WO2016045150A1 - 检测真空腔体密封性能的方法 - Google Patents

检测真空腔体密封性能的方法 Download PDF

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Publication number
WO2016045150A1
WO2016045150A1 PCT/CN2014/088310 CN2014088310W WO2016045150A1 WO 2016045150 A1 WO2016045150 A1 WO 2016045150A1 CN 2014088310 W CN2014088310 W CN 2014088310W WO 2016045150 A1 WO2016045150 A1 WO 2016045150A1
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vacuum chamber
detecting
sealing
sealing performance
reading
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English (en)
French (fr)
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王质武
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US14/411,393 priority Critical patent/US9395263B2/en
Publication of WO2016045150A1 publication Critical patent/WO2016045150A1/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
    • G01M3/2853—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipe joints or seals
    • G01M3/2869—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipe joints or seals for seals not incorporated in a pipe joint
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
    • G01M3/3272—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers for verifying the internal pressure of closed containers

Definitions

  • the present invention relates to a method for detecting the sealing performance of a vacuum chamber closure.
  • the vacuum chamber is generally sealed by an O-ring.
  • a sealing structure in the prior art is: sealing with a double sealing ring, an opening at a cavity wall between the double sealing rings, and connecting a pump to pump air in the space between the double sealing rings , to achieve vacuum between the double seals. Although this structure can improve the sealing reliability, there are certain problems, mainly in:
  • the technical problem to be solved by the present invention is to provide a method for detecting the sealing performance of a vacuum chamber, which can achieve accurate alignment during the bonding process of the array substrate and the color film substrate, and avoid being handled or flipped. The resulting substrate misalignment situation.
  • the invention provides a method for detecting the sealing performance of a vacuum chamber, wherein the closed portion of the vacuum chamber comprises a double sealing ring, a sealing cavity is formed between the double sealing rings, and a suction hole is arranged at a cavity wall of the sealing cavity
  • the method for detecting the sealing performance of the vacuum chamber includes: connecting an air suction valve to the air suction hole through a pipeline to form an air suction pipeline; installing a pressure gauge on the air suction pipeline; and opening the air suction valve, The sealed chamber is evacuated, and during the vacuuming, the pressure gauge is monitored; and the seal of the double seal is judged according to the reading of the pressure gauge.
  • the method for determining the tightness of the double seal according to the reading of the pressure gauge comprises: when the reading of the pressure gauge fails to reach a first predetermined value, the first predetermined value is that the sealed chamber is in a vacuum When the pressure value in the pipeline is in the state, it is judged that the double seal ring is leaking; otherwise, when the reading of the pressure gauge reaches the first predetermined value, it is judged that the double seal ring seal has no air leakage.
  • the cavity is opened, and the double seal ring and the vacuum cavity matched with the double seal ring are cleaned, and then the vacuum cavity is closed, and the opening is repeated.
  • the pumping valve performs a step of evacuating the sealed chamber.
  • the method for detecting the sealing performance of the vacuum chamber further comprises: installing a helium gas leak detector in the air suction line, wherein the helium gas leak detector can be implemented in During the vacuuming process, detecting whether there is helium gas in the sealed cavity; using an air gun on the periphery of the vacuum cavity, aligning the closed portion of the vacuum cavity, injecting helium gas; if the helium gas leak detector The helium gas is detected, and the seal ring located in the outer ring of the double seal ring is detected to be leaked; if the helium gas leak detector does not detect helium gas, the seal on the outer ring in the double seal ring is proved The ring does not leak, and the seal ring located in the inner ring of the double seal ring leaks.
  • the method for detecting the sealing performance of the vacuum chamber further includes: connecting an intake valve to the air inlet through a pipeline to form an intake pipeline; When the sealing chamber needs to be evacuated, the intake valve is closed, and the suction valve is opened; when the vacuum chamber needs to be opened, the suction valve is closed, and the intake valve is opened.
  • the outside air enters the sealed cavity through the intake pipe, so that the gas pressure in the sealed cavity rises to atmospheric pressure.
