WO2016033887A1 - 触控面板及其制作方法 - Google Patents

触控面板及其制作方法 Download PDF

Info

Publication number
WO2016033887A1
WO2016033887A1 PCT/CN2014/092904 CN2014092904W WO2016033887A1 WO 2016033887 A1 WO2016033887 A1 WO 2016033887A1 CN 2014092904 W CN2014092904 W CN 2014092904W WO 2016033887 A1 WO2016033887 A1 WO 2016033887A1
Authority
WO
WIPO (PCT)
Prior art keywords
pattern
touch
electrode
base substrate
floating
Prior art date
Application number
PCT/CN2014/092904
Other languages
English (en)
French (fr)
Inventor
张方振
吕志军
高涛
刘震
Original Assignee
京东方科技集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/768,360 priority Critical patent/US9965065B2/en
Priority to EP14881401.5A priority patent/EP3190484A4/en
Publication of WO2016033887A1 publication Critical patent/WO2016033887A1/zh

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0448Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • Embodiments of the present invention relate to a touch panel and a method of fabricating the same.
  • touch screen panels have gradually spread throughout people's lives.
  • manufacturers use a single layer of conductive layer design to produce touch panels, that is, deposit a single layer of metal on the substrate.
  • the patterning process forms a touch electrode.
  • the reflective effect of the metal causes the user to see the pattern of the metal touch electrode on the touch panel, thus affecting the touch panel.
  • the visual effect requires an anti-reflection layer, which increases the complexity of the production process and the production cost of the touch panel, and the anti-reflection layer has a limited effect, which cannot effectively improve the visual effect of the touch panel.
  • a touch panel includes: a substrate, a raised structure over the substrate, and the raised structure and the substrate a touch electrode and a floating electrode insulated from each other; wherein a cross-sectional width of the protruding structure gradually increases along a direction in which the substrate substrate is directed away from the substrate; the raised structure causes the touch electrode and the The floating electrode is broken at the edge of the raised structure.
  • the pattern of the touch electrodes is consistent with the pattern of the raised structures, and the pattern of the floating electrodes is complementary to the pattern of the raised structures.
  • the pattern of the touch electrodes is complementary to the pattern of the raised structures, and the pattern of the floating electrodes coincides with the pattern of the raised structures.
  • the thickness of the raised structure is greater than the thickness of the touch electrode and the floating electrode.
  • the touch electrode includes a touch sensing electrode and a touch driving electrode that form a finger structure.
  • the material of the raised structure is an insulating material.
  • the material of the raised structure is a negative photoresist material.
  • a method for fabricating a touch panel including:
  • a pattern of the touch electrodes and the floating electrodes which are insulated from each other is formed by using the pattern of the convex structure as a mask.
  • the material used to form the pattern of the raised structure on the substrate is an insulating material.
  • a pattern of the touch electrodes and the floating electrodes that are insulated from each other is formed on the base substrate on which the pattern of the raised structure is formed, and the pattern of the raised structure is used as a mask.
  • the pattern of the touch electrodes is formed to conform to the pattern of the raised structures, and the pattern of the floating electrodes is formed to be complementary to the pattern of the raised structures.
  • the forming a pattern of the raised structure on a substrate includes:
  • the light-shielding region in the film plate corresponds to a pattern region where the floating electrode needs to be formed.
  • the pattern of the floating electrode is formed to conform to the pattern of the raised structure, and the pattern of the touch electrode is formed to be complementary to the pattern of the raised structure.
  • the forming a pattern of the raised structure on a substrate includes:
  • the light transmissive area in the board corresponds to a pattern area where the floating electrode needs to be formed.
  • FIG. 1 is a schematic cross-sectional view of a touch panel according to an embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view of another touch panel according to an embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a planar structure of a touch electrode according to an embodiment of the present invention.
  • FIG. 4 is a schematic plan view showing another touch electrode according to an embodiment of the present invention.
  • FIG. 5 is a flowchart of a method for manufacturing a touch panel according to an embodiment of the present invention.
  • the embodiment of the present invention provides a touch panel, as shown in FIG. 1 and FIG. 2, comprising: a substrate 1 , a raised structure 2 on the substrate 1 , and a raised structure 2 and a substrate A touch electrode 3 and a dummy electrode 4 which are insulated from each other on the substrate 1 and are insulated from each other.
  • the cross-sectional width of the raised structure 2 gradually increases along the direction in which the base substrate 1 is directed away from the base substrate 1, forming a pattern resembling an inverted trapezoid, and the raised structure 2 causes the touch electrode 3 and the floating electrode 4 to be in the raised structure 2
  • the edge is broken at the edge to ensure that the touch electrode 3 and the floating electrode 4 are insulated from each other.
  • the pattern of the touch electrode 3 and the pattern of the floating electrode 4 are disconnected by the gap of the bump structure 2, and the touch electrode 3 and the floating electrode 4 are viewed from a top view.
  • the pattern covers the entire base substrate 1 so that the entire touch panel surface has the same optical characteristics, thereby weakening or eliminating the influence of the pattern of the touch electrode 3 in the touch panel on the visual effect, and improving the overall touch panel.
  • the anti-reflection layer can be omitted and the visual effect can be achieved, so that the manufacturing cost can be saved.
  • the arrangement of the touch electrode 3 and the floating electrode 4 on the substrate 1 can be There are two ways. For example, as shown in FIG. 1, the pattern of the touch electrode 3 is set to be consistent with the pattern of the raised structure 2, and the pattern of the floating electrode 4 is set to be complementary to the pattern of the raised structure 2; or, as shown in FIG. The pattern of the touch electrode 3 is set to be complementary to the pattern of the raised structure 2, and the pattern of the floating electrode 4 is set to coincide with the pattern of the raised structure 2.
  • the touch electrodes 3 and the floating electrodes 4 arranged in the above two arrangement manners cover the entire base substrate 1 so that the entire touch panel has the same optical characteristics, thereby weakening or eliminating the touch electrodes in the touch panel.
  • the effect of the pattern of 3 on the visual effect improves the overall viewing effect of the touch panel.
  • the thickness of the convex structure 2 is greater than the thickness of the touch electrode 3 and the floating electrode 4, so that the pattern of the convex structure 2 is In the reticle, when the conductive material is deposited on the base substrate 1 on which the convex structure 2 is formed, the conductive material is naturally broken at the gap of the convex structure 2, and the pattern of the touch electrode 3 and the floating electrode 4 is formed. .
