitrary stop position to the measurement position Pm and starting measurement is 3 seconds. In S16, the rotational speed at which the holder 61 is moved in (3-t) seconds from the position detected by the encoder 96, that is, the position detected in S4, or from the return position Pr to the measurement position Pm is calculated. Therefore, in the present embodiment, the holder 61 stopped at an arbitrary position is moved to the measurement position Pm for a predetermined period. In the present embodiment, the time until the start of measurement is set to 3 seconds in advance, but an arbitrary time such as 5 seconds, 10 seconds, and 1 second may be set in advance.

In S17, the timer is stopped. When the timer is stopped, the process proceeds to S18.

In S18, the movement to the target position is started. That is, since the measurement position Pm is set as the target position in S14, the movement to the measurement position Pm is started. The movement to the measurement position Pm is executed by rotating the spindle 57 at the clockwise rotation direction set in S15 and the arrival time (3-t) set in S16, that is, the calculated rotation speed. . When the movement to the measurement position Pm is started, the process proceeds to S19.

In S19, it is determined whether or not the target position has been reached. That is, in S14, since the measurement position Pm is set as the target position, it is determined whether or not the measurement position Pm has been reached. This determination is performed based on a signal from the encoder 96. If it is determined that the measurement position Pm has been reached, the process proceeds to S20. If it is determined that it has not reached, the process is executed again in S19.

In S20, measurement is started. That is, the received light intensity obtained in the optical sensor 72 is adopted as measurement data. Therefore, in S16, the holder 61 stopped at an arbitrary position is moved to the measurement position Pm in a predetermined period, so that the measurement is started after the predetermined period. When the measurement data is collected, the process proceeds to S1.

On the other hand, if it is determined in S5 that the movement instruction is to the extraction position P1, the extraction position P1 is set as the target position in S21. When the setting is completed, the process proceeds to S22.

In S22, it is determined whether or not the stop position acquired in S4 is area 1. Compared to the case where the stop position is displaced from the measurement position Pm, the stop position may be displaced from the take-out position P1, and in the subsequent processing, the take-out is performed from the stop position acquired in S4. Control is executed so that the moving distance is shortened to the position P1. Therefore, it is determined whether the stop position acquired in S4 is area 1, area 2, or area 3. If it is determined that it is area 1, the process proceeds to S22. If it is determined that it is not area 1, that is, the stop position is area 2 or area 3, the process proceeds to S24.

In S23, the rotation direction is set counterclockwise. That is, since the stop position is area 1, it is possible to reach the take-out position P1 earlier when rotating counterclockwise than when rotating clockwise. When the setting is completed, the process proceeds to S25.

On the other hand, in S24, the rotation direction is set clockwise. That is, since the stop position is the area 2 or the area 3, it is possible to reach the take-out position P1 faster when rotating clockwise than when rotating counterclockwise. When the setting is completed, the process proceeds to S25.

In S25, the arrival time is set to the extraction mode. In the present embodiment, the take-out mode is a preset movement time from an arbitrary stop position to the measurement position P1. This moving time is based on, for example, the maximum speed of the spindle motor 35 that can be set. When the arrival time is set to the measurement mode, the process proceeds to S26.

In S26, the movement to the target position is started. That is, since the extraction position P1 is set as the target position in S21, the movement to the extraction position P1 is started. The movement to the take-out position P1 rotates the main shaft 57 in the counterclockwise rotation direction set in S23 or the clockwise rotation direction set in S24. Further, the main shaft 57 is rotated at the arrival time set in S25. When the movement to the take-out position P1 is started, the process proceeds to S27.

In S27, it is determined whether or not the target position has been reached. That is, in S21, since the extraction position P1 is set as the target position, it is determined whether or not the extraction position P1 has been reached. This determination is performed based on a signal from the encoder 96. If it is determined that the extraction position P1 has been reached, the process proceeds to S28. If it is determined that it has not reached, the process of S27 is re-executed.

In S28, a notification that it can be taken out is notified. The notification that can be taken out is an example of a message that the lid member 11B is opened and can be taken out when the display unit (not shown) is provided in the inspection apparatus 1. In addition, the same message displayed on the display unit of a personal computer connected to the inspection apparatus 1 from the outside may be used. When a notification of possible removal is notified, the process proceeds to S1.

