WO2015194048A1 - Electronic-component inspection device - Google Patents

Abstract

This invention provides an electronic-component inspection device that, after inspecting and classifying an electronic component, can use the results of that inspection to perform re-inspection and reclassification, reducing the overkill rate or minimizing quality variability. Observation-result information (i1) for an electronic component is analyzed to determine whether said electronic component is acceptable or defective, and on the basis of determination information (i2), the electronic component is classified into a container corresponding to the quality of said electronic component. Identifying information (i3) indicating the position of the electronic component inside the container into which said electronic component was classified is generated and associated with the observation-result information (i1). The quality of the electronic component is re-determined on the basis of said observation-result information (i1), and the result of the re-determination is further associated with the identifying information (i3) associated with the observation-result information (i1). The electronic component at the position indicated by said identifying information (i3) is then reclassified, on the basis of the result of the re-determination, into the container corresponding to the quality of said electronic component.

Description

Electronic component inspection equipment

The present invention relates to an electronic component inspection apparatus that inspects electronic components and classifies them according to quality.

The electronic component inspection device inspects the electronic component, distinguishes between the non-defective product and the defective product according to the inspection result, and classifies the electronic component into a good product housing and a defective product housing. The inspection of the electronic component is, for example, an appearance inspection for checking whether the electronic component is scratched, dirty, or damaged, an electrical property inspection for checking the electrical property of the electronic component, or a combination thereof.

If the inspection standards are strict, the overkill rate of classifying non-defective electronic components as defective containers increases, and the production efficiency decreases. If inspection standards are loose, defective electronic parts are shipped as non-defective products, resulting in variations in quality and reducing the reliability of inspection. In an electronic component of an integrated circuit such as an IC or LSI having a high unit price per component, a high overkill ratio or a variation in quality is particularly problematic.

Therefore, an electronic component inspection apparatus capable of re-inspecting whether or not a non-defective product is included in the non-defective product group or a non-defective product is included in the non-defective product group by changing inspection items, inspection methods or inspection accuracy. Is desired. However, among the inspections composed of the electronic component observation stage and the observation result analysis and determination stage, the redoing of the observation stage increases the time required for production per electronic component and decreases the production efficiency.

Therefore, a technology that scans the wafer ring before peeling the electronic component from the wafer ring, visually inspects it by computer analysis, and then visually confirms the scan result before peeling the electronic component from the wafer ring, and re-inspects it visually. Has been proposed (see, for example, Patent Document 1). This technology associates the inspection result data from the first scan with the position data on the wafer ring of the electronic component that is the main component of the inspection result data, and the inspection result data is displayed on the screen based on the position data of the defective electronic component. To display.

JP 2005-134282 A

However, there are cases where it is desired to inspect the electronic components after the individual electronic components have been peeled off from the wafer. For example, when an electronic component is stuck on a wafer, only the exposed surface of the electronic component can be inspected. Moreover, when the electronic component is still attached to the wafer, the electrical characteristics of the electronic component may not be inspected.

In such a case, the electronic component is once picked up from the wafer ring, transported to a unit for inspecting the electronic component, classified according to the inspection result, and re-inspected and re-classified after the classification. . In the case of this method, no matter how much the electronic components on the wafer ring, which is the supplier, are linked to each other and the quality is re-determined based on the inspection result, it can be accommodated at any position in the classification destination. Therefore, it is impossible to reclassify based on the result of the re-inspection.

For this reason, in an electronic component inspection device that reinspects and reclassifies after inspecting and classifying electronic components, no matter how much inspection results obtained by inspection can be stored, reinspection and reclassification cannot be performed, resulting in a high overkill rate. Or the problem of the variation in quality could not be solved.

The present invention has been proposed to solve the above-described problems of the prior art, and after inspecting and classifying electronic components, the inspection results can be used for reinspection and reclassification. An object of the present invention is to provide an electronic component inspection apparatus capable of suppressing a decrease in kill rate or variation in quality.

The electronic component inspection apparatus according to the present invention holds a non-defective product container and a defective product container, one of which is a retest target container that houses a retest target electronic component, inspects the electronic component, and results of the test An electronic component inspection apparatus for classifying electronic components into the non-defective product housing and the defective product housing according to the method, an observation means for observing the electronic components, and an electronic component by analyzing an observation result of the observation means Inspection means for determining whether the product is non-defective and defective, first classification means for classifying the electronic component into either a non-defective product container or a defective product container based on the determination result of the inspection means, The identification information generating means for generating identification information indicating the position of the electronic component housed in the retest target container within the container, and the observation result of the electronic component and the identification information indicating the position of the electronic component are associated with each other Storage means for storing From the results, re-inspection means for re-determining whether the electronic parts stored in the re-inspection target body are good or defective from different viewpoints, techniques or accuracy, and the identification information associated with the observation result Based on the re-determination result of the re-inspection means based on the re-determination result of the re-inspection means, the electronic component at the position indicated by the identification information associated with the re-determination result is used for non-defective products. And second classification means for reclassifying the container or the defective container.

The reexamination object container includes a plurality of storage areas for storing electronic components, and the first classification unit continuously fills a continuous storage area with a certain number of electronic components and fills the electronic components. One area adjacent to the continuous area may be left as an empty accommodation area.

The reinspection object container is formed with a plurality of columns of continuous electronic components divided by empty storage regions, and the identification information is indicated by the columns to which the electronic components belong and the arrangement order in the columns. Also good.

The second classification means includes a holding means for holding the electronic component and releasing it from the non-defective product container or the defective product housing, and an electronic component storage area at a position where the holding device releases the electronic component. Re-feeding means for moving the re-examination object container so as to be sequentially positioned, and the storage area moving to a predetermined position are sequentially imaged, and the presence of the empty storage area is confirmed for each predetermined number of movements. A misfeed detection means, and the reclassification may be stopped if the miss feed detection means cannot confirm the presence of the empty accommodation area for every predetermined number.

Dicing line information including a supply unit that supplies the electronic component attached to the wafer ring to the first classification unit, wherein the identification information generation unit indicates a matrix position of the electronic component on the wafer ring in the identification information The re-inspection means associates an electronic component re-determined as a non-defective product or a defective product based on the dicing line information and another electronic component arranged in the same row or column on the wafer ring with the same quality. Re-determination may be performed.

The re-inspection unit may include a display unit that displays the observation result, and an operation unit that receives a re-determination operation for a non-defective product or a defective product by visual observation of the observation result displayed on the display unit. .

A supply unit configured to supply the electronic component attached to the wafer ring to the first classification unit, wherein the reinspection unit displays the observation result; and the observation result displayed on the display unit An operation unit that accepts a re-determination operation for a good product or a defective product by visual inspection, and the identification information generation unit further associates dicing line information indicating a matrix position of the electronic component on the wafer ring with the identification information. The display unit may continuously display observation result information of the electronic component being displayed and other electronic components arranged in the same row or column on the wafer ring based on the dicing line information. .

The first classification unit and the second classification unit may be configured by a common device.

According to the present invention, since an observation result of an electronic component is associated with a position of the electronic component on a container, re-determination is performed based on the observation result, and the electronic component is reclassified based on the re-determination result. It is possible to suppress a decrease in overkill rate or a variation in quality.