  • the touch electrode 3 includes a touch sensing electrode 301 and a touch driving electrode 302.
  • the touch sensing electrode 301 is generally connected to the touch signal output line 303, and the touch driving electrode 302 is generally driven.
  • the line 304 is connected to each other, and the touch sensing electrode 301 and the touch driving electrode 302 are respectively disposed in a plane, so that the touch sensing electrode 301 and the touch driving electrode 302 can be arranged in a finger-finger structure.
  • the specific structure may be implemented in various manners. For example, as shown in FIG. 3, the touch sensing electrode 301 may be disposed in a U-shaped pattern, and the touch driving electrode 302 may be disposed as a rectangular pattern inserted into the U-shaped opening position.
  • the touch sensing electrodes 301 are arranged in a triangular pattern, and the touch driving electrodes 302 can be disposed as the touch sensing electrodes.
  • the opposite triangular pattern of the hypotenuse of the pattern may be similar to the interdigitated structure, and the remaining blank portions are the floating electrodes 4.
  • the graphics of the touch sensing electrodes 301 and the touch driving electrodes 302 may also be other graphics that meet the requirements of the process, which is not limited herein.
  • the material of the raised structure 2 may be an insulating material such as silicon nitride or silicon dioxide.
  • the material of the convex structure 2 is preferably a negative photoresist material, and the negative photoresist material is used to fabricate the convex structure 2, which can realize the function of insulation, and can easily realize the chamfer patterning process, and is favorable for making the inverted trapezoidal cross section. Raised structure 2 graphics.
  • the embodiment of the invention further provides a method for manufacturing a touch panel, as shown in FIG. 5, comprising the following steps:
  • S102 forming a pattern of mutually insulated touch electrodes and floating electrodes on the base substrate on which the pattern of the convex structure is formed, using the pattern of the convex structure as a mask.
  • the pattern of the formed protrusion is a cross section from the substrate.
  • a pattern similar to an inverted trapezoid is gradually enlarged toward the outer surface, so that the pattern of the touch electrode and the floating electrode which is formed by using the pattern of the convex structure as a mask is broken at the gap of the convex structure.
  • the two sides of the touch panel have the same optical characteristics, so that the touch panel can be weakened or eliminated due to the touch.
  • the influence of the electrode pattern on the visual effect improves the overall viewing effect of the touch panel, and the anti-reflection layer can be omitted to achieve a better visual effect than the prior art touch panel. Can save production costs.
  • the material used to form the raised structure pattern may generally be an insulating material such as silicon nitride or silicon dioxide.
  • the convex structure 2 is made of a negative photoresist material, which can realize the function of insulation and easily realize the chamfer patterning process, and is favorable for the pattern of the convex structure 2 having an inverted trapezoidal cross section.
  • step S102 in the method for fabricating the touch panel provided by the embodiment of the present invention may be The method is as follows: forming a conductive material having a thickness smaller than a thickness of the convex structure on the base substrate on which the pattern having the convex structure is formed, and the pattern of the convex structure formed in step S101 is a cross section directed from the base substrate
  • the outer surface gradually increases like an inverted trapezoidal pattern, so that the pattern of the convex structure formed in step S101 is used as a mask, so that the conductive material having a thickness smaller than the convex structure is naturally at the difference of the pattern of the convex structure.
  • the disconnected and disconnected conductive materials respectively form a two-part pattern, so that the patterns of the mutually insulated touch electrodes and floating electrodes can be naturally formed.
  • the pattern of the touch electrodes and the floating electrodes which are insulated from each other is formed by using the above step S102. Since the pattern formed on the pattern of the convex structure is consistent with the pattern of the convex structure, it can be formed as shown in FIG.
  • the pattern of the touch electrode 3 is set to coincide with the pattern of the bump structure 2, and correspondingly, the pattern of the formed floating electrode 4 is set to be complementary to the pattern of the bump structure 2.
  • step S101 includes, for example, the following steps:
  • Step S102 is used to form patterns of mutually insulated touch electrodes and floating electrodes. Since the pattern formed on the pattern of the raised structure is consistent with the pattern of the raised structure, it may also be formed as shown in FIG.
  • the pattern of the floating electrode 4 is set to coincide with the pattern of the raised structure 2, and correspondingly, the formed pattern of the touch electrode 3 is set to be complementary to the pattern of the raised structure 2.
  • the step S101 includes, for example, the following steps:
  • the material of the bump structure may also be an organic photoresist material, an inorganic material, and an inverted trapezoidal pattern can be formed by exposure etching. Materials that meet the requirements for insulation and transparency are acceptable.
  • the method for manufacturing the touch panel provided by the embodiment of the present invention can be applied to multiple touch technology solutions such as an external touch technology or an embedded touch technology, and the corresponding touch process needs to be added to different touch technology solutions. To meet the needs of the corresponding solution, it will not be described in detail here.
  • the embodiment of the invention provides a touch panel and a manufacturing method thereof.
  • the method for fabricating the touch panel is to form a convex structure on the base substrate by using a negative photoresist material, and the formed protrusion is formed.
  • the pattern of the structure is a pattern similar to an inverted trapezoid in which the cross section is gradually increased from the base substrate toward the outer surface, and the pattern of the formed convex structure is used as a mask to form a pattern of mutually insulated touch electrodes and floating electrodes,
  • the formed pattern of the touch electrode and the floating electrode is disconnected by the gap of the protruding structure, and the pattern of the touch electrode and the floating electrode covers the entire substrate from the top view, so that the entire substrate surface is
  • the same optical characteristics can be used to weaken or eliminate the influence of the touch electrode pattern on the visual effect of the touch panel, and improve the overall viewing effect of the touch panel.
  • the touch panel can be fabricated. It is also possible to achieve a better visual effect by eliminating the need to make an

