WO2015155895A1 - Circuit d'attaque de diode laser et dispositif laser - Google Patents

Circuit d'attaque de diode laser et dispositif laser Download PDF

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Publication number
WO2015155895A1
WO2015155895A1 PCT/JP2014/060521 JP2014060521W WO2015155895A1 WO 2015155895 A1 WO2015155895 A1 WO 2015155895A1 JP 2014060521 W JP2014060521 W JP 2014060521W WO 2015155895 A1 WO2015155895 A1 WO 2015155895A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
light
prism
transmitting means
laser diode
Prior art date
Application number
PCT/JP2014/060521
Other languages
English (en)
Japanese (ja)
Inventor
隼規 坂本
一郎 福士
章之 門谷
一馬 渡辺
直也 石垣
次郎 齊川
進吾 宇野
廣木　知之
東條　公資
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to PCT/JP2014/060521 priority Critical patent/WO2015155895A1/fr
Priority to JP2016512562A priority patent/JP6183544B2/ja
Publication of WO2015155895A1 publication Critical patent/WO2015155895A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4286—Optical modules with optical power monitoring

Definitions

  • the present invention relates to a laser diode drive circuit and a laser device.
  • APC auto power control
  • ACC auto current control
  • the APC method or the ACC method has also been used for a laser device that uses a plurality of laser diodes to obtain a single stable beam output by a fiber or the like.
  • Patent Document 1 is known as a driving method of a plurality of lasers using the APC method.
  • a plurality of laser diodes are connected in parallel, one light receiving means is provided for each laser diode, and a high-luminance laser beam output is obtained.
  • a laser diode drive circuit corresponding to a plurality of laser diodes and the plurality of laser diodes, and emits laser light emitted from the plurality of laser diodes.
  • a light receiving means for receiving a part of the laser light transmitted through the transmission means, and a control means for controlling the outputs of the plurality of laser diodes to a predetermined magnitude based on the intensity of the laser light received by the light receiving means.
  • the present invention it is possible to provide a laser diode driving circuit and a laser device capable of obtaining a stable output with a simple structure.
  • FIG. 1 is a diagram showing a configuration of a laser processing apparatus including a laser diode drive circuit according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
  • FIG. 3 is a diagram showing the details of the light transmitting means of Example 2 in the laser diode drive circuit according to the embodiment of the present invention.
  • FIG. 4 is a diagram showing details of the light transmitting means of the third embodiment in the laser diode drive circuit according to the embodiment of the present invention.
  • FIG. 5 is a diagram showing the details of the light transmission means of Example 4 in the laser diode drive circuit according to the embodiment of the present invention.
  • a laser apparatus includes a laser diode drive circuit, and, as shown in FIG. 1, collects laser light output from each of a plurality of laser diodes 11a to 11c that emit excitation light. 18, the workpiece 21 is irradiated with the beam, and the workpiece 21 is processed. The combined laser light passes through the optical fiber 19, is converged by the converging lens 20 (corresponding to the converging portion of the present invention), and is irradiated onto the workpiece 21.
  • the laser diode drive circuit is configured as follows.
  • a plurality of lenses 12a to 12c are provided corresponding to the plurality of laser diodes 11a to 11c.
  • the lens 12a guides the laser beam from the laser diode 11a to the prism 13a.
  • the lens 12c guides the laser light from the laser diode 11c to the prism 13b.
  • the lens 12 b guides the laser light from the laser diode 11 b to the lens 18.
  • the prisms 13a and 13b are provided corresponding to the laser diodes 11a and 11c, guide the laser beams emitted from the laser diodes 11a and 11c, and guide them to the lens 18.
  • the light transmitting means 14a is formed on the surface of the prism 13a, and the light transmitting means 14a transmits a part of the laser light totally reflected by the prism 13a.
  • the light receiving means 15 is made of, for example, a photodiode, and receives a part of the laser light transmitted from the light transmitting means 14a.
  • the control unit 16 corresponds to the control means of the present invention, and controls the outputs of the plurality of laser diodes 11a to 11c to a predetermined magnitude based on the laser light intensity received by the light receiving means 15.
  • a part of the laser light transmitted from the light transmitting means 14a formed on one prism 13a is received by the light receiving means 15, but from the light transmitting means formed on each of two or more prisms.
  • a part of the transmitted laser beam may be received by the light receiving means 15 arranged corresponding to each prism.
  • the laser beams emitted from the plurality of laser diodes 11a to 11c are incident on the prisms 13a and 13b.
  • the parallel beams incident on the prisms 13 a and 13 b are reflected a plurality of times (for example, twice) in the prism and then input to the fiber 19 through the condenser lens 18.
  • the light transmitting means 14a extracts a part of the incident laser light.
  • the light receiving means 15 receives a part of the laser light transmitted from the light transmitting means 14a.
  • the light receiving means 15 outputs the received laser beam to an unillustrated auto power control unit (APC unit).
  • the APC unit controls the current flowing through the laser diode 11a or a plurality of laser diodes connected in series to the laser diode 11a so that the laser beam from the light receiving means 15 is constant. That is, a stable output can be obtained.
  • an optical element such as a beam splitter for entering the light receiving means becomes unnecessary, and a stable output can be obtained with a simple structure.
  • FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
  • the light transmitting means 14a shown in FIG. 2 has irregularities formed on the surface of the prism 13a, and scatters and transmits a part of the totally reflected laser light.
  • the surface of the prism 13a is formed in a frosted glass shape, a fine scratch is formed on the surface of the prism 13a, or a grating is formed on the surface of the prism 13a. By performing such processing, a part of the laser beam totally reflected by the prism 13a can be transmitted.
  • FIG. 3 is a diagram showing details of the light transmission means of Example 2 in the laser diode drive circuit according to the embodiment of the present invention.
  • the light transmitting means 14a shown in FIG. 3 uses a polarization characteristic in total reflection of the prism 13b. Specifically, a part of the laser light is transmitted using a prism having polarization characteristics (polarization transmission characteristics) or a prism having polarization characteristics in transmittance. Alternatively, the incident angle of the laser beam to the prism 13a may be set to the Brewster angle so that a part of the laser beam is transmitted.
  • FIG. 4 is a diagram showing details of the light transmitting means of Example 3 in the laser diode drive circuit according to the embodiment of the present invention.
  • the surface of the prism 13a is coated with a single layer film or a dielectric multilayer film 25 made of a metal thin film having a refractive index different from that of the prism 13a. That is, by changing the refractive index of the prism surface by the single layer film or the dielectric multilayer film 25, a part of the laser beam can be transmitted.
  • FIG. 5 is a diagram showing details of the light transmitting means of Example 4 in the laser diode drive circuit according to the embodiment of the present invention.
  • the light transmitting means 14a shown in FIG. 5 emits light by exciting the light emitting material 26 using an evanescent wave generated when the light emitting material 26 is formed on the surface of the prism 13a and the laser light is totally reflected by the prism 13a. The light is incident on the light receiving means 15.
  • Fluorescent molecular thin film is used as the light emitting material 26.
  • a silver thin film 26a and a fluorescent molecular thin film 26b are formed on a slope where the light transmitting means 14a of the prism 13a is to be formed, using a technique such as vapor deposition.
  • a surface plasmon is excited in the vicinity of the interface of the silver thin film 26a and the fluorescent molecular thin film 26b by an evanescent wave generated when the laser light is totally reflected, and light emitted from the excited molecule is directly fed back to the light receiving means 15. . Thereby, a part of laser beam can be transmitted indirectly.
  • the present invention is applicable to laser devices, laser processing devices, and laser illumination devices.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

La présente invention porte sur un circuit d'attaque de diode laser dans lequel une pluralité de prismes (13a, 13b) sont utilisés qui correspondent à une pluralité de diodes laser (11a, 11c) et guident de la lumière laser émise par les diodes laser. Un moyen de transmission de lumière (14a) est formé sur une surface d'au moins un prisme de la pluralité de prismes, et transmet une partie de la lumière laser totalement réfléchie au moyen des prismes. Un moyen de réception de lumière (15) reçoit la partie de la lumière laser transmise à travers le moyen de transmission de lumière. Sur la base de l'intensité de la lumière laser reçue par le moyen de réception de lumière, un moyen de commande (16) commande les sorties des diodes laser à un niveau prédéterminé.
PCT/JP2014/060521 2014-04-11 2014-04-11 Circuit d'attaque de diode laser et dispositif laser WO2015155895A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2014/060521 WO2015155895A1 (fr) 2014-04-11 2014-04-11 Circuit d'attaque de diode laser et dispositif laser
JP2016512562A JP6183544B2 (ja) 2014-04-11 2014-04-11 レーザダイオードの駆動回路及びレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2014/060521 WO2015155895A1 (fr) 2014-04-11 2014-04-11 Circuit d'attaque de diode laser et dispositif laser

Publications (1)

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WO2015155895A1 true WO2015155895A1 (fr) 2015-10-15

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JP (1) JP6183544B2 (fr)
WO (1) WO2015155895A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6437172B1 (ja) * 2018-04-02 2018-12-12 三菱電機株式会社 レーザ装置
JP2019515487A (ja) * 2016-04-26 2019-06-06 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＯｓｒａｍ Ｏｐｔｏ Ｓｅｍｉｃｏｎｄｕｃｔｏｒｓ ＧｍｂＨ 光学部品を有するレーザモジュール

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JP2001215371A (ja) * 2000-02-04 2001-08-10 Sumitomo Osaka Cement Co Ltd モニタ付光導波路型素子
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JP2009236939A (ja) * 2008-03-25 2009-10-15 Fuji Xerox Co Ltd 光導波路及びその製造方法、並びに、光導波路モジュール
JP2011145546A (ja) * 2010-01-15 2011-07-28 Panasonic Electric Works Co Ltd 活線検出装置
JP2011238698A (ja) * 2010-05-07 2011-11-24 Furukawa Electric Co Ltd:The レーザモジュール
JP2012163903A (ja) * 2011-02-09 2012-08-30 Furukawa Electric Co Ltd:The 光通信モジュール及び光結合部材
JP2012194454A (ja) * 2011-03-17 2012-10-11 Enplas Corp レンズアレイおよびこれを備えた光モジュール
JP2013024738A (ja) * 2011-07-21 2013-02-04 Panasonic Corp 活線検出装置
JP2013506871A (ja) * 2009-09-30 2013-02-28 コーニング インコーポレイテッド 角度劈開光ファイバ並びにその製造及び使用方法

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US7254296B2 (en) * 2003-01-16 2007-08-07 Sae Magnetics (Hong Kong) Limited Apparatus for improved fiber optic coupling efficiency
JP4153438B2 (ja) * 2003-01-30 2008-09-24 富士フイルム株式会社 レーザ光合波方法および装置
JP5550353B2 (ja) * 2010-01-08 2014-07-16 株式会社エンプラス レンズアレイおよびこれを備えた光モジュール
JP2013061587A (ja) * 2011-09-15 2013-04-04 Alps Electric Co Ltd ビームスプリッタ及びそれを用いた光通信モジュール

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Publication number Priority date Publication date Assignee Title
JP2001033604A (ja) * 1999-05-20 2001-02-09 Sharp Corp 光学部品及びポリイミド厚膜の製造方法
JP2001215371A (ja) * 2000-02-04 2001-08-10 Sumitomo Osaka Cement Co Ltd モニタ付光導波路型素子
JP2004317630A (ja) * 2003-04-14 2004-11-11 Fujikura Ltd 光送信モジュール
JP2005308658A (ja) * 2004-04-23 2005-11-04 Rohm Co Ltd 表面プラズモン共鳴センサ装置
JP2009236939A (ja) * 2008-03-25 2009-10-15 Fuji Xerox Co Ltd 光導波路及びその製造方法、並びに、光導波路モジュール
JP2013506871A (ja) * 2009-09-30 2013-02-28 コーニング インコーポレイテッド 角度劈開光ファイバ並びにその製造及び使用方法
JP2011145546A (ja) * 2010-01-15 2011-07-28 Panasonic Electric Works Co Ltd 活線検出装置
JP2011238698A (ja) * 2010-05-07 2011-11-24 Furukawa Electric Co Ltd:The レーザモジュール
JP2012163903A (ja) * 2011-02-09 2012-08-30 Furukawa Electric Co Ltd:The 光通信モジュール及び光結合部材
JP2012194454A (ja) * 2011-03-17 2012-10-11 Enplas Corp レンズアレイおよびこれを備えた光モジュール
JP2013024738A (ja) * 2011-07-21 2013-02-04 Panasonic Corp 活線検出装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019515487A (ja) * 2016-04-26 2019-06-06 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＯｓｒａｍ Ｏｐｔｏ Ｓｅｍｉｃｏｎｄｕｃｔｏｒｓ ＧｍｂＨ 光学部品を有するレーザモジュール
JP2022031843A (ja) * 2016-04-26 2022-02-22 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学部品を有するレーザモジュール
JP7261857B2 (ja) 2016-04-26 2023-04-20 エイエムエス－オスラム インターナショナル ゲーエムベーハー 光学部品を有するレーザモジュール
JP6437172B1 (ja) * 2018-04-02 2018-12-12 三菱電機株式会社 レーザ装置
WO2019193640A1 (fr) * 2018-04-02 2019-10-10 三菱電機株式会社 Dispositif laser
US10958043B2 (en) 2018-04-02 2021-03-23 Mitsubishi Electric Corporation Laser device

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JP6183544B2 (ja) 2017-08-23
JPWO2015155895A1 (ja) 2017-04-13

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