WO2016013565A1 - Dispositif de commande et procédé de commande - Google Patents

Dispositif de commande et procédé de commande Download PDF

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Publication number
WO2016013565A1
WO2016013565A1 PCT/JP2015/070788 JP2015070788W WO2016013565A1 WO 2016013565 A1 WO2016013565 A1 WO 2016013565A1 JP 2015070788 W JP2015070788 W JP 2015070788W WO 2016013565 A1 WO2016013565 A1 WO 2016013565A1
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WO
WIPO (PCT)
Prior art keywords
liquid
recess
discharge port
fluid passage
swirl flow
Prior art date
Application number
PCT/JP2015/070788
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English (en)
Japanese (ja)
Inventor
斉 岩坂
英幸 徳永
裕二 河西
Original Assignee
株式会社ハーモテック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社ハーモテック filed Critical 株式会社ハーモテック
Priority to JP2015553940A priority Critical patent/JP5945641B1/ja
Publication of WO2016013565A1 publication Critical patent/WO2016013565A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a control device and a control method for a holding device that generates a negative pressure between a plate-like member by discharging liquid and holds the member.
  • Patent Document 1 proposes an apparatus that transports a plate-shaped member in a non-contact manner using Bernoulli's theorem.
  • a fluid is supplied into a cylindrical chamber opened on the lower surface of the device to generate a swirling flow, and the plate-like member is sucked by the negative pressure at the center of the swirling flow, while the fluid flowing out of the circular chamber is used.
  • Patent Document 1 also proposes using a liquid as a fluid.
  • An object of the present invention is to increase the generated negative pressure in a holding device that holds a held body by generating a negative pressure with the held body by discharging a liquid.
  • the present invention is a control device for controlling the supply of liquid to a holding device that holds the held body by generating a negative pressure between the held body by discharging the liquid
  • the holding device Is a columnar main body, a flat end surface formed on the main body and facing the object to be held, a concave portion formed on the end surface, and one or more for discharging liquid into the concave portion through a discharge port A fluid passage
  • the control device controls the supply of the liquid so that the recess is filled with the liquid until the discharge port of the fluid passage is covered with the liquid in a state where no swirl flow is formed in the recess.
  • the supply of the liquid is controlled so that a swirling flow is formed by the liquid discharged from the fluid passage into the recess after the recess is filled with the liquid until the discharge port of the fluid passage is covered with the liquid.
  • Provide control device .
  • the control device sets the flow rate of the liquid supplied into the concave portion to a first amount, and in a state where no swirl flow is formed in the concave portion, the discharge passage of the fluid passage is covered with the liquid. After the recess is filled with liquid and the recess is filled with liquid until the discharge port of the fluid passage is covered with liquid, the flow rate of the liquid supplied into the recess is changed from the first amount to the first amount. The amount may be changed to a second amount larger than the amount of 1, and a swirl flow may be formed by the liquid discharged from the fluid passage into the recess.
  • the one or more fluid passages are provided on a first fluid passage for discharging liquid from a first discharge port provided on a bottom surface of the recess, and on an inner peripheral side surface of the recess.
  • a second fluid passage for discharging liquid from the second discharge port, and the control device supplies the liquid into the recess through the first fluid passage, and the swirl flow in the recess.
  • the recess is filled with liquid until the second discharge port is covered with liquid
  • the recess is filled with liquid until the second discharge port is covered with liquid.
  • the supply of the liquid through the first fluid passage may be stopped, and the swirl flow may be formed by supplying the liquid into the recess through the second fluid passage.
  • the one or more fluid passages are configured to discharge a liquid from a third discharge port provided on an inner peripheral side surface of the concave portion to form a first swirl flow. And discharging a liquid from a fourth discharge port provided on the inner peripheral side surface of the recess to form a second swirl flow swirling in a direction opposite to the swirl direction of the first swirl flow.
  • the control device supplies the liquid into the concave portion through the third and fourth fluid passages, and in the state where the swirl flow is not formed in the concave portion, the third control device includes the third fluid passage.
  • the supply of the liquid is controlled so that the inside of the recess is filled with the liquid until the discharge port is covered with the liquid, and after the inside of the recess is filled with the liquid until the third discharge port is covered with the liquid, the third The fourth fluid passage is maintained while maintaining the supply of the liquid through the fluid passage.
  • the supply of liquid is stopped, may be formed a swirl flow by the liquid discharged from the third fluid passage in the recess over.
  • the present invention is a control method for controlling the supply of liquid to a holding device that holds the held body by generating a negative pressure between the held body by discharging the liquid,
  • the holding device discharges the liquid through the columnar main body, the flat end surface formed on the main body and facing the held body, the concave portion formed on the end surface, and the discharge port through the discharge port 1
  • the control method controls the supply of liquid so that the recess is filled with liquid until the discharge port of the fluid path is covered with the liquid in a state where no swirl flow is formed in the recess.
  • Control supply To provide a control method and a step.
  • the negative pressure can be increased in the holding device that holds the held body by generating a negative pressure between the held body by discharging the liquid.
  • FIG. 2 is a sectional view taken along line AA in FIG. 1.
  • FIG. 2 is a sectional view taken along line BB in FIG. 2 is a diagram illustrating an example of a circuit configuration of a transport system 100.
