WO2015159378A1 - Dispositif et procédé d'inspection à ultrasons - Google Patents

Dispositif et procédé d'inspection à ultrasons Download PDF

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Publication number
WO2015159378A1
WO2015159378A1 PCT/JP2014/060767 JP2014060767W WO2015159378A1 WO 2015159378 A1 WO2015159378 A1 WO 2015159378A1 JP 2014060767 W JP2014060767 W JP 2014060767W WO 2015159378 A1 WO2015159378 A1 WO 2015159378A1
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Prior art keywords
ultrasonic
waveform
wave
vibration direction
shear wave
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PCT/JP2014/060767
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English (en)
Japanese (ja)
Inventor
雅則 北岡
永島　良昭
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株式会社日立製作所
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Priority to JP2016513540A priority Critical patent/JP6248183B2/ja
Priority to CN201480078005.4A priority patent/CN106233134B/zh
Priority to PCT/JP2014/060767 priority patent/WO2015159378A1/fr
Publication of WO2015159378A1 publication Critical patent/WO2015159378A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • G01N29/075—Analysing solids by measuring propagation velocity or propagation time of acoustic waves by measuring or comparing phase angle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4409—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
    • G01N29/4427—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with stored values, e.g. threshold values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/012—Phase angle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves

Definitions

  • the present invention relates to an ultrasonic inspection apparatus and an ultrasonic inspection method.
  • Patent Document 1 Piezoelectric materials that vibrate in two orthogonal directions are laminated, vibration is generated by applying a voltage to these piezoelectric materials, and by superposing polarizations orthogonal to the two directions, a transverse wave with any polarization state is generated. Generate sound waves.
  • a method of measuring the acoustic anisotropy of a material having acoustic anisotropy using a shear wave ultrasonic wave having an arbitrary polarization state and a material degradation diagnostic apparatus using the measurement method of the acoustic anisotropy are described There is.
  • Patent Document 2 uses an ultrasonic probe having a conventionally used ultrasonic transducer for longitudinal waves and is used to vertically and obliquely inside a material to be inspected. Transverse waves oscillating in the same direction without mode conversion in the direction or direction along the flaw detection surface are respectively transmitted from the two ultrasonic probes, and the reception time of each horizontal polarization transverse wave is referenced with reference to the time delay value.
  • An ultrasonic flaw detection apparatus capable of performing flaw detection or thickness measurement of a test material with low frequency ultrasonic waves by adding and analyzing after correction is described.
  • Patent Document 1 simultaneously generates two ultrasonic waves having orthogonal polarizations, measures the acoustic anisotropy, and measures the shear wave velocity from the bottom surface echo and the thickness of the test object, thereby degrading the material.
  • the diagnosis is performed, it does not have a focus function for detecting reflectors such as minute defects or inclusions.
  • reflectors such as minute defects or inclusions.
  • a focusing function is required.
  • the present invention has been made in view of the above problems, and provides an ultrasonic inspection apparatus and an ultrasonic inspection method capable of detecting minute defects or inclusions present in a metal material with high accuracy.
  • the purpose is to
  • the present invention provides a polarization control probe for generating a shear wave ultrasonic wave having a first vibration direction and a shear wave ultrasonic wave having a second vibration direction, and a shear wave ultrasonic wave having a first vibration direction From the waveform generation unit for controlling the phase difference of each of the shear wave ultrasonic waves having the second vibration direction, and the received waveform of the polarization control probe, the shear wave ultrasonic waves having the first vibration direction and the shear wave ultrasonic waves having the second vibration direction And a display unit for displaying the synthesized waveform obtained by the waveform analysis unit.
  • an ultrasonic inspection apparatus and an ultrasonic inspection method capable of detecting an intrinsic defect or inclusion of an object to be inspected with high accuracy.
  • FIG. 1 is a block diagram showing an entire configuration of an ultrasonic inspection apparatus according to a first embodiment. It is a conceptual diagram which shows the principle of the ultrasonic inspection used by a present Example. It is a conceptual diagram which shows the principle of the ultrasonic inspection used by a present Example. It is a graph of an example of the waveform which shows the principle of the ultrasonic inspection used by a present Example. It is a conceptual diagram which shows the effect of the frequency of the longitudinal wave ultrasonography used by a present Example. It is a conceptual diagram which shows the effect of the frequency of the shear wave ultrasonography used by a present Example. It is a conceptual diagram which shows the effect of the acoustic anisotropy of the ultrasonic inspection used by a present Example.