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Position Input By Displaying (AREA)

Abstract

公开了一种触控面板及其制作方法。触控面板的制作方法是采用负性光刻胶材料在衬底基板(1)上形成凸起结构(2)的图形,且形成的凸起结构(2)的图形为截面从衬底基板指向外表面逐渐增大的类似于倒梯形的图形,并以形成的凸起结构(2)的图形为掩模板形成相互绝缘的触控电极(3)和浮空电极(4)的图形,由于所形成的触控电极(3)与浮空电极(4)的图形是通过凸起结构(2)的断差而断开,从俯视图来看触控电极(3)与浮空电极(4)的图形覆盖了整个衬底基板(1),使整个触控面板表面具有相同的光学特性,从而可以削弱或消除触控面板中触控电极金属图案对视觉效果的影响,提高了触控面板整体的观看效果。

Description

触控面板及其制作方法 技术领域
本发明实施例涉及一种触控面板及其制作方法。
背景技术
随着显示技术的飞速发展,触摸屏(Touch Screen Panel)已经逐渐遍及人们的生活中,为了降低生产成本,各厂商采用单层导电层设计生产触控面板,即在基板上沉积单层金属,通过构图工艺形成触控电极,这样的设计由于单层导电层和基板的折射率不同,金属的反光作用会使得用户看到触控面板出现金属触控电极的图案,这样就影响了触控面板的视觉效果,因此需要增加防反射层,这样又会增加了触控面板的生产工艺复杂度和生产成本,且防反射层的作用有限,无法有效改善触控面板的视觉效果。
发明内容
根据本发明的一方面,提供了一种触控面板,包括:衬底基板,位于所述衬底基板之上的凸起结构,以及位于所述凸起结构和所述衬底基板之上且相互绝缘的触控电极和浮空电极;其中所述凸起结构的截面宽度沿衬底基板指向远离所述衬底基板的方向逐渐递增;所述凸起结构使所述触控电极和所述浮空电极在所述凸起结构边缘处断开。
在一个示例中,所述触控电极的图形与所述凸起结构的图形一致,所述浮空电极的图形与所述凸起结构的图形互补。
在一个示例中,所述触控电极的图形与所述凸起结构的图形互补,所述浮空电极的图形与所述凸起结构的图形一致。
在一个示例中,所述凸起结构的厚度大于所述触控电极和所述浮空电极的厚度。
在一个示例中,所述触控电极包括构成插指结构的触控感应电极和触控驱动电极。
在一个示例中,所述凸起结构的材料为绝缘材料。
在一个示例中,所述凸起结构的材料为负性光刻胶材料。
根据本发明的另一方面,还提供了一种触控面板的制作方法,包括:
在衬底基板上形成凸起结构的图形,所述凸起结构的截面宽度沿衬底基板指向远离所述衬底基板的方向逐渐递增;以及
在形成有所述凸起结构的图形的衬底基板上,以所述凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空电极的图形。
在一个示例中,所述在衬底基板上形成凸起结构的图形所采用的材料为绝缘材料。
在一个示例中,在形成有所述凸起结构的图形的衬底基板上,以所述凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空电极的图形,具体包括:
在形成有所述凸起结构的图形的衬底基板上形成一层厚度小于所述凸起结构的厚度的导电材料,使在所述凸起结构的图形边缘处的所述导电材料断开,形成相互绝缘的所述触控电极和浮空电极的图形。
在一个示例中,所述触控电极的图形形成为与所述凸起结构的图形一致,以及所述浮空电极的图形形成为与所述凸起结构的图形互补。
在一个示例中,所述在衬底基板上形成所述凸起结构的图形,具体包括:
在所述衬底基板上形成一层负性光刻胶材料;
采用第一掩膜板对所述负性光刻胶材料进行曝光显影,其中,所述第一掩膜板中透光区域对应于需要形成所述触控电极的图形区域,所述第一掩膜板中遮光区域对应于需要形成所述浮空电极的图形区域。
在一个示例中,所述浮空电极的图形形成为与所述凸起结构的图形一致,以及所述触控电极的图形形成为与所述凸起结构的图形互补。
在一个示例中,所述在衬底基板上形成所述凸起结构的图形,包括:
在所述衬底基板上形成一层负性光刻胶材料;
采用第一掩膜板对所述负性光刻胶材料进行曝光显影,其中,所述第一掩膜板中遮光区域对应于需要形成所述触控电极的图形区域,所述第一掩膜板中透光区域对应于需要形成所述浮空电极的图形区域。
附图说明
为了更清楚地说明本发明实施例的技术方案,下面将对实施例的附图作简单地介绍,显而易见地,下面描述中的附图仅仅涉及本发明的一些实施例,而非对本发明的限制。
图1为本发明实施例提供的触控面板的截面示意图;
图2为本发明实施例提供的另一触控面板的截面示意图;
图3为本发明实施例提供的触控电极的平面结构示意图;
图4为本发明实施例提供的另一触控电极的平面结构示意图;
图5为本发明实施例提供的触控面板的制作方法的流程图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例的附图,对本发明实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例。基于所描述的本发明的实施例,本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。
本发明实施例提供了一种触控面板,如图1和图2所示,包括:衬底基板1,位于衬底基板1之上的凸起结构2,以及位于凸起结构2和衬底基板1之上且相互绝缘的触控电极3和浮空电极(Dummy)4。
凸起结构2的截面宽度沿衬底基板1指向远离衬底基板1的方向逐渐递增,形成类似一个倒梯形的图形,凸起结构2使触控电极3和浮空电极4在凸起结构2的边缘处断开,这样才能保证触控电极3与浮空电极4是相互绝缘的。
本发明实施例提供的上述触控面板中,触控电极3的图形和浮空电极4的图形通过凸起结构2的断差而断开,从俯视图来看触控电极3与浮空电极4的图形覆盖了整个衬底基板1,使整个触控面板表面具有相同的光学特性,从而可以削弱或消除触控面板中触控电极3的图案对视觉效果的影响,提高了触控面板整体的观看效果,相较于现有技术中的触控面板的制作,可以省去制作防反射层也可以达到较好的视觉效果,因此可以节省制作成本。
在一个示例中,触控电极3与浮空电极4在衬底基板1上的排布方式可 以有两种方式。例如,如图1所示,将触控电极3的图形设置为与凸起结构2的图形一致,浮空电极4的图形设置为与凸起结构2的图形互补;或者,如图2所示,将触控电极3的图形设置为与凸起结构2的图形互补,浮空电极4的图形设置为与凸起结构2的图形一致。采用上述两种排布方式排布的触控电极3与浮空电极4覆盖了整个衬底基板1,使整个触控面板具有相同的光学特性,从而可以削弱或消除触控面板中触控电极3的图案对视觉效果产生的影响,提高了触控面板整体的观看效果。
在一个示例中,为了使触控电极3与浮空电极4相互绝缘,凸起结构2的厚度要大于触控电极3和浮空电极4的厚度,这样,在以凸起结构2的图形为掩模板,在形成有凸起结构2的衬底基板1上沉积导电材料时,导电材料才会在凸起结构2的断差处自然断开,形成触控电极3和浮空电极4的图形。
在一个示例中,为了实现触控功能,触控电极3包括触控感应电极301和触控驱动电极302,触控感应电极301一般与触摸信号输出线303相连,触控驱动电极302一般与驱动线304相连,且为了使触控感应电极301与触控驱动电极302在一个平面内相互绝缘,因此可以将触控感应电极301与触控驱动电极302设置成插指结构,其中插指结构的具体地结构可以有多种实现方式,例如图3所示,可以将触控感应电极301设置为U形图案,对应的可以将触控驱动电极302设置为插入U形开口位置的长方形图案,两者构成插指结构,其余空白部分为浮空电极4;也可以如图4所示,将触控感应电极301设置为三角形图案,对应的可以将触控驱动电极302设置为与触控感应电极的图案斜边相对的三角形图案,两者互补也可以构成类似于插指结构,其余空白部分为浮空电极4。在具体实施时,触控感应电极301和触控驱动电极302的图形还可以为其他符合工艺要求的图形,在此不作限定。
在一个示例中,凸起结构2的材料可以采用氮化硅、二氧化硅等绝缘材料,。例如凸起结构2的材料优选负性光刻胶材料,采用负性光刻胶材料制作凸起结构2既可以实现绝缘的功能,又容易实现倒角构图工艺,有利于制作截面为倒梯形的凸起结构2图形。
本发明实施例还提供了一种触控面板的制作方法,如图5所示,包括如下步骤:
S101、在衬底基板上形成凸起结构的图形,凸起结构的截面宽度沿从衬底基板指向远离衬底基板的方向逐渐递增;
S102、在形成有凸起结构的图形的衬底基板上,以凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空电极的图形。
