WO2015174271A1 - プラズマ処理装置の上部電極構造、プラズマ処理装置、及びプラズマ処理装置の運用方法 - Google Patents
プラズマ処理装置の上部電極構造、プラズマ処理装置、及びプラズマ処理装置の運用方法 Download PDFInfo
- Publication number
- WO2015174271A1 WO2015174271A1 PCT/JP2015/062802 JP2015062802W WO2015174271A1 WO 2015174271 A1 WO2015174271 A1 WO 2015174271A1 JP 2015062802 W JP2015062802 W JP 2015062802W WO 2015174271 A1 WO2015174271 A1 WO 2015174271A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- region
- gas
- gas diffusion
- plate
- temperature
- Prior art date
Links
- 238000012545 processing Methods 0.000 title claims description 156
- 238000000034 method Methods 0.000 title claims description 23
- 238000009792 diffusion process Methods 0.000 claims abstract description 261
- 239000007789 gas Substances 0.000 claims description 641
- 230000003287 optical effect Effects 0.000 claims description 63
- 238000001179 sorption measurement Methods 0.000 claims description 37
- 238000001228 spectrum Methods 0.000 claims description 33
- 230000008021 deposition Effects 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 7
- 239000003507 refrigerant Substances 0.000 claims description 6
- 238000009826 distribution Methods 0.000 description 35
- 235000012431 wafers Nutrition 0.000 description 29
- 230000006870 function Effects 0.000 description 18
- 238000000151 deposition Methods 0.000 description 13
- 230000007423 decrease Effects 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 7
- 229910021418 black silicon Inorganic materials 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 238000009832 plasma treatment Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000008707 rearrangement Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
Definitions
- Embodiments of the present invention relate to an upper electrode structure of a plasma processing apparatus, a plasma processing apparatus, and an operation method of the plasma processing apparatus.
- a capacitively coupled plasma processing apparatus generally includes a processing container, a mounting table, and an upper electrode structure.
- the mounting table is provided in the processing container and supports an object to be processed mounted thereon.
- the mounting table includes a lower electrode.
- the upper electrode structure is provided above the mounting table.
- the upper electrode structure constitutes a shower head for supplying gas into the processing container.
- the upper electrode structure has an electrode plate in which a plurality of gas discharge ports are formed, that is, a first plate, and a backing plate that supports the electrode plate, that is, a second plate.
- the first plate is fixed to the second plate by a clamp that presses the peripheral edge of the first plate against the second plate.
- Patent Document 1 an upper electrode structure in which an electrostatic adsorption device is interposed between a first plate and a second plate has been proposed.
- the electrostatic adsorption device has a support surface made of a flexible material. By adsorbing the first plate to the support surface, uniform contact between the first plate and the electrostatic adsorption device is ensured.
- this upper electrode structure in order to connect the gas supply path formed in the backing plate and the plurality of gas discharge ports, a thin gas line continuous to the plurality of gas discharge ports is also formed in the electrostatic adsorption device. ing.
- the gas line formed in the electrostatic adsorption device reduces the conductance.
- uniform contact between the electrode plate and the electrostatic adsorption device can be ensured, but there is still room for improvement in the controllability of the temperature of the electrode plate.
- an upper electrode structure of a capacitively coupled plasma processing apparatus includes a first plate, a second plate, and an electrostatic attraction portion.
- the first plate includes a first region, a second region concentrically surrounding the first region, and A third region is concentrically surrounding the second region.
- a plurality of gas discharge ports are formed in each of the first region, the second region, and the third region.
- a flow path for refrigerant is formed in the second plate.
- the electrostatic adsorption unit is interposed between the first plate and the second plate, and adsorbs the first plate.
- the electrostatic adsorption unit includes a first heater provided between the second plate and the first region, a second heater provided between the second plate and the second region, And it has the 3rd heater provided between the 2nd plate and the 3rd field.
- the electrostatic attraction unit together with the second plate, supplies a gas to the first area, a second supply path to supply the gas to the second area, and a gas to the third area.
- a third supply path for supply is provided.
- the electrostatic adsorption unit includes a first gas diffusion chamber included in the first supply path, a second gas diffusion chamber included in the second supply path, and a third gas included in the third supply path. A gas diffusion chamber is formed.
- the upper electrode structure In the upper electrode structure according to the above-described one side surface, three heaters provided concentrically are provided in the electrostatic attraction portion located immediately above the first plate. Therefore, this upper electrode structure is excellent in temperature controllability in the radial direction of the first plate.
- plasma having a plasma density distribution that varies in a radial direction with respect to a central axis passing through the center of the first plate may be generated. Therefore, the amount of heat input from the plasma to the first plate has a distribution that varies in the radial direction. Further, due to such plasma density distribution, the amount of the first plate cut by the plasma processing also has a distribution that varies in the radial direction. That is, when the plasma treatment is performed, the first plate has a thickness distribution.
- Such a thickness distribution of the first plate facilitates a temperature distribution that varies in the first plate. According to the upper electrode structure according to one aspect, even if such factors, that is, the distribution of heat input due to the plasma density distribution and the thickness distribution of the first plate, occur in the radial direction in the first plate. It is possible to correct the fluctuating temperature distribution.
- the first gas diffusing unit, the second gas diffusing unit, and the third gas are disposed in the electrostatic attraction unit interposed between the first plate and the second plate. Since the diffusion part is provided, it is possible to suppress a decrease in conductance due to the provision of the electrostatic adsorption part.
- the electrostatic adsorption part has a ceramic main body part and an electrostatic adsorption electrode, and the surface of the ceramic main body part constitutes the adsorption surface of the first plate.
- the surface of the ceramic main body portion having a relatively high rigidity functions as an adsorption surface, but when the gas enters the gap between the first plate and the electrostatic adsorption portion, the gas is It facilitates heat transfer between the first plate and the electrostatic chuck.
- the first supply path includes a first gas line, a fourth gas diffusion chamber, a plurality of second gas lines, a fifth gas diffusion chamber, a plurality of third gas lines, and a first gas line. These gas diffusion chambers are connected in order.
- the plurality of second gas lines and the plurality of third gas lines are arranged circumferentially with respect to the central axis of the first region, and the first gas diffusion chamber, the fourth gas diffusion chamber, and The conductance is lower than the conductance of the fifth gas diffusion chamber.
- the second supply path includes a fourth gas line, a sixth gas diffusion chamber, a plurality of fifth gas lines, a seventh gas diffusion chamber, a plurality of sixth gas lines, and a second gas. The diffusion chambers are connected in order.
- the plurality of fifth gas lines and the plurality of sixth gas lines are arranged circumferentially with respect to the central axis, and the second gas diffusion chamber, the sixth gas diffusion chamber, and the seventh gas diffusion are arranged.
- the conductance is lower than the conductance of the chamber.
- the third supply path includes a seventh gas line, an eighth gas diffusion chamber, a plurality of eighth gas lines, a ninth gas diffusion chamber, a plurality of ninth gas lines, and a third gas.
- the diffusion chambers are connected in order.
- the plurality of eighth gas lines and the plurality of ninth gas lines are arranged in the circumferential direction with respect to the central axis, and the third gas diffusion chamber, the eighth gas diffusion chamber, and the ninth gas diffusion are arranged. It has a conductance that is lower than the conductance of the chamber.
- the combined conductance of the first supply path mainly depends on the conductances of the plurality of second gas lines and the plurality of third gas lines. Further, the conductances of the plurality of second gas lines and the plurality of third gas lines are combined from the connection position of the first gas line and the fourth gas diffusion chamber to the plurality of gas discharge ports in the first region. It contributes approximately equally to conductance. Therefore, according to this aspect, it is possible to reduce the difference in the combined conductance from the first gas line to the plurality of gas discharge ports in the first region. Similarly, regarding the second supply path, it is possible to reduce the difference in the combined conductance from the second gas line to each of the plurality of gas discharge ports in the second region.
- each of the first supply path, the second supply path, and the third supply path includes three gas diffusion chambers. Therefore, it is possible to reduce the difference in volume of these supply paths. As a result, it is possible to reduce the difference in time from when the gas is supplied to these supply paths to when the gas is discharged from the gas discharge port in the corresponding region.
- a capacitively coupled plasma processing apparatus is provided.
- the plasma processing apparatus is a processing container, a mounting table provided in the processing container, and includes the mounting table including a lower electrode, and the upper electrode structure of any one of the above-described one side face or form. ing.
- a plasma processing apparatus includes a first acquisition unit that irradiates light from a light source onto a first region of a first plate and acquires a wavelength spectrum of reflected light from the front surface and the back surface of the first region; Irradiating the second region of the first plate with the light from the light source, and acquiring the wavelength spectrum of the reflected light from the front and back surfaces of the second region, and the light from the light source
- a third acquisition unit that irradiates a third region of one plate and acquires a wavelength spectrum of reflected light from the front and back surfaces of the third region; a wavelength spectrum acquired by the first acquisition unit; 2 based on the wavelength spectrum, and on the basis of the wavelength spectrum by the third acquisition unit, the optical path length between the front and back surfaces of the first region, the optical path length between the front and back surfaces of the second region, And the optical path length between the front and back surfaces of the third region, respectively.
- Mel processor may comprise. According to this aspect, for example, it is possible to grasp the replacement time of the first plate by measuring the optical path length of each region.
- the plasma processing apparatus of this embodiment may be configured to output an alarm when the optical path length of each region reaches a predetermined optical path length.
- a plasma processing apparatus includes a first heater power source connected to a first heater, a second heater power source connected to a second heater, and a third heater connected to a third heater. You may further provide the control part which controls a power supply and a 1st heater power supply, a 2nd heater power supply, and a 3rd heater power supply.
- the processing unit is configured to calculate the temperature of the first area, the second area based on the optical path length of the first area, the optical path length of the second area, and the optical path length of the third optical path length. And the controller calculates the temperature calculation value of the first region, the temperature calculation value of the second region, and the temperature calculation value of the third region, respectively.
- the first heater power source, the second heater power source, and the third heater power source are controlled. According to this aspect, it is possible to correct the temperature of each region by controlling the heater power supply corresponding to each region based on the calculated temperature value of each region of the first plate.
- control unit includes a first heater power source, a second heater power source, and a temperature of the first region, a temperature of the second region, and a temperature of the third region substantially the same. And a third heater power supply is controlled. According to this embodiment, it is possible to correct the temperature distribution that can occur in the first plate.
