WO2016031138A1 - 膜厚モニタおよび膜厚測定方法 - Google Patents
膜厚モニタおよび膜厚測定方法 Download PDFInfo
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- WO2016031138A1 WO2016031138A1 PCT/JP2015/003800 JP2015003800W WO2016031138A1 WO 2016031138 A1 WO2016031138 A1 WO 2016031138A1 JP 2015003800 W JP2015003800 W JP 2015003800W WO 2016031138 A1 WO2016031138 A1 WO 2016031138A1
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- film
- crystal resonator
- film thickness
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- 238000000034 method Methods 0.000 title abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 81
- 238000007740 vapor deposition Methods 0.000 claims abstract description 38
- 239000010453 quartz Substances 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000008021 deposition Effects 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 238000003860 storage Methods 0.000 claims description 5
- 238000010408 sweeping Methods 0.000 claims description 3
- 238000000691 measurement method Methods 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 abstract description 13
- 239000002184 metal Substances 0.000 abstract description 13
- 230000014509 gene expression Effects 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 4
- 238000005401 electroluminescence Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000003380 quartz crystal microbalance Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019589 hardness Nutrition 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Definitions
- the present invention relates to a film thickness monitor and a film thickness measuring method for measuring a film thickness based on a change in the resonance frequency of a crystal resonator.
- a method of measuring a small amount of mass change using a quartz resonator (QCM: Quartz Crystal Microbalance) is used.
- QCM Quartz Crystal Microbalance
- Patent Document 1 describes a sensor head configured to be able to individually switch a crystal resonator to be used.
- ⁇ f is the film density (g / cm 3 )
- tf is the film thickness (nm)
- ⁇ q is the crystal resonator density (g / cm 3 )
- tq is the crystal resonator thickness.
- Nm Z is the acoustic impedance ratio
- fq is the frequency (Hz) of the crystal resonator when it is not formed
- fc is the frequency (Hz) of the crystal resonator after film formation.
- the above formula (1) is suitable for calculating the film thickness of a relatively hard film such as a metal film or an oxide film.
- a relatively hard film such as a metal film or an oxide film.
- a relatively soft film such as an organic film.
- an object of the present invention is a film capable of measuring a film thickness of a relatively hard film such as a metal film and a film thickness of a relatively soft film such as an organic film with high accuracy. It is to provide a thickness monitor and a film thickness measuring method.
- a film thickness monitor measures a film thickness of a vapor deposition film based on a change in the resonance frequency of a crystal resonator installed in a film deposition apparatus having a vapor deposition source.
- a monitor comprising a measurement unit and a calculation unit.
- the measurement unit electrically scans the vicinity of the resonance frequency of the crystal resonator to give half-value frequencies F1, F2 (F1 ⁇ F2) that give a half of the maximum value of conductance, and the half-value frequencies F1, F2.
- the film thickness monitor is configured to determine whether the film forming material is soft or soft according to the half-width of the half-width of the resonance frequency of the crystal resonator, and to properly use the respective arithmetic expressions according to the determination result.
- the above formula (1) is used for measuring a relatively hard film such as a metal film or an oxide film
- the above formula (2) is an arithmetic expression that takes into account the complex elastic modulus of the film. Used to measure relatively soft membranes. Accordingly, the film thickness of a relatively hard film such as a metal film or an oxide film and the film thickness of a relatively soft film such as an organic film can be measured with high accuracy.
- the resonance frequency change ⁇ Fs of the crystal resonator is calculated by Expression (2).
- the film thickness of a relatively hard film such as a metal film and the film thickness of a relatively soft film such as an organic film can be measured with high accuracy.
- FIG. 1 is a schematic sectional view showing a film forming apparatus according to an embodiment of the present invention.
- the film forming apparatus 10 of this embodiment is configured as a vacuum vapor deposition apparatus.
- the film forming apparatus 10 includes a vacuum chamber 11, a vapor deposition source 12 disposed inside the vacuum chamber 11, a stage 13 facing the vapor deposition source 12, and a film thickness sensor 14 disposed inside the vacuum chamber 11. Have.
- the vapor deposition source 12 is configured to be able to generate vapor (particles) of vapor deposition material.
- the vapor deposition source 12 is electrically connected to the power supply unit 18 and constitutes an evaporation source that heats and evaporates the vapor deposition material to release vapor deposition material particles.