本发明实施例提供的上述触控面板的制作方法中,由于采用负性光刻胶材料在衬底基板上形成凸起结构的图形,因此,形成的凸起结构的图形为截面从衬底基板指向外表面逐渐增大的类似于倒梯形的图形,因此在之后以凸起结构的图形为掩膜板制作出的触控电极与浮空电极的图形在凸起结构的断差处会断开而相互绝缘,而从俯视图来看触控电极与浮空电极的图形又覆盖了整个衬底基板,使整个触控面板表面具有相同的光学特性,从而可以削弱或消除触控面板中由于触控电极图案对视觉效果产生的影响,提高了触控面板整体的观看效果,相较于现有技术中的触控面板的制作,可以省去制作防反射层也可以达到较好的视觉效果,因此可以节省制作成本。
在一个示例中,制作凸起结构图形采用的材料,一般地可以采用氮化硅、二氧化硅等绝缘材料。例如,用负性光刻胶材料制作凸起结构2,既可以实现绝缘的功能,又容易实现倒角构图工艺,有利于制作截面为倒梯形的凸起结构2图形。
在一个示例中,为了达到采用凸起结构的图形作为掩模板而使形成的触控电极和浮空电极相互绝缘的效果,本发明实施例提供的上述触控面板的制作方法中的步骤S102可以采用下述方式实现:在形成有凸起结构的图形的衬底基板上形成一层厚度小于凸起结构的厚度的导电材料,由于步骤S101形成的凸起结构的图形为截面从衬底基板指向外表面逐渐增大的类似于倒梯形的图形,因此以步骤S101所形成的凸起结构的图形为掩模板,会使得厚度小于凸起结构的导电材料在凸起结构的图形的断差处自然断开,断开的导电材料分别形成两部分图形,这样就可以自然形成相互绝缘的触控电极和浮空电极的图形。
采用上述步骤S102形成相互绝缘的触控电极和浮空电极的图形,由于在凸起结构的图形上方形成的图形与该凸起结构的图形一致,因此,可以如图1所示,将形成的触控电极3的图形设置为与凸起结构2的图形一致,对应地,将形成的浮空电极4的图形设置为与凸起结构2的图形互补。
进一步地,为了得到上述结构的触控电极3与浮空电极4,步骤S101例如包括如下步骤:
S201、在衬底基板上形成一层负性光刻胶材料;
S202、采用第一掩膜板对负性光刻胶材料进行曝光显影,其中,第一掩膜板中透光区域对应于需要形成触控电极的图形区域,第一掩膜板中遮光区域对应于需要形成浮空电极的图形区域。这样,在经过曝光显影后,与第一掩膜板的透光区域对应的负性光刻胶被保留,保留区域的图形与触控电极的图形一致,与第一掩膜板的遮光区域对应的负性光刻胶被刻蚀掉,刻蚀掉区域的图形与浮空电极的图形一致。
采用步骤S102形成相互绝缘的触控电极和浮空电极的图形,由于在凸起结构的图形上方形成的图形与该凸起结构的图形一致,因此,还可以如图2所示,将形成的浮空电极4的图形设置为与凸起结构2的图形一致,对应的,将形成的触控电极3的图形设置为与凸起结构2的图形互补。
进一步地,为了得到上述结构的浮空电极4和触控电极3,步骤S101例如包括如下步骤:
S301、在衬底基板上形成一层负性光刻胶材料;
S302、采用第一掩膜板对负性光刻胶材料进行曝光显影,其中,第一掩膜板中遮光区域对应于需要形成触控电极的图形区域,第一掩膜板中透光区域对应于需要形成浮空电极的图形区域。这样,在经过曝光显影后,与第一掩膜板的透光区域对应的负性光刻胶被保留,保留区域的图形与浮空电极的图形一致,与第一掩膜板的遮光区域对应的负性光刻胶被刻蚀掉,刻蚀掉区域的图形与触控电极的图形一致。
具体地,本发明实施例提供的上述触控面板及其制作方法中,凸起结构的材料还可以是有机光阻材料、无机材料,以及通过曝光刻蚀可以形成截面为倒梯形图形、且能满足绝缘、透明的要求的材料都可以。
本发明实施例提供的上述触控面板的制作方法可以应用于外挂式触控技术或内嵌式触控技术等多种触控技术方案中,应用于不同触控技术方案需要增加对应的工艺步骤,以满足对应方案的需求,在此不作详述。
本发明实施例提供了一种触控面板及其制作方法,其触控面板的制作方法是采用负性光刻胶材料在衬底基板上形成凸起结构的图形,且形成的凸起 结构的图形为截面从衬底基板指向外表面逐渐增大的类似于倒梯形的图形,并以形成的凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空电极的图形,由于所形成的触控电极与浮空电极的图形是通过凸起结构的断差而断开,从俯视图来看触控电极与浮空电极的图形覆盖了整个衬底基板,使整个衬底基板表面具有相同的光学特性,从而可以削弱或消除触控面板中触控电极图案对视觉效果的影响,提高了触控面板整体的观看效果,相较于现有技术中的触控面板的制作,可以省去制作防反射层也可以达到较好的视觉效果,因此可以节省制作成本。
以上所述仅是本发明的示范性实施方式,而非用于限制本发明的保护范围,本发明的保护范围由所附的权利要求确定。
本申请基于并且要求于2014年9月4日递交的中国专利申请第201410448652.1号的优先权,在此全文引用上述中国专利申请公开的内容。