  • FIG. 4 is a flowchart showing an example of a control operation executed by the microcomputer 4. It is a graph shown about an example of the relationship between a flow volume and suction pressure. It is a perspective view which shows an example of the turning flow formation body 5 which concerns on 2nd Embodiment. It is CC sectional view taken on the line of FIG.
  • FIG. 8 is a sectional view taken along line DD of FIG.
  • FIG. 2 is a diagram illustrating an example of a circuit configuration of a transport system 200.
  • FIG. It is a flowchart which shows an example of the control operation performed by the microcomputer 4A. It is a perspective view which shows an example of the rotational flow formation body 7 which concerns on 3rd Embodiment. It is the EE sectional view taken on the line of FIG. It is the FF sectional view taken on the line of FIG. 2 is a diagram illustrating an example of a circuit configuration of a transport system 300.
  • FIG. It is a flowchart which shows an example of the control operation performed by the microcomputer 4B.
  • FIG. 3 is a diagram illustrating an example of a configuration of a transport device 10.
  • FIG. 3 is a diagram illustrating an example of a configuration of a transport device 20.
  • SYMBOLS 1 Swirling flow formation body, 2 ... Solenoid valve, 3 ... Liquid supply pump, 4 ... Microcomputer, 5 ... Swirling flow formation body, 7 ... Swirling flow formation body, 10 ... Conveyance apparatus, 11 ... Main body, 12 ... Recessed part, DESCRIPTION OF SYMBOLS 13 ... End surface, 14 ... Discharge port, 15 ... Inclined surface, 16 ... Supply port, 17 ... Annular channel, 18 ... Communication channel, 19 ... Supply channel, 20 ... Conveyor device, 51 ... Main body, 52 ... Recess, 53 ... End surface , 54 ... discharge port, 55 ... inclined surface, 56 ...
  • FIG. 1 is a perspective view showing an example of a swirl flow forming body 1 according to a first embodiment of the present invention.
  • 2 is a cross-sectional view taken along line AA in FIG. 3 is a cross-sectional view taken along line BB in FIG.
  • the swirl flow forming body 1 is an apparatus for holding and transporting a plate-like member such as a semiconductor wafer or a glass substrate.
  • the swirl flow forming body 1 generates a negative pressure between the plate-like member by discharging the liquid and holds the member.
  • the liquid is, for example, pure water or carbonated water.
  • the material of the swirl flow forming body 1 is, for example, an aluminum alloy.
  • This swirl flow forming body 1 is an example of a “holding device” according to the present invention.
  • the swirl flow forming body 1 includes a main body 11, a recess 12, an end surface 13, two discharge ports 14, and an inclined surface 15.
  • the main body 11 has a cylindrical shape.
  • the end surface 13 is formed in a flat shape on one surface of the main body 11 (specifically, a surface facing a plate-like member that is a body to be held) (hereinafter referred to as “bottom surface”).
  • the recess 12 has a cylindrical shape and is formed on the end surface 13.
  • the recess 12 is formed coaxially with the main body 11.
  • the two discharge ports 14 are formed on the inner peripheral side surface of the main body 11 facing the recess 12.
  • the two discharge ports 14 are disposed so as to face each other.
  • the main body 11 or the recess 12 is arranged point-symmetrically about the central axis of the central axis.
  • the liquid supplied to the swirl flow forming body 1 is discharged into the recess 12 through each discharge port 14.
  • the inclined surface 15 is formed in the opening of the recess 12.
  • the swirling flow forming body 1 also includes a supply port 16, an annular passage 17, a communication passage 18, and two supply passages 19.
  • the supply port 16 has a circular shape and is provided at the center of the upper surface of the main body 11 (that is, the surface opposite to the bottom surface).
  • the supply port 16 is connected to a later-described liquid supply pump 3 through, for example, a tube, and the liquid is supplied into the main body 11 through the supply port 16.
  • the annular passage 17 has a cylindrical shape and is formed inside the main body 11 so as to surround the recess 12.
  • the annular passage 17 is formed coaxially with the recess 12.
  • the annular passage 17 supplies the liquid supplied from the communication passage 18 to the supply passage 19.
  • the communication path 18 is provided inside the main body 11 and extends linearly in the radial direction of the bottom surface or top surface of the main body 11.
  • the communication path 18 communicates with the annular path 17 at both ends thereof.
  • the communication path 18 supplies the liquid supplied into the main body 11 via the supply port 16 to the annular path 17.
  • Each of the two supply paths 19 discharges liquid into the recess 12 via the discharge port 14 and forms a swirl flow in the recess 12.
  • each supply passage 19 is formed so as to be substantially parallel to the end surface 13 and to extend in a tangential direction with respect to the outer periphery of the recess 12, one end thereof communicating with the annular passage 17, and the other end discharging. It communicates with the outlet 14.
  • the supply passage 19 is an example of the “fluid passage” according to the present invention.
  • the liquid When the liquid is supplied to the swirl flow forming body 1 described above via the supply port 16, the liquid passes through the communication path 18, the annular path 17, and the supply path 19 from the discharge port 14 into the recess 12. Discharged.
  • the liquid discharged into the recess 12 is rectified as a swirl flow in the recess 12 and then flows out from the opening of the recess 12.
  • a plate-like member is present opposite to the end face 13
  • the flow of the external fluid (for example, air) into the recess 12 is restricted, and the center of the swirl flow is caused by the centrifugal force and the entrainment effect of the swirl flow.