- the type of the evaporation source is not particularly limited, and various methods such as a resistance heating method, an induction heating method, and an electron beam heating method can be applied.
- the evaporation material may be an organic material, a metal material, a metal compound material (for example, metal oxide, metal nitride, metal carbide, etc.).
- the stage 13 is configured to be able to hold a substrate W, which is a film formation target such as a semiconductor wafer or a glass substrate, toward the vapor deposition source 12.
- a substrate W which is a film formation target such as a semiconductor wafer or a glass substrate
- the film thickness sensor 14 incorporates a crystal resonator having a predetermined resonance frequency (natural frequency), and constitutes a sensor head for measuring the film thickness and film formation rate of the deposited film deposited on the substrate W.
- the film thickness sensor 14 is disposed inside the vacuum chamber 11 at a position facing the vapor deposition source 12 and is typically disposed near the stage 13.
- the crystal resonator for example, an SC cut crystal resonator or an AT cut crystal resonator having relatively excellent temperature characteristics is used.
- the predetermined resonance frequency is typically 5 to 6 MHz, and in this embodiment, 5 MHz.
- the output of the film thickness sensor 14 is supplied to the measurement unit 17.
- the measurement unit 17 measures the film thickness and the film formation rate based on the change in the resonance frequency of the crystal resonator, and controls the vapor deposition source 12 via the power supply unit 18 so that the film formation rate becomes a predetermined value. Control.
- the film thickness sensor 14 and the measurement unit 17 constitute a film thickness monitor 100 (FIG. 2).
- the film forming apparatus 10 further includes a shutter 16.
- the shutter 16 is disposed between the vapor deposition source 12 and the stage 13, and is configured to be able to open or shield the incident path of vapor deposition particles from the vapor deposition source 12 to the stage 13 and the film thickness sensor 14.
- the opening and closing of the shutter 16 is controlled by a control unit (not shown).
- the shutter 16 is closed at the start of vapor deposition until the release of vapor deposition particles at the vapor deposition source 12 is stable. And when discharge
- the vapor deposition particles from the vapor deposition source 12 reach the substrate W on the stage 13, and the film forming process of the substrate W is started.
- the vapor deposition particles from the vapor deposition source 12 reach the film thickness sensor 14, and the measurement unit 17 monitors the film thickness of the vapor deposition film on the substrate W and its film formation rate.
- FIG. 2 is a schematic block diagram showing a configuration example of the film thickness monitor 100.
- the film thickness monitor 100 includes a film thickness sensor 14 and a measurement unit 17.
- the measurement unit 17 includes a measurement unit 21 and a controller 22.
- the measuring unit 21 functions as a network analyzer.
- the measurement unit 21 includes a signal supply circuit 211 and a measurement circuit 212.
- the signal supply circuit 211 is electrically connected to the crystal resonator 20 mounted on the film thickness sensor 14 (sensor head), and is configured to output an alternating input signal while changing the frequency. Yes.
- the measurement circuit 212 measures the electrical characteristics such as the resonance frequency and phase of the crystal resonator 20 based on the output signal of the crystal resonator 20 and the input signal output from the signal supply circuit 211, and sends the measurement result to the controller 22. Configured to output.
- the measurement unit 21 electrically sweeps the vicinity of the resonance frequency of the crystal unit 20 to obtain half-value frequencies F1 and F2 (F1 ⁇ F2) that give 1/2 of the maximum conductance as shown in FIG.
- the controller 22 can be typically realized by hardware elements used in a computer such as a CPU (Central Processing Unit), a RAM (Random Access Memory), and a ROM (Read Only Memory) and necessary software.
- a CPU Central Processing Unit
- RAM Random Access Memory
- ROM Read Only Memory
- PLD Programmable Logic Device
- FPGA Field Programmable Gate Array
- DSP Digital Signal Processor
- the controller 22 is configured as an “arithmetic unit” that calculates the change ⁇ Fs of the resonance frequency of the crystal unit 20.
- the controller 22 determines whether or not the time change ⁇ Fw of the half-value half width of the resonance frequency acquired in the measurement unit 21 exceeds a predetermined value, and according to one arithmetic expression selected based on the determination result, The film thickness of the deposited film deposited on the surface is measured.
- the Sauerbrey equation represented by the following equation (1) is used.
- ⁇ f is a film density (g / cm 3 )
- tf is a film thickness (nm)
- ⁇ q is a crystal resonator density (g / cm 3 )
- tq is a crystal vibration.
