US20170219302A1 - Heat exchanger - Google Patents
Heat exchanger Download PDFInfo
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- US20170219302A1 US20170219302A1 US15/329,699 US201515329699A US2017219302A1 US 20170219302 A1 US20170219302 A1 US 20170219302A1 US 201515329699 A US201515329699 A US 201515329699A US 2017219302 A1 US2017219302 A1 US 2017219302A1
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- fluid
- heat exchanger
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
- F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
- F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
- F28D1/053—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits the conduits being straight
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
- F28F13/08—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by varying the cross-section of the flow channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
- F28F13/12—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/02—Header boxes; End plates
Definitions
- the present invention relates to a heat exchanger.
- heat exchangers have been used in heat exchange systems for cooling, heating, and the like.
- a heat exchanger formed by a plurality of substrates that are laminated.
- Each of the substrates has a plurality of strips arranged substantially parallel side by side as well as slits between the strips, and is provided with recesses that continue in a longitudinal direction on several surfaces of the strips.
- the strips of adjacent substrates are interconnected to define tubes, the recesses define tube internal channels, and the slits define tube external channels.
- Patent Document 1 Japanese Unexamined Patent Application No. 2005-300062A
- An object of the present invention is therefore to provide a heat exchanger having a superior heat exchange efficiency.
- a heat exchanger is formed from a ceramic and performs heat exchange between a first fluid and a second fluid.
- the heat exchanger is provided with a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which the first fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members.
- spaces between the plurality of first members serve as second channels through which the second fluid flows.
- regions that overlap with opening regions of upstream-side introduction holes exist in the walls including downstream-side introduction holes, when viewed in a direction in which the first fluid flows.
- a heat exchanger is formed from a ceramic and performs heat exchange between a first fluid and a second fluid.
- the heat exchanger is provided with a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which the first fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members.
- spaces between the plurality of first members serve as second channels through which the second fluid flows.
- regions that overlap with opening regions of upstream-side discharge holes exist in the walls including downstream-side discharge holes, when viewed in a direction in which the first fluid flows.
- the heat exchanger according to the present invention has a superior heat exchange efficiency.
- FIG. 1 is a perspective view illustrating an example of a heat exchanger according to a present embodiment.
- FIG. 2 is a cross-sectional view illustrating an example of the heat exchanger according to the present embodiment.
- FIG. 3 is a perspective view illustrating an example of a first member that constitutes the heat exchanger according to the present embodiment.
- FIG. 4 is a perspective view illustrating an example of a second member and a third member that constitute the heat exchanger according to the present embodiment.
- FIG. 5 is a partial cross-sectional view illustrating an example of the heat exchanger according to the present embodiment.
- FIG. 6 is an enlarged partial cross-sectional view illustrating an example of the second member side of the heat exchanger according to the present embodiment.
- FIG. 7 is an enlarged partial cross-sectional view illustrating another example of the second member side of the heat exchanger according to the present embodiment.
- FIG. 1 is a perspective view and FIG. 2 is a cross-sectional view illustrating an example of a heat exchanger according to the present embodiment.
- FIG. 3 is a perspective view illustrating an example of a first member constituting the heat exchanger according to the present embodiment
- FIG. 4 is a perspective view illustrating an example of a second member and a third member that constitute the heat exchanger according to the present embodiment.
- FIG. 5 is a partial cross-sectional view of the heat exchanger according to the present embodiment
- FIGS. 6 and 7 are enlarged partial cross-sectional views of the second member side of the heat exchanger according to the present embodiment.
- a heat exchanger 1 of the example illustrated in FIG. 1 includes a plurality of first members 2 .
- Each of the first members 2 includes walls provided with introduction holes 5 on a first end side and discharge holes 6 on a second end side. Spaces connecting the introduction holes 5 and the discharge holes 6 serve as first channels 8 through which a first fluid flows.
- the heat exchanger 1 further includes second members 3 that communicate with the introduction holes 5 at the first end side of the plurality of first members 2 to introduce the first fluid to the first members 2 .
- the heat exchanger 1 further includes third members 4 that communicate with the discharge holes 6 at the second end side of the plurality of first members 2 to discharge the first fluid that has flowed through the first members 2 . Further, spaces between the plurality of first members 2 serve as second channels 10 through which a second fluid flows. Note that the “first end side” here can also be expressed as an upstream side of the first fluid, and the “second end side” can also be expressed as a downstream side of the first fluid.
- the heat exchanger 1 that includes three first members 2 is illustrated in FIGS. 1 and 2 as an example, the heat exchanger 1 is not limited thereto and may include two or more first members 2 .
- a fluid, a vapor, or the like may be used as the first fluid and the second fluid, in accordance with the objective.
- the first fluid may be a fluid such as water
- the second fluid may be a vapor such as gas.
- the first members 2 , the second members 3 , and the third members 4 that constitute the heat exchanger 1 according to the present embodiment are formed from a ceramic. With these members thus formed from a ceramic, the heat exchanger 1 has superior thermal resistance and corrosion resistance.
- the types of ceramics used can be selected as appropriate in accordance with the characteristics of the fluid. Examples include an oxide ceramic, such as an alumina ceramic or a cordierite ceramic, and a non-oxide ceramic, such as a silicon nitride ceramic, an aluminum nitride ceramic, or a silicon carbide ceramic.
- the heat exchange efficiency of the heat exchanger 1 can be increased due to a high thermal conductivity. Further, when these members are formed from an alumina ceramic having an alumina content exceeding 50 mass % with respect to all components that constitute the ceramic, the raw material cost decreases and machineability increases, thus the heat exchanger 1 can be manufactured at a cost lower than that when other materials are used.
- FIGS. 1 and 2 illustrate an example in which the heat exchanger 1 includes a flange portion 16 at the lowest level.
- the flange portion 16 includes an introduction portion 11 and a discharge portion 12 for the first fluid.
- the path of the first fluid in this example will now be described. First, the first fluid enters the heat exchanger 1 from the introduction portion 11 of the flange portion 16 , flows through an introduction channel 7 , passes through the introduction holes 5 and the first channels 8 of the first members 2 , flows through the discharge holes 6 , and is then discharged from the discharge portion 12 via a discharge channel 9 .
- the heat exchanger 1 of the present embodiment can perform heat exchange efficiently with the second fluid that flows through the second channel 10 while the first fluid flows through the first channel 8 , in particular.
- the flange portion 16 is not mandatory in a configuration of the heat exchanger 1 .