  • a barometer is installed in the intake line, and whether the reading by the barometer is close to a large Air pressure to determine whether the vacuum chamber can be opened.
  • a barometer is installed in the intake line to determine whether the barometer reading is reached, and the second preset value is a value of atmospheric pressure or near atmospheric pressure, when the barometer reading reaches the second When the preset value is reached, the vacuum chamber is opened.
  • an alarm device is added to the air intake pipeline, and when the reading of the air pressure gauge reaches a second preset value, the alarm device alarms to remind the staff to open the vacuum chamber.
  • the invention connects the suction pipeline at the air suction hole, and uses the air suction valve to pump air, and can judge whether the sealing cavity is in a vacuum state according to the reading of the pressure gauge, thereby judging the sealing performance of the double sealing ring, due to the sealing between the double sealing rings.
  • the space in the cavity is small in the entire vacuum chamber, and the vacuum can be quickly pumped down. According to the pressure gauge reading, the sealing performance of the double sealing ring can be quickly judged, and the frequent switching cavity is avoided, which saves time for production.
  • FIG. 1 is a schematic view of a method for detecting a sealing property of a vacuum chamber according to an embodiment of the present invention, in which a vacuum chamber is required to be opened.
  • FIG. 2 is a schematic view of a method for detecting the sealing performance of a vacuum chamber according to an embodiment of the present invention when vacuuming a sealed chamber.
  • the present invention provides a method for detecting the sealing performance of a vacuum chamber.
  • the closed portion of the vacuum chamber includes a double seal ring 10, and a seal chamber is formed between the double seal rings 10,
  • An air venting hole 20 is disposed at a cavity wall of the sealed cavity, and the method for detecting the sealing performance of the vacuum cavity includes:
  • the gas valve 40 is connected to the suction hole 20 through a pipeline to form a suction line;
  • a pressure gauge 60 is installed on the suction line; the extraction valve 40 is opened, and the sealed chamber is evacuated and evacuated.
  • the pressure gauge 60 is monitored; and the seal of the double seal 10 is judged based on the reading of the pressure gauge 60.
  • the invention connects the air suction pipe at the air suction hole 20, and uses the air suction valve 40 to pump air. According to the reading of the pressure gauge 60, it can be judged whether the sealing cavity is in a vacuum state, thereby judging the sealing performance of the double sealing ring 10, due to the double sealing ring.
  • the sealing cavity between 10 has a small space in the entire vacuum chamber, and the vacuum can be quickly pumped down. According to the pressure gauge reading, the sealing performance of the double sealing ring 10 can be quickly judged, and the frequent switching cavity is avoided. Save time for production.
  • the method of determining the tightness of the double seal 10 based on the reading of the pressure gauge 60 includes: when the reading of the pressure gauge 60 fails to reach a first predetermined value, the first predetermined value Determining that the double seal ring 10 is leaking when the pressure is in the pipeline when the sealed chamber is in a vacuum state; otherwise, when the reading of the pressure gauge 60 reaches a first predetermined value, determining the double seal ring 10 seals without leaks.
  • the first predetermined value is 0.1 Pa.
  • the pressure value in the sealed chamber must be greater than the first predetermined value. For example, during the vacuuming process, the value of the pressure gauge can only reach 0.5 Pa, which is greater than the first A predetermined value of 0.1 Pa proves that the double seal ring 10 is leaking.
  • the cause of the air leakage may be that there is debris on the surface of the double seal ring 10, and cleaning is required. At this time, it is necessary to open the cavity and clean the double seal ring. 10 and a vacuum chamber engaged with the double seal ring 10, and then closing the vacuum chamber, and repeating the step of opening the suction valve 40 to evacuate the sealed chamber.
  • the inside of the vacuum chamber is evacuated.
  • the specific method is as follows.
