JP6980607B2 - Heat exchanger and heat exchange system - Google Patents

Description

The present disclosure relates to heat exchangers and heat exchange systems.

Conventionally, a heat exchanger has been used for a heat exchange system such as cooling or heating. As an example of such a heat exchanger, Patent Document 1 includes a plurality of long plates arranged substantially in parallel and slits between the long plates, and is continuous in the longitudinal direction on some surfaces of the long plates. A plurality of substrates provided with recesses are laminated, and the elongated plates of the adjacent substrates are connected to each other to form a pipe, the recesses form an in-pipe flow path, and the slits form an outer flow path. A configured heat exchanger has been proposed.

Japanese Unexamined Patent Publication No. 2005-300062

The heat exchangers of this time are required to improve the heat exchange efficiency, including the miniaturization.

The present disclosure has been devised in view of such requirements, and an object of the present disclosure is to provide a heat exchanger having excellent heat exchange efficiency.

The heat exchanger of the present disclosure includes a plurality of first members and a plurality of second members located between the adjacent first members. Further, the first member has a plurality of openings and a first flow path connected to the openings. Further, the second member has a second flow path connected to each opening in the adjacent first member. Further, the opening in the first member, the first flow path, and the second flow path in the second member are the flow paths of the first fluid, and the region between the adjacent first members is the second. It is a fluid flow path. Further, the first member and the second member are made of ceramics. Further, the opening area S1 of the opening is larger than the cross-sectional area S2 perpendicular to the direction in which the first fluid flows in the first flow path.

The heat exchangers of the present disclosure have excellent heat exchange efficiency.

It is an external perspective view which shows an example of the heat exchanger of this disclosure. FIG. 3 is a cross-sectional view taken along the line i-i in FIG. It is an enlarged view which shows the T part shown in FIG. FIG. 3 is an external perspective view showing another example of the heat exchanger of the present disclosure. FIG. 3 is an external perspective view showing another example of the heat exchanger of the present disclosure. FIG. 3 is an external perspective view showing another example of the heat exchanger of the present disclosure. FIG. 3 is an external perspective view showing another example of the heat exchanger of the present disclosure. FIG. 3 is an external perspective view showing another example of the heat exchanger of the present disclosure. FIG. 8 is a cross-sectional view taken along the line ii-ii in FIG. FIG. 8 is a cross-sectional view taken along the line iii-iii in FIG. It is sectional drawing which shows the other example of the heat exchanger of this disclosure. It is an external perspective view which shows the heat exchanger system of this disclosure.

Hereinafter, the heat exchanger of the present disclosure will be described in detail with reference to the drawings. In each figure, numbers and alphabets are used to identify the heat exchanger, but only numbers are added except for the description of the configuration peculiar to each figure.

The heat exchanger 10 of the present disclosure includes a plurality of first members 1. Here, in FIGS. 1 and 2, a heat exchanger 10a including three first members 1 is shown as an example. When the number of the first member 1 is 3 or more, the heat exchanger 10 of the present disclosure is particularly suitable for miniaturization. The number of the first member 1 is not limited to this, and may be two or more.

Further, although FIG. 1 shows an example in which the shape of the first member 1 is a square plate shape, the shape is not limited to this, and a disk shape, an elliptical plate, or the like may be used.

Further, the first member 1 in the heat exchanger 10 of the present disclosure has a plurality of openings 5 and a first flow path 6 connected to the openings 5. In FIGS. 1 and 2, of the three first members 1, the upper first member 1a and the middle first member 1b have four openings 5, and the lower first member 1c has two. Shown is an example having an opening 5. The number of openings 5 may be plural, and is not limited to the configurations shown in FIGS. 1 and 2, including the configuration of the first member 1 having different numbers of openings 5.

Further, the heat exchanger 10 of the present disclosure includes a plurality of second members 2 located between adjacent first members 1. The second member 2 has a second flow path 7 connected to each opening 5 in the adjacent first member 1. The shape of the second member 2 may be any shape as long as it has the second flow path 7.

In the heat exchanger 10 of the present disclosure, the opening 5 in the first member 1, the first flow path 6 and the second flow path 7 in the second member 2 are the flow paths of the first fluid. Here, the flow path of the first fluid in the heat exchanger 10a shown in FIGS. 1 and 2 will be described. First, the first fluid is introduced from the opening 5IN in the first member 1a in the upper stage. Then, after passing through the first flow path 6 of each first member 1 and the second flow path 7 of each second member 2, the meat is discharged from the opening 5OUT in the first member 1a in the upper stage.