  • FIG. 1 is a perspective view of an inspection mode according to a first embodiment.
  • 5 is a flowchart showing an operation procedure of the first embodiment.
  • FIG. 2 is a perspective view of a polarization control probe in Embodiment 1. It is a detailed view of a waveform generator included in a waveform generation unit of this embodiment. It is a figure of an example of the polarization state which the polarization control probe used by a present Example generates.
  • FIG. 7 is a detailed view of an arithmetic unit included in the waveform analysis unit of the present embodiment.
  • FIG. 7 is a block diagram showing an entire configuration of an ultrasonic inspection apparatus according to a second embodiment.
  • FIG. 7 is a perspective view of a polarization control probe according to a second embodiment.
  • FIG. 10 is a block diagram showing the overall configuration of an ultrasonic inspection apparatus according to a third embodiment.
  • FIG. 10 is a perspective view of an inspection mode according to a third embodiment.
  • 15 is a flowchart illustrating an operation procedure of the third embodiment.
  • FIG. 16 is a block diagram showing an entire configuration of an ultrasonic inspection apparatus according to a fourth embodiment.
  • FIG. 14 is a perspective view of an inspection mode according to a fourth embodiment.
  • Ultrasonic flaw inspection is used to nondestructively inspect internal defects or inclusions of metal materials.
  • the conventional ultrasonic flaw inspection that generates ultrasonic waves (longitudinal wave ultrasonic waves) that travel in a direction perpendicular to the flaw detection surface of the test material, the S / S of the reflected wave from the internal defect or inclusion to be inspected
  • N signal-to-noise ratio
  • shear wave ultrasound In order to solve this problem, it is conceivable to use shear wave ultrasound. If shear wave ultrasonic waves are used, the speed of sound of the shear wave ultrasonic waves is about half of that of the longitudinal wave ultrasonic waves. Therefore, it is advantageous to obtain the same degree of measurement accuracy at about half the frequency of the longitudinal wave ultrasonic waves.
  • the metallic material having acoustic anisotropy has a transverse acoustic velocity in the vibration direction (polarization: the polarization here means the vibration direction and It is difficult to pinpoint the position of an internal defect or an inclusion with high accuracy, without considering the acoustic anisotropy, which is characterized by being different for each phase of the shear wave ultrasonic wave specified. .
  • polarization the polarization here means the vibration direction
  • Patent Document 1 and Patent Document 2 described in the background art describe a flaw detection inspection using a shear wave ultrasonic wave, but do not describe a focus function.
  • the focus function refers to a predetermined position to be detected by transmitting and receiving polarized waves that are shear wave ultrasonic waves having vibration direction components in two directions and causing the polarized waves to interfere at a predetermined position inside the inspection object.
  • the ultrasound signals are reinforced at each other, and unnecessary signals at other positions are controlled to be destructive.
  • FIG. 2 is a conceptual view of an ultrasonic inspection method.
  • the force is transmitted as an acoustic vibration to the test object 7 by the longitudinal wave probe 110 or the shear wave probe 111 which converts a voltage into a physical force.
  • both a longitudinal wave 112 oscillating in the same direction as the propagation direction and a transverse wave 113 oscillating in the direction perpendicular to the propagation direction are used (FIG. 2A).
  • a reflector 72 such as a defect or an inclusion is present in the path of sound propagating in the inspection object 7, the reflector echo 101b reflected by the reflector is detected.
  • the bottom surface echo 101c is detected by the bottom surface 71 of the inspection object (FIG. 2 (b)).
  • the position of the reflector is measured by the time interval 102 between the transmission wave 101a and the reflector echo 101b and the ultrasonic velocity in the sample.
  • the specimen thickness is measured by the time interval 103 between the transmission wave 101a and the bottom echo 101c and the ultrasonic velocity in the specimen.