- the control unit includes the first heater power supply, the second heater temperature, the second region temperature, and the third region temperature so that the temperature of the first region, the second region, and the third region is a predetermined temperature.
- the heater power source and the third heater power source are controlled.
- the state of plasma when processing each object to be processed may vary.
- the plasma state when processing a first object to be processed may be different from the plasma state when processing a subsequent object.
- Such a phenomenon is a phenomenon called “first wafer effect”. Due to this phenomenon, the temperature of the upper electrode structure when processing each object to be processed may vary.
- the temperature of the first region, the temperature of the second region, and the temperature of the third region during the plasma processing can be controlled to predetermined temperatures based on the calculated temperature value. Therefore, it is possible to reduce the difference in temperature of the upper electrode structure when processing each object to be processed.
- control unit includes a first gas discharged from the plurality of gas discharge ports in the first region, a second gas discharged from the plurality of gas discharge ports in the second region, and a third gas
- the temperature of the first region and the temperature of the second region according to the amount of the deposition gas with respect to the amount of the etching gas contained in each of the third gases discharged from the plurality of gas discharge ports in the region The first heater power source, the second heater power source, and the third heater power source are controlled so that the temperatures of the first region and the third region become higher.
- black silicon when a deposit derived from the deposition gas adheres to the surface of the first plate, a phenomenon that the deposit becomes a micromask and the surface of the first plate is scraped, so-called black silicon is generated. To do. The generation of black silicon becomes significant depending on the amount of the depositing gas in the gas, that is, the ratio of the depositing gas in the gas. On the other hand, the amount of deposits decreases as the temperature of the first plate increases. According to this embodiment, since the temperature of the region is increased according to the amount of the deposition gas in the gas ejected from the gas discharge port of each region, the generation of black silicon is suppressed in each region. Is possible.
- a method for operating the above-described plasma processing apparatus is provided.
- the first heater power source and the second heater are set so that the temperature of the first region, the temperature of the second region, and the temperature of the third region are substantially the same during plasma processing.
- the power source and the third heater power source are controlled.
- the first heater power supply, the second heater temperature, the second region temperature, and the third region temperature are substantially the same during plasma processing.
- the heater power supply and the third heater power supply are controlled.
- a first gas discharged from a plurality of gas discharge ports in a first region a second gas discharged from the plurality of gas discharge ports in a second region, and a first gas
- the temperature of the first region and the second region according to the amount of the deposition gas with respect to the amount of the etching gas contained in each of the third gases discharged from the plurality of gas discharge ports in the region 3
- the first heater power source, the second heater power source, and the third heater power source are controlled such that the temperature of the first region and the temperature of the third region become higher.
- the gas line can suppress a decrease in conductance even if the upper electrode structure is provided with the electrostatic adsorption portion.
- the controllability of the temperature of the first plate having the upper electrode structure can be improved.
- FIG. 4 is a cross-sectional view of the upper electrode structure taken along the line IV-IV in FIG. 2. It is a perspective view of the joined state of the 1st member and 2nd member of an upper electrode structure. It is a disassembled perspective view of the 1st member of an upper electrode structure, and a 2nd member.
- FIG. 3 is a cross-sectional view of the upper electrode structure taken along line VII-VII in FIG. 2.
- FIG. 3 is a cross-sectional view of the upper electrode structure taken along the line VIII-VIII in FIG. 2.
- FIG. 3 is a cross-sectional view of the upper electrode structure taken along the line IX-IX in FIG. 2. It is a flowchart for demonstrating calculation of an optical path length. It is a flowchart which shows an example of the operating method of the plasma processing apparatus which concerns on one Embodiment. 10 is a graph showing an experimental result of Experimental Example 2.
- FIG. 1 is a cross-sectional view schematically showing a plasma processing apparatus according to an embodiment.
- a plasma processing apparatus 10 shown in FIG. 1 is a capacitively coupled plasma processing apparatus.
- the plasma processing apparatus 10 includes a processing container 12.
- the processing container 12 is a substantially cylindrical container and defines a processing space PS therein.
- the processing space PS can be depressurized by the exhaust device VS.
- a mounting table 14 is provided in the processing space PS.
- the mounting table 14 includes a base 14a and an electrostatic chuck 14b.
- the base 14a is made of a conductive member such as aluminum and has a substantially disk shape.
- a focus ring FR is provided in the peripheral area on the upper surface of the base 14a so as to surround the edge of the object to be processed (hereinafter referred to as “wafer W”).
- an electrostatic chuck 14b is provided in the central region of the upper surface of the base 14a.
- the electrostatic chuck 14b has, for example, an electrode film provided as an inner layer of an insulating film, and has a substantially disk shape.
- the electrostatic chuck 14b attracts the wafer W by generating an electrostatic force by a DC voltage supplied to the electrode film from a DC power source through a switch.
- the upper surface of the electrostatic chuck 14b constitutes a placement area for placing the wafer W thereon.
- the wafer W is placed on the placement area of the electrostatic chuck 14b so that the center substantially coincides with the axis AX passing through the center of the placement area in the vertical direction.
- the base 14a constitutes a lower electrode.
- a high frequency power supply HFS that generates high frequency power for plasma generation is connected to the base 14a via a first matching unit MU1.
- the high frequency power supply HFS generates high frequency power having a frequency of 100 MHz, for example.
- the first matching unit MU1 has a circuit for matching the output impedance of the first matching unit MU1 with the input impedance on the load side (lower electrode side).
- the high frequency power supply HFS may be connected to the upper electrode structure US that constitutes the upper electrode.
- a high frequency power supply LFS that generates a high frequency bias power for ion attraction is connected to the base 14a via a second matching unit MU2.
- the high frequency power supply LFS generates high frequency power having a frequency of 3.2 MHz, for example.
- the second matching unit MU2 has a circuit for matching the output impedance of the second matching unit MU2 with the input impedance on the load side (lower electrode side).
- An upper electrode structure US is provided on the mounting table 14 so as to face the mounting table 14 through the processing space PS.
- the upper electrode structure US also functions as a shower head that introduces gas into the processing space PS.
- a gas is introduced from the upper electrode structure US and high frequency power is supplied to the base 14a, a high frequency electric field is formed between the upper electrode structure US and the base 14a, and the inside of the processing space PS. Plasma is generated.
- the DC power supply NP is connected to the upper electrode structure US.
- the DC power supply NP can apply a negative DC voltage to the upper electrode structure US, for example, a first plate 16 described later. Details of the upper electrode structure US will be described later.
- an electromagnet 30 is mounted on the upper electrode structure US.
- the electromagnet 30 includes a core member 32, a coil 34, and a coil 35.
- the core member 32 has a structure in which a base portion 40 and a plurality of cylindrical portions 41 to 43 are integrally formed, and is made of a magnetic material.
- the base portion 40 has a substantially annular plate shape, and is provided so that the central axis thereof substantially coincides with the axis AX.
- a plurality of cylindrical portions 41 to 43 extend downward from the lower surface of the base portion 40.
- Each of the cylindrical portions 41 to 43 has a cylindrical shape, and is provided so that the central axis thereof coincides with the axis AX.
- the cylindrical portion 42 is provided outside the cylindrical portion 41, and the cylindrical portion 43 is provided outside the cylindrical portion 42.
- the lower ends of the cylindrical portions 41 to 43 are located on the outer upper side of the edge of the wafer W.
- a groove is defined between the cylindrical portion 41 and the cylindrical portion 42.
- a coil 34 wound around the outer peripheral surface of the cylindrical portion 41 is accommodated.
- a groove is also defined between the cylindrical portion 42 and the cylindrical portion 43, and the coil 35 wound around the outer peripheral surface of the cylindrical portion 42 is accommodated in the groove.
- Current sources are connected to both ends of the coil 34 and both ends of the coil 35, respectively. When a current is applied to the coil 34 and / or the coil 35 from the current source, a magnetic field including a horizontal magnetic field component along the radial direction with respect to the axis AX is generated in a region below the electromagnet 30 in the processing space PS.
- the plasma density may increase in a region near the axis AX, and the plasma density distribution may decrease as the distance from the axis AX decreases.
- the magnetic field generated by the electromagnet 30 makes it possible to make such a plasma density distribution uniform. That is, when the magnetic field having the horizontal magnetic field component described above is formed by the electromagnet 30, the electrons receive the Lorentz force based on the horizontal magnetic field component. As a result, the electrons perform a drift motion in the circumferential direction with respect to the axis AX. As described above, since the lower ends of the cylindrical portions 41 to 43 are provided outside and above the edge of the wafer W, a magnetic field including a horizontal magnetic field component is generated outside and above the edge of the wafer W.
- the electrons make a drift motion in the circumferential direction above and outside the edge of the wafer W.
- the electrons that perform the drift motion in this way promote gas dissociation on the outer side and the upper side of the wafer W, and as a result, the plasma density on the outer side and the upper side of the wafer W is improved. Therefore, the electromagnet 30 makes the plasma density distribution in the radial direction uniform with respect to the axis AX.
- FIG. 2 is a cross-sectional view schematically showing an upper electrode structure according to an embodiment.
- the upper electrode structure US includes a first plate 16, a second plate 18, and an electrostatic adsorption unit 19.
- the first plate 16 has a substantially disk shape, and is provided so that the center thereof coincides with the axis AX.
- the first plate 16 faces the mounting table 14 through the processing space PS. That is, the lower surface of the first plate 16 is in contact with the processing space PS.
- the first plate 16 is made of, for example, silicon.
- the first plate 16 includes a first region R1, a second region R2, and a third region R3 provided concentrically.
- the first region R1 is a substantially circular region in plan view, and its center is located on the axis AX.
- the first region R1 is provided so as to face a region from the center of the wafer W to the middle between the center and the edge of the wafer W.
- a plurality of gas discharge ports 16i are formed in the first region R1. The plurality of gas discharge ports 16i are substantially evenly distributed in the first region R1.
- region R2 is an area
- the second region R2 faces the region from the middle to the edge of the wafer W.
- a plurality of gas discharge ports 16j are formed. The plurality of gas discharge ports 16j are substantially evenly distributed in the second region R2.
- the third region R3 is a region surrounding the second region R2, and is a region extending in a substantially annular shape.
- the third region R3 is provided so as to face a region outside the edge of the wafer W, for example, the focus ring FR.
- a plurality of gas discharge ports 16k are formed in the third region R3.
- the plurality of gas discharge ports 16k are substantially evenly distributed in the third region R3.
