WO2016008273A1 - 一种带压下六氟化硫气体湿度传感器的校验平台 - Google Patents

一种带压下六氟化硫气体湿度传感器的校验平台 Download PDF

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WO2016008273A1
WO2016008273A1 PCT/CN2014/095811 CN2014095811W WO2016008273A1 WO 2016008273 A1 WO2016008273 A1 WO 2016008273A1 CN 2014095811 W CN2014095811 W CN 2014095811W WO 2016008273 A1 WO2016008273 A1 WO 2016008273A1
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valve
sulfur hexafluoride
humidity
humidity sensor
sensor
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PCT/CN2014/095811
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English (en)
French (fr)
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祁炯
苏镇西
赵跃
韩慧慧
袁小芳
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国家电网公司
国网安徽省电力公司电力科学研究院
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Priority claimed from CN201410335176.2A external-priority patent/CN104061955B/zh
Priority claimed from CN201420388962.4U external-priority patent/CN204007679U/zh
Application filed by 国家电网公司, 国网安徽省电力公司电力科学研究院 filed Critical 国家电网公司
Publication of WO2016008273A1 publication Critical patent/WO2016008273A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00

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  • the invention provides a calibration platform for a humidity sensor with a sulfur hexafluoride gas, which belongs to the technical field of sulphur hexafluoride gas humidity sensor verification.
  • a sulphur hexafluoride gas humidity density sensor In order to monitor the status of GIS equipment, most of the GIS equipment has installed a sulphur hexafluoride gas humidity density sensor. After using this type of sensor for a period of time, the measurement accuracy is deteriorated and it needs to be periodically checked.
  • the calibration technology and equipment are mostly equipped with different humidity density sulphur hexafluoride gas to test the sulphur hexafluoride gas humidity density sensor under normal pressure. In actual use, the sulphur hexafluoride gas humidity density sensor is mostly in the situation. Very depressed work, so the existing domestic gas preparation method can not meet the calibration requirements of sulfur hexafluoride gas humidity density sensor.
  • the object of the present invention is to provide a calibration platform for a sulphur hexafluoride gas humidity sensor capable of solving the above-mentioned defects and capable of solving the calibration and excellent working performance of the sulphur hexafluoride gas humidity density sensor. . Its technical solution is:
  • a calibration platform with a humidity sensor for sulphur hexafluoride gas comprising a saturated steam generator, a gas source, a vacuum filtration device with a drying function, and a gas source outlet sequentially connected to the first valve through a vacuum filtration device
  • the second air inlet of the steam generator is characterized in that: a vacuum pump, a linear motor driven cylinder and a sensor standard degree detecting device are added, wherein the sensor standard degree detecting device comprises a tank body, a mirror type sulfur hexafluoride humidity sensor, and a resistance a capacitive sulphur hexafluoride humidity density sensor, a motor, a magnetic coupling, and a fan disposed in the tank body, wherein the tank body is provided with a safety valve, a pressure gauge, a vacuum gauge, a first air inlet, a first air outlet, and The adapter for installing the sulfur hexafluoride humidity sensor to be tested, the first air inlet is connected to the first end of the first four
  • the saturated steam generator comprises a closed container provided with an electric heating tube, a circulation pump, an aeration head, a water tank and a temperature sensor, wherein the bottom of the closed container is provided with a second air inlet and a water port, and the temperature sensor is installed at the bottom of the airtight container
  • the aeration head is installed in the closed container and communicates with the second air inlet
  • the water port is provided with the second valve, and is connected with the bottom of the water tank
  • the gas port is connected to the gas source through the pipeline provided with the first valve and the pressure reducing filter device, the second end of the first four-way through the first valve and the third valve, and the fourth of the second four-way through the circulation pump.
  • the first end of the second four-way communicates with the second air outlet of the top of the closed container, the second end is connected to the atmosphere through the exhaust pipe provided with the fourth valve, and the third end is connected to the first end of the three-way through the fifth valve
  • the second end of the three-way communicates with the cylinder, and the third end communicates with the third end of the first four-way via the sixth valve; the fourth end of the first four-way communicates with the vacuum pump via the seventh valve; the piston rod of the cylinder and the linear motor
  • the output is fixedly connected.
  • the calibration platform for the humidity sensor with sulphur hexafluoride gas pressure is 2-4, and the connection port of each adapter and the tank is provided.
  • the external thread is screwed through the sealing ring, and the connecting end of the adapter and the humidity sensor for detecting sulfur hexafluoride is internally threaded, and the sealing pipe is screwed.
  • the calibration platform with a humidity sensor for sulphur hexafluoride gas is disposed, and the electric heating tube is disposed in the lower half of the sealed container.
  • the calibration platform with a humidity sensor for sulphur hexafluoride gas is pressed, and the height difference between the water tank and the closed container is 0.5 m.
  • the working principle is as follows: firstly, the humidity sensor of sulfur hexafluoride to be tested is installed on the tank through the adapter, then the sulfur hexafluoride gas is prepared, and the prepared sulfur hexafluoride gas and the dry gas are injected into the tank to open the motor.
  • the fan equalizes the humidity of the gas in the tank, and the density and humidity are respectively read by the pressure sensor, the mirror-type sulfur hexafluoride humidity sensor and the resistance-capacitance sulfur hexafluoride humidity density sensor, and then the humidity sensor of the sulfur hexafluoride to be detected is analyzed. The output value is compared with the read humidity and density to determine the accuracy of the sulfur hexafluoride humidity sensor to be tested and verified.
  • the preparation of sulfur hexafluoride gas is divided into two types: preparation of sulfur hexafluoride gas with different humidity under constant pressure and preparation of sulfur hexafluoride gas with different pressures and different humidity:
  • the circulating pump is turned on, so that the gas in the air chamber is continuously withdrawn from the closed container, and after circulating through the circulation pump, it enters the closed container again from the second air inlet at the bottom of the closed container, after repeated cycles
  • the saturated sulfur hexafluoride water vapor is obtained in the upper air chamber of the closed container;
  • the seventh valve and the ninth valve are opened, and the pipeline and the calibration chamber (the seventh valve and the ninth valve) are evacuated to a rated vacuum by a vacuum pump; Opening the fifth valve and the sixth valve, extracting a certain volume of saturated sulfur hexafluoride water vapor from the first inlet into the tank, and then opening the third valve to inject the dry gas into the tank Inside, when the set pressure is reached, the third valve is closed; the fan is started to uniformly mix the gas in the tank, and the gas prepared in the tank is detected by a humidity sensor and a pressure gauge.
  • a humidity of sulfur hexafluoride is completed under the pressure. Preparation of gas. If other humidity sulphur hexafluoride gas is disposed under the pressure, and then extracted in a closed container A certain volume of saturated sulphur hexafluoride water vapor is injected into the tank to prepare saturated sulphur hexafluoride water vapor of different humidity.
  • the liquid level in the closed container is higher than the aeration head, the temperature sensor and the electric heating tube, and The water temperature is controlled at the set temperature; the circulating pump is turned on, so that the gas in the air chamber is continuously drawn out from the sealed container, and after circulating through the circulation pump, it enters the closed container again from the second air inlet of the bottom of the closed container, after repeated cycles That is, the saturated sulfur hexafluoride water vapor is obtained in the upper air chamber of the closed container; the seventh valve and the ninth valve are opened, and the pipeline and the calibration chamber (the seventh valve and the ninth valve) are evacuated to the rated vacuum by the vacuum pump.
  • the body is injected into the tank body, and the third valve is closed when the set pressure is reached; the fan is started to uniformly mix the gas in the tank body, and the gas prepared in the tank body is detected by the humidity sensor and the pressure gauge, and the humidity is completed under the pressure at this time. Preparation of sulfur fluoride gas.
  • the pressure of sulphur hexafluoride gas in the gas source should be reduced to a set pressure, and then a certain volume of saturated sulphur hexafluoride vapor in a closed container is withdrawn and injected into the tank. In the body, saturated sulfur hexafluoride vapor with different humidity is prepared.
  • the invention has the advantages of:
  • the preparation method of sulfur dioxide hexafluoride gas under different pressures is as follows: a certain volume of saturated sulfur hexafluoride water vapor is mixed with the dry gas to obtain a certain humidity gas, and the saturated sulfur hexafluoride water vapor is injected a plurality of times to obtain different humidity.
  • Sulfur hexafluoride gas; different pressures and different humidity sulphur hexafluoride gas preparation method is based on the preparation method of different humidity sulphur hexafluoride gas under constant pressure, can be adjusted by adjusting the pressure difference between the water tank and the closed container Constant pressure to prepare sulfur hexafluoride gas with different pressure and humidity.