It is a block diagram which shows schematic structure of the electronic component inspection apparatus which concerns on 1st Embodiment. It is a block diagram which shows the structure of the classification device which concerns on 1st Embodiment. It is a block diagram which shows the structure of the control part of the classification device which concerns on 1st Embodiment. It is a schematic diagram which shows the data memorize | stored in the observation result memory | storage part concerning 1st Embodiment. It is a block diagram which shows the structure of the reexamination apparatus which concerns on 1st Embodiment. It is a schematic diagram which shows the display screen which concerns on 1st Embodiment and a reexamination apparatus displays. It is a flowchart which shows the control operation of the classification mode of an electronic component inspection apparatus. It is a flowchart which shows the operation | movement of the reinspection of an electronic component inspection apparatus. It is a flowchart which shows resupply of the electronic component in the control operation | movement of the reclassification mode of an electronic component inspection apparatus. It is a flowchart which shows the reclassification of the electronic component in the control operation | movement of the reclassification mode of an electronic component inspection apparatus. It is a schematic diagram which shows the state with which the accommodation position and observation result information of an electronic component are linked | related. It is a block diagram which shows the structure of the control part of the electronic component inspection apparatus which concerns on 2nd Embodiment. It is a schematic diagram which shows the arrangement | sequence of the electronic component on a wafer. It is a schematic diagram which shows the data memorize | stored in the observation result memory | storage part concerning 2nd Embodiment. It is a schematic diagram which shows the display screen which concerns on 2nd Embodiment and a reexamination apparatus displays.

(First embodiment)
(Constitution)
(Electronic component inspection equipment)
Hereinafter, a first embodiment of an electronic component inspection apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram showing a schematic configuration of the electronic component inspection apparatus according to the first embodiment. The electronic component inspection apparatus 1 classifies and reclassifies the electronic component into a non-defective product and a defective product according to the result of the inspection and re-inspection of the electronic component. In the re-inspection, the observation result obtained at the time of inspecting the electronic component is analyzed with a different viewpoint, method, or accuracy, and the re-inspection result is derived. The different viewpoint or method is, for example, visual observation of an observation result by a reexamination person.

Here, electronic parts are parts used in electrical products. Examples of the electronic component include a semiconductor element and resistors and capacitors other than the semiconductor element. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, and thyristors, and integrated circuits such as ICs and LSIs. A non-defective product is an electronic component that has reached a certain quality standard by inspection or re-inspection, and a defective product is an electronic component that has not reached a certain quality standard by inspection and re-inspection. Electronic components classified as either good or defective are re-inspected and re-classified. In classification and reclassification, electronic components are packed according to quality.

The electronic component inspection device 1 includes an inspection classification device 3 and a re-inspection device 2. The inspection classification device 3 and the re-inspection device 2 have a so-called computer and are connected to each other via a network such as a LAN so that data communication is possible. Alternatively, the computer included in the inspection classification device 3 can function as the re-inspection device 2. The inspection classification device 3 inspects the electronic components and classifies the electronic components into good products and defective products according to the inspection results. The re-inspection device 2 supports re-inspection using the observation results of the electronic components classified as either good or defective by the inspection classification device 3. Further, the inspection classification device 3 reclassifies the electronic parts re-inspected by the re-inspection device 2 into non-defective products and defective products according to the re-inspection results. Electronic components that are re-inspected depend on quality standards. When quality standards are set strictly, electronic parts classified as defective products are re-inspected. When quality standards are set loosely, electronic parts classified as good products are re-inspected.

(Classifier)
FIG. 2 is a configuration diagram showing a detailed configuration of the inspection classification device 3. The inspection classification device 3 is provided with a transport path 3b for electronic parts on the top surface of the gantry 3a, and aligns and transports a plurality of electronic parts that have been scheduled for inspection and have been re-inspected along the transport path 3b. The electronic component to be inspected and the re-inspected electronic component are transported in separate processes.

The inspection classification apparatus 3 includes a supply unit 33 that supplies an electronic component to be inspected to the transport path 3b and a resupply unit 38 that re-supplys the retested electronic component to the transport path 3b. A non-defective product storage unit 36 and a defective product storage unit 37 are arranged on the downstream side in the transport direction from the supply unit 33 and the resupply unit 38, and the non-defective product storage unit 36 or the defective product storage unit 37 is arranged according to the inspection result and the re-inspection result. Contains electronic components.

Various observation units 35a to 35e for electronic parts are arranged on the transport path 3b between the supply unit 33 and the non-defective product storage unit 36 and the defective product storage unit 37. The various observation units 35a to 35e observe the electronic components to be inspected supplied from the supply unit 33 on the transport path 3b, and obtain observation results. The electronic component supplied from the resupply unit 38 is reinspected by the reinspection apparatus 2 and does not require inspection by the inspection classification apparatus 3, and passes through these observation units 35a to 35e.

The conveyance path 3b of the inspection classification device 3 is annular, and the start and end of the path are connected. Therefore, a forced discharge bin 39 is disposed immediately before the supply unit 33 in order to prevent the electronic component from entering the supply unit 33 again without detaching from the conveyance path 3b.

Inside the gantry 3a, there is a control unit comprising a computer and a controller for controlling the transport path 3b, the supply unit 33, the observation units 35a to 35e, the non-defective product storage unit 36, the defective product storage unit 37, and the resupply unit 38. 4 is provided. The control unit 4 evaluates the observation result of the electronic component, controls the classification according to the evaluation of the electronic component, is connected to the reinspection apparatus 2 so as to be able to perform data communication, and outputs the observation result to the reinspection apparatus 2. In addition, the control unit 4 receives a reinspection result from the reinspection apparatus 2 and controls reclassification of electronic components according to the reinspection result. In addition to the control unit 4, a power source for driving the inspection classification device 3, cables, a compressor, and an air pipe are accommodated in the gantry 3 a.

Each part will be described in detail. The conveyance path 3b is formed by a conveyance table 31 installed on the upper surface of the gantry 3a. The transfer table 31 has a shape such as a disk or a star that radially expands around one point, and rotates in parallel with the upper surface of the gantry 3a by a predetermined angle in the circumferential direction. The power source of the transfer table 31 is a direct drive motor 32. The transfer table 31 extends to a position higher than the upper surface of the gantry 3 a via the direct drive motor 32.

A suction nozzle 31 a is attached to the outer periphery of the transport table 31. The suction nozzle 31a can be moved up and down along its axial direction. A plurality of suction nozzles 31 a are attached at equal circumferential positions along the outer periphery of the transport table 31 and at the same distance from the center of the transport table 31. When the transfer table 31 has a star shape, the transfer table 31 has arms arranged radially, and a suction nozzle 31a is attached to the tip of the arm.

The suction nozzle 31a is an electronic component holding means. The suction nozzle 31a is hollow and has one end opened, and the suction nozzle 31a is hung from the transport table 31 with the open end facing the upper surface of the gantry 3a. The inside of the suction nozzle 31a communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. The suction nozzle 31a descends in turn toward the supply unit 33, the observation units 35a to 35e, the non-defective product storage unit 36, the defective product storage unit 37, and the re-supply unit 38. The electronic components are separated by the above and delivered, or the electronic components of these units are picked up by the open ends to pick up the electronic components, and the electronic components are returned from each unit to the transport path 3b.