  • the density of fluid molecules per unit volume of the part is reduced, and a negative pressure is generated between the swirl flow forming body 1 and the plate member.
  • the plate-like member is pressed by the surrounding fluid and pulled toward the end face 13 side.
  • the distance between the end surface 13 and the plate-like member approaches, the amount of liquid flowing out from the recess 12 is limited, the speed of the liquid discharged from the discharge port 14 into the recess 12 is reduced, and the swirl flow The pressure in the center rises.
  • the plate-shaped member does not contact the end surface 13, and a certain distance is maintained between the plate-shaped member and the end surface 13.
  • FIG. 4 is a diagram illustrating an example of a circuit configuration of the transport system 100 including the swirl flow forming body 1.
  • the supply port 16 of the swirl flow forming body 1 is connected to the liquid supply pump 3 via the electromagnetic valve 2 by, for example, a tube.
  • the electromagnetic valve 2 is connected to the microcomputer 4.
  • the solenoid valve 2 is specifically a proportional solenoid valve, and its opening degree is adjusted based on a control signal output from the microcomputer 4.
  • the microcomputer 4 outputs a control signal to the electromagnetic valve 2 in accordance with a predetermined program, and the flow rate of the liquid supplied to the swirling flow forming body 1 (more specifically, the swirling flow forming body per unit time). 1) is controlled.
  • the microcomputer 4 is an example of the “control device” according to the present invention.
  • FIG. 5 is a flowchart showing an example of a control operation executed by the microcomputer 4. This control operation is performed when the plate-like member is sucked and held by the swirling flow forming body 1 and transported in the atmosphere.
  • the swirling flow forming body 1 is a plate-like member with the opening of the recess 12 facing upward (in other words, with the recess 12 opening in the direction opposite to the vertical direction). The case where it sucks and conveys is assumed.
  • step Sa1 of this control operation the microcomputer 4 controls the electromagnetic valve 2 to start supplying liquid to the swirl flow forming body 1.
  • the swirling flow forming body 1 is supplied with the liquid at the first flow rate.
  • the first flow rate is a flow rate at which no swirling flow is formed in the recess 12 of the swirling flow forming body 1. This is because if the swirl flow is formed in the recess 12, the liquid flows out of the recess 12 due to the centrifugal force of the swirl flow, and the liquid does not accumulate in the recess 12.
  • step Sa3 the microcomputer 4 starts measuring time with a timer. Then, the microcomputer 4 determines whether or not a predetermined time has elapsed (step Sa3). This predetermined time is the time required for the recess 12 of the swirling flow forming body 1 to become full of water, and this time is measured in advance and stored in the microcomputer 4.
  • step Sa3: NO When the predetermined time has not elapsed (step Sa3: NO), the microcomputer 4 stands by, and when the predetermined time has elapsed (that is, when the concave portion 12 of the swirling flow forming body 1 is full) (step Sa3: YES). ), The electromagnetic valve 2 is controlled to start supplying the liquid at the second flow rate to the swirling flow forming body 1 (step Sa4).
  • the second flow rate is a flow rate higher than the first flow rate, and is a flow rate that enables the formation of a swirling flow in the recess 12 of the swirling flow forming body 1.
  • FIG. 6 shows the flow rate and the suction pressure when the swirl flow is started from the state where the recess 12 of the swirl flow forming body 1 is empty, and when the swirl flow is started when the recess 12 is full. It is a graph shown about an example of a relationship.
  • the horizontal axis of the graph represents the flow rate (unit: L / min), and the vertical axis represents the suction pressure (unit: kPa).
  • the suction pressure when the formation of the swirl flow is started when the recess 12 is full of water is the suction pressure when the formation of the swirl flow is started from the state where the recess 12 is empty. It can be seen that the pressure is twice or more compared to the pressure.
  • the suction pressure shown in the graph was measured using KUMADE (registered trademark) Cup (model number: KMCP-60CW) manufactured by Harmotech Co., Ltd.
  • the inside of the recess 12 is filled with water before the swirl flow is formed in the recess 12, and the swirl flow is formed after that, as shown in FIG.
  • a higher suction pressure can be obtained as compared with the case where the formation of the swirl flow is started in the state where the recess 12 is empty.
  • the concave portion 12 of the swirling flow forming body 1 is filled with the liquid during the conveyance of the plate-like member, and thus is generated when the surface of the plate-like member is dried.
  • the formation of watermarks also known as water stains
  • This watermark is generally composed of an oxide when the plate-like member is a semiconductor wafer.
  • FIG. 7 is a perspective view showing an example of a swirl flow forming body 5 according to a second embodiment of the present invention.
  • 8 is a cross-sectional view taken along the line CC of FIG. 9 is a cross-sectional view taken along the line DD of FIG.
  • the swirl flow forming body 5 is an apparatus for holding and transporting a plate-like member such as a semiconductor wafer or a glass substrate.
  • the swirling flow forming body 5 generates a negative pressure between the plate-like member by discharging the liquid and holds the member.
  • the liquid is, for example, pure water or carbonated water.
  • the material of the swirl flow forming body 5 is, for example, an aluminum alloy.
  • the swirl flow forming body 5 is an example of the “holding device” according to the present invention.
  • the swirl flow forming body 5 includes a main body 51, a recess 52, an end surface 53, two discharge ports 54, an inclined surface 55, and a jet port 56.
  • the main body 51 has a cylindrical shape.
  • the end surface 53 is formed in a flat shape on one surface of the main body 51 (specifically, a surface facing a plate-like member that is to be held) (hereinafter referred to as “bottom surface”).
  • the recess 52 has a cylindrical shape and is formed on the end surface 53.
  • the recess 52 is formed coaxially with the main body 51.
  • the two discharge ports 54 are formed on the inner peripheral side surface of the main body 51 facing the recess 52.
  • the two discharge ports 54 are disposed so as to face each other.
  • the main body 51 or the recess 52 is arranged point-symmetrically about the axis of the central axis.
  • the liquid supplied to the swirl flow forming body 5 is discharged into the recess 52 through each discharge port 54.
  • the inclined surface 55 is formed at the opening of the recess 52.
  • the ejection port 56 has a circular shape and is provided at the center of the bottom surface of the recess 52.
  • the jet port 56 communicates with an introduction path 58 described later and discharges liquid.
  • the swirling flow forming body 5 also has an introduction port 57, an introduction passage 58, an annular passage 59, a communication passage 60, a supply port 61, and two supply passages 62.
  • the introduction port 57 has a circular shape and is provided at the center of the upper surface of the main body 51 (that is, the surface opposite to the bottom surface).
  • the introduction port 57 is connected to the liquid supply pump 3 ⁇ / b> A through, for example, a tube, and the liquid is supplied into the main body 51 through the introduction port 57.
  • the introduction path 58 is provided inside the main body 51 and extends linearly along the central axis of the main body 51.
  • the introduction path 58 is an example of a “fluid passage” according to the present invention, and in particular, an example of a “first fluid passage”.
  • the annular passage 59 has a cylindrical shape and is formed inside the main body 51 so as to surround the recess 52.
  • the annular passage 59 is formed coaxially with the recess 52.
  • the annular passage 59 supplies the liquid supplied from the communication passage 60 to the supply passage 62.
  • the communication path 60 is provided inside the main body 51 and extends linearly in parallel with the central axis of the main body 51.
  • the communication passage 60 communicates with the annular passage 59 at one end, and communicates with the supply port 61 at the other end.
  • the supply port 61 has a circular shape and is provided on the upper surface of the main body 51.
  • the supply port 61 is connected to the liquid supply pump 3 ⁇ / b> A through, for example, a tube, and fluid is supplied into the main body 51 through the supply port 61.
  • each of the two supply paths 62 discharges liquid into the recess 52 via the discharge port 54 and forms a swirl flow in the recess 52.
  • each supply passage 62 is formed so as to be substantially parallel to the end surface 53 and to extend in a tangential direction with respect to the outer periphery of the recess 52, one end thereof communicating with the annular passage 59, and the other end discharging. It communicates with the outlet 54.
  • the supply path 62 is an example of a “fluid passage” according to the present invention, and in particular an example of a “second fluid passage”.
  • the liquid When the liquid is supplied to the swirl flow forming body 5 described above via the supply port 61, the liquid passes from the discharge port 54 into the recess 52 through the communication path 60, the annular path 59 and the supply path 62. Discharged.
  • the liquid discharged into the recess 52 is rectified as a swirl flow in the recess 52, and then flows out from the opening of the recess 52.
  • an external fluid for example, air
  • the density of fluid molecules per unit volume in the central portion is reduced, and a negative pressure is generated between the swirl flow forming body 1 and the plate member.
  • the plate-like member is pressed by the surrounding fluid and pulled toward the end face 53 side.
  • the distance between the end surface 53 and the plate-like member approaches, the amount of liquid flowing out from the recess 52 is limited, the speed of the liquid discharged from the discharge port 54 into the recess 52 is reduced, and the swirl flow The pressure in the center rises.
  • the plate member does not come into contact with the end surface 53, and a certain distance is maintained between the plate member and the end surface 53.
  • FIG. 10 is a diagram illustrating an example of a circuit configuration of the transport system 200 including the swirl flow forming body 5.
  • the introduction port 57 of the swirl flow forming body 5 is connected to the liquid supply pump 3A via the electromagnetic valve 2A, for example, by a tube.
  • the supply port 61 of the swirl flow forming body 5 is connected to the liquid supply pump 3A via the electromagnetic valve 2B, for example, by a tube.
  • the solenoid valves 2A and 2B are connected to the microcomputer 4A.
  • the solenoid valves 2A and 2B permit or block the passage of the liquid supplied from the liquid supply pump 3A based on the on / off control signal output from the microcomputer 4A.
  • the microcomputer 4A outputs an on / off control signal to the electromagnetic valves 2A and 2B according to a predetermined program, and controls the supply of liquid to the swirling flow forming body 5.
  • the microcomputer 4A is an example of the “control device” according to the present invention.
  • FIG. 11 is a flowchart showing an example of a control operation executed by the microcomputer 4A.
  • This control operation is executed when the plate-like member is sucked and held by the swirling flow forming body 5 and transported in the atmosphere.
  • the swirling flow forming body 5 has a plate-like member with the opening of the recess 52 facing upward (in other words, with the recess 52 opening in the direction opposite to the vertical direction). The case where it sucks and conveys is assumed.
