JP6325674B2 - Heat exchanger - Google Patents

Heat exchanger Download PDF

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JP6325674B2
JP6325674B2 JP2016538401A JP2016538401A JP6325674B2 JP 6325674 B2 JP6325674 B2 JP 6325674B2 JP 2016538401 A JP2016538401 A JP 2016538401A JP 2016538401 A JP2016538401 A JP 2016538401A JP 6325674 B2 JP6325674 B2 JP 6325674B2
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side hole
fluid
introduction
heat exchanger
introduction side
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JPWO2016017697A1 (en
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森山　正幸
正幸 森山
石峯　裕作
裕作 石峯
和彦 藤尾
和彦 藤尾
敬一 関口
敬一 関口
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Kyocera Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
    • F28D1/053—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits the conduits being straight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
    • F28F13/08—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by varying the cross-section of the flow channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
    • F28F13/12—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/02—Header boxes; End plates

Description

本発明は、熱交換器に関する。   The present invention relates to a heat exchanger.

従来、冷却・加熱等の熱交換システムには熱交換器が用いられている。このような熱交換器の１例として、略平行に並べられた複数の長板と前記長板相互間のスリットからなり、前記長板のいくつかの表面に長手方向に連続して凹みが設けられた基板が複数積層され、隣接する前記基板の前記長板相互が接続されて管を構成するとともに、前記凹みが管内流路を構成し、かつ前記スリットが管外流路を構成してなる熱交換器が提案されている（例えば、特許文献１を参照。）。   Conventionally, heat exchangers are used in heat exchange systems such as cooling and heating. As an example of such a heat exchanger, a plurality of long plates arranged substantially in parallel and slits between the long plates are provided, and recesses are continuously provided in the longitudinal direction on some surfaces of the long plates. A plurality of stacked substrates, the long plates of the adjacent substrates are connected to each other to form a tube, the recess forms an in-tube flow path, and the slit forms an out-tube flow path. An exchanger has been proposed (see, for example, Patent Document 1).

特開2005−300062号公報JP 2005-300062 JP

今般の熱交換器には、さらに優れた熱交換効率を有する熱交換器が求められている。それゆえ、本発明の目的は、優れた熱交換効率を有する熱交換器を提供することにある。   A heat exchanger having a further excellent heat exchange efficiency is required for the current heat exchanger. Therefore, an object of the present invention is to provide a heat exchanger having excellent heat exchange efficiency.

本発明の熱交換器は、セラミックスからなり、第１の流体と第２の流体とで熱交換を行なう熱交換器であって、該熱交換器は、一端側に導入側孔を有し、他端側に排出側孔を有する壁を備え、前記導入側孔および前記排出側孔を繋ぐ空間が前記第１の流体が流れる第１流路とされた複数個の第１部材と、複数個の該第１部材の一端側で前記導入側孔同士と連通し、前記第１の流体を前記第１部材に導入するための第２部材と、複数個の前記第１部材の他端側で前記排出側孔同士と連通し、前記第１部材を流れた前記第１の流体を排出するための第３部材とを備え、複数個の前記第１部材同士の間が前記第２の流体が流れる第２流路とされており、隣り合う前記導入側孔同士の少なくとも１つにおいて、前記第１の流体の流れる方向に見たとき、下流導入側孔を備える前記壁に、上流導入側孔の開口領域と重なる領域が存在しており、前記第２部材の内面の算術平均粗さＲａ１より、前記第２部材における前記第１の流体の下流側に隣接する前記第１部材の前記導入側孔の内面の算術平均粗さＲａ２が大きいことを特徴とする。
The heat exchanger of the present invention is a heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid, the heat exchanger having an introduction side hole on one end side, A plurality of first members, each having a wall having a discharge side hole on the other end side, wherein a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows; A second member for introducing the first fluid into the first member, and a second member for introducing the first fluid into the first member on one end side of the first member; And a third member for discharging the first fluid that has flowed through the first member, and the second fluid is between a plurality of the first members. When it sees in the flowing direction of the first fluid in at least one of the adjacent introduction side holes, which is a second flow path that flows. Said wall comprising a downstream inlet side hole, a region overlapping the opening region of the upstream inlet side hole is present, than the arithmetic mean roughness Ra1 of the inner surface of said second member, said first fluid in said second member The arithmetic average roughness Ra2 of the inner surface of the introduction side hole of the first member adjacent to the downstream side of the first member is large .

本発明の熱交換器は、セラミックスからなり、第１の流体と第２の流体とで熱交換を行なう熱交換器であって、該熱交換器は、一端側に導入側孔を有し、他端側に排出側孔を有する壁を備え、前記導入側孔および前記排出側孔を繋ぐ空間が前記第１の流体が流れる第１流路とされた複数個の第１部材と、複数個の該第１部材の一端側で前記導入側孔同士と連通し、前記第１の流体を前記第１部材に導入するための第２部材と、複数個の前記第１部材の他端側で前記排出側孔同士と連通し、前記第１部材を流れた前記第１の流体を排出
するための第３部材とを備え、複数個の前記第１部材同士の間が前記第２の流体が流れる第２流路とされており、隣り合う前記排出側孔同士の少なくとも１つにおいて、前記第１の流体の流れる方向に見たとき、下流排出側孔を備える前記壁に、上流排出側孔の開口領域と重なる領域が存在しており、前記第３部材の内面の算術平均粗さＲａ３より、前記第３部材における前記第１の流体の下流側に隣接する前記第１部材の前記排出側孔の内面の算術平均粗さＲａ４が大きいことを特徴とする。 The heat exchanger of the present invention is a heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid, the heat exchanger having an introduction side hole on one end side, A plurality of first members, each having a wall having a discharge side hole on the other end side, wherein a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows; A second member for introducing the first fluid into the first member, and a second member for introducing the first fluid into the first member on one end side of the first member; And a third member for discharging the first fluid that has flowed through the first member, and the second fluid is between a plurality of the first members. When it sees in the flowing direction of the first fluid in at least one of the adjacent discharge side holes, which is a second flow path Said wall comprising a downstream discharge side hole, there are regions overlapping the opening region of the upstream discharge side hole, the third from the arithmetic mean roughness Ra3 of the inner surface of member, said first fluid in said third member The arithmetic average roughness Ra4 of the inner surface of the discharge side hole of the first member adjacent to the downstream side of the first member is large .

本発明の熱交換器は、優れた熱交換効率を有する。   The heat exchanger of the present invention has excellent heat exchange efficiency.

本実施形態の熱交換器の一例を示す斜視図である。It is a perspective view which shows an example of the heat exchanger of this embodiment. 本実施形態の熱交換器の一例を示す断面図である。It is sectional drawing which shows an example of the heat exchanger of this embodiment. 本実施形態の熱交換器を構成する第１部材の一例を示す斜視図である。It is a perspective view which shows an example of the 1st member which comprises the heat exchanger of this embodiment. 本実施形態の熱交換器を構成する第２部材および第３部材の一例を示す斜視図である。It is a perspective view which shows an example of the 2nd member and 3rd member which comprise the heat exchanger of this embodiment. 本実施形態の熱交換器の一例を示す部分断面図ある。It is a fragmentary sectional view showing an example of the heat exchanger of this embodiment. 本実施形態の熱交換器における第２部材側を拡大した一例を示す部分断面図である。It is a fragmentary sectional view showing an example which expanded the 2nd member side in a heat exchanger of this embodiment. 本実施形態の熱交換器における第２部材側を拡大した他の例を示す部分断面図である。It is a fragmentary sectional view showing other examples which expanded the 2nd member side in a heat exchanger of this embodiment.

