Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
  • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
  • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
  • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
  • F16K3/30—Details
  • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
  • F16K37/0025—Electrical or magnetic means
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
  • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

• the present invention relates to a closure or lock device for a Vakuunnkannnner with a can be arranged on a vacuum chamber and an opening of the vacuum chamber surrounding the counter plate and a movable relative to the counter plate mounted closure lid, which closes in a closing position on the counter plate, the opening of the vacuum chamber.
• the invention relates to a method for closing an opening of a vacuum chamber by means of such a closure or lock device.
• WO 2005/121621 A1 describes a generic lock device for a lock opening arranged in a wall between a first and a second recipient and with a shut-off element arranged in the interior of the first recipient and a counter plate associated with the shut-off element.
• the flange-like configured and the opening enclosing the back plate is provided with a circumferential seal, against which the obturator is pressed sealingly.
• the obturator As evenly as possible in the circumferential direction around the opening distributed areas of the seal presses.
• the application of a uniform and homogeneous contact pressure on the seal over the entire seal is particularly difficult in the case of seals with a seal diameter of a few millimeters for a dimension of a shut-off device or a closure cover in the range of a few decimeters or meters in terms of design and production engineering.
• the gasket typically made of an elastomeric material, such as rubber, may undergo an aging process and may change its elastic properties with continued use of the closure or lock device.
• the vacuum chamber is operated with different vacuum or pressure levels. If the closure or lock device seals the interior of the vacuum chamber against the atmosphere or another ambient pressure, for example. Against a different pressure of an adjacent vacuum chamber, the contact pressure on the seal depending on the pressure prevailing in the vacuum chamber in each case vary and it can relative movements come between the seal and metal parts of the lock or lock device.
• the present invention seeks to provide an improved closure or lock device for a vacuum chamber and an associated method for closing a vacuum chamber, by means of which a well-defined and particularly uniform contact force exercisable on the seal and by means of which a predetermined distance or a required gap is precisely adjustable between a housing-side counter plate and a closure lid.
• the device should also be able to achieve a particularly high degree of particle freedom in the region of the vacuum chamber.
• the closure or lock device should also be characterized by a comparatively low weight and by a simple and good handling of their individual components in terms of production and operation.
• a closure or lock device for a vacuum chamber.
• the closure or lock device has a counter plate which can be arranged on or arranged on a vacuum chamber and is optionally integrated into the vacuum chamber or connected to a chamber wall, which encloses an opening of the vacuum chamber.
• the counter-plate is typically formed flange. It can protrude outwardly from the wall of the vacuum chamber and form or have a contact surface extending approximately perpendicular to the direction of insertion through the opening of the vacuum chamber.
• the closure or lock device further has a closure lid movably mounted with respect to the counter-plate. This closes in a closed position on the counter plate, the opening of the vacuum chamber.
• the closure lid can be moved in particular between a rest or initial position spaced from the counterplate into a contact position with the counterplate and ultimately into a closed position in which the closure lid abuts sealingly against the counterplate and, to that extent, seals the opening of the vacuum chamber in a gastight manner ,
• the closure or lock device has at least one controllable and / or controllable magnetic device in operative connection with the counterplate and the closure lid. This is designed to produce a closing force (S) acting between the counterplate and the closure lid.
• S closing force
• the adjustable magnetic device By means of the adjustable magnetic device, the amount and the tion of the counter-plate and closure lid acting closing force varied.
• both an attractive and repulsive force can be exerted on the closure lid in order to optionally close or open the opening of the vacuum chamber by means of the closure lid, depending on the pressure level prevailing in the vacuum chamber and the vacuum chamber environment.
• the closure or lock device at least one distance measuring device for measuring a distance between Verschlüssl e, cover and counter-plate.
• a distance between closure cap and counterplate in the direction of the closing force emanating from the magnet device can be measured at least at certain points.
• the distance between the closure cap and the counterplate is a measure of the currently prevailing compression or elastic deformation of a seal provided between the opposing plate and the closure cap, provided that the closure cap rests against the counterplate via the seal. Consequently, the degree of elastic deformation of the seal can be measured by means of the distance measuring device.
• the magnetic device can be regulated as a function of the distance between the counterplate and the closure cover measured by the distance measuring device.
• the magnetic device can be regulated as a function of the distance between the counterplate and the closure cover measured by the distance measuring device.
• the distance measuring device can be used to measure whether and to what extent the counterplate and the closure lid are sealingly connected to one another. If the distance is approximately above a maximum value provided for a sufficient seal, the closing force can for example be incrementally increased by means of the controllable magnetic device until the maximum permissible maximum distance is undershot.
• the magnetic device has at least one electromagnetic actuator arranged on one of the closure lid and counterplate and at least one counterpart arranged on the other of the closure lid and the counterplate, which magnetically interacts with the electromagnetic actuator.
• the electromagnetic actuator can be arranged, for example, on the counterplate or let into the counterplate, while the counterpart can be arranged on the closure lid. It is also conceivable that the counterpart is integrated in the cap, or that the entire cap acts as a counterpart.
• the counterpart or the closure cap is designed either ferromagnetically or permanently magnetically in order to interact with the electromagnetic actuator acted upon by a corresponding control current into magnetic operative connection.
• the electromagnetic actuator and its associated counterpart In the closed position of the closure lid on the counter plate, in which the closure cover completely covers the opening cross section of the vacuum chamber, the electromagnetic actuator and its associated counterpart reach at least partially overlapping, so that a sufficient closing force or opening force can be generated.
• the electromagnetic actuator of the magnet device it is generally conceivable for the electromagnetic actuator of the magnet device to be arranged on the closure lid, while the counterpart interacting magnetically with the electromagnetic actuator is arranged on the counterplate or formed thereon.
• At least one further permanent magnet which can further support the force originating from the electromagnetic actuator, can also be arranged on that component on which the electromagnetic actuator is arranged.
• an electroless locking of the closure lid can be achieved, so that the coil of the actuator can be acted upon with a much lower current intensity. Heat losses of the coil and associated problems with respect to cooling or thermal expansion can thereby be reduced or even eliminated.
• At least one electronic control circuit is also provided, which is coupled to the distance measuring device and to the at least one magnetic device and designed to maintain and / or set a predetermined distance between the counterplate and the closure cover.
• the control loop typically has a desired value transmitter, by means of which the distance signals which can be generated by the distance sensor are provided with a predetermined value. given setpoint. From the comparison of setpoint and actual value, a controller connected downstream of the setpoint generator can be used to generate a control signal for actuating the magnetic device, in particular for controlling the electromagnetic actuator.
• the control signal which can be generated by the controller is typically supplied via an amplifier to the electromagnetic actuator of the magnetic device.
• the electronic control circuit By means of the electronic control circuit an active and automatic regulation of the closing force can be realized. Any sudden or continuous changes in the operating or environmental conditions, such as a change in the pressure difference between the interior of the vacuum chamber and the environment, can be reacted flexibly in this way dynamically and depending on the situation.
• the distance measuring device and the magnetic device coupled together control loop a required distance between counter-plate and cap and thus a required contact pressure of the cap and a concomitant compression of provided between counter-plate and cap seal can be brought about and controlled adhered.
• an elastically compressible seal surrounding the opening is arranged in an intermediate space between the sides of the closure lid and the counterplate facing each other in a closed position of the closure lid on the closure lid or on the counterplate.
• the seal can be arranged for example on the counter-plate.
• the counterplate may, for example, have a groove enclosing the opening of the vacuum chamber, in which the peripheral seal is arranged.
• the thickness or the diameter of a sealing section is greater than the depth of the groove receiving the seal, so that a part of the seal at least slightly protrudes from the side of the counter-plate facing the closing cover, and thus with the contact surface formed by the counter-plate.
• the mutually facing sides of the closure lid and the counterplate are typically designed at least in regions as planar contact surfaces, which are in the closed position substantially perpendicular to the predetermined by the geometry of the opening of the vacuum chamber direction (z), or perpendicular to a closing direction in which the the magnetic device outgoing closing force acts, extend.
• the seal is typically made of an elastomer and has a suitable for the intended use elasticity or compressibility.
• the distance-dependent regulation of the closing force of the magnetic device is also conceivable, also with regard to their elastic or mechanical properties different seals, each to be used for different purposes of the closure or lock device.
• the closure or lock device can be adapted adaptively to different or varying elastic properties of a respective intended seal.
• At least one spacer made of plastic is arranged on one of the closing position of the closure lid facing each other sides of the closure lid and the counter plate, which prevents a direct contact position of counter-plate and closure lid.
• the spacer has a lower elasticity or compressibility than the seal to be arranged between the closure cap and the counterplate.
• the spacer may be disposed adjacent to the seal of the backing plate or on the closure lid.
• the spacer has, based on the surface normal of the plant surfaces of the counter-plate and / or closure lid on a lower height than the height by which the seal protrudes in the uncompressed initial state of its associated abutment surface of the closure lid or counter-plate.
• the spacer is designed as a kind of end stop to avoid direct metal contact of counter plate and cap. In normal operation, a simultaneous contact of the spacer with the closure lid and with the counter plate should also be avoided.
• the spacer is used in particular but also a calibration of the distance measuring device.
• the magnetic device can be controlled such that the closure lid touches the seal without compression. This position represents the maximum adjustable or adjustable distance.
• the magnetic device is driven in such a way that the spacer comes into abutment with both the closure cap and the counter plate. This position corresponds to the minimum distance to be set.
• the distance sensors of the distance measuring devices can be calibrated. From these two distances, a relative control or travel range can be derived. Any installation tolerances of the distance sensors, for example. On the back plate can be compensated or hidden. Such a calibration is advantageous in particular for a plurality of distance sensors arranged on at least one of the closure cover and the counterplate, since.
• the spacer is disposed on the backplate together with the gasket.
• the spacer and the seal are arranged on the side of the closure cover facing the counter-plate.
• different arrangements of seal and spacers on counter-plate and closure lid are conceivable.
• the seal can be arranged on the counterplate, while the spacer is arranged on the closure lid.
• a reverse constellation with closure cap side seal and Jacobplatten workedem spacers is equally conceivable.
• the spacer is dimensioned in comparison to the geometry of the seal and the groove receiving the seal such that the arranged for example on the counter plate or the closure lid spacers only with two components counter plate and closure lid comes into contact position when the seal almost compressed maximum or elastic is deformed.
• a direct metallic contact of counter-plate and closure lid can be avoided.
• a plurality of magnetic devices each provided with its own distance measuring device are arranged distributed over the circumference of the opening or over the circumference of the counter plate designed, for example, in the manner of a flange.
• Each of the distance measuring device coupled with one magnet device can, as it were, autonomously set and maintain a predetermined distance between the counterplate and the closure lid at the location of the corresponding distance measuring device or magnet device.
• Pressure-dependent and inevitably minimal deformations of the closure lid which would otherwise lead to an uneven pressing or closing force of the seal, can thus be effectively compensated and an uneven gap dimension respectively over the opening circumference varying distance between the closure lid and counter-plate can be counteracted.
• Any load-dependent or manufacturing-related deformations or component tolerances can be compensated by control technology.
• tions locally different clamping forces and contact pressures can be generated over the circumference of the opening or over the circumference of the counter plate, so that as homogeneous as possible compression of the seal targeted and controlled adjustable, which ultimately leads to a required tightness of the closure or lock device.
• that configuration is of particular advantage, namely in particular if at least one of the closure lid and the counterplate are not absolutely rigid and / or subject to local deformations depending on the load.
• the distributed over the circumference of the opening of the vacuum chamber or over the circumference of the counter-plate or over the circumference of the closure lid arranged magnetic devices are each coupled with its own control loop.
• each of the magnet devices distributed circumferentially over the circumference of the opening or over an outer edge of the counterplate are each provided with their own control circuit, each of the magnet devices can independently of one another determine the distance or distance prevailing at their position .adjust and adjust a gap between the cover and the counterplate.
• the magnetic devices distributed over the circumference of the opening and / or the distance measuring devices associated with the magnetic devices are coupled to a central control.
• the central control can be provided instead of a local control loop or in addition to the control circuit associated with the respective magnetic device and the associated distance sensor.
• the central control can each be coupled to the setpoint generator of the individual control loops, so that by means of the central control a distance to be maintained between the counterplate and the closure lid can be simultaneously transferred to all control loops.
• the user of the closure or lock device receives a control element which is particularly easy to operate, with which a distance or a corresponding gap dimension between closure cover and counter plate can be set synchronously or at the same time for all control circuits and magnetic devices.
• the distance measuring device can have, for example, one or more distance sensors which are based on an optical, magnetic or capacitive measuring principle.
• sensors are used which are based on an inductive measuring principle or on the basis of eddy currents.