In the above embodiment, when the holder 61 stopped at an arbitrary position is located in the area 3 in S8, the holder 61 is moved to the folding position P1 and moved from the folding position Pr to the measurement position Pm. However, the present invention is not limited to this. When the timer is started in S7, the process may move to S14. That is, the holder 61 may be moved clockwise from an arbitrary position to the measurement position Pm for a predetermined period.

In the above embodiment, the clockwise direction is described as the first rotation direction, and the counterclockwise direction is the second rotation direction. However, the clockwise direction may be the second rotation direction, and the counterclockwise direction may be the first rotation direction. Further, the turn-back position Pr is described as a position shifted by three pulses counterclockwise from the measurement position Pm. However, the turn-back position Pr may be a position shifted by several pulses clockwise from the measurement position Pm. Good.

<Modification>
In the above-described embodiment, in S4, the movement time from the acquired arbitrary stop position to the measurement position Pm is set in advance to a predetermined time, and the arbitrary stop position included in the area 1 or the return position Pr to the measurement position. , The rotational speed of the main shaft 57 is determined so as to move in (3-t) seconds, but is not limited thereto. For example, the time from the arbitrary stop position to the start of measurement may be constant, and after reaching the measurement position Pm, it may wait until a predetermined measurement start time. Hereinafter, the flow of the inspection process of the modification will be described with reference to the flowchart shown in FIG.

In the flowchart shown in FIG. 7, S1 to S15 and S21 to S28 are the same as the follow chart shown in FIG. In S15 shown in FIG. 7, when the rotation direction is set clockwise, the process proceeds to S16A.

In S16A, the arrival time is set to the measurement mode. In the modification, the measurement mode is a preset movement time from an arbitrary stop position to the measurement position Pm. For example, when the rotation speed of the spindle motor is set to a preset speed, and the holder 61 is rotated at this rotation speed, the moving liquid is stored in the measurement unit 293 of the test chip 2. , Based on the highest speed among the speeds that do not flow out of the measurement unit 293 due to centrifugal force. Further, the rotation speed is calculated so that the movement time is within a predetermined period. When the arrival time is set to the measurement mode, the process proceeds to S17A.

In S17A, the movement to the target position is started. That is, since the measurement position Pm is set as the target position in S14, the movement to the measurement position Pm is started. The movement to the measurement position Pm is executed by rotating the main shaft 57 at the clockwise rotation direction set in S15 and the preset rotation speed set in S16A. When the movement to the measurement position Pm is started, the process proceeds to S18A.

In S18A, it is determined whether or not the target position has been reached. That is, in S14, since the measurement position Pm is set as the target position, it is determined whether or not the measurement position Pm has been reached. This determination is performed based on a signal from the encoder 96. If it is determined that the measurement position Pm has been reached, the process proceeds to S19A. If it is determined that it has not reached, the process is executed again in S19.

In S19A, it is determined whether or not the time indicated by the timer is longer than 3 seconds. If it is determined that it is long, that is, if it is 3 seconds, the process proceeds to S20A. If it is determined to be short, the process of S19A is re-executed.

In S20A, the timer is stopped. When the timer is stopped, the process proceeds to S21A.

In S21A, measurement is started. That is, the received light intensity obtained in the optical sensor 72 is adopted as measurement data. Therefore, in S16A, the rotation speed is calculated so that the moving time is within a predetermined period, and in S19A, if it is determined that the time indicated by the timer is 3 seconds, the measurement is started in S20A. The Accordingly, since the measurement is started when it is determined that a certain period has elapsed, the timing at which the measurement is started becomes more accurate. Therefore, it is possible to suppress variations in the period until the start of measurement for each measurement, and to further suppress a decrease in measurement accuracy. When the measurement data is collected, the process proceeds to S1.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Inspection chip 3 Inspection system 7 Measuring part 20 Plate material 293 Measuring part 33 Turntable 34 Angle changing mechanism 35 Spindle motor 40 Inner shaft 57 Spindle 61 Holder 70 Measuring light 71 Light source 72 Optical sensor 81 Rotation area 90 Control part 91 CPU
96 Encoder A1 Vertical axis A2 Horizontal axis