Claims (14)

  1. 一种触控面板,包括:衬底基板,位于所述衬底基板之上的凸起结构,以及位于所述凸起结构和所述衬底基板之上且相互绝缘的触控电极和浮空电极;
    其中所述凸起结构的截面宽度沿衬底基板指向远离所述衬底基板的方向逐渐递增;
    所述凸起结构使所述触控电极和所述浮空电极在所述凸起结构边缘处断开。
  2. 如权利要求1所述的触控面板,其中所述触控电极的图形与所述凸起结构的图形一致,所述浮空电极的图形与所述凸起结构的图形互补。
  3. 如权利要求1所述的触控面板,其中所述触控电极的图形与所述凸起结构的图形互补,所述浮空电极的图形与所述凸起结构的图形一致。
  4. 如权利要求1-3任一项所述的触控面板,其中所述凸起结构的厚度大于所述触控电极和所述浮空电极的厚度。
  5. 如权利要求1-3任一项所述的触控面板,其中所述触控电极包括构成插指结构的触控感应电极和触控驱动电极。
  6. 如权利要求1-3任一项所述的触控面板,其中所述凸起结构的材料为绝缘材料。
  7. 如权利要求6所述的触控面板,其中所述凸起结构的材料为负性光刻胶材料。
  8. 一种触控面板的制作方法,包括:
    在衬底基板上形成凸起结构的图形,所述凸起结构的截面宽度沿衬底基板指向远离所述衬底基板的方向逐渐递增;以及
    在形成有所述凸起结构的图形的衬底基板上,以所述凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空电极的图形。
  9. 如权利要求8所述的方法,其中所述在衬底基板上形成凸起结构的图形所采用的材料为绝缘材料。
  10. 如权利要求8所述的方法,其中在形成有所述凸起结构的图形的衬底基板上,以所述凸起结构的图形为掩模板形成相互绝缘的触控电极和浮空 电极的图形,具体包括:
    在形成有所述绝凸起结构的图形的衬底基板上形成一层厚度小于所述凸起结构的厚度的导电材料,使在所述凸起结构的图形边缘处的所述导电材料断开,形成相互绝缘的所述触控电极和浮空电极的图形。
  11. 如权利要求9或10所述的方法,其中所述触控电极的图形形成为与所述凸起结构的图形一致,以及所述浮空电极的图形形成为与所述凸起结构的图形互补。
  12. 如权利要求11所述的方法,其中所述在衬底基板上形成所述凸起结构的图形,包括:
    在所述衬底基板上形成一层负性光刻胶材料;
    采用第一掩膜板对所述负性光刻胶材料进行曝光显影,其中,所述第一掩膜板中透光区域对应于需要形成所述触控电极的图形区域,所述第一掩膜板中遮光区域对应于需要形成所述浮空电极的图形区域。
  13. 如权利要求9或10所述的方法,其中所述浮空电极的图形形成为与所述凸起结构的图形一致,以及所述触控电极的图形形成为与所述凸起结构的图形互补。
  14. 如权利要求13所述的方法,其中所述在衬底基板上形成所述凸起结构的图形,包括:
    在所述衬底基板上形成一层负性光刻胶材料;
    采用第一掩膜板对所述负性光刻胶材料进行曝光显影,其中,所述第一掩膜板中遮光区域对应于需要形成所述触控电极的图形区域,所述第一掩膜板中透光区域对应于需要形成所述浮空电极的图形区域。
PCT/CN2014/092904 2014-09-04 2014-12-03 触控面板及其制作方法 WO2016033887A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/768,360 US9965065B2 (en) 2014-09-04 2014-12-03 Touch panel and method for fabricating the same
EP14881401.5A EP3190484A4 (en) 2014-09-04 2014-12-03 Touch control panel and manufacturing method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410448652.1 2014-09-04
CN201410448652.1A CN104238816A (zh) 2014-09-04 2014-09-04 一种触控面板及其制作方法