  • step Sb1 of this control operation the microcomputer 4 controls the electromagnetic valve 2A and starts supplying the liquid to the swirl flow forming body 5 through the introduction port 57. That is, supply of the liquid into the recessed part 52 from the jet nozzle 56 provided in the bottom face of the recessed part 52 is started. At this time, the electromagnetic valve 2 ⁇ / b> B is kept closed, and no liquid is supplied into the recess 52 from the discharge port 54 provided on the inner peripheral side surface of the recess 52. Therefore, no swirl flow is formed in the recess 52.
  • the microcomputer 4A starts measuring time by a timer (step Sb2). Then, the microcomputer 4A determines whether or not a predetermined time has elapsed (step Sb3).
  • This predetermined time is the time required for the recess 52 of the swirling flow forming body 5 to become full of water, and this time is measured in advance and stored in the microcomputer 4A.
  • step Sb3: NO the microcomputer 4A waits, and when the predetermined time has elapsed (that is, when the concave portion 52 of the swirling flow forming body 5 is full) (step Sb3: YES). ), The electromagnetic valve 2A is controlled to stop the supply of the liquid to the swirling flow forming body 5 through the inlet 57, and the swirling flow forming body 5 through the supply port 61 is controlled by controlling the electromagnetic valve 2B. Supply of liquid to the is started (step Sb4). As a result, liquid is supplied into the recess 52 from the discharge port 54 provided on the inner peripheral side surface of the recess 52, and a swirling flow is formed in the recess 52.
  • the inside of the recess 52 is filled with water before the swirl flow is formed in the recess 52, and then the swirl flow is formed. Similarly, a higher suction pressure can be obtained as compared with the case where the formation of the swirling flow is started in the state where the recess 52 is empty. Further, according to the control operation according to the present embodiment, since the recess 52 of the swirl flow forming body 5 is filled with the liquid during the conveyance of the plate-like member, the formation of the watermark is performed as in the first embodiment. Is prevented.
  • FIG. 12 is a perspective view showing an example of a swirl flow forming body 7 according to a third embodiment of the present invention.
  • 13 is a cross-sectional view taken along the line EE of FIG. 14 is a cross-sectional view taken along line FF in FIG.
  • the swirl flow forming body 7 is an apparatus for holding and transporting a plate-like member such as a semiconductor wafer or a glass substrate.
  • the swirling flow forming body 7 generates a negative pressure between the plate-like member by discharging liquid and holds the member.
  • the liquid is, for example, pure water or carbonated water.
  • the material of the swirl flow forming body 7 is, for example, an aluminum alloy.
  • the swirl flow forming body 7 is an example of the “holding device” according to the present invention.
  • the swirling flow forming body 7 includes a main body 71, a recess 72, an end face 73, four discharge ports 74a, 74b, 74c and 74d (hereinafter collectively referred to as “discharge”).
  • An inclined surface 75 four inlets 76a, 76b, 76c and 76d (hereinafter collectively referred to as” inlet 76 "), and four inlets 77a, 77b, 77c and 77d (hereinafter collectively referred to as “introduction path 77”).
  • the main body 71 has a cylindrical shape.
  • the end surface 73 is formed in a flat shape on one surface of the main body 71 (specifically, a surface facing a plate-like member that is a body to be held) (hereinafter referred to as “bottom surface”).
  • the recess 72 has a cylindrical shape and is formed on the end surface 73.
  • the recess 72 is formed coaxially with the main body 71.
  • Each of the four discharge ports 74 has a circular shape and is formed on the inner peripheral side surface of the main body 71 facing the recess 72.
  • the four discharge ports 74 are disposed in the axially central portion of the inner peripheral side surface.
  • the discharge ports 74a and 74c are arranged to face each other.
  • the main body 71 or the recess 72 is arranged point-symmetrically about the axis of the central axis.
  • the discharge ports 74b and 74d are disposed so as to face each other.
  • the main body 71 or the recess 72 is arranged point-symmetrically about the axis of the central axis.
  • the liquid supplied to the swirl flow forming body 7 is discharged into the recess 72 through each discharge port 74.
  • the inclined surface 75 is formed in the opening of the recess 72.
  • Each of the four introduction ports 76 has a circular shape and is formed on the outer peripheral side surface of the main body 71.
  • the four inlets 76 are connected to a liquid supply pump 3B described later by, for example, a tube, and the liquid is supplied into the main body 71 through the inlets 76.
  • the four introduction paths 77 are formed so as to be substantially parallel to the end face 73 and to extend tangentially to the outer periphery of the recess 72.
  • Each introduction path 77 connects the discharge port 74 and the introduction port 76.
  • the introduction path 77a connects the discharge port 74a and the introduction port 76a
  • the introduction path 77b connects the discharge port 74b and the introduction port 76b
  • the introduction path 77c includes the discharge port 74c and the introduction port.
  • 76c is connected
  • the introduction path 77 connects the discharge port 74d and the introduction port 76d.
  • the introduction paths 77 are arranged so as to extend in parallel with each other.
  • the introduction path 77a and the introduction path 77d are arranged on the same straight line, and the introduction path 77b and the introduction path 77d are arranged on the same straight line.
  • the introduction paths 77 a and 77 c discharge liquid into the recess 72, and form a swirl flow swirling counterclockwise in the recess 72 as viewed from the bottom surface side of the swirl flow forming body 7.
  • the introduction paths 77 b and 77 d discharge liquid into the recess 72, and form a swirl flow that swirls clockwise in the recess 72 as viewed from the bottom surface side of the swirl flow forming body 7.
  • Each introduction path 77 is an example of the “liquid passage” according to the present invention.
  • the introduction paths 77a and 77c are examples of the “third fluid passage” according to the present invention
  • the introduction paths 77b and 77d are examples of the “fourth fluid path” according to the present invention.
  • the plate-like member is pressed by the surrounding fluid and pulled toward the end face 73 side.
  • the distance between the end surface 73 and the plate-like member approaches, the amount of liquid flowing out from the recess 72 is limited, and the speed of the liquid discharged from the discharge ports 74a and 74c into the recess 72 is reduced.
  • the pressure at the center of the swirling flow increases.
  • the plate member does not come into contact with the end surface 73, and a certain distance is maintained between the plate member and the end surface 73.
  • FIG. 15 is a diagram illustrating an example of a circuit configuration of the transport system 300 including the swirl flow forming body 7.
  • the inlets 76a and 76c of the swirl flow forming body 7 are connected to the liquid supply pump 3B via the electromagnetic valve 2C, for example, by a tube.
  • the introduction ports 76b and 76d are connected to the liquid supply pump 3B via the electromagnetic valve 2D, for example, by a tube.
  • the solenoid valves 2C and 2D are connected to the microcomputer 4B, respectively.
  • the solenoid valves 2C and 2D permit or block the passage of the liquid supplied from the liquid supply pump 3B based on the on / off control signal output from the microcomputer 4B.
  • the microcomputer 4B outputs an on / off control signal to the electromagnetic valves 2C and 2D according to a predetermined program, and controls the supply of liquid to the swirling flow forming body 7.
  • the microcomputer 4B is an example of the “control device” according to the present invention.
  • FIG. 16 is a flowchart showing an example of a control operation executed by the microcomputer 4B.
  • This control operation is executed when the plate-like member is sucked and held by the swirling flow forming body 7 in the atmosphere and transported.
  • the swirl flow forming body 7 has a plate-like member with the opening of the recess 72 facing upward (in other words, with the recess 72 opening in the direction opposite to the vertical direction). The case where it sucks and conveys is assumed.
  • step Sc1 of this control operation the microcomputer 4B controls the electromagnetic valves 2C and 2D to start supplying the liquid to the swirling flow forming body 7 via the inlets 76a to 76d.
  • the liquid supplied into the recess 72 via the inlets 76a and 76c attempts to form a swirling flow that rotates counterclockwise as viewed from the bottom surface side of the swirling flow forming body 7, whereas
  • the liquid supplied into the concave portion 72 through the ports 76b and 76d tends to form a swirling flow swirling clockwise as viewed from the bottom surface side of the swirling flow forming body 7.
  • both flows cancel each other, and no swirl flow is formed in the recess 72.
  • the microcomputer 4B starts measuring time with a timer (step Sc2). Then, the microcomputer 4B determines whether or not a predetermined time has elapsed (step Sc3). This predetermined time is the time required for the concave portion 72 of the swirling flow forming body 7 to become full of water, and this time is measured in advance and stored in the microcomputer 4B.
  • step Sc3: NO When the predetermined time has not elapsed (step Sc3: NO), the microcomputer 4B stands by, and when the predetermined time has elapsed (that is, when the concave portion 72 of the swirling flow forming body 7 is full) (step Sc3: YES). ), The electromagnetic valve 2D is controlled while the electromagnetic valve 2C is kept open, and the supply of the liquid to the swirling flow forming body 7 through the introduction ports 76b and 76d is stopped (step Sc4). As a result, the liquid is supplied to the recess 72 only through the inlets 76 a and 76 c, and a swirling flow is formed in the recess 72.
  • the inside of the recess 72 is filled with water before the swirl flow is formed in the recess 72, and then the swirl flow is formed. Similar to the embodiment, a higher suction pressure can be obtained as compared with the case where the formation of the swirling flow is started in the state where the recess 72 is empty. Further, according to the control operation according to the present embodiment, the concave portion 72 of the swirling flow forming body 7 is filled with the liquid during the conveyance of the plate-like member, and therefore, as in the first and second embodiments, Mark formation is prevented.
  • FIG. 17 is a diagram illustrating an example of the configuration of the transport apparatus 10 according to the present modification. Specifically, FIG. 17A is a bottom view of the transport apparatus 10, and FIG. 17B is a side view of the transport apparatus 10. As shown in FIG. 17, the transport device 10 includes a base body 101, twelve swirling flow forming bodies 1, twelve friction members 102, and six hole portions 103.
  • the base body 101 has a disc shape.
  • the material of the base 101 is, for example, an aluminum alloy.
  • the twelve swirling flow forming bodies 1 are provided on one surface of the base 101 (specifically, the surface facing the plate-like member W that is the object to be held) (hereinafter referred to as “bottom surface”).
  • the twelve swirling flow forming bodies 1 are arranged on the circumference of the same circle on the bottom surface.
  • the twelve swirling flow forming bodies 1 are arranged at equal intervals along the outer periphery of the base body 101.
  • the twelve friction members 102 each have a cylindrical shape and are provided on the bottom surface of the base 101.
  • the twelve friction members 102 are arranged at equal intervals on the circumference of the same circle on which the swirl flow forming body 1 is arranged.
  • One friction member 102 is disposed between the two swirl flow forming bodies 1.