In the heat exchanger 10 of the present disclosure, the region between the adjacent first members 1 is the flow path of the second fluid. When the second fluid passes between the adjacent first members 1, heat exchange is performed between the first member 1 and the second member 2 through which the first fluid flows. Depending on the temperature relationship between the first fluid and the second fluid, the second fluid can be cooled or heated. As the first fluid and the second fluid, a liquid, a gas, or the like can be used depending on the purpose. For example, the first fluid can be a liquid such as water, and the second fluid can be a gas such as gas.

Further, the first member 1 and the second member in the heat exchanger 10 of the present disclosure are made of ceramics. As described above, since the first member 1 and the second member 2 are made of ceramics, the heat exchanger 10 of the present disclosure is excellent in heat resistance and corrosion resistance. The type of ceramic may be appropriately selected according to the characteristics of the first fluid and the second fluid, and may be oxide ceramics such as alumina ceramics or cordierite ceramics, silicon nitride ceramics, aluminum nitride ceramics or the like. Non-oxide ceramics such as silicon carbide ceramics can be used.

Here, for example, the silicon carbide ceramics is all the components 100 constituting the ceramics.
Of the mass%, silicon carbide is contained in an amount of 70% by mass or more. The materials of the first member 1 and the second member 2 constituting the heat exchanger 10 of the present disclosure can be confirmed by the following method. First, measurement is performed using an X-ray diffractometer (XRD), the first member 1 and the second member 2 are measured, and a JCPDS card is used from the obtained values of 2θ (2θ is a diffraction angle). And identify. Next, quantitative analysis of the components contained in the first member 1 and the second member 2 is performed using an ICP emission spectroscopic analyzer (ICP) or a fluorescent X-ray analyzer (XRF). Then, for example, if the presence of silicon carbide is confirmed by the above identification and the content converted from the silicon (Si) content measured by ICP or XRF into silicon carbide (SiC) is 70% by mass or more, it is carbonized. Silicone ceramics.

Further, in the heat exchanger 10 of the present disclosure, as shown in FIG. 3, the opening area S1 of the opening 5 is larger than the cross-sectional area S2 perpendicular to the direction in which the first fluid flows in the first flow path 6. Here, the opening area S1 is a cross-sectional area perpendicular to the direction in which the first fluid flows in the second flow path 7 in the opening 5. The direction in which the first fluid flows in the second flow path 7 is the vertical direction in FIG.

By satisfying such a configuration, the first fluid can be vigorously flowed into the first flow path 6 from the opening 5 of the first member 1, and the first flow through the first flow path 6 can be vigorously flowed. The heat exchanger 10 of the present disclosure has excellent heat exchange efficiency because the flow velocity of the fluid becomes high. Here, the magnitude relationship between the opening area S1 of the opening 5 and the cross-sectional area S2 of the first flow path 6 is compared in the same first member 1.

In the same first member 1, the ratio S1 / S2 of the opening area S1 of the opening 5 to the cross-sectional area S2 of the first flow path 6 may be 8 or more.

Further, in the heat exchanger 10 of the present disclosure, the opening area S1 of the opening 5 may be larger than the total cross-sectional area S2 of each first member 1. If such a configuration is satisfied, the flow velocity of the first fluid flowing through each of the first flow paths 6 becomes faster, so that the heat exchange efficiency of the heat exchanger 10 of the present disclosure is improved.

Further, in the heat exchanger 10 of the present disclosure, the cross-sectional area S3 perpendicular to the direction in which the first fluid flows in the second flow path 7 in the second flow path 7 may be larger than the opening area S1 of the opening 5. If such a configuration is satisfied, the first fluid can be vigorously flowed from the second flow path 7 of the second member 2 to the opening 5 of the first member 1, and the first flow path 6 is accompanied by this. Since the flow velocity of the first fluid flowing through the fluid becomes faster, the heat exchange efficiency of the heat exchanger 10 of the present disclosure is improved.

Here, the opening area S1 of the opening 5 may be, for example, 5 mm ² or more and 100 mm ² or less. Further, the cross-sectional area S2 of the first flow path 6 may be, for example, 0.75 mm ² or more and 15 mm ² or less. Further, the cross-sectional area S3 of the second flow path 7 may be, for example, 20 mm ² or more and 120 mm ² or less.