- a gas is individually supplied to each of the first region R1, the second region R2, and the third region R3.
- the second plate 18 and the electrostatic adsorption unit 19 use the first supply path for supplying gas to the first region R ⁇ b> 1 and the second for supplying gas to the second region R ⁇ b> 2.
- the second plate 18 has a substantially disk shape.
- the second plate 18 is made of, for example, aluminum and / or stainless steel.
- a flow path 18 f is formed in the second plate 18.
- the flow path 18f is formed over the entire region of the second plate 18, for example, in a spiral shape.
- Refrigerant is supplied to the flow path 18f from an external chiller unit.
- the refrigerant that has flowed through the flow path 18f is collected by the chiller unit.
- an electrostatic adsorption unit 19 is interposed between the second plate 18 and the first plate 16.
- the electrostatic attraction unit 19 is fixed to the lower surface of the second plate 18 via, for example, a clamp.
- the electrostatic adsorption unit 19 adsorbs the first plate 16 by electrostatic force.
- the electrostatic chuck 19 has a main body 19m and an electrode 19e.
- the main body 19m is made of ceramic and has a substantially disk shape.
- the main body 19m has a lower surface, that is, a surface 19s.
- the surface 19s is a part of the main body 19m, and is therefore made of ceramic, but constitutes a suction surface that sucks the first plate 16.
- the electrode 19e is provided as an inner layer of the main-body part 19m.
- the electrode 19e is a substantially circular thin film in plan view.
- a DC power source DCS is connected to the electrode 19e via a switch SW1. When a direct current voltage from the direct current power source DCS is applied to the electrode 19e, an electrostatic force such as a Coulomb force is generated, and the first plate 16 is attracted to the surface 19s of the electrostatic attraction unit 19 by the electrostatic force.
- the adsorption force of the electrostatic adsorption unit 19, that is, the surface pressure when adsorbing the first plate 16 is, for example, 3.25 ⁇ 10 4 Pa when a voltage of 3 KV is applied to the electrode 19 e.
- the surface pressure is 2.76 ⁇ 10 4 Pa when the clamping fastening torque is 2.0 N ⁇ m. It becomes. Therefore, the electrostatic adsorption unit 19 can hold the first plate 16 with a high surface pressure.
- the electrostatic chucking portion 19 unlike the clamp at the peripheral portion, even when heat is applied to the first plate 16, the state where the substantially entire surface of the first plate 16 is in contact with the surface 19s is maintained. It is possible to realize substantially uniform heat conduction over the entire surface of the first plate 16.
- the main body 19m of the electrostatic chuck 19 includes a gas diffusion chamber D13 (first gas diffusion chamber), a gas diffusion chamber D23 (second gas diffusion chamber), and a gas diffusion chamber D33 (third gas diffusion chamber). Chamber) is formed.
- the gas diffusion chamber D13, the gas diffusion chamber D23, and the gas diffusion chamber D33 constitute a part of the first supply path, a part of the second supply path, and a part of the third supply path, respectively.
- the gas diffusion chamber D13, the gas diffusion chamber D23, and the gas diffusion chamber D33 are provided above the first region R1, the second region R2, and the third region R3, respectively.
- the gas diffusion space D13 is a space having a substantially circular planar shape corresponding to the first region R1.
- the gas diffusion space D23 is a space extending in an annular shape so as to surround the gas diffusion space D13.
- the gas diffusion space D33 is a space that extends in an annular shape so as to surround the gas diffusion space D23.
- the gas diffusion space D13 communicates with the gas discharge port 16i in the first region R1, and has a conductance larger than that of the gas line of the first supply path in the electrostatic adsorption unit 19.
- the gas diffusion space D23 communicates with the gas discharge port 16j in the second region R2, and has a conductance larger than that of the gas line of the second supply path in the electrostatic attraction unit 19.
- the gas diffusion space D33 communicates with the gas discharge port 16j in the third region R3, and has a conductance larger than that of the gas line of the third supply path in the electrostatic attraction unit 19.
- the electrostatic adsorption portion 19 is interposed between the first plate 16 and the second plate 18, the gas diffusion chamber D13, Since the gas diffusion chamber D23 and the gas diffusion chamber D33 are provided, it is possible to suppress a decrease in conductance of the first supply path, the second supply path, and the third supply path in the electrostatic adsorption unit 19. Is possible.
- the main body 19m of the electrostatic chuck 19 is made of ceramic, it has excellent resistance to corrosive gas for processing the wafer W. Since part of the supply path such as the gas diffusion chamber D13, the gas diffusion chamber D23, and the gas diffusion chamber D33 is formed in the main body 19m, it is possible to suppress the generation of particles. Further, since the gas diffusion chamber D13, the gas diffusion chamber D23, and the gas diffusion chamber D33 are formed in the ceramic main body 19m, concentration of the electric field in these gas diffusion chambers can be suppressed. Therefore, abnormal discharge in the gas diffusion chamber D13, the gas diffusion chamber D23, and the gas diffusion chamber D33 can be suppressed.
- a first heater HT1, a second heater HT2, and a third heater HT3 are provided in the electrostatic attraction unit 19.
- the first heater HT1 is provided above the first region R1.
- the second heater HT2 is provided above the second region R2, and extends in an annular shape so as to surround the first heater HT1.
- the third heater HT3 is provided above the third region R3 and extends in an annular shape so as to surround the second heater HT2.
- the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 are connected to the first heater HT1, the second heater HT2, and the third heater HT3, respectively.
- the plasma generated in the plasma processing apparatus generally has a plasma density distribution that varies in the radial direction with respect to the axis AX. Therefore, the amount of heat input from the plasma to the first plate 16 has a distribution that varies in the radial direction.
- the amount by which the first plate 16 is scraped by the plasma processing also has a distribution that varies in the radial direction. That is, when the plasma treatment is performed, the first plate 16 has a thickness distribution. The thickness distribution of the first plate 16 facilitates a temperature distribution that varies in the first plate 16.
- the first heater HT1, the second heater HT2, and the third heater HT3 can correct the temperature distribution that varies in the radial direction in the first plate 16.
- FIG. 3 is a diagram illustrating a gas supply system according to an embodiment.
- the gas supply system GP includes gas sources GS11 to GS1M, valves V11 to V1M, flow controllers F11 to F1M such as a mass flow controller, flow splitter FS, gas sources GS21 to GS2N, valves V21 to V2N, mass flow. It has flow controllers F21 to F2N such as a controller and a valve V3.
- the gas sources GS11 to GS1M are gas sources common to the first supply path, the second supply path, and the third supply path.
- the gas sources GS11 to GS1M are connected to the flow splitter FS via valves V11 to V1M and flow rate controllers F11 to F1M, respectively.
- the flow splitter FS distributes the mixed gas from the gas sources GS11 to GS1M to the gas introduction pipe IP1, the gas introduction pipe IP2, and the gas introduction pipe IP3 at a set distribution ratio.
- the gas sources GS21 to GS2N are sources of additive gas, and are connected to the valve V3 via the valves V21 to V2N and the flow controllers F21 to F2N, respectively.
- the valve V3 is connected to the gas introduction pipe IP3.
- the mixed gas of the gas sources GS21 to GS2N may be supplied to the gas introduction pipe IP1 and the gas introduction pipe IP2 in addition to the gas introduction pipe IP3.
- the first supply path supplies the gas input from the gas supply system GP through the gas introduction pipe IP1 to the first region R1, that is, the plurality of gas discharge ports 16i.
- the gas introduction pipe IP1 is connected to the first supply path at a position away from the axis AX.
- the second supply path supplies the gas input from the gas supply system GP via the gas introduction pipe IP2 to the second region R2, that is, the plurality of gas discharge ports 16j.
- the gas introduction pipe IP2 is connected to the second supply path at a position away from the axis AX.
- the third supply path supplies gas input from the gas supply system GP via the gas introduction pipe IP3 to the third region R3, that is, the plurality of gas discharge ports 16k.
- the gas introduction pipe IP3 is connected to the third supply path at a position substantially coinciding with the axis AX.
- FIGS. 4 to 9 together with FIGS. 4 is a cross-sectional view of the upper electrode structure taken along the line IV-IV in FIG.
- FIG. 4 shows a state in which a cross section along the same plane as the upper surface of the second member 22 described later is viewed from above.
- FIG. 5 is a perspective view of a joined state of the first member and the second member of the upper electrode structure
- FIG. 6 is an exploded perspective view of the first member and the second member of the upper electrode structure.
- FIG. 7 is a cross-sectional view of the upper electrode structure taken along the line VII-VII in FIG. FIG.
- FIG. 7 shows a state in which a cross section crossing the middle of the gas diffusion chamber D11, the gas diffusion chamber D21, and the gas diffusion chamber D31 in the height direction (that is, the axis AX direction) is viewed from above.
- FIG. 8 is a cross-sectional view of the upper electrode structure taken along the line VIII-VIII in FIG.
- FIG. 8 shows a state in which a cross section crossing the middle in the height direction of the gas diffusion chamber D12, the gas diffusion chamber D22, and the gas diffusion chamber D32 is viewed from above.
- FIG. 9 is a cross-sectional view of the upper electrode structure taken along the line IX-IX in FIG. FIG.
- FIGS. 1 and 2 corresponds to the vertical cross section taken along the line II-II in FIGS. 4 and 7 to 9.
- the second plate 18 and the electrostatic attraction unit 19 of the upper electrode structure US are the gas line L11 (the first line) as the constituent elements of the first supply path.
- Gas diffusion chamber D11 fourth gas diffusion chamber
- a plurality of gas lines L12 second gas line
- a gas diffusion chamber D12 fifth gas diffusion chamber
- a plurality of gas lines L13 A third gas line
- a gas diffusion space D13 first gas diffusion space
- the second plate 18 and the electrostatic adsorption unit 19 of the upper electrode structure US include, as constituent elements of the second supply path, a gas line L21 (fourth gas line) and a gas diffusion chamber D21 (sixth gas).
- the second plate 18 and the electrostatic adsorption unit 19 of the upper electrode structure US include, as constituent elements of the third supply path, a gas line L31 (seventh gas line) and a gas diffusion chamber D31 (eighth gas).
- Diffusion chamber Diffusion chamber
- a plurality of gas lines L32 (eighth gas line)
- a gas diffusion chamber D32 (9th gas diffusion chamber)
- a plurality of gas lines L33 (9th gas line)
- a gas diffusion chamber D33 (first) 3 gas diffusion chambers).
- the first supply path is configured by connecting a gas line L11, a gas diffusion chamber D11, a plurality of gas lines L12, a gas diffusion chamber D12, a plurality of gas lines L13, and a gas diffusion chamber D13 in order from the upstream. ing.
- the gas line L11, the gas diffusion space D11, the plurality of gas lines L12, and the gas diffusion space D12 are formed in the second plate 18. Further, the plurality of gas lines L13 are formed across the second plate 18 and the electrostatic attraction unit 19. Further, the gas diffusion space D13 is formed in the electrostatic attraction unit 19.
- the gas line L11 is connected to the gas introduction pipe IP1 at a position away from the axis AX.
- the gas line L11 is connected to the gas diffusion space D11.
- the gas diffusion space D ⁇ b> 11 is a substantially circular space in plan view, and is provided so that the center thereof coincides with the axis AX.
- a gas diffusion chamber D12 is provided downstream of the gas diffusion chamber D11 and upstream of the gas diffusion chamber D13. That is, the gas diffusion chamber D12 is provided below the gas diffusion chamber D11, and the gas diffusion chamber D13 is provided below the gas diffusion chamber D12.
- the gas diffusion space D13 is provided immediately above the first region R1 described above, and is connected to the gas discharge port 16i.
- the gas diffusion space D ⁇ b> 12 and the gas diffusion space D ⁇ b> 13 are both substantially circular spaces in plan view, and their centers are provided so as to coincide with the axis AX. Yes.
- a plurality of gas lines L12 are interposed between the gas diffusion space D11 and the gas diffusion space D12.
- the plurality of gas lines L12 extend substantially parallel to the axis AX, and are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- one of the gas lines L12 extends on the axis AX.
- One end of these gas lines L12 is connected to the gas diffusion space D11, and the other end of the gas line L12 is connected to the gas diffusion space D12.
- These gas lines L12 have conductances lower than the conductances of the gas diffusion space D11 and the gas diffusion space D12.
- a plurality of gas lines L13 are interposed between the gas diffusion space D12 and the gas diffusion space D13.
- the plurality of gas lines L13 extend substantially parallel to the axis AX, and are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- one of the gas lines L13 extends on the axis AX.
- the other gas lines L13 are arranged at equal intervals in the circumferential direction along two circles centered on the axis AX.
- One end of these gas lines L13 is connected to the gas diffusion space D12, and the other end of the gas line L13 is connected to the gas diffusion space D13.
- These gas lines L13 have conductances lower than the conductances of the gas diffusion space D12 and the gas diffusion space D13.
- the second gas supply path is configured by connecting a gas line L21, a gas diffusion chamber D21, a plurality of gas lines L22, a gas diffusion chamber D22, a plurality of gas lines L23, and a gas diffusion chamber D23 in order from the upstream.
- the gas line L21, the gas diffusion space D21, the plurality of gas lines L22, and the gas diffusion space D22 are formed in the second plate 18.
- the plurality of gas lines L ⁇ b> 23 are formed across the second plate 18 and the electrostatic adsorption unit 19.
- the gas diffusion space D23 is formed in the electrostatic attraction unit 19.
- the gas line L21 is connected to the gas introduction pipe IP2 at a position away from the axis AX.
- the gas line L21 is connected to the gas diffusion space D21.
- the gas diffusion space D ⁇ b> 21 is a space that extends in a substantially annular shape about the axis AX.
- the gas diffusion chamber D21 extends in the circumferential direction outside the gas diffusion chamber D11 with respect to the axis AX.
- a gas diffusion chamber D22 is provided downstream of the gas diffusion chamber D21 and upstream of the gas diffusion chamber D23.
- the gas diffusion space D22 is a space extending in a substantially annular shape about the axis AX.
- the gas diffusion space D22 extends in the circumferential direction obliquely outward and downward with respect to the gas diffusion space D21.
- the gas diffusion space D22 is provided outside the gas diffusion space D12 so as to surround the gas diffusion space D12. Further, the gas diffusion space D22 extends farther from the axis AX than the gas diffusion space D21.
- the gas diffusion space D23 is provided immediately above the second region R2 and is connected to the gas discharge port 16j.
- the gas diffusion space D23 is a space extending in a substantially annular shape about the axis AX, and extends in the circumferential direction with respect to the axis AX below the gas diffusion space D22.
- the gas diffusion space D23 extends so as to surround the gas diffusion space D13.
- a plurality of gas lines L22 are interposed between the gas diffusion space D21 and the gas diffusion space D22.
- the plurality of gas lines L ⁇ b> 22 extend so as to be inclined away from the axis AX toward the lower side, and are arranged in the circumferential direction with respect to the axis AX.
- the plurality of gas lines L22 are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- One end of these gas lines L22 is connected to the gas diffusion space D21, and the other end of the gas line L22 is connected to the gas diffusion space D22.
- These gas lines L22 have conductances lower than the conductances of the gas diffusion space D21 and the gas diffusion space D22.
- a plurality of gas lines L23 are interposed between the gas diffusion space D22 and the gas diffusion space D23.
- the plurality of gas lines L23 extend substantially parallel to the axis AX, and are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- One end of these gas lines L23 is connected to the gas diffusion space D22, and the other end of the gas line L23 is connected to the gas diffusion space D23.
- These gas lines L23 have conductances lower than the conductances of the gas diffusion space D22 and the gas diffusion space D23.
- the third supply path is configured by connecting a gas line L31, a gas diffusion chamber D31, a plurality of gas lines L32, a gas diffusion chamber D32, a plurality of gas lines L33, and a gas diffusion chamber D33 in order from the upstream. ing.
- the gas line L31, the gas diffusion chamber D31, the plurality of gas lines L32, and the gas diffusion chamber D32 are formed in the second plate 18. Further, the plurality of gas lines L33 are formed across the second plate 18 and the electrostatic attraction unit 19. Further, the gas diffusion space D33 is formed in the electrostatic attraction unit 19.
- the gas line L31 includes a first flow path FL1 and a plurality of second flow paths FL2.
- gas line L31 contains gas branching part FLB and a plurality of penetration holes FLH.
- the first flow path FL1 extends on the axis AX. One end of the first flow path FL1 is connected to the gas introduction pipe IP3, and the other end of the first flow path FL1 is connected to the gas branch portion FLB.
- the gas branch portion FLB is a substantially circular space in plan view, and the plurality of second flow paths FL2 branch from the first flow path FL1 in the gas branch section FLB.
- the plurality of second flow paths FL2 are connected to the first flow path FL1 via the gas branch portion FLB at one end on the axis AX side.
- the plurality of second flow paths FL2 extend in the radial direction with respect to the axis AX, and are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- a plurality of through holes FLH extending substantially parallel to the axis AX are connected to the other ends of the plurality of second flow paths FL2, respectively. These through holes FLH are connected to a gas diffusion space D31 provided below the through holes FLH.
- the gas diffusion space D31 is a space extending in a substantially annular shape about the axis AX.
- the gas diffusion chamber D31 extends in the circumferential direction outside the gas diffusion chamber D21 with respect to the axis AX.
- a gas diffusion chamber D32 is provided downstream of the gas diffusion chamber D31 and upstream of the gas diffusion chamber D33.
- the gas diffusion space D32 is a space extending in a substantially annular shape about the axis AX, and extends in the circumferential direction obliquely outward and downward with respect to the gas diffusion space D31. .
- the gas diffusion space D32 is provided outside the gas diffusion space D22 so as to surround the gas diffusion space D22. Further, the gas diffusion space D32 extends farther from the axis AX than the gas diffusion space D31.
- the gas diffusion space D33 is provided immediately above the third region R3 and connected to the gas discharge port 16k.
- the gas diffusion space D33 is a space extending in a substantially annular shape about the axis AX, and extends in the circumferential direction so as to surround the gas diffusion space D23.
- a plurality of gas lines L32 are interposed between the gas diffusion space D31 and the gas diffusion space D32.
- the plurality of gas lines L32 extend so as to be separated from the axis AX as going downward, and are arranged at equal intervals in the circumferential direction with respect to the axis AX. ing.
- One end of these gas lines L32 is connected to the gas diffusion space D31, and the other end of the gas line L32 is connected to the gas diffusion space D32.
- These gas lines L32 have conductances lower than the conductances of the gas diffusion space D31 and the gas diffusion space D32.
- a plurality of gas lines L33 are interposed between the gas diffusion space D32 and the gas diffusion space D33.
- the plurality of gas lines L33 extend substantially parallel to the axis AX, and are arranged at equal intervals in the circumferential direction with respect to the axis AX.
- One end of these gas lines L33 is connected to the gas diffusion space D32, and the other end of the gas line L33 is connected to the gas diffusion space D33.
- These gas lines L33 have conductances lower than the conductances of the gas diffusion space D32 and the gas diffusion space D33.
- the second plate 18 may be composed of a plurality of members. Specifically, the second plate 18 includes a first member 20 and a second member 22 constituting an upper member, a middle member 24, and a lower member 26, and these upper member and middle member 24 are included. , And the lower member 26 is laminated.
- Both the first member 20 and the second member 22 are made of stainless steel, and the upper surface of the first member 20 and the lower surface of the second member 22 are integrated by diffusion bonding, Thereby, the upper stage member is comprised.
- the second member 22 has a substantially disk shape, and on the upper surface thereof, a concave portion 22a serving as a gas branching portion FLB and a second flow path FL2 are formed.
- a plurality of grooves 22b are formed.
- the plurality of grooves 22b are connected to the recess 22a at one end and extend in the radial direction with respect to the axis AX.
- the second member 22 has a plurality of through holes FLH, and each of the plurality of through holes FLH is connected to the other end of the plurality of grooves 22b.
- the first member 20 includes a substantially disc-shaped central portion 20a and a plurality of protruding portions 20b extending radially from the central portion 20a.
- a first flow path FL1 is formed in the central portion 20a.
- the first flow path FL1 is connected to the recess 22a, that is, the gas branch portion FLB.
- the first member 20 and the second member 22 are formed with a gas line L11 and a gas line L22 that penetrate the first member 20 and the second member 22 in the axis AX direction.
- the central portion 20a and the plurality of protrusions 20b of the first member 20 close the upper openings of the recesses 22a and the plurality of grooves 22b when the first member 20 and the second member 22 are joined to each other. It has become. Thereby, the gas branch part FLB and the plurality of second flow paths FL2 are defined. As described above, the first member 20 and the second member 22 are bonded to each other by diffusion bonding, thereby defining the gas line L11, the gas line L21, and the gas line L31 without using a sealing member. can do. As a result, the thickness of the composite for defining these gas lines can be reduced.
- a recess 22c, a groove 22d, and a groove 22e are formed on the lower surface of the second member 22.
- the recess 22c is a substantially circular space in plan view.
- the recess 22c constitutes the upper portion of the gas diffusion chamber D11.
- the groove 22d extends in the circumferential direction with respect to the axis AX, and is provided between the recess 22c and the groove 22e.
- the annular groove 22e extends in the circumferential direction outside the groove 22d.
- the annular groove 22d and the annular groove 22e constitute a gas diffusion chamber D21 and a gas diffusion chamber D31 when an upper member composed of the first member 20 and the second member 22 is mounted on the middle member 24, respectively. To do.
- the middle member 24 has a substantially disk shape and is made of a metal such as aluminum.
- a recess 24 a is formed on the upper surface of the middle stage member 24.
- the recess 24a is a substantially circular space in plan view, and is provided in a region that intersects the axis AX.
- the recess 24a is continuous with the recess 22c and constitutes the lower portion of the gas diffusion chamber D11. That is, the recess 24a functions as an expansion region that expands the gas diffusion space D11.
- a gas line L12, a gas line L22, and a gas line L32 penetrating the middle stage member 24 are formed.
- a recess 24 b is formed on the lower surface of the middle stage member 24.
- the recess 24b is a substantially circular space in plan view, and is provided in a region that intersects the axis AX.
- the recess 24b constitutes an upper portion of the gas diffusion space D12. That is, the recess 24b functions as an expansion region that expands the gas diffusion chamber D12.
- the lower member 26 is a substantially disk-shaped member, and is made of, for example, aluminum. On the upper surface of the lower member 26, a recess 26a, a groove 26b, and a recess 26c are formed.
- the recess 26a is a substantially circular space in plan view, and is provided in a region that intersects the axis AX. When the middle member 24 is mounted on the lower member 26, the recess 26a is continuous with the recess 24b of the middle member 24 and constitutes the lower portion of the gas diffusion chamber D12.
- the groove 26b extends in the circumferential direction with respect to the axis AX, and is provided between the recess 26a and the recess 26c.
- the recess 26c extends in the circumferential direction outside the groove 26b.
- the groove 26b and the recess 26c constitute a gas diffusion chamber D22 and a gas diffusion chamber D32 when the middle member 24 is mounted on the lower member 26, respectively.
- the lower member 26 partially includes a through hole that partially configures the gas line L ⁇ b> 13, a through hole that partially configures the gas line L ⁇ b> 23, and a gas line L ⁇ b> 33.
- a through hole is formed.
- a plurality of gas lines L12 having a low conductance and arranged in the circumferential direction are interposed between the gas diffusion chamber D11 and the gas diffusion chamber D12.
- a plurality of gas lines L13 having low conductance and arranged in the circumferential direction are interposed between the gas diffusion chamber D12 and the gas diffusion chamber D13.
- a plurality of gas lines L22 having a low conductance and arranged in the circumferential direction are interposed between the gas diffusion chamber D21 and the gas diffusion chamber D22, and the gas diffusion chamber D22.
- a plurality of gas lines L23 having a low conductance and arranged in the circumferential direction are interposed between the gas diffusion chamber D23 and the gas diffusion chamber D23.
- a plurality of gas lines L32 having a low conductance and arranged in the circumferential direction are interposed between the gas diffusion space D31 and the gas diffusion space D32, and the gas diffusion space D32.
- a plurality of gas lines L33 having low conductance and arranged in the circumferential direction are interposed between the gas diffusion chamber D33 and the gas diffusion chamber D33.
- the conductance of the gas line L12 and the conductance of the gas line L13 contribute substantially equally to the combined conductance from the gas line L11 to each of the plurality of gas discharge ports 16i in the first region R1. Therefore, the difference in the combined conductance from the connection position of the gas line L11 to the gas diffusion space D11 to each of the plurality of gas discharge ports 16i in the first region R1 is reduced, and as a result, the plurality of gas discharges in the first region R1. The difference in the gas flow rate from the outlet 16i is reduced. Similarly, the difference in gas flow rate from the plurality of gas discharge ports 16j in the second region R2 is reduced, and the difference in gas flow rate from the plurality of gas discharge ports 16k in the third region R3 is reduced.
- each of the first supply path, the second supply path, and the third supply path includes three gas diffusion chambers, the volume of the first supply path and the volume of the second supply path , And the volume of the third supply path can be made closer to each other.
- the time from when the gas is input to the gas supply path until the gas is injected from the gas discharge port depends on the volume of the gas supply path. Therefore, according to this upper electrode structure US, it is possible to reduce the difference in time from when a gas is input to each gas supply path until the gas is injected from the corresponding gas discharge port.
- the plasma processing apparatus 10 further includes a first acquisition unit OS1, a second acquisition unit OS2, a third acquisition unit OS3, and a processing unit PU.
- the first acquisition unit OS1 irradiates the first region R1 of the first plate 16 with light and receives reflected light from the front surface and the back surface of the first region R1.
- the second acquisition unit OS2 irradiates the second region R2 of the first plate 16 with light, and receives reflected light from the front surface and the back surface of the second region R2.
- the third acquisition unit OS3 irradiates the third region R3 of the first plate 16 with light, and receives reflected light from the front surface and the back surface of the third region R3.
- the first acquisition unit OS1 acquires the wavelength spectrum of the received reflected light
- the second acquisition unit OS2 acquires the wavelength spectrum of the received reflected light
- the third acquisition unit OS3 receives the light spectrum. The wavelength spectrum of the reflected light is obtained.
- the processing unit PU obtains the optical path length between the front surface (upper surface in FIG. 1) and the rear surface (lower surface in FIG. 1) of the first region R1 based on the wavelength spectrum acquired by the first acquisition unit OS1.
- the optical path length between the front surface and the back surface of the second region R2 is obtained based on the wavelength spectrum acquired by the second acquisition unit OS2, and the third region R3 based on the wavelength spectrum acquired by the third acquisition unit OS3.
- the optical path length between the front surface and the back surface is obtained.
- the first acquisition unit OS1, the second acquisition unit OS2, and the third acquisition unit OS3 have substantially the same configuration.
- the acquisition unit OS1, the second acquisition unit OS2, and the third acquisition unit OS3 are collectively referred to as “acquisition unit OS”, and the acquisition unit OS will be described.
- acquisition unit OS the acquisition unit OS will be described.
- the first region R1, the second region R2, and the third region R3 are not distinguished and are referred to as the first plate 16.
- the acquisition unit OS includes a light source 82, a circulator 84, an optical fiber 86, an optical element 88, and a spectrometer 90.
- the light source 82 emits light.
- the light emitted from the light source 82 is light that irradiates the first plate 16 and is light that passes through the first plate 16.
- the light emitted from the light source 82 is, for example, infrared light and light in the wavelength band of 1510 nm to 1590 nm.
- the light emitted from the light source 82 is guided to the optical element 88 through the circulator 84 and the optical fiber 86.
- the optical element 88 is a collimator or a condensing optical element.
- the optical element 88 is provided so as to face the surface (the upper surface in FIG. 1) of the first plate 16.
- the optical element 88 converts light from the light source 82 into parallel light or condenses it. .
- the optical element 88 outputs the light received from the light source 82 toward the first plate 16.
- the optical fiber 86 and the optical element 88 may be provided inside a tube that penetrates the second plate 18 and the electrostatic adsorption unit 19.
- the optical fiber 86 and the optical element 88 are disposed in the through holes formed in the second plate 18 and the electrostatic chuck 19 so as to avoid the gas lines of the second plate 18 and the electrostatic chuck 19. It may be provided. In this case, the through hole may pass through the beam provided in the gas diffusion chamber.
- the light output from the optical element 88 is reflected on the front surface (upper surface in FIG. 1) and the rear surface (lower surface in FIG. 1) of the first plate 16.
- a plurality of reflected light beams caused by the reflection on the front surface and the back surface are guided to the spectroscope 90 through the optical element 88, the optical fiber 86, and the circulator 84.
- the spectroscope 90 outputs a plurality of received reflected light beams, that is, wavelength spectra of the reflected light.
- the plurality of reflected light beams interfere with each other and strengthen each other according to the wavelength, or weaken each other. Therefore, the wavelength spectrum that is the output from the spectroscope 90 has a signal intensity that can vary depending on the wavelength.
- the spectroscope 90 may be a general spectroscope. However, as described in JP 2013-96858 A, a tunable filter, a light receiving element, an A / D converter, and a wavelength are used. The spectroscope which has a control part may be sufficient.
- the wavelength spectrum acquired by the spectroscope 90 is output to the processing unit PU.
- the processing unit PU calculates the optical path length of the first plate 16 based on the peak wavelength or valley wavelength of the wavelength spectrum obtained by processing the first wavelength spectrum.
- FIG. 10 is a flowchart for explaining the calculation of the optical path length.
- the processing unit PU obtains the optical path length nd between the front surface and the back surface of the first plate 16 by the processing shown in FIG.
- n is the refractive index of the first plate 16
- d is the plate thickness (the distance between the front surface and the back surface of the first plate 16.
- the calculation of the optical path length by the processing unit PU starts from a wavelength spectrum input process (step S10), that is, the wavelength spectrum from the acquisition unit OS is input to the processing unit PU.
- the processing unit PU adjusts the waveform of the received wavelength spectrum. That is, the processing unit PU applies the window function to the wavelength spectrum.
- This window function is a wavelength-dependent window function.
- the window function may be a bell-shaped function that maximizes the center wavelength determined by the wavelength sweep range and gradually attenuates as the difference from the center wavelength increases. .
- the center wavelength for example, the median value of the wavelength sweep range is adopted.
- the window function a Gaussian function, a Lorentz function, a composite function of a Gaussian function and a Lorentz function, or the like can be used.
- step S12 the processing unit PU converts the coordinate axis of the spectrum obtained by the processing in step S11 from the wavelength ⁇ to the spatial frequency (1 / ⁇ ).
- the processing unit PU executes first data interpolation (first linear interpolation). That is, the processing unit PU performs data interpolation on the spectrum obtained by the processing in step S12.
- the sampling number is Ns
- the spatial frequency array is (x 0 , x 1 , x 2 ,..., X N ⁇ 1 )
- the intensity array is (y 0 , y 1 , y 2 ,..., y N-1 ).
- the processing unit PU rearranges the spatial frequency array at equal intervals. For example, when the spatial frequency included in the rearranged spatial frequency array is X i , the processing unit PU performs rearrangement using the following equation (1).
- the processing unit PU calculates the intensity at the spatial frequency X i after the rearrangement by linear interpolation.
- the intensity Y i is calculated by the following equation (2).
- j is the largest integer that satisfies X i > x j .
- step S16 the processing unit PU applies Fourier transform (FFT processing) to the spectrum interpolated in the processing in step S14.
- FFT processing Fourier transform
- the processing unit PU performs second data interpolation (second linear interpolation). That is, the processing unit PU interpolates the 2nd peak data obtained by the process of step S20.
- Processing unit PU is linear interpolation at regular intervals for example between data points in the interpolation number N A.
- Interpolation number N A is set in advance based on, for example, the required precision. For example, the interpolation number N A can be set based on the measurement accuracy of the later-described temperature. For example, when the first plate 16 is made of silicon, the peak interval ⁇ 2nd after FFT is 0.4 ⁇ m / ° C.
- the 1 °C accuracy if necessary, the data interval is set interpolation number N A so that the 0.4 .mu.m.
- the noise level may be to determine the interpolation number N A contemplated that the system has.
- data interpolation may be performed using the following equation (3).
- j is an index used for the intensity array.
- step S24 the processing unit PU extracts only the data range used for the calculation of the center of gravity from the data interpolated in the process of step S22. For example, the processing unit PU assigns 0 to the intensity data Y that is equal to or less than the maximum intensity Y MAX ⁇ A of the peak, with the threshold value used for centroid calculation being A%.
- step S26 the processing unit PU calculates a weighted centroid from the data interpolated in the processing in step S24.
- the processing unit PU uses, for example, the following formula (4).
- N is the number of data points after extracting the center of gravity range.
- the processing unit PU can calculate the optical path length nd.
- the processing unit PU sequentially calculates the optical path length of the first plate 16, that is, the optical path length of the first region R1, the optical path length of the second region R2, and the optical path length of the third region R3.
- the calculated temperature values of the first region R1, the second region R2, and the third region R3 can be calculated based on these optical path lengths.
- the calculation of the temperature calculation value utilizes the fact that the optical path length nd varies depending on the temperature of the first plate 16.
- the processing unit PU uses the table or function that specifies the relationship between the optical path length and the temperature to calculate the first region R1, the second region R2, and the third region R3 from the calculated optical path length nd. Calculate the respective temperature calculation values.
- the processing unit PU has an optical path length of the first plate 16, that is, an optical path length of the first region R1, an optical path length of the second region R2, an optical path length of the third region R3, and Alternatively, when the calculated temperature value of the first region R1, the calculated temperature value of the second region R2, and the calculated temperature value of the third region R3 are obtained, the control unit Cnt can perform various controls.
- the control unit Cnt can be a programmable computer device, and includes a magnitude of the high frequency power of the high frequency power supply HFS, a magnitude of the high frequency bias power of the high frequency power supply LFS, an exhaust amount of the exhaust device VS, and a gas supply system GP.
- the type and flow rate of the gas supplied to the supply path, and the amount of current applied to the coil of the electromagnet 30 can be adjusted.
- control unit Cnt is stored in a memory or according to a recipe input by an input device, a high frequency power supply HFS, a high frequency power supply LFS, an exhaust device VS, a valve and a flow rate controller of a gas supply system GP, an electromagnet A control signal can be sent to a current source connected to 30 coils.
- control unit Cnt outputs an alarm according to the optical path length of the first region R1, the optical path length of the second region R2, and the optical path length of the third region R3 obtained by the processing unit PU. be able to.
- the optical path length of the first region R1, the optical path length of the second region R2, and the optical path length of the third region R3 are the thickness of the first region R1, the thickness of the second region R2, and the The thickness of each of the three regions R3 is reflected. Therefore, the control unit Cnt, for example, alarms when the optical path length of the first region R1, the optical path length of the second region R2, and the optical path length of the third region R3 are respectively predetermined optical path lengths. Can be output. Even if the alarm is not output, the operator of the plasma processing apparatus 10 can calculate the first path R1, the second path R2, and the third path R3 from the first path R1. It is possible to grasp the replacement time of the plate 16.
- control unit Cnt performs the first calculation based on the temperature calculation value of the first region R1, the temperature calculation value of the second region R2, and the temperature calculation value of the third region R3 calculated by the processing unit PU.
- the electric power supplied to the first heater HT1, the second heater HT2, and the third heater HT3 from the heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3, respectively, can be controlled. .
- FIG. 11 is a flowchart illustrating an example of a method for operating a plasma processing apparatus according to an embodiment.
- the control unit Cnt first controls the first heater HT1, the second heater HT2, and the third heater HT2. Electric power is supplied to the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 so that the heater HT3 is turned on.
- the control unit Cnt controls the chiller unit so as to supply the refrigerant to the flow path 18f. As a result, the entire region of the first plate 16 has a substantially uniform temperature.
- the control unit Cnt supplies gas from the gas supply system GP and operates the exhaust device VS.
- gas is supplied in the processing space PS, and the pressure of the processing space PS becomes a predetermined pressure.
- the gas when the gas is supplied from the gas supply system GP, the gas also enters the gap between the first plate 16 and the electrostatic chuck 19.
- the gas that has entered the gap functions as a heat transfer medium between the first plate 16 and the electrostatic adsorption unit 19, and the entire region of the first plate 16 approaches the target temperature.
- control unit Cnt causes the high-frequency power source HFS to supply high-frequency power to generate plasma.
- control unit Cnt may supply the high-frequency bias power to the high-frequency power supply LFS, or may control the DC power supply NP so that a negative DC voltage is supplied to the upper electrode structure US.
- the control unit Cnt acquires the temperature calculation value of the first region R1, the temperature calculation value of the second region R2, and the temperature calculation value of the third region calculated by the processing unit PU.
- the control unit Cnt performs the first heater power supply HP1, the first heater R1 based on the calculated temperature value of the first region R1, the calculated temperature value of the second region R2, and the calculated temperature value of the third region. 2 heater power supply HP2 and 3rd heater power supply HP3 are controlled.
- the controller Cnt is configured to calculate the temperature of the first region R1, the second region R1, the second region R2, the third region, and the third region.
- the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 are controlled so that the temperature of the region R2 and the temperature of the third region become substantially equal. Note that step ST54 and step ST55 can be repeatedly executed until the plasma processing of one wafer W is completed.
- plasma having a plasma density distribution that varies in the radial direction with respect to the axis AX may be generated.
- a plasma having a high density in the vicinity of the axis AX and a density that decreases as the distance from the axis AX may occur. Therefore, the amount of heat input from the plasma to the first plate 16 has a distribution that varies in the radial direction.
- the amount of the first plate 16 to be scraped by the plasma processing also has a distribution that varies in the radial direction. That is, when the plasma treatment is performed, the first plate 16 has a thickness distribution.
- the thickness distribution of the first plate 16 facilitates a temperature distribution that varies in the first plate 16.
- the electric power supplied from the first heater power supply HP1 to the first heater HT1 is set to the largest electric power in the step ST55, and the second heater power supply HP2 is changed to the second heater HT2.
- the supplied power is set to the next largest power, and the power supplied from the third heater power supply HP3 to the third heater HT3 can be set to the minimum power or OFF.
- the coolant may be continuously supplied from the chiller unit to the flow path 18f during the plasma generation period.
- the control unit Cnt performs the first calculation calculated by the processing unit PU during plasma processing. Based on the calculated temperature value of the region R1, the calculated temperature value of the second region R2, and the calculated temperature value of the third region, the temperature of the first region R1, the temperature of the second region R2, and the third temperature The first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 are controlled so that the temperature of the region R3 becomes a predetermined temperature.
- the plasma state when processing each wafer W may vary.
- the plasma state when the first wafer W is processed may be different from the plasma state when the subsequent wafer W is processed.
- Such a phenomenon is a phenomenon called “first wafer effect”.
- the temperature of the upper electrode structure US may vary when each wafer W is processed.
- the first region R1, the second region R2, and the third region R3 are set to a predetermined temperature so that the temperature of the first region R1 is equal to the predetermined temperature.
- the outputs of the heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 are controlled. Therefore, it is possible to reduce the temperature difference of the upper electrode structure US when processing a plurality of wafers W continuously.
- the first gas discharged from the plurality of gas discharge ports 16i in the first region R1, the second gas discharged from the plurality of gas discharge ports 16j in the second region R2, and the second gas It is assumed that the amount of the deposition gas differs from the amount of the etching gas contained in each of the third gases discharged from the plurality of gas discharge ports 16j in the third region R3.
- the etching gas is a corrosive gas such as a halogen element, and may be, for example, a fluorocarbon gas.
- the deposition gas is a gas that adheres to the first plate 16 or changes the quality of the first plate 16, and is, for example, an oxygen gas (O 2 ) gas.
- the control unit Cnt has the first gas, the second gas, and the first gas according to the amount of the deposition gas with respect to the amount of the etching gas included in each of the third gas.
- the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 so that the temperature of the region R1, the temperature of the second region R2, and the temperature of the third region R3 are increased.
- the control unit Cnt is further based on the temperature calculation value of the first region R1, the temperature calculation value of the second region R2, and the temperature calculation value of the third region calculated by the processing unit PU.
- the outputs of the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 can be controlled.
- black silicon becomes significant depending on the amount of the depositing gas in the gas, that is, the ratio of the depositing gas in the gas.
- the amount of deposits decreases as the temperature of the first plate 16 increases.
- each of the first region R1, the second region R2, and the third region R3 has a deposition gas in a gas discharged from each gas discharge port. Since the temperature of the regions is controlled, the generation of black silicon in these regions can be suppressed.
- the state in which the temperature of the first plate 16 is stabilized after the generation of the plasma is determined to be a state in which the temperature of the first plate 16 is 150 ° C., and the first plate in this state
- the plate thickness of the third region R3, that is, nd / 3.7 is obtained from the optical path length nd of the third region R3, and the third thickness is calculated from the plate thickness.
- the amount of abrasion in the region R3 was calculated.
- the amount of chipping when the processing time was 10 minutes, 20 minutes, and 50 minutes was 0.4 ⁇ m, 0.9 ⁇ m, and 1.9 ⁇ m, respectively.