- the thickness (nm) of the child, Z is the acoustic impedance ratio, fq is the frequency (Hz) of the crystal resonator when it is not formed, and fc is the frequency (Hz) of the crystal resonator after film formation.
- Equation (1) treats the elastic modulus of the film as a real number. Therefore, when a 45 ⁇ m organic film (Alq3 (Tris (8-quinolinolato) aluminum)) is deposited on a quartz resonator having a fundamental frequency of 5 MHz in a relatively soft film such as an organic film, the change in resonance frequency ⁇ Fs
- Alq3 Tris (8-quinolinolato) aluminum
- G ′ is a storage elastic modulus (dynamic elastic modulus) (MPa)
- G ′′ is a loss elastic modulus (dynamic loss).
- MPa MPa
- ⁇ is the angular frequency
- ⁇ f is the density of the formed film (g / cm 3 )
- F0 is the fundamental frequency (Hz) of the crystal resonator
- Zq is the shear mode acoustic impedance of the crystal resonator ( gm / sec / cm 2 ).
- Expression (3) in Expression (4), Expression (3) can be approximated to Expression (5) by Taylor expansion of the tan term in Expression (3).
- equation (5) can be transformed into equation (6).
- FIG. 4 shows the film thickness and resonance frequency of the quartz resonator of 5 MHz when the values of G ′ and G ′′ are changed.
- FIG. 5 shows the acoustic impedance ratio (Z) in the equation (1). It is one experimental result which shows the relationship between the film thickness when changing the value of, and the resonance frequency. As shown in FIG.
- FIG. 6 is a flowchart for explaining the operation of the film thickness monitor 100.
- the film thickness monitor 100 oscillates the signal supply circuit 211 so as to electrically sweep (sweep) the vicinity of the resonance frequency of the crystal resonator 20, as shown in FIG. Are controlled to obtain half-value frequencies F1 and F2 (F1 ⁇ F2) that give 1 ⁇ 2 of the maximum value of conductance.
- the controller 22 determines that the deposited film is a relatively soft film such as an organic film, and sets the resonance frequency change ⁇ Fs of the crystal resonator 20 according to the equation (2). Calculate (steps 102 and 104).
- the parameters (density, complex elastic modulus, etc.) in the formula (2) physical property values appropriately determined according to the vapor deposition material are used. These parameters are stored in the controller 22 in advance.
- the value of the predetermined value ⁇ is not particularly limited, and can be set as appropriate according to the type of vapor deposition material, the film thickness, the calculation accuracy, and the like. Typically, the predetermined value ⁇ is set in a range of 100 Hz to 1000 Hz.
- the hardness of the film forming material is determined according to the half width of the resonance frequency of the crystal resonator, and the above (1) is determined according to the determination result.
- (2) are configured so as to be used properly. Accordingly, the film thickness of a relatively hard film such as a metal film or an oxide film and the film thickness of a relatively soft film such as an organic film can be measured with high accuracy.
- the film thicknesses of a plurality of film forming materials having different hardnesses can be accurately measured with a single film thickness monitor.
- the vacuum deposition apparatus has been described as an example of the film forming apparatus, but the present invention is not limited to this and can be applied to other film forming apparatuses such as a sputtering apparatus.
- the vapor deposition source is composed of a sputtering cathode including a target.
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Abstract
Description
上記測定部は、上記水晶振動子の共振周波数付近を電気的に掃引することでコンダクタンスの最大値の1/2を与える半値周波数F1,F2(F1<F2)と、上記半値周波数F1,F2から算出される半値半幅Fw(Fw=(F1-F2)/2)の時間変化ΔFwを取得する。
上記演算部は、測定された上記半値半幅の時間変化ΔFwが所定値以下の場合は、上記水晶振動子の共振周波数変化ΔFs(ΔFs=fq-fc)を式(1)で算出し、測定された上記半値半幅の時間変化ΔFwが上記所定値を超える場合は、上記水晶振動子の共振周波数変化ΔFsを式(2)で算出する。
測定された上記半値半幅の時間変化ΔFwが所定値以下の場合は、上記水晶振動子の共振周波数変化ΔFs(ΔFs=fq-fc)は、式(1)で算出される。
一方、測定された上記半値半幅の時間変化ΔFwが上記所定値を超える場合は、上記水晶振動子の共振周波数変化ΔFsは、式(2)で算出される。
図2は、膜厚モニタ100の一構成例を示す概略ブロック図である。膜厚モニタ100は、膜厚センサ14と測定ユニット17とを有する。測定ユニット17は、測定部21と、コントローラ22とを有する。
測定回路212は、水晶振動子20の出力信号や、信号供給回路211から出力される入力信号に基づいて、水晶振動子20の共振周波数や位相等の電気的特性を測定して、コントローラ22へ出力するように構成される。
ΔFs=-519470Hz、ΔR1=3454Ω、ΔFw=4163Hz
G'=8.458E+8、G"=9.987+E6
G'とG"の値を変えたときの5MHzの水晶振動子での膜厚と共振周波数は図4のようになる。一方、図5は、式(1)において、音響インピーダンス比(Z)の値を変えたときの膜厚と共振周波数との関係を示す一実験結果である。
図4に示したように、複素弾性率G(G=G'+iG")を変えたときの膜厚と共振周波数との関係は、図5に示したように音響インピーダンス比Zを変えたときの膜厚と共振周波数との関係と似たようなカーブを描くことから、弾性率を複素数として扱うことで、半値半幅の増加(ΔFw)を説明することができることになる。
11…真空チャンバ
12…蒸着源
14…膜厚センサ
17…測定ユニット
20…水晶振動子
21…測定部
22…コントローラ
211…信号供給回路
212…測定回路
Claims (2)
- 蒸着源を有する成膜装置に設置された水晶振動子の共振周波数変化に基づいて蒸着膜の膜厚を測定する膜厚モニタであって、
前記水晶振動子の共振周波数付近を電気的に掃引することでコンダクタンスの最大値の1/2を与える半値周波数F1,F2(F1<F2)と、前記半値周波数F1,F2から算出される半値半幅Fw(Fw=(F1-F2)/2)の時間変化ΔFwを取得する測定部と、
測定された前記半値半幅の時間変化ΔFwが所定値以下の場合は、前記水晶振動子の共振周波数変化ΔFs(ΔFs=fq-fc)を式(1)で算出し、測定された前記半値半幅の時間変化ΔFwが前記所定値を超える場合は、前記水晶振動子の共振周波数変化ΔFsを式(2)で算出する演算部と
を具備する膜厚モニタ。
- 蒸着源を有する成膜装置に設置された水晶振動子の共振周波数変化に基づいて蒸着膜の膜厚を測定する膜厚測定方法であって、
前記水晶振動子の共振周波数付近を電気的に掃引することでコンダクタンスの最大値の1/2を与える半値周波数F1,F2(F1<F2)と、前記半値周波数F1,F2から算出される半値半幅Fw(Fw=(F1-F2)/2)の時間変化ΔFwを取得し、
測定された前記半値半幅の時間変化ΔFwが所定値以下の場合は、前記水晶振動子の共振周波数変化ΔFs(ΔFs=fq-fc)を式(1)で算出し、
測定された前記半値半幅の時間変化ΔFwが前記所定値を超える場合は、前記水晶振動子の共振周波数変化ΔFsを式(2)で算出する
膜厚測定方法。
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JP2016544925A JP6328253B2 (ja) | 2014-08-26 | 2015-07-29 | 膜厚モニタおよび膜厚測定方法 |
CN201580045208.8A CN106574365B (zh) | 2014-08-26 | 2015-07-29 | 膜厚监视器和膜厚测量方法 |
KR1020177003477A KR102066984B1 (ko) | 2014-08-26 | 2015-07-29 | 막 두께 모니터 및 막 두께 측정 방법 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI701641B (zh) * | 2019-10-01 | 2020-08-11 | 龍翩真空科技股份有限公司 | 無線傳輸薄膜厚度監控裝置 |
CN113720252A (zh) * | 2020-05-26 | 2021-11-30 | 株式会社爱发科 | 测定异常检测装置及测定异常检测方法 |
CN113811634A (zh) * | 2019-12-17 | 2021-12-17 | 株式会社爱发科 | 测定异常检测装置及测定异常检测方法 |
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CN113811634B (zh) * | 2019-12-17 | 2023-04-04 | 株式会社爱发科 | 测定异常检测装置及测定异常检测方法 |
CN113720252A (zh) * | 2020-05-26 | 2021-11-30 | 株式会社爱发科 | 测定异常检测装置及测定异常检测方法 |
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