以下、図面を用いて本実施形態の熱交換器について説明する。なお、図面において、同じ部材には同じ符号を付して説明する。   Hereinafter, the heat exchanger of this embodiment is demonstrated using drawing. In the drawings, the same members are described with the same reference numerals.

本実施形態の熱交換器の一例を示す、図１は斜視図であり、図２は断面図である。また、図３は、本実施形態の熱交換器を構成する第１部材の一例を示す斜視図であり、図４は、本実施形態の熱交換器を構成する第２部材および第３部材の一例を示す斜視図である。さらに、図５は、本実施形態の熱交換器の部分断面図であり、図６および図７は、本実施形態の熱交換器における第２部材側を拡大した部分断面図である。   FIG. 1 is a perspective view and FIG. 2 is a cross-sectional view showing an example of a heat exchanger according to the present embodiment. FIG. 3 is a perspective view showing an example of the first member constituting the heat exchanger of the present embodiment, and FIG. 4 shows the second member and the third member constituting the heat exchanger of the embodiment. It is a perspective view which shows an example. Furthermore, FIG. 5 is a partial cross-sectional view of the heat exchanger of the present embodiment, and FIGS. 6 and 7 are partial cross-sectional views in which the second member side in the heat exchanger of the present embodiment is enlarged.

まず、図１および図２を用いて、本実施形態の熱交換器の構成について説明する。図１に示す例の熱交換器１は、一端側に導入側孔５を有し、他端側に排出側孔６を有する壁を備え、導入側孔５および排出側孔６を繋ぐ空間が第１の流体が流れる第１流路８とされた複数個の第１部材２を備える。また、複数個の第１部材２の一端側で導入側孔５同士と連通し、第１の流体を第１部材２に導入するための第２部材３を備える。さらに、複数個の第１部材２の他端側で排出側孔６同士と連通し、第１部材２を流れた第１の流体を排出するための第３部材４を備える。そして、複数個の第１部材２同士の間が第２の流体が流れる第２流路10とされている。なお、ここでいう一端側とは、第１の流体の上流側と言い換えることができるものであり、他端側とは、第１の流体の下流側と言い換えることができるものである。   First, the structure of the heat exchanger of this embodiment is demonstrated using FIG. 1 and FIG. The heat exchanger 1 in the example shown in FIG. 1 includes a wall having an introduction side hole 5 on one end side and a discharge side hole 6 on the other end side, and a space connecting the introduction side hole 5 and the discharge side hole 6 is provided. A plurality of first members 2 are provided as first flow paths 8 through which the first fluid flows. Further, a second member 3 is provided which communicates with the introduction-side holes 5 at one end side of the plurality of first members 2 and introduces the first fluid into the first member 2. Furthermore, the 3rd member 4 for discharging | emitting the 1st fluid which communicated with the discharge side holes 6 in the other end side of several 1st member 2 and flowed through the 1st member 2 is provided. A space between the plurality of first members 2 is a second flow path 10 through which the second fluid flows. Here, the one end side can be rephrased as the upstream side of the first fluid, and the other end side can be rephrased as the downstream side of the first fluid.

そして、図１および図２においては、３個の第１部材２を備える熱交換器１を例に示しているが、これに限定されるものではなく、第１部材２の数は２個以上であればよい。また、第１の流体および第２の流体には、目的に応じて液体や気体等を用いることができ、例えば第１の流体を水等の液体とし、第２の流体をガス等の気体とすることができる。   In FIGS. 1 and 2, the heat exchanger 1 including three first members 2 is illustrated as an example, but is not limited thereto, and the number of the first members 2 is two or more. If it is. In addition, as the first fluid and the second fluid, a liquid, a gas, or the like can be used depending on the purpose. For example, the first fluid is a liquid such as water, and the second fluid is a gas such as a gas. can do.

本実施形態の熱交換器１は、熱交換器１を構成する第１部材２、第２部材３および第３部材４がセラミックスから構成されている。このように、上記部材がセラミックスからなることにより、熱交換器１は、耐熱性や耐腐食性に優れる。ここで、セラミックスの種類としては、流体の特性に合わせて適宜選択すればよく、アルミナ質セラミックスやコージェライト質セラミックス等の酸化物セラミックス、窒化珪素質セラミックスや窒化アルミニウム質セラミックスや炭化珪素質セラミックス等の非酸化物セラミックスを用いることができる。   In the heat exchanger 1 of the present embodiment, the first member 2, the second member 3, and the third member 4 constituting the heat exchanger 1 are made of ceramics. Thus, when the member is made of ceramic, the heat exchanger 1 is excellent in heat resistance and corrosion resistance. Here, the type of ceramic may be appropriately selected according to the characteristics of the fluid, such as oxide ceramics such as alumina ceramics and cordierite ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, etc. Non-oxide ceramics can be used.

そして、上記部材が、セラミックスを構成する全成分のうち、炭化珪素の含有量が50質量％を超える炭化珪素質セラミックスからなるときには、高い熱伝導率により熱交換器１の熱交換効率を高めることができる。また、セラミックスを構成する全成分のうち、アルミナの含有量が50質量％を超えるアルミナ質セラミックスからなるときには、原料代が安く加工しやすいため、他材質よりも安価に熱交換器１を製造することができる。   And when the said member consists of silicon carbide ceramics in which content of silicon carbide exceeds 50 mass% among all the components which comprise ceramics, the heat exchange efficiency of the heat exchanger 1 is improved with high thermal conductivity. Can do. Moreover, since the raw material cost is cheap and easy to process when the alumina content is more than 50% by mass among all the components constituting the ceramic, the heat exchanger 1 is manufactured at a lower cost than other materials. be able to.

図１および図２に示す熱交換器１においては、第１の流体の導入部11および排出部12を有するフランジ部16を最下段に備えている例を示している。この例における第１の流体の経路について説明する。まず、第１の流体は、フランジ部16の導入部11から入り、導入側流路７を通り、各導入側孔５を通過して各第１部材２の第１流路８を流れ、各排出側孔６を通過した後に排出側流路９を経て、排出部12から排出される。   In the heat exchanger 1 shown in FIGS. 1 and 2, an example is shown in which a flange portion 16 having a first fluid introduction portion 11 and a discharge portion 12 is provided at the lowermost stage. The path of the first fluid in this example will be described. First, the first fluid enters from the introduction part 11 of the flange part 16, passes through the introduction side flow path 7, passes through each introduction side hole 5, and flows through the first flow path 8 of each first member 2. After passing through the discharge side hole 6, it is discharged from the discharge unit 12 through the discharge side flow path 9.

このような構成を満たしていることにより、本実施形態の熱交換器１は、特に第１の流体が第１流路８を流れる間に、第２流路10を流れる第２の流体と効率よく熱交換を行なうことができる。   By satisfying such a configuration, the heat exchanger 1 of the present embodiment is more efficient than the second fluid flowing through the second flow path 10, particularly while the first fluid flows through the first flow path 8. Heat exchange can be performed well.

また、フランジ部16内において、導入部11と排出部12とを繋ぐ流路を設ければ、フランジ部16でも熱交換を行なうことができ、熱交換器１の熱交換効率を向上させることができる。なお、フランジ部16は、熱交換器１において、必須の構成ではなく、図１および図２における最下段に位置する第２部材３の開口部を第１の流体の導入口とし、最下段に位置する第３部材４の開口部を第１の流体の排出口としても構わない。   Further, if a flow path connecting the introduction part 11 and the discharge part 12 is provided in the flange part 16, heat exchange can be performed also in the flange part 16, and the heat exchange efficiency of the heat exchanger 1 can be improved. it can. The flange portion 16 is not an essential component in the heat exchanger 1, and the opening of the second member 3 located at the lowest level in FIGS. 1 and 2 is used as the first fluid inlet, and the flange 16 is at the lowest level. The opening of the third member 4 positioned may be used as the first fluid discharge port.