Publications (1)

Publication Number Publication Date
WO2016033887A1 true WO2016033887A1 (zh) 2016-03-10

Family

ID=52227032

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2014/092904 WO2016033887A1 (zh) 2014-09-04 2014-12-03 触控面板及其制作方法

Country Status (4)

Country Link
US (1) US9965065B2 (zh)
EP (1) EP3190484A4 (zh)
CN (1) CN104238816A (zh)
WO (1) WO2016033887A1 (zh)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102218718B1 (ko) * 2014-10-10 2021-02-19 엘지전자 주식회사 전도성 필름 및 이의 제조 방법, 그리고 전도성 필름을 포함하는 터치 패널 및 디스플레이 장치
CN104461162B (zh) * 2014-12-31 2017-12-15 京东方科技集团股份有限公司 触摸基板、触摸面板和触摸显示装置
CN104699337A (zh) * 2015-01-19 2015-06-10 北京理工大学 一种On-cell消隐结构及其制备方法
CN105404418B (zh) * 2015-11-03 2018-09-04 京东方科技集团股份有限公司 触控屏及其制备方法、显示面板和显示装置
CN106201103B (zh) * 2016-07-25 2019-09-06 京东方科技集团股份有限公司 触摸屏、显示装置及其制作方法
CN105974639A (zh) * 2016-07-26 2016-09-28 京东方科技集团股份有限公司 内嵌式触控基板及其驱动方法、显示面板
CN108622848B (zh) * 2017-03-16 2020-08-25 厦门大学 一种大面积的三维复合纳米结构及其制备方法
CN107168593B (zh) * 2017-05-10 2020-01-14 京东方科技集团股份有限公司 一种触控电极及触控电极制作方法
CN107300996B (zh) * 2017-06-09 2019-12-10 京东方科技集团股份有限公司 一种阵列基板及其制备方法、显示装置
CN206931070U (zh) * 2017-06-09 2018-01-26 合肥鑫晟光电科技有限公司 绑定区连接结构、触摸屏和显示装置
KR102374754B1 (ko) * 2017-09-27 2022-03-15 엘지디스플레이 주식회사 터치 구조물을 포함하는 디스플레이 장치
CN108321088B (zh) * 2018-02-05 2020-06-16 京东方科技集团股份有限公司 触控基板的制造方法、触控基板及显示装置
CN108563364B (zh) * 2018-04-28 2024-03-08 京东方科技集团股份有限公司 一种触摸屏、其制作方法、触控显示面板及显示装置
CN108829297B (zh) * 2018-06-21 2020-12-11 京东方科技集团股份有限公司 触控基板、触控显示面板、触控显示装置和触控驱动方法
EP4033234A4 (en) * 2019-09-18 2022-11-16 PHC Holdings Corporation ELECTRODE SUBSTRATE, PROCESS FOR ITS PRODUCTION AND BIOSENSOR WITH ELECTRODE SUBSTRATE
CN110673762B (zh) * 2019-09-29 2023-04-07 合肥微晶材料科技有限公司 一种低可见性触控电极及其制作方法
US11188185B1 (en) * 2020-05-26 2021-11-30 Futuretech Capital, Inc. Integrate metal mesh touch sensor and cover lens
CN113220158A (zh) * 2021-04-30 2021-08-06 上海天马微电子有限公司 触控面板制备方法、触控面板及显示装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102654806A (zh) * 2011-08-31 2012-09-05 北京京东方光电科技有限公司 一种触控面板及其制造方法
CN103309095A (zh) * 2013-05-30 2013-09-18 京东方科技集团股份有限公司 一种阵列基板及其制作方法、显示装置
CN103853401A (zh) * 2012-11-30 2014-06-11 恒颢科技股份有限公司 触控面板

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7811720B2 (en) * 2004-05-10 2010-10-12 Taiwan Semiconductor Manufacturing Co., Ltd. Utilizing compensation features in photolithography for semiconductor device fabrication
US7639234B2 (en) * 2007-01-04 2009-12-29 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Capacitive sensing and absolute position mapping in displacement type pointing devices
KR101055102B1 (ko) * 2009-01-21 2011-08-08 엘지이노텍 주식회사 입력장치
WO2012128893A1 (en) * 2011-02-24 2012-09-27 Cypress Semiconductor Corporation Single layer touch sensor
KR101875020B1 (ko) * 2011-05-31 2018-07-06 엘지디스플레이 주식회사 정전용량 방식 터치 스크린 패널
US8680419B2 (en) * 2011-09-01 2014-03-25 Wistron Corporation Seamless capacitive touch panel
US9256311B2 (en) * 2011-10-28 2016-02-09 Atmel Corporation Flexible touch sensor
US20140327845A1 (en) * 2011-12-02 2014-11-06 Sharp Kabushiki Kaisha Touch panel
TWI463374B (zh) * 2012-06-07 2014-12-01 Mstar Semiconductor Inc 觸控面板
CN103577005A (zh) * 2012-08-01 2014-02-12 奕力科技股份有限公司 电容式触控面板及其模块
TW201409300A (zh) * 2012-08-23 2014-03-01 Henghao Technology Co Ltd 觸控電極裝置及其形成方法
CN103163676B (zh) * 2012-09-26 2016-03-09 敦泰电子有限公司 集成单层电容传感器的液晶显示触摸屏及其应用设备
KR20140052676A (ko) * 2012-10-25 2014-05-07 삼성디스플레이 주식회사 터치 센싱 패널의 제조 방법
KR101461290B1 (ko) * 2012-12-28 2014-11-12 삼성전기주식회사 터치패널
CN105094469A (zh) * 2014-04-25 2015-11-25 天津富纳源创科技有限公司 电容式触摸屏

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102654806A (zh) * 2011-08-31 2012-09-05 北京京东方光电科技有限公司 一种触控面板及其制造方法
CN103853401A (zh) * 2012-11-30 2014-06-11 恒颢科技股份有限公司 触控面板
CN103309095A (zh) * 2013-05-30 2013-09-18 京东方科技集团股份有限公司 一种阵列基板及其制作方法、显示装置

Also Published As

Publication number Publication date
EP3190484A4 (en) 2018-04-11
US9965065B2 (en) 2018-05-08
CN104238816A (zh) 2014-12-24
EP3190484A1 (en) 2017-07-12
US20160252989A1 (en) 2016-09-01

Similar Documents

Publication Publication Date Title
WO2016033887A1 (zh) 触控面板及其制作方法
WO2016150133A1 (zh) 触控基板和显示装置
WO2018082396A1 (zh) 一种掩膜板
CN107579166B (zh) 显示面板、显示装置及显示面板制作方法
WO2016070542A1 (zh) 阵列基板、液晶显示面板及显示装置
WO2016107039A1 (zh) 阵列基板及其制作方法及显示装置
WO2017133097A1 (zh) 阵列基板及其制造方法以及显示面板
WO2010026682A1 (ja) 液晶表示装置
WO2016155234A1 (zh) 触摸屏、其制作方法及显示装置
WO2015143862A1 (zh) 触摸屏、其制作方法及显示装置
WO2013143292A1 (zh) 触摸传感器、其制作方法以及具有触摸屏的液晶显示器
WO2015043219A1 (zh) 彩膜基板、触控显示装置及彩膜基板的制作方法
US9483148B2 (en) Method for manufacturing touch substrate
WO2015176414A1 (zh) 触摸屏及其制备方法和具有该触摸屏的显示装置
WO2015027639A1 (zh) 触摸屏、触摸屏的制作方法及显示装置
WO2015113363A1 (zh) 保护板及其制备方法、显示面板及显示装置
TW201314536A (zh) 觸控顯示裝置及其形成方法
TW201508579A (zh) 裝飾基板以及觸控面板
CN108803161A (zh) 显示面板、显示面板的制造方法以及显示装置
WO2019184543A1 (zh) 显示面板及其制作方法以及显示装置
WO2019001285A1 (zh) 阵列基板及其制备方法和显示装置
WO2015027637A1 (zh) 触摸屏、其制作方法及显示装置
JP2011075809A (ja) 液晶表示パネル
WO2016206203A1 (zh) 导电结构及其制作方法、阵列基板、显示装置
WO2015188539A1 (zh) 光栅基板及其制作方法、显示装置

Legal Events

Date Code Title Description
REEP Request for entry into the european phase

Ref document number: 2014881401

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2014881401

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 14768360

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14881401

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE