WO2016023280A1 - 蒸镀线源 - Google Patents

蒸镀线源 Download PDF

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Publication number
WO2016023280A1
WO2016023280A1 PCT/CN2014/090482 CN2014090482W WO2016023280A1 WO 2016023280 A1 WO2016023280 A1 WO 2016023280A1 CN 2014090482 W CN2014090482 W CN 2014090482W WO 2016023280 A1 WO2016023280 A1 WO 2016023280A1
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vapor deposition
pot body
line source
heat
outer casing
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PCT/CN2014/090482
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English (en)
French (fr)
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肖昂
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京东方科技集团股份有限公司
鄂尔多斯市源盛光电有限责任公司
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Application filed by 京东方科技集团股份有限公司, 鄂尔多斯市源盛光电有限责任公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/770,155 priority Critical patent/US20160251752A1/en
Publication of WO2016023280A1 publication Critical patent/WO2016023280A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the present invention relates to the field of vapor deposition, and in particular to a vapor deposition line source.
  • the linear evaporation source (referred to as a line source) is used for vapor deposition of the luminescent material.
  • the existing vapor deposition line source is filled with a luminescent material in a vapor deposition line source before being vapor-deposited, and sealed.
  • the vacuum state inside and outside the line source is maintained, and the vapor deposition line source is heated by the heating device to evaporate the internal material, and the cooling device cools the outer wall of the vapor deposition line source to prevent the heat from being too high to damage the equipment outside the line source.
  • the heating energy of the heating device is partially lost in heat exchange with the cooling device
  • the present invention provides a vapor deposition line source.
  • a vapor deposition line source comprising a casing and a crucible disposed in the casing, the crucible including a pot body and a nozzle, and the outside of the pot body is provided with heating for heating the pot body
  • the device is provided with a heat insulating device between the outer casing and the heating device for preventing heat from being radiated to the outer casing.
  • the heat insulating device is provided with a reflective layer in a direction toward the pot body.
  • the reflective layer is provided with a clearance hole for preventing deformation.
  • the heat insulating device surrounds the pot body, and the heat insulating device is provided with an opening at a position corresponding to the nozzle.
  • the thermal insulation device further comprises a substrate carrying the reflective layer.
  • the reflective layer comprises a layer of heat reflective material and a film layer for attaching the layer of heat reflective material to the substrate.
  • the heat reflective material comprises a metal oxide doped with lanthanide NaZn (PO 4), aluminum-doped NaZn (PO 4) or doped alumina NaZn (PO 4).
  • the distance between the reflective layer and the crucible is greater than 2 cm.
  • the vapor deposition line source further comprises a cooling device for cooling the outer casing, the cooling device being disposed on a side of the outer casing close to the pot body, a side facing away from the pot body or a casing chamber.
  • the invention has the beneficial effects that the evaporation wire source of the invention is provided with a heat insulating device between the outer casing and the pot body for preventing heat from being radiated to the outer casing, which can effectively reduce the energy loss of the heating device during heating,
  • the inner wall of the outer casing reduces the heat radiation from the heating device and prolongs the service life.
  • FIG. 1 is a schematic structural view of a vapor deposition line source according to an embodiment of the present invention
  • Figure 2 is a cross-sectional view of Figure 1;
  • FIG. 3 is a distribution diagram of a clearance hole of a heat insulating device on a vapor deposition line source according to an embodiment of the present invention
  • FIG. 4 is a cross-sectional view of a heat insulating device on a vapor deposition line source in accordance with an embodiment of the present invention.
  • FIG. 1 is a schematic structural view of a vapor deposition line source according to an embodiment of the present invention.
  • the vapor deposition line source of the embodiment includes a housing 100 and a crucible 200 disposed in the housing 100, and the external arrangement of the crucible 200 There is a heating device 300 for heating the crucible 200, and a heat insulating device 400 for preventing heat from being radiated to the outer casing 100 is provided between the outer casing 100 and the heating device 300.
  • the vapor deposition line source of the present invention is provided with a heat insulating device for preventing heat from being radiated to the outer casing between the outer casing and the heating device of the crucible, which can effectively reduce the energy loss of the heating device during heating, and the heating device is reduced due to the inner wall of the outer casing. Thermal radiation, extended service life.
  • the vapor deposition line source of the present invention further includes a cooling device 500 for cooling the outer casing, and the cooling device 500 can select various structures suitable for cooling the outer casing.
  • a liquid cooling bag is employed in the embodiment, and the liquid cooling bag may be disposed in a side of the outer casing adjacent to the weir, a side facing away from the weir, or a chamber of the outer casing.
  • the liquid cooling bag is a circulating liquid so that the outer casing can be continuously cooled.
  • the circulating liquid may be a liquid such as water or a cooling oil to circulate and cool the outer casing to lower the temperature.
  • the crucible 200 includes a pot 201 and a nozzle 202.
  • the heat insulating device 300 is fixed to the bottom of the line source through the base 403.
  • the heat insulating device of the present embodiment surrounds the pot body 201, and the heat insulating device 300 is provided with an opening at a position corresponding to the nozzle 202 of the crucible so as to match the pot body of the crucible.
  • the pot body of the crucible of this embodiment may have a square shape, a circular shape or the like.
  • the heat insulating device of the present invention is used for blocking the heating device from dissipating heat to the outer casing.
  • the heat insulating device 300 is provided with a reflective layer 401 in a direction toward the pot body, thereby reflecting heat back to the direction of the pot body, thereby avoiding heat loss.
  • the reflective layer is provided with a clearance hole 404 for preventing deformation. Since the reflective layer causes expansion under the action of the heating device, it causes cracking and affects the service life.
  • the present invention provides a plurality of clearance holes on the reflective layer, and the clearance holes are evenly distributed, thereby avoiding expansion and cracking of the reflective layer.
  • the base of the heat insulating device is also provided with a gap at a position corresponding to the clearance hole on the reflective layer, so that a through hole is formed in the heat insulating device, and the size and shape of the through hole can be set as needed.
  • the clearance holes are strip-shaped and symmetrically distributed on the heat insulating device.
  • the invention forms a clearance hole in the heat insulating device, which greatly reduces the cracking caused by heat of the heat insulating device.
  • the heat insulating device is made of a material having a sufficiently strong strength, it is also possible to provide no clearance holes. At this point, the cost required will increase.
  • the heat insulating device of the present embodiment is a plate-like structure including a plate-like base 402 and a reflective layer 401 formed on the plate-like base in a direction in which the heat insulating device faces the weir direction.
  • the plate-like substrate 402 is disposed in a direction away from the crucible, and the plate-like substrate 402 is aluminum or a copper alloy.
  • the plate-shaped heat insulating device of this embodiment is composed of a plurality of curved faces which form a matching structure with the pan body.
  • the reflective layer 401 of the thermal insulation device of the present embodiment includes a heat reflective material layer and a film layer for attaching the heat reflective material layer to the plate substrate 402.
  • the layer of heat reflective material is made of a heat reflective material to reflect the received heat from the crucible.
  • the heat reflective material comprises NaZn (PO 4 ) doped with lanthanum oxide metal, NaZn doped with aluminum ( PO 4 ) or NaZn (PO 4 ) doped with alumina.
  • the distance between the reflective layer and the crucible is greater than 2 cm, so that the heat in the crucible can be reduced to the thermal insulation device.
  • the distance between the reflective layer and the crucible of the present invention can be designed according to the size of a specific line source, and the distance can be adjusted as needed.
  • a methyl or ethyl or propyl or isopropyl or butyl or tert-butyl or isobutyl acrylate emulsion is used as the film layer to adhere the heat reflective material to the substrate.
  • the lanthanide metal is preferably lanthanum, cerium, lanthanum or cerium.
  • Lanthanum oxide-based metal constitutes NaZn (PO 4) 0.1% to 1%, the proportion of alumina or aluminum NaZn (PO 4) 0.5 to 2%.
  • the above technical solution is provided with a heat insulating device between the outer casing and the pot body for preventing heat from being radiated to the outer casing, which can effectively reduce the energy loss of the heating device during heating, and the inner wall of the outer casing reduces the heat radiation of the heated device. Extended service life.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种蒸镀线源，包括外壳（100）和设置在外壳（100）中的坩埚（200），坩埚（200）包括锅体（201）和喷嘴（202），锅体（201）的外部设置有用于对锅体（201）进行加热的加热装置（300），外壳（100）和加热装置（300）之间设有用于阻止热量向外壳（100）进行散发的隔热装置（400）。

Description

蒸镀线源
相关申请的交叉引用
本申请主张在2014年8月14日在中国提交的中国专利申请号No.201410400453.3的优先权，其全部内容通过引用包含于此。
技术领域
本发明涉及蒸镀领域，特别是涉及一种蒸镀线源。
背景技术
现有OLED面板的生产中通常采用蒸镀工艺使发光材料附着到基板上，在量产中蒸镀发光材料需要使用到线性蒸发源(简称线源)。现有的蒸镀线源在蒸镀前先将发光材料装填在蒸镀线源中，密封好。蒸镀时保持线源内外部的真空状态，由加热装置对蒸镀线源进行加热蒸发内部的材料，同时冷却装置冷却蒸镀线源外壁，防止热量太高损坏线源外部的设备。
但是现有线源的设计存在如下问题：
1.加热装置的加热能量有部分损失在与冷却装置的热交换中；
2.由于线源内壁内外直接到受温差大的热辐射和冷却装置的作用，长期蒸镀容易导致线源内壁的损坏。
发明内容
为了解决现有蒸镀线源存在线源内壁损坏的问题，本发明提供了一种蒸镀线源。
本发明采用的技术方案是：一种蒸镀线源，包括外壳和设置在外壳中的坩埚，所述坩埚包括锅体和喷嘴，所述锅体的外部设置有用于对锅体进行加热的加热装置，所述外壳和所述加热装置之间设有用于阻止热量向外壳进行散发的隔热装置。
其中，所述隔热装置在朝向锅体的方向设有反射层。
其中，所述反射层上设有用于防止变形的间隙孔。
其中，所述隔热装置围绕在所述锅体的周围，所述隔热装置在与喷嘴对应位置设有开口。
其中，所述隔热装置还包括承载所述反射层的基底。
其中，所述反射层包括热反射材料层和用于将热反射材料层附着到基底上的膜层。
其中，所述热反射材料包括掺杂氧化镧系金属的NaZn(PO4)、掺杂铝的NaZn(PO4)或掺杂氧化铝的NaZn(PO4)。
其中，所述氧化镧系金属占NaZn(PO4)的0.1％～1％，所述铝或所述氧化铝占NaZn(PO4)的0.5～2％。
其中，所述反射层与所述坩埚的距离大于2cm。
其中，所述蒸镀线源还包括用于对外壳进行冷却的冷却装置，所述冷却装置设置在所述外壳靠近锅体的一侧、背离锅体的一侧或者外壳腔室中。
本发明的有益效果是：本发明的蒸镀线源在外壳和坩埚的锅体之间设有用于阻止热量向外壳进行散发的隔热装置，可以有效减少加热装置在加热时的能量损耗，由于外壳内壁减少了受加热装置的热辐射，使用寿命延长。
附图说明
图1为本发明一种实施例的蒸镀线源的结构示意图；
图2为图1的截面图；
图3为本发明一种实施例的蒸镀线源上的隔热装置的间隙孔的分布图；
图4为本发明一种实施例的蒸镀线源上的隔热装置的截面图。
具体实施方式
为使本发明要解决的技术问题、技术方案和优点更加清楚，下面将结合附图及具体实施例进行详细描述。
如图1所示，为本发明一种实施例的蒸镀线源的结构示意图，本实施例的蒸镀线源包括外壳100和设置在外壳100中的坩埚200，所述坩埚200的外部设置有用于对坩埚200进行加热的加热装置300，所述外壳100和所述加热装置300之间设有用于阻止热量向外壳100进行散发的隔热装置400。
本发明的蒸镀线源在外壳和坩埚的加热装置之间设有用于阻止热量向外壳进行散发的隔热装置，可以有效减少加热装置在加热时的能量损耗，由于外壳内壁减少了受加热装置的热辐射，使用寿命延长。
再次参阅图1，本发明的蒸镀线源还包括用于对外壳进行冷却的冷却装置500，冷却装置500可以选用各种适合能够给外壳进行冷却的结构，本实 施例中采用液体冷却袋，液体冷却袋可以设置在外壳靠近坩埚的一侧、背离坩埚的一侧或者外壳的腔室中。优选地，液体冷却袋为循环液体，从而可以对外壳进行持续冷却。循环液体可以是水或者冷却油等液体，从而对外壳进行循环冷却，降低温度。
如图2所示，坩埚200包括锅体201和喷嘴202。隔热装置300通过底座403固定在线源底部。本实施例的隔热装置围绕在锅体201的周围，隔热装置300在与坩埚的喷嘴202对应位置设有一开口，从而与坩埚的锅体相匹配。本实施例的坩埚的锅体可以是方形、圆形等形状。
本发明的隔热装置用于阻挡加热装置向外壳散发热量，如图3所示，隔热装置300在朝向锅体的方向设有反射层401，从而将热量反射回锅体方向，避免了热量损失。其中，所述反射层上设有用于防止变形的间隙孔404。由于反射层在加热装置的作用下会造成膨胀，从而导致破裂，影响到使用寿命。为此，本发明在反射层上设置多条间隙孔，间隙孔均匀分布，从而避免了反射层的膨胀破裂。优选地，隔热装置的基底在与反射层上间隙孔对应位置也设置有空隙，使得隔热装置上形成了通孔，通孔的大小和形状可以根据需要进行设定。间隙孔为条形，对称分布在隔热装置上。本发明在隔热装置上形成了间隙孔，大大减小了隔热装置受热造成的破裂。当然，如果隔热装置采用强度足够大的材料，也可以不设置间隙孔。此时，需要的成本会有所增加。
如图4所示，本实施例的隔热装置为板状结构，包括板状基底402和在隔热装置朝向坩埚方向形成在板状基底上的反射层401。板状基底402设置在隔热装置背离坩埚方向，板状基底402为铝或铜合金。本实施例的板状的隔热装置由多个弧形面组成，其与锅体形成相匹配的结构。本实施例的隔热装置的反射层401包括热反射材料层和用于将热反射材料层附着到板状基底402上的膜层。热反射材料层由热反射材料制成，从而对接收的来自坩埚的热量进行反射，优选地，所述热反射材料包括掺杂氧化镧系金属的NaZn(PO4)、掺杂铝的NaZn(PO4)或掺杂氧化铝的NaZn(PO4)。反射层和坩埚的距离大于2cm，从而可以减少坩埚中的热量辐射到隔热装置上。当然，本发明的反射层和坩埚的距离可以根据具体线源的尺寸进行设计，还可以根据需要进行距离的调整。本实施例中采用甲基或乙基或丙基或异丙基或丁基或叔丁基或异 丁基丙烯酸乳液为膜层，从而将热反射材料附着到基底上。镧系金属优选镧、铕、铈、釹。氧化镧系金属占NaZn(PO4)的0.1％～1％，铝或氧化铝占NaZn(PO4)的0.5～2％。
上述技术方案在外壳和坩埚的锅体之间设有用于阻止热量向外壳进行散发的隔热装置，可以有效减少加热装置在加热时的能量损耗，由于外壳内壁减少了受加热装置的热辐射，使用寿命延长。
以上所述是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明所述原理的前提下，还可以作出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。

Claims (10)

  1. 一种蒸镀线源，其特征在于，包括外壳(100)和设置在所述外壳(100)中的坩埚(200)，所述坩埚(200)包括锅体(201)和喷嘴(202)，所述锅体(201)的外部设置有用于对所述锅体进行加热的加热装置(300)，所述外壳(100)和所述加热装置(300)之间设有用于阻止热量向所述外壳(100)进行散发的隔热装置(400)。
  2. 根据权利要求1所述的蒸镀线源，其特征在于，所述隔热装置(400)在朝向所述锅体(201)的方向设有反射层(401)。
  3. 根据权利要求2所述的蒸镀线源，其特征在于，所述反射层(401)上设有用于防止变形的间隙孔(404)。
  4. 根据权利要求3所述的蒸镀线源，其特征在于，所述隔热装置(400)围绕在所述锅体(201)的周围，所述隔热装置(400)在与所述喷嘴(202)对应位置设有开口。
  5. 根据权利要求3所述的蒸镀线源，其特征在于，所述隔热装置(400)还包括承载所述反射层(401)的基底(402)。
  6. 根据权利要求5所述的蒸镀线源，其特征在于，所述反射层(401)包括热反射材料层和用于将热反射材料层附着到基底上的膜层。
  7. 根据权利要求6所述的蒸镀线源，其特征在于，所述热反射材料包括掺杂氧化镧系金属的NaZn(PO4)、掺杂铝的NaZn(PO4)或掺杂氧化铝的NaZn(PO4)。
  8. 根据权利要求7所述的蒸镀线源，其特征在于，所述氧化镧系金属占NaZn(PO4)的0.1％～1％，所述铝或所述氧化铝占NaZn(PO4)的0.5～2％。
  9. 根据权利要求2-8任何一项所述的蒸镀线源，其特征在于，所述反射层(401)与所述坩埚(200)的距离大于2cm。
  10. 根据权利要求1-8任何一项所述的蒸镀线源，其特征在于，所述蒸镀线源还包括用于对外壳进行冷却的冷却装置(500)，所述冷却 装置(500)设置在所述外壳(100)靠近所述锅体(201)的一侧、背离所述锅体(201)的一侧或者所述外壳(100)的腔室中。
PCT/CN2014/090482 2014-08-14 2014-11-06 蒸镀线源 WO2016023280A1 (zh)

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