また、熱交換器１において、第１の流体と第２の流体とは、直交流となるように配置したり、第１の流体と第２の流体との流れが同じ方向となるように配置したりすることができる。   Further, in the heat exchanger 1, the first fluid and the second fluid are arranged so as to be orthogonal flows, or the flows of the first fluid and the second fluid are arranged in the same direction. You can do it.

また、図１および図２には示していないが、第１部材２において、第１の流体を分岐することができる隔壁部を設けてもよい。このように、隔壁部を設けることにより、第１の流体との接触面積を大きくすれば、熱交換効率の向上を図ることができる。   Although not shown in FIGS. 1 and 2, the first member 2 may be provided with a partition portion that can branch the first fluid. As described above, by providing the partition wall portion, the heat exchange efficiency can be improved by increasing the contact area with the first fluid.

次に、図３および図４を用いて本実施形態の熱交換器を構成する各部材について説明する。まず、第１部材２は、図３に示すように、第２部材３と連通する導入側孔５および第３部材４と連通する排出側孔６を有している。なお、図３においては、導入側孔５および排出側孔６が、上方の壁および下方の壁の互いに対応する位置に設けられて貫通孔となっている例を示しているが、この構成の第１部材２は、図１および図２における第１部材２ｂおよび第１部材２ｃに該当するものである。また、最上段に配置される第１部材２ａは、上流側においてさらに上方へ第１の流体を流す必要がなく、下流側において上方から第１の流体が流れてくることがないことから、第１部材２ａを構成する壁のうち下方の壁にのみ導入側孔５および排出側孔６を有するものである。   Next, each member which comprises the heat exchanger of this embodiment is demonstrated using FIG. 3 and FIG. First, as shown in FIG. 3, the first member 2 has an introduction side hole 5 that communicates with the second member 3 and a discharge side hole 6 that communicates with the third member 4. FIG. 3 shows an example in which the introduction side hole 5 and the discharge side hole 6 are provided at positions corresponding to each other on the upper wall and the lower wall to form through holes. The first member 2 corresponds to the first member 2b and the first member 2c in FIGS. Further, the first member 2a arranged at the uppermost stage does not need to flow the first fluid further upward on the upstream side, and the first fluid does not flow from above on the downstream side. The introduction side hole 5 and the discharge side hole 6 are provided only on the lower wall of the walls constituting the one member 2a.

次に、第２部材３および第３部材４は、図４に示すように、例えば、円筒状の部材である。なお、第２部材３および第３部材４は、第１の流体が内部を流れることができるとともに、第２流路10を設けることができる高さを有しているものであれば、第１の流体が流れる方向に垂直な断面は、円形状に限らず、楕円形状、三角形状、四角形状等の多角形状等であっても構わない。   Next, the 2nd member 3 and the 3rd member 4 are cylindrical members, for example, as shown in FIG. The second member 3 and the third member 4 may be the first member as long as the first fluid can flow inside and has a height at which the second flow path 10 can be provided. The cross section perpendicular to the direction in which the fluid flows is not limited to a circular shape, and may be an elliptical shape, a triangular shape, a polygonal shape such as a quadrangular shape, or the like.

そして、上述した構成に加えて本実施形態の熱交換器１は、隣り合う導入側孔５同士の少なくとも１つにおいて、第１の流体の流れる方向に見たとき、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在している。このような構成を満たしていることにより、第１の流体が導入側流路７を流れる際、下流導入側孔を備える壁における上流導入側孔の開口領域と重なる領域に第１の流体は衝突することとなり、第１の流体の流れに変化が生じて乱流が発生することとなる。そして、発生した乱流が接触する流路の内面（以下、乱流領域という。）は、第１の流体と接触する機会が増えることなる。それゆえ、本実施形態の熱交換器１は、優れた熱交換効率を有する。   And in addition to the structure mentioned above, when the heat exchanger 1 of this embodiment is seen in the direction through which a 1st fluid flows in at least 1 of adjacent introduction side holes 5, it is a wall provided with a downstream introduction side hole. In addition, there is a region overlapping the opening region of the upstream introduction side hole. By satisfying such a configuration, when the first fluid flows through the introduction-side flow path 7, the first fluid collides with a region overlapping the opening region of the upstream introduction-side hole in the wall including the downstream introduction-side hole. As a result, a change occurs in the flow of the first fluid and a turbulent flow is generated. And the opportunity for the inner surface (hereinafter referred to as a turbulent flow region) of the flow path to be in contact with the generated turbulent flow increases with the first fluid. Therefore, the heat exchanger 1 of the present embodiment has excellent heat exchange efficiency.

ここで、隣り合う導入側孔５同士とは、図２に示す熱交換器１によれば、導入側孔５ａおよび導入側孔５ｂ、導入側孔５ｂおよび導入側孔５ｃ、導入側孔５ｃおよび導入側孔５ｄ、導入側孔５ｄおよび導入側孔５ｅのことであり、第１の流体が流れる方向において隣り合う位置にある２つの導入側孔５のことである。   Here, the adjacent introduction side holes 5 are, according to the heat exchanger 1 shown in FIG. 2, the introduction side hole 5a and the introduction side hole 5b, the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5c, and The introduction side hole 5d, the introduction side hole 5d, and the introduction side hole 5e are the two introduction side holes 5 that are adjacent to each other in the direction in which the first fluid flows.

また、上流導入側孔とは、隣り合う導入側孔５同士において、第１の流体の流れる方向の上流に位置する方の導入側孔５のことであり、下流導入側孔とは、第１の流体の流れる方向の下流に位置する方の導入側孔５のことである。例えば、導入側孔５ｂおよび導入側孔５ｃの組み合わせでは、導入側孔５ｂが下流導入側孔、導入側孔５ｃが上流導入側孔である。また、導入側孔５ｃおよび導入側孔５ｄの組み合わせでは、導入側孔５ｃが下流導入側孔、導入側孔５ｄが上流導入側孔となる。このように、同じ導入側孔５であっても、組み合わせによって、上流導入側孔にも下流導入側孔にもなりうる。   Further, the upstream introduction side hole is the introduction side hole 5 located upstream in the direction in which the first fluid flows between the adjacent introduction side holes 5, and the downstream introduction side hole is the first introduction side hole 5. It is the introduction side hole 5 located downstream in the direction in which the fluid flows. For example, in the combination of the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5b is a downstream introduction side hole, and the introduction side hole 5c is an upstream introduction side hole. In the combination of the introduction side hole 5c and the introduction side hole 5d, the introduction side hole 5c is a downstream introduction side hole, and the introduction side hole 5d is an upstream introduction side hole. Thus, even the same introduction side hole 5 can be an upstream introduction side hole or a downstream introduction side hole depending on the combination.

このように、隣り合う導入側孔５同士が上述した構成を満たす例としては、隣り合う導入側孔５同士が同じ開口形状であって、上流導入側孔の開口領域が下流導入側孔の開口領域よりも大きい場合や、隣り合う導入側孔５同士の開口形状自体が異なっている場合があるが、流体の流速を必要以上に遅くしない観点から、隣り合う導入側孔５同士が同じ開口形状であるものの導入側孔５の中心が第１の流体の流れる方向に見て、流れる方向に交差する方向にずれている場合が好ましい。なお、導入側孔５の開口形状としては、図３に示すような円形状に限らず、楕円形状、三角形状、四角形状等の多角形状等であっても構わない。   Thus, as an example in which the adjacent introduction side holes 5 satisfy the above-described configuration, the adjacent introduction side holes 5 have the same opening shape, and the opening region of the upstream introduction side hole is the opening of the downstream introduction side hole. If the area is larger than the region or the opening shapes of the adjacent introduction side holes 5 may be different, the adjacent introduction side holes 5 have the same opening shape from the viewpoint of not slowing the flow rate of the fluid more than necessary. However, it is preferable that the center of the introduction side hole 5 is shifted in the direction intersecting the flow direction as seen in the flow direction of the first fluid. The opening shape of the introduction side hole 5 is not limited to the circular shape as shown in FIG. 3, and may be an elliptical shape, a triangular shape, a polygonal shape such as a quadrangular shape, or the like.

次に、隣り合う導入側孔５同士において、第１の流体の流れる方向に見たとき、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在しているという構成に関して、図５を用いて説明する。なお、図５においては、第１部材２ｂが３つの壁から構成されている例を示しているが、これに限定されるものではなく、第１部材２ｂを構成する壁の数は３つ以上であっても構わない。   Next, in the adjacent introduction-side holes 5, when viewed in the direction in which the first fluid flows, the wall including the downstream introduction-side hole has a region that overlaps with the opening region of the upstream introduction-side hole. Will be described with reference to FIG. In addition, in FIG. 5, although the example in which the 1st member 2b is comprised from three walls is shown, it is not limited to this, The number of the walls which comprise the 1st member 2b is three or more It does not matter.

図５に示すように、隣り合う導入側孔５同士が、導入側孔５ｂおよび導入側孔５ｃであるとき、導入側孔５ｂが下流導入側孔であり、導入側孔５ｃが上流導入側孔である。そして、隣り合う導入側孔５同士において、第１の流体の流れる方向に見たとき、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在しているというのは、上流導入側孔である導入側孔５ｃの開口領域を、第１の流体の流れる方向に沿って、下流導入側孔を備える壁13ｂまで平行移動させたとき、壁13ｂに上流導入側孔の開口領域と重なる部分が存在しているときのことを指す。また、上記構成によれば、導入側孔５ｃの開口領域を、第１の流体の流れる方向に沿って導入側孔５ｂに向かって平行移動させたときに、導入側孔５ｂの開口領域と重なり合わない部分が存在するとも言い換えることができる。   As shown in FIG. 5, when the adjacent introduction side holes 5 are the introduction side hole 5b and the introduction side hole 5c, the introduction side hole 5b is a downstream introduction side hole, and the introduction side hole 5c is an upstream introduction side hole. It is. And when it sees in the direction where the 1st fluid flows between adjacent introduction side holes 5, the area which overlaps with the opening area of an upstream introduction side hole exists in the wall provided with a downstream introduction side hole. When the opening region of the introduction side hole 5c that is the upstream introduction side hole is translated along the flow direction of the first fluid to the wall 13b having the downstream introduction side hole, the upstream introduction side hole is formed in the wall 13b. This refers to when there is a portion that overlaps the open area. Further, according to the above configuration, when the opening area of the introduction side hole 5c is translated toward the introduction side hole 5b along the flow direction of the first fluid, it overlaps with the opening area of the introduction side hole 5b. In other words, there are parts that do not match.

図５に示す例によれば、第２部材３ｂおよび導入側孔５ｂを通過した第１の流体の一部が、第１の流体の流れる方向に見たとき、導入側孔５ｃの開口領域と重なる領域が存在している壁13ｂに衝突し、衝突した部分に隣接する第２部材３ａの内面や、第１部材２ｂの内面が乱流領域となる。そして、この乱流領域は、第１の流体と接触する機会が増えることから、熱交換器１の熱交換効率が向上する。   According to the example shown in FIG. 5, when a part of the first fluid that has passed through the second member 3b and the introduction side hole 5b is viewed in the direction in which the first fluid flows, the opening region of the introduction side hole 5c It collides with the wall 13b where the overlapping region exists, and the inner surface of the second member 3a adjacent to the collided portion and the inner surface of the first member 2b become a turbulent flow region. And since this turbulent flow area increases the chance of contact with the first fluid, the heat exchange efficiency of the heat exchanger 1 is improved.

なお、図５を用いて説明したために、第１部材２ｂが有している導入側孔５同士について説明したが、上述した他の組み合わせにおいても、隣り合う導入側孔５同士において、第１の流体の流れる方向に見たとき、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在していれば、上述したのと同様の効果を得ることができる。また、乱流領域を広げる観点から、上記の重なる領域は、上流導入側孔の開口領域の１０面積％以上の面積を有していることが好ましい。   In addition, since it demonstrated using FIG. 5, although the introduction side holes 5 which the 1st member 2b has were demonstrated, also in the other combination mentioned above, in the adjacent introduction side holes 5, it is 1st. When viewed in the direction of fluid flow, the same effect as described above can be obtained if there is an area overlapping the opening area of the upstream introduction side hole on the wall provided with the downstream introduction side hole. In addition, from the viewpoint of expanding the turbulent flow region, the overlapping region preferably has an area of 10% by area or more of the opening region of the upstream introduction side hole.

そして、ここまで隣り合う導入側孔５同士について説明してきたが、隣り合う排出側孔６同士においても同様に、隣り合う排出側孔６同士の少なくとも１つにおいて、第１の流体の流れる方向に見たとき、下流排出側孔を備える壁に、上流排出側孔の開口領域と重なる領域が存在すれば、上述したのと同様の効果を得ることができる。   And although the introduction side holes 5 adjacent to each other have been described so far, similarly in the adjacent discharge side holes 6, in the direction in which the first fluid flows in at least one of the adjacent discharge side holes 6. When viewed, if there is an area overlapping the opening area of the upstream discharge side hole on the wall provided with the downstream discharge side hole, the same effect as described above can be obtained.

また、本実施形態の熱交換器１は、複数個の第１部材２のうち少なくとも１つが、第１の流体の下流側に位置する導入側孔５の第１部材２の内部側の縁における、第１部材２の中央側に、面取り状の部位を有していることが好適である。   Further, in the heat exchanger 1 of the present embodiment, at least one of the plurality of first members 2 is at the inner edge of the first member 2 of the introduction side hole 5 located on the downstream side of the first fluid. It is preferable to have a chamfered portion on the center side of the first member 2.

上記構成について図６を用いて説明する。図６において、第１の流体は、下方の導入側孔５ｃから第１部材２ｂ内に流入し、一端側から他端側に延びる第１流路８と、上方の導入側孔５ｂとへ分岐して流れることとなる。このとき、第１部材２ｂを構成する壁13ｂにおける導入側孔５ｂの縁のうち、第１部材２ｂの中央側（図６における右側）に面取り部14を有していることにより、第１の流体の分岐をスムーズに行なうことができる。なお、面取り状の部位である面取り部14とは、縁である角部が削られて面が現れている部分のことである。   The above configuration will be described with reference to FIG. In FIG. 6, the first fluid flows into the first member 2b from the lower introduction side hole 5c and branches into the first flow path 8 extending from one end side to the other end side and the upper introduction side hole 5b. Will flow. At this time, by having the chamfered portion 14 on the center side (right side in FIG. 6) of the first member 2b among the edges of the introduction side hole 5b in the wall 13b constituting the first member 2b, the first The fluid can be smoothly branched. Note that the chamfered portion 14 which is a chamfered portion is a portion where a corner is cut and a surface appears.

このように、第１の流体の下流側に位置する導入側孔５ｂにおいて、第１部材２ｂの内部側の縁のうち、第１部材２ｂの中央側に面取り部14を有していることにより、第１の流体の分岐をスムーズに行なうことができることから、面取り部14よりも第１の流体の上流側において乱流が生じる構成とされていることが好適である。このような構成となっていれば、乱流の生じた第１の流体がスムーズに分岐され、乱流領域が拡がることとなることから、さらに熱交換効率を向上させることができる。   Thus, in the introduction side hole 5b located on the downstream side of the first fluid, the chamfered portion 14 is provided on the center side of the first member 2b among the inner side edges of the first member 2b. Since the first fluid can be smoothly branched, it is preferable that the turbulent flow is generated on the upstream side of the first fluid from the chamfered portion 14. If it becomes such a structure, since the 1st fluid which the turbulent flow will branch off smoothly and a turbulent flow area will spread, heat exchange efficiency can be improved further.

また、図示していないが、排出側流路９においても同様のことが言えることから、複数個の第１部材２のうち少なくとも１つが、第１の流体の下流側に位置する排出側孔６において、第１部材２の内部側の縁のうち、第１部材２の中央側に面取り状の部位を有していることにより、第１流路８を流れてきた第１の流体と、上方の排出側孔６から流入してきた第１の流体との合流をスムーズに行なうことができる。   Although not shown, since the same can be said for the discharge-side flow path 9, at least one of the plurality of first members 2 is the discharge-side hole 6 positioned on the downstream side of the first fluid. The first fluid that has flowed through the first flow path 8 by having a chamfered portion on the center side of the first member 2 among the edges on the inner side of the first member 2, The first fluid flowing in from the discharge side hole 6 can be smoothly merged.

また、本実施形態の熱交換器１は、複数個の第１部材２のうち少なくとも１つが、第１の流体の下流側に位置する導入側孔５の第１部材２の内部側の縁の周りにおける、第１部材２の中央側の位置に突出している部位を有していることが好適である。以降では、この突出している部位を突出部15として説明する。   Further, in the heat exchanger 1 of the present embodiment, at least one of the plurality of first members 2 is an edge on the inner side of the first member 2 of the introduction side hole 5 located on the downstream side of the first fluid. It is preferable to have a portion projecting at a position on the center side of the first member 2 around. Hereinafter, the protruding portion will be described as the protruding portion 15.

上記構成について図７を用いて説明する。図７において、第１の流体は、下方の導入側孔５ｃから第１部材２ｂ内に流入し、一端側から他端側に延びる第１流路８と、上方の導入側孔５ｂとへ分岐して流れることとなる。このとき、第１部材２ｂを構成する壁13ｂにおける導入側孔５ｂの縁の周りのうち、第１部材２ｂの中央側の位置に突出部15を有していることにより、第１の流体が第１流路８へ分岐する際にも乱流を発生させることができるため、さらに熱交換効率を向上させることができる。ここで、突出部15とは、第１部材２ｂを構成する壁13bにおいて、この壁13bの内面のうち導入側孔５ｂの縁の周りを除いた面を基準面とした際に、この基準面よりも第１流路８側に１μｍ以上突出している部位のことである。   The above configuration will be described with reference to FIG. In FIG. 7, the first fluid flows into the first member 2b from the lower introduction side hole 5c and branches to the first flow path 8 extending from one end side to the other end side and the upper introduction side hole 5b. Will flow. At this time, the first fluid is caused by having the protruding portion 15 at a position on the center side of the first member 2b, around the edge of the introduction side hole 5b in the wall 13b constituting the first member 2b. Since turbulent flow can be generated also when branching to the first flow path 8, the heat exchange efficiency can be further improved. Here, the projecting portion 15 is a reference surface when a surface of the wall 13b constituting the first member 2b excluding the periphery of the edge of the introduction side hole 5b is used as the reference surface. It is the part which protrudes 1 micrometer or more to the 1st flow path 8 side.

また、図示していないが、複数個の第１部材２のうち少なくとも１つが、第１の流体の下流側に位置する導入側孔５において、第１部材２の内部側の縁の周りのうち、第１部材２の中央側の位置に突出部15を有している場合には、第１流路８を流れてきた第１の流体が突出部15を越える際に、第１流路８を流れる本流との合流および上方の排出側孔６から流入してき第１の流体と合流により乱流が発生するため、熱交換効率が向上する。   Although not shown, at least one of the plurality of first members 2 is around the edge on the inner side of the first member 2 in the introduction side hole 5 located on the downstream side of the first fluid. When the first member 2 has the protrusion 15 at the central position, the first fluid 8 flows when the first fluid flowing through the first channel 8 exceeds the protrusion 15. Since the turbulent flow is generated by the merging with the main stream flowing through and the upper discharge side hole 6 and the merging with the first fluid, the heat exchange efficiency is improved.

また、本実施形態の熱交換器１は、第２部材３の内面の算術平均粗さＲａ１より、第２部材３における第１の流体の下流側に隣接する導入側孔５の内面の算術平均粗さＲａ２が大きいことが好適である。   Moreover, the heat exchanger 1 of this embodiment is the arithmetic average of the inner surface of the introduction | transduction side hole 5 adjacent to the downstream of the 1st fluid in the 2nd member 3 from the arithmetic mean roughness Ra1 of the inner surface of the 2nd member 3. It is preferable that the roughness Ra2 is large.

図５を用いて説明する。図５に示す構成において、第２部材３ｂの内面の算術平均粗さＲａ１より、導入側孔５ｃの内面の算術平均粗さＲａ２が大きいときには、第２部材３ｂの内部から導入側孔５ｃに第１の流体が流入する際に乱流が発生するため、熱交換効率を向上させることができる。特に、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在することによって生じる乱流領域に、導入側孔５ｃが含まれる構成であることが好適である。   This will be described with reference to FIG. In the configuration shown in FIG. 5, when the arithmetic average roughness Ra2 of the inner surface of the introduction side hole 5c is larger than the arithmetic average roughness Ra1 of the inner surface of the second member 3b, the second member 3b is connected to the introduction side hole 5c from the inside. Since a turbulent flow is generated when one fluid flows in, the heat exchange efficiency can be improved. In particular, it is preferable that the introduction side hole 5c is included in a turbulent flow region that is generated when a region that overlaps with the opening region of the upstream introduction side hole exists in the wall that includes the downstream introduction side hole.

また、排出側流路９において、第３部材４の内面の算術平均粗さＲａ３より、第３部材４における第１の流体の下流側に隣接する排出側孔６の内面の算術平均粗さＲａ４が大きい場合にも、第３部材４の内部から隣接する排出側孔６に第１の流体が流入する際に乱流が発生するため、熱交換効率を向上させることができる。   Further, in the discharge-side flow path 9, the arithmetic average roughness Ra4 of the inner surface of the discharge-side hole 6 adjacent to the downstream side of the first fluid in the third member 4 from the arithmetic average roughness Ra3 of the inner surface of the third member 4. Even when the first fluid is large, a turbulent flow is generated when the first fluid flows from the inside of the third member 4 to the adjacent discharge side hole 6, so that the heat exchange efficiency can be improved.

ここで、上述の算術平均粗さＲａ１〜Ｒ４は、接触型の表面粗さ計を用い、ＪＩＳ Ｂ 0601（2013）に準拠して測定することにより求めることができる。測定条件としては、例えば、測定長さを2.5ｍｍ、カットオフ値を0.8ｍｍとし、触針の走査速度を0.3ｍｍ／秒に設定して測定すればよい。以下、排出側流路９に関してはカッコ内に記載する。そして、第２部材３（第３部材４）の内面および導入側孔５（排出側孔６）の内面のうち、それぞれ隣接位置に近い部分を測定箇所とし、第１の流体が流れる方向に沿った方向に、それぞれ少なくとも３ヵ所測定し、この平均値を算術平均粗さＲａ１（Ｒａ３）およびＲａ２（Ｒａ４）とすればよい。   Here, the arithmetic average roughness Ra1 to R4 can be obtained by measuring in accordance with JIS B 0601 (2013) using a contact-type surface roughness meter. As measurement conditions, for example, the measurement length is 2.5 mm, the cutoff value is 0.8 mm, and the scanning speed of the stylus is set to 0.3 mm / second. Hereinafter, the discharge side channel 9 will be described in parentheses. Of the inner surface of the second member 3 (third member 4) and the inner surface of the introduction side hole 5 (discharge side hole 6), a portion close to the adjacent position is taken as a measurement location, and along the direction in which the first fluid flows. It is sufficient to measure at least three points in each direction, and to calculate the average values as arithmetic average roughness Ra1 (Ra3) and Ra2 (Ra4).