  • FIG. 1 is a schematic structural view of an embodiment of the present invention.
  • the sensor standardity detecting device comprises a tank body 7, a mirror type sulfur hexafluoride humidity sensor 8, a resistance-capacitance sulfur hexafluoride humidity density sensor 9, a motor 10, a magnetic coupling 11 and a fan 12 disposed in the tank body 7.
  • the tank body 7 is provided with a safety valve 13, a pressure gauge 14, a vacuum gauge 15, a first air inlet 16, a first air outlet 17, and four adapters 18 for mounting a humidity sensor for detecting sulfur hexafluoride.
  • the connecting end of each adapter 18 and the can body 7 is provided with external threads, and the two are screwed through the sealing pad 34.
  • the connecting end of the adapter 18 and the humidity sensor for detecting sulfur hexafluoride is internally threaded.
  • the sealing tube is threaded.
  • the first air inlet 16 is connected to the first end of the first four-way 19, the mirror-type sulfur hexafluoride humidity sensor 8 and the resistance-capacity sulfur hexafluoride humidity density sensor 9 are all mounted on the inner wall of the tank body 7, the first out
  • the air port 17 is connected to the dew point meter 21 via the eighth valve 20, the magnetic coupling 11 is embedded in the can body 7, the outer rotor of the magnetic coupling 11 is connected to the output shaft of the motor 10, and the inner rotor is fixedly connected with the fan 12;
  • the saturated steam generator includes a hermetic container 23 provided with an electric heating tube 22, a circulation pump 24, an aeration head 25, a water tank 26, and a temperature sensor 27, wherein the electric heating tube 22 is disposed in the lower half of the hermetic container 23, and the hermetic container 23
  • the bottom of the bottom is provided with a second air inlet 28 and a water port 29, and the temperature sensor 27 is installed at the bottom of the airtight container 23, and the aeration head 25 is installed in the airtight container 23 and communicates with the second air inlet 28, and the water port 29 is provided.
