WO2016017697A1

WO2016017697A1 - Heat exchanger

Info

Publication number: WO2016017697A1
Application number: PCT/JP2015/071513
Authority: WO
Inventors: 森山　正幸; 石峯　裕作; 和彦藤尾; 敬一関口
Original assignee: 京セラ株式会社
Priority date: 2014-07-29
Filing date: 2015-07-29
Publication date: 2016-02-04
Also published as: EP3176532A1; EP3176532B1; JP6325674B2; JPWO2016017697A1; US20170219302A1; EP3176532A4

Abstract

[Problem] To provide a heat exchanger having a superior heat exchange efficiency. [Solution] The heat exchanger according to the present invention is formed from a ceramic and performs heat exchange between a first fluid and a second fluid. The heat exchanger is provided with: a plurality of first members having a wall that has introduction holes on one side thereof and wall that has discharge holes on the other side thereof, and the spaces connecting the introduction holes and the discharge holes serve as first channels through which the first fluid flows; second members that communicate with the introduction holes at one side of the plurality of the first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the other side of the plurality of the first members to discharge the first fluid that has flowed through the first members, wherein the spaces between the plurality of first members serve as second channels through which the second fluid flows, and, in at least one of adjacent introduction holes, regions that overlap with the opening regions of the upstream-side introduction holes exist in the walls having the downstream-side introduction holes, when viewed in the direction in which the first fluid flows.

Description

Heat exchanger

The present invention relates to a heat exchanger.

Conventionally, heat exchangers are used for heat exchange systems such as cooling and heating. As an example of such a heat exchanger, a plurality of long plates arranged substantially in parallel and slits between the long plates are provided, and recesses are continuously provided in the longitudinal direction on some surfaces of the long plates. A plurality of stacked substrates, the long plates of the adjacent substrates are connected to each other to form a tube, the recess forms an in-tube flow path, and the slit forms an out-tube flow path. An exchanger has been proposed (see, for example, Patent Document 1).

JP 2005-300062 JP

For this heat exchanger, a heat exchanger having further excellent heat exchange efficiency is required. Therefore, an object of the present invention is to provide a heat exchanger having excellent heat exchange efficiency.

The heat exchanger of the present invention is a heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid, the heat exchanger having an introduction side hole on one end side, A plurality of first members, each having a wall having a discharge side hole on the other end side, wherein a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows; A second member for introducing the first fluid into the first member, and a second member for introducing the first fluid into the first member on one end side of the first member; And a third member for discharging the first fluid that has flowed through the first member, and the second fluid is between a plurality of the first members. When it sees in the flowing direction of the first fluid in at least one of the adjacent introduction side holes, which is a second flow path that flows. , The wall with the downstream inlet side hole, characterized in that a region overlapping the opening region of the upstream inlet side hole is present.

The heat exchanger of the present invention is a heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid, the heat exchanger having an introduction side hole on one end side, A plurality of first members, each having a wall having a discharge side hole on the other end side, wherein a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows; A second member for introducing the first fluid into the first member, and a second member for introducing the first fluid into the first member on one end side of the first member; And a third member for discharging the first fluid that has flowed through the first member, and the second fluid is between a plurality of the first members. When it sees in the flowing direction of the first fluid in at least one of the discharge side holes adjacent to each other, the second flow path flows. , The wall with the downstream discharge side hole, characterized in that a region overlapping the opening region of the upstream discharge side hole is present.

The heat exchanger of the present invention has excellent heat exchange efficiency.

It is a perspective view which shows an example of the heat exchanger of this embodiment. It is sectional drawing which shows an example of the heat exchanger of this embodiment. It is a perspective view which shows an example of the 1st member which comprises the heat exchanger of this embodiment. It is a perspective view which shows an example of the 2nd member and 3rd member which comprise the heat exchanger of this embodiment. It is a fragmentary sectional view showing an example of the heat exchanger of this embodiment. It is a fragmentary sectional view showing an example which expanded the 2nd member side in a heat exchanger of this embodiment. It is a fragmentary sectional view showing other examples which expanded the 2nd member side in a heat exchanger of this embodiment.

Hereinafter, the heat exchanger according to the present embodiment will be described with reference to the drawings. In the drawings, the same members are described with the same reference numerals.