また、算術平均粗さＲａ１（Ｒａ３）と、算術平均粗さＲａ２（Ｒａ４）との比率Ｒａ２／Ｒａ１（Ｒａ４／Ｒａ３）が３以上30以下であることが好ましい。このように、Ｒａ２／Ｒａ１（Ｒａ４／Ｒａ３）が３以上30以下であるならば、第１の流体が流れる速度を低下させずに、第１の流体に大きな乱流を発生させることができるため、さらに熱交換効率を向上させることができる。   Further, the ratio Ra2 / Ra1 (Ra4 / Ra3) between the arithmetic average roughness Ra1 (Ra3) and the arithmetic average roughness Ra2 (Ra4) is preferably 3 or more and 30 or less. As described above, if Ra2 / Ra1 (Ra4 / Ra3) is 3 or more and 30 or less, a large turbulent flow can be generated in the first fluid without reducing the flow rate of the first fluid. Further, the heat exchange efficiency can be improved.

次に、本実施形態の熱交換器の製造方法の一例について説明する。   Next, an example of the manufacturing method of the heat exchanger of this embodiment is demonstrated.

まず、第１部材については、例えば、主成分原料（炭化珪素、アルミナ等）の粉末に、焼結助剤、バインダ、溶媒および分散剤等を適宜添加し混合してスラリーを作製する。そして、このスラリーを用いて、ドクターブレード法によりセラミックグリーンシートを形成する。   First, for the first member, for example, a sintering aid, a binder, a solvent, a dispersant, and the like are appropriately added to and mixed with the powder of the main component material (silicon carbide, alumina, etc.) to prepare a slurry. Then, using this slurry, a ceramic green sheet is formed by a doctor blade method.

なお、セラミックグリーンシートを形成する他の方法としては、スラリーを噴霧乾燥造粒法（スプレードライ法）により噴霧乾燥して造粒することによって顆粒を作製し、得られた顆粒をロールコンパクションにより成形する方法がある。また、顆粒を用いて、メカプレス法や冷間静水圧加圧成形（ＣＩＰ）法、または、スラリーの代わりに坏土を作製して、押出成形法によってセラミックグリーンシートを得てもよい。   In addition, as another method of forming the ceramic green sheet, the slurry is spray-dried and granulated by spray-drying granulation method (spray-drying method) to produce granules, and the obtained granules are formed by roll compaction. There is a way to do it. In addition, a ceramic green sheet may be obtained by using a granule to produce a clay instead of a mechanical press method, a cold isostatic pressing (CIP) method, or a slurry, and an extrusion method.

次に、金型もしくはレーザ光を用いて、得られたセラミックグリーンシートを所望の外形状に加工したり、導入側孔および排出側孔を形成する加工を施した後、それぞれに上記スラリーを塗布して積層して加圧し、主成分原料に合わせた焼成温度で焼成することで、第１部材を得る。   Next, using a mold or laser light, the obtained ceramic green sheet is processed into a desired outer shape, or after forming the introduction side hole and the discharge side hole, the slurry is applied to each. Then, the first member is obtained by laminating and pressing, and firing at a firing temperature matched to the main component raw material.

ここで、隣接する導入側孔同士において、第１の流体の流れる方向に見たとき、下流導入側孔を備える壁に、上流導入側孔の開口領域と重なる領域が存在するものとするには、上流導入側孔を形成したセラミックグリーンシートに対して、下流導入側孔を形成する予定のセラミックグリーンシートを重ねて見たときに、セラミックグリーンシートに上流導入側孔の開口領域と重なる領域が残るように下流導入側孔を形成すればよい。   Here, in the adjacent introduction-side holes, when viewed in the direction in which the first fluid flows, the wall provided with the downstream introduction-side hole has a region overlapping with the opening region of the upstream introduction-side hole. When the ceramic green sheet on which the downstream introduction side hole is to be formed is overlapped with the ceramic green sheet on which the upstream introduction side hole is formed, there is a region that overlaps the opening area of the upstream introduction side hole on the ceramic green sheet. What is necessary is just to form a downstream introduction | transduction side hole so that it may remain.

具体的には、開口形状が同じであれば、セラミックグリーンシートの外辺からの位置が異なるように、下流導入側孔を設けたり、セラミックグリーンシートの外辺からの位置を同じとして、開口形状を異ならせたりすればよい。また、隣接する排出側孔同士において、第１の流体の流れる方向に見たとき、下流排出側孔を備える壁に、上流排出側孔の開口領域と重なる領域が存在するものとするには、上述した記載において、導入側孔を排出側孔に置き換えればよいため、説明は省略する。   Specifically, if the opening shape is the same, the downstream introduction side hole is provided so that the position from the outer side of the ceramic green sheet is different, or the position from the outer side of the ceramic green sheet is the same. You can make them different. Further, in the adjacent discharge side holes, when viewed in the direction in which the first fluid flows, the wall provided with the downstream discharge side hole has a region overlapping with the opening region of the upstream discharge side hole. In the above description, the introduction side hole may be replaced with the discharge side hole, and thus the description is omitted.

また、複数個の第１部材のうち少なくとも１つが、第１の流体の下流側に位置する導入側孔または排出側孔において、第１部材の内部側の縁のうち、第１部材の中央側に面取り状の部位を有しているものとするには、上述したセラミックグリーンシートにおける導入側孔または排出側孔の形成時において、対応箇所となる縁に接する金型の刃の形状をテーパ状にしたり、レーザ光の入射角度を調節したりすればよい。あるいは、導入側孔または排出側孔を形成した後に、例えば、錐状の治具を対応箇所となる縁に押し当てて押圧したり、切削加工によって面取りしたりすればよい。   In addition, at least one of the plurality of first members is a central side of the first member among the inner side edges of the first member in the introduction side hole or the discharge side hole located on the downstream side of the first fluid. In order to have a chamfered portion, the shape of the blade of the die that contacts the corresponding edge at the time of forming the introduction side hole or the discharge side hole in the ceramic green sheet is tapered. Or the incident angle of the laser beam may be adjusted. Alternatively, after forming the introduction side hole or the discharge side hole, for example, a cone-shaped jig may be pressed against the corresponding edge to be pressed, or chamfered by cutting.

また、複数個の第１部材のうち少なくとも１つが、第１の流体の下流側に位置する導入側孔または排出側孔において、第１部材の内部側の縁の周りのうち、第１部材の中央側の位置に突出している部位を有しているものとするには、上述したセラミックグリーンシートにおける導入側孔または排出側孔を金型によりプレスして形成するときに、使用する金型の刃と臼とのクリアランスを調節すれば、対応箇所となる縁の周りに突出した部位を形成することができる。また、セラミックグリーンシートに導入側孔または排出側孔を設けた後、セラミックグリーンシートの成形に用いたのと同じ組成のペーストを対応箇所となる縁の周りに塗布することによっても、突出した部位を形成することができる。さらに、セラミックグリーンシートにおける対応箇所となる縁の少なくとも一部を冶具等により押圧することにより突出させても構わない。   Further, at least one of the plurality of first members is an introduction side hole or a discharge side hole located on the downstream side of the first fluid. In order to have a portion protruding at the center side position, when the introduction side hole or the discharge side hole in the ceramic green sheet is formed by pressing with a mold, the mold used If the clearance between the blade and the die is adjusted, it is possible to form a portion protruding around the edge serving as a corresponding portion. Also, after the introduction side hole or the discharge side hole is provided in the ceramic green sheet, the protruding portion can be obtained by applying a paste having the same composition as that used for forming the ceramic green sheet around the corresponding edge. Can be formed. Furthermore, you may make it protrude by pressing at least one part of the edge used as the corresponding location in a ceramic green sheet with a jig etc. FIG.