The conveyance table 31 and the suction nozzle 31a constitute electronic component classification means, and the rotation locus of the opening end of the suction nozzle 31a becomes the electronic component conveyance path 3b. That is, the direct drive motor 32 is controlled by the control unit 4 so as to rotate intermittently by one pitch. The pitch is equal to the arrangement interval of the suction nozzles 31a. Thereby, the suction nozzle 31a follows a common movement locus with the intermittent rotation of the transport table 31, stops at the common stop position, and moves up and down in the axial direction of the suction nozzle 31a. By providing the supply unit 33, the observation units 35a to 35e, the non-defective product storage unit 36, the defective product storage unit 37, and the resupply unit 38 at this stop position, the suction nozzle 31a sequentially moves these units along the transport path 3b. After that, inspection, classification, and reclassification of electronic components can be performed.

The supply unit 33 includes a ring holder 33a and a pickup device 33b when the electronic components are diced into individual pieces and held on the wafer ring WR. The ring holder 33a holds the wafer ring WR, and the pickup device 33b picks up electronic components one by one from the wafer ring WR and supplies them to the transport path 3b.

The ring holder 33a vertically places the wafer ring WR with the electronic component attachment surface facing the outer edge of the transfer table 31. That is, the wafer ring WR is orthogonal to the moving surface of the suction nozzle 31a. The pickup device 33b has an arm that extends radially from one point on one plane, and the radiation surface thereof is orthogonal to the moving surface of the suction nozzle 31a and the plane on which the wafer ring WR extends. A suction nozzle 31a is provided at the tip of each arm. The suction nozzle 31a is extended along the axis along the arm, and directs the opening end that sucks the electronic component outward in the radial direction. The pickup device 33b enters under the transfer table 31, is installed at a position where the apex of the pickup device 33b and the transfer path 3b overlap, and faces the wafer ring WR directly beside.

The pickup device 33b intermittently rotates the suction nozzle 31a around the radiation center. The ring holder 33a pushes up an electronic component from the back side with a push-up pin (not shown), and passes the electronic component on the wafer ring WR to the suction nozzle 31a facing the wafer ring WR. The suction nozzle 31a of the pickup device 33b that has received the electronic component faces the suction nozzle 31a of the transfer table 31 at the apex of the pickup device 33b, and passes the electronic component to the suction nozzle 31a of the transfer table 31. Thereby, the supply unit 33 supplies an electronic component to the conveyance path 3b.

The observation units 35c to 35e acquire observation results that are materials for visual inspection of electronic components. The appearance inspection is a check for the presence or absence of scratches, dirt, or damage on the electronic component, and is an inspection by image analysis. The observation result is appearance image data of the electronic component. Each of the observation units 35c to 35e is a camera having an image pickup element such as a CCD or CMOS and a lens, and the image pickup optical system faces the surface of each electronic component determined and images the surface.

For example, the observation unit 35c images the bottom surface of the electronic component, the observation unit 35d images two adjacent side surfaces of the electronic component, and the observation unit 35e images the other two adjacent side surfaces. The bottom surface of the electronic component is the surface opposite to the holding surface by the suction nozzle 31a. Each of the observation units 35c to 35e is connected to the control unit 4 through a signal line so that data communication is possible, and transmits appearance image data to the control unit 4.

The observation unit 35a and the observation unit 35b are pre-processing units for obtaining observation results by the observation units 35c to 35e, and correct the electronic components to a prescribed appropriate posture. The observation unit 35a is a camera having an imaging element such as a CCD or CMOS and a lens. The imaging optical system faces the bottom surface of the electronic component and images the surface. The imaging data is transmitted to the control unit 4. The control unit 4 analyzes the imaging data and measures the attitude deviation of the electronic component. The attitude shift is a shift in the direction of the electronic component and a shift in the center position.

The observation unit 35b has a stage on which electronic components are placed, moves the stage in two-dimensional directions along the placement surface, and rotates the stage with a rotation axis orthogonal to the placement surface. The amount of movement and the amount of rotation in each of the two-dimensional directions are amounts for eliminating the posture deviation measured by the control unit 4, and follow the correction data for eliminating the posture deviation transmitted from the control unit 4.

Note that the electronic component inspection apparatus 1 is not limited to the appearance inspection, and may perform various inspections. For example, the observation units 35a to 35e may be mixed with units for electrical characteristic inspection or the like, or may be composed of only units for electrical characteristic inspection. In the electrical characteristic inspection, voltage application or current injection is performed on the electronic component, and the voltage, current, resistance, or frequency of the electronic component, the output signal for the logic signal, and the like are inspected.

The non-defective product storage unit 36 and the defective product storage unit 37 hold the storage bodies T for storing electronic components in the empty areas, respectively, move the storage bodies T by 1 pitch or 2 pitches, and move the empty areas directly under the transport path 3b. To be located. When the suction nozzle 31a located immediately above the non-defective product storage unit 36 or the defective product storage unit 37 releases the electronic component, the electronic component is packed in the empty area.

The good product storage unit 36 and the defective product storage unit 37 are, for example, taping units. The container T is a carrier tape. The carrier tape has a pocket along the length of the band, and an electronic component is packed in this pocket. The taping unit moves the carrier tape one pitch or two pitches along the length of the band to move an empty pocket, which is an empty area, directly below the transport path 3b. Further, the taping unit presses the seal so as to seal the pocket of the carrier tape in which the electronic component is packed.

In principle, the non-defective product accommodation unit 36 and the defective product accommodation unit 37 are moved by one pitch. However, when the re-inspection object is a good electronic component, the good product accommodation unit 36 moves the container T by a certain number of times by one pitch. Every time, the two pitch movements of the container T are sandwiched once. When the re-inspection target is a defective electronic component, the defective article storage unit 37 sandwiches the two-pitch movement of the container T once every time the container T is moved by a certain number of pitches. This is because the electronic parts to be packed are explicitly divided into a certain number so that each of the electronic parts can be easily specified in the order of the number of columns.

The non-defective product storage unit 36 and the defective product storage unit 37 are not limited to taping units, but may be units that move other various types of containers. Examples of other containers include a wafer ring WR and a tray. Further, the non-defective product storage unit 36 and the defective product storage unit 37 are not limited to the same type of unit, but may be different units such that one is a taping unit and the other is a ring holder 33a.

The re-supply unit 38 holds the container T that packs the electronic components that have been subjected to re-classification through the re-inspection, and re-supplyes the electronic components onto the transport path 3b. When the defective product storage unit 37 stores an electronic component determined to be a defective product, an operator takes out the storage body T from the defective product storage unit 37 and sets it in the resupply unit 38. In addition, the resupply unit 38 includes a camera having an imaging optical system directed to one point of the container T, and confirms the presence of an empty area in the image. If the empty area does not exist at a certain number of times when an empty area where electronic parts are not packed appears, or if an empty area exists at other timings, an error is notified and the inspection classification device 3 is driven. Stop.

The resupply unit 38 includes a supply device 33 in a case where the container that stores the electronic components to be inspected and the container T that packs the electronic components that have been subjected to reclassification after retesting are the same type. One of the refeeding device 38 may also serve as the other. For example, when the electronic component container to be inspected is the wafer ring WR and the container T held by the resupply unit 38 is also the wafer ring WR, the classification of the electronic components to be inspected and the re-inspected electronic components Since the reclassification is a separate process, the supply device 33 can also serve as the resupply device 38.

When the container T for packing electronic components to be reinspected is a carrier tape, the resupply unit 38 is detapered. The detaper moves the electronic components to be reclassified sequentially immediately below the conveyance path 3b by running the carrier tape while removing the seal from the carrier tape. When the electronic component to be reclassified is moved directly below the transport path 3b, the suction nozzle 31a of the transport table 3b sucks the electronic component directly below and circulates along the transport path 3b.