- the optical path length nd corresponding to the thickness of each region of the first plate 16 can be obtained by the acquisition unit and the processing unit PU described above.
- Experimental Example 2 in which the plasma processing apparatus 10 is performed for evaluation will be described.
- the first heater power supply HP1, the second heater power supply HP2, and the third heater power supply HP3 are controlled so that the target temperature of the first plate 16 becomes 150 ° C.
- a gas was supplied from the gas supply system GP, then plasma generation was performed for a predetermined time, and then the plasma generation was stopped a plurality of times, and the temperature of the third region R3 was measured. .
- FIG. 12 is a graph showing the experimental results of Experimental Example 2.
- the horizontal axis represents time
- the vertical axis represents the temperature of the third region R3.
- the temperature of the third region R3 is equal to the target temperature.
- the temperature was lower than 150 ° C, that is, about 125 ° C. Thereafter, when the gas supply was started, the temperature of the third region R3 was close to the target temperature of 150 ° C.
- the period P1, the period P2, the period P3, and the period P4 each start the generation of plasma (indicated by “plasma ON” in the drawing), that is, the high-frequency power source HFS and the high-frequency power source LFS. It is a period from the start of the supply of the high frequency power from the end of the generation of plasma, that is, the stop of the supply of the high frequency power from the high frequency power supply HFS and the high frequency power supply LFS. As shown in FIG. 12, it is confirmed that the maximum temperature reached in the third region R3 in the period P1, which is the first plasma processing period, is lower than the maximum temperature reached in the third region R3 in other periods. It was done.
- the first heater power supply HP ⁇ b> 1, the first heater R ⁇ b> 1, the second region R ⁇ b> 2, and the third region R ⁇ b> 3 are set to a predetermined temperature during the plasma processing. Since the second heater power supply HP2 and the third heater power supply HP3 can be controlled, the influence of this phenomenon can be suppressed.
- the first plate 16 of the above-described embodiment has three regions, but the first plate 16 may have four or more concentric regions, and the upper electrode structure US. May have four or more supply paths for individually supplying gas to these four or more regions.
- gas line (seventh gas line), D31 ... gas diffusion chamber (eighth gas diffusion chamber), L32 ... gas line (eighth gas line), D32 ... gas diffusion chamber (ninth gas diffusion) Chamber), L33 ... gas line (9th gas line), GP ... gas supply system, HFS ... high frequency power supply, LFS ... high frequency power supply, OS1 ... first acquisition unit, OS2 ... second acquisition unit, OS3 ... first 3 acquisition units, 82... Light source, 84. Over data, 86 ... optical fiber, 88 ... optical element, 90 ... spectroscope, PU ... processor, Cnt ... control unit.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Abstract
Description
<プラズマ処理の条件>
・ガス:CF系ガス(50scc)、Arガス(400sccm)、O2ガス(30sccm
・高周波電源HFS:40MHz、1200W
・高周波電源LFS:13MHz、4500W
・処理時間:10分、20分、50分の三種
<条件>
・ガス:CF系ガス(50scc)、Arガス(400sccm)、O2ガス(30sccm
・高周波電源HFS:40MHz、1200W
・高周波電源LFS:13MHz、4500W
・直流電源NPの印加電圧(DC):0V、150V、300Vの三種
Claims (12)
- 容量結合型のプラズマ処理装置の上部電極構造であって、
第1の領域、該第1の領域を同心状に囲む第2の領域、及び該第2の領域を同心状に囲む第3の領域を有し、該第1の領域、該第2の領域、及び該第3の領域のそれぞれに複数のガス吐出口が形成された第1のプレートと、
冷媒用の流路が形成された第2のプレートと、
前記第1のプレートと前記第2のプレートとの間に介在し、前記第1のプレートを吸着する静電吸着部と、
を備え、
前記静電吸着部は、前記第2のプレートと前記第1の領域との間に設けられた第1のヒータ、前記第2のプレートと前記第2の領域との間に設けられた第2のヒータ、及び、前記第2のプレートと前記第3の領域との間に設けられた第3のヒータを有し、
前記静電吸着部は、前記第2のプレートと共に、前記第1の領域にガスを供給する第1の供給経路、前記第2の領域にガスを供給する第2の供給経路、及び前記第3の領域にガスを供給する第3の供給経路を提供し、
前記静電吸着部には、前記第1の供給経路に含まれる第1のガス拡散室、前記第2の供給経路に含まれる第2のガス拡散室、及び、前記第3の供給経路に含まれる第3のガス拡散室が形成されている、
上部電極構造。 - 前記静電吸着部は、セラミック製の本体部、及び静電吸着用の電極を有しており、
前記セラミック製の本体部の表面が前記第1のプレートの吸着面を構成する、
請求項1に記載の上部電極構造。 - 前記第1の供給経路は、第1のガスライン、第4のガス拡散室、複数の第2のガスライン、第5のガス拡散室、複数の第3のガスライン、及び前記第1のガス拡散室が順に接続されることにより構成されており、
前記複数の第2のガスライン及び前記複数の第3のガスラインは、前記第1の領域の中心軸線に対して周方向に配列されており、前記第1のガス拡散室、前記第4のガス拡散室、及び前記第5のガス拡散室のコンダクタンスよりも低いコンダクタンスを有し、
前記第2の供給経路は、第4のガスライン、第6のガス拡散室、複数の第5のガスライン、第7のガス拡散室、複数の第6のガスライン、及び前記第2のガス拡散室が順に接続されることにより構成されており、
前記複数の第5のガスライン及び前記複数の第6のガスラインは、前記中心軸線に対して周方向に配列されており、前記第2のガス拡散室、前記第6のガス拡散室、及び前記第7のガス拡散室のコンダクタンスよりも低いコンダクタンスを有し、
前記第3の供給経路は、第7のガスライン、第8のガス拡散室、複数の第8のガスライン、第9のガス拡散室、複数の第9のガスライン、及び前記第3のガス拡散室が順に接続されることにより構成されており、
前記複数の第8のガスライン及び前記複数の第9のガスラインは、前記中心軸線に対して周方向に配列されており、前記第3のガス拡散室、前記第8のガス拡散室、及び前記第9のガス拡散室のコンダクタンスよりも低いコンダクタンスを有する、
請求項1又は2に記載の上部電極構造。 - 容量結合型のプラズマ処理装置であって、
処理容器と、
前記処理容器内に設けられた載置台であり、下部電極を含む該載置台と、
請求項1~3の何れか一項に記載の上部電極構造と、
を備えるプラズマ処理装置。 - 光源からの光を前記第1のプレートの前記第1の領域に照射し、該第1の領域の表面及び裏面からの反射光の波長スペクトルを取得する第1の取得部と、
光源からの光を前記第1のプレートの前記第2の領域に照射し、該第2の領域の表面及び裏面からの反射光の波長スペクトルを取得する第2の取得部と、
光源からの光を前記第1のプレートの前記第3の領域に照射し、該第3の領域の表面及び裏面からの反射光の波長スペクトルを取得する第3の取得部と、
前記第1の取得部によって取得された前記波長スペクトル、前記第2の取得部によって取得された前記波長スペクトル、及び、前記第3の取得部によって取得された前記波長スペクトルに基づいて、前記第1の領域の前記表面と前記裏面との間の光路長、前記第2の領域の前記表面と前記裏面との間の光路長、及び前記第3の領域の前記表面と前記裏面との間の光路長をそれぞれ求める処理部と、
を更に備える請求項4に記載のプラズマ処理装置。 - 前記第1のヒータに接続された第1のヒータ電源と、
前記第2のヒータに接続された第2のヒータ電源と、
前記第3のヒータに接続された第3のヒータ電源と、
前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する制御部と、
を更に備え、
前記処理部は、前記第1の領域の前記光路長、前記第2の領域の前記光路長、及び前記第3の領域の前記光路長に基づいて、前記第1の領域の温度計算値、前記第2の領域の温度計算値、及び前記第3の領域の温度計算値をそれぞれ求め、
前記制御部は、前記第1の領域の前記温度計算値、前記第2の領域の前記温度計算値、及び前記第3の領域の前記温度計算値に基づいて、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、
請求項5に記載のプラズマ処理装置。 - 前記制御部は、前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度が実質的に同一となるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、請求項6に記載のプラズマ処理装置。
- 前記制御部は、プラズマ処理時に、前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度が所定の温度となるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、請求項6に記載のプラズマ処理装置。
- 前記制御部は、前記第1の領域の前記複数のガス吐出口から吐出される第1のガス、前記第2の領域の前記複数のガス吐出口から吐出される第2のガス、及び前記第3の領域の前記複数のガス吐出口から吐出される第3のガスそれぞれに含まれるエッチング性ガスの量に対する堆積性ガスの量の多さに応じて、前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度のそれぞれが高くなるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、請求項6に記載のプラズマ処理装置。
- 請求項6又は7に記載のプラズマ処理装置の運用方法であって、
プラズマ処理時に前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度が実質的に同一となるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、
運用方法。 - 請求項6又は8に記載のプラズマ処理装置の運用方法であって、
プラズマ処理時に前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度が実質的に同一となるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、
運用方法。 - 請求項6又は9に記載のプラズマ処理装置の運用方法であって、
前記第1の領域の前記複数のガス吐出口から吐出される第1のガス、前記第2の領域の前記複数のガス吐出口から吐出される第2のガス、及び前記第3の領域の前記複数のガス吐出口から吐出される第3のガスそれぞれに含まれるエッチング性ガスの量に対する堆積性ガスの量の多さに応じて、前記第1の領域の温度、前記第2の領域の温度、及び前記第3の領域の温度のそれぞれが高くなるよう、前記第1のヒータ電源、前記第2のヒータ電源、及び前記第3のヒータ電源を制御する、
運用方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/303,274 US20170069470A1 (en) | 2014-05-12 | 2015-04-28 | Upper electrode structure of plasma processing apparatus, plasma processing apparatus, and operation method therefor |
KR1020167028274A KR102364187B1 (ko) | 2014-05-12 | 2015-04-28 | 플라즈마 처리 장치의 상부 전극 구조, 플라즈마 처리 장치 및 플라즈마 처리 장치의 운용 방법 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014098809A JP6169040B2 (ja) | 2014-05-12 | 2014-05-12 | プラズマ処理装置の上部電極構造、プラズマ処理装置、及びプラズマ処理装置の運用方法 |