- the opening of the second member 3 positioned at the lowest level in FIGS. 1 and 2 may serve as the introduction port of the first fluid, and the opening of the third member 4 positioned at the lowest level may serve as the discharge port of the first fluid.
- the first fluid and the second fluid can be disposed so as to form a cross flow, or disposed so as to flow in the same direction.
- a partition portion capable of branching the first fluid may be provided in the first member 2 .
- a contact surface area with the first fluid is increased.
- the heat exchange efficiency can be improved.
- the first member 2 includes the introduction hole 5 that communicates with the second member 3 , and the discharge hole 6 that communicates with the third member 4 , as illustrated in FIG. 3 .
- FIG. 3 illustrates an example in which the introduction hole 5 and the discharge hole 6 are provided in mutually corresponding positions of an upper wall and a lower wall, forming through-holes
- the first member 2 of this configuration corresponds to a first member 2 b and a first member 2 c in FIGS. 1 and 2 .
- the first member 2 a disposed on the highest level does not require the first fluid to flow further upward on the upstream side, and the first fluid never flows from above on the downstream side.
- the introduction hole 5 and the discharge hole 6 are included only on the lower wall of the walls constituting the first member 2 a.
- the second member 3 and the third member 4 are, for example, cylindrical members, as illustrated in FIG. 4 .
- a cross section of each of the second members 3 and the third members 4 orthogonal to the direction in which the first fluid flows is not limited to a circular shape.
- the cross section may be an elliptical shape, a polygonal shape such as a triangular shape or a quadrilateral shape, or the like.
- the heat exchanger 1 of the present embodiment has a superior heat exchange efficiency.
- the one adjacent pair of the introduction holes 5 are an introduction hole 5 a and an introduction hole 5 b, the introduction hole 5 b and an introduction hole 5 c, the introduction hole 5 c and an introduction hole 5 d, or the introduction hole 5 d and an introduction hole 5 e, and are thus two of the introduction holes 5 adjacently positioned in the direction in which the first fluid flows.
- the upstream-side introduction hole is the introduction hole 5 positioned upstream in the direction in which the first fluid flows
- the downstream-side introduction hole is the introduction hole 5 positioned downstream in the direction in which the first fluid flows.
- the introduction hole 5 b is the downstream-side introduction hole
- the introduction hole 5 c is the upstream-side introduction hole.
- the introduction hole 5 c is the downstream-side introduction hole
- the introduction hole 5 d is the upstream-side introduction hole.
- the same introduction hole 5 may be an upstream-side introduction hole as well as a downstream-side introduction hole, depending on the combination.
- Examples in which the one adjacent pair of the introduction holes 5 satisfy the configuration described above include when the adjacent pair of the introduction holes 5 have the same opening shape and the opening region of the upstream-side introduction hole is larger than the opening region of the downstream-side introduction hole, and when the opening shapes of the adjacent pair of the introduction holes 5 are different. From the viewpoint of not delaying the flow rate of the fluid more than necessary, however, a case where the adjacent pair of the introduction holes 5 have the same opening shape, but the centers of the pair of the introduction holes 5 are shifted in a direction that intersects the direction of flow when viewed in the direction in which the first fluid flows is preferred.
- the opening shape of the introduction hole 5 is not limited to a circular shape as illustrated in FIG. 3 , and may be an elliptical shape, a polygonal shape such as a triangular shape or a quadrilateral shape, or the like.
- FIG. 5 illustrates an example in which the first member 2 b includes three walls, the number of walls that constitute the first member 2 b is not limited thereto, and may be three or greater.
- the introduction hole 5 b is the downstream-side introduction hole and the introduction hole 5 c is the upstream-side introduction hole.
- a region that overlaps with the opening region of the upstream-side introduction hole exists in the wall including the downstream-side introduction hole, when viewed in the direction in which the first fluid flows refers to when the opening region of the introduction hole 5 c (which is the upstream-side introduction hole) is moved in parallel in the direction in which the first fluid flows to a wall 13 b that includes the downstream-side introduction hole, and when a section that overlaps with the opening region of the upstream-side introduction hole exists in the wall 13 b.
- a portion of the first fluid that has passed through a second member 3 b and the introduction hole 5 b when viewed in the direction in which the first fluid flows, collides with the wall 13 b where the region that overlaps with the opening region of the introduction hole 5 c exists, forming turbulence regions on the inner face of a second member 3 a as well as on the inner face of the first member 2 b, which are adjacent to the section where the colliding occurred. Then, in such a turbulence region, the number of opportunities for contact with the first fluid increases, thereby improving the heat exchange efficiency of the heat exchanger 1 .
- the same effect as described above can be achieved with the other combinations as well as long as, in the adjacent pair of the introduction holes 5 , a region that overlaps with the opening region of the upstream-side introduction hole exists in the wall that includes the downstream-side introduction hole, when viewed in the direction in which the first fluid flows.
- the overlapping region described above has a surface area equivalent to at least 10% the surface area of the opening region of the upstream-side introduction hole.
- the adjacent pair of the introduction holes 5 can be achieved with the adjacent pair of the discharge holes 6 as well as long as, in at least one adjacent pair of the discharge holes 6 , a region that overlaps with the opening region of the upstream-side discharge hole exists in the wall that includes the downstream-side discharge hole, when viewed in the direction in which the first fluid flows.
- the at least one of the plurality of first members 2 includes a chamfered area on a center section thereof, on an edge of the introduction hole 5 positioned on the downstream side of the first fluid, the edge being on an interior side of the first member 2 .
- the first fluid flows from the lower introduction hole 5 c into the first member 2 b, and branches and flows to the first channel 8 extending from a first end side to a second end side, and to the upper introduction hole 5 b.
- a chamfered portion 14 is provided to the center section of the first member 2 b (the right side in FIG. 6 ), on the edge of the introduction hole 5 b of the wall 13 b that constitutes the first member 2 b , and thus the first fluid can be smoothly branched.
- the chamfered portion 14 serving as a chamfered area is a section in which a corner portion serving as the edge is cut to form a plane.
- the first fluid can be smoothly branched by providing the chamfered portion 14 to the center section of the first member 2 b, on the edge of the introduction hole 5 b positioned on the downstream side of the first fluid, the edge being on the interior side of the first member 2 b, a configuration in which turbulence occurs further on the upstream side of the first fluid than the chamfered portion 14 is preferred.
- the first fluid in which a turbulence has occurred is smoothly branched and the turbulence region is expanded, and thus, the heat exchange efficiency can be further improved.
- At least one of the plurality of first members 2 includes a chamfered area on the center section thereof, on the edge of the discharge hole 6 positioned on the downstream side of the first fluid, the edge being on the interior side of the first member 2 .
- the first fluid that has flowed through the first channel 8 and the first fluid that has flowed from the upper discharge hole 6 can be smoothly merged.
- At the least one of the plurality of first members 2 includes a protruding area at a position on the center section thereof, in an area around the edge of the introduction hole 5 positioned on the downstream side of the first fluid, the edge being on an interior side of the first member 2 .
- this protruding area is described as a protruding portion 15 .
- the first fluid flows from the lower introduction hole 5 c into the first member 2 b, and branches and flows to the first channel 8 extending from the first end side to the second end side, and to the upper introduction hole 5 b.
- the protruding portion 15 is provided to a position on the center section of the first member 2 b, in an area around the edge of the introduction hole 5 b of the wall 13 b that constitutes the first member 2 b, turbulence can be generated even when the first fluid branches to the first channel 8 , and thus, the heat exchange efficiency can be further improved.
- the protruding portion 15 is an area of this wall 13 b that protrudes at least 1 ⁇ m on the first channel 8 side of this reference plane.
- the at least one of the plurality of first members 2 includes the protruding portion 15 at a position on the center section thereof, in an area around the edge of the introduction hole 5 positioned on the downstream side of the first fluid, the edge being on the interior side of the first member 2 , turbulence occurs from a merge with a main flow that flows through the first channel 8 and a merge with the first fluid that has flowed from the upper discharge hole 6 when the first fluid that has flowed through the first channel 8 passes over the protruding portion 15 , thereby improving the heat exchange efficiency.
- the inner face of the introduction hole 5 adjacent to the second member 3 on the downstream side of first fluid has an arithmetic mean roughness Ra2 that is greater than an arithmetic mean roughness Ra1 of the inner face of the second member 3 .
- the introduction hole 5 c is preferably included in the turbulence region that occurs due to the existence of the region that overlaps with the opening region of the upstream-side introduction hole in the wall that includes the downstream-side introduction hole.
- an arithmetic mean roughness Ra4 on the inner face of the discharge hole 6 on the downstream side of the first fluid adjacent to the third member 4 is greater than an arithmetic mean roughness Ra3 of the inner face of the third member 4 in the discharge channel 9 as well, turbulence occurs when the first fluid flows from the interior of the third member 4 into the discharge hole 6 , and thus, the heat exchange efficiency can be improved.
- the arithmetic mean roughness values Ra1 to R4 described above may be found by measurement using a contact-type surface roughness gauge in accordance with JIS B 0601 (2013).
- measurement conditions include, for example, a measurement length of 2.5 mm, a cutoff value of 0.8 mm, and a stylus scanning speed set to 0.3 mm/sec.
- items related to the discharge channel 9 will be described in parenthesis.
- a section near adjacent positions may be defined as a measurement location, and the arithmetic mean roughness values Ra1 (Ra3) and Ra2 (Ra4) may be found by measuring at least three locations each in a direction along the direction in which the first fluid flows, and calculating the average value thereof
- a ratio Ra2/Ra1 (Ra4/Ra3) of the arithmetic mean roughness Ra1 (Ra3) to the arithmetic mean roughness Ra2 (Ra4) is preferably from 3 to 30, both inclusive.
- Ra2/Ra1 (Ra4/Ra3) is from 3 to 30, both inclusive, significant turbulence in the first fluid can be generated without decreasing the speed in which the first fluid flows, and thus further improve the heat exchange efficiency.
- a slurry is manufactured by adding and mixing together a sintering aid, a binder, a solvent, a dispersing agent, and the like with a powder formed from primary component raw materials (silicon carbide, alumina, and the like), as appropriate. Then, using this slurry, a ceramic green sheet is formed by a doctor blade method.
- examples of other methods for forming the ceramic green sheet include manufacturing granules by spray drying and granulating the slurry by a spray drying and granulating method (spray drying method), and molding the obtained granules by roll compaction. Further, the ceramic green sheet may also be obtained by a mechanical pressing method and a cold isostatic pressing (CIP) method using the granules, or by manufacturing a green body rather than a slurry and using an extrusion molding method.
- spray drying method spray drying method
- CIP cold isostatic pressing
- the obtained ceramic green sheet is machined into a preferred profile shape using a metal mold or a laser beam, and machining for forming the introduction hole and the discharge hole is performed.
- the slurry is then applied to each ceramic green sheet, the sheets are laminated and pressurized, and the laminated and pressurized sheets are fired at a firing temperature in accordance with the primary component raw materials.
- the downstream-side introduction hole may be formed so that the region that overlaps with the opening region of the upstream-side introduction hole remains on the ceramic green sheet when viewing the ceramic green sheet for forming the downstream-side introduction hole overlapped with the ceramic green sheet that formed the upstream-side introduction hole.
- the downstream-side introduction hole may be provided so as to differ in position from an outer edge of the ceramic green sheet.
- the positions of each hole from the outer edge of the ceramic green sheet may be made identical and the opening shapes may be made different.
- the same method as described above may be used by replacing “introduction hole” with “discharge hole” and thus a description thereof is omitted.
- a shape of a blade of a metal mold that comes into contact with the applicable edge may be tapered or an angle of incidence of the laser beam may be adjusted during formation of the introduction hole or the discharge hole in the ceramic green sheet described above.
- a pyramid shaped jig may be pressed and pushed against the applicable edge, or the edge may be chamfered by cut processing, for example.
- the protruding area can be formed in the area around the applicable edge by adjusting the clearance between the used blade of the metal mold and mortar when the introduction hole or the discharge hole in the ceramic green sheet described above is press-formed by the metal mold.
- a protruding area can be formed by applying a paste having the same composition as that used for formation of the ceramic green sheet to the area around the applicable edge. Furthermore, at least one portion of the applicable edge of the ceramic green sheet may be made to protrude by pressing the area with a jig or the like.
- a slurry is manufactured by adding and mixing together a sintering aid, a binder, a solvent, a dispersing agent, and the like with a powder formed from primary component raw materials (silicon carbide, alumina, and the like) that constitute each of the members, as appropriate.
- the second member, the third member, and the flange portion can be obtained by manufacturing granules by spray drying and granulating this slurry by a spray drying and granulating method, manufacturing a powder compact having a preferred shape by a mechanical pressing method or a cold isostatic pressing method using the obtained granules, cutting the powder compact as necessary, and firing. Note that grinding may be performed as necessary after firing.
- the powder compact of which the second member and the third member are made may be obtained by an extrusion molding method using a green body rather than the slurry. Further, the powder compact of which the flange portion is made may be formed by laminating the ceramic green sheets in the same way as with the first member.
- a method such as follows may be used.
- the arithmetic mean roughness Ra1 of the inner face of the second member is measured.
- the introduction hole is provided to the ceramic green sheet using an output-adjusted laser beam, the mold is pressed after the introduction hole is provided to the ceramic green sheet, or laser processing or blasting may be performed after firing is performed.
- the same method as described above may be used by replacing “second member” with “third member” and “introduction hole” with “discharge hole”. Thus, a description thereof is omitted.
- the heat exchanger can be obtained by using the obtained first member, second member, third member, and flange portion, applying an adhesive to the bonded parts of each member, disposing each member so that the first fluid communicates therethrough, and curing the adhesive by thermal treatment.
- the hole positions and the hole shapes may be made identical and the first member adjacent to the second member or the third member may be bonded in shifted position.
- the second member and the third member are preferably prepared and bonded in accordance with the number of first members.
- the weight of each member of the upper level is applied to the areas around the introduction hole and the discharge hole of the first member of the lower level, and therefore the second member and the third member disposed between the first members may each be disposed so that a central axis thereof is shifted in the direction in which the first fluid flows. This makes it possible to decrease the possibility of the occurrence of flaws and cracks in the areas near the introduction hole and the discharge hole of the first member of the lower level caused by the applied weight of each member of the upper level.
- the preferred adhesive used is an inorganic adhesive superior in thermal resistance and corrosion resistance.
- examples of such an inorganic adhesive include a paste that contains an SiO 2 —Al 2 O 3 —B 2 O 3 —RO glass (R: alkaline earth metal element) powder and a powder obtained by mixing a silicon metal powder and a silicon carbide powder.
- R alkaline earth metal element
- heat exchanger described above is not particularly limited in application as long as heat exchange is performed, allowing suitable use as a heat exchanger for various laser devices, semiconductor elements, and semiconductor manufacturing devices, for example.
Abstract
Description
- The present invention relates to a heat exchanger.
- Conventionally, heat exchangers have been used in heat exchange systems for cooling, heating, and the like. As an example of such a heat exchanger, there has been proposed a heat exchanger formed by a plurality of substrates that are laminated. Each of the substrates has a plurality of strips arranged substantially parallel side by side as well as slits between the strips, and is provided with recesses that continue in a longitudinal direction on several surfaces of the strips. The strips of adjacent substrates are interconnected to define tubes, the recesses define tube internal channels, and the slits define tube external channels. (Refer to Patent Document 1, for example.)
- Patent Document 1: Japanese Unexamined Patent Application No. 2005-300062A
- In the heat exchangers of recent years, an even superior heat exchange efficiency has been in demand. An object of the present invention is therefore to provide a heat exchanger having a superior heat exchange efficiency.
- A heat exchanger according to the present invention is formed from a ceramic and performs heat exchange between a first fluid and a second fluid. The heat exchanger is provided with a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which the first fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members. In such a heat exchanger, spaces between the plurality of first members serve as second channels through which the second fluid flows. Further, in at least one adjacent pair of the introduction holes, regions that overlap with opening regions of upstream-side introduction holes exist in the walls including downstream-side introduction holes, when viewed in a direction in which the first fluid flows.
- A heat exchanger according to the present invention is formed from a ceramic and performs heat exchange between a first fluid and a second fluid. The heat exchanger is provided with a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which the first fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members. In such a heat exchanger, spaces between the plurality of first members serve as second channels through which the second fluid flows. Further, in at least one adjacent pair of the discharge holes, regions that overlap with opening regions of upstream-side discharge holes exist in the walls including downstream-side discharge holes, when viewed in a direction in which the first fluid flows.
- The heat exchanger according to the present invention has a superior heat exchange efficiency.
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FIG. 1 is a perspective view illustrating an example of a heat exchanger according to a present embodiment. -
FIG. 2 is a cross-sectional view illustrating an example of the heat exchanger according to the present embodiment. -
FIG. 3 is a perspective view illustrating an example of a first member that constitutes the heat exchanger according to the present embodiment. -
FIG. 4 is a perspective view illustrating an example of a second member and a third member that constitute the heat exchanger according to the present embodiment. -
FIG. 5 is a partial cross-sectional view illustrating an example of the heat exchanger according to the present embodiment. -
FIG. 6 is an enlarged partial cross-sectional view illustrating an example of the second member side of the heat exchanger according to the present embodiment. -
FIG. 7 is an enlarged partial cross-sectional view illustrating another example of the second member side of the heat exchanger according to the present embodiment. - A heat exchanger according to the present embodiment will be described hereinafter using the drawings. Note that, in the following descriptions, identical members in the drawings will be denoted using the same symbols.
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FIG. 1 is a perspective view andFIG. 2 is a cross-sectional view illustrating an example of a heat exchanger according to the present embodiment. Further,FIG. 3 is a perspective view illustrating an example of a first member constituting the heat exchanger according to the present embodiment, andFIG. 4 is a perspective view illustrating an example of a second member and a third member that constitute the heat exchanger according to the present embodiment. Further,FIG. 5 is a partial cross-sectional view of the heat exchanger according to the present embodiment, andFIGS. 6 and 7 are enlarged partial cross-sectional views of the second member side of the heat exchanger according to the present embodiment. - First, the configuration of the heat exchanger according to the present embodiment will be described using
FIGS. 1 and 2 . A heat exchanger 1 of the example illustrated inFIG. 1 includes a plurality offirst members 2. Each of thefirst members 2 includes walls provided withintroduction holes 5 on a first end side anddischarge holes 6 on a second end side. Spaces connecting theintroduction holes 5 and thedischarge holes 6 serve asfirst channels 8 through which a first fluid flows. The heat exchanger 1 further includessecond members 3 that communicate with theintroduction holes 5 at the first end side of the plurality offirst members 2 to introduce the first fluid to thefirst members 2. The heat exchanger 1 further includesthird members 4 that communicate with thedischarge holes 6 at the second end side of the plurality offirst members 2 to discharge the first fluid that has flowed through thefirst members 2. Further, spaces between the plurality offirst members 2 serve assecond channels 10 through which a second fluid flows. Note that the “first end side” here can also be expressed as an upstream side of the first fluid, and the “second end side” can also be expressed as a downstream side of the first fluid. - While the heat exchanger 1 that includes three
first members 2 is illustrated inFIGS. 1 and 2 as an example, the heat exchanger 1 is not limited thereto and may include two or morefirst members 2. Further, a fluid, a vapor, or the like may be used as the first fluid and the second fluid, in accordance with the objective. For example, the first fluid may be a fluid such as water, and the second fluid may be a vapor such as gas. - The
first members 2, thesecond members 3, and thethird members 4 that constitute the heat exchanger 1 according to the present embodiment are formed from a ceramic. With these members thus formed from a ceramic, the heat exchanger 1 has superior thermal resistance and corrosion resistance. The types of ceramics used can be selected as appropriate in accordance with the characteristics of the fluid. Examples include an oxide ceramic, such as an alumina ceramic or a cordierite ceramic, and a non-oxide ceramic, such as a silicon nitride ceramic, an aluminum nitride ceramic, or a silicon carbide ceramic. - When these members are formed from a silicon carbide ceramic having a silicon carbide content exceeding 50 mass % with respect to all components that constitute the ceramic, the heat exchange efficiency of the heat exchanger 1 can be increased due to a high thermal conductivity. Further, when these members are formed from an alumina ceramic having an alumina content exceeding 50 mass % with respect to all components that constitute the ceramic, the raw material cost decreases and machineability increases, thus the heat exchanger 1 can be manufactured at a cost lower than that when other materials are used.
-
FIGS. 1 and 2 illustrate an example in which the heat exchanger 1 includes aflange portion 16 at the lowest level. Theflange portion 16 includes anintroduction portion 11 and adischarge portion 12 for the first fluid. The path of the first fluid in this example will now be described. First, the first fluid enters the heat exchanger 1 from theintroduction portion 11 of theflange portion 16, flows through anintroduction channel 7, passes through theintroduction holes 5 and thefirst channels 8 of thefirst members 2, flows through thedischarge holes 6, and is then discharged from thedischarge portion 12 via adischarge channel 9. - By satisfying such a configuration, the heat exchanger 1 of the present embodiment can perform heat exchange efficiently with the second fluid that flows through the
second channel 10 while the first fluid flows through thefirst channel 8, in particular. - Further, when a channel that connects the
introduction portion 11 and thedischarge portion 12 is provided in theflange portion 16, heat exchange can be performed in theflange portion 16 as well. Thus, the heat exchange efficiency of the heat exchanger 1 can be improved. Note that theflange portion 16 is not mandatory in a configuration of the heat exchanger 1. The opening of thesecond member 3 positioned at the lowest level inFIGS. 1 and 2 may serve as the introduction port of the first fluid, and the opening of thethird member 4 positioned at the lowest level may serve as the discharge port of the first fluid. - Further, in the heat exchanger 1, the first fluid and the second fluid can be disposed so as to form a cross flow, or disposed so as to flow in the same direction.
- Further, while not illustrated in
FIGS. 1 and 2 , a partition portion capable of branching the first fluid may be provided in thefirst member 2. When the partition portion is thus provided, a contact surface area with the first fluid is increased. Thus, the heat exchange efficiency can be improved. - Next, each member that constitutes the heat exchanger according to the present embodiment will be described using
FIGS. 3 and 4 . First, thefirst member 2 includes theintroduction hole 5 that communicates with thesecond member 3, and thedischarge hole 6 that communicates with thethird member 4, as illustrated inFIG. 3 . Note that whileFIG. 3 illustrates an example in which theintroduction hole 5 and thedischarge hole 6 are provided in mutually corresponding positions of an upper wall and a lower wall, forming through-holes, thefirst member 2 of this configuration corresponds to afirst member 2 b and afirst member 2 c inFIGS. 1 and 2 . Further, thefirst member 2 a disposed on the highest level does not require the first fluid to flow further upward on the upstream side, and the first fluid never flows from above on the downstream side. Thus, theintroduction hole 5 and thedischarge hole 6 are included only on the lower wall of the walls constituting thefirst member 2 a. - Next, the
second member 3 and thethird member 4 are, for example, cylindrical members, as illustrated inFIG. 4 . Note that a cross section of each of thesecond members 3 and thethird members 4 orthogonal to the direction in which the first fluid flows is not limited to a circular shape. As long as the first fluid can flow through the interior and the height allows provision of thesecond channel 10, the cross section may be an elliptical shape, a polygonal shape such as a triangular shape or a quadrilateral shape, or the like. - Then, in addition to the configuration described above, in the heat exchanger 1 of the present embodiment, in at least one adjacent pair of the introduction holes 5, regions that overlap with opening regions of the upstream-side introduction holes exist in the walls including the downstream-side introduction holes, when viewed in the direction in which the first fluid flows. With satisfaction of such a configuration, when the first fluid flows through the
introduction channel 7, the first fluid collides with the regions that overlap with the opening regions of the upstream-side introduction holes in the walls including the downstream-side introduction holes, causing change in the flow of the first fluid and, as a result, turbulence occurs. Then, the number of opportunities for contact between the first fluid and an inner face (hereinafter referred to as “turbulence region”) of the channel that comes into contact with the generated turbulence increases. As a result, the heat exchanger 1 of the present embodiment has a superior heat exchange efficiency. - Here, the one adjacent pair of the introduction holes 5, according to the heat exchanger 1 illustrated in
FIG. 2 , are anintroduction hole 5 a and anintroduction hole 5 b, theintroduction hole 5 b and anintroduction hole 5 c, theintroduction hole 5 c and anintroduction hole 5 d, or theintroduction hole 5 d and anintroduction hole 5 e, and are thus two of the introduction holes 5 adjacently positioned in the direction in which the first fluid flows. - Further, of the one adjacent pair of the introduction holes 5, the upstream-side introduction hole is the
introduction hole 5 positioned upstream in the direction in which the first fluid flows, and the downstream-side introduction hole is theintroduction hole 5 positioned downstream in the direction in which the first fluid flows. For example, for the combination of theintroduction hole 5 b and theintroduction hole 5 c, theintroduction hole 5 b is the downstream-side introduction hole, and theintroduction hole 5 c is the upstream-side introduction hole. Further, for the combination of theintroduction hole 5 c and theintroduction hole 5 d, theintroduction hole 5 c is the downstream-side introduction hole, and theintroduction hole 5 d is the upstream-side introduction hole. Thus, thesame introduction hole 5 may be an upstream-side introduction hole as well as a downstream-side introduction hole, depending on the combination. - Examples in which the one adjacent pair of the introduction holes 5 satisfy the configuration described above include when the adjacent pair of the introduction holes 5 have the same opening shape and the opening region of the upstream-side introduction hole is larger than the opening region of the downstream-side introduction hole, and when the opening shapes of the adjacent pair of the introduction holes 5 are different. From the viewpoint of not delaying the flow rate of the fluid more than necessary, however, a case where the adjacent pair of the introduction holes 5 have the same opening shape, but the centers of the pair of the introduction holes 5 are shifted in a direction that intersects the direction of flow when viewed in the direction in which the first fluid flows is preferred. Note that the opening shape of the
introduction hole 5 is not limited to a circular shape as illustrated inFIG. 3 , and may be an elliptical shape, a polygonal shape such as a triangular shape or a quadrilateral shape, or the like. - Next, a configuration in which, in the adjacent pair of the introduction holes 5, a region that overlaps with the opening region of the upstream-side introduction hole exists in the wall including the downstream-side introduction hole, when viewed in the direction in which the first fluid flows, will be described using
FIG. 5 . Note that whileFIG. 5 illustrates an example in which thefirst member 2 b includes three walls, the number of walls that constitute thefirst member 2 b is not limited thereto, and may be three or greater. - As illustrated in
FIG. 5 , when the adjacent pair of the introduction holes 5 are theintroduction hole 5 b and theintroduction hole 5 c, theintroduction hole 5 b is the downstream-side introduction hole and theintroduction hole 5 c is the upstream-side introduction hole. Then, “in the adjacent pair of the introduction holes 5, a region that overlaps with the opening region of the upstream-side introduction hole exists in the wall including the downstream-side introduction hole, when viewed in the direction in which the first fluid flows” refers to when the opening region of theintroduction hole 5 c (which is the upstream-side introduction hole) is moved in parallel in the direction in which the first fluid flows to awall 13 b that includes the downstream-side introduction hole, and when a section that overlaps with the opening region of the upstream-side introduction hole exists in thewall 13 b. In other words, according to the above-described configuration, when the opening region of theintroduction hole 5 c is moved in parallel toward theintroduction hole 5 b in the direction in which the first fluid flows, a section in which there is no overlap with the opening region of theintroduction hole 5 b exists. - According to the example illustrated in
FIG. 5 , a portion of the first fluid that has passed through asecond member 3 b and theintroduction hole 5 b, when viewed in the direction in which the first fluid flows, collides with thewall 13 b where the region that overlaps with the opening region of theintroduction hole 5 c exists, forming turbulence regions on the inner face of asecond member 3 a as well as on the inner face of thefirst member 2 b, which are adjacent to the section where the colliding occurred. Then, in such a turbulence region, the number of opportunities for contact with the first fluid increases, thereby improving the heat exchange efficiency of the heat exchanger 1. - Note that while the above has been described using
FIG. 5 and thus describes the introduction holes 5 of thefirst member 2 b, the same effect as described above can be achieved with the other combinations as well as long as, in the adjacent pair of the introduction holes 5, a region that overlaps with the opening region of the upstream-side introduction hole exists in the wall that includes the downstream-side introduction hole, when viewed in the direction in which the first fluid flows. Further, from the viewpoint of expanding the turbulence regions, preferably the overlapping region described above has a surface area equivalent to at least 10% the surface area of the opening region of the upstream-side introduction hole. - Then, while a description has been given using the adjacent pair of the introduction holes 5, the same effect as described above can be achieved with the adjacent pair of the discharge holes 6 as well as long as, in at least one adjacent pair of the discharge holes 6, a region that overlaps with the opening region of the upstream-side discharge hole exists in the wall that includes the downstream-side discharge hole, when viewed in the direction in which the first fluid flows.
- Further, in the heat exchanger 1 of the present embodiment, preferably the at least one of the plurality of
first members 2 includes a chamfered area on a center section thereof, on an edge of theintroduction hole 5 positioned on the downstream side of the first fluid, the edge being on an interior side of thefirst member 2. - The above-described configuration will now be described using
FIG. 6 . InFIG. 6 , the first fluid flows from thelower introduction hole 5 c into thefirst member 2 b, and branches and flows to thefirst channel 8 extending from a first end side to a second end side, and to theupper introduction hole 5 b. At this time, a chamferedportion 14 is provided to the center section of thefirst member 2 b (the right side inFIG. 6 ), on the edge of theintroduction hole 5 b of thewall 13 b that constitutes thefirst member 2 b, and thus the first fluid can be smoothly branched. Note that the chamferedportion 14 serving as a chamfered area is a section in which a corner portion serving as the edge is cut to form a plane. - Thus, because the first fluid can be smoothly branched by providing the chamfered
portion 14 to the center section of thefirst member 2 b, on the edge of theintroduction hole 5 b positioned on the downstream side of the first fluid, the edge being on the interior side of thefirst member 2 b, a configuration in which turbulence occurs further on the upstream side of the first fluid than the chamferedportion 14 is preferred. With such a configuration, the first fluid in which a turbulence has occurred is smoothly branched and the turbulence region is expanded, and thus, the heat exchange efficiency can be further improved. - Further, while not illustrated, the same can be said for the
discharge channel 9 as well. Thus, at least one of the plurality offirst members 2 includes a chamfered area on the center section thereof, on the edge of thedischarge hole 6 positioned on the downstream side of the first fluid, the edge being on the interior side of thefirst member 2. Thus, the first fluid that has flowed through thefirst channel 8 and the first fluid that has flowed from theupper discharge hole 6 can be smoothly merged. - Further, in the heat exchanger 1 of the present embodiment, preferably at the least one of the plurality of
first members 2 includes a protruding area at a position on the center section thereof, in an area around the edge of theintroduction hole 5 positioned on the downstream side of the first fluid, the edge being on an interior side of thefirst member 2. In the following, this protruding area is described as a protrudingportion 15. - The above-described configuration will now be described using
FIG. 7 . InFIG. 7 , the first fluid flows from thelower introduction hole 5 c into thefirst member 2 b, and branches and flows to thefirst channel 8 extending from the first end side to the second end side, and to theupper introduction hole 5 b. At this time, because the protrudingportion 15 is provided to a position on the center section of thefirst member 2 b, in an area around the edge of theintroduction hole 5 b of thewall 13 b that constitutes thefirst member 2 b, turbulence can be generated even when the first fluid branches to thefirst channel 8, and thus, the heat exchange efficiency can be further improved. Here, given the inner face of thewall 13 b that constitutes thefirst member 2 b, excluding the area around the edge of theintroduction hole 5 b, as a reference plane, the protrudingportion 15 is an area of thiswall 13 b that protrudes at least 1 μm on thefirst channel 8 side of this reference plane. - Further, while not illustrated, when the at least one of the plurality of
first members 2 includes the protrudingportion 15 at a position on the center section thereof, in an area around the edge of theintroduction hole 5 positioned on the downstream side of the first fluid, the edge being on the interior side of thefirst member 2, turbulence occurs from a merge with a main flow that flows through thefirst channel 8 and a merge with the first fluid that has flowed from theupper discharge hole 6 when the first fluid that has flowed through thefirst channel 8 passes over the protrudingportion 15, thereby improving the heat exchange efficiency. - Further, in the heat exchanger 1 of the present embodiment, preferably the inner face of the
introduction hole 5 adjacent to thesecond member 3 on the downstream side of first fluid has an arithmetic mean roughness Ra2 that is greater than an arithmetic mean roughness Ra1 of the inner face of thesecond member 3. - A description is given below, using
FIG. 5 . In the configuration illustrated inFIG. 5 , when the arithmetic mean roughness Ra2 of the inner face of theintroduction hole 5 c is greater than the arithmetic mean roughness Ra1 of the inner face of thesecond member 3 b, turbulence occurs when the first fluid flows from the interior of thesecond member 3 b into theintroduction hole 5 c, and thus, the heat exchange efficiency can be improved. In particular, theintroduction hole 5 c is preferably included in the turbulence region that occurs due to the existence of the region that overlaps with the opening region of the upstream-side introduction hole in the wall that includes the downstream-side introduction hole. - Further, when an arithmetic mean roughness Ra4 on the inner face of the
discharge hole 6 on the downstream side of the first fluid adjacent to thethird member 4 is greater than an arithmetic mean roughness Ra3 of the inner face of thethird member 4 in thedischarge channel 9 as well, turbulence occurs when the first fluid flows from the interior of thethird member 4 into thedischarge hole 6, and thus, the heat exchange efficiency can be improved. - Here, the arithmetic mean roughness values Ra1 to R4 described above may be found by measurement using a contact-type surface roughness gauge in accordance with JIS B 0601 (2013). Examples of measurement conditions include, for example, a measurement length of 2.5 mm, a cutoff value of 0.8 mm, and a stylus scanning speed set to 0.3 mm/sec. In the following descriptions, items related to the
discharge channel 9 will be described in parenthesis. Then, of the inner face of the second member 3 (third member 4) and the inner face of the introduction hole 5 (discharge hole 6), a section near adjacent positions may be defined as a measurement location, and the arithmetic mean roughness values Ra1 (Ra3) and Ra2 (Ra4) may be found by measuring at least three locations each in a direction along the direction in which the first fluid flows, and calculating the average value thereof - Further, a ratio Ra2/Ra1 (Ra4/Ra3) of the arithmetic mean roughness Ra1 (Ra3) to the arithmetic mean roughness Ra2 (Ra4) is preferably from 3 to 30, both inclusive. When Ra2/Ra1 (Ra4/Ra3) is from 3 to 30, both inclusive, significant turbulence in the first fluid can be generated without decreasing the speed in which the first fluid flows, and thus further improve the heat exchange efficiency.
- Next, an example of a manufacturing method of the heat exchanger according to the embodiment will be described.
- First, for the first member, for example, a slurry is manufactured by adding and mixing together a sintering aid, a binder, a solvent, a dispersing agent, and the like with a powder formed from primary component raw materials (silicon carbide, alumina, and the like), as appropriate. Then, using this slurry, a ceramic green sheet is formed by a doctor blade method.
- Note that examples of other methods for forming the ceramic green sheet include manufacturing granules by spray drying and granulating the slurry by a spray drying and granulating method (spray drying method), and molding the obtained granules by roll compaction. Further, the ceramic green sheet may also be obtained by a mechanical pressing method and a cold isostatic pressing (CIP) method using the granules, or by manufacturing a green body rather than a slurry and using an extrusion molding method.
- Next, the obtained ceramic green sheet is machined into a preferred profile shape using a metal mold or a laser beam, and machining for forming the introduction hole and the discharge hole is performed. The slurry is then applied to each ceramic green sheet, the sheets are laminated and pressurized, and the laminated and pressurized sheets are fired at a firing temperature in accordance with the primary component raw materials.
- Here, to make, in a pair of adjacent introduction holes, a region that overlaps with the opening region of the upstream-side introduction hole, exist on the wall that includes the downstream-side introduction hole when viewed in the direction in which the first fluid flows, the downstream-side introduction hole may be formed so that the region that overlaps with the opening region of the upstream-side introduction hole remains on the ceramic green sheet when viewing the ceramic green sheet for forming the downstream-side introduction hole overlapped with the ceramic green sheet that formed the upstream-side introduction hole.
- Specifically, given that the opening shapes are identical, the downstream-side introduction hole may be provided so as to differ in position from an outer edge of the ceramic green sheet. Or, the positions of each hole from the outer edge of the ceramic green sheet may be made identical and the opening shapes may be made different. Further, to make, in adjacent discharge holes, a region that overlaps with the opening region of the upstream-side discharge hole, exist on the wall that includes the downstream-side discharge hole when viewed in the direction in which the first fluid flows, the same method as described above may be used by replacing “introduction hole” with “discharge hole” and thus a description thereof is omitted.
- Further, to make at least one of the plurality of first members include a chamfered area on the center section of the at least one of the plurality of the first members, on an edge of the introduction hole or discharge hole positioned on the downstream side of the first fluid, the edge being on the interior side of the at least one of the plurality of the first members, a shape of a blade of a metal mold that comes into contact with the applicable edge may be tapered or an angle of incidence of the laser beam may be adjusted during formation of the introduction hole or the discharge hole in the ceramic green sheet described above. Or, after formation of the introduction hole or the discharge hole, a pyramid shaped jig may be pressed and pushed against the applicable edge, or the edge may be chamfered by cut processing, for example.
- Further, to make at least one of the plurality of first members include a protruding area at a position on the center section of the at least one of the plurality of the first members, in an area around the edge of the introduction hole or discharge hole positioned on the downstream side of the first fluid, the edge being on the interior side of the at least one of the plurality of the first members, the protruding area can be formed in the area around the applicable edge by adjusting the clearance between the used blade of the metal mold and mortar when the introduction hole or the discharge hole in the ceramic green sheet described above is press-formed by the metal mold. Further, after the introduction hole or the discharge hole has been provided to the ceramic green sheet, a protruding area can be formed by applying a paste having the same composition as that used for formation of the ceramic green sheet to the area around the applicable edge. Furthermore, at least one portion of the applicable edge of the ceramic green sheet may be made to protrude by pressing the area with a jig or the like.
- Next, for the second member, the third member, and the flange portion, a slurry is manufactured by adding and mixing together a sintering aid, a binder, a solvent, a dispersing agent, and the like with a powder formed from primary component raw materials (silicon carbide, alumina, and the like) that constitute each of the members, as appropriate. Then, the second member, the third member, and the flange portion can be obtained by manufacturing granules by spray drying and granulating this slurry by a spray drying and granulating method, manufacturing a powder compact having a preferred shape by a mechanical pressing method or a cold isostatic pressing method using the obtained granules, cutting the powder compact as necessary, and firing. Note that grinding may be performed as necessary after firing.
- Further, the powder compact of which the second member and the third member are made may be obtained by an extrusion molding method using a green body rather than the slurry. Further, the powder compact of which the flange portion is made may be formed by laminating the ceramic green sheets in the same way as with the first member.
- Further, to make the arithmetic mean roughness Ra2 of the inner face of the introduction hole on the downstream side of the first fluid adjacent to the second member greater than the arithmetic mean roughness Ra1 of the inner face of the second member, a method such as follows may be used. For example, the arithmetic mean roughness Ra1 of the inner face of the second member is measured. Then, to ensure that the arithmetic mean roughness Ra2 of the inner face of the introduction hole on the downstream side of the first fluid adjacent to the second member is greater than the arithmetic mean roughness Ra1, the introduction hole is provided to the ceramic green sheet using an output-adjusted laser beam, the mold is pressed after the introduction hole is provided to the ceramic green sheet, or laser processing or blasting may be performed after firing is performed.
- Further, to make the arithmetic mean roughness Ra4 of the discharge hole on the downstream side of the first fluid adjacent to the third member greater than the arithmetic mean roughness Ra3 of the inner face of the third member, the same method as described above may be used by replacing “second member” with “third member” and “introduction hole” with “discharge hole”. Thus, a description thereof is omitted.
- Then, the heat exchanger can be obtained by using the obtained first member, second member, third member, and flange portion, applying an adhesive to the bonded parts of each member, disposing each member so that the first fluid communicates therethrough, and curing the adhesive by thermal treatment. Note that while the above has described shifting the positions of the holes to be formed or making the shapes of the holes to be formed different as a way to ensure that, in the introduction holes adjacent to the second member and the discharge holes adjacent to the third member, regions that overlap with opening regions of the upstream-side introduction holes (upstream-side discharge holes) exist in the walls including the downstream-side introduction holes (downstream-side discharge holes), when viewed in the direction in which the first fluid flows, the hole positions and the hole shapes may be made identical and the first member adjacent to the second member or the third member may be bonded in shifted position.
- Further, when the number of first members is to be increased in the heat exchanger, the second member and the third member are preferably prepared and bonded in accordance with the number of first members.
- Further, when the number of first members has been increased, the weight of each member of the upper level is applied to the areas around the introduction hole and the discharge hole of the first member of the lower level, and therefore the second member and the third member disposed between the first members may each be disposed so that a central axis thereof is shifted in the direction in which the first fluid flows. This makes it possible to decrease the possibility of the occurrence of flaws and cracks in the areas near the introduction hole and the discharge hole of the first member of the lower level caused by the applied weight of each member of the upper level.
- Note that the preferred adhesive used is an inorganic adhesive superior in thermal resistance and corrosion resistance. Examples of such an inorganic adhesive include a paste that contains an SiO2—Al2O3—B2O3—RO glass (R: alkaline earth metal element) powder and a powder obtained by mixing a silicon metal powder and a silicon carbide powder. When such a paste is used as the inorganic adhesive, the members can be strongly bonded together without deteriorating the members when thermal treatment is performed, and superior thermal resistance and corrosion resistance are achieved, and thus, the reliability of the heat exchanger can be improved.
- The present invention has been described in detail above. However, the present invention is not limited to the embodiments described above, and various modifications or improvements can be made without departing from the essential spirit of the present invention.
- Further, the heat exchanger described above is not particularly limited in application as long as heat exchange is performed, allowing suitable use as a heat exchanger for various laser devices, semiconductor elements, and semiconductor manufacturing devices, for example.
-
- 1 Heat exchanger
- 2 First member
- 3 Second member
- 4 Third member
- 5 Introduction hole
- 6 Discharge hole
- 7 Introduction channel
- 8 First channel
- 9 Discharge channel
- 10 Second channel
- 11 Introduction portion
- 12 Discharge portion
- 13 Wall including introduction hole and discharge hole
- 14 Chamfered portion
- 15 Protruding portion
- 16 Flange portion
Claims (10)
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JP2014153946 | 2014-07-29 | ||
JP2014-153946 | 2014-07-29 | ||
PCT/JP2015/071513 WO2016017697A1 (en) | 2014-07-29 | 2015-07-29 | Heat exchanger |
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US20170219302A1 true US20170219302A1 (en) | 2017-08-03 |
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ID=55217595
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US15/329,699 Abandoned US20170219302A1 (en) | 2014-07-29 | 2015-07-29 | Heat exchanger |
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EP (1) | EP3176532B1 (en) |
JP (1) | JP6325674B2 (en) |
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Cited By (1)
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US11486648B2 (en) | 2017-01-30 | 2022-11-01 | Kyocera Corporation | Heat exchanger |
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JP6363485B2 (en) * | 2014-12-03 | 2018-07-25 | 京セラ株式会社 | Ceramic channel body and heat exchanger provided with the same |
WO2021172331A1 (en) * | 2020-02-27 | 2021-09-02 | 三菱重工業株式会社 | Heat exchange core, heat exchanger, and method for manufacturing heat exchange core |
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Also Published As
Publication number | Publication date |
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JP6325674B2 (en) | 2018-05-16 |
EP3176532A4 (en) | 2018-08-22 |
JPWO2016017697A1 (en) | 2017-04-27 |
EP3176532A1 (en) | 2017-06-07 |
EP3176532B1 (en) | 2022-07-20 |
WO2016017697A1 (en) | 2016-02-04 |
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