Claims

A holder for holding an inspection chip;
A rotation mechanism for rotating the holder about a main shaft;
A position detector for detecting the position of the holder rotated by the rotation mechanism;
A light emitting unit for emitting measurement light;
A light receiving unit that receives the transmitted light that has passed through the inspection chip held by the holder, and the measurement light emitted by the light emitting unit;
A control unit for controlling rotation by the rotation mechanism;
With
The controller is
Within a predetermined period, a holder stopped at an arbitrary position is rotated from a position detected by the position detection unit to a measurement position where the measurement light can pass through the inspection chip held by the holder. ,
An inspection apparatus that starts measurement based on transmitted light received by the light receiving unit after the predetermined period.
2. The inspection according to claim 1, wherein the control unit is rotated in a first clockwise direction that is predetermined clockwise or counterclockwise to stop the holder at the measurement position. apparatus.
The inspection apparatus according to claim 2, wherein the control unit is rotated in the first rotation direction from the detected position to stop the holder at the measurement position.
The control unit calculates a rotation speed when rotating the holder in the first rotation direction from the detected position and stopping the holder at the measurement position in the certain period, and at the calculated rotation speed, The inspection apparatus according to claim 3, wherein the holder is rotated in the first rotation direction from the detected position.
The control unit rotates in the first rotation direction from the detected position to stop the holder at the measurement position, and from the detected position in a direction opposite to the first rotation direction. Or a second route that causes the measurement position to pass through, rotates from a predetermined folding position to the first rotation direction, and stops the holder at the measurement position. The inspection apparatus according to claim 2, wherein the inspection device is determined based on a position detected by a position detection unit, is rotated by the determined route, and the holder is stopped at the measurement position.
The controller is
When it is determined that the holder is to be rotated by the first route in the certain period, the rotation speed when rotating the holder from the detected position in the first rotation direction and stopping the holder at the measurement position is Calculating and rotating the holder in the first rotation direction from the detected position at the calculated rotation speed;
When it is determined that the holder is to be rotated in the second route, the holder is rotated in the second rotation direction from the detected position, the holder is stopped at the folding position, and the first rotation is performed from the folding position. The rotation speed when rotating the holder in the direction and stopping the holder at the measurement position is calculated based on the remaining time of the fixed period, and the holder is moved from the turn-up position to the first rotation direction at the calculated rotation speed. The inspection apparatus according to claim 5, wherein the inspection apparatus is rotated.
The controller determines whether or not the predetermined period has elapsed in a state where the holder is stopped at the measurement position;
The inspection apparatus according to claim 5, wherein when it is determined that the predetermined period has elapsed, measurement is started based on transmitted light received by the light receiving unit.
When the control unit stops the holder at a position different from the measurement position, either the clockwise direction or the counterclockwise direction from the detected position to the designated position and the first rotation direction 8. The inspection apparatus according to claim 1, wherein the holder is rotated to a specified position along a route closer to the second direction opposite to the first rotation direction.
A holder for holding an inspection chip, a rotation mechanism for rotating the holder around a main axis, a position detection unit for detecting the position of the holder rotated by the rotation mechanism, a light emitting unit for emitting measurement light, In a computer of an inspection apparatus, comprising: a light receiving unit that receives transmitted light that has passed through an inspection chip held by the holder, and a control unit that controls rotation by the rotation mechanism. ,
Within a predetermined period, a holder stopped at an arbitrary position is rotated from a position detected by the position detection unit to a measurement position where the measurement light can pass through the inspection chip held by the holder. A rotation step;
And a measurement step of starting measurement based on transmitted light received by the light receiving unit after the predetermined period.
A holder for holding an inspection chip, a rotation mechanism for rotating the holder around a main axis, a position detection unit for detecting the position of the holder rotated by the rotation mechanism, a light emitting unit for emitting measurement light, An inspection method for an inspection apparatus, comprising: a light receiving unit that receives transmitted light that has passed through an inspection chip held by the holder, and a control unit that controls rotation by the rotation mechanism. Because
Within a predetermined period, a holder stopped at an arbitrary position is rotated from a position detected by the position detection unit to a measurement position where the measurement light can pass through the inspection chip held by the holder. A rotation step;
And a measurement step of starting measurement based on the transmitted light received by the light receiving unit after the certain period of time.