FIG. 1 is a perspective view and FIG. 2 is a cross-sectional view showing an example of a heat exchanger according to the present embodiment. FIG. 3 is a perspective view showing an example of the first member constituting the heat exchanger of the present embodiment, and FIG. 4 shows the second member and the third member constituting the heat exchanger of the embodiment. It is a perspective view which shows an example. Furthermore, FIG. 5 is a partial cross-sectional view of the heat exchanger of the present embodiment, and FIGS. 6 and 7 are partial cross-sectional views in which the second member side in the heat exchanger of the present embodiment is enlarged.

First, the configuration of the heat exchanger according to the present embodiment will be described with reference to FIGS. 1 and 2. The heat exchanger 1 in the example shown in FIG. 1 includes a wall having an introduction side hole 5 on one end side and a discharge side hole 6 on the other end side, and a space connecting the introduction side hole 5 and the discharge side hole 6 is provided. A plurality of first members 2 are provided as first flow paths 8 through which the first fluid flows. Further, a second member 3 is provided which communicates with the introduction-side holes 5 at one end side of the plurality of first members 2 and introduces the first fluid into the first member 2. Furthermore, the 3rd member 4 for discharging | emitting the 1st fluid which communicated with the discharge side holes 6 in the other end side of several 1st member 2 and flowed through the 1st member 2 is provided. A space between the plurality of first members 2 is a second flow path 10 through which the second fluid flows. Here, the one end side can be rephrased as the upstream side of the first fluid, and the other end side can be rephrased as the downstream side of the first fluid.

In FIGS. 1 and 2, the heat exchanger 1 including three first members 2 is illustrated as an example, but is not limited thereto, and the number of the first members 2 is two or more. If it is. In addition, as the first fluid and the second fluid, a liquid, a gas, or the like can be used depending on the purpose. For example, the first fluid is a liquid such as water, and the second fluid is a gas such as a gas. can do.

In the heat exchanger 1 of the present embodiment, the first member 2, the second member 3, and the third member 4 constituting the heat exchanger 1 are made of ceramics. Thus, when the member is made of ceramic, the heat exchanger 1 is excellent in heat resistance and corrosion resistance. Here, the type of ceramic may be appropriately selected according to the characteristics of the fluid, such as oxide ceramics such as alumina ceramics and cordierite ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, etc. Non-oxide ceramics can be used.

And when the said member consists of silicon carbide ceramics in which content of silicon carbide exceeds 50 mass% among all the components which comprise ceramics, the heat exchange efficiency of the heat exchanger 1 is improved with high thermal conductivity. Can do. Moreover, since the raw material cost is cheap and easy to process when the alumina content is more than 50% by mass among all the components constituting the ceramic, the heat exchanger 1 is manufactured at a lower cost than other materials. be able to.

In the heat exchanger 1 shown in FIGS. 1 and 2, an example is shown in which a flange portion 16 having a first fluid introduction portion 11 and a discharge portion 12 is provided at the bottom. The path of the first fluid in this example will be described. First, the first fluid enters from the introduction part 11 of the flange part 16, passes through the introduction side flow path 7, passes through each introduction side hole 5, and flows through the first flow path 8 of each first member 2. After passing through the discharge side hole 6, it is discharged from the discharge unit 12 through the discharge side flow path 9.

By satisfying such a configuration, the heat exchanger 1 of the present embodiment is more efficient than the second fluid flowing through the second flow path 10, particularly while the first fluid flows through the first flow path 8. Heat exchange can be performed well.

Further, if a flow path connecting the introduction part 11 and the discharge part 12 is provided in the flange part 16, heat exchange can be performed also in the flange part 16, and the heat exchange efficiency of the heat exchanger 1 can be improved. it can. The flange portion 16 is not an essential component in the heat exchanger 1, and the opening of the second member 3 located at the lowest level in FIGS. 1 and 2 is used as the first fluid inlet, and the flange 16 is at the lowest level. The opening of the third member 4 positioned may be used as the first fluid discharge port.

Further, in the heat exchanger 1, the first fluid and the second fluid are arranged so as to be orthogonal flows, or the flows of the first fluid and the second fluid are arranged in the same direction. You can do it.

Although not shown in FIGS. 1 and 2, the first member 2 may be provided with a partition wall that can branch the first fluid. As described above, by providing the partition wall portion, the heat exchange efficiency can be improved by increasing the contact area with the first fluid.

Next, each member which comprises the heat exchanger of this embodiment is demonstrated using FIG. 3 and FIG. First, as shown in FIG. 3, the first member 2 has an introduction side hole 5 that communicates with the second member 3 and a discharge side hole 6 that communicates with the third member 4. FIG. 3 shows an example in which the introduction side hole 5 and the discharge side hole 6 are provided at positions corresponding to each other on the upper wall and the lower wall to form through holes. The first member 2 corresponds to the first member 2b and the first member 2c in FIGS. Further, the first member 2a arranged at the uppermost stage does not need to flow the first fluid further upward on the upstream side, and the first fluid does not flow from above on the downstream side. The introduction side hole 5 and the discharge side hole 6 are provided only on the lower wall of the walls constituting the one member 2a.

Next, the second member 3 and the third member 4 are, for example, cylindrical members as shown in FIG. The second member 3 and the third member 4 may be the first member as long as the first fluid can flow inside and has a height at which the second flow path 10 can be provided. The cross section perpendicular to the direction in which the fluid flows is not limited to a circular shape, and may be an elliptical shape, a triangular shape, a polygonal shape such as a quadrangular shape, or the like.

And in addition to the structure mentioned above, when the heat exchanger 1 of this embodiment is seen in the direction through which a 1st fluid flows in at least 1 of adjacent introduction side holes 5, it is a wall provided with a downstream introduction side hole. In addition, there is a region overlapping the opening region of the upstream introduction side hole. By satisfying such a configuration, when the first fluid flows through the introduction-side flow path 7, the first fluid collides with a region overlapping the opening region of the upstream introduction-side hole in the wall including the downstream introduction-side hole. As a result, a change occurs in the flow of the first fluid and a turbulent flow is generated. And the opportunity for the inner surface (hereinafter referred to as a turbulent flow region) of the flow path to be in contact with the generated turbulent flow increases with the first fluid. Therefore, the heat exchanger 1 of the present embodiment has excellent heat exchange efficiency.

Here, the adjacent introduction side holes 5 are, according to the heat exchanger 1 shown in FIG. 2, the introduction side hole 5a and the introduction side hole 5b, the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5c, and The introduction side hole 5d, the introduction side hole 5d, and the introduction side hole 5e are the two introduction side holes 5 that are adjacent to each other in the direction in which the first fluid flows.

Further, the upstream introduction side hole is the introduction side hole 5 located upstream in the direction in which the first fluid flows between the adjacent introduction side holes 5, and the downstream introduction side hole is the first introduction side hole 5. It is the introduction side hole 5 located downstream in the direction in which the fluid flows. For example, in the combination of the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5b is a downstream introduction side hole, and the introduction side hole 5c is an upstream introduction side hole. In the combination of the introduction side hole 5c and the introduction side hole 5d, the introduction side hole 5c is a downstream introduction side hole, and the introduction side hole 5d is an upstream introduction side hole. Thus, even the same introduction side hole 5 can be an upstream introduction side hole or a downstream introduction side hole depending on the combination.

Thus, as an example in which the adjacent introduction side holes 5 satisfy the above-described configuration, the adjacent introduction side holes 5 have the same opening shape, and the opening region of the upstream introduction side hole is the opening of the downstream introduction side hole. If the area is larger than the region or the opening shapes of the adjacent introduction side holes 5 may be different, the adjacent introduction side holes 5 have the same opening shape from the viewpoint of not slowing the flow rate of the fluid more than necessary. However, it is preferable that the center of the introduction side hole 5 is shifted in the direction intersecting the flow direction as seen in the flow direction of the first fluid. The opening shape of the introduction side hole 5 is not limited to the circular shape as shown in FIG. 3, and may be an elliptical shape, a triangular shape, a polygonal shape such as a quadrangular shape, or the like.

Next, in the adjacent introduction-side holes 5, when viewed in the direction in which the first fluid flows, the wall including the downstream introduction-side hole has a region that overlaps with the opening region of the upstream introduction-side hole. Will be described with reference to FIG. In addition, in FIG. 5, although the example in which the 1st member 2b is comprised from three walls is shown, it is not limited to this, The number of the walls which comprise the 1st member 2b is three or more It does not matter.

As shown in FIG. 5, when the adjacent introduction side holes 5 are the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5b is a downstream introduction side hole, and the introduction side hole 5c is an upstream introduction side hole. It is. And when it sees in the direction where the 1st fluid flows between adjacent introduction side holes 5, the area which overlaps with the opening area of an upstream introduction side hole exists in the wall provided with a downstream introduction side hole. When the opening region of the introduction side hole 5c that is the upstream introduction side hole is translated along the flow direction of the first fluid to the wall 13b having the downstream introduction side hole, the upstream introduction side hole is formed in the wall 13b. This refers to when there is a portion that overlaps the open area. Further, according to the above configuration, when the opening area of the introduction side hole 5c is translated toward the introduction side hole 5b along the flow direction of the first fluid, it overlaps with the opening area of the introduction side hole 5b. In other words, there are parts that do not match.

According to the example shown in FIG. 5, when a part of the first fluid that has passed through the second member 3b and the introduction side hole 5b is viewed in the direction in which the first fluid flows, the opening region of the introduction side hole 5c It collides with the wall 13b where the overlapping region exists, and the inner surface of the second member 3a adjacent to the collided portion and the inner surface of the first member 2b become a turbulent flow region. And since this turbulent flow area increases the chance of contact with the first fluid, the heat exchange efficiency of the heat exchanger 1 is improved.

In addition, since it demonstrated using FIG. 5, although the introduction side holes 5 which the 1st member 2b has were demonstrated, also in the other combination mentioned above, in the adjacent introduction side holes 5, it is 1st. When viewed in the direction of fluid flow, the same effect as described above can be obtained if there is an area overlapping the opening area of the upstream introduction side hole on the wall provided with the downstream introduction side hole. In addition, from the viewpoint of expanding the turbulent flow region, the overlapping region preferably has an area of 10% by area or more of the opening region of the upstream introduction side hole.

And although the introduction side holes 5 adjacent to each other have been described so far, similarly in the adjacent discharge side holes 6, in the direction in which the first fluid flows in at least one of the adjacent discharge side holes 6. When viewed, if there is an area overlapping the opening area of the upstream discharge side hole on the wall provided with the downstream discharge side hole, the same effect as described above can be obtained.

Further, in the heat exchanger 1 of the present embodiment, at least one of the plurality of first members 2 is at the inner edge of the first member 2 of the introduction side hole 5 located on the downstream side of the first fluid. It is preferable to have a chamfered portion on the center side of the first member 2.

The above configuration will be described with reference to FIG. In FIG. 6, the first fluid flows into the first member 2b from the lower introduction side hole 5c and branches into the first flow path 8 extending from one end side to the other end side and the upper introduction side hole 5b. Will flow. At this time, by having the chamfered portion 14 on the center side (right side in FIG. 6) of the first member 2b among the edges of the introduction side hole 5b in the wall 13b constituting the first member 2b, the first The fluid can be smoothly branched. Note that the chamfered portion 14 which is a chamfered portion is a portion where a corner is cut and a surface appears.

Thus, in the introduction side hole 5b located on the downstream side of the first fluid, the chamfered portion 14 is provided on the center side of the first member 2b among the inner side edges of the first member 2b. Since the first fluid can be smoothly branched, it is preferable that the turbulent flow is generated on the upstream side of the first fluid from the chamfered portion 14. If it becomes such a structure, since the 1st fluid which the turbulent flow will branch off smoothly and a turbulent flow area will spread, heat exchange efficiency can be improved further.

Although not shown, since the same can be said for the discharge-side flow path 9, at least one of the plurality of first members 2 is the discharge-side hole 6 positioned on the downstream side of the first fluid. The first fluid that has flowed through the first flow path 8 by having a chamfered portion on the center side of the first member 2 among the edges on the inner side of the first member 2, The first fluid flowing in from the discharge side hole 6 can be smoothly merged.

Further, in the heat exchanger 1 of the present embodiment, at least one of the plurality of first members 2 is an edge on the inner side of the first member 2 of the introduction side hole 5 located on the downstream side of the first fluid. It is preferable to have a portion projecting at a position on the center side of the first member 2 around. Hereinafter, the protruding portion will be described as the protruding portion 15.