(Control part)
As shown in FIG. 3, the control unit 4 controls each part of the inspection classification device 3 to control and classify the electronic mode components to be inspected and classified, and the inspection classification device 3. A reclassification mode control unit 49 is provided for reclassifying electronic components that have been reinspected.

The classification mode control unit 41 operates the supply unit 33, intermittent rotation of the direct drive motor 32 and rotation amount per pitch, raising / lowering and suction / detachment of the suction nozzle 31a, driving timing of the observation units 35a to 35e, and the electronic component Imaging data analysis of the observation unit 35a for deriving the posture deviation and the correction amount, control of the observation unit 35b by transmitting the correction amount data, movement timing of the container T of the non-defective product storage unit 36 and the defective product storage unit 37, non-defective product Command for 1-pitch movement or 2-pitch movement of the storage unit 36 or the defective product storage unit 37, selection and command of detachment of the electronic component immediately above the non-defective product storage unit 36 of the suction nozzle 31a or removal of the electronic component immediately above the defective product storage unit To control.

The reclassification mode control unit 49 is an electronic component that reclassifies the movement amount of the container T of the resupply unit 38, intermittent rotation of the direct drive motor 32 and rotation amount for each pitch, raising and lowering of the suction nozzle 31a, suction and separation. The movement timing of the container T of the non-defective product storage unit 36 or the defective product storage unit 37 that controls the movement, and the amount of movement of the storage body T of the non-defective product storage unit 36 or the defective product storage unit 37 that stores the electronic components to be reclassified are controlled. The reclassification mode control unit 49 receives the re-determination information generated by the re-inspection device 2 by the re-determination information reception unit 48 of the control unit 4, and controls the inspection classification device 3 according to the re-determination information.

In other words, the classification mode control unit 41 and the reclassification control unit 49 manage and control the 1-pitch movement or 2-pitch movement of the non-defective product containing unit 36 or the defective product containing unit 37 that contains the electronic components scheduled for reinspection. The unit 42 is a component.

Further, the control unit 4 evaluates the observation result of the electronic component, determines the electronic component accommodation destination as the non-defective product accommodation unit 36 or the defective product accommodation unit 37 according to the inspection result, and in accordance with the determination, the inspection classification device 3 is controlled. The control unit 4 includes an observation result reception unit 43, an inspection unit 44, an identification information generation unit 45, an observation result storage unit 46, and a transmission unit 47.

The observation result receiving unit 43 mainly includes a LAN adapter and a serial port interface such as RS232 / 485, and receives observation result information i1 which is observation result data from the observation units 35c to 35e.

The inspection unit 44 mainly includes a CPU, analyzes the observation result information i1, determines the quality of the electronic component, and generates determination information i2 indicating the determination result. The determination information i2 indicates whether the electronic component is good or defective. The determination information i2 is output to the classification mode control unit 41. The classification mode control unit 41 controls the elevating and lowering timing of the suction nozzle 31a that holds the electronic component and the electronic component detachment timing and the movement of the container T of the non-defective product storage unit 36 or the defective product storage unit 37 according to the determination information i2. The parts are accommodated in the non-defective product accommodation unit 36 or the defective product accommodation unit 37.

The identification information generation unit 45 mainly includes a CPU, and associates identification information i3 with observation result information i1 and determination information i2, as shown in FIG. The identification information i3 is information for identifying the electronic component that is the subject of the observation result information i1 and the determination information i2.

The identification information i3 indicates the position in the container T that is the storage destination after the electronic components are classified, as shown in FIG. In the container T that is moved by two pitches every fixed number, there are empty areas for every fixed number. A certain number of electronic component groups sandwiched between the empty areas can be recognized as one unit lot. The identification information i3 includes the number of columns of the electronic component group that is the lot number and the arrangement order in the columns.

Here, the storage unit control unit 42 manages and controls the 1-pitch movement or 2-pitch movement of the non-defective product storage unit 36 or the defective product storage unit 37 that stores the electronic components to be re-inspected. The identification information generation unit 45 specifies the position of the electronic component in the container T according to the management and control of the electronic component storage position by the storage unit control unit 42, and generates and associates the identification information i3.

The observation result storage unit 46 mainly includes a memory, and stores observation result information i1, determination information i2, and identification information i3 associated with each other. The observation result transmission unit 47 is mainly configured to include a serial port interface such as a LAN adapter and RS232 / 485, and sends the observation result information i1, the determination information i2, and the identification information i3 of the electronic component scheduled for reinspection to the reinspection apparatus 2. Send.

(Re-inspection equipment)
Next, a detailed configuration of the reinspection apparatus 2 will be described. FIG. 5 is a configuration diagram showing details of the re-inspection apparatus 2. As shown in FIG. 5, the reexamination device 2 includes a receiving unit 23, an observation result storage unit 25, a display unit 21, an operation unit 22, a redetermination information generation unit 26, and a transmission unit 24. The observation result information i1 received from the classification device 3 is reexamined. In the reexamination apparatus 2 of this embodiment, the observation result information i1 is displayed, and the reexamination person visually observes the observation result information i1, thereby supporting visual reexamination.

The receiving unit 23 is mainly configured to include a serial port interface such as a LAN adapter or RS232 / 485, and the observation result information i1, the determination information i2, and the identification information of the electronic component that is the subject of re-inspection from the inspection classification device 3 Receive i3. The observation result storage unit 25 mainly includes a RAM, and stores the received observation result information i1, determination information i2, and identification information i3.

The display unit 21 mainly includes a display having a display screen such as a liquid crystal display or an organic EL display and a CPU, and responds to the reexamination's operation on the GUI screen with the observation result information i1, the determination information i2, and the identification information i3. Display sequentially. The operation unit 22 is mainly an input interface such as a mouse or a touch panel, and operates the GUI screen displayed on the display unit 21.

The re-determination information generation unit 26 is configured mainly including a CPU, and updates the determination information i2 associated with the observation result information i1 according to the operation received by the operation unit 22. Specifically, the classification of the non-defective or defective electronic component indicated by the determination information i2 is changed.

The transmission unit 24 is configured mainly including a LAN adapter, a serial port interface such as RS232 / 485, and returns the observation result information i1, the determination information i2, and the identification information i3 to the inspection classification device 3. Part of the determination information i <b> 2 returned to the inspection classification device 3 has been changed by the redetermination information generation unit 26. Observation result information i 1, determination information i 2, and identification information i 3 returned from the transmission unit 24 are stored in the re-determination information reception unit 48 of the examination classification device 3.

FIG. 6 is a schematic diagram showing a GUI screen of the display unit 21. As shown in FIG. 6, observation result information i1, determination information i2, and identification information i3 are arranged in the screen. When the observation result information i1 is image data obtained by appearance inspection, an image showing the appearance of the electronic component is displayed on the screen. In the screen, the NG button 22a for changing the judgment information i2 to a defective product, the GOOD button 22b for changing the judgment information i2 to a non-defective product, the observation result information i1, the judgment information i2, and the identification information i3 A feed button 22c for changing to an electronic component is displayed. Further, a cursor 22d that moves in the screen by the operation of the operation unit 22 is displayed in the screen.

The reexaminer visually observes the observation result information i1 on the screen, and when making a determination different from the determination information i2 being displayed, presses the NG button 22a or the GOOD button 22b using the cursor 22d. In response to this pressing, the redetermination information generation unit 26 updates the determination information i2 to the content corresponding to the pressing button. When the feed button 22c is pressed using the cursor 22d, the display unit 21 displays determination information i2 and identification information i3 corresponding to the electronic component next to the identification information i3 being displayed.

(Operation)
(Classification mode operation)
The control operation in the classification mode of the electronic component inspection apparatus 1 will be described. FIG. 7 is a flowchart showing the classification mode control operation of the electronic component inspection apparatus 1. In this control operation, the quality standard of the electronic component is set strictly, and the housing T held by the defective product housing unit 37 is used as the retest target housing for storing the retest target electronic component. A case where a good product and a defective product are mixed in the body T is described as an example.

First, in the supply unit 33, the pickup device 33b sequentially picks up electronic components from the wafer ring WR held by the ring holder 33a. The pickup device 33b rotates intermittently, sequentially positions the suction nozzle 31a that picks up the electronic component at the apex, and sequentially transfers the electronic component to the suction nozzle 31a on the side of the conveying table 3b facing each other.

Each electronic component held by the suction nozzle 31a of the transfer table 3b is corrected in order by the observation units 35a and 35b by the intermittent rotation of the transfer table 3b, and is sequentially transferred to the observation units 35c to 35e for observation. The observation result information i1 of each electronic component is sequentially generated by the units 35c to 35e.

During the driving of the inspection classification device 3 so far, in step S01, the storage unit control unit 42 initializes the column N in which the electronic components to be reinspected and the order M are set to 1.

Next, in step S02, the observation result receiving unit 43 receives the observation result information i1 of the electronic component first transported from the observation units 35c to 35e. In the case of the observation units 35c to 35e for appearance inspection, the observation result information i1 is appearance image data of the electronic component. In the case of the observation units 35c to 35e for the electrical characteristic inspection, the observation result information i1 is a voltage value, a current value, a resistance value, a frequency, an output signal for a logic signal, or the like.

When the observation result information i1 is received, in step S03, the inspection unit 44 analyzes the observation result information i1 and determines whether the electronic component is good or defective. When the observation result information i1 is image data, the inspection unit 44 performs binarization and enhancement processing on the image data, and shows scratches, dirt, or breakage in a region surrounded by a line image indicating the external shape of the electronic component. Scan for line images. The inspection unit 44 determines that the electronic component is defective if the number of pixels constituting the line image indicating scratches, dirt, or breakage is a certain number or more, and if the number is less than the predetermined number, the inspection unit 44 determines that the electronic component is a non-defective product. To do.

If it is determined in step S04 that the electronic component is a non-defective product (step S04, Yes), the electronic component is carried to the non-defective product storage unit 36 by the suction nozzle 31a. In step S05, the good product storage unit 36 holds the electronic product. It is accommodated in the container T.

If the electronic component is not determined to be a non-defective product (step S04, No) and the electronic component is determined to be defective, the accommodation unit control unit 42 determines whether the arrangement order M is the maximum value in step S06. The accommodation unit control unit 42 stores in advance the maximum value of the arrangement order M. The maximum value of the arrangement order M corresponds to the number included in each lot of electronic components scheduled for reinspection.

If the arrangement order M is not the maximum value (step S06, No), in step S07, the defective product storage unit 37 moves the stored storage body T by one pitch under the control of the storage unit control unit 42. That is, an empty area that does not accommodate electronic components is not created. Then, the accommodation unit control unit 42 increments the arrangement order M by 1 in step S08.

On the other hand, if the arrangement order M is the maximum value (step S06, Yes), in step S09, the defective product storage unit 37 moves the stored storage body T by two pitches under the control of the storage unit control unit 42. . That is, an empty area in which no electronic component is accommodated is created. In step S10, the accommodation unit control unit 42 increments the column N by 1 and initializes the arrangement order M to 1.

In step S11, the classification mode control unit 41 positions the electronic component determined to be a defective product immediately above the defective product storage unit 37, and causes the suction nozzle 31a to remove the electronic component so that the electronic component is empty. To accommodate.

In step S12, the identification information generation unit 45 generates identification information i3 indicating the accommodation position of the accommodated electronic component. That is, the identification information generation unit 45 acquires the numerical information of the column N and the arrangement order M counted by the accommodation unit control unit 42 in steps S08 and S10, and the numerical information of the column N and the arrangement order M is identified as the identification information i3. To do. In step S <b> 13, the observation result storage unit 46 stores the observation result information i <b> 1, the determination information i <b> 2, and the identification information i <b> 3 of the electronic component accommodated in the defective product accommodation unit 37 in association with each other.

If this inspection and classification have not been completed for all the electronic parts (step S14, No), the process returns to step S02, the observation result information i1 is obtained for each electronic part, and the distinction between the non-defective product and the defective product is determined. In this case, the material information i1, the determination information i2, and the identification information i3 of the electronic component determined to be defective are associated with each other while determining the accommodation position.

(Re-inspection operation)
FIG. 8 is a flowchart showing the reinspection operation of the electronic component inspection apparatus 1. The re-inspection is performed in the next process after the end of the classification mode. In step S21, the reexamination device 2 receives the observation result information i1, the determination information i2, and the identification information i3 associated with each other from the inspection classification device 3. Although there is no particular limitation on the transmission / reception timing of these pieces of information, for example, after the inspection classification device 3 finishes the inspection and classification of all the electronic components that can be accommodated in the container T, the inspection classification device 3 transmits to the re-inspection device 2. It may be. In addition, the reexamination person operates the inspection classification device 3, requests transmission of information to the inspection classification device 3 in response to the operation, and transmits the information from the inspection classification device 3 to the reinspection device 2 in response to the request. You may make it do.

When the observation result information i1 or the like is received, in step S22, the display unit 21 displays the observation result information i1, the determination information i2, and the identification information i3 that are associated with each other on the GUI screen. On this GUI screen, an NG button 22a for changing the judgment information i2 to a defective product, a GOOD button 22b for changing the judgment information i2 to a non-defective product, observation result information i1, judgment information i2 and identification information i3 in the screen A feed button 22c for changing to a part is also displayed.

The reexaminer visually inspects the observation result information i1 and reinspects the electronic component, and depresses the GOOD button 22b that determines that the product is good in step S23 (step S23, Yes), or the NG button that determines that the product is defective in step S24. When 22a is pressed (step S24, Yes), in step S25, the redetermination information generation unit 26 responds to the button press, and displays the determination information i2 of the electronic component being displayed as a non-defective or defective product corresponding to the button press. Update to information.

Then, when visual re-inspection is completed for all electronic components to be re-inspected, the transmission unit 24 transmits observation result information i1, determination information i2, and identification information i3 to the inspection classification device 3. The determination information i2 reflects the result of the reexamination. The transmission timing is triggered by the retester's input of an operation indicating the end of the retest, or triggered by the request from the test classification device 3 when the reclassification operation of the test classification device 3 is started. Also good.

(Reclassification mode operation)
FIG. 9 is a flowchart showing resupply of electronic components in the control operation in the reclassification mode of the electronic component inspection apparatus 1. In this control operation, the quality standards of the electronic parts are set strictly, and the container T held by the defective product storage unit 37 is used as a retest target storage body. A case where electronic components can be mixed is described as an example. In addition, the camera provided in the resupply unit 38 is arranged so as to pick up an image of the position immediately before the position where the suction nozzle 31a picks up the electronic component.

This reclassification mode is performed in the next process after the classification mode operation and re-inspection. First, in step S <b> 31, the worker takes out the container T in which the electronic component determined to be defective is packed from the defective product storage unit 37 and sets it in the resupply unit 38. In step S32, the reclassification mode control unit 49 initializes the column N and the arrangement order M of electronic components to be reclassified to 1 in advance.

In the case of detapering, the resupply unit 38 moves the Mth electronic component in the Nth row directly below the suction nozzle 31a while peeling the sealing seal from the container T. In step S33, the reclassification mode control unit 49 controls the suction nozzle 31a to pick up the Mth electronic component in the Nth row and transport it along the transport path 3b.

In step S34, the reclassification mode control unit 49 confirms the image of the camera included in the resupply unit 38 and determines whether an empty area exists. The presence of the empty area may be obtained by, for example, binarizing and enhancing the camera image and analyzing whether the outline of the electronic component exists within the empty area.

If there is no empty area in the camera image (No at Step S34) and M is not the maximum value (No at Step S35), the reclassification mode control unit 49 sets the container T to 1 in Step S36. In step S37, M is incremented by 1 and the pickup and transport of the Nth row M-th electronic component are repeated until the electronic component pickup is completed (Yes in step S41). If M is not the maximum value, it is normal that there is no empty area at the adjacent empty area detection position.

If there is an empty area in the camera image (step S34, Yes) and M is the maximum value (step S38, Yes), the reclassification mode control unit 49 sets the container T to 2 pitches in step S39. In step S40, N is incremented by 1 and M is initialized to 1. In step S41, the pickup and transport of the Mth electronic component in the Nth row are repeated until the electronic component pickup is completed (step S41, Yes). If M is the maximum value, it is normal that there is an empty area at the adjacent empty area detection position, so that two pitch moves to pass through the empty area and pick up the electronic components of the next lot. It is what is letting.

On the other hand, there is no empty area in the camera image (No at Step S34), but when M is the maximum value (Yes at Step S35), or there is an empty area in the camera image (Step S35). (S34, Yes), if M is not the maximum value (step S38, No), the reclassification mode control unit 49 informs that there is a mechanical error in the movement of the container T in step S42, and performs the inspection. The driving of the classification device 3 is stopped.

That is, the electronic parts are packaged continuously in groups of M, and the group should be sandwiched between empty areas. When M is the maximum, the camera should have an empty area, and the absence of the empty area can be estimated as a mechanical error in the movement of the container T. Further, when M is not the maximum, a group of electronic components continues and the empty area should not be reflected, and the existence of the empty area can be estimated as a mechanical error in the movement of the container T.

For the notification, the inspection classification device 3 is provided with an alarm or a patrol lamp, and these devices may be operated, or may be displayed on a display provided in the inspection classification device 3, or connected to the inspection classification device 3 via a network. You may make it display on the display of the computer for monitoring used.

Next, reclassification of electronic components in the control operation of the reclassification mode of the electronic component inspection apparatus 1 will be described. FIG. 10 is a flowchart showing reclassification of electronic components in the control operation in the reclassification mode of the electronic component inspection apparatus 1. In this control operation, the quality standard of the electronic component is set strictly, and a case where a good product and a defective product can be mixed in the defective product storage unit 37 is described as an example.

After the electronic component container T determined to be defective in the first inspection is set in the resupply unit 38 and the Nth row Mth electronic component is picked up and transported, an empty space for resupplying the electronic component is obtained. This is an operation in parallel with the area check operation. That is, in step S51, the electronic component container T determined to be defective in the first inspection is set in the resupply unit 38, and in step S52, the Nth row Mth electronic component is picked up and transported. In the defective product storage unit 37, a new storage body T for packing electronic components determined to be defective by re-inspection is set.

In step S53, when the N-th row Mth electronic component reaches the non-defective product storage unit 36, the reclassification mode control unit 49 determines whether the N-th row Mth electronic component is non-defective by re-inspection. Specifically, the reclassification mode control unit 49 reads the determination information i2 associated with the N-th column M-th identification information i3 received via the re-determination information reception unit 48, and whether the determination information i2 indicates a non-defective product. judge.

As a result of the determination, if the N-row M-th electronic component is a non-defective product by re-examination (step S54, Yes), in step S55, the reclassification mode control unit 49 adds the N-row M to the container T of the good product storage unit 36. No. electronic parts are packed.

That is, the suction nozzle 31 a is lowered toward the non-defective product storage unit 36. The non-defective product storage unit 36 moves the storage body T, and prepares an empty area immediately below the suction nozzle 31a. The lowered suction nozzle 31a separates the held Mth electronic component in the N row toward the empty area.

On the other hand, as a result of the determination, if the electronic component in the Nth row and Mth is a defective product by re-inspection (step S54, No), the reclassification mode control unit 49 does not release the electronic component in the non-defective product accommodation unit 36, The conveyance path 3b is further conveyed as it is. In step S56, when the Nth row Mth electronic component determined to be defective by re-inspection reaches the defective product storage unit 37 (step S56, Yes), in step S57, the reclassification mode control unit 49 The electronic components of the Nth row and Mth are packed in the container T of the defective product storage unit 37.

That is, the suction nozzle 31 a is lowered toward the defective product storage unit 37. The defective product storage unit 37 moves the container T, and prepares an empty area immediately below the suction nozzle 31a. The lowered suction nozzle 31a separates the held Mth electronic component in the N row toward the empty area.

(Function and effect)
The electronic component inspection apparatus 1 includes observation units 35a to 35e that observe electronic components, and an inspection unit 44 that analyzes observation result information i1 of the observation units 35a to 35e and determines whether the electronic components are good or defective. And a first classification means for classifying the electronic component into either a non-defective product or a defective product T based on the determination information i2 of the inspection unit 44. In the present embodiment, the first classification unit includes a conveyance table 31 and a suction nozzle 31a.

In addition, an identification information generation unit 45 is provided that generates identification information i3 indicating the position of the electronic component accommodated in the reinspection container, and the observation result information i1 of the electronic component and the position of the electronic component are The identification information i3 to be shown is associated and stored in the observation result storage unit 46.

Furthermore, a re-inspection device 2 for re-determining whether the electronic parts stored in the re-inspection container is re-determined from the observation result information i 1 is provided in the observation result information i 1 by the re-determination information generator 26. The re-determination result is further associated with the associated identification information i3. The re-determination result is associated by updating the determination information i2.

Then, based on the re-determination result of the re-inspection apparatus 2, the electronic component at the position indicated by the identification information i3 associated with the re-determination result is used as the non-defective product or the defective product T. Reclassified crab. In the present embodiment, the second classification unit is a device common to the first classification unit, and is the conveyance table 31 and the suction nozzle 3a of the inspection classification apparatus 3.

According to this electronic component inspection apparatus 1, as shown in FIG. 11, the inspected electronic component D and its observation result information i1 are linked via the identification information i3 indicating the position of the electronic component on the container T. It is done. Therefore, re-inspection can be performed using the observation result information i1, and the electronic component D for which the quality has been re-determined by the re-inspection can be specified. Therefore, the inspection result information i1 is used for reinspection, and the electronic component D can be treated according to the result. By enabling this reinspection process, it is possible to reinspect the non-defective product and the defective product of the electronic component D with high accuracy without performing a process of acquiring new observation result information i1.

