JP6431096B2 - 真空室用の閉鎖またはエアロック装置 - Google Patents

真空室用の閉鎖またはエアロック装置 Download PDF

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Publication number
JP6431096B2
JP6431096B2 JP2016572449A JP2016572449A JP6431096B2 JP 6431096 B2 JP6431096 B2 JP 6431096B2 JP 2016572449 A JP2016572449 A JP 2016572449A JP 2016572449 A JP2016572449 A JP 2016572449A JP 6431096 B2 JP6431096 B2 JP 6431096B2
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Japan
Prior art keywords
closure
counter plate
lid
distance
closing
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JP2016572449A
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English (en)
Japanese (ja)
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JP2017523354A (ja
Inventor
ウルリヒ・オルデンドルフ
クリストフ・クレーゼン
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2017523354A publication Critical patent/JP2017523354A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Sliding Valves (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Magnetically Actuated Valves (AREA)
JP2016572449A 2014-06-10 2015-06-10 真空室用の閉鎖またはエアロック装置 Active JP6431096B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014008170.2 2014-06-10
DE102014008170.2A DE102014008170A1 (de) 2014-06-10 2014-06-10 Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer
PCT/EP2015/062927 WO2015189263A1 (de) 2014-06-10 2015-06-10 Verschluss- oder schleusenvorrichtung für eine vakuumkammer

Publications (2)

Publication Number Publication Date
JP2017523354A JP2017523354A (ja) 2017-08-17
JP6431096B2 true JP6431096B2 (ja) 2018-11-28

Family

ID=53496636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016572449A Active JP6431096B2 (ja) 2014-06-10 2015-06-10 真空室用の閉鎖またはエアロック装置

Country Status (5)

Country Link
JP (1) JP6431096B2 (zh)
KR (1) KR101908536B1 (zh)
CN (1) CN106461120B (zh)
DE (1) DE102014008170A1 (zh)
WO (1) WO2015189263A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK179123B1 (en) * 2016-09-16 2017-11-13 Danfoss As Valve attachment, valve and method for controlling a valve
EP3372883B1 (de) 2017-03-09 2019-12-11 VAT Holding AG Vakuumventil mit optischem sensor
CN109072412A (zh) * 2017-03-17 2018-12-21 应用材料公司 用于基板的真空处理的设备、用于制造具有有机材料的装置的系统、用于使处理真空腔室和维护真空腔室相互密封的方法
KR102193613B1 (ko) * 2017-03-17 2020-12-21 어플라이드 머티어리얼스, 인코포레이티드 기판의 진공 프로세싱을 위한 장치, 유기 재료들을 갖는 디바이스들의 제조를 위한 시스템, 및 2개의 압력 구역들을 연결시키는 개구를 밀봉하기 위한 방법
KR102109335B1 (ko) * 2017-06-08 2020-05-12 어플라이드 머티어리얼스, 인코포레이티드 폐쇄 디바이스, 폐쇄 디바이스를 갖는 진공 시스템, 및 폐쇄 디바이스를 동작시키는 방법
EP3477173A1 (de) * 2017-10-30 2019-05-01 VAT Holding AG Erweiterte vakuumprozesssteuerung
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
DE102019134546A1 (de) * 2019-12-16 2021-06-17 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Vakuumanordnung
CN111188902B (zh) * 2020-01-15 2021-06-29 燕山大学 一种非螺栓预紧的自紧式人孔装置
JP7435096B2 (ja) * 2020-03-18 2024-02-21 株式会社島津製作所 圧力制御バルブ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2556225A (en) * 1946-03-21 1951-06-12 Joseph J Day Magnetic valve
JPS5281620A (en) * 1975-12-27 1977-07-08 Inoue Japax Res Inc Preparation of keeping vessels air tightly
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
JPH07190228A (ja) * 1993-12-27 1995-07-28 Ulvac Japan Ltd 無摺動ゲートバルブ
JP2000005060A (ja) * 1998-06-24 2000-01-11 Hisaka Works Ltd 蒸煮釜等に用いる蓋シール装置及びこの装置を備えた圧力又は真空容器
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
DE102004027752A1 (de) * 2004-06-08 2006-01-05 Leybold Optics Gmbh Schleusenvorrichtung
DE102007034927A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
DE202008005238U1 (de) * 2008-04-16 2008-07-31 Vat Holding Ag Vakuumventil-System mit Lageerkennung

Also Published As

Publication number Publication date
CN106461120B (zh) 2019-05-07
DE102014008170A1 (de) 2015-12-17
JP2017523354A (ja) 2017-08-17
KR101908536B1 (ko) 2018-10-16
WO2015189263A1 (de) 2015-12-17
CN106461120A (zh) 2017-02-22
KR20170002462A (ko) 2017-01-06

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