Further, as shown in FIG. 4, the heat exchanger 10 of the present disclosure may include a third member 3 extending toward a region between adjacent first members 1 on the first member 1. Due to the presence of the third member 3, when the second fluid passes between the adjacent first members 1, the flow of the second fluid changes, so that the second fluid is the first member 1 and the second member. The chances of contacting the member 2 increase. Further, since the third member 3 is connected to the first member 1 and is cooled or heated by the first fluid flowing through the first flow path 6 of the first member 1, the third member 3 and the second fluid are heated. Heat exchange is performed with. Therefore, if such a configuration is satisfied, the heat exchange efficiency of the heat exchanger 10 of the present disclosure is improved.

Here, the third member 3 may have any shape, but the contact area between the third member 3 and the second fluid can be increased without excessively obstructing the flow of the second fluid. In terms of points, it may have a shape extending along the direction in which the second fluid flows.

In the following, the second fluid will be described as flowing from the front to the back on the illustrated surface. Further, the lateral direction of the first member 1 will be described as the width direction. Based on this, in FIG. 4, the third member 3 has a square plate shape extending along the width direction of the first member 1.

Further, as shown in the heat exchanger 10b in FIG. 4, a plurality of third members 3 may be located at intervals. If such a configuration is satisfied, the heat exchange efficiency is improved because there are a plurality of third members 3 that exchange heat with the second fluid.

Further, the third member 3 may be connected to each of the opposing first members 1 as in the heat exchanger 10c shown in FIG. If such a configuration is satisfied, the third member 3 is cooled or heated by the first fluid flowing through the first flow path 6 of the two first members 1 to which the third member 3 is connected. , The heat exchange between the third member 3 and the second fluid is performed more efficiently.

Further, as in the heat exchanger 10d shown in FIG. 6, a fourth member 4 extending from the third member 3 toward the region between the adjacent first members 1 may be provided. If such a configuration is satisfied, the first member 1, the second member 2, and the third member 3 are cooled or heated by the first fluid flowing through the first flow path 6 of the first member 1. The heat exchange efficiency is improved by exchanging heat with the second fluid even in the fourth member 4 via the third member 3.

Here, the fourth member 4 may have any shape, but the contact area between the fourth member 4 and the second fluid can be increased without excessively obstructing the flow of the second fluid. In terms of points, like the third member 3, it may have a shape extending along the direction in which the second fluid flows. Note that FIG. 6 shows an example in which the fourth member 4 has a square plate shape extending along the width direction of the first member 1.

Further, the fourth member 4 may be located at a plurality of positions at intervals as in the heat exchanger 10d shown in FIG. If such a configuration is satisfied, the heat exchange efficiency is improved because there are a plurality of fourth members 4 that exchange heat with the second fluid.

Further, the fourth member 4 may be connected to each of the opposing third members 3 as in the heat exchanger 10e shown in FIG. 7. If such a configuration is satisfied, it is cooled or heated by the first fluid flowing through the first flow path 6 of the first member 1 via the two third members 3 to which the fourth member 4 is connected. Therefore, heat exchange between the fourth member 4 and the second fluid is performed more efficiently.

Further, the fourth member 4 may be in contact with the second member 2 as in the heat exchanger 10f shown in FIG. If such a configuration is satisfied, the fourth member 4 and the fourth member 4 are cooled or heated by the first fluid flowing through the second flow path 7 of the second member 2 in contact with the fourth member 4. 2 Heat exchange with the fluid is performed more efficiently.

Further, the third member 3 and the fourth member 4 constituting the heat exchanger 10 of the present disclosure may be made of ceramics in the same manner as the first member 1 and the second member 2. In particular, if the first member 1, the second member 2, the third member 3 and the fourth member 4 are made of silicon carbide ceramics, the heat exchanger 10 of the present disclosure has excellent mechanical strength and is suitable for miniaturization. It becomes a thing.

The materials of the third member 3 and the fourth member 4 can be confirmed by the same method as the method of confirming the materials of the first member 1 and the second member 2 described above.

Further, as shown in FIG. 11, the heat exchanger 10 of the present disclosure includes a first housing 8a that surrounds the outer periphery of the first member 1 and the second member 2 in the direction perpendicular to the direction in which the second fluid flows. A second housing 8b surrounding the first housing 8a may be provided via the heat insulating layer 9. If such a configuration is satisfied, heat exchange with the second fluid is efficiently performed, and the heat exchange efficiency of the heat exchanger 10 of the present disclosure is improved.

Here, the first housing 8a and the second housing 8b may be made of stainless steel, ceramics, or the like. In particular, if the first housing 8a and the second housing 8b are made of stainless steel, the first member 1 is provided with the first housing 8a without a gap by providing a leaf spring in the region of the heat insulating layer 9. It becomes possible to make contact.

Further, the heat insulating layer 9 may have any structure as long as it has a heat insulating property. The heat insulating layer 9 may be filled with a gas such as air having a low thermal conductivity, an inert gas, or glass fiber, for example.

The heat exchanger 10 of the present disclosure is not particularly limited in its use as long as it exchanges heat, and is, for example, for various laser devices, vehicles, chemical substance recovery devices, and semiconductor devices. It can also be used as a heat exchanger for semiconductor manufacturing equipment and the like.

Further, as shown in FIG. 12, the heat exchange system 100 of the present disclosure includes a plurality of heat exchangers 10 having the above-described configuration, a supply path 20 for supplying the first fluid, and a discharge path 30 for discharging the first fluid. The heat exchangers 10 are arranged in one direction and are connected to each other by sharing the supply path 20 and the discharge path 30. By satisfying such a configuration, the heat exchange system 100 of the present disclosure can supply the first fluid to each heat exchanger 10 while suppressing the change in the temperature of the first fluid. The second fluid can be efficiently cooled or heated, and the first fluid whose temperature has changed due to heat exchange with the second fluid is recovered from each heat exchanger 10, and the recovered first fluid is cooled or heated. It can be reused.

Hereinafter, a method for manufacturing the heat exchanger 10 of the present disclosure will be described.

First, a method for manufacturing the first member 1 will be described.

First, a sintering aid, a binder, a solvent, a dispersant and the like are added to the powder of the raw material (silicon carbide, aluminum oxide, etc.) as the main component and appropriately mixed to prepare a slurry. Next, using this slurry, a ceramic green sheet is produced by the doctor blade method. Next, a plurality of ceramic green sheets having an arbitrary shape are laminated by punching with a die or laser processing to produce a molded body which is a laminated body. Then, by firing this molded body, a first member 1 having an opening 5 and a first flow path 6 is obtained. Here, by producing a molded body as a laminated body, it is easy to produce the first flow path 6 inside the first member 1. Further, the thickness of the first member 1 can be adjusted by adjusting the number of ceramic green sheets to be laminated. Further, the opening 5 may be formed by punching or laser processing the ceramic green sheet with a die.

As another method for producing the ceramic green sheet, granules are produced by spray-drying the slurry by a spray granulation method (spray-drying method) to granule the granules, and the granules are produced by a roll compaction method or a mechanical press method. You may.

Next, a method of manufacturing the second member 2 will be described. For the second member 2, a molding method suitable for the shape thereof may be selected. For example, if the shape of the second member 2 is a pipe shape, the slurry may be adjusted to a clay and manufactured by an extrusion molding method. Alternatively, the granules may be produced by a mechanical press method or a cold hydrostatic pressure molding (CIP) method. Further, if the shape of the second member 2 is to be a plate shape, a molded body which is a laminated body may be produced by laminating ceramic green sheets as in the case of the first member 1. Then, the second member 2 is obtained by firing the molded body.

Next, a method of manufacturing the third member 3 and the fourth member 4 will be described. The third member 3 and the fourth member 4 are obtained by producing a molded body of a ceramic green sheet by a doctor blade method, a roll compaction method, or a mechanical press method and firing the same as in the first member 1. Further, the molded bodies of the third member 3 and the fourth member 4 may be collectively manufactured by an extrusion molding method.

Then, the heat exchanger 10 of the present disclosure is obtained by joining the first member 1, the second member 2, the third member 3 and the fourth member 4, respectively, using an adhesive. Here, if the configuration has both the third member 3 and the fourth member 4, such as the heat exchanger 10d in FIG. 6, the heat exchanger 10e in FIG. 7, and the heat exchanger 10f in FIG. 8, the extrusion molding method is used. A third member 3 and a fourth member 4 may be integrated with each other, and the third member 3 and the fourth member 4 may be joined to the first member 1 by using an adhesive.

As the adhesive, any adhesive may be used as long as it can bond each member to each other, but if an inorganic adhesive is used, each member will not be deteriorated during heat treatment. , Each member can be firmly joined to each other. Further, since the inorganic adhesive is excellent in heat resistance and corrosion resistance, the reliability of the heat exchanger 10 of the present disclosure can be improved. Here, as the inorganic adhesive, for example, SiO _2- Al ₂ O _3- B ₂ O _3- RO-based glass paste (R: alkaline earth metal element) or SiC-SiC-based paste may be used. In particular, if the first member 1, the second member 2, the third member 3 and the fourth member 4 are made of silicon carbide ceramics, the coefficient of thermal expansion of the inorganic adhesive is similar to that of the silicon carbide ceramics. By using a Si—SiC-based paste, the high temperature strength of the heat exchanger 10 of the present disclosure can be improved.

Further, it is composed of a first housing 8a, a heat insulating layer 9 and a second housing 8b so as to surround the outer periphery of the first member 1 and the second member 2 in the direction perpendicular to the direction in which the second fluid flows. It may be fitted in the housing. At this time, if a leaf spring is provided in the heat insulating layer 9, the first member 1 and the first housing 8a can be brought into contact with each other without a gap.

Further, by preparing a plurality of heat exchangers 10, arranging the heat exchangers 10 in one direction and joining them to the pipe serving as the supply path 20 and the pipe serving as the discharge path 30, according to the present disclosure. The heat exchange system 100 can be obtained.

The present disclosure is not limited to the above-described embodiment, and various changes and improvements can be made without departing from the gist of the present disclosure.

1: 1st member 2: 2nd member 3: 3rd member
4: 4th member 5: Opening 6: 1st flow path 7: 2nd flow path 8a: 1st housing 8b: 2nd housing 9: Insulation layer 10: Heat exchanger 20: Supply path 30: Discharge channel 100: Heat exchange system

Claims (15)

With multiple first members,
A plurality of second members located between the adjacent first members are provided.
The first member is
With multiple openings,
It has a first flow path connected to the opening, and has.
The second member is
It has a second flow path that connects to each of the openings in the adjacent first member.
The opening in the first member, the first flow path, and the second flow path in the second member are flow paths of the first fluid, and the region between adjacent first members is the second fluid. It is a flow path
The first member and the second member are made of ceramics.
The opening, the first flow path, and the second flow path are located in the order of the second flow path, the opening, and the first flow path along the flow direction of the first fluid.
The opening area S1 of the opening, the much larger than the said first vertical cross-sectional area S2 in the direction of fluid flow in the first flow path, and, perpendicular to the first direction the fluid flows in the second flow path A heat exchanger in which the cross-sectional area S3 is larger than the opening area S1 of the opening. The heat exchanger according to claim 1, wherein the first flow path opens to the inner surface of the opening. In a cross-sectional view cut along a plane parallel to the direction in which the first fluid flows in the first flow path and the direction in which the first fluid flows in the second flow path, the first flow path in the opening is open. The first inner surface is flush with the inner surface of the second flow path, and is between the second inner surface located on the opposite side of the first inner surface of the opening and the inner surface of the second flow path. The heat exchanger according to claim 2, wherein a step is located. The heat exchanger according to any one of claims 1 to 3, wherein the opening area S1 is larger than the total of the cross-sectional areas S2 of the first member. The heat exchanger according to any one of claims 1 to 4, further comprising a third member extending toward the region on the first member. The heat exchanger according to claim 5 , wherein the third member is connected to the first member facing the first member. The heat exchanger according to claim 5 or 6 , wherein the third member is located at a plurality of intervals. The heat exchanger according to any one of claims 5 to 7 , further comprising a fourth member extending from the third member toward the region. The heat exchanger according to claim 8 , wherein the fourth member is located at a plurality of positions at intervals. The heat exchanger according to claim 8 or 9 , wherein the fourth member is connected to the third member facing the third member. The heat exchanger according to any one of claims 8 to 10 , wherein the fourth member is in contact with the second member. The heat exchanger according to any one of claims 8 to 11 , wherein the third member and the fourth member are made of ceramics. The heat exchanger according to any one of claims 8 to 12 , wherein the first member, the second member, the third member, and the fourth member are made of silicon carbide ceramics. A first housing that surrounds the outer periphery of the first member and the second member in a direction perpendicular to the direction in which the second fluid flows, and a second housing that surrounds the first housing via a heat insulating layer. The heat exchanger according to any one of claims 1 to 13. The plurality of heat exchangers according to any one of claims 1 to 14 , a supply path for supplying the first fluid, and a discharge path for discharging the first fluid are provided.
A heat exchange system in which each of the heat exchangers is arranged in one direction and is connected by sharing the supply path and the discharge path.

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