DE102014008170A1 - Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer - Google Patents
Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer Download PDFInfo
- Publication number
- DE102014008170A1 DE102014008170A1 DE102014008170.2A DE102014008170A DE102014008170A1 DE 102014008170 A1 DE102014008170 A1 DE 102014008170A1 DE 102014008170 A DE102014008170 A DE 102014008170A DE 102014008170 A1 DE102014008170 A1 DE 102014008170A1
- Authority
- DE
- Germany
- Prior art keywords
- closure
- counter
- plate
- cap
- closure lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- 125000006850 spacer group Chemical group 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 15
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- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 42
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- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Sliding Valves (AREA)
- Magnetically Actuated Valves (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014008170.2A DE102014008170A1 (de) | 2014-06-10 | 2014-06-10 | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
| CN201580030603.9A CN106461120B (zh) | 2014-06-10 | 2015-06-10 | 用于真空腔的封闭装置 |
| PCT/EP2015/062927 WO2015189263A1 (de) | 2014-06-10 | 2015-06-10 | Verschluss- oder schleusenvorrichtung für eine vakuumkammer |
| JP2016572449A JP6431096B2 (ja) | 2014-06-10 | 2015-06-10 | 真空室用の閉鎖またはエアロック装置 |
| KR1020167032242A KR101908536B1 (ko) | 2014-06-10 | 2015-06-10 | 진공 챔버용 폐쇄 또는 에어록 장치 및 이를 이용한 진공 챔버 개구부의 폐쇄 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014008170.2A DE102014008170A1 (de) | 2014-06-10 | 2014-06-10 | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102014008170A1 true DE102014008170A1 (de) | 2015-12-17 |
Family
ID=53496636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102014008170.2A Withdrawn DE102014008170A1 (de) | 2014-06-10 | 2014-06-10 | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6431096B2 (zh) |
| KR (1) | KR101908536B1 (zh) |
| CN (1) | CN106461120B (zh) |
| DE (1) | DE102014008170A1 (zh) |
| WO (1) | WO2015189263A1 (zh) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3372883A1 (de) * | 2017-03-09 | 2018-09-12 | VAT Holding AG | Vakuumventil mit optischem sensor |
| WO2018166618A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for the manufacture of devices having organic materials, and method for sealing a processing vacuum chamber and a maintenance vacuum chamber from each other |
| WO2018166620A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for the manufacture of devices having organic materials, and method for sealing an opening connecting two pressure regions |
| WO2018224150A1 (en) * | 2017-06-08 | 2018-12-13 | Applied Materials, Inc. | Closing device, vacuum system with closing device and method of operating a closing device |
| DE102019134546A1 (de) * | 2019-12-16 | 2021-06-17 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Steuervorrichtung und Vakuumanordnung |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK179123B1 (en) * | 2016-09-16 | 2017-11-13 | Danfoss As | Valve attachment, valve and method for controlling a valve |
| EP3477173A1 (de) | 2017-10-30 | 2019-05-01 | VAT Holding AG | Erweiterte vakuumprozesssteuerung |
| CN110242758B (zh) * | 2018-03-09 | 2021-02-26 | (株）Np控股 | 密封构件更换型闸阀系统、密封板及密封板用料盒 |
| CN111188902B (zh) * | 2020-01-15 | 2021-06-29 | 燕山大学 | 一种非螺栓预紧的自紧式人孔装置 |
| JP7435096B2 (ja) * | 2020-03-18 | 2024-02-21 | 株式会社島津製作所 | 圧力制御バルブ |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
| WO2005121621A1 (de) | 2004-06-08 | 2005-12-22 | Leybold Optics Gmbh | Schleusenvorrichtung |
| DE202008005238U1 (de) * | 2008-04-16 | 2008-07-31 | Vat Holding Ag | Vakuumventil-System mit Lageerkennung |
| DE102007034927A1 (de) * | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Verfahren zur Steuerung oder Regelung eines Vakuumventils |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2556225A (en) * | 1946-03-21 | 1951-06-12 | Joseph J Day | Magnetic valve |
| JPS5281620A (en) * | 1975-12-27 | 1977-07-08 | Inoue Japax Res Inc | Preparation of keeping vessels air tightly |