The above configuration will be described with reference to FIG. In FIG. 7, the first fluid flows into the first member 2b from the lower introduction side hole 5c and branches to the first flow path 8 extending from one end side to the other end side and the upper introduction side hole 5b. Will flow. At this time, the first fluid is caused by having the protruding portion 15 at a position on the center side of the first member 2b, around the edge of the introduction side hole 5b in the wall 13b constituting the first member 2b. Since turbulent flow can be generated also when branching to the first flow path 8, the heat exchange efficiency can be further improved. Here, the projecting portion 15 is a reference surface when a surface of the wall 13b constituting the first member 2b excluding the periphery of the edge of the introduction side hole 5b is used as the reference surface. It is the part which protrudes 1 micrometer or more to the 1st flow path 8 side.

Although not shown, at least one of the plurality of first members 2 is around the edge on the inner side of the first member 2 in the introduction side hole 5 located on the downstream side of the first fluid. When the first member 2 has the protrusion 15 at the central position, the first fluid 8 flows when the first fluid flowing through the first channel 8 exceeds the protrusion 15. Since the turbulent flow is generated by the merging with the main stream flowing through and the upper discharge side hole 6 and the merging with the first fluid, the heat exchange efficiency is improved.

Moreover, the heat exchanger 1 of this embodiment is the arithmetic average of the inner surface of the introduction | transduction side hole 5 adjacent to the downstream of the 1st fluid in the 2nd member 3 from the arithmetic mean roughness Ra1 of the inner surface of the 2nd member 3. It is preferable that the roughness Ra2 is large.

This will be described with reference to FIG. In the configuration shown in FIG. 5, when the arithmetic average roughness Ra2 of the inner surface of the introduction side hole 5c is larger than the arithmetic average roughness Ra1 of the inner surface of the second member 3b, the second member 3b is connected to the introduction side hole 5c from the inside. Since a turbulent flow is generated when one fluid flows in, the heat exchange efficiency can be improved. In particular, it is preferable that the introduction side hole 5c is included in a turbulent flow region that is generated when a region that overlaps with the opening region of the upstream introduction side hole exists in the wall that includes the downstream introduction side hole.

Further, in the discharge-side flow path 9, the arithmetic average roughness Ra4 of the inner surface of the discharge-side hole 6 adjacent to the downstream side of the first fluid in the third member 4 from the arithmetic average roughness Ra3 of the inner surface of the third member 4. Even when the first fluid is large, a turbulent flow is generated when the first fluid flows from the inside of the third member 4 to the adjacent discharge side hole 6, so that the heat exchange efficiency can be improved.

Here, the arithmetic average roughness Ra1 to R4 described above can be obtained by measuring in accordance with JIS B 0601 (2013) using a contact type surface roughness meter. As measurement conditions, for example, the measurement length is 2.5 mm, the cutoff value is 0.8 mm, and the scanning speed of the stylus is set to 0.3 mm / second. Hereinafter, the discharge side channel 9 will be described in parentheses. Of the inner surface of the second member 3 (third member 4) and the inner surface of the introduction side hole 5 (discharge side hole 6), a portion close to the adjacent position is taken as a measurement location, and along the direction in which the first fluid flows. It is sufficient to measure at least three points in each direction, and to calculate the average values as arithmetic average roughness Ra1 (Ra3) and Ra2 (Ra4).

Further, the ratio Ra2 / Ra1 (Ra4 / Ra3) between the arithmetic average roughness Ra1 (Ra3) and the arithmetic average roughness Ra2 (Ra4) is preferably 3 or more and 30 or less. As described above, if Ra2 / Ra1 (Ra4 / Ra3) is 3 or more and 30 or less, a large turbulent flow can be generated in the first fluid without reducing the flow rate of the first fluid. Further, the heat exchange efficiency can be improved.

Next, an example of the manufacturing method of the heat exchanger of this embodiment will be described.

First, for the first member, for example, a sintering aid, a binder, a solvent, a dispersing agent, and the like are appropriately added to and mixed with the powder of the main component material (silicon carbide, alumina, etc.) to prepare a slurry. Then, using this slurry, a ceramic green sheet is formed by a doctor blade method.

In addition, as another method of forming the ceramic green sheet, the slurry is spray-dried and granulated by spray-drying granulation method (spray-drying method) to produce granules, and the obtained granules are formed by roll compaction. There is a way to do it. In addition, a ceramic green sheet may be obtained by using a granule to produce a clay instead of a mechanical press method, a cold isostatic pressing (CIP) method, or a slurry, and an extrusion method.

Next, using a mold or laser light, the obtained ceramic green sheet is processed into a desired outer shape, or after forming the introduction side hole and the discharge side hole, the slurry is applied to each. Then, the first member is obtained by laminating and pressing, and firing at a firing temperature matched to the main component raw material.

Here, in the adjacent introduction-side holes, when viewed in the direction in which the first fluid flows, the wall provided with the downstream introduction-side hole has a region overlapping with the opening region of the upstream introduction-side hole. When the ceramic green sheet on which the downstream introduction side hole is to be formed is overlapped with the ceramic green sheet on which the upstream introduction side hole is formed, there is a region that overlaps the opening area of the upstream introduction side hole on the ceramic green sheet. What is necessary is just to form a downstream introduction | transduction side hole so that it may remain.

Specifically, if the opening shape is the same, the downstream introduction side hole is provided so that the position from the outer side of the ceramic green sheet is different, or the position from the outer side of the ceramic green sheet is the same. You can make them different. Further, in the adjacent discharge side holes, when viewed in the direction in which the first fluid flows, the wall provided with the downstream discharge side hole has a region overlapping with the opening region of the upstream discharge side hole. In the above description, the introduction side hole may be replaced with the discharge side hole, and thus the description is omitted.

In addition, at least one of the plurality of first members is a central side of the first member among the inner side edges of the first member in the introduction side hole or the discharge side hole located on the downstream side of the first fluid. In order to have a chamfered portion, the shape of the blade of the die that contacts the corresponding edge at the time of forming the introduction side hole or the discharge side hole in the ceramic green sheet is tapered. Or the incident angle of the laser beam may be adjusted. Alternatively, after forming the introduction side hole or the discharge side hole, for example, a cone-shaped jig may be pressed against the corresponding edge to be pressed, or chamfered by cutting.

Further, at least one of the plurality of first members is an introduction side hole or a discharge side hole located on the downstream side of the first fluid. In order to have a portion protruding at the center side position, when the introduction side hole or the discharge side hole in the ceramic green sheet is formed by pressing with a mold, the mold used If the clearance between the blade and the die is adjusted, it is possible to form a portion protruding around the edge serving as a corresponding portion. Also, after the introduction side hole or the discharge side hole is provided in the ceramic green sheet, the protruding portion can be obtained by applying a paste having the same composition as that used for forming the ceramic green sheet around the corresponding edge. Can be formed. Furthermore, you may make it protrude by pressing at least one part of the edge used as the corresponding location in a ceramic green sheet with a jig etc. FIG.

Next, for the second member, the third member, and the flange portion, first, powders of main component materials (silicon carbide, alumina, etc.) constituting each member are added to a sintering aid, a binder, a solvent, a dispersant, and the like. Are added and mixed as appropriate to prepare a slurry. The slurry is then spray-dried and granulated by spray-drying granulation to produce granules, and a molded body having a desired shape is obtained using the obtained granules by mechanical press or cold isostatic pressing. The second member, the third member, and the flange portion can be obtained by firing after cutting and performing firing as necessary. In addition, you may grind as needed after baking.

Moreover, about the molded body used as the 2nd member and the 3rd member, you may obtain a molded object by the extrusion method using a clay instead of a slurry. Moreover, about the molded object used as a flange part, you may laminate | stack a ceramic green sheet similarly to the 1st member.

In order to make the arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member larger than the arithmetic average roughness Ra1 of the inner surface of the second member, Just do the method. For example, the arithmetic average roughness Ra1 of the inner surface of the second member is measured. In the formation of the introduction side hole, the arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member is a value larger than the arithmetic average roughness Ra1. Using the laser beam whose output is adjusted, an introduction side hole may be provided in the ceramic green sheet, a pressing die may be pressed after the introduction side hole is provided in the ceramic green sheet, or laser processing or blasting may be performed after firing.

In the above description, the arithmetic average roughness Ra4 of the discharge side hole adjacent to the downstream side of the first fluid in the third member is larger than the arithmetic average roughness Ra3 of the inner surface of the third member. Since the second member may be replaced with the third member, and the introduction side hole may be replaced with the discharge side hole, description thereof will be omitted.

Then, using the obtained first member, second member, third member, flange portion, an adhesive is applied to the joint portion in each member, and arranged so that the first fluid communicates with each member, A heat exchanger can be obtained by curing the adhesive by heat treatment. In addition, in the introduction side holes adjacent to the second member and the discharge side holes adjacent to the third member, a wall having a downstream introduction side hole (downstream discharge side hole) when viewed in the direction in which the first fluid flows. As described above, the position of the hole to be formed is shifted or the shape of the hole to be formed is changed as a form in which there is an area overlapping with the opening area of the upstream introduction side hole (upstream discharge side hole). Assuming that the hole shapes are the same, the first member adjacent to the second member or the third member may be joined in a shifted arrangement.

Moreover, in the heat exchanger, when the number of the first members is increased, the second member and the third member may be prepared and joined in accordance with the number of the first members.

Further, when the number of the first members is increased, the weight of each upper member is applied around the introduction side hole and the discharge side hole in the lower first member. The second member and the third member arranged in the above may be arranged with the central axis shifted in the direction in which the first fluid flows. As a result, it is possible to reduce the possibility of chipping or cracking around the introduction side hole and the discharge side hole in the lower first member due to the weight of each upper member.

In addition, as an adhesive agent used, it is preferable to use an inorganic adhesive agent as what is excellent in heat resistance and corrosion resistance. Examples of the inorganic adhesive include SiO ₂ —Al ₂ O ₃ —B ₂ O ₃ —RO-based glass (R: alkaline earth metal element) powder and powder obtained by mixing metal silicon powder and silicon carbide powder. A paste to be used may be used. If such a paste is used as an inorganic adhesive, it is possible to firmly join each other's members without deteriorating the members when heat treatment is performed, and because of excellent heat resistance and corrosion resistance, The reliability of the heat exchanger can be improved.

The present invention has been described in detail above. However, the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the scope of the present invention.

Further, the heat exchanger described above is not particularly limited as long as it performs heat exchange, and is suitable for, for example, heat exchangers for various laser devices, semiconductor elements, and semiconductor manufacturing devices. Can be used.

1: heat exchanger 2: first member 3: second member 4: third member 5: introduction side hole 6: discharge side hole 7: introduction side flow channel 8: first flow channel 9: discharge side flow channel
10: Second flow path
11: Introduction
12: Discharge section
13: Wall with inlet and outlet holes
14: Chamfer
15: Projection
16: Flange

Claims

A heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid,
The heat exchanger is
A wall having an introduction side hole on one end side and a discharge side hole on the other end side is provided, and a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows. A plurality of first members;
A second member for introducing the first fluid into the first member in communication with the introduction side holes on one end side of the plurality of first members;
A third member for discharging the first fluid that has flowed through the first member in communication with the discharge side holes on the other end side of the plurality of the first members;
A space between the plurality of first members is a second flow path through which the second fluid flows,
In at least one of the adjacent introduction side holes, when viewed in the direction in which the first fluid flows, there is a region overlapping the opening region of the upstream introduction side hole in the wall including the downstream introduction side hole. A heat exchanger characterized by having
A heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid,
The heat exchanger is
A wall having an introduction side hole on one end side and a discharge side hole on the other end side is provided, and a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows. A plurality of first members;
A second member for introducing the first fluid into the first member in communication with the introduction side holes on one end side of the plurality of first members;
A third member for discharging the first fluid that has flowed through the first member in communication with the discharge side holes on the other end side of the plurality of the first members;
A space between the plurality of first members is a second flow path through which the second fluid flows,
In at least one of the adjacent discharge side holes, when viewed in the direction in which the first fluid flows, there is an area overlapping the opening area of the upstream discharge side hole on the wall provided with the downstream discharge side hole. A heat exchanger characterized by having
At least one of the plurality of first members is formed on the inner side edge of the first member of the introduction side hole or the discharge side hole located on the downstream side of the first fluid. The heat exchanger according to claim 1, wherein the heat exchanger has a chamfered portion on the center side.
At least one of the plurality of first members is the first around the edge on the inner side of the first member of the introduction side hole or the discharge side hole located on the downstream side of the first fluid. The heat exchanger according to claim 1, wherein a projecting portion is provided at a position on a central side of the member.
The arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member is larger than the arithmetic average roughness Ra1 of the inner surface of the second member. The heat exchanger according to any one of claims 1 to 4.
The arithmetic average roughness Ra4 of the discharge side hole adjacent to the downstream side of the first fluid in the third member is larger than the arithmetic average roughness Ra3 of the inner surface of the third member. The heat exchanger according to claim 5.