  • multiple reflection signals repeatedly reflected in the inspection object 7 may be detected.
  • the reflector echo 101d is a bottom echo reflected on the surface and reflected again by the reflector 72
  • the second bottom echo 101e is an echo in which the first bottom echo is reflected on the surface and is reflected again on the bottom It is.
  • the third and subsequent bottom echoes are detected (FIG. 2 (c)).
  • FIG. 3 is a conceptual diagram showing the effect of frequency in ultrasonic examination.
  • the frequency is high, the attenuation of the ultrasonic wave 113 in the test material 7 increases, and the echo 114 is attenuated while propagating to the probe 111, and the S / N of the signal is reduced (FIG. 3A). Therefore, if shear wave ultrasonic waves are used, the speed of sound of shear wave ultrasonic waves is about half of that of longitudinal wave ultrasonic waves, so it is advantageous to obtain similar measurement accuracy at about half the frequency of longitudinal wave ultrasonic waves. is there.
  • the low-frequency shear wave ultrasonic wave 115 has a small reflectance to the minute reflector 72, only a small amplitude reflection echo 116 is obtained, and the S / N of the signal is lowered (FIG. 3 (b)). Therefore, in order to detect minute defects or inclusions present in the metal material with high accuracy, if using the focus function when using shear wave ultrasonic waves, it is possible to catch the defects or inclusions more clearly. it can.
  • FIG. 4A is a conceptual view of inspection in ultrasonic flaw detection using a transverse wave when the object to be inspected has acoustic anisotropy.
  • the ultrasonic wave 113 vibrates in two principal axes depending on the transmitted ultrasonic wave 113 and the direction of the acoustic anisotropy of the test object 7
  • the received waveform becomes a reflector echo 101b in which these two polarizations are superimposed, and the accuracy in identifying the reflector position by propagation time measurement decreases. .
  • FIG. 4B The graph of an example of the waveform which shows the effect of acoustic anisotropy in FIG.4 (b) is shown.
  • the test object 7 is divided into the polarization 113a and the polarization 113b by acoustic anisotropy. Since the propagation speed of the polarization 113 a and the polarization 113 b is different, the phase shift 104 occurs.
  • this shift elongates the reception waveform of the reflector echo 101b and weakens the reception waveform synthesized by the interference effect. This effect is greater for the bottom echo 101c as the phase shift 105 is greater.
  • FIG. 4C shows an outline of the propagation of the shear wave ultrasonic wave in the material having acoustic anisotropy (in the case where the shear wave ultrasonic wave is transmitted from the front side to the back side of the drawing).
  • the main axis shown here refers to the axial direction in the subject having the fastest propagation speed of the shear wave or the axial direction in the subject having the slowest propagation speed of the shear wave.
  • the ultrasonic wave 113 When transmitting the ultrasonic wave 113 in the direction inclined 45 degrees with the principal axis direction of the material having acoustic anisotropy, the ultrasonic wave is separated into the polarization 113a and the polarization 113b, and the propagation velocity of the shear wave in each axis direction is Because they are different from each other, the reception waveform is received with the polarization 113 a and the polarization 113 b combined with a phase difference. If the phase difference is shifted, the waveform is synthesized destructively, so that even if the same ultrasonic wave is transmitted, the strength of the received waveform may be different depending on the axial direction of the crystal of the test object 7 and the transmission direction of the ultrasonic wave. become.
  • the direction (principal axis direction) of the acoustic anisotropy of the inspection object 7 can be determined.
  • the phase difference between the polarization 113a and the polarization 113b is controlled using the principle that the propagation velocity of the shear wave is different in each axial direction, the synthesized waveform can be strengthened only at a predetermined location, and the focusing function realizable.
  • the present invention provides an inspection apparatus using a polarization-controllable probe in order to perform micro-reflector detection with good S / N in ultrasonic inspection using a transverse wave using the above principle.
  • FIG. 1 is a block diagram showing the configuration of a system using a polarization control probe and an ultrasonic flaw detector according to the present embodiment.
  • FIG. 5 is an explanatory view of an ultrasonic flaw detector according to an embodiment of the present invention and a measurement form of defects or inclusions by a polarization control probe.