For example, the Kth electronic components aligned from the start of conveyance are observed Kth by the observation units 35a to 35e. Then, observation result information i1 attached with the K-th alignment number is generated by this observation, and by analyzing the observation result information i1 with respect to the K-th electronic component, it is determined whether the product is good or defective.

Here, it is assumed that Ma pieces (the maximum number of electronic components in the lot ≧ Ma + 1) have occurred before the determination of the K-th observation result information i1. In this case, the value Ma is stored in advance by counting the number of defective products, and when the product is determined to be defective by analysis of the Kth observation result information i1, the identification information i3 of Ma + 1 obtained by incrementing Ma is obtained. appear. Then, determination information i2 indicating a defective product and newly generated identification information i3 of Ma + 1 are stored in association with the Kth observation result information i1.

During this determination process, the K-th aligned electronic component reaches the K-th non-defective product containing unit 37, but the determination information i2 associated with the observation result information i1 attached with the K-th alignment number indicates the defective product. Since it shows, it passes as it is and is accommodated in the accommodating body T of the defective article accommodating unit 38.

At this time, Ma electronic components are already accommodated in the continuous accommodation area, and the K-th electronic component is accommodated in the same Ma + 1-th accommodation area as the identification information i3. Therefore, the identification information i3 and the position in the container T match, and the position in the container T, the observation result information i1, and the determination information i2 are linked via the identification information i3.

Therefore, it can be specified whether the observation result information i1 about which electronic component accommodated in the container T is redetermined, and the electronic component can be reclassified according to the result of redetermination. .

In addition, at least the reinspection target container has a plurality of storage areas for storing electronic components such as carrier tape. The first classifying unit continuously fills a continuous accommodation area with a certain number of electronic components, and leaves one area adjacent to the continuous area filled with the electronic components as an empty accommodation area.

That is, the container T moves by one pitch or two pitches for accommodating the next electronic component depending on whether or not the arrangement order M of the electronic components is the maximum value. Therefore, as shown in FIG. 11, a fixed number of electronic components D are continuously arranged in the storage regions P in the container T, and one empty region Pa is arranged between the fixed number of electronic component groups. Will be.

This empty area Pa functions as a mark for detecting a mechanical feed error of the container T. When the electronic parts are re-supplied to the transport path 3b for reclassification, the camera provided in the re-supply unit 38 functions as a feed error detection means, and if there is no empty area Pa for every fixed number, or a fixed number If there is an empty area Pa, it can be detected that a mechanical error has occurred in the movement of the container T. Therefore, an electronic component determined to be non-defective product by re-inspection is accommodated in a defective product housing T, and an electronic component determined to be defective product by re-inspection is stored in a non-defective product housing T. It becomes possible. When a sending mistake occurs, the control unit 4 may stop the reclassification.

For example, it is assumed that a camera that captures an accommodation area existing at a position k before the position where the electronic parts are re-supplied to the transport path 3b is installed, and a certain number is C. At this time, in the re-supply unit 38, the empty region Pa should exist again at the photographing position of the camera due to the movement of the C pitch container T after the previous detection of the empty region Pa. The empty area Pa should not be imaged.

However, if the empty area Pa is imaged other than the movement of the C pitch, or if the empty area Pa is not imaged due to the movement of the C pitch, the resupply unit 38 fails to move the container T as specified and moves. There is a gap. This misalignment leads to a situation in which the non-defective product and the defective product are distinguished according to the arrangement order of the electronic components, resulting in a situation where the non-defective product is reclassified as a defective product and the defective product is reclassified as a good product. Cancel classification.

(Second Embodiment)
Next, the electronic component inspection apparatus 1 according to the second embodiment will be described in detail with reference to the drawings. Note that the same configurations and functions as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

FIG. 12 is a block diagram showing a configuration of the control unit 4 of the electronic component inspection apparatus 1 according to the second embodiment. As shown in FIG. 12, in the electronic component inspection apparatus 1, the control unit 4 includes a ring holder control unit 50. The ring holder control unit 50 controls driving of the ring holder 33a to supply electronic components to the transport path 3b. Specifically, the electronic component to be supplied is designated, and the movement amount in each dimension of the planar movement of the wafer ring WR by the ring holder 33a and the electronic component by the push-up pin so as to supply the designated electronic component to the transport path 3b. The push timing is controlled.

Supplied electronic parts are specified by the arrangement position of the electronic parts on the wafer ring WR. The arrangement position is specified by a matrix as shown in FIG. That is, on the wafer ring WR, electronic components are specified by a matrix by mapping processing.

As shown in FIG. 14, the identification information generating unit 45 further associates the dicing line information i4 indicating the position of the electronic component on the wafer ring WR in a matrix with the observation result information i1, the determination information i2, and the identification information i3.

For example, the classification mode control unit 41 identifies each electronic component aligned and conveyed to the conveyance path 3b by the dicing line information i4 in the conveyance order, and in turn in synchronization with the input timing of the observation result information i1 to the inspection unit 44. The dicing line information i4 is handed over. That is, in the inspection unit 44, the dicing line information i4 and the observation result information i1 are associated with each other. The identification information generation unit 45 obtains the associated dicing line information i4, observation result information i1, and determination result information i2 in a state of being associated with each other.

The re-inspection apparatus 2 receives the dicing line information i4, the observation result information i1, the determination result information i2, and the identification information i3 that are associated with each other. FIG. 15 is a schematic diagram showing a GUI screen displayed on the display unit 21 of the reinspection apparatus 2. The display unit 21 further arranges buttons 22e, 22f, and 22g on the GUI screen.

The button 22e accepts an operation for browsing the same dicing line. When the feed button 22c is pressed after the button 22e is pressed, the display unit 21 displays the electronic components arranged on the same dicing line as the currently displayed electronic component.

Specifically, the dicing line information i4 having the same row or column as the dicing line information i4 associated with the currently displayed observation result information i1 is retrieved from the observation information storage unit 25, and the corresponding dicing line information i4 is retrieved. Observation result information i1, determination result information i2, and identification information i3 associated therewith are stocked in a queue. When the send button 22c is pressed, observation result information i1, determination result information i2, and identification information i3 associated with each other are sequentially displayed from the queue.

The button 22f accepts an operation to change all the determination information i2 related to the dicing line in the same row to a defective product. When the button 22f is pressed, the redetermination information generation unit 26 determines that all the electronic components arranged on the dicing line in the same row as the currently displayed electronic component are defective.

Specifically, the same dicing line information i4 as the row of the dicing line information i4 associated with the currently displayed observation result information i1 is searched from the observation information storage unit 25 or the queue, and the corresponding dicing line information i4 is stored. The associated determination result information i2 is changed to determination of defective products.

The button 22g accepts an operation for changing all the determination information i2 related to the dicing lines in the same row to non-defective items. When the button 22g is pressed, the redetermination information generation unit 26 determines that all electronic components arranged on the same row of dicing lines as the currently displayed electronic component are defective.

Specifically, the same dicing line information i4 as the column of the dicing line information i4 associated with the currently displayed observation result information i1 is searched from the observation information storage unit 25 or the queue, and the corresponding dicing line information i4 is stored. The associated determination result information i2 is changed to determination of defective products.

As described above, in the electronic component inspection apparatus 1, the identification information generating unit 45 further associates the dicing line information i4 indicating the matrix position on the wafer ring WR of the electronic component with the identification information i3. The wafer included in the wafer ring WR is diced in the matrix direction, and defects during dicing often spread to the same dicing line.

Therefore, the re-determination information generation unit 26 of the re-inspection apparatus 3 selects the electronic components re-determined as non-defective products or defective products based on the dicing line information i4 and other electronic components arranged in the same row or column on the wafer ring WR. Re-determined with the same quality. As a result, the time required for re-inspection can be greatly reduced. In particular, when the observation result information i1 is confirmed visually and the determination information i2 is changed manually by the reexaminer, the time required for the reexamination can be drastically reduced, and the labor of the reexaminer can be reduced. Misjudgments due to distraction of the reexamination person can be reduced.

Further, even if the display unit 21 continuously displays the observation result information i1 of the electronic component being displayed and other electronic components arranged in the same row or column on the wafer ring, there is no distinction between dicing lines. Compared with the sequential re-inspection of the electronic parts by visual observation of the observation result information i1, the time and labor are greatly reduced.

(Other embodiments)
As mentioned above, although each embodiment was demonstrated as an example, the electronic component inspection apparatus 1 classify | categorizes and reclassifies an electronic component into a non-defective product and a defective product according to the result of the inspection and re-inspection of the electronic component. Analyzes the observation results obtained at the time of inspection of electronic components from different viewpoints, methods or precisions, and various omissions, replacements, and changes are made without departing from the scope of the invention, as long as they lead to re-inspection results be able to. And this embodiment and its deformation | transformation are included in the invention described in the claim, and its equivalent range while being included in the range and summary of invention.

For example, although the suction nozzle 31a has been described as an example of the holding means, an electrostatic suction method, a Bernoulli chuck method, or a chuck mechanism that mechanically holds an electronic component may be provided. Moreover, although the conveyance table 31 has been described by taking an annular method as an example, a linear conveyance method may be used. In the first place, without attaching the holding means to the transfer table 31, the holding means may be attached to the articulated arm, and the holding means may be moved from the supply unit 33 to each container T by operating the arm.

Further, the classification means uses the common conveyance table 31 and the suction nozzle 31a in the classification according to the inspection and the reclassification according to the re-inspection, but the conveyance path may be changed according to the classification and the re-classification. Good.

Further, the container T is not limited to a carrier tape, and may be a tray in which storage areas are arranged in an array on a plane, or a wafer ring WR.

Furthermore, the observation units arranged on the transport path 3b are not limited to a single type, and a plurality of units of different types of inspection items may be arranged. You may do it.

Further, in this embodiment, re-inspection is performed by visual observation, which is a method different from inspection, but the observation result information i1 may be re-determined without human intervention by performing computer analysis using a different analysis method. Computer analysis may be performed by the same analysis method that is more detailed and precise than the analysis at the time of inspection.

DESCRIPTION OF SYMBOLS 1 Electronic component inspection apparatus 2 Reinspection apparatus 21 Display part 22 Operation part 23 Reception part 24 Transmission part 25 Observation result memory | storage part 26 Redetermination information generation part 3 Inspection classification | category apparatus 3a Stand 3b Conveyance path 31 Conveyance table 31a Adsorption nozzle 32 Direct drive Motor 33 Supply unit 33a Ring holder 33b Pickup devices 35a to 35e Observation unit 36 Non-defective product storage unit 37 Defective product storage unit 38 Resupply unit 39 Forced discharge bin 4 Control unit 41 Classification mode control unit 42 Storage unit control unit 43 Observation result reception unit 44 Inspection unit 45 Identification information generation unit 46 Observation result storage unit 47 Observation result transmission unit 48 Re-determination information reception unit 49 Re-classification mode control unit 50 Ring holder control unit i1 Observation result information i2 Determination information i3 Identification information i4 Dicing line information

Claims (8)

1. One holds a non-defective product container and a non-defective product container to be a re-test target container for housing an electronic component to be re-inspected, and inspects the electronic component and according to the inspection result, An electronic component inspection apparatus for classifying electronic components into a defective product container,
   Observation means for observing electronic components;
   An inspection means for analyzing the observation result of the observation means to determine whether the electronic component is good or defective;
   First classification means for classifying the electronic component into either a non-defective product container or a defective product container based on the determination result of the inspection means;
   Identification information generating means for generating identification information indicating the position of the electronic component accommodated in the reinspection container, in the container;
   Storage means for associating and storing the observation result of the electronic component and the identification information indicating the position of the electronic component;
   Re-inspection means for re-determining with a different viewpoint, technique or accuracy, whether the electronic component stored in the re-inspection container is different from the non-defective product from the observation result,
   Re-determination information generating means for further associating the result of re-determination by the re-inspection means with the identification information associated with the observation result;
   Based on the re-determination result of the re-inspection means, a second classification for re-classifying the electronic component at the position indicated by the identification information associated with the re-determination result into either a non-defective product container or a defective product container Means,
   Providing
   An electronic component inspection apparatus characterized by.
2. The retest target container has a plurality of storage areas for storing electronic components,
   The first classifying means continuously fills a continuous accommodation area with a certain number of electronic components, and leaves one area adjacent to the continuous area filled with electronic components as an empty accommodation area;
   The electronic component inspection apparatus according to claim 1.
3. In the reinspection object container, a plurality of continuous rows of electronic components are defined by an empty accommodation region,
   The identification information is indicated by a column to which the electronic component belongs and an arrangement order in the column;
   The electronic component inspection apparatus according to claim 2.
4. The second classification means includes
   Holding means for holding an electronic component and releasing it from the non-defective product container or the defective product container;
   Resupply means for moving the reinspection target container so that the holding area of the electronic component is sequentially positioned at a position where the holding means separates the electronic component;
   Sending error detection means for sequentially imaging the accommodation area moving to a predetermined position and confirming the existence of the empty accommodation area for each of the predetermined number of movements;
   With
   If the sending error detection means cannot confirm the existence of the empty accommodation area for every certain number, the reclassification is stopped;
   The electronic component inspection apparatus according to claim 2 or 3,
5. A supply unit that supplies the electronic component attached to the wafer ring to the first classification unit;
   The identification information generation unit further associates dicing line information indicating a matrix position of the electronic component on the wafer ring with the identification information,
   The re-inspection means re-determines that the electronic components re-determined as non-defective or defective and other electronic components arranged in the same row or column on the wafer ring as the same quality based on the dicing line information;
   The electronic component inspection apparatus according to claim 1, wherein:
6. The re-inspection means includes
   A display unit for displaying the observation results;
   An operation unit that accepts a redetermination operation of a non-defective product or a defective product by visual observation of the observation result displayed on the display unit;
   Providing
   An electronic component inspection apparatus according to any one of claims 1 to 5.
7. A supply unit that supplies the electronic component attached to the wafer ring to the first classification unit;
   The re-inspection means includes
   A display unit for displaying the observation results;
   An operation unit that accepts a redetermination operation of a non-defective product or a defective product by visual observation of the observation result displayed on the display unit;
   With
   The identification information generation unit further associates dicing line information indicating a matrix position of the electronic component on the wafer ring with the identification information,
   The display unit continuously displays the observation result information of the electronic component being displayed and the other electronic components arranged in the same row or column on the wafer ring based on the dicing line information.
   The electronic component inspection apparatus according to claim 1, wherein:
8. The first classification unit and the second classification unit are configured by a common device;
   The electronic component inspection apparatus according to claim 1, wherein:

Images