次に、第２部材、第３部材およびフランジ部については、まず、それぞれの部材を構成する主成分原料（炭化珪素、アルミナ等）の粉末に、焼結助剤、バインダ、溶媒および分散剤等を適宜添加し混合してスラリーを作製する。そして、このスラリーを噴霧乾燥造粒法により噴霧乾燥して造粒することによって顆粒を作製し、得られた顆粒を用いて、メカプレス法や冷間静水圧加圧成形法により所望形状の成形体を作製し、必要に応じて切削加工を施した後、焼成することにより第２部材、第３部材およびフランジ部を得ることができる。なお、焼成後に必要に応じて研削加工を施してもよい。   Next, for the second member, the third member, and the flange portion, first, powders of main component materials (silicon carbide, alumina, etc.) constituting each member are added to a sintering aid, a binder, a solvent, a dispersant, and the like. Are added and mixed as appropriate to prepare a slurry. The slurry is then spray-dried and granulated by spray-drying granulation to produce granules, and a molded body having a desired shape is obtained using the obtained granules by mechanical press or cold isostatic pressing. The second member, the third member, and the flange portion can be obtained by firing after cutting and performing firing as necessary. In addition, you may grind as needed after baking.

また、第２部材および第３部材となる成形体については、スラリーの代わりに坏土を用いて押出成形法により成形体を得てもよい。また、フランジ部となる成形体については、第１部材と同様にセラミックグリーンシートを積層して形成してもよい。   Moreover, about the molded object used as the 2nd member and the 3rd member, you may obtain a molded object by the extrusion method using a clay instead of a slurry. Moreover, about the molded object used as a flange part, you may laminate | stack a ceramic green sheet similarly to the 1st member.

また、第２部材の内面の算術平均粗さＲａ１より、第２部材における第１の流体の下流側に隣接する導入側孔の内面の算術平均粗さＲａ２が大きいものとするには、以下の方法を行なえばよい。例えば、第２部材の内面の算術平均粗さＲａ１を測定する。そして、第２部材における第１の流体の下流側に隣接する導入側孔の内面の算術平均粗さＲａ２が、算術平均粗さＲａ１よりも大きな値となるように、導入側孔の形成において、出力を調整したレーザ光を用いて、セラミックグリーンシートに導入側孔を設けたり、セラミックグリーンシートに導入側孔を設けた後に押し型を押し付けたり、焼成後にレーザ加工やブラスト加工を行なえばよい。   In order to make the arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member larger than the arithmetic average roughness Ra1 of the inner surface of the second member, Just do the method. For example, the arithmetic average roughness Ra1 of the inner surface of the second member is measured. In the formation of the introduction side hole, the arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member is a value larger than the arithmetic average roughness Ra1. Using the laser beam whose output is adjusted, an introduction side hole may be provided in the ceramic green sheet, a pressing die may be pressed after the introduction side hole is provided in the ceramic green sheet, or laser processing or blasting may be performed after firing.

また、第３部材の内面の算術平均粗さＲａ３より、第３部材における第１の流体の下流側に隣接する排出側孔の算術平均粗さＲａ４が大きいものとするには、上述した記載において、第２部材を第３部材に、導入側孔を排出側孔に置き換えればよいため、説明は省略する。   In the above description, the arithmetic average roughness Ra4 of the discharge side hole adjacent to the downstream side of the first fluid in the third member is larger than the arithmetic average roughness Ra3 of the inner surface of the third member. Since the second member may be replaced with the third member, and the introduction side hole may be replaced with the discharge side hole, description thereof will be omitted.

そして、得られた第１部材、第２部材、第３部材、フランジ部を用いて、各部材における接合部に接着剤を塗布し、各部材において第１の流体が連通するように配置し、熱処理により接着剤を硬化させることにより熱交換器を得ることができる。なお、第２部材に隣接する導入側孔同士および第３部材に隣接する排出側孔同士において、第１の流体の流れる方向に見たとき、下流導入側孔（下流排出側孔）を備える壁に、上流導入側孔（上流排出側孔）の開口領域と重なる領域が存在する形態として、形成する孔位置をずらしたり、形成する孔形状を異ならせたりすることを上述したが、孔位置および孔形状が同じとして、第２部材または第３部材に隣接する第１部材をずらした配置として接合してもよい。   Then, using the obtained first member, second member, third member, flange portion, an adhesive is applied to the joint portion in each member, and arranged so that the first fluid communicates with each member, A heat exchanger can be obtained by curing the adhesive by heat treatment. In addition, in the introduction side holes adjacent to the second member and the discharge side holes adjacent to the third member, a wall having a downstream introduction side hole (downstream discharge side hole) when viewed in the direction in which the first fluid flows. As described above, the position of the hole to be formed is shifted or the shape of the hole to be formed is changed as a form in which there is an area overlapping with the opening area of the upstream introduction side hole (upstream discharge side hole). Assuming that the hole shapes are the same, the first member adjacent to the second member or the third member may be joined in a shifted arrangement.

また、熱交換器において、第１部材の個数を増加させる場合には、第１部材の個数に合わせて、第２部材および第３部材を準備して接合すればよい。   Further, in the heat exchanger, when the number of the first members is increased, the second member and the third member may be prepared and joined in accordance with the number of the first members.

また、第１部材の個数を増加させたときには、下段の第１部材における導入側孔周辺および排出側孔周辺には、上段の各部材分の重量が掛かることとなることから、第１部材間に配置される第２部材および第３部材を、第１の流体の流れる方向において、中心軸をずらした配置としてもよい。これにより、上段の各部材分の重量が掛かることによる、下段の第１部材における導入側孔周辺および排出側孔周辺で欠けや割れが発生するおそれを少なくすることができる。   Further, when the number of the first members is increased, the weight of each upper member is applied around the introduction side hole and the discharge side hole in the lower first member. The second member and the third member arranged in the above may be arranged with the central axis shifted in the direction in which the first fluid flows. As a result, it is possible to reduce the possibility of chipping or cracking around the introduction side hole and the discharge side hole in the lower first member due to the weight of each upper member.

なお、使用される接着剤としては、耐熱性や耐腐食性に優れているものとして、無機接着剤を用いることが好ましい。無機接着剤としては、例えば、ＳｉＯ２−Ａｌ２Ｏ３−Ｂ２Ｏ３−ＲＯ系ガラス（Ｒ：アルカリ土類金属元素）粉末や、金属珪素粉末と炭化珪素粉末とを混合した粉末を含有するペーストを用いればよい。無機接着剤としてこのようなペーストを用いたならば、熱処理を行なった際に部材を劣化させることなく、互いの部材を強固に接合できるうえに、耐熱性や耐腐食性に優れているので、熱交換器の信頼性を向上させることができる。In addition, as an adhesive agent used, it is preferable to use an inorganic adhesive agent as what is excellent in heat resistance and corrosion resistance. Examples of the inorganic adhesive include SiO 2 —Al 2 O 3 —B 2 O 3 —RO-based glass (R: alkaline earth metal element) powder, and powder obtained by mixing metal silicon powder and silicon carbide powder. A paste to be used may be used. If such a paste is used as an inorganic adhesive, it is possible to firmly join each other's members without deteriorating the members when heat treatment is performed, and because of excellent heat resistance and corrosion resistance, The reliability of the heat exchanger can be improved.