JP2014-098809 | 2014-05-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015174271A1 true WO2015174271A1 (ja) | 2015-11-19 |
Family
ID=54479813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/062802 WO2015174271A1 (ja) | 2014-05-12 | 2015-04-28 | プラズマ処理装置の上部電極構造、プラズマ処理装置、及びプラズマ処理装置の運用方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20170069470A1 (ja) |
JP (1) | JP6169040B2 (ja) |
KR (1) | KR102364187B1 (ja) |
WO (1) | WO2015174271A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210142983A1 (en) * | 2019-11-12 | 2021-05-13 | Tokyo Electron Limited | Plasma processing apparatus |
US20210272781A1 (en) * | 2020-03-02 | 2021-09-02 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11434568B2 (en) * | 2018-04-17 | 2022-09-06 | Applied Materials, Inc. | Heated ceramic faceplate |
JP7106358B2 (ja) | 2018-06-08 | 2022-07-26 | 東京エレクトロン株式会社 | プラズマ処理装置及び温度制御方法 |
JP7246154B2 (ja) | 2018-10-02 | 2023-03-27 | 東京エレクトロン株式会社 | プラズマ処理装置及び静電吸着方法 |
JP7345382B2 (ja) * | 2018-12-28 | 2023-09-15 | 東京エレクトロン株式会社 | プラズマ処理装置及び制御方法 |
CN111446144B (zh) * | 2019-01-17 | 2024-04-19 | 东京毅力科创株式会社 | 静电吸附部的控制方法和等离子体处理装置 |
JP7346269B2 (ja) * | 2019-01-17 | 2023-09-19 | 東京エレクトロン株式会社 | 静電吸着部の制御方法、及びプラズマ処理装置 |
JP7153574B2 (ja) * | 2019-01-17 | 2022-10-14 | 東京エレクトロン株式会社 | 上部電極構造、プラズマ処理装置、及び上部電極構造を組み立てる方法 |
KR102410743B1 (ko) * | 2020-02-18 | 2022-06-21 | 세메스 주식회사 | 부품 세정 방법 및 장치 |
KR20220021514A (ko) * | 2020-08-14 | 2022-02-22 | 삼성전자주식회사 | 상부 전극 및 이를 포함하는 기판 처리 장치 |
CN114256046A (zh) * | 2020-09-22 | 2022-03-29 | 中微半导体设备(上海)股份有限公司 | 等离子体处理装置及其工作方法 |
US20220093361A1 (en) * | 2020-09-22 | 2022-03-24 | Applied Materials, Inc. | Showerhead assembly with recursive gas channels |
JP2022155065A (ja) * | 2021-03-30 | 2022-10-13 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP2023015765A (ja) | 2021-07-20 | 2023-02-01 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ処理装置で使用する上部電極アセンブリ、上部電極アセンブリの製造方法、及び、上部電極アセンブリの再生方法 |
WO2023074260A1 (ja) * | 2021-10-29 | 2023-05-04 | 東京エレクトロン株式会社 | プラズマ処理システム及びプラズマ処理装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001085398A (ja) * | 1999-09-13 | 2001-03-30 | Kobe Steel Ltd | プラズマ処理装置 |
JP2001267295A (ja) * | 2000-03-16 | 2001-09-28 | Anelva Corp | プラズマ処理装置 |
JP2004538633A (ja) * | 2001-08-08 | 2004-12-24 | ラム リサーチ コーポレーション | 半導体処理反応室用シャワーヘッド電極構造 |
JP2006066855A (ja) * | 2004-07-30 | 2006-03-09 | Tokyo Electron Ltd | プラズマエッチング装置 |
JP2013541842A (ja) * | 2010-09-15 | 2013-11-14 | ラム リサーチ コーポレーション | 半導体製造中にプラズマ成分のフラックス及び蒸着を制御するための方法、並びにそれを実現するための装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1604822A (en) | 1977-04-22 | 1981-12-16 | Beecham Group Ltd | N-monosubstituted-9-amino-9-deoxyclavulanic acid derivative |
US6206972B1 (en) * | 1999-07-08 | 2001-03-27 | Genus, Inc. | Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes |
JP3946641B2 (ja) * | 2001-01-22 | 2007-07-18 | 東京エレクトロン株式会社 | 処理装置 |
US7712434B2 (en) * | 2004-04-30 | 2010-05-11 | Lam Research Corporation | Apparatus including showerhead electrode and heater for plasma processing |
US20060042754A1 (en) * | 2004-07-30 | 2006-03-02 | Tokyo Electron Limited | Plasma etching apparatus |
US20060288934A1 (en) * | 2005-06-22 | 2006-12-28 | Tokyo Electron Limited | Electrode assembly and plasma processing apparatus |
JP4911984B2 (ja) * | 2006-02-08 | 2012-04-04 | 東京エレクトロン株式会社 | ガス供給装置,基板処理装置,ガス供給方法及びシャワーヘッド |
JP2008251866A (ja) * | 2007-03-30 | 2008-10-16 | Hitachi High-Technologies Corp | プラズマ処理装置 |
KR101519684B1 (ko) * | 2007-09-25 | 2015-05-12 | 램 리써치 코포레이션 | 플라즈마 프로세싱 장치용 샤워헤드 전극 어셈블리를 위한 온도 제어 모듈 |
JP2009188173A (ja) * | 2008-02-06 | 2009-08-20 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
KR101412034B1 (ko) * | 2008-06-18 | 2014-06-26 | 주식회사 원익아이피에스 | 가스분사조립체 및 이를 이용한 박막증착장치 |
JP5709505B2 (ja) * | 2010-12-15 | 2015-04-30 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ処理方法、および記憶媒体 |
JP5752454B2 (ja) * | 2011-03-23 | 2015-07-22 | 東京エレクトロン株式会社 | プラズマ処理装置及び温度測定方法 |
JP6157061B2 (ja) * | 2012-05-11 | 2017-07-05 | 東京エレクトロン株式会社 | ガス供給装置及び基板処理装置 |
JP6007143B2 (ja) * | 2013-03-26 | 2016-10-12 | 東京エレクトロン株式会社 | シャワーヘッド、プラズマ処理装置、及びプラズマ処理方法 |
JP2015095551A (ja) * | 2013-11-12 | 2015-05-18 | 東京エレクトロン株式会社 | シャワーヘッドアセンブリ及びプラズマ処理装置 |
-
2014
- 2014-05-12 JP JP2014098809A patent/JP6169040B2/ja active Active
-
2015
- 2015-04-28 US US15/303,274 patent/US20170069470A1/en not_active Abandoned
- 2015-04-28 WO PCT/JP2015/062802 patent/WO2015174271A1/ja active Application Filing
- 2015-04-28 KR KR1020167028274A patent/KR102364187B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001085398A (ja) * | 1999-09-13 | 2001-03-30 | Kobe Steel Ltd | プラズマ処理装置 |
JP2001267295A (ja) * | 2000-03-16 | 2001-09-28 | Anelva Corp | プラズマ処理装置 |
JP2004538633A (ja) * | 2001-08-08 | 2004-12-24 | ラム リサーチ コーポレーション | 半導体処理反応室用シャワーヘッド電極構造 |
JP2006066855A (ja) * | 2004-07-30 | 2006-03-09 | Tokyo Electron Ltd | プラズマエッチング装置 |
JP2013541842A (ja) * | 2010-09-15 | 2013-11-14 | ラム リサーチ コーポレーション | 半導体製造中にプラズマ成分のフラックス及び蒸着を制御するための方法、並びにそれを実現するための装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210142983A1 (en) * | 2019-11-12 | 2021-05-13 | Tokyo Electron Limited | Plasma processing apparatus |
US11705308B2 (en) * | 2019-11-12 | 2023-07-18 | Tokyo Electron Limited | Plasma processing apparatus |
US20210272781A1 (en) * | 2020-03-02 | 2021-09-02 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
US11961718B2 (en) * | 2020-03-02 | 2024-04-16 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP2015216261A (ja) | 2015-12-03 |
KR20170004964A (ko) | 2017-01-11 |
JP6169040B2 (ja) | 2017-07-26 |
US20170069470A1 (en) | 2017-03-09 |
KR102364187B1 (ko) | 2022-02-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6169040B2 (ja) | プラズマ処理装置の上部電極構造、プラズマ処理装置、及びプラズマ処理装置の運用方法 | |
KR102220184B1 (ko) | 샤워 헤드, 플라스마 처리 장치 및 플라스마 처리 방법 | |
JP7259017B2 (ja) | Rfシールドが埋め込まれた半導体基板支持体 | |
TW202305935A (zh) | 電漿處理裝置、處理器、控制方法、非暫時性電腦可讀記錄媒體及程式 | |
KR101995449B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR20180106816A (ko) | 플라스마 처리 장치 및 플라스마 처리 방법 | |
US9978567B2 (en) | Apparatus and method of treating a substrate | |
KR102554994B1 (ko) | Tcp를 사용할 시의 웨이퍼 에칭 불균일성을 개선하기 위한 시스템들 및 방법들 | |
KR20010110708A (ko) | 플라즈마 처리실에서 처리하는 불균일한 웨이퍼를보상하기 위한 방법 및 장치 | |
CN102066603A (zh) | 用于均匀沉积的装置和方法 | |
US11562887B2 (en) | Plasma processing apparatus and etching method | |
JP2021073378A (ja) | Pvd装置 | |
US10923328B2 (en) | Plasma processing method and plasma processing apparatus | |
KR20130126458A (ko) | 플라즈마 처리 장치 | |
US10083819B2 (en) | Antenna and plasma processing apparatus | |
KR20060042099A (ko) | 웨이퍼 스테이지 | |
KR102245903B1 (ko) | 플라즈마 처리 장치의 클리닝 방법 및 플라즈마 처리 장치 | |
JP7349329B2 (ja) | プラズマ処理装置及びエッチング方法 | |
KR20140121795A (ko) | 다중―세그먼트 전극 어셈블리 및 그에 대한 방법들 | |
US20230298865A1 (en) | Substrate support assembly, plasma processing apparatus, and plasma processing method | |
KR20210116260A (ko) | 검사 방법, 검사 장치, 및 플라즈마 처리 장치 | |
CN107464764B (zh) | 一种承载装置及预清洗腔室 | |
US20180374720A1 (en) | Gas exhaust plate and plasma processing apparatus | |
WO2024084965A1 (ja) | 回折格子の形成方法 | |
JP6406631B2 (ja) | プラズマ処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15792262 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20167028274 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15303274 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 15792262 Country of ref document: EP Kind code of ref document: A1 |