  • Each friction member 102 is a member that comes into contact with the surface of the plate-like member W that is the object to be held and prevents movement of the plate-like member W by a frictional force generated between the surfaces.
  • the material of each friction member 102 is, for example, fluororubber.
  • the six holes 103 are substantially rounded rectangular through holes provided in the base body 101.
  • the six holes 103 are arranged at equal intervals on the circumference of the same circle in the base body 101.
  • the circle in which the hole 103 is arranged on the circumference is concentric with the circle in which the swirl flow forming body 1 is arranged on the circumference.
  • the hole 103 is disposed closer to the center of the surface of the base body 101 than the swirl flow forming body 1.
  • the conveying apparatus 10 may replace with the swirl flow formation body 1, and the swirl flow formation body 5 which concerns on 2nd Embodiment, and the swirl flow formation body 7 which concerns on 3rd Embodiment may be attached.
  • FIG. 18 is a diagram illustrating an example of the configuration of the transport device 20 according to the present modification. Specifically, FIG. 18A is a bottom view of the transport device 20, and FIG. 18B is a side view of the transport device 20. As shown in FIG. 18, the transport device 20 includes a base body 201, ten swirl flow forming bodies 1, and twelve friction members 102 ⁇ / b> A.
  • the base 201 is a bifurcated fork-shaped plate-like member, and includes a rectangular gripping portion 2011 and two arm portions 2012 branched from the gripping portion 2011.
  • the material of the base 201 is, for example, an aluminum alloy.
  • the ten swirling flow forming bodies 1 are formed on one surface (specifically, a surface facing the plate-like member W as a held body) (hereinafter referred to as “bottom surface”). .).
  • the ten swirling flow forming bodies 1 are arranged on the circumference of the same circle in the two arm portions 2012. Five swirl flow forming bodies 1 are arranged at equal intervals for each arm portion 2012.
  • the twelve friction members 102 ⁇ / b> A are plate-like members and are provided on the bottom surfaces of the two arm portions 2012.
  • the twelve friction members 102A are arranged on the circumference of the same circle on which the swirl flow forming body 1 is arranged. In each arm part 2012, it arrange
  • Each friction member 102A comes into contact with the surface of the plate-like member W, which is an object to be conveyed, and prevents the plate-like member from moving due to the frictional force generated between the friction members.
  • the material of each friction member 102A is, for example, fluororubber.
  • the conveying apparatus 20 may replace with the swirl flow formation body 1, and the swirl flow formation body 5 which concerns on 2nd Embodiment, and the swirl flow formation body 7 which concerns on 3rd Embodiment may be attached.
  • the swirl flow forming body is transported with the plate-shaped member with the opening of the concave portion facing upward, but the plate-shaped member is transported.
  • the posture of the swirling flow forming body is not limited to this.
  • the swirl flow forming body may be configured to convey the plate-like member in a state where the concave portion opens in the vertical direction. Or you may make it convey a plate-shaped member in the state which opens the swirl
  • the distance between the end of the swirling flow forming body and the surface of the plate-like member is, for example, smaller than the cross-sectional area of the discharge port 14.
  • the swirl flow is formed in the concave portion after the concave portion of the swirl flow forming body is filled with water, but it is not always necessary to fill the concave portion with water.
  • the swirl flow may be formed after half of the recess is filled with liquid.
  • the swirl flow may be formed after the recess is filled with the liquid so that at least the discharge port of the fluid passage is covered with the liquid. According to an experiment by the inventor of the present invention, it is confirmed that the suction pressure is increased in accordance with the amount of the liquid if it is filled with a certain amount of liquid without necessarily filling the recess.
  • the time required for the inside of the concave portion of the swirling flow forming body to become full is measured in advance, and the inside of the concave portion is full when the time has elapsed.
  • the sensor may actually detect the height of the liquid level in the recess and determine that the recess is full when the height reaches a predetermined amount.
  • an ultrasonic liquid level detection sensor may be used to detect whether or not the inside of the recess is full.
  • the program executed by the microcomputer 4, 4A or 4B may be provided in a state stored in a storage medium such as a magnetic tape, a magnetic disk, a flexible disk, an optical disk, a magneto-optical disk, or a memory. Good.
  • the program may be downloaded via a communication line such as the Internet.
  • the shape of the main body 11 of the swirl flow forming body 1 according to the first embodiment is not limited to a cylinder, but may be a prism or an elliptic cylinder. Further, the position of the discharge port 14 provided in the swirl flow forming body 1 is not limited to the axially central portion of the inner peripheral side surface of the recess 12. Further, the number of supply paths 19 provided in the swirl flow forming body 1 is not limited to two, and may be one or three or more. Moreover, the approach direction with respect to the outer periphery of the recessed part 12 of the supply path 19 is not restricted to a tangential direction. The inclined surface 15 may not be provided (that is, the end portion of the end surface 13 may not be chamfered).
  • the modifications described above may be employed in the swirling flow forming body 5 according to the second embodiment and the swirling flow forming body 7 according to the third embodiment. Further, the position of the ejection port 56 of the swirling flow forming body 5 according to the second embodiment is not limited to the center of the bottom surface of the recess 52.
  • the configuration of the base 101 of the transfer device 10 is not limited to the example shown in the first modification. Further, the number, shape, and arrangement of the friction members 102 and the holes 103 provided on the base 101 of the transport apparatus 10 are not limited to the example shown in the first modification. These elements may be determined according to the size, shape, and material of the plate-like member W conveyed by the conveying device 10. The friction member 102 and the hole 103 may not be provided in the base 101 of the transport device 10 in the first place. When the friction member 102 is not provided on the base 101 of the transport apparatus 10, a known centering guide may be installed on the base 101 in order to position the plate-like member W (for example, JP-A-2005-51260). No. publication). Similarly, the configuration of the base 201 of the transfer device 20 is not limited to the example shown in the second modification.
  • the number, configuration, and arrangement of the swirl flow forming bodies 1 provided on the base 101 of the transport apparatus 10 are not limited to the example shown in the first modification. These elements may be determined according to the size, shape, and material of the plate-like member W conveyed by the conveying device 10. For example, the number of swirl flow forming bodies 1 may be less than 12 or 13 or more. Further, the swirl flow forming bodies 1 may be arranged in two or more rows along the outer periphery of the base body 101. Similarly, the number, configuration, and arrangement of the swirl flow forming bodies 5 provided on the base body 201 of the transfer device 20 are not limited to the example shown in the second modification.
  • the flow rate of the liquid supplied to the swirl flow forming body 5 in step Sb1 may be the first flow rate according to the first embodiment.
  • the flow rate of the liquid supplied to the swirl flow forming body 5 in step Sb4 may be the second flow rate according to the first embodiment.
  • the flow rate of the liquid supplied to the swirl flow forming body 7 through the inlets 76a and 76c in step Sc1 is the first flow rate according to the first embodiment. Also good.
  • the flow rate of the liquid supplied to the swirl flow forming body 7 via the inlets 76a and 76c in step Sc4 may be the second flow rate according to the first embodiment.
  • a known electric fan may be employed (for example, refer to Japanese Patent Application Laid-Open No. 2011-138948).
  • the electric fan is provided in the concave portion 12 of the swirl flow forming body 1 so that the rotation axis thereof is coaxial with the concave portion 12, the drive is stopped in step Sa1 of the control operation, and in step Sa4 You may make it start a drive. That is, the electric fan may be driven when the swirl flow is formed.
  • the discharge port 14 according to the first embodiment may be provided on the bottom surface of the recess 12.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manipulator (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un dispositif de commande qui commande le débit d'un liquide à introduire dans un dispositif de maintien, lequel génère, par la décharge du liquide, une pression négative entre le dispositif de maintien et un sujet à maintenir, et lequel maintient le sujet. Le dispositif de maintien comporte : un corps principal en colonne ; une surface d'extrémité plate, laquelle constitue une partie du corps principal, et qui fait face au sujet ; une section évidée formée dans la surface d'extrémité ; et un ou plusieurs chemins de fluide pour la décharge du liquide dans la section évidée. Dans un état où un flux tourbillonnant n'est pas formé dans la section évidée, le dispositif de commande remplit la section évidée d'une quantité préétablie de liquide. Ensuite, après le remplissage de la section évidée par la quantité préétablie de liquide, le flux tourbillonnant est formé au moyen du liquide déchargé dans la section évidée depuis les chemins de fluide.
PCT/JP2015/070788 2014-07-23 2015-07-22 Dispositif de commande et procédé de commande WO2016013565A1 (fr)

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JP2001148414A (ja) * 1999-09-09 2001-05-29 Mimasu Semiconductor Industry Co Ltd ウェーハ回転保持装置
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JP2011151233A (ja) * 2010-01-22 2011-08-04 Disco Abrasive Syst Ltd 搬送機構
JP2013030654A (ja) * 2011-07-29 2013-02-07 Kimihiro Eguchi 基板保持機構、半導体基板の分離処理装置および半導体基板の分離方法
WO2015083613A1 (fr) * 2013-12-03 2015-06-11 株式会社ハーモテック Dispositif de retenue
WO2015083609A1 (fr) * 2013-12-03 2015-06-11 株式会社ハーモテック Dispositif de transport
WO2015083615A1 (fr) * 2013-12-03 2015-06-11 株式会社ハーモテック Dispositif et système de retenue, procédé de commande et dispositif de transport

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JPH0717628A (ja) * 1993-06-30 1995-01-20 Sumitomo Sitix Corp 薄板搬送方法とその装置
JPH08264626A (ja) * 1994-04-28 1996-10-11 Hitachi Ltd 試料保持方法及び試料表面の流体処理方法並びにそれらの装置
JP2001148414A (ja) * 1999-09-09 2001-05-29 Mimasu Semiconductor Industry Co Ltd ウェーハ回転保持装置
JP2009028862A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
JP2011151233A (ja) * 2010-01-22 2011-08-04 Disco Abrasive Syst Ltd 搬送機構
JP2013030654A (ja) * 2011-07-29 2013-02-07 Kimihiro Eguchi 基板保持機構、半導体基板の分離処理装置および半導体基板の分離方法
WO2015083613A1 (fr) * 2013-12-03 2015-06-11 株式会社ハーモテック Dispositif de retenue
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WO2015083615A1 (fr) * 2013-12-03 2015-06-11 株式会社ハーモテック Dispositif et système de retenue, procédé de commande et dispositif de transport

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JP2017209752A (ja) * 2016-05-25 2017-11-30 株式会社ハーモテック 流体流形成体及び非接触搬送装置

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JP5945641B1 (ja) 2016-07-05

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