以上、本発明について詳細に説明したが、本発明は上述した実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内において、種々の変更、改良等が可能である。   Although the present invention has been described in detail above, the present invention is not limited to the above-described embodiments, and various changes and improvements can be made without departing from the scope of the present invention.

また、上述した熱交換器は、熱交換を行なうものであれば、特にその用途が制限されるものではなく、例えば、各種レーザ装置用、半導体素子用および半導体製造装置用の熱交換器に好適に用いることができる。   Further, the heat exchanger described above is not particularly limited as long as it performs heat exchange, and is suitable for, for example, heat exchangers for various laser devices, semiconductor elements, and semiconductor manufacturing devices. Can be used.

１：熱交換器
２：第１部材
３：第２部材
４：第３部材
５：導入側孔
６：排出側孔
７：導入側流路
８：第１流路
９：排出側流路
10：第２流路
11：導入部
12：排出部
13：導入側孔および排出側孔を有する壁
14：面取り部
15：突出部
16：フランジ部1: heat exchanger 2: first member 3: second member 4: third member 5: introduction side hole 6: discharge side hole 7: introduction side flow channel 8: first flow channel 9: discharge side flow channel
10: Second flow path
11: Introduction
12: Discharge section
13: Wall with inlet and outlet holes
14: Chamfer
15: Projection
16: Flange

Claims (6)

セラミックスからなり、第１の流体と第２の流体とで熱交換を行なう熱交換器であって、
該熱交換器は、
一端側に導入側孔を有し、他端側に排出側孔を有する壁を備え、前記導入側孔および前記排出側孔を繋ぐ空間が前記第１の流体が流れる第１流路とされた複数個の第１部材と、
複数個の該第１部材の一端側で前記導入側孔同士と連通し、前記第１の流体を前記第１部材に導入するための第２部材と、
複数個の前記第１部材の他端側で前記排出側孔同士と連通し、前記第１部材を流れた前記第１の流体を排出するための第３部材とを備え、
複数個の前記第１部材同士の間が前記第２の流体が流れる第２流路とされており、
隣り合う前記導入側孔同士の少なくとも１つにおいて、前記第１の流体の流れる方向に見たとき、下流導入側孔を備える前記壁に、上流導入側孔の開口領域と重なる領域が存在しており、
前記第２部材の内面の算術平均粗さＲａ１より、前記第２部材における前記第１の流体の下流側に隣接する前記第１部材の前記導入側孔の内面の算術平均粗さＲａ２が大きいことを特徴とする熱交換器。 A heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid,
The heat exchanger is
A wall having an introduction side hole on one end side and a discharge side hole on the other end side is provided, and a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows. A plurality of first members;
A second member for introducing the first fluid into the first member in communication with the introduction side holes on one end side of the plurality of first members;
A third member for discharging the first fluid that has flowed through the first member in communication with the discharge side holes on the other end side of the plurality of the first members;
A space between the plurality of first members is a second flow path through which the second fluid flows,
In at least one of the adjacent introduction side holes, when viewed in the direction in which the first fluid flows, there is a region overlapping the opening region of the upstream introduction side hole in the wall including the downstream introduction side hole. And
The arithmetic average roughness Ra2 of the inner surface of the introduction side hole of the first member adjacent to the downstream side of the first fluid in the second member is larger than the arithmetic average roughness Ra1 of the inner surface of the second member. A heat exchanger characterized by セラミックスからなり、第１の流体と第２の流体とで熱交換を行なう熱交換器であって、
該熱交換器は、
一端側に導入側孔を有し、他端側に排出側孔を有する壁を備え、前記導入側孔および前記排出側孔を繋ぐ空間が前記第１の流体が流れる第１流路とされた複数個の第１部材と、
複数個の該第１部材の一端側で前記導入側孔同士と連通し、前記第１の流体を前記第１部材に導入するための第２部材と、
複数個の前記第１部材の他端側で前記排出側孔同士と連通し、前記第１部材を流れた前記第１の流体を排出するための第３部材とを備え、
複数個の前記第１部材同士の間が前記第２の流体が流れる第２流路とされており、
隣り合う前記排出側孔同士の少なくとも１つにおいて、前記第１の流体の流れる方向に見たとき、下流排出側孔を備える前記壁に、上流排出側孔の開口領域と重なる領域が存在しており、
前記第３部材の内面の算術平均粗さＲａ３より、前記第３部材における前記第１の流体の下流側に隣接する前記第１部材の前記排出側孔の内面の算術平均粗さＲａ４が大きいことを特徴とする熱交換器。 A heat exchanger made of ceramics and performing heat exchange between the first fluid and the second fluid,
The heat exchanger is
A wall having an introduction side hole on one end side and a discharge side hole on the other end side is provided, and a space connecting the introduction side hole and the discharge side hole is a first flow path through which the first fluid flows. A plurality of first members;
A second member for introducing the first fluid into the first member in communication with the introduction side holes on one end side of the plurality of first members;
A third member for discharging the first fluid that has flowed through the first member in communication with the discharge side holes on the other end side of the plurality of the first members;
A space between the plurality of first members is a second flow path through which the second fluid flows,
In at least one of the adjacent discharge side holes, when viewed in the direction in which the first fluid flows, there is an area overlapping the opening area of the upstream discharge side hole on the wall provided with the downstream discharge side hole. And
The arithmetic average roughness Ra4 of the inner surface of the discharge side hole of the first member adjacent to the downstream side of the first fluid in the third member is larger than the arithmetic average roughness Ra3 of the inner surface of the third member. A heat exchanger characterized by 複数個の前記第１部材のうち少なくとも１つが、前記第１の流体の下流側に位置する前記導入側孔または前記排出側孔の前記第１部材の内部側の縁における、前記第１部材の中央側に、面取り状の部位を有していることを特徴とする請求項１または請求項２に記載の熱交換器。   At least one of the plurality of first members is formed on the inner side edge of the first member of the introduction side hole or the discharge side hole located on the downstream side of the first fluid. The heat exchanger according to claim 1, wherein the heat exchanger has a chamfered portion on the center side. 複数個の前記第１部材のうち少なくとも１つが、前記第１の流体の下流側に位置する前記導入側孔または前記排出側孔の前記第１部材の内部側の縁の周りにおける、前記第１部材の中央側の位置に、突出している部位を有していることを特徴とする請求項１または請求項２に記載の熱交換器。   At least one of the plurality of first members is the first around the edge on the inner side of the first member of the introduction side hole or the discharge side hole located on the downstream side of the first fluid. The heat exchanger according to claim 1, wherein a projecting portion is provided at a position on a central side of the member. 前記第２部材の内面の算術平均粗さＲａ１より、前記第２部材における前記第１の流体の下流側に隣接する前記導入側孔の内面の算術平均粗さＲａ２が大きいことを特徴とする請求項２乃至請求項４のいずれかに記載の熱交換器。 The arithmetic average roughness Ra2 of the inner surface of the introduction side hole adjacent to the downstream side of the first fluid in the second member is larger than the arithmetic average roughness Ra1 of the inner surface of the second member. The heat exchanger in any one of Claim 2 thru | or 4. 前記第３部材の内面の算術平均粗さＲａ３より、前記第３部材における前記第１の流体の下流側に隣接する前記排出側孔の算術平均粗さＲａ４が大きいことを特徴とする請求項１、請求項３または請求項４に記載の熱交換器。 The arithmetic average roughness Ra4 of the discharge side hole adjacent to the downstream side of the first fluid in the third member is larger than the arithmetic average roughness Ra3 of the inner surface of the third member. The heat exchanger according to claim 3 or claim 4 .
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