  • the exhaust pipe provided with the fourth valve 35 is connected to the atmosphere, the third end is connected to the first end of the three-way 37 via the fifth valve 36, the second end of the three-way 37 is connected to the cylinder 6, and the third end is connected to the sixth valve.
  • 38 is connected to the third end of the first four-way 19; the fourth end of the first four-way 19 is connected to the vacuum pump 4 via the seventh valve 34; Piston rod 5 and the linear motor is fixedly connected to the output terminal.

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  • General Physics & Mathematics (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

一种带压下六氟化硫气体湿度传感器的校验平台，包括饱和蒸汽发生器、气源（1）以及减压过滤装置（2），其特征是：增设了真空泵（4）、直线电机（5）带动的气缸（6）和传感器标准度检测装置，其中，传感器标准度检测装置包括罐体（7）、高精度传感器（8，9）、电机（10）、磁性联轴器（11）和设置在罐体（7）内的风扇（12），其中罐体（7）上设有用于安装待检测六氟化硫湿度传感器的转接头（18），饱和蒸汽发生器配制出来的一定湿度、压力的饱和六氟化硫水蒸气与干燥气体注入罐体（7）内，开启电机风扇（12）使罐体（7）内气体湿度均衡，由高精度传感器（8，9）读出其湿度和密度，然后分析待检测六氟化硫湿度传感器的输出值，并与读出的湿度和密度进行对比，以判断待检测六氟化硫湿度传感器的准确度，并对其进行校验。该校验平台工作性能优良。

Description

一种带压下六氟化硫气体湿度传感器的校验平台 技术领域
本发明提供一种带压下六氟化硫气体湿度传感器的校验平台，属于六氟化硫气体湿度传感器校验技术领域。
背景技术
为对GIS设备进行状态监控，大部分GIS设备中已安装了六氟化硫气体湿度密度传感器，此类传感器经使用一段时间后，测量精度变差，需定期进行校验；当前国内现有的校验技术和设备多为常压下配置不同湿度密度六氟化硫气体对六氟化硫气体湿度密度传感器进行校验，而在实际使用中，六氟化硫气体湿度密度传感器多数情况下处于非常压下工作，因此国内现有的气体配制方法不能满足六氟化硫气体湿度密度传感器的校验需要。
发明内容
本发明的目的是提供一种能克服上述缺陷、能解决非常压下六氟化硫气体湿度密度传感器的校验、工作性能优良的一种带压下六氟化硫气体湿度传感器的校验平台。其技术方案为：
一种带压下六氟化硫气体湿度传感器的校验平台，包括饱和蒸汽发生器、气源、具有干燥功能的减压过滤装置，气源出口依次经减压过滤装置、第一阀门接饱和蒸汽发生器的第二进气口，其特征在于：增设了真空泵、直线电机带动的气缸和传感器标准度检测装置，其中传感器标准度检测装置包括罐体、镜面式六氟化硫湿度传感器、阻容式六氟化硫湿度密度传感器、电机、磁性联轴器和设置在罐体内的风扇，其中罐体上设有安全阀、压力表、真空计、第一进气口、第一出气口和用于安装待检测六氟化硫湿度传感器的转接头，第一进气口接第一四通的第一端，镜面式六氟化硫湿度传感器和阻容式六氟化硫湿度密度传感器均安装在罐体内壁上，第一出气口经第八阀门接露点仪，磁性联轴器嵌装在罐体上，磁性联轴器的外转子与电机的输出轴连接，内转子与风扇固定连接；
饱和蒸汽发生器包括设有电加热管的密闭容器、循环泵、曝气头、水箱和温度传感器，其中密闭容器的底部设有第二进气口和水口，温度传感器安装在密闭容器内的底部，曝气头安装在密闭容器内、并与第二进气口连通，水口设有第二阀门，并与水箱底部连通；第二进 气口依次经设有第一阀门和减压过滤装置的管道连通气源、依次经第一阀门和第三阀门接第一四通的第二端，并经循环泵接第二四通的第四端；第二四通的第一端连通密闭容器顶部的第二出气口，第二端经设有第四阀门的排气管道接大气，第三端经第五阀门接三通的第一端，三通的第二端连通气缸，第三端经第六阀门连通第一四通的第三端；第一四通的第四端经第七阀门连通真空泵；气缸的活塞杆与直线电机的输出端固定连接。
所述的一种带压下六氟化硫气体湿度传感器的校验平台，安装待检测六氟化硫湿度传感器的接口为2-4个，每个转接头与罐体的连接端均设有外螺纹，两者经密封垫螺纹连接，转接头与待检测六氟化硫湿度传感器的连接端设有内螺纹，两者密封管螺纹连接。
所述的一种带压下六氟化硫气体湿度传感器的校验平台，电加热管设置在密闭容器的下半部分。
所述的一种带压下六氟化硫气体湿度传感器的校验平台，水箱与密闭容器的高度差为0.5米。
其工作原理为：先将待检测六氟化硫湿度传感器经转接头安装到罐体上，然后配制六氟化硫气体，再将配制的六氟化硫气体与干燥气体注入罐体内，开启电机风扇使罐体内气体湿度均衡，由压力传感器、镜面式六氟化硫湿度传感器和阻容式六氟化硫湿度密度传感器分别读出其密度和湿度，然后分析待检测六氟化硫湿度传感器的输出值，并与读出的湿度和密度进行对比，以判断待检测六氟化硫湿度传感器的准确度，并进行校验。
配制六氟化硫气体分为定压下不同湿度六氟化硫气体的配制和不同压力不同湿度六氟化硫气体的配制两种：
1、在配制定压下不同湿度六氟化硫气体时，首先将密闭容器内注满水之后关闭第四阀门，开启电源，对密闭容器内液体加热至设定温度50℃；打开第一阀门，气源经减压过滤装置将压力降至定压并过滤后进入密闭容器，在密闭容器上部形成气腔，密闭容器内液面高于曝气头、温度传感器和电加热管，并使水温控制在设定温度；开启循环泵，使气腔内的气体不断从密闭容器内抽出，经循环泵循环后再次从密闭容器底部的第二进气口进入密闭容器内，经多次循环后即在密闭容器上部气腔中得到饱和六氟化硫水蒸气；打开第七阀门和第九阀门，用真空泵对管路、校验腔(第七阀门和第九阀门)抽真空至额定真空度；打开第五阀门、第六阀门，抽取密闭容器中一定体积的饱和六氟化硫水蒸气自第一进气口进入罐体内，而后打开第三阀门，将干燥的气体注入罐体内，达到设定压力时关闭第三阀门；启动风扇将罐体中气体混合均匀，用湿度传感器、压力仪对罐体内配制的气体进行检测，此时完成该压力下一种湿度六氟化硫气体的配制。若在该压力下配置其它湿度六氟化硫气体，再抽取密闭容器中 一定体积的饱和六氟化硫水蒸气，注入到罐体中，即配制出不同湿度的饱和六氟化硫水蒸气。
2、在配制不同压力不同湿度的六氟化硫气体时，首先将密闭容器内注满水之后关闭第四阀门，开启电源，对密闭容器内液体加热至设定温度50℃；打开第一阀门，气源经减压过滤装置将压力降低至第一压强并过滤后进入密闭容器，在密闭容器上部形成气腔，密闭容器内液面高于曝气头、温度传感器和电加热管，并使水温控制在设定温度；开启循环泵，使气腔内的气体不断从密闭容器内抽出，经循环泵循环后再次从密闭容器底部的第二进气口进入密闭容器内，经多次循环后即在密闭容器上部气腔中得到饱和六氟化硫水蒸气；打开第七阀门和第九阀门，用真空泵对管路、校验腔(第七阀门和第九阀门)抽真空至额定真空度；打开第五阀门、第六阀门，抽取密闭容器中一定体积的饱和六氟化硫水蒸气自第一进气口进入罐体内，而后打开第三阀门，将干燥的气体注入罐体内，达到设定压力时关闭第三阀门；启动风扇将罐体中气体混合均匀，用湿度传感器、压力仪对罐体内配制的气体进行检测，此时完成该压力下一种湿度六氟化硫气体的配制。若配置其它压力下不同湿度六氟化硫气体，需将气源中六氟化硫气体压力减压为设定压力，再抽取密闭容器中一定体积的饱和六氟化硫水蒸气，注入到罐体中，即配制出不同湿度的饱和六氟化硫水蒸气。
本发明与现有技术相比，其优点在于：
1、可以配制多种指标的六氟化硫气体。同压下不同湿度六氟化硫气体配制方法为：取一定体积饱和六氟化硫水蒸气与干燥气体充分混合后得到一定湿度气体，通过多次注入饱和六氟化硫水蒸气，得到不同湿度的六氟化硫气体；不同压力不同湿度六氟化硫气体的配制方法是在定压下不同湿度六氟化硫气体配制方法基础上，通过调整水箱与密闭容器之间的压力差即可调整定压压力，配制不同压力不同湿度的六氟化硫气体。
2、通过内置于罐体内的磁性连轴搅拌器进行混合，以保证其它的均匀性，缩短测试时间，同时可保证校验腔的密封性。
3、采用镜面式六氟化硫湿度传感器、阻容式六氟化硫湿度密度传感器对配制的不同压力不同湿度气体进行湿度压力监测，精度高、重复性好。
附图说明
图1为本发明实施例的结构示意图。
图中：1、气源   2、减压过滤装置   3、第一阀门   4、真空泵   5、直线电机   6、气缸   7、罐体   8、镜面式六氟化硫湿度传感器   9、阻容式六氟化硫湿度密度传感器10、电机   11、磁性联轴器   12、风扇   13、安全阀   14、压力表   15、真空计   16、第一进气口   17、第一出气口   18、转接头   19、第一四通   20、第八阀门   21、露点 仪   22、电加热管   23、密闭容器   24、循环泵   25、曝气头   26、水箱   27、温度传感器   28、第二进气口   29、水口   30、第二阀门   31、第二出气口   32、第三阀门33、第二四通   34、第七阀门   35、第四阀门   36、第五阀门   37、三通   38、第六阀门    39、第九阀门
具体实施方式
以下通过实施例和附图1对本发明内容作进一步详细说明。
传感器标准度检测装置包括罐体7、镜面式六氟化硫湿度传感器8、阻容式六氟化硫湿度密度传感器9、电机10、磁性联轴器11和设置在罐体7内的风扇12，其中罐体7上设有安全阀13、压力表14、真空计15、第一进气口16、第一出气口17和4个用于安装待检测六氟化硫湿度传感器的转接头18，每个转接头18与罐体7的连接端均设有外螺纹，两者经密封垫34螺纹连接，转接头18与待检测六氟化硫湿度传感器的连接端设有内螺纹，两者密封管螺纹连接。第一进气口16接第一四通19的第一端，镜面式六氟化硫湿度传感器8和阻容式六氟化硫湿度密度传感器9均安装在罐体7内壁上，第一出气口17经第八阀门20接露点仪21，磁性联轴器11嵌装在罐体7上，磁性联轴器11的外转子与电机10的输出轴连接，内转子与风扇12固定连接；
饱和蒸汽发生器包括设有电加热管22的密闭容器23、循环泵24、曝气头25、水箱26和温度传感器27，其中电加热管22设置在密闭容器23的下半部分，密闭容器23的底部设有第二进气口28和水口29，温度传感器27安装在密闭容器23内的底部，曝气头25安装在密闭容器23内、并与第二进气口28连通，水口29设有第二阀门30，并与水箱26底部连通；第二进气口28依次经设有第一阀门3和减压过滤装置2的管道连通气源1、依次经第一阀门3和第三阀门32接第一四通19的第二端，并经循环泵24接第二四通33的第四端；第二四通33的第一端连通密闭容器23顶部的第二出气口，第二端经设有第四阀门35的排气管道接大气，第三端经第五阀门36接三通37的第一端，三通37的第二端连通气缸6，第三端经第六阀门38连通第一四通19的第三端；第一四通19的第四端经第七阀门34连通真空泵4；气缸6的活塞杆与直线电机5的输出端固定连接。

Claims (4)

  1. 一种带压下六氟化硫气体湿度传感器的校验平台，包括饱和蒸汽发生器、气源(1)、具有干燥功能的减压过滤装置(2)，气源(1)出口依次经减压过滤装置(2)、第一阀门(3)接饱和蒸汽发生器的第二进气口(28)，其特征在于：增设了真空泵(4)、直线电机(5)带动的气缸(6)和传感器标准度检测装置，其中传感器标准度检测装置包括罐体(7)、镜面式六氟化硫湿度传感器(8)、阻容式六氟化硫湿度密度传感器(9)、电机(10)、磁性联轴器(11)和设置在罐体(7)内的风扇(12)，其中罐体(7)上设有安全阀(13)、压力表(14)、真空计(15)、第一进气口(16)、第一出气口(17)和用于安装待检测六氟化硫湿度传感器的转接头(18)，第一进气口(16)接第一四通(19)的第一端，镜面式六氟化硫湿度传感器(8)和阻容式六氟化硫湿度密度传感器(9)均安装在罐体(7)内壁上，第一出气口(17)经第八阀门(20)接露点仪(21)，磁性联轴器(11)嵌装在罐体(7)上，磁性联轴器(11)的外转子与电机(10)的输出轴连接，内转子与风扇(12)固定连接；
    饱和蒸汽发生器包括设有电加热管(22)的密闭容器(23)、循环泵(24)、曝气头(25)、水箱(26)和温度传感器(27)，其中密闭容器(23)的底部设有第二进气口(28)和水口(29)，温度传感器(27)安装在密闭容器(23)内的底部，曝气头(25)安装在密闭容器(23)内、并与第二进气口(28)连通，水口(29)设有第二阀门(30)，并与水箱(26)底部连通；第二进气口(28)依次经设有第一阀门(3)和减压过滤装置(2)的管道连通气源(1)、依次经第一阀门(3)和第三阀门(32)接第一四通(19)的第二端，并经循环泵(24)接第二四通(33)的第四端；第二四通(33)的第一端连通密闭容器(23)顶部的第二出气口，第二端经设有第四阀门(35)的排气管道接大气，第三端经第五阀门(36)接三通(37)的第一端，三通(37)的第二端连通气缸(6)，第三端经第六阀门(38)连通第一四通(19)的第三端；第一四通(19)的第四端经第七阀门(34)连通真空泵(4)；气缸(6)的活塞杆与直线电机(5)的输出端固定连接。
  2. 根据权利要求1所述的一种带压下六氟化硫气体湿度传感器的校验平台，其特征在于：安装待检测六氟化硫湿度传感器的接口为2-4个，每个转接头(18)与罐体(7)的连接端均设有外螺纹，两者经密封垫(34)螺纹连接，转接头(18)与待检测六氟化硫湿度传感器的连接端设有内螺纹，两者密封管螺纹连接。
  3. 根据权利要求1所述的一种带压下六氟化硫气体湿度传感器的校验平台，其特征在于： 电加热管(22)设置在密闭容器(23)的下半部分。
  4. 根据权利要求1所述的一种带压下六氟化硫气体湿度传感器的校验平台，其特征在于：水箱(26)与密闭容器(23)的高度差为0.5米。
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