  • the same reference numerals indicate the same parts.
  • the example shown in FIG. 5 does not limit the embodiment of the present invention.
  • a phase difference 31, an amplitude 3 a and an amplitude 3 b are input to the flaw detection apparatus 1 using the input unit 2.
  • the waveform generator 32 provided in the waveform generation unit 3 generates a voltage waveform a and a voltage waveform b based on the phase difference, the amplitude a, and the amplitude b.
  • the voltage waveform at this time may be a pulse wave or a burst wave.
  • the pulse width and burst width are set appropriately according to the purpose.
  • the phase difference of the two-direction vibration component of the shear wave ultrasonic wave can be specified, for example, by the time difference at each transmission timing.
  • the input unit 2 inputs data to the flaw detection apparatus 1 by operating, for example, a keyboard of a personal computer, a slider displayed on a tablet, and a knob provided on the flaw detection apparatus 1.
  • the voltage waveform a and the voltage waveform b are respectively applied to the first piezoelectric element 4a and the second piezoelectric element 4b provided in the polarization control probe, and are superimposed in the inspection object 7 to generate an ultrasonic wave. Thereafter, the polarization control probe 4 receives an echo from the inspection object 7, and the reception waveform a and the reception waveform b are input to the waveform analysis unit 5 provided in the flaw detection apparatus 1.
  • the first piezoelectric element 4a or the second piezoelectric element 4b can convert an electric signal into vibration and convert the vibration into electric signal, for example, with PZT (lead zirconate titanate) or the like. is there.
  • the waveform analysis unit includes a reception waveform transmission line 50 for taking in two reception waveforms acquired by the polarization control probe, an arithmetic unit 52 for calculating the two reception waveforms, a memory 51, a comparator 53, and a waveform generation unit.
  • 3 has a control signal generation unit 54 that generates a phase 31, an amplitude 3a, and an amplitude 3b for transmitting a feedback signal.
  • the control signal generation unit 54 can be implemented, for example, by software on a personal computer.
  • step S101 the polarization control probe 4 is brought into contact with the inspection object 7 with an appropriate weight.
  • step S102 appropriate initial values are set for the amplitude 1 and the amplitude 2, and the position where a specific echo from the subject 7 occurs is input to the flaw detection apparatus 1 by the input unit 2.
  • this echo is preferably a first bottom echo 101c.
  • the second bottom echo 101e and multiple echoes after that may be designated from the input unit 2 so that the amplitudes can be easily compared in the subsequent steps.
  • step S103 the initial phase difference 31 is set to 0, and the waveform analysis unit 5 stores the combined amplitude of the reception waveform a and the reception waveform b in the memory 51.
  • step S104 the computing unit 52 weights and adds the reception waveform a and the reception waveform b with the amplitude 3a and the amplitude 3b, respectively, and stores the amplitude of the echo composite waveform in the memory 51 by the comparator 53 in step S105. Compare with the value you If the maximum value of the amplitude of the echo synthesized waveform is obtained, the process proceeds to step S107. If not, the process proceeds to step S106 to execute the second and subsequent steps.
  • step S106 the control signal generation unit 54 changes the ratio of the amplitude 3a and the amplitude 3b under the condition that all the amplitudes are constant, and transmits the same to the waveform generation unit 3; Similarly, the comparison is repeated to calculate the ratio of the amplitude 3a and the amplitude 3b at which the amplitude of the echo composite waveform is maximum. That is, by changing the ratio of the amplitude 3a and the amplitude 3b, it is possible to transmit polarized waves whose vibration direction is controlled.
  • the polarization here can be referred to as linear polarization.
  • the control signal generation unit 54 transmits the measurement result in the main axis direction to the display 6, and the display 6 displays the measurement result. The case where the object to be inspected in this example is an anisotropic material having an angle of 90 degrees is shown.
  • the transmitted ultrasonic wave coincides with the principal axis direction of the material, so the ultrasonic wave becomes a single waveform, and basically the transmission waveform A waveform is received that is attenuated by less than intensity in the material. This is the largest echo received.
  • the transmission direction of the ultrasonic wave does not coincide with the main axis direction, the transmission waveform is separated into two polarized waves, which causes a phase difference, so that a destructive composite waveform is received.
  • the principal axis direction of the acoustically anisotropic material can be determined.
  • the initial phase difference is determined using the echo from the test object 7 used in the main axis direction measurement.
  • the polarization control probe 4 is rotated so that the axis of the polarization control probe 4 coincides with the main axis of the inspection object 7.
  • the amplitude 3a and the amplitude 3b are set to be equal, and the synthetic amplitude is stored in the memory 51 with the phase difference 31 being 0.
  • step S109 ultrasonic waves are transmitted and received, and the synthetic echo amplitude is calculated.
  • the amplitude of the echo synthesized waveform is compared with the value stored in the memory 51 by the comparator 53.
  • step S111 the phase difference 31 is sequentially changed, step S109 is executed again, and in step S110, the phase difference 31 that maximizes the amplitude of the echo composite waveform is determined.
  • the condition that the amplitude of the composite waveform of the echo becomes maximum is given by the following (Expression 1) when the axis of the polarization control probe 4 and the main axis of the inspection object 7 coincide with each other.
  • V 0 is the average sound velocity of polarization in each direction of the two main axes
  • z is twice the distance from the inspection surface to the reflector that produces a specific echo
  • ⁇ is the initial phase
  • n is the order of interference.
  • the bottom of the subject is prepared in advance so as to maximize the interference, but this position may be changed as appropriate depending on the object to be measured.
  • the interference position z moves inward from the bottom of the subject, and if there is a defect or an inclusion at that position, the defect or the inclusion can be caught more clearly. it can.
  • the interference waveform is sent from the calculator 52 to the display 6 and displayed.
  • the polarization control probe 4 will be described with reference to FIG.
  • the polarization control probe 4 has a structure in which a first piezoelectric element 4a and a second piezoelectric element 4b different in the direction of 90 ° vibration from each other are laminated.
  • Each piezoelectric element is provided with a first input / output transmission line 41 a and a second input / output transmission line 41 b for applying or reading a voltage waveform.
  • FIG. 8 is a detailed block diagram of the waveform generator 32.
  • the trigger 321 is input to the delayed pulse generator, and generates two trigger pulses having a time difference in transmission timing by a designated phase difference.
  • the arbitrary waveform generator 323a and the arbitrary waveform generator 323b generate the same waveform based on the inputted amplitude 3a and amplitude 3b, and respectively synchronize the trigger pulse sent from the delay pulse generator with the voltage waveform a and the voltage Output waveform b.
  • a voltage waveform having an arbitrary polarization state for controlling the polarization control probe can be generated.
  • the voltage waveform a and the voltage waveform b are amplified as necessary via the amplifier 321a and the amplifier 321b, and are respectively transmitted from the first voltage waveform terminal 324a and the second voltage waveform terminal 324b.
  • FIG. 9 shows the state of polarization generated by the polarization control probe 4.
  • the polarization control probe 4 generates polarized waves oscillating in two orthogonal axial directions, and displays the amplitude 3a, the amplitude 3b and the phase difference 31 in the axial direction on the display 6 as polarization states. Such polarization is called elliptical polarization. This process is processed by the waveform analysis unit.
  • the phase difference 31 is ⁇ where the ratio of the axial length 3c of the displayed ellipse to the axial length 3d is tan ( ⁇ / 2).
  • the arrow 3e indicates the rotation direction of the polarization, and is counterclockwise when 0 ⁇ ⁇ , and clockwise when ⁇ ⁇ ⁇ 2 ⁇ .
  • FIG. 10 shows an example of a designated echo reception waveform.
  • the reflected waves from the inspection object 7 are respectively received by the first piezoelectric element 4a and the second piezoelectric element 4b, sent to the computing unit 52, and calculated to generate a composite waveform.
  • the reception waveform 7a and the reception waveform 7b of the ultrasonic wave having passed through the test object having ultrasonic anisotropy change the phase difference 81, and the phase difference 81 is the ultrasonic wave.
  • the phase difference 81 between the reception waveform 8a and the reception waveform 8b is exactly half integral multiple, the synthesized waveform 8c of the reception waveforms weakens.
  • FIG. 11 is a detailed configuration of the computing unit 52.
  • the received waveform is calculated by weighted addition 521.
  • the synthesized waveform is calculated by weighting and adding the wave heights of the same reception time by the arithmetic unit 52.
  • the weight 52a and the weight 52b can be used to calculate the amount of change in reception polarization relative to transmission polarization by using the amplitude 3a and the amplitude 3b input to the waveform generation unit 3, respectively. By using the value as a weight, projection of the received waveform in an arbitrary direction can be obtained.
  • the inspector can evaluate the minute reflector in the inspection object by the difference from the healthy part. .
  • FIG. 12 is a block diagram showing an entire configuration of an inspection apparatus according to a second embodiment of the present invention.
  • This embodiment is configured by a polarization control probe using the first coil 14a, the second coil 14b and the permanent magnet 14c instead of the polarization control probe using the piezoelectric element shown in FIG. 1 in the first embodiment. It is intended to In the inspection apparatus of FIG. 12, the description of the configuration having the same reference numeral shown in FIG. 1 already described and the part having the same function will be omitted.
  • FIG. 13 is a perspective view showing the internal structure of a polarization control probe according to an embodiment of the present invention.
  • An ultrasound probe consisting of a permanent magnet and a single coil is commonly known as an EMAT.
  • the first coil 14a and the second coil 14b different in the current direction by 90 degrees are stacked immediately below the permanent magnet 14c so that polarization control can be performed.
  • Each coil is provided with an input / output transmission line 141a and an input / output terminal 141b for applying or reading a current waveform.
  • FIGS. 12 to 13 the same reference numerals indicate the same parts. However, the example shown in FIG. 13 does not limit the embodiment of the present invention.
  • FIG. 14 is a block diagram showing an entire configuration of an inspection apparatus according to a third embodiment of the present invention.
  • FIG. 15 is an explanatory view of an ultrasonic flaw detector according to an embodiment of the present invention and a measurement form of defects or inclusions by a polarization control probe.
  • the example shown in FIG. 15 does not limit the embodiment of the present invention.
  • FIG. 14 shows a block diagram using a polarization control probe using a piezoelectric element, but instead of the polarization control probe using a piezoelectric element, a polarization control probe 14 using an EMAT is used. Also good.
  • the description of the configuration having the same reference numeral shown in FIG. 1 already described and the part having the same function will be omitted.
  • step S201 the transmission polarization control probe 24 and the reception polarization control probe 34 are brought into contact with the inspection object 7 with an appropriate weight.
  • step S 202 the position where the specific echo from the object 7 occurs is input to the flaw detection apparatus 1 by the input unit 2. It is preferable that this echo be a first bottom echo in order to improve the S / N. However, the second and subsequent bottom echoes may be designated so that the amplitudes can be easily compared in the subsequent steps.
  • step S203 the initial phase difference 31 is set to 0, and the amplitude 3a and the amplitude 3b are set to appropriate values.
  • the memory 51 stores the combined amplitude of the reception waveform a and the reception waveform b.
  • the arithmetic unit 52 weights the reception waveform a and the reception waveform b with appropriate weights 52a and 52b and adds them.
  • step S205 the echo amplitude is compared with the value stored in the memory 51 by the comparator 53. Compare. If the maximum value of the amplitude of the echo synthesized waveform is obtained, the process proceeds to step S207. If not, the process proceeds to step S206 to execute the second and subsequent steps.
  • step S206 the ratio between the amplitude 3a and the amplitude 3b is changed under the condition that all the amplitudes are constant, and the ratio between the weight 52a and the weight 52b is changed under the condition that all the weights are constant.
  • an extreme value search algorithm such as hill climbing is used to calculate the ratio of the amplitude 3a and the amplitude 3b, the weight 52a, and the weight 52b at which the echo amplitude is maximum.
  • the measurement results of the main axis direction are transmitted to and displayed on the display 6.
  • step S207 the transmission polarization control probe 24 and the reception polarization control probe 34 are rotated so that the axes of the respective probes coincide with the main axis of the inspection object 7.
  • step S208 amplitude 3a and amplitude 3b at which the synthetic echo amplitude becomes minimum are set, phase difference 31 is set to 0, and synthetic amplitude is stored in memory 51.
  • step S209 ultrasonic waves are transmitted and received, and the synthetic echo amplitude is calculated.
  • step S212 the process proceeds to step S212. If not, the process proceeds to step S211 to execute the second and subsequent steps.
  • step S211 the phase difference 31 is sequentially changed to measure the phase difference 31 at which the amplitude of the echo composite waveform becomes maximum.
  • the condition that the amplitude of the echo composite waveform is maximum is given by (Expression 2) when the axes of the transmission polarization control probe 24 and the reception polarization control probe 34 coincide with the main axis of the inspection object 7.
  • z represents the distance from the transmission polarization control probe 24 to the reception polarization control probe 34, and the other symbols are the same as those described in the first embodiment. Since the preparation for flaw detection has been completed, flaw detection is started in step S212.
  • flaw detection can be performed by the two-probe penetration method.
  • FIG. 17 is a block diagram showing an entire configuration of an inspection apparatus according to a fourth embodiment of the present invention.
  • FIG. 18 is an explanatory view of an ultrasonic flaw detector according to one embodiment of the present invention and a measurement form of defects or inclusions by the polarization control probe 4.
  • the present embodiment is provided with a scanning mechanism 9 which automatically scans the probe relative to the inspection surface.
  • the scanning mechanism 9 includes a position designating device 91 which outputs a signal for designating the position of the probe, and a memory 92 which stores a waveform for each measurement position.
  • the waveform received according to the locator 91 is stored in the memory 92 along with the designated position.
  • the stored waveform is sent to the display 16 and displayed.
  • the display 16 has a function of displaying a two-dimensional flaw detection image based on the designated position and the waveform stored in the memory.
  • a wide range can be rapidly detected, and the result can be displayed by a method generally called B scope or C scope so that the inspector can easily find a defect or an inclusion.
  • the polarization control probe 4 may be configured of a piezoelectric element having a single vibration direction, and the piezoelectric element may be moved (rotated) in accordance with the direction in which the vibration is desired.
  • the probe since the probe can be configured by a single piezoelectric element, cost can be reduced.
  • the above-described embodiments are described in detail to explain the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described.

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Abstract

Le but de la présente invention est de pourvoir à un dispositif d'inspection à ultrasons et à un procédé d'inspection à ultrasons, de minuscules défauts ou inclusions dans un matériau métallique pouvant être détectés de façon extrêmement précise. Afin d'atteindre cet objectif, la présente invention est un dispositif d'inspection à ultrasons caractérisé en ce qu'il comporte : une sonde de commande de polarisation qui génère des ondes ultrasonores horizontales ayant une première direction d'oscillation, et des ondes ultrasonores horizontales ayant une seconde direction d'oscillation ; une unité de génération de formes d'onde qui commande des différences de phase respectives des ondes ultrasonores horizontales ayant la première direction d'oscillation, et des ondes ultrasonores horizontales ayant la seconde direction d'oscillation ; une unité d'analyse de forme d'onde qui calcule une forme d'onde synthétisée en calculant, sur la base d'une forme d'onde de réception de la sonde de commande de polarisation, les ondes ultrasonores horizontales ayant la première direction d'oscillation, et les ondes ultrasonores horizontales ayant la seconde direction d'oscillation ; et un affichage qui affiche une forme d'onde synthétisée obtenue au moyen de l'unité d'analyse de forme d'onde.
PCT/JP2014/060767 2014-04-16 2014-04-16 Dispositif et procédé d'inspection à ultrasons WO2015159378A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016513540A JP6248183B2 (ja) 2014-04-16 2014-04-16 超音波検査装置及び超音波検査方法
CN201480078005.4A CN106233134B (zh) 2014-04-16 2014-04-16 超声波检查装置以及超声波检查方法
PCT/JP2014/060767 WO2015159378A1 (fr) 2014-04-16 2014-04-16 Dispositif et procédé d'inspection à ultrasons

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JP2021113682A (ja) * 2020-01-16 2021-08-05 Ｊｆｅスチール株式会社 被検体の肉厚測定装置及び肉厚測定方法
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