• the distance sensor is arranged in particular in the immediate vicinity of the magnetic device, in particular in the immediate vicinity of the electromagnetic actuator or to the counterpart of the magnetic device, so that the highest possible degree of coking can be achieved.
• the immediately adjacent or even overlapping arrangement of distance measuring device and magnetic device tion contributes to the improvement in measurement and control accuracy.
• the distance sensor can be arranged on the counterplate and thus measure a distance, in particular a gap dimension, between the counterplate and the closure cover.
• a distance sensor arranged on the counterplate is designed, in particular, to measure the distance to a defined reference surface or a reference point of the closure lid precisely, typically with an accuracy in the sub-millimeter or in the micrometer range.
• the closure lid is slidably mounted on a parallel to the plane of the opening extending guide.
• the closure lid is displaceably mounted in particular parallel to the contact surface of the counter-plate.
• the guide acts as a sliding guide and can be stationary, for example, be arranged on a basic framework or a base of the vacuum chamber. It is also conceivable that the guide is otherwise connected to the vacuum chamber or disposed thereon.
• the closure lid typically extends in a plane that is oriented perpendicular to the direction of insertion of the opening.
• the counter-plate with its contact surface typically extends parallel to the guide for the closure lid and parallel to the orientation of the closure lid.
• the sliding guide is provided in particular that the closure lid located in a rest position, that is, at a predetermined distance, relative to the insertion of the opening, is spaced from the counter-plate.
• the guide may for example have a guide rail which extends above or below, possibly also laterally of the opening of the vacuum chamber.
• a sliding guide is particularly suitable for a space-saving design and arrangement of the closure or lock device in the region of a substrate-processing process station.
• the region which lies outside the opening of the vacuum chamber and, so to speak, in the extension of that opening can be used to arrange further components of a process station and does not have to remain free, as is customary with a pivotable mounting of the closure lid.
• the closure lid is mounted without contact on the guide by means of one or more magnetic bearings.
• one or more magnetic bearings which can be configured in particular as actively controlled magnetic bearings, but also as a passive magnetic bearing, a non-contact, thus wear and low maintenance displacement of the closure lid and relative to the counter plate is possible.
• no abrasion occurs in the case of a magnetic bearing-mounted mounting of the closure cap.
• Required clean room conditions and a required particle freedom in the area of the closure or lock device can hereby be easily achieved.
• the magnetic bearings provided for the guide can, similar to the magnetic device provided for the closure or lock device, each have an electromagnetic actuator and a magnetically interacting element. the counterpart and a distance measuring device and a control circuit, so that the closure lid by means of the one or more magnetic bearings quasi freely suspended at a predetermined distance from the guide and is movable along the guide.
• the closure lid is movably mounted on the guide by means of at least one holder between a rest position spaced from the counterplate and a closed position sealing the opening.
• the holder allows in particular a movement of the closure lid perpendicular to the predetermined direction of the displacement direction.
• the closure lid can be separated from the rest position spaced apart from the counterplate in the insertion direction (z) or in the closing direction, i. be moved in the direction of the counter-plate in order to achieve sealing with this in the closed position.
• the movement of the closure lid between the spaced rest position and the closing position sealing on the counterplate can be effected by the at least one, preferably by a plurality of magnetic devices of the closure or lock device.
• no separate drive is required for the movement of the closure lid between the rest position and the closed position.
• a method for closing an opening of a vacuum chamber by means of a previously described closure or lock device comprises the steps of measuring a distance or a gap dimension between the closure lid and the counterplate with at least one distance measuring device. Then, the at least one controllable magnet device is actuated to generate a closing force acting between the counterplate and the closure lid as a function of the measured distance. It is provided here that at least one distance between the closure lid and the counterplate is measured and, depending on the measured distance, at least one controllable magnetic device is actuated to maintain a predetermined distance or gap dimension between the counterplate and the closure lid.
• the simultaneous or time-staggered measuring a plurality of distances between the closure cap and counter-plate, in particular provided at different portions of the closure cap and counter-plate.
• a plurality of distance measurements is preferably carried out with a corresponding number of Abstandmessmessignchtonne, which are typically distributed over the circumference of the closure lid or over the circumference of the counter-plate.
• Each of these distance measuring devices is typically associated with its own magnetic device which can be controlled in each case by means of a control circuit provided for this purpose, which couples the distance measuring device to the respective magnetic device. In this manner, at different sections and positions of the closure lid, a holding force which brings about the respectively required distance between the closure lid and the counterplate can be generated locally and adapted dynamically in terms of magnitude to maintain the required distance.
• the closure cover is initially brought into contact with the seal arranged on the counterplate by means of a first actuation of the magnet device and in a subsequent one Step then the closure cap is brought by means of a second control of the magnetic device under compression or deformation of the seal in the contact position with the spacer, which is typically arranged on the counter plate.
• the closure lid by means of the first control, that is, by means of a first actuation of the relevant electromagnetic actuator with a control signal, in particular with a control current or by means of a synchronous actuation of a plurality of electromagnetic actuators distributed over the circumference arranged magnetic devices in the contact position brought with the counter-plate, in which position the closure lid quasi contact pressure on the counter-plate or against the arranged between the counter-plate and closure lid seal.
• the distance signal of the distance measuring device that accompanies the first activation serves to calibrate the distance sensor. This distance signal is virtually equivalent to a zero state or an uncompressed state of the seal. It represents a maximum distance for the control loop.
• a maximum permissible control signal for the magnetic device is determined by means of the second control, in which the seal is compressed to the maximum extent and, accordingly, the closure cover comes into contact or contact position with the spacer.
• the control signal which is to be provided for bringing about this abutment position represents a maximum value, which is applied to the magnetic device for maximum compression of the seal.
• the concern or striking the spacer as well as the achievement of the contact position can be read from a characteristic between the measured distance and the control of the magnetic device.
• a maximum distance and with reaching the contact position on the spacer a minimum distance can be measured.
• the distance sensor in question can be calibrated.
• the distance measuring device can be calibrated for the regulation and control of the magnetic device. The knowledge of the positions of the distance sensors themselves to one of counter-plate and closure lid is unnecessary in this respect.
• Fig. 1 is a simplified schematic representation of the closure or
• FIG. 2 shows the closure or lock device according to FIG. 1 with the closure lid in contact position with the counterplate
• FIG. 3 shows a schematic representation of the closure or Schleusenvor- direction according to FIG. 2, but with the closure lid in contact with the arranged between the closure lid and counter-plate spacers and
• FIGS. 1 to 3 shows a representation of the closure or lock device according to FIGS. 1 to 3 with the closure cover in the closed position with an absolute average closing force (S),
• FIG. 5 is a plan view of the closure or lock device with a counter-plate-side circumferential groove for receiving a seal
• FIG. 6 is a cross-sectional view along the line A-A of FIG. 5,
• FIG. 7 shows a further embodiment of the closure or Schleusenvorrich- device, but with a plurality of distributed over the circumference of the opening of the vacuum chamber arranged grooves which are respectively provided for receiving and for arranging in each case an electromagnetic actuators of a magnetic device
• 8 shows a cross section along BB according to FIG. 7,
• FIG. 9 shows an embodiment of the closure or lock device with a plurality of annular grooves distributed around the opening boundary or electromagnetic actuators, FIG.
• FIG. 10 is a cross-section C-C according to FIG. 9,
• FIG. 1 is a schematic representation of a closure cover displaceably mounted along a linear guide and located in a release position, FIG.
• Fig. 12 is a view according to FIG. 1 1, but with the closure lid in
• Fig. 13 is a side view of the closure or lock device according to
• FIG. 14 shows a representation according to FIG. 13 with a closure cover located in the closed position and sealingly mounted on the counterplate
• FIG. 15 shows a further embodiment of a sliding guide, but with a further magnet device which is arranged opposite the end of the closure lid, FIG.
• 16 shows a flow chart of the method for calibrating the closure or lock device.
• the closure or locking device 10 shown in cross-section in FIG. 1 is intended to be arranged at an opening 14 of a vacuum chamber 12.
• the closure or lock device 10 has a counterplate 16, which is typically connected to the wall 1 1 of the vacuum chamber 12 schematically indicated in FIG. 1.
• the counter-plate 16 may be arranged in alignment with the opening 14 of the vacuum chamber 12 on the wall 1 1 or formed as an integral part of the vacuum chamber 12. In that regard, the counter-plate 16 may have an opening 14 which may typically coincide with the opening of the vacuum chamber 12.
• the closure or lock device further has a closure lid 18 movably mounted relative to the counterplate 16, which closes the opening 14 in a gas-tight or vacuum-tight manner in a closed position 28, shown for example in FIGS. 3 and 4.
• Counter-plate 16 and closure cover 18 are further provided with at least one magnetic device 30, by means of which a closing force (S) on the closure cap 18 is exercisable.
• the counterplate 16 may have a flange-like geometry and in particular have a seal 22 on a side 17 facing the closure cap 18 and functioning as a contact surface, which extends around the opening 14, typically in the region of an opening boundary of the counterplate 16.
• the seal 22 made of an elastic and deformable material is arranged in a circumferential groove 20 of the counterplate 16. However, it can also be arranged in a corresponding groove of the closure cap 18 or in a gap 25 between the closure cap 18 and the counterplate 16.
• a closing force (S) directed in the insertion or closing direction (z) can be exerted on the closure cap 18.
• the closing force (S) is typically perpendicular to the plane (x, y) or perpendicular to the plane Contact surface or aligned to the side 17 of the counter-plate 16.
• the closure cap 18 also has a side 19 which faces the counterplate 16 and likewise acts as a contact surface.
• the in closed position 28 facing each other sides 17, 19 of counter-plate 18 and cover 19 are at least partially aligned parallel to each other.
• the magnetic device 30 has at least one electromagnetic actuator 32 arranged on the counterplate 16, as well as a counterpart 34 magnetically interacting with it and arranged on the closure cover 18.
• the counterpart 34 is configured as a permanent-magnetic or ferromagnetic component, which is either arranged on the closure lid 18 or embedded in the closure lid 18.
• the closure lid 18 itself at least in sections, a permanent magnetic or ferromagnetic material comprises or at least partially or completely formed from such.
• the closure or lock device 10 also has a distance measuring device 40, by means of which a distance 41 between the closure cap 18 and the counterplate 16, in particular a distance between the mutually facing sides 19, 17 of closure cap 18 and counterplate 16 can be determined and is quantitatively measurable.
• the distance measuring device 40 has a distance sensor 42 which is arranged on the counterplate 16 and measures a distance 41 in the closing direction (z) between the counterplate 16 and the closure cap 18.
• the distance measuring device 40 can thus Magnetic device 30, in particular its outgoing closing force (z) are controlled as a function of distance. It is particularly provided that by means of a distance-dependent control of the magnetic device 30, the distance 41 between the closure cap 18 and counter-plate 16 is precisely adjustable to a predetermined level.
• a control circuit 45 which couples the magnetic device 30 with the distance measuring device 40.
• the control circuit 45 has a setpoint generator 44, which is connected to the distance sensor 42 in terms of data technology.
• the setpoint generator 44 receives the distance signals provided by the distance sensor 42 and compares them with a preset or from a central control 50 variably predetermined setpoint. Setpoint and actual values are compared with each other in setpoint generator 44.
• a comparison signal resulting therefrom is then supplied to a controller 46, which generates therefrom a control signal provided for driving the electromagnetic actuator 32.
• the control signal that can be generated by the controller 46 is supplied to the electromagnetic actuator 32 via an amplifier 48. That the coil 33 of the electromagnetic actuator 32 supplied controllable control signal is calculated and determined so that a predetermined distance 41 between the counter plate 16 and closure cap 18 is met, and that in deviations from a required distance from the magnetic means 30 outgoing force to maintain the distance 41 is dynamically adaptable.
• the electromagnetic actuator 32 typically has a ferromagnetic core, for example an iron core, in addition to the coil 30 that can be acted upon by electrical signals.
• the electromagnetic actuator 32 can be designed as an electromagnet in a wide variety of other ways, for example as a Lorenz or immersion coil actuator. The latter, in contrast to an electromagnet, can generate not only attractive but also repulsive forces between the electromagnetic actuator and the counterpart.
• the counterplate 16 has a single groove 31 surrounding the presently rectangular opening 14, in which at least one one-part magnet coil, which encloses the opening 14 along the course of the opening. or multiple times, can be arranged. It is conceivable, in particular for reasons of redundancy, to arrange a plurality of such one-part magnetic coils in one and the same groove 31 and to couple these each with their own or the same distance measuring device 40 via a corresponding control circuit 45. By means of several coils an improved controllability is also achievable.
• a plurality of magnetic devices 30 are arranged over the circumference of the opening 14.
• Each of the magnet devices 30 has at least one electromagnetic actuator 32, which is arranged in a groove 31 of the counterplate 16.
• Each of the magnet devices 30 can be provided with its own distance measuring device 40 as well as with its own local control loop 45. In this way, individual clearance controls between the counterplate and the closure lid can be made as required and spatially resolved over the course of the opening, in particular along the opening boundary, so that any assembly or component tolerances as well as local deformations of the closure lid and / or counterplate can be compensated.
• a cover 21 provided for this purpose is typically made of a magnetically permeable material or of a non-magnetic or only weakly magnetic material.
• the cover 21 can act as a kind of closure for the groove 31 and be designed as such.
• the cover 21 can be arranged in a sealing manner over or in the groove 31.
• the cover 21 can be integrated flush into the side 17 facing the counterpart 34, ie, into the contact surface of the counterplate 16 or closure cover 18.
• the cover 21 is shown in Fig. 1 only on the right side of the counter-plate 16.
• Each of the distributed over the circumference of the opening 14 arranged Magneteinrich- 30 can be controlled according to the prevailing in their area distance 41 between counter plate 16 and cover 18 such that over the entire outer circumference of the opening 14 a constant or within the smallest tolerances remaining Distance 41 is adjustable.
• a large number of individual magnetic devices are embedded in the counterplate 16.
• the grooves 31 provided for receiving the individual electromagnetic actuators 32 here have a circular or annular geometry.
• Fig. 1 is located between the facing sides 17, 19 of the counter-plate 16 and cover 18, at least one spacer 24, which acts as an end stop for the closure cap 18. in the uncompressed state of the seal, as shown in FIGS. 1 and 2, protrudes the seal over a greater degree than the spacer 24 from the functioning as a bearing surface side 17 of the counter-plate 16 forth. Only when a maximum compression or deformation of the seal 22 is achieved, as shown in Fig. 3, the spacer 24 comes into abutment with the closure cover 18 located in the closed position 28.
• FIGS. 2 to 4 show a cross section through the closure or lock device from above. 2, the closure lid 18 is in a quasi-weak contact position 27 with the circumferential seal 22. In that contact position 27, such a closing force is exerted on the closure lid 18, that the closure lid 18 rests only on the seal 22, without this to deform or compress significantly.
• PEEK polyetheretherketone
• contact position 27 corresponds to a first activation of the at least one magnetic device 30.
• a corresponding control signal can be stored, for example, in a central control 50 or locally, for example in the controller 46 of the corresponding control circuits 45, and stored in particular for calibrating the distance measuring device.
• the magnetic device 30 can be acted upon by a control signal, typically with an electrical current, such that a minimum distance 41 between the closure cap 18 and the counterplate 16 is set.
• FIG. 16 again shows the method for calibration according to the representation of FIGS. 2 to 4 in the form of a block diagram.
• a control signal required therefor for the at least one magnetic device or a corresponding first maximum controllable distance 41 can then be stored in a step 302.
• the relevant control signal or the first or maximum distance 41 can be determined particularly easily from a characteristic curve of the measured distance 41 via the control signal applied to the magnetic device.
• step 304 as shown in FIG. 3, a second activation of the at least one magnetic device 30 is realized.
• a maximum control signal associated therewith can also be read from that characteristic curve. It corresponds to the current intensity at which a further increase in the magnitude of the current no longer leads to a measurable reduction of the distance 41. This is an indication that the stop position is reached with the spacer 24.
• step 306 a second minimum distance between closure cap and counterplate is then determined. On the basis of the measured minimum and maximum distances at which the seal 22 is in contact both with the closure lid and with the counterplate, the distance measuring device 40 can thus be calibrated with the magnetic device 30 that can be regulated and controlled.
• Figs. 1 1 and 12 a frontal view of the lock or lock device.
• the closure cap 18 is at an elongated Guide 62 slidably mounted.
• the guide 62 which is designed as a sliding guide extends parallel to the plane of the counter-plate 16 and / or cover 18 formed abutment surface (x, y), thus parallel to the facing sides 17, 19 of the counter-plate 16 and cover 18.
• Die Guide 62 is, however, as shown in the side view of FIG. 13, with respect to the closing direction (z) slightly spaced from the counter-plate 16 arranged to allow in particular a collision-free displacement of the closure cap 18 relative to the counter-plate 16. As indicated in FIG.
• the closure lid 18 is mounted on the guide 62 in a contact-free manner, in particular via at least one, typically two or more spaced, magnetic bearings 60.
• the individual magnetic bearings 60 similar to the magnetic devices 30, may each have a distance sensor (not shown separately), a control loop and an electromagnetic actuator 61 which can be controlled via the distance sensor and the control loop and interacts magnetically with a counterpart 63. In this way, a required floating state of the closure cap 18 on the guide 62 can be achieved.
• a non-contact mounting of the closure cap 18 on the guide 62 is to avoid contamination and abrasion in the vicinity of the vacuum chamber 12 of particular advantage.
• a plurality of electromagnetic actuators 62 are provided along the guide 62, which engage in succession with the counterparts 63 arranged on a carriage-type carrier 66 when the carrier 66 is displaced.
• actuators 62 can be arranged on the carrier 66 or on the closure lid 18, while magnetically interacting counterparts 63 are arranged in a stationary manner on the linear guide 62 designed as a guide rail.
• Fig. 1 the closure lid 18 is shown in a release position in which it is outside the range of the counter-plate 16.
• the closure lid 18 is in register with the counter-plate 16, so that the opening 14 is closed gas-tight.
• FIGS. 13 and 14 From a comparison of FIGS. 13 and 14 also shows that the closure lid 18 by means of a holder 64 in the closing direction (z), that is perpendicular to the plane (x, y) of the closure cover 18 slidably or movably mounted on the guide 62.
• the closure lid 18 By means of the at least one magnetic device 30 arranged along the circumference of the opening 14, the closure lid 18 can be transferred from the contactless rest position 26 shown in FIG. 13 into the contact position 27 shown in FIG. 14 and further into the closed position 28.
• For movement of the closure cap 18 between rest position 26 and contact position 27, i. perpendicular to the plane of the closure cap 18 is also conceivable to provide a separate drive.
• the holder 64 causes or supports in this case a kind of parallel displacement of the closure cap 18 from the spaced rest position 26 into the contact position 27 and further into the closed position 28, so that as far as possible no relative movements of the closure cap 18 and seal 22 in the plane of the closure cap (X, Y) occur. Such shearing movements could otherwise result in abrasion of the seal 22 and at least minor contamination of the environment of the vacuum chambers 12.
• Fig. 15 is a perspective view of the closure or Schleußen- device shown at an angle.
• a further guide 70 is provided which also magnetgelagert, as well as the magnetic bearing guide 62 may be configured without contact.
• the lower guide 70 can not only lead a displacement of the closure lid in a direction parallel to the plane of the closure lid, in this case horizontally. In particular, it can contribute to a tilt-free parallel displacement of the closure lid 18 from its rest position 26 into the contact position 27 and further into the closed position 28. Also, the guide 70 70 may be coupled with its own Abstandmessemesseacht 40. However, it is also conceivable that the distances of all distributed over the circumference of the opening 14 spaced distance measuring means 40 are read out and made available via the central controller 50, so that from a comparison of the individual distance signals conclusions about the orientation of the closure lid 18 in the yz Level can be taken.
• the contactless mounting of the closure cap 18 on the guide 62 takes place, for example, with a slide-like support 66 connected to the closure cap.
• One of the components of the relevant magnetic bearing 60 ie one of the electromagnetic actuator 61 and the counterpart 63, is arranged stationarily on the guide 62 while the other one Component of actuator 61 and counterpart 63 is arranged on the carrier 66. But it is also conceivable reverse mutual constellations and arrangements of electromagnetic actuators and counterparts.
• a linear motor 68 is provided, by means of which the closure lid 18 between the release position and rest position 26 is movable.

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• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Pressure Vessels And Lids Thereof (AREA)
• Sliding Valves (AREA)
• Magnetic Bearings And Hydrostatic Bearings (AREA)
• Indication Of The Valve Opening Or Closing Status (AREA)
• Magnetically Actuated Valves (AREA)

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• 2014
  • 2014-06-10 DE DE102014008170.2A patent/DE102014008170A1/de not_active Withdrawn
• 2015
  • 2015-06-10 KR KR1020167032242A patent/KR101908536B1/ko active IP Right Grant
  • 2015-06-10 CN CN201580030603.9A patent/CN106461120B/zh active Active
  • 2015-06-10 JP JP2016572449A patent/JP6431096B2/ja active Active
  • 2015-06-10 WO PCT/EP2015/062927 patent/WO2015189263A1/de active Application Filing

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