  • the method for detecting the sealing performance of the vacuum chamber further comprises: installing a helium leak detector 80 in the pumping line, and the helium leak detector 80 can realize Detecting the presence or absence of helium in the sealed chamber during the vacuuming process; arranging the helium gas at the periphery of the vacuum chamber with the air gun at the periphery of the vacuum chamber; if the helium gas leak detection When the meter 80 detects the helium gas, the helium gas leak detector 80 will issue an alarm when detecting the helium gas, and the position in the double seal ring 10 is detected.
  • the cavity wall of the sealing cavity is further provided with an air inlet hole 30, and the method for detecting the sealing performance of the vacuum cavity further comprises the following steps:
  • An intake valve 50 is connected to the intake port 30 through a line to form an intake line.
  • the intake valve 50 in FIG. 1 is in a closed state, and the intake valve 40 is in an open state.
  • the intake valve 50 is closed, and the exhaust valve 40 is opened again to perform the step of evacuating the sealed chamber.
  • the intake valve 50 in Fig. 1 is in an open state, and the exhaust valve 40 is in a closed state.
  • the suction valve 40 is closed, and the intake valve 50 is opened, and the outside air enters the sealed cavity through the intake pipe, so that the gas in the sealed cavity The pressure rises to atmospheric pressure.
  • the vacuum chamber is easily opened.
  • a barometer can be installed in the intake pipe to judge whether the vacuum chamber can be opened by whether the barometer reading is close to atmospheric pressure.
  • the second preset value is set, and the second preset value is a value of atmospheric pressure or near atmospheric pressure.
  • an alarm device may be added to the intake line.
  • the alarm device alarms to remind the worker to open the vacuum chamber. You can use the buzzer to make an audible alarm, or you can use the LED light to remind you by lighting. For example, when the air pressure in the intake line does not reach the second preset value, the red LED lights up, when in the intake line. When the air pressure reaches the second preset value, the green LED lights up.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

一种检测真空腔体密封性能的方法，所述真空腔体之闭合处包括双密封圈（10），所述双密封圈（10）之间形成密封腔，所述密封腔的腔壁处设抽气孔（20），其中检测真空腔体密封性能的方法包括：将抽气阀（40）通过管路连接至所述抽气孔（20），形成抽气管路；在所述抽气管路上安装压力计（60）；开启所述抽气阀（40），对所述密封腔进行抽真空，在抽真空的过程中，监控所述压力计（60）；根据所述压力计（60）的读数判断所述双密封圈的密封性。

Description

检测真空腔体密封性能的方法
本发明要求2014年9月28日递交的发明名称为“检测真空腔体密封性能的方法”的申请号201410510010.X的在先申请优先权，上述在先申请的内容以引入的方式并入本文本中。
技术领域
本发明涉及针对真空腔体闭合处，检测其密封性能的方法。
背景技术
真空腔体闭合处一般采取密封圈(O-ring)进行密封。现有技术中的一种密封结构为：采用双密封圈进行密封，双密封圈之间的腔壁处有开孔，连接抽气泵(Pump)，可对双密封圈之间的空间进行抽气，实现双密封圈之间的抽真空。这种结构虽然能实现密封可靠性的提高，但也存在一定的问题，主要表现在：
1、真空受体的开腔体困难，在开腔体时，由于双密封圈之间处于真空状态，需要克服大气压强的存在分离腔体，特别是针对大的腔体则更困难；
2、较难保证两根密封圈同时密封好，当两根密封圈之中只有一根密封圈出现密封问题而产生漏气，不会对腔体的密封性产生影响，但此时却失去了双密封圈密封的意义，降低了密封可靠性。
因此，如何设计一种真空腔体闭合处的检测密封性能的方法，能够实现快速开腔，容易开腔，而且，能够快速判断真空腔体密封处的密封圈密封性，一直为业界研究的课题。
发明内容
本发明所要解决的技术问题在于提供一种检测真空腔体密封性能的方法，可以使阵列基板与彩膜基板的贴合过程中实现精确对位，避免由于搬运或翻转 而引起的基板对位不良的情形。
为了实现上述目的，本发明实施方式提供如下技术方案：
本发明供了一种检测真空腔体密封性能的方法，所述真空腔体之闭合处包括双密封圈，所述双密封圈之间形成密封腔，所述密封腔的腔壁处设抽气孔，所述检测真空腔体密封性能的方法包括：将抽气阀通过管路连接至所述抽气孔，形成抽气管路；在所述抽气管路上安装压力计；开启所述抽气阀，对所述密封腔进行抽真空，在抽真空的过程中，监控所述压力计；根据所述压力计的读数判断所述双密封圈的密封性。
其中，根据所述压力计的读数判断所述双密封圈的密封性的方法包括：当所述压力计的读数无法达到第一预定值时，所述第一预定值为所述密封腔处于真空状态下时管路中的压力值，判断所述双密封圈漏气；反之，当所述压力计的读数达到第一预定值时，判断所述双密封圈密封无漏气情况。
其中，当判断所述双密封圈漏气时，打开腔体，并清洁所述双密封圈及与所述双密封圈所配合的真空腔体，再闭合所述真空腔体，重复所述开启所述抽气阀对所述密封腔进行抽真空的步骤。
其中，当判断所述双密封圈不漏气时，对所述真空腔体内部进行抽真空。
其中，当判断所述双密封圈漏气时，所述检测真空腔体密封性能的方法还包括：在所述抽气管路中安装氦气检漏仪，所述氦气检漏仪能够实现在抽真空的过程中检测所述密封腔内是否存在氦气；利用气枪在所述真空腔体的外围，对准所述真空腔体的闭合处，喷射氦气；若所述氦气检漏仪检测到氦气，检测出所述双密封圈中的位于外圈的密封圈漏气；若所述氦气检漏仪没有检测到氦气，证明所述双密封圈中的位于外圈的密封圈不漏气，所述双密封圈中的位于内圈的密封圈漏气。
其中，所述密封腔的腔壁处还设有进气孔，所述检测真空腔体密封性能的方法还包括：将进气阀通过管路连接至所述进气孔，形成进气管路；当需要对所述密封腔进行抽真空时，所述进气阀关闭，再开启所述抽气阀；当需要打开所述真空腔体时，所述抽气阀关闭，开启所述进气阀，通过所述进气管路使得外界大气进入所述密封腔内，使得所述密封腔内的气体压力升至大气压。
其中，在所述进气管路中安装气压计，通过所述气压计的读数是否接近大 气压，来判断是否可以打开所述真空腔体。
其中，在所述进气管路中安装气压计，判断所述气压计的读数是否达到，所述第二预设值为大气压或接近大气压的值，当所述气压计的读数达到所述第二预设值时，打开所述真空腔体。
其中，在所述进气管路上增设报警装置，当所述气压计的读数达到第二预设值时，所述报警装置报警提醒工作人员打开所述真空腔体。
本发明通过在抽气孔处连接抽气管路，利用抽气阀抽气，根据压力计的读数能够判断密封腔是否为真空状态，进而判断双密封圈的密封性能，由于双密封圈之间的密封腔在整个真空腔体中所点的空间很小，其中的真空能够快速抽下去，根据压力表读数，能够快速判断双密封圈的密封性能，避免频繁的开关腔体，为生产节省了时间。
附图说明
为了更清楚地说明本发明的技术方案，下面将对实施方式中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以如这些附图获得其他的附图。
图1是本发明一种实施方式提供的检测真空腔体密封性能的方法之需要打开真空腔体时的示意图。
图2是本发明一种实施方式提供的检测真空腔体密封性能的方法之需要对密封腔进行抽真空时的示意图。
具体实施方式
下面将结合本发明实施方式中的附图，对本发明实施方式中的技术方案进行清楚、完整地描述。
本发明供了一种检测真空腔体密封性能的方法，请参阅图1和图2，所述真空腔体之闭合处包括双密封圈10，所述双密封圈10之间形成密封腔，所述密封腔的腔壁处设抽气孔20，所述检测真空腔体密封性能的方法包括：将抽 气阀40通过管路连接至所述抽气孔20，形成抽气管路；在所述抽气管路上安装压力计60；开启所述抽气阀40，对所述密封腔进行抽真空，在抽真空的过程中，监控所述压力计60；根据所述压力计60的读数判断所述双密封圈10的密封性。
本发明通过在抽气孔20处连接抽气管路，利用抽气阀40抽气，根据压力计60的读数能够判断密封腔是否为真空状态，进而判断双密封圈10的密封性能，由于双密封圈10之间的密封腔在整个真空腔体中所点的空间很小，其中的真空能够快速抽下去，根据压力表读数，能够快速判断双密封圈10的密封性能，避免频繁的开关腔体，为生产节省了时间。
一种实施方式中，根据所述压力计60的读数判断所述双密封圈10的密封性的方法包括：当所述压力计60的读数无法达到第一预定值时，所述第一预定值为所述密封腔处于真空状态下时管路中的压力值，判断所述双密封圈10漏气；反之，当所述压力计60的读数达到第一预定值时，判断所述双密封圈10密封无漏气情况。本实施方式中，第一预定值为0.1Pa。当所述双密封圈10产生漏气时，密封腔内的压力值一定会大于第一预定值，举例而言，在抽真空的过程中，压力表的值最低只能达到0.5Pa，大于第一预定值0.1Pa，证明所述双密封圈10产生漏气。
进一步而言，当判断所述双密封圈10漏气时，漏气的原因可能是双密封圈10的表面有杂物，需要清洁，此时，需要打开腔体，并清洁所述双密封圈10及与所述双密封圈10所配合的真空腔体，再闭合所述真空腔体，重复所述开启所述抽气阀40对所述密封腔进行抽真空的步骤。
当判断所述双密封圈10不漏气时，对所述真空腔体内部进行抽真空。
本发明一种实施方式中，可以利用氦气漏检的方法检测具体的双密封圈中的哪一条的密封性能不好。具体如下方法如下。
当判断所述双密封圈10漏气时，所述检测真空腔体密封性能的方法还包括：在所述抽气管路中安装氦气检漏仪80，所述氦气检漏仪80能够实现在抽真空的过程中检测所述密封腔内是否存在氦气；利用气枪在所述真空腔体的外围，对准所述真空腔体的闭合处，喷射氦气；若所述氦气检漏仪80检测到氦气，氦气检漏仪80检测到氦气时会发出报警，检测出所述双密封圈10中的位 于外圈的密封圈漏气；若所述氦气检漏仪80没有检测到氦气，证明所述双密封圈10中的位于外圈的密封圈不漏气，所述双密封圈10中的位于内圈的密封圈漏气。
本实施方式中，所述密封腔的腔壁处还设有进气孔30，所述检测真空腔体密封性能的方法还包括如下步骤：
将进气阀50通过管路连接至所述进气孔30，形成进气管路。
如图2所示，图1中的进气阀50为关闭状态，抽气阀40为开启状态。当需要对所述密封腔进行抽真空时，所述进气阀50关闭，再开启所述抽气阀40，实施上述对密封腔进行抽真空的步骤。
如图1所示，图1中的进气阀50为开启状态，抽气阀40为关闭状态。当需要打开所述真空腔体时，所述抽气阀40关闭，开启所述进气阀50，通过所述进气管路使得外界大气进入所述密封腔内，使得所述密封腔内的气体压力升至大气压。当密封腔内气体压力为大气压时，真空腔体就很容易打开了。
为了便于判断别密封腔内气体压力是否为大气压，可以在进气管路中安装气压计，通过气压计的读数是否接近大气压，来判断是否可以打开真空腔体。具体而言，设定第二预设值，第二预设值为大气压或接近大气压的值，开启进气阀50时，外界气体慢慢进入密封腔，气压计的读数逐渐变大，当气压计的读数达到第二预设值时，就可以打开真空腔体了。
本发明一种实施方式中，还可以在进气管路上增设报警装置，当气压计的读数达到第二预设值时，报警装置报警提醒工作人员打开所述真空腔体。可以利用蜂鸣器进行声响式的报警，也可以利用LED灯，通过亮灯的方式提醒，例如，进气管路中的气压未达到第二预设值时，红色LED灯亮，当进气管路中的气压达到第二预设值时，绿色LED灯亮。
以上所述是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。

Claims (9)

  1. 一种检测真空腔体密封性能的方法，所述真空腔体之闭合处包括双密封圈，所述双密封圈之间形成密封腔，所述密封腔的腔壁处设抽气孔，其特征在于，所述检测真空腔体密封性能的方法包括：
    将抽气阀通过管路连接至所述抽气孔，形成抽气管路；
    在所述抽气管路上安装压力计；
    开启所述抽气阀，对所述密封腔进行抽真空，在抽真空的过程中，监控所述压力计；
    根据所述压力计的读数判断所述双密封圈的密封性。
  2. 如权利要求1所述的检测真空腔体密封性能的方法，其特征在于，根据所述压力计的读数判断所述双密封圈的密封性的方法包括：当所述压力计的读数无法达到第一预定值时，所述第一预定值为所述密封腔处于真空状态下时管路中的压力值，判断所述双密封圈漏气；反之，当所述压力计的读数达到第一预定值时，判断所述双密封圈密封无漏气情况。
  3. 如权利要求2所述的检测真空腔体密封性能的方法，其特征在于，当判断所述双密封圈漏气时，打开腔体，并清洁所述双密封圈及与所述双密封圈所配合的真空腔体，再闭合所述真空腔体，重复所述开启所述抽气阀对所述密封腔进行抽真空的步骤。
  4. 如权利要求2所述的检测真空腔体密封性能的方法，其特征在于，当判断所述双密封圈不漏气时，对所述真空腔体内部进行抽真空。
  5. 如权利要求2所述的检测真空腔体密封性能的方法，其特征在于，当判断所述双密封圈漏气时，所述检测真空腔体密封性能的方法还包括：
    在所述抽气管路中安装氦气检漏仪，所述氦气检漏仪能够实现在抽真空的过程中检测所述密封腔内是否存在氦气；
    利用气枪在所述真空腔体的外围，对准所述真空腔体的闭合处，喷射氦气；
    若所述氦气检漏仪检测到氦气，检测出所述双密封圈中的位于外圈的密封圈漏气；
    若所述氦气检漏仪没有检测到氦气，证明所述双密封圈中的位于外圈的密 封圈不漏气，所述双密封圈中的位于内圈的密封圈漏气。
  6. 如权利要求1所述的检测真空腔体密封性能的方法，其特征在于，所述密封腔的腔壁处还设有进气孔，所述检测真空腔体密封性能的方法还包括：
    将进气阀通过管路连接至所述进气孔，形成进气管路；
    当需要对所述密封腔进行抽真空时，所述进气阀关闭，再开启所述抽气阀；
    当需要打开所述真空腔体时，所述抽气阀关闭，开启所述进气阀，通过所述进气管路使得外界大气进入所述密封腔内，使得所述密封腔内的气体压力升至大气压。
  7. 如权利要求6所述的检测真空腔体密封性能的方法，其特征在于，在所述进气管路中安装气压计，通过所述气压计的读数是否接近大气压，来判断是否可以打开所述真空腔体。
  8. 如权利要求6所述的检测真空腔体密封性能的方法，其特征在于，在所述进气管路中安装气压计，判断所述气压计的读数是否达到，所述第二预设值为大气压或接近大气压的值，当所述气压计的读数达到所述第二预设值时，打开所述真空腔体。
  9. 如权利要求8所述的检测真空腔体密封性能的方法，其特征在于，在所述进气管路上增设报警装置，当所述气压计的读数达到第二预设值时，所述报警装置报警提醒工作人员打开所述真空腔体。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796571A (zh) * 2017-10-27 2018-03-13 辽沈工业集团有限公司 一种产品异型表面气密性检测便携式装备
CN116735115A (zh) * 2023-05-17 2023-09-12 中广核工程有限公司 核电站放射性废物容器检测密封方法

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104280200A (zh) * 2014-09-28 2015-01-14 深圳市华星光电技术有限公司 检测真空腔体密封性能的方法
US10067027B2 (en) * 2016-03-04 2018-09-04 Robert Bosch Gmbh Test methodology to reduce false rejections and increase number of containers tested for tightness
CN105841902A (zh) * 2016-03-22 2016-08-10 天津深之蓝海洋设备科技有限公司 一种用于水下机器人的密封性检测方法及系统
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US10266184B2 (en) * 2017-01-24 2019-04-23 The Boeing Company Support systems and methods for a transportation system
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CN110735185A (zh) * 2019-10-30 2020-01-31 中科钢研节能科技有限公司 长晶炉
US11624672B2 (en) * 2020-06-23 2023-04-11 Ateq Apparatus and method for automatic leak detection
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US11635338B2 (en) * 2020-10-23 2023-04-25 Applied Materials, Inc. Rapid chamber vacuum leak check hardware and maintenance routine
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CN117551986A (zh) * 2023-12-20 2024-02-13 嘉兴科民电子设备技术有限公司 Ald装置反应腔室的密封结构及ald装置
CN121632482A (zh) * 2024-08-29 2026-03-10 盛美半导体设备(上海)股份有限公司 密封性检测装置及其使用方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080014240A (ko) * 2006-08-10 2008-02-14 이민철 용기의 핀홀 검출 장치 및 방법
CN103822765A (zh) * 2014-03-04 2014-05-28 上海诺地乐通用设备制造有限公司 一种大型通风设备空气泄漏率检测装置
CN103822761A (zh) * 2014-01-03 2014-05-28 中国空间技术研究院 密封性检测装置及方法
CN103872264A (zh) * 2012-12-11 2014-06-18 上海大学 制作有机电致发光器件的可控制充气压力封装系统
CN203683659U (zh) * 2013-12-31 2014-07-02 中晟光电设备（上海）有限公司 用于多反应腔化学气相沉积设备的多腔双密封圈系统
CN104034495A (zh) * 2013-03-06 2014-09-10 楚天科技股份有限公司 一种容器的真空检漏方法及真空检漏系统
CN104280200A (zh) * 2014-09-28 2015-01-14 深圳市华星光电技术有限公司 检测真空腔体密封性能的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2766570B1 (fr) * 1997-07-24 1999-09-24 Transnucleaire Dispositif et procede de controle permanent de l'etancheite de couvercles simples ou multiples d'obturation de conteneurs pour matieres radioactives
JP5782398B2 (ja) * 2012-03-27 2015-09-24 株式会社荏原製作所 めっき方法及びめっき装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080014240A (ko) * 2006-08-10 2008-02-14 이민철 용기의 핀홀 검출 장치 및 방법
CN103872264A (zh) * 2012-12-11 2014-06-18 上海大学 制作有机电致发光器件的可控制充气压力封装系统
CN104034495A (zh) * 2013-03-06 2014-09-10 楚天科技股份有限公司 一种容器的真空检漏方法及真空检漏系统
CN203683659U (zh) * 2013-12-31 2014-07-02 中晟光电设备（上海）有限公司 用于多反应腔化学气相沉积设备的多腔双密封圈系统
CN103822761A (zh) * 2014-01-03 2014-05-28 中国空间技术研究院 密封性检测装置及方法
CN103822765A (zh) * 2014-03-04 2014-05-28 上海诺地乐通用设备制造有限公司 一种大型通风设备空气泄漏率检测装置
CN104280200A (zh) * 2014-09-28 2015-01-14 深圳市华星光电技术有限公司 检测真空腔体密封性能的方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796571A (zh) * 2017-10-27 2018-03-13 辽沈工业集团有限公司 一种产品异型表面气密性检测便携式装备
CN107796571B (zh) * 2017-10-27 2024-04-12 辽沈工业集团有限公司 一种产品异型表面气密性检测便携式装备
CN116735115A (zh) * 2023-05-17 2023-09-12 中广核工程有限公司 核电站放射性废物容器检测密封方法

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