| US4747577A (en) * | 1986-07-23 | 1988-05-31 | The Boc Group, Inc. | Gate valve with magnetic closure for use with vacuum equipment |
| JPH07190228A (ja) * | 1993-12-27 | 1995-07-28 | Ulvac Japan Ltd | 無摺動ゲートバルブ |
| JP2000005060A (ja) * | 1998-06-24 | 2000-01-11 | Hisaka Works Ltd | 蒸煮釜等に用いる蓋シール装置及びこの装置を備えた圧力又は真空容器 |
-
2014
- 2014-06-10 DE DE102014008170.2A patent/DE102014008170A1/de not_active Withdrawn
-
2015
- 2015-06-10 WO PCT/EP2015/062927 patent/WO2015189263A1/de active Application Filing
- 2015-06-10 CN CN201580030603.9A patent/CN106461120B/zh active Active
- 2015-06-10 JP JP2016572449A patent/JP6431096B2/ja active Active
- 2015-06-10 KR KR1020167032242A patent/KR101908536B1/ko active IP Right Grant
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
| WO2005121621A1 (de) | 2004-06-08 | 2005-12-22 | Leybold Optics Gmbh | Schleusenvorrichtung |
| DE102007034927A1 (de) * | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Verfahren zur Steuerung oder Regelung eines Vakuumventils |
| DE202008005238U1 (de) * | 2008-04-16 | 2008-07-31 | Vat Holding Ag | Vakuumventil-System mit Lageerkennung |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3372883A1 (de) * | 2017-03-09 | 2018-09-12 | VAT Holding AG | Vakuumventil mit optischem sensor |
| US10520109B2 (en) | 2017-03-09 | 2019-12-31 | Vat Holding Ag | Vacuum valve with optical sensor |
| WO2018166618A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for the manufacture of devices having organic materials, and method for sealing a processing vacuum chamber and a maintenance vacuum chamber from each other |
| WO2018166620A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for the manufacture of devices having organic materials, and method for sealing an opening connecting two pressure regions |
| KR20180115213A (ko) * | 2017-03-17 | 2018-10-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판의 진공 프로세싱을 위한 장치, 유기 재료들을 갖는 디바이스들의 제조를 위한 시스템, 및 2개의 압력 구역들을 연결시키는 개구를 밀봉하기 위한 방법 |
| CN108966661A (zh) * | 2017-03-17 | 2018-12-07 | 应用材料公司 | 用于基板的真空处理的设备、用于具有有机材料的装置的制造的系统、和用以密封连接两个压力区域的开口的方法 |
| JP2019512040A (ja) * | 2017-03-17 | 2019-05-09 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 基板の真空処理のための装置、有機材料を有するデバイスの製造のためのシステム、及び２つの圧力領域を接続する開口部を密封するための方法 |
| KR102193613B1 (ko) * | 2017-03-17 | 2020-12-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판의 진공 프로세싱을 위한 장치, 유기 재료들을 갖는 디바이스들의 제조를 위한 시스템, 및 2개의 압력 구역들을 연결시키는 개구를 밀봉하기 위한 방법 |
| WO2018224150A1 (en) * | 2017-06-08 | 2018-12-13 | Applied Materials, Inc. | Closing device, vacuum system with closing device and method of operating a closing device |
| DE102019134546A1 (de) * | 2019-12-16 | 2021-06-17 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Steuervorrichtung und Vakuumanordnung |
| US11804385B2 (en) | 2019-12-16 | 2023-10-31 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and vacuum arrangement |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015189263A1 (de) | 2015-12-17 |
| CN106461120B (zh) | 2019-05-07 |
| KR20170002462A (ko) | 2017-01-06 |
| CN106461120A (zh) | 2017-02-22 |
| JP2017523354A (ja) | 2017-08-17 |
| KR101908536B1 (ko) | 2018-10-16 |
| JP6431096B2 (ja) | 2018-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R081 | Change of applicant/patentee |
Owner name: APPLIED MATERIALS, INC. (N.D.GES.D. STAATES DE, US Free format text: FORMER OWNER: MECATRONIX GMBH, 64291 DARMSTADT, DE |
|
| R082 | Change of representative |
Representative=s name: ZIMMERMANN & PARTNER PATENTANWAELTE MBB, DE Representative=s name: QUERMANN STURM WEILNAU PATENTANWAELTE PARTNERS, DE |
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| R081 | Change of applicant/patentee |
Owner name: APPLIED MATERIALS, INC. (N.D.GES.D. STAATES DE, US Free format text: FORMER OWNER: MECATRONIX AG, 64291 DARMSTADT, DE |
|
| R082 | Change of representative |
Representative=s name: ZIMMERMANN & PARTNER PATENTANWAELTE MBB, DE |
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| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |