WO2015155895A1 - Laser diode drive circuit and laser apparatus - Google Patents
Laser diode drive circuit and laser apparatus Download PDFInfo
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- WO2015155895A1 WO2015155895A1 PCT/JP2014/060521 JP2014060521W WO2015155895A1 WO 2015155895 A1 WO2015155895 A1 WO 2015155895A1 JP 2014060521 W JP2014060521 W JP 2014060521W WO 2015155895 A1 WO2015155895 A1 WO 2015155895A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4286—Optical modules with optical power monitoring
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- the present invention relates to a laser diode drive circuit and a laser device.
- APC auto power control
- ACC auto current control
- the APC method or the ACC method has also been used for a laser device that uses a plurality of laser diodes to obtain a single stable beam output by a fiber or the like.
- Patent Document 1 is known as a driving method of a plurality of lasers using the APC method.
- a plurality of laser diodes are connected in parallel, one light receiving means is provided for each laser diode, and a high-luminance laser beam output is obtained.
- a laser diode drive circuit corresponding to a plurality of laser diodes and the plurality of laser diodes, and emits laser light emitted from the plurality of laser diodes.
- a light receiving means for receiving a part of the laser light transmitted through the transmission means, and a control means for controlling the outputs of the plurality of laser diodes to a predetermined magnitude based on the intensity of the laser light received by the light receiving means.
- the present invention it is possible to provide a laser diode driving circuit and a laser device capable of obtaining a stable output with a simple structure.
- FIG. 1 is a diagram showing a configuration of a laser processing apparatus including a laser diode drive circuit according to an embodiment of the present invention.
- FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
- FIG. 3 is a diagram showing the details of the light transmitting means of Example 2 in the laser diode drive circuit according to the embodiment of the present invention.
- FIG. 4 is a diagram showing details of the light transmitting means of the third embodiment in the laser diode drive circuit according to the embodiment of the present invention.
- FIG. 5 is a diagram showing the details of the light transmission means of Example 4 in the laser diode drive circuit according to the embodiment of the present invention.
- a laser apparatus includes a laser diode drive circuit, and, as shown in FIG. 1, collects laser light output from each of a plurality of laser diodes 11a to 11c that emit excitation light. 18, the workpiece 21 is irradiated with the beam, and the workpiece 21 is processed. The combined laser light passes through the optical fiber 19, is converged by the converging lens 20 (corresponding to the converging portion of the present invention), and is irradiated onto the workpiece 21.
- the laser diode drive circuit is configured as follows.
- a plurality of lenses 12a to 12c are provided corresponding to the plurality of laser diodes 11a to 11c.
- the lens 12a guides the laser beam from the laser diode 11a to the prism 13a.
- the lens 12c guides the laser light from the laser diode 11c to the prism 13b.
- the lens 12 b guides the laser light from the laser diode 11 b to the lens 18.
- the prisms 13a and 13b are provided corresponding to the laser diodes 11a and 11c, guide the laser beams emitted from the laser diodes 11a and 11c, and guide them to the lens 18.
- the light transmitting means 14a is formed on the surface of the prism 13a, and the light transmitting means 14a transmits a part of the laser light totally reflected by the prism 13a.
- the light receiving means 15 is made of, for example, a photodiode, and receives a part of the laser light transmitted from the light transmitting means 14a.
- the control unit 16 corresponds to the control means of the present invention, and controls the outputs of the plurality of laser diodes 11a to 11c to a predetermined magnitude based on the laser light intensity received by the light receiving means 15.
- a part of the laser light transmitted from the light transmitting means 14a formed on one prism 13a is received by the light receiving means 15, but from the light transmitting means formed on each of two or more prisms.
- a part of the transmitted laser beam may be received by the light receiving means 15 arranged corresponding to each prism.
- the laser beams emitted from the plurality of laser diodes 11a to 11c are incident on the prisms 13a and 13b.
- the parallel beams incident on the prisms 13 a and 13 b are reflected a plurality of times (for example, twice) in the prism and then input to the fiber 19 through the condenser lens 18.
- the light transmitting means 14a extracts a part of the incident laser light.
- the light receiving means 15 receives a part of the laser light transmitted from the light transmitting means 14a.
- the light receiving means 15 outputs the received laser beam to an unillustrated auto power control unit (APC unit).
- the APC unit controls the current flowing through the laser diode 11a or a plurality of laser diodes connected in series to the laser diode 11a so that the laser beam from the light receiving means 15 is constant. That is, a stable output can be obtained.
- an optical element such as a beam splitter for entering the light receiving means becomes unnecessary, and a stable output can be obtained with a simple structure.
- FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
- the light transmitting means 14a shown in FIG. 2 has irregularities formed on the surface of the prism 13a, and scatters and transmits a part of the totally reflected laser light.
- the surface of the prism 13a is formed in a frosted glass shape, a fine scratch is formed on the surface of the prism 13a, or a grating is formed on the surface of the prism 13a. By performing such processing, a part of the laser beam totally reflected by the prism 13a can be transmitted.
- FIG. 3 is a diagram showing details of the light transmission means of Example 2 in the laser diode drive circuit according to the embodiment of the present invention.
- the light transmitting means 14a shown in FIG. 3 uses a polarization characteristic in total reflection of the prism 13b. Specifically, a part of the laser light is transmitted using a prism having polarization characteristics (polarization transmission characteristics) or a prism having polarization characteristics in transmittance. Alternatively, the incident angle of the laser beam to the prism 13a may be set to the Brewster angle so that a part of the laser beam is transmitted.
- FIG. 4 is a diagram showing details of the light transmitting means of Example 3 in the laser diode drive circuit according to the embodiment of the present invention.
- the surface of the prism 13a is coated with a single layer film or a dielectric multilayer film 25 made of a metal thin film having a refractive index different from that of the prism 13a. That is, by changing the refractive index of the prism surface by the single layer film or the dielectric multilayer film 25, a part of the laser beam can be transmitted.
- FIG. 5 is a diagram showing details of the light transmitting means of Example 4 in the laser diode drive circuit according to the embodiment of the present invention.
- the light transmitting means 14a shown in FIG. 5 emits light by exciting the light emitting material 26 using an evanescent wave generated when the light emitting material 26 is formed on the surface of the prism 13a and the laser light is totally reflected by the prism 13a. The light is incident on the light receiving means 15.
- Fluorescent molecular thin film is used as the light emitting material 26.
- a silver thin film 26a and a fluorescent molecular thin film 26b are formed on a slope where the light transmitting means 14a of the prism 13a is to be formed, using a technique such as vapor deposition.
- a surface plasmon is excited in the vicinity of the interface of the silver thin film 26a and the fluorescent molecular thin film 26b by an evanescent wave generated when the laser light is totally reflected, and light emitted from the excited molecule is directly fed back to the light receiving means 15. . Thereby, a part of laser beam can be transmitted indirectly.
- the present invention is applicable to laser devices, laser processing devices, and laser illumination devices.
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Abstract
Disclosed is a laser diode drive circuit wherein a plurality of prisms (13a, 13b) are provided corresponding to a plurality of laser diodes (11a, 11c), and guide laser light emitted from the laser diodes. A light transmitting means (14a) is formed on a surface of at least one prism of the plurality of prisms, and transmits a part of laser light totally reflected by means of the prisms. A light receiving means (15) receives the part of the laser light transmitted through the light transmitting means. On the basis of the intensity of the laser light received by means of the light receiving means, a control means (16) controls outputs of the laser diodes to a predetermined level.
Description
本発明は、レーザダイオードの駆動回路及びレーザ装置に関する。
The present invention relates to a laser diode drive circuit and a laser device.
レーザ出力を安定化するためには、フォトダイオードなどの受光手段にレーザ出力の一部をフィードバックし、レーザ出力を一定に制御するＡＰＣ（オートパワーコントロール）方式がある。また、駆動電流をモニタすることにより駆動電流を一定に制御するＡＣＣ（オートカレントコントロール）方式がある。
In order to stabilize the laser output, there is an APC (auto power control) system in which a part of the laser output is fed back to a light receiving means such as a photodiode and the laser output is controlled to be constant. Further, there is an ACC (auto current control) system in which the drive current is controlled to be constant by monitoring the drive current.
従来、複数のレーザダイオードを用いてファイバ等により一本の安定したビーム出力を得るレーザ装置についてもＡＰＣ方式あるいはＡＣＣ方式が用いられて来た。
Conventionally, the APC method or the ACC method has also been used for a laser device that uses a plurality of laser diodes to obtain a single stable beam output by a fiber or the like.
ＡＰＣ方式を用いた複数レーザの駆動方式としては、例えば、特許文献１が知られている。特許文献１では、複数のレーザダイオードを並列に接続し、１つのレーザダイオードに対して１つの受光手段を設け、高輝度のレーザビーム出力を得ている。
For example, Patent Document 1 is known as a driving method of a plurality of lasers using the APC method. In Patent Document 1, a plurality of laser diodes are connected in parallel, one light receiving means is provided for each laser diode, and a high-luminance laser beam output is obtained.
しかしながら、加工用レーザ装置のように高出力を得るために複数のレーザダイオードを用いる場合において、特許文献１のように全てのレーザダイオードに対して出力をコントロールすると、レーザ駆動回路およびレーザ装置が複雑化し、高コストとなる。
However, in the case where a plurality of laser diodes are used to obtain a high output as in a processing laser apparatus, if the output is controlled for all the laser diodes as in Patent Document 1, the laser drive circuit and the laser apparatus are complicated. And high cost.
本発明は、簡易な構造で安定した出力を得ることができるレーザダイオードの駆動回路及びレーザ装置を提供することを目的とする。
It is an object of the present invention to provide a laser diode drive circuit and a laser device that can obtain a stable output with a simple structure.
上記の課題を解決するために、本発明に係るレーザダイオードの駆動回路は、複数のレーザダイオードと、前記複数のレーザダイオードに対応して設けられ、前記複数のレーザダイオードから出射されるレーザ光をガイドする複数のプリズムと、前記複数のプリズムのうちの少なくとも１つのプリズムの表面に形成され、前記プリズムにおいて全反射される前記レーザ光の一部のレーザ光を透過させる光透過手段と、前記光透過手段を透過したその一部のレーザ光を受光する受光手段と、前記受光手段で受光したレーザ光強度に基づいて、前記複数のレーザダイオードの出力を所定の大きさにコントロールする制御手段とを備える。
In order to solve the above problems, a laser diode drive circuit according to the present invention is provided corresponding to a plurality of laser diodes and the plurality of laser diodes, and emits laser light emitted from the plurality of laser diodes. A plurality of prisms for guiding; light transmitting means that is formed on a surface of at least one of the plurality of prisms, and transmits a part of the laser light that is totally reflected by the prism; and the light A light receiving means for receiving a part of the laser light transmitted through the transmission means, and a control means for controlling the outputs of the plurality of laser diodes to a predetermined magnitude based on the intensity of the laser light received by the light receiving means. Prepare.
本発明によれば、簡易な構造で安定した出力を得ることができるレーザダイオードの駆動回路及びレーザ装置を提供することができる。
According to the present invention, it is possible to provide a laser diode driving circuit and a laser device capable of obtaining a stable output with a simple structure.
以下、本発明の実施形態に係るレーザダイオードの駆動回路及びレーザ装置が、レーザ加工装置に適用される場合について、図面を参照しながら詳細に説明される。
Hereinafter, a case where a laser diode drive circuit and a laser apparatus according to an embodiment of the present invention are applied to a laser processing apparatus will be described in detail with reference to the drawings.
本発明の実施形態に係るレーザ装置は、レーザダイオードの駆動回路を含み、図１に示すように、励起光を出射する複数のレーザダイオード１１ａ～１１ｃの各々から出力されるレーザ光を集光レンズ１８で合波して加工対象物２１に照射し該加工対象物２１を加工する。合波されたレーザ光は、光ファイバ１９を通り、収束レンズ２０（本発明の収束部に対応）で収束されて加工対象物２１に照射される。
A laser apparatus according to an embodiment of the present invention includes a laser diode drive circuit, and, as shown in FIG. 1, collects laser light output from each of a plurality of laser diodes 11a to 11c that emit excitation light. 18, the workpiece 21 is irradiated with the beam, and the workpiece 21 is processed. The combined laser light passes through the optical fiber 19, is converged by the converging lens 20 (corresponding to the converging portion of the present invention), and is irradiated onto the workpiece 21.
レーザダイオードの駆動回路は、以下のように構成される。複数のレーザダイオード１１ａ～１１ｃに対応して、複数のレンズ１２ａ～１２ｃが設けられている。レンズ１２ａはレーザダイオード１１ａからのレーザ光をプリズム１３ａに導く。レンズ１２ｃはレーザダイオード１１ｃからのレーザ光をプリズム１３ｂに導く。レンズ１２ｂはレーザダイオード１１ｂからのレーザ光をレンズ１８に導く。
The laser diode drive circuit is configured as follows. A plurality of lenses 12a to 12c are provided corresponding to the plurality of laser diodes 11a to 11c. The lens 12a guides the laser beam from the laser diode 11a to the prism 13a. The lens 12c guides the laser light from the laser diode 11c to the prism 13b. The lens 12 b guides the laser light from the laser diode 11 b to the lens 18.
プリズム１３ａ，１３ｂは、レーザダイオード１１ａ，１１ｃに対応して設けられ、レーザダイオード１１ａ，１１ｃから出射されるレーザ光をガイドして、レンズ１８に導く。
The prisms 13a and 13b are provided corresponding to the laser diodes 11a and 11c, guide the laser beams emitted from the laser diodes 11a and 11c, and guide them to the lens 18.
プリズム１３ａの表面には光透過手段１４ａが形成され、この光透過手段１４ａは、プリズム１３ａにおいて全反射されるレーザ光の一部のレーザ光を透過させる。受光手段１５は、例えば、フォトダイオードからなり、光透過手段１４ａから透過したレーザ光の一部を受光する。
The light transmitting means 14a is formed on the surface of the prism 13a, and the light transmitting means 14a transmits a part of the laser light totally reflected by the prism 13a. The light receiving means 15 is made of, for example, a photodiode, and receives a part of the laser light transmitted from the light transmitting means 14a.
制御部１６は、本発明の制御手段に対応し、受光手段１５で受光したレーザ光強度に基づいて、複数のレーザダイオード１１ａ～１１ｃの出力を所定の大きさにコントロールする。
The control unit 16 corresponds to the control means of the present invention, and controls the outputs of the plurality of laser diodes 11a to 11c to a predetermined magnitude based on the laser light intensity received by the light receiving means 15.
なお、図１に示す例では、１つのプリズム１３ａに形成した光透過手段１４ａから透過したレーザ光の一部を受光手段１５で受光したが、２つ以上のプリズムにそれぞれ形成した光透過手段から透過したレーザ光の一部を各プリズムに対応して配置された受光手段１５で受光してもよい。
In the example shown in FIG. 1, a part of the laser light transmitted from the light transmitting means 14a formed on one prism 13a is received by the light receiving means 15, but from the light transmitting means formed on each of two or more prisms. A part of the transmitted laser beam may be received by the light receiving means 15 arranged corresponding to each prism.
このように実施形態のレーザ装置によれば、複数のレーザダイオード１１ａ～１１ｃから出射されたレーザ光の内、レーザダイオード１１ａ，１１ｃから出射されたレーザ光は、プリズム１３ａ，１３ｂに入射する。
Thus, according to the laser apparatus of the embodiment, among the laser beams emitted from the plurality of laser diodes 11a to 11c, the laser beams emitted from the laser diodes 11a and 11c are incident on the prisms 13a and 13b.
プリズム１３ａ，１３ｂに入射した平行ビームは、プリズム内で複数回（例えば、２回）反射された後、集光レンズ１８を介してファイバ１９に入力される。
The parallel beams incident on the prisms 13 a and 13 b are reflected a plurality of times (for example, twice) in the prism and then input to the fiber 19 through the condenser lens 18.
このとき、プリズム１３ａの斜面部に形成された光透過手段１４ａにおいて、入射したレーザ光の一部が散乱され透過するようになる。即ち、光透過手段１４ａは、入射したレーザ光の一部を取り出す。そして、受光手段１５は、光透過手段１４ａから透過したレーザ光の一部を受光する。
At this time, a part of the incident laser light is scattered and transmitted by the light transmitting means 14a formed on the inclined surface of the prism 13a. That is, the light transmitting means 14a extracts a part of the incident laser light. The light receiving means 15 receives a part of the laser light transmitted from the light transmitting means 14a.
受光手段１５は、受光したレーザ光を図示しないオートパワーコントロール部（ＡＰＣ部）に出力する。ＡＰＣ部は、受光手段１５からのレーザ光が一定となるようにレーザダイオード１１ａあるいはレーザダイオード１１ａに直列接続された複数のレーザダイオードに流れる電流を制御する。即ち、安定した出力を得ることができる。
The light receiving means 15 outputs the received laser beam to an unillustrated auto power control unit (APC unit). The APC unit controls the current flowing through the laser diode 11a or a plurality of laser diodes connected in series to the laser diode 11a so that the laser beam from the light receiving means 15 is constant. That is, a stable output can be obtained.
また、実施形態の受光手段を用いることにより、受光手段に入射するためのビームスプリッタ等の光学素子が不要となり、簡易な構造で安定した出力を得ることができる。
Further, by using the light receiving means of the embodiment, an optical element such as a beam splitter for entering the light receiving means becomes unnecessary, and a stable output can be obtained with a simple structure.
（光透過手段１４の実施例）
次に、光透過手段１４ａの具体的な実施例を例示する。図２は本発明の実施形態に係るレーザダイオードの駆動回路内の実施例１の光透過手段の詳細を示す図である。 (Example of the light transmission means 14)
Next, a specific example of the light transmission means 14a will be illustrated. FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
次に、光透過手段１４ａの具体的な実施例を例示する。図２は本発明の実施形態に係るレーザダイオードの駆動回路内の実施例１の光透過手段の詳細を示す図である。 (Example of the light transmission means 14)
Next, a specific example of the light transmission means 14a will be illustrated. FIG. 2 is a diagram showing details of the light transmitting means of Example 1 in the laser diode drive circuit according to the embodiment of the present invention.
図２に示す光透過手段１４ａは、プリズム１３ａの表面に凹凸が形成され、全反射されるレーザ光の一部を散乱し透過させる。具体的には、プリズム１３ａの表面をすりガラス状に形成したり、あるいはプリズム１３ａの表面に細かいキズを形成したり、あるいは、プリズム１３ａの表面にグレーティングを形成する。このような処理を施すことで、プリズム１３ａにおいて全反射されるレーザ光の一部を透過させることができる。
The light transmitting means 14a shown in FIG. 2 has irregularities formed on the surface of the prism 13a, and scatters and transmits a part of the totally reflected laser light. Specifically, the surface of the prism 13a is formed in a frosted glass shape, a fine scratch is formed on the surface of the prism 13a, or a grating is formed on the surface of the prism 13a. By performing such processing, a part of the laser beam totally reflected by the prism 13a can be transmitted.
図３は本発明の実施形態に係るレーザダイオードの駆動回路内の実施例２の光透過手段の詳細を示す図である。図３に示す光透過手段１４ａは、プリズム１３ｂの全反射における偏光特性を用いている。具体的には、偏光特性（偏光透過特性）を有するプリズムや透過率に偏光特性を備えたプリズムを用いてレーザ光の一部を透過させる。あるいは、プリズム１３ａへのレーザ光の入射角をブリュースタ角に設定して、レーザ光の一部を透過させるようにしても良い。
FIG. 3 is a diagram showing details of the light transmission means of Example 2 in the laser diode drive circuit according to the embodiment of the present invention. The light transmitting means 14a shown in FIG. 3 uses a polarization characteristic in total reflection of the prism 13b. Specifically, a part of the laser light is transmitted using a prism having polarization characteristics (polarization transmission characteristics) or a prism having polarization characteristics in transmittance. Alternatively, the incident angle of the laser beam to the prism 13a may be set to the Brewster angle so that a part of the laser beam is transmitted.
図４は本発明の実施形態に係るレーザダイオードの駆動回路内の実施例３の光透過手段の詳細を示す図である。図４に示す光透過手段１４ａは、プリズム１３ａの表面に、プリズム１３ａの屈折率とは異なる屈折率を持つ金属薄膜からなる単層膜又は誘電体多層膜２５がコーティングされている。即ち、単層膜又は誘電体多層膜２５によりプリズム表面の屈折率を変化させることによって、レーザ光の一部を透過させることができる。
FIG. 4 is a diagram showing details of the light transmitting means of Example 3 in the laser diode drive circuit according to the embodiment of the present invention. In the light transmitting means 14a shown in FIG. 4, the surface of the prism 13a is coated with a single layer film or a dielectric multilayer film 25 made of a metal thin film having a refractive index different from that of the prism 13a. That is, by changing the refractive index of the prism surface by the single layer film or the dielectric multilayer film 25, a part of the laser beam can be transmitted.
図５は本発明の実施形態に係るレーザダイオードの駆動回路内の実施例４の光透過手段の詳細を示す図である。図５に示す光透過手段１４ａは、プリズム１３ａの表面に発光材料２６が形成され、プリズム１３ａでレーザ光が全反射される際に発生するエバネッセント波を用いて前記発光材料２６を励起して発光させ、受光手段１５に光を入射させる。
FIG. 5 is a diagram showing details of the light transmitting means of Example 4 in the laser diode drive circuit according to the embodiment of the present invention. The light transmitting means 14a shown in FIG. 5 emits light by exciting the light emitting material 26 using an evanescent wave generated when the light emitting material 26 is formed on the surface of the prism 13a and the laser light is totally reflected by the prism 13a. The light is incident on the light receiving means 15.
発光材料２６としては、蛍光分子薄膜が用いられる。プリズム１３ａの光透過手段１４ａを形成したい斜面部に、蒸着法等の手法を用いて銀薄膜２６ａ、蛍光分子薄膜２６ｂを形成する。レーザ光が全反射された際に発生するエバネッセント波によって、銀薄膜２６ａ、蛍光分子薄膜２６ｂ界面近傍に表面プラズモンを励起させ、励起された分子から放射される光を直接、受光手段１５にフィードバックする。これにより、レーザ光の一部を間接的に透過させることができる。
Fluorescent molecular thin film is used as the light emitting material 26. A silver thin film 26a and a fluorescent molecular thin film 26b are formed on a slope where the light transmitting means 14a of the prism 13a is to be formed, using a technique such as vapor deposition. A surface plasmon is excited in the vicinity of the interface of the silver thin film 26a and the fluorescent molecular thin film 26b by an evanescent wave generated when the laser light is totally reflected, and light emitted from the excited molecule is directly fed back to the light receiving means 15. . Thereby, a part of laser beam can be transmitted indirectly.
本発明は、レーザ装置、レーザ加工装置、レーザ照明装置に適用可能である。
The present invention is applicable to laser devices, laser processing devices, and laser illumination devices.
Claims (6)
- 複数のレーザダイオードと、
前記複数のレーザダイオードに対応して設けられ、前記複数のレーザダイオードから出射されるレーザ光をガイドする複数のプリズムと、
前記複数のプリズムのうちの少なくとも１つのプリズムの表面に形成され、前記プリズムにおいて全反射される前記レーザ光の一部のレーザ光を透過させる光透過手段と、
前記光透過手段を透過したその一部のレーザ光を受光する受光手段と、
前記受光手段で受光したレーザ光強度に基づいて、前記複数のレーザダイオードの出力を所定の大きさにコントロールする制御手段と、
を備えるレーザダイオードの駆動回路。 A plurality of laser diodes;
A plurality of prisms provided corresponding to the plurality of laser diodes, for guiding laser light emitted from the plurality of laser diodes;
A light transmitting means that is formed on a surface of at least one of the plurality of prisms and transmits a part of the laser light that is totally reflected by the prism;
A light receiving means for receiving a part of the laser light transmitted through the light transmitting means;
Control means for controlling the outputs of the plurality of laser diodes to a predetermined magnitude based on the laser light intensity received by the light receiving means;
A laser diode drive circuit comprising: - 前記光透過手段は、前記プリズムの表面に凹凸が形成され、前記全反射される前記レーザ光の一部を散乱させる請求項１記載のレーザダイオードの駆動回路。 2. The laser diode driving circuit according to claim 1, wherein the light transmitting means has irregularities formed on a surface of the prism and scatters a part of the laser light that is totally reflected. 3.
- 前記光透過手段は、前記プリズムの全反射における偏光特性を用いる請求項１記載のレーザダイオードの駆動回路。 2. The laser diode driving circuit according to claim 1, wherein the light transmitting means uses a polarization characteristic in total reflection of the prism.
- 前記光透過手段は、前記プリズムの表面に、前記プリズムの屈折率とは異なる屈折率を持つ単層膜又は多層膜がコーティングされている請求項１記載のレーザダイオードの駆動回路。 2. The laser diode driving circuit according to claim 1, wherein the light transmitting means is coated on the surface of the prism with a single layer film or a multilayer film having a refractive index different from that of the prism.
- 前記光透過手段は、前記プリズムの表面に発光材料が形成され、前記プリズムでレーザ光が全反射される際に発生するエバネッセント波を用いて前記発光材料を励起して発光させ、前記受光手段に光を入射させる請求項１記載のレーザダイオードの駆動回路。 The light transmitting means is formed with a light emitting material on the surface of the prism, and uses the evanescent wave generated when the laser light is totally reflected by the prism to cause the light emitting material to emit light. The laser diode driving circuit according to claim 1, wherein light is incident.
- 請求項１乃至５のいずれか１項記載のレーザダイオードの駆動回路と、
前記複数のレーザダイオードから出射されるレーザ光を合波する光ファイバと、
前記光ファイバで合成されたレーザ光を収束して加工対象物に照射し該加工対象物を加工する収束部と、
を備えるレーザ装置。 A laser diode drive circuit according to any one of claims 1 to 5,
An optical fiber for combining laser beams emitted from the plurality of laser diodes;
A converging unit for converging the laser beam synthesized by the optical fiber to irradiate the processing object and processing the processing object;
A laser apparatus comprising:
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| PCT/JP2014/060521 WO2015155895A1 (en) | 2014-04-11 | 2014-04-11 | Laser diode drive circuit and laser apparatus |
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